Measuring device, measuring method, and program

Abstract

To provide a measuring device capable of more accurately identifying a size of an internal element present in a semiconductor element.SOLUTION: A measuring device 10 includes a setting unit 11, an actual measurement unit 12, and an analysis unit 13. The setting unit 11 sets a first equation for deriving a current-voltage ratio of a first conductive path extending from the first electrode to the second electrode, in a semiconductor element having a first electrode and a second electrode. The actual measurement unit 12 measures a first actual measured value of the current-voltage ratio of the first conductive path. The analysis unit 13 identifies a first parameter composing the first equation on the basis of a first theoretical value obtained from the first equation and the first actual measured value. The first parameter includes a size of a first element included inside the semiconductor element. The analysis unit 13 substitutes, into the first equation, the first actual measured value having a minimum difference from the first theoretical value.SELECTED DRAWING: Figure 1

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