Vaporizer and liquid material vaporizing device

Abstract

To ensure that a liquid material flows in each of heating channels of a vaporizer, and that the liquid material is sufficiently vaporized even at large flow rate.SOLUTION: A vaporizer 3 that heats and vaporizes liquid material LQ includes a spray chamber 121, a plurality of heating channels 122, and a taper portion 13. The liquid material LQ is sprayed into the spray chamber 121. The plurality of heating channels 122 extends from the spray chamber 121 to at least axially one side Da. The taper portion 13 tapers in the axial direction in a communication portion 123 between the spray chamber 121 and the heating channel 122.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a vaporizer and a liquid material vaporizing device. [Background technology]

[0002] In a DLI (Direct Liquid Injection) vaporizer, a gas-liquid mixture of a liquid material and a carrier gas is sprayed into a vaporization chamber using a nozzle to vaporize the liquid material. In recent years, due to the increase in the area of ​​film formation in semiconductor manufacturing processes, there is a demand to vaporize liquid materials at a large flow rate and supply them to semiconductor manufacturing equipment.

[0003] For example, in Patent Document 1, droplets of liquid raw material are introduced into a diameter-expanding space of a vaporization chamber together with a carrier gas. The vaporization chamber has a diameter-expanding space, a guide space, and an outlet space. The guide space is composed of a plurality of guide holes (hereinafter referred to as heating flow paths) formed vertically from above to below, and guides the droplets of liquid raw material introduced into the diameter-expanding space to the outlet space. The droplets of liquid raw material are vaporized as they pass through the diameter-expanding space, the guide space, and the outlet space in that order. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-67906 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, when vaporizing a liquid material at a large flow rate through multiple heating channels as in Patent Document 1, there is a risk that residues of the liquid material will adhere to the connecting parts to the heating channels. If a large amount of residue adheres, the heating channel may be clogged with the residue or the flow rate of the liquid material in the heating channel may decrease. In the latter case, the flow rate in other heating channels may increase, which may cause poor vaporization.

[0006] The present invention has been made to solve the above-mentioned problems, and its purpose is to ensure that liquid material flows through each heating flow path of the vaporizer, thereby sufficiently vaporizing the liquid material even at a large flow rate. [Means for solving the problem]

[0007] A vaporizer according to one aspect of the present invention heats and vaporizes a liquid material. The vaporizer includes a spray chamber, a plurality of heating flow paths, and a tapered portion. The liquid material is sprayed into the spray chamber. The plurality of heating flow paths extend from the spray chamber in at least one axial direction. The tapered portion tapers in the axial direction at a communication portion between the spray chamber and the heating flow paths.

[0008] A liquid material vaporizing device according to another aspect of the present invention includes the above vaporizer, and a liquid material supplying section that supplies liquid material to the vaporizer. Effect of the Invention

[0009] According to the present invention, the liquid material can be reliably caused to flow through each heating flow path of the vaporizer, and the liquid material can be sufficiently vaporized even at a large flow rate. [Brief description of the drawings]

[0010] [Figure 1] 1 is a cross-sectional view showing a schematic configuration example of a liquid material vaporizing device according to an embodiment of the present invention. [Diagram 2] 4 is a perspective cross-sectional view showing an example of the configuration of a vaporizer included in the liquid material vaporizing device. FIG. [Figure 3A] 4 is an enlarged cross-sectional view showing a first configuration example of a communication portion between a spray chamber and each heating flow path in the vaporizer. FIG. [Figure 3B] 4 is a cross-sectional view of the communication portion of the first configuration example, as viewed obliquely from the other axial side. FIG. [Figure 4A] FIG. 11 is a cross-sectional view showing a first modified example of a cylindrical portion. [Figure 4B] FIG. 11 is a cross-sectional view showing a second modified example of the cylindrical portion. [Figure 5A]6 is an enlarged cross-sectional view showing a second configuration example of the communication portion. FIG. [Figure 5B] 11 is a cross-sectional view of the communication portion of the second configuration example, as viewed obliquely from the other axial side. FIG. [Figure 6A] FIG. 11 is an enlarged cross-sectional view showing a third configuration example of the communication portion. [Figure 6B] 13 is a cross-sectional view of the communication portion of the third configuration example, as viewed obliquely from the other axial side. FIG. [Figure 7A] 11A to 11C are enlarged cross-sectional views showing fourth and fifth configuration examples of the communication portion. [Figure 7B] FIG. 11 is a cross-sectional view of the communication portion of the fourth configuration example, as viewed obliquely from the other axial side. [Figure 7C] FIG. 11 is a cross-sectional view of the communication portion of the fifth configuration example, as viewed obliquely from the other axial side. [Figure 8A] FIG. 13 is an enlarged cross-sectional view showing a sixth configuration example of the communication portion. [Figure 8B] FIG. 13 is a cross-sectional view of the communication portion of the sixth configuration example, as viewed obliquely from the other axial side. [Figure 9] FIG. 2 is a perspective view showing a part of a static mixer as a heat exchange element included in the vaporizer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings.

[0012] 1 is a cross-sectional view showing a schematic configuration example of a liquid material vaporizer 1 according to one embodiment of the present invention. The liquid material vaporizer 1 is installed in, for example, a semiconductor manufacturing device (not shown). The liquid material vaporizer 1 includes a liquid material supply unit 2 and a vaporizer 3. The liquid material supply unit 2 and the vaporizer 3 are connected via a connection unit 4, but may also be directly connected without using the connection unit 4.

[0013] The liquid material supply unit 2 supplies the liquid material LQ to the vaporizer 3. Such a liquid material supply unit 2 is composed of, for example, a flow control valve (flow rate adjustment valve). Particularly in this embodiment, the liquid material supply unit 2 supplies a gas-liquid mixture MG, which is a mixture of the liquid material LQ and a carrier gas CG, to the vaporizer 3. The liquid material LQ is a liquid material of a desired gas used in the semiconductor manufacturing process. As the carrier gas CG, for example, an inert gas such as nitrogen or argon can be used.

[0014] The liquid material LQ and the carrier gas CG are mixed in the gas-liquid mixing section 21. The gas-liquid mixing section 21 is configured to have, for example, a valve seat member and a valve body member. The valve body member is driven by an actuator 22 to come into contact with or separate from the valve seat member. The supply of the liquid material LQ flowing through the gap between the valve seat member and the valve body member is turned on and off by the approach and separation of the valve body member from the valve seat member. This makes it possible to switch on and off the mixing of the liquid material LQ with the carrier gas CG. The actuator 22 is configured, for example, as a piezo stack in which multiple piezo elements are layered, but may also be configured as a solenoid or the like.

[0015] The vaporizer 3 heats the gas-liquid mixture MG and vaporizes the liquid material LQ. FIG. 2 is a perspective cross-sectional view showing a configuration example of the vaporizer 3 included in the liquid material vaporizer 1. FIG. 3A is a cross-sectional view showing an enlarged first configuration example of a communication part 123 between a spray chamber 121 described later and each heating flow passage 122 described later in the vaporizer 3. FIG. 3B is a cross-sectional view of the communication part 123 of the first configuration example seen obliquely from the other axial direction Db side. The communication part 123 includes one axial end (particularly one axial end face) of the spray chamber 121 and the other axial end (particularly the inner circumferential surface at the other axial end) of each heating flow passage 122. The communication part 123 may further include the inner circumferential surface of one axial end of the spray chamber 121. FIG. 2 and FIG. 3B show a cross-sectional structure of the vaporizer 3 virtually cut along a plane perpendicular to the axial direction and including the two-dot chain line II-II in FIG. 1. Fig. 3A corresponds to the cross-sectional structure of a portion IIIa surrounded by a dashed line in Fig. 1. In Fig. 3B, the heater 31 is omitted in order to make the structure easier to understand.

[0016] The vaporizer 3 has a nozzle 11 and a vaporizing portion 12 .

[0017] The vaporizer 12 of the vaporizer 3 is a cylindrical structure extending in the axial direction along the central axis CA, and has a spray chamber 121 and a plurality of heating channels 122 therein. Each heating channel 122 extends in at least one axial direction Da from the spray chamber 121 toward one axial end of the vaporizer 12. The other axial end of each heating channel 122 is an opening through which the spray of the gas-liquid mixture MG flows in, and is disposed at one axial end of the spray chamber 121 (particularly the communication section 123). The one axial end of each heating channel 122 is an opening through which the mixed gas MGa flows out, and is disposed on one axial end face of the vaporizer 12.

[0018] In this embodiment, all the heating channels 122 extend linearly in one axial direction Da. However, this example does not exclude a configuration in which all the heating channels 122 do not extend in the same manner. For example, when viewed from the axial direction, each heating channel 122 may be arranged radially around the center axis CA. The extension shape of some of the heating channels 122 may be different from the extension shape of other parts of the heating channels 122. At least one heating channel 122 may extend curvedly rather than linearly, or may extend in a direction intersecting with one axial direction Da, as long as one axial end of the heating channel 122 is arranged on one axial end face of the vaporizer 12. Here, the direction intersecting with one axial direction Da is a direction that includes at least one of a radial component and a circumferential component in addition to the one axial direction Da component.

[0019] The spray hole 111 of the nozzle 11 is arranged on the other axial end face of the spray chamber 121. The nozzle 11 sprays the gas-liquid mixture MG supplied from the liquid material supply unit 2 from the spray hole 111 into the spray chamber 121. The spray of the gas-liquid mixture MG flows from the spray chamber 121 to each heating flow path 122.

[0020] Further, a plurality of heaters 31 for heating the vaporizer 12 (particularly the heating flow passage 122) are embedded in the vaporizer 3. The heaters 31 are columnar and extend in the axial direction, and a plurality of heaters 31 are arranged in the circumferential direction around the central axis CA outside the spray chamber 121 and the plurality of heating flow passages 122. That is, the plurality of heaters 31 are arranged radially outward of the spray chamber 121 and the plurality of heating flow passages 122 so as to surround them.

[0021] The vaporizer 3 further includes a cylindrical portion 32. The cylindrical portion 32 is cylindrical and surrounds the central axis CA, and extends in one axial direction Da at one axial end of the vaporizer 3. In detail, the cylindrical portion 32 extends in one axial direction Da from one axial end face of the vaporizer 12. One axial end of the cylindrical portion 32 is connected to a semiconductor manufacturing device (not shown). The other axial end of the cylindrical portion 32 is disposed radially outward from one axial end of the plurality of heating channels 122 at one axial end face of the vaporizer 12, and surrounds them. In this embodiment, one axial end of the cylindrical portion 32 surrounds one axial end of all of the heating channels 122. In this embodiment, one axial end of each heating channel 122 contacts the inner periphery of one axial end of the cylindrical portion 32 (see FIG. 1 and FIG. 2). However, without being limited to this example, one axial end of at least one heating flow passage 122 may be spaced radially inward from one axial end of the tubular portion 32 .

[0022] The mixed gas MGa flowing out from one axial end of each heating flow passage 122 joins together inside the tube portion 32 and is supplied to a semiconductor manufacturing apparatus (not shown). The tube portion 32 may be cylindrical or rectangular.

[0023] In this embodiment, as shown in Figures 1 and 2, the inner diameter of the cylindrical portion 32 is constant along the axial direction. However, without being limited to the example shown in Figures 1 and 2, the inner diameter of one axial end of the cylindrical portion 32 may be different from the inner diameter of the other axial end of the cylindrical portion 32. Figure 4A is a cross-sectional view showing a first modified example of the cylindrical portion 32. Figure 4B is a cross-sectional view showing a second modified example of the cylindrical portion 32. Note that Figures 4A and 4B correspond to the cross-sectional structure of a portion IV surrounded by a dashed line in Figure 1.

[0024] For example, as shown in FIG. 4A, the inner diameter Wa1 of one axial end of the tube portion 32 may be larger than the inner diameter Wb1 of the other axial end of the tube portion 32. In detail, in FIG. 4A, the tube portion 32 has a frustum portion 321 and a tube portion 322. The frustum portion 321 is a tube having a frustum shape and extends from one axial end face of the vaporizing portion 12 in one axial direction Da. The inner diameter of the frustum portion 321 tapers and becomes smaller toward the one axial direction Da. The tube portion 322 extends from one axial end of the frustum portion 321 in the one axial direction Da. The inner diameter of the tube portion 322 is constant along the axial direction. In FIG. 4A, the one axial end of the tube portion 322 is the one axial end of the tube portion 32. The other axial end of the tube portion 321 is the other axial end of the frustum portion 321. 4A does not exclude a configuration in which tube portion 322 is omitted. In other words, one axial end portion of tube portion 321 may be one axial end portion of frustum portion 321.

[0025] Alternatively, as shown in FIG. 4B, the inner diameter Wa2 of the one axial end of the tube portion 32 may be smaller than the inner diameter Wb2 of the other axial end of the tube portion 32. In detail, in FIG. 4B, the tube portion 32 has a tube portion 322 and a frustum portion 323. The frustum portion 323 is a tube having a frustum shape and extends from one axial end face of the vaporizing portion 12 to one axial direction Da. The inner diameter of the frustum portion 323 becomes larger toward one axial direction Da. In FIG. 4B, the other axial end of the frustum portion 323 is the other axial end of the tube portion 32. The tube portion 322 extends from one axial end of the frustum portion 323 to one axial direction Da. The configuration of the tube portion 322 in FIG. 4B is the same as that of the tube portion 322 in FIG. 4A. Note that the example of FIG. 4B does not exclude a configuration in which the tube portion 322 is omitted. In other words, one axial end of the tube portion 321 may be one axial end of the frustum portion 323 .

[0026] By making the inner diameter Wa1 (or Wa2) of one axial end of the cylindrical portion 32 different from the inner diameter Wb1 (or Wb2) of the other axial end, the inner diameter Wa1 (or Wa2) of the connection port (i.e., one axial end of the cylindrical portion 32) with a semiconductor manufacturing device (not shown) can be set to any size. In other words, the inner diameter Wa1 (or Wa2) is not influenced by the inner diameter Wb1 (or Wb2) of the other axial end of the cylindrical portion 32 and the arrangement of one axial end of each heating flow channel 122 on one axial end face of the vaporizer 12. Therefore, the inner diameter Wa1 (or Wa2) can be set to a size suitable for connection with a semiconductor manufacturing device (not shown).

[0027] In addition, if a tubular member having a constant inner diameter and different from the inner diameters Wa1, Wa2 of the pipe portion 322 is arranged in place of the frustum portions 321, 323 in the pipe portion 32, a step having a plane perpendicular to the axial direction is formed inside the portion where the tubular member is connected to the pipe portion 322. In this case, the flow path cross-sectional area of ​​the mixed gas MGa in the pipe portion 32 changes suddenly at the step. Therefore, the mixed gas MGa is likely to remain at the step, and its residue is likely to adhere thereto. In particular, when the inner diameter Wb1 of the other axial end of the pipe portion 32 is smaller than the inner diameter Wa1 of the pipe portion 322, the step is formed on the other axial direction Db side (i.e., the upstream side of the mixed gas MGa) of the pipe portion 322. Therefore, the tendency for the mixed gas MGa to remain and for its residue to adhere thereto is particularly noticeable when Wa1>Wb1.

[0028] 4A and 4B, the above-mentioned step is not formed at the portion where the frustum portions 321, 323 and the tube portion 322 are connected, and the mixed gas MGa flowing near the inner peripheral surface of the tube portion 32 flows smoothly along the inner peripheral surfaces of the tapered frustum portions 321, 323 to the tube portion 322. Therefore, since the mixed gas MGa does not stagnate at the portion where the frustum portions 321, 323 and the tube portion 322 are connected, adhesion of the residue can be effectively suppressed or prevented.

[0029] 4A, the step is not formed on the other axial direction Db side of the portion where the frustum portion 321 and the tube portion 322 are connected, and therefore the flow path cross-sectional area of ​​the mixed gas MGa in the tube portion 32 does not suddenly decrease. Also, the inner diameter of one axial end of the frustum portion 321 is the same as the inner diameter Wb1 of the other axial end of the tube portion 322. Therefore, it is possible to more reliably suppress or prevent the retention of the mixed gas MGa and the adhesion of its residue on the inner peripheral surface of the tube portion 32 (particularly near the portion where the frustum portion 321 and the tube portion 322 are connected).

[0030] 4B, by disposing the frustum portion 323, the flow path cross-sectional area of ​​the mixed gas MGa in the cylindrical portion 32 becomes wider toward one side of the axial direction Da. Therefore, the mixed gas MGa does not stagnate on the other side of the axial direction Db of the cylindrical portion 32, and flows smoothly toward the semiconductor manufacturing equipment (not shown). Therefore, it is possible to prevent residues of the mixed gas MGa from adhering to the other side of the axial direction Db of the cylindrical portion 32. Therefore, it is possible to reliably flow the mixed gas MGa into the semiconductor manufacturing equipment, and a large volume of the mixed gas MGa can be sufficiently supplied to the semiconductor manufacturing equipment.

[0031] In this embodiment, as shown in Figures 4A and 4B, one axial end of each heating flow passage 122 is in contact with (the inner peripheral surface of) one axial end of the tubular portion 32. This makes it possible to more effectively prevent the mixed gas MGa from stagnating on the other axial side Db of the tubular portion 32. Therefore, the mixed gas MGa can be made to flow more smoothly toward the semiconductor manufacturing apparatus. However, this example does not exclude a configuration in which one axial end of at least one heating flow passage 122 is separated radially inward from (the inner peripheral surface of) one axial end of the tubular portion 32.

[0032] The liquid material LQ contained in the sprayed gas-liquid mixture MG is heated and vaporized in the vaporizer 12 (particularly, the heating flow passage 122). The mixed gas MGa of the vaporized liquid material LQ and carrier gas CG is discharged from one axial end of each of the heating flow passages 122 toward a semiconductor manufacturing apparatus (not shown).

[0033] At least some of the heating passages 122 are aligned in the circumferential direction about the central axis CA. The central axis CA extends in the axial direction through the spray holes 111 arranged on the other axial end face of the spray chamber 121. For example, in this embodiment, all of the heating passages 122 are aligned in the circumferential direction centered on the central axis CA (see, for example, FIG. 2).

[0034] Here, as shown in FIG. 5A and FIG. 5B, some of the heating flow passages 122 may be arranged in the circumferential direction around the central axis CA, and other heating flow passages 122 may be arranged radially inward from the heating flow passages 122 arranged in the circumferential direction. FIG. 5A is an enlarged cross-sectional view of a second configuration example of the communication part 123. FIG. 5B is a cross-sectional view of the communication part 123 of the second configuration example as viewed obliquely from the other axial direction Db side. Note that FIG. 5A corresponds to the cross-sectional structure of a portion IIIa surrounded by a dashed line in FIG. 1. FIG. 5B corresponds to the cross-sectional structure of the vaporizer 3 cut virtually by a plane perpendicular to the axial direction and including the two-dot chain line II-II in FIG. 1. Also, in FIG. 5B, the heater 31 is omitted from illustration in order to make the structure easier to understand.

[0035] 5A and 5B, the other axial end of the other heating flow passage 122a faces the spray hole 111 in the axial direction. In addition, a first axis JFa extending in the axial direction through the center of the other heating flow passage 122a preferably passes through the spray hole 111 and more preferably coincides with the central axis CA of the vaporizer 12.

[0036] This allows the spray of the liquid material LQ to flow more evenly through some of the heating flow paths 122 that are lined up in the circumferential direction. Furthermore, it is possible to directly flow some of the spray of the gas-liquid mixture MG sprayed from the spray holes 111 through the other heating flow paths 122a. Therefore, residues of the liquid material LQ are less likely to adhere to the communication part 123a between the spray chamber 121 and the other heating flow paths 122a and its vicinity.

[0037] In this case, more preferably, the inner diameter W2 of the other heating flow passage 122a is smaller than the inner diameter W1 of the heating flow passage 122 arranged in the circumferential direction (see FIG. 5A). In this way, the flow rate of the spray in the other heating flow passage 122a can be reduced to approach the flow rate of the spray in each of the heating flow passages 122 arranged in the circumferential direction. In other words, the difference in flow rate between the two can be reduced or eliminated. This is because the spray flows more easily in the other heating flow passage 122a than in each of the heating flow passages 122. Therefore, even with the arrangement as shown in FIG. 5A, the flow rate of the spray flowing in each of the heating flow passages 122, 122a can be made more uniform. Therefore, poor vaporization of the liquid material LQ due to an excessive flow rate (especially in the other heating flow passage 122a) can be suppressed or prevented. However, this example does not exclude a configuration where W2≧W1.

[0038] Furthermore, the above examples do not exclude a configuration in which at least some of the heating flow passages 122 are not arranged in the circumferential direction around the central axis CA, nor do they exclude a configuration in which the other axial end portion of some of the heating flow passages 122a does not axially face the spray hole 111. For example, when viewed from the other axial direction Db side, the multiple heating flow passages 122 may be randomly arranged two-dimensionally.

[0039] As shown in FIGS. 3A to 3B and 5A to 8B, the vaporizer 12 of the vaporizer 3, the spray chamber 121, further includes a tapered portion 13. The tapered portion 13 is disposed in a communication portion 123 between the spray chamber 121 and each heating flow passage 122. For example, the tapered portion 13 is disposed at least one of the axial end portion of the spray chamber 121 (particularly, the axial end portion of the spray chamber 121 facing the axial end portion Db of the spray chamber 121) and the axial end portion of each heating flow passage 122 (particularly, the inner peripheral surface at the axial end portion). The tapered portion 13 may also be disposed on the inner peripheral surface of the axial end portion of the spray chamber 121. The tapered portion 13 tapers toward the axial direction at the communication portion 123 between the spray chamber 121 and the heating flow passage 122. FIG. 6A is an enlarged cross-sectional view showing a third configuration example of the communication portion 123. FIG. 6B is a cross-sectional view of the communication part 123 of the third configuration example, viewed obliquely from the other axial direction Db side. FIG. 7A is a cross-sectional view showing the fourth and fifth configuration examples of the communication part 123 in an enlarged manner. FIG. 7B is a cross-sectional view of the communication part 123 of the fourth configuration example, viewed obliquely from the other axial direction Db side. FIG. 7C is a cross-sectional view of the communication part 123 of the fifth configuration example, viewed obliquely from the other axial direction Db side. FIG. 8A is a cross-sectional view of the communication part 123 of the sixth configuration example, viewed obliquely from the other axial direction Db side. FIG. 8B is a cross-sectional view of the communication part 123 of the sixth configuration example, viewed obliquely from the other axial direction Db side. Note that FIG. 6A, FIG. 7A, and FIG. 8A correspond to the cross-sectional structure of the portion IIIa surrounded by the dashed line in FIG. 1. FIG. 6B, FIG. 7B, FIG. 7C, and FIG. 8B correspond to the cross-sectional structure of the carburetor 3 virtually cut along a plane perpendicular to the axial direction and including the two-dot chain line II-II in FIG. 1. Moreover, in order to make the structure easier to understand, the heater 31 is not illustrated in FIGS. 6B, 7B, 7C, and 8B.

[0040] 3A to 3B and 5A to 8A, by arranging the tapered portion 13 as described above in the communication portion 123 between the spray chamber 121 and each heating flow path 122, the spray of the gas-liquid mixture MG flows smoothly to each heating flow path 122 without stagnating in the communication portion 123. This makes it possible to prevent residues of the sprayed liquid material LQ from adhering to the communication portion 123. This makes it possible to reliably flow the liquid material LQ into each heating flow path 122 of the vaporizer 3, and the liquid material LQ can be sufficiently vaporized even if it is a large volume.

[0041] Preferably, a residue prevention layer 14 that repels the liquid material LQ is disposed on the inner surface of at least one of the spray chamber 121 and the tapered portion 13. That is, the vaporizer 3 is provided with the residue prevention layer 14. More preferably, the residue prevention layer 14 is disposed on the inner surface of the tapered portion 13. For example, in this embodiment, as shown in Figs. 6A to 8A, the residue prevention layer 14 is disposed on all of the inner surfaces of the spray chamber 121 and the tapered portion 13. The residue prevention layer 14 can be disposed by a fluororesin coating process such as PFA (perfluoroalkoxy alkane) processing, a water-repellent process by irradiating the inner surface with a laser, or the like. In this way, the liquid material LQ is unlikely to adhere to the residue prevention layer 14 on the inner surface, so that adhesion of the residue of the spray of the liquid material LQ can be effectively suppressed or prevented. However, this example does not exclude a configuration in which the residue prevention layer 14 is not arranged on the inner surface of the spray chamber 121 on the other axial side Db, nor does it exclude a configuration in which the residue prevention layer 14 is not arranged on the inner surfaces of the spray chamber 121 and the tapered portion 13.

[0042] Also, preferably, as shown in FIG. 3A to FIG. 5B and FIG. 8A to FIG. 8B, the tapered portion 13 includes a first tapered portion 131. The first tapered portion 131 is disposed on one axial end face of the spray chamber 121, and is a cone-shaped curved surface whose outer diameter becomes smaller toward the one axial end Da or the other axial end Db. In this case, a part of the first tapered portion 131 (for example, the other axial end Db side) may be disposed on the inner peripheral surface of one axial end face of the spray chamber 121. For example, in FIG. 3A to FIG. 5B and FIG. 8A to FIG. 8B, the first tapered portion 131 refers to the curved surface of the cone shape disposed on one axial end face of the spray chamber 121 from one axial end to the other axial end. Here, the cone shape includes a cone shape with a pointed tip (for example, a cone shape, a pyramid shape) as well as a pyramid shape with a flat tip (for example, a cone shape, a pyramid shape). For example, in Figures 3A to 3B, 5A to 5B, and 8A to 8B, the cone-shaped first tapered portion 131 is disposed on one axial end face of the spray chamber 121, and the outer diameter thereof becomes smaller toward one axial direction Da. Also, in Figures 6A to 6B, the cone-shaped first tapered portion 131 is disposed on one axial end face of the spray chamber 121, and the outer diameter thereof becomes smaller toward the other axial direction Db. Note that in Figures 6A to 6B, the first tapered portion 131 may be frustum-shaped.

[0043] The first tapered portion 131 can reduce or eliminate a plane disposed on one axial end face of the spray chamber 121 in the communication portion 123 and intersecting (particularly perpendicular to) the axial direction. Therefore, in Figs. 3A to 3B, 5A to 5B, and 8B, the gas-liquid mixture MG can smoothly flow from the spray chamber 121 to each heating flow path 122 in the communication portion 123. In addition, adhesion of residues of the liquid material LQ to one axial end face of the spray chamber 121 can be suppressed or prevented, and can be effectively suppressed or prevented particularly in Figs. 3A to 3B, 5A to 5B, and 8A to 8B. For example, near the first tapered portion 131, the gas flow of the spray flowing from the spray chamber 121 to each heating flow path 122 flows along the first tapered portion 131 in one axial direction Da and flows into each heating flow path 122. Therefore, residue of the liquid material LQ is unlikely to occur in the first tapered section 131. Even if residue occurs, it is swept away into the heating flow path 122 by the air current.

[0044] In this embodiment, the central axis (not shown) of the pyramidal or frustum shape of the first tapered portion 131 coincides with the central axis CA of the vaporizer 12 and extends in the axial direction through the center of gravity of the pyramidal or frustum shape. However, this example does not exclude a configuration in which the central axis of the first tapered portion 131 does not coincide with the central axis CA. For example, the central axis of the first tapered portion 131 may extend in a direction that obliquely intersects with the central axis CA, or may be separated from the central axis CA.

[0045] 7A to 8B, the tapered portion 13 preferably includes a second tapered portion 132. In Figs. 7A to 7C, the tapered portion 13 includes only the second tapered portion 132. On the other hand, in Figs. 8A to 8B, the tapered portion 13 includes both the first tapered portion 131 and the second tapered portion 132.

[0046] The second tapered portion 132 is disposed on the inner circumferential surface at the other axial end of at least one heating flow passage 122, and is a curved surface in a frustum shape with an outer diameter decreasing toward one axial end Da. For example, in Figs. 7A to 8B, the second tapered portion 132 of each heating flow passage 122 indicates the curved surface in the frustum shape disposed at the other axial end of the heating flow passage 122 from one axial end to the other axial end. In this way, the second tapered portion 132 can smoothly flow the gas flow of the spray of the liquid material LQ from the spray chamber 121 to each heating flow passage 122. In addition, the arrangement of the second tapered portion 132 can make the outer shape of the other axial end of the heating flow passage 122 larger than the inner diameter of the heating flow passage 122. Therefore, the area of ​​the plane formed on one axial end face of the spray chamber 121 can be reduced or eliminated. Therefore, the generation of residue of the liquid material LQ can be suppressed or prevented.

[0047] More preferably, in at least two heating flow paths 122 adjacent in the circumferential direction centered on the central axis CA, the second taper portions 132 arranged in each heating flow path 122 (i.e., the second taper portions 132 adjacent in the circumferential direction) are in contact with each other in the circumferential direction. More preferably, in all heating flow paths 122 arranged in the circumferential direction, the second taper portions 132 arranged in each heating flow path 122 adjacent in the circumferential direction are in contact with each other in the circumferential direction. For example, as shown in FIG. 7C, etc., a peak portion 133 is arranged between the second taper portions 132 adjacent in the circumferential direction. The peak portion 133 is formed by the second taper portions 132 adjacent in the circumferential direction and is pointed toward the other axial direction Db. Note that, when the second taper portions 132 adjacent in the circumferential direction are in point contact with each other, the peak portion 133 is point-shaped when viewed from the axial direction and is the contact point between the two. Furthermore, when circumferentially adjacent second tapered portions 132 are in line contact, the apex 133 has a linear shape when viewed from the axial direction, and is the ridge line between them (see Figures 7C and 8B). This makes it possible to make each second tapered portion 132 larger when viewed from the axial direction. This therefore allows the airflow of the spray of liquid material LQ to flow smoothly into the heating flow passage 122. Also, it is possible to reduce or eliminate the area of ​​the plane formed on one axial end face of the spray chamber 121. This therefore makes it possible to further suppress or prevent the generation of residue of liquid material LQ.

[0048] However, without being limited to the above example, in at least some of the heating flow passages 122, the second taper portions 132 (i.e., the second taper portions 132 adjacent in the circumferential direction) arranged at the other axial end portions of at least two heating flow passages 122 adjacent in the circumferential direction centered on the central axis CA may be spaced apart in the circumferential direction. For example, as shown in FIG. 7B, a part of one axial end face of the spray chamber 122 (i.e., the inner surface of the spray chamber 122 facing the other axial direction Db) is arranged between the second taper portions 132 adjacent in the circumferential direction. In this way, the size of each of the second taper portions 132 can be set to a size such that the second taper portions 132 do not come into contact with each other when viewed from the axial direction. Therefore, the second taper portions 132 are easily formed.

[0049] In at least one heating flow passage 122, the first axis JF is preferably different from the second axis JT, and more preferably is spaced radially outward from the second axis JT with respect to the central axis CA. The first axis JF is the central axis of the heating flow passage 122, and extends axially through the center of the heating flow passage 122. The second axis JT is the central axis of the frustum shape of the second taper section 132 disposed in the heating flow passage 122, and extends axially through the center of gravity of the frustum-shaped second taper section 132. For example, in Figs. 7A to 8B, the first axis JF of each heating flow passage 122 is spaced radially outward from the second axis JT of the second taper section 132 disposed at the other axial end of the heating flow passage 122.

[0050] By shifting the central axis of the heating flow passage 122 (i.e., the first axis JF) from the central axis of the second taper portion 132 (i.e., the second axis JT), the degree of freedom in designing the layout of the second taper portion 132 can be improved. Also, the outer shape of the other axial end of the second taper portion 132 can be made larger. Furthermore, by shifting the first axis JF radially outward from the second axis JT, the area of ​​the second taper portion 132 (particularly the radially inner side) can be made larger. Therefore, the area of ​​the plane formed on one axial end face of the spray chamber 121 can be further reduced or eliminated. Therefore, the generation of residue of the liquid material LQ can be further suppressed or prevented.

[0051] However, the above examples do not exclude a configuration in which, in at least one heating passage 122, the first axis JF is separated from the second axis JT in another direction perpendicular to the axial direction (e.g., radially inward, circumferential direction), nor do they exclude a configuration in which, in at least one heating passage 122, the first axis JF of the heating passage 122 overlaps with the second axis JT of the heating passage 122.

[0052] As long as no particular contradiction occurs, the tapered portion 13 may include both the first tapered portion 131 and the second tapered portion 132 as shown in Figures 8A to 8B. Alternatively, the tapered portion 13 may include only the first tapered portion 131 as shown in Figures 3A to 3B and 6A to 6B, or may include only the second tapered portion 132 as shown in Figures 7A to 7B. In other words, it is sufficient for the tapered portion 13 to include at least either the first tapered portion 131 or the second tapered portion 132 disposed at the other axial end of at least one heating flow passage 122.

[0053] 1 to 8B, a cone-shaped tapered surface (reference numeral omitted) whose outer diameter becomes smaller toward the other axial direction Db is arranged on the other axial end surface of the spray chamber 121. However, the other axial end surface of the spray chamber 121 is not limited to this example, and may be a flat surface.

[0054] In addition, as shown in Figs. 6A to 6B and Figs. 7C to 8B, a convex portion 124 protruding in the other axial direction Db may be disposed on one axial end face of the spray chamber 121. The outer diameter of the convex portion 124 as viewed from the axial direction becomes smaller toward the other axial direction Db. The convex portion 124 may be a frustum shape as shown in Fig. 7C, or may be a cone shape with a pointed tip as shown in Figs. 6A to 6B and Figs. 8A to 8B. In Figs. 6A to 6B, the other axial end of each heating flow passage 122 is disposed on the other axial end face of the convex portion 124. Therefore, the gas-liquid mixture MG flowing along the other axial end face of the convex portion 124 can be more smoothly flowed into each heating flow passage 122.

[0055] Preferably, the other axial end of the convex portion 124 is pointed toward the other axial direction Db and faces the spray hole 111 arranged in the other axial end face of the spray chamber 121 in the axial direction (see FIG. 8A, etc.). Residues of the spray of the liquid material LQ tend to adhere to the area of ​​the one axial end face of the spray chamber 121 that faces the spray hole 111 in the axial direction. Therefore, by arranging the convex portion 124 so that it is pointed toward the other axial direction Db (i.e., the spray hole 111 side), it is possible to suppress or prevent adhesion of residues in the vicinity of the above-mentioned area.

[0056] However, the above examples do not exclude configurations in which the other axial end of the convex portion 124 is not pointed in the other axial direction Db, configurations in which the other axial end of the convex portion 124 is not axially opposed to the spray hole 111, and configurations in which the convex portion 124 is not positioned on one axial end face of the spray chamber 121.

[0057] Furthermore, the first to sixth configuration examples of the communication portion 123 described above can be implemented by combining at least some of the configurations together, so long as no particular contradiction occurs.

[0058] Next, the vaporizer 3 includes a heat exchange element 15. The heat exchange element 15 is disposed in each heating flow path 122 and contacts the inner surface of the heating flow path 122 at a predetermined position. The heat exchange element 15 is formed of, for example, a metal material having thermal conductivity. Examples of the metal material include SUS (stainless steel), copper, aluminum, and titanium.

[0059] For example, a static mixer is used as the heat exchange element 15. Fig. 9 is a perspective view showing a part of a static mixer as the heat exchange element 15 included in the vaporizer 3. The static mixer is configured by connecting a plurality of fins 150 in the axial direction. The number of fins 150 is not particularly limited as long as there is a plurality of fins. Each fin 150 can stir the liquid material LQ in the heating flow path 122. This can generate a more complex turbulent flow in the heating flow path 122, thereby improving the heat exchange efficiency of the liquid material LQ and thus improving the vaporization performance.

[0060] For example, the multiple fins 150 include a first fin 151 and a second fin 152. When viewed from one axial direction Da side, the first fin 151 has a shape in which a flat plate is twisted clockwise around its central axis (reference numeral omitted). When viewed from one axial direction Da side, the second fin 152 has a shape in which a flat plate is twisted counterclockwise around its central axis. The first fin 151 and the second fin 152 are alternately arranged in the axial direction and connected by welding or the like. With this configuration, in the heating flow path 122, the first fin 151 or the second fin 152 repeatedly divides the flow path of the liquid material LQ (division of the flow path to the front side and back side of the fin 150) and merges each divided flow path. This reliably generates a more complicated turbulence in the heating flow path 122, thereby improving the vaporization performance.

[0061] The configuration of the static mixer is not limited to the example shown in FIG. 9. For example, at least one through hole extending in the axial direction or thickness direction may be arranged in at least one flat plate of the first fin 151 and the second fin 152, or a notch with a part of the periphery open may be formed. By arranging a through hole in the static mixer, a flow path passing through the through hole can be generated in the static mixer. Therefore, a complex turbulent flow can be more reliably generated in the heating flow path 122, and the vaporization performance can be further improved.

[0062] Furthermore, a filler may be disposed in place of the static mixer in the heat exchange element 15 disposed in at least one heating flow path 122. The filler includes a metallic granular material and filters disposed upstream and downstream of the granular material in the flow path. The filler can achieve a heat exchange efficiency equivalent to that of a static mixer. Therefore, even if the filler is used instead of a static mixer, it is possible to improve the vaporization performance of the liquid material LQ and achieve vaporization of the liquid material LQ at a large flow rate.

[0063] Furthermore, the liquid material vaporizer 1 of this embodiment is an internal mixing type in which the liquid material LQ and the carrier gas CG are mixed inside the liquid material supply unit 2. However, without being limited to this example, the liquid material vaporizer 1 may be an external mixing type in which the liquid material LQ and the carrier gas CG are mixed outside the liquid material supply unit 2. In the external mixing type, for example, the liquid material supply unit 2 introduces the liquid material LQ into the vaporizer 12 via the nozzle 11, and introduces the carrier gas CG into the vaporizer 12 via a separate route. Even in such an external mixing type, by applying the configuration of the vaporizer 3 of this embodiment, it is still possible to improve the vaporization performance of the liquid material LQ and realize vaporization of the liquid material LQ at a large flow rate.

[0064] Although the embodiment of the present invention has been described above, the scope of the present invention is not limited to this, and the invention can be expanded or modified without departing from the spirit of the invention.

[0065] The embodiments described thus far will be summarized below.

[0066] For example, the vaporizer 3 disclosed herein may be A vaporizer 3 that heats and vaporizes a liquid material LQ, A spray chamber 121 in which the liquid material LQ is sprayed; A plurality of heating channels 122 extending from the spray chamber 121 in at least one axial direction Da; a tapered portion 13 tapered in an axial direction at a communication portion 123 between the spray chamber 121 and the heating flow passage 122; The configuration is a first configuration.

[0067] The vaporizer 3 of the first configuration is as follows: The tapered portion 13 includes a first tapered portion 131 disposed on one axial end surface of the spray chamber 121, The first tapered portion 131 may be configured (second configuration) to be a cone-shaped curved surface whose outer diameter becomes smaller toward one axial direction Da or the other axial direction Db.

[0068] Moreover, the vaporizer 3 having the first or second configuration is The tapered portion 13 includes a second tapered portion 132 disposed on an inner circumferential surface at the other axial end portion of at least one of the heating channels 122, The second tapered portion 132 may be configured (third configuration) to have a curved surface in a frustum shape in which the outer diameter becomes smaller toward one axial direction Da.

[0069] Moreover, the vaporizer 3 of the third configuration is In at least two of the heating flow paths 122 adjacent to each other in the circumferential direction, a peak portion 133 is disposed between the second tapered portions 132 disposed in each of the heating flow paths 122, The pointed portion 133 may be configured to be formed by the second tapered portions 132 adjacent in the circumferential direction and to be pointed toward the other axial direction Db (fourth configuration).

[0070] Moreover, the vaporizer 3 having the third or fourth configuration is In at least two of the heating passages 122 adjacent to each other in the circumferential direction, a portion of one axial end face of the spray chamber 121 may be arranged between the second tapered portions 132 arranged in each of the heating passages 122 (fifth configuration).

[0071] In addition, the vaporizer 3 having any one of the third to fifth configurations described above has the following features: In at least one of the heating passages 122, a first axis JF extending axially through the center of the heating passage may have a configuration (sixth configuration) different from a second axis JT extending axially through the center of gravity of the frustum shape of the second tapered portion 132 arranged in the heating passage 122.

[0072] In addition, the vaporizer 3 having any one of the first to sixth configurations described above has the following features: A convex portion 124 protruding in the other axial direction Db is arranged on one axial end face of the spray chamber 121, The other axial end of the convex portion 124 may be configured to be pointed in the other axial direction Db and to axially face the spray hole 111 arranged on the other axial end face of the spray chamber 121 (seventh configuration).

[0073] In addition, the vaporizer 3 having any one of the first to seventh configurations described above has the following features: A residue prevention layer 14 that repels the liquid material LQ may be disposed on the inner surface of at least one of the spray chamber 121 and the tapered portion 13 (eighth configuration).

[0074] In addition, the vaporizer 3 having any one of the first to eighth configurations described above has the following features: At least a portion of the heating passages 122 may be configured (ninth configuration) to be arranged circumferentially around a central axis CA extending axially through a spray hole 111 arranged on the other axial end face of the spray chamber 121.

[0075] In addition, the vaporizer 3 having any one of the first to eighth configurations described above has the following features: The carburetor 3 further includes a cylindrical portion 32 extending in one axial direction Da at one axial end portion thereof, The other axial end of the cylindrical portion 32 surrounds one axial end of the heating flow passage 122, The inner diameter Wa1 (or Wa2) of one axial end of the cylindrical portion 32 may be different from the inner diameter Wb1 (or Wb2) of the other axial end of the cylindrical portion 32 (tenth configuration).

[0076] The liquid material vaporizer 1 disclosed in this specification is A vaporizer 3 having any one of the first to tenth configurations; A liquid material supply unit 2 that supplies the liquid material LQ to the vaporizer 3; The above configuration (eleventh configuration) is provided. [Industrial Applicability]

[0077] The present invention can be used, for example, in a vaporizer provided at the upstream stage of a semiconductor manufacturing device. [Explanation of symbols]

[0078] 1 Liquid material vaporizer 2 Liquid material supply section 21 Gas-liquid mixing section 22 Actuator 3. Carburetor 31 Heater 32 Cylinder part 321 Frustum part 322 Sugabe 323 frustum part 4 Connection 11 Nozzle 111 Spray hole 12 Vaporizing section 121 Spray room 122,122a Heating channel 123,123a Communication part 124 Convex 13 Tapered section 131 First taper section 132 Second taper section 133 Apex 14 Residue prevention layer 15 Heat exchange element 150 Fins 151 1st Fin 152 2nd Fin CG Carrier Gas LQ Liquid Material MG gas-liquid mixture MGa mixed gas CA center axis JF, JFa 1st axis JT 2nd axis Da Axial direction Db Axial other side

Claims

1. A vaporizer that heats and vaporizes a liquid material, a spray chamber in which the liquid material is sprayed; a plurality of heating passages extending in at least one axial direction from the spray chamber; a tapered portion tapered in an axial direction at a communicating portion between the spray chamber and the heating flow passage; A vaporizer comprising:

2. The tapered portion includes a first tapered portion disposed on one axial end surface of the spray chamber, 2. The carburetor according to claim 1, wherein the first tapered portion is a cone-shaped curved surface having an outer diameter that decreases toward one or the other axial direction.

3. the tapered portion includes a second tapered portion disposed on an inner circumferential surface at the other axial end portion of at least one of the heating channels, 3. The carburetor according to claim 1, wherein the second tapered portion is a frustum-shaped curved surface whose outer diameter decreases in one axial direction.

4. In at least two of the heating flow paths adjacent to each other in the circumferential direction, a peak is disposed between the second tapered portions disposed in each of the heating flow paths, The carburetor according to claim 3 , wherein the peak portion is constituted by the second tapered portion adjacent in the circumferential direction and peaks toward the other axial direction.

5. A carburetor as described in claim 3 or claim 4, wherein in at least two of the heating flow passages adjacent in the circumferential direction, a portion of one axial end face of the spray chamber is positioned between the second tapered portions arranged in each of the heating flow passages.

6. A vaporizer as described in any one of claims 3 to 5, wherein in at least one of the heating flow paths, a first axis extending axially through the center of the heating flow path is different from a second axis extending axially through the center of gravity of the frustum shape of the second tapered portion arranged in the heating flow path.

7. A convex portion protruding in the other axial direction is disposed on one axial end surface of the spray chamber, 7. The carburetor according to claim 1, wherein the other axial end of the protrusion is pointed in the other axial direction and faces a spray hole arranged in the other axial end face of the spray chamber in the axial direction.

8. The vaporizer according to claim 1 , wherein a residue prevention layer that repels the liquid material is disposed on an inner surface of at least one of the spray chamber and the tapered portion.

9. 9. The carburetor according to claim 1, wherein at least a portion of the heating flow passages are arranged in a circumferential direction around a central axis extending in the axial direction through a spray hole arranged on the other axial end face of the spray chamber.

10. a cylindrical portion extending in one axial direction at one axial end of the carburetor, the other axial end of the cylindrical portion surrounds one axial end of the heating flow passage, 10. The carburetor according to claim 1, wherein an inner diameter of one axial end of the cylindrical portion is different from an inner diameter of the other axial end of the cylindrical portion.

11. A vaporizer according to any one of claims 1 to 10; a liquid material supply unit that supplies the liquid material to the vaporizer; A liquid material vaporizer comprising:

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