Heating stage and temperature characteristic measurement system

Abstract

To prevent the needle of a probe from damaging.SOLUTION: A temperature characteristic measurement system includes: a heating stage 100 including a first stage for mounting a measurement sample 190, a second stage electrically insulated with the first stage and a heater 50 for heating the first and second stages at an approximately same temperature; a probe 120 including a needle 125 contacting the measurement sample 190; a measuring device 150 for measuring the electrical properties of the measuring sample 190 through the probe 120; a Z stage 110 for moving any of the heating stage 100 and the probe 120; and a controller 160 for determining that a time that the resistance is equal to or more than the threshold is equal to or more than a predetermined time by repeating separating a gap between the second stage and the needle 125 by a predetermined distance when a resistance measured by the measuring device 150 between the second stage and the needle 150 is less than a threshold to hold the gap when the resistance is equal to or more than the threshold.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a heating stage and a temperature characteristics measurement system, for example, to a system for measuring the temperature characteristics of a semiconductor chip. [Background technology]

[0002] When measuring the temperature characteristics of a semiconductor chip, the semiconductor chip is placed on a heating stage and the tip of a probe pin is brought into contact with the electrode of the semiconductor chip. At this time, the probe pin extends due to heating, and the tip of the probe pin may hit the stage and be damaged.

[0003] Patent Document 1 describes a technology in which a temperature control mechanism is provided at the extension point of the probe of a probe card. Patent Document 1 also describes that "a Peltier module controls the cooling and heating of each probe. This allows the temperature of each probe to be controlled from low to high so that it can approach the temperature of the object to be measured in a short time, and realizes stable probing that takes into account the contraction and expansion of the probe." [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2003-215162 A (Claim 1, paragraph 0018) Summary of the Invention [Problem to be solved by the invention]

[0005] In the technology described in Patent Document 1, a heating control mechanism such as a Peltier or ceramic heater is provided at the extension origin of the probe. Therefore, when the probe pin (needle) is long, the temperature at the tip of the needle differs from the temperature at the extension origin. Therefore, even if the stage temperature and the temperature at the extension origin are made the same, the stage temperature and the temperature at the tip of the needle differ. As a result, when the needle is brought into contact with the stage, it may extend further and be damaged. Note that the technology in Patent Document 1 requires modification of the probe card, and a standard probe card cannot be used.

[0006] The present invention has been made in consideration of the above circumstances, and has an object to provide a heating stage and a temperature characteristics measurement system that can further prevent damage to the probe needle. [Means for solving the problem]

[0007] In order to achieve the above object, the heating stage (100) of the present invention comprises a first stage (10) on which a measurement sample (190) is placed, a second stage (20) electrically insulated from the first stage, and a heater (50) for heating the first stage and the second stage to substantially the same temperature. To The needle is repeatedly brought into contact with the object and then separated from the object. This configuration allows for the operation of The resistance between the second stage and the needle or the resistance between a plurality of the needles via the second stage can be measured. The symbols and letters in parentheses are symbols and the like given in the embodiments and do not limit the present invention.

[0008] In addition, the temperature characteristic measuring system (200) of the present invention includes: The method according to claim 2The apparatus includes a heating stage (100), a probe (120) having a needle (125) that contacts the measurement sample, a measuring device (150) that measures the electrical characteristics of the measurement sample via the probe, a Z stage (110) that moves either or both of the heating stage and the probe up and down, and a control device that controls the measuring device and the Z stage. The heating stage includes a first stage (10) on which the measurement sample (190) is placed, a second stage (20) that is electrically insulated from the first stage, and a heater (50) that heats the first stage and the second stage to approximately the same temperature. The control device is characterized in that, when the measuring device is measuring the resistance between the second stage and the needle, the control device increases the distance between the second stage and the needle by a predetermined distance when the resistance falls below a threshold, and maintains the distance when the resistance becomes equal to or greater than the threshold, and repeats this process. Effect of the Invention

[0009] According to the present invention, damage to the needle of the probe can be prevented. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a plan view showing a configuration of a heating stage according to a first embodiment of the present invention. [Diagram 2] 1 is a configuration diagram of a temperature characteristics measuring system according to a first embodiment of the present invention. [Diagram 3] 4 is a flowchart illustrating the operation of the temperature characteristics measuring system according to the first embodiment of the present invention. [Figure 4] 6 is a flowchart illustrating the operation of a temperature characteristics measuring system according to a second embodiment of the present invention. [Diagram 5] FIG. 11 is a plan view showing the configuration of a heating stage according to a third embodiment of the present invention. [Figure 6] FIG. 4 is an outline view of a probe according to a comparative example of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention (hereinafter, referred to as "the present embodiment") will be described in detail with reference to the drawings. Note that each drawing is merely a schematic illustration to allow a sufficient understanding of the present embodiment. In addition, in each drawing, common or similar components are given the same reference numerals, and duplicated explanations thereof will be omitted.

[0012] FIG. 1 is a plan view showing the configuration of a heating stage according to a first embodiment of the present invention. The heating stage 100 includes a first stage 10 and a second stage 20. The first stage 10 is a circular stage on which a measurement sample 190 (FIG. 2) is placed. The second stage 20 is a rectangular stage smaller than the first stage 10. A needle 125 of a probe 120 can be brought close to the second stage 20. The second stage 20 is electrically insulated from the first stage 10, but is controlled to have approximately the same temperature as the first stage 10. Furthermore, the upper surface of the first stage 10 and the upper surface of the second stage 20 are approximately flush with each other. The measurement sample 190 is, for example, an IC chip.

[0013] FIG. 2 is a configuration diagram of a temperature characteristics measuring system according to a first embodiment of the present invention. The measurement system 200 includes a heating stage 100, an XYZθ stage 110 as a Z stage, a probe 120, a cable 130, an electronic measuring instrument 150 as a measurement device, a control device 160, and an alarm unit 170. The heating stage 100 is for mounting a measurement sample 190 thereon, and includes a heater 50 that maintains the first stage 10 (FIG. 1) and the second stage 20 (FIG. 2) at substantially the same temperature, as described above.

[0014] The XYZθ stage 110 translates the heating stage 100 in the XYZ directions and rotates it around the Z axis. Note that the XYZθ stage 110 may move the probe 120 without moving the heating stage 100. In other words, the XYZθ stage 110 moves either or both of the heating stage 100 and the probe 120 in the XYZθ directions.

[0015] The probe 120 includes a plurality of needles 125 for measuring electrical characteristics of the measurement sample 190. The cable 130 is a cable that connects the electronic measuring instrument 150 and the probe 120. The electronic measuring instrument 150 is a measuring device that measures the voltage-current characteristics of the measurement sample 190 via the probe 120. The control device 160 is, for example, a personal computer (PC), and controls the electronic measuring instrument 150 and the XYZθ stage 110 by executing an application program. The notification unit 170 notifies the operator by voice or visually in response to a command from the control device 160.

[0016] 3 is a flow chart for explaining the operation of the temperature characteristics measuring system according to the first embodiment of the present invention. This flow is started when the temperatures of the first stage 10 and the second stage 20 are raised to the measurement temperature. Note that steps S2 to S5 shown within the dashed frame are executed by the control device 160, but steps S1, S6, and S7 shown outside the dashed frame may be executed by the control device 160 or may be executed manually by an operator.

[0017] First, the operator heats the first stage 10 and the second stage 20 with the heater 50. Next, the operator visually brings the tip of the needle 125 close to the top surface of the second stage 20, which has the same temperature as the first stage 10 (S1). As a result, the top surface temperature of the second stage 20 and the tip temperature of the needle 125 are approximately the same. After the process of S1, the control device 160 causes the electronic measuring device 150 to measure the contact resistance and determines whether the contact resistance is equal to or greater than a threshold value (S2). Here, the measurement target is the contact resistance between the two needles 125 if there are two needles 125, and the contact resistance between the multiple needles 125 if there are three or more needles 125. Also, if there is one needle 125, the measurement target is the contact resistance between the second stage 20 and the needle 125.

[0018] If the needle 125 and the upper surface of the second stage 20 are not in contact with each other, all of the contact resistances are equal to or greater than the threshold. If all of the contact resistances are equal to or greater than the threshold (equal to or greater than the threshold in S2), the control device 160 repeats the measurement of the contact resistances. On the other hand, if the needle 125 extends due to thermal expansion and comes into contact with the upper surface of the second stage 20, any of the contact resistances will be less than the threshold (less than the threshold in S2). When any of the contact resistances is less than the threshold, the control device 160 uses the XYZθ stage 110 (FIG. 2) to separate the second stage 20 from the tip of the needle 125 by a predetermined distance (for example, 50 μm) in the Z direction (S3), returning the needle 125 to a close state. This prevents the needle 125 from contacting the second stage 20 for a long time even if the needle 125 extends due to a temperature rise in the needle 125, and thus prevents the needle 125 from being subjected to a force that would break or bend the needle 125. Furthermore, since the second stage 20 and the tip of the needle 125 are repeatedly brought into contact with and into close proximity with each other, the temperature of the upper surface of the second stage 20 and the temperature of the tip of the needle 125 become approximately equal to each other.

[0019] After the process of S3, the control device 160 judges whether the time elapsed from the start of the measurement of the contact resistance has exceeded a first predetermined time (e.g., about one hour) (S4). If the first predetermined time has not elapsed ("not elapsed" in S4), the control device 160 returns the process to S2 and repeats the judgment of the contact resistance. On the other hand, if the first predetermined time has elapsed ("elapsed" in S4), the temperature and extension of the needle 125 can be considered to have reached a steady state, and the control device 160 notifies the operator that a steady state has been reached via the notification unit 170 (FIG. 2) (S5).

[0020] After the process of S5, the operator or the control device 160 manually or by using the XYZθ stage 110 (FIG. 2) moves the needle 125 of the probe 120 from the second stage 20 (FIG. 1) to the first stage 10 (FIG. 19) (S6) and brings the needle 125 into contact with the measurement sample 190. After the process of S6, the operator or the control device 160 uses the electronic measuring device 150 to measure the electrical characteristics of the measurement sample 190 (S7), and ends the process.

[0021] As described above, according to the measurement system 200 of this embodiment, even if the needle 125 extends due to a temperature rise caused by its proximity to the upper surface of the second stage 20, the tip of the needle 125 repeatedly comes into contact with and approaches the upper surface of the second stage 20. In other words, the tip of the needle 125 does not come into complete contact with the second stage 20. Therefore, damage to the needle 125 is avoided. Furthermore, if a state in which the contact resistance is equal to or greater than a threshold value continues for a first predetermined time (for example, about one hour) or more, a notification is issued to the operator. Furthermore, after the first predetermined time has passed, the temperature of the tip of the needle 125 becomes substantially the same as the temperature of the upper surface of the second stage 20.

[0022] That is, according to measurement system 200, the maintenance of the distance between needle 125 and second stage 20 is automated, so that the operator does not need to manually maintain the proximity between needle 125 and the upper surface of second stage 20 for the first predetermined time (for example, about one hour). Also, in the case of a probe card having multiple (large number of) needles, each needle stretches to a different extent, so it was difficult for the operator to identify the needle that stretches the most. However, according to measurement system 200, a decrease in the contact resistance of any of the multiple needles is automatically detected, so the operator only needs to recognize the notification (S5 (FIG. 3)).

[0023] Second embodiment In the first embodiment, it was determined whether a first predetermined time (e.g., about one hour) had elapsed since the contact resistance became less than a threshold value and the upper surface of the second stage 20 was separated from the tip of the needle 125, but the elapsed time may also be determined after the contact resistance becomes equal to or greater than the threshold value.

[0024] FIG. 4 is a flowchart illustrating the operation of the temperature characteristics measuring system according to the second embodiment of the present invention. The operator brings the tip of the needle 125 close to the surface of the second stage 20, which has the same temperature as the first stage 10 (S11). After the process of S11, the control device 160 has the electronic measuring device 150 measure the contact resistance and determine whether it is equal to or greater than a threshold value (S12). If the contact resistance is equal to or greater than the threshold value (equal to or greater than the threshold value in S12), the control device 160 determines whether a second predetermined time (e.g., about one hour) has elapsed (S14). If the second predetermined time has not elapsed (not elapsed in S14), the control device 160 returns the process to S12 and has the electronic measuring device 150 determine the contact resistance.

[0025] When the needle 125 extends due to heating, and the tip of the needle 125 comes into contact with the surface of the second stage 20, the contact resistance becomes less than the threshold. If the contact resistance is less than the threshold, the control device 160 separates the tip of the needle 125 from the second stage 20 by a predetermined distance (S13), sets the timer to zero, and returns the process to S12 to determine the contact resistance. If the contact resistance is greater than the threshold (greater than or equal to the threshold in S12), the control device 160 determines whether the elapsed time of the timer (i.e., the time during which the contact resistance is greater than or equal to the threshold) has exceeded a second predetermined time (e.g., about one hour) (S14). If the elapsed time of the timer has exceeded the second predetermined time (elapsed in S14), the control device 160 notifies the operator (S15).

[0026] After the process of S15, the operator or the control device 160 manually or by using the XYZθ stage 110 (FIG. 2) moves the needle 125 of the probe 120 to the first stage 10 (S16) and brings the needle 125 into contact with the measurement sample 190. After the process of S6, the operator or the control device 160 uses the electronic measuring device 150 to measure the electrical characteristics of the measurement sample 190 (S17), and the process ends.

[0027] Third embodiment The heating stage 100 (FIG. 1) in the first and second embodiments is provided with a circular first stage 10 and a rectangular second stage 20, but the second stage can also be in the shape of a ring surrounding the first stage 10.

[0028] FIG. 5 is a plan view showing the configuration of a heating stage 101 according to a third embodiment of the present invention. The heating stage 101 is configured to include a circular first stage 11 and a ring-shaped (circular belt-shaped) second stage 21 provided on the outer periphery of the first stage 11. The first stage 11 has a similar configuration to the first stage 10 of the above embodiment. The second stage 21 is disposed on the outer periphery of the first stage 11, but is electrically insulated from the first stage 11. Also, similar to the above embodiment, the first stage 11 and the second stage 21 are maintained at the same temperature.

[0029] The operation of this embodiment is the same as that of the first and second embodiments. That is, the needle 125 of the probe 120 is brought close to the upper surface of the second stage 21. When the needle 125 extends and contacts the upper surface of the second stage 21, the control device 160 uses the XYZθ stage 110 to lower the second stage 21. As a result, the needle 125 and the upper surface of the second stage 21 are again separated from each other. If this separated state continues for a predetermined time or more, the control device 160 notifies the operator.

[0030] (Comparative Example) FIG. 6 is an outline view of a probe as a comparative example of the present invention. The probe 121 is a probe card equipped with a plurality of needles 126, 127. When the probe 121 approaches the heating stage 100 (FIGS. 1 and 2), the longest needle, for example, needle 127, may extend and come into contact with the upper surface of the heating stage 100, resulting in breakage. For this reason, the probe 121 may be provided with an edge sensor (not shown) that detects needle breakage with light. With the measurement system 200 of each of the above-described embodiments, needle breakage can be prevented without using an edge sensor.

[0031] (Modification) The present invention is not limited to the above-described embodiment, and various modifications are possible, for example, as follows. (1) In the above embodiments, it is determined whether the contact resistance is equal to or greater than a threshold value, but it may be determined whether a current is flowing. In other words, the electronic measuring device 150 measures the resistance between the needles 125 or between the needle 125 and the second stage 20, and the control device 160 determines whether the resistance value is infinite or zero. [Explanation of symbols]

[0032] 10,11 Stage 1 20,21 Stage 2 50 Heater 100,101 Heating stage (stage for measuring temperature characteristics) 110 XYZθ stage (Z stage) 120, 121 Probes 125,126 Needle (probe needle) 130 Cable 150 Electronic measuring instruments (measuring devices) 160 Control device 170 Notification Department 190 Measurement samples 200 Measurement System

Claims

1. a first stage on which a measurement sample is placed; a second stage electrically isolated from the first stage; a heater that heats the first stage and the second stage to substantially the same temperature; the second stage is configured to be capable of repeating a contact state in which the second stage is in contact with a needle that is to be brought into contact with the measurement sample and a proximity state in which the second stage is separated from the needle, The resistance between the second stage and the needle or the resistance between a plurality of the needles via the second stage can be measured. A heating stage characterized by:

2. A heating stage according to claim 1; a measuring device for measuring electrical characteristics of the measurement sample through the needle; a Z stage for vertically moving either or both of the heating stage and the probe having the needle; A control device for controlling the measurement device and the Z stage, The control device, while measuring the resistance with the measuring device, increases the distance between the second stage and the needle by a predetermined distance when the resistance becomes less than a threshold value, and maintains the distance when the resistance becomes equal to or greater than the threshold value, repeatedly. A temperature characteristics measuring system comprising:

3. The control device issues a notification when the elapsed time from the start of measurement of the resistance exceeds a predetermined time, or when the time during which the resistance is equal to or greater than a threshold exceeds a predetermined time.

3. The temperature characteristics measuring system according to claim 2.

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