Sensor element and manufacturing method of sensor element

Abstract

To provide a sensor element and a method for manufacturing the sensor element capable of reducing a process for manufacturing a cantilever structure.SOLUTION: A sensor element 10 includes a frame 11 in which an opening H is formed, and a cantilever 12 in which one end is supported by the frame 11. The cantilever 12 and the frame 11 are connected by an active layer 1c of an SOI (Silicon On Insulator) 1, and a shape control layer 2 that is formed on the active layer 1c and deflects the cantilever 12. A manufacturing method of the sensor element 10 includes: a film formation step of film-forming the shape control layer 2 on the active layer 1c of the SOI 1; a pattern formation step of forming a pattern of the cantilever 12 for the frame 11 after the film formation step; and a manufacturing step of manufacturing a structure of the cantilever 12 by removing a BOX layer 1b of the SOI 1 after the pattern formation step.SELECTED DRAWING: Figure 1

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