Capacitive sensor module

Abstract

To provide a capacitive sensor module which can limit a detection range of an object to be detected (a detected object).SOLUTION: A capacitive sensor module includes: three or more capacitive sensors; and a control unit which controls the three or more capacitive sensors. The three or more capacitive sensors include a first sensor 1a, a second sensor 1b, and a third sensor 1c. The control unit detects approach of a detected object based on the first information, the second information, and the third information. The first information indicates that a capacitance value of the first sensor 1a is larger than or equal to a first threshold value. The second information indicates that a capacitance value of the second sensor 1b is larger than or equal to a second threshold value. The third information indicates that a capacitance value of the third sensor 1c is larger than or equal to a third threshold value.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a capacitive sensor module including a plurality of capacitive sensors. [Background technology]

[0002] Patent Document 1 discloses a capacitance detection device (capacitance sensor module). The capacitance detection device of Patent Document 1 includes an unlocking sensor electrode and a locking sensor electrode built into a door handle of a vehicle. In the capacitance detection device of Patent Document 1, the locking sensor electrode and the unlocking sensor electrode are configured so that a human hand does not detect the door handle at the same time. The capacitance detection device of Patent Document 1 determines whether a human hand, which is an object to be detected, is approaching either the locking sensor electrode or the unlocking sensor electrode. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-129762 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, the capacitance detection device disclosed in Patent Document 1 is based on the premise that a human hand does not approach both the locking sensor electrode and the unlocking sensor electrode at the same time, which means that it is not possible to control the detection range of the unlocking sensor electrode and the detection range of the locking sensor electrode separately.

[0005] The present disclosure relates to a capacitive sensor module capable of limiting a detection range of an object to be detected. [Means for solving the problem]

[0006] A capacitance sensor module according to an embodiment of the present disclosure includes three or more capacitance sensors and a controller. The controller controls the three or more capacitance sensors. The three or more capacitance sensors include a first sensor, a second sensor, and a third sensor. The controller detects the approach of a detection target based on each of the first information, the second information, and the third information. The first information indicates that a capacitance value of the first sensor is equal to or greater than a first threshold. The second information indicates that a capacitance value of the second sensor is equal to or greater than a second threshold. The third information indicates that a capacitance value of the third sensor is equal to or greater than a third threshold.

[0007] A capacitance sensor module according to another embodiment of the present disclosure includes three or more sensor units and a control unit that controls the three or more sensor units. Each of the three or more sensor units includes a sensor electrode. The three or more sensor units include a first sensor unit, a second sensor unit, and a third sensor unit. The first sensor unit is located between the second sensor unit and the third sensor unit. The control unit operates the first sensor unit as a capacitance sensor. The control unit sets the potential of both the sensor electrode of the second sensor unit and the sensor electrode of the third sensor unit to the same potential as ground potential or to a potential independent of the ground potential. Effect of the Invention

[0008] According to the capacitance sensor module according to the above aspect, it is possible to limit the detection range of the detection target object. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a functional block diagram of the capacitance sensor module according to the first embodiment. [Diagram 2] FIG. 2 is a plan view of a capacitance sensor of the capacitance sensor module. [Diagram 3] FIG. 3 is a schematic diagram showing a detection range of the above capacitive sensor module. [Figure 4] FIG. 4 is a graph showing an example of a change in capacitance value of the capacitance sensor in the capacitance sensor module. [Diagram 5] FIG. 5 is a graph showing another example of a change in capacitance value of the capacitance sensor in the capacitance sensor module. [Figure 6] FIG. 6 is a plan view of the capacitance sensor of the capacitance sensor module according to the second embodiment. [Figure 7] FIG. 7 is a schematic diagram showing a detection range of the above capacitive sensor module. [Figure 8] FIG. 8 is a schematic diagram showing an arrangement of capacitance sensors in the capacitance sensor module according to the third embodiment. [Figure 9] FIG. 9 is a schematic diagram showing a detection range of the above capacitive sensor module. [Figure 10] FIG. 10 is a schematic diagram showing the detection range of the above capacitive sensor module from a different direction than that of FIG. [Figure 11] FIG. 11 is a schematic diagram showing a moving path of an object to be detected in the capacitance sensor module according to the fourth embodiment. [Figure 12] FIG. 12 is a graph showing an example of a change in capacitance value of the capacitance sensor in the capacitance sensor module. [Figure 13] FIG. 13 is a graph showing another example of a change in capacitance value of the capacitance sensor in the capacitance sensor module. [Figure 14] FIG. 14 is a schematic diagram showing the detection range of the capacitance sensor module according to the fifth embodiment. [Figure 15] FIG. 15 is a schematic diagram showing a detection range of a capacitance sensor module according to a modified example of the fifth embodiment. [Figure 16] FIG. 16 is a plan view of a capacitance sensor of a capacitance sensor module according to another modified example. [Figure 17]Fig. 17A is a cross-sectional view of a capacitance sensor of a capacitance sensor module according to embodiment 6. Fig. 17B is a cross-sectional view of a capacitance sensor of a capacitance sensor module according to modification 1 of embodiment 6. Fig. 17C is a cross-sectional view of a capacitance sensor of a capacitance sensor module according to modification 2 of embodiment 6. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the capacitance sensor module according to the first to sixth embodiments and the modified examples thereof will be described in detail with reference to the drawings. However, each figure described in the following embodiments is a schematic diagram, and the ratio of the size and thickness of each component does not necessarily reflect the actual dimensional ratio. Note that the configuration described in the following embodiments is merely an example of the present disclosure. The present disclosure is not limited to the following embodiments, and various modifications are possible according to the design, etc., as long as the effects of the present disclosure can be achieved.

[0011] (Embodiment 1) 1. Configuration (1) Capacitive sensor module 1 is a functional block diagram of a capacitance sensor module 100 according to embodiment 1. The capacitance sensor module 100 includes a plurality of capacitance sensors 1 (three in FIG. 1) and a control unit 2.

[0012] (2) Capacitive sensor As shown in Fig. 2, each of the multiple capacitance sensors 1 includes a substrate 10 and one or more (one in Fig. 2) detection electrodes 20. Note that the dot hunting in Fig. 2 does not indicate a cross section of the detection electrode 20, but indicates the area of ​​the detection electrode 20.

[0013] The substrate 10 is, for example, a rectangular substrate made of an insulating material. The material of the substrate 10 is, for example, a resin such as polyethylene terephthalate (PET). Hereinafter, the longitudinal direction, lateral direction, and thickness direction of the substrate 10 are referred to as a first direction D1, a second direction D2, and a third direction D3 (see FIG. 17), respectively. Any two of the first direction D1, the second direction D2, and the third direction D3 are orthogonal to each other. The substrate 10 has a first surface 11 and a second surface 12 that face each other in the third direction D3.

[0014] The detection electrode 20 is, for example, a rectangular electrode. The detection electrode 20 is formed of, for example, a conductive material. The conductive material is, for example, a metal material such as an aluminum alloy, or a light-transmitting oxide conductive material such as ITO (Indium Tin Oxide). The detection electrode 20 is, for example, a plate-shaped electrode. The detection electrode 20 is, for example, an electrode in which a plurality of linear conductive materials are arranged in a mesh shape. The detection electrode 20 is formed on the first surface 11 of the substrate 10.

[0015] The areas of the detection electrodes 20 are equal to each other in the multiple capacitance sensors 1. Here, "the areas of the detection electrodes 20 are equal to each other in the multiple capacitance sensors" does not necessarily mean that the areas of the multiple detection electrodes 20 are completely the same, but also means that the difference in area between two detection electrodes 20 is 10% or less of the area of ​​one detection electrode 20. As a result, the detection distance, sensitivity, and detection accuracy of the detection object are equal among the multiple capacitance sensors 1.

[0016] (3) Control section The control unit 2 controls the multiple capacitance sensors 1. More specifically, the control unit 2 uses the detection electrodes 20 of each of the multiple capacitance sensors 1 to detect an object to be sensed.

[0017] The control unit 2 applies a voltage to the detection electrode 20 of each of the multiple capacitance sensors 1. More specifically, the control unit 2 applies a voltage to each of the multiple capacitance sensors 1 so that the potential difference between the detection electrode 20 of each of the multiple capacitance sensors 1 and a ground electrode serving as a reference becomes a reference voltage value. Then, the control unit 2 measures a current value flowing into or out of each of the multiple capacitance sensors 1, and calculates the charge amount (capacitance value) of each of the detection electrodes 20 of the multiple capacitance sensors 1. Note that the reference voltage value may be, for example, a single value, or a value that changes depending on the passage of time, for example, a value that changes in a rectangular wave shape that periodically repeats ON (a state in which the reference voltage is applied) and OFF (a state in which the reference voltage is not applied).

[0018] The control unit 2 detects the approach of the object to be detected based on the capacitance value of the detection electrode 20 of each of the multiple capacitance sensors 1. More specifically, when the capacitance value of the detection electrode 20 for each of the multiple capacitance sensors 1 is equal to or greater than a threshold value, the control unit 2 generates determination information corresponding to that capacitance sensor 1. The control unit 2 determines the approach of the object to be detected based on the presence or absence of multiple pieces of determination information corresponding to each of the multiple capacitance sensors 1.

[0019] 2. Capacitive sensor placement The three capacitance sensors 1 include a first sensor 1a, a second sensor 1b, and a third sensor 1c. The three capacitance sensors 1 are arranged on the same plane. More specifically, the first surfaces 11 of the substrates 10 of the first sensor 1a, the second sensor 1b, and the third sensor 1c are arranged on the same plane. Therefore, each of the third direction D3 of the first sensor 1a, the third direction D3 of the second sensor 1b, and the third direction D3 of the third sensor 1c is parallel to the Z axis (see FIG. 3).

[0020] FIG. 3 is a schematic diagram showing the arrangement of three capacitance sensors 1a, 1b, and 1c in a space indicated by mutually orthogonal X-axis, Y-axis, and Z-axis, and the detection area S1 of the capacitance sensor 1a, the detection area S2 of the capacitance sensor 1b, and the detection area S3 of the capacitance sensor 1c. FIG. 3 shows three capacitance sensors 1 and detection areas S1 to S3 corresponding to each of the three capacitance sensors 1 in a plane including a part of the detection electrode 20 (see FIG. 2) of the first sensor 1a and normalized to the Y-axis. The detection electrodes 20 of the three capacitance sensors 1 are arranged in a row along the X-axis orthogonal to the Z-axis. More specifically, the first direction D1 of the first sensor 1a, the first direction D1 of the second sensor 1b, and the first direction D1 of the third sensor 1c are each parallel to the X-axis (see FIG. 3). As shown in FIG. 3, the first sensor 1a is located between the second sensor 1b and the third sensor 1c in the extension direction of the X-axis. Here, the first sensor 1a, the second sensor 1b, and the third sensor 1c are arranged such that the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c overlap with each other. Here, the "detection area S1 of the first sensor 1a" refers to the range in which the capacitance of the detection electrode 20 of the first sensor 1a may change depending on the presence or absence of the detection object.

[0021] The control unit 2 generates first information as the determination information when the capacitance value of the first sensor 1a is equal to or greater than the first threshold. The control unit 2 generates second information as the determination information when the capacitance value of the second sensor 1b is equal to or greater than the second threshold. The control unit 2 generates third information as the determination information when the capacitance value of the third sensor 1c is equal to or greater than the third threshold.

[0022] In the following description, the first information is said to be positive when the first information is generated, that is, the capacitance value of the first sensor 1a is equal to or greater than the first threshold. Similarly, the second information is said to be positive when the second information is generated, that is, the capacitance value of the second sensor 1b is equal to or greater than the second threshold. Similarly, the third information is said to be positive when the third information is generated, that is, the capacitance value of the third sensor 1c is equal to or greater than the third threshold. Also, the first information is said to be negative when the first information is not generated, that is, the capacitance value of the first sensor 1a is less than the first threshold. Similarly, the second information is said to be negative when the second information is not generated, that is, the capacitance value of the second sensor 1b is equal to the second threshold. Similarly, the third information is said to be negative when the third information is not generated, that is, the capacitance value of the third sensor 1c is less than the third threshold. Note that the control unit 2 may generate information indicating that the first information is negative when the capacitance value of the first sensor 1a is less than the first threshold. Similarly, the control unit 2 may generate information indicating that the second information is negative when the capacitance value of the second sensor 1b is less than the second threshold value. Similarly, the control unit 2 may generate information indicating that the third information is negative when the capacitance value of the third sensor 1c is less than the third threshold value.

[0023] The control unit 2 sets the first threshold, the second threshold, and the third threshold based on a detection range S4 in which the detection target object is detected. The detection range S4 refers to a range of space in which the capacitance sensor module 100 determines whether the detection target object has approached. The control unit 2, for example, sets the first threshold, the second threshold, and the third threshold to be equal. As described above, since the areas of the detection electrodes 20 of the first sensor 1a, the second sensor 1b, and the third sensor 1c are the same, the first threshold, the second threshold, and the third threshold are equal to each other, and therefore the detection distances of the first sensor 1a, the second sensor 1b, and the third sensor 1c are equal to each other. This allows the control unit 2 to control the detection range based on the distance from each of the detection electrodes 20 of the first sensor 1a, the detection electrodes 20 of the second sensor 1b, and the detection electrodes 20 of the third sensor 1c.

[0024] The control unit 2 determines the approach of the detection target based on the first information, the second information, and the third information. More specifically, when the first information, the second information, and the third information are all positive, the control unit 2 detects the position of the detection target based on which of the capacitance values ​​of the first sensor 1a, the second sensor 1b, and the third sensor 1c is the largest. More specifically, when the first information, the second information, and the third information are all positive, if the capacitance value of the first sensor 1a is the largest, that is, if the capacitance value of the first sensor 1a is larger than the capacitance value of the second sensor 1b and the capacitance value of the third sensor 1c, the control unit 2 determines that the detection target is approaching. The reason is as follows.

[0025] For example, in a situation where the object to be detected exists at the position P1 shown in FIG. 3, the object to be detected is included in all of the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c. In addition, the distance between the first sensor 1a and the position P1 is smaller than the distance between the second sensor 1b and the position P1 and the distance between the third sensor 1c and the position P1. Therefore, as shown in FIG. 4, when the capacitance value 111 of the first sensor 1a is equal to or greater than the first threshold value Th1, the capacitance value 112 of the second sensor 1b is equal to or greater than the second threshold value Th1, and the capacitance value 113 of the third sensor 1c is equal to or greater than the third threshold value Th1, the capacitance value 111 of the first sensor 1a is maximum. That is, the capacitance value 111 of the first sensor 1a is larger than the capacitance value 112 of the second sensor 1b and the capacitance value 113 of the third sensor 1c.

[0026] In contrast, for example, in a situation where the object to be detected exists at position P2 shown in FIG. 3, the object to be detected is included in all of the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c. In addition, the distance between the second sensor 1b and the position P1 is smaller than the distance between the first sensor 1a and the position P1 and the distance between the third sensor 1c and the position P1. Therefore, as shown in FIG. 5, when the capacitance value 111 of the first sensor 1a is equal to or greater than the first threshold value Th1, the capacitance value 112 of the second sensor 1b is equal to or greater than the second threshold value Th1, and the capacitance value 113 of the third sensor 1c is equal to or greater than the third threshold value Th1, the capacitance value 112 of the second sensor 1b is maximum. That is, the capacitance value 112 of the second sensor 1b is greater than the capacitance value 111 of the first sensor 1a and the capacitance value 113 of the third sensor 1c.

[0027] For example, in a situation where the object to be detected is present at position P3 shown in Fig. 3, the object to be detected is included in all of the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c. Also, the distance between the third sensor 1c and position P1 is smaller than the distance between the first sensor 1a and position P1 and the distance between the second sensor 1b and position P1. Therefore, when the capacitance value 111 of the first sensor 1a is equal to or greater than the first threshold value Th1, the capacitance value 112 of the second sensor 1b is equal to or greater than the second threshold value Th1, and the capacitance value 113 of the third sensor 1c is equal to or greater than the third threshold value Th1, the capacitance value 113 of the third sensor 1c is maximum.

[0028] That is, the control unit 2 can determine which of the first sensor 1a, the second sensor 1b, and the third sensor 1c is closest to the detection object based on the relative magnitudes of the capacitance values ​​of the first sensor 1a, the second sensor 1b, and the third sensor 1c. Therefore, the control unit 2 can determine the approach of the detection object only when the capacitance value of the first sensor 1a is the largest, for example, and can set the detection range S4 of the capacitance sensor module 100 only to an area where the detection object is in all of the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c, and the distance between the detection object and the first sensor 1a is shorter than the distance between the detection object and the second sensor 1b and the distance between the detection object and the third sensor 1c. That is, the control unit 2 does not detect the detection object when any one of the first information, the second information, and the third information is negative.

[0029] In the above description, the control unit 2 determines the approach of the detection object based on the first information, the second information, and the third information. On the other hand, the control unit 2 may determine that the detection object is approaching when any one of the first information, the second information, and the third information is positive. In other words, the control unit 2 determines that the detection object is approaching even when one or two of the first information, the second information, and the third information are negative.

[0030] 3.Effects The capacitance sensor module 100 according to the first embodiment includes three capacitance sensors 1 and a control unit 2. The control unit 2 controls the three capacitance sensors 1. The three capacitance sensors 1 include a first sensor 1a, a second sensor 1b, and a third sensor 1c. The control unit 2 detects the approach of a detection target based on each of the first information, the second information, and the third information. The first information indicates that the capacitance value of the first sensor 1a is equal to or greater than a first threshold value. The second information indicates that the capacitance value of the second sensor 1b is equal to or greater than a second threshold value. The third information indicates that the capacitance value of the third sensor 1c is equal to or greater than a third threshold value. As a result, in the capacitance sensor module 100 according to the first embodiment, by combining the detection results of each of the three capacitance sensors 1, it is possible to limit the detection range S4 of the capacitance sensor module 100 as necessary.

[0031] In the capacitance sensor module 100 according to the first embodiment, the control unit 2 sets the first threshold, the second threshold, and the third threshold based on a detection range S4 for detecting a detection target object. This makes it possible for the capacitance sensor module 100 according to the first embodiment to control the detection range S4 based on the distance from each of the detection electrodes 20 of the first sensor 1a, the detection electrodes 20 of the second sensor 1b, and the detection electrodes 20 of the third sensor 1c.

[0032] Furthermore, in the capacitance sensor module 100 according to the first embodiment, when all of the first information, the second information, and the third information are positive, the control unit 2 detects the position of the object to be detected based on which of the capacitance value of the first sensor 1a, the capacitance value of the second sensor 1b, and the capacitance value of the third sensor 1c is the largest. This makes it possible for the capacitance sensor module 100 according to the first embodiment to control the detection range S4 using the correlation of the distances between the object to be detected and each of the three capacitance sensors 1.

[0033] (Embodiment 2) 1. Configuration In the capacitance sensor module 100 according to the second embodiment, each of the multiple capacitance sensors 1d further includes a ground electrode 30. Instead of the ground electrode 30, an electrode for shielding may be provided.

[0034] As shown in Fig. 6, the capacitance sensor 1d includes a substrate 10, one or more (one in Fig. 6) detection electrodes 20, and a ground electrode 30. Note that dot hunting in Fig. 6 indicates the area of ​​the detection electrode 20 or the ground electrode 30.

[0035] The ground electrode 30 is disposed on the first surface 11 of the substrate 10. The ground electrode 30 sandwiches the detection electrode 20 in the first direction D1. More specifically, in a plan view from the third direction D3, the ground electrode 30 surrounds the detection electrode 20 in the first direction D1 and the second direction D2. The ground electrode 30 is formed of a conductive material, and is, for example, a frame-shaped electrode. The ground electrode 30 is, for example, a plate-shaped electrode. Moreover, the ground electrode 30 is, for example, an electrode in which a plurality of linear conductive materials are arranged in a mesh pattern.

[0036] The ground electrode 30 is connected to a reference ground electrode in the control unit 2. That is, when the control unit 2 applies a voltage to the detection electrode 20 of the capacitance sensor 1d, the potential difference between the detection electrode 20 and the ground electrode 30 is equal to the reference voltage value. As a result, when the control unit 2 applies a voltage to the detection electrode 20 of the capacitance sensor 1d, the electric field formed by the detection electrode 20 is less likely to spread from the detection electrode 20 to the second surface 12 side of the substrate 10. Therefore, as shown in FIG. 7, each of the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c is narrower than that of the capacitance sensor module 100 according to the first embodiment (see FIG. 3). Note that FIG. 7 shows the detection areas S1, S2, and S3 of the three capacitance sensors 1d and the three capacitance sensors 1a, 1b, and 1c in a plane including a part of the detection electrode 20 of the first sensor 1a and normalized to the Y axis. Therefore, in the capacitance sensor module 100 of embodiment 2, the detection area S1 of the first sensor 1a, the detection area S2 of the second sensor 1b, and the detection area S3 of the third sensor 1c can each be narrowed, making it possible to control the detection range S4 (see Figure 3) of the capacitance sensor module 100 to be even narrower.

[0037] 2.Effects In the capacitance sensor module 100 according to the second embodiment, each of the three capacitance sensors 1d has a detection electrode 20 and a ground electrode 30 that sandwiches the detection electrode in the first direction D1. In the capacitance sensor module 100 according to the second embodiment, each of the three capacitance sensors 1d may have a detection electrode 20 and a shield electrode that sandwiches the detection electrode in the first direction D1. As a result, in the capacitance sensor module 100 according to the second embodiment, the electric field formed by the detection electrode 20 of the capacitance sensor 1d is less likely to spread than the capacitance sensor 1 (see FIG. 3) that does not have either the ground electrode 30 or the shield electrode. Therefore, it is possible to narrow the detection area of ​​each of the capacitance sensors 1d compared to the detection area of ​​each of the capacitance sensors 1.

[0038] (Embodiment 3) 1. Configuration In the capacitance sensor module 100 according to the third embodiment, a plurality of capacitance sensors 1 are arranged three-dimensionally, not on the same plane.

[0039] In the capacitance sensor module 100 according to the third embodiment, the second sensor 1b and the third sensor 1c are arranged on the same plane as shown in Fig. 8. The first sensor 1a is arranged on a different plane from the second sensor 1b and the third sensor 1c.

[0040] The first sensor 1a, the second sensor 1b, and the third sensor 1c are attached to a cylindrical protrusion 9 protruding in the positive direction of the Z axis, as shown in FIG. 8, for example. The first sensor 1a is disposed on one end of the protrusion 9 on a plane normal to the Z axis. More specifically, the third direction D3 of the first sensor 1a is parallel to the Z axis, and the first surface 11 of the substrate 10 faces the positive direction of the Z axis, and the second surface 12 faces the negative direction of the Z axis. The second sensor 1b and the third sensor 1c are disposed on the surface of a cylinder extending in the extension direction of the Z axis. More specifically, the second sensor 1b and the third sensor 1c protrude from the protrusion 9 in the positive direction of the Y axis in a plan view from the Z axis. The second sensor 1b protrudes from the protrusion 9 in the positive direction of the X axis in a plan view from the Z axis. The third sensor 1c protrudes from the protrusion 9 in the negative direction of the X axis in a plan view from the Z axis. Furthermore, the distance between the second sensor 1b and the first sensor 1a and the distance between the third sensor 1c and the first sensor are, for example, equal.

[0041] In addition, although FIG. 8 shows an example in which the second sensor 1b and the third sensor 1c are arranged on the same curved surface, the first sensor 1a, the second sensor 1b, and the third sensor 1c may be arranged on different planes. In other words, the first sensor 1a, the second sensor 1b, and the third sensor 1c, which are flat or curved, may be arranged on different planes or different curved surfaces. Here, the different planes or different curved surfaces on which the first sensor 1a, the second sensor 1b, and the third sensor 1c are arranged may be in a parallel positional relationship, a perpendicular positional relationship, or a twisted positional relationship that is not a parallel positional relationship or a perpendicular positional relationship. This allows the detection directionality of the capacitance sensor module 100 to be set arbitrarily.

[0042] FIG. 9 shows three capacitance sensors 1 and their respective detection areas in a plane including all of the first sensor 1a, the second sensor 1b, and the third sensor 1c, and normalized to the Y axis. FIG. 10 shows two capacitance sensors 1 (the first sensor 1a and the second sensor 1b) and their detection areas in a plane including the first sensor 1a and the second sensor 1b, and normalized to the X axis. Note that FIG. 10 omits the third sensor 1c and its detection area S3. Note that the first sensor 1a and the third sensor 1c and their respective detection areas in a plane including the first sensor 1a and the third sensor 1c, and normalized to the X axis, have a shape inverted left and right (positive and negative directions of the Y axis) by replacing the second sensor 1b in FIG. 10 with the third sensor 1c and replacing the detection area S2 with the detection area S3. The detection area S1 of the first sensor 1a extends in the positive direction of the Z axis, part of the negative direction of the Z axis, and the positive direction of the X axis, as shown in Figures 9 and 10. The detection area S2 of the second sensor 1b extends in the positive direction of the Z axis, part of the negative direction of the Z axis, the positive direction of the X axis, and the positive direction of the Y axis, as shown in Figures 9 and 10. The detection area S3 of the third sensor 1c extends in the positive direction of the Z axis, part of the negative direction of the Z axis, the negative direction of the X axis, and the positive direction of the Y axis, as shown in Figure 9.

[0043] In the capacitance sensor module 100 according to the third embodiment, an overlapping region of the detection region S1 of the first sensor 1a, the detection region S2 of the second sensor 1b, and the detection region S3 of the third sensor 1c is a relatively narrow region corresponding to the positive direction of the Y axis from the protrusion 9. Therefore, in the capacitance sensor module 100 according to the third embodiment, it is possible to control the detection range S4 in detail three-dimensionally.

[0044] In the capacitance sensor module 100 according to the third embodiment, the distance between the second sensor 1b and the first sensor 1a is equal to the distance between the third sensor 1c and the first sensor 1a. This makes it possible to set the detection range S4 of the capacitance sensor module 100 as a range symmetrical with respect to the Y axis. In the capacitance sensor module 100 according to the third embodiment, the distance between the second sensor 1b and the first sensor 1a may be different from the distance between the third sensor 1c and the first sensor 1a. This makes it possible to set the detection range S4 of the capacitance sensor module 100 as a range asymmetrical with respect to the Y axis.

[0045] Furthermore, in the capacitance sensor module 100 of embodiment 3, multiple capacitance sensors 1 do not need to be present on the same plane but are arranged three-dimensionally, so that the housing (not shown) in which the capacitance sensor module 100 is arranged is smaller and the space required for installing the housing (not shown) can be reduced.

[0046] 2.Effects In the capacitance sensor module 100 according to the third embodiment, the second sensor 1b and the third sensor 1c are arranged on the same plane. The first sensor 1a is arranged on a different plane from the second sensor 1b and the third sensor 1c. As a result, the capacitance sensors 1 do not need to be on the same plane and are arranged three-dimensionally, so that the housing (not shown) in which the capacitance sensor module 100 is arranged can be made smaller and the space required for installing the housing (not shown) can be reduced.

[0047] In the capacitance sensor module 100 according to the third embodiment, the distance between the second sensor 1b and the first sensor 1a is equal to the distance between the third sensor 1c and the first sensor 1a. This makes it possible to set the detection range S4 of the capacitance sensor module 100 as a range symmetrical with respect to the Y axis.

[0048] In the capacitance sensor module 100 according to the third embodiment, the first sensor 1a, the second sensor 1b, and the third sensor 1c may be arranged on different planes. This allows the capacitance sensors 1 to be arranged three-dimensionally without needing to be on the same plane, so that the housing (not shown) in which the capacitance sensor module 100 is arranged can be made smaller and the space required for installing the housing (not shown) can be reduced.

[0049] (Embodiment 4) 1. Configuration In the capacitance sensor module 100 according to the fourth embodiment, the control unit 2 further detects the moving direction of the detection target.

[0050] The control unit 2 generates first information when it detects that the capacitance value of the first sensor 1a is equal to or greater than the first threshold value. Then, when the first information is generated and becomes positive, it compares the capacitance value of the second sensor 1b with the capacitance value of the third sensor 1c. Then, the control unit 2 detects the moving direction of the object to be detected based on an increase or decrease in the difference between the capacitance value of the second sensor 1b and the capacitance value of the third sensor 1c. For example, when the value obtained by subtracting the capacitance value of the third sensor 1c from the capacitance value of the second sensor 1b tends to increase, the control unit 2 determines that the object to be detected is moving in the direction from the third sensor 1c to the second sensor 1b.

[0051] Here, it is not essential that the control unit 2 generates the second information when the capacitance value of the second sensor 1b is equal to or greater than the second threshold and generates the third information when the capacitance value of the third sensor 1c is equal to or greater than the third threshold when the control unit 2 detects that the capacitance value of the first sensor 1a is equal to or greater than the first threshold. However, in order for the control unit 2 to detect the moving direction with high accuracy, it is preferable that the control unit 2 generates the second information when the capacitance value of the second sensor 1b is equal to or greater than the second threshold and generates the third information when the capacitance value of the third sensor 1c is equal to or greater than the third threshold when the control unit 2 detects that the capacitance value of the first sensor 1a is equal to or greater than the first threshold.

[0052] Alternatively, when the control unit 2 detects that the capacitance value of the first sensor 1a is equal to or greater than the first threshold, it generates first information and holds the first time, which is the time when the first information was generated. When the control unit 2 detects that the capacitance value of the second sensor 1b is equal to or greater than the second threshold, it generates second information and holds the second time, which is the time when the second information was generated. When the control unit 2 detects that the capacitance value of the third sensor 1c is equal to or greater than the third threshold, it generates third information and holds the third time, which is the time when the third information was generated.

[0053] The control unit 2 detects the moving direction of the object to be detected based on the relationship between the first time, the second time, and the third time. Here, the "relation between the first time, the second time, and the third time" refers to the relationship between the first time, the second time, and the third time on the time axis. FIG. 11 shows three capacitance sensors 1d and their respective detection areas on a plane including a part of the detection electrode 20 of the first sensor 1a and normalized to the Y axis, and two paths R1 and R2 on the plane. When the object to be detected moves from the positive direction of the X axis to the negative direction of the X axis along the path R1 in FIG. 11, the object to be detected approaches the second sensor 1b, then the first sensor 1a, and finally the third sensor 1c. Therefore, as shown in FIG. 12, the first time t1, the second time t2, and the third time t3 are arranged in the order of the second time t2, the first time t1, and the third time t3. On the other hand, when the object to be detected moves from the negative direction of the X-axis to the positive direction of the X-axis along the path R2 in Fig. 11, the object to be detected approaches the third sensor 1c, then the first sensor 1a, and finally the second sensor 1b. Therefore, as shown in Fig. 13, the first time t1, the second time t2, and the third time t3 are arranged in the order of the third time t3, the first time t1, and the second time t2.

[0054] That is, the order of the first time t1, the second time t2, and the third time t3 indicates the order in which the object to be detected approaches the first sensor 1a, the second sensor 1b, and the third sensor 1c. Therefore, the control unit 2 can detect the moving direction of the object to be detected based on the order of the first time t1, the second time t2, and the third time t3.

[0055] 2.Effects In the capacitance sensor module 100 according to the fourth embodiment, the first sensor 1a, the second sensor 1b, and the third sensor 1c have the same sensitivity. When any one of the first information, the second information, and the third information becomes positive, the control unit 2 detects the moving direction of the detection object by comparing any two of the capacitance value of the first sensor 1a, the capacitance value of the second sensor 1b, and the capacitance value of the third sensor 1c. This makes it possible for the capacitance sensor module 100 according to the fourth embodiment to detect not only the position of the detection object but also the moving direction.

[0056] (Embodiment 5) 1. Configuration In the capacitance sensor module 100 according to the fifth embodiment, the capacitance sensor module 100 is used as one or more sensors among the multiple capacitance sensors 1, and the potential of the detection electrodes 20 of the two capacitance sensors 1 sandwiching the one or more sensors is set to a potential independent of the ground potential. That is, each of the first sensor 1a, the second sensor 1b, and the third sensor 1c corresponds to a sensor unit. Each of the detection electrodes 20 of the first sensor 1a, the second sensor 1b, and the third sensor 1c corresponds to a sensor electrode.

[0057] As shown in FIG. 14, the first sensor 1a, the second sensor 1b, and the third sensor 1c are aligned in the extension direction of the X-axis. The first sensor 1a is located between the second sensor 1b and the third sensor 1c. The control unit 2 operates the first sensor 1a as a capacitance sensor. The control unit 2 sets the potential of both the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c to a potential independent of the ground potential. That is, the first sensor 1a corresponds to the first sensor unit. The second sensor 1b and the third sensor 1c correspond to the second sensor unit and the third sensor unit, respectively.

[0058] More specifically, the control unit 2 connects each of the detection electrodes 20 of the second sensor 1b and the third sensor 1c to a shield potential independent of the ground potential. Here, the potential independent of the ground potential refers to a potential that is not electrically connected to a reference ground electrode and the voltage between the detection electrodes is indefinite. Note that the control unit 2 may insulate each of the detection electrodes 20 of the second sensor 1b and the detection electrodes 20 of the third sensor 1c from any other electrodes. In addition, the control unit 2 applies a voltage to the detection electrode 20 of the first sensor 1a so that the voltage value between the detection electrode 20 of the first sensor 1a and the reference ground electrode becomes a reference voltage value.

[0059] As a result, the first sensor 1a is not directly coupled to the GND electrode, but is coupled to the GND electrode via the second sensor 1b or the third sensor 1c. Here, the same voltage is applied to the second sensor 1b and the third sensor 1c at the same timing in synchronization with the first sensor 1a. Therefore, the first sensor 1a and the GND electrode are coupled in series via a very small capacitance. Therefore, the electric field emitted from the first sensor 1a that is absorbed by the GND electrode is suppressed. As a result, by using a shield electrode for the second sensor 1b and the third sensor 1c rather than a GND electrode, it becomes possible for the electric field by the first sensor 1a to be emitted over a wide range. And the detection range of the first sensor 1a is also widened.

[0060] Of the electric field formed by the detection electrode 20 of the first sensor 1a, the part spreading in the positive direction of the X-axis is absorbed by the detection electrode 20 of the second sensor 1b, and the first sensor 1a is less likely to spread in the positive direction of the X-axis than the second sensor 1b. Similarly, of the electric field formed by the detection electrode 20 of the first sensor 1a, the part spreading in the negative direction of the X-axis is absorbed by the detection electrode 20 of the third sensor 1c, and the first sensor 1a is less likely to spread in the negative direction of the X-axis than the third sensor 1c. Therefore, as shown in FIG. 14, the detection area S1 of the first sensor 1a is smaller in the extension direction of the X-axis than the detection area S1 of the first sensor 1a in the first embodiment. Note that FIG. 14 shows the first sensor 1a and its detection area S1 in a plane including a part of the detection electrode 20 of the first sensor 1a and normal to the Y-axis. In the capacitance sensor module 100 of embodiment 5, the entire detection area S1 of the first sensor 1a is set as the detection range S4 of the capacitance sensor module 100, so that it is possible to control the range of the detection range S4 of the capacitance sensor module 100.

[0061] Here, the period during which the first sensor 1a operates as a capacitance sensor and the period during which a potential is supplied to the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c are synchronized. This makes it possible to reliably exert the interaction between the detection electrode 20 of the first sensor 1a and the detection electrodes 20 of the second sensor 1b and the third sensor 1c. In addition, the potential of the detection electrode 20 of the first sensor 1a is the same as the potential of the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c. This prevents the second sensor 1b and the third sensor 1c from generating an electric field that affects the detection of the object to be detected.

[0062] 2.Effects The capacitance sensor module 100 according to the fifth embodiment includes three capacitance sensors 1 and a control unit 2. The control unit 2 controls the three capacitance sensors 1. Each of the three capacitance sensors 1 includes a sensor electrode 20. The three capacitance sensors 1 include a first sensor 1a, a second sensor 1b, and a third sensor 1c. The first sensor 1a is located between the second sensor 1b and the third sensor 1c. The control unit 2 operates the first sensor 1a as a capacitance sensor. The control unit 2 makes the potential of both the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c independent of the ground potential. In addition, the control unit 2 supplies the second sensor 1b and the third sensor 1c with the same potential in synchronization with the first sensor 1a. As a result, in the capacitance sensor module 100 according to the fifth embodiment, the detection area S1 of the first sensor 1a is narrowed at least in the direction in which the three capacitance sensors 1 are arranged. In other words, it is possible to set a detection range in which the detection region S1 of the first sensor 1a is limited in a specific direction, and set this as the detection range S4 of the capacitance sensor module 100.

[0063] In the capacitance sensor module 100 according to the fifth embodiment, the period during which the first sensor 1a is operated as a capacitance sensor is synchronized with the period during which a potential is supplied to the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c. The potential of the detection electrode 20 of the first sensor 1a is the same as the potential of the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c. This makes it possible to reliably exert the above-mentioned interaction between the detection electrode 20 of the first sensor 1a and the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c. In addition, the second sensor 1b and the third sensor 1c do not generate an electric field that affects the detection of the detection target.

[0064] (Modification) 1. Configuration In the capacitance sensor module 100 according to the modified example of the fifth embodiment, the control unit 2 sets the potential of both the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c to the same potential as the ground potential.

[0065] More specifically, the control unit 2 connects the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c to a ground electrode. The control unit 2 also applies a voltage to the detection electrode 20 of the first sensor 1a so that the voltage value between the detection electrode 20 of the first sensor 1a and the reference ground electrode becomes a reference voltage value.

[0066] As a result, the electric field formed by the detection electrode 20 of the first sensor 1a is absorbed by the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c, as in the fifth embodiment, and is less likely to spread in the direction of extension of the X-axis. In addition, the ground electrode absorbs a larger amount of the electric field than the shield electrode, so that the distance and the horizontal reaction range are also shorter. Therefore, in the capacitance sensor module 100 according to the modified example of the fifth embodiment, the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c are each a ground electrode, so that as shown in FIG. 15, the detection region S1 of the first sensor 1a is further narrower in the direction of extension of the X-axis and the direction of extension of the Z-axis than the capacitance sensor module 100 according to the fifth embodiment. Note that FIG. 15 shows the first sensor 1a and its detection region S1 in a plane including a part of the detection electrode 20 of the first sensor 1a and normalized to the Y-axis. In the capacitance sensor module 100 relating to the modified example of embodiment 5, the entire detection area S1 of the near first sensor 1a is set as the detection range S4 of the capacitance sensor module 100, so that it is possible to control the range of the detection range S4 of the capacitance sensor module 100.

[0067] 2.Effects In the capacitance sensor module 100 according to the modification of the fifth embodiment, the control unit 2 sets the potential of both the detection electrode 20 of the second sensor 1b and the detection electrode 20 of the third sensor 1c to the ground potential. This makes it possible to narrow the detection area S1 of the first sensor 1a in the direction in which the three capacitance sensors 1 are arranged, and set it as the detection range S4 of the capacitance sensor module 100.

[0068] (Embodiment 6) 1. Configuration In the capacitance sensor module 100 according to the sixth embodiment, each of the multiple capacitance sensors 1e further includes a shield electrode .

[0069] As shown in FIG. 17A, the capacitance sensor 1e includes, in addition to the configuration of the capacitance sensor 1, a second substrate 13 separate from the substrate (first substrate) 10, and a shield electrode 40.

[0070] Furthermore, the substrate (first substrate) 10 may be provided on the second substrate 13 as an insulating resin layer.

[0071] The second substrate 13 is, for example, a rectangular substrate made of an insulating material. The material of the second substrate 13 is, for example, a resin such as polyethylene terephthalate (PET). The second substrate 13 has a third surface 14 and a fifth surface 15 that face each other in the third direction D3.

[0072] The shield electrode 40 is an electrode formed on the third surface 14 of the second substrate 13. The shield electrode 40 is made of a conductive material. In a plan view from the third direction D3, the shield electrode 40 has a portion that is disposed outside the detection electrode 20.

[0073] The second substrate 13 is attached to the first substrate 10 such that the third surface 14 of the second substrate 13 is in contact with the second surface 12 of the first substrate 10. Therefore, the shield electrode 40 is located on the second surface 12 of the first substrate 10.

[0074] As a result, in the capacitance sensor 1e, the electric field formed by the detection electrode 20 is less likely to penetrate the second substrate 13. Therefore, the electric field formed by the detection electrode 20 of the capacitance sensor 1e is likely to spread only in one direction, the third direction D3. Therefore, it is possible to make the detection range of the capacitance sensor 1e smaller than that of the capacitance sensor 1 according to the first embodiment.

[0075] Similarly to the capacitance sensor 1d according to the second embodiment, the capacitance sensor 1e may include a ground electrode 30. This makes it possible to further reduce the detection range of the capacitance sensor 1e.

[0076] 2.Effects The capacitance sensor 1e according to the sixth embodiment includes a substrate 10, a detection electrode 20, and a shield electrode 40. The substrate 10 has a first surface 11 and a second surface facing each other. The detection electrode 20 is disposed on the first surface 11 of the substrate 10. The shield electrode 40 is disposed on the second surface 12 of the substrate 10. This allows the detection range of the capacitance sensor 1e to be smaller than that of the capacitance sensor 1 according to the first embodiment.

[0077] Furthermore, the capacitance sensor 1e according to the sixth embodiment may further include a ground electrode 30 disposed on the first surface 11 and sandwiching the detection electrode 20 in at least one direction. This makes it possible to further reduce the detection range of the capacitance sensor 1e.

[0078] (Variation 1) 17B, ​​the capacitance sensor 1f includes an adhesive layer 50 in addition to the configuration of the capacitance sensor 1e. The adhesive layer 50 is a resin layer for bonding the third surface 14 of the second substrate 13 and the second surface 12 of the substrate 10.

[0079] The capacitance sensor 1f provides the same effects as the capacitance sensor 1e.

[0080] (Variation 2) Unlike the capacitance sensor 1e, the capacitance sensor 1g does not have a second substrate 13. In the capacitance sensor 1g, the shield electrode 40 is formed directly on the second surface 12 of the substrate 10, as shown in Fig. 17C.

[0081] The capacitance sensor 1g provides the same effects as the capacitance sensor 1e.

[0082] (Other Modifications of the Embodiment) (1) In the first to sixth embodiments, the capacitance sensor module 100 includes three capacitance sensors 1, 1d. However, the number of capacitance sensors 1, 1d is not limited to three and may be four or more.

[0083] Furthermore, the multiple capacitance sensors 1, 1d included in the capacitance sensor module 100 do not need to have the same configuration. For example, in embodiment 5, the first sensor 1a may be capacitance sensor 1d, and the second sensor 1b and the third sensor 1c may be capacitance sensors 1.

[0084] (2) In the first to fourth embodiments, the capacitance sensor module 100 determines that the detection target is approaching when the capacitance value of the first sensor 1a is greater than the capacitance value of the second sensor 1b and the capacitance value of the third sensor 1c when the first information, the second information, and the third information are simultaneously positive. On the other hand, the capacitance sensor module 100 may determine that the detection target is approaching when the capacitance value of the second sensor 1b is greater than the capacitance value of the first sensor 1a and the capacitance value of the third sensor 1c when the first information, the second information, and the third information are simultaneously positive. In this case, the capacitance sensor module 100 may set the vicinity of the second sensor 1b as the detection range S4. Also, for example, the capacitance sensor module 100 may determine that the detection target is approaching based on which of the capacitance value of the first sensor 1a, the capacitance value of the second sensor 1b, and the capacitance value of the third sensor 1c is the smallest when the first information, the second information, and the third information are simultaneously positive. In this case, the capacitance sensor module 100 can exclude only the vicinity of a specific capacitance sensor 1 from the detection range S4.

[0085] (3) In the second embodiment, the ground electrode 30 of the capacitance sensor 1d not only sandwiches the detection electrode 20 in the first direction D1 but also sandwiches the detection electrode 20 therebetween, but as shown in Fig. 16, electrodes 30a and 30b, which are parts of the ground electrode 30, may sandwich the detection electrode 20 in the first direction D1. Note that the dot hunting in Fig. 16 does not indicate a cross section of the detection electrode 20 or the ground electrode 30, but indicates the area of ​​the detection electrode 20 or the ground electrode 30.

[0086] In the capacitance sensor 1d according to the second embodiment, the ground electrode 30 may be used as an electrode that is not connected to the ground potential of the control unit 2. This makes the detection area of ​​the capacitance sensor 1d wider than that of the capacitance sensor 1d according to the second embodiment and narrower than that of the capacitance sensor 1 according to the first embodiment. This may allow the detection range of the capacitance sensor module 100 to be appropriately controlled. In this case, the control unit 2 may be capable of controlling whether or not the ground electrode 30 of the capacitance sensor 1d is connected to the ground potential. This makes it easier for the control unit 2 to appropriately control the detection range S4 of the capacitance sensor module 100.

[0087] (4) In the first to fourth embodiments, the control unit 2 of the capacitance sensor module 100 sets the first threshold, the second threshold, and the third threshold to the same value, but the first threshold, the second threshold, and the third threshold may be different from each other. For example, when the areas of the detection electrodes 20 of the first sensor 1a, the second sensor 1b, and the third sensor 1c are the same, the first threshold, the second threshold, and the third threshold can be made different from each other to make the sizes of the detection regions S1 to S3 different. Also, when the areas of the detection electrodes 20 of the first sensor 1a, the second sensor 1b, and the third sensor 1c are different from each other, the first threshold, the second threshold, and the third threshold can be made different from each other to make the sizes of the detection regions S1 to S3 the same or different from each other. This makes it possible to appropriately control the detection range of the capacitance sensor module 100.

[0088] (Aspect) A capacitance sensor module (100) according to a first aspect includes three or more capacitance sensors (1; 1d to 1f) and a control unit (2). The control unit (2) controls the three or more capacitance sensors (1; 1d to 1f). The three or more capacitance sensors (1; 1d to 1f) include a first sensor (1a), a second sensor (1b), and a third sensor (1c). The control unit (2) detects the approach of a detection target object based on each of the first information, the second information, and the third information. The first information indicates that the capacitance value of the first sensor (1a) is equal to or greater than a first threshold value. The second information indicates that the capacitance value of the second sensor (1b) is equal to or greater than a second threshold value. The third information indicates that the capacitance value of the third sensor (1c) is equal to or greater than a third threshold value.

[0089] According to the capacitance sensor module (100) of the above aspect, the detection range (S4) can be limited as necessary by combining the detection results of the three capacitance sensors (1; 1d to 1f).

[0090] In the capacitance sensor module (100) according to the second aspect, in the first aspect, the control unit (2) sets the first threshold, the second threshold, and the third threshold based on the detection range (S4) for detecting the detection object.

[0091] According to the capacitance sensor module (100) of the above aspect, it is possible to control the detection range (S4) based on the distance from each of the first sensor (1a), the second sensor (1b), and the third sensor (1c).

[0092] In the capacitance sensor module (100) according to the third aspect, in the first or second aspect, when the first information, the second information, and the third information are all positive, the control unit (2) detects the position of the object to be detected based on which of the capacitance value of the first sensor (1a), the capacitance value of the second sensor (1b), and the capacitance value of the third sensor (1c) is maximum.

[0093] According to the capacitance sensor module (100) of the above aspect, it is possible to control the detection range (S4) by utilizing the interrelationship of the distance between the object to be detected and each of the first sensor (1a), the second sensor (1b), and the third sensor (1c).

[0094] In a capacitance sensor module (100) according to a fourth aspect, in any of the first to third aspects, at least one (1d) of the three or more capacitance sensors (1) has a detection electrode (20) and a ground electrode (30) or a shield electrode. The ground electrode (30) or the shield electrode sandwiches the detection electrode (20) in at least one direction.

[0095] According to the capacitance sensor module (100) of the above aspect, the electric field formed by the detection electrode (20) of the capacitance sensor (1d) is less likely to spread than the capacitance sensor (1) that does not have the ground electrode (30) or the shield electrode. Therefore, it is possible to make the detection area of ​​each of the capacitance sensors (1d) smaller than the detection area of ​​each of the capacitance sensors (1).

[0096] In the capacitance sensor module (100) according to the fifth aspect, in any one of the first to fourth aspects, the second sensor (1b) and the third sensor (1c) are arranged on the same plane. The first sensor (1a) is arranged on a plane different from the second sensor (1b) and the third sensor (1c).

[0097] According to the capacitance sensor module (100) of the above aspect, the first sensor (1a) does not need to be on the same plane as the second sensor (1b) and the third sensor (1c) and is arranged three-dimensionally, so that the housing in which the capacitance sensor module (100) is arranged is smaller and the space required for installing the housing can be reduced.

[0098] In the capacitance sensor module (100) according to the sixth aspect, in the fifth aspect, the distance between the second sensor (1b) and the first sensor (1a) is equal to the distance between the third sensor (1c) and the first sensor (1a).

[0099] According to the capacitance sensor module (100) of the above aspect, it is possible to set the detection range (S4) of the capacitance sensor module (100) as a range that is symmetrical with respect to the direction in which the second sensor (1b) and the third sensor (1c) are arranged.

[0100] In the capacitance sensor module (100) according to the seventh aspect, in any of the first to fourth aspects, the first sensor (1a), the second sensor (1b), and the third sensor (1c) are arranged on different planes.

[0101] According to the capacitance sensor module (100) of the above aspect, the first sensor (1a), the second sensor (1b), and the third sensor (1c) do not need to be on the same plane but are arranged three-dimensionally, so that the housing in which the capacitance sensor module (100) is arranged is smaller and the space required for installing the housing can be reduced.

[0102] In the capacitance sensor module (100) according to the eighth aspect, in any of the first to fifth aspects, the first sensor (1a), the second sensor (1b), and the third sensor (1c) have equal sensitivity. When any of the first information, the second information, and the third information becomes positive, the control unit (2) detects the moving direction of the object to be detected by comparing any two of the capacitance value of the first sensor (1a), the capacitance value of the second sensor (1b), and the capacitance value of the third sensor (1c).

[0103] According to the capacitance sensor module (100) of the above aspect, it is possible to detect not only the position of an object to be detected but also the direction of movement of the object.

[0104] A capacitance sensor module (100) according to a ninth embodiment includes three or more sensor units (capacitance sensors 1) and a control unit (2). The control unit (2) controls the three or more sensor units (capacitance sensors 1). Each of the three or more sensor units (capacitance sensors 1) includes a sensor electrode (detection electrode 20). The three or more sensor units (capacitance sensors 1) include a first sensor unit (first sensor 1a), a second sensor unit (second sensor 1b), and a third sensor unit (third sensor 1c). The first sensor unit (first sensor 1a) is located between the second sensor unit (second sensor 1b) and the third sensor unit (third sensor 1c). The control unit (2) operates the first sensor unit (first sensor 1a) as a capacitance sensor. The control unit (2) sets the potential of both the sensor electrode (detection electrode 20) of the second sensor unit (second sensor 1b) and the sensor electrode (detection electrode 20) of the third sensor unit (third sensor 1c) to the same potential as ground potential or to a potential independent of ground potential.

[0105] According to the capacitance sensor module (100) of the above aspect, the detection area of ​​the first sensor unit (first sensor 1a) can be narrowed in the direction in which the three or more sensor units (capacitance sensors 1) are arranged, and can be used as the detection range (S4) of the capacitance sensor module (100).

[0106] In the capacitance sensor module (100) according to claim 10, in the ninth aspect, a period during which the first sensor unit (first sensor 1a) is operated as a capacitance sensor is synchronized with a period during which a potential is supplied to the sensor electrode (detection electrode 20) of the second sensor unit (second sensor 1b) and the sensor electrode (detection electrode 20) of the third sensor unit (third sensor 1c). The potential of the sensor electrode (detection electrode 20) of the first sensor unit (first sensor 1a) is the same as the potential of the sensor electrode (detection electrode 20) of the second sensor unit (second sensor 1b) and the sensor electrode (detection electrode 20) of the third sensor unit (third sensor 1c).

[0107] According to the capacitance sensor module (100) of the above aspect, it is possible to reliably exert an interaction between the first sensor unit (first sensor 1a), the sensor electrode (detection electrode 20) of the second sensor unit (second sensor 1b), and the sensor electrode (detection electrode 20) of the third sensor unit (third sensor 1c). In addition, the second sensor (1b) and the third sensor (1c) do not generate an electric field that affects the detection of the object to be detected.

[0108] In a capacitance sensor module (100) according to an eleventh aspect, in any of the first to tenth aspects, the capacitance sensor (1e; 1f; 1g) includes a substrate (10), a detection electrode (20), and a shield electrode (40). The substrate (10) has a first surface (11) and a second surface (12) facing each other. The detection electrode (20) is disposed on the first surface (11) of the substrate (10). The shield electrode (40) is disposed on the second surface (12) of the substrate (10).

[0109] According to the capacitance sensor (1e; 1f; 1g) of the above aspect, the detection range of the capacitance sensor (1e; 1f; 1g) can be made smaller than that of a capacitance sensor (1) that does not have a shield electrode (40).

[0110] In the capacitance sensor module (100) according to the twelfth aspect, in the eleventh aspect, the capacitance sensor (1e; 1f; 1g) further includes a ground electrode (30) or a shield electrode. The ground electrode (30) or the shield electrode is disposed on the first surface (11) and sandwiches the detection electrode (20) in at least one direction.

[0111] According to the capacitance sensor (1e; 1f; 1g) of the above aspects, the electric field generated by the detection electrode (20) is less likely to spread than in the capacitance sensor (1) that does not have the ground electrode (30). Therefore, it is possible to further narrow the detection region of the capacitance sensor (1e; 1f; 1g). [Explanation of symbols]

[0112] 100 Capacitive Sensor Module 1, 1d, 1e, 1f, 1g Capacitive sensor (sensor unit) 1a First sensor (first sensor unit) 1b Second sensor (second sensor unit) 1c 3rd sensor (3rd sensor unit) 2. Control section 10 Substrate 11 Page 1 12 Side 2 20 Detection electrode (sensor electrode) 30 Ground electrode 40 Shield electrode S4 Detection Range

Claims

1. Three or more capacitive sensors; A control unit that controls the three or more capacitance sensors, the three or more capacitance sensors include a first sensor, a second sensor, and a third sensor; the control unit detects the approach of the detection object based on each of first information indicating that the capacitance value of the first sensor is equal to or greater than a first threshold, second information indicating that the capacitance value of the second sensor is equal to or greater than a second threshold, and third information indicating that the capacitance value of the third sensor is equal to or greater than a third threshold. Capacitive sensor module.

2. The control unit sets the first threshold, the second threshold, and the third threshold based on a detection range in which the detection object is detected. The capacitive sensor module according to claim 1 .

3. when all of the first information, the second information, and the third information are positive, the control unit detects the position of the detection object based on which of the capacitance value of the first sensor, the capacitance value of the second sensor, and the capacitance value of the third sensor is largest. The capacitive sensor module according to claim 1 .

4. At least one of the three or more capacitive sensors has a detection electrode and a ground electrode or a shield electrode sandwiching the detection electrode in at least one direction. The capacitive sensor module according to claim 1 .

5. The second sensor and the third sensor are disposed on the same plane, The first sensor is disposed on a different plane from the second sensor and the third sensor. The capacitive sensor module according to claim 1 .

6. a distance between the second sensor and the first sensor is equal to a distance between the third sensor and the first sensor; The capacitive sensor module according to claim 5 .

7. The first sensor, the second sensor, and the third sensor are arranged on different planes. The capacitive sensor module according to claim 1 .

8. the first sensor, the second sensor, and the third sensor have equal sensitivities; The control unit is When any one of the first information, the second information, and the third information becomes positive, a moving direction of the detection object is detected by comparing any two of a capacitance value of the first sensor, a capacitance value of the second sensor, and a capacitance value of the third sensor. The capacitive sensor module according to claim 1 .

9. Three or more sensor units; A control unit that controls the three or more sensor units, each of the three or more sensor units includes a sensor electrode; the three or more sensor units include a first sensor unit, a second sensor unit and a third sensor unit; the first sensor unit is located between the second sensor unit and the third sensor unit, The control unit is operating the first sensor unit as a capacitance sensor; The potential of each of the sensor electrodes of the second sensor unit and the third sensor unit is set to the same potential as a ground potential or a potential independent of the ground potential. Capacitive sensor module.

10. a period during which the first sensor unit operates as a capacitance sensor; a period during which a potential is supplied to the sensor electrode of the second sensor unit and a period during which a potential is supplied to the sensor electrode of the third sensor unit are synchronized; a potential of the sensor electrode of the first sensor unit is set to the same potential as a potential of the sensor electrode of the second sensor unit and a potential of the sensor electrode of the third sensor unit; The capacitive sensor module according to claim 9 .

11. The capacitance sensor includes: a substrate having a first surface and a second surface opposed to each other; a detection electrode disposed on the first surface of the substrate; a shield electrode disposed on the second surface of the substrate; Equipped with The capacitive sensor module according to claim 1 .

12. The capacitance sensor includes: a ground electrode or a shield electrode disposed on the first surface and sandwiching the detection electrode in at least one direction; Further comprising: The capacitive sensor module according to claim 11.

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