Conveyance system

Abstract

To provide a conveyance system capable of improving a utilization efficiency of a processing device.SOLUTION: A conveyance system 1 comprises: a conveyance path 10 that is arranged above a plurality of processing devices 100 over the plurality of processing devices 100; and a conveyance vehicle 20 that contains a first cassette 23 housing a material 210, and travels on the conveyance path 10. The conveyance vehicle 20 includes a first lifting unit that lifts the first cassette 23 with respect to each processing device 100. Each processing device 100 includes: a passing port 312 where the first cassette 23 passes onto an upper surface; a second cassette 330 that houses a plurality of materials 210; a conveyance arm 345 that conveys each material 210 between the first cassette 23 and the second cassette 330; and a movement unit 350 that relatively moves at least any one of the first cassette 23 and the second cassette 330 and the conveyance arm 345. Each material 210 is conveyed between the first cassette 23 and the second cassette 330.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a transport system. [Background technology]

[0002] 2. Description of the Related Art There is known a transport system in which a transport vehicle (automated transport vehicle) transports items such as workpieces, processing tools, and consumables used in processing to a processing device that processes a plurality of workpieces (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-161579 A Summary of the Invention [Problem to be solved by the invention]

[0004] In such a conveying system, the processing equipment is operated by conveying the workpieces or articles from a cassette supplied from the conveying vehicle into the processing equipment. Therefore, since the processing of the processing equipment depends on the timing at which the workpieces or articles are supplied from the conveying vehicle, there is a problem that the operating efficiency of the processing equipment may decrease.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a transport system that improves the operating efficiency of a processing device. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the conveying system of the present invention is a conveying system that conveys articles to a processing device that processes the articles, the conveying system comprising: a conveying path that spans multiple processing devices and is arranged above the processing devices, a conveying vehicle that includes a first cassette that stores articles and runs on the conveying path, and a control unit, the conveying vehicle has a first lifting unit that raises and lowers the first cassette relative to the processing device, the processing device has a passing opening on its upper surface through which the first cassette passes, a second cassette that stores multiple articles, a conveying arm that conveys the articles between the first cassette and the second cassette, and a moving unit that moves at least one of the first cassette and the second cassette relative to the conveying arm, and the control unit drives the moving unit to convey articles between the first cassette and the second cassette using the conveying arm.

[0007] The second cassette may have an upper surface formed with a landing portion on which the first cassette can land.

[0008] The moving unit may include a second lifting unit that raises and lowers the second cassette relative to the transport arm.

[0009] The article may be at least one of a workpiece to be processed by the processing device and a consumable item to be used by the processing device.

[0010] The processing device may include at least one of a processing device that processes the workpiece, an inspection device that inspects the condition of the workpiece, and a storage unit having a storage section that stores a plurality of workpieces and transfers the workpieces between the storage section and the first cassette of the transport vehicle. Effect of the Invention

[0011] In the present invention, a second cassette capable of storing multiple items is installed in the processing device, and the items are transported from the first cassette on the transport vehicle to the second cassette.Since the processing device can hold multiple items, the processing of the processing device is less affected by the timing at which the items are supplied from the transport vehicle, and the operating efficiency of the processing device can be improved. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic diagram showing a configuration example of a transfer system according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a part of the transport system of FIG. [Diagram 3] FIG. 3 is a side cross-sectional view showing one state of the processing apparatus shown in FIG. [Figure 4] FIG. 4 is a side sectional view showing one state of the processing apparatus shown in FIG. [Diagram 5] FIG. 5 is a side cross-sectional view showing one state of the processing apparatus shown in FIG. [Figure 6] FIG. 6 is a side cross-sectional view showing an example of an inspection device, which is another example of the processing device of the transfer system of FIG. [Figure 7] FIG. 7 is a side cross-sectional view showing a part of the inspection device of FIG. [Figure 8] FIG. 8 is a side cross-sectional view showing a stocker which is another example of the processing device of the transfer system of FIG. [Figure 9] FIG. 9 is a perspective view showing a transport vehicle of the transport system of FIG. [Figure 10] 10 is a side cross-sectional view showing a first lifting unit of the transport vehicle of FIG. [Figure 11] FIG. 11 is a side cross-sectional view showing a main part of a transfer system according to the second embodiment. [Figure 12] FIG. 12 is a top view showing a main part of the transfer system according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0014] [Embodiment 1] A conveying system 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram (top view) showing a configuration example of the conveying system 1 according to the first embodiment. FIG. 2 is a perspective view showing a part of the conveying system 1 of FIG. 1. FIG. 2 shows a processing device 110 (cutting device) which is an example of the processing device 100 of the conveying system 1 of FIG. 1, a part of the conveying path 10, and a part of the conveying vehicles 20. FIGS. 3, 4, and 5 are all side cross-sectional views showing one state of the processing device 100 shown in FIG. 2. FIGS. 3, 4, and 5 all omit illustration of a part of the conveying unit 340, a processing unit 360, a receiving unit 370, a transmitting unit 380, and a control unit 390, which will be described later. In the drawings, some components are omitted as appropriate, or some components are simply shown by outlines or the like.

[0015] 1, the transport system 1 includes a transport path 10 arranged above a plurality of processing devices 100 that perform processing on workpieces 200, a transport vehicle 20 that includes a first cassette 23 (see FIG. 2, etc.) that stores an article 210 including the workpiece 200 and travels on the transport path 10, and a control unit 30. Note that the transport system 1 may include the processing device 100 as a component.

[0016] In the example shown in Fig. 1, the conveying system 1 in the first embodiment is provided with ten processing devices 100, including a processing device 110 (cutting device), a tape attachment device 120, a processing device 130 (grinding device), a processing device 140 (tape expansion device), an inspection device 150, an inspection device 160, an arbitrary processing device 170, and three stockers 190, but the present invention is not limited to this, and any number of processing devices 100 may be provided as long as the processing device 100 can divide the workpiece 200 to manufacture a plurality of device chips, and any combination of processing devices 100 may be used. In addition, the conveying system 1 in the first embodiment includes a plurality of conveying vehicles 20 (five in the example shown in Fig. 1), but the present invention is not limited to this, and may include one to four, or six or more.

[0017] A description will be given of a workpiece 200 which is an example of an article 210 to be processed by the processing device 100 and transported by the transport vehicle 20. The workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like.

[0018] The workpiece 200 has a flat surface 201 (see FIG. 6 ) and has a device region in which chip-like devices 203 (see FIG. 6 ) are formed in each region partitioned by a plurality of planned division lines that intersect with each other, and a peripheral excess region in which no devices 203 are formed and which surrounds the periphery of the device region. The workpiece 200 is processed by the processing device 100 to divide the device region along the planned division lines, thereby manufacturing chips of the plurality of devices 203 (device chips). The device chips manufactured from the workpiece 200 are included in the goods 210 to be transported by the transport vehicle 20.

[0019] The workpiece 200 has a support tape 205 (see FIG. 2) attached to a back surface 204 (see FIG. 6) on the back side of the front surface 201, and an annular frame 206 (see FIG. 2) attached to the outer edge of the support tape 205. That is, the workpiece 200 is supported and fixed to the opening of the annular frame 206 via the support tape 205. Note that the workpiece 200 is not limited to this in the present invention, and the annular frame 206 may not be attached, and the support tape 205 may not be attached. In addition, in the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0020] The items 210 to be transported by the transport vehicle 20 include, in addition to the workpiece 200 and the device chips manufactured from the workpiece 200, processing tools used to process the workpiece 200, consumables used to inspect the state of the processing tools, cleaning tools for cleaning the processing device 100, maintenance parts for maintaining the processing device 100, and the like. The processing tools used to process the workpiece 200 and process the workpiece 200 are, for example, cutting blades, grinding wheels, and the like. Other consumables used to process the workpiece 200 are, for example, dressing boards, precut boards, dummy works, dummy workpieces, adhesive tapes, carbon pieces, and the like. The cleaning tools are cleaning supplies such as cleaning stones for cleaning the support surface on which the processing tools are attached, and the like. The maintenance parts are maintenance tools for maintaining any other mechanisms provided in the processing device 100, and the like. Regarding the workpiece 200 and the item 210 other than the device chip manufactured from the workpiece 200, in embodiment 1, as shown in FIG. 2, a support tape 205 (adhesive tape) is attached to the back surface and an annular frame 206 is attached to the outer edge of the support tape 205, but the present invention is not limited to this, and the annular frame 206 may not be attached, and the support tape 205 may not be attached.

[0021] The article 210 is provided with a barcode, ID (IDentification), RFID (Radio Frequency IDentification) tag, or the like (all not shown) that indicates the type of the article 210. Here, the type of the article 210 refers to the type of the article 210, the specifications of the article 210, and information for distinguishing each article 210. The type of the article 210 is, for example, the workpiece 200 (or a device chip manufactured from the workpiece 200), a substrate, a cutting blade, a grinding wheel, a dressing board, a precut board, a dummy work, a dummy workpiece, an adhesive tape, a piece of carbon, a cleaning tool, a maintenance tool, and the like. For example, when the article 210 is a workpiece 200, the specifications of the article 210 include the diameter, thickness, composition and configuration of the base material, type and specifications of the device 203, the interval (index width), width and number of the planned division lines, the material, configuration, type and specifications of the attached support tape 205, and the material, configuration, type and specifications of the annular frame 206. Even when the article 210 is something other than the workpiece 200, the specification items of the article 210 are appropriately determined according to the type of the article 210. The information for distinguishing each article 210 is, for example, an identification number provided for each article 210. Furthermore, when the article 210 is a workpiece 200, the information for distinguishing each article 210 may include the lot number of the workpiece 200.

[0022] 2, the processing device 100 of the transport system 1 includes a housing 310, a second cassette mounting table 320, a second cassette 330, a transport unit 340, a second lifting unit 351, a processing unit 360, a receiving unit 370, a transmitting unit 380, and a control unit 390. The housing 310 houses each of the components of the processing device 100 except for the housing 310. A passage opening 312 having a size and shape that allows the first cassette 23 of the transport vehicle 20 that houses the article 210 (workpiece 200) to pass through is formed in a ceiling 311 above the housing 310. In the following description of this specification, components and items that are similar (generally common) among the processing device 110 (cutting device), the tape application device 120 shown in FIG. 1, the processing device 130 (grinding device) shown in FIG. 1, the processing device 140 (tape expansion device) shown in FIG. 1, and any processing device 170 shown in FIG. 1 will be described as components and items of the processing device 100.

[0023] 2, the second cassette placement stage 320 is provided below the passage opening 312 in the vertical direction (Z-axis direction in FIG. 2, etc.), and is a placement stage for placing a second cassette 330 which is a container for storing a plurality of articles 210 (workpieces 200). A second lifting unit 351 is connected below the second cassette placement stage 320, and the second cassette placement stage 320 is provided so as to be freely raised and lowered in the vertical direction by the second lifting unit 351.

[0024] In the first embodiment, the second cassette 330 is formed in a rectangular box shape having a pair of side walls facing each other, a bottom plate formed in a flat plate shape connecting the lower ends of the pair of side walls, a top plate connecting the upper ends of the pair of side walls, and a back plate connecting the ends of one side (rear side) of the pair of side walls, bottom plate, and top plate. The pair of side walls, bottom plate, top plate, and back plate are all formed in a flat plate shape. The second cassette 330 is surrounded by the ends of the other side (front) of the pair of side walls, bottom plate, and top plate, and an opening of a size and shape that allows the article 210 (workpiece 200) to pass through is formed on the opposite side facing the back plate.

[0025] A pair of side walls of the second cassette 330 form a pair of guide rails on the inside, which extend in the direction in which the rear plate and the opening face each other. One side of each pair of guide rails (a pair of guide rails) is formed so as to protrude from one side wall toward the other side wall, and the other side is formed so as to protrude from the other side wall toward the one side wall, and is formed at a position where the vertical height is uniform. The multiple pairs of guide rails are equally spaced apart at a predetermined interval in the vertical direction that is sufficiently larger than the thickness of the article 210 (workpiece 200). The second cassette 330 accommodates the article 210 (workpiece 200) by placing an end of the article 210 (workpiece 200) or a portion of the annular frame 206 attached to the article 210 (workpiece 200) on the pair of guide rails, or by placing an end of the article 210 (workpiece 200) or a portion of the annular frame 206 attached to the article 210 (workpiece 200) on a support plate installed on the pair of guide rails. The second cassette 330 accommodates a number of articles 210 (workpieces 200) equal to the number of pairs of guide rails.

[0026] The second cassette 330 is placed on the second cassette placing stage 320 with its top plate facing upward and its bottom plate facing downward, facing the upper surface of the second cassette placing stage 320, and with its opening facing the transport unit 340. The second cassette 330 placed on the second cassette placing stage 320 rises and falls as the second elevating unit 351 rises and falls the second cassette placing stage 320.

[0027] A landing portion 331 on which the first cassette 23 of the transport vehicle 20 lands is formed on the upper surface of the top plate of the second cassette 330. The landing portion 331 is a portion (area) on which the first cassette 23 descended by the first lifting unit 24 from the transport vehicle 20 lands and is placed, and is provided with the same shape and size as the shape and size of the first cassette 23 in a plan view. The second cassette 330 supports the first cassette 23 that has landed and been placed thereon, facing upward, on the landing portion 331.

[0028] A positioning block 332 is provided on the landing portion 331. A plurality of positioning blocks 332 (four in the example shown in FIG. 2) are erected on the outer periphery side of the landing portion 331 from the upper surface of the top plate of the second cassette 330. The positioning blocks 332 are arranged on the inner periphery side at positions where the outer periphery side of the first cassette 23 can be fitted. The positioning block 332 has an inclined surface formed on the inner periphery side surface, which is inclined in a direction protruding toward the inner periphery as it goes downward. Furthermore, the inclined surface is formed to be curved, so that the first cassette 23 smoothly slides along the positioning block 332 and is positioned. Therefore, even if the horizontal position of the first cassette 23 deviates from the landing section 331 when the first cassette 23 is lowered from the transport vehicle 20 stopped in the delivery area 12 (see FIG. 2, etc.), the positioning block 332 contacts the first cassette 23 with its inclined surface, corrects the horizontal position of the first cassette 23 (direction parallel to the XY plane in FIG. 2, etc.), positions the first cassette 23 in the horizontal direction, and allows the first cassette 23 to land and be placed accurately on the landing section 331. The positioning block 332 also regulates the first cassette 23 placed on the landing section 331 so as not to move horizontally on the upper surface of the top plate of the second cassette 330. In the processing device 100, the positioning block 332 thus preferably restricts the horizontal movement of the first cassette 23 on the landing portion 331, so that the first cassette 23 can be stably raised and lowered on the landing portion 331 as the second lifting unit 351 raises and lowers the second cassette 330. The second lifting unit 351 may be configured to have a known ball screw mechanism having a motor, a ball screw, and a guide, or may be configured to have an air cylinder as a drive source instead of a motor.

[0029] The transport unit 340 is installed adjacent to the second cassette mounting table 320, as shown in Fig. 2. The transport unit 340 transports the article 210 (workpiece 200) between the inside of the first cassette 23 that has landed on the landing section 331, the inside of the second cassette 330 that has been mounted on the second cassette mounting table 320, and a predetermined position relative to the processing unit 360. Here, in the example of the first embodiment shown in Fig. 2, the predetermined position relative to the processing unit 360 is on a holding table (chuck table) around the processing unit 360-1 (cutting unit) and the processing unit 360-3 (imaging unit, inspection unit), or on a spinner table of the processing unit 360-2 (cleaning unit).

[0030] In the first embodiment, the transport unit 340 includes a first transport section 341, a second transport section 342, and a pair of rails 343, as shown in FIG. 2. As shown in FIGS. 2, 3, 4, and 5, the first transport section 341 includes a transport arm 345 provided toward the side where the second cassette placement table 320 is provided, and an arm moving section 346 that moves the transport arm 345 along the horizontal direction. In the first embodiment, the transport arm 345 holds the tip of the annular frame 206 attached to the article 210 (workpiece 200) from above and below and pulls it out onto the pair of rails 343. Note that the form of the transport arm 345 is not limited to this in the present invention, and may be, for example, a robot pick equipped with a U-shaped hand, and may suction-hold the workpiece 200 from above or below.

[0031] 3, when the processing device 100 carries out the article 210 (workpiece 200) from the first cassette 23, the second lifting unit 351 adjusts the vertical height of the first cassette 23 that has landed on the landing portion 331 to that of the transport arm 345, and then the arm moving unit 346 moves the transport arm 345 into the first cassette 23, and the transport arm 345 holds the article 210 (workpiece 200) in the first cassette 23. Next, as shown in FIG. 4, the arm moving unit 346 moves the transport arm 345 out of the first cassette 23, whereby the transport arm 345 carries out the article 210 (workpiece 200) from the first cassette 23.

[0032] Furthermore, when the processing device 100 carries the article 210 (workpiece 200) into the first cassette 23, the second lifting unit 351 aligns the vertical height of the first cassette 23 that has landed on the landing portion 331 with the transport arm 345, and then the arm moving portion 346 moves the transport arm 345 into the first cassette 23. Next, the transport arm 345 releases the held article 210 (workpiece 200) in the first cassette 23, and the arm moving portion 346 moves the transport arm 345 out of the first cassette 23, whereby the transport arm 345 carries the article 210 (workpiece 200) into the first cassette 23.

[0033] When carrying out the article 210 (workpiece 200) from the second cassette 330, the processing device 100 uses the second lifting unit 351 to align the vertical height of the second cassette 330 placed on the second cassette placement table 320 with the transport arm 345, and then uses the arm moving unit 346 to move the transport arm 345 into the second cassette 330, and the transport arm 345 holds the article 210 (workpiece 200) in the second cassette 330. Next, the arm moving unit 346 moves the transport arm 345 out of the second cassette 330, whereby the transport arm 345 carries out the article 210 (workpiece 200) from the second cassette 330.

[0034] 5, when the processing device 100 carries the article 210 (workpiece 200) into the second cassette 330, the second lifting unit 351 aligns the vertical height of the second cassette 330 placed on the second cassette placement table 320 with that of the transport arm 345, and then the arm moving unit 346 moves the transport arm 345 into the second cassette 330. Next, the transport arm 345 releases the held article 210 (workpiece 200) in the second cassette 330, and the arm moving unit 346 moves the transport arm 345 out of the second cassette 330, whereby the transport arm 345 carries the article 210 (workpiece 200) into the second cassette 330.

[0035] In addition, the first transport unit 341 moves the transport arm 345 to the vicinity of the pair of rails 343 using the arm moving unit 346, and uses the transport arm 345 to hold the item 210 (workpiece 200) on the pair of rails 343, or releases the held item 210 (workpiece 200) on the pair of rails 343, and moves the transport arm 345 from the vicinity of the pair of rails 343 using the arm moving unit 346, thereby causing the transport arm 345 to transport the item 210 (workpiece 200) out from the pair of rails 343, or causes the transport arm 345 to transport the item 210 (workpiece 200) onto the pair of rails 343.

[0036] As described above, the transport arm 345 of the first transport section 341, in conjunction with the arm moving section 346 and second lifting unit 351 of the first transport section 341, transports the article 210 (workpiece 200) between the inside of the first cassette 23 that has landed on the landing section 331, the inside of the second cassette 330 that has been placed on the second cassette placement table 320, and the top of the pair of rails 343. The arm moving section 346 and the second lifting unit 351 also relatively move at least one of the first cassette 23 and the second cassette 330 and the transport arm 345 of the first transport section 341 in the horizontal and vertical directions, respectively, and constitute a moving unit 350 (see FIGS. 2, 3, 4, and 5) according to the present invention.

[0037] The second conveying section 342 conveys the article 210 (workpiece 200) between the pair of rails 343 and a predetermined position around the processing unit 360. The pair of rails 343 can approach or move away from each other while maintaining a parallel state, and the article 210 (workpiece 200) can be held between the pair of rails 343 via the annular frame 206. The processing device 100 also includes a reader that reads a barcode or ID of the article 210 (workpiece 200) at an arbitrary location, such as the conveying arm 345, when the article 210 (workpiece 200) is carried out from the first cassette 23 and carried into the first cassette 23, and when the article 210 (workpiece 200) is carried out from the second cassette 330 and carried into the second cassette 330, thereby acquiring information on the type of the article 210 (workpiece 200) and outputting the information to the control unit 390.

[0038] The processing unit 360 processes the workpiece 200. In the first embodiment, the processing unit 360 is, for example, a processing unit that processes the workpiece 200, a cleaning unit that cleans the workpiece 200, an imaging unit that captures the workpiece 200, an inspection unit that inspects the workpiece 200, a tape attachment unit that attaches or peels off the support tape 205 or the like to the workpiece 200, a film formation unit that forms a film on the workpiece 200, or the like. That is, the processing device 100 including the processing unit 360 can perform at least one of processing, cleaning, inspection, imaging, attachment of the support tape 205 or the like, peeling off the support tape 205 or the like, and film formation on the workpiece 200.

[0039] When the processing unit 360 is a processing unit, it may be, for example, a cutting processing unit having a spindle on which a cutting blade is rotatably mounted and cutting the workpiece 200 with the cutting blade, a grinding processing unit having a spindle on which a grinding wheel with a grinding wheel disposed thereon is rotatably mounted and grinding the workpiece 200 with the grinding wheel, a laser processing unit having a laser beam irradiator for irradiating the workpiece 200 with a laser beam and laser processing the workpiece 200 with the laser beam, a plasma processing unit for supplying plasmatized gas to the workpiece 200 for etching, an ultraviolet processing unit having an ultraviolet irradiator for irradiating ultraviolet rays to the workpiece 200 and ultraviolet irradiation processing the workpiece 200, a tape expansion unit for expanding the support tape 205 attached to the workpiece 200, dividing the workpiece 200 based on the division starting points to manufacture device chips and widening the intervals between the device chips, or a tape expansion process for widening the intervals between the device chips manufactured by dividing the workpiece 200, etc. When the processing unit 360 is a processing unit, the processing device 100 is a processing device that processes the workpiece 200 .

[0040] When the processing unit 360 is a cleaning unit, it is provided with a nozzle for supplying a cleaning liquid, a cleaning gas, or the like to the workpiece 200, and cleans the workpiece 200. When the processing unit 360 is a cleaning unit, the processing device 100 is a cleaning device that cleans the workpiece 200.

[0041] When the processing unit 360 is an imaging unit, it includes an imaging device that images the workpiece 200, and a work mover that moves the workpiece 200 to change and adjust the position and orientation of the workpiece 200 relative to the imaging device, and performs imaging processing of the workpiece 200. When the processing unit 360 is an imaging unit, the processing device 100 can perform imaging processing of the workpiece 200.

[0042] When the processing unit 360 is an inspection unit, it includes a laser beam irradiator that irradiates the workpiece 200 with an inspection laser beam, an electromagnetic wave irradiator that irradiates the workpiece 200 with an inspection electromagnetic wave, an ultraviolet irradiator that irradiates the workpiece 200 with inspection ultraviolet light, an imager that captures an inspection image of the workpiece 200, and an inspection and determination section that inspects and determines the workpiece 200 based on the results of the irradiation and imaging, and inspects and processes the workpiece 200. When the processing unit 360 is an inspection unit, the processing device 100 can inspect and process the workpiece 200.

[0043] When the processing unit 360 is a tape application unit, it includes a support tape etc. supplying section that supplies the support tape 205 etc. to the workpiece 200, an application section that applies the supplied support tape 205 etc. to the workpiece 200, and a peeling section that peels off the support tape 205 etc. applied to the workpiece 200, and performs an application process or a peeling process on the workpiece 200. When the processing unit 360 is a tape application unit, the processing device 100 is a tape application device that performs an application process or a peeling process on the workpiece 200.

[0044] When the processing unit 360 is a film forming unit, it includes a film forming section that forms a film on the workpiece 200, and performs a film formation process on the workpiece 200. When the processing unit 360 is a film forming unit, the processing device 100 is a film forming device that performs a film formation process on the workpiece 200.

[0045] In the example shown in Fig. 2, the processing apparatus 100 includes processing units 360-1, 360-2, and 360-3 as the processing units 360. The processing apparatus 100 shown in Fig. 2 is a processing apparatus 110 (cutting apparatus) in which one of the processing units 360, 360-1, is a cutting unit, and can perform cutting processing on the workpiece 200. In addition, the processing apparatus 100 (processing apparatus 110) shown in Fig. 2 is a processing unit in which one of the processing units 360, 360-2, is a cleaning unit, and can perform cleaning processing on the workpiece 200. In addition, the processing apparatus 100 (processing apparatus 110) shown in Fig. 2 is a processing unit in which one of the processing units 360, 360-3, is an imaging unit, and can perform imaging processing on the workpiece 200. In addition, the processing device 100 (machining device 110) shown in FIG. 2 has a processing unit 360-3 that functions as an imager, and a control unit 390 that functions as an inspection and judgment unit. Therefore, the processing device 100 essentially has an inspection unit, and can perform inspection processing such as a so-called kerf check that automatically checks whether the cutting processing of the workpiece 200 has been performed within a normal range.

[0046] The processing device 100 (tape application device 120) shown in FIG. 1 has a processing unit 360 that is a tape application unit, and can perform application processing or peeling processing on the workpiece 200. The processing device 100 (processing device 130) shown in FIG. 1 has a processing unit 360 that is a grinding processing unit, and can perform grinding processing on the workpiece 200. The processing device 100 (processing device 140) shown in FIG. 1 is a tape expansion device that has a processing unit 360 that is a tape expansion unit, and can perform tape expansion processing on the support tape 205 applied to the workpiece 200. The processing device 100 (any processing device 170) shown in FIG. 1 may have a processing unit 360 similar to any of the processing devices 110 (cutting device), tape application device 120, processing device 130 (grinding device), and processing device 140 (tape expansion device) in the first embodiment, or may have a processing unit 360 different from any of them.

[0047] The processing device 100 may include an exchange unit (not shown) corresponding to the processing unit 360. The exchange unit performs an exchange process for exchanging items 210 other than the workpiece 200, such as consumables including processing tools used to process the workpiece 200, cleaning tools for cleaning the processing device 100, and maintenance parts for maintaining the processing device 100, in the processing unit 360. The exchange unit performs the exchange process by collecting used processing tools, consumables, etc. from the processing unit 360 and replenishing and mounting new processing tools, consumables, etc. in the processing unit 360.

[0048] After carrying out the replacement process, the replacement unit recovers used machining tools, consumables, etc. from the processing unit 360 and stores them in the first cassette 23 that has landed and been placed on the landing section 331, and carries them out of the processing device 100 through the passage opening 312, and new machining tools, consumables, etc. are carried in from outside the processing device 100 through the passage opening 312 and replenished to the replacement unit from the first cassette 23 that has landed and been placed on the landing section 331. In the processing device 100 (processing device 110) that is the cutting device shown in Fig. 2, the replacement unit is a cutting blade replacement unit that replaces the cutting blade attached to the processing unit 360 that is the cutting processing unit.

[0049] The receiving unit 370 is connected to the control unit 30 of the transport system 1 so as to be capable of communicating information, receives information transmitted from the control unit 30, and outputs the received information to the control unit 390. In the first embodiment, the receiving unit 370 is connected to the control unit 30 so as to be capable of communicating information wirelessly, but the present invention is not limited to this, and the receiving unit 370 may be connected to the control unit 30 so as to be capable of communicating information wired. In the first embodiment, the information received by the receiving unit 370 from the control unit 30 is, for example, command information for an operation related to processing by the processing device 100, a transport status or transport history, a storage status or storage history, a processing status or processing history, information on the position of the item 210 (workpiece 200) in the processing device 100, and the like.

[0050] The transmission unit 380 is connected to the control unit 30 so as to be able to communicate with the control unit 30, and transmits information output from the control unit 390 to the control unit 30. In the first embodiment, the transmission unit 380 is connected to the control unit 30 so as to be able to communicate with the control unit 30 wirelessly, but the present invention is not limited to this, and the transmission unit 380 may be connected to the control unit 30 so as to be able to communicate with the control unit 30 via a wire. In the first embodiment, the information transmitted by the transmission unit 380 to the control unit 30 is, for example, information such as the transport status and transport history, storage status and storage history, processing status and processing history, and information on the position of the item 210 (workpiece 200) in the processing device 100.

[0051] The control unit 390 controls the operation of each component of the processing device 100 to cause the processing device 100 to perform various processing operations on the article 210 (workpiece 200). The control unit 390 drives the moving unit 350 (arm moving section 346 and second lifting unit 351) to control the transport of the article 210 (workpiece 200) between the first cassette 23 that has landed on the landing section 331 by the transport arm 345 and the second cassette 330 that has been placed on the second cassette placement table 320. The control unit 390 also controls the transport unit 340 and the second lifting unit 351 to control the transport of the article 210 (workpiece 200) between the first cassette 23 and the second cassette 330 and a predetermined position of the processing unit 360.

[0052] The control unit 390 also acquires information on the conveyance status and conveyance history of the article 210 (workpiece 200), the storage status and storage history, and the position of the article 210 (workpiece 200) from the conveyance unit 340 and the second lifting unit 351. The control unit 390 controls the processing unit 360 to control the processing of the article 210 (workpiece 200) by the processing unit 360, and acquires information on the processing status and processing history of the article 210 (workpiece 200), and the position of the article 210 (workpiece 200) from the processing unit 360. In this way, the control unit 390 acquires information on the conveyance status and conveyance history of the article 210 (workpiece 200) in the processing device 100, the storage status and storage history, the processing status and processing history, and the position of the article 210 (workpiece 200) from the conveyance unit 340, the second lifting unit 351, and the processing unit 360.

[0053] The control unit 390 acquires information received by the receiving unit 370 from the control unit 30, and outputs information to be transmitted to the control unit 30 to the transmitting unit 380. The control unit 390 causes the processing device 100 to perform an operation according to the command information received by the receiving unit 370 from the control unit 30. In response to the request information received by the receiving unit 370 from the control unit 30, the control unit 390 causes the transmitting unit 380 to transmit to the control unit 30 information on the transport status and transport history, storage status and storage history, processing status and processing history, and the position of the item 210 (workpiece 200) in the processing device 100. Even if the control unit 390 does not receive request information from the control unit 30, it can also autonomously cause the transmitting unit 380 to transmit to the control unit 30 information such as the transport status and transport history, storage status and storage history, processing status and processing history, and the position of the item 210 (workpiece 200) in the processing device 100.

[0054] Here, the information on the transport status and transport history of the article 210 (workpiece 200) and the position of the article 210 (workpiece 200) acquired from the transport unit 340, the second lifting unit 351, and the processing unit 360 is linked to the type of the article 210 (workpiece 200) and the type of processing device 100 into which the article 210 (workpiece 200) of that type was carried in and out, and the date and time (time) when the article was carried in and out of the processing device 100. Also, the storage status and storage history of the article 210 (workpiece 200) acquired from the transport unit 340 and the second lifting unit 351 is linked to the type of the article 210 (workpiece 200), the type of processing device 100 into which the article 210 (workpiece 200) of that type was carried in, and the type of the destination (first cassette 23 or second cassette 330) of the article 210 (workpiece 200) was carried in, and the date and time (time) when the article was stored in the processing device 100.

[0055] The type of processing device 100 refers to information for distinguishing each processing device 100, such as the type of processing performed by the processing device 100 or an identification number provided for each processing device 100. The type of the accommodated device refers to information for distinguishing the first cassette 23 or the second cassette 330 placed in the processing device 100, such as an identification number provided for the first cassette 23 or the second cassette 330.

[0056] In addition, the processing status of the processing device 100 includes, for example, the type of processing device 100 being processed, the item 210 (workpiece 200) brought into the housing 310 of the processing device 100, the transport status including positional information of the item 210 (workpiece 200) inside the housing 310 of the processing device 100, the processing status of the workpiece 200 by the processing unit 360, an error status regarding errors that have occurred in the processing unit 360 during processing or in the workpiece 200 during and after processing, and the replacement processing status by the replacement unit.

[0057] In addition, the processing history of the processing device 100 refers to the type of processing device 100, the transportation history, processing history, error history, and replacement processing history of the item 210 (workpiece 200) carried out within the housing 310 of the processing device 100 for each item 210 (workpiece 200) brought into the housing 310 of the processing device 100. Specifically, for each item 210 (workpiece 200), information on the transportation processing within the housing 310 of the processing device 100 and the history of the location information when the transportation processing was performed, information on the processing, the processing conditions at the time of processing, and the history of processing data obtained during processing, error history regarding errors that occurred in the processing unit 360 during processing or in the workpiece 200 during and after processing, information on the replacement processing, the replacement processing conditions at the time of replacement processing, and the history of replacement processing data obtained during replacement processing, all of which are linked to the date and time (time) when these processes were performed and the type of the item 210 (workpiece 200).

[0058] In the first embodiment, the control unit 390 includes a computer system. The computer system included in the control unit 390 is a computer having an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 390 performs arithmetic processing according to a computer program stored in the storage device of the control unit 390, and outputs control signals for controlling the processing device 100 to each component of the processing device 100 via the input / output interface device of the control unit 390.

[0059] 6 is a side cross-sectional view showing an example of an inspection device 150 which is another example of the processing device 100 of the conveying system 1 of FIG. 1. FIG. 7 is a side cross-sectional view showing a part of the inspection device 150 of FIG. 6. As shown in FIG. 6 and FIG. 7, the inspection device 150 includes a holding table 151, a push-up pin 152, an imaging unit 155, an imaging moving unit 156, a storage unit 158, and a measuring unit 159. The inspection device 150 shown in FIG. 6 and FIG. 7 includes a housing 310, a second cassette mounting table 320, a second cassette 330, a transport unit 340, a second lifting unit 351, a receiving unit 370, a transmitting unit 380, and a control unit 390, which are the same as those of the processing device 100 (processing device 110) shown in FIG. 2. That is, the inspection device 150 shown in Fig. 6 and Fig. 7 is obtained by providing a holding table 151, a push-up pin 152, an imaging unit 155, and an imaging movement unit 156 instead of the processing unit 360 in the processing device 100 (processing device 110) shown in Fig. 2, and adding the functions of a memory unit 158 ​​and a measurement unit 159 to a control unit 390. Therefore, the inspection device 150 shown in Fig. 6 and Fig. 7 includes a movement unit 350 similar to that of the processing device 100 (processing device 110) shown in Fig. 2. Note that Fig. 6 omits illustration of the housing 310, the second cassette placement table 320, the second cassette 330, the transport unit 340, and the second lifting unit 351.

[0060] The holding table 151 has a disc-shaped transparent member and an annular frame that holds the outer edge of the transparent member. The disc-shaped transparent member is made of a transparent material such as quartz glass, borosilicate glass, sapphire, calcium fluoride, lithium fluoride, magnesium fluoride, or the like, and is formed into a disc shape with a constant thickness. The outer diameter of the disc-shaped transparent member is larger than the outer diameter of the workpiece 200 and smaller than the inner diameter (opening diameter) of the annular frame 206. The disc-shaped transparent member is supported by the annular outer edge of the frame and is exposed above and below the holding table 151.

[0061] The upper surface of the disc-shaped transparent member serves as a holding surface on which the workpiece 200 (a device chip manufactured by dividing the workpiece 200) is placed and which holds one of the surfaces of the placed workpiece 200 (device chip). The holding surface of the disc-shaped transparent member is formed flat and parallel to the horizontal plane. In the first embodiment, the holding surface of the disc-shaped transparent member holds the back surface 204 side of the workpiece 200 (device chip) via a support tape 205.

[0062] The annular frame is made of a metal such as stainless steel. The annular frame is formed with an inner diameter equal to the outer diameter of the disc-shaped transparent member, and is attached to the outer edge of the disc-shaped transparent member. The upper surface of the annular frame is formed flat along the horizontal direction, and is disposed on the same plane as the holding surface of the disc-shaped transparent member. The annular frame 206 attached to the workpiece 200 (device chip) is placed on the upper surface of the annular frame, and holds the placed annular frame 206. In the first embodiment, the upper surface of the annular frame holds the annular frame 206 attached to the workpiece 200 (device chip) via a support tape 205.

[0063] The annular frame has a suction groove (not shown) that is recessed from the top surface and has a circular planar shape on the inner edge of the top surface, and is connected to a suction source (not shown) through a suction path (not shown) that is formed by penetrating the inside of the suction groove. The holding table 151 holds the workpiece 200 (device chip) and the annular frame 206 by suction via the support tape 205 on the holding surface of the disc-shaped transparent member and the top surface of the annular frame, as a suction source (not shown) sucks the suction groove through the suction path. The holding table 151 is provided so as to be rotatable about an axis parallel to the vertical direction by a rotation drive source (not shown).

[0064] The holding table 151 is provided with push-up pins 152 as shown in Fig. 7 within a disc-shaped transparent member. A plurality of push-up pins 152 are provided on the holding table 151 at positions corresponding to devices 203 (device chips manufactured by dividing the workpiece 200) of the workpiece 200 held on the holding surface of the holding table 151. Each of the push-up pins 152 is provided with a pin drive unit (not shown) that moves the push-up pin 152 up and down in a height direction perpendicular to the holding surface of the holding table 151. The push-up pins 152 are provided independently of each other so as to be freely moved up and down by the pin drive unit between a retracted position where the upper end of the push-up pin 152 is equal to or lower than the height of the holding surface of the holding table 151 and a push-up position where the upper end of the push-up pin 152 is higher than the height of the holding surface of the holding table 151.

[0065] When the workpiece 200 (device chip) and the annular frame 206 are suction-held on the holding table 151 via the support tape 205, if one push-up pin 152 is moved to a push-up position, the push-up pin 152 can push up the lower surface (the lower surface of the support tape 205 attached to the back surface 204) of the workpiece 200 (device chip) located on the push-up pin 152 above the holding surface of the holding table 151 via the support tape 205, as shown in FIG. 7. By pushing the workpiece 200 (device chip) upward in this manner, the push-up pin 152 makes it easier to image, by the side imaging unit 155-3 (see FIG. 7), the side 221 (see FIG. 7) of the division groove 220 (see FIG. 6) of the workpiece 200 formed when the workpiece 200 is divided to manufacture the device chips, i.e., the side 221 of the device chip manufactured by dividing the workpiece 200. As a result, inspection based on the image of the side 221 of the device chip imaged by the side imaging unit 155-3 can be made easier and the accuracy of the inspection can be improved.

[0066] As shown in Fig. 6 and Fig. 7, the imaging unit 155 includes a front surface imaging unit 155-1, a back surface imaging unit 155-2, and a side surface imaging unit 155-3. As shown in Fig. 6, the front surface imaging unit 155-1 is provided at a position higher than the holding surface of the holding table 151 and facing downward toward the holding surface of the holding table 151, and images the surface side (front surface 201 side) of the workpiece 200 (device chip) held on the holding table 151 facing upward. As shown in Fig. 6, the back surface imaging unit 155-2 is provided at a position lower than the holding surface of the holding table 151 and facing upward toward the holding surface of the holding table 151, and images the surface side (back surface 204 side) of the workpiece 200 (device chip) held on the holding table 151 facing downward. As shown in FIG. 7, the side imaging unit 155-3 is disposed at a position higher than the holding surface of the holding table 151 and inclined horizontally downward from the holding surface of the holding table 151, and images the side 221 of the workpiece 200 (device chip) held on the holding table 151.

[0067] In this way, the imaging unit 155 can image the device chip manufactured by the multiple processing devices 100 from the front surface 201, the back surface 204, and the side surface 221. Note that the present invention is not limited to this, and the imaging unit 155 only needs to be able to image the device chip manufactured by the multiple processing devices 100 from at least one of the front surface 201, the back surface 204, and the side surface 221. In the first embodiment, the imaging unit 155 is a line sensor camera in which light receiving sensor cameras are arranged in a line and has a field of view extending along one direction of the arrangement.

[0068] As shown in Fig. 6 and Fig. 7, the imaging moving unit 156 includes an imaging moving unit 156-1, an imaging moving unit 156-2, and an imaging moving unit 156-3. The imaging moving unit 156-1 moves the front side imaging unit 155-1 along a direction parallel to the horizontal direction and perpendicular to the direction in which the imaging field of view of the front side imaging unit 155-1 extends. The imaging moving unit 156-2 moves the back side imaging unit 155-2 along a direction parallel to the horizontal direction and perpendicular to the direction in which the imaging field of view of the back side imaging unit 155-2 extends. The imaging moving unit 156-3 moves the side imaging unit 155-3 along a direction parallel to the horizontal direction and perpendicular to the direction in which the imaging field of view of the side imaging unit 155-3 extends.

[0069] In this way, the inspection device 150 can image the entire surface of the upwardly facing surface side (the surface 201 side) of the workpiece 200 (device chip) held on the holding table 151 by the front surface imaging unit 155-1 being moved by the imaging movement unit 156-1. Also, the inspection device 150 can image the entire surface of the downwardly facing surface side (the back surface 204 side) of the workpiece 200 (device chip) held on the holding table 151 by the back surface imaging unit 155-2 being moved by the imaging movement unit 156-2. Also, the inspection device 150 can image the entire surface of the side surface 221 side of the workpiece 200 (device chip) held on the holding table 151 by the side surface imaging unit 155-3 by rotating the holding table 151 and moving the side surface imaging unit 155-3 by the imaging movement unit 156-3.

[0070] The storage unit 158 ​​stores the images captured by the imaging unit 155. The measurement unit 159 measures predetermined measurement items related to the workpiece 200 (device chip) from the images captured by the imaging unit 155. The measurement unit 159 acquires information on the images captured by the imaging unit 155 directly from the imaging unit 155, or acquires information on the images captured by the imaging unit 155 stored in the storage unit 158 ​​from the storage unit 158. The measurement unit 159 measures predetermined measurement items of the workpiece 200 (device chip) by carrying out predetermined image processing based on the acquired information on the images captured by the imaging unit 155.

[0071] The predetermined image processing performed by the measuring unit 159 is, for example, a process of detecting the edges (outer edges) of the front surface 201 and back surface 204 of the workpiece 200 (device chip) and the positional relationship between the edges (outer edges), and the surface properties of the side surface 221 of the workpiece 200 (device chip) by detecting shading and boundary lines within the image based on the image.

[0072] In embodiment 1, the specified measurement items measured by the measuring unit 159 include at least chipping that has occurred on the front surface 201 side or the back surface 204 side of the workpiece 200 (device chip), and also include adhesion of foreign matter to the front surface 201 side or the back surface 204 side, the inclination (diagonal cut) from the edge (outer edge) on the front surface 201 side to the edge (outer edge) on the back surface 204 side, and the presence or absence of the inclination (diagonal cut) exceeding a predetermined threshold value, the chip size of the workpiece 200 (device chip), and the presence or absence of the chip size outside a predetermined tolerance range, the surface roughness of the saw marks on the side surface 221 or the back surface 204 of the workpiece 200 (device chip), and the presence or absence of the saw marks with a surface roughness exceeding a predetermined threshold value, etc.

[0073] Chipping refers to minute chips or cracks that may occur on the outer periphery of a device chip separated from the workpiece 200. Saw marks refer to patterns or irregularities left by processing that may occur due to cutting or grinding, and in the first embodiment, saw marks may occur on the side surface 221 of the workpiece 200 (device chip) due to cutting, and may occur on the back surface 204 of the workpiece 200 (device chip) due to grinding.

[0074] The inspection device 150 uses the imaging unit 155 and the imaging movement unit 156 to image the entire surfaces of the front surface 201, back surface 204 and side surface 221 of all of the device chips manufactured by dividing the workpiece 200, stores the imaged images of the entire surfaces of all of these device chips in the memory unit 158, and inspects the above-mentioned specified measurement items for the entire surfaces of all of these device chips using the measurement unit 159, and stores an inspection record of all of the device chips obtained by this inspection.

[0075] In the first embodiment, the storage unit 158 ​​and the measurement unit 159 are provided by the control unit 390 of the inspection device 150, the function of the storage unit 158 ​​is realized by a storage device of the control unit 390, and the function of the measurement unit 159 is realized by an arithmetic processing device of the control unit 390 executing a computer program stored in the storage device. Note that the present invention is not limited to this, and the storage unit 158 ​​and the measurement unit 159 may be provided in any form as long as they are provided by the transport system 1. For example, they may be provided by the control unit 30, or may be provided in another control mechanism provided separately from the control unit 30, the control unit 390, and the control unit 29.

[0076] In the first embodiment, the inspection device 160 shown in Fig. 1 is similar to the inspection device 150 shown in Fig. 6 and Fig. 7. Note that the inspection device 160 is not limited to this in the present invention, and may be, for example, a processing device 100 (processing device 110) shown in Fig. 2 that includes the above-mentioned inspection unit as a processing unit 360 and can perform any inspection process.

[0077] 8 is a side cross-sectional view showing a stocker 190 which is another example of the processing device 100 of the transport system 1 of FIG. 1. As shown in FIG. 8, the stocker 190 includes a housing 310, a second cassette mounting table 320, a second cassette 330, a transport unit 340, a storage unit 360-6, a receiving unit 370, a transmitting unit 380, and a control unit 390. The stocker 190 is obtained by changing the processing unit 360 to the storage unit 360-6 in the processing device 100 (processing device 110) shown in FIG. 2, and changing the transport unit 340 and the second lifting unit 351 to match the configuration of the stocker 190. The housing 310, the second cassette mounting table 320, the second cassette 330, the receiving unit 370, the transmitting unit 380, and the control unit 390 are the same as those of the processing device 100 (processing device 110) shown in FIG. 2.

[0078] 8, the storage unit 360-6 includes a support table 362, a placement table 363, an outer door 364, an inner door 365, and a storage section 369. In the stocker 190, the housing 310 is provided on its side with an opening 313 of a size and shape that allows the storage section 369, which stores a plurality of articles 210 (workpieces 200), to pass through. The outer door 364 is provided in the opening 313 formed on the side of the housing 310, and is provided so as to be movable between an open position where the opening 313 is opened and a closed position where the opening 313 is closed.

[0079] The inner door 365 is provided at a position inside the housing 310 from the outer door 364 along a direction perpendicular to the side surface of the housing 310 in which the opening 313 is formed, by at least the length along the direction passing through the opening 313 of the storage section 369. The inner door 365 is provided inside the housing 310 at the opening 314 formed to a size and shape that allows the storage section 369 to pass through, and is provided so as to be movable between an open position that opens the opening 314 and a closed position that closes the opening 314.

[0080] In the stocker 190, the control unit 390 controls so that at least one of the outer door 364 and the inner door 365 is positioned in the closed position. Therefore, in the stocker 190, when the inner door 365 is positioned in the closed position, the outer door 364 can be moved to the open position, and when the outer door 364 is positioned in the closed position, the inner door 365 can be moved to the open position.

[0081] Both the support base 362 and the mounting base 363 are formed in a rectangular flat plate shape, with a length in one direction that is equal to or greater than the length along the direction passing through the opening 313 of the storage section 369, and a length in the other direction perpendicular to the one direction that is parallel to the horizontal direction and equal to or greater than the length along the direction perpendicular to the direction passing through the opening 313 of the storage section 369. The mounting base 363 is formed so that the lengths in both one and the other directions are shorter than those of the support base 362. Since the mounting base 363 has such a size and shape, the storage section 369 can be stably mounted thereon.

[0082] The support base 362 is fixed horizontally between the outer door 364 and the inner door 365 inside the housing 310, with the one direction being oriented along the direction in which the outer door 364 and the inner door 365 face each other. A support rail (not shown) is provided on the upper surface side of the support base 362, and the mounting base 363 is attached via this support rail. The mounting base 363 is provided so as to be slidable relative to the support base 362 along the direction in which the outer door 364 and the inner door 365 face each other by means of this support rail.

[0083] In storage unit 360-6, by positioning outer door 364 in the open position while positioning inner door 365 in the closed position, opening 313 is opened and then sliding mounting base 363, which passes through the opened opening 313, can move between an internal position which is a position on support base 362 inside housing 310 and an external position where it is pulled out from support base 362 outside housing 310.

[0084] In the storage unit 360-6, by positioning the placement table 363 at the external position, an operator can retrieve the storage section 369 that contains the processed workpiece 200 (device chip) or the used item 210 from the placement table 363, or place the storage section 369 that contains the workpiece 200 before processing or the item 210 that can be used from now on onto the placement table 363. Then, in the storage unit 360-6, after a new storage section 369 is placed on the placement table 363, the placement table 363 is slid to move the placement table 363, and the newly placed storage section 369 can be installed inside the stocker 190 (inside the housing 310) by positioning the placement table 363 on which the new storage section 369 is placed at the internal position.

[0085] In the first embodiment, two containing units 360-6 are provided at the first height and the second height, but the present invention is not limited to this, and one or three or more containing units may be provided.

[0086] In the stocker 190, the transport unit 340 includes a transport arm 345, a temporary placement unit 347, and an elevation transport unit 348, which are similar to those of the processing device 100 (processing device 110) shown in FIG. 2, as shown in FIG. 8. The temporary placement unit 347 has a rectangular cylindrical housing with an opening formed on the side where the storage unit 360-6 is provided, and the article 210 (workpiece 200) is temporarily placed inside the housing. The elevation transport unit 348 is provided on the opposite side of the temporary placement unit 347 from the side where the storage unit 360-6 is provided, and moves the temporary placement unit 347 along the vertical direction between a first cassette height that is the same height as the first cassette 23 that has landed and been placed on the landing portion 331, a second cassette height that is the same height as the second cassette 330 that has been placed on the second cassette placement table 320, and a storage height that is the same height as the storage unit 360-6.

[0087] The transport arm 345 holds the article 210 (workpiece 200). In the stocker 190, a plurality of transport arms 345 (two in the example shown in FIG. 8) are provided in the housing of the temporary placement unit 347, and are provided so as to be freely movable in the housing of the temporary placement unit 347 by an arm moving unit (not shown) similar to the arm moving unit 346 of the processing apparatus 100 (processing apparatus 110) shown in FIG.

[0088] When the transport unit 340 of the stocker 190 uses the lifting transport unit 348 to position the temporary placement unit 347 at the storage height for one of the storage units 360-6, the transport arm 345 can transport the item 210 (workpiece 200) between the storage section 369 placed in the storage unit 360-6 and the temporary placement unit 347.

[0089] The transport arm 345 grasps and removes the article 210 (workpiece 200) in the storage section 369 placed in the storage unit 360-6, and temporarily places it in the temporary placement unit 347, thereby transporting the article 210 (workpiece 200) from the storage section 369 placed in the storage unit 360-6 to the temporary placement unit 347. The transport arm 345 grasps the article 210 (workpiece 200) temporarily placed in the temporary placement unit 347 and carries it into the storage section 369 placed in the storage unit 360-6, thereby transporting the article 210 (workpiece 200) from the temporary placement unit 347 to the storage section 369 placed in the storage unit 360-6.

[0090] The stocker 190 adjusts the vertical height of the first cassette 23, which has landed on the landing section 331, and the transport arm 345 to the first cassette height using the second lifting unit 351 and the lifting transport unit 348, and then moves the transport arm 345 into the first cassette 23 using an arm moving unit not shown, and the transport arm 345 holds the item 210 (workpiece 200) in the first cassette 23 or releases the held item 210 (workpiece 200) within the first cassette 23, and moves the transport arm 345 out of the first cassette 23 using an arm moving unit not shown, thereby causing the transport arm 345 to transport the item 210 (workpiece 200) out of the first cassette 23 or causes the transport arm 345 to transport the item 210 (workpiece 200) into the first cassette 23.

[0091] The stocker 190 adjusts the vertical height of the second cassette 330 placed on the second cassette mounting table 320 and the transport arm 345 to the second cassette height using the second lifting unit 351 and the lifting transport unit 348, and then moves the transport arm 345 into the second cassette 330 using an arm moving unit not shown, and uses the transport arm 345 to hold the item 210 (workpiece 200) in the second cassette 330 or releases the held item 210 (workpiece 200) within the second cassette 330, and moves the transport arm 345 out of the second cassette 330 using an arm moving unit not shown, thereby causing the transport arm 345 to transport the item 210 (workpiece 200) out of the second cassette 330 or causing the transport arm 345 to transport the item 210 (workpiece 200) into the second cassette 330.

[0092] As described above, the transport arm 345 of the transport unit 340 of the stocker 190 transports the article 210 (workpiece 200) between the first cassette 23 landed on the landing portion 331, the second cassette 330 placed on the second cassette placement table 320, and the storage portion 369 placed on the storage unit 360-6 via the temporary placement unit 347 in conjunction with the arm moving section, the lifting transport unit 348, and the second lifting unit 351. The arm moving section, the lifting transport unit 348, and the second lifting unit 351 move at least one of the first cassette 23 and the second cassette 330 relative to the transport arm 345 of the transport unit 340 in the horizontal and vertical directions, respectively, constituting a moving unit 350 (see FIG. 8) according to the present invention. In this manner, the stocker 190 transfers the item 210 (workpiece 200) between the storage section 369 placed in the storage unit 360-6 and the first cassette 23 of the transport vehicle 20 that has landed on the landing section 331.

[0093] As described above, the processing device 100 of the conveying system 1 of embodiment 1 includes the processing device 110, the inspection device 150, and the stocker 190, but the present invention is not limited to this and it is sufficient that the processing device 100 includes at least one of the processing device 110, the inspection device 150, and the stocker 190.

[0094] As shown in FIG. 2, the conveying path 10 of the conveying system 1 includes a passage area 11, a transfer area 12, and a guide unit 13. The passage area 11 is disposed above the housings 310 of the processing devices 100. The transfer area 12 is disposed adjacent to the passage area 11 above the housing 310 for each processing device 100. The passage area 11 and the transfer area 12 are provided with vertical and horizontal lines (not shown) that can be detected by sensors 21-3 and 21-4 of the conveying vehicle 20 described later. In the transfer area 12, an opening 14 is formed directly above the passage opening 312 of the housing 310, which has a size and shape that allows the vehicle body 21 of the conveying vehicle 20 to pass through but allows the first cassette 23 of the conveying vehicle 20 to pass through.

[0095] The guide parts 13 are disposed on both widthwise ends of the passage area 11 and the transfer area 12. The guide parts 13 are formed higher than the wheels 22 of the transport vehicle 20, thereby preventing the transport vehicle 20 from climbing over the guide parts 13 and falling off the passage area 11 and the transfer area 12.

[0096] Fig. 9 is a perspective view showing the transport vehicle 20 of the transport system 1 of Fig. 1. Fig. 10 is a side cross-sectional view showing a first lifting unit 24 of the transport vehicle 20 of Fig. 9. The transport vehicle 20 is an automated guided vehicle (AGV) that travels unmanned, and has a vehicle body 21, wheels 22, a first cassette 23, a first lifting unit 24, a receiving unit 27, a transmitting unit 28, and a control unit 29, as shown in Fig. 9.

[0097] The vehicle body 21 includes a flat first frame 21-1 and a flat second frame 21-2 arranged above the first frame 21-1 at a distance from the first frame 21-1. The transport vehicle 20 includes sensors 21-3 (only the rear end is shown in FIG. 9) at the front end (the end on the left rear side in FIG. 9) and the rear end (the end on the right front side in FIG. 9) of the first frame 21-1, and a pair of sensors 21-4 (only the left end is shown in FIG. 9) at both side ends of the first frame 21-1. The sensors 21-3 and 21-4 are mounted so as to face the passage area 11 and the transfer area 12 of the transport path 10 along which the transport vehicle 20 travels, respectively, and detect vertical and horizontal lines (not shown) provided in the passage area 11 and the transfer area 12. The sensors 21-3 and 21-4 output the detection results to the control unit 29.

[0098] The transport vehicle 20 is provided with a collision sensor 21-5 at the front end of the first frame 21-1 to detect when the transport vehicle 20 collides with an obstacle. For example, a push button switch is used as the collision sensor 21-5. When the front end of the transport vehicle 20 collides with an obstacle, the collision sensor 21-5 detects the collision of the transport vehicle 20 and outputs the detection result to the control unit 29.

[0099] The transport vehicle 20 is also provided with a cover 21-6 on the underside of the rear end of the first frame 21-1. The cover 21-6 covers an opening 23-1 of the first cassette 23 when the first cassette 23 is positioned at a storage position between the front wheels 22 and the rear wheels 22 on the underside of the first frame 21-1. By covering the opening 23-1, the cover 21-6 prevents foreign matter from entering the first cassette 23 while the transport vehicle 20 is traveling, prevents foreign matter from adhering to the article 210 (workpiece 200), and prevents the article 210 (workpiece 200) from falling out of the first cassette 23.

[0100] The wheels 22 include a pair of front wheels 22 provided at both ends of the front side of the lower surface of the first frame 21-1, and a pair of rear wheels 22 provided at both ends of the rear side of the lower surface of the first frame 21-1. The wheels 22 are provided to be rotatable independently of each other about their axis, and the orientation of the rotation axis and the rotation direction are controlled independently of each other. The outer circumferential surface of the wheels 22 contacts the passage area 11 or the transfer area 12 of the conveying path 10. The wheels 22 are each connected to a motor 22-1, and the motor 22-1 applies a rotational motion about the axis to the wheels 22, causing the wheels 22 to travel on the passage area 11 or the transfer area 12 of the conveying path 10. The motor 22-1 is connected to a battery 22-2, and is driven by power supplied from the battery 22-2. In the first embodiment, the wheels 22 are, for example, mecanum wheels having a plurality of inclined barrel-shaped (cylindrical) rotating bodies attached to the outer circumferential surface.

[0101] The first cassette 23 stores at least one of the workpiece 200 and the article 210 used in the processing device 100. The first cassette 23 is provided on the lower surface side of the first frame 21-1, and is formed in a flat box shape capable of storing the article 210 (workpiece 200) inside. The first cassette 23 has an opening 23-1 at the rear side of the transport vehicle 20 through which the article 210 (workpiece 200) can be freely inserted and removed. The first cassette 23 has guide rails on the inside for holding the ends of the stored article 210 (workpiece 200) and the annular frame 206 supporting the stored article 210 (workpiece 200).

[0102] The first lifting unit 24 raises and lowers the first cassette 23 relative to the first frame 21-1 of the vehicle body 21. The first lifting unit 24 raises and lowers the first cassette 23 between a storage position located between the front wheel 22 and the rear wheel 22 on the underside of the first frame 21-1, and a lowered position located below the wheels 22. In the storage position, the underside of the first cassette 23 is located above the lower ends of the wheels 22 that run on the conveying path 10. Therefore, the first cassette 23 does not come into contact with the conveying path 10 while the conveying vehicle 20 is traveling on the conveying path 10.

[0103] Each component of the first lifting unit 24, except for the hanging member 59 whose lower end is attached and connected to the first cassette 23, is disposed in the space between the first frame 21-1 and the second frame 21-2. When the transport vehicle 20 is positioned above the opening 14 of the transfer area 12, the first lifting unit 24 lowers the first cassette 23 positioned at the storage position, and positions the first cassette 23 on the landing portion 331 of the processing device 100. In addition, the first lifting unit 24 raises the first cassette 23 positioned on the landing portion 331 of the processing device 100, and positions the first cassette 23 at the storage position.

[0104] As shown in FIG. 10, the first lifting unit 24 comprises a motor 52 fixed to the upper surface of the first frame 21-1 and having a rotating shaft 51, a first rotating shaft 53 and a second rotating shaft 54 ​​supported for free rotation on the upper surface of the first frame 21-1 and parallel to each other, a pulley 56 fixed to one end of the first rotating shaft 53 and around which an endless connecting member 55 such as a belt or chain is hung between the rotating shaft 51 of the motor 52, pulleys (not shown) fixed to the other ends of the first rotating shaft 53 and the second rotating shaft 54 ​​and around which endless connecting members such as a belt or chain are hung, cylindrical reels 57 fixed to both ends of the first rotating shaft 53 and around which a hanging member 59 is wound, cylindrical reels 58 fixed to both ends of the second rotating shaft 54 ​​and around which a hanging member 59 is wound, and a hanging member 59.

[0105] The first lifting unit 24 rotates the first rotating shaft 53 and the second rotating shaft 54 ​​about their axes using the motor 52, and rotates the reels 57, 58 about their axes, thereby winding up the hanging members 59 onto the reels 57, 58 and feeding out the hanging members 59 from the reels 57, 58.

[0106] When the first lifting unit 24 has wound the hanging members 59 onto the reels 57, 58, it positions the first cassette 23 at the storage position. When the first lifting unit 24 has unwound the hanging members 59 from the reels 57, 58, it positions the first cassette 23 at the lowered position.

[0107] In the first embodiment, four hanging members 59 are provided. For example, a belt having a predetermined width is used as the hanging members 59. The lower ends of the four hanging members 59 are attached to the upper surface of the first cassette 23 at intervals from each other. Note that in the present invention, instead of a belt, a wire rope that can be wound up and let out may be used as the hanging members 59.

[0108] When the transport vehicle 20 is first set on the transport path 10 of the transport system 1, the location where the transport vehicle 20 is set and the type of the transport vehicle 20 are registered in the control unit 29 and the control unit 30. After the transport vehicle 20 is set, in the first embodiment, as described above, the position of the transport vehicle 20 on the transport path 10 is detected by the sensors 21-3 and 21-4. Note that the transport vehicle 20 is not limited to this configuration in the present invention, and may be configured to detect a mark (not shown) by a line sensor instead of this configuration, or to detect the position of the transport vehicle 20 by a plurality of sensors installed on the transport path 10, or to wirelessly connect the transport vehicle 20 to a GPS (Global Positioning System) so as to be able to communicate information, and to acquire the position of the transport vehicle 20 using the GPS. Any configuration capable of acquiring the position of the transport vehicle 20 may be used.

[0109] The receiving unit 27 is connected to the control unit 30 so as to be able to communicate with the control unit 30, receives information transmitted from the control unit 30, and outputs the received information to the control unit 29. In the first embodiment, the receiving unit 27 is connected to the control unit 30 so as to be able to communicate with the control unit 30 wirelessly, but the present invention is not limited to this, and the receiving unit 27 may be connected to the control unit 30 so as to be able to communicate with the control unit 30 by wire. In the first embodiment, the information received by the receiving unit 27 from the control unit 30 is, for example, command information regarding the operation related to the travel of the transport vehicle 20 and the lifting and lowering of the first cassette 23, request information for prompting the transmission of the transport status and transport history of the transport vehicle 20 including the position of the transport vehicle 20 and the position of the first cassette 23, etc.

[0110] The transmission unit 28 is connected to the control unit 30 so as to be able to communicate with the control unit 30, and transmits information output from the control unit 29 to the control unit 30. In the first embodiment, the transmission unit 28 is connected to the control unit 30 so as to be able to communicate with the control unit 30 wirelessly, but the present invention is not limited to this, and the transmission unit 28 may be connected to the control unit 30 so as to be able to communicate with the control unit 30 via a wire. In the first embodiment, the information transmitted by the transmission unit 28 to the control unit 30 is, for example, information on the transportation status and transportation history of the transportation vehicle 20.

[0111] The control unit 29 controls the operation of each component of the transport vehicle 20, and causes the transport vehicle 20 to perform operations related to the travel of the transport vehicle 20 and the lifting and lowering of the first cassette 23. The control unit 29 controls the travel of the transport vehicle 20 by controlling the motor 22-1 connected to the wheels 22 and the angle of the wheels 22, etc. The control unit 29 controls the lifting and lowering movement of the first cassette 23 by controlling the motor 52 of the first lifting unit 24.

[0112] The control unit 29 controls the sensors 21-3 and 21-4 to acquire the position of the transport vehicle 20 on the transport path 10. The control unit 29 generates information on the transport status and transport history of the transport vehicle 20 based on information on the position of the transport vehicle 20 on the transport path 10 and information on the type of the article 210 (workpiece 200) transported by the transport vehicle 20.

[0113] The control unit 29 acquires information received by the receiving unit 27 from the control unit 30, and outputs information to be transmitted to the control unit 30 to the transmitting unit 28. The control unit 29 causes the transport vehicle 20 to perform an operation according to the command information received by the receiving unit 27 from the control unit 30. The control unit 29 causes the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the control unit 30 in response to request information received by the receiving unit 27 from the control unit 30. Even if the control unit 29 does not receive request information from the control unit 30, it can also cause the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the control unit 30 on its own initiative.

[0114] Here, the transportation status of the transport vehicle 20 includes, for example, the item 210 (workpiece 200) being transported, the type of transport vehicle 20 being transported, the type of transport path 10 on which the transport vehicle 20 is transporting and the position on the transport path 10, the transport speed, and error status related to errors that occurred in the transport vehicle 20 during transport and the workpiece 200 after transport. In addition, the transportation history of the transport vehicle 20 includes, for each transported item 210 (workpiece 200), the type of transport vehicle 20 that transported the item, the history of the type of transport path 10 on which the transport vehicle 20 transported the item, the passing history of the position on the transport path 10, the transport speed history, and the error history related to errors that occurred in the transport vehicle 20 during transport and the workpiece 200 after transport, all of which are associated with the time when the transport was performed and the type of the item 210 (workpiece 200).

[0115] In the first embodiment, the control unit 29 includes a computer system similar to the above-described control unit 390. The arithmetic processing device of the control unit 29 performs arithmetic processing in accordance with a computer program stored in a storage device of the control unit 29, and outputs control signals for controlling the transport vehicle 20 to each component of the transport vehicle 20 via an input / output interface device of the control unit 29.

[0116] The control unit 30 centrally manages and controls the entire transport system 1. The control unit 30 is communicably connected to the receiving unit 370 and the transmitting unit 380 of each processing device 100, and is communicably connected to the receiving unit 27 and the transmitting unit 28 of each transport vehicle 20. The control unit 30 transmits command information to each receiving unit 370, 27, thereby remotely controlling and operating each processing device 100 and each transport vehicle 20 via each control unit 390, 29.

[0117] The control unit 30 can receive and grasp information on the processing status and processing history of each processing device 100, processing information, information on the storage status and storage history, and a total inspection record of the device chips by the inspection device 150 from the transmission unit 380, and can receive and grasp information on the transport status and transport history of each transport vehicle 20 from the transmission unit 28. In this way, the control unit 30 can comprehensively control and operate each processing device 100 and each transport vehicle 20, which are components of the transport system 1. The control unit 30 also functions as a server that collectively manages various information (data) received from each processing device 100 and various information (data) received from each transport vehicle 20. The control unit 30 can also analyze each processing device 100 that is the cause of the defect and provide feedback to each processing device 100 that is the cause of the defect, if there is a defect in the device chip, based on the total inspection record of the device chips by the inspection device 150.

[0118] In this way, the control unit 30 comprehensively manages and controls the overall control of the conveying system 1, enabling it to divide the workpiece 200 to manufacture multiple device chips, as well as manage the storage status and storage history of the item 210 (workpiece 200) contained in the second cassette 330 placed on the second cassette mounting table 320 of each processing device 100.

[0119] In the first embodiment, the control unit 30 includes a computer system similar to the control units 390 and 29. The arithmetic processing device of the control unit 30 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 30, and outputs control signals for controlling the transport system 1 to each component of the transport system 1 via the input / output interface device of the control unit 30.

[0120] The conveying system 1 of embodiment 1 having the above-mentioned configuration has a second cassette 330 capable of storing multiple items 210 (workpieces 200) installed in the processing device 100, and conveys the items 210 (workpieces 200) from the first cassette 23 of the conveying vehicle 20 to the second cassette 330, thereby enabling the processing device 100 to hold multiple items 210 (workpieces 200). Therefore, the conveying system 1 of embodiment 1 can convey the item 210 (workpiece 200) from the first cassette 23 supplied from the conveying vehicle 20 into the processing device 100 and operate the processing device 100 to process it, or can convey the item 210 (workpiece 200) to the second cassette 330 of the processing device 100 and then, depending on the operating status of the processing device 100, remove the item 210 (workpiece 200) from the second cassette 330 and operate the processing device 100 to process it.This reduces the influence of the timing at which the item 210 (workpiece 200) is supplied from the conveying vehicle 20 on the processing of the processing device 100, thereby achieving the advantageous effect of improving the operating efficiency of the processing device 100.

[0121] Furthermore, in the conveying system 1 of embodiment 1, a landing portion 331 where the first cassette 23 lands is formed on the upper surface of the second cassette 330, so that conveying between the first cassette 23 and the second cassette 330 can be realized without increasing the parts and installation space for landing the first cassette 23.

[0122] Furthermore, the conveying system 1 of embodiment 1 lands the first cassette 23 on the second cassette 330, and the moving unit 350 includes a second lifting unit 351 that raises and lowers the second cassette 330 relative to the conveying arm 345. Therefore, the first cassette 23 can be raised and lowered using the second lifting unit 351 that raises and lowers the second cassette 330, thereby reducing the number of parts required to raise and lower the first cassette 23 and the second cassette 330.

[0123] [Embodiment 2] A conveying system 1 according to a second embodiment of the present invention will be described. Fig. 11 and Fig. 12 are a side cross-sectional view and a top view, respectively, showing a main part of the conveying system 1 according to the second embodiment. Both Fig. 11 and Fig. 12 show a first cassette 23-2 of the conveying system 1 according to the second embodiment. In Fig. 11 and Fig. 12, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0124] The transport system 1 according to the second embodiment is the same as that of the transport system 1 according to the first embodiment, except that the first cassette 23 is replaced with a first cassette 23-2. The first cassette 23-2 of the transport system 1 according to the second embodiment is the same as that of the transport system 1 according to the first embodiment, except that the number of articles 210 (workpieces 200) that can be stored (the number of pieces) is changed from one to more than one.

[0125] Specifically, as shown in Fig. 11, the first cassette 23-2 of the second embodiment has a pair of side walls 61 facing each other, a bottom plate 62 formed in a flat plate shape and connecting the lower ends of the pair of side walls 61, a top plate 63 connecting the upper ends of the pair of side walls 61, and a back plate 64 connecting the ends of one side (back side) of the pair of side walls 61, the bottom plate 62, and the top plate 63, and is formed into a rectangular box shape. The pair of side walls 61, the bottom plate 62, the top plate 63, and the back plate 64 are all formed in a flat plate shape. The first cassette 23-2 is surrounded by the ends of the other side (front) of the pair of side walls 61, the bottom plate 62, and the top plate 63, and an opening 65 of a size and shape that allows the article 210 (workpiece 200) to pass through is formed on the opposite side facing the back plate 64. The first cassette 23-2 is positioned at the storage position of the transport vehicle 20 and at the landing portion 331 on the second cassette 330 with the top plate 63 facing upward and the bottom plate 62 facing downward.

[0126] A pair of side walls 61 of the first cassette 23-2 form a pair with each other, and a plurality of guide rails 66 extending along the direction in which the rear plate 64 and the opening 65 face each other are formed inside. One side of each pair of guide rails 66 (a pair of guide rails 66) is formed convexly from one side wall 61 toward the other side wall 61, and the other side is formed convexly from the other side wall 61 toward the one side wall 61, and is formed at a position where the vertical height is uniform. The multiple pairs of guide rails 66 are equally spaced apart at a predetermined interval in the vertical direction that is sufficiently larger than the thickness of the article 210 (workpiece 200).

[0127] The first cassette 23-2 has support plates 67 installed on each pair of guide rails 66, and stores the articles 210 (workpieces 200) by placing ends of the articles 210 (workpieces 200) or portions of the annular frame 206 attached to the articles 210 (workpieces 200) on the support plates 67. The first cassette 23-2 stores a number of articles 210 (workpieces 200) equal to the number of pairs of guide rails 66. By providing the support plates 67 on each pair of guide rails 66 in this manner, the first cassette 23-2 can stably store and hold thin workpieces 200 and the like without bending.

[0128] 12, the support plate 67 has openings 68 formed at positions corresponding to the workpieces 200 and devices 203 to be accommodated. Therefore, when the article 210 (workpieces 200) to be accommodated is placed on the support plate 67, the first cassette 23-2 can reduce the risk that the workpieces 200 and devices 203 to be accommodated will come into contact with the support plate 67. In addition, it is preferable that the support plate 67 has minute projections and recesses on the upper surface on which the article 210 (workpieces 200) to be accommodated is placed. In this case, the risk that the support plate 67 and the article 210 (workpieces 200) to be accommodated will come into close contact with each other can be reduced.

[0129] In the conveying system 1 of embodiment 2 having the above-described configuration, the first cassette 23-2 can accommodate multiple items 210 (workpieces 200), so that the items 210 (workpieces 200) can be more efficiently transported and held in the second cassette 330, thereby further improving the operating efficiency of the processing device 100.

[0130] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0131] 1. Transport system 10 Transport path 20 Transport vehicle 23,23-2 First Cassette 30 Control Unit 24 First lifting unit 100 Processing equipment 150 Inspection Equipment 190 Stocker 200 Workpiece 210 Goods 312 Passage gate 330 Second Cassette 331 Landing part 345 Transport Arm 350 Mobile Units 351 Second lifting unit 369 Storage Unit

Claims

1. A conveyance system that conveys an article to a processing device that processes the article, The transport system comprises: a transport path disposed above a plurality of processing devices; a transport vehicle including a first cassette for accommodating an article and traveling on the transport path; A control unit, The transport vehicle is a first lifting unit for lifting the first cassette relative to the processing device; The processing device comprises: a passage opening through which the first cassette passes on an upper surface; a second cassette containing a plurality of said articles; a transport arm that transports the article between the first cassette and the second cassette; a moving unit that moves at least one of the first cassette and the second cassette and the transport arm relatively; The control unit drives the moving unit to transport the article between the first cassette and the second cassette by the transport arm. Conveying system.

2. 2. The transport system according to claim 1, wherein a landing portion on which the first cassette is to land is formed on an upper surface of the second cassette.

3. 3. The transfer system according to claim 2, wherein the moving unit includes a second lifting unit for lifting and lowering the second cassette relative to the transfer arm.

4. 4. The transport system according to claim 1, wherein the article is at least one of a workpiece to be processed by the processing device and a consumable item to be used by the processing device.

5. The processing device comprises: A processing device that processes a workpiece; An inspection device that inspects the state of the workpiece; a stocker having a storage section for storing a plurality of workpieces and transferring the workpieces between the storage section and the first cassette of the transport vehicle; The transport system according to claim 4 , comprising at least one of the following:

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