Electrical connection device

Abstract

To provide an electrical connection device capable of highly precisely measuring the characteristics of an inspection object.SOLUTION: An electrical connection device 1 includes: a probe 10; a wiring sheet 20 having flexibility that is connected to the probe 10; and a wiring board 30. The probe 10 has a tip section disposed so as to be capable of abutting on an inspection object and a base end section connected to the tip section. Both the surfaces are defined by a first sheet surface 211 and a second sheet surface 212 in the wiring sheet 20, a first connection section 21 connected to the base end section of the probe 10 is disposed on the first sheet surface 211, and a second connection section 22 is disposed on the second sheet surface 212. An internal circuit for connecting the first connection section 21 and the second connection section 22 is formed between the first sheet surface 211 and the second sheet surface 212. A first electrode 31 connected to the second connection section 22 is disposed in the wiring board 30, and the wiring board has a first main surface that opposes the second sheet surface 212 and a second main surface in which a second electrode 32 electrically connected to the first electrode 31 is disposed.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an electrical connecting device used for testing electrical characteristics of an object to be tested. [Background technology]

[0002] In order to measure the electrical characteristics of an object under test such as an integrated circuit, an electrical connection device having an inspection terminal that is brought into contact with the object under test is used. In a measurement using the electrical connection device, the object under test is electrically connected to an inspection device such as a tester via the inspection terminal.

[0003] In order to measure the characteristics of an object to be inspected with high accuracy, it is important to transmit to the electrical connection device an electrical signal with reduced loss and noise, etc. For example, in order to measure high-frequency characteristics with high accuracy, an electrical connection device equipped with electronic components such as a capacitor that is connected to the signal wiring through which the electrical signal propagates is being considered. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2004-233155 A Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide an electrical connecting device capable of measuring the characteristics of an object to be inspected with high accuracy. [Means for solving the problem]

[0006] An electrical connection device according to one aspect of the present invention includes a terminal for inspection, a flexible wiring sheet connected to the terminal for inspection, and a wiring board. The terminal for inspection has a tip portion arranged so as to be in contact with an object to be inspected and a base portion connected to the tip portion. The wiring sheet has both sides defined by a first sheet surface and a second sheet surface, a first connection portion connected to the base portion of the terminal for inspection is arranged on the first sheet surface, and a second connection portion is arranged on the second sheet surface. An internal circuit connecting the first connection portion and the second connection portion is formed between the first sheet surface and the second sheet surface. The wiring board has a first main surface on which a first electrode connected to the second connection portion is arranged and which faces the second sheet surface, and a second main surface on which a second electrode electrically connected to the first electrode is arranged. Effect of the Invention

[0007] According to the present invention, it is possible to provide an electrical connecting device capable of measuring the characteristics of an object to be inspected with high accuracy. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of an electrical connecting device according to an embodiment. [Diagram 2] FIG. 2 is a schematic plan view showing the configuration of the electrical connecting device according to the embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view showing an example of the structure of the wiring sheet of the electrical connection device according to the embodiment. [Figure 4] FIG. 4 is a schematic diagram showing an example of an internal circuit of the wiring sheet of the electrical connection device according to the embodiment. [Diagram 5] FIG. 5 is a schematic diagram showing another example of the internal circuit of the wiring sheet of the electrical connection device according to the embodiment. [Figure 6] FIG. 6 is a schematic diagram showing an example of the arrangement of electronic circuits arranged in the electrical connecting device according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the thickness ratios of each part are different from the actual ones. Of course, the drawings also include parts with different dimensional relationships and ratios. The embodiments shown below are examples of devices and methods for embodying the technical ideas of this invention, and the embodiments of this invention do not specify the materials, shapes, structures, arrangements, etc. of the components as described below.

[0010] An electrical connection device 1 according to the embodiment shown in Fig. 1 is used to inspect an object under inspection 2. The electrical connection device 1 includes a probe 10, a flexible wiring sheet 20 connected to the probe 10, a wiring board 30 laminated on the wiring sheet 20, and a printed circuit board 40 laminated on the wiring board 30. In the following description, the direction in which the electrical connection device 1 is located as viewed from the object under inspection 2 is referred to as the upward direction, and the direction in which the object under inspection 2 is located as viewed from the electrical connection device 1 is referred to as the downward direction. In addition, in each of the components of the electrical connection device 1, the surface facing upward is also referred to as the upper surface, and the surface facing downward is also referred to as the lower surface.

[0011] The probe 10 functions as an inspection terminal that electrically connects the inspection object 2 to an inspection device (not shown). The probe 10 has one end (hereinafter referred to as the "tip") arranged so as to be able to come into contact with the inspection object 2, and the other end (hereinafter referred to as the "base end") connected to the tip. The probe 10 may be supported by a probe head 60 through which the probe 10 penetrates. The probe head 60 may be a housing having a space provided therein. The probe head 60 is fixed to the wiring sheet 20, for example.

[0012] Both sides of the wiring sheet 20 are defined by a first sheet surface 211 and a second sheet surface 212. A first connection portion 21 that connects to the base end of the probe 10 is disposed on the first sheet surface 211, which is the lower surface of the wiring sheet 20. The second sheet surface 212, which is the upper surface of the wiring sheet 20, faces the wiring board 30 and has a second connection portion 22 disposed thereon. Although not shown in FIG. 1, an internal circuit that connects the first connection portion 21 and the second connection portion 22 is formed between the first sheet surface 211 and the second sheet surface 212.

[0013] A first electrode 31 that connects to the second connection portion 22 of the wiring sheet 20 is disposed on a first main surface of the wiring board 30 that faces the second sheet surface 212. A second electrode 32 that electrically connects to the first electrode 31 is disposed on a second main surface of the wiring board 30 that faces the printed circuit board 40. The second electrode 32 is electrically connected to the first electrode 31 via a connection wiring 300. The connection wiring 300 may be, for example, an internal wiring disposed inside the wiring board 30. A multilayer wiring board such as MLO (Multi-Layer Organic) or MLC (Multi-Layer Ceramic) may be used for the wiring board 30.

[0014] A wiring pattern 400 is arranged on the printed circuit board 40 disposed opposite the second main surface of the wiring board 30, and is connected to the second electrode 32 of the wiring board 30. The wiring pattern 400 arranged inside and on the surface of the printed circuit board 40 electrically connects the second connection portion 22 of the wiring board 30 to an inspection device. For example, a first end 41 of the wiring pattern 400 is connected to the second electrode 32 of the wiring board 30, and a second end 42 of the wiring pattern 400 is electrically connected to an inspection device (not shown). The first end 41 is arranged on the lower surface of the printed circuit board 40, and the second end 42 is arranged on the upper surface of the printed circuit board 40.

[0015] The inspection object 2 is mounted on a stage 3. The electrical connecting device 1 is capable of moving vertically relative to the stage 3. When inspecting the inspection object 2, the distance between the electrical connecting device 1 and the stage 3 is narrowed so that the tip of the probe 10 comes into contact with a signal terminal (not shown) of the inspection object 2. Fig. 1 shows a state in which the probe 10 and the inspection object 2 are spaced apart.

[0016] The wiring board 30 may be a space transformer that converts the interval between the base ends of the probes 10 as viewed from the normal direction of the main surface of the wiring board 30 into the interval between the first ends 41 of the printed circuit board 40. By using the wiring board 30 as a space transformer, the base ends of the probes 10, which correspond to the interval between the signal terminals arranged on the inspection target 2, can be electrically connected to the wiring pattern 400 of the printed circuit board 40, which is arranged at an interval wider than the interval between the base ends. By widening the interval between the second ends 42 of the wiring pattern 400 by the space transformer, it becomes easier to connect the wiring pattern 400 of the printed circuit board 40 to an inspection device.

[0017] 1, a stiffener 50 may be laminated on the printed circuit board 40. The stiffener 50 has a higher rigidity than the printed circuit board 40, and ensures the mechanical strength of the electrical connection device 1 by preventing the printed circuit board 40 from bending. Furthermore, the stiffener 50 may be used as a support for fixing each of the components of the electrical connection device 1. The printed circuit board 40 may be fixed to the stiffener 50 by, for example, a screw.

[0018] 2 is a plan view of the laminated structure of wiring sheet 20, wiring board 30, printed board 40, and stiffener 50 as viewed from the Z direction (hereinafter also referred to as "plan view") In FIG. 2, the Z direction is the depth direction of the paper, the X direction is the left-right direction of the paper, and the Y direction is the up-down direction of the paper.

[0019] A stiffener 50 is disposed on the upper surface of printed circuit board 40, which is circular in plan view. Stiffener 50 has a shape in which an outer circular ring and an inner rectangular ring are connected by spokes, as shown in Fig. 2, for example. Wiring board 30 and wiring sheet 20 are disposed near the center of the lower surface of printed circuit board 40. The wiring sheet 20, wiring board 30, printed circuit board 40, and stiffener 50 are fixed to one another by, for example, screws.

[0020] A flexible material is used for the wiring sheet 20. Therefore, when the first connection portion 21 receives a pressing force from the base end of the probe 10, the wiring sheet 20 elastically deforms so as to bias the first connection portion 21 toward the base end. For example, when the tip end of the probe 10 contacts the test object 2, a pressing force is generated from the base end of the probe 10 toward the first connection portion 21. In repulsion against this pressing force, the wiring sheet 20 biases the first connection portion 21 toward the base end. In this way, the electrical connection device 1 has a preload function of pressing the probe 10 against the first connection portion 21 of the wiring sheet 20 during testing of the test object 2. Therefore, in the electrical connection device 1, the contact between the probe 10 and the test object 2 is stable, and the accuracy of the measurement of the test object 2 can be improved.

[0021] The wiring sheet 20 may have a structure in which a conductive film and an insulating film are laminated. For example, an internal circuit may be configured by a conductive pattern formed on the conductive film. FIG. 3 shows an example of the structure of the wiring sheet 20. The wiring sheet 20 shown in FIG. 3 has a structure in which a laminate of a conductive film 202 and an insulating film 203 is sandwiched between a pair of cover films 201 made of an insulating material. The number of laminates of the conductive film 202 and the insulating film 203 can be set arbitrarily. The conductive film 202 may be a metal material such as copper foil. The insulating film 203 may be an insulating material such as a polyimide sheet. The cover film 201 may be an insulating material such as a solder resist. For example, an adhesive may be used to bond the conductive film 202, the insulating film 203, and the cover film 201 to each other. The wiring sheet 20 may have a structure in which an insulating film (also called a "base film") is further sandwiched between the laminates including the conductive film 202 and the insulating film 203.

[0022] 3 provides flexibility due to the material of the wiring sheet 20, as well as elasticity in the lamination direction due to the laminated structure of a conductive film and an insulating film. Therefore, the electrical connection device 1 including the wiring sheet 20 provides a preload function that presses the first connection portion 21 of the wiring sheet 20 against the probe 10 during inspection of the inspection target 2. As a result, the contact between the probe 10 and the inspection target 2 is stabilized, and the accuracy of measurement of the inspection target 2 can be improved.

[0023] The internal circuit of wiring sheet 20 may include, for example, a circuit (hereinafter also referred to as an "interposer circuit") that electrically connects first connection portion 21 and second connection portion 22. For example, when an interposer circuit is formed on wiring sheet 20 having the structure shown in Fig. 3, wiring is formed that penetrates cover film 201, conductive film 202, and insulating film 203 from first sheet surface 211 to second sheet surface 212.

[0024] When the internal circuit of the wiring sheet 20 includes an interposer circuit, the internal circuit of the wiring sheet 20 may include a short-circuit wiring 231 that shorts the first connection portion 21 and the second connection portion 22, as shown in FIG. 4. In the electrical connection device 1 having the wiring sheet 20 having the internal circuit shown in FIG. 4, the inspection target 2 and the inspection device are electrically connected via the probe 10, the internal circuit of the wiring sheet 20, the connection wiring 300 of the wiring board 30, and the wiring pattern 400 of the printed circuit board 40. As a result, an electrical signal is propagated between the inspection device such as an IC tester and the inspection target 2, and the characteristics of the inspection target 2 are measured. For example, the first connection portion 21 and the second connection portion 22 are connected one-to-one by the internal circuit of the wiring sheet 20. Alternatively, one first connection portion 21 may be connected to multiple second connection portions 22, or multiple first connection portions 21 may be connected to one second connection portion 22 by the internal circuit.

[0025] The internal circuit of the wiring sheet 20 may include a matching circuit 232 having a first terminal connected to the first connection portion 21 and a second terminal connected to the second connection portion 22, as shown in FIG. 5. The matching circuit 232 may be a circuit that matches impedance between the first connection portion 21 and the second connection portion 22. For example, the matching circuit 232 may include a π-type filter. By forming the matching circuit in the internal circuit of the wiring sheet 20, the wiring length between the inspection object 2 and the matching circuit can be shortened. This makes it possible to stably perform high-frequency measurement on the inspection object 2, for example.

[0026] The configuration of the internal circuit of the wiring sheet 20 is not limited to the above. For example, the internal circuit may include electronic components such as a capacitor or an inductor. The electronic components included in the internal circuit of the wiring sheet 20 may be formed, for example, by using a MEMS (Micro Electro Mechanical Systems) process. By using the MEMS process, a miniaturized element can be formed integrally with the wiring sheet 20. The internal circuit may also include a circuit (loopback circuit) that electrically connects one of the first connection parts 21 to another of the first connection parts 21. Alternatively, the internal circuit of the wiring sheet 20 may include a circuit that switches any one of the first connection parts 21 to either an interposer circuit that connects to any one of the second connection parts 22 or a loopback circuit that connects to another first connection part 21.

[0027] In the electrical connection device 1, electronic components electrically connected to the internal circuit can be arranged on the surface of the wiring sheet 20. For example, as shown in FIG. 6, electronic components 100 connected to the internal circuit of the wiring sheet 20 may be arranged on each of the first sheet surface 211 and the second sheet surface 212. The electronic components 100 may be, for example, a capacitor, an inductor, or a resistive element. FIG. 6 shows an example in which the electronic components 100 are arranged on each of the first sheet surface 211 and the second sheet surface 212, but the electronic components 100 may be arranged on either the first sheet surface 211 or the second sheet surface 212. By arranging the electronic components 100 on the surface of the wiring sheet 20, for example, electronic components arranged on the wiring board 30 or the printed circuit board 40 can be reduced or divided. Furthermore, by arranging the electronic components on the surface of the wiring sheet 20, the wiring length between the inspection target 2 and the electronic components can be shortened. For this reason, for example, by arranging electronic components such as a capacitor that reduces power supply noise on the wiring sheet 20, measurement of the inspection target 2 can be stably performed.

[0028] Furthermore, by making the area of ​​wiring sheet 20 larger than that of wiring board 30 in a plan view, electronic components 100 can be placed in the remaining area of ​​second sheet surface 212 excluding the area bonded to wiring board 30, as shown in Fig. 6. On the other hand, in an electrical connection device that does not include wiring sheet 20, electronic components cannot be placed on the second main surface of wiring board 30 that faces printed circuit board 40. In this way, electrical connection device 1 can increase the number of electronic components that can be mounted.

[0029] As described above, the electrical connection device 1 according to the embodiment has a configuration in which the flexible wiring sheet 20 is disposed between the probes 10 and the wiring board 30. According to the electrical connection device 1, the contact between the probes 10 and the test object 2 is stabilized by the preload function provided by the wiring sheet 20. As a result, the accuracy of measurement of the test object 2 can be improved.

[0030] Also, the electrical connecting device 1 can increase the number of electronic components that can be mounted. Furthermore, the electrical connecting device 1 can shorten the wiring length between the inspection object 2 and the electronic components by arranging the electronic components near the inspection object 2. As a result, the accuracy of the measurement of the inspection object 2 can be improved.

[0031] Furthermore, according to the electrical connecting device 1, by disposing the flexible wiring sheet 20 between the probe head 60 and the wiring board 30, the warping and unevenness of the surfaces of the probe head 60 and the wiring board 30 can be absorbed by the wiring sheet 20. This makes it possible to suppress rattling and poor contact of the electrical connecting device 1 caused by gaps occurring between the probe head 60 and the wiring board 30.

[0032] (Other embodiments) Although the present invention has been described above by way of the embodiment, the description and drawings forming part of this disclosure should not be understood as limiting the present invention. Various alternative embodiments, examples and operating techniques will become apparent to those skilled in the art from this disclosure.

[0033] For example, FIG. 1 shows a case where an electrical connection device 1 equipped with a wiring sheet 20 includes a probe 10 that contacts a signal terminal of an object under test 2. According to the electrical connection device 1 shown in FIG. 1, for example, it is possible to measure the electrical characteristics of the object under test 2 in a state where it is not separated from a wafer or in a state where it is chipped. On the other hand, the wiring sheet 20 may be mounted on an electrical connection device including a test socket in order to measure the electrical characteristics of the object under test 2 mounted on a package or the like. For example, instead of the probe 10 and the probe head 60 of the electrical connection device 1 shown in FIG. 1, a test socket in which a terminal for inspection that can be connected to an external terminal of a package in which the object under test 2 is mounted may be arranged on the wiring board 30.

[0034] Thus, the present invention naturally includes various embodiments not described above. Therefore, the technical scope of the present invention is defined only by the invention-specifying matters related to the scope of the claims appropriate from the above description. [Explanation of symbols]

[0035] 1 Electrical connection device 2. Inspection subject 10 Probes 20 Wiring sheet 21 First connection part 22 Second connection part 30 Wiring board 31 1st electrode 32 2nd electrode 40 Printed Circuit Board 41 First end 42 Second end 50 Stiffna 60 Probe Head 100 Electronic Components 201 Cover Film 202 Conductive film 203 Insulating film 211 First sheet surface 212 Second sheet surface 300 Connection Wiring 400 Wiring Pattern

Claims

1. An electrical connection device used for inspecting an object to be inspected, comprising: a terminal for inspection having a tip portion arranged so as to be in contact with the object to be inspected and a base portion connected to the tip portion; a flexible wiring sheet, both surfaces of which are defined by a first sheet surface and a second sheet surface, a first connection portion connected to the base end portion of the inspection terminal being arranged on the first sheet surface, a second connection portion being arranged on the second sheet surface, and an internal circuit connecting the first connection portion and the second connection portion being formed between the first sheet surface and the second sheet surface; a wiring board having a first main surface on which a first electrode connected to the second connection portion is arranged and which faces the second sheet surface, and a second main surface on which a second electrode electrically connected to the first electrode is arranged; An electrical connection device comprising:

2. 2. The electrical connection device according to claim 1, further comprising an electronic component disposed on at least one of the first sheet surface and the second sheet surface of the wiring sheet and electrically connected to the internal circuit.

3. 2. The electrical connecting device according to claim 1, wherein the wiring sheet has a structure in which a laminate of a conductive film and an insulating film is sandwiched between cover films made of an insulating material.

4. 4. The electrical connection device according to claim 1, wherein the wiring sheet elastically deforms so as to urge the first connection portion toward the base end when the first connection portion receives a pressing force from the base end.

5. 5. The electrical connecting device according to claim 4, wherein the pushing force is generated from the base end toward the first connecting portion by the tip end of the terminal for inspection coming into contact with the object to be inspected.

6. 4. The electrical connecting device according to claim 1, further comprising a printed circuit board arranged opposite said wiring board and on which a wiring pattern connected to said second electrodes is arranged.

7. 7. The electrical connecting device according to claim 6, wherein the wiring board is a space transformer that converts a spacing between the terminals for inspection into a spacing between the wiring patterns of the printed circuit board when viewed in a normal direction of a main surface of the wiring board.

8. 4. The electrical connection device according to claim 1, wherein the inspection terminal is a probe having one end arranged so as to be in contact with a signal terminal of the object to be inspected and the other end connected to the first connection portion of the wiring sheet.

9. 4. The electrical connecting device according to claim 1, wherein the terminals for inspection are arranged in a test socket that connects to external terminals of a package in which the device under test is mounted.

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