Inspection jig, and inspection device

Abstract

To provide an inspection jig and an inspection device in each of which stress applied to a support portion supporting a contact is mitigated.SOLUTION: An inspection jig 3 comprises: a rod-shaped probe Pr; a first support portion 311 that supports one end portion of the probe Pr; a second support portion 312 that supports the other end portion of the probe Pr; and a separation holding member 7 that holds the first support portion 311 and the second support portion 312 to be separated from each other. The first support portion 311 includes a support plate in which a through-hole B2H is formed through which the probe Pr is inserted, and the first support portion 311 includes a plurality of laminated support plates. The plurality of support plates include a first support plate B2 which is a support plate closest to the second support portion 312 and a second support plate E2 which is a support plate other than the first support plate B2. The hardness of the first support plate B2 is less than that of the second support plate E2.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an inspection tool having a contact and an inspection device using the same. [Background technology]

[0002] Conventionally, there has been known a probe card that includes a support member having an upper support hole and a lower support hole that respectively position and support the upper and lower parts of a wire probe, and a flexible guide film that supports the middle part of the wire probe by bending it in one direction (see, for example, Patent Document 1). The lower support hole of this support member is formed in a first bottom plate and a second bottom plate that are laminated together.

[0003] Patent Document 1 states that if the guide film is too flexible, the elasticity of the wire probe may stretch the guide film and cause it to bend up and down. Therefore, the technology described in Patent Document 1 provides a reinforcing film on the surface of the guide film to suppress bending caused by the expansion and contraction of the guide film. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2012-103125 A Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, in Patent Document 1, the force bending the guide film up and down is also applied to the first and second bottom plates having lower support holes through which the wire probes are inserted, in the same manner as the guide film, which may result in stress being applied to the first and second bottom plates.

[0006] An object of the present invention is to provide an inspection tool and an inspection device that can easily reduce the stress applied to the support portion that supports the contacts. [Means for solving the problem]

[0007] An inspection jig according to one example of the present invention comprises a rod-shaped contactor, a first support part supporting one end side of the contactor, a second support part supporting the other end side of the contactor, and a spacing retaining member that retains the first support part and the second support part spaced apart from each other, the first support part comprising a support plate having a through hole formed therein through which the contactor is inserted, the first support part including a plurality of the support plates stacked together, the plurality of support plates including a first support plate which is the support plate closest to the second support part, and a second support plate which is the support plate other than the first support plate, and the first support plate has a hardness softer than that of the second support plate. An inspection jig according to one example of the present invention comprises a rod-shaped contactor, a first support part supporting one end side of the contactor, a second support part supporting the other end side of the contactor, and a spacing retaining member that retains the first support part and the second support part spaced apart from each other, the first support part comprising a support plate having a through hole formed therein through which the contactor is inserted, the first support part including a plurality of the support plates stacked together, the plurality of support plates including a first support plate which is the support plate closest to the second support part, and a second support plate which is the support plate other than the first support plate, and the first support plate has a bending strength greater than that of the second support plate.

[0008] An inspection device according to one example of the present invention includes the above-mentioned inspection jig and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected. Effect of the Invention

[0009] The inspection jig and inspection device having such a configuration can easily reduce the stress applied to the support portion that supports the contact. [Brief description of the drawings]

[0010] [Figure 1]1 is a conceptual diagram illustrating an example of the configuration of an inspection device 1 that uses an inspection jig 3 according to an embodiment of the present invention. [Diagram 2] 2 is a plan view of the inspection jig 3 shown in FIG. 1 as viewed from the tip side of the contact Pr. [Diagram 3] 3 is an end view taken along line III-III of the inspection jig 3 shown in FIG. 2. [Figure 4] 4 is an end view of the inspection jig 3 shown in FIG. 2 along line IV-IV. [Diagram 5] 5 is a plan view of the reinforcing plate 5 shown in FIGS. 3 and 4, as viewed from the Z direction. FIG. [Figure 6] 6 is a plan view showing a modified example of the reinforcing plate 5 shown in FIG. 5. FIG. [Figure 7] 1 is an explanatory diagram showing an example of a state in which an inspection jig 3 is in contact with a substrate 100. FIG. [Figure 8] 10 is an explanatory diagram conceptually showing the behavior of a plate PL when a contact Pr is pressed into it. FIG. [Figure 9] 4 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in the plate PL. FIG. [Figure 10] 13 is an explanatory diagram conceptually showing the behavior of the plate PL when the pressing load of the contact Pr is released. FIG. [Figure 11] 4 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in the plate PL. FIG. [Figure 12] 13 is an enlarged end view showing the vicinity of a through hole B2H of a first support plate B2. FIG. [Figure 13] 4 is an end view showing a modified example of the inspection jig 3 shown in FIG. [Figure 14] 13 is an enlarged end view showing the vicinity of a through hole B2H of a reinforcing plate B2a. FIG. [Figure 15] 2 is a cross-sectional view showing an example of a slip layer 33 formed on a plate PL. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, components with the same reference numerals in each drawing are the same, and their description will be omitted. XYZ orthogonal coordinate axes are appropriately described to indicate the orientation of each drawing. The inspection device 1 shown in FIG. 1 is a device for inspecting a substrate 100, which is an example of an object to be inspected.

[0012] The substrate 100 may be various substrates such as a printed wiring board, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, a package substrate or a film carrier for a semiconductor package, etc. The object to be inspected is not limited to a substrate, but may be an electronic component such as a semiconductor element (IC: Integrated Circuit), or any other object that can be subjected to electrical inspection.

[0013] The inspection device 1 shown in Fig. 1 includes inspection units 4U and 4D, a substrate fixing device 6, and an inspection processing unit 8. The substrate fixing device 6 is configured to fix a substrate 100 to be inspected at a predetermined position. The inspection units 4U and 4D include inspection jigs 3U and 3D. The inspection units 4U and 4D are capable of moving the inspection jigs 3U and 3D in three mutually orthogonal axis directions of X, Y, and Z by a drive mechanism (not shown), and further capable of rotating the inspection jigs 3U and 3D around the Z axis.

[0014] The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection units 4U and 4D are configured to be able to detachably mount inspection jigs 3U and 3D for inspecting the circuit pattern formed on the substrate 100. Hereinafter, the inspection units 4U and 4D are collectively referred to as the inspection unit 4.

[0015] Each of the inspection jigs 3U and 3D includes a plurality of contacts Pr, a support member 31 that holds the tips of the plurality of contacts Pr toward the substrate 100, and a base plate 321. The base plate 321 is provided with electrodes that are in contact with and conductive with the rear ends of the contacts Pr. The inspection units 4U and 4D include a connection circuit (not shown) that electrically connects the rear ends of the contacts Pr to the inspection processing unit 8 via the electrodes of the base plate 321 and switches the connection.

[0016] The contact Pr has a generally rod-like shape. A plurality of through holes for supporting the contact Pr are formed in the support member 31. Each through hole is arranged to correspond to the position of an inspection point set on the wiring pattern of the board 100 to be inspected. This allows the tip of the contact Pr to come into contact with the inspection point of the board 100. The inspection point is, for example, a wiring pattern, a pad, a solder bump, a connection terminal, a through hole, a via, or the like.

[0017] The inspection jigs 3U and 3D are configured similarly to each other, except that they are attached to the inspection units 4U and 4D upside down. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as the inspection jig 3. The inspection jig 3 is replaceable depending on the substrate 100 to be inspected.

[0018] The inspection processing unit 8 includes, for example, a power circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection units 4U and 4D, and brings the tips of the contacts Pr into contact with the respective inspection points of the board 100. This electrically connects each inspection point to the inspection processing unit 8. In this state, the inspection processing unit 8 supplies an inspection current or voltage to each inspection point of the board 100 via each contact Pr of the inspection jig 3, and performs an inspection of the board 100, such as for a break or short circuit in the circuit pattern, based on a voltage signal or current signal obtained from each contact Pr. Alternatively, the inspection processing unit 8 may measure the impedance of the inspection target based on a voltage signal or current signal obtained from each contact Pr by supplying an AC current or voltage to each inspection point.

[0019] 2, 3 and 4, the support member 31 includes a first support portion 311 that supports the rear end side of the contact Pr, a second support portion 312 that supports the tip side of the contact Pr, a spacing retaining member 7 that retains the first support portion 311 and the second support portion 312 at a distance from each other, a spacer S, and a reinforcing plate 5.

[0020] The first support portion 311 is configured by stacking a first support plate B2 and second support plates C1, D, E1, E2 in the Z direction. The second support plates C1, D, E1, E2 are stacked in this order from the side closer to the second support portion 312. The first support plate B2 is stacked on the second support plate C1. In other words, of the multiple support plates B2, C1, D, E1, E2 constituting the first support portion 311, the support plate closest to the second support portion 312 is the first support plate B2 (opposing support plate).

[0021] The second support plate may be composed of three or less or five or more support plates. Alternatively, the first support portion 311 may be composed of a single support plate.

[0022] The first support plate B2 has through holes B2H for supporting the contacts Pr.

[0023] The second support plates C1, D, E1, and E2 have through holes C1H, DH, E1H, and E2H for supporting the respective contacts Pr.

[0024] The rear end side of the contact Pr is inserted into the through holes B2H, C1H, DH, E1H, and E2H. As a result, the rear end side of the contact Pr is supported by the first support portion 311.

[0025] The reinforcing plate 5 is disposed on a surface of the first support plate B2 facing the second support portion 312. Referring to Fig. 5, the reinforcing plate 5 is a substantially rectangular plate-like member. The reinforcing plate 5 has two substantially rectangular openings 5C that are elongated in the Y direction. The two openings 5C are opened so as to include, in a plan view, an area that includes the multiple through holes B2H of the first support plate B2.

[0026] The inspection jig 3 may include a reinforcing plate 5a shown in Fig. 6 instead of the reinforcing plate 5. In place of the two openings 5C, the reinforcing plate 5a is formed with a plurality of through holes 5H that correspond one-to-one to the plurality of through holes B2H of the first support plate B2. The contacts Pr may be inserted into each of the through holes 5H. The inner diameter of the through holes 5H is larger than that of the through holes B2H.

[0027] Figures 3 and 4 1, a spacer S having a substantially rectangular frame shape is laminated on the outer periphery of the reinforcing plate 5. As shown in FIG.

[0028] The second support portion 312 is configured by stacking support plates A, A2, and A3. The support plates A, A2, and A3 are stacked in this order from the side farthest from the first support portion 311. The support plates A and A2 are formed with through holes AH and A2H for supporting each contact Pr. The support plate A3 is formed with a through hole A3H for supporting each contact Pr.

[0029] The second support portion 312 may be composed of two or less or four or more support plates.

[0030] The tip side of the contact Pr is inserted into the through holes AH, A2H, and A3H. As a result, the tip side of the contact Pr is supported by the second support portion 312.

[0031] A generally rectangular tubular spacing member 7 extends from the outer periphery of the support plate A3. The support plate A3 and the spacing member 7 are integrally formed. As a result, the support plate A3 and the spacing member 7 form a spacing block B. Note that the support plate A3 and the spacing member 7 may be separate bodies.

[0032] An end face of the spacing member 7 is attached to the surface of the spacer S on the side of the second support portion 312. As a result, the first support plate B2 and the support plate A3, i.e., the first support portion 311 and the second support portion 312, are held apart by a distance equal to the sum of the length of the spacing member 7 in the Z direction, the thickness of the spacer S, and the thickness of the reinforcing plate 5. The support plates A, A2, A3, the reinforcing plate 5, the first support plate B2, and the second support plates C1, D, E1, E2 are held in parallel.

[0033] The spacer S is a member for finely adjusting the distance between the first support portion 311 and the second support portion 312, and the inspection jig 3 does not necessarily need to include the spacer S.

[0034] Furthermore, the spacing member 7 is not limited to a rectangular tubular member. Any spacing member may be used as long as it can keep the first support portion 311 and the second support portion 312 apart from each other. For example, a rod-shaped support may be used as the spacing member.

[0035] The through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are provided perpendicular to each plate so that one and the same contact Pr is inserted through each of the corresponding through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H. The position of each through hole is shifted in the X direction with respect to the perpendicular direction (Z direction) of the support plates A, A2, and A3, the first support plate B2, and the second support plates C1, D, E1, and E2 so that the contact Pr is inclined with respect to the perpendicular direction (Z direction).

[0036] As a result, each contact Pr is supported at an incline in the same direction in the X direction with respect to the Z direction. The tip of each contact Pr protrudes from the support plate A when not in contact with the substrate 100. Hereinafter, through holes AH, A2H, A3H, B2H, C1H, DH, E1H, E2H, and 5H will be collectively referred to as through hole H. Note that through hole H may penetrate each plate at an incline with respect to the perpendicular direction.

[0037] 2, when the inspection jig 3 is viewed from the support plate A side, the multiple through holes H are distributed in a first region P1 and a second region P2 each extending in a substantially rectangular shape elongated in the Y direction. The X direction corresponds to an example of the first direction, and the Y direction corresponds to an example of the second direction.

[0038] The through holes H are arranged at equal intervals in the first region P1 and the second region P2. The first region P1 and the second region P2 are spaced apart by a distance greater than the intervals between the through holes H in the same region.

[0039] 2, the through holes H are provided in five zigzag rows in the X direction (first direction) and eleven zigzag rows in the Y direction (second direction) in the first region P1. Similarly, the through holes H are provided in five zigzag rows in the X direction (first direction) and eleven zigzag rows in the Y direction (second direction) in the second region P2.

[0040] That is, in the first region P1 and the second region P2 in which the through holes H are arranged at equal intervals, the number of rows of the through holes H corresponding to the X direction (first direction) is smaller than the number of rows of the through holes H corresponding to the Y direction (second direction). Note that the through holes H are not limited to being arranged in a zigzag pattern, and may be arranged linearly in the X direction and the Y direction, i.e., in a lattice pattern. Also, although an example in which there are two regions in which the through holes H are arranged at equal intervals has been shown, there may be one such region, or three or more such regions.

[0041] As described above, the position of each through hole H is shifted in the X direction with respect to the perpendicular direction (Z direction), so the direction of shift of the through holes H is along the X direction (first direction) in which the number of rows of the through holes H is small.

[0042] When the inspection jig 3 is brought into contact with the substrate 100 to inspect the substrate 100, the tip of each contact Pr is pressed into the second support portion 312, as shown in Fig. 7. At this time, since each contact Pr is supported at an inclination in the same direction in the X direction, it bends in the X direction to absorb the amount of pressing of the contact Pr.

[0043] Here, the inclination of the contact Pr is determined by the direction of deviation of the through holes H, and since the direction of deviation of the through holes H is along the X direction (first direction) in which the number of rows of the through holes H is small, the inclination direction of the contact Pr and the bending direction of the contact Pr are also the X direction in which the number of rows of the through holes H is small.

[0044] When the contacts Pr bend, there is an increased risk that the contacts Pr adjacent to each other in the bending direction will come into contact with each other. However, in the inspection jig 3, since each contact Pr bends along the X direction (first direction) in which the number of rows of the through holes H is small, there is a reduced risk that the contacts Pr will come into contact with each other compared to when the contacts Pr bend along the Y direction (second direction) in which the number of rows of the through holes H is large.

[0045] The direction of the shift of the through holes H does not necessarily have to be along the first direction in which the number of rows of the through holes H is small.

[0046] 3 and 7, the support plates A, A2, A3, the spacing member 7, the spacer S, the first support plate B2, and the second support plates C1, D, E1, E2 are made of an insulating material, for example, a resin material. The reinforcing plates 5, 5a have a higher bending strength than the first support plate B2 and the second support plates C1, D, E1, E2. The reinforcing plates 5, 5a can be made of a material such as ceramics or fine ceramics.

[0047] The bending strength of the reinforcing plates 5, 5a, and B2a can be evaluated, for example, in accordance with JIS R 1601 "Test method for bending strength at room temperature of fine ceramics" or ISO14704. The bending strength of the first support plate B2 and the second support plates C1, D, E1, and E2 can be evaluated, for example, in accordance with JIS K 7171 "Plastics - Determination of bending properties" or ISO178. The bending strength of each plate is evaluated as follows. When the plate is assembled into the inspection jig, two points sandwiching the through hole through which the contact is expected to penetrate the support plate and where the laminate of the support plate and the reinforcing plate faces the spacing member are set as external supports, and the approximate center of the two external supports is set as the load point. In the case where the plate shape has an opening larger than the indenter of the load measuring instrument at the approximate center of the two external supports and the load of the load measuring instrument cannot be applied, the point where the load can be applied to the plate near the approximate center of the two external supports may be set as the load point. The stroke of the load measuring device is measured when a specified load is applied to the load point that does not destroy the plate. The smaller the stroke, the stronger the bending strength can be evaluated. The specified load can be any value and is not bound by the measurement conditions in the above standard. Regardless of the regulations in the above standard regarding the shape, dimensions, surface roughness, etc. of the test piece, it is sufficient to evaluate the bending strength with the shape and dimensions of the plate as it is, without processing it. Regardless of the regulations in the above standard regarding the number of test pieces, only one plate is required to evaluate the bending strength.

[0048] The reinforcing plates 5, 5a have a higher bending strength than the first support plate B2 and the second support plates C1, D, E1, E2, which are the support parts that support the contacts. As a result, the reinforcing plates 5, 5a reduce the deflection of the first support plate B2 and the second support plates C1, D, E1, E2, and the stress applied to the support parts that support the contacts can be reduced.

[0049] The mechanism by which stress is applied to the support portions that support the contacts in an inspection jig that does not include the reinforcing plates 5, 5a will be described below.

[0050] Specifically, when the inspection jig is brought into contact with the inspection object and the contacts Pr are pushed in and bent, the plate PL is pushed and bent by the bent contacts Pr as shown in Fig. 8. More specifically, as shown in Fig. 9, the bent contacts Pr hit and get caught on the opening edges of the through holes PLH of the plate PL, and strongly press the plate PL.

[0051] In this state, when the inspection jig is separated from the inspection object and the contacts Pr try to return to their original position, the plate PL is pulled by the contacts Pr and bent in the opposite direction, as shown in Fig. 10. More specifically, the bent contacts Pr are pressed strongly against the inner wall of the through hole PLH. This generates a large frictional force between the contacts Pr and the through hole PLH, and when the contacts Pr return to their original position, the contacts Pr pull the plate PL, causing the plate PL to bend in the opposite direction, as shown in Fig. 11. In this manner, bending of the plate PL applies stress to the plate PL, which is a support that supports the contacts Pr.

[0052] On the other hand, since the inspection jig 3 is provided with the reinforcing plates 5, 5a having a bending strength stronger than that of the first support plate B2 and the second support plates C1, D, E1, E2, the deflection of the first support plate B2 and the second support plates C1, D, E1, E2 is suppressed by the reinforcing plates 5, 5a. Therefore, as a result of reducing the deflection of the first support plate B2 and the second support plates C1, D, E1, E2, it becomes easy to reduce the stress applied to the first support plate B2 and the second support plates C1, D, E1, E2, which are the support parts that support the contacts Pr.

[0053] The first support plate B2 has a lower hardness than the second support plates C1, D, E1, and E2. The hardness of the first support plate B2 and the second support plates C1, D, E1, and E2 can be measured using various indices, such as Vickers hardness, Brinell hardness, Nouveau hardness, Rockwell hardness, superficial hardness, Mayer hardness, durometer hardness, Barcol hardness, monotron hardness, Shore hardness, and Mohs hardness. The hardness of the first support plate B2 and the second support plates C1, D, E1, and E2 can be evaluated, for example, according to JIS Z 2244 "Vickers hardness test - test method" or ISO 6507.

[0054] 12 shows an example in which the reinforcing plate 5a is used, but it goes without saying that the reinforcing plate 5 may also be used. When the contact Pr is bent, the load applied to the first support portion 311 due to the bending is mostly applied to the opening edge H1 of the through hole B2H of the first support plate B2. Therefore, the frictional force of the contact Pr is the largest in the through hole B2H among the through holes B2H, C1H, DH, E1H, and E2H. Therefore, by making the hardness of the first support plate B2 softer than that of the second support plates C1, D, E1, and E2, it is possible to reduce the risk of the contact Pr being damaged.

[0055] In addition, the second support plates C1, D, E1, and E2 have a higher bending strength than the first support plate B2. As described above, the first support plate B2 has a lower hardness than the second support plates C1, D, E1, and E2, so that the risk of damaging the contact Pr can be reduced. On the other hand, soft materials generally have a lower bending strength.

[0056] Therefore, by combining a first support plate B2 having a softer hardness than the second support plates C1, D, E1, E2 with second support plates C1, D, E1, E2 having a stronger bending strength than the first support plate B2, it is possible to reduce the risk of damage to the contact Pr while ensuring the bending strength of the entire first support portion 311.

[0057] In addition, the opening edges H1, H2 of the through hole B2H of the first support plate B2 are chamfered. This increases the smoothness of the opening edges H1, H2, so that the opening edges H1, H2 are This can reduce the risk of the contact Pr being damaged by friction. The chamfering can be a rounded surface with rounded corners, an angular surface with beveled corners, or various other chamfering shapes. As shown in Fig. 12, the through hole H of each support plate may have a large diameter portion and a small diameter portion connected to each other. In this case, it is preferable that the opening edge of the small diameter portion of the through hole H be chamfered.

[0058] In addition, since the contact Pr bends on the second support portion 312 side of the first support plate B2, the friction between the opening edge H1 on the second support portion 312 side and the contact Pr is greater than the friction between the opening edge H2 on the second support plate C1 side and the contact Pr. Therefore, although an example in which both opening edges H1, H2 are chamfered is shown in Fig. 12, only the opening edge H1 on the second support portion 312 side, which has greater friction with the contact Pr, may be chamfered.

[0059] Alternatively, the opening edges H1, H2 of the through hole B2H of the first support plate B2 do not have to be chamfered.

[0060] The positions of the through holes H of the support plates do not necessarily have to be shifted, and the contact Pr is not limited to being supported at an angle. The second support plates C1, D, E1, and E2 are not limited to being stronger in bending strength than the first support plate B2, and the first support plate B2 is not limited to being softer in hardness than the second support plates C1, D, E1, and E2.

[0061] Moreover, the support member 31 may not include the reinforcing plate 5, and the first support plate B2 may function as the reinforcing plate.

[0062] 13 and 14, the support member 31a of the inspection jig 3a includes a reinforcing plate B2a instead of the reinforcing plates 5 and 5a. The reinforcing plate B2a has a shape similar to that of the first support plate B2. The reinforcing plate B2a is made of the same material as the reinforcing plates 5 and 5a, or has the same bending strength as the reinforcing plates 5 and 5a.

[0063] The first support portion 311a of the support member 31a does not include the first support plate B2, and is configured by stacking second support plates C1, D, E1, E2 (one or more support plates) in the Z direction. In this case, the second support plate C1 corresponds to the opposing support plate that is closest to the second support portion 312 among the one or more support plates.

[0064] According to the inspection jig 3a, the reinforcing plate B2a reduces the deflection of the second support plates C1, D, E1, and E2, and the stress applied to the support parts that support the contacts Pr can be reduced. Moreover, instead of the reinforcing plate 5 or the reinforcing plate 5a and the first support plate B2 in the inspection jig 3, the inspection jig 3a only needs to include the reinforcing plate B2a. Therefore, the configuration of the inspection jig 3a can be simplified.

[0065] The reinforcing plate B2a has a shape similar to that of the first support plate B2. Therefore, like the inspection jig 3, the inspection jig 3a can deflect each of the contacts Pr in the X direction by tilting each of the contacts Pr in the same direction in the X direction. Also, like the inspection jig 3, the inspection jig 3a deflects each of the contacts Pr along the X direction (first direction) in which the number of rows of the through holes H is small, reducing the risk of the contacts Pr coming into contact with each other.

[0066] In addition, although an example has been shown in which the first support portion 311a includes four second support plates C1, D, E1, and E2 as support plates, the first support portion 311a may include only one support plate, or may include five or more support plates. When the first support portion 311a includes only one support plate, that support plate corresponds to the opposing support plate.

[0067] In addition, similarly to the first support plate B2, the opening edges H1, H2 of the through hole B2H of the reinforcing plate B2a are chamfered, so that the risk of the contact Pr being damaged by friction with the opening edges H1, H2 can be reduced. Furthermore, among the opening edges H1, H2 of the reinforcing plate B2a, only the opening edge H1 on the second support part 312 side, which has a larger friction with the contact Pr, may be chamfered.

[0068] Alternatively, the opening edges H1, H2 of the through hole B2H of the reinforcing plate B2a do not have to be chamfered.

[0069] In addition, it is preferable that a lubricating layer 33, for example a coating layer, is formed on the inner surface of each through hole H of each support plate or reinforcing plate 5a, B2a in the inspection jig 3, 3a in order to reduce friction. In FIG. 15, each support plate or reinforcing plate 5a, B2a is shown as plate PL, and the through hole H is shown in more detail. The inner surface of the through hole H of the plate PL includes chamfered opening edges H1, H2 (chamfered portion) and a through hole main body portion H3 which is the portion of the inner surface of the through hole H excluding the opening edges H1, H2. In the plate PL, for example, a large diameter portion H4 which is coaxial with the through hole H and has a diameter larger than that of the through hole H is connected to the through hole H.

[0070] 15, the lubricating layer 33 may be formed on the entire surface of the plate PL, including the inner surfaces of each through hole H. However, since the contact Pr does not come into contact with any part other than the inner surface of each through hole H, the lubricating layer 33 does not have to be formed on any part other than the inner surface of each through hole H.

[0071] Moreover, the slip layer 33 may be formed on at least one of the inner surfaces of each through hole H, that is, the through hole main body portion H3 and the opening edge portion H1.

[0072] The thickness of the sliding layer 33 is, for example, about 1 μm. The friction coefficient of the sliding layer 33 with respect to the contact Pr is smaller than the friction coefficient of the base portion 34 of the sliding layer 33 on the plate PL. The sliding layer 33 can be formed by, for example, vapor deposition of a material with a small friction coefficient. The magnitude of the friction coefficient may be compared by comparing either the kinetic friction coefficients with each other or the static friction coefficients with each other.

[0073] The material of the slip layer 33 may be, for example, a paraxylylene-based polymer, and is preferably an insulating material with a small coefficient of friction, such as Parylene (registered trademark), fluorine, polyester, or acrylic.

[0074] By forming the lubricating layer 33 on the inner surface of the through hole H in this manner, the friction between the through hole H and the contact Pr can be reduced.

[0075] The contact Pr bends on the side of the first support plate B2 or the second support portion 312 of the reinforcing plates 5a and B2a. Therefore, the contact pressure between the contact Pr and the through hole B2H of the first support plate B2, the through hole B2H of the reinforcing plate B2a, or the through hole 5H of the reinforcing plate 5a tends to be greater than the contact pressure between the other through holes H and the contact Pr, and friction tends to occur.

[0076] Therefore, the slip layer 33 may be formed at least on the inner surface of the through hole B2H of the first support plate B2, the through hole B2H of the reinforcing plate B2a, or the through hole 5H of the reinforcing plate 5a.

[0077] That is, an inspection jig according to one embodiment of the present invention comprises a rod-shaped contactor, a first support portion supporting one end side of the contactor, a second support portion supporting the other end side of the contactor, and a spacing retaining member retaining the first support portion and the second support portion spaced apart from each other, the first support portion comprising a support plate having a through hole formed therein through which the contactor is inserted, and a reinforcing plate having a bending strength greater than that of the support plate is arranged on the surface of the support plate facing the second support portion.

[0078] According to this configuration, the reinforcing plate, which has a bending strength greater than that of the support plate, is disposed on the surface of the support plate facing the second support portion, so that the reinforcing plate reduces the bending of the support plate, making it easier to reduce the stress applied to the support plate, which is the support portion that supports the contacts.

[0079] It is also preferable that the first support portion includes a plurality of stacked support plates, the plurality of support plates including a first support plate which is the support plate closest to the second support portion, and a second support plate which is a support plate other than the first support plate, and the reinforcing plate is disposed on the opposing surface of the first support plate facing the second support portion.

[0080] According to this configuration, the first support section is formed by stacking a plurality of support plates. Since the contactor bends significantly between the first support section and the second support section, the first support plate, which is the support plate closest to the second support section among the plurality of support plates in the first support section, is most susceptible to the force caused by the bending of the contactor. A reinforcing plate is disposed on the first support plate, which is most susceptible to the force caused by the bending of the contactor. In this way, by reinforcing the support plate which is most susceptible to the force caused by the bending of the contactor, it becomes easier to reduce the stress applied to the support section.

[0081] Moreover, it is preferable that the first support plate has a hardness lower than that of the second support plate.

[0082] Since the contactor bends significantly between the first support portion and the second support portion, when the contactor bends, the friction between the contactor and the through hole in the first support plate is greater than the friction between the contactor and the through hole in the second support plate. Therefore, by making the hardness of the first support plate, which has greater friction, softer than that of the second support plate, it becomes easier to reduce the risk of damaging the contactor.

[0083] In addition, it is preferable that the second support plate has a bending strength greater than that of the first support plate.

[0084] Materials with soft hardness generally tend to have weak bending strength, so by combining a first support plate with soft hardness and a second support plate with strong bending strength, it becomes easy to reduce the risk of damaging the contacts while ensuring the bending strength of the entire first support portion.

[0085] Furthermore, it is preferable that the positions of the through holes of the first support plate and the through holes of the second support plate, which correspond to each other so that the same contact can be inserted, are offset from the position of the through holes of the first support plate and the position of the through holes of the second support plate in the direction of the perpendicular line so that the contact is inclined with respect to the perpendicular line of the first and second support plates.

[0086] According to this configuration, the contacts can be easily supported at an angle by the through holes formed in the first and second support plates.

[0087] Furthermore, it is preferable that a plurality of through holes are formed in the first and second support plates, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and in a plurality of rows corresponding to a second direction intersecting the first direction, and within a region in which the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is smaller than the number of rows corresponding to the second direction, and the direction of the shift is along the first direction.

[0088] According to this configuration, the direction of the misalignment of the through holes is along the first direction in which the number of rows of the through holes is small. Since the contacts are inclined along the first direction, which is the direction of the misalignment of the through holes, the contacts bend along the first direction. Therefore, the contacts bend in the direction in which the number of rows of the through holes is small, i.e., the number of rows of the contacts is small, so there is a reduced risk of the contacts coming into contact with each other compared to when the contacts bend along the second direction in which the number of rows is large.

[0089] In addition, it is preferable that an opening edge portion of the through hole of the first support plate on the second support portion side is chamfered.

[0090] With this configuration, the opening edge on the second support part side, which is prone to friction with the bent contact, is chamfered and made smoother, making it easy to reduce the risk of the contact being damaged by friction with the opening edge.

[0091] It is also preferable that a plurality of through holes are formed in the first and second support plates, and that an opening is formed in the reinforcing plate such that an area including the plurality of through holes of the first support plate is included within the opening.

[0092] According to this configuration, since it is not necessary to provide the reinforcing plate with through holes in the number of the contacts, the reinforcing plate can be easily produced.

[0093] In addition, it is preferable that a sliding layer is formed on the inner surface of the through hole of the first support plate to reduce friction, and that the friction coefficient of the sliding layer with respect to the contact is smaller than the friction coefficient of a base portion of the sliding layer on the first support plate.

[0094] According to this configuration, friction between the contact inserted into the through hole and the inner surface of the through hole is reduced.

[0095] In addition, an opening edge portion of the through hole of the first support plate on the side of the second support portion is chamfered, and the chamfered portion is formed on an inner surface of the through hole including the chamfered portion. A sliding layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which are portions excluding the through hole main body portion and the chamfered portion, and it is preferable that the friction coefficient of the sliding layer with respect to the contact is smaller than the friction coefficient of the base portion of the sliding layer on the first support plate.

[0096] According to this configuration, it is possible to reduce friction between the contact and at least one of the through-hole main body and the chamfered portion in the through-hole.

[0097] It is also preferable that a plurality of the through holes are formed in the one or more support plates, and that the reinforcing plate is formed with a plurality of through holes that correspond one-to-one to the plurality of through holes in an opposing support plate, which is the support plate among the one or more support plates that is closest to the second support portion.

[0098] According to this configuration, the area where the through holes are formed in the support plate can also be reinforced with the reinforcing plate, improving the effect of reducing stress applied to the support portion that supports the contact.

[0099] Furthermore, it is preferable that the positions of the through holes of the reinforcing plate and the through holes of the opposing support plate, which correspond to each other so that the same contact can be inserted, are offset from the position of the through holes of the reinforcing plate and the position of the through holes of the opposing support plate in the direction of the perpendicular line so that the contact is inclined with respect to the perpendicular line of the reinforcing plate and the opposing support plate.

[0100] According to this configuration, the contacts can be easily supported at an angle by the through holes formed in the reinforcing plate and the opposing support plate.

[0101] Furthermore, it is preferable that the multiple through holes in the reinforcing plate and the opposing support plate are arranged in multiple rows corresponding to a predetermined first direction, and also in multiple rows corresponding to a second direction intersecting the first direction, the number of rows corresponding to the first direction being less than the number of rows corresponding to the second direction, and the direction of the shift is along the first direction.

[0102] According to this configuration, the direction of the misalignment of the through holes is along the first direction in which the number of rows of the through holes is small. Since the contacts are inclined along the first direction, which is the direction of the misalignment of the through holes, the contacts bend along the first direction. Therefore, the contacts bend in the direction in which the number of rows of the through holes is small, i.e., the number of rows of the contacts is small, so there is a reduced risk of the contacts coming into contact with each other compared to when the contacts bend along the second direction in which the number of rows is large.

[0103] In addition, it is preferable that an opening edge portion of the through hole of the reinforcing plate on the second support portion side is chamfered.

[0104] With this configuration, the opening edge on the second support part side, which is prone to friction with the bent contact, is chamfered and made smoother, making it easy to reduce the risk of the contact being damaged by friction with the opening edge.

[0105] In addition, it is preferable that a lubricating layer is formed on the inner surface of the through hole of the reinforcing plate to reduce friction, and the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of a base portion of the lubricating layer on the reinforcing plate.

[0106] According to this configuration, friction between the contact inserted into the through hole and the inner surface of the through hole is reduced.

[0107] In addition, the opening edge portion of the through hole of the reinforcing plate on the side of the second support portion is chamfered, and a lubricating layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which are the portions of the inner surface including the chamfered portion of the through hole excluding the chamfered portion, and it is preferable that the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of the base portion of the lubricating layer in the reinforcing plate.

[0108] According to this configuration, it is possible to reduce friction between the contact and at least one of the through-hole main body and the chamfered portion in the through-hole.

[0109] An inspection device according to one example of the present invention includes the above-mentioned inspection jig and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

[0110] According to this configuration, it becomes easy to reduce the stress applied to the support portion that supports the contact in the inspection jig used for inspection. [Explanation of symbols]

[0111] 1 Inspection device 3, 3a, 3U, 3D Inspection jig 4, 4U, 4D Inspection section 5, 5a, B2a Reinforcement plate 5C Opening 6 Substrate fixing device 7 Spacing member 8 Inspection processing section 31, 31a Support member 100 Substrate (object to be inspected) 311, 311a First support section 312 Second support section 321 Base plate A, A2, A3 Support plate H, 5H, AH, A2H, A3H, B2H, C1H, DH, E1H, E2H Through hole B Spacing block B2 First support plate (support plate, opposing support plate) C1 Second support plate (support plate, opposing support plate) D, E1, E2 Second support plate (support plate) H1, H2 Opening edge (chamfered section) P1 First region P2 Second region PL Plate PLH Through hole Pr Contact S Spacer

Claims

1. 1. An inspection jig comprising: a rod-shaped contactor; a first support portion supporting one end side of the contactor; a second support portion supporting the other end side of the contactor; and a spacing member holding the first support portion and the second support portion apart from each other, wherein the first support portion comprises a support plate having a through hole formed therein through which the contactor is inserted, the first support portion including a plurality of the support plates stacked together, the plurality of support plates including a first support plate which is the support plate closest to the second support portion, and a second support plate which is the support plate other than the first support plate, and the first support plate having a hardness softer than that of the second support plate.

2. 1. An inspection jig comprising: a rod-shaped contactor; a first support portion supporting one end side of the contactor; a second support portion supporting the other end side of the contactor; and a spacing member holding the first support portion and the second support portion apart from each other, wherein the first support portion comprises a support plate having a through hole formed therein through which the contactor is inserted, the first support portion including a plurality of the support plates stacked together, the plurality of support plates including a first support plate which is the support plate closest to the second support portion, and a second support plate which is the support plate other than the first support plate, and the second support plate having a bending strength greater than that of the first support plate.

3. 2. An inspection jig as described in claim 1, wherein the positions of the through holes of the first support plate and the through holes of the second support plate which correspond to each other so that the same contact can be inserted therethrough are offset relative to the direction of the perpendicular line to the first and second support plates so that the contact is inclined relative to the perpendicular line.

4. 3. An inspection jig as described in claim 2, wherein the through holes of the first support plate and the through holes of the second support plate correspond to each other so that the same contact is inserted therethrough, and the positions of the through holes of the first support plate and the through holes of the second support plate are offset relative to the direction of the perpendicular line so that the contact is inclined relative to the perpendicular line of the first and second support plates.

5. The inspection jig of claim 3, wherein a plurality of through holes are formed in the first and second support plates, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and a plurality of rows corresponding to a second direction intersecting the first direction, and within a region in which the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the shift is along the first direction.

6. The inspection jig of claim 4, wherein a plurality of through holes are formed in the first and second support plates, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and in a plurality of rows corresponding to a second direction intersecting the first direction, and within a region in which the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the shift is along the first direction.

7. The inspection jig according to claim 1 , wherein an opening edge portion of the through hole of the first support plate on the side of the second support portion is chamfered.

8. The inspection jig according to claim 2 , wherein an opening edge portion of the through hole of the first support plate on the side of the second support portion is chamfered.

9. The inspection jig described in claim 1, wherein a lubricating layer is formed on the inner surface of the through hole of the first support plate to reduce friction, and the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of a base portion of the lubricating layer on the first support plate.

10. The inspection jig described in claim 2, wherein a lubricating layer is formed on the inner surface of the through hole of the first support plate to reduce friction, and the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of a base portion of the lubricating layer on the first support plate.

11. The inspection jig described in claim 9, wherein the opening edge portion of the through hole of the first support plate on the second support portion side is chamfered, and a lubricating layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which are the portions of the inner surface including the chamfered portion of the through hole excluding the chamfered portion, and the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of a base portion of the lubricating layer in the first support plate.

12. The inspection jig described in claim 10, wherein the opening edge portion of the through hole of the first support plate on the second support portion side is chamfered, and a lubricating layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which are the portions of the inner surface including the chamfered portion of the through hole excluding the chamfered portion, and the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of a base portion of the lubricating layer in the first support plate.

13. An inspection device comprising: the inspection tool according to any one of claims 1 to 12; and an inspection processing unit that inspects an object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

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