Transport device

Abstract

To provide a transport device which reduces the risk of a cable for sharing a power source being routed, broken, rubbed, or generating dust when the transport device is transported.SOLUTION: A transport device 1 for transporting a workpiece 200 includes a holding unit 10 for holding the workpiece 200, an arm 20 for supporting the holding unit 10, and a guide rail 30 for guiding the movement of the arm 20, and the arm 20 includes a self-propelled drive unit 22 that moves by itself along the guide rail 30 and a charging unit 23 that supplies electricity to the self-propelled drive unit 22, and the guide rail 30 includes a power supply unit 33 that supplies power to the charging unit 23.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a conveying device in a processing device. [Background technology]

[0002] 2. Description of the Related Art There is known a processing apparatus in which a transport device takes out a workpiece from a cassette containing the workpiece, transports the workpiece to a holding table that holds the workpiece, and processes the workpiece on the holding table (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-112228 A Summary of the Invention [Problem to be solved by the invention]

[0004] In a processing device such as that described in Patent Document 1, a power supply sharing cable is required for the transport device in the processing device. However, because the power supply sharing cable is thick, there is a problem that the cable may be pulled around, broken, rubbed, or generate dust as the transport device moves.

[0005] The present invention has been made in consideration of such problems, and its purpose is to provide a conveying device that reduces the risk of the need to route a shared power cable to the conveying device, and the risk of it breaking, being rubbed, generating dust, etc., when the conveying device is being transported. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the objective, the conveying device of the present invention is a conveying device for conveying a workpiece, and includes a holding section for holding the workpiece, an arm supporting the holding section, and a guide rail for guiding the movement of the arm, the arm including a self-propelled drive section that moves by itself along the guide rail and a charging section that supplies electricity to the self-propelled drive section, and the guide rail including a power supply section that supplies power to the charging section.

[0007] The arm may include a vertical drive unit that moves the holding unit up and down, and the charging unit may supply electricity to the vertical drive unit.

[0008] The holding unit may include a suction drive unit that sucks and holds the workpiece, and the charging unit may supply electricity to the suction drive unit. Effect of the Invention

[0009] The present invention allows the electricity to be supplied wirelessly to the self-propelled drive unit that self-propels the holding unit and arm in the conveying direction, thereby making it possible to omit the need for a thick shared power cable, thereby reducing the risk of the shared power cable having to be run to the conveying device and becoming broken, chafed, or generating dust. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view illustrating an example of the configuration of a conveying device according to an embodiment. [Diagram 2] FIG. 2 is a perspective view illustrating a configuration example of the conveying device according to the embodiment. [Diagram 3] FIG. 3 is a perspective view illustrating a configuration example of the conveying device according to the embodiment. [Figure 4] FIG. 4 is a functional diagram for explaining the function between the charging unit and the power supply unit of the transport device of FIGS. [Diagram 5] FIG. 5 is a perspective view showing a configuration example of a processing device equipped with the transfer device of FIGS. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment] A conveying device 1 according to an embodiment of the present invention will be described with reference to the drawings. FIGS. 1, 2, and 3 are all perspective views showing a configuration example of the conveying device 1 according to the embodiment. FIG. 4 is a functional diagram explaining the function between the charging unit 23 and the power supply unit 33 of the conveying device 1 of FIGS. 1 to 3. FIG. 5 is a perspective view showing a configuration example of a processing device 100 to which the conveying device 1 of FIGS. 1 to 3 is attached. As shown in FIGS. 1, 2, and 3, the conveying device 1 according to the embodiment includes a holding unit 10, an arm 20, and a guide rail 30. As shown in FIG. 5, the conveying device 1 according to the embodiment is attached to the processing device 100, and is a device that conveys a workpiece 200, which is an object to be processed by the processing device 100, within the processing device 100.

[0013] The workpiece 200, which is an object to be conveyed by the conveying device 1 according to the embodiment and is an object to be processed by the processing device 100 to which the conveying device 1 is attached, is, as shown in Figs. 1 and 5, a disk-shaped semiconductor wafer or an optical device wafer, for example, made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like as a base material. The workpiece 200 has a flat surface 201, and a chip-shaped device 203 is formed in an area partitioned by a plurality of mutually intersecting division lines 202. The workpiece 200 has an adhesive tape 205 attached to a back surface 204 on the back side of the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. That is, the workpiece 200 is fixed to an opening of the annular frame 206 via the adhesive tape 205. The workpiece 200 does not need to have the adhesive tape 205 or the annular frame 206 attached thereto. In addition, in the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] 5, the processing device 100 equipped with the transport device 1 according to the embodiment includes a holding table 110, a processing unit 120, a cassette mounting table 130, and a control unit 140. The holding table 110 holds the workpiece by suction on a holding surface 111 on the upper surface of the holding table 110. The holding table 110 is provided to be movable along the X-axis direction parallel to the horizontal direction between a transport position where the workpiece 200 is carried in or out onto the holding surface 111 by the transport device 1, and a processing position where the workpiece 200 on the holding surface 111 is processed by the processing unit 120.

[0015] The processing unit 120 processes the workpiece 200 held by the holding surface 111 of the holding table 110 positioned at the processing position. In the example of this embodiment shown in FIG. 5, the processing unit 120 is a cutting processing unit that includes a spindle 122 to which a cutting blade 121 is rotatably attached and cuts the workpiece 200 with the cutting blade 121. Note that the processing unit 120 is not limited to this in the present invention, and may be a grinding processing unit that includes a spindle to which a grinding wheel with a grinding wheel is rotatably attached and grinds the workpiece 200 with the grinding wheel, a laser processing unit that includes a laser beam irradiator that irradiates the workpiece 200 with a laser beam and laser processes the workpiece 200 with the laser beam, a grinding processing unit that includes a spindle to which a polishing pad is rotatably attached and polishes the workpiece 200 with the polishing pad, or the like.

[0016] The cassette placement table 130 is a placement table on which a cassette 135, which is a container for storing a plurality of workpieces 200, is placed, and the placed cassette 135 is raised and lowered in a Z-axis direction parallel to the vertical direction and perpendicular to the XY plane. The processing device 100 further includes a transport unit (not shown) and transports the workpiece 200 between the cassette 135 and a temporary placement section for temporarily placing the workpiece 200, which is provided adjacent to the cassette 135. The processing device 100 further includes a cleaning unit (not shown). The temporary placement section is, for example, a pair of guide rails that can approach and move away from each other. The cleaning unit cleans the workpiece 200 processed by the processing unit 120, and removes processing debris attached to the workpiece 200 by processing.

[0017] The transport device 1 according to the embodiment installed in the processing apparatus 100 holds the workpiece 200 and transports the workpiece 200 between the temporary placement unit, the holding surface 111 of the holding table 110, and the cleaning unit. The transport device 1 according to the embodiment installed in the processing apparatus 100 is supported so as to be movable in the Y-axis direction, which is the transport direction, parallel to the horizontal direction and perpendicular to the X-axis direction, between a predetermined first position 301 (one end position, see FIG. 1) and a predetermined second position 302 (the other end position, see FIG. 3) in the processing apparatus 100. The predetermined first position 301 of the transport device 1 is a position above the temporary placement unit in the processing apparatus 100 and a position above the transport position of the holding table 110. The predetermined second position 302 of the transport device 1 is a so-called standby position that is the furthest away from the first position 301 along the Y-axis direction, and in this embodiment, is a charging position for charging the charging unit 26 of the arm 20 of the transport device 1. Further, below a position between the first position 301 and the second position 302 of the transfer device 1, a cleaning unit is disposed.

[0018] The control unit 140 controls the operation of each component of the processing apparatus 100, and causes the processing apparatus 100 including the transport apparatus 1 to perform various processes including the processing of the workpiece 200 by the processing unit 120 and the transport of the workpiece 200 by the transport apparatus 1. The control unit 140 is connected to an electric power supply source, and supplies electricity received from the electric power supply source to each component of the processing apparatus 100, including the power supply unit 34 of the transport apparatus 1 according to an embodiment described below.

[0019] The control unit 140 wirelessly communicates information with the transport device 1 via a communication unit provided in a charging unit 26 of an arm 20 of the transport device 1, which will be described later. The control unit 140 wirelessly transmits to the communication unit of the transport device 1 a command signal instructing the transport device 1 to transport the workpiece 200, and a control signal for controlling each part of the transport device 1. The control signal transmitted from the control unit 140 to the communication unit of the transport device 1 is transmitted from the communication unit of the transport device 1 to each part of the transport device 1. The control unit 140 wirelessly receives transport information, which is information such as a history and coordinates related to transport by the transport device 1, from the communication unit of the transport device 1.

[0020] The control unit 140 controls the transport process of the workpiece 200 by the transport device 1. When there is no plan to transmit a command signal instructing the transport device 1 to transport the workpiece 200 and the transport device 1 has completed the transport process of the workpiece 200 based on the command signal previously received, the control unit 140 determines that the transport device 1 is in a standby state in which it is waiting to receive the next command signal without performing the transport process of the workpiece 200. When the control unit 140 determines that the transport device 1 is in a standby state, it moves the transport device 1 to the second position 302, which is a charging position for charging the charging unit 26, and charges the charging unit 26 until it transmits the next command signal to the transport device 1.

[0021] Furthermore, the control unit 140 detects the remaining amount of electricity in the charging unit 26 from the charging unit 26 at regular intervals (for example, 5 minutes). When the control unit 140 determines that the remaining amount of electricity in the charging unit 26 is equal to or less than a predetermined threshold that has been determined and input in advance, the control unit 140 interrupts the transport process of the workpiece 200 by the transport device 1, moves the transport device 1 to a second position 302 that is a charging position for charging the charging unit 26, and charges the charging unit 26. Here, the predetermined threshold is, for example, a remaining amount of electricity at which the charging unit 26 runs out after the transport device 1 has performed the transport process of transporting the workpiece 200 several times.

[0022] In the first embodiment, the control unit 140 includes a computer system. The computer system included in the control unit 140 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 140 performs arithmetic processing according to a computer program stored in the storage device of the control unit 140, and outputs a control signal for controlling the processing device 100 including the conveying device 1 to each component of the processing device 100 including the conveying device 1 via the input / output interface device of the control unit 140.

[0023] Next, this specification will explain the conveying device 1 according to the embodiment with reference to the drawings. As shown in Fig. 1, Fig. 2 and Fig. 3, the holding unit 10 includes a suction pad 11 and a suction drive unit 12. A plurality of suction pads 11 (four in the example of this embodiment shown in Fig. 1, Fig. 2 and Fig. 3) are provided on the underside of an arm body 21 of an arm 20 described later. Each of the plurality of suction pads 11 is electrically connected to the suction drive unit 12, and is driven by the suction drive unit 12 to suction and hold the workpiece 200 or an annular frame 206 attached to the workpiece 200 from above.

[0024] The suction driving unit 12 consumes electricity (power) to drive the suction pad 11, causing the suction pad 11 to suck and hold the workpiece 200 or the annular frame 206 attached to the workpiece 200 from above. The suction driving unit 12 is supplied with electricity from the charging unit 26 of the charging unit 23 of the arm 20. The holding unit 10 thus holds the workpiece 200 by sucking and holding the workpiece 200 or the annular frame 206 attached to the workpiece 200 from above with the suction pad 11 driven by the suction driving unit 12. Note that the holding unit 10 is not limited to this in the present invention, and may hold the workpiece 200 by, for example, sucking and holding a portion of the adhesive tape 205 attached to the workpiece 200 from above.

[0025] 1, 2 and 3, the suction pad 11 and suction drive unit 12 of the holder 10 are both supported by the arm body 21 of the arm 20, and are supported by the self-propelled drive unit 22 via the arm body 21 and the vertical drive unit 24 of the arm 20 so as to be freely movable in the Y-axis direction between a first position 301 and a second position 302. In addition, the suction pad 11 and suction drive unit 12 of the holder 10 are supported by the arm body 21 of the arm 20 so as to be freely movable in the Z-axis direction by the vertical drive unit 24.

[0026] As shown in Figs. 1, 2 and 3, the arm 20 includes an arm body 21, a self-propelled driving unit 22, a charging unit 23 and a vertical driving unit 24. The arm body 21 supports the suction pads 11 of the holding unit 10 from above on its lower surface, and supports the suction driving unit 12 of the holding unit 10 from below on its upper surface. In this manner, the arm body 21 supports the holding unit 10. The arm body 21 is supported by the self-propelled driving unit 22 via the vertical driving unit 24 so as to be movable in the Y-axis direction between a first position 301 and a second position 302. The arm body 21 is also supported by the vertical driving unit 24 so as to be movable in the Z-axis direction.

[0027] The self-propelled driving unit 22 is provided so as to be movable along the Y-axis direction between a first position 301 and a second position 302 by a guide rail body 31 of a guide rail 30 disposed along the Y-axis direction in the processing apparatus 100, and is provided by being screwed into a ball screw 32 of the guide rail 30 provided along the Y-axis direction in parallel to the guide rail body 31 of the guide rail 30. The self-propelled driving unit 22 has a motor, and consumes electricity to rotate the ball screw 32 of the guide rail 30 by the motor, thereby self-propelling along the guide rail body 31 of the guide rail 30 in the Y-axis direction between the first position 301 and the second position 302. The self-propelled driving unit 22 is supplied with electricity from a charging unit 26 of the charging unit 23.

[0028] The self-propelled driving unit 22 is attached with a charging unit 23 and a vertical driving unit 24, and the arm body 21 is attached via the vertical driving unit 24. The self-propelled driving unit 22 consumes electricity and moves by itself along the guide rail body 31 of the guide rail 30, thereby moving the charging unit 23 and the vertical driving unit 24, the arm body 21 attached via the vertical driving unit 24, and the multiple suction pads 11 and the suction driving unit 12 of the holding unit 10 supported by the arm body 21, integrally with the self-propelled driving unit 22, between a first position 301 and a second position 302 in the Y-axis direction along the guide rail body 31 of the guide rail 30.

[0029] 1, 2, 3, and 4, the charging section 23 includes a power receiving head 25 and a charging unit 26. The power receiving head 25 and the charging unit 26 are provided close to each other and are electrically connected to each other by wires. The power receiving head 25 and the charging unit 26 of the charging section 23 are attached to the self-propelled driving section 22, and are supported by the self-propelled driving section 22 so as to be freely movable in the Y-axis direction between a first position 301 and a second position 302.

[0030] 3 , when the power receiving head 25 is positioned at the second position 302, it faces the power supply head 35 of the power supply unit 33 of the guide rail 30 provided at the second position 302 in the X-axis direction in close proximity to the power supply head 35. When the power receiving head 25 faces the power supply head 35 in the X-axis direction in this manner in close proximity to the power supply head 35, it is electrically connected to the power supply head 35 wirelessly and receives a supply of electricity from the power supply head 35 (receives power). The power receiving head 25 supplies the electricity received from the power supply head 35 in this manner to the charging unit 26, thereby charging the charging unit 26.

[0031] The charging unit 26 is charged by receiving electricity from the power receiving head 25. For example, a rechargeable battery is used as the charging unit 26. The charging unit 26 is electrically connected to the suction drive unit 12, the self-propelled drive unit 22, and the vertical drive unit 24 of the holding unit 10, and supplies electricity to the suction drive unit 12, the self-propelled drive unit 22, and the vertical drive unit 24 of the holding unit 10. In the present embodiment, the charging unit 26 is provided with a communication unit that wirelessly communicates information with the control unit 140, and controls the operation of the suction drive unit 12, the self-propelled drive unit 22, and the vertical drive unit 24 of the holding unit 10 by controlling the electricity supplied to the suction drive unit 12, the self-propelled drive unit 22, and the vertical drive unit 24 of the holding unit 10 based on a control signal transmitted from the control unit 140. Note that the communication unit is not limited to being provided in the charging unit 26 in the present invention, and may be provided in either the holding unit 10 or the arm 20 that moves in the Y-axis direction by the self-propelled drive unit 22.

[0032] The vertical drive unit 24 is attached to the self-propelled drive unit 22, and is supported by the self-propelled drive unit 22 so as to be movable in the Y-axis direction between a first position 301 and a second position 302. The vertical drive unit 24 supports the arm body 21 so as to be movable in the Z-axis direction relative to the vertical drive unit 24 and the self-propelled drive unit 22. The vertical drive unit 24 consumes electricity to move the arm body 21 and the holding unit 10 supported by the arm body 21 along the Z-axis direction. The vertical drive unit 24 is supplied with electricity from the charging unit 26 of the charging unit 23. In this embodiment, the vertical drive unit 24 is a known ball screw mechanism having a motor, a ball screw, and a guide.

[0033] 1, 2, and 3, the guide rail 30 includes a guide rail main body 31, a ball screw 32, and a power supply unit 33. The guide rail main body 31 is disposed along the Y-axis direction between a first position 301 and a second position 302 in the processing device 100 (see FIG. 5), and supports the self-propelled drive unit 22 of the arm 20 so as to be freely movable along the Y-axis direction.

[0034] The ball screw 32 is provided parallel to the guide rail body 31 of the guide rail 30, between the first position 301 and the second position 302, along the Y-axis direction, and is screwed into the self-propelled driving unit 22. The ball screw 32 is rotated by the motor of the self-propelled driving unit 22, thereby moving (self-propelling) the self-propelled driving unit 22 along the Y-axis direction between the first position 301 and the second position 302, and moving the charging unit 23 and the vertical driving unit 24 attached to the self-propelled driving unit 22, the arm body 21 attached via the vertical driving unit 24, and the multiple suction pads 11 and the suction driving unit 12 of the holding unit 10 supported by the arm body 21, together with the self-propelled driving unit 22, along the Y-axis direction between the first position 301 and the second position 302.

[0035] As shown in Figs. 1, 2, 3 and 4, the power supply section 33 includes a power supply unit 34 and a power supply head 35. The power supply unit 34 and the power supply head 35 are provided close to each other and are electrically connected to each other by wire. The power supply unit 34 and the power supply head 35 of the power supply section 33 are installed at a second position 302 in the guide rail body 31. The power supply unit 34 is electrically connected to the control unit 140 of the processing device 100, and is connected to an electric power supply source via the control unit 140 of the processing device 100, and receives electricity from the electric power supply source via the control unit 140 of the processing device 100. The power supply head 35 receives (receives) electricity from the power supply unit 34, which is supplied to the power supply unit 34 from the electric power supply source.

[0036] 3 , when the power receiving head 25 is positioned at the second position 302, the power supply head 35 comes close to and faces the power receiving head 25 along the X-axis direction. When the power receiving head 25 comes close to and faces the power receiving head 25 along the X-axis direction in this manner, the power supply head 35 is electrically connected to the power receiving head 25 wirelessly and supplies (supplies) electricity received from the power supply unit 34 to the power receiving head 25.

[0037] An example of the operation process of the transport device 1 according to the embodiment having the above-mentioned configuration will be described. When the charging unit 26 is sufficiently charged and a transport command is received from the control unit 140, the transport device 1 performs a transport process to transport the workpiece 200 in response to a control signal from the control unit 140. The transport device 1 performs the transport process by sequentially performing a workpiece holding process, a workpiece moving process, and a workpiece placing process, which will be described below.

[0038] The transport device 1 first positions each suction pad 11 of the holder 10 above the workpiece 200 to be transported by the self-propelled drive unit 22 supplied with electricity from the charging unit 26. The transport device 1 then lowers each suction pad 11 of the holder 10 by the up-down drive unit 24 supplied with electricity from the charging unit 26, so that each suction pad 11 of the holder 10 approaches and contacts the workpiece 200 to be transported. The transport device 1 then sucks and holds the workpiece 200 to be transported by each suction pad 11 of the holder 10 by the suction drive unit 12 supplied with electricity from the charging unit 26. In this way, the transport device 1 performs a workpiece holding process in which the holder 10 sucks and holds the workpiece 200 to be transported.

[0039] After performing the workpiece holding process, the transport device 1 raises each suction pad 11 of the holder 10 that has suction-held the workpiece 200 to be transported, by the vertical drive unit 24 supplied with electricity from the charging unit 26. The transport device 1 then positions each suction pad 11 of the holder 10 that has suction-held the workpiece 200 to be transported above the destination, by the self-propelled drive unit 22 supplied with electricity from the charging unit 26. In this way, the transport device 1 performs a workpiece moving process in which the workpiece 200 to be transported that has been suction-held by the holder 10 is moved to the destination.

[0040] After performing the workpiece moving process, the transport device 1 uses the up / down drive unit 24 supplied with electricity from the charging unit 26 to lower each of the suction pads 11 of the holder 10 that has suction-held the workpiece 200 to be transported, and moves it closer to the destination. The transport device 1 then uses the suction drive unit 12 supplied with electricity from the charging unit 26 to release the suction-holding of the workpiece 200 to be transported by each of the suction pads 11 of the holder 10, thereby placing the workpiece 200 to be transported at the destination. In this way, the transport device 1 performs a workpiece placing process in which the workpiece 200 to be transported that has been suction-held by the holder 10 is placed at the destination.

[0041] When the conveying device 1 is in a standby state waiting to receive the next command signal without performing the conveying process of the workpiece 200, or when the remaining amount of electricity in the charging unit 26 is below a predetermined threshold value that has been determined and input in advance, the conveying device 1 performs a charging process to charge the charging unit 26 in response to a control signal from the control unit 140.

[0042] The transport device 1 moves to the second position 302 by the self-propelled drive unit 22 supplied with electricity from the charging unit 26. When the transport device 1 is positioned at the second position 302, the power receiving head 25 and the power supplying head 35 face each other closely along the X-axis direction and are electrically connected wirelessly. Electricity is supplied from the power supplying head 35 to the power receiving head 25, and further electricity is supplied from the power receiving head 25 to the charging unit 26, thereby charging the charging unit 26.

[0043] The conveying device 1 of the embodiment having the above-mentioned configuration can wirelessly receive electricity to supply to the self-propelled drive unit 22 that self-propels the holding unit 10 and the arm 20 in the conveying direction and charge it. This makes it possible to omit a thick power supply sharing cable, thereby achieving the advantageous effect of reducing the risk of the power supply sharing cable having to be routed to the conveying device 1 and of breakage, chafing, dust generation, etc.

[0044] Furthermore, the conveying device 1 according to the embodiment can wirelessly receive and charge electricity to be supplied to the vertical drive unit 24 that moves the holder 10 up and down. Furthermore, the conveying device 1 according to the embodiment can wirelessly receive and charge electricity to be supplied to the suction drive unit 12 that suctions and holds the workpiece 200. In either case, the conveying device 1 according to the embodiment can omit a thick power supply sharing cable, and therefore can more significantly achieve the effect of suppressing the risk of the power supply sharing cable being routed to the conveying device 1 and breaking, rubbing, dust generation, etc.

[0045] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0046] 1. Conveyor device 10 Holding part 12 Suction drive unit 20 Arm 22 Self-propelled drive unit 23 Live parts 24 Vertical drive unit 30 Guide rail 33 Power supply unit 200 Work

Claims

1. A conveying device for conveying a workpiece, A holding part for holding a workpiece; An arm supporting the holding portion; a guide rail for guiding the movement of the arm; the arm includes a self-propelled drive unit that self-propels along the guide rail and a charging unit that supplies electricity to the self-propelled drive unit; The guide rail is a conveying device equipped with a power supply unit that supplies power to the charging unit.

2. The arm includes a vertical drive unit that moves the holding unit up and down, 2. The transport device according to claim 1, wherein the charging section supplies electricity to the vertical drive section.

3. The holding unit includes a suction drive unit that holds the workpiece by suction, 2. The transport device according to claim 1, wherein the charging section supplies electricity to the suction drive section.

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