Substrate transfer system and substrate transfer method

Abstract

To quickly and accurately grasp, for example, the situation on the spot when an error occurs in a robot.SOLUTION: A substrate transfer system includes a robot, a camera, and a display. The robot holds and transports a substrate. The camera captures an image of the substrate held by the robot. The display displays the image captured by the camera. The robot has a robot arm and a robot hand. The robot arm includes a plurality of link bodies. The robot hand is fixed to one of the plurality of link bodies and holds the substrate. The camera is fixed to the link body to which the robot hand is fixed, and faces the robot hand.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a substrate transport system and a substrate transport method. [Background technology]

[0002] Conventionally, robots have been used to transport substrates such as wafers, etc. The robot disclosed in Patent Document 1 includes a controller for controlling the movement of the robot. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2008-28134 A Summary of the Invention [Problem to be solved by the invention]

[0004] Robots can experience errors for a variety of reasons. In these cases, maintenance work must be carried out depending on the error that has occurred. In wafer processing facilities and the like, in order to achieve a high level of information management, there are often restrictions on taking data to other locations and on communicating with external networks. In these situations, there is a demand for the ability to quickly identify and resolve the cause of robot errors.

[0005] The present invention has been made in consideration of the above circumstances, and has as its object to enable an operator to quickly and effectively grasp the situation when, for example, an error occurs in a robot. [Means for solving the problem]

[0006] The problem to be solved by the present invention has been described above. Next, the means for solving this problem and the effects thereof will be described.

[0007] According to a first aspect of the present invention, there is provided a substrate transfer system having the following configuration. That is, the substrate transfer system includes a robot, a camera, and a display. The robot holds and transfers a substrate. The camera photographs the substrate held by the robot. The display displays the image captured by the camera. The robot has a robot arm and a robot hand. The robot arm includes a plurality of link bodies. The robot hand is fixed to one of the plurality of link bodies and holds the substrate. The camera is fixed to the link body to which the robot hand is fixed, and faces towards the robot hand.

[0008] According to a second aspect of the present invention, there is provided a substrate transport method as follows. That is, this substrate transport method is a substrate transport method in a substrate transport system. The substrate transport system includes a robot and a camera. The robot holds and transports a substrate. The camera photographs the substrate held by the robot. The robot includes a robot arm and a robot hand. The robot arm includes a plurality of link bodies. The robot hand is fixed to one of the plurality of link bodies and holds the substrate. The camera is fixed to the link body to which the robot hand is fixed. The substrate transport method includes an imaging step and a display step. In the imaging step, while the robot hand holds and transports the substrate, the camera images the robot hand so that the substrate is included in the image. In the display step, the image obtained in the imaging step is displayed on a display.

[0009] This allows the operator to quickly and clearly grasp the situation when, for example, an error occurs in the robot, and therefore the operator can deal with the situation smoothly and appropriately. Effect of the Invention

[0010] According to the present invention, when an error occurs in a robot, for example, an operator can quickly and effectively grasp the situation. [Brief description of the drawings]

[0011] [Figure 1] 1 is a plan sectional view showing a part of a semiconductor processing facility to which a video confirmation computer according to an embodiment of the present invention is applied; [Diagram 2] FIG. 1 is a side cross-sectional view showing a portion of a semiconductor processing facility. [Diagram 3] FIG. 1 is a schematic diagram illustrating a communication network constructed in a semiconductor processing facility. [Figure 4] FIG. 13 is a diagram showing an example of a status check screen displayed on the video check computer. [Diagram 5] FIG. 13 is a diagram showing an example of a log analysis screen displayed on a troubleshooting computer. [Figure 6] FIG. 13 is a diagram showing a display example of an error handling support screen. [Figure 7] FIG. 4 is a diagram showing a display example of a manual screen. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a plan sectional view showing a part of semiconductor processing equipment 20 to which one embodiment of the present invention is applied. Fig. 2 is a side sectional view showing a cutaway part of semiconductor processing equipment 20. In Figs. 1 and 2, various states of movement of robot 27 are shown by two-dot chain lines.

[0013] The semiconductor processing equipment 20 performs a predetermined process on a wafer 24, which is a substrate to be processed. In this embodiment, the wafer 24 is a semiconductor wafer. The process performed on the wafer 24 may include various processes such as a heat treatment, an impurity introduction process, a thin film formation process, a lithography process, a cleaning process, and a planarization process. In the semiconductor processing equipment 20, a substrate process other than the above-mentioned substrate processes may be performed.

[0014] The semiconductor processing equipment 20 includes a wafer processing device 22 and a wafer transfer device 23. The semiconductor processing equipment 20 is, for example, specified in advance by the SEMI standard. SEMI is an abbreviation for Semiconductor Equipment and Materials International. In this case, for example, the FOUP 25 and the FOUP opener 26 for opening and closing the FOUP 25 comply with the specifications of SEMI standards such as E47.1, E15.1, E57, E62, E63, and E84. However, the configuration of the semiconductor processing equipment 20 may differ from the SEMI standard.

[0015] The wafer processing apparatus 22 is formed with a processing space 30 filled with a predetermined gas. The wafer processing apparatus 22 performs the above-mentioned processing on the wafer 24 in the processing space 30. In addition to a processing apparatus main body that processes the wafer 24, the wafer processing apparatus 22 is equipped with a processing space forming section that forms the processing space 30, a transport device that transports the wafer 24 in the processing space 30, and an adjusting device that controls the atmospheric gas that fills the processing space 30. The adjusting device is realized by a fan filter unit or the like.

[0016] The wafer transfer device 23 removes the unprocessed wafer 24 from the FOUP 25 and supplies it to the wafer processing device 22, and also removes the processed wafer 24 from the wafer processing device 22 and stores it back in the FOUP 25. The wafer transfer device 23 functions as an Equipment Front End Module (EFEM). In the semiconductor processing equipment 20, the wafer transfer device 23 serves as an interface section that transfers the wafer 24 between the FOUP 25 and the wafer processing device 22. While moving between the space in the FOUP 25 and the processing space 30 of the wafer processing device 22, the wafer 24 passes through a highly clean preparation space 29 filled with a predetermined atmospheric gas.

[0017] The preparation space 29 is a closed space where contamination control is performed. In the preparation space 29, airborne particles are controlled to be below a limited cleanliness level, and environmental conditions such as temperature, humidity, and pressure are also controlled as necessary. In this embodiment, the processing space 30 and the preparation space 29 are maintained at a predetermined cleanliness level so as not to adversely affect the processing of the wafer 24. For example, CLASS 1 defined by ISO (International Organization for Standardization) is adopted as this cleanliness level.

[0018] The robot 27 functions as a wafer transfer robot. In this embodiment, the robot 27 is realized by a SCARA type horizontal articulated robot. SCARA is an abbreviation for Selective Compliance Assembly Robot Arm. The robot 27 is disposed in a preparation space 29.

[0019] As shown in FIG. 2 and other figures, the robot 27 includes a base 41, a robot arm 42, a vertical drive actuator 43a, a horizontal drive actuator 43b, and a controller 44.

[0020] The base 41 functions as a base member that supports the robot arm 42. The robot arm 42 is attached to the upper surface of the base 41.

[0021] The robot arm 42 has a link structure including a plurality of link bodies sequentially connected in a direction from the base end to the tip end. A robot hand 45 is provided at the tip end of the robot arm 42. The robot hand 45 can hold and release the wafer 24. There are various methods for the robot hand 45 to hold the wafer 24, and for example, the wafer 24 may be placed on the robot hand 45, the wafer 24 may be sandwiched between the robot hand 45, or the wafer 24 may be attracted to the robot hand 45 by negative pressure.

[0022] The vertical drive actuator 43a displaces the robot arm 42 in the vertical direction. The vertical drive actuator 43a is configured as, for example, an electric motor. By moving the robot arm 42 in the vertical direction, the height of the robot hand 45 can be changed.

[0023] The horizontal drive actuator 43b rotates each link of the robot arm 42 individually around the corresponding joint axis. The horizontal drive actuator 43b is configured as, for example, an electric motor. By rotating each link around the vertical joint axis, the robot hand 45 can be moved within a horizontal plane.

[0024] The controller 44 controls the vertical drive actuator 43a and the horizontal drive actuator 43b according to a predetermined operation program or a movement command input by a user, and moves the robot hand 45 to a predetermined position. As shown in FIG. 3, the controller 44 includes a memory circuit 46, an arithmetic circuit 47, and an output device 48. The memory circuit 46 stores a predetermined program and various data. The arithmetic circuit 47 performs arithmetic processing according to the program. The output device 48 outputs control signals to the vertical drive actuator 43a and the horizontal drive actuator 43b based on the arithmetic result of the arithmetic circuit 47. The memory circuit 46 is realized by, for example, a RAM, a ROM, a HDD, etc. The arithmetic circuit 47 is realized by, for example, a CPU.

[0025] 3, the semiconductor processing facility 20 includes a host controller 61. The host controller 61 transmits commands to various devices constituting the semiconductor processing facility 20 to execute semiconductor processing steps.

[0026] The upper controller 61 is connected by wire or wirelessly to the controller 44 provided in the robot 27. The upper controller 61 transmits commands to the controller 44 so that the robot 27 performs a required operation at a required timing. The controller 44 controls the robot 27 according to the commands received from the upper controller 61.

[0027] When an error occurs, the controller 44 transmits information about the error to the upper controller 61. The program for the controller 44 to control the robot 27 is composed of a plurality of modules. Here, a module refers to a part of the program for realizing a certain unit of operation by the robot 27. Examples of the unit of operation include, but are not limited to, an operation of placing the wafer 24 held by the robot hand 45 at a predetermined position, and an operation of holding the wafer 24 placed at a predetermined position by the robot hand 45.

[0028] The vertical drive actuator 43a and the horizontal drive actuator 43b are each configured as an electric motor. The electric motor has a known configuration and includes a motor drive circuit, a motor body, a rotational position sensor, and a current sensor, which are not shown. The motor body includes a stator, a rotor, and an output shaft. The controller 44 supplies current to the motor drive circuit via a power supply circuit so that the electric motor performs the desired operation. As a result, the output shaft of the electric motor rotates in response to the current that flows.

[0029] The current flowing through the motor drive circuit is determined by a target value for the operation of the electric motor and a measured value for the operation. The target value for the operation of the electric motor may be, for example, a target value related to a rotational position, a rotational speed, or a rotational acceleration. Similarly, the measured value may be, for example, a measured value related to a rotational position, a rotational speed, or a rotational acceleration. A control law such as a feedback control law or an adaptive control law may be used to control the current flowing through the motor drive circuit.

[0030] A camera 62 is fixed to a link member of the robot arm 42 to which the robot hand 45 is fixed. As shown in Fig. 3, the camera 62 is connected to a video confirmation computer 65 via a network. The video confirmation computer 65 can be, for example, a mobile terminal, a personal computer, or the like.

[0031] The semiconductor processing facility 20 is provided with a camera 63 for photographing the robot 27. The camera 63 is connected to the controller 44 by wire or wirelessly.

[0032] When some abnormality occurs in the robot 27 and troubleshooting becomes necessary, the operator can obtain information for dealing with the problem by operating some computer. This computer may be called a troubleshooting computer 70. In this embodiment, the upper controller 61 also functions as the troubleshooting computer 70.

[0033] The video confirmation computer 65 includes a memory circuit (memory unit) 66 and an arithmetic circuit (arithmetic unit) 67. The memory circuit 66 is realized by, for example, a RAM, a ROM, a HDD, etc. The arithmetic circuit 67 is realized by, for example, a CPU.

[0034] For example, the following information (1) to (6) is stored in the memory circuit 66 of the video confirmation computer 65 and the memory circuit 46 of the controller 44 (hereinafter simply referred to as the memory circuit). These storage operations may be performed continuously or discretely at intervals.

[0035] (1) Information about images obtained by cameras 62 and 63 (2) Information regarding signals received by the controller 44 from the upper controller 61 and signals transmitted by the controller 44 to the upper controller 61 (communication log information) (3) Information about the program executed by the controller 44 to control the robot 27 (4) Information regarding the current value, position, speed, acceleration (including negative acceleration; the same applies below), position deviation, speed deviation, and acceleration deviation of the electric motor equipped in the robot 27. (5) Information regarding output signals from various sensors (e.g., light projection / light blocking sensor, piston position sensor of pneumatic actuator, pressure sensor, valve position sensor of solenoid valve) of the robot 27 (6) Information regarding input signals to various devices (e.g., solenoid valves) of the robot 27

[0036] Here, the electric motor current value is measured by a current sensor provided in the motor drive circuit. The position of the electric motor can be obtained based on the measurement value of a rotational position sensor provided in the electric motor. The speed and acceleration of the electric motor can be obtained by time-differentiating the measurement value of the rotational position sensor. The position deviation, speed deviation, and acceleration deviation can be obtained by calculating the differences between the above-mentioned position, speed, and acceleration and the target position, target speed, and target acceleration.

[0037] A web server application and a database application are pre-installed on the controller 44, and the programs are stored in the storage circuit 46 described above.

[0038] However, for some reason, an error may occur in the robot 27. In this case, the video confirmation computer 65 can display a status confirmation screen 71 as shown in Fig. 4 based on the contents stored in the memory circuit 66. This status confirmation screen 71 includes a model area 72, a video area 73, a log area 74, and a graph area 75.

[0039] In the model area 72, two-dimensional and three-dimensional models that reproduce the posture of the robot 27 at a certain time are displayed by computer graphics. The posture of the displayed model is calculated based on the motor positions stored in the memory circuit 66. A seek bar 72a is arranged at the bottom of the model area 72, and a slider, a play button, a pause button, and a reverse play button are arranged on the seek bar 72a. This makes it possible to reproduce the movement of the robot 27 in the display of the model area 72 or to stop it at a certain point. Even if the real robot 27 is hidden from the camera 63 and in a position where it cannot be photographed, for example, the operator can easily understand what posture the robot 27 was in by referring to the display contents of the model area 72.

[0040] The image area 73 displays the captured image acquired by the camera 62 and stored in the memory circuit 66. The playback position of the image can be specified by the seek bar 72a. Therefore, the reproduction of the model movement in the model area 72 and the playback of the moving image in the image area 73 can be synchronized.

[0041] The log area 74 displays the communication log stored in the memory circuit 66. The log area 74 may also display information about the program executed to control the robot 27.

[0042] In the graph area 75, information related to the electric motor's current value, position, speed, acceleration, position deviation, speed deviation, and acceleration deviation stored in the memory circuit 66 is displayed in graphs of different colors. In the example shown in FIG. 4, a line graph is displayed with each value on the vertical axis and time on the horizontal axis. A vertical line (time figure) is displayed in each graph in the graph area 75. The position of this line corresponds to the time displayed in the model area 72 and the image area 73.

[0043] When an error of any kind occurs in the robot 27, information stored in the memory circuit 66 during a predetermined time range including the time when the error occurred (for example, from a few seconds before the error occurred to a few seconds after the error occurred) becomes the subject of display on the status confirmation screen 71.

[0044] When the play button is pressed in the seek bar 72a, the information to be displayed is played in the model area 72 and the video area 73. Similarly, when the reverse play button is pressed, the information to be displayed is played in reverse. When the pause button is pressed, the play / reverse play is paused, and when the pause button is pressed again, the pause is released. The seek bar 72a may also include buttons for performing well-known fast-forward / rewind operations.

[0045] When the information to be displayed is played back, the reproduced movement of the robot 27 is displayed in the model area 72, and the image captured by the camera 62 is dynamically displayed in the video area 73. During playback, a communication log is displayed in the log area 74, and a graph is displayed in the graph area 75. In the log area 74, the log history at the time specified by the seek bar 72a is displayed. This log history is added moment by moment in synchronization with playback. In the graph area 75, the time figure in each graph moves horizontally in synchronization with playback.

[0046] With the above configuration, when an error occurs, an operator can operate the video confirmation computer 65 to quickly identify the cause of the error from various perspectives and deal with it.

[0047] In the above example, information stored in the memory circuitry 66 for a predetermined time range before and after the occurrence of an error is to be displayed on the status confirmation screen 71. Alternatively, information stored regarding an operation unit or module being executed in the controller 44 when the error occurred may be displayed on the status confirmation screen 71.

[0048] The model area 72 and the image area 73 are arranged adjacent to each other on the same status check screen 71. Therefore, the information in the two areas allows the worker to intuitively understand the situation in which the error occurred in a comprehensive manner.

[0049] The overall status of the robot 27 can be obtained from the model area 72, and the detailed status of the area around the tip of the robot hand 45 can be obtained from the image area 73. In this way, the two-dimensional or three-dimensional model information displayed in the model area 72 and the captured image information displayed in the image area 73 can have a mutually complementary relationship. In this sense, it is advantageous to display both images side by side.

[0050] In addition, the addition of the log history to the log area 74 is performed at a timing that matches the time displayed in the model area 72 and the image area 73, so that the worker will not become confused in understanding the situation.

[0051] Since the model area 72 and the video area 73 are arranged adjacent to each other, the operator can easily grasp the model video and the photographed image as integrated information. Therefore, even if the video in the video area 73 is played / stopped by the seek bar 72a in the model area 72, it is possible to achieve a configuration that is unlikely to cause discomfort.

[0052] 4, the model area 72 is arranged on the left and the image area 73 is arranged on the right. However, the arrangement may be reversed. Also, the model area 72 and the image area 73 may be arranged vertically.

[0053] Next, a log analysis screen 81 that the controller 44 can cause to be displayed on the display (for example, the display 68 shown in FIG. 3) of the troubleshooting computer 70 will be described with reference to FIG.

[0054] When some kind of error occurs in the robot 27, the communication log that describes the contents of the communications before and after the occurrence of the error is valuable information for identifying the cause of the error. However, communication logs generally contain information that is highly relevant to the error and information that is not, and in many cases information that is not highly relevant to the error makes up the majority of the information. Therefore, there is a risk that information that is highly relevant to the error will be buried and difficult to find.

[0055] In this embodiment, the log analysis screen 81 output by the controller 44 to the troubleshooting computer 70 has a function of extracting and displaying communication logs that are highly related to errors. This makes it easy to identify the cause of the error and to handle it. The troubleshooting computer 70 functions as a terminal for the controller 44.

[0056] More specifically, each line of the communication log describes a communication code indicating the type of communication. Information on communication codes that are highly relevant to errors in the communication log is stored in advance in the memory circuit 46 of the controller 44 in a form associated with information that identifies the type of error (e.g., an error code). When an operator instructs extraction of the communication log, the communication logs are filtered to display only those types that are highly relevant to the error code, and are output from the controller 44 to the troubleshooting computer 70.

[0057] When the controller 44 causes the troubleshooting computer 70 to display the communication log in such a narrowed-down form, it can simultaneously display, for example, the following information (1) to (5). This log analysis screen 81 allows the worker to understand the situation more easily.

[0058] (1) Error Description Area 82. The contents displayed in the error description area 82 include, for example, the date and time when the error occurred, the error code, and a summary of the error. (2) Detailed log area 83. The display contents of the detailed log area 83 include the communication log extracted as described above from a predetermined time before the error occurred to the point at which the error occurred. (3) Operation position area 84. In the operation position area 84, a numerical value indicating the posture of the robot 27 when an error occurs can be displayed in the form of a position measured by the electric motor or a target value. (4) Program status area 85. The program status area 85 displays information for identifying the module that was executed to control the robot 27 according to the communication log displayed in the detailed log area 83. However, each line of the communication log may be selectable in the detailed log area 83, and the program status area 85 may display a program corresponding to the log of the selected line. (5) Input / Output Signal Area 86 The input / output signal area 86 displays output signals from various sensors that the robot 27 has, and input signals to various devices.

[0059] Next, the error handling support screen 88 that can be displayed by the handling computer 70 will be described with reference to FIG.

[0060] The memory circuit 46 of the controller 44 stores data indicating a countermeasure to be taken when some error occurs in the robot 27. This countermeasure can be output from the controller 44 to the countermeasure computer 70 and displayed on a display (for example, the display 68 shown in FIG. 3) to assist the worker in dealing with the error.

[0061] The contents displayed on the display 68 to assist in the operation of dealing with the error may be, for example, the following items (1) to (3).

[0062] (1) Error explanation area 89. The error explanation area 89 displays the date and time of the error occurrence, the error code, etc. Errors that occurred within a predetermined time from the most recent error occurrence, or errors that occurred a predetermined number of times from the most recent error occurrence, may be displayed in a selectable manner in the error explanation area 89. Hereinafter, past errors displayed in the error explanation area 89 may be referred to as error history.

[0063] (2) Handling Content Explanation Area (Detailed Explanation Area) 90. The handling content explanation area 90 displays in detail the handling method corresponding to the error being explained in the error explanation area 89. The handling method is created in advance by the manufacturer of the robot 27 corresponding to the error code, and is stored in the memory circuit 46 of the controller 44 in the form of appropriate electronic data such as HTML data, image data, video data, PDF data, etc. When an error history is selected in the error explanation area 89, the handling content explanation area 90 may display the handling method corresponding to the error history. The video data may be, for example, data of the robot 27 photographed by the camera 63 when an error occurred in the past.

[0064] (3) Related item list area 91. The related item list area 91 displays a list of items related to the error being explained in the error explanation area 89. When an error history is selected in the error explanation area 89, items related to the error history may be displayed in the related item list area 91. The list is made up of one or more related items. The related items may be, for example, the following (a) and (b). (a) A work record corresponding to the current error or the selected error history in the past. When an error occurs, the worker can operate an appropriate user interface device to display a work record creation screen on the display 68. This interface can be, for example, a touch panel integral with the display 68, or a hardware key arranged near the display 68, but is not limited to this. On the work record creation screen, the worker can create a work record by specifying the error code, the date and time of the error, the date and time of the work, the worker, the work content and its result, the title of the work record, the importance of the work record, and the like. The work record input by the worker to the countermeasure computer 70 is transmitted from the countermeasure computer 70 to the controller 44. The controller 44, which receives the data of the work record, associates the work record with the error code and stores the work record in the memory circuit 46. In the related item list area 91, for example, the importance and title of the work record are displayed. (b) Errors related to the current error or the selected error history. Examples of related errors include, but are not limited to, other errors that may occur simultaneously with a certain error, and other errors that occur due to the occurrence of a certain error. The association between errors is created in advance by the manufacturer of the robot 27 and stored in the memory circuit 46 of the controller 44. The association between errors may be configured to be registerable in the memory circuit 46 by an operator's operation. The related item list area 91 displays, for example, an error code.

[0065] The worker can appropriately select a related item displayed in the related item list area 91 by appropriately operating the above-mentioned user interface device. Information on the selected related item is transmitted from the troubleshooting computer 70 to the controller 44. The controller 44 transmits various data to the troubleshooting computer 70 so that the contents of the work record are displayed in the troubleshooting content explanation area 90 when a work record is selected, and the method of dealing with the error are displayed in the troubleshooting content explanation area 90 when a related error is selected.

[0066] A plurality of related items can be displayed in the related item list area 91, and the controller 44 can control the countermeasure computer 70 to sort and display the related items so that the related items with higher priority are placed at the top and the related items with lower priority are placed at the bottom. FIG. 6 shows the related items arranged according to priority in the related item list area 91. The priority can be determined based on, for example, the frequency of occurrence of an error, the frequency with which an explanatory screen is displayed, the importance specified in the work record, the relevance determined from the current sensor and position sensor detection value at the time of the error, and the like. When a plurality of viewpoints are used to determine the priority, the controller 44 can, for example, calculate the sum of values ​​obtained by multiplying an index that quantifies the frequency of occurrence of an error, etc., by an appropriate weight, and use the obtained sum as the priority.

[0067] For example, when a collision occurs, an abnormality such as an increase in position deviation is simultaneously detected for multiple motors that drive each joint. On the other hand, when a cable of a certain motor is broken, an abnormality is detected only for that motor. In this way, the expected abnormality detection patterns may be stored in advance, and when an abnormality occurs, the similarity between the actual abnormality detection pattern and the expected abnormality detection pattern may be calculated, and the troubleshooting content for the abnormality corresponding to the expected abnormality detection pattern with a high similarity may be preferentially displayed. As the abnormality detection pattern, a combination of occurrence / non-occurrence of multiple detection items (position deviation, speed deviation, etc.) may be used, or a measured value such as a current value of a certain motor when an abnormality occurs may be used. In addition, when a combination of occurrence / non-occurrence of multiple detection items is used as the abnormality detection pattern, the number of combinations of occurrence / non-occurrence of multiple detection items that match may be used as the similarity. In this case, the influence of an important detection item on the similarity may be increased by weighting the multiple detection items.

[0068] The above configuration makes it easy to identify the cause of an error and deal with it. In addition, by displaying the work records registered by the user on the error handling support screen 88, it becomes possible to handle an error based on the accumulated knowledge acquired from past handling, and such knowledge can be shared among multiple people. Related items are displayed in order of priority, so that an error that has occurred can be efficiently handled.

[0069] Materials describing methods for identifying the cause of errors and methods for dealing with errors, as well as a manual describing how to use the robot, are stored in the memory circuit 46 of the controller 44. By operating the user interface device according to the situation, the user can display these materials and manuals on a display 68 and refer to them, as shown in FIG.

[0070] The manual screen 93 will be briefly described. A table of contents display area 94 is arranged on the left side of the manual screen 93, and the items in the table of contents of the manual are displayed in a list format in this table of contents display area 94. A detailed display area 95 is arranged on the right side of the manual screen 93, and this detailed display area 95 can display the specific contents of the manual corresponding to the table of contents item selected in the table of contents display area 94. A search box 96 is arranged above the table of contents display area 94, and a text search can be performed on the text data of the manual. This makes it unnecessary to bring a paper manual close to the robot 27.

[0071] The display of the log analysis screen 81, the error handling support screen 88, and the manual screen 93 described above is realized by cooperation between a web server application pre-installed in the controller 44 and a web browser application pre-installed in the troubleshooting computer 70. When an operator starts up a web browser in the troubleshooting computer 70 and operates it appropriately, the log analysis screen 81, the error handling support screen 88, and the manual screen 93 described above can be displayed on the display 68, for example, in the form of a web page.

[0072] The troubleshooting computer 70 for viewing various screens (in other words, a terminal for the controller 44) may be prepared separately from the upper controller 61. In any case, a web browser application is installed on the viewing computer. The web server of the controller 44 determines the display contents from the stored contents of the memory circuit 46 in response to a request from the web browser of the viewing computer, and transmits various data such as HTML data. The web browser in the viewing computer draws a screen such as a web page based on the received various data. In this configuration, the worker can use the functions of the log analysis screen 81, the error troubleshooting support screen 88, and the manual screen 93 simply by preparing an appropriate terminal on which a general web browser application is installed as the viewing computer. In this manner, in this embodiment, there is no need to install special software such as a dedicated application on the terminal. Therefore, this configuration is suitable for semiconductor manufacturing plants and the like where the introduction of electronic devices is generally strictly restricted and high-level confidentiality measures are required for the electronic devices brought in.

[0073] As described above, in this embodiment, the image checking computer 65 for checking the image related to the operation of the robot 27 includes a memory circuit 66 and an arithmetic circuit 67. The memory circuit 66 is capable of storing information. The arithmetic circuit 67 outputs information based on the stored contents of the memory circuit 66. The memory circuit 66 stores information on the position of the electric motor that drives the link body of the robot 27 and information on the image. The information on the position of the electric motor is received from the controller 44 of the robot 27. The image information is acquired by the camera 62 attached to the robot 27. The arithmetic circuit 67 displays the model area 72 and the image area 73 side by side on the display of the robot itself. In the model area 72, a two-dimensional or three-dimensional model that reproduces the posture of the robot 27 is displayed by computer graphics. In the image area 73, an image is displayed.

[0074] By displaying the two areas side by side in this way, the worker can intuitively and comprehensively grasp the situation regarding the operation of the robot 27. Therefore, the worker can smoothly and appropriately deal with the situation (e.g., the occurrence of an error).

[0075] In addition, in the image checking computer 65 of this embodiment, the time corresponding to the model displayed in the model area 72 and the time corresponding to the image displayed in the image area 73 are synchronized.

[0076] This makes it possible to synchronize the reproduction of the model movement in the model area 72 with the playback of the moving image in the video area 73. Therefore, a worker looking at the screen can easily grasp the situation.

[0077] In the video confirmation computer 65 of this embodiment, the memory circuitry 66 stores a communication log of the communication between the controller 44 and other devices. The arithmetic circuitry 67 causes the computer to display, in addition to the model area 72 and the video area 73, a log area 74 in which the history of the communication log is output. The timing of displaying the communication log history in the log area 74 is synchronized with the time in the model area 72 and the video area 73.

[0078] As a result, the display in the log area 74 changes at a timing that matches the time displayed in the model area 72 and the image area 73. This prevents the worker from becoming confused about the situation.

[0079] In addition, in the image confirmation computer 65 of this embodiment, the arithmetic circuit 67 displays a common seek bar 72a for specifying the time corresponding to the model displayed in the model area 72 and the time corresponding to the image displayed in the image area 73.

[0080] This allows an intuitive operation using the seek bar to specify the situation at what time should be displayed in the model area 72 and the video area 73. This allows the worker to easily grasp the situation at the time he or she wishes to know. In addition, because the seek bar 72a is common, a simple screen that is less likely to cause confusion during operation can be realized.

[0081] Although the preferred embodiment of the present invention has been described above, the above configuration can be modified, for example, as follows.

[0082] Information on the robot 27 in a normal state may be stored in at least one of the memory circuit 66 of the video confirmation computer 65 and the memory circuit 46 of the controller 44. In this case, when an error occurs, the information on the normal state can be displayed for reference in the video confirmation computer 65 or the countermeasure computer 70. This configuration is particularly advantageous in the graph area 75 on the status confirmation screen 71 displayed by the video confirmation computer 65. This is because the graph in the graph area 75 may fluctuate significantly even in a normal state, and it is difficult to distinguish between abnormality and normality without a comparison standard. Parameters (e.g., average value, maximum value, minimum value, etc.) that indicate the characteristics of the graph in a normal state can also be displayed together with the graph in the graph area 75.

[0083] The computer that displays at least one of the log analysis screen 81, the error handling support screen 88, and the manual screen 93 may be a teach pendant that is operated to teach the robot 27.

[0084] The images captured by the camera 62 attached to the robot 27 can also be used as an auxiliary means when performing a teaching operation using the teach pendant.

[0085] The image checking computer 65 and the countermeasures computer 70 may be realized by a single piece of hardware (computer).

[0086] The status check screen 71 displayed by the video check computer 65 may also be displayed on a browser basis, similar to the log analysis screen 81 and the like.

[0087] The video confirmation computer 65 may display the status confirmation screen 71 on the display of another computer connected to the video confirmation computer 65 instead of or in addition to the display of its own device. [Explanation of symbols]

[0088] 27 Robot 44 Controller (Robot Controller) 65 Video confirmation computer 66 Memory circuit (memory section) 67 Arithmetic circuit (arithmetic unit) 68 Display (Display unit) 72 Model Area 73 Video Area 74 Log Area

Claims

1. A robot that holds and transports the substrate; a camera for photographing the substrate held by the robot; a display for displaying an image captured by the camera; Equipped with The robot comprises: A robot arm including a plurality of link bodies; a robot hand fixed to one of the plurality of link bodies and holding the substrate; having A substrate transport system, wherein the camera is fixed to the link body to which the robot hand is fixed, and faces the robot hand.

2. 2. The substrate transfer system according to claim 1, A substrate transport system, wherein the camera has a function of capturing video and is configured to capture an image of the entire top surface of the substrate held by the robot.

3. 3. The substrate transfer system according to claim 1, A storage unit capable of storing information; A calculation unit that outputs information based on the contents stored in the storage unit; Further comprising: The storage unit is Position information of electric motors that drive the plurality of link bodies received from a controller of the robot; and Image information acquired by the camera and configured to indicate a state of the substrate; and Remember, The calculation unit displays on the display, a model area in which a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics; an image area in which an image configured to indicate a state of the substrate is displayed; A substrate transport system that displays the above images side by side.

4. The substrate transfer system according to claim 3, A substrate transport system, wherein a time corresponding to the model displayed in the model area and a time corresponding to the image displayed in the image area are synchronized.

5. The substrate transfer system according to claim 4, A substrate transport system, wherein the calculation unit displays a common seek bar for specifying the time corresponding to the model displayed in the model area and the time corresponding to the image displayed in the image area.

6. The substrate transfer system according to any one of claims 3 to 5, The calculation unit displays on the display a graph area in which at least information on the position of the electric motor is displayed in a graph, alongside the model area and the image area.

7. 7. The substrate transport system according to claim 6, The calculation unit displays a time figure on the graph in the graph area at a position corresponding to at least one of the time corresponding to the model displayed in the model area and the time corresponding to the image displayed in the image area.A substrate transport system.

8. The substrate transfer system according to claim 7, The information of the display object in the model area and the image area can be reproduced in a synchronized state with each other; A substrate transport system, wherein in the graph area, the time figure moves in synchronization with the reproduction of the information to be displayed.

9. A robot that holds and transports the substrate; a camera for photographing the substrate held by the robot; Equipped with The robot comprises: A robot arm including a plurality of link bodies; a robot hand fixed to one of the plurality of link bodies and holding the substrate; having A substrate transport method in a substrate transport system, wherein the camera is fixed to the link body to which the robot hand is fixed, an imaging step of imaging the robot hand with the camera so that the substrate is included in the image while the robot hand holds and transports the substrate; a display step of displaying the image obtained in the photographing step on a display; A substrate transport method comprising:

Images