Linear motor, stage device, lithography device, and article manufacturing method

Abstract

To provide an advantageous technique for simplifying a configuration for dynamic braking.SOLUTION: A linear motor includes a mover having a magnet row, a stator including a plurality of coils arranged within the movable range of the mover, a plurality of selection switches arranged between a driver that drives the plurality of coils and the respective plurality of coils, and a path provided between the driver and the plurality of selection switches, which short-circuits, during braking, a coil of the plurality of coils that faces the magnet row and a coil of the plurality of coils that does not face the magnet row.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a linear motor, a stage apparatus, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] Patent Document 1 describes a stage device that moves a moving body by a linear motor. This linear motor has multiple coils as a stator and a magnet as a mover, and generates a thrust by Lorentz force by switching which of the multiple coils to energize. In this stage device, of a pair of coils arranged at positions apart from each other, the coil facing the magnet is used as a dynamic brake coil, and the other coil is used as a current limiting resistor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-237069 A Summary of the Invention [Problem to be solved by the invention]

[0004] By limiting the current flowing through the dynamic braking coil during dynamic braking operation, it is possible to prevent damage to the coil. However, in order to connect the ground side terminals of the two coils to each other or to ground, it is necessary to provide two switches (e.g., transistors such as FETs) on the ground side for one coil. Therefore, such a configuration can become more complicated.

[0005] An object of the present invention is to provide an advantageous technique for simplifying the configuration for dynamic braking. [Means for solving the problem]

[0006] One aspect of the present invention relates to a linear motor comprising a mover having a magnet row, and a stator including a plurality of coils arranged within a movable range of the mover, the linear motor comprising a plurality of selection switches arranged between a driver that drives the plurality of coils and each of the plurality of coils, and a path provided between the driver and the plurality of selection switches, for short-circuiting, during braking, a coil of the plurality of coils that faces the magnet row and a coil of the plurality of coils that does not face the magnet row. Effect of the Invention

[0007] According to the present invention, an advantageous technique is provided for simplifying the configuration for dynamic braking. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing the configuration of a stage device and a linear motor according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing the configuration of a stage device and a linear motor according to the first embodiment. [Diagram 3] An enlarged view of a portion of Figure 2. [Figure 4] 2 is a cross-sectional view showing the configuration of a magnet assembly and a coil assembly of the linear motor according to the first embodiment. FIG. [Diagram 5] FIG. 2 is a top view showing the configuration of a stage device and a linear motor according to the first embodiment. [Figure 6] FIG. 2 is a top view showing the configuration of a magnet assembly and a coil assembly of the linear motor according to the first embodiment. [Figure 7] FIG. 2 is a diagram showing the circuit configuration of a linear motor incorporated in the stage device of the first embodiment. [Figure 8] 5A to 5C are diagrams showing the operation of a linear motor incorporated in the stage device of the first embodiment. [Figure 9] 5A to 5C are diagrams showing the operation of a linear motor incorporated in the stage device of the first embodiment. [Figure 10]10 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a second embodiment. [Figure 11] 10 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a second embodiment. [Figure 12] 10A to 10C are diagrams showing the operation of a linear motor incorporated in the stage device of the second embodiment. [Figure 13] FIG. 13 is a perspective view showing the configuration of a stage device and a linear motor according to a third embodiment. [Figure 14] FIG. 13 is a perspective view showing the configuration of a stage device and a linear motor according to a third embodiment. [Figure 15] FIG. 11 is a cross-sectional view showing the configuration of a magnet assembly and a coil assembly of a linear motor according to a third embodiment. [Figure 16] FIG. 13 is a top view showing the configuration of a stage device and a linear motor according to a third embodiment. [Figure 17] 13 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a third embodiment. [Figure 18] 13 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a third embodiment. [Figure 19] 13 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a third embodiment. [Figure 20] FIG. 13 is a top view showing the configuration of a magnet assembly and a coil assembly of a linear motor according to a fourth embodiment. [Figure 21] 13 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a fourth embodiment. [Figure 22] 13 is a diagram showing the circuit configuration and operation of a linear motor incorporated in a stage device according to a fourth embodiment. [Figure 23] 13A to 13C are diagrams showing the operation of a linear motor incorporated in the stage device of the fourth embodiment. [Figure 24] 13A to 13C are diagrams showing the operation of a linear motor incorporated in the stage device of the fourth embodiment. [Diagram 25] FIG. 1 is a diagram illustrating the configuration of a lithography apparatus according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] First, a configuration example of the stage device ST of the first embodiment will be described with reference to FIGS. 1, 2, 3, 4, 5, and 6. FIG. 1 is a perspective view of the stage device ST. FIG. 2 is a perspective view of the stage device ST of FIG. 1 with some components removed. FIG. 3 is a perspective view of an enlarged portion of FIG. 2. FIG. 4 is a cross-sectional view showing a configuration example of the coil assembly (stator) 505 and the magnet assembly (moveable element) 504. FIG. 5 is a top view of the stage device ST. FIG. 6 is a top view showing a configuration example of the coil assembly (stator) 505 and the magnet assembly (moveable element) 504. The coil assembly (stator) 505 and the magnet assembly (moveable element) 504 constitute a linear motor.

[0011] A yaw guide 501 may be fixed to each of both sides of the base 500. A stage 502 may be slidably supported by the upper surface of the base 500 and the side surfaces of the two yaw guides 501 via an air slide (not shown). An arm 503 may be fixed onto the stage 502, and a magnet assembly 504 serving as a mover may be fixed to the tip of the arm 503. The magnet assembly 504 faces the coil assembly 505 serving as a stator in a non-contact manner so as to surround the coil assembly 505. The coil assembly 505 may be fixed to a coil support structure 506. The coil support structure 506 may include a support 506-1 and a base 506-2.

[0012] The magnet assembly 504 may include an upper yoke 504-1U, two spacers 504-2, an upper magnet row 504-3U, a lower magnet row 504-3L, and a lower yoke 504-1L. The upper magnet row 504-3U may include two upwardly magnetized magnets 504-3VU, two downwardly magnetized magnets 504-3VL, two Y+ direction magnetized magnets 504-3YP, and three Y- direction magnetized magnets 504-3YM. The upper magnet row 504-3U may be fixed to the upper yoke 504-1U to form a magnet row in a Halbach array that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 504-3L may be fixed to the lower yoke 504-1L to form a magnet row in a Halbach array similar to the upper magnet row 504-3U. The coil assembly 505 may include eleven flattened oval coils 505-C and a coil support member 505-S that supports the flattened oval coils 505-C. The flattened oval coils 505-C may be fixed to the coil support member 505-S by a method such as adhesion.

[0013] If the period of the magnetic flux density distribution of the approximately sinusoidal wave is T, the distance between adjacent coils is 3 / 4T in terms of center distance and 3 / 2π in terms of electrical angle. The distance between every other coil is 3π in terms of electrical angle, and the phases are opposite to each other. Therefore, by reversing the connections to the windings of every other coil, these can be treated as coils of the same phase. Here, a set of every other coil 505A in a certain set constitutes an A-phase coil set, and a set of every other coil 505B in the remaining set constitutes a B-phase coil set. That is, the coils 505A of the A-phase coil set and the coils 505B of the B-phase coil set are arranged alternately. In one example, the A-phase coil set is composed of eight coils 505A, and the B-phase coil set is composed of eight coils 505B. At position y (drive direction, i.e., the direction in which the multiple coils are arranged) of stage 502, a current Ia=I·sin(2π / T·y) flows through the A-phase coil set, and a current Ib=I·sin(2π / T·y+3-2π) flows through the B-phase coil set. This makes it possible to generate a thrust proportional to the current amplitude I at position y. The currents Ia and Ib are supplied only to the coils facing the magnet, rather than to all coils.

[0014] 6 shows magnet assembly 504 and coil assembly 505 with upper yoke 504-1U removed. The coils shown in white are coils 505A of the A-phase coil set, and the coils shown in gray are coils 505B of the B-phase coil set.

[0015] The circuit configuration and operation of the linear motor LM incorporated in the stage device ST of the first embodiment will be described below with reference to Figures 7, 8, and 9. The linear motor LM may be incorporated in other devices. The linear motor LM includes a magnet assembly 504 as a mover having a magnet array, and a coil assembly 505 as a stator including multiple coils 505A, 505B arranged within the movable range of the magnet assembly 504 (mover).

[0016] The linear motor LM has a dynamic braking circuit. The linear motor LM may include paths (also referred to as short-circuit paths) P1, P2 that short-circuit the coils facing the magnet assembly 504 (magnet row) among the multiple coils and the coils not facing the magnet assembly 504 among the multiple coils during braking operation by the dynamic braking circuit. The multiple coils of the coil assembly 505 constitute multiple coil pairs, and each coil pair is composed of two coils arranged in positions that do not simultaneously face the magnet assembly 504. The multiple coils of the coil assembly 505 may include multiple first coils 505A that constitute the A phase and multiple second coils 505B that constitute the B phase. The short-circuit paths are preferably provided in both the A phase and the B phase, but may be provided in only one of the A phase and the B phase.

[0017] In the following, as an example, a linear motor LM in which short-circuit paths are provided in both the A phase and the B phase will be described. The linear motor LM may include a first driver 700A for driving a plurality of first coils 505A constituting the A phase, and a second driver 700B for driving a plurality of second coils 505B constituting the B phase. The linear motor LM has a first path P1 for short-circuiting a first coil facing the magnet assembly 504 (magnet row) among the plurality of first coils 505A and a first coil not facing the magnet assembly 504 among the plurality of first coils 505A during a braking operation. The linear motor LM also has a second path P2 for short-circuiting a second coil facing the magnet assembly 504 among the plurality of second coils 505B and a second coil not facing the magnet assembly 504 among the plurality of second coils 505B during a braking operation. The plurality of first coils 505A constitute a plurality of first coil pairs, and the plurality of second coils 505B constitute a plurality of second coil pairs. Each of the first coil pairs and each of the second coil pairs is composed of two coils arranged in positions that do not simultaneously face the magnet assembly 504.

[0018] The linear motor LM may include a plurality of first selection switches 701A arranged between the first driver 700A and each of the plurality of first coils 505A, and a first path P1 provided between the first driver 700A and the plurality of first selection switches 701A. The first path P1 may be arranged to short-circuit the first coils 505A facing the magnet assembly 504 (magnet array) among the plurality of first coils 505A and the first coils 505A not facing the magnet assembly 504 among the plurality of first coils 505A during braking. Similarly, the linear motor LM may include a plurality of second selection switches 701B arranged between the second driver 700B and each of the plurality of second coils 505B, and a second path P2 provided between the second driver 700B and the plurality of second selection switches 701B. The second path P2 can be arranged so as to be able to short-circuit, during braking, the second coils 505B among the multiple second coils 505B that face the magnet assembly 504 (magnet array) and the second coils 505B among the multiple second coils 505B that do not face the magnet assembly 504. The multiple first selection switches 701A and the multiple second selection switches 701B can be formed of transistors such as FETs, for example.

[0019] In another aspect, the linear motor LM may have a plurality of first separation switches 702A that separate the plurality of first coil pairs from each other, and a plurality of first selection switches 701A that respectively correspond to the plurality of first coils 505A. A first path P1 may be provided for each first coil pair, and the first path P1 connects the two first coils 505A that constitute each first coil pair via the two corresponding first selection switches 701A. Similarly, the linear motor LM may have a plurality of second separation switches 702B that separate the plurality of second coil pairs from each other, and a plurality of second selection switches 701B that respectively correspond to the plurality of second coils 505B. A second path P2 may be provided for each second coil pair, and the second path P2 connects the two second coils 505B that constitute each second coil pair via the two corresponding second selection switches 701B. The plurality of first separation switches 702A and the plurality of second selection switches 701B can be configured, for example, with transistors such as FETs.

[0020] Each of the plurality of first separation switches 702A may be disposed between the first driver 700A and a corresponding first coil pair of the plurality of first coil pairs. Each of the plurality of second separation switches 702B may be disposed between the second driver 700B and a corresponding second coil pair of the plurality of second coil pairs. Each of the plurality of first selection switches 701A may be disposed between a corresponding first coil 505A of the plurality of first coils 505A and one first separation switch 702A of the plurality of first separation switches 702A. Each of the plurality of second selection switches 701B may be disposed between a corresponding second coil 505B of the plurality of second coils 505B and one second separation switch 702B of the plurality of second separation switches 702B.

[0021] The multiple first separation switches 702A, the multiple first selection switches 701A, the multiple first paths P1, the multiple second separation switches 702B, the multiple second selection switches 701B, and the multiple second paths P2 configure a connection circuit network 704. The linear motor LM may include a switch control circuit 705 that controls the connection circuit network 704 (more specifically, the multiple first separation switches 702A, the multiple first selection switches 701A, the multiple second separation switches 702B, and the multiple second selection switches 701B).

[0022] In one configuration example, the multiple first separation switches 702A may correspond to each of the multiple first coil pairs. In other words, one first separation switch 702A may correspond to one first coil pair. Similarly, the multiple second separation switches 702B may correspond to each of the multiple second coil pairs. In other words, one second separation switch 702B may correspond to one second coil pair.

[0023] In another configuration example, the number of the first separation switches 702A may be one less than the number of the first coil pairs, and the number of the second separation switches 702B may be one less than the number of the second coil pairs. This is because the first separation switch 702A is only required to be able to separate the first coil pairs from each other, and the second separation switch 702B is only required to be able to separate the second coil pairs from each other. Therefore, in a modified example of the configuration example of FIG. 7, the number of the first separation switches 702A may be three, which is one less than the number of the first coil pairs, which is four. Also, the number of the second separation switches 702B may be three, which is one less than the number of the second coil pairs, which is four.

[0024] The center distance between adjacent first coils 505A among the multiple first coils 505A is equal to the center distance between adjacent second coils 505B among the multiple second coils 505B. Here, the center distance between adjacent first coils 505A among the multiple first coils 505A and the center distance between adjacent second coils 505B among the multiple second coils 505B are P. In the configuration example of FIG. 7, the two first coils 505A having a center distance P may face the magnet assembly 504 at the same time. Also, in the configuration example of FIG. 7, the two second coils 505B having a center distance P may face the magnet assembly 504 at the same time.

[0025] The short-circuit path mentioned above must be a path that short-circuits one of the multiple coils that faces the magnet assembly 504 (magnet row) with one of the multiple coils that does not face the magnet assembly 504. These are conditions (also called design conditions) that must be met when designing the short-circuit path. If the design conditions are met, during braking, when one coil constituting a coil pair faces the magnet assembly 504 and generates an electromotive force, the other coil functions as a load for the current that flows due to the electromotive force. If the resistance value of one coil is R, then the two coils constituting the coil pair form a closed circuit as a dynamic braking circuit with a resistance value of 2R during braking, which applies a braking force to the mover (magnet assembly 504).

[0026] In the configuration example of FIG. 7, the center-to-center distance between the two first coils 505A constituting each first coil pair is 4P, and the center-to-center distance between the two second coils 505B constituting each second coil pair is 4P, which satisfies the above design conditions. The former means that the center-to-center distance between the two first coils 505A constituting each first coil pair is four times the center-to-center distance P between the adjacent coils 505A among the multiple coils 505A driven by the first driver 700A. The latter means that the center-to-center distance between the two second coils 505B constituting each second coil pair is four times the center-to-center distance P between the adjacent coils 505B among the multiple coils 505B driven by the second driver 700B.

[0027] In phase A, the number of the first coils 505A driven by the first driver 700A may be an even number. The center-to-center distance (4P) of the two coils 505A constituting each first coil pair may be equal to the product of 1 / 2 the number of the first coils 505A driven by the first driver 700A and the center-to-center distance (P) of the adjacent first coils 505A. Similarly, in phase B, the number of the second coils 505B driven by the second driver 700B may be an even number. The center-to-center distance (4P) of the two second coils 505B constituting each second coil pair may be equal to the product of 1 / 2 the number of the second coils 505B driven by the second driver 700B and the center-to-center distance (P) of the adjacent second coils 505B.

[0028] FIG. 7 shows a schematic diagram of the state of the linear motor LM during normal operation, in other words, during operation in which the stage 502 (magnet assembly 504) is driven by the linear motor LM (coil assembly 505). During normal operation, the switch control circuit 705 turns on the multiple first separation switches 702A and the multiple second separation switches 702B. During normal operation, the switch control circuit 705 turns on only the first selection switch 701A connected to the first coil 505A facing the movable assembly 504 among the multiple first selection switches 701A. During normal operation, the switch control circuit 705 turns on only the second selection switch 701B connected to the second coil 505B facing the movable assembly 504 among the multiple second selection switches 701B.

[0029] 8 shows a schematic diagram of the state of the linear motor LM during an emergency stop, in other words, during an operation to emergency stop the stage 502 (magnet assembly 504) driven by the linear motor LM (coil assembly 505). During an emergency stop, the switch control circuit 705 sets the first separation switches 702A and the second separation switches 702B to a non-conductive state. Also, during an emergency stop, the switch control circuit 705 sets all of the first selection switches 701A and the second selection switches 701B to a conductive state.

[0030] In the state of FIG. 8, the fourth second coil (B-phase coil) 505B from the left faces the magnet assembly 504 and generates an induced voltage. FIG. 9 shows a plurality of second coils 505B and related configurations extracted from FIG. 8. The fourth second coil 505B (505B-4) from the left facing the magnet assembly 504 and the eighth second coil 505B (505B-8) from the left not facing the magnet assembly 504 are two second coils 505B forming a second coil pair. The second coil 505B-4 facing the magnet assembly 504 and generating an induced voltage and the second coil 505B-4 not facing the magnet assembly 504 are connected through a second path P2 to form a closed circuit. If the resistance value of each second coil 505B is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake to brake the magnet assembly 504 which is the mover.

[0031] The first embodiment is advantageous for simplifying the configuration for dynamic braking. More specifically, the first embodiment is advantageous for reducing the number of switches constituting the connection circuit network 704, for example. In the example shown in FIG. 7, the total number of coils 505A and 505B constituting the coil assembly 505 is 16. Therefore, the total number of selection switches 701A and 701B is 16, the total number of separation switches 702A and 702B is 8, and the total number of switches 701A, 701B, 702A, and 702B is 24. On the other hand, in a general configuration, one switch may be disposed between the first terminal of each coil and the driver, one switch may be disposed between the second terminal of each coil and the ground, and one switch may be disposed in a path shorting the first terminal and the second terminal. Therefore, in a general configuration, if three switches are provided for each coil and the total number of coils is 16, the total number of switches is 48. Even in the configuration described in Patent Document 1, two switches must be placed on the ground side and one switch must be placed on the driver side for one coil, so three switches are required per coil. Note that Patent Document 1 shows one three-way switch on the ground side of each coil, but one three-way switch is equivalent to two switches.

[0032] Furthermore, in the first embodiment, as described above, the number of first separation switches 702A may be one less than the number of first coil pairs, and the number of second separation switches 702B may be one less than the number of second coil pairs. Thus, if the total number of coils is 16, the total number of switches can be 22.

[0033] The stage device ST and the linear motor LM of the second embodiment will be described with reference to FIG. 10, FIG. 11, and FIG. 12. Matters not mentioned as the second embodiment may follow the first embodiment. In the second embodiment, the center distance between the two first coils 505A constituting each first coil pair is 2P, and the center distance between the two second coils 505B constituting each second coil pair is 2P, which satisfies the above design conditions. The former means that the center distance between the two first coils 505A constituting each first coil pair is twice the center distance P between the first coils 505A adjacent to each other among the multiple first coils 505A driven by the first driver 700A. The latter means that the center distance between the two second coils 505B constituting each second coil pair is twice the center distance P between the second coils 505B adjacent to each other among the multiple second coils 505B driven by the second driver 700B.

[0034] FIG. 10 shows a schematic diagram of the state of the linear motor LM during normal operation, in other words, during operation in which the stage 502 (magnet assembly 504) is driven by the linear motor LM (coil assembly 505). During normal operation, the switch control circuit 705 turns on the multiple first separation switches 702A and the multiple second separation switches 702B. During normal operation, the switch control circuit 705 turns on only the first selection switch 701A connected to the first coil 505A facing the movable assembly 504 among the multiple first selection switches 701A. During normal operation, the switch control circuit 705 turns on only the second selection switch 701B connected to the second coil 505B facing the movable assembly 504 among the multiple second selection switches 701B.

[0035] 11 shows a schematic diagram of the state of the linear motor LM during an emergency stop, in other words, during an operation to emergency stop the stage 502 (magnet assembly 504) driven by the linear motor LM (coil assembly 505). During an emergency stop, the switch control circuit 705 sets the first separation switches 702A and the second separation switches 702B to a non-conductive state. Also, during an emergency stop, the switch control circuit 705 sets all of the first selection switches 701A and the second selection switches 701B to a conductive state.

[0036] In the state of FIG. 11, the fourth second coil (B-phase coil) 505B from the left faces the magnet assembly 504 and generates an induced voltage. FIG. 12 shows a plurality of second coils 505B and related configurations extracted from FIG. 11. The fourth second coil 505B (505B-4) from the left facing the magnet assembly 504 and the second second coil 505B (505B-2) not facing the magnet assembly 504 are two second coils 505B forming a second coil pair. The second coil 505B-4 facing the magnet assembly 504 and generating an induced voltage and the second coil 505B-2 not facing the magnet assembly 504 are connected through a second path P2 to form a closed circuit. If the resistance value of each second coil 505B is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake to brake the magnet assembly 504 which is the mover.

[0037] The second embodiment is also advantageous for simplifying the configuration for dynamic braking. More specifically, the second embodiment is also advantageous for reducing the number of switches constituting the connection circuit network 704, for example. In the example shown in FIG. 10, the total number of coils 505A and 505B constituting the coil assembly 505 is 16. Therefore, the total number of selection switches 701A and 701B is 16, the total number of separation switches 702A and 702B is 8, and the total number of switches 701A, 701B, 702A, and 702B is 24. On the other hand, in a general configuration, one switch may be disposed between the first terminal of each coil and the driver, one switch may be disposed between the second terminal of each coil and the ground, and one switch may be disposed in a path shorting the first terminal and the second terminal. Therefore, in a general configuration, if three switches are provided for each coil and the total number of coils is 16, the total number of switches is 48.

[0038] Furthermore, in the second embodiment, the number of first separation switches 702A may be one less than the number of first coil pairs, and the number of second separation switches 702B may be one less than the number of second coil pairs. In this case, if the total number of coils is 16, the total number of switches can be 22.

[0039] A stage device ST and a linear motor LM of the third embodiment will be described with reference to Figs. 13, 14, 15, 16, 17, 18, and 19. Matters not mentioned as the third embodiment may follow the first or second embodiment. In the third embodiment, the configuration of the magnet assembly 504 is different from that of the first and second embodiments. In the third embodiment, the number of magnets constituting the magnet row of the magnet assembly 504 is greater than that in the first and second embodiments. Fig. 13 is a perspective view of the stage device ST. Fig. 14 is a perspective view of the stage device ST of Fig. 13 with some components removed. Fig. 15 is a cross-sectional view showing a configuration example of the coil assembly (stator) 505 and the magnet assembly (moveable element) 504. Fig. 16 is a top view showing a configuration example of the coil assembly (stator) 505 and the magnet assembly (moveable element) 504. The coil assembly (stator) 505 and the magnet assembly (moveable element) 504 constitute a linear motor. 17, 18, and 19 are diagrams for explaining the circuit configuration and operation of the linear motor LM incorporated in the stage ST.

[0040] In the third embodiment, the magnet assembly 504 includes three upwardly magnetized magnets 504-3VU, four downwardly magnetized magnets 504-3VL, four Y+-direction magnetized magnets 504-3YP, and four Y-direction magnetized magnets 504-3YM. These magnets can form a Halbach array magnet array that forms a substantially sinusoidal magnetic flux density distribution. Accordingly, in the third embodiment, the dimensions in the Y direction (driving direction) of the upper yoke 904-1U, the lower yoke 904-1L, and the spacer 904-2 are larger than those in the first and second embodiments.

[0041] 16 shows the magnet assembly 504 and the coil assembly 505 with upper yoke 504-1U removed. The coils shown in white are coils 505A of the A-phase coil set, and the coils shown in gray are coils 505B of the B-phase coil set.

[0042] As in the first and second embodiments, the center-to-center distance between adjacent first coils 505A among the multiple first coils 505A and the center-to-center distance between adjacent second coils 505B among the multiple second coils 505B are denoted as P. In the third embodiment, two first coils 505A having a center-to-center distance of P or 2P can simultaneously face the magnet assembly 504. Also, in the third embodiment, two second coils 505B having a center-to-center distance of P or 2P can simultaneously face the magnet assembly 504.

[0043] In the third embodiment, the design condition is that the center-to-center distance between the two first coils 505A constituting each first coil pair is 3P or more, and the center-to-center distance between the two second coils 505B constituting each second coil pair is 3P or more. By satisfying this design condition, a short-circuit path can be arranged to short-circuit the coils facing the magnet assembly 504 (magnet row) among the multiple coils and the coils not facing the magnet assembly 504 among the multiple coils. In the examples shown in Figures 14, 15, 16, 17, 18, and 19, the center-to-center distance between the two first coils 505A constituting each first coil pair is 4P, and the center-to-center distance between the two second coils 505B constituting each second coil pair is 4P.

[0044] FIG. 17 shows a schematic diagram of the state of the linear motor LM during normal operation, in other words, during operation in which the stage 502 (magnet assembly 504) is driven by the linear motor LM (coil assembly 505). During normal operation, the switch control circuit 705 turns on the multiple first separation switches 702A and the multiple second separation switches 702B. During normal operation, the switch control circuit 705 turns on only the first selection switch 701A connected to the first coil 505A facing the movable assembly 504, among the multiple first selection switches 701A. During normal operation, the switch control circuit 705 turns on only the second selection switch 701B connected to the second coil 505B facing the movable assembly 504, among the multiple second selection switches 701B.

[0045] 18 is a schematic diagram showing the state of the linear motor LM during an emergency stop, in other words, during an operation to emergency stop the stage 502 (magnet assembly 504) driven by the linear motor LM (coil assembly 505). During an emergency stop, the switch control circuit 705 sets the first separation switches 702A and the second separation switches 702B to a non-conductive state. Also, during an emergency stop, the switch control circuit 705 sets all of the first selection switches 701A and the second selection switches 701B to a conductive state.

[0046] In the state of FIG. 18, the fourth first coil (A-phase coil) 505A from the left and the fifth first coil (A-phase coil) 505A from the left face the magnet assembly 504 and generate an induced voltage. FIG. 19 shows a plurality of first coils 505A and related configurations extracted from FIG. 18. The fourth first coil 505A (505A-4) from the left facing the magnet assembly 504 and the eighth first coil 505A (505A-8) from the left not facing the magnet assembly 504 are two first coils 505A forming a first coil pair. The fifth first coil 505A (505A-5) from the left facing the magnet assembly 504 and the first first coil 505A (505A-1) from the left not facing the magnet assembly 504 are two first coils 505A forming a first coil pair.

[0047] The first coil 505A-4, which faces the magnet assembly 504 and generates an induced voltage, and the first coil 505A-8, which does not face the magnet assembly 504, are connected through a first path P1 to form a closed circuit. This is shown by a thick black line. If the resistance value of each first coil 505A is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake to brake the magnet assembly 504, which is the mover. The first coil 505A-5, which faces the magnet assembly 504 and generates an induced voltage, and the first coil 505A-1, which does not face the magnet assembly 504, are connected through a first path P1 to form a closed circuit. This is shown by a thick gray line. If the resistance value of each first coil 505A is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake to brake the mover, the magnet assembly 504. In this manner, in the third embodiment, two closed circuits are formed at the same time.

[0048] In the third embodiment, similarly to the first and second embodiments, the configuration for dynamic braking can be simplified, for example, the number of switches can be reduced.

[0049] A stage device ST and a linear motor LM of the fourth embodiment will be described with reference to FIGS. 20, 21, 22, 23, and 24. Matters not mentioned as the fourth embodiment may follow the first to third embodiments. In the fourth embodiment, the coil assembly 505 and its related parts have four phases, namely, phase A, phase B, phase C, and phase D. In other respects, the stage device ST in the fourth embodiment may have a similar configuration to the stage device ST in the third embodiment. FIG. 20 shows the magnet assembly 504 and the coil assembly 505 with the upper yoke 504-1U removed. The coil assembly 505 includes a phase A coil 505A, a phase B coil 505B, a phase C coil 505C, and a phase D coil 505D. The phases A, B, C, and D are distinguished by gradation.

[0050] In the first to third embodiments, the coils of opposite phases are treated as if they were in the same phase, but in the fourth embodiment, the coils of opposite phases are treated as different phases. The period of the approximately sinusoidal magnetic flux density distribution is T. The B-phase coil is placed at a center-to-center distance of 3 / 4T and an electrical angle of 3 / 2π from the A-phase coil. The C-phase coil is placed at a center-to-center distance of 6 / 4T and an electrical angle of 6 / 2π from the A-phase coil. The D-phase coil is placed at a center-to-center distance of 9 / 4T and an electrical angle of 9 / 2π from the A-phase coil.

[0051] The circuit configuration and operation of the linear motor LM incorporated in the stage ST of the fourth embodiment will be described below with reference to Figures 21, 22, 23, and 24. The linear motor LM includes a magnet assembly 504 as a mover having a magnet row, and a coil assembly 505 as a stator including a plurality of coils 505A, 505B, 505C, and 505D arranged within the movable range of the magnet assembly 504 (mover).

[0052] The linear motor LM has a dynamic braking circuit. The linear motor LM has short-circuit paths P1, P2, P3, and P4 that short-circuit the coils facing the magnet assembly 504 and the coils not facing the magnet assembly 504 among the multiple coils during braking operation by the dynamic braking circuit. The multiple coils of the coil assembly 505 form multiple coil pairs, and each coil pair is composed of two coils arranged in positions that do not simultaneously face the magnet assembly 504. The multiple coils of the coil assembly 505 may include multiple first coils 505A that constitute the A phase, multiple second coils 505B that constitute the B phase, multiple third coils 505C that constitute the C phase, and multiple fourth coils 505BD that constitute the D phase. It is preferable that the short-circuit paths are provided for all of the A phase, the B phase, the C phase, and the D phase, but it is sufficient that the short-circuit paths are provided for at least one of the A phase, the B phase, the C phase, and the D phase.

[0053] In the following, as an example, a linear motor LM in which short-circuit paths are provided for all of the A, B, C, and D phases will be described. The linear motor LM may include a first driver 700A, a second driver 700B, a third driver 700C, and a fourth driver 700D. The first driver 700A drives a plurality of first coils 505A constituting the A phase. The second driver 700B drives a plurality of second coils 505B constituting the B phase. The third driver 700C drives a plurality of third coils 505C constituting the C phase. The fourth driver 700D drives a plurality of fourth coils 505D constituting the D phase.

[0054] The linear motor LM has a first path P1 that short-circuits, during braking, a first coil of the plurality of first coils 505A that faces the magnet assembly 504 (magnet row) and a first coil of the plurality of first coils 505A that does not face the magnet assembly 504. The linear motor LM also has a second path P2 that short-circuits, during braking, a second coil of the plurality of second coils 505B that faces the magnet assembly 504 and a second coil of the plurality of second coils 505B that does not face the magnet assembly 504. The linear motor LM also has a third path P3 that short-circuits, during braking, a third coil of the plurality of third coils 505C that faces the magnet assembly 504 (magnet row) and a third coil of the plurality of third coils 505C that does not face the magnet assembly 504. The linear motor LM also has a fourth path P4 that short-circuits the fourth coils of the multiple fourth coils 505D that face the magnet assembly 504 and the fourth coils of the multiple fourth coils 505D that do not face the magnet assembly 504 during braking operation.

[0055] The first coils 505A constitute a plurality of first coil pairs, the second coils 505B constitute a plurality of second coil pairs, the third coils 505C constitute a plurality of third coil pairs, and the fourth coils 505D constitute a plurality of fourth coil pairs. Each of the first coil pairs, the second coil pairs, the third coil pairs, and the fourth coil pairs is composed of two coils arranged in positions that do not simultaneously face the magnet assembly 504.

[0056] The linear motor LM may have a plurality of first separation switches 702A that separate the plurality of first coil pairs from each other, and a plurality of first selection switches 701A that respectively correspond to the plurality of first coils 505A. A first path P1 may be provided for each first coil pair, and the first path P1 connects the two first coils 505A that constitute each first coil pair via the two corresponding first selection switches 701A. Similarly, the linear motor LM may have a plurality of second separation switches 702B that separate the plurality of second coil pairs from each other, and a plurality of second selection switches 701B that respectively correspond to the plurality of second coils 505B. A second path P2 may be provided for each second coil pair, and the second path P2 connects the two second coils 505B that constitute each second coil pair via the two corresponding second selection switches 701B. Similarly, the linear motor LM may have a plurality of third separation switches 702C that separate the plurality of third coil pairs from each other, and a plurality of third selection switches 701C that respectively correspond to the plurality of third coils 505C. A third path P3 may be provided for each third coil pair, and the third path P3 connects the two third coils 505C that constitute each third coil pair via the two corresponding third selection switches 701C. Similarly, the linear motor LM may have a plurality of fourth separation switches 702D that separate the plurality of fourth coil pairs from each other, and a plurality of fourth selection switches 701D that respectively correspond to the plurality of fourth coils 505D. A fourth path P4 may be provided for each fourth coil pair, and the fourth path P4 connects the two fourth coils 505D that constitute each fourth coil pair via the two corresponding fourth selection switches 701D.

[0057] Each of the plurality of first separation switches 702A may be disposed between the first driver 700A and a corresponding first coil pair of the plurality of first coil pairs. Each of the plurality of second separation switches 702B may be disposed between the second driver 700B and a corresponding second coil pair of the plurality of second coil pairs. Each of the plurality of third separation switches 702C may be disposed between the third driver 700C and a corresponding third coil pair of the plurality of third coil pairs. Each of the plurality of fourth separation switches 702D may be disposed between the fourth driver 700D and a corresponding fourth coil pair of the plurality of fourth coil pairs.

[0058] Each of the plurality of first selection switches 701A may be disposed between a corresponding first coil 505A of the plurality of first coils 505A and one first separation switch 702A of the plurality of first separation switches 702A. Each of the plurality of second selection switches 701B may be disposed between a corresponding second coil 505B of the plurality of second coils 505B and one second separation switch 702B of the plurality of second separation switches 702B. Each of the plurality of third selection switches 701C may be disposed between a corresponding third coil 505C of the plurality of third coils 505C and one third separation switch 702C of the plurality of third separation switches 702C. Each of the plurality of fourth selection switches 701D may be disposed between a corresponding fourth coil 505D of the plurality of fourth coils 505D and one fourth separation switch 702D of the plurality of fourth separation switches 702D.

[0059] The connection circuitry 704 includes a plurality of first isolation switches 702A, a plurality of second isolation switches 702B, a plurality of third isolation switches 702C, and a plurality of fourth isolation switches 702D. The connection circuitry 704 also includes a plurality of first selection switches 701A, a plurality of second selection switches 701B, a plurality of third selection switches 701C, and a plurality of fourth selection switches 701D. The connection circuitry 704 also includes a first path P1, a second path P2, a third path P3, and a fourth path P4. The linear motor LM may further include a switch control circuit 705 that controls the connection circuitry 704.

[0060] In one configuration example, the multiple first separation switches 702A may correspond to each of the multiple first coil pairs. In other words, one first separation switch 702A may correspond to one first coil pair. The multiple second separation switches 702B may correspond to each of the multiple second coil pairs. In other words, one second separation switch 702B may correspond to one second coil pair. The multiple third separation switches 702C may correspond to each of the multiple third coil pairs. In other words, one third separation switch 702C may correspond to one third coil pair. The multiple fourth separation switches 702D may correspond to each of the multiple fourth coil pairs. In other words, one fourth separation switch 702D may correspond to one fourth coil pair.

[0061] In another configuration example, the number of the first separation switches 702A may be one less than the number of the first coil pairs. The number of the second separation switches 702B may be one less than the number of the second coil pairs. The number of the third separation switches 702C may be one less than the number of the third coil pairs. The number of the fourth separation switches 702D may be one less than the number of the fourth coil pairs. This is because the first separation switch 702A only needs to be able to separate the first coil pairs from each other. The same is true for the second separation switch 702AB, the second separation switch 702B, the third separation switch 702C, and the fourth separation switch 702D. In the configuration example of FIG. 21, the number of the first separation switches 702A may be one less than the number of the first coil pairs, which is two. The number of second separation switches 702B may be 1, which is one less than the number of second coil pairs, which is 2. The number of third separation switches 702C may be 1, which is one less than the number of third coil pairs, which is 1. The number of fourth separation switches 702D may be 1, which is one less than the number of fourth coil pairs, which is 2.

[0062] The center distance between adjacent first coils 505A, the center distance between adjacent second coils 505B, the center distance between adjacent third coils 505C, and the center distance between adjacent fourth coils 505D are equal to each other, and this is defined as P. In the configuration example of FIG. 21, the two first coils 505A having a center distance of P may face the magnet assembly 504 at the same time. Also, the two second coils 505B having a center distance of P may face the magnet assembly 504 at the same time. Also, the two third coils 505C having a center distance of P may face the magnet assembly 504 at the same time. Also, the two fourth coils 505C having a center distance of P may face the magnet assembly 504 at the same time.

[0063] In the fourth embodiment, the center-to-center distance between the two first coils 505A constituting each first coil pair is 2P, and the center-to-center distance between the two second coils 505B constituting each second coil pair is 2P, which satisfies the above-mentioned design condition. Similarly, in the fourth embodiment, the center-to-center distance between the two third coils 505C constituting each third coil pair is 2P, and the center-to-center distance between the two fourth coils 505D constituting each fourth coil pair is 2P, which satisfies the above-mentioned design condition. Thus, in the fourth embodiment as well, when one coil constituting a coil pair faces the magnet assembly 504 and generates an electromotive force during braking, the other coil functions as a load for the current flowing due to the electromotive force. If the resistance value of one coil is R, the two coils constituting a coil pair form a closed circuit as a dynamic braking circuit having a resistance value of 2R during braking, which applies a braking force to the mover (the magnet assembly 504).

[0064] In the A phase, the number of the first coils 505A driven by the first driver 700A may be an even number. The center-to-center distance (2P) of the two first coils 505A constituting each first coil pair may be equal to the product of 1 / 2 the number of the first coils 505A driven by the first driver 700A and the center-to-center distance (P) of the adjacent first coils 505A. Similarly, in the B phase, the number of the second coils 505B driven by the second driver 700B may be an even number. The center-to-center distance (2P) of the two coils 505B constituting each second coil pair may be equal to the product of 1 / 2 the number of the coils 505B driven by the second driver 700B and the center-to-center distance (P) of the adjacent second coils 505B. Similarly, in the C phase, the number of the third coils 505C driven by the third driver 700C may be an even number. Also, the center distance (2P) of the two third coils 505C constituting each third coil pair may be equal to the product of 1 / 2 the number of the multiple third coils 505C driven by the third driver 700C and the center distance (P) of the adjacent third coils 505C. Similarly, in the D phase, the number of the multiple fourth coils 505D driven by the fourth driver 700D may be an even number. Also, the center distance (2P) of the two fourth coils 505D constituting each fourth coil pair may be equal to the product of 1 / 2 the number of the multiple fourth coils 505D driven by the fourth driver 700D and the center distance (P) of the adjacent fourth coils 505D.

[0065] FIG. 21 shows a schematic diagram of the state of the linear motor LM during normal operation, in other words, during operation in which the stage 502 (magnet assembly 504) is driven by the linear motor LM (coil assembly 505). During normal operation, the switch control circuit 705 turns on the first separation switches 702A, the second separation switches 702B, the third separation switches 702C, and the fourth separation switches 702D. During normal operation, the switch control circuit 705 turns on only the first selection switch 701A connected to the first coil 505A facing the movable assembly 504, among the first selection switches 701A. During normal operation, the switch control circuit 705 turns on only the second selection switch 701B connected to the second coil 505B facing the movable assembly 504, among the second selection switches 701B. Furthermore, during normal operation, the switch control circuit 705, among the multiple third selection switches 701C, brings into a conductive state only the third selection switch 701C connected to the third coil 505C facing the movable assembly 504. Furthermore, during normal operation, the switch control circuit 705, among the multiple fourth selection switches 701D, brings into a conductive state only the fourth selection switch 701D connected to the fourth coil 505D facing the movable assembly 504.

[0066] 22 shows a schematic diagram of the state of the linear motor LM during an emergency stop, in other words, during an operation to emergency stop the stage 502 (magnet assembly 504) driven by the linear motor LM (coil assembly 505). During an emergency stop, the switch control circuit 705 sets the first separation switches 702A, the second separation switches 702B, the third separation switches 702C, and the fourth separation switches 702D to a non-conductive state. Also, during an emergency stop, the switch control circuit 705 sets all of the first selection switches 701A, the second selection switches 701B, the third selection switches 701C, and the fourth selection switches 701D to a conductive state.

[0067] In the state of FIG. 22, the second third coil (C-phase coil) 505C from the left and the third first coil (A-phase coil) 505A from the left face the magnet assembly 504 and generate an induced voltage. FIG. 23 shows a plurality of third coils 505C and related configurations extracted from FIG. 22. The second third coil 505C (505C-2) from the left facing the magnet assembly 504 and the fourth third coil 505C (505C-2) from the left not facing the magnet assembly 504 are two third coils 505C forming a third coil pair. The third coil 505C-2 facing the magnet assembly 504 and generating an induced voltage and the third coil 505C-2 not facing the magnet assembly 504 are connected through a third path P3 to form a closed circuit. If the resistance value of each third coil 505C is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake that brakes the magnet assembly 504, which is the mover.

[0068] FIG. 24 shows a plurality of first coils 505A and related configurations extracted from FIG. 22. The third first coil 505A (505A-3) from the left facing the magnet assembly 504 and the first first coil 505A (505C-1) from the left not facing the magnet assembly 504 are two first coils 505A forming a first coil pair. The first coil 505A-3 facing the magnet assembly 504 and generating an induced voltage and the first coil 505A-1 not facing the magnet assembly 504 are connected through a first path P1 to form a closed circuit. If the resistance value of each first coil 505A is R, the induced voltage value is E, and the current value flowing through the closed circuit is I, then I=E / (2R). This current acts as a dynamic brake that brakes the magnet assembly 504, which is the mover. In this way, in the fourth embodiment, two closed circuits are formed at the same time.

[0069] The fourth embodiment is also advantageous for reducing the number of switches constituting the connection circuit network 704. In the example shown in FIG. 21, the total number of coils 505A, 505B, 505C, and 505D constituting the coil assembly 505 is 16. Therefore, the total number of selection switches 701A, 701B, 701C, and 701D is 16, and the total number of separation switches 702A, 702B, 702C, and 702D is 8. Therefore, the total number of switches 701A, 701B, 701C, 701D, 702A, 702B, 702C, and 702D is 24. On the other hand, in a general configuration, one switch may be disposed between the first terminal of each coil and the driver, one switch may be disposed between the second terminal of each coil and the ground, and one switch may be disposed in a path shorting the first terminal and the second terminal. Therefore, in a general configuration, if three switches are provided for each coil and the total number of coils is 16, the total number of switches is 48. Furthermore, in the fourth embodiment, as described above, the number of separation switches 702A, 702B, 702C, and 702D can be set to 1 each. In this case, if the total number of coils is 16, the total number of switches can be set to 20.

[0070] The above-mentioned embodiments may be implemented by combining two or more of them. In the above-mentioned example, the linear motor has a flat oval coil, but the linear motor may be configured as a cylindrical linear motor with a ring coil arranged on the same axis. In addition, an external resistor may be connected in series to the above-mentioned closed circuit.

[0071] An embodiment of a lithography apparatus as an application example of the above-mentioned motor or stage device will be described below. Fig. 25 shows the configuration of an exposure apparatus EXP as one embodiment of a lithography apparatus that transfers a pattern of an original R to a substrate S. The exposure apparatus EXP may include a stage that holds the substrate S or the original, and the above-mentioned linear motor LM configured to drive the stage. Alternatively, the exposure apparatus EXP may include the above-mentioned stage device configured to hold and drive the substrate S or the original.

[0072] The exposure apparatus EXP may include, for example, an illumination optical system IO that illuminates the original R, and a projection optical system PO that projects the pattern of the original R onto the substrate S. The exposure apparatus EXP may also include an original stage RS that holds the original R, an electric motor MR configured to drive the original stage RS, a substrate stage SS that holds the substrate S, and an electric motor MS configured to drive the substrate stage SS. The original stage RS and the electric motor MR may form an original stage device that drives the original RS. The substrate stage SS and the electric motor MS may form a substrate stage device that drives the substrate S.

[0073] An article manufacturing method according to one embodiment may include a transfer step of transferring a pattern of the original R to a substrate S by the above-described lithography apparatus, and a processing step of obtaining an article by processing the substrate S to which the pattern has been transferred. Processing the substrate S may include, for example, etching the substrate S.

[0074] The present disclosure includes the following. (Item 1) A linear motor including a mover having a magnet array and a stator including a plurality of coils arranged within a movable range of the mover, a plurality of selection switches disposed between a driver that drives the plurality of coils and each of the plurality of coils; a path that is provided between the driver and the plurality of selection switches, and that short-circuits, during a braking operation, one of the plurality of coils that faces the magnet row and one of the plurality of coils that does not face the magnet row; A linear motor comprising: (Item 2) The plurality of coils constitute a plurality of coil pairs, Each coil pair is arranged in a position where it does not simultaneously face the magnet array, and is composed of two coils that can be short-circuited through the path. 2. The linear motor according to item 1, (Item 3) and a plurality of isolation switches for isolating the plurality of coil pairs from each other, each of the plurality of isolation switches is disposed between the driver and a corresponding one of the plurality of coil pairs; Each of the plurality of selection switches is disposed between a corresponding one of the plurality of coils and one of the plurality of separation switches. 3. The linear motor according to item 2, (Item 4) The plurality of separation switches correspond to the plurality of coil pairs, respectively. 4. The linear motor according to item 3, (Item 5) The number of the separation switches is one less than the number of the coil pairs. 4. The linear motor according to item 3, (Item 6) The center-to-center distance between the two coils constituting each coil pair is twice the center-to-center distance between adjacent coils among the plurality of coils driven by the driver. 6. The linear motor according to any one of items 3 to 5, (Item 7) The center-to-center distance between the two coils constituting each coil pair is four times the center-to-center distance between adjacent coils among the plurality of coils driven by the driver. 6. The linear motor according to any one of items 3 to 5, (Item 8) the number of coils driven by the driver is an even number; The center-to-center distance of the two coils constituting each coil pair is equal to the product of 1 / 2 the number of the plurality of coils driven by the driver and the center-to-center distance of adjacent coils among the plurality of coils. 6. The linear motor according to any one of items 3 to 5, (Item 9) When the movable element is driven, the plurality of separation switches are brought into a conductive state, and a selection switch selected from the plurality of selection switches is brought into a conductive state; When the movable element is stopped, the plurality of separation switches are brought into a non-conductive state, and the plurality of selection switches are brought into a conductive state. 9. The linear motor according to any one of items 3 to 8, (Item 10) A linear motor comprising: a mover having a magnet array; and a stator including a plurality of coils arranged within a movable range of the mover, the plurality of coils including a plurality of first coils driven by a first driver and a plurality of second coils driven by a second driver, a plurality of first selection switches respectively corresponding to the plurality of first coils; a plurality of second selection switches respectively corresponding to the plurality of second coils; a first path that is provided between the first driver and the plurality of first selection switches and that short-circuits, during a braking operation, a first coil among the plurality of first coils that faces the magnet row and a first coil among the plurality of first coils that does not face the magnet row; a second path that is provided between the second driver and the plurality of second selection switches and short-circuits, during a braking operation, one of the plurality of second coils that faces the magnet row and one of the plurality of second coils that does not face the magnet row; A linear motor comprising: (Item 11) the first coils constitute a plurality of first coil pairs, and the second coils constitute a plurality of second coil pairs; Each first coil pair is arranged at a position where it does not simultaneously face the magnet array, and is composed of two first coils that can be short-circuited through the first path; Each second coil pair is arranged at a position where it does not simultaneously face the magnet array, and is composed of two second coils that can be short-circuited through the second path. 11. The linear motor according to item 10, (Item 12) a plurality of first isolation switches that isolate the plurality of first coil pairs from each other; and a plurality of second isolation switches that isolate the plurality of second coil pairs from each other. each of the plurality of first separation switches is disposed between the first driver and a corresponding one of the plurality of first coil pairs; each of the plurality of second separation switches is disposed between the second driver and a corresponding one of the plurality of second coil pairs; each of the plurality of first selection switches is disposed between a corresponding one of the plurality of first coils and one of the plurality of first separation switches; Each of the plurality of second selection switches is disposed between a corresponding one of the plurality of second coils and one of the plurality of second separation switches. 12. The linear motor according to item 11, (Item 13) the first separation switches correspond to the first coil pairs, respectively, and the second separation switches correspond to the second coil pairs, respectively. Item 13. The linear motor according to item 12, (Item 14) The number of the first separation switches is one less than the number of the first coil pairs, and the number of the second separation switches is one less than the number of the second coil pairs. Item 13. The linear motor according to item 12, (Item 15) a center-to-center distance between two first coils constituting each first coil pair is twice the center-to-center distance between adjacent first coils among the plurality of first coils driven by the first driver, and a center-to-center distance between two second coils constituting each second coil pair is twice the center-to-center distance between adjacent second coils among the plurality of second coils driven by the second driver; 15. The linear motor according to any one of items 12 to 14, (Item 16) The center-to-center distance between the two first coils constituting each first coil pair is four times the center-to-center distance between adjacent first coils among the plurality of first coils, and the center-to-center distance between the two second coils constituting each second coil pair is four times the center-to-center distance between adjacent second coils among the plurality of second coils to be driven. 15. The linear motor according to any one of items 12 to 14, (Item 17) the number of the first coils and the number of the second coils are even numbers, a center-to-center distance between two first coils constituting each first coil pair is equal to a product of half the number of the plurality of first coils and a center-to-center distance between adjacent first coils among the plurality of first coils, a center-to-center distance between two second coils constituting each second coil pair is equal to a product of the number of the plurality of second coils and the center-to-center distance between adjacent second coils among the plurality of second coils; 15. The linear motor according to any one of items 12 to 14, (Item 18) when the movable element is driven, the plurality of first separation switches and the plurality of second separation switches are brought into a conductive state, and a first selection switch selected from the plurality of first selection switches and a second selection switch selected from the plurality of second selection switches are brought into a conductive state; When the movable element is stopped, the first separation switches and the second separation switches are brought into a non-conductive state, and the first selection switches and the second selection switches are brought into a conductive state. 18. The linear motor according to any one of items 12 to 17, (Item 19) Stage and Item 19: A linear motor according to any one of items 1 to 18 configured to drive the stage; A stage device comprising: (Item 20) A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a stage for holding the substrate or the original; Item 19: A linear motor according to any one of items 1 to 18 configured to drive the stage; 1. A lithography apparatus comprising: (Item 21) A transfer step of transferring a pattern of an original to a substrate by the lithography apparatus according to item 20; a processing step of obtaining an article by processing the substrate to which the pattern has been transferred; A method for manufacturing an article, comprising:

[0075] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0076] 504: magnet assembly, 505: coil assembly, 705: control circuit, ST: stage device, LM: linear motor

Claims

1. A linear motor including a mover having a magnet array and a stator including a plurality of coils arranged within a movable range of the mover, a plurality of selection switches disposed between a driver that drives the plurality of coils and each of the plurality of coils; a path that is provided between the driver and the plurality of selection switches, and that short-circuits, during a braking operation, one of the plurality of coils that faces the magnet row and one of the plurality of coils that does not face the magnet row; A linear motor comprising:

2. The plurality of coils constitute a plurality of coil pairs, Each coil pair is arranged at a position where it does not simultaneously face the magnet array, and is composed of two coils that can be short-circuited through the path.

2. The linear motor according to claim 1 .

3. and a plurality of isolation switches for isolating the plurality of coil pairs from each other, each of the plurality of isolation switches is disposed between the driver and a corresponding one of the plurality of coil pairs; Each of the plurality of selection switches is disposed between a corresponding one of the plurality of coils and one of the plurality of separation switches.

3. The linear motor according to claim 2.

4. The plurality of separation switches correspond to the plurality of coil pairs, respectively.

4. The linear motor according to claim 3.

5. The number of the separation switches is one less than the number of the coil pairs.

4. The linear motor according to claim 3.

6. a center-to-center distance between two coils constituting each coil pair is twice the center-to-center distance between adjacent coils among the plurality of coils driven by the driver; 4. The linear motor according to claim 3.

7. a center-to-center distance between two coils constituting each coil pair is four times a center-to-center distance between adjacent coils among the plurality of coils driven by the driver; 4. The linear motor according to claim 3.

8. the number of coils driven by the driver is an even number; a center-to-center distance between two coils constituting each coil pair is equal to a product of half the number of the plurality of coils driven by the driver and a center-to-center distance between adjacent coils among the plurality of coils; 4. The linear motor according to claim 3.

9. When the movable element is driven, the plurality of separation switches are brought into a conductive state, and a selection switch selected from the plurality of selection switches is brought into a conductive state; When the movable element is stopped, the plurality of separation switches are brought into a non-conductive state, and the plurality of selection switches are brought into a conductive state.

4. The linear motor according to claim 3.

10. A linear motor comprising: a mover having a magnet array; and a stator including a plurality of coils arranged within a movable range of the mover, the plurality of coils including a plurality of first coils driven by a first driver and a plurality of second coils driven by a second driver, a plurality of first selection switches respectively corresponding to the plurality of first coils; a plurality of second selection switches respectively corresponding to the plurality of second coils; a first path that is provided between the first driver and the first selection switches and that short-circuits, during a braking operation, a first coil among the first coils that faces the magnet row and a first coil among the first coils that does not face the magnet row; a second path that is provided between the second driver and the plurality of second selection switches and that short-circuits, during a braking operation, one of the plurality of second coils that faces the magnet row and one of the plurality of second coils that does not face the magnet row; A linear motor comprising:

11. the first coils constitute a plurality of first coil pairs, and the second coils constitute a plurality of second coil pairs; Each first coil pair is configured with two first coils that are arranged at positions that do not simultaneously face the magnet array and can be short-circuited through the first path, Each second coil pair is arranged at a position not simultaneously facing the magnet array and is composed of two second coils that can be short-circuited through the second path.

11. The linear motor according to claim 10.

12. a plurality of first isolation switches that isolate the plurality of first coil pairs from each other; a plurality of second isolation switches that isolate the plurality of second coil pairs from each other; each of the plurality of first separation switches is disposed between the first driver and a corresponding one of the plurality of first coil pairs; each of the plurality of second separation switches is disposed between the second driver and a corresponding one of the plurality of second coil pairs; each of the plurality of first selection switches is disposed between a corresponding first coil among the plurality of first coils and one first separation switch among the plurality of first separation switches; Each of the plurality of second selection switches is disposed between a corresponding one of the plurality of second coils and one of the plurality of second separation switches.

12. The linear motor according to claim 11.

13. the first separation switches correspond to the first coil pairs, respectively, and the second separation switches correspond to the second coil pairs, respectively.

13. The linear motor according to claim 12.

14. The number of the first separation switches is one less than the number of the first coil pairs, and the number of the second separation switches is one less than the number of the second coil pairs.

13. The linear motor according to claim 12.

15. a center-to-center distance between two first coils constituting each first coil pair is twice the center-to-center distance between adjacent first coils among the plurality of first coils driven by the first driver, and a center-to-center distance between two second coils constituting each second coil pair is twice the center-to-center distance between adjacent second coils among the plurality of second coils driven by the second driver; 13. The linear motor according to claim 12.

16. the center-to-center distance between the two first coils constituting each first coil pair is four times the center-to-center distance between adjacent first coils among the plurality of first coils, and the center-to-center distance between the two second coils constituting each second coil pair is four times the center-to-center distance between adjacent second coils among the plurality of second coils to be driven; 13. The linear motor according to claim 12.

17. the number of the first coils and the number of the second coils are even numbers, a center-to-center distance between two first coils constituting each first coil pair is equal to a product of half the number of the plurality of first coils and a center-to-center distance between adjacent first coils among the plurality of first coils, a center-to-center distance between two second coils constituting each second coil pair is equal to a product of the number of the plurality of second coils and a center-to-center distance between adjacent second coils among the plurality of second coils; 13. The linear motor according to claim 12.

18. When the movable element is driven, the plurality of first separation switches and the plurality of second separation switches are brought into a conductive state, and a first selection switch selected from the plurality of first selection switches and a second selection switch selected from the plurality of second selection switches are brought into a conductive state; When the movable element is stopped, the first separation switches and the second separation switches are brought into a non-conductive state, and the first selection switches and the second selection switches are brought into a conductive state.

13. The linear motor according to claim 12.

19. Stage and A linear motor according to any one of claims 1 to 18 configured to drive the stage; A stage device comprising:

20. A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a stage for holding the substrate or the original; A linear motor according to any one of claims 1 to 18 configured to drive the stage; 1. A lithography apparatus comprising:

21. A transfer step of transferring a pattern of an original onto a substrate by the lithography apparatus according to claim 20; a processing step of obtaining an article by processing the substrate to which the pattern has been transferred; A method for manufacturing an article, comprising:

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