Circuit board loading / unloading machine

Abstract

This device is a substrate transport device for loading and unloading substrates, such as glass substrates and semiconductor substrates, while holding them from below. It can hold and remove substrates from a substrate storage container or substrate processing equipment and transfer them to another substrate storage container or another substrate processing equipment. This device has a pair of left and right forks, each consisting of two long plates connected together. The substrates to be loaded or unloaded are placed on the pair of left and right forks (a total of four plates). The pair of left and right forks are powered by an electric motor and can move in the direction of the plates relative to the substrate transport device body, thereby loading and unloading the substrates. The perspective view, front view, rear view, plan view, bottom view, left side view, and right side view show the forks extended from the substrate transport device body, while the reference perspective view and reference plan view show the forks retracted. Furthermore, a pair of left and right cameras are attached to the upper front of the substrate transport device body to capture images of the substrates being loaded or unloaded from above, allowing the substrates to be inspected.

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