Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that are capable of preventing peeling control of an adhesive sheet from becoming complicated.SOLUTION: A sheet peeling device includes sheet holding means 10 that holds an adhesive sheet AS stuck to an outer peripheral surface WKE of an adherend WK, and peeling means 20 that applies tension to the adhesive sheet AS held by the sheet holding means 10 to peel the adhesive sheet AS from the adherend WK. The peeling means 20 rotates the sheet holding means 10 and the adherend WK relatively to each other such that a position of a peel boundary portion PE of the adhesive sheet AS to be peeled from the adherend WK falls within a predetermined area AR while bringing contact members 22, 24 into contact with the adhesive sheet AS located between the sheet holding means 10 and the adherend WK and applying tension to the adhesive sheet AS.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet peeling device and a sheet peeling method. [Background technology]

[0002] 2. Description of the Related Art A sheet peeling device is known which peels off an adhesive sheet attached to the outer peripheral surface of an adherend from the adherend (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2022-30877 Summary of the Invention [Problem to be solved by the invention]

[0004] In the tape peeling system 70 (sheet peeling device) described in Patent Document 1, a peeling operation is performed to peel the adhesive sheet from the wafer W (adherend) so that the peel angle between the protective tape 27 (adhesive sheet) peeled from the wafer W (adherend) and the tangent direction of the adherend is 90 degrees, i.e., so that the peel boundary of the adhesive sheet peeled from the adherend remains at one point. However, to perform such a peeling operation, it is not enough to simply perform synchronization control such as synchronizing the retraction speed of the chucking mechanism 93 with the rotational speed of the adherend, or synchronizing the speed at which the adhesive sheet is fed by the tape feed roller 95 with the rotational speed of the adherend; precise synchronization control must be performed taking into consideration the elongation of the adhesive sheet being peeled and the ease with which the adhesive sheet can be peeled from the adherend, etc., which results in the inconvenience of complicated control of peeling of the adhesive sheet.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method that can prevent the control of peeling of an adhesive sheet from becoming complicated. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, the sheet holding means and the adherend are rotated relative to each other so that the position of the peel boundary of the adhesive sheet being peeled off from the adherend falls within a specified region, thereby eliminating the need for precise synchronization control such as peeling the adhesive sheet from the adherend while keeping the peel boundary at one point, and preventing the adhesive sheet peel control from becoming complicated. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1E are explanatory views of a sheet peeling device according to an embodiment of the present invention and an explanatory view of the operation of the device, and FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the direction of the arrow VD parallel to the Y-axis is used as the reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction.

[0010] The sheet peeling apparatus EA which carries out the sheet peeling method of the present invention comprises sheet holding means 10 which performs a sheet holding step of holding an adhesive sheet AS affixed to the outer peripheral surface WKE of an adherend WK, peeling means 20 which performs a peeling step of applying tension to the adhesive sheet AS held by the sheet holding means 10 and peeling the adhesive sheet AS from the adherend WK, peel boundary detection means 30 which performs a peel boundary detection step of detecting the position of the peel boundary PE (see Figures 1 (D) and (E)), and energy application means 40 which performs an energy application step of applying heat as a predetermined energy to the peeling sheet PS. In this embodiment, the adherend WK has a circular shape centered on the adherend center WKC.

[0011] The sheet holding means 10 includes a support member 11 that directly or indirectly supports each member constituting the sheet holding means 10, a support roller 12 that supports a release sheet PS as a peeling adhesive member, a guide roller 13 that guides the release sheet PS, a sheet support base 14 that is supported by a slide shaft 14B that can slide on a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, and a drive unit 15B that is supported by an output shaft 15B of a linear motor 15A as a driving device via an energy applying means 40 and connected to the output shaft 15B of the linear motor 15A as a driving device. The cutting device comprises a pressing member 15 having a pressing surface 15C for pressing the adhesive sheet AS, a cutter blade 16 as cutting means supported by an output shaft 16B of a linear motor 16A as a driving device, a receiving member 17 supported by a slider 17B of a linear motor 17A as a driving device, and a holding member 18 attached to an output shaft 18B of a rotary motor 18A as a driving device supported by the receiving member 17. The adhesive sheet AS is held via the release sheet PS by pressing the release sheet PS against the adhesive sheet AS with the pressing surface 15C to adhere it. The release sheet PS of this embodiment is a heat-sensitive adhesive sheet whose adhesive strength improves when heat is applied as a predetermined energy.

[0012] The peeling means 20 includes a rotary motor 21 as a driving device, a driving roller 22 as a contact member supported by an output shaft 21A of the rotary motor 21, a linear motor 23 as a driving device, a pinch roller 24 as a contact member rotatably supported by an output shaft 23A of the linear motor 23, a rotary motor 25 as a driving device, a support table 26 supported by an output shaft 25A of the rotary motor 25 and having a support surface 26A that can be attracted and held by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector, and an imaging means such as a camera or a projector. and an edge detector 27 which is composed of various sensors such as a step, an optical sensor, an ultrasonic sensor, etc. and is capable of detecting the peel start edge AS1 of the adhesive sheet AS. A drive roller 22 and a pinch roller 24 are abutted against the adhesive sheet AS located between the sheet holding means 10 and the adherend WK to apply tension to the adhesive sheet AS, while rotating the sheet holding means 10 and the adherend WK relative to each other so that the position of the peel boundary portion PE of the adhesive sheet AS peeled off from the adherend WK falls within a predetermined area AR (see Figures 1 (D) and (E)). In this embodiment, the support table 26 is configured to rotate around a table center 26C by a rotary motor 25. Further, the peeling means 20 of this embodiment is configured to rotate the sheet holding means 10 and the adherend WK relative to each other based on the detection result of the peel boundary detection means 30. Furthermore, the specified area AR in this embodiment is between position PP1, where the peel angle PA of the adhesive sheet AS peeled off from the outer peripheral surface WKE is 0 degrees, and position PP2, where the peel angle PA of the adhesive sheet AS is 180 degrees, as shown in FIG. 1(E). The peel angle PA in the present invention refers to the angle between a tangent TL to the outer peripheral surface WKE passing through the peel boundary PE and the adhesive surface ASB of the adhesive sheet AS peeled off from the outer peripheral surface WKE, as shown in Figure 1(E).

[0013] The peeling boundary detection means 30 includes a detector 31 including an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and is disposed at the upper left of the support table 26. The peeling boundary detection means 30 is not shown in any diagrams except for FIG. 1(A).

[0014] The energy application means 40 includes a heating device 41 such as a coil heater or the heating side of a heat pipe.

[0015] The operation of the sheet peeling device EA will be described. First, the user of the sheet peeling device EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer to the sheet peeling device EA, in which each member is arranged at the initial position shown by the solid line in Fig. 1(A). Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK, which has an adhesive sheet AS attached to its outer peripheral surface WKE, on the support table 26 so that the adherend center WKC of the adherend WK overlaps with the table center 26C, as shown in Fig. 1(A). The peeling means 20 then drives a pressure reducing means (not shown) to start suction and holding on the support surface 26A.

[0016] Thereafter, the peeling means 20 drives the rotary motor 25 and the edge detector 27, rotates the adherend WK in the direction of the arrow RD1 as shown in Fig. 1(B), detects the peel start edge AS1 of the adhesive sheet AS with the edge detector 27, and based on the detection result of the edge detector 27, stops driving the rotary motor 25 with the rear part of the peel start edge AS1 in the rotation direction positioned to the right of the pressing member 15 (see Fig. 1(C)). Also, the sheet holding means 10 drives the linear motor 17A, presses the receiving member 17 against the sheet support base 14 as shown in Fig. 1(B), and moves the sheet support base 14 backward together with the receiving member 17, so that the leading end of the peeling sheet PS is positioned on the receiving member 17. Next, the sheet holding means 10 drives the rotary motor 18A, and as shown by the dotted line in Figure 1(B), the pressing member 18 and the receiving member 17 clamp and hold the tip of the peel-off sheet PS, and then drives the linear motor 17A, and as shown in Figure 1(C), returns the receiving member 17 to its initial position, and pulls out a predetermined length of the peel-off sheet PS.

[0017] Then, the sheet holding means 10 drives the linear motor 15A, and as shown by the two-dot chain line in Fig. 1(C), the pressing member 15 presses the release sheet PS to the rear part of the peeling start edge AS1 in the rotation direction, and then the energy applying means 40 drives the heating device 41 to heat the release sheet PS and attach the release sheet PS to the adhesive sheet AS. Next, the sheet holding means 10 drives the linear motor 16A, and as shown by the two-dot chain line in Fig. 1(C), the cutter blade 16 enters the recessed groove 14D to cut the release sheet PS, and then drives the linear motors 15A and 16A to return the pressing member 15 and the cutter blade 16 to their initial positions. Thereafter, the peeling means 20 drives the linear motor 23, and the release sheet PS is sandwiched between the drive roller 22 and the pinch roller 24 (see Fig. 1(D)). Next, the peel boundary detection means 30 drives the detector 31, and the peeling means 20 drives the rotary motor 21, and as shown in Figures 1(D) and (E), the drive roller 22 rotates in the direction of the arrow RD2 to apply tension to the adhesive sheet AS located between the sheet holding means 10 and the adherend WK, and peels the adhesive sheet AS from the adherend WK. At this time, the peeling means 20 drives the rotary motor 25, and based on the detection result of the peel boundary detection means 30, rotates the adherend WK in the direction of the arrow RD1 or the direction opposite to the arrow RD1 so that the position of the peel boundary PE falls within a predetermined area AR.

[0018] Then, when the entire adhesive sheet AS is peeled off from the adherend WK and the adhesive sheet AS is held by a user or a conveying means (not shown), the peeling means 20 stops driving the rotary motors 21, 25. Next, the sheet holding means 10 and the peeling means 20 drive the rotary motor 18A and the linear motor 23 to return the presser member 18 and the pinch roller 24 to their initial positions, and the user or the conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Thereafter, the peeling means 20 stops driving the decompression means (not shown) and releases the suction and holding on the support surface 26A, and the user or the conveying means (not shown) conveys the adherend WK to the next process, and the same operations as above are repeated thereafter.

[0019] According to the embodiment described above, the sheet holding means 10 and the substrate WK are rotated relative to each other so that the position of the peel boundary PE of the adhesive sheet AS being peeled off from the substrate WK falls within a predetermined area AR. This eliminates the need for precise synchronization control such as peeling the adhesive sheet AS from the substrate WK while keeping the peel boundary PE at a single point, thereby preventing the peel control of the adhesive sheet AS from becoming complicated.

[0020] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a mere embodiment shown in the above embodiment. For example, the sheet-holding means may be anything that can hold an adhesive sheet attached to the outer peripheral surface of an adherend, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0021] The sheet holding means 10 may cut the release sheet PS after peeling the adhesive sheet AS from the adherend WK, or may cut the release sheet PS before attaching the release sheet PS to the adherend WK, or may not cut the release sheet PS, or may have no cutting means 16, or may employ a single release sheet PS, or may use a gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive ... The release sheet PS may be held by using an adhesive sheet, adhesive tape, magnetic force, Bernoulli suction, suction, driving equipment, etc., or the release sheet PS may be affixed to an adhesive sheet AS affixed to the outer peripheral surface WKE of the adherend WK by a driving device such as an articulated robot, or the release sheet PS may be affixed to the front part of the rotational direction of the peel starting edge AS1, and the position at which the release sheet PS is affixed can be determined depending on where the peel starting edge AS1 is to be, and the direction in which the peeling means 20 rotates the adherend WK can be determined. The pressing member 15 may be supported by the output shaft 15B of the linear motor 15A without the energy applying means 40 being interposed therebetween. The pressing surface 15C may have any shape, for example, a concave arc shape, a convex arc shape, a V shape, an inverted V shape, a U shape, an inverted U shape, a concave and convex rectangular shape, a straight line shape, or any other shape. The sheet holding means 10 may hold the adhesive sheet AS without using the peeling sheet PS, and may hold the adhesive sheet AS directly or indirectly, for example, by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc.

[0022] The peeling means 20 may be configured to use the sheet peeling device EA exemplified in the above embodiment, and to apply tension to the adhesive sheet AS by relatively rotating the sheet holding means 10 holding the adhesive sheet AS and the adherend WK, while bringing the drive roller 22 and pinch roller 24 into contact with the adhesive sheet AS located between the sheet holding means 10 and the adherend WK to guide the adhesive sheet AS so that the position of the peel boundary portion PE of the adhesive sheet AS peeled off from the adherend WK falls within a predetermined area AR. A sheet peeling device configured in this way can also achieve the same effect as the sheet peeling device EA shown in the above embodiment. The peeling means 20 may employ a support table 26 that cannot be adsorbed and held on the support surface 26A, or may hold the adherend WK using a gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, or the like, or may have an upper pressing member that holds the adherend WK by clamping it between the support table 26. In the above example, the sheet holding means 10 is not moved to rotate the adherend WK, but is rotated by the rotation of the adherend WK so that the position of the peel boundary PE falls within a predetermined area AR and tension is applied to the adhesive sheet AS, but the sheet holding means 10 may not be rotated by rotation, or may be rotated by the rotation of the adherend WK while the sheet holding means 10 is moved to rotate the adherend WK so that the position of the peel boundary PE falls within a predetermined area AR and tension is applied to the adhesive sheet AS. 1(F), the peeling means 20 may employ, for example, a linear motor 28 as a driving device and a moving roller 29 as a contact member rotatably supported on an output shaft 28A of the linear motor 28, instead of the rotary motor 21, the drive roller 22, the linear motor 23, and the pinch roller 24. In this case, the peeling means 20 drives the linear motor 28, and while bringing the moving roller 29 into contact with the adhesive sheet AS located between the sheet holding means 10 and the adherend WK to apply tension to the adhesive sheet AS, the peeling means 20 drives the rotary motor 25 to rotate the adherend WK in the direction of the arrow RD1 or in the direction opposite to the arrow RD1 so that the position of the peel boundary PE falls within a predetermined area AR. The peeling means 20 may employ, for example, a chuck motor as a contact member and a driving device attached to a working arm at the tip of an articulated robot as a driving device, instead of the rotary motor 21, the driving roller 22, the linear motor 23, and the pinch roller 24. In this case, the peeling means 20 drives the articulated robot and the chuck motor, and while holding (contacting) the adhesive sheet AS located between the sheet holding means 10 and the adherend WK with the chuck motor to apply tension to the adhesive sheet AS, the peeling means 20 drives the rotary motor 25 to rotate the adherend WK in the direction of the arrow RD1 or in the direction opposite to the arrow RD1 so that the position of the peel boundary PE falls within a predetermined area AR. The peeling means 20 may employ any type of contact member, such as a shaft member such as a cylinder or a rectangular column, a plate-like member such as a plate or a blade, or an endless belt rotated by a driving device, a driving roller, and a driven roller.

[0023] The peel boundary detection means 30 may be located below or to the side of the support table 26, or may be located anywhere as long as it is in a position where it can detect the position of the peel boundary PE, and it may or may not be provided in the sheet peeling apparatus EA of the present invention. If it is not provided in the sheet peeling apparatus EA of the present invention, the sheet holding means 10 and the adherend WK may be rotated relative to each other, or an abutting member may be abutted against the adhesive sheet AS to guide the adhesive sheet AS so that the position of the peel boundary PE falls within a specified area AR, taking into consideration empirical values ​​such as the elongation of the adhesive sheet AS to be peeled and the ease of peeling the adhesive sheet AS from the adherend WK.

[0024] The energy applying means 40 may be any type of energy that applies the specified energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, and may apply any type of energy as long as it is capable of improving the adhesive strength of the peeling adhesive member taking into account the characteristics, properties, qualities, material, composition and configuration of the peeling adhesive member, and may be provided at a location other than that shown in the above embodiment, and may be provided anywhere as long as it is a position where the specified energy can be applied to the peeling adhesive member, and may or may not be provided in the sheet peeling apparatus EA of the present invention.

[0025] The adhesive sheet AS may be attached to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WKE overlap, or such that one edge and the other edge are in contact with each other, or such that one edge and the other edge are spaced apart. The adhesive sheet AS may have any shape in plan view, such as a straight line, a curved shape, a bent shape, or the like, and may have a bonding strength that is reduced by a predetermined second energy. For example, the adhesive sheet AS may be attached to the adherend WK such that one edge and the other edge are overlapped with each other in the circumferential direction of the outer peripheral surface WKE, or such that one edge and the other edge are spaced apart from each other. The adhesive strength may be reduced by any type of energy, such as electromagnetic waves such as visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air.In this case, the sheet peeling device EA may employ any type of second energy application means for applying a predetermined second energy to the adhesive sheet AS, such as one that applies electromagnetic waves, one that applies a heating medium, or one that applies a cooling medium, and the second energy application means can be determined arbitrarily taking into consideration the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS. The surface shape of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK may be the same as or different from the shape of the outer peripheral surface WKE of the adherend WK.

[0026] The peeling adhesive member may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet, or may be, other than an adhesive sheet, for example, an adhesive tape, a pressure-sensitive adhesive sheet, or a pressure-sensitive adhesive tape in which an adhesive medium such as an adhesive or a pressure-sensitive adhesive is laminated onto a substrate such as metal, resin, rubber, etc., or may be one whose adhesive strength is improved by the application of any type of energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, or may be one whose adhesive strength is not improved by the application of a specified energy. The specified area AR may be, for example, between the position where the peel angle PA is 0 degrees and the position where the peel angle PA is 90 degrees, or between the position where the peel angle PA is 30 degrees and the position where the peel angle PA is 65 degrees, or between the position where the peel angle PA is 75 degrees and the position where the peel angle PA is 175 degrees, or any range is acceptable, but considering the distribution of the tension applied to peel the adhesive sheet AS from the substrate WK, it is particularly preferable for the peel angle PA to be between the position where the peel angle PA is 90 degrees and the position where the peel angle PA is 180 degrees.

[0027] The next process may be any process, such as a plating process, a cleaning process, an etching process, a dipping process, a cutting process, an oxide film formation process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a painting process, a lamination process, a sheet bonding process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc.

[0028] The material, type, shape, etc. of the adhesive sheet AS, peeling adhesive member, and adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, peeling adhesive member, and adherend WK may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the adhesive sheet AS and peeling adhesive member may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS or peeling adhesive member is used, the adhesive sheet AS or peeling adhesive member may be bonded by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS or peeling adhesive member. In addition, such adhesive sheets AS and peelable adhesive members may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer or a cover layer provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wooden board or a resin, or a composite formed of two or more of these, and may be a member or an article of any shape. The adhesive sheet AS may be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0029] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, or electric equipment, actuators, etc., which may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0030] In the above embodiment, some object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A, that is, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. If the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a non-deformable member. Other members such as a rotating or non-rotating shaft or blade may be used instead of the roller. When a pressing means or pressing member such as a pressing roller or a pressing head that presses an object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-mentioned examples. The peeling means may be made of a deformable material such as rubber, resin, sponge, etc., or may be made of a non-deformable material such as metal or glass. When a peeling means or peeling member such as a peeling plate or peeling roller is used to peel off the peeled object, a plate-shaped member, a round bar, a roller, etc. may be used instead of or in combination with the above examples. The peeling means may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or supporting (holding) member that supports (holds) the supported member (held member), etc. is used. In this case, a configuration may be adopted in which the supported member is supported (held) by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc., or in the case where a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting means that use a cutter blade, laser cutter, ion beam, fire, heat, water pressure, electric heating wire, spraying of gas or liquid, etc., may be used instead of or in combination with the above examples,The cutting object may be moved by combining an appropriate driving device, and when a biasing means is used, the biasing means may be made of a spring, rubber, resin, a driving device, or the like. [Explanation of symbols]

[0031] EA…Sheet peeling device 10...Sheet holding means 20...Removal means 22...Drive roller (contact member) 24...Pinch roller (contact member) 29... Moving roller (contact member) AR: Predefined area AS…adhesive sheet PA…Peel angle PE…Peeled boundary WK...Adherent WKE...outer surface

Claims

1. a sheet holding means for holding an adhesive sheet attached to the outer peripheral surface of an adherend; a peeling means for applying tension to the adhesive sheet held by the sheet holding means to peel the adhesive sheet from the adherend, The peeling means is characterized in that it applies tension to the adhesive sheet by contacting a contact member with the adhesive sheet located between the sheet holding means and the adherend, while rotating the sheet holding means and the adherend relatively so that the position of the peel boundary of the adhesive sheet peeled from the adherend falls within a predetermined area.

2. a sheet holding means for holding an adhesive sheet attached to the outer peripheral surface of an adherend; a peeling means for applying tension to the adhesive sheet held by the sheet holding means to peel the adhesive sheet from the adherend, The peeling means is characterized in that the sheet holding means holding the adhesive sheet and the adherend are rotated relative to each other to apply tension to the adhesive sheet, while abutting a contact member against the adhesive sheet located between the sheet holding means and the adherend to guide the adhesive sheet so that the position of the peel boundary of the adhesive sheet peeled off from the adherend falls within a predetermined area.

3. 3. The sheet peeling device according to claim 1, wherein the predetermined area is between a position where the peel angle of the adhesive sheet peeled off from the outer peripheral surface is 0 degrees and a position where the peel angle of the adhesive sheet is 180 degrees.

4. a sheet holding step of holding the adhesive sheet attached to the outer peripheral surface of the adherend with a sheet holding means; a peeling step of applying tension to the adhesive sheet held by the sheet holding means and peeling the adhesive sheet from the adherend; The peeling step is a sheet peeling method characterized in that a contact member is abutted against the adhesive sheet located between the sheet holding means and the adherend to apply tension to the adhesive sheet, while the sheet holding means and the adherend are rotated relative to each other so that the position of the peel boundary of the adhesive sheet peeled from the adherend falls within a predetermined region.

5. a sheet holding step of holding the adhesive sheet attached to the outer peripheral surface of the adherend with a sheet holding means; a peeling step of applying tension to the adhesive sheet held by the sheet holding means and peeling the adhesive sheet from the adherend; The peeling step comprises rotating the sheet holding means holding the adhesive sheet relative to the adherend to apply tension to the adhesive sheet, while guiding the adhesive sheet by contacting a contact member with the adhesive sheet located between the sheet holding means and the adherend so that the position of the peel boundary of the adhesive sheet peeled off from the adherend falls within a predetermined region.

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