Jig for substrate dividing device, and jig arrangement device for arranging jig

Abstract

To provide a jig for a substrate dividing device, which can reduce the number of steps and costs involved in dividing a substrate, and a jig arrangement device for arranging the jig.SOLUTION: A jig arrangement device 1 according to the present disclosure is for placing a jig used in a substrate dividing device 2, and includes jig pins 2 that supports a pre-division substrate W1, a stage 3 that places the jig pins 2, a platform robot hand 14 that places the jig pins 2 at predetermined positions on the stage 3, and a first control unit 7 that controls the first robot hand 14. The jig pins 2 include a magnet 25. The stage 3 includes a first magnetized surface 33 to which the magnet 25 can be magnetically attracted.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a jig for a substrate dividing apparatus, and a jig arrangement device for arranging the jig. [Background technology]

[0002] Conventionally, there is known a technique for jigs that fix pre-separated substrates when the substrates are separated by a substrate separating apparatus. For example, in the example of a conventional jig shown in Fig. 8, a pair of jigs (upper jig 71 and lower jig 72) are manufactured according to the size of the pre-separated substrate W1 and the shape of the separation line (slit S), and the pre-separated substrate W1 is held between the upper jig 71 and the lower jig 72. The upper jig 71 and the lower jig 72 have openings 73 that are aligned with the slit S. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2003-163437 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, each type of pre-separation substrate differs in size, layout of electronic circuits, layout of slits, etc. For this reason, a jig needs to be manufactured for each type of pre-separation substrate, which increases the number of steps and costs required for dividing the substrate.

[0005] Therefore, an object of the present disclosure is to provide a jig for a substrate dividing apparatus that can reduce the number of steps and costs involved in dividing a substrate, and a jig arrangement device for arranging the jig. [Means for solving the problem]

[0006] In order to solve the above problems, the jig for a substrate dividing apparatus according to the present disclosure has the following features: (1) A jig for use in a substrate dividing apparatus, the jig comprising: a jig pin for supporting a substrate before division; and a stage for arranging the jig pin, the jig pin including a magnet, and the stage including a magnetizable surface to which the magnet can be magnetically attracted.

[0007] (2) In the case of (1), a resin film is provided on the surface of the stage to prevent the jig pins from shifting out of position.

[0008] (3) In the case of (1) or (2), the pre-separation substrate includes a slit that forms the separation line, and the jig pin includes an insertion portion that is inserted into the slit.

[0009] (4) In the case of any one of (1) to (3), the jig pin includes a step for receiving an edge of the unseparated substrate.

[0010] In order to solve the above problems, the jig placement device of the present disclosure has the following features. (5) A jig placement device for placing jigs used in a substrate dividing apparatus, comprising: jig pins for supporting the substrate before division; a stage for placing the jig pins; a robot hand for placing the jig pins at predetermined positions on the stage; and a control means for controlling the robot hand, wherein the jig pins include magnets, and the stage includes a magnetizable surface to which the magnets can be magnetized.

[0011] (6) In the case of (5), a stocker is provided for storing the jig pins in a spaced-apart state, the stocker including storage holes for individually storing the jig pins, and the storage holes including a magnetizable surface to which the magnet can be magnetized. Effect of the Invention

[0012] According to the jig and jig placement device for the substrate dividing apparatus disclosed herein, different types of pre-divided substrates can be accommodated by changing the arrangement of the jig pins, eliminating the need to manufacture a jig for each type of pre-divided substrate. This has the effect of reducing the labor and cost required for substrate division while being able to accommodate the division of small quantities of many different types of substrates. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic diagram of a fixture placement device according to one embodiment of the present disclosure. [Diagram 2] FIG. [Diagram 3] FIG. 2A is a perspective view of a jig pin, and FIG. [Figure 4] 11 is an explanatory diagram illustrating an operation of the first robot hand gripping a jig pin. FIG. [Diagram 5] FIG. 13 is a plan view showing a state in which a fixture pin is arranged on a stage. [Figure 6] 11 is a perspective view showing a state in which a jig for the substrate dividing device is removed from the jig placement device. FIG. [Figure 7] FIG. 2 is a perspective view of the substrate dividing device. [Figure 8] FIG. 11 is a plan view showing a jig for a substrate dividing apparatus according to a conventional example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An embodiment of a jig placement device and a substrate dividing device according to the present disclosure will be described below with reference to the drawings. In the following description, the horizontal (front and back) directions of the jig placement device and the substrate dividing device are defined as the X direction, the horizontal (right and left side) directions are defined as the Y direction, and the vertical direction is defined as the Z direction.

[0015] As shown in FIG. 1, the jig placement device 1 is provided adjacent to the substrate dividing device 11.

[0016] As shown in Figure 2, the jig placement device 1 includes a jig pin 2 that supports the pre-divided substrate W1, a stage 3 on which the jig pin is placed, a first set base 6 on which the stage 3 is mounted, a first robot hand 4 that places the jig pin 2 at a predetermined position on the stage 3, a first control unit 7 that controls the first robot hand 4, and placement information (not shown) indicating the placement position of the jig pin 2.

[0017] As shown in FIG. 3, the jig pin 2 is formed in a cylindrical shape. The jig pin 2 is composed of a tip portion 21 that supports the pre-division substrate W1, a base portion 24 that is magnetically attached to the stage 3, and a chucked portion 22 that is gripped by the chuck portion 5 of the first robot hand 4. A magnet 25 is provided on the base portion 24 of the jig pin 2. A convex portion 23 that protrudes in the outer circumferential direction of the chucked portion 22 is provided on the side surface of the chucked portion 22. The material of the jig pin 2 can be selected from, for example, aluminum, brass, magnesium, etc. By selecting aluminum, brass, magnesium, etc., it is possible to prevent the jig pin 2 from being magnetized by the magnet 25, and to smoothly insert and remove the jig pin 2 from the stocker 61 and place and remove it on the stage 3. In particular, when aluminum, etc. is selected, it is possible to reduce the weight of the jig pin 2 and reduce the burden on the first robot hand 4.

[0018] The jig pin 2 includes a first jig pin 2-1, a second jig pin 2-2, and a third jig pin 2-3. The jig pin 2 includes a support portion 21a that supports the pre-division substrate W1 and / or the substrate W2 at at least a part of the tip portion 21. The tip portion 21 of the first jig pin 2-1 includes an insertion portion 21b that is inserted into the slit S. By inserting the insertion portion 21b into the slit S, it is possible to prevent the pre-division substrate W1 from being displaced. The tip portion 21 of the second jig pin 2-2 is formed flat. The tip portion 21 of the third jig pin 2-3 is provided with a larger diameter than the chucked portion 22. In addition, the tip portion 21 of the third jig pin 2-3 is formed with a step 21c that receives the edge E of the pre-division substrate W1 and an inclined surface 21d that guides the edge E to the step 21c. A flat portion 24a for determining the direction of the step 21c is formed on the side surface of the base portion 24 of the third jig pin 2-3.

[0019] The first robot hand 4 comprises a chuck portion 5 that grips the jig pin 2, a slide mechanism (not shown) that slides the entire first robot hand 4 in the Y direction, and a lifting mechanism that moves (lifts) the entire first robot hand 4 in the Z direction.

[0020] As shown in FIG. 4, the chuck portion 5 is composed of a pair of gripping portions 51 that can be opened and closed, and each gripping portion 51 includes a semi-cylindrical groove portion 52 and a recessed portion 53 that accommodates the protrusion portion 23 provided around the chucked portion 22. The groove portion 52 is formed to have approximately the same diameter as the chucked portion 22 of the jig pin 2. The material of the chuck portion 5 can be selected from, for example, aluminum, brass, magnesium, etc. By selecting aluminum, brass, magnesium, etc., it is possible to prevent the chuck portion 5 from being magnetized by the magnet 25, and to smoothly grip and release the jig pin 2. In particular, when brass, magnesium, etc. are selected, it is possible to increase the rigidity of the chuck portion 5 and improve durability.

[0021] 4(b), when the gripping portion 51 is in the closed state, the groove portion 52 grips the outer circumferential surface of the chucked portion 22, and the protrusion portion 23 of the jig pin 2 is housed in the recess portion 53. At this time, the protrusion portion 23 functions as a retainer, so that the gripped jig pin 2 can be prevented from falling off.

[0022] The first set base 6 includes a stocker 61 for storing the jig pins 2, a first origin block 8 indicating the origin 6a of the first set base 6, and rollers 9 for moving the entire first set base 6 in the X direction.

[0023] A plurality of stockers 61 are attached to the surface of the first set base 6. Each stocker 61 has a plurality of accommodation holes 62 for individually accommodating the jig pins 2. The stockers 61 accommodate the first, second and third jig pins 2-1, 2-2 and 2-3, respectively, by type. The bottom of the stocker 61 includes a magnetized member 63 that can be magnetized by the magnet 25, and the bottom surface of the accommodation hole 62 functions as a second magnetized surface 64 to which the magnet 25 can be magnetized. The material of the magnetized member 63 can be selected from, for example, steel, SUS430 material, etc. The size of the stocker 61 and the number of accommodation holes 62 can be changed as appropriate.

[0024] 5 and 6, the stage 3 is provided in a plate shape and is equipped with a handle 34 for lifting the entire stage 3. A corner portion 32 of the stage 3 is formed in a shape complementary to the first origin block 8. When the corner portion 32 of the stage 3 is fitted into the first origin block 8, the origin 3a of the stage 3 and the origin 6a of the first set base 6 can be aligned, and the error between the arrangement information and the actual arrangement can be reduced.

[0025] The stage 3 is formed from a magnetizable material that can be magnetized by the magnet 25 of the jig pin 2, and the surface of the stage 3 functions as a first magnetizable surface 33 to which the magnet 25 can be magnetically attracted.

[0026] A resin film 31 is formed on the first magnetized surface 33 to prevent the jig pin 2 from shifting out of position. The jig pin 2 is held on the stage 3 by magnetic force, and if no measures are taken, it may shift out of position. By forming the resin film 31, a frictional force is generated in a direction that resists the jig pin 2 from shifting out of position, preventing the jig pin 2 from shifting out of position. The stage 3 may be made of a material such as steel or SUS430. The resin film 31 may be made of a material such as silicon. It is also possible to form an adhesive layer on the resin film 31 to hold the jig pin 2 more stably.

[0027] The first control unit 7 controls the slide mechanism and lift mechanism of the first robot hand 4 and the rollers 9 of the first set base 6 to adjust the position of the first robot hand 4. Specifically, the first control unit 7 controls the slide mechanism when the first robot hand 4 is moved in the Y direction, controls the rollers 9 when the first robot hand 4 is moved in the X direction, and controls the lift mechanism when the first robot hand 4 is moved in the Z direction.

[0028] The first control unit 7 controls the open / closed state of the gripper 51 of the chuck unit 5 of the first robot hand 4. Specifically, the first control unit 7 controls the gripper 51 to an open state in an initial state, and controls the gripper 51 to a closed state when the first robot hand 4 grips the jig pin 2. The first control unit 7 controls the gripper 51 to an open state when the jig pin 2 is released from the gripper 51.

[0029] As shown in FIG. 5, the first control unit 7 places the jig pins 2 on the stage 3 based on the placement information. The placement information is information indicating the position of each jig pin 2, and is generated by the user based on an image of the pre-separation substrate W1 or the like. The placement information may include, for example, position information on the XY coordinate system and map information. The first jig pin 2-1 is placed along the slit S. The second jig pin 2-2 is placed at a position where there is no slit S while avoiding an electronic circuit (not shown). The third jig pin 2-3 is placed along the edge E of the pre-separation substrate W1.

[0030] As shown in Figure 7, the substrate dividing apparatus 11 includes a jig pin 2 that supports the pre-divided substrate W1, a stage 3 on which the jig pin is arranged, a second set base 16 on which the stage 3 is mounted, a tool 15 that divides the pre-divided substrate W1, a second control unit 17 that controls the tool 15, a second origin block 18 that indicates the origin 16a of the second set base 16, and a corner block 19 that holds the corners of the pre-divided substrate W1.

[0031] The flow of the substrate dividing process using the jig arrangement device 1 and substrate dividing device 11 configured as above will be described with reference to FIGS.

[0032] 2, the stage 3 is attached to the first set base 6 of the jig placement device 1. At this time, the corner portion 32 of the stage 3 is fitted into the origin block 8 of the first set base 6, and the XY positions of the origin 3a of the stage 3 and the origin 6a of the first set base 6 are aligned.

[0033] Next, the first control unit 7 controls the first robot hand 4 to place the jig pin 2 on the stage 3 based on the placement map. Hereinafter, a detailed description will be given of an example in which the first jig pin 2-1 is placed on the stage 3.

[0034] The first control unit 7 controls the gripper 51 to be in an open state. The first control unit moves the first robot hand 4 in the ±X directions and / or ±Y directions to place the first robot hand 4 above the stocker 61. The first control unit 7 opens the gripper 51 and moves the first robot hand 4 in the -Z direction to align the position of the chuck portion 5 with the chucked portion 22 of the first jig pin 2-1. The first control unit 7 controls the gripper 51 to be in a closed state, and grips the first jig pin 2-1 with the gripper 51. After that, the first control unit 7 moves the first robot hand 4 in the +Z direction.

[0035] The first control unit 7 moves the first robot hand 4 in the ±X directions and / or ±Y directions to place the first robot hand 4 above the placement position included in the placement information. The first control unit 7 moves the first robot hand 4 in the -Z direction to place the first jig pin 2-1 on the stage 3. Thereafter, the first control unit controls the gripper 51 to be in an open state. The same applies to the second jig pin 2-2 and the third jig pin 2-3.

[0036] Next, as shown in Fig. 6, the stage 3 is removed from the first set base 6 of the jig placement device 1, and as shown in Fig. 7, the stage 3 is attached to the second set base 16 of the substrate dividing device 11. At this time, the corner portion 32 of the stage 3 is fitted into the origin block 18 of the second set base 16, and the origin 3a of the stage 3 and the origin 16a of the second set base 16 are aligned.

[0037] Finally, the second control unit 17 of the substrate dividing apparatus 11 controls the second robot hand 14 to divide the pre-divided substrate W1 along the slit S. The substrate W2 is held by the support portion 21a of the jig pin 2 and is supported without dropping.

[0038] Therefore, the jig arrangement device 1 of this embodiment can accommodate various types of pre-separated substrates W1 by rearranging the jig pins 2 on the stage 3. This can reduce the effort and cost required to manufacture jigs for each type of pre-separated substrate W1.

[0039] The present disclosure is not limited to the above-described embodiments, and may be implemented by appropriately modifying the shape and configuration of each part, for example, as exemplified below, without departing from the spirit of the present disclosure. (1) The jig placement device 1 and the substrate dividing device 11 are integrally provided, thereby reducing the effort required to move the stage 3. (2) Automate placement information through programming or machine learning. (3) An electromagnet (not shown) capable of magnetically attracting the stage 3 is provided on the back side of the first set base 6, and an electromagnet (not shown) capable of magnetically attracting the stage 3 is provided on the back side of the second set base 16. By providing electromagnets on the back sides of the first and second set bases 6 and 16, warping or floating of the magnetized stage 3 can be prevented, smoothness can be maintained, and the height accuracy of the support portion 21a of the jig pin 2 can be improved. [Explanation of symbols]

[0040] 1 Jig placement device 2 Jig pins 3 Stage (a: origin) 4. First Robot Hand 5 Chuck part 6 First set base (a: origin) 7 First Control Section 8 First origin block 9. Lola 11 Substrate division device 14 Second Robot Hand 15 Tools 16 Second set base (a: origin) 17 Second Control Section 18 Second origin block 19 Corner Block 21 tip portion (a: support portion, b: insertion portion, c: step, c: inclined surface) 22 Chucked part 23 Convex 24 Pedestal 25 Magnet 31 Resin Film 32 Corner section 33 First magnetized surface 34 Handle 51 Gripping part 52 Groove 53 Recess 61 Stocker 62 Storage Cave 63 Magnetized member 64 2nd magnetized surface 71 Conventional jig (upper side) 72 Conventional jig (lower side) 73 Opening E-edge S slit W1 Pre-separation board W2 Board

Claims

1. A jig used in a substrate dividing device, The method includes: a jig pin for supporting the pre-separation substrate; and a stage for arranging the jig pin; the fixture pin includes a magnet; A jig for a substrate dividing apparatus, wherein the stage includes a magnetized surface to which the magnet can be magnetically attracted.

2. 2. The jig for a substrate dividing apparatus according to claim 1, wherein a resin film is provided on a surface of said stage to prevent said jig pins from shifting in position.

3. the pre-separation substrate includes slits that form separation lines, The jig for use in a substrate dividing apparatus according to claim 1 , wherein the jig pin includes an insertion portion that is inserted into the slit.

4. The jig for use in a substrate dividing apparatus according to claim 1 , wherein the jig pin includes a step for receiving an edge of the undivided substrate.

5. A jig arrangement device for arranging a jig used in a substrate dividing device, a stage for arranging the jig pins, a robot hand for arranging the jig pins at predetermined positions on the stage, and a control means for controlling the robot hand, the fixture pin includes a magnet; The jig placement device, wherein the stage includes a surface to which the magnet can be magnetically attracted.

6. A stocker is provided for storing the jig pins in a state in which the jig pins are spaced apart from each other, the stocker includes accommodation holes for individually accommodating the jig pins, The jig placement device according to claim 5 , wherein the receiving hole includes a magnetizable surface to which the magnet can be magnetically attracted.

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