Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that are capable of preventing occurrence of sheet peeling defects by reliably attaching a peeling adhesive member to an adhesive sheet having an uneven surface.SOLUTION: A sheet peeling device includes sticking means 10 that presses and sticks a peeling adhesive member PS to the surface ASA of an adhesive sheet AS stuck to an adherend surface WKC of an adherend WK, and peeling means 20 that applies tension to the peeling adhesive member PS stuck to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK. The adherend WK has the adherend surface WKC having an uneven shape, and the stick means 10 presses and sticks the peeling adhesive member PS to the adhesive sheet AS by a pressing surface 15C corresponding to a shape of the surface ASA of the adhesive sheet AS which is unevenly shaped due to being stuck to the adherend surface WKC.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet peeling device and a sheet peeling method. [Background technology]

[0002] 2. Description of the Related Art Sheet peeling devices that peel off adhesive sheets from adherends are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2009-277864 A Summary of the Invention [Problem to be solved by the invention]

[0004] The sheet peeling device 10 (sheet peeling device) described in Patent Document 1 is intended to peel off an adhesive sheet S attached to a flat adherend surface, so for example, when a peeling sheet PS (peeling adhesive member) is pressed and attached to an adhesive sheet S (adhesive sheet) having an uneven surface due to being attached to an uneven adherend surface with a press head 34 (pressing means), the peeling adhesive member is only adhered to the adhesive sheet in a part of the area pressed by the press member, so the peeling adhesive member cannot be reliably attached to the adhesive sheet. Therefore, when peeling the adhesive sheet from the wafer W (adherend), a sheet peeling failure occurs in which the peeling adhesive member peels off from the adhesive sheet.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method that can reliably attach a peeling adhesive member to an adhesive sheet having an uneven surface, thereby preventing the occurrence of sheet peeling failure. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, the peeling adhesive member is pressed and affixed to the adhesive sheet with a pressing surface that corresponds to the shape of the surface of the adhesive sheet, which has an uneven shape due to being affixed to the adherend surface, so that the peeling adhesive member can be reliably affixed to the adhesive sheet having an uneven surface, preventing problems in peeling the sheet from occurring. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1F are explanatory views of a sheet peeling device according to an embodiment of the present invention and explanatory views of the operation of the device, and FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the direction of the arrow VD parallel to the Y-axis is used as the reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction.

[0010] The sheet peeling apparatus EA which carries out the sheet peeling method of the present invention comprises an attachment means 10 which performs an attachment step of pressing and attaching a release sheet PS as a peeling adhesive member to the surface ASA of an adhesive sheet AS which is affixed to the outer peripheral surface WKE as the adherend surface of an adherend WK, a peeling means 20 which performs a peeling step of applying tension to the release sheet PS affixed to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK, an attachment removal means 30 which performs an attachment removal step of removing attachments (not shown) adhering to the adhesive sheet portion to which the release sheet PS is affixed, and an energy application means 40 which performs an energy application step of applying heat as a predetermined energy to the release sheet PS. In this embodiment, the adherend WK has a circular shape centered on the adherend center WKC, and the outer circumferential surface WKE has an uneven shape rather than a flat shape. In addition, the uneven shape of the outer peripheral surface WKE is made into a three-dimensional curved surface by rounding the outer edge of the outer peripheral surface WKE (the outer edge corners of the adherend WK), as shown in Figure 1 (D). It should be noted that a three-dimensional curved surface is a surface shape that cannot be achieved by transforming a plane.

[0011] The sticking means 10 includes a support member 11 that directly or indirectly supports each of the components constituting the sticking means 10, a support roller 12 that supports a strip-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a sheet support base 14 that is supported by a slide shaft 14B that can slide on a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, and a sheet support base 14 that is supported by an output shaft 15B of a linear motor 15A as a driving device via an energy applying means 40 and has an uneven shape by being stuck to the outer peripheral surface WKE. The device comprises a pressing member 15 having a pressing surface 15C corresponding to the shape of the surface ASA of the adhesive sheet AS, a cutter blade 16 as cutting means supported by an output shaft 16B of a linear motor 16A as a driving device, a receiving member 17 supported by a slider 17B of a linear motor 17A as a driving device, and a pressing member 18 attached to an output shaft 18B of a rotary motor 18A as a driving device supported by the receiving member 17, and the adhesive sheet AS is held via the release sheet PS by pressing the release sheet PS against the adhesive sheet AS with the pressing surface 15C to adhere it. The pressing surface 15C in this embodiment has a shape corresponding to the shape of the surface ASA of the adhesive sheet AS, which is a three-dimensional curved surface when attached to the outer peripheral surface WKE. That is, the pressing surface 15C is a three-dimensional curved surface in which the shape when viewed in the Y-axis direction is a concave arc shape as shown in Fig. 1(D) and the shape when viewed in the Z-axis direction is also a concave arc shape as shown in Fig. 1(E). This allows the pressing member 15 to press and attach the release sheet PS to the adhesive sheet AS so as to follow the shape of the surface ASA of the adhesive sheet AS attached to the outer peripheral surface WKE of the circular adherend WK with R-chamfering. The release sheet PS of this embodiment is a heat-sensitive adhesive sheet whose adhesive strength improves when heat is applied as a predetermined energy.

[0012] The peeling means 20 includes a linear motor 21 as a driving device, a rotary motor 22 as a driving device supported by a slider 21A of the linear motor 21, a support table 23 supported by an output shaft 22A of the rotary motor 22 and having a support surface 23A that can be adsorbed and held by a pressure reduction means (holding means) not shown such as a pressure reduction pump or a vacuum ejector, and an edge detector 24 composed of an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and capable of detecting the peel start edge AS1 of the adhesive sheet AS. In this embodiment, the support table 23 is configured to rotate by the rotary motor 22 about a table center 23C.

[0013] The adhesion removal means 30 includes an applicator 31 such as a pump or sprayer that applies a detergent CS such as water or a solvent (see Figure 1 (B)) to the adhesive sheet AS affixed to the outer peripheral surface WKE of the adherend WK, and a remover 32 that removes adhesions adhered to the surface ASA of the adhesive sheet AS affixed to the outer peripheral surface WKE of the adherend WK. The remover 32 includes a linear motor 32A as a drive device, and a wiping roller 32D as a remover member that is supported by an output shaft 32B of the linear motor 32A and can be rotated by a rotary motor 32C as a drive device. The wiping roller 32D in this embodiment is made of a water-absorbent material such as cloth or sponge.

[0014] The energy application means 40 includes a heating device 41 such as a coil heater or the heating side of a heat pipe.

[0015] The operation of the sheet peeling apparatus EA will now be described. First, a user of the sheet peeling device EA (hereinafter simply referred to as "user") inputs a signal to start automatic operation to the sheet peeling device EA, in which each member is arranged at the initial position shown by the solid line in Fig. 1(A), via an operation means (not shown) such as an operation panel, a personal computer, etc. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK, which has an adhesive sheet AS affixed to its outer peripheral surface WKE, on the support table 23 so that the adherend center WKC of the adherend WK overlaps with the table center 23C, as shown in Fig. 1(A), and the peeling means 20 drives a pressure reducing means (not shown) to start suction and holding on the support surface 23A.

[0016] Thereafter, the peeling means 20 drives the rotary motor 22 and the edge detector 24, rotates the adherend WK in the direction of the arrow RD1 as shown in Fig. 1(B), detects the peel start edge AS1 of the adhesive sheet AS with the edge detector 24, and stops driving the rotary motor 22 with the rear part of the peel start edge AS1 in the rotation direction positioned to the right of the pressing member 15 based on the detection result of the edge detector 24 (see Figs. 1(C) and (E)). At this time, based on the detection result of the edge detector 24, the deposit removing means 30 drives the applicator 31, applies detergent CS to the rear part of the peel start edge AS1 in the rotation direction as shown in Fig. 1(B), and drives the linear motor 32A and the rotary motor 32C to press the wiping roller 32D against the surface ASA of the adhesive sheet AS and rotate the wiping roller 32D in the direction of the arrow RD2. As a result, even if deposits such as plating solution or grinding powder adhere to the adhesive sheet AS in a previous process such as a plating process or a grinding process, the deposits are removed from the rear part in the rotation direction of the peel start edge AS1, so that it is possible to prevent the adhesive strength of the release sheet PS to the adhesive sheet AS from being reduced by the deposits. When the application and removal of the detergent CS to the adhesive sheet portion to which the release sheet PS is attached is completed, the deposit removing means 30 stops driving the applicator 31 and the rotary motor 32C, and then drives the linear motor 32A to return the wiping roller 32D to its initial position.

[0017] When the adherend WK starts to rotate in the direction of the arrow RD1, the attaching means 10 drives the linear motor 17A, and as shown in Fig. 1(B), the receiving member 17 is pressed against the sheet support base 14, and the sheet support base 14 is moved backward together with the receiving member 17, and the leading end of the release sheet PS is positioned on the receiving member 17. Next, the attaching means 10 drives the rotating motor 18A, and as shown by the two-dot chain line in Fig. 1(B), the pressing member 18 and the receiving member 17 sandwich and hold the leading end of the release sheet PS, and then drives the linear motor 17A, and as shown in Fig. 1(C), the receiving member 17 is returned to its initial position, and a predetermined length of the release sheet PS is pulled out.

[0018] Then, the sticking means 10 drives the linear motor 15A, and as shown by the two-dot chain line in Fig. 1(C), the pressing member 15 presses the release sheet PS to the rear part of the peel start edge AS1 in the rotation direction, and then the energy applying means 40 drives the heating device 41 to heat the release sheet PS and stick the release sheet PS to the adhesive sheet AS. At this time, as shown in Figs. 1(D) and (E), the release sheet PS is pressed by the pressing surface 15C corresponding to the shape of the surface ASA of the adhesive sheet AS, which is a three-dimensional curved surface, so that the entire area pressed by the pressing surface 15C is adhered to the adhesive sheet AS. Next, the sticking means 10 drives the linear motor 16A, and as shown by the two-dot chain line in Fig. 1(C), the cutter blade 16 enters the recessed groove 14D to cut the release sheet PS, and then drives the linear motors 15A and 16A to return the pressing member 15 and the cutter blade 16 to their initial positions.

[0019] Thereafter, the peeling means 20 drives the linear motor 21 and the rotary motor 22, and rotates the adherend WK in the direction of the arrow RD1 as shown in FIG. 1(F), while moving the adherend WK to the right. This applies tension to the adhesive sheet AS via the peeling sheet PS, and the adhesive sheet AS is peeled off from the adherend WK. At this time, since the entire area of ​​the peeling sheet PS pressed by the pressing member 15 is adhered to the adhesive sheet AS, the peeling sheet PS does not peel off from the adhesive sheet AS due to insufficient adhesive force to the adhesive sheet AS. In addition, since the peeling sheet PS is adhered to the adhesive sheet AS in a state where the adhering matter is removed from the rear part of the peeling start edge AS1 in the rotation direction, the peeling sheet PS does not peel off from the adhesive sheet AS due to insufficient adhesive force to the adhesive sheet AS.

[0020] Next, as shown by the two-dot chain line in Fig. 1(F), when the entire adhesive sheet AS is peeled off from the adherend WK and the user or the conveying means (not shown) holds the adhesive sheet AS, the peeling means 20 stops driving the linear motor 21 and the rotating motor 22. Then, the sticking means 10 drives the rotating motor 18A to return the pressing member 18 to its initial position, and the user or the conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Next, the peeling means 20 stops driving the decompression means (not shown) and releases the suction and holding on the support surface 23A, and the user or the conveying means (not shown) conveys the adherend WK to the next process, after which the peeling means 20 drives the linear motor 21 and returns the support table 23 to its initial position, and the same operations as above are repeated thereafter.

[0021] According to the embodiment described above, the release sheet PS is pressed and attached to the adhesive sheet AS with the pressing surface 15C which corresponds to the shape of the surface ASA of the adhesive sheet AS which has an uneven shape due to being attached to the outer peripheral surface WKE, so that the release sheet PS can be reliably attached to the adhesive sheet AS having an uneven surface ASA, preventing problems with sheet peeling.

[0022] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are not limited at all to the components and steps of a mere embodiment shown in the above embodiment. For example, the peeling means may be anything that can peel the adhesive sheet from the adherend by applying tension to the peeling adhesive member attached to the adhesive sheet, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0023] The sticking means 10 may cut the release sheet PS after peeling the adhesive sheet AS from the adherend WK, or may cut the release sheet PS before sticking the release sheet PS to the adherend WK, or may use a single release sheet PS, or may not cut the release sheet PS, or may not have the cutting means 16, or may use a gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), or the like, instead of or in combination with the receiving member 17, the rotating motor 18A and the pressing member 18. The release sheet PS may be held by a mechanism such as a wire rod, adhesive tape, magnetic force, Bernoulli suction, suction, driving equipment, etc., or the release sheet PS may be affixed to an adhesive sheet AS affixed to the outer peripheral surface WKE of the adherend WK by a driving device such as an articulated robot, or the release sheet PS may be affixed to the front part of the rotation direction of the peel starting edge AS1. Depending on where the peel starting edge AS1 is to be, the position at which to affix the release sheet PS can be determined, and the direction in which the peeling means 20 rotates the adherend WK can be determined. The pressing member 15 may be supported by the output shaft 15B of the linear motor 15A without the energy applying means 40 being interposed therebetween. The pressing surface 15C may be a three-dimensional curved surface having a convex arc shape when viewed in one axis direction (e.g., Y axis direction) and a concave arc shape when viewed in an orthogonal axis direction (e.g., Z axis direction) perpendicular to the one axis direction, as shown in Fig. 1(G), or a three-dimensional curved surface having a convex shape when viewed in one axis direction and a convex shape when viewed in an orthogonal axis direction, as shown in Fig. 1(H), or any other three-dimensional curved surface. Note that a curved surface refers to a surface that is not flat, and a composite surface consisting of multiple flat surfaces is also considered to be a curved surface. The pressing surface 15C may be, for example, a two-dimensional curved surface having a concave shape as viewed in one axis direction and a linear shape as viewed in an orthogonal axis direction as shown in Fig. 1(I), or a two-dimensional curved surface having a linear shape as viewed in one axis direction and a concave-convex shape as viewed in an orthogonal axis direction as shown in Fig. 1(J), or any other two-dimensional curved surface. Note that a two-dimensional curved surface is a surface shape that can be established by deforming a plane. The pressing surface 15C may have any shape when viewed in one axial direction or in the orthogonal axial direction, such as a concave arc shape, a convex arc shape, a V shape, an inverted V shape, a U shape, an inverted U shape, an uneven rectangular shape, a straight shape, or any other shape, and may have any surface shape as long as it corresponds to the shape of the surface ASA of the adhesive sheet AS, which has an uneven shape.

[0024] The peeling means 20 may employ a support table 23 that cannot be adsorbed and held on the support surface 23A, or may hold the adherend WK by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, or the like, or may have an upper pressing member that holds the adherend WK by sandwiching it between the support table 23, and in the embodiment, while the attachment means 10 is stationary, the adherend WK is separated from the attachment means 10 and the adherend WK is rotated to peel off the adhesive sheet AS from the adherend WK, but while the adherend WK is stationary, the attachment means 10 is separated from the adherend WK and the attachment means 10 is rotated to peel off the adhesive sheet AS from the adherend WK, the attachment means 10 may be rotated around the adherend WK to peel off the adhesive sheet AS from the adherend WK, or the attachment means 10 may be moved to the left while moving the adherend WK away from the attachment means 10 and rotating the adherend WK to peel off the adhesive sheet AS from the adherend WK, or the attachment means 10 may be moved to the left and rotated around the adherend WK while moving the adherend WK away from the attachment means 10 to peel off the adhesive sheet AS from the adherend WK, or instead of the linear motor 21, the rotary motor 22 and the support table 23, a driving device such as an articulated robot or other device may be used to move the attachment means 10 and the adherend WK relative to each other to peel off the adhesive sheet AS from the adherend WK.

[0025] The adhesion removing means 30 may be only the applicator 31, or only the remover 32, or it may not be provided in the sheet peeling apparatus EA of the present invention. Alternatively, instead of at least one of the applicator 31 and the remover 32, or in combination with both, a spraying device such as an air pump or blower that blows away adhesions attached to the adhesive sheet AS, or a removal device such as a brush, file or blade that scrapes or scrapes off the adhesions, may be provided. Any device capable of removing adhesions attached to the adhesive sheet portion to which the release sheet PS is attached may be used. For example, a configuration may be adopted in which the detergent CS is impregnated into an absorbent member and the adhesive sheet portion to which the release sheet PS is attached is scrubbed, or a configuration may be adopted in which the adhesive sheet portion to which the release sheet PS is attached is scrubbed without impregnating an absorbent member or a non-absorbent member with detergent CS. For example, a configuration may be used in which adhesions are removed from the entire surface ASA of the adhesive sheet AS, or a configuration may be used in which adhesions are removed only from the adhesive sheet portion to which the release sheet PS is affixed. The applicator 31 may use any type of detergent CS, including neutral detergents, acidic detergents, alkaline detergents, solvents such as alcohol, thinner, and benzine, aqueous detergents, semi-aqueous detergents, hydrocarbon-based detergents, alcohol-based detergents, fluorine-based detergents, bromine-based detergents, and chlorine-based detergents, and may apply the detergent CS to the substrate WK by spraying, dropping, or impregnating an absorbent member with the detergent CS and transferring it. The removal device 32 may not have at least one of the linear motor 32A and the rotary motor 32C, or may use a belt-shaped or sheet-shaped absorbing member as the removal member and employ a driving device to rotate or reciprocate the removal member to remove the adhesions, or may not have a driving device to rotate, rotate or reciprocate the removal member, the removal member may not be water-absorbent, an elastically deformable removal member may be employed, or a non-elastically deformable removal member may be employed, or instead of or in combination with the wiping roller 32, the adhesions may be removed with, for example, a cloth, paper, blade, etc. having a linear shape or a shape corresponding to the cross-sectional shape of the outer peripheral surface WKE, or the adhesions may be removed by blowing gas.

[0026] The energy applying means 40 may be any type of energy that applies the specified energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, and may apply any type of energy as long as it is capable of improving the adhesive strength of the peeling adhesive member taking into account the characteristics, properties, qualities, material, composition and configuration of the peeling adhesive member, and may be provided at a location other than that shown in the above embodiment, and may be provided anywhere as long as it is a position where the specified energy can be applied to the peeling adhesive member, and may or may not be provided in the sheet peeling apparatus EA of the present invention.

[0027] The adhesive sheet AS may be attached to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WKE overlap, or such that one edge and the other edge are in contact with each other, or such that one edge and the other edge are spaced apart. The adhesive sheet AS may have any shape in plan view, such as a straight line, a curved shape, a bent shape, or the like, and may have a bonding strength that is reduced by a predetermined second energy. For example, the adhesive sheet AS may be attached to the adherend WK such that one edge and the other edge are overlapped with each other in the circumferential direction of the outer peripheral surface WKE, or such that one edge and the other edge are spaced apart from each other. The adhesive strength may be reduced by any type of energy, such as electromagnetic waves such as visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air.In this case, the sheet peeling device EA may employ any type of second energy application means for applying a predetermined second energy to the adhesive sheet AS, such as one that applies electromagnetic waves, one that applies a heating medium, or one that applies a cooling medium, and the second energy application means can be determined arbitrarily taking into consideration the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS. The surface shape of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK may be the same as or different from the shape of the outer peripheral surface WKE of the adherend WK.

[0028] The peeling adhesive member may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet, or may be, other than an adhesive sheet, for example, an adhesive tape, a pressure-sensitive adhesive sheet, or a pressure-sensitive adhesive tape in which an adhesive medium such as an adhesive or a pressure-sensitive adhesive is laminated onto a substrate such as metal, resin, rubber, etc., or may be one whose adhesive strength is improved by the application of any type of energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, or may be one whose adhesive strength is not improved by the application of a specified energy.

[0029] The adhesion surface having an uneven shape may be a surface having so-called C-chamfering in which corners (edges) are linearly removed, or a surface having so-called light chamfering, or, for example, a three-dimensional curved surface having a convex arc shape when viewed in one axial direction and a concave arc shape when viewed in the orthogonal axial direction, or a three-dimensional curved surface having a concave rectangular shape when viewed in one axial direction and an uneven shape when viewed in the orthogonal axial direction, or a two-dimensional curved surface having a concave arc shape when viewed in one axial direction and a linear shape when viewed in the orthogonal axial direction, or a two-dimensional curved surface having a linear shape when viewed in one axial direction and a convex shape when viewed in the orthogonal axial direction, or any other uneven surface may be used. The adherend surface may be any surface of the adherend WK, such as the outer peripheral surface WKE of the adherend WK, one side or the other side of the adherend WK, or the like. The previous process or the next process may be any process, such as a plating process, a cleaning process, an etching process, a dipping process, a cutting process, an oxide film formation process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a painting process, a lamination process, a sheet bonding process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc. The deposits may be any type of substance depending on the preceding or following process, such as liquids, such as plating solution used in a plating process or alcohol used in a cleaning process, gases, such as oxygen gas used in an oxide film formation process or ammonia gas used in a nitriding process, or solids, such as blasting materials used in a sandblasting process or abrasives used in a polishing process.

[0030] The material, type, shape, etc. of the adhesive sheet AS, peeling adhesive member, and adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, peeling adhesive member, and adherend WK may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the adhesive sheet AS and peeling adhesive member may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS or peeling adhesive member is used, the adhesive sheet AS or peeling adhesive member may be bonded by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS or peeling adhesive member. In addition, such adhesive sheets AS and peelable adhesive members may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer or a cover layer provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wooden board or a resin, or a composite formed of two or more of these, and may be a member or an article of any shape. The adhesive sheet AS may be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0031] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0032] In the above embodiment, some object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A, that is, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. If the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a non-deformable member. Other members such as a rotating or non-rotating shaft or blade may be used instead of the roller. When a pressing means or pressing member such as a pressing roller or a pressing head that presses an object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-mentioned examples. The peeling means may be made of a deformable material such as rubber, resin, sponge, etc., or may be made of a non-deformable material such as metal or glass. When a peeling means or peeling member such as a peeling plate or peeling roller is used to peel off the peeled object, a plate-shaped member, a round bar, a roller, etc. may be used instead of or in combination with the above examples. The peeling means may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or supporting (holding) member that supports (holds) the supported member (held member), etc. is used. In this case, a configuration may be adopted in which the supported member is supported (held) by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc., or in the case where a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting means that use a cutter blade, laser cutter, ion beam, fire, heat, water pressure, electric heating wire, spraying of gas or liquid, etc., may be used instead of or in combination with the above examples,The cutting object may be moved by combining an appropriate driving device, and when a biasing means is used, the biasing means may be made of a spring, rubber, resin, a driving device, or the like. [Explanation of symbols]

[0033] EA…Sheet peeling device 10...Attachment means 15C…Pressing surface 20...Removal means 40...Energy imparting means AS…adhesive sheet ASA…Surface PS…Removal sheet (adhesive material for removal) WK...Adherend WKE…Outer surface (adhered surface)

Claims

1. an attachment means for pressing and attaching a peeling adhesive member to a surface of an adhesive sheet attached to a surface of an adherend; a peeling means for applying tension to the peeling adhesive member attached to the adhesive sheet to peel the adhesive sheet from the adherend, The adherend has an uneven surface, The sheet peeling device is characterized in that the attachment means presses and attaches the peeling adhesive member to the adhesive sheet with a pressing surface that corresponds to the shape of the surface of the adhesive sheet, which has an uneven shape due to being attached to the adherend surface.

2. The uneven shape of the adherend surface is a three-dimensional curved surface, 2. The sheet peeling device according to claim 1, wherein the pressing surface has a shape corresponding to the shape of the surface of the adhesive sheet, which becomes a three-dimensional curved surface when attached to the adherend surface.

3. The adhesive member for peeling has an adhesive strength that is improved by application of a predetermined energy thereto, 3. The sheet peeling device according to claim 1, further comprising an energy applying means for applying the predetermined energy to the peeling adhesive member.

4. an attachment step of pressing and attaching a peeling adhesive member to a surface of an adhesive sheet attached to an adherend surface of an adherend; a peeling step of peeling the adhesive sheet from the adherend by applying tension to the peeling adhesive member attached to the adhesive sheet; The adherend has an uneven surface, The sheet peeling method is characterized in that in the attachment step, the peeling adhesive member is pressed against the adhesive sheet with a pressing surface that corresponds to the shape of the surface of the adhesive sheet, which has an uneven shape due to being attached to the adherend surface.

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