Analysis system for aerial environment

Abstract

To provide an analysis system for aerial environment, which can efficiently analyze aerial environment.SOLUTION: An analysis system for aerial environment is provided, comprising: an analysis device ; first piping having a first end disposed in a first measurement place, a second end, an a first point disposed between the first end and the second end, a first valve disposed between the second end of the first piping and the analysis device, a gas supply source supplying purge gas; second piping having a third end connected to the first point of the first piping and a fourth end connected to the gas supply source; a second valve disposed in second piping; third piping having a fifth end disposed in a second measurement place, a sixth end, and a second point disposed between the fifth end and the sixth end, and a third valve disposed between the sixth end of the third piping and the analysis device; fourth piping having a seventh end connected to the second point of the third piping and an eight end connected to the gas supply source; and a fourth valve disposed in the fourth piping.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE The present invention relates to an airborne environmental analysis system. [Background technology]

[0002] In a clean room used in the manufacturing process of semiconductor devices, environmental air contaminants may be floating around, so the environmental air in the clean room is analyzed using an ion chromatography system or the like. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-355646 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the embodiment is to provide an airborne environmental analysis system capable of efficiently performing environmental analysis. [Means for solving the problem]

[0005] The airborne environment analysis system of the embodiment includes an analytical device, a first pipe having a first end provided at a first measurement location, a second end, and a first location provided between the first end and the second end, a first valve provided between the second end of the first pipe and the analytical device, a gas supply source for supplying purge gas, a second pipe having a third end connected to the first location of the first pipe and a fourth end connected to the gas supply source, a second valve provided on the second pipe, a fifth end provided at the second measurement location, a sixth end, and a second location provided between the fifth end and the sixth end, a third valve provided between the sixth end of the third pipe and the analytical device, a fourth pipe having a seventh end connected to the second location of the third pipe and an eighth end connected to the gas supply source, and a fourth valve provided on the fourth pipe. [Brief description of the drawings]

[0006] [Figure 1] 1 is a schematic diagram of an aerial environment analyzing system according to a first embodiment. FIG. [Diagram 2] 1 is a plan view conceptually showing an example of the configuration of a semiconductor device manufacturing system arranged around the air environment analyzing system of the first embodiment; [Diagram 3] 6 is a plan view showing a schematic diagram of a manufacturing apparatus 603 included in the semiconductor device manufacturing system according to the first embodiment. FIG. [Figure 4] FIG. 2 is a perspective view showing a schematic diagram of an EFEM unit included in the semiconductor device manufacturing apparatus of the first embodiment. [Diagram 5] FIG. 2 is a schematic diagram showing a dry etching unit as a first example of a main processing unit. [Figure 6] FIG. 13 is a schematic diagram showing a film forming unit (sputtering unit) as a second example of the main processing unit. [Figure 7] 1 is a flowchart of an aerial environment analysis method according to a first embodiment. [Figure 8] 1 is a flowchart of an aerial environment analysis method according to a first embodiment. [Figure 9] FIG. 13 is a diagram showing schematic changes over time in the concentration at the first measurement location A1, the concentration at the second measurement location A2, the opening and closing of the first valve 52, the opening and closing of the second valve 54, the opening and closing of the third valve 56, and the opening and closing of the fourth valve 58 in the aerial environment analyzing method of the first embodiment. [Figure 10] FIG. 1 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of the first embodiment. [Figure 11] FIG. 1 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of the first embodiment. [Figure 12] FIG. 2 is a diagram showing a schematic diagram of analysis of piping and supply of purge gas (cleaning) over time in the air environment analyzing system of the first embodiment. [Figure 13] FIG. 2 is a diagram showing a schematic diagram of analysis of piping and supply of purge gas (cleaning) over time in the air environment analyzing system of the first embodiment. [Figure 14] FIG. 2 is a diagram showing a schematic diagram of analysis of piping and supply of purge gas (cleaning) over time in the air environment analyzing system of the first embodiment. [Figure 15] FIG. 11 is a schematic diagram of an aerial environment analyzing system according to a second embodiment. [Figure 16] 10 is a flowchart of an aerial environment analysis method according to a second embodiment. [Figure 17] 10 is a flowchart of an aerial environment analysis method according to a second embodiment. [Figure 18] FIG. 11 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of the second embodiment. [Figure 19] FIG. 11 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of the second embodiment. [Figure 20] FIG. 11 is a schematic diagram of an aerial environment analyzing system according to a third embodiment. [Figure 21] 13 is a flowchart of an aerial environment analysis method according to a third embodiment. [Figure 22] 13 is a flowchart of an aerial environment analysis method according to a third embodiment. [Figure 23] FIG. 13 is a diagram showing a schematic diagram of analysis of piping and gas supply (cleaning) over time in the aerial environment analyzing system of the fourth embodiment. [Figure 24] FIG. 13 is a diagram showing a schematic diagram of analysis of piping and purge gas supply (cleaning) over time in the air environment analyzing system of the fourth embodiment. [Diagram 25] FIG. 13 is a diagram showing a schematic diagram of the time course of analysis of piping and supply of purge gas (cleaning) in the air environment analyzing system of the fifth embodiment. [Figure 26] FIG. 13 is a diagram showing a schematic diagram of the time course of analysis of piping and supply of purge gas (cleaning) in the air environment analyzing system of the fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments will be described with reference to the drawings. In the drawings, the same or similar parts are denoted by the same or similar reference numerals.

[0008] (First embodiment) The aerial environment analysis system of this embodiment includes an analytical device, a first pipe having a first end provided at a first measurement location, a second end, and a first location provided between the first end and the second end, a first valve provided between the second end of the first pipe and the analytical device, a gas supply source for supplying purge gas, a second pipe having a third end connected to the first location of the first pipe and a fourth end connected to the gas supply source, a second valve provided on the second pipe, a fifth end provided at the second measurement location, a sixth end, and a second location provided between the fifth end and the sixth end, a third valve provided between the sixth end of the third pipe and the analytical device, a fourth pipe having a seventh end connected to the second location of the third pipe and an eighth end connected to the gas supply source, and a fourth valve provided on the fourth pipe.

[0009] In addition, the airborne environment analysis system of this embodiment further has a control device capable of executing an airborne environment analysis method, and the airborne environment analysis method includes supplying a first analyte from a first measurement location to an analytical device via a first end, performing a first analysis of the first analyte using the analytical device, and if a first predetermined time has elapsed since starting the first analysis and the concentration of the first analyte detected by the first analysis is equal to or greater than a first threshold concentration, closing a first valve and opening a second valve, supplying a purge gas from a gas supply source to the first measurement location via the first end, supplying a second analyte from the second measurement location to the analytical device via a fifth end, performing a second analysis of the second analyte using the analytical device, and if the concentration of the first analyte detected by the first analysis is not equal to or greater than the first threshold concentration, performing the second analysis without supplying purge gas.

[0010] FIG. 1 is a schematic diagram of an aerial environment analyzing system 100 of the present embodiment.

[0011] The airborne environment analysis system 100 is installed, for example, in a clean room. The airborne environment analysis system 100 is used, for example, to analyze the environmental air in the clean room. Note that the airborne environment analysis system 100 may be installed, for example, outside the clean room.

[0012] The analysis device 2 is, for example, an ion chromatography device. Note that the analysis device 2 may be, for example, a device used for mass spectrometry, photoanalysis such as ultraviolet absorption spectroscopy or ultraviolet fluorescence spectroscopy, or electrochemical analysis such as solution conductivity spectroscopy.

[0013] The first pipe 10 has a first end 12 and a second end 14. The first end 12 is provided, for example, at a first measurement location A1 in a clean room. The first end 12 is open. In other words, the first end 12 is an open end of the pipe. The second end 14 is connected to the analyzer 2 via a first valve 52 and a fifth pipe 62 that connects the first valve 52 and the analyzer 2.

[0014] The gas supply source 6 supplies a purge gas. Here, the purge gas is, for example, high-purity nitrogen gas or clean dry air (CDA) gas. The gas supply source 6 may be, for example, a gas cylinder that stores nitrogen gas. The gas supply source 6 may also be, for example, a gas supply source capable of supplying nitrogen gas generated by evaporating liquid nitrogen from a liquid nitrogen tank. Thus, the form of the gas supply source 6 is not particularly limited.

[0015] The second pipe 20 has a third end 22 and a fourth end 24. The third end 22 is connected to the first location 16 between the first end 12 and the second end 14 of the first pipe 10. The fourth end 24 is connected to the gas source 6.

[0016] The length L2 of the fifth pipe 62 is preferably shorter than the length L1 of the first pipe 10 between the first end 12 and the first location 16. It is difficult to clean the inside of the fifth pipe 62 with a purge gas. Therefore, if the length L2 of the fifth pipe 62 is too long, the amount of environmental air pollutants adsorbed on the inner wall of the fifth pipe 62 increases, which may cause an error in the analysis result of the analyzer 2.

[0017] The second valve 54 is provided in the second pipe 20 .

[0018] The third pipe 30 has a fifth end 32 and a sixth end 34. The fifth end 32 is provided, for example, at a second measurement location A2 in a clean room. The fifth end 32 is open. In other words, the fifth end 32 is an open end of the pipe. The sixth end 34 is connected to the analyzer 2 via a third valve 56 and a sixth pipe 64 that connects the third valve 56 to the analyzer 2.

[0019] The fourth pipe 40 has a seventh end 42 and an eighth end 44. The seventh end 42 is connected to the second location 36 between the fifth end 32 and the sixth end 34 of the third pipe 30. The eighth end 44 is connected to the gas supply source 6.

[0020] The length L4 of the sixth pipe 64 is preferably shorter than the length L3 of the third pipe 30 between the fifth end 32 and the second location 36. It is difficult to clean the inside of the sixth pipe 64 with a purge gas. If the length L4 of the sixth pipe 64 is too long, the amount of environmental air pollutants adsorbed on the inner wall of the sixth pipe 64 increases, which may cause errors in the analysis results of the analyzer 2.

[0021] The fourth valve 58 is provided in the fourth pipe 40 .

[0022] A second vacuum pump (second pump) 3 is provided in the analysis device 2. The second vacuum pump 3 sucks and supplies the analyte from the first measurement location A1 into the analysis device 2 via the first end 12. The supplied analyte is analyzed by the analysis device 2. The second vacuum pump 3 also sucks and supplies the analyte from the second measurement location A2 into the analysis device 2 via the fifth end 32. Note that the analyte may be sucked and supplied into the analysis device 2 using a first vacuum pump (first pump) 4 provided outside the analysis device 2. Note that the first vacuum pump 4 is an example of a first pump. Also, the second vacuum pump 3 is an example of a second pump.

[0023] The control device 70 is connected to, for example, the first valve 52, the second valve 54, the third valve 56, the fourth valve 58, the gas supply source 6, the analyzer 2, and the first vacuum pump 4. The control device 70 performs, for example, control of opening and closing of the first valve 52, the second valve 54, the third valve 56, and the fourth valve 58, control of the analyzer 2, control of on / off of the first vacuum pump 4, and control of on / off of the second vacuum pump 3.

[0024] The control device 70 is, for example, an electronic circuit, or a computer configured by a combination of hardware such as an arithmetic circuit and software such as a program.

[0025] The first pipe 10, the second pipe 20, the third pipe 30, the fourth pipe 40, the fifth pipe 62, and the sixth pipe 64 are pipes made of, for example, fluororesin. Also, the first pipe 10, the second pipe 20, the third pipe 30, the fourth pipe 40, the fifth pipe 62, and the sixth pipe 64 are pipes made of, for example, metal pipes lined with fluororesin. Note that pipes preferably used as the first pipe 10, the second pipe 20, the third pipe 30, the fourth pipe 40, the fifth pipe 62, and the sixth pipe 64 are not limited to those mentioned above.

[0026] The length of the fifth pipe 62 and the sixth pipe 64 is, for example, shorter than 1 m. It is preferable that the length of the fifth pipe 62 and the sixth pipe 64 is as short as possible.

[0027] The length of the second pipe 20 and the fourth pipe 40 is, for example, about several meters. However, for example, when the gas supply source 6 is a gas supply source capable of supplying nitrogen gas generated by evaporating liquid nitrogen from a liquid nitrogen tank, the length of the second pipe 20 and the fourth pipe 40 may be about several hundred meters.

[0028] The lengths of the first pipe 10 and the third pipe 30 are longer than the lengths of the second pipe 20, the fourth pipe 40, the fifth pipe 62, and the sixth pipe 64. In addition, for example, the length of the third pipe 30 is different from the length of the first pipe 10. For example, the length of the first pipe 10 is about 100 m, and the length of the third pipe 30 is about 50 m. It is acceptable for the length of the third pipe 30 to be longer than the first pipe 10.

[0029] FIG. 2 is a plan view conceptually showing an example of the configuration of a semiconductor device manufacturing system arranged around the air environment analyzing system of this embodiment.

[0030] The semiconductor device manufacturing system of this embodiment includes a track (overhead track) 601, a transport vehicle (overhead-traveling transport vehicle) 602 that can move along the track 601, a plurality of manufacturing devices 603 arranged in close proximity to the track 601, and a measuring device 701 for environmental evaluation.

[0031] The track 601 is installed on, for example, the ceiling of a manufacturing factory. In this case, the transport vehicle 602 functions as an overhead transport vehicle. The installation position of the track 601 is not limited to the ceiling. For example, the track 601 may be installed on the floor (ground) of the manufacturing factory, or on the wall surface of the manufacturing factory. In addition, the transport vehicle 602 does not need to have wheels. In this case, the transport vehicle 602 may be driven by, for example, a linear motor type.

[0032] A front opening unified pod (FOUP) 602a can be loaded onto the transport vehicle 602. The FOUP 602a is loaded onto the transport vehicle 602 with, for example, semiconductor wafers 602b stored therein, and is transported.

[0033] A plurality of manufacturing tools 603 are arranged along a track 601. As described below, each manufacturing tool 603 includes a main processing unit 603a, a vacuum transfer robot chamber 603b, a load lock chamber 603c, an EFEM unit 603d, and a load port unit 603e.

[0034] The measuring instrument 701 is disposed, for example, near the center of the manufacturing system. A plurality of pipes 702a, 702b, 702c, and 702d are connected to the measuring instrument 701. The tip portions (end portions) of the plurality of pipes 702a, 702b, 702c, and 702d are disposed at different positions in the manufacturing system. The measuring instrument 701 and the base end portions of the plurality of pipes 702a, 702b, 702c, and 702d are connected via a pipe cleaning mechanism 703.

[0035] The measuring instrument 701 corresponds to the analysis device 2 of this embodiment. The pipes 702a, 702b, 702c, and 702d correspond to the first pipe 10 or the third pipe 30 of this embodiment. The pipe cleaning mechanism 703 corresponds to the gas supply source 6, the first valve 52, the second valve 54, the third valve 56, the fourth valve 58, the second pipe 20, the fourth pipe 40, the fifth pipe 62, the sixth pipe 64, and the control device 70 of this embodiment.

[0036] FIG. 3 is a plan view showing a schematic diagram of a manufacturing apparatus 603 included in the semiconductor device manufacturing system of this embodiment.

[0037] FIG. 4 is a perspective view that shows a schematic diagram of an EFEM unit 603d included in a semiconductor device manufacturing apparatus 603 of the present embodiment.

[0038] Each manufacturing device 603 includes a main processing unit 603a, a vacuum transfer robot chamber 603b, a load lock chamber 603c, an EFEM unit 603d, and a load port unit 603e.

[0039] The main processing unit 603a is, for example, but not limited to, a dry etching unit or a film forming unit (a sputtering unit or a CVD unit) The main processing unit 603a is connected to a vacuum transfer robot chamber 603b.

[0040] A transfer robot 603b1 is provided in the vacuum transfer robot chamber 603b. A transfer arm 603b2 is provided in the transfer robot 603b1. The wafer 602b is transferred in and out of the main processing unit 603a via the vacuum transfer robot chamber 603b.

[0041] The wafer 602b is transferred between the vacuum transfer robot chamber 603b and the EFEM unit 603d via the load lock chamber 603c.

[0042] 5 is a schematic diagram showing a dry etching unit as a first example of the main processing unit 603a. The dry etching unit includes, for example, a chamber 603a1, a wafer holder 602a2, and an ion source 603a3. The wafer holder 603a2 holds a wafer 602b accommodated in the chamber 603a1. The ion source 603a3 irradiates ions onto the wafer 602b to perform dry etching of the wafer 602b.

[0043] 6 is a diagram showing a film formation unit (sputtering unit) as a second example of the main processing unit 603a. The film formation unit (sputtering unit) includes a chamber 603a4, a wafer holder 603a5, and a target holder 603a6. The wafer holder 603a5 holds a wafer 602b. The target holder 603a6 holds a sputtering target 603a7. The chamber 603a4 includes a gas supply port 603a8 for supplying a gas for film formation and an exhaust port 603a9 for exhausting unnecessary gas.

[0044] 7 and 8 are flowcharts of the aerial environment analysis method of this embodiment.

[0045] FIG. 9 is a diagram showing a schematic diagram of the concentration at the first measurement location A1, the concentration at the second measurement location A2, the opening and closing of the first valve 52, the opening and closing of the second valve 54, the opening and closing of the third valve 56, and the opening and closing of the fourth valve 58 in the aerial environment analysis method of this embodiment.

[0046] First, the first valve 52 is opened (S102 in FIG. 7, time t1 in FIG. 9). Note that the second valve 54 is closed. Also, the third valve 56 is open. Note that the third valve 56 may be closed. Also, the fourth valve 58 is closed. Note that the fourth valve 58 may be open.

[0047] Next, the first vacuum pump 4 or the second vacuum pump 3 is used to supply the analyte from the first measurement location A1 to the analyzer 2 via the first end 12 (S104 in FIG. 7). Here, the analyte at the first measurement location A1 is defined as the first analyte.

[0048] Next, the analysis device 2 is used to perform an analysis of the first analysis subject (first analysis) for a predetermined time (an example of a first predetermined time) (S106 in FIG. 7).

[0049] For example, if the concentration of the first analyte at the first measurement location A1 is high, the concentration of the analyte detected by the first analysis is likely to increase over time.

[0050] During the analysis (first analysis), if the concentration of the first analyte detected by the first analysis is equal to or higher than the first threshold concentration, the first valve 52 is closed and the second valve 54 is opened (S108 and S112 in FIG. 7, time t2 in FIG. 9). Next, purge gas is supplied from the gas supply source 6 to the first measurement location A1 through the second valve 54 and the first end 12 (S114 in FIG. 7). Next, the analyte is supplied from the second measurement location A2 to the analyzer 2 through the fifth end 32 (S116 in FIG. 7). Here, the analyte at the second measurement location A2 is the second analyte. Note that when the third valve 56 is closed, the third valve 56 is opened. Also, when the fourth valve 58 is open, the fourth valve 58 is closed. Furthermore, if the concentration of the first analyte detected by the first analysis is not equal to or greater than the first threshold concentration, the second analyte is supplied from the second measurement location A2 to the analysis device 2 via the fifth end 32 (S116).

[0051] Next, using the analytical device 2, an analysis of the second analyte (second analysis) is performed for a predetermined time (an example of a second predetermined time; the first and second predetermined times may be equal or different) (S118 in FIG. 7).

[0052] For example, if the concentration of the second analyte at the second measurement location A2 is high, the concentration of the analyte detected by the second analysis may increase over time.

[0053] During the analysis (during the second analysis), if the concentration of the second analyte detected by the second analysis is equal to or higher than the first threshold concentration, the third valve 56 is closed and the fourth valve 58 is opened (S120 and S124 in FIG. 7, time t3 in FIG. 9), and purge gas is supplied from the gas supply source 6 to the second measurement location A2 through the fifth end 32 (S126 in FIG. 7). Furthermore, if the first valve 52 is not open, the first valve 52 is opened, and if the second valve 54 is not closed, the second valve 54 is closed, and the first analyte is supplied from the first measurement location A1 to the analyzer 2 through the first end 12 (S128 and S130 in FIG. 7). Then, the first analysis of the first analyte is performed (S132 in FIG. 8). If the concentration of the second analyte detected by the second analysis is not equal to or greater than the first threshold concentration, the first valve 52 is opened if it is not open, and the second valve 54 is closed if it is not closed (S128 in FIG. 7).

[0054] Next, if the concentration of the first analyte is equal to or lower than a second threshold concentration that is lower than the first threshold concentration, the first analysis is continued (S134 and S136 in FIG. 8).If the concentration of the first analyte is not equal to or lower than the second threshold concentration, the first valve 52 is closed, the second valve 54 is opened, and purge gas is supplied from the gas supply source 6 to the first measurement location A1 via the first end 12 (S140 and S142 in FIG. 8).

[0055] Next, after a predetermined time (one example of a third predetermined time; the first, second and third predetermined times may be equal or different), if the third valve 56 is not open, it is opened, and if the fourth valve 58 is not closed, it is closed, and the second analyte is supplied from the second measurement location A2 to the analyzer 2 via the fifth end 32. Then, a second analysis of the second analyte is performed (S144, S146 and S148 in FIG. 8).

[0056] Then, if the concentration of the second analyte detected by the second analysis is equal to or lower than the second threshold concentration, the second analysis is continued (S150 and S152 in FIG. 8, time t4 in FIG. 9). Note that, if the concentration of the second analyte detected by the second analysis is not equal to or lower than the second threshold concentration, the third valve 56 is closed, the fourth valve 58 is opened, and purge gas is supplied from the gas supply source 6 to the second measurement location A2 via the fourth valve 58 and the fifth end 32 (S154 and S156 in FIG. 8).

[0057] FIG. 10 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of this embodiment.

[0058] As shown in Fig. 10, the steps S114, S116, and S118 in Fig. 7 may be performed simultaneously in order to perform the environmental analysis in a short time. Here, the dashed cross marks (x, cross-marks) attached to the first valve 52 and the fourth valve 58 in Fig. 10 indicate that the first valve 52 and the fourth valve 58 are closed. Also, the dashed circles (○) attached to the second valve 54 and the third valve 56 in Fig. 10 indicate that the second valve 54 and the third valve 56 are open. Also, the dashed arrows attached to the first pipe 10, the second pipe 20, and the third pipe 30 between the first end 12 and the first location 16 in Fig. 10 indicate the flow of air currents.

[0059] Similarly, the steps S142, S146, and S148 in FIG. 8 may be performed simultaneously in order to perform the environmental analysis in a short period of time.

[0060] FIG. 11 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of this embodiment.

[0061] As shown in Fig. 11, the steps shown in S126 and S130 in Fig. 7 and S132 in Fig. 8 may be performed simultaneously in order to perform the environmental analysis in a short time. Here, the dashed circle (○) attached to the first valve 52 and the fourth valve 58 in Fig. 11 indicates that the first valve 52 and the fourth valve 58 are open. Also, the dashed cross mark (×, cross mark) attached to the second valve 54 and the third valve 56 indicates that the second valve 54 and the third valve 56 are closed. Also, the dashed arrows attached to the first pipe 10, the fourth pipe 40, and the third pipe 30 between the fifth end 32 and the second location 36 indicate the flow of air currents.

[0062] Fig. 12 is a diagram showing the time course of analysis of piping and supply of purge gas (cleaning) in the air environment analyzing system of this embodiment. Note that Fig. 12 shows the time course from top to bottom of the drawing.

[0063] Analysis is performed in order using the pipes 702a, 702b, 702c, and 702d in Fig. 2. Then, in each pipe, purge gas is supplied while analysis is not being performed.

[0064] Fig. 13 is a diagram showing the time course of analysis of piping and supply of purge gas (cleaning) in the air environment analyzing system of this embodiment. Note that Fig. 13 shows the time course from top to bottom of the drawing.

[0065] When the analysis is completed, if the concentration of the analyte is equal to or higher than the first threshold concentration, purge gas is supplied, but if it is lower than that, the supply of purge gas is skipped. By skipping the supply of purge gas, it is possible to save power consumption of the purge gas and the airborne environmental analysis system. When the supply of purge gas is skipped, the open / closed state of the valves is the same as during the analysis. For example, in the system of the first piping 10 in FIG. 1, the second valve 54 is closed and the first valve 52 is left open. In this way, the environmental air of the first measurement location flows into the analyzer 2 via the first piping 10, so that a minimum cleaning effect is achieved.

[0066] Fig. 14 is a diagram showing the time course of analysis of piping and supply of purge gas (cleaning) in the air environment analyzing system of this embodiment. Note that Fig. 14 shows the time course from top to bottom of the drawing.

[0067] Concentration detection may be performed even during the supply of purge gas. If the concentration of the analyte does not fall below the first threshold concentration even after the supply of purge gas, the analysis result of the next cycle may be ignored. In this case, it is expected that the concentration of the analyte will fall below the first threshold concentration with the next supply of purge gas, but if it does not fall below the first threshold concentration, the supply of purge gas is repeated in the same manner.

[0068] If the concentration of the analyte during the analysis reaches or exceeds a third threshold concentration, which is higher than the first threshold concentration, the analysis may be terminated early. If the concentration of the analyte is significantly high, the analysis can be terminated early to prevent contamination of the analyzer and piping. Even in this case, the next analysis using the piping is performed after waiting for a predetermined time to elapse.

[0069] Next, the effects of the air environment analyzing apparatus and the air environment analyzing method of this embodiment will be described.

[0070] The inside of an analysis device 2 such as an ion chromatography system becomes contaminated by the subject of analysis in the ambient air, which is a contaminant in a clean room. Therefore, it is considered to clean the inside of the analysis device 2 with a purge gas such as nitrogen gas. This makes it possible to remove the contaminants inside the analysis device 2.

[0071] However, since the analysis device 2 is connected to the measurement location via a pipe, contaminants may also be adsorbed on the inner wall of the pipe connected to the analysis device 2. If contaminants are adsorbed on the inner wall of the pipe, the analysis device 2 may not be able to accurately measure the object to be analyzed. For example, after cleaning the inside of the analysis device 2, the device may be idling to remove the contaminants using the gas flowing through the pipe. However, in this case, it takes time to remove the contaminants adsorbed on the inner wall of the pipe. For example, when the analysis device is installed in a clean room for manufacturing semiconductor devices, the clean room is generally very large, and the length of the pipe may be, for example, several hundred meters. Therefore, it takes more and more time to remove the contaminants adsorbed on the inner wall of the pipe.

[0072] Consider a case where multiple pipes are connected to the analyzer 2 in order to analyze the target object at multiple locations in the clean room. In this case, the distance between the analyzer 2 and the multiple locations where the analysis is performed is different. Furthermore, the lengths of the multiple pipes are different from one another. As a result, the amount of contaminants adsorbed on the inner walls of each pipe is different, and it may become impossible to properly compare the analysis results of the target object at multiple locations.

[0073] Therefore, the aerial environment analyzing system of this embodiment has a mechanism for cleaning the piping connecting the analyzing device and the place where the analysis is performed by supplying a purge gas.

[0074] By providing valves (first valve and third valve) that can be connected to and disconnected from a gas supply source for each of the multiple pipes (first pipe and third pipe), it is possible to, for example, perform analysis of the second measurement location using the third pipe while cleaning the first pipe. Conversely, it is also possible to, for example, perform analysis of the first measurement location using the first pipe while cleaning the third pipe.

[0075] Furthermore, since cleaning is performed with the purge gas when the concentration of the analyte detected by the analysis is equal to or higher than the first threshold concentration, cleaning can be performed without impeding the efficiency of the measurement.

[0076] In addition, since the inner walls of the pipes can be cleaned, the adsorption conditions of contaminants can be made uniform even for pipes of different lengths (contaminants adsorbed to the inner walls of the pipes can be removed to a level that does not affect measurements by the analytical equipment), making it possible to compare measurement results.

[0077] According to the airborne environment analysis system and airborne environment analysis method of the present embodiment, it is possible to provide an airborne environment analysis system and airborne environment analysis method capable of efficiently performing environmental analysis.

[0078] Second embodiment The airborne environment analyzing system of this embodiment includes an analyzer, a first pipe provided at a first measurement location and having a first end which is an open end and a second end connected to the analyzer, a first valve provided on the first pipe, a second pipe having a third end connected to a first location of the first pipe between the first valve and the second end and an open fourth end, a second valve provided on the second pipe, a first filter provided on the second pipe between the second valve and the fourth end, a third pipe provided at a second measurement location and having a fifth end which is an open end and a sixth end connected to the analyzer, a third valve provided on the third pipe, a fourth pipe having a seventh end connected to a second location of the third pipe between the third valve and the sixth end and an open eighth end, a fourth valve provided on the fourth pipe, a second filter provided on the fourth pipe between the fourth valve and the eighth end, and a first pump connected to the second end and the sixth end.

[0079] Here, the description of the contents that overlap with the first embodiment will be omitted.

[0080] FIG. 15 is a schematic diagram of an aerial environment analyzing system 200 of this embodiment.

[0081] The second end 14 of the first pipe 10 is connected to the analysis device 2 .

[0082] The second pipe 20 has a third end 22 connected to the first location 16 of the first pipe 10 between the first valve 52 and the second end 14, and an open fourth end 24. The fourth end 24 is provided, for example, in a first environment B1 in a clean room. The first environmental air is supplied from the first environment B1 to the second end 14 through the fourth end 24. The first environmental air is preferably taken in by the first vacuum pump 4. In general, the exhaust capacity (volume) of the second vacuum pump 3 provided inside the analysis device 2 is small, so that the cleaning of the pipe can be completed in a shorter time by supplying the first environmental air using the first vacuum pump 4 having a larger exhaust capacity. The first environmental air may be taken in by the second vacuum pump 3.

[0083] The first filter 82 is disposed between the second valve 54 and the fourth end 24. The first ambient air is filtered by the first filter 82.

[0084] The sixth end 34 of the third pipe 30 is connected to the analysis device 2 .

[0085] The fourth pipe 40 has a seventh end 42 connected to the second location 36 of the third pipe 30 between the third valve 56 and the sixth end 34, and an open eighth end 44. The eighth end 44 is provided in, for example, a second environment B2 in a clean room. The second environmental air is taken from the second environment B2 to the sixth end 34 through the eighth end 44. The second environmental air is preferably taken in by the first vacuum pump 4. The second environmental air may be taken in by the second vacuum pump 3.

[0086] The second filter 84 is disposed between the fourth valve 58 and the eighth end 44. The second ambient air is filtered by the second filter 84.

[0087] The first filter 82 and the second filter 84 are filters that have a membrane such as ion exchange resin, activated carbon, or PTFE (polytetrafluoroethylene) and can be attached to piping. The first filter 82 and the second filter 84 function as a filter unit. In other words, the airborne environment analyzing system 200 of this embodiment includes the first filter 82 and the second filter 84 as a filter unit.

[0088] In the airborne environment analyzing system and airborne environment analyzing method of the present embodiment, the inner wall of the pipe is cleaned using environmental air purified by a filter.

[0089] It is preferable that the length L6 of the first pipe 10 between the second end 14 and the first location 16 is longer than the length L5 of the first pipe 10 between the first end 12 and the first valve 52. It is difficult to clean the first pipe 10 between the first end 12 and the first valve 52 with the first environmental air. Therefore, if the length L5 of the first pipe 10 between the first end 12 and the first valve 52 is too long, the amount of pollutants in the environmental air that are adsorbed on the inner wall of the first pipe 10 between the first end 12 and the first valve 52 increases, which may cause an error in the analysis result of the analyzer 2.

[0090] It is preferable that the length L8 of the third pipe 30 between the sixth end 34 and the second location 36 is longer than the length L7 of the third pipe 30 between the fifth end 32 and the third valve 56. It is difficult to clean the third pipe 30 between the fifth end 32 and the third valve 56 with the second environmental air. Therefore, if the length L7 of the third pipe 30 between the fifth end 32 and the third valve 56 is too long, the amount of environmental air contaminants adsorbed on the inner wall of the third pipe 30 between the fifth end 32 and the third valve 56 increases, which may cause an error in the analysis result of the analyzer 2.

[0091] 16 and 17 are flowcharts of the aerial environment analysis method of this embodiment.

[0092] The difference from the flowchart of the first embodiment is that purge gas is supplied from the gas supply source 6 to the first measurement location A1 via the second valve 54 and the first end 12 (S114 in FIG. 7 and S142 in FIG. 8), and the first environmental intake air is supplied from the fourth end 24 to the second end 14 via the first filter 82 and the third end 22 (S214 in FIG. 16 and S242 in FIG. 17), and that purge gas is supplied from the gas supply source 6 to the second measurement location A2 via the fifth end 32 (S126 in FIG. 7 and S156 in FIG. 8), and the second environmental air is supplied from the eighth end 44 to the sixth end 34 via the second filter 84 and the seventh end 42 (S226 in FIG. 16 and S256 in FIG. 17).

[0093] FIG. 18 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of this embodiment.

[0094] As shown in Fig. 18, the steps shown in S214, S116 and S118 in Fig. 16 may be performed simultaneously in order to perform the environmental analysis in a short time. Here, the dashed cross marks (x, cross-marks) attached to the first valve 52 and the fourth valve 58 in Fig. 18 indicate that the first valve 52 and the fourth valve 58 are closed. Also, the dashed circles (○) attached to the second valve 54 and the third valve 56 in Fig. 18 indicate that the second valve 54 and the third valve 56 are open. Also, the dashed arrows attached to the second pipe 20, the first pipe 10 between the first location 16 and the second end 14, the analyzer 2, between the first vacuum pump 4 and the analyzer 2, and the third pipe 30 in Fig. 18 indicate the flow of air currents.

[0095] Similarly, the steps shown in S242, S146, and S148 in FIG. 17 may be performed simultaneously in order to perform the environmental analysis in a short period of time.

[0096] FIG. 19 is a schematic diagram showing an example of a usage mode of the aerial environment analyzing system of this embodiment.

[0097] As shown in Fig. 19, the steps shown in S226 and S130 in Fig. 16 and S132 in Fig. 17 may be performed simultaneously in order to perform the environmental analysis in a short time. Here, the dashed circle (○) attached to the first valve 52 and the fourth valve 58 in Fig. 19 indicates that the first valve 52 and the fourth valve 58 are open. Also, the dashed cross mark (×, cross mark) attached to the second valve 54 and the third valve 56 indicates that the second valve 54 and the third valve 56 are closed. Also, the dashed arrows attached to the first pipe 10, the fourth pipe 40, the third pipe 30 between the second location 36 and the sixth end 34, the analyzer 2, and between the first vacuum pump 4 and the analyzer 2 in Fig. 19 indicate the flow of air currents.

[0098] As in this embodiment, the inner wall of the pipe may be cleaned using filtered ambient air.

[0099] The airborne environment analysis system and airborne environment analysis method of the present embodiment also make it possible to provide an airborne environment analysis system and airborne environment analysis method that are capable of efficiently performing environmental analysis.

[0100] Third embodiment The aerial environment analysis system of this embodiment includes an analyzer, a first pipe provided at a first measurement location and having a first end which is an open end and a second end connected to the analyzer, a first valve provided in the first pipe, a third pipe provided at a second measurement location and having a fifth end which is an open end and a sixth end connected to the analyzer, a third valve provided in the third pipe, a second pipe having a third end connected to a first location of the first pipe between the first valve and the second end and a fourth end connected to a second location of the third pipe between the third valve and the sixth end, a second valve provided in the second pipe, a fourth valve provided between the second valve and the second location of the second pipe, a first filter provided in the second pipe between the second valve and the fourth valve, a seventh pipe having a ninth end which is an open end and a tenth end connected to the first filter, and a first pump connected to the second end and the sixth end.

[0101] Here, the description of the contents overlapping with the first and second embodiments will be omitted.

[0102] FIG. 20 is a schematic diagram of an aerial environment analyzing system 300 of this embodiment.

[0103] The third end 22 of the second pipe 20 is connected to the first location 16 of the first pipe 10 between the first valve 52 and the second end 14, and the fourth end 24 of the second pipe 20 is connected to the first filter 82 serving as a filter unit. In addition, the seventh end 42 of the fourth pipe 40 is connected to the second location 36 of the third pipe 30 between the third valve 56 and the sixth end 34, and the eighth end 44 of the fourth pipe 40 is connected to the first filter 82 serving as a filter unit.

[0104] The fourth valve 58 is provided in the second pipe 20 between the second valve 54 and the second location 36 .

[0105] The first filter 82 is provided in the second pipe 20 between the second valve 54 and the fourth valve 58 .

[0106] The seventh pipe 90 has a ninth end 92 which is an open end and is disposed in the first environment B1, and a tenth end 94 which is connected to the first filter 82. The seventh pipe 90 is, for example, a pipe made of fluororesin. The seventh pipe 90 is, for example, a metal pipe lined with fluororesin. Note that the pipe preferably used as the seventh pipe 90 is not limited to the above.

[0107] Unlike the airborne environment analysis system 200 of the second embodiment, the airborne environment analysis system 300 of the present embodiment cleans the inner wall of the piping by supplying first environmental air filtered by one first filter 82 to the second end 14 and the sixth end 34. In other words, while the filter unit of the airborne environment analysis system 200 of the second embodiment includes the first filter 82 and the second filter 84, the filter unit of the airborne environment analysis system 300 of the third embodiment includes only the first filter 82.

[0108] 21 and 22 are flowcharts of the aerial environment analysis method of this embodiment.

[0109] The differences from the flowchart of the second embodiment are that the first environmental intake air is supplied from the fourth end 24 to the second end 14 via the first filter 82 and the third end 22 (S214 in FIG. 16 and S242 in FIG. 17) but the first environmental air is supplied from the ninth end 92 to the second end 14 via the first filter 82 and the third end 22 (S314 in FIG. 21 and S342 in FIG. 22), and that the second environmental air is supplied from the eighth end 44 to the sixth end 34 via the second filter 84 and the seventh end 42 (S226 in FIG. 16 and S256 in FIG. 17) but the first environmental air is supplied from the ninth end 92 to the sixth end 34 via the first filter 82 and the seventh end 42 (S326 in FIG. 21 and S356 in FIG. 22).

[0110] The airborne environment analyzing system and airborne environment analyzing method of the present embodiment use one filter, and therefore can perform environmental analysis with a simple structure.

[0111] The airborne environment analysis system and airborne environment analysis method of the present embodiment also make it possible to provide an airborne environment analysis system and airborne environment analysis method that are capable of efficiently performing environmental analysis.

[0112] (Fourth embodiment) The airborne environment analyzing system of this embodiment has a similar configuration to the airborne environment analyzing system of the first embodiment (FIG. 1), but the method of performing piping analysis is different. More specifically, the airborne environment analyzing system of this embodiment includes, as piping analysis, a preliminary analysis for evaluating the state of the piping as a result of purge gas supply (cleaning) and a main analysis for evaluating the environmental air after the effects of purge gas supply (cleaning) have disappeared. In this case, the period of piping analysis includes a preliminary analysis period in which the preliminary analysis is performed, a main analysis period in which the main analysis is performed, and a switching period set between the preliminary analysis period and the main analysis period, as shown in FIG. 23.

[0113] In the air environment analysis system of this embodiment, the preliminary analysis is performed immediately after the supply of the purge gas and before the main analysis. In other words, the preliminary analysis is performed as a part of the analysis of the piping, at an early stage of the analysis of the piping.

[0114] In the air environment analyzing system of this embodiment, the open / closed state of each valve when performing a preliminary analysis is the same as the open / closed state of each valve when performing a main analysis. Specifically, the open / closed state of each valve when performing a preliminary analysis on the first pipe 10 arranged at the first measurement location A1 is the same as the state shown in Fig. 11. Moreover, the open / closed state of each valve when performing a preliminary analysis on the third pipe 30 arranged at the second measurement location A2 is the same as the state shown in Fig. 10.

[0115] A preliminary analysis may be performed, for example, for a given pipe if the analysis of the immediately preceding pipe indicates a concentration of the analyte equal to or greater than a threshold value. In other words, if the analysis of the immediately preceding pipe indicates a concentration of the analyte lower than a threshold value, only a main analysis may be performed as the analysis of the pipe, and if the analysis of the immediately preceding pipe indicates a concentration of the analyte equal to or greater than a threshold value, both a preliminary analysis and a main analysis may be performed as the analysis of the pipe.

[0116] In the airborne environment analysis system of this embodiment, the preliminary analysis is performed to evaluate the state of the piping as a result of the purge gas supply (cleaning). That is, the preliminary analysis is performed to analyze the concentration of the analyte in the purge gas when the piping is filled with the purge gas as a result of the purge gas supply. This allows the effect of cleaning the piping by the purge gas supply to be evaluated. In particular, by performing the preliminary analysis when the concentration of the analyte in the immediately preceding analysis is equal to or higher than the threshold, it is possible to more reliably confirm that the analyte does not remain in the piping prior to the main analysis. This makes it possible to avoid the main analysis being performed in an inappropriate state. In addition, it is possible to avoid contamination of the analysis device 2 by performing the main analysis with the analyte remaining in the piping. On the other hand, by not performing the preliminary analysis when the concentration of the analyte in the immediately preceding analysis is lower than the threshold, it is possible to secure time for the main analysis.

[0117] Fig. 24 is a diagram showing the time course of piping analysis and purge gas supply (cleaning) in the air environment analyzing system of this embodiment. Fig. 24 shows a state in which a preliminary analysis is performed only when the concentration of the analyte in the immediately preceding piping analysis is equal to or higher than the threshold value.

[0118] The preliminary analysis period may be adjusted depending on the length of the pipe, for example. Specifically, for example, the preliminary analysis period may be longer for a pipe analysis of a long pipe, and may be shorter for a pipe analysis of a short pipe.

[0119] Fifth embodiment The airborne environment analysis system of this embodiment has a similar configuration to the airborne environment analysis system of the second embodiment (FIG. 15), but the method of performing piping analysis is different. More specifically, like the airborne environment analysis system of the fourth embodiment, the airborne environment analysis system of this embodiment includes, as piping analysis, a preliminary analysis that evaluates the state of the piping as a result of purge gas supply (cleaning) and a main analysis that evaluates the environmental air after the effects of purge gas supply (cleaning) have disappeared.

[0120] In the air environment analyzing system of the fourth embodiment, a preliminary analysis was performed after the purge gas supply (cleaning) was completed. However, in the air environment analyzing system of this embodiment, the preliminary analysis is performed in parallel with the purge gas supply (cleaning) without manipulating the opening and closing state of the valve during the purge gas supply (cleaning). In this case, the period of analysis of the piping includes a preliminary analysis period in which the purge gas supply (cleaning) and the preliminary analysis are performed in parallel, a main analysis period in which the main analysis is performed, and a switching period set between the preliminary analysis period and the main analysis period, as shown in FIG.

[0121] In the air environment analyzing system of this embodiment, the open / closed state of each valve when performing a preliminary analysis is similar to the open / closed state of each valve when performing a purge gas supply (cleaning). Specifically, the open / closed state of each valve when performing a preliminary analysis on the first pipe 10 arranged at the first measurement location A1 is similar to the state shown in Fig. 18. Moreover, the open / closed state of each valve when performing a preliminary analysis on the third pipe 30 arranged at the second measurement location A2 is similar to the state shown in Fig. 19.

[0122] In the air environment analyzing system of this embodiment as well, like the air environment analyzing system of the fourth embodiment, the effect of cleaning piping by supplying a purge gas can be evaluated.

[0123] Although the air environment analyzing system of this embodiment has been described as having the same configuration as the air environment analyzing system of the second embodiment (FIG. 15), it may have the same configuration as the air environment analyzing system of the third embodiment (FIG. 20). Even in this case, by setting the open / closed status of each valve in the same way, it is possible to perform a preliminary analysis and evaluate the effect of cleaning the piping by supplying a purge gas.

[0124] Fig. 26 is a diagram showing the time course of piping analysis and purge gas supply (cleaning) in the air environment analyzing system of this embodiment. Fig. 26 shows a state in which a preliminary analysis is performed only when the concentration of the analyte in the immediately preceding piping analysis is equal to or higher than the threshold value.

[0125] Although some embodiments and examples of the present invention have been described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0126] 2 Analyzer 3. Second vacuum pump (second pump) 4. First vacuum pump (first pump) 6 Gas supply source 10 First Pipe 12 First end 14 Second end 16 Part 1 20 Second piping 22 Third end 24 4th end 30 Third Pipe 32 5th end 34 6th end 36 Part 2 40 4th Pipe 42 7th end 44 8th end 52 First valve 54 Second Valve 56 3rd valve 58 4th valve 62 5th Pipe 64 6th Pipe 70 Control device 82 First Filter 84 Second Filter 90 7th Pipe 92 9th end 94 10th end 100 Airborne Environmental Analysis System 200 Airborne Environmental Analysis System 300 Airborne Environmental Analysis System A1 First measurement location A2 Second measurement location B1 1st environment B2 Second environment

Claims

1. An analytical device; a first end provided at a first measurement location; A second end; a first location between the first end and the second end; A first pipe having a first valve provided between the second end of the first pipe and the analysis device; a gas supply source that supplies a purge gas; a third end connected to the first location of the first pipe; a fourth end connected to the gas supply; A second pipe having a second valve provided in the second pipe; a fifth end provided at the second measurement location; and A sixth end; and a second location between the fifth end and the sixth end; A third pipe having a third valve provided between the sixth end of the third pipe and the analysis device; A seventh end connected to the second location of the third pipe; an eighth end connected to the gas supply; A fourth pipe having a fourth valve provided in the fourth pipe; An airborne environment analysis system comprising:

2. The length of the third pipe is different from the length of the first pipe. The airborne environment analysis system according to claim 1 .

3. The purge gas is high purity nitrogen gas or CDA gas; The airborne environment analysis system according to claim 1 .

4. The method further includes a control device capable of executing the airborne environment analysis method, The method for analyzing an aerial environment comprises: providing a first analyte from the first measurement location to the analytical device via the first end; performing a first analysis of the first analyte using the analysis device; After a first predetermined time has elapsed since the start of the first analysis, When the concentration of the first analyte detected by the first analysis is equal to or greater than a first threshold concentration, closing the first valve; Opening the second valve; supplying the purge gas from the gas supply source through the first end to the first measurement location; providing a second analyte from the second measurement location to the analytical device via the fifth end; performing a second analysis of the second analyte using the analysis device; When the concentration of the first analyte detected by the first analysis is not equal to or greater than the first threshold concentration, The second analysis is carried out without supplying the purge gas. Including, The airborne environment analysis system according to claim 1 .

5. The method for analyzing an aerial environment comprises: A preliminary analysis to evaluate the cleaning effect due to the supply of the purge gas and a main analysis to evaluate the environmental air, The airborne environment analysis system according to claim 4.

6. In the method for analyzing an aerial environment, After the first predetermined time has elapsed since the start of the first analysis, When the concentration of the first analyte detected by the first analysis is equal to or greater than the first threshold concentration, The supply of the purge gas to the first measurement location and the second analysis are performed simultaneously. The airborne environment analysis system according to claim 5.

7. In the method for analyzing an aerial environment, When the concentration of the first analyte detected by the first analysis is equal to or higher than a third threshold concentration that is higher than the first threshold concentration, the first analysis is stopped; The airborne environment analysis system according to claim 5.

8. When the concentration of the second analyte detected by the second analysis is equal to or greater than the first threshold concentration, closing the third valve; Open the fourth valve; supplying the purge gas from the gas supply source to the second measurement location through the fifth end; providing the first analyte from the first measurement location to the analytical device via the first end; When the concentration of the second analyte detected by the second analysis is not equal to or greater than the first threshold concentration, providing the first analyte from the first measurement location to the analytical device via the first end; When the concentration of the first analyte is equal to or less than a second threshold concentration that is lower than the first threshold concentration, Continuing the first analysis, if the concentration of the first analyte is not equal to or less than the second threshold concentration, closing the first valve; Opening the second valve; supplying the purge gas from the gas supply source through the first end to the first measurement location; The airborne environment analysis system according to claim 5.

9. if the concentration of the first analyte is not equal to or less than the second threshold concentration, closing the first valve; Opening the second valve; After supplying the purge gas from the gas supply source to the first measurement location through the first end, After the third predetermined time has elapsed, providing the second analyte from the second measurement location to the analytical device via the fifth end; performing the second analysis of the second analyte using the analysis device; when the concentration of the second analyte detected by the second analysis after the third predetermined time has elapsed is equal to or less than the second threshold concentration, Continuing the second analysis after the third predetermined time has elapsed; when the concentration of the second analyte detected by the second analysis after the third predetermined time has elapsed is not equal to or less than the second threshold concentration, closing the third valve; Open the fourth valve; supplying the purge gas from the gas source to the second measurement location through the fifth end; The airborne environment analysis system according to claim 8.

10. An analytical device; a first pipe provided at a first measurement location and having a first end that is an open end and a second end connected to the analytical device; a first valve provided in the first pipe; a third pipe provided at the second measurement location and having a fifth end that is an open end and a sixth end that is connected to the analytical device; a third valve provided in the third pipe; a second pipe having a third end connected to a first location of the first pipe between the first valve and the second end and a fourth end; a second pipe having a seventh end connected to a second location of the third pipe between the third valve and the sixth end and an eighth end; a second valve provided in the second pipe; a fourth valve provided in the fourth pipe; a filter unit connected to the fourth end and the eighth end; a first pump connected to the second end and the sixth end; An airborne environment analysis system comprising:

11. The length of the third pipe is different from the length of the first pipe. The airborne environment analysis system according to claim 10.

12. The analytical device includes a second pump; The capacity of the first pump is greater than the capacity of the second pump. The airborne environment analysis system according to claim 10.

13. The method further includes a control device capable of executing the airborne environment analysis method, The method for analyzing an aerial environment comprises: providing a first analyte from the first measurement location to the analytical device via the first end; performing a first analysis of the first analyte using the analysis device; After a first predetermined time has elapsed since the start of the first analysis, When the concentration of the first analyte detected by the first analysis is equal to or greater than a first threshold concentration, closing the first valve; Opening the second valve; providing a supply of ambient air to the second end via the filter unit and the third end; providing a second analyte from the second measurement location to the analytical device via the fifth end; performing a second analysis of the second analyte using the analysis device; When the concentration of the first analyte detected by the first analysis is not equal to or greater than the first threshold concentration, The second analysis is performed without supplying the ambient air. Including, The airborne environment analysis system according to claim 10.

14. The first analysis is closing the first valve; Opening the second valve; The air in the first pipe is evaluated by the analyzer while the ambient air is supplied to the second end through the filter unit and the third end. A first period; Opening the first valve; closing the second valve; Providing the first analyte from the first measurement location through the first end to the analytical device. A second period, The airborne environment analysis system according to claim 13.

15. In the method for analyzing an aerial environment, After the first predetermined time has elapsed since the start of the first analysis, When the concentration of the first analyte detected by the first analysis is equal to or greater than the first threshold concentration, The supply of the ambient air to the second end and the second analysis are performed simultaneously. The airborne environment analysis system according to claim 13.

16. In the method for analyzing an aerial environment, When the concentration of the first analyte detected by the first analysis is equal to or higher than a third threshold concentration that is higher than the first threshold concentration, the first analysis is stopped; The airborne environment analysis system according to claim 13.

17. The supply of the ambient air is performed using the first pump. The airborne environment analysis system according to claim 13.

18. When the concentration of the second analyte detected by the second analysis is equal to or greater than the first threshold concentration, closing the third valve; Open the fourth valve; supplying the ambient air to the sixth end through the filter unit; providing the first analyte from the first measurement location to the analytical device via the first end; When the concentration of the second analyte detected by the second analysis is not equal to or greater than the first threshold concentration, providing the first analyte from the first measurement location to the analytical device via the first end; When the concentration of the first analyte is equal to or less than a second threshold concentration that is lower than the first threshold concentration, Continuing the first analysis, if the concentration of the first analyte is not equal to or less than the second threshold concentration, closing the first valve; Opening the second valve; supplying the ambient air to the second end through the filter unit; The airborne environment analysis system according to claim 13.

19. if the concentration of the first analyte is not equal to or less than the second threshold concentration, closing the first valve; Opening the second valve; After supplying the ambient air to the second end through the filter unit, After the third predetermined time has elapsed, providing the second analyte from the second measurement location to the analytical device via the fifth end; performing the second analysis of the second analyte using the analysis device; when the concentration of the second analyte detected by the second analysis after the third predetermined time has elapsed is equal to or less than the second threshold concentration, Continuing the second analysis after the third predetermined time has elapsed; when the concentration of the second analyte detected by the second analysis after the third predetermined time has elapsed is not equal to or less than the second threshold concentration, closing the third valve; Open the fourth valve; The supply of the ambient air to the sixth end through the filter unit.

20. The airborne environment analysis system according to claim 18.

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