Lid moving systems and methods for chambers and containers

Abstract

To provide lid moving systems and moving methods therefor for opening and closing interior chambers, for enclosures such as modules used in substrate processing systems and other chambers or containers.SOLUTION: Lid moving systems 300 include: a base member 302; side walls 304A extending from the base member and each including a cam surface 306A defined therein; a lid mounting arm 310 extending away from the base member; a first pivotal connection system 320 engaging with the cam surfaces and pivotally engaging with the lid mounting arm; a traveler member 330 including a recess or opening on a surface facing the base member; a second pivotal connection system pivotally engaging the traveler member with the lid mounting arm; a motor 350 for moving the traveler member; and / or a stopper mechanism 360 extending into the recess or opening of the traveler member from a direction of the surface facing the base member when a lid is opened.SELECTED DRAWING: Figure 3C

Description

[Technical field]

[0001] The present disclosure relates generally to systems and methods for opening and closing internal chambers relative to enclosures (e.g., modules, other chambers, or vessels used in substrate processing systems, etc.). Some more specific aspects of the technology relate to lid movement systems, enclosures (e.g., substrate handling chamber modules, substrate processing chamber modules, reactor chambers, storage vessels, other vessels, etc.) that include such lid movement systems, and / or methods of moving lids (e.g., to open and close access openings relative to such enclosures). [Background technology]

[0002] A material layer is generally deposited onto a substrate during the manufacture of semiconductor devices, such as during the manufacture of integrated circuits and electronic devices. Material layer deposition is generally accomplished by supporting the substrate in a substrate processing chamber arrangement, heating the substrate to a desired deposition temperature, and flowing one or more material layer precursors through the chamber arrangement and across the substrate. As the precursors flow across the substrate, a material layer typically grows gradually onto the surface of the substrate according to the temperature of the substrate and the environmental conditions within the chamber arrangement.

[0003] Existing substrate processing systems 100 include "cluster-type" systems of the type generally shown in Figure 1. Such substrate processing systems 100 include a substrate handling chamber 102 that operatively connects to two to four substrate processing chambers 104 via gate valves 106. Each substrate processing chamber 104 is equipped to receive a substrate on a substrate support 108 that holds the substrate during processing (e.g., during material layer deposition as described above).

[0004] The substrate handling chamber 102 includes a robotic arm 110 that is used to move substrates in and out of the various substrate processing chambers 104 through a gate valve 106. In use, the gate valve 106 is opened and an end effector 110A of the robotic arm 110 extends through the open gate valve 106 to insert a substrate into or remove a substrate from the internal chamber of the substrate processing chamber 104 (e.g., to place a substrate on or remove a substrate from the substrate support 108). When the robotic arm 110 is retracted from the substrate processing chamber 104, the gate valve 106 is closed, thereby sealing the substrate processing chamber 104 from the substrate handling chamber 102. Other desired actions can then be performed within the substrate processing chamber 104 and / or the substrate handling chamber 102.

[0005] 1 further shows that the substrate processing system 100 includes a load lock module 112. The load lock module 112 is connected to the substrate handling chamber 102 by a gate valve 116. The load lock module 112 includes a substrate holding component 114 to hold the substrate on its way into the substrate handling chamber 102 for further processing and on its way out of the substrate handling chamber 102 (after processing is completed). An end effector 110A of the robot arm 110 moves through the gate valve 116 (when open) to move the substrate from the load lock module 112 into the substrate handling chamber 102 (for layer deposition and other processing) and from the substrate handling chamber 102 into the load lock module 112 (after processing is completed). The load lock module 112 and gate valve 116 keep the substrate isolated from the environment of the substrate handling chamber 102 until the conditions (e.g., temperature, pressure, atmospheric content, etc.) within the substrate handling chamber 102 are ready for the substrate to be inserted.

[0006] The load lock module 112 is further coupled to an equipment front end module 120 via another gate valve 118. The equipment front end module 120 includes a robot arm 122. An end effector 122A of the robot arm 122 moves through the gate valve 118 (when open) to move substrates from the equipment front end module 120 into the load lock module 112 (for layer deposition and / or other processing) and from the load lock module 112 back into the equipment front end module 120 (after processing is completed). The robot arm 122 of the equipment front end module 120 also picks up new substrates for processing from one of the load ports 124A-124C and returns processed substrates to one of the load ports 124A-124C, for example to be transported elsewhere for further processing.

[0007] This type of substrate handling chamber 102 typically includes a chamber body 102A (e.g., within which the robot arm 110 is housed) having an access opening 102O that is covered and sealed by a lid 102L. The lid 102L is removable to allow cleaning and other maintenance to the substrate handling chamber 102, the robot arm 110, etc.

[0008] Removal of the lid 102L of the substrate handling chamber 102 generally requires a hoisting mechanism due to the size, weight, and / or shape of the lid 102L. The lifting mechanism typically includes a gantry 130 constructed to straddle the lid 102L of the substrate handling chamber 102 and a hoist 132. The hoist 132 connects with the lid 102L (e.g., at connector 102C) and exerts an upward force sufficient to break the seal between the lid 102L and the interior chamber of the substrate handling chamber 102. The force required to break the seal can be significant, even after the substrate handling chamber 102 has been vented. The gantry 130 enables the rolled-up lid 102L to be shifted away from the chamber body 102A (by moving the hoist 132 and attached lid 102L along the gantry 130 away from the rest of the substrate processing system 100) to provide access to the interior of the substrate handling chamber 102 and the robot arm 110.

[0009] While conventional semiconductor manufacturing systems and methods of this type are generally acceptable for their intended purposes, there is room for improvement. Gantry hoist arrangements of the type described above require space and may require periodic certification and inspection, thereby increasing the cost of ownership and / or complicating servicing of the substrate processing system. Summary of the Invention

[0010] Aspects of the present technology relate to systems and methods for opening and closing internal chambers relative to enclosures (e.g., modules, other chambers, or vessels used in substrate processing systems, etc.). Some more specific aspects and examples of the present technology relate to lid movement systems, enclosures (e.g., substrate handling chamber modules, substrate processing chamber modules, reactor chambers, storage vessels, other vessels, etc.) that include such lid movement systems, and / or methods for moving lids, e.g., for opening and closing access openings relative to such enclosures.

[0011] Lid movement systems and methods according to embodiments of the technology facilitate reliable and safe movement of a lid for a chamber. Such systems may include one or more of: (a) a base member, (b) sidewalls extending from the base member, each including a cam surface defined therein, (c) lid mounting arms extending away from the base member, (d) a first pivot connection system that engages the cam surface and pivotally engages the lid mounting arms, (e) a traveler member including a recess or opening on a surface facing the base member, (f) a second pivot connection system that pivotally engages the traveler member with the lid mounting arms, (g) a motor for moving the traveler member (causing movement of the lid mounting arms relative to the sidewalls), and / or (h) a stop mechanism that extends from the direction of the surface facing the base member into the recess or opening in the traveler member when the lid is opened.

[0012] A lid movement system in accordance with at least some embodiments of the present technology includes (a) a base member having a first side and a second side; (b) a first sidewall extending from the first side of the base member and including a first cam surface defined therein; (c) a second sidewall extending from the second side of the base member and including a second cam surface defined therein; (d) a lid mounting arm extending in a direction away from the base member; (e) a first pivot connection system that engages the first cam surface and the second cam surface and that pivotally engages the lid mounting arm; and (f) a recess or a recessed portion on a surface facing the base member. The lid mounting arm may include one or more of: (a) a traveler member including an opening; (h) a second pivot connection system pivotally engaging the traveler member with the lid mounting arm; (i) a motor for moving the traveler member, where movement of the traveler member causes movement of the lid mounting arm relative to the first side wall and the second side wall; and / or (j) a stop mechanism configured to removably extend from the direction of a surface facing the base member when the traveler member is in the lid open position into a recess or opening in the traveler member.

[0013] In addition to or as an alternative to one or more of the above-mentioned features, a base member in a lid movement system according to the present technology may include a through-hole opening, and a stop mechanism is releasably engageable with a recess or opening in the traveler member through the through-hole opening in the base member when the traveler member is in the lid-open position.

[0014] In addition to or as an alternative to one or more of the features discussed above, a lid movement system according to the present technology may include a heating element configured to heat at least a portion of the lid mounting arm.

[0015] In addition to or in the alternative to one or more of the features discussed above, in some embodiments of the present technology, the first cam surface and the second cam surface may each have a vertical cam segment at a first end and an angled cam segment extending upwardly and away from the vertical cam segment and away from the base member.

[0016] In addition to or as an alternative to one or more of the above-mentioned features, in some embodiments of the present technology, the first side wall and the second side wall may each include a tracking slot that defines a direction of movement for the traveler member, the traveler member including one or more tracking elements extending into the tracking slot.

[0017] In addition to or in the alternative to one or more of the features discussed above, in some embodiments of the present technology, the lid mounting arm may include a first end and a lid engaging portion, where the first pivot connection system is located at the first end and the second pivot connection system is spaced from the first end toward the lid engaging portion.

[0018] Additional aspects of the technology relate to enclosures, including: (a) a body member including a top, a bottom, and one or more sidewalls connecting the top and bottom, the top including an opening providing access to an interior chamber partially defined by the body member; (b) a lid sealingly attachable to the top of the body member to close the interior chamber; and / or (c) a lid movement system engaging the body member, the lid movement system including: (i) a base member having a first side and a second side, the first sidewall including a surface facing away from the body member; (ii) a first sidewall extending from the first side of the base member including a first cam surface defined therein; (iii) a second sidewall extending from the second side of the base member including a second cam surface defined therein; and (iv) a lid mounting arm extending away from the base member. The lid movement system may include one or more of: (a) a lid mounting arm that engages the lid at a first outer edge location of the lid; (v) a first pivot connection system that engages the first cam surface and the second cam surface and pivotally engages the lid mounting arm; (vi) a traveler member including a recess or opening on a surface facing the base member; (vii) a second pivot connection system that pivotally engages the traveler member with the lid mounting arm; (viii) a motor for moving the traveler member, wherein movement of the traveler member causes movement of the lid mounting arm and the lid relative to the body member; and / or (ix) a stop mechanism configured to extend from the direction of the surface facing the base member into the recess or opening in the traveler member when the traveler member is in the lid open position.

[0019] In addition to or in the alternative to one or more of the above-mentioned features, in some exemplary enclosures according to the present technology, the base member may include a through-hole opening, and the stop mechanism is releasably engageable with a recess or opening in the traveler member through the through-hole opening in the base member when the traveler member is in the lid-open position.

[0020] In addition to or as an alternative to one or more of the features described above, some exemplary enclosures according to the present technology may include a control system for controlling the motor, the control system generating a signal to stop operation of the motor when the lid is in the lid open position.

[0021] In addition to or as an alternative to one or more of the features described above, some exemplary enclosures according to the present technology may include a heating element configured to heat at least one of: (i) the lid at least at a first peripheral location; or (ii) at least a portion of the lid mounting arm.

[0022] In addition to or in the alternative to one or more of the above-mentioned features, in some example enclosures according to the present technology, the first cam surface and the second cam surface may each include a vertical cam segment at a first end and an angled cam segment extending upwardly and away from the vertical cam segment and away from the base member.

[0023] In addition to or in the alternative to one or more of the above-mentioned features, in some exemplary enclosures according to the present technology, each of the first and second cam surfaces may be configured such that, during a lid-opening event, (i) the lid movement system first lifts the lid upwardly at a first outer edge location until a seal between the lid and the body member is opened, and then (ii) the lid pivots upwardly away from the body member about the first and second pivot connection systems.

[0024] In addition to or as an alternative to one or more of the above-mentioned features, in some exemplary enclosures according to the present technology, the first side wall and the second side wall each may include a tracking slot that defines a direction of movement for the traveler member, the traveler member including one or more tracking elements extending into the tracking slot.

[0025] In addition to or in the alternative to one or more of the features discussed above, in some exemplary enclosures according to the present technology, the lid mounting arm may include a first end and a lid engaging portion, with a first pivot connection system located at the first end and a second pivot connection system spaced from the first end toward the lid engaging portion.

[0026] In addition to or as an alternative to one or more of the features described above, in some exemplary enclosures according to the present technology, the body member may include a substrate handling chamber for moving substrates from the internal chamber to one or more substrate processing chambers.

[0027] An additional aspect of this technology is a method for mounting a lid on a lid, the lid movement system including: (a) a base member having a surface facing away from the body member; (ii) a lid mounting arm extending away from the base member, where engaging includes engaging the lid mounting arm with the lid at a first peripheral location of the lid; (iii) a traveler member including a recess or opening on a surface facing the base member; (iv) a pivot connection system pivotally engaging the traveler member with the lid mounting arm; and (v) a motor for moving the traveler member, where movement of the traveler member (b) engaging the lid mounting arms and causing movement of the lid; (c) operating the motor to apply a rotational force to rotate the lid upwardly on the lid mounting arms in a direction away from the body member to a lid-open position after the lifting force has been applied; and (d) inserting a stop mechanism into a recess or opening in the traveler member from a surface facing the base member to prevent the lid from moving from the lid-open position.

[0028] In addition to or in the alternative to one or more of the features discussed above, in some exemplary methods according to the present technology, the inserting may include inserting the stop mechanism through a through-hole opening provided in the base member and into a recess or opening in the traveler member.

[0029] In addition to or in the alternative to one or more of the above-mentioned features, in some exemplary methods according to the present technology, the lifting force breaks the sealed engagement between the lid and the body member at a first peripheral location.

[0030] In addition to or in the alternative to one or more of the features described above, in some exemplary methods according to the present technology, applying a lifting force to break the sealed engagement may include deforming a shape of the lid at a first peripheral location.

[0031] In addition to or in the alternative to one or more of the features described above, some example methods according to the present technology may include heating at least one of (i) the lid at least at a first peripheral location, or (ii) at least a portion of the lid mounting arm, prior to operating the motor to apply the lifting force.

[0032] In addition to or as an alternative to one or more of the features described above, in some exemplary methods according to the present technology, the body member may include a substrate handling chamber for moving a substrate from the body member to one or more substrate processing chambers.

[0033] In addition to or as an alternative to one or more of the features discussed above, some exemplary methods according to the present technology may include a lid closure step.

[0034] In addition to or in the alternative to one or more of the features described above, some example methods according to the present technology may include, with the lid in the lid-open position, one or more of: (i) removing the stopper mechanism from the recess or opening in the traveler member, and / or (ii) rotating the lid on the lid mounting arm first downwardly toward the body member and then operating a motor to move the lid downwardly toward the body member.

[0035] This Summary is provided to introduce selected concepts related to the technology in a simplified form. These concepts are described in more detail below in the Detailed Description of the Disclosure. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0036] These and other features, aspects, and advantages of the inventions disclosed herein are described below with reference to drawings of certain specific embodiments, which are intended to illustrate but not to limit the invention. [Brief description of the drawings]

[0037] [Figure 1] FIG. 1 is a schematic diagram of a basic prior art cluster-type substrate processing system. [Diagram 2] FIG. 2 provides a simplified overhead view of an exemplary substrate processing system in accordance with some embodiments of the present technology. [Figure 3A] FIG. 3A provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3B] FIG. 3B provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3C]FIG. 3C provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3D] FIG. 3D provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3E] FIG. 3E provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3F] FIG. 3F provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 3G] FIG. 3G provides a diagram illustrating features of a lid movement system integrated into an enclosure (eg, a substrate handling chamber), according to some embodiments of the present technology. [Figure 4A] FIG. 4A provides a diagram illustrating various features of the lid movement operation according to some embodiments of the present technology. [Figure 4B] 4B(1)-4B(2) provide diagrams illustrating various features of the lid movement operation according to some embodiments of the present technology. [Figure 4C] 4C(1)-4C(2) provide diagrams illustrating various features of the lid movement operation according to some embodiments of the present technology. [Figure 4D] FIG. 4D provides a diagram illustrating various features of the lid movement operation according to some embodiments of the present technology. [Figure 4E] 4E(1)-4E(2) provide diagrams illustrating various features of the lid movement operation according to some embodiments of the present technology. [Figure 4F] 4F(1)-4F(2) provide diagrams illustrating various features of the lid movement operation according to some embodiments of the present technology. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0038] It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale, for example, the relative sizes of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of the present disclosure.

[0039] Reference is now made to the drawings in which like reference numbers identify analogous structural features or aspects of the present disclosure.

[0040] FIG. 2 illustrates an exemplary substrate processing system 200 including a lid movement system 300 and / or using a lid movement method according to some embodiments of the present technology. More specifically, FIG. 2 illustrates a schematic overhead view of a substrate processing system 200 (e.g., a "cluster type" semiconductor processing system) having one or more "enclosures" that may include the lid movement system 300 and / or may use a lid movement method according to aspects of the present technology. This specific exemplary substrate processing system 200 includes a lid movement system 300 according to embodiments of the present technology engaged with a substrate handling chamber 210 (including a body 210A, such as a body member or chamber, including a top, a bottom, one or more sidewalls connecting the top and bottom, and a top access opening 210O). FIG. 2 further illustrates a lid movement system 300 according to embodiments of the present technology connected to a lid 210L covering an access opening 210O to an internal chamber of the substrate handling chamber 210 in this "cluster type" substrate processing system 200.

[0041] 2 includes (a) a substrate handling chamber 210 including a first robot arm 212 having an end effector 212A and a lid movement system 300, (b) a load lock module 220 connected to one edge or face of the substrate handling chamber 210, and (c) an equipment front end module 230 including a second robot arm 232 having an end effector 232A connected to the opposite side of the substrate handling chamber 210 from the load lock module 220. The equipment front end module 230 may include or be connected to a nitrogen gas source for providing a nitrogen gas atmosphere within the equipment front end module 230. The equipment front-end module 230 receives new substrates (e.g., wafers) for processing into the substrate processing system 200 and removes processed substrates from the substrate processing system 200 via one or more loading ports 240A-240D (using a second robotic arm 232 to move substrates between the loading ports 240A-240D and the load lock module 220). Although four loading ports 240A-240D are shown in the embodiment of Figure 2, more or fewer loading ports may be provided in other embodiments of the technology.

[0042] The substrate handling chamber 210 is connected to a number of substrate processing chambers 280. Substrates are transferred into the substrate processing chambers 280 where one or more layers of material are deposited onto the surface of the substrate and / or other desired substrate processing takes place. FIG. 2 shows each substrate processing chamber 280 including four substrate supports 282 onto which a substrate can be placed during processing. More or fewer substrate supports 282 may be provided in each substrate processing chamber 280 (e.g., the substrate processing chamber 280 may be a dual chamber module (DCM) or a quad chamber module (QCM)). The substrate processing chamber 280 according to some embodiments of the technology may include another four substrate supports 282 located vertically below the four substrate supports 282 shown in the top view of FIG. 2. Each of the substrate processing chambers 280 may have the same structure, or one or more of the substrate processing chambers 280 may have a different structure from the other substrate processing chambers 280 present.

[0043] The substrate handling chambers 210 are connected to their respective substrate processing chambers 280 via one or more gate valves 250. Although two gate valves 250 are shown connecting the substrate handling chambers 210 to each of their respective substrate processing chambers 280, in other embodiments of the technology, each substrate processing chamber 280 may be provided with more or fewer gate valves 250. The substrate processing chambers 280 according to some embodiments of the technology may be connected to the substrate handling chambers 210 by another two gate valves 250, for example, located vertically below the two gate valves 250 shown in the top view of FIG. 2. When closed, the gate valves 250 sealingly separate the substrate handling chambers 210 from their connected substrate processing chambers 280 (so that independent atmospheric conditions may be maintained within each chamber). When open, the gate valve 250 provides an opening (e.g., a substrate transport slot) through which the end effector 212A of the first robot arm 212 can extend to move a substrate in and out of the substrate processing chamber 280. The openings through the gate valve 250 align with substrate transport slots provided in the substrate processing chamber 280 and the substrate handling chamber 210 to allow the substrate to be moved between the substrate processing chamber 280 and the substrate handling chamber 210 through the gate valve 250. Each of the gate valves 250 may have the same structure, or one or more of the gate valves 250 may have a different structure than the other gate valves 250 present.

[0044] One side of the load lock module 220 connects to the equipment front end module 230 by one or more gate valves 260A (two are shown in FIG. 2 ) and the opposite side of the load lock module 220 connects to the substrate handling chamber 210 by one or more gate valves 260B. The load lock module 220 further includes one or more substrate supports 222 (two are shown in FIG. 2 ) for holding a substrate while the substrate is waiting to be moved into the equipment front end module 230 or the substrate handling chamber 210. When closed, the gate valves 260A, 260B sealingly isolate the load lock module 220 from the equipment front end module 230 and the substrate handling chamber 210 (so that independent atmospheric conditions may be maintained in each chamber). When open, the gate valve 260A provides an opening (e.g., a substrate transport slot) through which the end effector 232A of the second robot arm 232 can extend to move a substrate in and out of the equipment front end module 230. The openings through the gate valve 260A align with substrate transport slots provided in the equipment front end module 230 and the load lock module 220 to allow substrates to be moved between the equipment front end module 230 and the load lock module 220 through the gate valve 260A. When open, the gate valve 260B provides an opening (e.g., a substrate transport slot) through which the end effector 212A of the first robot arm 212 can extend to move a substrate in and out of the substrate handling chamber 210. Openings through gate valve 260B align with substrate transport slots provided in the substrate handling chamber 210 and the load lock module 220 to allow substrates to be moved through gate valve 260B between the substrate handling chamber 210 and the load lock module 220. Each of the gate valves 260A, 260B may have the same structure, or one or more of the gate valves 260A, 260B may have a different structure than the other gate valves 260A, 260B that are present.

[0045] As mentioned above, the substrate handling chamber 210 of this example is equipped with a lid movement system 300 according to an embodiment of the present technology. This exemplary lid movement system 300 is discussed in more detail below in conjunction with FIGS. 3A-3G. FIG. 3A provides a perspective view of the load lock module 220 and substrate handling chamber 210 (including the lid movement system 300) of the substrate processing system 200 with the substrate processing chamber 280 and the equipment front end module 230 removed. FIG. 3B provides a perspective view of the lid movement system 300 with the lid 210L attached according to some embodiments of the present technology. FIGS. 3C and 3D show side and cross-sectional views, respectively, of a portion of the lid movement system 300 in a "lid open" position according to some embodiments of the present technology. FIG. 3E provides additional details regarding cam surfaces according to some embodiments of the present technology. FIG. 3F provides a front view of a portion of the "tower" of the lid movement system 300. Figure 3G provides an exploded view of lid movement system 300 according to some embodiments of the present technology to illustrate its various parts. Where the same reference numbers used in Figure 2 (or other figures) are used in Figures 3A-3G, the same or similar parts are referenced and many of the duplicated descriptions may be omitted.

[0046] As shown in FIG. 3A, the lid 210L covers and seals an opening to the internal chamber 210C that contains the first robot arm 212 (the first robot arm 212 is not visible in the view of FIG. 3A). The lid 210L and / or rim (lid seat) of the opening may include sealing components (e.g., gaskets, elastomeric O-rings, etc.) that help maintain a sealed environment within the internal chamber 210C (e.g., such that the internal chamber 210C may be maintained under vacuum and / or under different atmospheric conditions than the substrate processing chamber 280 and / or the load lock module 220). The lid 210L in this embodiment further includes additional fastening devices 214 that fasten (e.g., through bolt connections) to the body 210A to provide further fastening of the lid 210L to the body 210A. In this illustrated embodiment, the additional fastening devices 214 are spaced around the perimeter 210P of the lid 210L. Although not a requirement in all embodiments of the present technology, the lid 210L in the illustrated embodiment further includes several sealed sight windows 210W that provide visual access through the top into the interior chamber 210C.

[0047] Additional features of the lid movement system 300 and its engagement with the lid 210L will now be described in more detail in conjunction with Figures 3A-3G. This exemplary lid movement system 300 includes a base member 302 (e.g., a rear panel) having a first side 302A (e.g., right of center when viewed on the major surface 302S of the base member 302 - see Figure 3F) and a second side 302B (e.g., left of center when viewed on the major surface 302S of the base member 302 - see Figure 3F). A first sidewall 304A extends from the first side 302A of the base member 302 (e.g., toward the lid 210L and / or toward the lid mounting arm 310 and / or away from the major surface 302S). This first sidewall 304A includes a first cam surface 306A defined therein. Similarly, the lid movement system 300 further includes a second sidewall 304B extending from the second side 302B of the base member 302 (e.g., toward the lid 210L and / or toward the lid mounting arm 310 and / or away from the main surface 302S), which second sidewall 304B also includes a second cam surface 306B defined therein. The base member 302, first sidewall 304A, and second sidewall 304B of this example are fixedly mounted (e.g., by a bolted connection) to the body 210A of the substrate handling chamber 210 (e.g., at a location opposite the location of the load lock module 220). The base member 302, the first sidewall 304A, and the second sidewall 304B (optionally together with the top member 304T and / or the bottom member 304X) may form a "tower" like structure of the lid movement system 300. The parts forming the "tower" structure may define, for example, an interior chamber 304V having an open front side, as shown in FIG.In this illustrated embodiment, the substrate handling chamber 210 has a generally regular pentagonal shape (or at least its gate valve mounting locations are arranged in a pentagon), the load lock module 220 is coupled to one face of the pentagon, and the lid movement system 300 (e.g., at least the base member 302 and the first sidewall 304A, second sidewall 304B (or tower)) is located at a corner of the pentagon directly opposite the load lock module 220 of the substrate handling chamber 210. However, the lid movement system 300 can be located at other locations around the substrate handling chamber 210 (e.g., other corners of the pentagon and / or in enclosures of other shapes) if desired.

[0048] The lid mounting arm 310 extends away from the base member 302 (and toward the lid 210L). The lid mounting arm 310 in this illustrated embodiment includes a first arm member 310A on one side and a second arm member 310B on the other side. As shown in FIG. 3B, a base member 318P (e.g., a base plate) extends between the arm members 310A, 310B and the base member 318P, and the first arm member 310A and / or second arm member 310B engage an upper surface of the lid 210L near the perimeter 210P of the lid 210L, e.g., by bolts. Thus, the lid mounting arm 310 is fixed to the lid 210L (e.g., in a cantilever arrangement), but the mounting arm 310 is movable relative to the base member 302, the first side wall 304A, and the second side wall 304B (and relative to the entire “tower”).

[0049] As shown in Figures 3C, 3D, and 3G, the first pivot connection system 320 engages with the first cam surface 306A of the first sidewall 304A and the second cam surface 306B of the second sidewall 304B. The first pivot connection system 320 in this example includes one or more axles 320A, 320B (e.g., pins) mounted to or integrally formed with the lid mounting arm 310, for example, at couplings 322A, 322B (e.g., parts that form mounting holes for the axles), respectively. The axles 320A, 320B may be fixed relative to the lid mounting arm 310 (e.g., fixed relative to the first arm member 310A and the second arm member 310B, respectively). The shafts 320A, 320B extend into and engage with the cam surfaces 306A and / or 306B in a manner such that the shafts 320A, 320B can slide and rotate within the respective cam surfaces 306A, 306B. Any type of connection may be used in accordance with this technique. For example, the first arm member 310A may include a coupling 322A that is a separate piece from a coupling 322B provided on the second arm member 310B, or a single coupling piece may be provided (e.g., extending between the arm members 310A, 310B). As another example, the shaft 320A may be a separate piece from the shaft 320B, or the shafts 320A and 320B may constitute opposing ends of a single shaft member. As another example, the shafts 320A, 320B may comprise one or more rods fixed to or integrally formed at the first ends 316 of the first and second arm members 310A, 310B and sized and shaped to permit rotation within the cam surfaces 306A, 306B. Alternatively, in some embodiments, the shafts 320A, 320B may rotate relative to the couplings 322A, 322B, respectively. In the particular embodiment shown in FIG. 3G, the shafts 320A, 320B extend through the couplings 322A, 322B, respectively, into opposing ends of the mounting members 316M provided at the first ends 316 of the first and second arm members 310A, 310B.The mounting member 316M in this embodiment includes one or more holes that receive the ends of the shafts 320A and 320B.

[0050] As described above, the shafts 320A and 320B engage the cam surfaces 306A and 306B, respectively. The cam surfaces 306A and 306B guide the movement of the lid mounting arm 310 and the engaged lid 210L as the lid 210L moves, as described in more detail below. As shown in FIG. 3E along with FIG. 3C and FIG. 3D, in this illustrated embodiment, the first cam surface 306A and the second cam surface 306B each have a vertical cam segment 306V at a first end thereof and an angled cam segment 306X that extends upward and away from the vertical cam segment to the second end of the cam surfaces 306A, 306B (and away from the base member 302). When this exemplary lid movement system 300 is mounted on the substrate handling chamber 210 for typical use, for example, in the manner illustrated in FIG. 2 and FIG. 3A, there is a vertical orientation and an upward orientation. Therefore, the angled cam segment 306X (and the movement of the axes 320A, 320B induced by them) includes both vertical and horizontal components when the lid movement system 300 is mounted on the substrate handling chamber 210. The vertical cam segment 306V and the angled cam segment 306X define an angle A as shown in FIG. 3E. Angle A may be an obtuse angle, for example, in the range of 95 degrees to 150 degrees, and in some embodiments, in the range of 100 degrees to 140 degrees, or in the range of 105 degrees to 130 degrees. In the illustrated embodiment, angle A is approximately 120 degrees.

[0051] 3C, 3D, and 3G further illustrate that this exemplary lid movement system 300 includes a traveler member 330 that is used to move the lid mounting arm 310 (and the lid 210L attached to the lid mounting arm). This exemplary traveler member 330 includes a base element 330A. A recess 330R (or opening) is defined in (or through) the base element 330A (or other portion of the traveler member 330), for example, on a surface 332 of the traveler member 330 that directly faces the base member 302. See FIG. 3D. The opening to this recess 330R may be provided at a location on the surface 332 that is offset from a central vertical axis or location of the traveler member 330 (and / or offset from a central vertical axis or location of the base member 302 or "tower"). Additionally, the base member 302 of this embodiment includes an opening 302O (e.g., a through-hole opening) that overlaps (e.g., is at least partially aligned axially or longitudinally) with a recess 330R defined in (or through) the base element 330A of the traveler member 330 when the traveler member 330 is in the lid-open position. As shown in FIG. 3F, the opening 302O (and the recess 330R of the traveler member 330) may be offset to one side of the base member 302 (e.g., located in the first side 302A in this illustrated embodiment). The offset location (from center) of the opening 302O and the recess 330R provides additional room to incorporate those features into the lid movement system 300 structure (e.g., offset from a central track or other component over which the traveler 330 moves) and allows easy access to the opening 302O for inserting the stopper mechanism 360 (described in more detail below).

[0052] The traveler member 330 of this example further includes one or more follower elements 334, for example, extending outward from each side of the base element 330A. In the example of Figures 3C, 3D, and 3G, two follower elements 334 are shown on each side of the traveler member 330. The follower elements 334 fit into and engage corresponding follower slots 304C and 304D defined in the first and second side walls 304A and 304B, respectively. The follower slots 304C and 304D and the follower elements 334 extending into (and engaging with) them define the direction of movement of the traveler member 330 when the motor 350 moves the traveler member 330 (which in turn moves the lid mounting arm 310 and connected lid 210L). The traveler member 330 moves vertically in this illustrated embodiment (although other orientations are possible). The traveler member 330 may be mounted on a lead screw that rotates (e.g., driven by a motor 350 and gearbox, driven by a hand crank, etc.) to move the traveler member 330 up and down (with the direction of movement of the traveler member 330 controlled by the follower element 334, follower slots 304C and 304D, side walls 304A and 304B, and / or the screw drive).

[0053] The second pivot connection system 340 pivotally engages the traveler member 330 with the lid mounting arm 310. The second pivot connection system 340 in this example includes one or more axles 340A (or pins) provided on or engaged with the traveler member 330 (e.g., with axles 340A extending through a portion of the traveler member 330 that defines axle mounting hole 330H, as shown in FIG. 3G ) that are pivotally (rotatably) mounted to a coupling 340B. The axles 340A are fixed relative to the lid mounting arm 310, and optionally integrally formed as part of the lid mounting arm 310 (e.g., with one axle 340A fixed to the first arm member 310A and another axle 340A fixed to the second arm member 310B). Alternatively, the shaft 340A can be fixed to the traveler member 330 at the coupling 340B, but the lid mounting arm 310 can rotate within a provided shaft mounting opening or within the coupling.

[0054] Any type of connection in the second pivot connection system 340 may be used in accordance with this technique. For example, the first arm member 310A may include an axle support that is a separate piece from the axle support provided on the second arm member 310B, or a single axle support may be provided (e.g., extending between the arm members 310A, 310B). As another example, a single axle 340A may be provided that engages (or is integrally formed with) both the first arm member 310A and the second arm member 310B, or separate axle 340A pieces may be provided (with one axle 340A provided on the first arm member 310A and a separate axle 340A provided on the second arm member 310B). The openings in the shaft 340A and coupling 340B may be sized and shaped to permit rotation of the arm members 310A, 310B within the openings in the coupling 340B about the shaft 340A relative to the traveler 330. If necessary or desired, bearings or other rotational support structures may be provided at the locations of rotational engagement between the shaft 340A and the coupling 340B.

[0055] Additional details of the specifically illustrated exemplary second pivot connection system 340 will be described with additional reference to FIG. 3G. As shown, the axial mounting hole 330H of the traveler member 330 is provided in a rotatable or pivot mounting area 330P of the traveler member 330. The rotatable or pivot mounting area 330P, in this illustrated embodiment, faces and is located somewhat below the surface 332 and / or it extends outwardly and downwardly of the base element 330A of the traveler member 330. In this illustrated embodiment, as can be seen in FIG. 3G, the rotatable or pivot mounting area 330P extends into a recess or opening 310R defined in the top surface of the lid mounting arm 310, such that the axial mounting hole 330H of the traveler member 330 is axially aligned with the axial hole 310H provided in the lid mounting arm 310 (e.g., in this illustrated embodiment, with one axial hole 310H provided in the first arm member 310A and another axial hole 310H provided in the second arm member 310B). The axial hole 310H opens into the recess 310R. The axle 340A extends through the axial hole 310H of the lid mounting arm 310 and through the axial mounting hole 330H of the traveler member 330 to rotatably mount the lid mounting arm 310 relative to the traveler member 330. Thus, the shaft 340A extends through the shaft bore 310H and through the recess 310R (with the shaft 340A located inside the shaft mounting bore 330H of the traveler member 330 within the recess 310R).

[0056] As shown in the embodiment of Figures 3D and 3G, the lid mounting arm 310 (e.g., each of the first arm member 310A and the second arm member 310B) includes or extends to a first end 316 that includes a first pivot connection system 320. The lid mounting arm 310 (e.g., each of the first arm member 310A and the second arm member 310B) also includes a lid engaging portion 318 where the lid mounting arm 310 is coupled to the lid 210L (e.g., by a bolted connection). In this illustrated embodiment, the second pivot connection system 340 is spaced from the first end 316 toward the lid engaging portion 318. In this manner, the lid engaging portion 318 is located closer to the second pivot connection system 340 than the first pivot connection system 320. The second pivot connection system 340 may be located at or within the lid engaging portion 318 in some embodiments of the technology. As shown in FIG. 3B, the lid engaging portion 318 in this embodiment includes a base member 318P (e.g., a base plate) that extends between the arm members 310A, 310B, and one or more of the base member 318P, the first arm member 310A, and / or the second arm member 310B engage with an upper surface of the lid 210L, for example, by a bolt.

[0057] This example lid movement system 300 further includes a motor 350 for moving the traveler member 330. The motor 350 may move a shaft 352, or other support member, that engages the traveler member 330. Movement of the traveler member 330 causes movement of the lid mounting arm 310 relative to the first and second side walls 304A, 304B (or "tower" structures), as discussed in more detail below.

[0058] The lid movement system 300 of this embodiment further includes a stop mechanism 360 for holding the lid 210L in the open position. The stop mechanism 360 of this illustrated embodiment includes a rod 362 configured to (i) extend through an opening 302O (e.g., a through-hole opening) defined through the base member 302, and (ii) removably extend into (or through) a recess 330R (or opening) of the traveler member 330. The stop mechanism 360 extends into the opening 330R from the direction of a surface 332 of the traveler member 330 facing the base member 302 when the traveler member 330 is in the lid-open position, as shown in Figures 3C and 3D (and as discussed in more detail below). As seen in FIG. 3D, the stop mechanism 360 extends into contact with the base member 302 and the traveler 330 and prevents the traveler 330 from moving up or down relative to the base member 302 .

[0059] 3B, a lid movement system 300 according to at least some embodiments of the present technology may include one or more heating elements 370. The heating element 370, if present, may be used to heat the interface between the lid 210L and a lid mounting seat provided on the body 210A of the substrate handling chamber 210. The heating element 370 may heat the lid 210L and the body 210A to help break the seal between these components when the lid 210L is lifted (as described in more detail below). The heating element 370 may be provided (i) as part of the lid movement system 300 (e.g., on one or more of the lid mounting arm 310, first arm member 310A, second arm member 310B, base member 318P, first sidewall 304A, second sidewall 304B, base member 302, or base "tower"), (ii) as part of the lid 210L (e.g., on or around the periphery of the lid 210L), and / or (iii) on the body 210A of the substrate handling chamber 210. Exemplary locations of the heating element 370 are shown generally in Figures 3A and 3B.

[0060] The operation of the lid movement system 300 to move the lid 210L will now be described in more detail with additional reference to Figures 4A-4F(2). Figures 4A-4C(2) illustrate an initial lid lifting stage of the lid movement operation, in which the lid movement system 300 first lifts the lid 210L upward (at at least one outer edge location) until any remaining seals between the lid 210L and the body 210A are opened. Figures 4D-4F(2) illustrate a lid rotation stage of the lid movement operation, in which the lid movement system 300 pivots the lid 210L upward and away from the body 210A about the first pivot connection system 320 and the second pivot connection system 340. Figures 4B(1), 4C(1), 4E(1), and 4F(1) show only representations of cam surfaces 306A, 306B; axles 320A, 320B engaging cam surfaces 306A, 306B; tracking slots 304C, 304D; and tracking element 334 engaging tracking slots 304C, 304D. Figures 4B(2), 4C(2), 4E(2), and 4F(2) show more complete views of lid movement system 300, its operation, and the operation of lid 210L at the pivot locations shown in Figures 4B(1), 4C(1), 4E(1), and 4F(1), respectively.

[0061] Initially, as illustrated in Figures 2, 3A, 4A, and 4D, the lid movement system 300 engages the lid 210L, for example, by bolting (or otherwise connecting) the lid 210L to the lid mounting arm 310 of the lid movement system 300 (e.g., at the base member 318P and / or arm members 310A, 310B). This engagement step may be completed during the initial manufacture of the substrate handling chamber 210, or in some embodiments, the lid movement system 300 may be engaged with the substrate handling chamber 210 and / or the lid 210L as an "aftermarket" product or option. The lid movement system 300 may be, for example, a) a base member 302 having a major surface 302S facing away from the body 210A of the substrate handling chamber 210 (e.g., the lid movement system 300 may have a "tower" structure of the type described above, including at least the base member 302, a first sidewall 304A, and a second sidewall 304B); b) a lid mounting arm 310 (e.g., including a first arm member 310A and a second arm member 310B) extending away from the base member 302, where the lid mounting arm 310 (and its arm members 310A, 310B) may engage the lid 210L at a first outer edge location 310P of the lid 210L, for example, via the base member 318P; c) a traveler member 330 including a recess 330R or opening on a surface 332 facing the base member 302; d) a pivot connection system 340 pivotally engaging the traveler member 330 with the lid mounting arm 310; e) a motor 350 operably connected to move the traveler member 330.

[0062] The lid mounting arm 310 may be further connected to side walls 304A and 304B extending from the base member 302 and away from its major surface 302S by a first pivot connection system 320. As described in more detail below, movement of the traveler member 330 relative to the base member 302 causes movement of the lid mounting arm 310 and the lid 210L.

[0063] As shown in FIG. 4A, at the start of the lid movement operation, the lid 210L may be sealed to the body 210A of the substrate handling chamber 210. The substrate handling chamber 210 may be under vacuum or low pressure conditions and / or other atmospheric conditions different from the external atmospheric conditions. When the lid 210L is in the sealed position shown in FIG. 4A, (i) the shafts 320A, 320B located at the first end 316 of the mounting arm 310 are positioned at the bottom of the vertical cam segments 306V of the cam surfaces 306A, 306B, respectively, and (ii) the follower elements 334 of the traveler member 330 are positioned toward the bottom of the follower slots 304C, 304D. See FIG. 4B(1) and FIG. 4B(2).

[0064] As a first step, if present (and if necessary), any fastening elements (such as the additional fastening device 214) securing the lid 210L to the body 210A of the substrate handling chamber 210 are disengaged (so that the lid 210L is no longer secured to the body 210A). This step may result in an initial "venting" of the internal chamber 210C (e.g., bringing the pressure in the internal chamber 210C to equal (or substantially equal) the pressure conditions of the external environment). Additionally or alternatively, if necessary, a separate "venting" step may be performed (e.g., before removing the additional fastening device 214) to bring the pressure in the internal chamber 210C to equal (or substantially equal) the pressure conditions of the external environment.

[0065] In some cases, the above-mentioned "venting" step alone may not be sufficient to completely unseal the joint between the lid 210L (e.g., its peripheral rim) and the lid engagement structure (e.g., lid seal seat) provided on the body 210A of the substrate handling chamber 210. For this reason, the lid movement system 300 and lid movement method according to at least some aspects of the present technology include an initial lid lifting stage within the lid movement operation. In the initial lid lifting stage, the lid movement system 300 first applies a force to lift the lid 210L upward at least at a first outer edge location 310P (which is adjacent where the lid 210L engages with the lid mounting arm 310). See arrow U in FIG. 4A. This initial lid lifting action near the mounting arm 310 pulls the edge of the lid 210L upward at least near the mounting arm 310, breaking any remaining seal between the lid 210L and the body 210A. More specifically, in the illustrated embodiment, motor 350 rotates a screw drive on which traveler member 330 is mounted. This action moves traveler member 330 upward, which in turn (a) moves follower element 334 upward in follower slots 304C, 304D, and (b) moves shafts 320A and 320B upward in vertical cam segment 306V of cam surfaces 306A, 306B. Compare Figures 4B(1) and 4B(2) with Figures 4C(1) and 4C(2) (Figure 4C(2) shows the small gap G between the bottom of lid 210L and the top surface of body 210A of substrate handling chamber 210, while Figure 4B(2) shows the abutting relationship between these parts). The opening action may be accompanied by an audible "pop", "whoosh", or other sound as seals are broken and pressure inside and outside the substrate handling chamber 210 is equalized and / or parts that were stuck together separate (e.g., when the lid 210L is lifted from the seal provided around the opening 210O or from its lid seat).In some cases, the residual sealing and / or adhesive forces, as well as the force applied to the lid 210L by the motor 350 lifting the lid mounting arm 310, may be sufficient to cause the lid 210L to deform somewhat (e.g., temporarily bend), for example, near the first peripheral location 310P and / or in proximity to the attachment of the first arm member 310A, the second arm member 310B, and / or the base member 318P to the lid 210L. This deformation, when it occurs, can help to break the seals and / or adhesions at or near the first peripheral location 310P and can help to complete the venting and unsealing process.

[0066] Additionally or alternatively, in at least some implementations of this technology, heat may be applied (e.g., via heating element 370) during or before the initial "venting" action and / or the initial lid lifting phase to one or more of: (a) the lid 210L (e.g., at least at or near the first outer edge location 310P), (b) at least a portion of the lid mounting arm 310 (e.g., one or more of the first arm member 310A, the second arm member 310B, and / or the base member 318P), and / or (c) the body 210A of the substrate handling chamber 210 (e.g., at least at or near the first outer edge location 310P). Such heating may occur prior to and / or during operation of motor 350 to apply a lifting force during the initial lid lifting phase described above.

[0067] After the initial lid lift phase is complete, the motor 350 may continue to move the traveler member 330 upward to apply a rotational force to pivot the lid 210L upward. See arrow R in FIG. 4D. This force rotates the lid 210L on the lid mounting arm 310 upward and away from the body 210A of the substrate handling chamber 210 to the "lid open position" (e.g., as shown in FIGS. 3C and 3D). Starting with the axes 320A, 320B and the follower element 334 in the locations shown in FIGS. 4C(1) and 4C(2), the motor 350 continues to move the traveler member 330 upward (e.g., by rotating a screw drive) during this lid rotation phase. This action: (a) moves the follower element 334 upward within the follower slots 304C, 304D, and (b) moves the shafts 320A and 320B upward and in an angular direction within the angled cam segment 306X of the cam surfaces 306A, 306B. Compare Figures 4C(1) and 4C(2) with Figures 4E(1) and 4E(2). Because of the pivot connection systems 320 and / or 340, this action also initiates a rotation of the lid mounting arm 310 and its connected lid 210L upward and away from the top surface of the body 210A of the substrate handling chamber 210.

[0068] Continued operation of the motor 350 continues the movement of the follower element 334 upward in the follower slots 304C, 304D, and the movement of the shafts 320A, 320B upward and the cam surfaces 306A, 306B in the angled direction in the angled cam segment 306X, until the lid 210L reaches the lid-open position. Compare FIG. 4E(1) and FIG. 4E(2) with FIG. 4F(1) and FIG. 4F(2). One or more sensors may be provided (e.g., limit switches) to generate a signal when the lid 210L reaches the lid-open position and / or the lid-closed position (e.g., upper and lower limit switches). Signals from such sensors may enable an automatic control system to automatically stop operation of the motor 350 when an upper limit of rotation (opening the lid 210L) and / or a lower limit of rotation (closing the lid) is reached. The sensors may sense one or more of the location of the traveler member 330, the location of the follower element 334, the location of the lid 210L, the location of the lid mounting arm 310, the location of the first arm member 310A and / or the second arm member 310B, the location of the shafts 320A, 320B, contact between portions of the lid 210L and portions of the body 210A, etc. Such sensors and the use of sensors for automatic motor control (e.g., shutoff) are known and commercially available.

[0069] 3C and 3F diagrammatically illustrate a control panel 390 secured to the base member 302, operably coupled to the motor 350 and the automated control system, and used to operate the motor 350. In the illustrated arrangement, the control panel 390 is accessible from the rear of the substrate handling chamber 210, optionally from the first floor (e.g., without the need for an operator to climb onto the substrate handling chamber 210 and / or up a ladder). The control panel 390 may enable an operator to initiate an "open lid" process (e.g., via button 390A, see FIG. 3F), a "close lid" process (e.g., via button 390B), an "emergency stop" process (e.g., via button 390C), and / or other desired functions. The automatic control system may include / execute software for operation of the lid movement system 300, for example, initiating a lid opening process, initiating a lid closing process, requiring reversal of the motor 350 when either the upper and lower limit switches are tripped, recognizing an overcurrent condition if the motor 350 is actuated when the stopper mechanism 360 is in place, etc. The control panel 390 may include physical buttons or switches, soft buttons or switches, a touch screen, and / or any desired type of controller or input device (e.g., a keyboard, mouse, or other pointer device, etc.).

[0070] Once in the lid-open position, e.g., the positions shown in Figures 3C, 3D, 4F(1), and 4F(2), a stopper mechanism 360 (e.g., a hardened steel rod 362) may be inserted into the recess 330R of the traveler member 330. In at least some implementations of this technology, the stopper mechanism 360 may be inserted into the recess 330R from the direction of the surface 332 of the traveler member 330 facing the base member 302. The stopper mechanism 360 may be inserted through an opening 302O (e.g., a through-hole opening) formed in the base member 302 and then inserted into the recess 330R. The illustrated structure and arrangement allows an operator to insert the rod 362 into the opening 302O and / or the recess 330R from a location behind the substrate handling chamber 210 (e.g., the operator does not need to be on top of the substrate handling chamber 210 and / or on a ladder to insert the stopper mechanism 360). The stop mechanism 360 forms a releasable and fixed connection between the traveler member 330 and the base member 302 to prevent the traveler member 330 from moving vertically, and therefore the lid 210L, from moving downwardly from the lid-open position. This feature helps to ensure that the lid 210L remains in the open position, for example, while a technician or other person interacts with equipment inside the inner chamber 210C of the substrate handling chamber 210 through its top access opening 210O.

[0071] To close the lid 210L, the above process is reversed. If necessary, the stopper mechanism 360 (e.g., rod 362) is removed from the recess 330R of the traveler member 330 (and, optionally, pulled out of the opening 302O of the base member 302). If necessary, the motor 350 may be operated to slightly lift the traveler member 330 (to relieve pinching or sticking forces on the stopper mechanism 360 so that it can be more easily removed). The motor 350 then operates to move the traveler member 330 downward. During this stage, the operation of the motor 350 moves the follower element 334 downward within the follower slots 304C, 304D, and also moves the shafts 320A and 320B downward and in an angled direction within the angled cam segments 306X of the cam surfaces 306A, 306B. Compare Figures 4F(1) and 4F(2) with Figures 4E(1) and 4E(2). These actions begin to rotate the lid 210L downward on the lid mounting arm 310, in a direction towards the body 210A.

[0072] Continued operation of motor 350 to close lid 210L further moves follower element 334 downward within follower slots 304C, 304D and also moves shafts 320A and 320B downward and in an angled direction within angled cam segment 306X of cam surfaces 306A, 306B until shafts 320A, 320B reach the ends of angled cam segment 306X. Compare Figures 4E(1) and 4E(2) with Figures 4C(1) and 4C(2). These actions are accompanied by continued downward rotation of lid 210L. Continued operation of the motor 350 to close the lid 210L then moves the follower element 334 further downward within the follower slots 304C, 304D and also moves the shafts 320A and 320B downward within the vertical cam segment 306V of the cam surfaces 306A, 306B, for example, until the shafts 320A, 320B reach the bottom of the vertical cam segment 306V. Compare Figures 4C(1) and 4C(2) with Figures 4B(1) and 4B(2). This action may trigger the lower limit switch sensor to automatically stop operation of the motor 350. At this point, the lid 210L is properly positioned over the access opening 210O of the body 210A of the substrate handling chamber 210. If necessary, other lid securing actions may be taken (e.g., securing additional securing devices 214) and the substrate handling chamber 210 may be sealed and ready to contain a vacuum or other atmospheric environment.

[0073] Although described above with respect to a lid movement system 300 for a substrate handling chamber 210 of a cluster-type substrate processing system 200, the lid movement system 300 of the type described herein may also be used with removable lids provided for other types of enclosures, such as substrate processing chambers 280, chemical reaction vessels, storage tanks, other containers, etc.

[0074] Also, while the above embodiments utilize a computer-controlled motor 350 to move the traveler member 330 upwardly and downwardly relative to the side walls 304A, 304B, in some embodiments of the technology, the motor 350 need not be computer-controlled (e.g., it may be manually controlled) or may be replaced by a manually operated crank mechanism (e.g., used to rotate a screw drive to move the traveler member 330 upwardly and downwardly).

[0075] Some advantageous features or results that may be realized in at least some embodiments of the present technology include: (a) providing access to the interior surfaces of the substrate processing 280 module and / or the load lock module 220 from above or within the substrate handling chamber 210; (b) providing a lid movement system 300 with a small footprint, for use with smaller sized chambers or containers, for example; (c) providing an automated system and method for better “venting” or unsealing the lid 210L before initiating rotation of the lid 210L; (d) limiting movement of the traveler 330, for example, within a predetermined area defined by the side walls 304A and 304B (e.g., within the inner chamber 304V of the “tower” structure); and (e) preventing undesired or unplanned movement of the lid open position 210L (e.g., due to accidental activation, mechanical failure, etc.). etc.); (f) enabling remote operation of the lid movement system 300, for example from a ground location behind the substrate handling chamber 210; (g) avoiding the need to build a gantry and / or other structure above the substrate handling chamber 210 when lid removal is required; (h) maintaining the lid 210L in a stored (lid open) position securely attached to the lid movement system 300 without having to completely remove the lid 210L from the area of ​​the substrate handling chamber 210; and / or (i) reducing the size and / or force of the equipment required to move the lid 210L by using a lid pivoting step subsequent to an initial lid lifting step (e.g., for venting and / or unsealing) and / or using localized heating before or during the initial lid lifting step.

[0076] Although the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses of the present embodiments and obvious modifications and their equivalents. In addition, while several variations of the embodiments of the present disclosure have been shown and described in detail, other modifications that are within the scope of the present disclosure will be readily apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or subcombinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that various features and aspects of the disclosed embodiments can be combined with or substituted for one another to form varying modes of the embodiments of the present disclosure. It is therefore intended that the scope of the present disclosure should not be limited by the specific embodiments described above.

[0077] Any headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein. [Explanation of symbols]

[0078] 100 Substrate Processing System 102 Substrate handling chamber 102A Chamber body 102C Connector 102L Lid 102O Access opening 104 Substrate treatment chamber 106 Open gate valve 108 Substrate support 110 Robot Arm 110A End Effector 112 Load Lock Module 114 Substrate Retention Components 116 Gate valve 118 Gate valve 120 Equipment Front-End Module 122 Robot Arm 122A End Effector 124A Load Port 124B Loading Port 124C Loading Port 130 Gantry 132 Hoist 200 Substrate Processing System 210 Substrate handling chamber 210A Main Unit 210C Inner Chamber 210L Lid 210O opening 210O Access opening 210P Surroundings 210W Window 212 First Robot Arm 212A End Effector 214 Fixed Devices 220 Load Lock Module 222 Base material support 230 Equipment Front-End Module 232 Second Robot Arm 232A End Effector 240A Loading Port 240B Loading Port 240C Loading Port 240D Loading Port 250 Gate valve 260A Gate Valve 260B Gate Valve 280 Substrate Processing Chamber 282 Base material support 300 Lid Movement System 302 Base member 302A First Side 302B Second Side 302O opening 302S main surface 304A First Side Wall 304B Second side wall 304C Follow-up slot 304D Follow-up Slot 304T Top member 304V Inner Chamber 304X Bottom member 306A First Cam Surface 306B Second Cam Surface 306V Vertical Cam Segment 306X Cam Segment 310 Arm 310A First Arm Member 310B Second arm member 310H shaft hole 310P First outer edge location 310R Recess 316 First End 316M Parts 318 Lid engagement part 318P Base member 320 First pivot connection system 320A axis 320B axis 322A Coupling 322B Coupling 330 Traveler parts 330A Base Element 330H hole 330P Area 330R Recess 332 Surface 334 Follower elements 340 Second Pivot Connection System 340A axis 340B Coupling 350 Computer Controlled Motor 352 Shaft 360 Stopper mechanism 362 Hardened Steel Rod 370 Heating element 390 Control Panel 390A Button 390B Button 390C Button

Claims

1. A lid movement system, comprising: a base member having a first side and a second side; a first sidewall extending from the first side of the base member, the first sidewall including a first cam surface defined therein; a second sidewall extending from the second side of the base member, the second sidewall including a second cam surface defined therein; a lid mounting arm extending away from the base member; a first pivot connection system engaging the first cam surface and the second cam surface and pivotally engaging the lid mounting arm; a traveler member including a recess or opening on a surface facing the base member; a second pivot connection system pivotally engaging the traveler member with the lid mounting arm; a motor for moving the traveler member, the movement of the traveler member causing movement of the lid mounting arm relative to the first sidewall and the second sidewall; and a stop mechanism configured to removably extend from the direction of the surface facing the base member into the recess or the opening of the traveler member when the traveler member is in a lid open position.

2. 2. The lid movement system of claim 1, wherein the base member includes a through hole opening and the stop mechanism is releasably engageable with the recess or opening in the traveler member through the through hole opening in the base member when the traveler member is in the lid open position.

3. The lid movement system of claim 1 , further comprising a heating element configured to heat at least a portion of the lid mounting arm.

4. 2. The lid movement system of claim 1, wherein the first cam surface and the second cam surface each have a vertical cam segment at a first end and an angled cam segment extending upwardly and away from the vertical cam segment and away from the base member.

5. 2. The lid movement system of claim 1, wherein each of the first sidewall and the second sidewall includes a tracking slot that defines a direction of movement relative to the traveler member, and the traveler member includes one or more tracking elements that extend into the tracking slot.

6. 2. The lid movement system of claim 1, wherein the lid mounting arm includes a first end and a lid engaging portion, the first pivot connection system being located at the first end and the second pivot connection system being spaced from the first end toward the lid engaging portion.

7. 1. An enclosure comprising: a body member including a top, a bottom, and one or more sidewalls connecting the top and bottom, the top including an opening providing access to an interior chamber partially defined by the body member; a lid sealingly attachable to the top of the body member to close the interior chamber; A lid movement system engaged with the body member, the lid movement system comprising: a base member having a first side and a second side, the base member including a surface facing away from the body member; a first sidewall extending from the first side of the base member, the first sidewall including a first cam surface defined therein; a second sidewall extending from the second side of the base member, the second sidewall including a second cam surface defined therein; a lid mounting arm extending away from the base member and engaging the lid at a first peripheral location of the lid; a first pivot connection system engaging the first cam surface and the second cam surface and pivotally engaging the lid mounting arm; a traveler member including a recess or opening on a surface facing the base member; a second pivot connection system pivotally engaging the traveler member with the lid mounting arm; a motor for moving the traveler member, the movement of the traveler member causing movement of the lid mounting arm and the lid relative to the body member; and a stop mechanism configured to extend from the direction of the surface facing the base member into the recess or the opening of the traveler member when the traveler member is in a lid open position.

8. 8. The enclosure of claim 7, wherein the base member includes a through hole opening and the stop mechanism is releasably engageable with the recess or opening in the traveler member through the through hole opening in the base member when the traveler member is in the lid open position.

9. 8. The enclosure of claim 7, further comprising a control system for controlling the motor, the control system generating a signal to stop operation of the motor when the lid is in the lid-open position.

10. 8. The enclosure of claim 7, further comprising a heating element configured to heat at least one of: (i) the lid at least at the first peripheral location; or (ii) at least a portion of the lid mounting arm.

11. 8. The enclosure of claim 7, wherein the first cam surface and the second cam surface each have a vertical cam segment at a first end and an angled cam segment extending upwardly and away from the vertical cam segment and away from the base member.

12. 8. The enclosure of claim 7, wherein each of the first cam surface and the second cam surface are configured such that, during a lid-opening event, (i) the lid movement system first lifts the lid upwardly at the first outer edge location until a seal between the lid and the body member is opened, and then (ii) the lid pivots upwardly away from the body member about the first pivot connection system and the second pivot connection system.

13. 8. The enclosure of claim 7, wherein the first and second side walls each include a tracking slot that defines a direction of movement relative to the traveler member, and the traveler member includes one or more tracking elements that extend into the tracking slot.

14. 8. The enclosure of claim 7, wherein the lid mounting arm includes a first end and a lid engaging portion, the first pivot connection system being located at the first end and the second pivot connection system being spaced from the first end toward the lid engaging portion.

15. The enclosure of claim 7 , wherein the body member comprises a substrate handling chamber for moving a substrate from the internal chamber to one or more substrate processing chambers.

16. 1. A method of moving a lid relative to a body member of an enclosure, comprising: Engaging a lid movement system with the lid, the lid movement system comprising: a base member having a surface facing away from the body member; a lid mounting arm extending away from the base member, said engaging including engaging the lid with the lid at a first peripheral location of the lid; a traveler member including a recess or opening on a surface facing the base member; a pivot connection system pivotally engaging the traveler member with the lid mounting arm; a motor for moving the traveler member, the movement of the traveler member causing movement of the lid mounting arm and the lid; operating the motor to initially apply a lifting force to the lid at the first peripheral location; operating the motor to apply a rotational force after the lifting force has been applied to rotate the lid upwardly on the lid mounting arm and away from the body member to a lid-open position; and inserting a stop mechanism into the recess or opening of the traveler member from the direction of the surface facing the base member to prevent the lid from moving from the lid-open position.

17. 17. The method of claim 16, wherein said inserting comprises inserting the stop mechanism through a through-bore opening provided in the base member and into the recess or opening in the traveler member.

18. 17. The method of claim 16, wherein the lifting force breaks a sealed engagement between the lid and the body member at the first peripheral location.

19. 20. The method of claim 18, wherein applying the lifting force to break the sealed engagement comprises deforming a shape of the lid at the first peripheral location.

20. 17. The method of claim 16, further comprising heating at least one of: (i) the lid at least at the first peripheral location; or (ii) at least a portion of the lid mounting arm prior to operating the motor to apply the lifting force.

21. The method of claim 16 , wherein the body member comprises a substrate handling chamber for moving a substrate from the body member to one or more substrate processing chambers.

22. With the lid beginning in the lid open position, the method comprises: removing the stopper mechanism from the recess or opening in the traveler member; 17. The method of claim 16, further comprising operating the motor to first rotate the lid downwardly on the lid mounting arm in a direction toward the body member and then move the lid downwardly onto the body member.

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