Method for manufacturing semiconductor device

Abstract

To provide a novel metal oxide.SOLUTION: A metal oxide including crystals which are oriented to a C-axis includes: indium; an element M (M is one of gallium, aluminum, yttrium, and tin); and zinc. The diffusion length of hydrogen in the metal oxide is 200 nm at a maximum. The absorption at a local level measured by CPM in the metal oxide is 0.01 / cm at a maximum. Also, the diffusion length of hydrogen is calculated under the condition that the temperature is 400°C and length of time is one hour.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] 1. Field of the Invention One embodiment of the present invention relates to a metal oxide and a method for forming a metal oxide. Another embodiment of the present invention relates to a semiconductor device and a method for manufacturing the semiconductor device. Another embodiment of the present invention relates to a semiconductor wafer, a module, and an electronic device.

[0002] In this specification and the like, a semiconductor device refers to any device that can function by utilizing semiconductor characteristics. Semiconductor elements such as transistors, semiconductor circuits, arithmetic devices, and memory devices are all embodiments of semiconductor devices. Display devices (such as liquid crystal display devices and light-emitting display devices), projection devices, lighting devices, electro-optical devices, power storage devices, memory devices, semiconductor circuits, imaging devices, electronic devices, and the like may be considered to include semiconductor devices.

[0003] Note that one aspect of the present invention is not limited to the above technical field. One aspect of the invention disclosed in the present specification etc. relates to an object, a method, or a manufacturing method. Alternatively, one aspect of the present invention relates to a process, a machine, a manufacture, or a composition of matter. [Background technology]

[0004] Technology that constructs transistors using semiconductor thin films formed on substrates with insulating surfaces is attracting attention. Such transistors are widely used in electronic devices such as integrated circuits (ICs) and image display devices (also simply referred to as display devices). Silicon-based semiconductor materials are widely known as semiconductor thin films that can be used in transistors, but oxide semiconductors are also attracting attention as other materials.

[0005] In oxide semiconductors, c-axis aligned crystalline (CAAC) structures and nanocrystalline (nc) structures, which are neither single crystal nor amorphous, have been found (see Non-Patent Documents 1 and 2).

[0006] Non-Patent Documents 1 and 2 disclose techniques for manufacturing a transistor using an oxide semiconductor having a CAAC structure. [Prior art documents] [Non-patent literature]

[0007] [Non-Patent Document 1] S. Yamazaki et al., “SID Symposium Digest of Technical Papers”, 2012, volume 43, issue 1, p.183-186 [Non-Patent Document 2] S. Yamazaki et al., “Japanese Journal of Applied Physics”, 2014, volume 53, Number 4S, p.04ED18-1-04ED18-10 Summary of the Invention [Problem to be solved by the invention]

[0008] An object of one embodiment of the present invention is to provide a novel metal oxide and a method for forming the same. Another object of one embodiment of the present invention is to provide a semiconductor device with high reliability and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device having good electrical characteristics and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device with little variation in transistor characteristics and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device that can be miniaturized or highly integrated and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device with high on-current and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device having high frequency characteristics and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device with low power consumption and a manufacturing method thereof.

[0009] Note that the description of these problems does not preclude the existence of other problems. Note that one embodiment of the present invention does not necessarily solve all of these problems. Note that problems other than these will become apparent from the description of the specification, drawings, claims, etc., and it is possible to extract problems other than these from the description of the specification, drawings, claims, etc. [Means for solving the problem]

[0010] One embodiment of the present invention is a metal oxide containing c-axis oriented crystals. The metal oxide contains indium, an element M (M is gallium, aluminum, yttrium, or tin), and zinc. The diffusion length of hydrogen in the metal oxide is 200 nm or less. In the metal oxide, the absorption due to the localized level calculated by CPM is 1×10 -2 cm -1 The following is the result.

[0011] In the above metal oxide, the diffusion length of hydrogen is preferably calculated at a temperature of 400° C. for one hour.

[0012] Another embodiment of the present invention is a transistor including any of the above metal oxides in a channel formation region.

[0013] Another embodiment of the present invention is a semiconductor device having a metal oxide, a first conductor and a second conductor in contact with the metal oxide, a third conductor overlapping the metal oxide, and an insulator located between the metal oxide and the third conductor. The metal oxide contains indium, an element M (M is gallium, aluminum, yttrium, or tin), and zinc. The metal oxide contains c-axis oriented crystals. The diffusion length of hydrogen in the metal oxide is 200 nm or less. In the metal oxide, the absorption due to the localized level calculated by CPM is 1×10 -2 cm -1 The following is the result.

[0014] Another embodiment of the present invention is a semiconductor device having a metal oxide, a first conductor and a second conductor on the metal oxide, an insulator disposed between the first conductor and the second conductor and disposed on the metal oxide, and a third conductor on the insulator. The metal oxide contains indium, an element M (M is gallium, aluminum, yttrium, or tin), and zinc. The metal oxide contains c-axis oriented crystals. The diffusion length of hydrogen in the metal oxide is 200 nm or less. In the metal oxide, the absorption due to the localized level calculated by CPM is 1×10 -2 cm -1 The following is the result.

[0015] In the above semiconductor device, the diffusion length of hydrogen is preferably calculated at a temperature of 400° C. for one hour.

[0016] Another embodiment of the present invention is a method for forming a metal oxide film on a substrate, performing a heat treatment at a temperature of 500° C. to 600° C. after the metal oxide film is formed, and forming island-shaped metal oxide by processing the metal oxide film using a lithography method. The metal oxide film is formed by a sputtering method using an In-M-Zn oxide target (M is gallium, aluminum, yttrium, or tin) at a substrate temperature of 200° C. to 400° C.

[0017] In the above method for forming a metal oxide, the heat treatment preferably includes a first heat treatment in a nitrogen gas atmosphere and then a second heat treatment in an oxygen gas atmosphere.

[0018] Another aspect of the present invention is a method for producing a semiconductor device, comprising the steps of forming a metal oxide film on a substrate, performing a heat treatment at a temperature of 500° C. to 600° C. after forming the metal oxide film, forming a conductive film on the metal oxide film, processing the conductive film and the metal oxide film by a lithography method to form an island-shaped conductive layer and a metal oxide, forming a first insulator and a second insulator, processing the second insulator, the first insulator, and the conductive layer to form an opening where the metal oxide is exposed in the second insulator and the first insulator, and a first conductor and a second conductor, and forming a third insulator and a third conductor. The metal oxide film is formed by a sputtering method at a substrate temperature of 200° C. to 400° C. using an In-M-Zn oxide target (M is gallium, aluminum, yttrium, or tin).

[0019] In the above-described method for manufacturing a semiconductor device, the heat treatment is preferably performed in such a manner that a first heat treatment is performed in a nitrogen gas atmosphere and then a second heat treatment is performed in an oxygen gas atmosphere. Effect of the Invention

[0020] According to one embodiment of the present invention, a novel metal oxide and a method for forming the same can be provided. According to one embodiment of the present invention, a semiconductor device with high reliability and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device having good electrical characteristics and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device with little variation in transistor characteristics and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device which can be miniaturized or highly integrated and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device with high on-state current and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device having high frequency characteristics and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device with low power consumption and a manufacturing method thereof can be provided.

[0021] Note that the description of these effects does not preclude the existence of other effects. Note that one embodiment of the present invention does not need to have all of these effects. Note that effects other than these will become apparent from the description in the specification, drawings, claims, etc., and it is possible to extract effects other than these from the description in the specification, drawings, claims, etc. [Brief description of the drawings]

[0022] [Figure 1] Fig. 1A is a top view of the semiconductor device, and Fig. 1B to Fig. 1D are cross-sectional views of the semiconductor device. [Diagram 2] FIG. 2 is a cross-sectional view of the semiconductor device. [Diagram 3] Fig. 3A is a diagram for explaining the classification of IGZO crystal structures, Fig. 3B is a diagram for explaining the XRD spectrum of a CAAC-IGZO film, and Fig. 3C is a diagram for explaining the micro-electron beam diffraction pattern of a CAAC-IGZO film. [Figure 4] Fig. 4A is a top view of the semiconductor device, and Fig. 4B to Fig. 4D are cross-sectional views of the semiconductor device. [Diagram 5] Fig. 5A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 5B to Fig. 5D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 6] Fig. 6A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 6B to Fig. 6D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 7] Fig. 7A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 7B to Fig. 7D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 8] Fig. 8A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 8B to Fig. 8D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 9] 9A is a top view illustrating a method for manufacturing a semiconductor device, and FIGS. 9B to 9D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 10]Fig. 10A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 10B to Fig. 10D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 11] Fig. 11A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 11B to Fig. 11D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 12] Fig. 12A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 12B to Fig. 12D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 13] Fig. 13A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 13B to Fig. 13D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 14] Fig. 14A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 14B to Fig. 14D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 15] Fig. 15A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 15B to Fig. 15D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 16] Fig. 16A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 16B to Fig. 16D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 17] Fig. 17A is a top view illustrating a method for manufacturing a semiconductor device, and Fig. 17B to Fig. 17D are cross-sectional views illustrating the method for manufacturing a semiconductor device. [Figure 18] Fig. 18A is a top view of the semiconductor device, and Fig. 18B to Fig. 18D are cross-sectional views of the semiconductor device. [Figure 19] 19A and 19B are cross-sectional views of a semiconductor device. [Figure 20] FIG. 20 is a cross-sectional view showing the configuration of a storage device. [Figure 21] FIG. 21 is a cross-sectional view showing the configuration of a storage device. [Figure 22] FIG. 22 is a cross-sectional view of the semiconductor device. [Figure 23] FIG. 23 is a cross-sectional view of the semiconductor device. [Figure 24]Fig. 24A is a top view of the semiconductor device, and Fig. 24B is a cross-sectional view of the semiconductor device. [Diagram 25] FIG. 25 is a cross-sectional view of the semiconductor device. [Figure 26] Fig. 26A is a block diagram showing a configuration example of a storage device, and Fig. 26B is a schematic diagram showing a configuration example of a storage device. [Figure 27] 27A to 27H are circuit diagrams showing configuration examples of a memory device. [Figure 28] FIG. 28 is a diagram showing various storage devices by hierarchy. [Figure 29] Fig. 29A is a block diagram of the semiconductor device, and Fig. 29B is a schematic diagram of the semiconductor device. [Diagram 30] 30A and 30B are diagrams illustrating an example of an electronic component. [Diagram 31] 31A to 31E are schematic diagrams of a memory device. [Diagram 32] 32A to 32H are diagrams showing electronic devices. [Diagram 33] FIG. 33 is a schematic diagram showing the structure of the sample. [Diagram 34] FIG. 34 shows the results of CPM measurement of the sample. [Diagram 35] FIG. 35 is a schematic diagram showing the structure of the sample. [Diagram 36] 36A and 36B are diagrams showing the results of SIMS measurement of the sample. [Figure 37] 37A and 37B are diagrams showing the results of SIMS measurement of the sample. [Figure 38] FIG. 38 shows the results of SIMS measurement of the sample. [Figure 39] FIG. 39 is a diagram for explaining the diffusion length of deuterium in a sample. [Diagram 40] FIG. 40 is a schematic diagram showing the structure of the sample. [Diagram 41] 41A and 41B are diagrams showing the results of SIMS measurement of the sample. [Diagram 42]42A and 42B are diagrams showing the results of SIMS measurement of the sample. [Diagram 43] FIG. 43 shows the results of SIMS measurement of the sample. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, the embodiments will be described with reference to the drawings. However, it will be easily understood by those skilled in the art that the embodiments can be implemented in many different ways, and that the modes and details can be changed in various ways without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the description of the following embodiments.

[0024] In addition, in the drawings, the size, thickness of layers, or areas may be exaggerated for clarity. Therefore, the drawings are not necessarily limited to the scale. The drawings are schematic illustrations of ideal examples, and are not limited to the shapes or values ​​shown in the drawings. For example, in an actual manufacturing process, layers, resist masks, etc. may be unintentionally thinned by etching or other processes, but this may not be reflected in the drawings to facilitate understanding. In addition, in the drawings, the same reference numerals are used in common between different drawings for the same parts or parts having similar functions, and repeated explanations may be omitted. In addition, when referring to similar functions, the same hatch pattern may be used and no particular reference numeral may be attached.

[0025] In order to facilitate understanding of the invention, particularly in top views (also called "plan views") and perspective views, some components may be omitted from the drawings. Also, some hidden lines may be omitted from the drawings.

[0026] In addition, in this specification, ordinal numbers such as first, second, etc. are used for convenience and do not indicate the order of steps or stacking. Therefore, for example, "first" can be appropriately replaced with "second" or "third" to explain. In addition, the ordinal numbers described in this specification and the like may not match the ordinal numbers used to specify one embodiment of the present invention.

[0027] In addition, in this specification, the terms "above" and "below" indicating the arrangement are used for convenience in order to explain the positional relationship between the components with reference to the drawings. In addition, the positional relationship between the components changes as appropriate depending on the direction in which each component is depicted. Therefore, the terms are not limited to those described in the specification, and can be rephrased appropriately depending on the situation.

[0028] For example, when it is explicitly stated in this specification that X and Y are connected, the case where X and Y are electrically connected, the case where X and Y are functionally connected, and the case where X and Y are directly connected are considered to be disclosed in this specification. Therefore, it is not limited to a specific connection relationship, for example, a connection relationship shown in a figure or text, and a connection relationship other than that shown in a figure or text is also considered to be disclosed in the figure or text. Here, X and Y are objects (for example, a device, an element, a circuit, wiring, an electrode, a terminal, a conductive film, a layer, etc.).

[0029] In this specification, a transistor is an element having at least three terminals including a gate, a drain, and a source. A region where a channel is formed between the drain (drain terminal, drain region, or drain electrode) and the source (source terminal, source region, or source electrode) (hereinafter, also referred to as a channel formation region) is provided, and a current can flow between the source and the drain through the channel formation region. In this specification, a channel formation region refers to a region through which a current mainly flows.

[0030] Furthermore, the functions of the source and drain may be interchanged when transistors of different polarities are used, when the direction of current changes during circuit operation, etc. For this reason, in this specification and the like, the terms source and drain may be used interchangeably.

[0031] The channel length refers to, for example, a region where the semiconductor (or a portion in the semiconductor through which current flows when the transistor is on) and the gate electrode overlap in a top view of a transistor, or a distance between the source (source region or source electrode) and the drain (drain region or drain electrode) in a channel formation region. Note that the channel length of one transistor does not necessarily have the same value in all regions. That is, the channel length of one transistor may not be fixed to one value. Therefore, in this specification, the channel length is defined as any one value, maximum value, minimum value, or average value in the channel formation region.

[0032] The channel width refers to, for example, the length of a channel formation region in a vertical direction based on the channel length direction in a region where a semiconductor (or a portion in the semiconductor through which current flows when the transistor is on) and a gate electrode overlap in a top view of a transistor, or in a channel formation region. Note that the channel width does not necessarily have the same value in all regions in one transistor. In other words, the channel width of one transistor may not be determined to a single value. Therefore, in this specification, the channel width is defined as any one value, maximum value, minimum value, or average value in the channel formation region.

[0033] In this specification and the like, depending on the structure of a transistor, the channel width in a region where a channel is actually formed (hereinafter also referred to as an "effective channel width") may differ from the channel width shown in a top view of the transistor (hereinafter also referred to as an "apparent channel width"). For example, when a gate electrode covers a side surface of a semiconductor, the effective channel width may be larger than the apparent channel width, and the influence of this may not be negligible. For example, in a fine transistor in which a gate electrode covers a side surface of a semiconductor, the proportion of a channel formation region formed on the side surface of the semiconductor may be large. In that case, the effective channel width is larger than the apparent channel width.

[0034] In such a case, it may be difficult to estimate the effective channel width by actual measurement. For example, in order to estimate the effective channel width from the design value, it is necessary to assume that the shape of the semiconductor is known. Therefore, if the shape of the semiconductor is not precisely known, it is difficult to accurately measure the effective channel width.

[0035] In this specification, when simply described as a channel width, it may refer to an apparent channel width. Alternatively, when simply described as a channel width, it may refer to an effective channel width. Note that the values ​​of the channel length, channel width, effective channel width, apparent channel width, etc. can be determined by analyzing a cross-sectional TEM image, etc.

[0036] Note that impurities in a semiconductor refer to, for example, anything other than the main components constituting the semiconductor. For example, an element with a concentration of less than 0.1 atomic % can be considered an impurity. The inclusion of impurities can, for example, increase the density of defect states in the semiconductor or reduce the crystallinity. When the semiconductor is an oxide semiconductor, impurities that change the characteristics of the semiconductor include, for example, Group 1 elements, Group 2 elements, Group 13 elements, Group 14 elements, Group 15 elements, and transition metals other than the main components of the oxide semiconductor, such as hydrogen, lithium, sodium, silicon, boron, phosphorus, carbon, and nitrogen. Note that water can also function as an impurity. For example, the inclusion of impurities can cause oxygen deficiencies (V O Sometimes it is written as ". ) may be formed.

[0037] In this specification and the like, silicon oxynitride refers to a material having a composition that contains more oxygen than nitrogen, and silicon nitride oxide refers to a material having a composition that contains more nitrogen than oxygen.

[0038] In this specification and the like, the term "insulator" can be replaced with an insulating film or an insulating layer, the term "conductor" can be replaced with a conductive film or a conductive layer, and the term "semiconductor" can be replaced with a semiconductor film or a semiconductor layer.

[0039] In addition, in this specification, "parallel" refers to a state in which two straight lines are arranged at an angle of -10 degrees or more and 10 degrees or less. Therefore, it also includes the case of -5 degrees or more and 5 degrees or less. "Approximately parallel" refers to a state in which two straight lines are arranged at an angle of -30 degrees or more and 30 degrees or less. "Perpendicular" refers to a state in which two straight lines are arranged at an angle of 80 degrees or more and 100 degrees or less. Therefore, it also includes the case of 85 degrees or more and 95 degrees or less. "Approximately perpendicular" refers to a state in which two straight lines are arranged at an angle of 60 degrees or more and 120 degrees or less.

[0040] In this specification and the like, the term "metal oxide" refers to an oxide of a metal in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (also referred to as oxide semiconductors or simply OS), and the like. For example, when a metal oxide is used for a semiconductor layer of a transistor, the metal oxide may be referred to as an oxide semiconductor. In other words, an OS transistor can be rephrased as a transistor having a metal oxide or an oxide semiconductor.

[0041] In this specification and the like, normally off means that when no potential is applied to the gate or when a ground potential is applied to the gate, the drain current flowing through the transistor per 1 μm of channel width is 1×10 -20 A or less, 1×10 at 85℃ -18 A or less, or 1×10 at 125°C -16 This means that it is A or lower.

[0042] (Embodiment 1) In this embodiment, a metal oxide, a method for forming the metal oxide, a semiconductor device including the metal oxide, and a manufacturing method thereof will be described with reference to FIGS. 1A to 19B.

[0043] <Metal oxides and methods for forming same> This section describes metal oxides that can be used for the semiconductor layer of a transistor and a method for forming the same.

[0044] In the transistor, a metal oxide functioning as a semiconductor (hereinafter also referred to as an oxide semiconductor) is preferably used for a semiconductor layer including a channel formation region.

[0045] In addition, the metal oxide functioning as a semiconductor preferably has a band gap of 2 eV or more, more preferably 2.5 eV or more. By using such a metal oxide having a wide band gap, the off-state current of a transistor can be reduced.

[0046] A transistor using an oxide semiconductor for a channel formation region has an extremely small leakage current (off-state current) in a non-conducting state, and therefore a semiconductor device with low power consumption can be provided. In addition, an oxide semiconductor can be formed by a sputtering method or the like, and therefore can be used for a transistor that constitutes a highly integrated semiconductor device.

[0047] As the oxide semiconductor, for example, a metal oxide such as In-M-Zn oxide having indium, element M, and zinc (element M is one or more selected from aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc.) may be used. Also, as the oxide semiconductor, In-Ga oxide, In-Zn oxide, or indium oxide may be used.

[0048] Here, the case where the oxide semiconductor is an In-M-Zn oxide having indium (In), an element M, and zinc (Zn) is considered. The element M can be aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc. However, there are cases where the element M can be a combination of two or more of the above elements.

[0049] In a transistor using an oxide semiconductor, impurities and oxygen vacancies (V O When such impurities are present, the electrical characteristics are likely to fluctuate, and the reliability may be reduced. Examples of impurities in an oxide semiconductor include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, and silicon.

[0050] In particular, hydrogen contained in oxide semiconductors may react with oxygen that is bonded to metal atoms to form HO and oxygen vacancies. In addition, hydrogen near the oxygen vacancies may form defects in which hydrogen enters the oxygen vacancies (hereinafter referred to as V O H.) and generate electrons that serve as carriers. Some of the hydrogen may bond with oxygen that bonds to metal atoms and generate electrons that serve as carriers. Therefore, transistors using an oxide semiconductor that contains hydrogen tend to have normally-on characteristics (characteristics in which a channel exists and current flows through the transistor even when no voltage is applied to the gate electrode).

[0051] A defect in which hydrogen has entered an oxygen vacancy (V O H) can function as a donor for the metal oxide. However, it is difficult to quantitatively evaluate the defect. Therefore, in the case of metal oxides, the carrier concentration may be used instead of the donor concentration. Therefore, in this specification, the carrier concentration assuming a state in which no electric field is applied may be used as a parameter of the metal oxide instead of the donor concentration. In other words, the "carrier concentration" described in this specification may be rephrased as the "donor concentration". In addition, the "carrier concentration" described in this specification may be rephrased as the "carrier density".

[0052] For the above reasons, it is preferable that hydrogen and oxygen vacancies are reduced as much as possible in the channel formation region in the oxide semiconductor. Specifically, in the channel formation region in the oxide semiconductor, the hydrogen concentration measured by secondary ion mass spectrometry (SIMS) is set to 1×10 20 atoms / cm 3 Less than 1 x 10 19 atoms / cm 3 less than 5×10 18 atoms / cm 3 less than 1×10 18 atoms / cm 3It is preferable that a channel formation region in the oxide semiconductor have a reduced carrier concentration and be i-type (intrinsic) or substantially i-type.

[0053] Therefore, it is preferable that the metal oxide used in the channel formation region of a transistor is one in which hydrogen diffusion is suppressed. Note that a metal oxide in which hydrogen diffusion is suppressed can be rephrased as a metal oxide in which hydrogen diffusion length is short. Here, it is presumed that hydrogen diffusion is suppressed because oxygen vacancies in the metal oxide are reduced, thereby decreasing the frequency of hydrogen diffusion through oxygen vacancies. In this specification, suppressing hydrogen diffusion is also referred to as freezing hydrogen.

[0054] By using a metal oxide in which hydrogen diffusion is suppressed for the channel formation region of a transistor, hydrogen can be prevented from being mixed into the channel formation region, and a highly reliable transistor can be manufactured. In addition, hydrogen in the source or drain region can be prevented from diffusing into the channel formation region, and the carrier concentration in the channel formation region, source region, and drain region can be prevented from varying among transistors. Therefore, a semiconductor device with little variation in transistor characteristics can be manufactured.

[0055] The diffusion length of hydrogen in a metal oxide can be calculated, for example, by estimating the diffusion coefficient from the results obtained by SIMS, creating an Arrhenius plot of the diffusion coefficient and temperature, and using the frequency factor and activation energy calculated from the Arrhenius plot. The method for calculating the diffusion length of hydrogen in a metal oxide will be described in detail in the examples described later. Specifically, the diffusion length of hydrogen in a metal oxide is 200 nm or less, preferably 100 nm or less, and more preferably 60 nm or less. The diffusion length of hydrogen is calculated at a temperature of 400° C. for 1 hour.

[0056] Furthermore, it is preferable that the amount of oxygen vacancies contained in the metal oxide is reduced. By using a metal oxide with a reduced amount of oxygen vacancies in the channel formation region of a transistor, the carrier concentration in the channel formation region is reduced, and the channel formation region can be made i-type (intrinsic) or substantially i-type. Therefore, a semiconductor device including a transistor having good electrical characteristics can be manufactured.

[0057] The amount of oxygen vacancies contained in a metal oxide may be evaluated, for example, using a constant photocurrent method (CPM). Using CPM, it is possible to evaluate deep defect levels caused by oxygen vacancies contained in a metal oxide. The deep defect level caused by oxygen vacancies refers to a localized level formed in a range from a position 0.5 eV away from the upper end of the valence band of the metal oxide toward the conduction band side to a position 0.5 eV away from the lower end of the conduction band of the metal oxide toward the valence band side. Specifically, in a metal oxide, the absorption caused by the localized level calculated by CPM is 2×10 -2 cm -1 Less than 1 x 10 -2 cm -1 Make it less than.

[0058] The metal oxide preferably contains c-axis aligned crystals. An example of the metal oxide containing c-axis aligned crystals is CAAC-OS (c-axis aligned crystalline oxide semiconductor), which will be described later.

[0059] In this manner, a semiconductor device including a transistor with favorable electrical characteristics can be manufactured. In addition, a semiconductor device including a highly reliable transistor can be manufactured. In addition, a semiconductor device with little variation in transistor characteristics can be manufactured.

[0060] Next, a method for forming the above-mentioned metal oxide will be described.

[0061] First, a metal oxide film containing c-axis oriented crystals is formed. The metal oxide film can be formed by sputtering, chemical vapor deposition (CVD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD), atomic layer deposition (ALD), or the like. In particular, it is preferable to form the metal oxide film by sputtering.

[0062] When the metal oxide is formed by sputtering, the above-mentioned In-M-Zn oxide target is used. In addition, oxygen or a mixed gas of oxygen and a rare gas is used as the sputtering gas. By increasing the ratio of oxygen contained in the sputtering gas, the crystallinity of the metal oxide can be improved. For example, the ratio of oxygen contained in the sputtering gas is set to more than 30% and 100% or less, preferably 70% or more and 100% or less.

[0063] In addition, when the metal oxide is deposited by sputtering, the crystallinity of the metal oxide can be improved by depositing the film while heating the substrate. For example, the substrate is heated to a temperature of 100° C. or higher and lower than 500° C., preferably 200° C. or higher and 400° C. or lower.

[0064] Next, the metal oxide is subjected to a heat treatment at a temperature at which the metal oxide does not become polycrystallized. The temperature at which the metal oxide does not become polycrystallized is specifically 250°C or higher and 650°C or lower, preferably 450°C or higher and 600°C or lower, and more preferably 500°C or higher and lower than 600°C. By performing the heat treatment at the above temperature, the structure of the metal oxide is relaxed. At this time, the metal oxide does not become polycrystallized, the amount of oxygen vacancies is reduced, and the diffusion of hydrogen can be suppressed.

[0065] When the heat treatment is performed at a temperature of 600°C or more and less than 700°C, the metal oxide does not become polycrystallized, but the crystallinity in the metal oxide changes, and the reduction in the amount of oxygen vacancies is suppressed, or there is a high probability that oxygen vacancies are formed, compared to when the heat treatment is performed at a temperature less than 600°C. In addition, when the heat treatment is performed at a temperature of 700°C or more, the metal oxide tends to become polycrystallized. Polycrystals have crystal grain boundaries, which become recombination centers and capture carriers. Therefore, there is a high possibility that this will cause a decrease in the on-current of the transistor, a decrease in the field effect mobility, and the like. In addition, when the heat treatment is performed at a temperature less than 250°C, there is a risk that the hydrogen concentration in the metal oxide will not be sufficiently reduced.

[0066] The heat treatment is preferably performed in a nitrogen gas or inert gas atmosphere, or an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas. For example, when the heat treatment is performed in a mixed atmosphere of nitrogen gas and oxygen gas, the oxygen gas may be about 20%. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in a nitrogen gas or inert gas atmosphere, and then in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas to compensate for the desorbed oxygen. For example, the heat treatment may be performed in a nitrogen atmosphere for one hour, followed by another treatment in an oxygen atmosphere for one hour.

[0067] In addition, the gas used in the heat treatment is preferably highly purified. For example, the amount of moisture contained in the gas used in the heat treatment may be 1 ppb or less, preferably 0.1 ppb or less, and more preferably 0.05 ppb or less. By using a highly purified gas for the heat treatment, it is possible to prevent moisture and the like from being incorporated into the metal oxide as much as possible.

[0068] The heat treatment can further increase the crystallinity of the metal oxide, thereby forming a dense metal oxide with high crystallinity, reduced oxygen vacancies, and suppressed hydrogen diffusion.

[0069] The above is a description of the method for forming the metal oxide.

[0070] Here, the above-mentioned CAAC-OS will be described in detail.

[0071] [CAAC-OS] CAAC-OS is an oxide semiconductor having a plurality of crystalline regions, each of which has a c-axis aligned in a specific direction. The specific direction is the thickness direction of the CAAC-OS film, the normal direction of the surface on which the CAAC-OS film is formed, or the normal direction of the surface of the CAAC-OS film. The crystalline region is a region having periodic atomic arrangement. If the atomic arrangement is considered as a lattice arrangement, the crystalline region is also a region with a uniform lattice arrangement. CAAC-OS has a region in which a plurality of crystalline regions are connected in the ab-plane direction, and the region may have distortion. The distortion refers to a portion in which the direction of the lattice arrangement changes between a region with a uniform lattice arrangement and another region with a uniform lattice arrangement in the region in which the plurality of crystalline regions are connected. In other words, CAAC-OS is an oxide semiconductor having a c-axis aligned and no clear orientation in the ab-plane direction.

[0072] Each of the multiple crystalline regions is composed of one or more minute crystals (crystals with a maximum diameter of less than 10 nm). When a crystalline region is composed of one minute crystal, the maximum diameter of the crystalline region is less than 10 nm. When a crystalline region is composed of many minute crystals, the size of the crystalline region may be about several tens of nm.

[0073] In addition, in an In-M-Zn oxide (wherein element M is one or more elements selected from aluminum, gallium, yttrium, tin, titanium, etc.), the CAAC-OS tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium (In) and oxygen (hereinafter, In layer) and a layer containing element M, zinc (Zn), and oxygen (hereinafter, (M, Zn) layer) are stacked. Note that indium and element M are mutually substituted. Thus, the (M, Zn) layer may contain indium. Also, the In layer may contain element M. Note that the In layer may contain Zn. The layered structure is observed as a lattice image in a high-resolution TEM image, for example.

[0074] When the CAAC-OS film is subjected to structural analysis using, for example, an XRD device, a peak indicating c-axis orientation is detected at or near 2θ=31° in out-of-plane XRD measurement using θ / 2θ scan. Note that the position of the peak indicating c-axis orientation (2θ value) may vary depending on the type and composition of the metal elements constituting the CAAC-OS.

[0075] For example, a plurality of bright points (spots) are observed in the electron diffraction pattern of the CAAC-OS film, and the two spots are observed at positions symmetrical to each other with respect to the spot of the incident electron beam that has passed through the sample (also called the direct spot).

[0076] When the crystal region is observed from the specific direction, the lattice arrangement in the crystal region is based on a hexagonal lattice, but the unit cell is not necessarily a regular hexagon and may be a non-regular hexagon. The above distortion may have a pentagonal or heptagonal lattice arrangement. In addition, no clear grain boundary can be confirmed in the CAAC-OS even in the vicinity of the distortion. That is, it is found that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is considered to be because the CAAC-OS can tolerate distortion due to the fact that the arrangement of oxygen atoms is not dense in the ab-plane direction and the bond distance between atoms changes due to the substitution of metal atoms.

[0077] A crystal structure in which clear grain boundaries are observed is called a polycrystal. The grain boundaries are likely to become recombination centers and capture carriers, causing a decrease in the on-current of a transistor and a decrease in field effect mobility. Therefore, CAAC-OS in which clear grain boundaries are not observed is one of the crystalline oxides having a crystal structure suitable for a semiconductor layer of a transistor. In order to form a CAAC-OS, a structure containing Zn is preferable. For example, In-Zn oxide and In-Ga-Zn oxide are suitable because they can suppress the occurrence of grain boundaries more than indium oxide.

[0078] The CAAC-OS is an oxide semiconductor with high crystallinity and no clear crystal grain boundaries. Therefore, it can be said that the CAAC-OS is less susceptible to a decrease in electron mobility due to crystal grain boundaries. In addition, since the crystallinity of an oxide semiconductor can be decreased by the inclusion of impurities or the generation of defects, the CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, the physical properties of an oxide semiconductor having the CAAC-OS are stable. Therefore, an oxide semiconductor having the CAAC-OS is resistant to heat and has high reliability. In addition, the CAAC-OS is stable against high temperatures (so-called thermal budget) in the manufacturing process. Therefore, the use of the CAAC-OS in an OS transistor can increase the degree of freedom in the manufacturing process.

[0079] <Example of semiconductor device configuration> A configuration of a semiconductor device including a transistor 200 having the above-described metal oxide will be described with reference to FIGS. 1A to 1D. FIGS. 1A to 1D are a top view and a cross-sectional view of a semiconductor device including the transistor 200. FIG. 1A is a top view of the semiconductor device. FIGS. 1B to 1D are cross-sectional views of the semiconductor device. FIG. 1B is a cross-sectional view of a portion indicated by a dashed line A1-A2 in FIG. 1A, and is also a cross-sectional view of the transistor 200 in the channel length direction. FIG. 1C is a cross-sectional view of a portion indicated by a dashed line A3-A4 in FIG. 1A, and is also a cross-sectional view of the transistor 200 in the channel width direction. FIG. 1D is a cross-sectional view of a portion indicated by a dashed line A5-A6 in FIG. 1A. Note that some elements are omitted from the top view of FIG. 1A for clarity.

[0080] The semiconductor device in this embodiment includes an insulator 212 on a substrate (not shown), an insulator 214 on the insulator 212, an insulator 216 on the insulator 214, a transistor 200 on the insulator 214 and on the insulator 216, an insulator 254 on the transistor 200, an insulator 280 on the insulator 254, an insulator 282 on the insulator 280, an insulator 283 on the insulator 282, and an insulator 284 on the insulator 283. The insulators 212, 214, 216, 254, 280, 282, 283, and 284 function as interlayer films. The semiconductor device also includes a conductor 240a and a conductor 240b that are electrically connected to the transistor 200 and function as plugs. An insulator 241a is provided in contact with a side surface of the conductor 240a, and an insulator 241b is provided in contact with a side surface of the conductor 240b. A conductor 246a electrically connected to the conductor 240a and functioning as a wiring, and a conductor 246b electrically connected to the conductor 240b and functioning as a wiring, are provided on the insulator 284, the conductor 240a, and the conductor 240b. An insulator 286 is provided on the conductor 246a, the conductor 246b, and the insulator 284.

[0081] Insulator 241a is provided in contact with the side walls of the openings of insulators 254, 280, 282, 283, and 284, a first conductor of conductor 240a is provided in contact with the side surface of insulator 241a, and a second conductor of conductor 240a is provided further inward. Insulator 241b is provided in contact with the side walls of the openings of insulators 254, 280, 282, 283, and 284, a first conductor of conductor 240b is provided in contact with the side surface of insulator 241b, and a second conductor of conductor 240b is provided further inward. Here, the height of the top surface of conductor 240a (conductor 240b) and the height of the top surface of insulator 284 in the region overlapping with conductor 246a (conductor 246b) can be made to be approximately the same. 1A to 1D, the semiconductor device shows a configuration in which the first conductor of the conductor 240a and the second conductor of the conductor 240a are stacked, and the first conductor of the conductor 240b and the second conductor of the conductor 240b are stacked, but this embodiment is not limited to this. For example, the conductor 240a and the conductor 240b may each be configured as a single layer or a stacked structure of three or more layers. When a structure has a stacked structure, ordinal numbers may be given in the order of formation to distinguish them.

[0082] [Transistor 200] As shown in Figures 1A to 1D, transistor 200 has conductor 205 (conductor 205a and conductor 205b) arranged so as to be embedded in insulator 214 and / or insulator 216, insulator 222 on insulator 216 and on conductor 205, insulator 224 on insulator 222, oxide 230a on insulator 224, oxide 230b on oxide 230a, oxide 243a, oxide 243b, and oxide 230c on oxide 230b, conductor 242a on oxide 243a, conductor 242b on oxide 243b, oxide 230d on oxide 230c, insulator 250 on oxide 230d, and conductor 260 (conductor 260a and conductor 260b) located on insulator 250 and overlapping with part of oxide 230c. The oxide 230c contacts the side surfaces of the oxide 243a, the oxide 243b, the conductor 242a, and the conductor 242b. The insulator 282 contacts the top surfaces of the conductor 260, the insulator 250, the oxide 230d, the oxide 230c, and the insulator 280.

[0083] The insulator 280 and the insulator 254 have openings reaching the oxide 230b. The oxide 230c, the oxide 230d, the insulator 250, and the conductor 260 are disposed in the openings. In addition, the conductor 260, the insulator 250, the oxide 230d, and the oxide 230c are disposed between the conductor 242a and the oxide 243a and the conductor 242b and the oxide 243b in the channel length direction of the transistor 200. The insulator 250 has a region in contact with the side surface of the conductor 260 and a region in contact with the bottom surface of the conductor 260. The oxide 230c has a region in contact with the oxide 230b, a region overlapping with the side surface of the conductor 260 via the oxide 230d and the insulator 250, and a region overlapping with the bottom surface of the conductor 260 via the oxide 230d and the insulator 250.

[0084] Oxide 230 preferably includes oxide 230a disposed on insulator 224, oxide 230b disposed on oxide 230a, oxide 230c disposed on oxide 230b and at least partially in contact with oxide 230b, and oxide 230d disposed on oxide 230c.

[0085] In the transistor 200, the oxide 230 has a four-layer structure of the oxide 230a, the oxide 230b, the oxide 230c, and the oxide 230d, but the present embodiment is not limited to this structure. For example, the oxide 230 may have a single layer of the oxide 230b, a two-layer structure of the oxide 230a and the oxide 230b, a two-layer structure of the oxide 230b and the oxide 230c, a three-layer structure of the oxide 230a, the oxide 230b, and the oxide 230c, a three-layer structure of the oxide 230a, the oxide 230b, and the oxide 230d, or a stacked structure of five or more layers. Each of the oxides 230a, 230b, 230c, and 230d may have a stacked structure.

[0086] The conductor 260 functions as a first gate (also referred to as a top gate) electrode, and the conductor 205 functions as a second gate (also referred to as a back gate) electrode. The insulators 250, 224, and 222 function as gate insulators. The conductor 242a functions as one of a source electrode or a drain electrode, and the conductor 242b functions as the other of the source electrode or the drain electrode. The oxide 230 functions as a channel formation region.

[0087] Here, an enlarged view of the vicinity of the channel formation region in FIG. 1B is shown in FIG. 2. As shown in FIG. 2, the oxide 230 has a region 234 that functions as a channel formation region of the transistor 200, and regions 236a and 236b that are provided on either side of the region 234 and function as a source region or a drain region. The region 234 at least partially overlaps with the conductor 260. A conductor 242a and a conductor 242b are provided on the oxide 230b, and regions with lower resistance are formed near the conductor 242a in the region 236a and near the conductor 242b in the region 236b.

[0088] The regions 236a and 236b functioning as source and drain regions are regions with a low oxygen concentration, an increased carrier concentration due to the inclusion of impurities such as hydrogen, nitrogen, and metal elements, and the like, and thus have a low resistance. That is, the regions 236a and 236b are regions with a high carrier concentration and a low resistance compared to the region 234. The region 234 functioning as a channel formation region is a region with a low carrier concentration and a high resistance due to a higher oxygen concentration and a lower impurity concentration than the regions 236a and 236b. A region with an oxygen concentration equal to or higher than that of the region 236a (region 236b) and equal to or lower than that of the region 234 may be formed between the region 234 and the region 236a (region 236b).

[0089] 2, the width of the region 234 in the channel length direction is the same as the width of the conductor 260, but this embodiment is not limited to this. The width of the region 234 may be narrower than the width of the conductor 260, or the width of the region 234 may be wider than the width of the conductor 260.

[0090] In addition, it may be difficult to clearly detect the boundaries between the regions in the oxide 230. The concentration of impurities such as hydrogen, nitrogen, and metal elements detected in each region may not only vary stepwise from region to region, but may also vary continuously within each region. In other words, it is sufficient that the concentration of impurities such as hydrogen, nitrogen, and metal elements decreases in the region closer to the channel formation region.

[0091] In order to increase the oxygen concentration in the region 234, an insulator containing oxygen that is desorbed by heating (hereinafter may be referred to as excess oxygen) may be provided near the oxide semiconductor, and heat treatment may be performed to supply oxygen from the insulator to the oxide semiconductor. This allows oxygen vacancies in a channel formation region in the oxide semiconductor to be repaired by the supplied oxygen. Furthermore, the supplied oxygen reacts with hydrogen remaining in the oxide semiconductor, and the hydrogen can be removed as HO (dehydration). This allows the oxide semiconductor to be charged with V. O The formation of H can be suppressed.

[0092] However, if an excessive amount of oxygen is supplied to the source region or drain region, the carrier concentration in the source region or drain region may decrease, which may cause a decrease in the on-current and a decrease in the field effect mobility of the transistor 200. Furthermore, if the amount of oxygen supplied to the source region or drain region becomes non-uniform within the substrate surface, the characteristics of the semiconductor device having the transistor may vary.

[0093] Therefore, in the oxide semiconductor, the region 234 functioning as a channel formation region preferably has a reduced carrier concentration and is i-type or substantially i-type, while the regions 236a and 236b functioning as source and drain regions preferably have a high carrier concentration and are n-type.

[0094] In the transistor 200, it is preferable to use the above-mentioned metal oxide for the oxide 230 (the oxide 230a, the oxide 230b, the oxide 230c, and the oxide 230d) including the channel formation region. In particular, it is preferable to use the above-mentioned metal oxide for the oxide 230b.

[0095] By using the above-mentioned metal oxide for the oxide 230b, diffusion of hydrogen in the channel formation region can be suppressed, and diffusion of hydrogen from the source region to the drain region or from the drain region to the source region can be suppressed. Thus, in the oxide semiconductor, an i-type or substantially i-type region and an n-type region can be maintained. Thus, a semiconductor device including a highly reliable transistor can be manufactured. In addition, a semiconductor device with little variation in transistor characteristics can be manufactured.

[0096] The above-mentioned metal oxide is preferably used in a transistor with a shortened channel length. By using the above-mentioned metal oxide, hydrogen diffusion from the source region to the drain region or from the drain region to the source region can be prevented even in a transistor with a shortened channel length. Therefore, an i-type or substantially i-type region and an n-type region in the oxide semiconductor can be maintained. Specifically, the channel length can be set to 500 nm or less, preferably 300 nm or less, and more preferably 150 nm or less. Of course, the above-mentioned metal oxide may be used in a transistor with a channel length longer than 500 nm.

[0097] In addition, the above-mentioned metal oxide has a highly crystalline and dense structure, and thus can suppress the diffusion of oxygen in the metal oxide. By using the above-mentioned metal oxide for the oxide 230b, the diffusion of oxygen in the oxide 230b is suppressed. Therefore, it is possible to suppress the diffusion of oxygen supplied to the region 234 via the oxide 230c into the regions 236a and 236b that function as source and drain regions. This suppresses the formation of an offset region between the region 234 and the region 236a or the region 236b, and allows the manufacture of a transistor with a large on-current.

[0098] Furthermore, by suppressing the diffusion of oxygen in the oxide 230b, it is possible to suppress the diffusion of oxygen to the conductor 242a (conductor 242b) in contact with the oxide 230b via the oxide 243a (oxide 243b). This makes it possible to suppress the oxidation of the conductor 242a and the conductor 242b, and to suppress an increase in the contact resistance between the transistor and the wiring. This makes it possible to provide the transistor with good electrical characteristics and reliability.

[0099] The above-mentioned metal oxide may be used for the oxide 230a. By using the above-mentioned metal oxide for the oxide 230a, it is possible to suppress the diffusion of hydrogen from a structure formed below the oxide 230a to the oxide 230b.

[0100] Moreover, the above-mentioned metal oxide may be used for the oxide 230c. By using the above-mentioned metal oxide for the oxide 230c, it is possible to suppress the diffusion of impurities from a structure formed above the oxide 230c to the oxide 230b.

[0101] As described above, by using the above-described metal oxide in the channel formation region of a transistor, a change in electrical characteristics can be suppressed, stable electrical characteristics can be achieved, and a transistor with improved reliability can be provided.

[0102] The oxide 230 preferably has a stacked structure of multiple oxide layers with different chemical compositions. Also, the oxide 230 preferably has a stacked structure of multiple oxide layers that have a common element (main component) other than oxygen.

[0103] Specifically, the atomic ratio of element M to In in the metal oxide used for oxide 230a or oxide 230d is preferably greater than the atomic ratio of element M to In in the metal oxide used for oxide 230b or oxide 230c. The greater the atomic ratio of element M to In, the easier it is to suppress the diffusion of impurities or oxygen. Thus, by having oxide 230a below oxide 230b, it is possible to suppress the diffusion of impurities from structures formed below oxide 230a to oxide 230b. Also, by having oxide 230d on oxide 230c, it is possible to suppress the diffusion of impurities from structures formed above oxide 230d to oxide 230c.

[0104] In other words, the atomic ratio of In to element M in the metal oxide used for the oxide 230b or the oxide 230c is preferably greater than the atomic ratio of In to element M in the metal oxide used for the oxide 230a or the oxide 230d. By using a metal oxide with a high indium content in the channel formation region, the on-current of the transistor can be increased. In this case, the main carrier path is the oxide 230b, the oxide 230c, or the vicinity thereof, for example, the interface between the oxide 230b and the oxide 230c. In addition, since the oxide 230b and the oxide 230c have a common element other than oxygen (as a main component), the defect level density at the interface between the oxide 230b and the oxide 230c can be reduced, so that the effect of interface scattering on carrier conduction is small, and a high on-current can be obtained.

[0105] In order to make the oxide 230b, the oxide 230c or its vicinity, for example, the interface between the oxide 230b and the oxide 230c, the main carrier path, it is preferable that the conduction band minimums of the oxide 230b and the oxide 230c are farther from the vacuum level than the conduction band minimums of the oxide 230a and the oxide 230d. In other words, it is preferable that the electron affinity of the oxide 230b and the oxide 230c is larger than the electron affinity of the oxide 230a and the oxide 230d.

[0106] The oxide 230b and the oxide 230c are preferably crystalline. In particular, the above-mentioned CAAC-OS is preferably used as the oxide 230b and the oxide 230c. The oxide 230d may be crystalline.

[0107] By using the CAAC-OS for the oxide 230b or the oxide 230c, impurities and oxygen vacancies can be reduced in a region in the oxide semiconductor where a channel is formed, thereby making it possible to provide a transistor with reduced fluctuation in electrical characteristics, stable electrical characteristics, and improved reliability.

[0108] In addition, the extraction of oxygen from the oxide 230b by the source electrode or the drain electrode can be suppressed. As a result, even if a heat treatment is performed, the extraction of oxygen from the oxide 230b can be reduced, so that the transistor 200 is stable against high temperatures (so-called thermal budget) in the manufacturing process.

[0109] In addition, the CAAC-OS has a property of easily transferring oxygen in a direction perpendicular to the c-axis of the crystal of the metal oxide, so that oxygen in the oxide 230c can be efficiently supplied to the oxide 230b.

[0110] CAAC-OS is a metal oxide having a highly crystalline and dense structure and few impurities and defects (such as oxygen vacancies). In particular, by performing heat treatment at a temperature (e.g., 400° C. or higher and 600° C. or lower) at which the metal oxide does not polycrystallize after formation of the metal oxide, the CAAC-OS can have a more crystalline and dense structure. In this way, the density of the CAAC-OS can be increased, and the diffusion of impurities or oxygen in the CAAC-OS can be further reduced.

[0111] In addition, by using the above-mentioned metal oxide as the oxide 230b, it is possible to reduce the diffusion of impurities and oxygen in the oxide 230b, and thus it is possible to reduce the diffusion of oxygen supplied to the region 234 of the oxide 230b to the regions 236a and 236b of the oxide 230b.

[0112] In this manner, oxygen is selectively supplied to the region 234 functioning as a channel formation region, making the region 234 i-type or substantially i-type, while oxygen diffusion to the regions 236a and 236b functioning as source and drain regions is suppressed, thereby maintaining the regions 236a and 236b as n-type. This makes it possible to suppress fluctuations in the electrical characteristics of the transistor 200 and to suppress variations in the electrical characteristics of the transistor 200 within the substrate surface.

[0113] Moreover, the oxide 230d preferably contains at least one of the metal elements constituting the metal oxide used in the oxide 230c, and more preferably contains all of the metal elements. For example, the oxide 230c may be In-M-Zn oxide, In-Zn oxide, or indium oxide, and the oxide 230d may be In-M-Zn oxide, M-Zn oxide, or an oxide of element M. This can reduce the defect state density at the interface between the oxide 230c and the oxide 230d.

[0114] Moreover, the oxide 230d is preferably a metal oxide that suppresses the diffusion or permeation of oxygen more than the oxide 230c. By providing the oxide 230d between the insulator 250 and the oxide 230c, it is possible to suppress the diffusion of oxygen contained in the insulator 280 into the insulator 250. Therefore, the oxygen can be efficiently supplied to the oxide 230b via the oxide 230c. Moreover, it is possible to suppress the oxidation of the conductor 260 by supplying the oxygen to the conductor 260 via the insulator 250.

[0115] In addition, by making the atomic ratio of In to the main component metal element in the metal oxide used for the oxide 230d smaller than the atomic ratio of In to the main component metal element in the metal oxide used for the oxide 230c, it is possible to suppress the diffusion of In to the insulator 250 side. Since the insulator 250 functions as a gate insulator, if In gets mixed into the insulator 250, the transistor characteristics will be poor. Therefore, by providing the oxide 230d between the oxide 230c and the insulator 250, it is possible to provide a highly reliable semiconductor device.

[0116] Here, the conduction band minimum changes gradually at the junctions of the oxides 230a, 230b, 230c, and 230d. In other words, the conduction band minimum at the junctions of the oxides 230a, 230b, 230c, and 230d can be said to change continuously or to be a continuous junction. To achieve this, it is preferable to reduce the defect level density of the mixed layers formed at the interface between the oxides 230a and 230b, the interface between the oxides 230b and 230c, and the interface between the oxides 230c and 230d.

[0117] For example, the oxide 230a and the oxide 230b, the oxide 230b and the oxide 230c, and the oxide 230c and the oxide 230d have a common element other than oxygen as a main component, so that a mixed layer with a low defect level density can be formed. For example, when the oxide 230b is an In-M-Zn oxide, the oxide 230a, the oxide 230c, and the oxide 230d may be an In-M-Zn oxide, an M-Zn oxide, an oxide of element M, an In-Zn oxide, indium oxide, or the like.

[0118] Specifically, the oxide 230a may be a metal oxide having a composition of In:M:Zn=1:3:4 [atomic ratio] or a composition close thereto, or In:M:Zn=1:1:0.5 [atomic ratio] or a composition close thereto. The oxide 230b and the oxide 230c may be a metal oxide having a composition of In:M:Zn=1:1:1 [atomic ratio] or a composition close thereto, or In:M:Zn=4:2:3 [atomic ratio] or a composition close thereto. The oxide 230d may be a metal oxide having a composition of In:M:Zn=1:3:4 [atomic ratio] or a composition close thereto, M:Zn=2:1 [atomic ratio] or a composition close thereto, or M:Zn=2:5 [atomic ratio] or a composition close thereto, or an oxide of the element M. The composition close thereto includes a range of ±30% of the desired atomic ratio. It is preferable to use gallium as the element M.

[0119] By configuring the oxide 230a, the oxide 230b, the oxide 230c, and the oxide 230d as described above, it is possible to reduce the defect state density at the interface between the oxide 230a and the oxide 230b, the interface between the oxide 230b and the oxide 230c, and the interface between the oxide 230c and the oxide 230d. As a result, the effect of interface scattering on carrier conduction is reduced, and the transistor 200 can obtain a large on-current and high frequency characteristics.

[0120] In addition, in a cross-sectional view of the transistor in the channel length direction, a groove is preferably provided in the oxide 230b, and the oxide 230c having the CAAC-OS is preferably filled in the groove. In this case, the oxide 230c is disposed so as to cover the inner wall (side wall and bottom surface) of the groove.

[0121] In addition, it is preferable that the depth of the groove of the oxide 230b is approximately equal to the film thickness of the oxide 230c. In other words, it is preferable that the upper surface of the oxide 230c in the region overlapping with the oxide 230b is disposed approximately equal to the interface between the oxide 230b and the oxide 243a or the oxide 243b. For example, when the bottom surface of the insulator 222 is used as a reference, the difference between the height of the interface between the oxide 230b and the oxide 243a or the oxide 243b and the height of the interface between the oxide 230c and the oxide 230d is preferably equal to or less than the film thickness of the oxide 230c, and more preferably equal to or less than half the film thickness of the oxide 230c.

[0122] By using the above configuration, the transistor V O The influence of defects and impurities such as H can be reduced, and a channel can be formed in the oxide 230c. This allows the transistor to have good electrical characteristics. Furthermore, a semiconductor device with little variation in transistor characteristics and good reliability can be provided.

[0123] Also, it is preferable that impurities at the interface between the oxide 230b and the oxide 230c and in the vicinity thereof are reduced or removed. When the element M is not aluminum, impurities such as aluminum and silicon are particularly preferable, since they hinder the improvement of the crystallinity or c-axis orientation of the oxide 230c and the oxide 230b, and therefore are reduced or removed. For example, the concentration of aluminum atoms at the interface between the oxide 230b and the oxide 230c and in the vicinity thereof is preferably 2.0 atomic % or less, more preferably 1.5 atomic % or less, and even more preferably 1.0 atomic % or less.

[0124] In addition, the region of the metal oxide in which the improvement of the crystallinity or c-axis orientation is hindered by impurities such as aluminum and silicon and which becomes a quasi-amorphous-like oxide semiconductor (a-like OS) is sometimes called a non-CAAC region. OThere is a high probability that a large amount of H will be formed, and the transistor will be more likely to be normally on. For these reasons, it is preferable that the non-CAAC region is reduced or removed.

[0125] In contrast, in the oxide 230b and the oxide 230c having the CAAC structure, a dense crystal structure is formed, so that V O Furthermore, in the oxygen-adding process described later, excess oxygen is supplied to the oxide 230b and the oxide 230c, so that V in the oxide 230b and the oxide 230c is reduced. O H, and V O In this manner, the oxide 230b and the oxide 230c have a CAAC structure, which can suppress the transistor from becoming normally on.

[0126] 2 shows a configuration in which the side of the opening in which the conductor 260 and the like are embedded is approximately perpendicular to the surface on which the oxide 230b is formed, including the groove of the oxide 230b, but this embodiment is not limited to this. The bottom of the opening may be U-shaped with a gentle curve.

[0127] Here, in the oxide 230c, the c-axis of the CAAC structure is preferably oriented in a direction substantially perpendicular to the surface on which the oxide 230c is formed or the top surface. Therefore, the oxide 230d has a region in which the crystal layer extends so as to be substantially parallel to the bottom and side surfaces of the opening. It is more preferable that the oxide 230d has the same crystal structure as the oxide 230c.

[0128] Moreover, the angle between the ab plane of the CAAC structure of the oxide 230c in the groove and the ab plane of the CAAC structure of the oxide 230b is preferably 60 degrees or less, more preferably 45 degrees or less, and even more preferably 30 degrees or less. In this way, by reducing the angle between the ab plane of the CAAC structure of the oxide 230c in the groove and the ab plane of the CAAC structure of the oxide 230b, the crystallinity of the oxide 230c in the groove can be increased.

[0129] In addition, the oxide consisting of the non-CAAC region is not limited to being formed so as to be surrounded by oxide 230b, oxide 243a, oxide 230c, and oxide 230d, but may also be formed so as to be sandwiched between oxide 230b and oxide 230c.

[0130] 1C, in a cross-sectional view in the channel width direction of the transistor 200, a curved surface may be formed between the side surface of the oxide 230b and the top surface of the oxide 230b. In other words, the end of the side surface and the end of the top surface may be curved (hereinafter also referred to as rounded).

[0131] The radius of curvature of the curved surface is preferably greater than 0 nm and smaller than the film thickness of the oxide 230b in the region overlapping with the conductor 242a or conductor 242b, or smaller than half the length of the region of the upper surface of the oxide 230b that does not have the curved surface. Specifically, the radius of curvature of the curved surface is greater than 0 nm and less than 20 nm, preferably greater than 1 nm and less than 15 nm, and more preferably greater than 2 nm and less than 10 nm. By forming the shape in this way, the coverage of the groove portion by the insulator 250 and the conductor 260 formed in a later process can be improved. In addition, the length of the region of the upper surface of the oxide 230b that does not have the curved surface can be prevented from decreasing, and the on-current and mobility of the transistor 200 can be suppressed from decreasing. Therefore, a semiconductor device having good electrical characteristics can be provided.

[0132] Note that the oxide 230c may be provided for each transistor 200. That is, the oxide 230c of one transistor 200 and the oxide 230c of another transistor 200 adjacent to the transistor 200 may not be in contact with each other. Furthermore, the oxide 230c of one transistor 200 and the oxide 230c of another transistor 200 adjacent to the transistor 200 may be separated from each other. In other words, a configuration in which the oxide 230c is not provided between the transistor 200 and the transistor 200 adjacent to the transistor 200 may be used.

[0133] In a semiconductor device in which a plurality of transistors 200 are arranged in the channel width direction, the above configuration allows the oxide 230c to be provided independently in each of the transistors 200. This makes it possible to suppress the generation of a parasitic transistor between a transistor 200 and a transistor 200 adjacent to the transistor 200, and to suppress the generation of a leakage path along the conductor 260. As a result, a semiconductor device having favorable electrical characteristics and capable of being miniaturized or highly integrated can be provided.

[0134] For example, when the distance between the side end of the oxide 230c of the transistor 200 and the side end of the oxide 230c of the transistor 200 adjacent to the transistor 200, which face each other in the channel width direction of the transistor 200, is expressed as L1, L1 is set to be larger than 0 nm. Also, when the distance between the side end of the oxide 230a of the transistor 200 and the side end of the oxide 230a of the transistor 200 adjacent to the transistor 200, which face each other in the channel width direction of the transistor 200, is expressed as L2, the value of the ratio of L1 to L2 (L1 / L2) is preferably larger than 0 and smaller than 1, more preferably 0.1 or more and 0.9 or less, and even more preferably 0.2 or more and 0.8 or less. Note that L2 may be the distance between the side end of the oxide 230b of the transistor 200 and the side end of the oxide 230b of the transistor 200 adjacent to the transistor 200, which face each other.

[0135] By reducing the ratio of L1 to L2 (L1 / L2) described above, even if a misalignment occurs in a region where oxide 230c is not located between transistor 200 and a transistor 200 adjacent to said transistor 200, oxide 230c of transistor 200 can be separated from oxide 230c of a transistor 200 adjacent to said transistor 200.

[0136] Furthermore, by increasing the ratio of L1 to L2 (L1 / L2), even if the distance between transistor 200 and the adjacent transistor 200 is narrowed, the minimum processing dimension width can be secured, thereby enabling further miniaturization or high integration of the semiconductor device.

[0137] Note that the conductor 260 and the insulator 250 may be shared between adjacent transistors 200. That is, the conductor 260 of one transistor 200 has a region provided contiguous with the conductor 260 of another transistor 200 adjacent to the transistor 200. The insulator 250 of one transistor 200 has a region provided contiguous with the insulator 250 of another transistor 200 adjacent to the transistor 200.

[0138] With the above structure, the oxide 230d has a region in contact with the insulator 224 between the transistor 200 and another transistor 200 adjacent to the transistor 200. Note that the oxide 230d of the transistor 200 may be separated from the oxide 230d of the transistor 200 adjacent to the transistor 200. In this case, the insulator 250 has a region in contact with the insulator 224 between the transistor 200 and another transistor 200 adjacent to the transistor 200.

[0139] The insulators 212, 214, 254, 282, 283, 284, and 286 preferably function as barrier insulating films that suppress the diffusion of impurities such as water and hydrogen from the substrate side or from above the transistor 200 to the transistor 200. Therefore, the insulators 212, 214, 254, 282, 283, 284, and 286 are preferably made of an insulating material that has a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), and copper atoms (through which the above impurities are unlikely to permeate). Alternatively, it is preferable to use an insulating material that has a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.) (through which the above oxygen is unlikely to permeate).

[0140] In this specification, a barrier insulating film refers to an insulating film having a barrier property. In this specification, the barrier property means a function of suppressing the diffusion of a corresponding substance (also called low permeability) or a function of capturing and fixing a corresponding substance (also called gettering).

[0141] For example, it is preferable to use silicon nitride or the like as the insulators 212, 283, and 284, and aluminum oxide or the like as the insulators 214, 254, and 282. This can suppress impurities such as water and hydrogen from diffusing from the substrate side to the transistor 200 side through the insulators 212 and 214. In addition, it is possible to suppress oxygen contained in the insulators 224 and the like from diffusing to the substrate side through the insulators 212 and 214. In this manner, it is preferable to have a structure in which the transistor 200 is surrounded by the insulators 212, 214, 254, 282, 283, and 284, which have the function of suppressing the diffusion of impurities such as water and hydrogen, and oxygen.

[0142] It may also be preferable to reduce the resistivity of insulators 212, 284, and 286. For example, it may be preferable to reduce the resistivity of insulators 212, 284, and 286 to approximately 1×10 13 By setting the resistivity at Ωcm, the insulator 212, the insulator 284, and the insulator 286 may be able to reduce charge-up of the conductor 205, the conductor 242a, the conductor 242b, the conductor 260, the conductor 246a, or the conductor 246b in a process using plasma or the like in a semiconductor device manufacturing process. 10 Ωcm or more 1×10 15 Ωcm or less.

[0143] It is to be noted that the insulator 283 or the insulator 284 does not necessarily have to be provided.

[0144] The insulator 216 and the insulator 280 preferably have a lower dielectric constant than the insulator 214. By using a material with a low dielectric constant as an interlayer film, the parasitic capacitance occurring between wirings can be reduced. For example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine has been added, silicon oxide to which carbon has been added, silicon oxide to which carbon and nitrogen have been added, silicon oxide having vacancies, or the like may be used as the insulator 216 and the insulator 280 as appropriate. In particular, silicon oxide and silicon oxynitride are preferable because they are thermally stable. In particular, materials such as silicon oxide, silicon oxynitride, and silicon oxide having vacancies are preferable because they can easily form a region containing oxygen that is desorbed by heating.

[0145] The conductor 205 (conductor 205a and conductor 205b) may function as a second gate electrode. In this case, the threshold voltage (Vth) of the transistor 200 can be controlled by changing the potential applied to the conductor 205 independently of the potential applied to the conductor 260. In particular, applying a negative potential to the conductor 205 can increase the Vth of the transistor 200 and reduce the off-current. Therefore, applying a negative potential to the conductor 205 can reduce the drain current when the potential applied to the conductor 260 is 0 V, compared to not applying a negative potential.

[0146] The conductor 205 is disposed so as to overlap the oxide 230 and the conductor 260 .

[0147] As shown in FIG. 1A, the conductor 205 is preferably provided larger than the size of the region of the oxide 230 that does not overlap with the conductor 242a and the conductor 242b. In particular, as shown in FIG. 1C, the conductor 205 preferably extends to the region outside the end of the oxide 230a and the oxide 230b that intersects with the channel width direction. In other words, the conductor 205 and the conductor 260 preferably overlap with each other via an insulator on the outside of the side surface of the oxide 230 in the channel width direction. With this configuration, the channel formation region of the oxide 230 can be electrically surrounded by the electric field of the conductor 260 that functions as the first gate electrode and the electric field of the conductor 205 that functions as the second gate electrode. In this specification, a structure of a transistor in which the channel formation region is electrically surrounded by the electric fields of the first gate electrode and the second gate electrode is called a surrounded channel (S-channel) structure.

[0148] In this specification and the like, a transistor with an S-channel structure refers to a transistor structure in which a channel formation region is electrically surrounded by the electric fields of one and the other of a pair of gate electrodes. The S-channel structure disclosed in this specification and the like is different from a fin type structure and a planar type structure. By adopting the S-channel structure, it is possible to improve resistance to the short channel effect, in other words, to make a transistor in which the short channel effect is unlikely to occur.

[0149] 1C, the conductor 205 is extended to function as wiring. However, the present invention is not limited to this, and a conductor functioning as wiring may be provided below the conductor 205. Also, it is not necessary to provide one conductor 205 for each transistor. For example, the conductor 205 may be shared by multiple transistors.

[0150] Here, the conductor 205a is preferably made of a conductive material having a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), copper atoms, etc. Alternatively, it is preferably made of a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0151] By using a conductive material having a function of suppressing the diffusion of oxygen for the conductor 205a, it is possible to suppress the conductor 205b from being oxidized and its conductivity from decreasing. As the conductive material having a function of suppressing the diffusion of oxygen, for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide, etc. are preferably used. Therefore, the conductor 205a may be a single layer or a multilayer of the above conductive material. For example, the conductor 205a may be a multilayer of tantalum, tantalum nitride, ruthenium, or ruthenium oxide and titanium or titanium nitride.

[0152] The conductor 205b is preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. Although the conductor 205b is illustrated as a single layer, it may have a laminated structure, for example, a laminate of titanium or titanium nitride and the conductive material.

[0153] Note that, although the conductor 205 in the transistor 200 has a structure in which the conductor 205a and the conductor 205b are stacked, the present embodiment is not limited to this. For example, the conductor 205 may have a single layer or a stacked structure of three or more layers. When the structure has a stacked structure, the structures may be distinguished by giving ordinal numbers to the order of formation.

[0154] The insulator 222 preferably has a function of suppressing the diffusion of hydrogen (e.g., at least one of hydrogen atoms, hydrogen molecules, etc.). The insulator 222 preferably has a function of suppressing the diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.). For example, the insulator 222 preferably has a function of suppressing the diffusion of one or both of hydrogen and oxygen more than the insulator 224.

[0155] The insulator 222 may be an insulator containing an oxide of one or both of aluminum and hafnium, which are insulating materials. The insulator containing an oxide of one or both of aluminum and hafnium has a barrier property against oxygen, hydrogen, and water. As the insulator, it is preferable to use aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like. When the insulator 222 is formed using such a material, the insulator 222 functions as a layer that suppresses the release of oxygen from the oxide 230 to the substrate side and the diffusion of impurities such as hydrogen from the periphery of the transistor 200 to the oxide 230. Thus, by providing the insulator 222, it is possible to suppress the diffusion of impurities such as hydrogen into the inside of the transistor 200 and the generation of oxygen vacancies in the oxide 230. In addition, it is possible to suppress the reaction of the conductor 205 with the insulator 224 and the oxygen contained in the oxide 230.

[0156] Alternatively, for example, aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to the insulator. Alternatively, these insulators may be nitrided. The insulator 222 may be formed by stacking silicon oxide, silicon oxynitride, or silicon nitride on these insulators.

[0157] The insulator 222 may be a single layer or a multilayer of insulators containing so-called high-k materials, such as aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO3), (Ba,Sr)TiO3 (BST), etc. As transistors become smaller and more highly integrated, problems such as leakage current may occur due to the thinning of the gate insulator. By using a high-k material for the insulator that functions as the gate insulator, it is possible to reduce the gate potential during transistor operation while maintaining the physical film thickness.

[0158] It is preferable that the insulator 224 in contact with the oxide 230 release oxygen by heating. For example, the insulator 224 may be made of silicon oxide, silicon oxynitride, or the like as appropriate. By providing an insulator containing oxygen in contact with the oxide 230, oxygen vacancies in the oxide 230 can be reduced and the reliability of the transistor 200 can be improved.

[0159] Specifically, it is preferable to use an insulating material containing a region where oxygen is present in excess of the stoichiometric composition (hereinafter also referred to as an excess oxygen region) or excess oxygen as the insulator 224. The excess oxygen region or the oxide film containing excess oxygen is an oxide film in which the amount of desorbed oxygen molecules is 1.0×10 18 molecules / cm 3 More than 1.0×10 19 molecules / cm 3 More preferably, 2.0×10 19molecules / cm 3 or more, or 3.0×10 20 molecules / cm 3 The surface temperature of the film during the TDS analysis is preferably in the range of 100° C. or higher and 700° C. or lower, or 100° C. or higher and 400° C. or lower.

[0160] The insulator having the excess oxygen region may be brought into contact with the oxide 230 and subjected to one or more of heat treatment, microwave treatment, and RF treatment. By performing such treatment, water or hydrogen in the oxide 230 can be removed. Note that some of the hydrogen may be diffused or captured (also referred to as gettering) in the conductor 242a and the conductor 242b.

[0161] The microwave treatment is preferably performed using, for example, a device having a power source for generating high-density plasma or a device having a power source for applying RF to the substrate side. For example, high-density oxygen radicals can be generated by using a gas containing oxygen and high-density plasma, and the oxygen radicals generated by the high-density plasma can be efficiently introduced into the oxide 230 or an insulator near the oxide 230 by applying RF to the substrate side. The pressure of the microwave treatment may be 133 Pa or more, preferably 200 Pa or more, and more preferably 400 Pa or more. For example, oxygen and argon may be used as gases to be introduced into the microwave treatment device, and the microwave treatment may be performed with an oxygen flow rate ratio (O2 / (O2+Ar)) of 50% or less, preferably 10% to 30%.

[0162] In addition, in a manufacturing process of the transistor 200, it is preferable to perform heat treatment in a state where the surface of the oxide 230 is exposed. The heat treatment may be performed, for example, at a temperature of 100° C. or higher and 450° C. or lower, more preferably 350° C. or higher and 400° C. or lower. Note that the heat treatment is performed in a nitrogen gas or inert gas atmosphere, or an atmosphere containing an oxidizing gas at 10 ppm or higher, 1% or higher, or 10% or higher. For example, the heat treatment is preferably performed in an oxygen atmosphere. This makes it possible to supply oxygen to the oxide 230 and reduce oxygen vacancies. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in an atmosphere containing an oxidizing gas at 10 ppm or higher, 1% or higher, or 10% or higher in order to compensate for desorbed oxygen after the heat treatment in a nitrogen gas or inert gas atmosphere. Alternatively, the heat treatment may be performed in an atmosphere containing an oxidizing gas at 10 ppm or higher, 1% or higher, or 10% or higher, and then the heat treatment may be performed in a nitrogen gas or inert gas atmosphere.

[0163] In addition, by performing an oxygen addition process on the oxide 230, it is possible to promote a reaction in which oxygen vacancies in the oxide 230 are repaired by the supplied oxygen. Furthermore, the supplied oxygen reacts with hydrogen remaining in the oxide 230, and the hydrogen can be removed as H2O (dehydrated). As a result, the hydrogen remaining in the oxide 230 recombines with the oxygen vacancies to form V O The formation of H can be suppressed.

[0164] Each of the insulator 222 and the insulator 224 may have a laminated structure of two or more layers. In that case, the laminated structures are not limited to those made of the same material, and may be those made of different materials.

[0165] Oxide 243a and oxide 243b may be provided on oxide 230b.

[0166] The oxide 243a and the oxide 243b preferably have a function of suppressing oxygen permeation. By disposing the oxide 243a (oxide 243b) having a function of suppressing oxygen permeation between the conductor 242a (conductor 242b) functioning as a source electrode or a drain electrode and the oxide 230b, the electrical resistance between the conductor 242a (conductor 242b) and the oxide 230b is reduced, which is preferable. With such a configuration, the electrical characteristics and reliability of the transistor 200 can be improved. Note that if the electrical resistance between the conductor 242a (conductor 242b) and the oxide 230b can be sufficiently reduced, the oxide 243a (oxide 243b) may not be provided.

[0167] Metal oxides having element M may be used as the oxide 243a and the oxide 243b. In particular, the element M may be aluminum, gallium, yttrium, or tin. The oxide 243a and the oxide 243b preferably have a higher concentration of element M than the oxide 230b. Gallium oxide may be used as the oxide 243a and the oxide 243b. Metal oxides such as In-M-Zn oxide may be used as the oxide 243a and the oxide 243b. Specifically, in the metal oxide used for the oxide 243a and the oxide 243b, the atomic ratio of element M to In is preferably greater than the atomic ratio of element M to In in the metal oxide used for the oxide 230b. The film thickness of the oxide 243a and the oxide 243b is preferably 0.5 nm or more and 5 nm or less, more preferably 1 nm or more and 3 nm or less, and even more preferably 1 nm or more and 2 nm or less. The oxide 243a and the oxide 243b preferably have crystallinity. When the oxide 243a and the oxide 243b have crystallinity, it is possible to suitably suppress the release of oxygen from the oxide 230. For example, when the oxide 243a and the oxide 243b have a crystal structure such as a hexagonal crystal structure, it is possible to suppress the release of oxygen from the oxide 230.

[0168] Conductor 242a is provided on oxide 243a, and conductor 242b is provided on oxide 243b.

[0169] As the conductor 242a and the conductor 242b, for example, a nitride containing tantalum, a nitride containing titanium, a nitride containing molybdenum, a nitride containing tungsten, a nitride containing tantalum and aluminum, a nitride containing titanium and aluminum, or the like is preferably used. In this embodiment, a nitride containing tantalum is particularly preferable. Also, for example, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, or the like may be used. These materials are preferable because they are conductive materials that are difficult to oxidize, or materials that maintain conductivity even when they absorb oxygen.

[0170] There may be a curved surface between the side surface of the conductor 242a (conductor 242b) and the top surface of the conductor 242a (conductor 242b). That is, the end of the side surface and the end of the top surface may be curved. The curved surface has a radius of curvature of, for example, 3 nm or more and 10 nm or less, preferably 5 nm or more and 6 nm or less, at the ends of the conductor 242a and the conductor 242b. The lack of corners at the ends improves the coverage of the film in the subsequent film formation process.

[0171] In addition, if the oxide 243a (oxide 243b) is not provided, the conductor 242a (conductor 242b) comes into contact with the oxide 230b or the oxide 230c, and oxygen in the oxide 230b or the oxide 230c diffuses into the conductor 242a (conductor 242b), which may cause the conductor 242a (conductor 242b) to oxidize. The oxidation of the conductor 242a and the conductor 242b is likely to reduce the conductivity of the conductor 242a and the conductor 242b. The diffusion of oxygen in the oxide 230b or the oxide 230c into the conductor 242a and the conductor 242b can be rephrased as the conductor 242a and the conductor 242b absorbing the oxygen in the oxide 230b or the oxide 230c.

[0172] In addition, oxygen in the oxide 230b or the oxide 230c may diffuse into the conductor 242a and the conductor 242b, forming layers between the conductor 242a and the oxide 230b, between the conductor 242b and the oxide 230b, or between the conductor 242a and the oxide 230c, and between the conductor 242b and the oxide 230c. Since the layer contains more oxygen than the conductor 242a or the conductor 242b, the layer is presumed to have insulating properties. In this case, the three-layer structure of the conductor 242a or the conductor 242b, the layer, and the oxide 230b or the oxide 230c can be regarded as a three-layer structure made of a metal-insulator-semiconductor, and can be regarded as a MIS (Metal-Insulator-Semiconductor) structure or a diode junction structure mainly based on the MIS structure.

[0173] Note that hydrogen contained in the oxide 230b, the oxide 230c, etc. may diffuse into the conductor 242a or the conductor 242b. In particular, by using a nitride containing tantalum for the conductor 242a and the conductor 242b, hydrogen contained in the oxide 230b, the oxide 230c, etc. may easily diffuse into the conductor 242a or the conductor 242b, and the diffused hydrogen may combine with nitrogen contained in the conductor 242a or the conductor 242b. In other words, hydrogen contained in the oxide 230b, the oxide 230c, etc. may be absorbed by the conductor 242a or the conductor 242b.

[0174] Insulator 254 is provided covering the side surfaces of oxide 230a, the side surfaces of oxide 230b, the side surfaces of oxide 243a, the side surfaces of oxide 243b, the side surfaces of conductor 242a, the top surface of conductor 242a, the side surfaces of conductor 242b, and the top surface of conductor 242b.

[0175] The insulator 254 preferably has a function of suppressing oxygen diffusion. For example, the insulator 254 preferably has a function of suppressing oxygen diffusion more than the insulator 280. As the insulator 254, for example, an insulator containing an oxide of one or both of aluminum and hafnium may be formed.

[0176] Moreover, the insulator 254 is preferably formed by forming a film of aluminum oxide or hafnium oxide in an atmosphere containing oxygen by bias sputtering. Bias sputtering is a method of sputtering while applying RF power to a substrate. By applying RF power to the substrate, the potential of the substrate becomes negative with respect to the plasma potential (called bias potential), and positive ions in the plasma are accelerated to this bias potential and injected into the substrate. The bias potential can be controlled by the magnitude of the RF power applied to the substrate. Therefore, oxygen can be injected into the insulator 224 by forming a film of aluminum oxide or hafnium oxide in an atmosphere containing oxygen by bias sputtering.

[0177] In the bias sputtering method, the amount of oxygen implanted into the insulator 224 that serves as the base of the insulator 254 can be controlled by the magnitude of the RF power applied to the substrate. For example, when the RF power has a power density of 0.31 W / cm 2 More than 0.62 W / cm 2 More preferably, 1.86 W / cm 2 The above bias may be applied to the substrate. In other words, the amount of oxygen suitable for the characteristics of the transistor can be changed and injected by adjusting the RF power when forming the insulator 254. Also, an amount of oxygen suitable for improving the reliability of the transistor can be injected. Also, the RF frequency is preferably 10 MHz or more. Typically, it is 13.56 MHz. The higher the RF frequency, the less damage can be caused to the substrate. Therefore, by adjusting the RF power applied to the substrate, the amount of oxygen injected into the insulator 224 can be controlled, and therefore the amount of oxygen injected into the insulator 224 can be optimized.

[0178] In the bias sputtering method, the bias applied to the substrate is not limited to RF power, and may be a DC voltage.

[0179] As described above, the insulator 254 has a function of injecting oxygen into the underlying film, but the insulator 254 itself has a function of suppressing oxygen permeation. Therefore, when the insulator 280 is formed on the insulator 254 in a later process and oxygen is diffused from the insulator 280, it is possible to prevent oxygen from diffusing directly from the insulator 280 into the oxide layers that become the oxide 230a, the oxide 230b, the oxide 243a, and the oxide 243b, and into the conductive layers that become the conductor 242a and the conductor 242b.

[0180] By providing the insulator 254 as described above, the oxide 230a, the oxide 230b, the oxide 243a, the oxide 243b, the conductor 242a, and the conductor 242b can be separated from the insulator 280. Therefore, it is possible to suppress the direct diffusion of oxygen from the insulator 280 to the oxide 230a, the oxide 230b, the oxide 243a, the oxide 243b, the conductor 242a, and the conductor 242b. This makes it possible to prevent the carrier concentration of the source region and the drain region from being reduced due to the supply of excess oxygen to the source region and the drain region of the oxide 230. In addition, it is possible to suppress the conductor 242a and the conductor 242b from being excessively oxidized, which increases the resistivity and reduces the on-current.

[0181] The insulator 250 is preferably disposed in contact with at least a portion of the oxide 230d. As the insulator 250, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, silicon oxide having vacancies, etc., can be used. In particular, silicon oxide and silicon oxynitride are preferable because they are stable against heat.

[0182] The insulator 250 is preferably formed using an insulator that releases oxygen when heated, similar to the insulator 224. By providing the insulator that releases oxygen when heated as the insulator 250 in contact with at least a part of the oxide 230d, oxygen can be effectively supplied to the channel formation region of the oxide 230, and oxygen vacancies in the channel formation region of the oxide 230 can be reduced. Therefore, a transistor with suppressed fluctuations in electrical characteristics, stable electrical characteristics, and improved reliability can be provided. Also, similar to the insulator 224, it is preferable that the concentration of impurities such as water and hydrogen in the insulator 250 is reduced. The thickness of the insulator 250 is preferably 1 nm or more and 20 nm or less.

[0183] 1B and 1C, the insulator 250 is illustrated as a single layer, but may have a laminated structure of two or more layers. The insulator 250 having a laminated structure will be described later.

[0184] Furthermore, a metal oxide may be provided between the insulator 250 and the conductor 260. The metal oxide preferably suppresses the diffusion of oxygen from the insulator 250 to the conductor 260. By providing a metal oxide that suppresses the diffusion of oxygen, the diffusion of oxygen from the insulator 250 to the conductor 260 is suppressed. In other words, a decrease in the amount of oxygen supplied to the oxide 230 can be suppressed. Furthermore, oxidation of the conductor 260 due to oxygen from the insulator 250 can be suppressed.

[0185] Note that the metal oxide preferably functions as a part of the first gate electrode. By including the metal oxide, the on-current of the transistor 200 can be improved without weakening the influence of the electric field from the conductor 260. For example, the metal oxide that can be used as the oxide 230 can be used as the metal oxide. In this case, the conductor 260a can be formed by a sputtering method to reduce the electrical resistance value of the metal oxide to make it a conductor. This can be called an OC (Oxide Conductor) electrode.

[0186] By including the metal oxide, the on-state current of the transistor 200 can be improved without weakening the influence of the electric field from the conductor 260.

[0187] The conductor 260 preferably includes a conductor 260a and a conductor 260b disposed on the conductor 260a. For example, the conductor 260a is preferably disposed so as to wrap the bottom and side surfaces of the conductor 260b. As shown in FIG. 1B and FIG. 1C, the upper surface of the conductor 260 is disposed so as to substantially coincide with the upper surface of the insulator 250, the upper surface of the oxide 230d, and the upper surface of the oxide 230c. Note that, although the conductor 260 is shown in FIG. 1B and FIG. 1C as having a two-layer structure of the conductor 260a and the conductor 260b, it may be a single-layer structure or a laminated structure of three or more layers.

[0188] The conductor 260a is preferably made of a conductive material having a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules, copper atoms, etc. Alternatively, it is preferably made of a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0189] Furthermore, since the conductor 260a has a function of suppressing the diffusion of oxygen, it is possible to suppress a decrease in conductivity due to oxidation of the conductor 260b caused by oxygen contained in the insulator 250. As a conductive material having a function of suppressing the diffusion of oxygen, it is preferable to use, for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide, or the like.

[0190] In addition, since the conductor 260 also functions as wiring, it is preferable to use a conductor with high conductivity. For example, the conductor 260b can be a conductive material mainly composed of tungsten, copper, or aluminum. The conductor 260b may also have a laminated structure, for example, a laminated structure of titanium or titanium nitride and the above-mentioned conductive material.

[0191] Moreover, in the transistor 200, the conductor 260 is formed in a self-aligned manner so as to fill an opening formed in the insulator 280 or the like. By forming the conductor 260 in this manner, the conductor 260 can be reliably disposed in the region between the conductor 242a and the conductor 242b without alignment.

[0192] As shown in FIG. 1C, in the channel width direction of the transistor 200, the bottom surface of the conductor 260 in the region where the conductor 260 and the oxide 230b do not overlap is preferably lower than the bottom surface of the oxide 230b. The conductor 260, which functions as a gate electrode, is configured to cover the side and top surfaces of the channel formation region of the oxide 230b via the insulator 250 or the like, so that the electric field of the conductor 260 can be easily applied to the entire channel formation region of the oxide 230b. This makes it possible to increase the on-current of the transistor 200 and improve the frequency characteristics. When the bottom surface of the insulator 222 is used as a reference, the difference between the height of the bottom surface of the conductor 260 in the region where the oxide 230a and the oxide 230b do not overlap with the conductor 260 and the height of the bottom surface of the oxide 230b is 0 nm or more and 100 nm or less, preferably 3 nm or more and 50 nm or less, and more preferably 5 nm or more and 20 nm or less.

[0193] The insulator 280 is provided on the insulator 254. In addition, the upper surface of the insulator 280 may be flattened.

[0194] The insulator 280 preferably has a reduced concentration of impurities such as water and hydrogen. The insulator 280 preferably has a low hydrogen concentration and an excess oxygen region or excess oxygen, and may be formed using a material similar to that of the insulator 216. The insulator 280 may have a stacked structure of the above materials, for example, a stacked structure of silicon oxide formed by a sputtering method and silicon oxynitride formed thereon by a CVD method. Silicon nitride may also be stacked on top of this.

[0195] Conductor 240a and conductor 240b are preferably made of a conductive material containing tungsten, copper, or aluminum as a main component.

[0196] Moreover, each of the conductor 240a and the conductor 240b may have a laminated structure. When each of the conductor 240a and the conductor 240b has a laminated structure, it is preferable to use a conductive material having a function of suppressing the permeation of impurities such as water and hydrogen for the conductor in contact with the insulator 284, the insulator 283, the insulator 282, the insulator 280, and the insulator 254. For example, it is preferable to use tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, ruthenium oxide, etc. Also, the conductive material having a function of suppressing the permeation of impurities such as water and hydrogen may be used in a single layer or a laminated layer. Also, it is possible to suppress impurities such as water and hydrogen contained in layers above the insulator 284 from being mixed into the oxide 230 through the conductor 240a and the conductor 240b.

[0197] As the insulator 241a and the insulator 241b, for example, an insulator such as silicon nitride, aluminum oxide, or silicon nitride oxide may be used. Since the insulator 241a and the insulator 241b are provided in contact with the insulator 254, impurities such as water and hydrogen contained in the insulator 280 can be prevented from being mixed into the oxide 230 through the conductor 240a and the conductor 240b. In particular, silicon nitride is preferable because it has a high blocking property against hydrogen. In addition, it can prevent the oxygen contained in the insulator 280 from being absorbed by the conductor 240a and the conductor 240b.

[0198] Also, a conductor 246a that functions as wiring in contact with the upper surface of the conductor 240a, and a conductor 246b that functions as wiring in contact with the upper surface of the conductor 240b may be disposed. The conductor 246a and the conductor 246b are preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. The conductor may have a laminated structure, for example, a laminate of titanium or titanium nitride and the above-mentioned conductive material. The conductor may be formed so as to be embedded in an opening provided in an insulator.

[0199] The insulator 286 is provided on the conductor 246a, the conductor 246b, and the insulator 284. As a result, the upper surface of the conductor 246a, the side surface of the conductor 246a, the upper surface of the conductor 246b, and the side surface of the conductor 246b are in contact with the insulator 286, and the lower surface of the conductor 246a and the lower surface of the conductor 246b are in contact with the insulator 284. In other words, the conductor 246a and the conductor 246b can be configured to be wrapped with the insulator 284 and the insulator 286, respectively. With such a configuration, it is possible to suppress the permeation of oxygen from the outside and prevent the conductor 246a and the conductor 246b from being oxidized. In addition, this is preferable because it is possible to prevent impurities such as water and hydrogen from diffusing to the outside from the conductor 246a and the conductor 246b.

[0200] <Materials for semiconductor devices> The following describes constituent materials that can be used in the semiconductor device.

[0201] [substrate] The substrate on which the transistor 200 is formed may be, for example, an insulating substrate, a semiconductor substrate, or a conductive substrate. Examples of insulating substrates include a glass substrate, a quartz substrate, a sapphire substrate, a stabilized zirconia substrate (such as an yttria stabilized zirconia substrate), and a resin substrate. Examples of semiconductor substrates include a semiconductor substrate made of silicon or germanium, or a compound semiconductor substrate made of silicon carbide, silicon germanium, gallium arsenide, indium phosphide, zinc oxide, and gallium oxide. Examples of semiconductor substrates include a semiconductor substrate having an insulating region inside the semiconductor substrate, such as an SOI (Silicon On Insulator) substrate. Examples of conductive substrates include a graphite substrate, a metal substrate, an alloy substrate, and a conductive resin substrate. Examples of substrates include a substrate having a metal nitride, a substrate having a metal oxide, and the like. Examples of substrates include a substrate having a conductor or semiconductor provided on an insulating substrate, a substrate having a conductor or insulator provided on a semiconductor substrate, and a substrate having a semiconductor or insulator provided on a conductive substrate. Alternatively, a substrate provided with elements may be used. The elements provided on the substrate include a capacitor element, a resistor element, a switch element, a light-emitting element, a memory element, and the like.

[0202] [Insulator] Examples of the insulator include oxides, nitrides, oxynitrides, nitride oxides, metal oxides, metal oxynitrides, and metal nitride oxides, each of which has insulating properties.

[0203] For example, as transistors become smaller and more highly integrated, problems such as leakage current can occur due to thinner gate insulators. By using a high-k material for the insulator that functions as the gate insulator, it is possible to reduce the voltage required for transistor operation while maintaining the physical film thickness. On the other hand, by using a material with a low dielectric constant for the insulator that functions as the interlayer film, it is possible to reduce the parasitic capacitance that occurs between wiring. Therefore, it is best to select materials according to the function of the insulator.

[0204] Further, examples of insulators with a high relative dielectric constant include gallium oxide, hafnium oxide, zirconium oxide, oxides having aluminum and hafnium, oxynitrides having aluminum and hafnium, oxides having silicon and hafnium, oxynitrides having silicon and hafnium, and nitrides having silicon and hafnium.

[0205] Examples of insulators with a low dielectric constant include silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide with fluorine added, silicon oxide with carbon added, silicon oxide with carbon and nitrogen added, silicon oxide with voids, or resin.

[0206] In addition, the transistor using metal oxide can have stable electrical characteristics by being surrounded by an insulator having a function of suppressing the permeation of impurities such as hydrogen and oxygen. As the insulator having a function of suppressing the permeation of impurities such as hydrogen and oxygen, for example, an insulator containing boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, or tantalum may be used in a single layer or a stacked layer. Specifically, as the insulator having a function of suppressing the permeation of impurities such as hydrogen and oxygen, metal oxides such as aluminum oxide, magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide, and metal nitrides such as aluminum nitride, silicon nitride oxide, and silicon nitride can be used.

[0207] The insulator that functions as the gate insulator is preferably an insulator having a region containing oxygen that is released by heating. For example, by using a structure in which silicon oxide or silicon oxynitride having a region containing oxygen that is released by heating is in contact with the oxide 230, oxygen vacancies in the oxide 230 can be compensated for.

[0208] [conductor] As the conductor, it is preferable to use a metal element selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, lanthanum, etc., or an alloy containing the above-mentioned metal elements as a component, or an alloy combining the above-mentioned metal elements. For example, it is preferable to use tantalum nitride, titanium nitride, tungsten, nitride containing titanium and aluminum, nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxide containing strontium and ruthenium, oxide containing lanthanum and nickel, etc. In addition, tantalum nitride, titanium nitride, nitride containing titanium and aluminum, nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxide containing strontium and ruthenium, oxide containing lanthanum and nickel are conductive materials that are difficult to oxidize, or materials that maintain conductivity even when oxygen is absorbed, so they are preferable. Furthermore, a semiconductor having high electrical conductivity, typified by polycrystalline silicon containing an impurity element such as phosphorus, or a silicide such as nickel silicide may be used.

[0209] A plurality of conductive layers formed of the above-mentioned materials may be stacked. For example, a stacked structure may be formed by combining the above-mentioned material containing a metal element and a conductive material containing oxygen. A stacked structure may be formed by combining the above-mentioned material containing a metal element and a conductive material containing nitrogen. A stacked structure may be formed by combining the above-mentioned material containing a metal element, a conductive material containing oxygen, and a conductive material containing nitrogen.

[0210] In addition, when an oxide is used for the channel formation region of a transistor, a conductor functioning as a gate electrode preferably has a stacked structure in which a material containing a metal element and a conductive material containing oxygen are combined. In this case, the conductive material containing oxygen is preferably provided on the channel formation region side. By providing the conductive material containing oxygen on the channel formation region side, oxygen released from the conductive material is easily supplied to the channel formation region.

[0211] In particular, it is preferable to use a conductive material containing oxygen and a metal element contained in the metal oxide in which the channel is formed as a conductor functioning as a gate electrode. The conductive material containing the metal element and nitrogen described above may also be used. For example, a conductive material containing nitrogen, such as titanium nitride or tantalum nitride, may also be used. Indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may also be used. Indium gallium zinc oxide containing nitrogen may also be used. By using such a material, hydrogen contained in the metal oxide in which the channel is formed may be captured. Alternatively, hydrogen mixed in from an external insulator may be captured.

[0212] [Metal oxides] It is preferable to use a metal oxide that functions as a semiconductor (oxide semiconductor) as the oxide 230. Hereinafter, metal oxides that can be applied to the oxide 230 according to the present invention will be described.

[0213] The metal oxide preferably contains at least indium or zinc. In particular, it is preferable that the metal oxide contains indium and zinc. In addition to these, it is preferable that the metal oxide contains aluminum, gallium, yttrium, tin, etc. In addition, it may contain one or more elements selected from boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc.

[0214] In this specification and the like, metal oxides containing nitrogen may also be collectively referred to as metal oxides. Furthermore, metal oxides containing nitrogen may also be referred to as metal oxynitrides.

[0215] <<Crystal structure classification>> First, classification of crystal structures in oxide semiconductors will be described with reference to Fig. 3A. Fig. 3A is a diagram for explaining classification of crystal structures of oxide semiconductors, typically IGZO (metal oxide containing In, Ga, and Zn).

[0216] As shown in FIG. 3A, oxide semiconductors are broadly classified into "Amorphous", "Crystalline", and "Crystal". "Amorphous" includes completely amorphous. "Crystalline" includes c-axis-aligned crystalline (CAAC), nanocrystalline (nc), and cloud-aligned composite (CAC). "Crystalline" excludes single crystal, poly crystal, and completely amorphous. "Crystal" includes single crystal and poly crystal.

[0217] The structure in the bold frame shown in Fig. 3A is an intermediate state between "Amorphous" and "Crystal" and belongs to a new boundary region (New crystalline phase). In other words, this structure is completely different from the energetically unstable "Amorphous" and "Crystal".

[0218] The crystal structure of the film or substrate can be evaluated using an X-ray diffraction (XRD) spectrum. Figure 3B shows an XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement of the CAAC-IGZO film classified as "Crystalline". The GIXD method is also called the thin film method or the Seemann-Bohlin method. Hereinafter, the XRD spectrum obtained by the GIXD measurement shown in Figure 3B will be simply referred to as the XRD spectrum. The composition of the CAAC-IGZO film shown in Figure 3B is approximately In:Ga:Zn=4:2:3 [atomic ratio]. The thickness of the CAAC-IGZO film shown in Figure 3B is 500 nm.

[0219] In Figure 3B, the horizontal axis is 2θ [deg.] and the vertical axis is intensity [au]. As shown in Figure 3B, a peak indicating clear crystallinity is detected in the XRD spectrum of the CAAC-IGZO film. Specifically, a peak indicating c-axis orientation is detected near 2θ = 31° in the XRD spectrum of the CAAC-IGZO film. Note that, as shown in Figure 3B, the peak near 2θ = 31° is asymmetric with respect to the angle at which the peak intensity is detected.

[0220] The crystal structure of the film or substrate can be evaluated from the diffraction pattern (also called the nanobeam electron diffraction pattern) observed by nanobeam electron diffraction (NBED). The diffraction pattern of the CAAC-IGZO film is shown in Figure 3C. Figure 3C shows a diffraction pattern observed by NBED, which causes an electron beam to be incident parallel to the substrate. The composition of the CAAC-IGZO film shown in Figure 3C is approximately In:Ga:Zn=4:2:3 [atomic ratio]. In the nanobeam electron diffraction method, electron diffraction is performed with a probe diameter of 1 nm.

[0221] As shown in Figure 3C, multiple spots indicating c-axis orientation are observed in the diffraction pattern of the CAAC-IGZO film.

[0222] <<Structure of oxide semiconductor>> Note that oxide semiconductors may be classified differently from that shown in FIG. 3A when focusing on their crystal structures. For example, oxide semiconductors are classified into single-crystal oxide semiconductors and other non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above-mentioned CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, a-like OS, and amorphous oxide semiconductors.

[0223] Here, the above-mentioned nc-OS and a-like OS will be described in detail.

[0224] [nc-OS] The nc-OS has periodic atomic arrangement in a minute region (for example, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). In other words, the nc-OS has minute crystals. Note that the size of the minute crystals is, for example, 1 nm to 10 nm, particularly 1 nm to 3 nm, and therefore the minute crystals are also called nanocrystals. In addition, the nc-OS does not show regularity in crystal orientation between different nanocrystals. Therefore, no orientation is seen in the entire film. Therefore, depending on the analysis method, the nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor. For example, when a structure analysis is performed on an nc-OS film using an XRD device, no peak indicating crystallinity is detected in out-of-plane XRD measurement using θ / 2θ scan. In addition, when an nc-OS film is subjected to electron diffraction (also called selected area electron diffraction) using an electron beam with a probe diameter larger than that of nanocrystals (for example, 50 nm or more), a diffraction pattern like a halo pattern is observed. On the other hand, when electron diffraction (also called nanobeam electron diffraction) is performed on an nc-OS film using an electron beam with a probe diameter (e.g., 1 nm to 30 nm) that is close to the size of a nanocrystal or smaller than the nanocrystal, an electron diffraction pattern in which multiple spots are observed within a ring-shaped region centered on the direct spot may be obtained.

[0225] [a-like OS] The a-like OS is an oxide semiconductor having a structure between the nc-OS and an amorphous oxide semiconductor. The a-like OS has a void or low-density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. Moreover, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and CAAC-OS.

[0226] <<Oxide semiconductor structure>> Next, the above-mentioned CAC-OS will be described in detail, with reference to its material composition.

[0227] [CAC-OS] CAC-OS is, for example, a material configuration in which elements constituting a metal oxide are unevenly distributed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof. In the following, a state in which one or more metal elements are unevenly distributed in a metal oxide and the regions having the metal elements are mixed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof, is also referred to as a mosaic or patch state.

[0228] Furthermore, CAC-OS is a composite metal oxide in which the material is separated into a first region and a second region, forming a mosaic structure, and the first region is distributed throughout the film (hereinafter, also referred to as a cloud structure). In other words, CAC-OS is a composite metal oxide in which the first region and the second region are mixed together.

[0229] Here, the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In-Ga-Zn oxide are represented as [In], [Ga], and [Zn], respectively. For example, in the CAC-OS in the In-Ga-Zn oxide, the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film. Also, the second region is a region where [Ga] is larger than [Ga] in the composition of the CAC-OS film. Alternatively, for example, the first region is a region where [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region. Also, the second region is a region where [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.

[0230] Specifically, the first region is a region mainly composed of indium oxide, indium zinc oxide, etc., and the second region is a region mainly composed of gallium oxide, gallium zinc oxide, etc. In other words, the first region can be rephrased as a region mainly composed of In, and the second region can be rephrased as a region mainly composed of Ga.

[0231] In addition, there are cases where a clear boundary between the first region and the second region cannot be observed.

[0232] For example, in the case of a CAC-OS of an In-Ga-Zn oxide, EDX mapping obtained using EDX (Energy Dispersive X-ray spectroscopy) has confirmed that the CAC-OS has a structure in which a region mainly composed of In (first region) and a region mainly composed of Ga (second region) are unevenly distributed and mixed.

[0233] When CAC-OS is used in a transistor, the conductivity due to the first region and the insulating property due to the second region act in a complementary manner, giving the CAC-OS a switching function (On / Off function). In other words, CAC-OS has a conductive function in part of the material and an insulating function in other parts of the material, and the material as a whole functions as a semiconductor. By separating the conductive function from the insulating function, it is possible to maximize both functions. Therefore, by using CAC-OS in a transistor, it is possible to achieve a high on-current (I on ), high field effect mobility (μ), and good switching behavior can be achieved.

[0234] Oxide semiconductors have a variety of structures and each structure has different characteristics. The oxide semiconductor of this embodiment may include two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS.

[0235] <<Transistors containing oxide semiconductors>> Next, the case where the oxide semiconductor is used for a transistor will be described.

[0236] By using the oxide semiconductor for a transistor, a transistor with high field-effect mobility and high reliability can be realized.

[0237] For the transistor, an oxide semiconductor having a low carrier concentration is preferably used. For example, the carrier concentration of the oxide semiconductor is 1×10 17 cm -3 Less than or equal to 1×10 15 cm -3 Less than 1×10, more preferably 13 cm -3 Less than or equal to 1×10 11 cm -3 Less than 1×10, more preferably 10 cm -3 Less than 1 x 10 -9 cm -3 The above is the case. Note that in order to reduce the carrier concentration of the oxide semiconductor film, the impurity concentration in the oxide semiconductor film may be reduced to reduce the density of defect states. In this specification and the like, an oxide semiconductor having a low impurity concentration and a low density of defect states is referred to as a high-purity intrinsic or substantially high-purity intrinsic oxide semiconductor. Note that in this specification and the like, when the carrier concentration of a metal oxide in a channel formation region is 1×10 16 cm -3 The following cases are defined as substantially high purity and authentic:

[0238] Furthermore, a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has a low density of defect states, and therefore the density of trap states might also be low.

[0239] In addition, charges trapped in the trap states of an oxide semiconductor take a long time to disappear and may behave as if they are fixed charges. Therefore, a transistor in which a channel formation region is formed in an oxide semiconductor with a high density of trap states may have unstable electrical characteristics.

[0240] In addition, when impurities and oxygen vacancies are present in a channel formation region of a transistor including an oxide semiconductor, the resistance of the oxide semiconductor may be reduced and the electrical characteristics may be easily changed, resulting in reduced reliability.

[0241] In a transistor using an oxide semiconductor for a channel formation region, when a low-resistance region is formed in the channel formation region, a leakage current (parasitic channel) between the source electrode and the drain electrode of the transistor is likely to occur in the low-resistance region. In addition, the parasitic channel is likely to cause defects in the transistor characteristics, such as a normally-on transistor, an increase in leakage current, and a shift in threshold voltage due to application of stress. In addition, if the processing precision of the transistor is low, the parasitic channel varies from transistor to transistor, causing variation in the transistor characteristics.

[0242] Therefore, in order to stabilize the electrical characteristics of a transistor, it is effective to reduce the impurity concentration in the oxide semiconductor. In order to reduce the impurity concentration in the oxide semiconductor, it is preferable to also reduce the impurity concentration in a film adjacent to the oxide semiconductor.

[0243] <<Impurities>> Here, the influence of each impurity in an oxide semiconductor will be described.

[0244] When impurities are mixed into an oxide semiconductor, defect states or oxygen vacancies may be formed. Thus, when impurities are mixed into a channel formation region of an oxide semiconductor, the electrical characteristics of a transistor using the oxide semiconductor are likely to fluctuate, and the reliability may be reduced. Furthermore, when oxygen vacancies are included in the channel formation region, the transistor is likely to have normally-on characteristics (characteristics in which a channel exists and a current flows through the transistor even when no voltage is applied to the gate electrode).

[0245] A transistor using a metal oxide is likely to have normally-on characteristics due to impurities and oxygen vacancies in the metal oxide, and when the transistor is operated in a state where the metal oxide contains excess oxygen that exceeds an appropriate amount, the valence of the excess oxygen atom changes, causing the electrical characteristics of the transistor to change, which may result in poor reliability.

[0246] Furthermore, when impurities are present in a channel formation region of an oxide semiconductor, the crystallinity of the channel formation region may be reduced, or the crystallinity of an oxide provided in contact with the channel formation region may be reduced. When the crystallinity of the channel formation region is low, the stability or reliability of the transistor tends to be degraded. When the crystallinity of an oxide provided in contact with the channel formation region is low, an interface state may be formed, which may degrade the stability or reliability of the transistor.

[0247] Impurities in the metal oxide include, for example, hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, silicon, and the like.

[0248] When an oxide semiconductor contains silicon or carbon, which is one of the group 14 elements, defect levels are formed in the oxide semiconductor. For this reason, the concentrations of silicon or carbon in the oxide semiconductor and those near the interface with the oxide semiconductor (concentrations obtained by SIMS) are calculated as 2×10 18 atoms / cm 3 Less than or equal to 2 x 10 17 atoms / cm 3 The following applies.

[0249] In addition, when an oxide semiconductor contains an alkali metal or an alkaline earth metal, defect states may be formed and carriers may be generated. Therefore, a transistor using an oxide semiconductor containing an alkali metal or an alkaline earth metal is likely to have normally-on characteristics. For this reason, when the concentration of an alkali metal or an alkaline earth metal in an oxide semiconductor obtained by SIMS is 1×10 18 atoms / cm 3 Less than or equal to 2 x 10 16 atoms / cm 3 To the following:

[0250] Furthermore, when nitrogen is contained in an oxide semiconductor, electrons serving as carriers are generated, the carrier concentration increases, and the semiconductor is likely to become n-type. As a result, a transistor using an oxide semiconductor containing nitrogen as a semiconductor is likely to have normally-on characteristics. Alternatively, when nitrogen is contained in an oxide semiconductor, trap states may be formed. As a result, the electrical characteristics of the transistor may become unstable. For this reason, the nitrogen concentration in an oxide semiconductor obtained by SIMS is set to 5×10 19 atoms / cm 3 Less than 5 x 10 18 atoms / cm 3 Less than or equal to 1×10 18 atoms / cm 3 Less than 5×10, more preferably 17 atoms / cm 3 To the following:

[0251] When an oxide semiconductor in which impurities are sufficiently reduced is used for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0252] <Modification 1 of the semiconductor device> An example of a semiconductor device will be described below with reference to FIGS. 4A to 4D.

[0253] Fig. 4A shows a top view of the semiconductor device. Fig. 4B is a cross-sectional view corresponding to the portion indicated by the dashed line A1-A2 in Fig. 4A. Fig. 4C is a cross-sectional view corresponding to the portion indicated by the dashed line A3-A4 in Fig. 4A. Fig. 4D is a cross-sectional view corresponding to the portion indicated by the dashed line A5-A6 in Fig. 4A. Some elements are omitted from the top view of Fig. 4A for clarity.

[0254] 4A to 4D, structures having the same functions as those of the structures constituting the semiconductor device shown in <Configuration example of semiconductor device> are denoted by the same reference numerals. Note that, in this section, the materials described in detail in <Configuration example of semiconductor device> can be used as the materials constituting the semiconductor device.

[0255] The semiconductor device shown in Figures 4A to 4D is a modified example of the semiconductor device shown in Figures 1A to 1D. The semiconductor device shown in Figures 4A to 4D is different from the semiconductor device shown in Figures 1A to 1D in the shape of the insulator 283. Also, the semiconductor device differs in that it has an insulator 287 and an insulator 274. Also, the semiconductor device differs in that it does not have an insulator 284.

[0256] 4A to 4D, the insulator 214, the insulator 216, the insulator 222, the insulator 224, the insulator 254, the insulator 280, and the insulator 282 are patterned. The insulator 287 and the insulator 283 are structured to cover the insulator 214, the insulator 216, the insulator 222, the insulator 224, the insulator 254, the insulator 280, and the insulator 282. That is, the insulator 287 contacts the top surface of the insulator 212, the side surface of the insulator 214, the side surface of the insulator 216, the side surface of the insulator 222, the side surface of the insulator 224, the side surface of the insulator 254, the side surface of the insulator 280, the side surface of the insulator 282, and the top surface of the insulator 282, and the insulator 283 contacts the top surface and the side surface of the insulator 287. As a result, the oxide 230, the insulator 214, the insulator 216, the insulator 222, the insulator 224, the insulator 254, the insulator 280, and the insulator 282 are isolated from the outside by the insulator 287, the insulator 283, and the insulator 212. In other words, the transistor 200 is disposed within a region sealed by the insulator 287, the insulator 283, and the insulator 212.

[0257] For example, it is preferable to form the insulators 214, 282, and 287 using a material that has a function of capturing and fixing hydrogen, and to form the insulators 212 and 283 using a material that has a function of suppressing the diffusion of hydrogen and oxygen. Typically, aluminum oxide can be used as the insulators 214, 282, and 287. Typically, silicon nitride can be used as the insulators 212 and 283.

[0258] With this structure, hydrogen contained outside the sealed region can be prevented from entering the sealed region, and therefore a low hydrogen concentration can be maintained in the transistor.

[0259] 4A to 4D show a structure in which the insulator 212, the insulator 287, and the insulator 283 are provided as a single layer, but this embodiment is not limited to this. For example, each of the insulator 212, the insulator 287, and the insulator 283 may be provided as a stacked structure of two or more layers.

[0260] Moreover, the insulator 287 does not necessarily have to be provided. With this structure, the transistor 200 is disposed in a region sealed with the insulator 212 and the insulator 283. With this structure, hydrogen contained outside the sealed region can be further prevented from entering the sealed region. Therefore, a low hydrogen concentration in the transistor can be further maintained.

[0261] The insulator 274 functions as an interlayer film. The insulator 274 preferably has a lower dielectric constant than the insulator 214. By using a material with a low dielectric constant as the interlayer film, parasitic capacitance generated between wirings can be reduced. The insulator 274 can be provided using, for example, a material similar to that of the insulator 280.

[0262] <Method for manufacturing semiconductor device> Next, a manufacturing method of the semiconductor device of one embodiment of the present invention shown in FIGS. 4A to 4D will be described with reference to FIGS. 5A to 17D.

[0263] Figures 5A, 6A, 7A, 8A, 9A, 10A, 11A, 12A, 13A, 14A, 15A, 16A, and 17A are top views, and Figures 5B, 6B, 7B, 8B, 9B, 10B, 11B, 12B, 13B, 14B, 15B, 16B, and 17B are cross-sectional views corresponding to the portions indicated by the dashed line A1-A2 in Figures 5A, 6A, 7A, 8A, 9A, 10A, 11A, 12A, 13A, 14A, 15A, 16A, and 17A, respectively, and are cross-sectional views in the channel length direction of the transistor 200. In addition, Figures 5C, 6C, 7C, 8C, 9C, 10C, 11C, 12C, 13C, 14C, 15C, 16C, and 17C are cross-sectional views corresponding to the portions indicated by the dotted line A3-A4 in Figures 5A, 6A, 7A, 8A, 9A, 10A, 11A, 12A, 13A, 14A, 15A, 16A, and 17A, respectively, and are also cross-sectional views in the channel width direction of transistor 200. Also, Fig. 5D, Fig. 6D, Fig. 7D, Fig. 8D, Fig. 9D, Fig. 10D, Fig. 11D, Fig. 12D, Fig. 13D, Fig. 14D, Fig. 15D, Fig. 16D, and Fig. 17D are cross-sectional views corresponding to the portions indicated by the dashed lines A5-A6 in Fig. 5A, Fig. 6A, Fig. 7A, Fig. 8A, Fig. 9A, Fig. 10A, Fig. 11A, Fig. 12A, Fig. 13A, Fig. 14A, Fig. 15A, Fig. 16A, and Fig. 17A, respectively. Note that in the top views of Fig. 5A, Fig. 6A, Fig. 7A, Fig. 8A, Fig. 9A, Fig. 10A, Fig. 11A, Fig. 12A, Fig. 13A, Fig. 14A, Fig. 15A, Fig. 16A, and Fig. 17A, some elements are omitted for clarity.

[0264] First, a substrate (not shown) is prepared, and then a film of the insulator 212 is formed on the substrate. The insulator 212 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.

[0265] CVD methods can be classified into plasma enhanced CVD (PECVD), which uses plasma, thermal CVD (TCVD), which uses heat, photo CVD (Photo CVD), etc. They can also be further divided into metal CVD (MCVD) and metal organic CVD (MOCVD), depending on the source gas used.

[0266] The plasma CVD method can obtain a high-quality film at a relatively low temperature. Moreover, the thermal CVD method is a film formation method that can reduce plasma damage to the object to be processed because it does not use plasma. For example, wiring, electrodes, elements (transistors, capacitive elements, etc.) included in a semiconductor device may be charged up by receiving electric charge from plasma. At this time, the wiring, electrodes, elements, etc. included in the semiconductor device may be destroyed by the accumulated electric charge. On the other hand, in the case of the thermal CVD method that does not use plasma, such plasma damage does not occur, so the yield of the semiconductor device can be increased. Furthermore, in the thermal CVD method, plasma damage does not occur during film formation, so a film with few defects can be obtained.

[0267] As the ALD method, a thermal ALD method in which a reaction between a precursor and a reactant is carried out using only thermal energy, a plasma enhanced ALD method in which a plasma excited reactant is used, or the like can be used.

[0268] In addition, the ALD method utilizes the self-regulating nature of atoms and can deposit atoms one layer at a time, which has the following advantages: extremely thin films can be formed; films can be formed on structures with high aspect ratios; films can be formed with fewer defects such as pinholes; films can be formed with excellent coverage; and films can be formed at low temperatures. In the PEALD (Plasma Enhanced ALD) method, the use of plasma allows films to be formed at lower temperatures, which may be preferable. Note that some precursors used in the ALD method contain impurities such as carbon. For this reason, films formed by the ALD method may contain more impurities such as carbon than films formed by other film formation methods. Note that the amount of impurities can be quantified using X-ray photoelectron spectroscopy (XPS).

[0269] The CVD method and the ALD method are different from the film formation method in which particles emitted from a target or the like are deposited, and are film formation methods in which a film is formed by a reaction on the surface of a workpiece. Therefore, they are film formation methods that are not easily affected by the shape of the workpiece and have good step coverage. In particular, the ALD method has excellent step coverage and excellent thickness uniformity, so it is suitable for coating the surface of an opening with a high aspect ratio. However, since the ALD method has a relatively slow film formation speed, it may be preferable to use it in combination with other film formation methods such as the CVD method, which has a fast film formation speed.

[0270] In the CVD method and the ALD method, the composition of the film obtained can be controlled by the flow rate ratio of the raw material gases. For example, in the CVD method and the ALD method, a film of any composition can be formed by changing the flow rate ratio of the raw material gases. In addition, for example, in the CVD method and the ALD method, a film whose composition changes continuously can be formed by changing the flow rate ratio of the raw material gases while forming the film. When forming a film while changing the flow rate ratio of the raw material gases, the time required for film formation can be shortened compared to the case of forming a film using multiple film formation chambers because no time is required for transportation and pressure adjustment. Therefore, the productivity of semiconductor devices can be increased in some cases.

[0271] In this embodiment, a silicon nitride film is formed by sputtering as the insulator 212. In this manner, by using an insulator such as silicon nitride through which copper does not easily permeate as the insulator 212, even if a metal that easily diffuses, such as copper, is used for a conductor in a layer (not shown) below the insulator 212, the metal can be prevented from diffusing upward through the insulator 212. Furthermore, by using an insulator such as silicon nitride through which impurities such as water and hydrogen do not easily permeate, the diffusion of impurities such as water and hydrogen contained in the layer below the insulator 212 can be prevented.

[0272] Next, the insulator 214 is deposited over the insulator 212. The insulator 214 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, aluminum oxide is used as the insulator 214.

[0273] The hydrogen concentration of the insulator 214 is preferably lower than that of the insulator 212. By forming a silicon nitride film by a sputtering method as the insulator 212, silicon nitride with a low hydrogen concentration can be formed. Furthermore, by using aluminum oxide as the insulator 214, the hydrogen concentration can be lower than that of the insulator 212.

[0274] In a subsequent process, the transistor 200 is formed on the insulator 214, and it is preferable that the film close to the transistor 200 has a relatively low hydrogen concentration, and it is preferable that the film with a relatively high hydrogen concentration is placed away from the transistor 200.

[0275] Next, the insulator 216 is deposited over the insulator 214. The insulator 216 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, silicon oxide or silicon oxynitride is used as the insulator 216. The insulator 216 is preferably deposited by a deposition method using a gas in which hydrogen atoms are reduced or removed. This allows the hydrogen concentration in the insulator 216 to be reduced.

[0276] Next, an opening is formed in the insulator 216, reaching the insulator 214. The opening may be, for example, a groove or a slit. The opening may be an area where an opening is formed. The opening may be formed by wet etching, but dry etching is preferable for fine processing. For the insulator 214, it is preferable to select an insulator that functions as an etching stopper film when etching the insulator 216 to form a groove. For example, when silicon oxide or silicon oxynitride is used for the insulator 216 that forms the groove, the insulator 214 may be silicon nitride, aluminum oxide, or hafnium oxide.

[0277] As the dry etching apparatus, a capacitively coupled plasma (CCP) etching apparatus having parallel plate electrodes can be used. The capacitively coupled plasma etching apparatus having parallel plate electrodes can be configured to apply a high frequency voltage to one of the parallel plate electrodes. Alternatively, it can be configured to apply a plurality of different high frequency voltages to one of the parallel plate electrodes. Alternatively, it can be configured to apply a high frequency voltage of the same frequency to each of the parallel plate electrodes. Alternatively, it can be configured to apply high frequency voltages of different frequencies to each of the parallel plate electrodes. Alternatively, a dry etching apparatus having a high density plasma source can be used. As the dry etching apparatus having a high density plasma source, for example, an inductively coupled plasma (ICP) etching apparatus or the like can be used.

[0278] After the opening is formed, a conductive film that becomes the conductor 205a is formed. The conductive film preferably contains a conductor that has a function of suppressing oxygen permeation. For example, tantalum nitride, tungsten nitride, titanium nitride, or the like can be used. Alternatively, the conductive film may be a stacked film of a conductor that has a function of suppressing oxygen permeation and tantalum, tungsten, titanium, molybdenum, aluminum, copper, or a molybdenum-tungsten alloy. The conductive film can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.

[0279] In this embodiment, the conductive film that becomes the conductor 205a has a multi-layer structure. First, a tantalum nitride film is formed by sputtering, and titanium nitride is laminated on the tantalum nitride. By using such a metal nitride as the lower layer of the conductor 205b, even if a metal that easily diffuses, such as copper, is used for the conductive film that becomes the conductor 205b described later, the metal can be prevented from diffusing out of the conductor 205a.

[0280] Next, a conductive film that becomes the conductor 205b is formed. The conductive film can be formed by a plating method, a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, a low-resistance conductive material such as copper is formed as the conductive film.

[0281] Next, a CMP process is performed to remove the conductive film that will become the conductor 205a and a portion of the conductive film that will become the conductor 205b, thereby exposing the insulator 216. As a result, the conductor 205a and the conductor 205b remain only in the openings. This makes it possible to form a conductor 205 with a flat upper surface (see FIGS. 5A to 5D). Note that the CMP process may remove a portion of the insulator 216.

[0282] Note that in the above description, the conductor 205 is formed to be embedded in the opening of the insulator 216; however, one embodiment of the present invention is not limited to this. For example, the conductor 205 may be formed over the insulator 214, the insulator 216 may be formed over the conductor 205, and a part of the insulator 216 may be removed by performing CMP treatment on the insulator 216 to expose the surface of the conductor 205.

[0283] Next, the insulator 222 is formed over the insulator 216 and the conductor 205. As the insulator 222, an insulator containing an oxide of one or both of aluminum and hafnium may be formed. The insulator containing an oxide of one or both of aluminum and hafnium has a barrier property against oxygen, hydrogen, and water. When the insulator 222 has a barrier property against hydrogen and water, the hydrogen and water contained in the structure provided around the transistor 200 are prevented from diffusing into the inside of the transistor 200 through the insulator 222, and the generation of oxygen vacancies in the oxide 230 can be suppressed.

[0284] The insulator 222 can be formed by sputtering, CVD, MBE, PLD, ALD, or the like.

[0285] It is preferable to carry out a heat treatment subsequently. The heat treatment may be carried out at 250°C or higher and 650°C or lower, preferably 300°C or higher and 500°C or lower, and more preferably 320°C or higher and 450°C or lower. The heat treatment may be carried out in an atmosphere of nitrogen gas or an inert gas, or an atmosphere containing 10 ppm or higher, 1% or higher, or 10% or higher of an oxidizing gas. For example, when the heat treatment is carried out in a mixed atmosphere of nitrogen gas and oxygen gas, the oxygen gas may be about 20%. The heat treatment may be carried out under reduced pressure. Alternatively, the heat treatment may be carried out in an atmosphere of nitrogen gas or an inert gas, and then in an atmosphere containing 10 ppm or higher, 1% or higher, or 10% or higher of an oxidizing gas to compensate for the desorbed oxygen.

[0286] In addition, it is preferable that the gas used in the heat treatment is highly purified. For example, the amount of moisture contained in the gas used in the heat treatment is 1 ppb or less, preferably 0.1 ppb or less, and more preferably 0.05 ppb or less. By performing the heat treatment using a highly purified gas, it is possible to prevent moisture and the like from being taken into the insulator 222 as much as possible.

[0287] In this embodiment, after the insulator 222 is formed, heat treatment is performed at a temperature of 400° C. for 1 hour with a nitrogen gas flow rate of 4 slm and an oxygen gas flow rate of 1 slm. The heat treatment can remove impurities such as water and hydrogen contained in the insulator 222. When an oxide containing hafnium is used as the insulator 222, the heat treatment can improve the crystallinity of the insulator 222. The heat treatment can also be performed at a timing such as after the insulator 224 is formed.

[0288] Next, the insulator 224 is formed on the insulator 222. The insulator 224 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, a silicon oxide or silicon oxynitride film is formed as the insulator 224 by a CVD method. The insulator 224 is preferably formed by a film formation method using a gas in which hydrogen atoms are reduced or removed. This allows the hydrogen concentration of the insulator 224 to be reduced. Since the insulator 224 becomes the insulator 224 in contact with the oxide 230a in a later process, it is preferable that the hydrogen concentration be reduced in this manner.

[0289] Here, in order to form an excess oxygen region in the insulator 224, a plasma treatment including oxygen may be performed under reduced pressure. For the plasma treatment including oxygen, it is preferable to use an apparatus having a power source that generates high density plasma using, for example, microwaves. Alternatively, the apparatus may have a power source that applies RF (Radio Frequency) to the substrate side. By using high density plasma, high density oxygen radicals can be generated, and by applying RF to the substrate side, the oxygen radicals generated by the high density plasma can be efficiently guided into the insulator 224. Alternatively, after performing a plasma treatment including an inert gas using this apparatus, a plasma treatment including oxygen may be performed to compensate for the desorbed oxygen. Note that impurities such as water and hydrogen contained in the insulator 224 can be removed by appropriately selecting the conditions for the plasma treatment. In that case, heat treatment does not need to be performed.

[0290] Here, after forming an aluminum oxide film on the insulator 224 by, for example, a sputtering method, a CMP process may be performed until the insulator 224 is reached. The CMP process can planarize and smooth the surface of the insulator 224. By disposing the aluminum oxide on the insulator 224 and performing the CMP process, it becomes easy to detect the end point of the CMP process. In addition, the CMP process may polish a part of the insulator 224, and the thickness of the insulator 224 may become thin, but the thickness may be adjusted when the insulator 224 is formed. By planarizing and smoothing the surface of the insulator 224, it may be possible to prevent a deterioration in the coverage rate of the oxide to be formed later and to prevent a decrease in the yield of the semiconductor device. In addition, it is preferable to form an aluminum oxide film on the insulator 224 by a sputtering method, since oxygen can be added to the insulator 224.

[0291] Next, oxide film 230A and oxide film 230B are sequentially formed on insulator 224 (see FIGS. 5A to 5D). Note that oxide film 230A and oxide film 230B are preferably formed successively without exposure to the air environment. By forming the films without exposure to the air, it is possible to prevent impurities or moisture from the air environment from adhering to oxide film 230A and oxide film 230B, and it is possible to keep the vicinity of the interface between oxide film 230A and oxide film 230B clean.

[0292] The oxide film 230A and the oxide film 230B can be formed by using a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.

[0293] For example, when the oxide film 230A and the oxide film 230B are formed by sputtering, oxygen or a mixed gas of oxygen and a rare gas is used as the sputtering gas. By increasing the ratio of oxygen contained in the sputtering gas, the excess oxygen in the oxide film to be formed can be increased. In addition, when the oxide film is formed by sputtering, the above-mentioned In-M-Zn oxide target can be used.

[0294] In particular, during the formation of the oxide film 230A, a portion of the oxygen contained in the sputtering gas may be supplied to the insulator 224. Therefore, the ratio of oxygen contained in the sputtering gas may be set to 70% or more, preferably 80% or more, and more preferably 100%.

[0295] When the oxide film 230B is formed by a sputtering method, an oxygen-excessive oxide semiconductor is formed when the ratio of oxygen contained in the sputtering gas is more than 30% and less than or equal to 100%, preferably 70% to 100%. A transistor using an oxygen-excessive oxide semiconductor for a channel formation region can have relatively high reliability. However, one embodiment of the present invention is not limited thereto. When the oxide film 230B is formed by a sputtering method, an oxygen-deficient oxide semiconductor is formed when the ratio of oxygen contained in the sputtering gas is more than or equal to 1% and less than or equal to 30%, preferably 5% to 20%,. A transistor using an oxygen-deficient oxide semiconductor for a channel formation region can have relatively high field-effect mobility. When the oxide film is formed while the substrate is heated, the crystallinity of the oxide film can be improved.

[0296] In this embodiment, the oxide film 230A is formed by sputtering using an oxide target with an atomic ratio of In:Ga:Zn=1:3:4. The oxide film 230B is formed by sputtering using an oxide target with an atomic ratio of In:Ga:Zn=4:2:4.1. Each oxide film may be formed according to the characteristics required for the oxide 230a and the oxide 230b by appropriately selecting the film formation conditions and atomic ratio.

[0297] Next, the oxide film 243A is formed on the oxide film 230B (see FIGS. 5A to 5D). The oxide film 243A can be formed by sputtering, CVD, MBE, PLD, ALD, or the like. The atomic ratio of Ga to In in the oxide film 243A is preferably greater than the atomic ratio of Ga to In in the oxide film 230B. In this embodiment, the oxide film 243A is formed by sputtering using an oxide target with an atomic ratio of In:Ga:Zn=1:3:4.

[0298] It is preferable to form the insulator 222, the insulator 224, the oxide film 230A, the oxide film 230B, and the oxide film 243A without exposing them to the atmosphere, for example, by using a multi-chamber type film forming apparatus.

[0299] Next, it is preferable to perform heat treatment under the conditions described in <Metal oxide and method for forming same>.

[0300] In this embodiment, the heat treatment is performed in a nitrogen atmosphere at 550° C. for 1 hour, followed by another heat treatment in an oxygen atmosphere at 550° C. for 1 hour. This heat treatment can remove impurities such as water and hydrogen from the oxide film 230A, the oxide film 230B, and the oxide film 243A. Furthermore, this heat treatment can improve the crystallinity of the oxide film 230B, resulting in a denser and more compact structure. This can suppress the diffusion of oxygen or impurities in the oxide film 230B.

[0301] Next, the conductive film 242A is formed on the oxide film 243A (see FIGS. 5A to 5D). The conductive film 242A can be formed by sputtering, CVD, MBE, PLD, ALD, or the like. Note that a heat treatment may be performed before the conductive film 242A is formed. The heat treatment may be performed under reduced pressure, and the conductive film 242A may be formed continuously without exposure to the air. By performing such a treatment, moisture and hydrogen adsorbed on the surface of the oxide film 243A can be removed, and the moisture concentration and hydrogen concentration in the oxide film 230A, the oxide film 230B, and the oxide film 243A can be reduced. The temperature of the heat treatment is preferably 100° C. or higher and 400° C. or lower. In this embodiment, the temperature of the heat treatment is set to 200° C.

[0302] Next, the oxide film 230A, the oxide film 230B, the oxide film 243A, and the conductive film 242A are processed into islands by using a lithography method to form the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B. This processing can be performed by a dry etching method or a wet etching method. Processing by the dry etching method is suitable for fine processing. Processing of the oxide film 230A, the oxide film 230B, the oxide film 243A, and the conductive film 242A may be performed under different conditions. In this process, the thickness of the region of the insulator 224 that does not overlap with the oxide 230a may become thin (see FIGS. 6A to 6D).

[0303] Here, the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B are formed so that at least a part of them overlaps with the conductor 205. In addition, it is preferable that the side surfaces of the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B are approximately perpendicular to the upper surface of the insulator 222. When the side surfaces of the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B are approximately perpendicular to the upper surface of the insulator 222, it is possible to reduce the area and increase the density when providing a plurality of transistors 200. Alternatively, a configuration may be used in which the side surfaces of the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B form a low angle with the upper surface of the insulator 222. By forming such a shape, the coverage of the insulator 254 and the like is improved in the subsequent steps, and defects such as voids can be reduced.

[0304] Furthermore, there is a curved surface between the side surface of the conductive layer 242B and the top surface of the conductive layer 242B. In other words, it is preferable that the end of the side surface and the end of the top surface are curved. For example, the curved surface has a radius of curvature of 3 nm or more and 10 nm or less, preferably 5 nm or more and 6 nm or less, at the end of the conductive layer 242B. By not having corners at the end, the coverage of the film in the subsequent film formation process is improved.

[0305] Next, the insulator 254 is formed over the insulator 224, the oxide 230a, the oxide 230b, the oxide layer 243B, and the conductive layer 242B (see FIGS. 7B to 7D). The insulator 254 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, aluminum oxide is formed as the insulator 254 by a sputtering method.

[0306] Next, an insulating film to be the insulator 280 is formed on the insulator 254. The insulating film can be formed by sputtering, CVD, MBE, PLD, ALD, or the like. For example, a silicon oxide film can be formed as the insulating film by sputtering, and a silicon oxide film can be formed thereon by PEALD or thermal ALD. The insulating film is preferably formed by a film formation method using a gas in which hydrogen atoms are reduced or removed. This can reduce the hydrogen concentration in the insulator 280. Before the insulating film is formed, a heat treatment can be performed. The heat treatment can be performed under reduced pressure, and the insulating film can be formed continuously without exposure to the atmosphere. By performing such a treatment, moisture and hydrogen adsorbed on the surface of the insulator 254 can be removed, and the moisture concentration and hydrogen concentration in the oxide 230a, the oxide 230b, the oxide layer 243B, and the insulator 224 can be reduced. The heat treatment can be performed under the above-mentioned heat treatment conditions.

[0307] Next, the insulating film is subjected to CMP processing to form an insulator 280 with a flat upper surface (see FIGS. 7B to 7D). As with the insulator 224, an aluminum oxide film may be formed on the insulator 280 by, for example, a sputtering method, and CMP may be performed until the aluminum oxide reaches the insulator 280.

[0308] Here, a microwave treatment may be performed. The microwave treatment is preferably performed in an oxygen-containing atmosphere under reduced pressure. By performing the microwave treatment, the hydrogen concentration in the oxide 230b and the oxide 230a can be reduced. In addition, some of the hydrogen may be gettered to the conductor 242a and the conductor 242b via the insulator 254. In addition, the V in the oxide 230a and the oxide 230b may be reduced. O can be repaired or compensated for.

[0309] After the microwave treatment, a heat treatment may be performed while maintaining the reduced pressure. By performing such a treatment, hydrogen in the insulator 280, the oxide 230b, and the oxide 230a can be efficiently removed. The heat treatment temperature is preferably 300° C. or more and 500° C. or less.

[0310] Furthermore, by performing microwave treatment, the film quality of the insulator 280 can be modified, thereby suppressing the diffusion of hydrogen, water, impurities, etc. Therefore, it is possible to suppress the diffusion of hydrogen, water, impurities, etc. into the oxide 230 through the insulator 280 in a post-process after the formation of the insulator 280, or by heat treatment, etc.

[0311] Next, a part of the insulator 280, a part of the insulator 254, a part of the conductive layer 242B, and a part of the oxide layer 243B are processed to form an opening that reaches the oxide 230b. The opening is preferably formed so as to overlap the conductor 205. By forming the opening, the conductor 242a, the conductor 242b, the oxide 243a, and the oxide 243b are formed (see FIGS. 8A to 8D).

[0312] When forming the opening, the upper part of the oxide 230b is removed. By removing a part of the oxide 230b, a groove is formed in the oxide 230b. Depending on the depth of the groove, the groove may be formed in the process of forming the opening, or may be formed in a process different from the process of forming the opening.

[0313] In addition, a part of the insulator 280, a part of the insulator 254, a part of the conductive layer 242B, a part of the oxide layer 243B, and a part of the oxide 230b can be processed by dry etching or wet etching. Processing by the dry etching method is suitable for fine processing. In addition, the processing may be performed under different conditions. For example, a part of the insulator 280 may be processed by dry etching, a part of the insulator 254 may be processed by wet etching, and a part of the oxide layer 243B, a part of the conductive layer 242B, and a part of the oxide 230b may be processed by dry etching. In addition, processing of a part of the oxide layer 243B and a part of the conductive layer 242B and processing of a part of the oxide 230b may be performed under different conditions.

[0314] Here, when a part of the oxide 230b is removed by dry etching to form a groove, it is preferable to perform the process by increasing the bias power. For example, the power density of the bias power is set to 0.03 W / cm 2 It is preferable to set it to 0.06 W / cm or more. 2 It is more preferable that the dry etching time is set to be equal to or longer than that. The dry etching time may be appropriately set according to the depth of the groove.

[0315] Here, it is preferable to remove impurities attached to the surfaces of the oxide 230a, the oxide 230b, etc. or diffused inside. The impurities include those originating from components contained in the insulator 280, the insulator 254, and the conductive layer 242B, components contained in the members used in the device used to form the opening, and components contained in the gas or liquid used in etching. The impurities include, for example, aluminum, silicon, tantalum, fluorine, and chlorine.

[0316] In order to remove the above-mentioned impurities, a cleaning process is performed. The cleaning method includes wet cleaning using a cleaning solution, plasma processing using plasma, cleaning by heat treatment, and the like, and the above cleaning methods may be combined appropriately. Note that the above-mentioned grooves may become deeper due to the cleaning process.

[0317] For wet cleaning, a cleaning process may be performed using an aqueous solution of ammonia water, oxalic acid, phosphoric acid, hydrofluoric acid, or the like diluted with carbonated water or pure water, pure water, carbonated water, or the like. Alternatively, ultrasonic cleaning may be performed using these aqueous solutions, pure water, or carbonated water. Alternatively, these cleaning methods may be combined as appropriate.

[0318] In this specification, an aqueous solution obtained by diluting commercially available hydrofluoric acid with pure water may be called diluted hydrofluoric acid, and an aqueous solution obtained by diluting commercially available ammonia water with pure water may be called diluted ammonia water. The concentration and temperature of the aqueous solution may be appropriately adjusted depending on the impurities to be removed and the configuration of the semiconductor device to be cleaned. The ammonia concentration of the diluted ammonia water may be 0.01% or more and 5% or less, preferably 0.1% or more and 0.5% or less. The hydrogen fluoride concentration of the diluted hydrofluoric acid may be 0.01 ppm or more and 100 ppm or less, preferably 0.1 ppm or more and 10 ppm or less.

[0319] In addition, it is preferable to use a frequency of 200 kHz or more, and more preferably 900 kHz or more, for ultrasonic cleaning. By using such a frequency, damage to the oxide 230b and the like can be reduced.

[0320] The above cleaning process may be performed multiple times, and the cleaning solution may be changed for each cleaning process. For example, a first cleaning process may be performed using diluted hydrofluoric acid or diluted ammonia water, and a second cleaning process may be performed using pure water or carbonated water.

[0321] In the present embodiment, as the cleaning process, wet cleaning is performed using diluted hydrofluoric acid, followed by wet cleaning using pure water or carbonated water. By performing this cleaning process, impurities attached to the surfaces of the oxide 230a, the oxide 230b, etc. or diffused inside can be removed. Furthermore, the crystallinity of the oxide 230c formed on the oxide 230b can be improved.

[0322] As a result of previous processes such as dry etching or the above-mentioned cleaning process, the thickness of insulator 224 in the area that overlaps with the opening but does not overlap with oxide 230b may become thinner than the thickness of insulator 224 in the area that overlaps with oxide 230b.

[0323] A heat treatment may be performed after the etching or cleaning. The heat treatment may be performed at 100° C. to 450° C., preferably 350° C. to 400° C. The heat treatment is performed in a nitrogen gas or inert gas atmosphere, or an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas. For example, the heat treatment is preferably performed in an oxygen atmosphere. This allows oxygen to be supplied to the oxide 230a and the oxide 230b, thereby reducing oxygen deficiency. In addition, by performing such a heat treatment, the crystallinity of the oxide 230b can be improved, and the crystallinity of the oxide 230c formed in the groove portion of the oxide 230b can also be improved. The heat treatment may be performed under reduced pressure. Alternatively, after the heat treatment in the oxygen atmosphere, the heat treatment may be performed in a nitrogen atmosphere without exposure to the air.

[0324] Next, the oxide film 230C is formed. A heat treatment may be performed before the oxide film 230C is formed. The heat treatment is preferably performed under reduced pressure, and the oxide film 230C is formed continuously without exposure to the atmosphere. The heat treatment is preferably performed in an atmosphere containing oxygen. By performing such a treatment, moisture and hydrogen adsorbed on the surface of the oxide 230b can be removed, and the moisture concentration and hydrogen concentration in the oxide 230a and the oxide 230b can be further reduced. The temperature of the heat treatment is preferably 100° C. or more and 400° C. or less. In this embodiment, the temperature of the heat treatment is 200° C.

[0325] Here, the oxide film 230C is preferably provided so as to contact at least the inner wall of the groove formed in the oxide 230b, a part of the side surface of the oxide 243a, a part of the side surface of the oxide 243b, a part of the side surface of the conductor 242a, a part of the side surface of the conductor 242b, a part of the side surface of the insulator 254, and a part of the side surface of the insulator 280. By being surrounded by the oxide 243a (oxide 243b), the insulator 254, and the oxide film 230C, the conductor 242a (conductor 242b) can be prevented from decreasing in conductivity due to oxidation of the conductor 242a (conductor 242b) in the subsequent steps.

[0326] The oxide film 230C can be formed by sputtering, CVD, MBE, PLD, ALD, or the like. The oxide film 230C may be formed by the same film formation method as the oxide film 230A or the oxide film 230B according to the characteristics required for the oxide film 230C. In this embodiment, the oxide film 230C is formed by sputtering using an oxide target with In:Ga:Zn=4:2:3 [atomic ratio], an oxide target with In:Ga:Zn=5:1:3 [atomic ratio], an oxide target with In:Ga:Zn=10:1:3 [atomic ratio], or an indium oxide target.

[0327] When the oxide film 230C is formed, some of the oxygen contained in the sputtering gas may be supplied to the oxide 230a and the oxide 230b. Alternatively, when the oxide film 230C is formed, some of the oxygen contained in the sputtering gas may be supplied to the insulator 280. Therefore, the proportion of oxygen contained in the sputtering gas for the oxide film 230C may be 70% or more, preferably 80% or more, and more preferably 100%. Furthermore, by forming the oxide film 230C in an atmosphere containing a large amount of oxygen in this manner, it becomes easier to make the oxide film 230C into a CAAC-OS.

[0328] The oxide film 230C is preferably formed while heating the substrate. At this time, by setting the substrate temperature to 200° C. or higher, oxygen vacancies in the oxide film 230C and the oxide 230b can be reduced. By forming the oxide film 230C while heating the substrate, the crystallinity of the oxide film 230C and the oxide 230b can be improved.

[0329] Next, a portion of the oxide film 230C is selectively removed by lithography (see FIGS. 9A, 9C, and 9D). The portion of the oxide film 230C may be removed by wet etching or the like. This process can remove a portion of the oxide film 230C located between the transistors 200 adjacent to each other in the channel width direction.

[0330] In the above process, in the region where a portion of oxide film 230C has been removed, the surfaces of insulators 224 and 280 are exposed. At this time, the film thickness of insulators 224 and 280 in the region may become thinner. Also, insulator 224 in the region may be removed, exposing the surface of insulator 222.

[0331] Next, the oxide film 230D is formed (see FIGS. 10A to 10D). The oxide film 230D can be formed by sputtering, CVD, MBE, PLD, ALD, or the like. The oxide film 230D may be formed by the same film formation method as the oxide film 230A or the oxide film 230B according to the characteristics required for the oxide film 230D. In this embodiment, the oxide film 230D is formed by sputtering using an oxide target with an atomic ratio of In:Ga:Zn=1:3:4.

[0332] When the oxide film 230D is formed, some of the oxygen contained in the sputtering gas may be supplied to the oxide film 230C. Alternatively, when the oxide film 230D is formed, some of the oxygen contained in the sputtering gas may be supplied to the insulator 280. Therefore, the ratio of oxygen contained in the sputtering gas for the oxide film 230D may be 70% or more, preferably 80% or more, and more preferably 100%.

[0333] Next, the insulating film 250A is formed (see FIGS. 10A to 10D). A heat treatment may be performed before the formation of the insulating film 250A, and the heat treatment may be performed under reduced pressure, and the insulating film 250A may be formed continuously without exposure to the atmosphere. The heat treatment is preferably performed in an atmosphere containing oxygen. By performing such a treatment, moisture and hydrogen adsorbed on the surface of the oxide film 230D can be removed, and the moisture concentration and hydrogen concentration in the oxide 230a, the oxide 230b, the oxide film 230C, and the oxide film 230D can be reduced. The temperature of the heat treatment is preferably 100° C. or higher and 400° C. or lower.

[0334] The insulating film 250A can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. The insulating film 250A is preferably formed by a film formation method using a gas in which hydrogen atoms are reduced or removed. This allows the hydrogen concentration of the insulating film 250A to be reduced. Since the insulating film 250A becomes the insulator 250 that contacts the oxide 230d in a later process, it is preferable that the hydrogen concentration is reduced in this manner.

[0335] Here, after the insulating film 250A is formed, a microwave treatment may be performed under an oxygen-containing atmosphere and reduced pressure. By performing the microwave treatment, the hydrogen concentration in the insulating film 250A, the oxide film 230D, the oxide film 230C, the oxide 230b, and the oxide 230a can be reduced. In addition, some of the hydrogen may be gettered to the conductor 242a and the conductor 242b. In addition, the V in the oxide 230a, the oxide 230b, the oxide film 230C, and the oxide film 230D may be reduced. O can be repaired or compensated for.

[0336] Also, a heat treatment may be performed while maintaining the reduced pressure state after the microwave treatment. By performing such a treatment, hydrogen in the insulating film 250A, the oxide film 230D, the oxide film 230C, the oxide 230b, and the oxide 230a can be efficiently removed. Also, some of the hydrogen may be gettered to the conductor 242a and the conductor 242b. Alternatively, a step of performing a heat treatment may be repeated multiple times while maintaining the reduced pressure state after the microwave treatment. By repeatedly performing the heat treatment, hydrogen in the insulating film 250A, the oxide film 230D, the oxide film 230C, the oxide 230b, and the oxide 230a can be more efficiently removed. Note that the heat treatment temperature is preferably 300° C. or more and 500° C. or less.

[0337] Furthermore, by performing microwave processing to modify the film quality of the insulating film 250A, it is possible to suppress the diffusion of hydrogen, water, impurities, etc. Therefore, it is possible to suppress the diffusion of hydrogen, water, impurities, etc. into the oxide 230b, the oxide 230a, etc. through the insulator 250 by a post-process such as film formation of a conductive film that becomes the conductor 260, or a post-treatment such as heat treatment.

[0338] Next, the conductive film 260A and the conductive film 260B are formed in this order (see FIGS. 11A to 11D). The conductive film 260A and the conductive film 260B can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. In this embodiment, the conductive film 260A is formed by an ALD method, and the conductive film 260B is formed by a CVD method.

[0339] Next, the oxide film 230C, the oxide film 230D, the insulating film 250A, the conductive film 260A, and the conductive film 260B are polished by CMP until the insulator 280 is exposed, thereby forming the oxide 230c, the oxide 230d, the insulator 250, and the conductor 260 (the conductor 260a and the conductor 260b) (see FIGS. 12A to 12D). As a result, the oxide 230c is arranged so as to cover the opening that reaches the oxide 230b and a part of the inner wall (side wall and bottom surface) of the groove of the oxide 230b. The oxide 230d is arranged so as to cover the opening and the inner wall of the groove through the oxide 230c. The insulator 250 is arranged so as to cover the opening and the inner wall of the groove through the oxide 230c and the oxide 230d. Moreover, the conductor 260 is arranged so as to fill the opening and the groove via the oxide 230c, the oxide 230d, and the insulator 250.

[0340] Next, heat treatment may be performed. In this embodiment, the treatment is performed in a nitrogen atmosphere at a temperature of 400° C. for 1 hour. The heat treatment can reduce the moisture and hydrogen concentrations in the insulators 250 and 280. Note that after the heat treatment, the insulator 282 may be formed without exposure to the air.

[0341] Next, the insulator 282 is formed over the oxide 230c, the oxide 230d, the insulator 250, the conductor 260, and the insulator 280 (see FIGS. 13B to 13D). The insulator 282 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. As the insulator 282, for example, it is preferable to form a film of aluminum oxide by a sputtering method. By forming the insulator 282 in an atmosphere containing oxygen by a sputtering method, oxygen can be added to the insulator 280 while forming the film. At this time, it is preferable to form the insulator 282 while heating the substrate. Moreover, it is preferable to form the insulator 282 in contact with the upper surface of the conductor 260, because this can suppress the oxygen contained in the insulator 280 from being absorbed by the conductor 260 in a subsequent heat treatment.

[0342] Next, a part of the insulator 282, a part of the insulator 280, a part of the insulator 254, a part of the insulator 224, a part of the insulator 222, a part of the insulator 216, and a part of the insulator 214 are processed to form an opening that reaches the insulator 212 (see FIGS. 14A to 14D). The opening may be formed so as to surround the transistor 200. Alternatively, the opening may be formed so as to surround a plurality of transistors 200. Thus, in the opening, a part of the side surface of the insulator 282, a part of the side surface of the insulator 280, a part of the side surface of the insulator 254, a part of the side surface of the insulator 224, a part of the side surface of the insulator 222, a part of the side surface of the insulator 216, and a part of the side surface of the insulator 214 are exposed.

[0343] A dry etching method or a wet etching method can be used to process a part of the insulator 282, a part of the insulator 280, a part of the insulator 254, a part of the insulator 224, a part of the insulator 222, a part of the insulator 216, and a part of the insulator 214. Processing by the dry etching method is suitable for fine processing. Moreover, the processing may be performed under different conditions. In this process, the film thickness of the insulator 212 in the region overlapping with the opening may become thin.

[0344] Next, the insulator 287 is formed to cover the insulator 282, the insulator 280, the insulator 254, the insulator 224, the insulator 222, the insulator 216, and the insulator 214 (see FIGS. 15B to 15D). The insulator 287 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. The insulator 287 may also be a multi-layered structure. For example, an aluminum oxide film may be formed by a sputtering method, and a silicon nitride film may be formed on the aluminum oxide by a sputtering method. As shown in FIGS. 15B to 15D, the insulator 287 contacts the insulator 212 at the bottom surface of the opening. That is, the upper surface and side surface of the transistor 200 are enclosed by the insulator 287, and the lower surface is enclosed by the insulator 212. In this manner, by enclosing the transistor 200 with the insulator 287 and the insulator 212 having high barrier properties, it is possible to prevent moisture and hydrogen from entering from the outside.

[0345] Next, the insulator 283 may be formed over the insulator 287 (see FIGS. 15B to 15D). Note that the insulator 283 is preferably formed using a film formation method with high film-forming properties. For example, the insulator 283 can be formed using a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. Note that the insulator 283 is preferably formed using the same material as the insulator 212.

[0346] Specifically, a silicon nitride film may be formed by a CVD method. In particular, the insulator 283 may be formed by a CVD method using a compound gas that does not contain hydrogen atoms or that contains a small amount of hydrogen atoms.

[0347] Next, an insulating film to be the insulator 274 is formed on the insulator 283. The insulating film can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. For example, a silicon oxide film may be formed by a CVD method. The insulating film is preferably formed by a film formation method using a gas in which hydrogen atoms are reduced or removed as described above. This allows the hydrogen concentration of the insulating film to be reduced.

[0348] Next, the insulating film that will become the insulator 274 is subjected to CMP processing to form the insulator 274 with a flat upper surface (see FIGS. 15B to 15D).

[0349] Next, heat treatment may be performed. In this embodiment, the treatment is performed in a nitrogen atmosphere at a temperature of 400° C. for one hour. This heat treatment allows oxygen added by the formation of the insulator 282 to diffuse into the insulator 280 and to be further supplied to the oxide 230a and the oxide 230b via the oxide 230c. Note that this heat treatment may be performed not only after the formation of the insulator 274 but also after the formation of the insulator 282 or the insulator 283.

[0350] Next, an opening reaching the conductor 242a and an opening reaching the conductor 242b are formed in the insulators 254, 280, 282, 287, and 283 (see FIGS. 16A and 16B). The openings may be formed by using a lithography method. Note that, although the shape of the opening is circular in top view in FIG. 16A, the shape is not limited to this. For example, the opening may be substantially circular such as an ellipse, polygonal such as a rectangle, or polygonal such as a rectangle with rounded corners in top view.

[0351] Next, an insulating film that will become the insulators 241a and 241b is formed, and the insulating film is anisotropically etched to form the insulators 241a and 241b (see FIGS. 16A and 16B). The insulating film can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. It is preferable to use an insulating film that has a function of suppressing oxygen permeation as the insulating film. For example, it is preferable to form an aluminum oxide film by the ALD method. Alternatively, it is preferable to form a silicon nitride film by the PEALD method. Silicon nitride is preferable because it has high blocking properties against hydrogen.

[0352] Moreover, the anisotropic etching of the insulating film that becomes the insulators 241a and 241b may be performed by, for example, dry etching. By providing the insulators 241a and 241b on the sidewalls of the opening, it is possible to suppress the permeation of oxygen from the outside and prevent the oxidation of the conductors 240a and 240b that will be formed next. It is also possible to prevent impurities such as water and hydrogen from diffusing to the outside from the conductors 240a and 240b.

[0353] Next, a conductive film that becomes the conductor 240a and the conductor 240b is formed. The conductive film is preferably a laminated structure including a conductor that has a function of suppressing the permeation of impurities such as water and hydrogen. For example, it can be a laminated structure of tantalum nitride, titanium nitride, or the like, and tungsten, molybdenum, copper, or the like. The conductive film can be formed by using a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.

[0354] Next, a CMP process is performed to remove parts of the conductive film that will become conductor 240a and conductor 240b, exposing the upper surfaces of insulator 283 and insulator 274. As a result, the conductive film remains only in the openings, forming conductors 240a and 240b with flat upper surfaces (see FIGS. 16A and 16B). Note that the CMP process may remove parts of the upper surfaces of insulator 283 and insulator 274.

[0355] Next, a conductive film that will become the conductor 246a and the conductor 246b is formed. The conductive film can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.

[0356] Next, the conductive film that will become the conductor 246a and the conductor 246b is processed by lithography to form the conductor 246a in contact with the upper surface of the conductor 240a and the conductor 246b in contact with the upper surface of the conductor 240b. At this time, a part of the insulator 283 in the region where the conductor 246a and the conductor 246b do not overlap with the insulator 283 may be removed (see FIGS. 17A and 17B).

[0357] Next, the insulator 286 is formed on the conductor 246a, the conductor 246b, and the insulator 283 (see FIGS. 4A to 4D). The insulator 286 can be formed by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. The insulator 286 may also be multi-layered. For example, a silicon nitride film may be formed by a sputtering method, and a silicon nitride film may be formed on the silicon nitride by a CVD method.

[0358] Through the above steps, a semiconductor device including the transistor 200 illustrated in Figures 4A to 4D can be manufactured. As illustrated in Figures 5A to 17D, the transistor 200 can be manufactured by the method for manufacturing a semiconductor device described in this embodiment.

[0359] <Modification 2 of Semiconductor Device> An example of a semiconductor device in this embodiment will be described below with reference to FIGS. 18A to 18D.

[0360] Fig. 18A shows a top view of a semiconductor device having a transistor 200A. Fig. 18B is a cross-sectional view corresponding to the portion indicated by the dashed line A1-A2 in Fig. 18A. Fig. 18C is a cross-sectional view corresponding to the portion indicated by the dashed line A3-A4 in Fig. 18A. Fig. 18D is a cross-sectional view corresponding to the portion indicated by the dashed line A5-A6 in Fig. 18A. Some elements are omitted from the top view of Fig. 18A for clarity.

[0361] 18A to 18D, structures having the same functions as those of the structures constituting the semiconductor device shown in <Configuration Example of Semiconductor Device> and <Modification Example of Semiconductor Device 1> are denoted by the same reference numerals. Note that, in this section as well, the materials described in detail in <Configuration Example of Semiconductor Device> and <Modification Example of Semiconductor Device 1> can be used as the materials constituting the semiconductor device.

[0362] The semiconductor device shown in Figures 18A to 18D is a modified example of the semiconductor device shown in Figures 4A to 4D. The semiconductor device shown in Figures 18A to 18D differs from the semiconductor device shown in Figures 4A to 4D in that it has an insulator 271a and an insulator 271b. It also differs in that it does not have an oxide 230c and an oxide 230d. It also differs in that the insulator 250 has a two-layer structure of an insulator 250a and an insulator 250b.

[0363] In the semiconductor device shown in FIGS. 18A to 18D, an insulator 271a is provided between the conductor 242a and the insulator 254, and an insulator 271b is provided between the conductor 242b and the insulator 254. In the semiconductor device shown in FIGS.

[0364] Here, the insulator 271a and the insulator 271b preferably have a function of suppressing diffusion of oxygen. This can suppress the absorption of excess oxygen contained in the insulator 280 by the conductor 242a and the conductor 242b functioning as a source electrode or a drain electrode. In addition, by suppressing oxidation of the conductor 242a and the conductor 242b, an increase in contact resistance between the transistor and the wiring can be suppressed. Thus, the transistor 200A can be provided with good electrical characteristics and reliability. The insulator 271a and the insulator 271b can be provided using, for example, a material similar to that of the insulator 254.

[0365] 18A to 18D, the insulating layers to be the insulators 271a and 271b and the conductive layer provided on the insulating films function as a mask for the conductive film 242A, so that the ends where the side surfaces and the top surfaces of the conductors 242a and 242b intersect are angular. The angular ends where the side surfaces and the top surfaces of the conductors 242a and 242b intersect are larger in cross-sectional area than when the ends have a curved surface. This reduces the resistance of the conductors 242a and 242b, and therefore the on-current of the transistor 200A can be increased.

[0366] Furthermore, by adopting a configuration in which the oxide 230c and the oxide 230d are not provided, it is possible to suppress the generation of a parasitic transistor between the transistor 200A and the transistor 200A adjacent to the transistor 200A, and to suppress the generation of a leakage path along the conductor 260. Therefore, it is possible to provide a semiconductor device that has favorable electrical characteristics and allows for miniaturization or high integration.

[0367] As shown in FIG. 18B, the insulator 250 may have a laminated structure of an insulator 250a and an insulator 250b.

[0368] When the insulator 250 has a layered structure of the insulator 250a and the insulator 250b, it is preferable that the insulator 250a is formed using an insulator that releases oxygen when heated, and the insulator 250b is formed using an insulator that has a function of suppressing the diffusion of oxygen. With such a configuration, it is possible to suppress the diffusion of oxygen contained in the insulator 250a to the conductor 260. In other words, it is possible to suppress a decrease in the amount of oxygen supplied to the oxide 230. In addition, it is possible to suppress the oxidation of the conductor 260 due to the oxygen contained in the insulator 250a. For example, the insulator 250a can be provided using a material that can be used for the insulator 250 described above, and the insulator 250b can be provided using a material similar to that of the insulator 222.

[0369] When silicon oxide or silicon oxynitride is used for the insulator 250a, the insulator 250b may be an insulating material that is a high-k material with a high dielectric constant. The gate insulator can be made into a laminated structure of the insulators 250a and 250b, which is stable against heat and has a high dielectric constant. This makes it possible to reduce the gate potential applied during transistor operation while maintaining the physical thickness of the gate insulator. It also makes it possible to reduce the equivalent oxide thickness (EOT) of the insulator that functions as the gate insulator.

[0370] Specifically, the insulator 250b may be a metal oxide containing one or more of hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium, etc., or a metal oxide that can be used as the oxide 230. In particular, it is preferable to use an insulator containing an oxide of one or both of aluminum and hafnium.

[0371] By forming the insulator 250 in a laminated structure of the insulator 250a and the insulator 250b, the physical thickness of the insulator 250 maintains the distance between the conductor 260 and the oxide 230, thereby making it possible to suppress leakage current between the conductor 260 and the oxide 230. In addition, the physical distance between the conductor 260 and the oxide 230 and the electric field strength applied from the conductor 260 to the oxide 230 can be easily and appropriately adjusted.

[0372] <Applications of semiconductor devices> 19A and 19B, an example of a semiconductor device including a transistor 200 according to one embodiment of the present invention, which is different from those described in the above <Structural Example of Semiconductor Device> and the above <Variation 1 of Semiconductor Device>, will be described below. Note that in the semiconductor device shown in FIG. 19A and FIG. 19B, structures having the same functions as those of the semiconductor device shown in <Variation 1 of Semiconductor Device> (see FIG. 4A to FIG. 4D) are denoted by the same reference numerals. Note that in this section, the materials described in detail in <Structural Example of Semiconductor Device> and <Variation 1 of Semiconductor Device> can be used as the materials for forming the transistor 200.

[0373] 19A and 19B show a configuration in which multiple transistors (transistors 200_1 to 200_n) are encapsulated with an insulator 287, an insulator 283, and an insulator 212. Note that although the multiple transistors appear to be aligned in the channel length direction in FIGS. 19A and 19B, this is not the only possible arrangement. The multiple transistors may be aligned in the channel width direction or may be arranged in a matrix. Furthermore, the transistors may be arranged without any regularity depending on the design.

[0374] 19A, a portion (hereinafter sometimes referred to as a sealing portion 265) where the insulator 287 and the insulator 283 contact the insulator 212 is formed outside the plurality of transistors (transistors 200_1 to 200_n). The sealing portion 265 is formed so as to surround the plurality of transistors (also referred to as a transistor group). With this structure, the plurality of transistors can be enclosed by the insulator 287, the insulator 283, and the insulator 212. Thus, a plurality of transistor groups surrounded by the sealing portion 265 are provided on the substrate.

[0375] Also, dicing lines (which may be called scribe lines, division lines, or cutting lines) may be provided overlapping the sealing portion 265. Since the substrate is divided along the dicing lines, a group of transistors surrounded by the sealing portion 265 is taken out as one chip.

[0376] 19A shows an example in which multiple transistors (transistors 200_1 to 200_n) are surrounded by one sealing portion 265, but the present invention is not limited to this. As shown in FIG 19B, multiple transistors may be surrounded by multiple sealing portions. In FIG 19B, multiple transistors are surrounded by a sealing portion 265a and further surrounded by an outer sealing portion 265b.

[0377] In this manner, by using a configuration in which multiple transistors (transistors 200_1 to 200_n) are surrounded by multiple sealing portions, the contact area between the insulator 287 and the insulator 212 increases, which can further improve the adhesion between the insulator 287 and the insulator 212. This makes it possible to more reliably seal the multiple transistors.

[0378] In this case, a dicing line may be provided so as to overlap sealing portion 265a or sealing portion 265b, or a dicing line may be provided between sealing portion 265a and sealing portion 265b.

[0379] According to one embodiment of the present invention, a semiconductor device with little variation in transistor characteristics can be provided. According to one embodiment of the present invention, a semiconductor device with high reliability can be provided. According to one embodiment of the present invention, a semiconductor device with good electrical characteristics can be provided. According to one embodiment of the present invention, a semiconductor device with large on-state current can be provided. According to one embodiment of the present invention, a semiconductor device that can be miniaturized or highly integrated can be provided.

[0380] The structures, methods, and the like described in the above-described embodiment modes can be used in appropriate combination with structures, methods, and the like described in other embodiment modes, examples, and the like.

[0381] (Embodiment 2) In this embodiment, one mode of a semiconductor device will be described with reference to FIGS.

[0382] [Storage device 1] 20 illustrates an example of a semiconductor device (memory device) according to one embodiment of the present invention. In the semiconductor device of one embodiment of the present invention, the transistor 200 is provided above the transistor 300, and the capacitor 100 is provided above the transistor 300 and the transistor 200. Note that the transistor 200 described in the above embodiment can be used as the transistor 200.

[0383] The transistor 200 is a transistor in which a channel is formed in a semiconductor layer including an oxide semiconductor. Since the off-state current of the transistor 200 is small, stored data can be retained for a long time by using the transistor 200 in a memory device. In other words, a refresh operation is not required or the frequency of the refresh operation is extremely low, so that the power consumption of the memory device can be sufficiently reduced.

[0384] 20, a wiring 1001 is electrically connected to a source of a transistor 300, and a wiring 1002 is electrically connected to a drain of the transistor 300. A wiring 1003 is electrically connected to one of a source and a drain of the transistor 200, a wiring 1004 is electrically connected to a first gate of the transistor 200, and a wiring 1006 is electrically connected to a second gate of the transistor 200. The gate of the transistor 300 and the other of the source and drain of the transistor 200 are electrically connected to one electrode of the capacitor 100, and a wiring 1005 is electrically connected to the other electrode of the capacitor 100.

[0385] Moreover, the memory device shown in FIG. 20 can be arranged in a matrix to form a memory cell array.

[0386] <Transistor 300> The transistor 300 is provided on a substrate 311 and includes a conductor 316 functioning as a gate, an insulator 315 functioning as a gate insulator, a semiconductor region 313 formed of a part of the substrate 311, and a low-resistance region 314a and a low-resistance region 314b functioning as a source region or a drain region. The transistor 300 may be either a p-channel type or an n-channel type.

[0387] Here, in the transistor 300 shown in FIG. 20, a semiconductor region 313 (a part of a substrate 311) in which a channel is formed has a convex shape. A conductor 316 is provided so as to cover the side and top surface of the semiconductor region 313 via an insulator 315. Note that the conductor 316 may be made of a material that adjusts the work function. Such a transistor 300 is also called a FIN type transistor because it uses a convex portion of a semiconductor substrate. Note that an insulator that contacts the upper portion of the convex portion and functions as a mask for forming the convex portion may be provided. Note that, although a case where a convex portion is formed by processing a part of a semiconductor substrate has been shown here, a semiconductor film having a convex shape may be formed by processing an SOI substrate.

[0388] Note that the transistor 300 illustrated in FIG. 20 is just an example, and the structure is not limited thereto. An appropriate transistor may be used depending on the circuit configuration and driving method.

[0389] <Capacitive element 100> The capacitor 100 is provided above the transistor 200. The capacitor 100 includes a conductor 110 that functions as a first electrode, a conductor 120 that functions as a second electrode, and an insulator 130 that functions as a dielectric. Here, the insulator 130 is preferably an insulator that can be used as the insulator 286 described in the above embodiment.

[0390] For example, the conductor 112 over the conductor 240 and the conductor 110 can be formed at the same time. Note that the conductor 112 functions as a plug or a wiring electrically connected to the capacitor 100, the transistor 200, or the transistor 300.

[0391] 20, the conductor 112 and the conductor 110 are shown as having a single-layer structure, but are not limited to this structure and may have a stacked structure of two or more layers. For example, a conductor having barrier properties and a conductor having high adhesion to the conductor having high conductivity may be formed between a conductor having barrier properties and a conductor having high conductivity.

[0392] The insulator 130 can be made of, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, hafnium oxide, hafnium oxynitride, hafnium nitride oxide, hafnium nitride, or the like, and can be provided as a stacked layer or a single layer.

[0393] For example, it is preferable to use a laminated structure of a material with high dielectric strength, such as silicon oxynitride, and a high dielectric constant (high-k) material for the insulator 130. With this configuration, the capacitance element 100 can ensure sufficient capacitance by having an insulator with high dielectric constant (high-k), and the capacitance element 100 can have improved dielectric strength by having an insulator with high dielectric strength, thereby suppressing electrostatic breakdown of the capacitance element 100.

[0394] Examples of high dielectric constant (high-k) materials (materials with a high relative dielectric constant) include gallium oxide, hafnium oxide, zirconium oxide, oxides having aluminum and hafnium, oxynitrides having aluminum and hafnium, oxides having silicon and hafnium, oxynitrides having silicon and hafnium, and nitrides having silicon and hafnium.

[0395] On the other hand, materials with high dielectric strength (materials with low dielectric constant) include silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide with added fluorine, silicon oxide with added carbon, silicon oxide with added carbon and nitrogen, silicon oxide or resin with voids, etc.

[0396] <Wiring layer> Between each structure, a wiring layer having an interlayer film, wiring, plugs, etc. may be provided. Also, a plurality of wiring layers may be provided according to the design. Here, a conductor having a function as a plug or wiring may be collectively given the same symbol as a plurality of structures. Also, in this specification, the wiring and the plug electrically connected to the wiring may be integrated. That is, there are cases where a part of the conductor functions as the wiring, and cases where a part of the conductor functions as the plug.

[0397] For example, an insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order as an interlayer film over the transistor 300. A conductor 328, a conductor 330, and the like that are electrically connected to the capacitor 100 or the transistor 200 are embedded in the insulator 320, the insulator 322, the insulator 324, and the insulator 326. The conductor 328 and the conductor 330 function as plugs or wirings.

[0398] The insulator functioning as an interlayer film may also function as a planarizing film that covers the uneven shape underneath. For example, the top surface of the insulator 322 may be planarized by a planarization process using a chemical mechanical polishing (CMP) method or the like to enhance flatness.

[0399] A wiring layer may be provided on the insulator 326 and the conductor 330. For example, in Fig. 20, an insulator 350, an insulator 352, and an insulator 354 are stacked in this order. Furthermore, a conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or a wiring.

[0400] Similarly, a conductor 218, a conductor constituting the transistor 200 (conductor 205), and the like are embedded in the insulators 210, 212, 214, and 216. Note that the conductor 218 functions as a plug or wiring electrically connected to the capacitor 100 or the transistor 300. Furthermore, an insulator 150 is provided over the conductor 120 and the insulator 130.

[0401] Here, similarly to the insulator 241 described in the above embodiment, the insulator 217 is provided in contact with the side surface of the conductor 218 functioning as a plug. The insulator 217 is provided in contact with the side wall of the opening formed in the insulators 210, 212, 214, and 216. In other words, the insulator 217 is provided between the conductor 218 and the insulators 210, 212, 214, and 216. Note that the conductor 205 can be formed in parallel with the conductor 218, and therefore the insulator 217 may be formed in contact with the side surface of the conductor 205.

[0402] As the insulator 217, for example, an insulator such as silicon nitride, aluminum oxide, or silicon nitride oxide may be used. Since the insulator 217 is provided in contact with the insulator 212, the insulator 214, and the insulator 222, it is possible to prevent impurities such as water or hydrogen from the insulator 210 or the insulator 216 from being mixed into the oxide 230 through the conductor 218. In particular, silicon nitride is preferable because it has a high blocking property against hydrogen. In addition, it is possible to prevent oxygen contained in the insulator 210 or the insulator 216 from being absorbed by the conductor 218.

[0403] The insulator 217 can be formed by a method similar to that of the insulator 241. For example, a silicon nitride film is formed by a PEALD method, and an opening reaching the conductor 356 is formed by anisotropic etching.

[0404] Examples of insulators that can be used as the interlayer film include insulating oxides, nitrides, oxynitrides, nitride oxides, metal oxides, metal oxynitrides, and metal nitride oxides.

[0405] For example, by using a material with a low dielectric constant for the insulator that functions as an interlayer film, the parasitic capacitance generated between wirings can be reduced. Therefore, it is advisable to select a material according to the function of the insulator.

[0406] For example, the insulator 150, the insulator 210, the insulator 352, the insulator 354, etc. preferably have an insulator with a low relative dielectric constant. For example, the insulator preferably has silicon oxynitride, silicon nitride, silicon oxide to which fluorine has been added, silicon oxide to which carbon has been added, silicon oxide to which carbon and nitrogen have been added, silicon oxide having voids, or resin. Alternatively, the insulator preferably has a laminated structure of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine has been added, silicon oxide to which carbon has been added, silicon oxide to which carbon and nitrogen has been added, or silicon oxide having voids, and resin. Silicon oxide and silicon oxynitride are thermally stable, and therefore can be combined with a resin to form a laminated structure that is thermally stable and has a low relative dielectric constant. Examples of the resin include polyester, polyolefin, polyamide (nylon, aramid, etc.), polyimide, polycarbonate, and acrylic.

[0407] Furthermore, when a transistor using an oxide semiconductor is surrounded by an insulator that has a function of suppressing the permeation of oxygen and impurities such as hydrogen, the electrical characteristics of the transistor can be stabilized. Therefore, the insulator 214, the insulator 212, the insulator 350, and the like can be made of an insulator that has a function of suppressing the permeation of oxygen and impurities such as hydrogen.

[0408] As an insulator having a function of suppressing the permeation of impurities such as hydrogen and oxygen, for example, an insulator containing boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, or tantalum may be used in a single layer or a stacked layer. Specifically, as an insulator having a function of suppressing the permeation of impurities such as hydrogen and oxygen, metal oxides such as aluminum oxide, magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, or tantalum oxide, silicon nitride oxide, or silicon nitride may be used.

[0409] Conductors that can be used for wiring and plugs include materials containing one or more metal elements selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, etc. Also, semiconductors with high electrical conductivity, typified by polycrystalline silicon containing impurity elements such as phosphorus, and silicides such as nickel silicide may be used.

[0410] For example, the conductor 328, the conductor 330, the conductor 356, the conductor 218, the conductor 112, etc. can be formed of a single layer or a stack of conductive materials such as metal materials, alloy materials, metal nitride materials, or metal oxide materials formed from the above materials. It is preferable to use a high melting point material such as tungsten or molybdenum that has both heat resistance and conductivity, and it is particularly preferable to use tungsten. Alternatively, it is preferable to form them from a low resistance conductive material such as aluminum or copper. By using a low resistance conductive material, the wiring resistance can be reduced.

[0411] <Wiring or plug of layer provided with oxide semiconductor> Note that when an oxide semiconductor is used for the transistor 200, an insulator having an excess oxygen region may be provided near the oxide semiconductor. In that case, an insulator having a barrier property is preferably provided between the insulator having the excess oxygen region and a conductor provided in the insulator having the excess oxygen region.

[0412] 20, for example, an insulator 241 may be provided between the insulator 224 and the insulator 280 having excess oxygen and the conductor 240. By providing the insulator 241 in contact with the insulator 222, the insulator 282, the insulator 287, and the insulator 283, the insulator 224 and the transistor 200 can be sealed with an insulator having barrier properties.

[0413] In other words, the insulator 241 can prevent excess oxygen contained in the insulator 224 and the insulator 280 from being absorbed by the conductor 240. Furthermore, the insulator 241 can prevent hydrogen, which is an impurity, from diffusing into the transistor 200 through the conductor 240.

[0414] As the insulator 241, an insulating material having a function of suppressing the diffusion of impurities such as water or hydrogen, and oxygen, may be used. For example, it is preferable to use silicon nitride, silicon nitride oxide, aluminum oxide, or hafnium oxide. In particular, silicon nitride is preferable because it has a high blocking property against hydrogen. In addition, other metal oxides such as magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, or tantalum oxide may be used.

[0415] As in the above embodiment, the transistor 200 is preferably sealed with the insulators 212, 214, 282, 287, and 283. Such a structure can reduce impurities (especially hydrogen and water) contained in the insulators 274, 150, and the like from being mixed into the insulator 280 and the like.

[0416] Here, the conductor 240 penetrates the insulator 283, the insulator 287, and the insulator 282, and the conductor 218 penetrates the insulator 214 and the insulator 212, but as described above, the insulator 241 is provided in contact with the conductor 240, and the insulator 217 is provided in contact with the conductor 218. This makes it possible to reduce hydrogen that is mixed into the inside of the insulators 212, 214, 282, 287, and 283 through the conductors 240 and 218. In this way, the transistor 200 can be more reliably sealed with the insulators 212, 214, 282, 287, 283, 241, and 217, and impurities such as hydrogen contained in the insulator 274 and the like can be reduced from being mixed into the transistor 200.

[0417] Furthermore, as described in the above embodiment, the insulators 216, 224, 280, 250, and 274 are preferably formed by a film formation method using a gas in which hydrogen atoms are reduced or removed, thereby reducing the hydrogen concentrations in the insulators 216, 224, 280, 250, and 274.

[0418] In this manner, the hydrogen concentration in the silicon-based insulating film in the vicinity of the transistor 200 can be reduced, and the hydrogen concentration in the oxide 230 can be reduced.

[0419] <Dicing line> In the following, a dicing line (sometimes called a scribe line, a dividing line, or a cutting line) that is provided when a large-area substrate is divided into individual semiconductor elements to extract multiple semiconductor devices in chip form will be described. As a dividing method, for example, first, grooves (dicing lines) for dividing the semiconductor elements are formed in the substrate, and then the substrate is cut along the dicing lines to divide (split) the substrate into multiple semiconductor devices.

[0420] 20, for example, it is preferable to design the insulator 282, the insulator 280, the insulator 254, the insulator 224, the insulator 222, the insulator 216, and the insulator 214 so that the regions where the insulators 287 and 283 contact with the insulator 212 overlap with the dicing lines. That is, openings are provided in the insulators 282, 280, 254, 224, 222, 216, and 214 near the regions that become the dicing lines provided on the outer edge of the memory cell having the multiple transistors 200.

[0421] That is, in the openings provided in the insulators 282, 280, 254, 224, 222, 216, and 214, the insulators 212, 287, and 283 are in contact with each other. For example, the insulators 212, 287, and 283 may be formed using the same material and the same method. By providing the insulators 212, 287, and 283 using the same material and the same method, adhesion can be improved. For example, it is preferable to use silicon nitride.

[0422] With this structure, the transistor 200 can be surrounded by the insulator 212, the insulator 214, the insulator 282, the insulator 287, and the insulator 283. At least one of the insulator 212, the insulator 214, the insulator 282, the insulator 287, and the insulator 283 has a function of suppressing diffusion of oxygen, hydrogen, and water, and therefore, even if the substrate is divided into a plurality of chips by dividing the substrate into each circuit region in which the semiconductor element shown in this embodiment is formed, impurities such as hydrogen or water can be prevented from entering from the side direction of the divided substrate and diffusing into the transistor 200.

[0423] This structure can prevent excess oxygen in the insulator 280 and the insulator 224 from diffusing to the outside. Therefore, the excess oxygen in the insulator 280 and the insulator 224 is efficiently supplied to the oxide in which a channel is formed in the transistor 200. The oxygen can reduce oxygen vacancies in the oxide in which a channel is formed in the transistor 200. As a result, the oxide in which a channel is formed in the transistor 200 can be an oxide semiconductor with low density of defect states and stable characteristics. That is, fluctuations in the electrical characteristics of the transistor 200 can be suppressed and reliability can be improved.

[0424] In the memory device shown in Fig. 20, the shape of the capacitor 100 is a planar type, but the memory device shown in this embodiment is not limited to this. For example, the shape of the capacitor 100 may be a cylindrical type as shown in Fig. 21. In the memory device shown in Fig. 21, the configuration below the insulator 150 is similar to that of the semiconductor device shown in Fig. 20.

[0425] Moreover, the insulator 150 is provided on the insulator 130, and the insulator 142 is provided on the insulator 150. Note that openings are formed in the insulator 150 and the insulator 142.

[0426] 21 has a conductor 115, an insulator 145 on the conductor 115 and the insulator 142, and a conductor 125 on the insulator 145. Here, at least a portion of the conductor 115, the insulator 145, and the conductor 125 are disposed in the opening.

[0427] The conductor 115 functions as the lower electrode of the capacitance element 100, the conductor 125 functions as the upper electrode of the capacitance element 100, and the insulator 145 functions as the dielectric of the capacitance element 100. The capacitance element 100 has a configuration in which the upper electrode and the lower electrode face each other across the dielectric not only on the bottom surface but also on the side surface in the openings of the insulators 150 and 142, and the capacitance per unit area can be increased. Therefore, the deeper the opening is, the larger the capacitance of the capacitance element 100 can be. Increasing the capacitance per unit area of ​​the capacitance element 100 in this way can promote miniaturization or high integration of semiconductor devices.

[0428] An insulator 152 is provided on the conductor 125 and the insulator 145 .

[0429] The insulator 152 may be made of an insulator that can be used for the insulator 280. The insulator 142 preferably functions as an etching stopper when forming an opening in the insulator 150, and may be made of an insulator that can be used for the insulator 214.

[0430] The shape of the openings formed in the insulator 150 and the insulator 142 when viewed from above may be a rectangle, a polygon other than a rectangle, a polygon with rounded corners, or a circle including an ellipse. Here, it is preferable that the area of ​​the opening overlapping with the transistor 200 when viewed from above is large. With such a configuration, the area occupied by a semiconductor device including the capacitor 100 and the transistor 200 can be reduced.

[0431] The conductor 115 is disposed in contact with the insulator 142 and an opening formed in the insulator 150. The upper surface of the conductor 115 preferably approximately coincides with the upper surface of the insulator 142. The lower surface of the conductor 115 is in contact with the conductor 110 through the opening of the insulator 130. The conductor 115 is preferably formed by an ALD method, a CVD method, or the like, and may be, for example, a conductor that can be used for the conductor 205.

[0432] The insulator 145 is disposed so as to cover the conductor 115 and the insulator 142. For example, the insulator 145 is preferably formed by an ALD method, a CVD method, or the like. The insulator 145 may be formed using, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, zirconium oxide, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, hafnium oxide, hafnium oxynitride, hafnium nitride oxide, hafnium nitride, or the like, and may be provided as a stacked layer or a single layer. For example, the insulator 145 may be an insulating film stacked in this order of zirconium oxide, aluminum oxide, and zirconium oxide.

[0433] Moreover, it is preferable to use a material with high dielectric strength, such as silicon oxynitride, or a high dielectric constant (high-k) material for the insulator 145. Alternatively, a laminated structure of a material with high dielectric strength and a material with high dielectric constant (high-k) may be used.

[0434] Examples of high-dielectric constant (high-k) materials (materials with a high relative dielectric constant) include gallium oxide, hafnium oxide, zirconium oxide, oxides having aluminum and hafnium, oxynitrides having aluminum and hafnium, oxides having silicon and hafnium, oxynitrides having silicon and hafnium, and nitrides having silicon and hafnium. By using such high-k materials, the capacitance of the capacitance element 100 can be sufficiently secured even if the insulator 145 is made thick. By making the insulator 145 thick, the leakage current occurring between the conductor 115 and the conductor 125 can be suppressed.

[0435] On the other hand, materials with high dielectric strength include silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, silicon oxide having vacancies, resin, etc. For example, an insulating film formed in the order of silicon nitride formed by the ALD method, silicon oxide formed by the PEALD method, and silicon nitride formed by the ALD method can be used. By using such an insulator with high dielectric strength, the dielectric strength is improved and electrostatic breakdown of the capacitance element 100 can be suppressed.

[0436] The conductor 125 is disposed so as to fill the openings formed in the insulator 142 and the insulator 150. The conductor 125 is electrically connected to the wiring 1005 via the conductor 140 and the conductor 153. The conductor 125 is preferably formed by an ALD method, a CVD method, or the like, and may be formed using a conductor that can be used for the conductor 205, for example.

[0437] The conductor 153 is provided over the insulator 154 and is covered with the insulator 156. The conductor 153 may be any conductor that can be used for the conductor 112, and the insulator 156 may be any insulator that can be used for the insulator 152. Here, the conductor 153 is in contact with the top surface of the conductor 140 and functions as a terminal of the capacitor 100, the transistor 200, or the transistor 300.

[0438] The structures, methods, and the like described in the above-described embodiment modes can be used in appropriate combination with structures, methods, and the like described in other embodiment modes, examples, and the like.

[0439] (Embodiment 3) In this embodiment mode, one mode of a semiconductor device will be described with reference to FIGS.

[0440] [Storage device 2] An example of a semiconductor device (memory device) in this embodiment mode is shown in FIG.

[0441] <Memory device configuration example> Fig. 22 is a cross-sectional view of a semiconductor device including a memory device 290. The memory device 290 shown in Fig. 22 includes a capacitor device 292 in addition to the transistor 200 shown in Fig. 4A to Fig. 4D. Fig. 22 corresponds to a cross-sectional view of the transistor 200 in the channel length direction.

[0442] 22, structures having the same functions as those of the structures constituting the semiconductor device shown in the previous embodiment are denoted by the same reference numerals. Also in this section, the materials described in detail in the previous embodiment can be used as the materials constituting the semiconductor device.

[0443] 22, the memory device 290 is preferably sealed with an insulator 283 and an insulator 212. This configuration can prevent impurities (particularly hydrogen and water) from entering the memory device 290. As shown in the above embodiment, an insulator 287 may be provided between the memory device 290 and the insulator 283.

[0444] The capacitance device 292 has a conductor 242b, an insulator 293 provided on the conductor 242b, and a conductor 294 provided on the insulator 293. That is, the capacitance device 292 configures a MIM (Metal-Insulator-Metal) capacitance. Note that one of a pair of electrodes of the capacitance device 292, that is, the conductor 242b, can also serve as a source electrode or a drain electrode of a transistor. Therefore, a part of the manufacturing process of the transistor can be used in the manufacturing process of the capacitance device 292, so that a semiconductor device with high productivity can be obtained. In addition, it is possible to reduce the area in which the transistor and the capacitance device are arranged.

[0445] The conductor 294 may be made of, for example, a material that can be used for the conductor 240.

[0446] The insulator 293 may have a stacked structure of, for example, zirconium oxide, aluminum oxide, and zirconium oxide. For example, any material that can be used for the insulator 130 may be used for the insulator 293, and may be provided as a stacked layer or a single layer.

[0447] 22, an insulator 160 functioning as an interlayer film is provided over a transistor 200 and a capacitor device 292. A conductor 166 electrically connected to the transistor 200 is embedded in the insulator 283 and the insulator 160. The conductor 166 functions as a plug or a wiring.

[0448] A wiring layer may be provided on the insulator 160 and the conductor 166. For example, as shown in Fig. 22, an insulator 162 and an insulator 164 are laminated in this order. A conductor 168 is embedded in the insulator 162 and the insulator 164. The conductor 168 functions as a plug or a wiring.

[0449] It is preferable that the insulator 160 and the insulator 164 have a low relative dielectric constant. For example, the insulator 160 and the insulator 164 may be an insulator that can be used for the insulator 352, etc.

[0450] An insulator having a function of suppressing permeation of oxygen and impurities such as hydrogen may be used as the insulator 162. For example, an insulator that can be used for the insulator 350, etc. may be used as the insulator 162.

[0451] The memory devices 290 may be stacked. Fig. 23 shows a cross-sectional view of a storage device in which five layers each having a memory device 290 are stacked. As shown in Fig. 23, the memory devices 290 are electrically connected to other memory devices 290 via the conductors 240 and 166.

[0452] As shown in FIG. 23, a plurality of memory devices (memory devices 290_1 to 290_5) may be encapsulated and sealed with the insulator 283 and the insulator 212. By encapsulating and sealing a plurality of memory devices, a manufacturing process of a storage device can be simplified. By forming a part of a structure constituting the transistor 200 and a part of a structure provided around the transistor 200 by a sputtering method, the hydrogen concentration of the transistor 200 can be reduced. Therefore, even when a different transistor 200 is formed above the transistor 200, the hydrogen concentration of the transistor 200 located below can be kept low. Therefore, when the memory devices 290 are stacked, the hydrogen concentration in the transistor 200 can be reduced by encapsulating and sealing a plurality of memory devices without sealing each memory device 290 individually.

[0453] The sealing of the multiple memory devices with the insulators 283 and 212 may be performed to comprehensively seal all of the multiple memory devices, or may be performed to comprehensively seal each of the multiple memory devices.

[0454] When the same material is used for the insulators 214 and 282, it is not necessary to provide either the insulator 214 or the insulator 282. This can reduce the number of manufacturing processes of the memory device.

[0455] 23, by stacking a plurality of memory devices (memory devices 290_1 to 290_5), the memory devices can be integrated and arranged without increasing the area occupied by the memory devices. In other words, a 3D memory device can be configured.

[0456] In addition, although the configuration in which each layer has one memory device is illustrated in Fig. 23, the present invention is not limited to this. As shown in the above <Application Example of Semiconductor Device>, each layer may have multiple memory devices, and the multiple memory devices may be arranged in the channel length direction, the channel width direction, or in a matrix. Also, they may be arranged without any regularity depending on the design.

[0457] <Modifications of memory device> An example of a semiconductor device having a transistor 200 and a capacitance device 292 according to the present embodiment, which is different from the semiconductor device shown in the previous <Configuration Example of Memory Device>, will be described below with reference to Figures 24A, 24B, and 25. Note that in the semiconductor device shown in Figures 24A, 24B, and 25, structures having the same functions as those of the semiconductor device shown in the previous embodiment and Figure 22 are denoted by the same reference numerals. Note that in this section, the materials constituting the transistor 200 and the capacitance device 292 can be the materials described in detail in the previous embodiment and in the previous <Configuration Example of Memory Device>.

[0458] <<Memory Device Variation 1>> 24A and 24B, an example of a semiconductor device including a memory device 600 will be described. The memory device 600 includes a transistor 200a, a transistor 200b, a capacitor device 292a, and a capacitor device 292b.

[0459] Fig. 24A is a top view of a semiconductor device having a memory device 600. Fig. 24B is a cross-sectional view of a portion indicated by a dashed line A1-A2 in Fig. 24A, and is also a cross-sectional view in the channel length direction of transistors 200a and 200b. Note that some elements are omitted from the top view of Fig. 24A for clarity.

[0460] As shown in FIG. 24B, the memory device 600 has a linear symmetrical configuration with the dashed line A3-A4 as the axis of symmetry. One of the source electrode or drain electrode of the transistor 200a and one of the source electrode or drain electrode of the transistor 200b are both served by the conductor 242c. Moreover, the conductor electrically connected to the transistor 200a and functioning as a plug and the conductor electrically connected to the transistor 200b and functioning as a plug are both served by the conductor 240c. Moreover, an insulator 241c is provided in contact with the side surface of the conductor 240c.

[0461] In this manner, by configuring two transistors, two capacitance devices, and connections between wiring and plugs as described above, it is possible to provide a semiconductor device that allows miniaturization or high integration.

[0462] The configuration examples of the semiconductor device illustrated in FIGS. 4A to 4D and 22 can be referred to for the configurations and effects of the transistor 200a, the transistor 200b, the capacitor device 292a, and the capacitor device 292b.

[0463] <<Memory Device Modification 2>> FIG. 25 shows an example in which a memory unit 470 includes a transistor layer 413 including a transistor 200T and four memory device layers 415 (memory device layers 415_1 to 415_4).

[0464] Each of the memory device layers 415_1 to 415_4 includes a plurality of memory devices 420. For the memory device 420, for example, the memory device 290 shown in Fig. 22 or the memory device 600 shown in Fig. 24A and Fig. 24B can be used.

[0465] Memory device 420 is electrically connected to memory device 420 in a different memory device layer 415 and transistor 200T in transistor layer 413 via electrical conductor 424 and electrical conductor 166.

[0466] The memory unit 470 is sealed by the insulator 212, the insulator 214, the insulator 282, and the insulator 283 (for convenience, this is referred to as a sealed structure below). An insulator 274 is provided around the insulator 283. A conductor 440 is provided in the insulators 274, 283, and 212 and is electrically connected to the element layer 411. Note that an insulator 287 may be provided between the memory unit 470 and the insulator 283.

[0467] Note that the insulators 212 and 283 are preferably made of a material having a high blocking property against hydrogen, and the insulators 214 and 282 are preferably made of a material having a function of capturing or fixing hydrogen.

[0468] For example, the material having a high blocking property against hydrogen includes silicon nitride, silicon oxynitride, etc. Furthermore, the material having a function of capturing or fixing hydrogen includes aluminum oxide, hafnium oxide, and oxide containing aluminum and hafnium (hafnium aluminate), etc.

[0469] Note that the crystal structure of the materials used for the insulators 212, 214, 282, and 283 is not particularly limited, and may be an amorphous or crystalline structure. For example, an amorphous aluminum oxide film is preferably used as a material having a function of trapping or fixing hydrogen. Amorphous aluminum oxide may trap and fix a larger amount of hydrogen than aluminum oxide with high crystallinity.

[0470] Moreover, an insulator 282 and an insulator 214 are preferably provided between the transistor layer 413 and the memory device layer 415_1 or between each memory device layer 415. Moreover, an insulator 296 is preferably provided between the insulator 282 and the insulator 214. The insulator 296 can be made of a material similar to that of the insulator 283. Alternatively, silicon oxide or silicon oxynitride can be used. Alternatively, a known insulating material can be used.

[0471] Further, an insulator 280 is provided inside the sealing structure. The insulator 280 has a function of releasing oxygen when heated. Alternatively, the insulator 280 has an excess oxygen region.

[0472] Here, the following model can be considered for the diffusion of excess oxygen in the insulator 280 and hydrogen in the oxide semiconductor in contact with the insulator 280.

[0473] Hydrogen present in the oxide semiconductor diffuses to other structures through the insulator 280 in contact with the oxide semiconductor. The hydrogen forms an OH bond with excess oxygen in the insulator 280 and diffuses through the insulator 280 as OH. When the hydrogen atom having the OH bond reaches a material (typically the insulator 282) having a function of capturing or fixing hydrogen, the hydrogen atom reacts with an oxygen atom bonded to an atom (e.g., a metal atom) in the insulator 282 and is captured or fixed in the insulator 282. On the other hand, the excess oxygen having the OH bond is presumed to remain in the insulator 280 as excess oxygen. That is, there is a high probability that the excess oxygen in the insulator 280 plays a role of bridging in the diffusion of the hydrogen.

[0474] In order to satisfy the above model, the manufacturing process of the semiconductor device is one of the important factors.

[0475] As an example, the insulator 280 containing excess oxygen is formed over an oxide semiconductor, and then the insulator 282 is formed. After that, heat treatment is preferably performed. Specifically, the heat treatment is performed in an atmosphere containing oxygen, an atmosphere containing nitrogen, or an atmosphere containing a mixture of oxygen and nitrogen at a temperature of 350° C. or higher, preferably 400° C. or higher. The heat treatment time is 1 hour or longer, preferably 4 hours or longer, and more preferably 8 hours or longer.

[0476] By the above heat treatment, hydrogen in the oxide semiconductor can diffuse outward through the insulator 280 and the insulator 282. That is, the absolute amount of hydrogen present in the oxide semiconductor and in the vicinity of the oxide semiconductor can be reduced.

[0477] After the heat treatment, the insulator 283 is formed. The insulator 283 is a material having a high blocking property against hydrogen, and therefore can prevent hydrogen diffused to the outside or hydrogen present on the outside from entering the inside, specifically, the oxide semiconductor or the insulator 280 side.

[0478] Note that the above heat treatment is exemplified as a process performed after the insulator 282 is formed, but is not limited thereto. For example, the heat treatment may be performed after the transistor layer 413 is formed or after the memory device layers 415_1 to 415_3 are formed. When hydrogen is diffused outward by the heat treatment, hydrogen is diffused upward or laterally of the transistor layer 413. Similarly, when the heat treatment is performed after the memory device layers 415_1 to 415_3 are formed, hydrogen is diffused upward or laterally.

[0479] By using the above manufacturing process, the insulator 212 and the insulator 283 are bonded to each other, thereby forming the above-described sealing structure.

[0480] According to the above, a semiconductor device with high reliability and a manufacturing method thereof can be provided. According to one embodiment of the present invention, a semiconductor device with good electrical characteristics and a manufacturing method thereof can be provided.

[0481] The configurations, structures, methods, and the like described in this embodiment mode can be used in appropriate combination with the configurations, structures, methods, and the like described in other embodiment modes, examples, and the like.

[0482] (Embodiment 4) 26A, 26B, and 27A to 27H will be used to describe a transistor using an oxide as a semiconductor (hereinafter may be referred to as an OS transistor) and a memory device including a capacitor (hereinafter may be referred to as an OS memory device) according to one embodiment of the present invention. The OS memory device is a memory device including at least a capacitor and an OS transistor that controls charging and discharging of the capacitor. Since the off-state current of the OS transistor is extremely small, the OS memory device has excellent retention characteristics and can function as a nonvolatile memory.

[0483] <Storage device configuration example> 26A shows an example of the configuration of an OS memory device. The memory device 1400 includes a peripheral circuit 1411 and a memory cell array 1470. The peripheral circuit 1411 includes a row circuit 1420, a column circuit 1430, an output circuit 1440, and a control logic circuit 1460.

[0484] The column circuit 1430 includes, for example, a column decoder, a precharge circuit, a sense amplifier, a write circuit, and the like. The precharge circuit has a function of precharging the wiring. The sense amplifier has a function of amplifying a data signal read from a memory cell. Note that the above wiring is a wiring connected to a memory cell included in the memory cell array 1470, and will be described in detail later. The amplified data signal is output to the outside of the memory device 1400 as a data signal RDATA via the output circuit 1440. The row circuit 1420 includes, for example, a row decoder, a word line driver circuit, and the like, and can select a row to be accessed.

[0485] A low power supply voltage (VSS), a high power supply voltage (VDD) for the peripheral circuit 1411, and a high power supply voltage (VIL) for the memory cell array 1470 are supplied to the memory device 1400 from the outside as power supply voltages. In addition, control signals (CE, WE, RE), an address signal ADDR, and a data signal WDATA are input from the outside to the memory device 1400. The address signal ADDR is input to a row decoder and a column decoder, and the data signal WDATA is input to a write circuit.

[0486] The control logic circuit 1460 processes control signals (CE, WE, RE) input from the outside to generate control signals for the row decoder and column decoder. The control signal CE is a chip enable signal, the control signal WE is a write enable signal, and the control signal RE is a read enable signal. The signals processed by the control logic circuit 1460 are not limited to these, and other control signals may be input as necessary.

[0487] The memory cell array 1470 has a plurality of memory cells MC arranged in a matrix and a plurality of wirings. The number of wirings connecting the memory cell array 1470 and the row circuit 1420 is determined by the configuration of the memory cells MC, the number of memory cells MC in one column, etc. The number of wirings connecting the memory cell array 1470 and the column circuit 1430 is determined by the configuration of the memory cells MC, the number of memory cells MC in one row, etc.

[0488] 26A shows an example in which the peripheral circuit 1411 and the memory cell array 1470 are formed on the same plane, but the present embodiment is not limited to this. For example, as shown in FIG. 26B, the memory cell array 1470 may be provided so as to overlap a part of the peripheral circuit 1411. For example, a sense amplifier may be provided so as to overlap the memory cell array 1470 below.

[0489] 27A to 27H will be used to explain examples of the configuration of a memory cell that can be applied to the above-mentioned memory cell MC.

[0490] [DOSRAM] 27A to 27C show circuit configuration examples of a DRAM memory cell. In this specification and the like, a DRAM using a memory cell with one OS transistor and one capacitor may be called a DOSRAM (Dynamic Oxide Semiconductor Random Access Memory). The memory cell 1471 shown in FIG. 27A includes a transistor M1 and a capacitor CA. Note that the transistor M1 includes a gate (sometimes called a top gate) and a back gate.

[0491] A first terminal of the transistor M1 is connected to a first terminal of the capacitance element CA, a second terminal of the transistor M1 is connected to a wiring BIL, a gate of the transistor M1 is connected to a wiring WOL, a back gate of the transistor M1 is connected to a wiring BGL, and a second terminal of the capacitance element CA is connected to a wiring CAL.

[0492] The wiring BIL functions as a bit line, and the wiring WOL functions as a word line. The wiring CAL functions as a wiring for applying a predetermined potential to the second terminal of the capacitor CA. When writing and reading data, it is preferable to apply a low-level potential to the wiring CAL. The wiring BGL functions as a wiring for applying a potential to the back gate of the transistor M1. The threshold voltage of the transistor M1 can be increased or decreased by applying an arbitrary potential to the wiring BGL.

[0493] Here, the memory cell 1471 shown in Fig. 27A corresponds to the memory device shown in Fig. 22. That is, the transistor M1 corresponds to the transistor 200, and the capacitance element CA corresponds to the capacitance device 292.

[0494] The memory cell MC is not limited to the memory cell 1471, and the circuit configuration can be changed. For example, the memory cell MC may be configured such that the back gate of the transistor M1 is connected to the wiring WOL instead of the wiring BGL, as in the memory cell 1472 shown in FIG. 27B. For example, the memory cell MC may be configured as a single-gate transistor, that is, a memory cell configured with a transistor M1 without a back gate, as in the memory cell 1473 shown in FIG. 27C.

[0495] When the semiconductor device described in the above embodiment is used for the memory cell 1471 or the like, the transistor 200 can be used as the transistor M1, and the capacitor 100 can be used as the capacitor CA. By using an OS transistor as the transistor M1, the leakage current of the transistor M1 can be made very small. That is, since written data can be held by the transistor M1 for a long time, the frequency of refreshing the memory cell can be reduced. Alternatively, the refresh operation of the memory cell can be made unnecessary. Furthermore, since the leakage current is very small, multi-valued data or analog data can be held in the memory cell 1471, the memory cell 1472, and the memory cell 1473.

[0496] Furthermore, in the DOSRAM, if a sense amplifier is provided so as to overlap under the memory cell array 1470 as described above, the bit line can be shortened. This reduces the bit line capacitance and the storage capacitance of the memory cell.

[0497] [NOSRAM] 27D to 27G show circuit configuration examples of a gain cell type memory cell having two transistors and one capacitor. The memory cell 1474 shown in FIG. 27D has a transistor M2, a transistor M3, and a capacitor CB. The transistor M2 has a top gate (sometimes simply called a gate) and a back gate. In this specification and the like, a storage device having a gain cell type memory cell using an OS transistor as the transistor M2 may be called a nonvolatile oxide semiconductor RAM (NOSRAM).

[0498] A first terminal of the transistor M2 is connected to a first terminal of the capacitance element CB, a second terminal of the transistor M2 is connected to the wiring WBL, a gate of the transistor M2 is connected to the wiring WOL, and a back gate of the transistor M2 is connected to the wiring BGL. A second terminal of the capacitance element CB is connected to the wiring CAL. A first terminal of the transistor M3 is connected to the wiring RBL, a second terminal of the transistor M3 is connected to the wiring SL, and a gate of the transistor M3 is connected to the first terminal of the capacitance element CB.

[0499] The wiring WBL functions as a write bit line, the wiring RBL functions as a read bit line, and the wiring WOL functions as a word line. The wiring CAL functions as a wiring for applying a predetermined potential to the second terminal of the capacitance element CB. When writing data, while holding data, and when reading data, it is preferable to apply a low-level potential to the wiring CAL. The wiring BGL functions as a wiring for applying a potential to the back gate of the transistor M2. By applying an arbitrary potential to the wiring BGL, the threshold voltage of the transistor M2 can be increased or decreased.

[0500] Here, the memory cell 1474 shown in Fig. 27D corresponds to the memory device shown in Fig. 20. That is, the transistor M2 corresponds to the transistor 200, the capacitor CB corresponds to the capacitor 100, the transistor M3 corresponds to the transistor 300, the wiring WBL corresponds to the wiring 1003, the wiring WOL corresponds to the wiring 1004, the wiring BGL corresponds to the wiring 1006, the wiring CAL corresponds to the wiring 1005, the wiring RBL corresponds to the wiring 1002, and the wiring SL corresponds to the wiring 1001.

[0501] Moreover, the memory cell MC is not limited to the memory cell 1474, and the circuit configuration can be changed as appropriate. For example, the memory cell MC may be configured such that the back gate of the transistor M2 is connected to the wiring WOL instead of the wiring BGL, as in the memory cell 1475 shown in FIG. 27E. For example, the memory cell MC may be configured such that the transistor M2 has a single gate structure, that is, a transistor M2 without a back gate, as in the memory cell 1476 shown in FIG. 27F. For example, the memory cell MC may be configured such that the wiring WBL and the wiring RBL are combined into one wiring BIL, as in the memory cell 1477 shown in FIG. 27G.

[0502] When the semiconductor device described in the above embodiment is used for the memory cell 1474 or the like, the transistor 200 can be used as the transistor M2, the transistor 300 can be used as the transistor M3, and the capacitor CB can be used as the capacitor CB. By using an OS transistor as the transistor M2, the leakage current of the transistor M2 can be made very small. As a result, written data can be held by the transistor M2 for a long time, so that the frequency of refreshing the memory cell can be reduced. Alternatively, the refresh operation of the memory cell can be made unnecessary. Furthermore, since the leakage current is very small, multi-level data or analog data can be held in the memory cell 1474. The same applies to the memory cells 1475 to 1477.

[0503] Note that the transistor M3 may be a transistor having silicon in a channel formation region (hereinafter, may be referred to as a Si transistor). The conductivity type of the Si transistor may be an n-channel type or a p-channel type. The Si transistor may have a higher field-effect mobility than an OS transistor. Therefore, a Si transistor may be used as the transistor M3 functioning as a read transistor. By using a Si transistor as the transistor M3, the transistor M2 can be stacked on the transistor M3, thereby reducing the area occupied by the memory cell and achieving high integration of the memory device.

[0504] In addition, the transistor M3 may be an OS transistor. When the transistors M2 and M3 are OS transistors, the memory cell array 1470 can be configured as a circuit using only n-type transistors.

[0505] FIG. 27H shows an example of a gain cell type memory cell having three transistors and one capacitor. A memory cell 1478 shown in FIG. 27H includes transistors M4 to M6 and a capacitor CC. The capacitor CC is provided as appropriate. The memory cell 1478 is electrically connected to a wiring BIL, a wiring RWL, a wiring WWL, a wiring BGL, and a wiring GNDL. The wiring GNDL is a wiring that applies a low-level potential. Note that the memory cell 1478 may be electrically connected to a wiring RBL and a wiring WBL instead of the wiring BIL.

[0506] The transistor M4 is an OS transistor having a backgate, and the backgate is electrically connected to the wiring BGL. The backgate and the gate of the transistor M4 may be electrically connected to each other. Alternatively, the transistor M4 does not necessarily have to have a backgate.

[0507] Note that the transistors M5 and M6 may be n-channel Si transistors or p-channel Si transistors. Alternatively, the transistors M4 to M6 may be OS transistors. In this case, the memory cell array 1470 can be configured as a circuit using only n-type transistors.

[0508] When the semiconductor device described in the above embodiment is used for the memory cell 1478, the transistor 200 can be used as the transistor M4, the transistors M5 and M6 can be used as the transistors M5 and M6, and the capacitor 100 can be used as the capacitor CC. By using an OS transistor as the transistor M4, the leakage current of the transistor M4 can be made extremely small.

[0509] Note that the configurations of the peripheral circuit 1411, the memory cell array 1470, and the like shown in this embodiment are not limited to those described above. The arrangement or functions of these circuits, wirings connected to the circuits, circuit elements, and the like may be changed, deleted, or added as necessary.

[0510] Generally, various storage devices (memories) are used in semiconductor devices such as computers depending on the application. Figure 28 shows various storage devices by hierarchy. The higher the storage device, the faster the access speed is required, while the lower the storage device, the larger the storage capacity and the higher the recording density are required. Figure 28 shows, from the top layer, memories embedded as registers in arithmetic processing devices such as CPUs, SRAMs (Static Random Access Memory), DRAMs (Dynamic Random Access Memory), and 3D NAND memories.

[0511] The memory embedded as a register in a processor such as a CPU is used for temporary storage of calculation results, and is accessed frequently by the processor. Therefore, a faster operating speed is required rather than a larger memory capacity. The register also has the function of storing setting information for the processor.

[0512] SRAM is used, for example, in caches. A cache has the function of storing a copy of some of the information stored in the main memory. By storing a copy of frequently used data in the cache, the speed of accessing the data can be increased.

[0513] DRAM is used, for example, as a main memory. The main memory has a function of storing programs and data read from storage. The recording density of DRAM is approximately 0.1 to 0.3 Gbit / mm 2 It is.

[0514] 3D NAND memory is used, for example, in storage. Storage has the function of holding data that needs to be stored for a long time and various programs used in processing units. Therefore, storage requires a larger memory capacity and a higher recording density than the operating speed. The recording density of memory devices used in storage is approximately 0.6 to 6.0 Gbit / mm 2 It is.

[0515] The storage device of one embodiment of the present invention has a high operating speed and can retain data for a long period of time. The storage device of one embodiment of the present invention can be suitably used as a storage device located in a boundary area 901 including both a hierarchical level where a cache is located and a hierarchical level where a main memory is located. The storage device of one embodiment of the present invention can be suitably used as a storage device located in a boundary area 902 including both a hierarchical level where a main memory is located and a hierarchical level where a storage is located.

[0516] The structure described in this embodiment mode can be used in appropriate combination with structures described in other embodiment modes, examples, or the like.

[0517] (Embodiment 5) In this embodiment, an example of a chip 1200 on which the semiconductor device of the present invention is mounted is shown with reference to Figures 29A and 29B. A plurality of circuits (systems) are mounted on the chip 1200. A technology for integrating a plurality of circuits (systems) on a single chip in this manner is sometimes called a system on chip (SoC).

[0518] As shown in FIG. 29A, the chip 1200 includes a CPU 1211, a GPU 1212, one or more analog computing units 1213, one or more memory controllers 1214, one or more interfaces 1215, one or more network circuits 1216, and the like.

[0519] Chip 1200 is provided with bumps (not shown) and is connected to a first surface of a printed circuit board (PCB) 1201 as shown in Fig. 29B. In addition, a plurality of bumps 1202 are provided on the back side of the first surface of PCB 1201 and are connected to a motherboard 1203.

[0520] The motherboard 1203 may be provided with storage devices such as a DRAM 1221 and a flash memory 1222. For example, the DRAM 1221 may be the DOSRAM described in the above embodiment. For example, the flash memory 1222 may be the NOSRAM described in the above embodiment.

[0521] The CPU 1211 preferably has a plurality of CPU cores. The GPU 1212 preferably has a plurality of GPU cores. The CPU 1211 and the GPU 1212 may each have a memory for temporarily storing data. Alternatively, a memory common to the CPU 1211 and the GPU 1212 may be provided in the chip 1200. The memory may be the above-mentioned NOSRAM or DOSRAM. The GPU 1212 is suitable for parallel calculation of a large amount of data, and may be used for image processing and multiplication and accumulation. By providing the GPU 1212 with an image processing circuit or a multiplication and accumulation circuit using the oxide semiconductor of the present invention, it becomes possible to perform image processing and multiplication and accumulation with low power consumption.

[0522] In addition, by providing the CPU 1211 and GPU 1212 on the same chip, the wiring between the CPU 1211 and GPU 1212 can be shortened, and data transfer from the CPU 1211 to the GPU 1212, data transfer between the memories of the CPU 1211 and GPU 1212, and transfer of calculation results from the GPU 1212 to the CPU 1211 after calculations in the GPU 1212 can be performed quickly.

[0523] The analog calculation unit 1213 has one or both of an A / D (analog / digital) conversion circuit and a D / A (digital / analog) conversion circuit. The analog calculation unit 1213 may also be provided with the above-mentioned product-sum calculation circuit.

[0524] The memory controller 1214 has a circuit that functions as a controller for the DRAM 1221 and a circuit that functions as an interface for the flash memory 1222 .

[0525] The interface 1215 has an interface circuit with externally connected devices such as a display device, a speaker, a microphone, a camera, and a controller. The controller includes a mouse, a keyboard, a game controller, etc. As such an interface, a USB (Universal Serial Bus), an HDMI (registered trademark) (High-Definition Multimedia Interface), etc. can be used.

[0526] The network circuit 1216 includes a circuit for a network such as a local area network (LAN), and may also include a circuit for network security.

[0527] The above circuits (systems) can be formed in the same manufacturing process in the chip 1200. Therefore, even if the number of circuits required for the chip 1200 increases, there is no need to increase the manufacturing process, and the chip 1200 can be manufactured at low cost.

[0528] A PCB 1201 on which a chip 1200 having a GPU 1212 is provided, a motherboard 1203 on which a DRAM 1221 and a flash memory 1222 are provided can be referred to as a GPU module 1204.

[0529] The GPU module 1204 has the chip 1200 using SoC technology, so that its size can be reduced. In addition, since it excels in image processing, it is suitable for use in portable electronic devices such as smartphones, tablet terminals, laptop PCs, and portable (portable) game consoles. In addition, a multiply-and-accumulate circuit using the GPU 1212 can execute techniques such as deep neural networks (DNN), convolutional neural networks (CNN), recurrent neural networks (RNN), autoencoders, deep Boltzmann machines (DBM), and deep belief networks (DBN), so that the chip 1200 can be used as an AI chip, and the GPU module 1204 can be used as an AI system module.

[0530] The structure described in this embodiment mode can be used in appropriate combination with structures described in other embodiment modes, examples, or the like.

[0531] (Embodiment 6) This embodiment mode describes an example of an electronic component or electronic device in which the memory device or the like described in the above embodiment mode is incorporated.

[0532] <Electronic components> First, an example of an electronic component incorporating memory device 720 will be described with reference to FIGS. 30A and 30B.

[0533] FIG. 30A shows a perspective view of electronic component 700 and a substrate (mounting substrate 704) on which electronic component 700 is mounted. Electronic component 700 shown in FIG. 30A has memory device 720 in mold 711. FIG. 30A omits a portion of electronic component 700 in order to show the inside of electronic component 700. Electronic component 700 has lands 712 on the outside of mold 711. Lands 712 are electrically connected to electrode pads 713, and electrode pads 713 are electrically connected to memory device 720 by wires 714. Electronic component 700 is mounted on, for example, a printed circuit board 702. A plurality of such electronic components are combined and electrically connected on printed circuit board 702 to complete mounting substrate 704.

[0534] The memory device 720 includes a driver circuit layer 721 and a memory circuit layer 722 .

[0535] 30B shows a perspective view of electronic component 730. Electronic component 730 is an example of a SiP (System in package) or MCM (Multi Chip Module). Electronic component 730 has an interposer 731 provided on a package substrate 732 (printed circuit board), and a semiconductor device 735 and a plurality of memory devices 720 provided on interposer 731.

[0536] In the electronic component 730, an example is shown in which the storage device 720 is used as a high bandwidth memory (HBM). Also, the semiconductor device 735 can be an integrated circuit (semiconductor device) such as a CPU, a GPU, or an FPGA.

[0537] The package substrate 732 may be a ceramic substrate, a plastic substrate, a glass epoxy substrate, etc. The interposer 731 may be a silicon interposer, a resin interposer, etc.

[0538] The interposer 731 has a plurality of wirings and functions to electrically connect a plurality of integrated circuits having different terminal pitches. The plurality of wirings are provided in a single layer or multiple layers. The interposer 731 also functions to electrically connect the integrated circuits provided on the interposer 731 to electrodes provided on the package substrate 732. For these reasons, the interposer may be called a "rewiring substrate" or an "intermediate substrate." In addition, a through electrode may be provided in the interposer 731, and the integrated circuits and the package substrate 732 may be electrically connected using the through electrode. In addition, in a silicon interposer, a TSV (Through Silicon Via) may be used as the through electrode.

[0539] It is preferable to use a silicon interposer as the interposer 731. Since a silicon interposer does not require an active element, it can be manufactured at a lower cost than an integrated circuit. On the other hand, since the wiring of the silicon interposer can be formed by a semiconductor process, it is easy to form fine wiring, which is difficult to form with a resin interposer.

[0540] In HBM, many wirings need to be connected to realize a wide memory bandwidth. For this reason, the interposer that mounts HBM requires fine and high-density wiring. Therefore, it is preferable to use a silicon interposer for the interposer that mounts HBM.

[0541] In addition, in SiPs and MCMs that use silicon interposers, reliability is less likely to decrease due to differences in the expansion coefficient between the integrated circuit and the interposer. In addition, because the surface of the silicon interposer is highly flat, connection defects are less likely to occur between the integrated circuit mounted on the silicon interposer and the silicon interposer. In particular, it is preferable to use silicon interposers in 2.5D packages (2.5-dimensional mounting) in which multiple integrated circuits are arranged side by side on the interposer.

[0542] A heat sink (heat dissipation plate) may be provided so as to overlap the electronic component 730. When providing a heat sink, it is preferable to align the height of an integrated circuit provided on the interposer 731. For example, in the electronic component 730 shown in this embodiment, it is preferable to align the height of the memory device 720 and the height of the semiconductor device 735.

[0543] In order to mount the electronic component 730 on another substrate, electrodes 733 may be provided on the bottom of the package substrate 732. Fig. 30B shows an example in which the electrodes 733 are formed of solder balls. By providing solder balls in a matrix on the bottom of the package substrate 732, BGA (Ball Grid Array) mounting can be realized. The electrodes 733 may also be formed of conductive pins. By providing conductive pins in a matrix on the bottom of the package substrate 732, PGA (Pin Grid Array) mounting can be realized.

[0544] The electronic component 730 can be mounted on other substrates using various mounting methods, including but not limited to BGA and PGA, such as Staggered Pin Grid Array (SPGA), Land Grid Array (LGA), Quad Flat Package (QFP), Quad Flat J-leaded package (QFJ), and Quad Flat Non-leaded package (QFN).

[0545] This embodiment mode can be implemented in appropriate combination with structures described in other embodiment modes, examples, and the like.

[0546] (Embodiment 7) In this embodiment, an application example of a storage device using the semiconductor device described in the previous embodiment will be described. The semiconductor device described in the previous embodiment can be applied to storage devices of various electronic devices (for example, information terminals, computers, smartphones, electronic book terminals, digital cameras (including video cameras), recording and reproducing devices, navigation systems, and the like). Note that the computer here includes a large computer such as a server system, in addition to tablet computers, notebook computers, and desktop computers. Alternatively, the semiconductor device described in the previous embodiment can be applied to various removable storage devices such as memory cards (for example, SD cards), USB memories, and SSDs (solid state drives). FIGS. 31A to 31E are schematic diagrams showing some configuration examples of removable storage devices. For example, the semiconductor device described in the previous embodiment is processed into a packaged memory chip and used in various storage devices and removable memories.

[0547] 31A is a schematic diagram of a USB memory. A USB memory 1100 has a housing 1101, a cap 1102, a USB connector 1103, and a board 1104. The board 1104 is housed in the housing 1101. For example, a memory chip 1105 and a controller chip 1106 are attached to the board 1104. The semiconductor device described in the above embodiment can be incorporated in the memory chip 1105 or the like.

[0548] FIG. 31B is a schematic diagram of the appearance of an SD card, and FIG. 31C is a schematic diagram of the internal structure of the SD card. The SD card 1110 has a housing 1111, a connector 1112, and a substrate 1113. The substrate 1113 is housed in the housing 1111. For example, a memory chip 1114 and a controller chip 1115 are attached to the substrate 1113. The capacity of the SD card 1110 can be increased by providing a memory chip 1114 on the back side of the substrate 1113 as well. In addition, a wireless chip having a wireless communication function may be provided on the substrate 1113. This makes it possible to read and write data from and to the memory chip 1114 by wireless communication between the host device and the SD card 1110. The semiconductor device shown in the above embodiment can be incorporated into the memory chip 1114 or the like.

[0549] FIG. 31D is a schematic diagram of the appearance of an SSD, and FIG. 31E is a schematic diagram of the internal structure of the SSD. SSD 1150 has a housing 1151, a connector 1152, and a board 1153. Board 1153 is housed in housing 1151. For example, memory chip 1154, memory chip 1155, and controller chip 1156 are attached to board 1153. Memory chip 1155 is a work memory for controller chip 1156, and may be, for example, a DOSRAM chip. By providing memory chip 1154 on the back side of board 1153, the capacity of SSD 1150 can be increased. The semiconductor device shown in the previous embodiment can be incorporated into memory chip 1154 or the like.

[0550] This embodiment mode can be implemented in appropriate combination with structures described in other embodiment modes, examples, and the like.

[0551] (Embodiment 8) The semiconductor device according to one embodiment of the present invention can be used for a processor such as a CPU or a GPU, or a chip. Specific examples of electronic devices including a processor such as a CPU or a GPU, or a chip according to one embodiment of the present invention are shown in FIG.

[0552] <Electronic equipment and systems> The GPU or chip according to one embodiment of the present invention can be mounted on various electronic devices. Examples of electronic devices include electronic devices with relatively large screens, such as television devices, monitors for desktop or notebook information terminals, digital signage, large game machines such as pachinko machines, digital cameras, digital video cameras, digital photo frames, electronic book readers, mobile phones, portable game machines, portable information terminals, and audio playback devices. Moreover, by providing the GPU or chip according to one embodiment of the present invention in an electronic device, it is possible to mount artificial intelligence on the electronic device.

[0553] The electronic device of one embodiment of the present invention may have an antenna. By receiving a signal through the antenna, images, information, and the like can be displayed on a display portion. In addition, when the electronic device has an antenna and a secondary battery, the antenna may be used for contactless power transmission.

[0554] An electronic device according to one embodiment of the present invention may have a sensor (including a function of measuring force, displacement, position, velocity, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor, or infrared rays).

[0555] An electronic device according to one embodiment of the present invention can have various functions. For example, the electronic device can have a function of displaying various information (still images, videos, text images, etc.) on a display unit, a touch panel function, a function of displaying a calendar, date, or time, a function of executing various software (programs), a wireless communication function, a function of reading out a program or data recorded in a recording medium, etc. Examples of electronic devices are shown in Figs. 32A to 32H.

[0556] [Information terminal] 32A illustrates a mobile phone (smartphone), which is a type of information terminal. The information terminal 5100 includes a housing 5101 and a display unit 5102. As an input interface, a touch panel is provided on the display unit 5102, and buttons are provided on the housing 5101.

[0557] By applying the chip of one embodiment of the present invention, the information terminal 5100 can execute applications using artificial intelligence. Examples of applications using artificial intelligence include an application that recognizes a conversation and displays the conversation content on the display unit 5102, an application that recognizes characters, figures, and the like input by a user to a touch panel provided in the display unit 5102 and displays them on the display unit 5102, and an application that performs biometric authentication such as fingerprints and voiceprints.

[0558] 32B illustrates a notebook type information terminal 5200. The notebook type information terminal 5200 includes a main body 5201 of the information terminal, a display unit 5202, and a keyboard 5203.

[0559] The notebook type information terminal 5200 can execute an application using artificial intelligence by applying a chip according to one embodiment of the present invention, similar to the above-described information terminal 5100. Examples of applications using artificial intelligence include design support software, text correction software, and automatic menu generation software. In addition, the notebook type information terminal 5200 can be used to develop new artificial intelligence.

[0560] In the above description, a smartphone and a notebook type information terminal are illustrated in Fig. 32A and Fig. 32B as examples of electronic devices, but information terminals other than smartphones and notebook type information terminals can also be applied. Examples of information terminals other than smartphones and notebook type information terminals include PDAs (Personal Digital Assistants), desktop type information terminals, and workstations.

[0561] [Game consoles] FIG. 32C illustrates a portable game machine 5300 which is an example of a game machine. The portable game machine 5300 includes a housing 5301, a housing 5302, a housing 5303, a display unit 5304, a connection unit 5305, an operation key 5306, and the like. The housing 5302 and the housing 5303 can be detached from the housing 5301. By attaching the connection unit 5305 of the housing 5301 to another housing (not shown), a video output to the display unit 5304 can be output to another video device (not shown). In this case, the housing 5302 and the housing 5303 can each function as an operation unit. This allows a plurality of players to play a game at the same time. The chips described in the above embodiments can be incorporated in the chips provided on the substrates of the housings 5301, 5302, and 5303.

[0562] 32D shows a stationary game machine 5400, which is an example of a game machine. A controller 5402 is connected to the stationary game machine 5400 wirelessly or via a wire.

[0563] A game machine with low power consumption can be realized by applying a GPU or a chip of one embodiment of the present invention to a game machine such as a portable game machine 5300 or a stationary game machine 5400. Furthermore, low power consumption can reduce heat generation from a circuit, and therefore the influence of heat generation on the circuit itself, peripheral circuits, and modules can be reduced.

[0564] Furthermore, by applying a GPU or a chip of one embodiment of the present invention to the portable game console 5300, the portable game console 5300 can have artificial intelligence.

[0565] Originally, the expression of the progress of a game, the behavior of creatures appearing in the game, and phenomena occurring in the game are determined by the program of the game, but by applying artificial intelligence to the portable game device 5300, it becomes possible to express things that are not limited to the game program. For example, it becomes possible to change and express the content of questions asked by the player, the progress of the game, the timing of events occurring during the game, the behavior of people appearing in the game, and the like, without being limited by the game program.

[0566] In addition, when playing a game on the portable game console 5300 that requires multiple players, the game players can be personified using artificial intelligence, so that the game can be played by one person by making the opponent a game player based on artificial intelligence.

[0567] 32C and 32D show a portable game machine and a stationary game machine as examples of game machines, but the game machine to which the GPU or chip of one embodiment of the present invention is applied is not limited to this. Examples of game machines to which the GPU or chip of one embodiment of the present invention is applied include arcade game machines installed in entertainment facilities (game centers, amusement parks, etc.) and pitching machines for batting practice installed in sports facilities.

[0568] [Mainframe computers] The GPU or chip of one embodiment of the present invention can be applied to a large computer.

[0569] Fig. 32E is a diagram showing a supercomputer 5500, which is an example of a large computer. Fig. 32F is a diagram showing a rack-mounted calculator 5502 included in the supercomputer 5500.

[0570] A supercomputer 5500 includes a rack 5501 and a plurality of rack-mounted computers 5502. The plurality of computers 5502 are stored in the rack 5501. The computer 5502 is provided with a plurality of boards 5504, and the GPU or chip described in the above embodiment can be mounted on the board.

[0571] The supercomputer 5500 is a large-scale computer mainly used for scientific and technological calculations. In scientific and technological calculations, huge amounts of calculations need to be processed at high speed, and therefore power consumption is high and chips generate a lot of heat. By applying a GPU or chip according to one embodiment of the present invention to the supercomputer 5500, a supercomputer with low power consumption can be realized. Furthermore, low power consumption can reduce heat generation from a circuit, and therefore the influence of heat generation on the circuit itself, peripheral circuits, and modules can be reduced.

[0572] 32E and 32F show a supercomputer as an example of a large computer, but the large computer to which the GPU or chip of one embodiment of the present invention is applied is not limited to this. Examples of large computers to which the GPU or chip of one embodiment of the present invention is applied include computers that provide services (servers) and large general-purpose computers (mainframes).

[0573] [Mobile object] The GPU or chip according to one embodiment of the present invention can be applied to automobiles, which are moving objects, and to the area around the driver's seat of an automobile.

[0574] Fig. 32G is a diagram showing the periphery of the windshield in the interior of an automobile, which is an example of a moving body, Fig. 32G shows display panel 5701, display panel 5702, and display panel 5703 attached to the dashboard, as well as display panel 5704 attached to a pillar.

[0575] The display panels 5701 to 5703 can provide various information by displaying a speedometer, a tachometer, a mileage, a fuel gauge, a gear state, an air conditioner setting, and the like. In addition, the display items and layouts displayed on the display panels can be changed as appropriate according to the user's preferences, and the design can be improved. The display panels 5701 to 5703 can also be used as lighting devices.

[0576] The display panel 5704 can complement the field of view (blind spot) blocked by the pillar by displaying an image from an imaging device (not shown) provided outside the vehicle. That is, by displaying an image from an imaging device provided outside the vehicle, blind spots can be complemented and safety can be improved. In addition, by displaying an image that complements the invisible part, safety can be confirmed more naturally and without discomfort. The display panel 5704 can also be used as a lighting device.

[0577] Since the GPU or chip of one embodiment of the present invention can be used as a component of artificial intelligence, the chip can be used, for example, in an automatic driving system for an automobile. The chip can also be used in a system that performs road guidance, risk prediction, etc. The display panels 5701 to 5704 may be configured to display information such as road guidance and risk prediction.

[0578] In the above description, an automobile is described as an example of a moving object, but the moving object is not limited to an automobile. For example, the moving object may be a train, a monorail, a ship, an aircraft (helicopter, unmanned aerial vehicle (drone), airplane, rocket), etc., and the chip of one embodiment of the present invention may be applied to these moving objects to provide a system using artificial intelligence.

[0579] [electric appliances] 32H shows an example of an electric appliance, an electric refrigerator-freezer 5800. The electric refrigerator-freezer 5800 has a housing 5801, a refrigerator door 5802, a freezer door 5803, and the like.

[0580] An electric refrigerator-freezer 5800 having artificial intelligence can be realized by applying the chip of one embodiment of the present invention to the electric refrigerator-freezer 5800. By using artificial intelligence, the electric refrigerator-freezer 5800 can have a function of automatically generating a menu based on ingredients stored in the electric refrigerator-freezer 5800 and the expiration dates of the ingredients, a function of automatically adjusting the temperature to match the ingredients stored in the electric refrigerator-freezer 5800, and the like.

[0581] Although an electric refrigerator-freezer has been described as an example of an electrical appliance, other electrical appliances include, for example, vacuum cleaners, microwave ovens, electric ovens, rice cookers, water heaters, induction cookers, water servers, heating and cooling appliances including air conditioners, washing machines, dryers, and audio-visual equipment.

[0582] The electronic devices, functions of the electronic devices, application examples of artificial intelligence, and effects thereof described in this embodiment can be appropriately combined with the descriptions of other electronic devices.

[0583] This embodiment mode can be implemented in appropriate combination with structures described in other embodiment modes, examples, and the like. EXAMPLES

[0584] In this example, a stacked layer structure including an oxide according to one embodiment of the present invention was fabricated and analyzed by constant photocurrent method (CPM) measurement. Note that in this example, Samples 1A to 1E were fabricated.

[0585] <1. Sample composition and preparation method> Samples 1A, 1B, 1C, 1D, and 1E of this example will be described below.

[0586] A structure 910 of Samples 1A to 1E is shown in Fig. 33. Samples 1A to 1E each have a substrate 911, an insulator 912 on the substrate 911, an insulator 913 on the insulator 912, an oxide 914 on the insulator 913, a conductor 915a and a conductor 915b on the oxide 914, and an insulator 916 on the oxide 914, the conductor 915a, and the conductor 915b.

[0587] Next, the method for preparing each sample will be described.

[0588] First, a quartz substrate was prepared as the substrate 911. Then, an aluminum oxide film was formed on the substrate 911 as the insulator 912 by the ALD method to a thickness of 10 nm.

[0589] Next, a silicon oxide film was formed as an insulator 913 on the insulator 912 to a thickness of 100 nm by a CVD method.

[0590] Next, a 40-nm-thick oxide film containing In, Ga, and Zn was formed as the oxide 914 on the insulator 913 by a sputtering method. The oxide 914 was formed using an oxide target containing In, Ga, and Zn (In:Ga:Zn=4:2:4.1 [atomic ratio]), oxygen (O2) at a flow rate of 45 sccm as the deposition gas, the deposition pressure was 0.7 Pa, the deposition power was 500 W, the substrate temperature was 130° C., and the target-substrate distance was 60 mm.

[0591] Subsequently, a heat treatment was carried out for 1 hour in a nitrogen atmosphere, and then the atmosphere was switched to an oxygen atmosphere, and a heat treatment was carried out for 1 hour in the oxygen atmosphere.

[0592] Here, the heat treatment temperatures were different for Samples 1A to 1E. Table 1 shows the heat treatment temperatures for Samples 1A to 1E.

[0593] [Table 1]

[0594] Next, a 30-nm-thick tungsten film was formed by sputtering as a conductive film to be the conductor 915a and the conductor 915b over the oxide 914. Then, the conductive film was processed to form the conductor 915a and the conductor 915b that function as electrodes.

[0595] Next, an insulator 916 functioning as a protective film was formed over the conductor 915a, the conductor 915b, and the oxide 914. A silicon oxide film having a thickness of 100 nm was formed by a CVD method as an insulating film to become the insulator 916. Next, a part of the insulating film was opened so as to expose a part of the conductor 915a and a part of the conductor 915b, and the insulator 916 was formed.

[0596] Through the above steps, Samples 1A to 1E of this example were fabricated.

[0597] <2. CPM measurement results for each sample> CPM measurements were performed on Sample 1A to Sample 1E to evaluate the localized level of the oxide 914 of each sample. In addition, a subgap optical absorption spectrum measuring system (SGA-5 type) manufactured by Bunkoukeiki Co., Ltd. was used as an analytical device for the CPM measurements.

[0598] In the CPM measurement, the amount of light absorption in the localized level is measured with high sensitivity, and the density of the localized level or the absorption caused by the localized level can be relatively compared between samples. Specifically, in a state where a voltage is applied between the conductor 915a and the conductor 915b, which function as a pair of electrodes provided in contact with the oxide 914, the amount of monochromatic light irradiated on the sample surface between the terminals is adjusted so that the value of the photocurrent is constant, and the absorption coefficient is derived from the amount of monochromatic light irradiated. The monochromatic light is irradiated by sweeping from long wavelengths to short wavelengths in 10 nm increments in the wavelength range of 350 nm to 750 nm. The transition of the absorption coefficient with respect to wavelength obtained by the CPM measurement may be called a CPM spectrum.

[0599] In this embodiment, the absorption coefficient was derived for each wavelength of monochromatic light. In the CPM measurement, the absorption coefficient in energy (converted from wavelength) increases according to the localized level density. In addition, the absorption due to the localized level of the sample can be derived by integrating the region of the CPM spectrum curve where the absorption coefficient is larger than the light absorption due to the band tail on the valence band side (also called the Urbach tail).

[0600] Specifically, the absorption α caused by the localized level of the sample can be calculated from the following formula.

[0601]

number

[0602] where E is the energy, α CPM represents the absorption coefficient obtained by CPM measurement, and α U represents the absorption coefficient of the Urbach tail.

[0603] FIG. 34 shows the results of the CPM measurements of Samples 1A to 1E. The vertical axis represents the absorption due to the localized level [cm -1 The horizontal axis represents the temperature [°C] of the heat treatment after the oxide 914 film was formed for each sample. Two samples were measured for each of Sample 1A, Sample 1C, Sample 1D, and Sample 1E. One sample was measured for Sample 1B.

[0604] 34, it was found that the localized state density changes depending on the conditions of the heat treatment after the formation of the oxide 914. In particular, it was found that the localized state density tends to decrease as the temperature of the heat treatment increases within the range of 400° C. to 550° C. On the other hand, it was found that when the temperature of the heat treatment is 600° C., the localized state density increases at least more than when the temperature of the heat treatment is 550° C.

[0605] Therefore, it was found that the density of localized states in the oxide semiconductor film can be reduced by performing heat treatment under appropriate conditions after the oxide semiconductor film is formed.

[0606] Specifically, after the oxide semiconductor film is formed, heat treatment is preferably performed at a temperature higher than or equal to 450° C. and lower than or equal to 600° C. This treatment reduces absorption due to localized levels in the oxide semiconductor film by 1.0×10 -2 cm -1 By using the oxide semiconductor for a channel formation region of a transistor, the carrier concentration in the channel formation region can be reduced, and the channel formation region can be made to be i-type (intrinsic) or substantially i-type. Therefore, a semiconductor device including a transistor with favorable electrical characteristics can be manufactured.

[0607] The configuration shown in this embodiment can be used in appropriate combination with other embodiments and mode of embodiment. EXAMPLES

[0608] In this example, a stacked structure of an oxide according to one embodiment of the present invention and an insulator was fabricated and analyzed by secondary ion mass spectrometry (SIMS). In this example, Sample 2A group (Sample 2A-1, Sample 2A-2, Sample 2A-3, and Sample 2A-4), Sample 2B group (Sample 2B-1, Sample 2B-2, Sample 2B-3, and Sample 2B-4), Sample 2C group (Sample 2C-1, Sample 2C-2, Sample 2C-3, and Sample 2C-4), Sample 2D group (Sample 2D-1, Sample 2D-2, Sample 2D-3, and Sample 2D-4), and Sample 2E group (Sample 2E-1, Sample 2E-2, Sample 2E-3, and Sample 2E-4) were fabricated.

[0609] In this embodiment, Sample 2A-1, Sample 2B-1, Sample 2C-1, Sample 2D-1, and Sample 2E-1 may be referred to as Sample 2-1 group. Similarly, Sample 2-2 group (Sample 2A-2, Sample 2B-2, Sample 2C-2, Sample 2D-2, and Sample 2E-2), Sample 2-3 group (Sample 2A-3, Sample 2B-3, Sample 2C-3, Sample 2D-3, and Sample 2E-3), and Sample 2-4 group (Sample 2A-4, Sample 2B-4, Sample 2C-4, Sample 2D-4, and Sample 2E-4).

[0610] <1. Sample composition and preparation method> The following describes Samples 2A, 2B, 2C, 2D, and 2E of this example. The structures of Samples 2A to 2E are shown in Fig. 35. Samples 2A to 2E each include a substrate 921, an insulator 922 on the substrate 921, an insulator 923 on the insulator 922, an oxide 924 on the insulator 923, an in...

Claims

[Claim 1] forming a metal oxide film on a substrate; After forming the metal oxide film, a heat treatment is performed at a temperature of 500° C. or more and 600° C. or less; forming islands of metal oxide by processing the metal oxide film using a lithography method; having The metal oxide film is formed by a sputtering method using an In-M-Zn oxide target (M is gallium, aluminum, yttrium, or tin) at a substrate temperature of 200° C. or higher and 400° C. or lower.

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