Processing apparatus and method for processing workpiece

Abstract

To provide a processing method and a processing apparatus that can confirm the cross-sectional shape both on the processing start side and the processing end side of a processed groove.SOLUTION: A processing apparatus 1 includes: a chuck table 10 which has a holding surface 11 that can hold a workpiece 200; an inspection table 60 which has an inspection holding surface 61 that can hold an inspection piece 70; a rotation drive unit 63 which rotates the inspection holding surface along a rotation axis 55 parallel to the inspection holding surface; a cutting unit 20 which processes the workpiece and the inspection piece; and an imaging unit 30 which images the workpiece and the inspection piece. The cutting unit 20 forms a processing groove 80 in the inspection piece such that a cross-section is exposed at at least one end of the inspection piece in a direction orthogonal to the rotation axis. The rotation drive unit rotates the inspection holding surface to move between a processing position parallel to the processing holding surface and an imaging position orthogonal to the processing holding surface, at which the cross-section on either the processing start side or processing end side of the processing groove is imaged by the imaging unit.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a processing apparatus and a method for processing a workpiece.

Background Art

[0002] In a processing apparatus and a processing method for forming a processing groove in a workpiece, there is provided an apparatus capable of processing an inspection piece held on an inspection table beside a processing table and rotating the inspection piece to image the cross-sectional shape of the processing groove on the processing apparatus (see, for example, Patent Document 1 and Patent Document 2).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the conventional technology, when the inspection piece is formed according to the material of the workpiece, depending on the material and the processing method, defects such as burrs, cracks, and chipping are more likely to occur on either the processing start side or the processing end side of the processing groove. If these defects occur, it may not be possible to accurately detect the shape of the processing groove, such as its width and depth. Therefore, there is a problem to be solved in that it is necessary to confirm the shape of the processing groove with good processing quality on either or both of the processing start side and the processing end side.

[0005] The present invention has been made in view of this point, and an object thereof is to provide a processing method and a processing apparatus capable of confirming the cross-sectional shape on either the processing start side or the processing end side of the processing groove.

Means for Solving the Problems

[0006] The processing apparatus of the present invention includes a processing table having a processing holding surface capable of holding a workpiece, an inspection table having an inspection holding surface capable of holding an inspection piece, a rotation driving unit that rotates the inspection holding surface along a rotation axis parallel to the inspection holding surface, a processing unit that processes the workpiece and the inspection piece, and an imaging unit that images the workpiece and the inspection piece. The processing unit forms a processing groove on the inspection piece such that a cross section is exposed at at least one end of the inspection piece in a direction orthogonal to the rotation axis. The rotation driving unit rotates and moves the inspection holding surface between a processing position parallel to the processing holding surface and an imaging position orthogonal to the processing holding surface and where a cross section on either the processing start side or the processing end side of the processing groove is imaged by the imaging unit.

[0007] Further, the inspection holding surface of the processing apparatus of the present invention includes a first inspection holding surface that holds a first inspection piece and a second inspection holding surface that is orthogonal to the first inspection holding surface and holds a second inspection piece. The rotation driving unit may rotate and move the inspection holding surface between a first position where the first inspection holding surface is positioned at the processing position and the second inspection holding surface is positioned at the imaging position, and a second position where the first inspection holding surface is positioned at the imaging position and the second inspection holding surface is positioned at the processing position.

[0008] Further, the processing unit of the processing apparatus of the present invention may include a rotating spindle, a mount connected to the spindle, and a cutting blade fixed to the mount.

[0009] Further, the processing apparatus of the present invention may further include a determination unit that determines whether the shape of the processing groove is normal based on an image captured by the imaging unit.

[0010] A method for processing a workpiece using the processing apparatus of the present invention may include a processing step of positioning the inspection piece at the processing position and forming the processing groove on the inspection piece such that a cross section is exposed at at least one end of the inspection piece in a direction orthogonal to the rotation axis, and an imaging step of rotating the inspection holding surface to position it at the imaging position and imaging a cross section on either the processing start side or the processing end side of the processing groove with the imaging unit.

[0011] In addition, the method for processing a workpiece according to the present invention includes a first processing step of positioning the first inspection holding surface at the processing position and forming a first processing groove in the first inspection piece, and a first imaging step of positioning the first inspection holding surface at the imaging position and imaging a cross section on the processing start side of the first processing groove with the imaging unit. The method further includes an inspection step on the processing start side including these steps, a second processing step of positioning the second inspection holding surface at the processing position and forming a second processing groove in the second inspection piece, and a second imaging step of positioning the second inspection holding surface at the imaging position and imaging a cross section on the processing end side of the second processing groove with the imaging unit. The method further includes an inspection step on the processing end side including these steps, and at least one of the inspection step on the processing start side and the inspection step on the processing end side may be performed.

[0012] In addition, the method for processing a workpiece according to the present invention may further include a determination step of determining whether the shape of the processing groove is normal based on the image captured by the imaging unit.

[0013] In addition, the processing unit of the present invention has a cutting blade, and the method for processing a workpiece according to the present invention may further include a cutting edge position detection step of detecting the cutting edge position of the cutting blade based on the image captured by the imaging unit.

Advantages of the Invention

[0014] According to the present invention, it is possible to provide a processing method and a processing apparatus capable of confirming the cross-sectional shape of both the processing start side and the processing end side of the processing groove.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

MODE FOR CARRYING OUT THE INVENTION

[0016] 〔Embodiment 1〕 The processing method according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus for carrying out the processing method according to Embodiment 1. FIG. 2 is a cross-sectional view showing an example of the inspection table of Embodiment 1. FIG. 3 is a cross-sectional view schematically showing the processing steps of the processing method of Embodiment 1. FIG. 4 is a diagram showing an example of a captured image captured by an imaging unit. FIG. 5 is a flowchart showing an example of the processing method of Embodiment 1. FIGS. 6 and 7 are cross-sectional views schematically showing the processing steps and the imaging steps of the processing method according to a modification of Embodiment 1. FIGS. 8 and 9 are cross-sectional views schematically showing the processing steps and the imaging steps of the processing method according to Embodiment 2. FIG. 10 is a flowchart showing an example of the processing method of Embodiment 2. FIG. 11 is a cross-sectional view schematically showing the processing steps and the imaging steps of the processing method according to Embodiment 3.

[0017] The X-axis direction, Y-axis direction, and Z-axis direction shown in each figure are perpendicular to each other. The X-axis direction and the Y-axis direction are substantially horizontal directions, and the Z-axis direction is the vertical direction (up and down direction). In each figure, among the double-headed arrows indicating the X-axis direction, the -X side is the left side and the +X side is the right side. Among the double-headed arrows indicating the Y-axis direction, the -Y side is the front side and the +Y side is the rear side. Among the double-headed arrows indicating the Z-axis direction, the +Z side is the upper side and the -Z side is the lower side.

[0018] (Processing device) The processing method according to Embodiment 1 is a method in which the processing device 1 shown in FIG. 1 cuts the workpiece 200. Cutting is an example of processing. In Embodiment 1, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate 204 made of silicon, sapphire, gallium, etc. In the workpiece 200, devices 203 are formed in regions partitioned in a grid pattern by a plurality of division planned lines 202 formed in a grid pattern on the surface 201 of the substrate 204.

[0019] Further, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which the central portion is thinned and a thick portion is formed at the outer peripheral portion. In addition to the wafer, a rectangular package substrate having a plurality of devices sealed with resin, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron may also be used. In Embodiment 1, a disk-shaped adhesive tape 210 having a diameter larger than that of the workpiece 200 is attached to the back surface 205 of the substrate 204 of the workpiece 200, and an annular frame 211 is attached to the outer peripheral edge of the adhesive tape 210 and is supported by the annular frame 211.

[0020] The processing device 1 shown in FIG. 1 is a cutting device that holds the workpiece 200 on the chuck table 10 and cuts it along the division planned line 202 with the cutting blade 21 to divide it into individual chips 206. The chuck table 10 is an example of a processing table. The processing table is not limited to the chuck table 10, and may be a sub-chuck table for placing a small piece for dressing or a table for placing a silicon base for detecting the shape of a processing groove.

[0021] Chip 206 includes a portion of the substrate 204 and the device 203. As shown in FIG. 1, the processing apparatus 1 includes a table unit 2 having a chuck table 10 that suction - holds the workpiece 200 on the holding surface 11, a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 with a cutting blade 21, an imaging unit 30 that images the workpiece 200 held on the chuck table 10, and a control unit 100 that is a control means. The cutting unit 20 is an example of a processing unit. Although a cutting unit 20 that cuts with a cutting blade 21 is used as an example of the processing unit, it is not limited thereto, and a laser cutting unit (not shown) that cuts with a laser beam may be used.

[0022] Also, as shown in FIG. 1, the processing apparatus 1 includes an X - axis moving unit 31 that feeds the chuck table 10, that is, the table unit 2, in the X - axis direction parallel to the horizontal direction, a Y - axis moving unit 32 that feeds the cutting unit 20 in the Y - axis direction parallel to the horizontal direction and orthogonal to the X - axis direction, a Z - axis moving unit 33 that feeds the cutting unit 20 in the Z - axis direction parallel to the vertical direction orthogonal to both the X - axis direction and the Y - axis direction, and a rotational moving unit 34 that rotates the chuck table 10 around an axis parallel to the Z - axis direction. The processing apparatus 1 is a so - called facing dual - type cutting apparatus, that is, a dicing saw having two cutting units 20, i.e., two spindles.

[0023] The chuck table 10 has a disk shape, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. The holding surface 11 is an example of a machining holding surface. Further, the chuck table 10 is provided so as to be movable in the X-axis direction across a machining area below the cutting unit 20 by the X-axis moving unit 31 and a loading / unloading area where the workpiece 200 is loaded and unloaded while being separated from below the cutting unit 20, and is provided so as to be rotatable about an axis parallel to the Z-axis direction by the rotational moving unit 34. The chuck table 10 has the holding surface 11 connected to a vacuum suction source (not shown), and sucks and holds the workpiece 200 placed on the holding surface 11 by being sucked by the vacuum suction source. In Embodiment 1, the chuck table 10 sucks and holds the back surface 205 side of the workpiece 200 via the adhesive tape 210.

[0024] In addition, in Embodiment 1, the chuck table 10 is provided on a table cover 3 that moves in the X-axis direction by the X-axis moving unit 31 of the table unit 2, and is rotatably supported about an axis by a rotational moving unit 34 that is provided so as to be movable in the X-axis direction by the X-axis moving unit 31. The upper surface of the table cover 3 is formed flat along the horizontal direction.

[0025] The cutting unit 20 is a cutting means to which a cutting blade 21 for cutting the workpiece 200 held by the chuck table 10 is detachably attached. The cutting unit 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 32 and movable in the Z-axis direction by the Z-axis moving unit 33 with respect to the workpiece 200 held by the chuck table 10, respectively.

[0026] As shown in FIG. 1, one cutting unit 20 is provided on one column portion of a portal-shaped support frame 5 erected from the apparatus main body 4 via a Y-axis moving unit 32, a Z-axis moving unit 33, and the like. As shown in FIG. 1, the other cutting unit 20 is provided on the other column portion of the support frame 5 via a Y-axis moving unit 32, a Z-axis moving unit 33, and the like. The support frame 5 connects the upper ends of the column portions with a horizontal beam. For the drawings after FIG. 2, description will be made based on one cutting unit 20.

[0027] The cutting unit 20 can position the cutting blade 21 at an arbitrary position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit 32 and the Z-axis moving unit 33.

[0028] The cutting unit 20 is provided so as to be movable in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 32 and the Z-axis moving unit 33, and includes a mount 22 connected to a spindle 23, a spindle 23 rotatably provided around an axis in the mount 22, and a cutting blade 21 mounted on the spindle 23 and fixed to the mount 22.

[0029] The cutting blade 21 is an extremely thin grinding wheel having a substantially ring shape. In Embodiment 1, the cutting blade 21 is a so-called hub blade, and includes an annular circular base made of a conductive metal and an annular cutting edge disposed on the outer peripheral edge of the circular base and cutting the workpiece 200. The cutting edge is made of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (binding material) such as metal and resin, and is formed to have a predetermined thickness. The spindle 23 is rotated by a spindle motor (not shown) and is mounted on the cutting blade 21 at its tip. The axes of the spindle 23 and the cutting blade 21 of the cutting unit 20 are set parallel to the Y-axis direction.

[0030] The imaging unit 30 is fixed to one cutting unit 20 so as to move integrally with the one cutting unit 20. The imaging unit 30 includes an imaging element that images a region to be divided of the workpiece 200 before cutting held on the chuck table 10. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element.

[0031] The imaging unit 30 images the workpiece 200 held on the chuck table 10 to obtain an image. The obtained image is used to perform alignment for aligning the workpiece 200 and the cutting blade 21. The imaging unit 30 outputs the obtained image to the control unit 100.

[0032] Also, the imaging unit 30 images the inspection piece 70 held on the inspection table 60 to obtain an image. Specifically, the imaging unit 30 images a cross section that is orthogonal to the inspection holding surface 61 and is either on the machining start side or the machining end side of the machining groove. The obtained image is used to determine whether the cutting blade 21 needs to be replaced when the inspection piece 70 is cut by the cutting blade 21. The imaging unit 30 outputs the obtained image to the control unit 100.

[0033] The X-axis movement unit 31 relatively moves the chuck table 10 of the table unit 2 in the X-axis direction, which is the machining feed direction, so as to perform machining feed along the X-axis direction between the chuck table 10 and the cutting unit 20. The Y-axis movement unit 32 relatively moves the cutting unit 20 in the Y-axis direction, which is the indexing feed direction, so as to perform indexing feed along the Y-axis direction between the chuck table 10 and the cutting unit 20. The Z-axis movement unit 33 relatively moves the cutting unit 20 in the Z-axis direction, which is the cutting feed direction, so as to perform cutting feed along the Z-axis direction between the chuck table 10 and the cutting unit 20.

[0034] The X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 include a well-known ball screw rotatably provided around an axis, a well-known motor that rotates the ball screw around the axis of the rotation shaft 55, and a well-known guide rail that movably supports the chuck table 10 or the cutting unit 20 in the X-axis direction, Y-axis direction, or Z-axis direction.

[0035] Further, the processing apparatus 1 includes an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction, a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction by the pulses of the motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the positions of the chuck table 10 in the X-axis direction, the cutting unit 20 in the Y-axis direction, or the Z-axis direction to the control unit 100. In the first embodiment, the positions of the respective components of the processing apparatus 1 in the X-axis direction, Y-axis direction, and Z-axis direction are determined based on a position with respect to a predetermined reference position (not shown).

[0036] Further, the processing apparatus 1 includes a cassette elevator 40 on which a cassette (not shown) for accommodating the workpiece 200 before and after cutting is placed and that moves the cassette in the Z-axis direction, a cleaning unit 50 for cleaning the workpiece 200 after cutting, and a conveying unit (not shown) for taking the workpiece 200 in and out of the cassette and conveying the workpiece 200 between the cassette, the chuck table 10, and the cleaning unit 50.

[0037] Further, the processing apparatus 1 includes an inspection table 60. The inspection table 60 is provided on the table cover 3 of the table unit 2 and is formed in a rectangular shape and composed of a metal material with a flat inspection holding surface 61 as shown in FIG. 2.

[0038] As shown in FIG. 2, the inspection table 60 is installed adjacent to the chuck table 10. The inspection table 60 does not necessarily have to be installed adjacent to the chuck table 10, and it may be installed within a range where both the workpiece 200 held by the chuck table 10 and the inspection piece 70 held by the inspection table 60 can be processed by the cutting unit 20. Therefore, the inspection table 60 may be arranged independently of the chuck table 10, or may be connected to each other at the lower end of the apparatus main body 4.

[0039] In the present embodiment, the inspection table 60 includes an extension plate 51 extending leftward (-X-axis direction) below the chuck table 10 (-Z-axis direction), a support base 52 installed above the extension plate 51 (+Z-axis direction), a fixed base 53 placed above the support base 52 (+Z-axis direction), a holding portion 54 pivotally supported rotatably with respect to the fixed base 53, and a rotating shaft 55. The rotating shaft 55 is arranged along the X-axis direction. The holding portion 54 is pivotally supported by the fixed base 53 by the rotating shaft 55 and is fixed rotatably about the X-axis direction. The holding portion 54 is formed in an L-shaped cross section. An inspection holding surface 61 is arranged on the holding portion 54. The inspection table 60 is rotatably supported about an axis parallel to the Y-axis direction by a rotation driving unit 63 attached to the table cover 3. That is, the rotation driving unit 63 rotates the inspection holding surface 61 of the inspection table 60 along the rotating shaft 55 parallel to the inspection holding surface 61.

[0040] The rotation driving unit 63 rotates the inspection table 60 based on the driving force supplied from a driving source supply unit (not shown). The rotation driving unit 63 is formed by a motor and can rotate the inspection table 60 to an arbitrary rotation position. The rotation driving unit 63 formed by a motor can rotate the inspection table 60 to at least three arbitrary positions (3 positions).

[0041] In Embodiment 1, the longitudinal direction of the inspection table 60 is parallel to the Y-axis direction. The inspection table 60 has an inspection piece 70 shown in FIG. 2 placed on the inspection holding surface 61. The inspection piece 70 is made of the same material as the substrate 204 of the workpiece 200 and is formed in a flat plate shape with a rectangular plane shape that is the same as the inspection holding surface 61.

[0042] The inspection table 60 has a suction groove (not shown) connected to a vacuum suction source (not shown) formed on the inspection holding surface 61. The suction groove is formed recessed from the inspection holding surface 61. The inspection table 60 sucks and holds the inspection piece 70 placed on the inspection holding surface 61 by being sucked by the vacuum suction source.

[0043] The cutting blade 21 cuts the inspection piece 70 from one end 71 (-X-axis direction) on the left side in the X-axis direction to the other end 72 (+X-axis direction) on the right side to form a processing groove 80 in the inspection piece 70. One end 71 (-X-axis direction) on the left side in the X-axis direction is called the processing start side, and the other end 72 (+X-axis direction) on the right side in the X-axis direction is called the processing end side. The processing groove 80 is an example of a processing groove.

[0044] In Embodiment 1, the inspection table 60 is rotatably supported around an axis parallel to the Y-axis direction by a rotation drive unit 63 attached to the table cover 3. In Embodiment 1, the rotation drive unit 63 rotates the inspection table 60 by 90 degrees each between the initial position shown in FIG. 3(1) where the inspection holding surface 61 faces upward (+Z-axis direction), the first imaging position shown in FIG. 3(2) where one end 71 of the inspection holding surface 61 faces upward (+Z-axis direction), and the second imaging position shown in FIG. 3(3) where the other end 72 of the inspection holding surface 61 faces upward (+Z-axis direction).

[0045] The initial position is an example of the machining position. At the initial position, the inspection holding surface 61 is in a position parallel to the holding surface 11. The first imaging position and the second imaging position are examples of imaging positions. At the first imaging position and the second imaging position, they are perpendicular to the holding surface 11 and are in positions where the imaging unit 30 can image either the cross-section on the machining start side or the machining end side of the machining groove 80. One end 71 and the other end 72 of the inspection holding surface 61 are arranged at positions facing each other.

[0046] By setting the inspection holding surface 61 to the initial position, the rotation drive unit 63 can cause the inspection piece 70 to be cut by the cutting blade 21 of the cutting unit 20.

[0047] By setting the inspection holding surface 61 to the first imaging position rotated 90 degrees counterclockwise from the initial position, the machining end side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the imaging unit 30 arranged above can image the cross-sectional shape of the machining groove 80 on the machining end side of the inspection piece 70. The machining end side is the cutting-out side of the cutting blade 21.

[0048] By setting the inspection holding surface 61 to the second imaging position rotated 90 degrees clockwise from the initial position, the machining start side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the imaging unit 30 arranged above can image the cross-sectional shape of the machining groove 80 on the machining start side of the inspection piece 70. The machining start side is the cutting-in side of the cutting blade 21.

[0049] Depending on the material and processing method of the inspection piece 70, there are those that are likely to have burrs, cracks, or chipping on the processing start side, and those that are likely to have burrs, cracks, or chipping on the processing end side. Therefore, depending on the material and processing method of the inspection piece 70, there may be a case where it is desired to confirm the cross-sectional shape on the processing start side and / or the cross-sectional shape on the processing end side. Thus, in Embodiment 1, by rotating the inspection holding surface 61 to an arbitrary position by the rotation drive unit 63, the cross-sectional shape of the processing groove 80 on the processing start side of the inspection piece 70 and the cross-sectional shape of the processing groove 80 on the processing end side are imaged by the imaging unit 30, whereby the cross-sectional shape on the processing start side and / or the cross-sectional shape on the processing end side can be confirmed.

[0050] The control unit 100 also controls each component of the processing apparatus 1 to cause the processing apparatus 1 to perform a processing operation on the workpiece 200. Note that the control unit 100 is a computer having an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the processing apparatus 1 to each component of the processing apparatus 1 via the input / output interface device.

[0051] The control unit 100 is connected to a display unit (not shown) constituted by a liquid crystal display device or the like that displays the state and image of the processing operation, an input unit used when the operator registers processing content information and the like, and the notification unit 101. The input unit is constituted by at least one of a touch panel provided on the display unit and an external input device such as a keyboard. The notification unit 101 emits at least one of sound and light to notify the operator.

[0052] Further, as shown in FIG. 1, the control unit 100 includes a normal image storage unit 102 and a determination unit 103. The normal image storage unit 102 stores a normal image shown in FIG. 4 obtained by imaging, with the imaging unit 30, a machining groove 80 formed in the inspection piece 70 by cutting the inspection piece 70 with a normal cutting blade 21 from one end 71 to the other end 72 in the X-axis direction, from the side surface on the one end 71 side of both ends 71 and 72. In the normal image, the inner surface 81, which is the side wall of the machining groove 80, is orthogonal to the surface 73 of the inspection piece 70. Further, the normal image storage unit 102 stores a predetermined distance 301 from the surface 201 of the inspection piece 70 of the machining groove 80 in the normal image, near the bottom. The predetermined distance 301 is a distance that defines a determination position 302 for determining whether or not the cutting blade 21 needs to be replaced when the inspection piece 70 is cut with the cutting blade 21. The mechanism of the normal image storage unit 102 is realized by a storage device.

[0053] The determination unit 103 determines whether the shape of the machining groove 80 formed in the inspection piece 70 is normal based on the captured image captured by the imaging unit 30. The determination unit 103 determines whether or not the cutting blade 21 needs to be replaced based on the machining groove 80 formed by cutting the inspection piece 70 with the cutting blade 21. The determination unit 103 determines whether or not the cutting blade 21 needs to be replaced based on the inclination of the inner surface 81 of the machining groove 80 in the captured image 300 obtained by the imaging unit 30 imaging the machining groove 80 formed by cutting the inspection piece 70 with the cutting blade 21 from the side surface on the one end 71 side. The function of the determination unit 103 is realized by the arithmetic processing unit executing a computer program stored in the storage device.

[0054] (Processing Method) The processing method according to Embodiment 1 is a processing operation in which the processing apparatus 1 cuts the inspection piece 70. In the processing method, an operator registers processing content information in the control unit 100 and places the inspection piece 70 before cutting on the inspection holding surface 61 facing upward above the inspection table 60. This is performed when the processing apparatus 1 receives an instruction to start the processing operation from the operator. When starting the processing operation, the processing apparatus 1 sucks and holds the inspection piece 70 on the inspection holding surface 61 of the inspection table 60. Before starting the processing operation, the inspection piece 70 may be sucked and held on the inspection holding surface 61 of the inspection table 60.

[0055] The processing method of Embodiment 1 is a processing method of the inspection piece 70. As shown in the flowchart of FIG. 5, it includes a processing step ST11, an imaging step ST12, and a determination step ST13.

[0056] The timing when the processing method starts is determined by the workpiece 200 to be cut, the material of the cutting edge of the cutting blade 21, etc. The timing for determining whether the cutting blade 21 needs to be replaced is, for example, every time one workpiece 200 is cut, or every time a predetermined number of workpieces 200 are cut, and it is stored in the storage device of the control unit 100 as part of the processing content information. Also, in the present invention, the timing for determining whether the cutting blade 21 needs to be replaced may be every time a predetermined number of division planned lines 202 are cut, that is, even during the cutting process of the workpiece 200 held on the chuck table 10. In this case, the timing for determining whether the cutting blade 21 needs to be replaced may be every time all of one of the division planned lines 202 parallel to each other are cut.

[0057] When the control unit 100 of the processing apparatus 1 determines that it is the timing for determining whether the cutting blade 21 needs to be replaced, it starts the processing method by the processing apparatus 1 of Embodiment 1.

[0058] (Processing step) FIG. 3(1) is a cross-sectional view schematically showing the processing step of the processing method shown in FIG. 5. In the processing step ST11 of Embodiment 1, the inspection piece 70 is positioned at the processing position, and a processing groove 80 is formed in the inspection piece 70 such that at least one end of the inspection piece 70 has a cross-section exposed in a direction (X-axis direction) perpendicular to the rotation axis 55 of the inspection table 60.

[0059] In the processing step ST11 of Embodiment 1, the rotation drive unit 63 rotates to the initial position shown in Fig. 3(1) where the inspection holding surface 61 faces upward (+Z-axis direction). In the processing step ST11, the inspection table 60 is suction-held, and the inspection piece 70 and the cutting edge of the cutting blade 21 are aligned. As shown in Fig. 3(1), the processing apparatus 1 cuts the cutting blade 21 into the inspection piece 70 and relatively moves the inspection piece 70 and the cutting unit 20 along the X-axis direction, and cuts from one end 71 (-X-axis direction) on the left side in the X-axis direction to the other end 72 (+X-axis direction) on the right side to form a processing groove 80 in the inspection piece 70. In Embodiment 1, the processing groove 80 is formed across one end 71 to the other end 72 in the X-axis direction of the inspection piece 70. However, in the present invention, it is not necessary to cut all the way from one end 71 to the other end 72, and it is also possible to cut halfway from one end 71 toward the other end 72 side and then raise the cutting blade 21. When the processing step ST11 is completed, the process proceeds to the imaging step ST12.

[0060] (Imaging Step) Figs. 3(2) and (3) are cross-sectional views schematically showing the imaging step of the processing method shown in Fig. 5. The imaging step ST12 of Embodiment 1 is a step of imaging the side surface on one end 71 side or the other end 72 side of the inspection piece 70 after performing the processing step ST11 to form an imaging image 300 including the processing groove 80.

[0061] In Embodiment 1, in the imaging step ST12, the processing apparatus 1 rotates the inspection table 60 counterclockwise by 90 degrees around the axis of the rotation axis 55 from the state of the initial position with the rotation drive unit 63, and rotates to the first imaging position shown in Fig. 3(2) where the other end 72 of the inspection holding surface 61 faces upward (+Z-axis direction). By setting the inspection table 60 to the first imaging position, the processed end side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the processing groove 80 on the processed end side of the inspection piece 70 can be imaged by the imaging unit 30 arranged above. The imaging unit 30 images the side surface on the processed end side of the inspection piece 70 to obtain the imaging image 300 shown in Fig. 4.

[0062] Also, in Embodiment 1, in the imaging step ST12, the processing apparatus 1 rotates the inspection table 60 clockwise by 90 degrees around the axis of the rotation axis 55 from the state of the initial position, so that one end 71 of the inspection holding surface 61 faces upward (+Z-axis direction), and rotates to the second imaging position shown in FIG. 3(3). By setting the inspection table 60 to the second imaging position, the processing start side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the processing groove 80 on the processing start side of the inspection piece 70 can be imaged by the imaging unit 30 disposed above. An imaging image 300 shown in FIG. 4 can be obtained by imaging the side surface of the processing start side of the inspection piece 70 with the imaging unit 30. When the imaging step ST12 ends, the process proceeds to the determination step ST13.

[0063] (Determination Step) FIG. 4 is a diagram showing an example of the determination step ST13 of the processing method shown in FIG. 5. The determination step ST13 is a step of determining the state of the cutting blade 21 based on the shape such as the inclination, tip shape, width, and tip position of the processing groove 80 detected by image-processing the imaging image 300. For example, based on the determination result of the determination step ST13, it is possible to determine whether or not the cutting blade 21 needs to be replaced. Note that it is not limited to determining whether or not the cutting blade 21 needs to be replaced based on the determination result of the determination step ST13. For example, based on the determination result of the determination step ST13, it may be determined whether or not the cutting blade 21 needs to be dressed.

[0064] In Embodiment 1, in determination step ST13, a normal image processing groove 80 (not shown) is superimposed on the captured image 300. In Embodiment 1, the upper end of the processing groove 80 of the normal image is superimposed on the upper end of the processing groove 80 of the captured image 300. In Embodiment 1, in determination step ST13, the control unit 100 detects the distance between the inner surface 81 of the processing groove 80 of the captured image 300 at the determination position 302 and the inner surface 81 of the processing groove 80 of the normal image. When it is determined that the detected distance is equal to or less than a predetermined allowable value, the control unit 100 determines that the replacement of the cutting blade 21 is unnecessary and returns to the processing step ST11. Thus, in Embodiment 1, in determination step ST13, the control unit 100 determines whether or not to replace the cutting blade 21 based on the inclination of the inner surface 81 of the processing groove 80 detected from the captured image 300.

[0065] In Embodiment 1, in determination step ST13, when the control unit 100 determines that the detected distance exceeds a predetermined allowable value, the control unit 100 determines that the replacement of the cutting blade 21 is necessary, operates the notification unit 101 to give a notification, and ends the processing operation, that is, the processing method according to Embodiment 1. In the present invention, the method for determining whether or not to replace the cutting blade 21 in determination step ST13 is not limited to that described in Embodiment 1. The contour of the processing groove 80 of the normal image and the contour of the processing groove 80 of the captured image 300 may be compared, or the inner surface 81 of the processing groove 80 of the captured image 300 and a virtual line of the inner surface of the ideal processing groove 80 may be compared. Further, instead of comparing with the processing groove 80 of the normal image, it may be determined whether it is good or bad by comparing with respective threshold values.

[0066] As described above, the processing method and the processing apparatus 1 according to Embodiment 1 form a processing groove 80 in the inspection piece 70 and image the side surfaces of the inspection piece 70 on the processing start side and the processing end side. Based on the inclination of the inner surface 81 of the processing groove 80 detected from the captured image 300 captured and formed, it is determined whether or not the cutting blade 21 needs to be replaced. As a result, it is possible to confirm the cross-sectional shape of either the processing start side or the processing end side of the processing groove 80. As a result, the processing method and the processing apparatus 1 have the effect of being able to determine the replacement timing of the cutting blade 21 more easily than in the past and suppressing the continuous production of defective chips 206. Further, in Embodiment 1, instead of determining whether or not the cutting blade 21 needs to be replaced, it may be determined whether or not the cutting blade 21 needs to be dressed based on the shape of the cutting blade 21. Alternatively, the cutting depth of the blade may be corrected by detecting the cutting edge position of the blade from the captured image.

[0067] In the above-described Embodiment 1, the processing apparatus 1 performs the determination step ST13, but this is not the limit. Instead of the determination step ST13, the processing apparatus 1 may perform a cutting edge position detection step. In the cutting edge position detection step, the position of the cutting edge of the current cutting blade 21 (hereinafter also referred to as the "cutting edge position") can be accurately measured and detected. For example, based on the cutting edge position detected in the cutting edge position detection step, the processing apparatus 1 can measure the cutting edge position, that is, measure the wear amount of the cutting blade 21, such as correcting the cutting depth so as to increase it by the amount by which the cutting edge of the cutting blade 21 has worn.

[0068] (Modification of Embodiment 1) A processing method according to a modification of Embodiment 1 of the present invention will be described with reference to the drawings. FIGS. 6 and 7 are cross-sectional views schematically showing the processing steps and the imaging steps of the processing method according to the modification of Embodiment 1. Note that the same reference numerals are given to the same parts as in Embodiment 1, and the description thereof is omitted.

[0069] The processing apparatus 1 that implements the processing method according to the modification of Embodiment 1 is composed of the same constituent members as the processing apparatus 1 according to Embodiment 1. However, in the processing apparatus 1 according to Embodiment 1, the rotational drive unit 63 is formed by a motor, while in the processing apparatus 1 that implements the processing method according to the modification of Embodiment 1, it is formed by an air cylinder, which is the difference. That is, in the processing apparatus 1 that implements the processing method according to the modification of Embodiment 1, the rotational drive unit 63 formed by the air cylinder can rotate the inspection table 60 to at least any two positions (two positions).

[0070] (Processing step) FIG. 6(1) is a cross-sectional view schematically showing the processing step when checking the cross-sectional shape on the processing end side of the processing groove 80 among the modifications of Embodiment 1. In the processing step ST11 of the modification of Embodiment 1, the rotational drive unit 63 rotates to the initial position shown in FIG. 6(1) where the inspection holding surface 61 faces upward (+Z-axis direction). In the initial position shown in FIG. 6(1), the inspection table 60 is arranged such that one end 71 in the X-axis direction is to the right (+X direction) and the other end 72 is to the left (-X direction) in the X-axis direction. Then, as shown in FIG. 6(1), the processing apparatus 1 cuts the cutting blade 21 into the inspection piece 70 and relatively moves the inspection piece 70 and the cutting unit 20 along the X-axis direction, and cuts from the other end 72 (-X-axis direction) on the left in the X-axis direction to the one end 71 (+X-axis direction) on the right to form the processing groove 80 in the inspection piece 70.

[0071] Different from FIG. 6(1), when checking the cross-sectional shape on the processing start side of the processing groove 80, the positions of one end 71 and the other end 72 of the inspection table 60 in the X-axis direction are rotated 180 degrees and swapped in the X-axis direction. The method of rotating 180 degrees and swapping the positions of one end 71 and the other end 72 of the inspection table 60 in the X-axis direction may be executed by a robot hand (not shown) or manually.

[0072] FIG. 7(1) is a cross-sectional view schematically showing a processing step when checking the cross-sectional shape on the processing start side of the processing groove 80 among the modified examples of Embodiment 1. In the processing step ST11 of the modified example of Embodiment 1, the rotation driving unit 63 rotates to the initial position shown in FIG. 7(1) where the inspection holding surface 61 faces upward (+Z-axis direction). In the initial position shown in FIG. 7(1), the inspection table 60 is arranged such that one end 71 of the inspection holding surface 61 is on the left side (-X direction) in the X-axis direction and the other end 72 is on the right side (+X direction) in the X-axis direction. Then, as shown in FIG. 7(1), the processing device 1 cuts the cutting blade 21 into the inspection piece 70 and relatively moves the inspection piece 70 and the cutting unit 20 along the X-axis direction, and cuts from one end 71 (-X-axis direction) on the left side in the X-axis direction to the other end 72 (+X-axis direction) on the right side to form a processing groove 80 in the inspection piece 70. When the processing step ST11 is completed, the process proceeds to the imaging step ST12.

[0073] (Imaging Step) FIG. 6(2) is a cross-sectional view schematically showing the imaging step of the modified example of Embodiment 1 executed after performing the processing step ST11 in a state where one end 71 of the inspection holding surface 61 is on the right side (+X direction) in the X-axis direction and the other end 72 is on the left side (-X direction) in the X-axis direction. The imaging step ST12 of the modified example of Embodiment 1 shown in FIG. 6(2) is performed when imaging the cross-sectional shape of the processing groove 80 on the processing end side. The imaging step ST12 of the modified example of Embodiment 1 shown in FIG. 6(2) is a step of imaging the side surface on the one end 71 side of the inspection piece 70 after performing the processing step ST11 to form an imaging image 300 including the processing groove 80.

[0074] In a modification of Embodiment 1, in the imaging step ST12, the processing apparatus 1 rotates the inspection table 60 counterclockwise by 90 degrees about the axis of the rotation shaft 55 from the state of the initial position, and rotates to the imaging position shown in FIG. 6(2) where one end 71 of the inspection holding surface 61 faces upward (+Z-axis direction). By setting the inspection table 60 to the imaging position shown in FIG. 6(2), the processed end side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the processing groove 80 on the processed end side of the inspection piece 70 can be imaged by the imaging unit 30 arranged above. The imaging unit 30 can image the side surface of the processed end side of the inspection piece 70 to obtain the imaging image 300 shown in FIG. 4.

[0075] (Imaging step) FIG. 7(2) is a cross-sectional view schematically showing the imaging step of a modification of Embodiment 1 executed after performing the processing step ST11 in a state where one end 71 of the inspection holding surface 61 is arranged to be on the left side in the X-axis direction (-X direction) and the other end 72 is on the right side in the X-axis direction (+X direction). The imaging step ST12 of the modification of Embodiment 1 shown in FIG. 7(2) is performed when imaging the cross-sectional shape of the processing groove 80 on the processing start side. The imaging step ST12 of the modification of Embodiment 1 shown in FIG. 7(2) is a step of imaging the side surface on the one end 71 side of the inspection piece 70 after performing the processing step ST11 to form an imaging image 300 including the processing groove 80.

[0076] In a modification of Embodiment 1, in the imaging step ST12, the processing apparatus 1 rotates the inspection table 60 clockwise by 90 degrees about the axis of the rotation shaft 55 from the state of the initial position, and rotates to the imaging position shown in FIG. 7(2) where one end 71 of the inspection holding surface 61 faces upward (+Z-axis direction). By setting the inspection table 60 to the imaging position shown in FIG. 7(2), the processing start side of the inspection piece 70 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the processing groove 80 on the processing start side of the inspection piece 70 can be imaged by the imaging unit 30 arranged above. The imaging unit 30 can image the side surface of the processing start side of the inspection piece 70 to obtain the imaging image 300 shown in FIG. 4.

[0077] (Determination step) The determination step of Modification 1 of Embodiment 1 is the same as that of Embodiment 1, so the description thereof is omitted.

[0078] As described above, the processing method and the processing apparatus 1 according to the modification of Embodiment 1 form the processing groove 80 in the test piece 70 and image the side surface on the processing end side of the test piece 70. Thereby, the cross-sectional shape of the processing end side of the processing groove 80 can be confirmed. When confirming the cross-sectional shape of the processing start side of the processing groove 80, the positions of one end 71 and the other end 72 of the inspection table 60 in the X-axis direction are rotated 180 degrees in the X-axis direction and replaced. As a result, the processing groove 80 is formed in the test piece 70, and the side surface on the processing start side of the test piece 70 is imaged. Thereby, the cross-sectional shape of the processing end side of the processing groove 80 can be confirmed. Therefore, by simply replacing the inspection table 60, it is possible to confirm the cross-sectional shape of either the processing start side or the processing end side of the processing groove 80.

[0079] In addition, since the rotation drive unit 63 can be configured by an air cylinder that can be positioned at only two positions, the cost can be reduced compared to being configured by a motor. Further, since the direction of rotating the inspection table 60 is only 90 degrees and the movement range is narrow, it can be realized in a small installation space, and the processing apparatus 1 can be downsized.

[0080] (Embodiment 2) The processing method according to Embodiment 2 of the present invention will be described with reference to the drawings. FIGS. 8 and 9 are cross-sectional views schematically showing the processing step and the imaging step of the processing method according to Embodiment 2. In addition, the same reference numerals are given to the same parts as those in Embodiment 1, and the description thereof is omitted.

[0081] In Embodiment 2, the inspection table 60 is rotatably supported about an axis parallel to the Y-axis direction by a rotation drive unit 63. The inspection table 60 of Embodiment 2 includes a first inspection holding surface 611 and a second inspection holding surface 612. The first inspection holding surface 611 holds the first inspection piece 701. The second inspection holding surface 612 holds the second inspection piece 702. The first inspection holding surface 611 is arranged along the X-axis direction, and the second inspection holding surface 612 is arranged along the Z-axis direction and is orthogonal to the first inspection holding surface 611.

[0082] In Embodiment 2, the rotation drive unit 63 rotates the inspection table 60 by 90 degrees between a first position shown in FIGS. 8(1) and 9(2) where the first inspection holding surface 611 faces upward (+Z-axis direction) and the second inspection holding surface 612 faces leftward (-X-axis direction), and a second position shown in FIGS. 8(2) and 9(1) where the second inspection holding surface 612 faces upward (+Z-axis direction) and the second inspection holding surface 612 faces rightward (+X-axis direction).

[0083] In FIG. 8(1), the first position is an example of the processing position of the first inspection holding surface 611. At the first position, the first inspection holding surface 611 is in a position parallel to the holding surface 11, and the second inspection holding surface 612 is in a position perpendicular to the holding surface 11. In FIG. 8(2), the second position is an example of the imaging position of the first inspection holding surface 611. At the second position, it is perpendicular to the holding surface 11, and it is in a position where the imaging unit 30 can image the cross section on the processing start side of the first processing groove 801 of the first inspection piece 701.

[0084] In FIG. 9(1), the second position is an example of the processing position of the second inspection holding surface 612. At the second position, the second inspection holding surface 612 is in a position parallel to the holding surface 11, and the first inspection holding surface 611 is in a position perpendicular to the holding surface 11. In FIG. 9(2), the first position is an example of the imaging position of the second inspection holding surface 612. At the first position, it is perpendicular to the holding surface 11, and it is in a position where the imaging unit 30 can image the cross-section of the second processing groove 802 on the processing end side of the second inspection piece 702. One end 71 and the other end 72 of the first inspection holding surface 611 are arranged opposite to each other.

[0085] By setting the first inspection holding surface 611 to the first position, the rotation driving unit 63 can cause the cutting blade 21 of the cutting unit 20 to cut the first inspection piece 701 held on the first inspection holding surface 611.

[0086] By rotating the first inspection holding surface 611 from the first position to the second position rotated 90 degrees clockwise, the processing start side of the first inspection piece 701 can be directed upward (+Z-axis direction). Thereby, the imaging unit 30 arranged above can image the cross-sectional shape of the first processing groove 801 on the processing start side of the first inspection piece 701. The processing start side is the cutting-in side of the cutting blade 21.

[0087] Also, as shown in FIG. 9(1), by setting the second inspection holding surface 612 to the second position, the rotation driving unit 63 can cause the cutting blade 21 of the cutting unit 20 to cut the second inspection piece 702 held on the second inspection holding surface 612.

[0088] By rotating the second inspection holding surface 612 from the second position to the first position rotated 90 degrees counterclockwise, the processing end side of the second inspection piece 702 can be directed upward (+Z-axis direction). Thereby, the imaging unit 30 arranged above can image the cross-sectional shape of the second processing groove 802 on the processing end side of the second inspection piece 702. The processing end side is the cutting-out side of the cutting blade 21.

[0089] Depending on the material and processing method of the inspection piece 70, there are those that are prone to burrs, cracks, or chipping on the processing start side, and those that are prone to burrs, cracks, or chipping on the processing end side. Therefore, depending on the material and processing method of the inspection piece, there may be a case where it is desired to confirm the cross-sectional shape on the processing start side and / or the cross-sectional shape on the processing end side. Thus, in Embodiment 2, by rotating the first inspection holding surface 611 and the second inspection holding surface 612 to the first position and the second position by the rotation drive unit 63, the cross-sectional shape of the first processing groove 801 on the processing start side of the first inspection piece 701 and the cross-sectional shape of the second processing groove 802 on the processing end side of the second inspection piece 702 can be imaged by the imaging unit 30 and thus confirmed.

[0090] (Processing method) The processing method according to Embodiment 2 is a processing operation in which the processing apparatus 1 performs cutting on the first inspection piece 701 and the second inspection piece 702. The processing method is such that the operator registers the processing content information in the control unit 100 and places the first inspection piece 701 before cutting on the first inspection holding surface 611 facing upward above the inspection table 60. Also, the second inspection piece 702 before cutting is placed on the second inspection holding surface 612 facing upward above the inspection table 60. When receiving an instruction to start the processing operation from the operator, the processing apparatus 1 performs it. When starting the processing operation, the processing apparatus 1 sucks and holds the first inspection piece 701 on the first inspection holding surface 611 of the inspection table 60 and sucks and holds the second inspection piece 702 on the second inspection holding surface 612 of the inspection table 60. Before starting the processing operation, the first inspection piece 701 may be sucked and held on the first inspection holding surface 611 of the inspection table 60 and the second inspection piece 702 may be sucked and held on the second inspection holding surface 612 of the inspection table 60.

[0091] The processing method of Embodiment 2 is a processing method for the first inspection piece 701. As shown in the flowchart of FIG. 10(1), it includes a first processing step ST21, a first imaging step ST22, and a determination step ST23. Also, the processing method of Embodiment 2 is a processing method for the second inspection piece 702. As shown in the flowchart of FIG. 10(2), it includes a second processing step ST31, a second imaging step ST32, and a determination step ST33. The first processing step ST21 and the first imaging step ST22 are an example of an inspection step on the processing start side. The second processing step ST31 and the second imaging step ST32 are an example of an inspection step on the processing end side.

[0092] When the control unit 100 of the processing apparatus 1 determines that it is the timing to determine whether the cutting blade 21 needs to be replaced, the processing method by the processing apparatus 1 of Embodiment 2 is started.

[0093] (First Processing Step) FIG. 8(1) is a cross-sectional view schematically showing the first processing step of the processing method shown in FIG. 10. In the first processing step ST21 of Embodiment 2, the first inspection piece 701 is positioned at the processing position, and a first processing groove 801 is formed in the first inspection piece 701 such that at least one end of the first inspection piece 701 has a cross-section exposed in a direction (X-axis direction) perpendicular to the rotation axis 55 of the inspection table 60.

[0094] In the first processing step ST21 of Embodiment 2, the rotation drive unit 63 rotates to the first position shown in FIG. 8(1) where the first inspection holding surface 611 faces upward (+Z-axis direction). In the first processing step ST21, the inspection table 60 is suction-held, and the first inspection piece 701 and the cutting edge of the cutting blade 21 are aligned. As shown in FIG. 8(1), the processing apparatus 1 cuts the cutting blade 21 into the first inspection piece 701 and relatively moves the first inspection piece 701 and the cutting unit 20 along the X-axis direction, and cuts from one end 71 (-X-axis direction) on the left side to the other end 72 (+X-axis direction) on the right side in the X-axis direction to form the first processing groove 801 in the first inspection piece 701. When the first processing step ST21 ends, the process proceeds to the first imaging step ST22.

[0095] (First imaging step) FIG. 8(2) is a cross-sectional view schematically showing the first imaging step of the processing method shown in FIG. 10. The first imaging step ST22 of Embodiment 2 is a step of imaging the processing start side of the first inspection piece 701 after performing the first processing step ST21 to form an imaging image 300 including the first processing groove 801.

[0096] In Embodiment 2, in the first imaging step ST22, the processing apparatus 1 rotates 90 degrees clockwise around the axis of the rotation shaft 55 by the rotation drive unit 63 from the state of the first position, so that the second inspection holding surface 612 faces upward (+Z-axis direction), and rotates to the second position shown in FIG. 8(2). By setting the inspection table 60 to the second position, the processing start side of the first inspection piece 701 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the first processing groove 801 on the processing start side of the first inspection piece 701 can be imaged by the imaging unit 30 disposed above. The side surface of the processing start side of the first inspection piece 701 is imaged by the imaging unit 30 to obtain the imaging image 300 shown in FIG. 4. When the first imaging step ST22 ends, the process proceeds to the determination step ST23.

[0097] The determination step ST23 of Embodiment 2 is the same as the determination step ST13 of Embodiment 1, so the description is omitted. In Embodiment 2, in the determination step ST23, the control unit 100 determines whether or not to replace the cutting blade 21 based on the inclination of the inner surface 81 of the first processing groove 801 detected from the imaging image 300. The determination step ST23 of Embodiment 2 may be performed simultaneously with the determination step ST33 after the end of the second imaging step ST32 described later, instead of after the end of the first imaging step ST22.

[0098] (Second processing step) FIG. 9(1) is a cross-sectional view schematically showing the second processing step of the processing method shown in FIG. 10. In the second processing step ST31 of Embodiment 2, the second inspection piece 702 is positioned at the processing position, and a second processing groove 802 is formed in the second inspection piece 702 such that a cross section is exposed at at least one end of the second inspection piece 702 in a direction (X-axis direction) orthogonal to the rotation axis 55 of the inspection table 60.

[0099] In the second processing step ST31 of Embodiment 2, the rotation drive unit 63 rotates to the second position shown in FIG. 9(1) where the second inspection holding surface 612 faces upward (+Z-axis direction). In the second processing step ST31, the inspection table 60 sucks and holds the second inspection piece 702, and aligns the second inspection piece 702 and the cutting edge of the cutting blade 21. As shown in FIG. 9(1), the processing apparatus 1 inserts the cutting blade 21 into the second inspection piece 702 and relatively moves the second inspection piece 702 and the cutting unit 20 along the X-axis direction, and cuts from the left end (-X-axis direction) to the right end (+X-axis direction) in the X-axis direction to form the second processing groove 802 in the second inspection piece 702. When the second processing step ST31 is completed, the process proceeds to the second imaging step ST32.

[0100] (First imaging step) FIG. 9(2) is a cross-sectional view schematically showing the second imaging step of the processing method shown in FIG. 10. The second imaging step ST32 of Embodiment 2 is a step of imaging the processed end side of the second inspection piece 702 after performing the second processing step ST31 to form an imaging image 300 including the second processing groove 802.

[0101] In Embodiment 2, in the second imaging step ST32, the processing apparatus 1 rotates the inspection table 60 counterclockwise by 90 degrees around the axis of the rotation shaft 55 from the state of the second position, and rotates to the first position shown in FIG. 9(2) where the first inspection holding surface 611 faces upward (+Z-axis direction). By setting the inspection table 60 to the first position, the processed end side of the second inspection piece 702 can be directed upward (+Z-axis direction). Thereby, the cross-sectional shape of the second processing groove 802 on the processed end side of the second inspection piece 702 can be imaged by the imaging unit 30 disposed above. The imaging unit 30 can image the side surface of the processed end side of the second inspection piece 702 to obtain the imaging image 300 shown in FIG. 4. When the second imaging step ST32 ends, the process proceeds to the determination step ST33.

[0102] The determination step ST33 of Embodiment 2 is the same as the determination step ST13 of Embodiment 1, and thus the description thereof is omitted. In Embodiment 2, in the determination step ST33, the control unit 100 determines the state of the second processing groove 802 detected from the imaging image 300. Specifically, the inclination, tip shape, width, and tip position are detected from the shape of the second processing groove 802, and based on these, it is determined whether the cutting blade 21 needs to be replaced or whether dressing is required. Alternatively, the tip position of the cutting blade 21 may be detected from the captured image to correct the cutting depth.

[0103] As described above, the processing method and the processing apparatus 1 according to the second embodiment form the first processing groove 801 in the first inspection piece 701 at the first position, and rotate the inspection table 60 from the first position to the second position, thereby imaging the side surface of the first inspection piece 701 on the processing start side. As a result, the cross-sectional shape of the first processing groove 801 on the processing start side can be confirmed. When confirming the cross-sectional shape of the processing end side of the first processing groove 801, the second processing groove 802 of the second inspection piece 702 is formed at the second position, and the inspection table 60 is rotated from the second position to the first position, thereby imaging the side surface of the second inspection piece 702 on the processing end side. As a result, the first processing groove 801 is formed in the first inspection piece 701, the side surface of the first inspection piece 701 on the processing start side is imaged, and the cross-sectional shape of the first processing groove 801 on the processing start side can be confirmed. At the same time, the second processing groove 802 is formed in the second inspection piece 702, the side surface of the second inspection piece 702 on the processing end side is imaged, and the cross-sectional shape of the second processing groove 802 on the processing end side can be confirmed. Therefore, by simply rotating and moving the inspection table 60, it is possible to confirm the cross-sectional shapes of both the processing start side and the processing end side of the first processing groove 801 and the second processing groove 802.

[0104] In addition, since the rotation drive unit 63 can be configured by an air cylinder that can be positioned at only two positions, the cost can be reduced compared to being configured by a motor. Further, since the direction of rotating the inspection table 60 is only 90 degrees and the movement range is narrow, it can be realized in a small installation space, and the processing apparatus 1 can be downsized.

[0105] (Embodiment 3) The processing method according to the third embodiment of the present invention will be described with reference to the drawings. FIG. 11 is a cross-sectional view schematically showing the processing steps and the imaging steps of the processing method according to the third embodiment. In addition, the same reference numerals are given to the same parts as those in the first embodiment, and the description thereof is omitted.

[0106] In Embodiment 2, the inspection table 60 includes a first holding portion 541 and a second holding portion 542 instead of the holding portion 54. The first holding portion 541 is fixed above the fixed base 53 (+Z-axis direction). A third inspection holding surface 613 is disposed on the first holding portion 541. A fourth inspection holding surface 614 is disposed on the second holding portion 542. The second holding portion 542 is rotatably supported by a rotation driving portion 63 about an axis parallel to the Y-axis direction. That is, the rotation driving portion 63 rotates the fourth inspection holding surface 614 of the inspection table 60 along a rotation axis 55 parallel to the fourth inspection holding surface 614.

[0107] The rotation driving portion 63 rotates the fourth inspection holding surface 614 of the inspection table 60 based on a driving force supplied from a driving source supply portion (not shown). The rotation driving portion 63 is formed by a motor or an air cylinder and can rotate the inspection table 60 to an arbitrary rotation position. The rotation driving portion 63 formed by a motor can rotate the inspection table 60 to at least two arbitrary positions (two positions).

[0108] In Embodiment 3, the longitudinal directions of the first holding portion 541 and the second holding portion 542 are parallel to the Y-axis direction. The third inspection piece 703 shown in FIG. 11 is placed on the third inspection holding surface 613 of the first holding portion 541, and the fourth inspection piece 704 shown in FIG. 11 is placed on the fourth inspection holding surface 614 of the second holding portion 542. The third inspection piece 703 and the fourth inspection piece 704 are made of the same material as the substrate 204 of the workpiece 200 and are formed in a rectangular flat plate shape whose planar shapes are the same as those of the third inspection holding surface 613 and the fourth inspection holding surface 614, respectively.

[0109] The first holding portion 541 and the second holding portion 542 are formed with suction grooves (not shown) connected to a vacuum suction source (not shown) on the third inspection holding surface 613 and the fourth inspection holding surface 614. The suction grooves are formed recessed from the third inspection holding surface 613 and the fourth inspection holding surface 614. The inspection table 60 sucks and holds the third inspection piece 703 and the fourth inspection piece 704 placed on the third inspection holding surface 613 and the fourth inspection holding surface 614 by being sucked by the vacuum suction source.

[0110] The cutting blade 21 cuts the third inspection piece 703 and the fourth inspection piece 704 from one end on the left side in the X-axis direction (-X-axis direction) to the other end on the right side (+X-axis direction), forming the third processing groove 803 and the fourth processing groove 804 in the third inspection piece 703 and the fourth inspection piece 704. One end on the left side in the X-axis direction (-X-axis direction) is called the processing start side, and the other end on the right side in the X-axis direction (+X-axis direction) is called the processing end side. The third processing groove 803 and the fourth processing groove 804 are examples of processing grooves.

[0111] In Embodiment 4, the second holding portion 542 is rotatably supported by the rotation driving portion 63 about an axis parallel to the Y-axis direction. In Embodiment 4, the rotation driving portion 63 rotates the second holding portion 542 of the inspection table 60 by 90 degrees each between the initial position shown in FIG. 11(1) where the fourth inspection holding surface 614 faces upward (+Z-axis direction) and the imaging position shown in FIG. 11(2) where the fourth inspection holding surface 614 faces rightward (+X-axis direction).

[0112] The initial position is an example of a processing position. In the initial position, the fourth inspection holding surface 614 is in a position parallel to the holding surface 11. The imaging position is an example of an imaging position. In the imaging position, it is perpendicular to the holding surface 11 and is a position where the cross-section on the processing end side of the fourth processing groove 804 can be imaged by the imaging unit 30. One end 71 and the other end 72 of the fourth inspection holding surface 614 are arranged at positions facing each other.

[0113] By setting the third inspection holding surface 613 and the fourth inspection holding surface 614 to the initial position, the rotation driving portion 63 can continuously cut the third inspection piece 703 and the fourth inspection piece 704 with the cutting blade 21 of the cutting unit 20. Thereby, the third processing groove 803 and the fourth processing groove 804 can be continuously processed.

[0114] The rotation drive unit 63 can direct the processed end side of the fourth inspection piece 704 upward (in the +Z-axis direction) by rotating the fourth inspection holding surface 614 90 degrees clockwise from the initial position to the imaging position. Thereby, the imaging unit 30 disposed above can image the cross-sectional shape of the fourth processing groove 804 on the processed end side of the fourth inspection piece 704. The processed end side is the side where the cutting blade 21 cuts out.

[0115] In Embodiment 4, by rotating the fourth inspection holding surface 614 by 90 degrees by the rotation drive unit 63, the cross-sectional shape of the fourth processing groove 804 on the processed end side of the fourth inspection piece 704 can be imaged by the imaging unit 30 and thus confirmed.

[0116] In Embodiment 4, even when the fourth inspection holding surface 614 is rotated by 90 degrees, the third inspection holding surface 613 does not rotate. Therefore, the top view of the third processing groove 803 from the processing start side to the processing end side of the third inspection piece 703 can be imaged by the imaging unit 30 and thus confirmed.

[0117] (Processing Method) The processing method according to Embodiment 4 is a processing operation in which the processing apparatus 1 performs cutting on the third inspection piece 703 and the fourth inspection piece 704. In the processing method, the operator registers the processing content information in the control unit 100, places the third inspection piece 703 before cutting on the third inspection holding surface 613, and places the fourth inspection piece 704 before cutting on the fourth inspection holding surface 614. When receiving an instruction to start the processing operation from the operator, the processing apparatus 1 executes it. When starting the processing operation, the processing apparatus 1 sucks and holds the third inspection piece 703 on the third inspection holding surface 613 and sucks and holds the fourth inspection piece 704 on the fourth inspection holding surface 614. Before starting the processing operation, the third inspection piece 703 and the fourth inspection piece 704 may be sucked and held on the third inspection holding surface 613 and the fourth inspection holding surface 614 of the inspection table 60.

[0118] The processing method of Embodiment 4 is a processing method for the third inspection piece 703 and the fourth inspection piece 704, and includes a processing step, an imaging step, and a determination step.

[0119] (Processing step) FIG. 11(1) is a cross-sectional view schematically showing the processing step of the processing method according to Embodiment 4. In the processing step of Embodiment 4, the third inspection piece 703 and the fourth inspection piece 704 are positioned at the processing position, and a fourth processing groove 804 is formed in the fourth inspection piece 704 such that at least one end of the fourth inspection piece 704 has a cross section exposed in a direction (X-axis direction) perpendicular to the rotation axis 55 of the inspection table 60.

[0120] In the processing step ST11 of Embodiment 4, the rotation drive unit 63 rotates to the initial position shown in FIG. 11(1) where the fourth inspection holding surface 614 faces upward (+Z-axis direction). In the processing step, the inspection table 60 is suction-held, and the third inspection piece 703, the fourth inspection piece 704, and the cutting edge of the cutting blade 21 are aligned. As shown in FIG. 11(1), the processing apparatus 1 causes the cutting blade 21 to cut into the third inspection piece 703 and the fourth inspection piece 704, and while relatively moving the third inspection piece 703, the fourth inspection piece 704, and the cutting unit 20 along the X-axis direction, cuts from the left end (-X-axis direction) to the right end (+X-axis direction) in the X-axis direction to continuously form a third processing groove 803 and a fourth processing groove 804 in the third inspection piece 703 and the fourth inspection piece 704. When the processing step is completed, the process proceeds to the imaging step.

[0121] (Imaging step) FIG. 11(2) is a cross-sectional view schematically showing the imaging step of the processing method according to Embodiment 4. The imaging step of Embodiment 4 is a step of imaging the side surface on the processing end side of the fourth inspection piece 704 after performing the processing step to form an imaging image 300 including the fourth processing groove 804.

[0122] In Embodiment 4, in the imaging step, the processing apparatus 1 rotates the fourth inspection holding surface 614 90 degrees clockwise around the axis of the rotation shaft 55 from the state of the initial position, so that the fourth inspection holding surface 614 rotates to the imaging position shown in FIG. 11(2) facing the right (+X-axis direction). By positioning the fourth inspection holding surface 614 at the imaging position, the processed end side of the fourth inspection piece 704 can be directed upward (+Z-axis direction). Thereby, the imaging unit 30 disposed above can image the cross-sectional shape of the fourth processing groove 804 on the processed end side of the fourth inspection piece 704. An imaging image 300 shown in FIG. 4 can be obtained by imaging the side surface of the processed end side of the fourth inspection piece 704 with the imaging unit 30. Further, the imaging unit 30 images a bird's-eye view of the third processing groove 803 from the processing start side to the processing end side of the third inspection piece 703. When the imaging step is completed, the process proceeds to the determination step.

[0123] (Determination Step) The determination step of Embodiment 4 is the same as that of Embodiment 1, so the description thereof is omitted.

[0124] As described above, the processing method and the processing apparatus 1 according to Embodiment 4 form the third processing groove 803 in the third inspection piece 703 and image the side surface of the processed end side of the third inspection piece 703. Thereby, the cross-sectional shape of the processed end side of the third processing groove 803 can be confirmed. Further, even when the side surface of the processed end side of the fourth inspection piece 704 is imaged, since the third inspection piece 703 does not rotate, a bird's-eye view of the third processing groove 803 from the processing start side to the processing end side of the third inspection piece 703 can be imaged and confirmed.

[0125] In addition, since the rotation drive unit 63 can be configured by an air cylinder that can be positioned at only two positions, cost reduction can be achieved compared to being configured by a motor. Further, since the direction of rotating the inspection table 60 only needs to be 90 degrees and the movement range is narrow, it can be realized in a small installation space, and the processing apparatus 1 can be downsized.

[0126] Note that the embodiments of the present invention are not limited to the above-described embodiments and modifications, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by technological progress or another derived technology, the method may be used for implementation. Therefore, the scope of the claims covers all embodiments that can be included within the scope of the technical idea of the present invention.

Industrial Applicability

[0127] As described above, the processing apparatus of the present invention can confirm the cross-sectional shape of both the processing start side and the processing end side of the processing groove. Therefore, it is particularly useful in the field of forming processing grooves.

Explanation of Reference Numerals

[0128] 1: Processing apparatus, 10: Chuck table, 11: Holding surface, 20: Cutting unit, 21: Cutting blade, 22: Mount, 23: Spindle, 30: Imaging unit, 55: Rotation axis, 60: Inspection table, 61: Inspection holding surface, 63: Rotation drive unit, 70: Inspection piece, 80: Processing groove, 100: Control unit, 102: Normal image storage unit, 103: Determination unit, 200: Workpiece, 541: First holding part, 542: Second holding part, 611: First inspection holding surface, 612: Second inspection holding surface, 613: Third inspection holding surface, 614: Fourth inspection holding surface, 701: First inspection piece, 702: Second inspection piece, 703: Third inspection piece, 704: Fourth inspection piece, 801: First processing groove, 802: Second processing groove, 803: Third processing groove, 804: Fourth processing groove

Claims

1. A processing apparatus, comprising: a processing table including a processing holding surface capable of holding a workpiece; an inspection table including an inspection holding surface capable of holding an inspection piece; a rotation driving unit configured to rotate the inspection holding surface along a rotation axis parallel to the inspection holding surface; a processing unit configured to process the workpiece and the inspection piece; an imaging unit configured to image the workpiece and the inspection piece; The processing unit is configured to: form a processing groove on the inspection piece such that a cross section is exposed at at least one end of the inspection piece in a direction orthogonal to the rotation axis; The rotation driving unit is configured to: rotate and move the inspection holding surface between a processing position parallel to the processing holding surface and an imaging position orthogonal to the processing holding surface and where a cross section on either the processing start side or the processing end side of the processing groove is imaged by the imaging unit. A processing apparatus, characterized in that.

2. The inspection holding surface includes: a first inspection holding surface for holding a first inspection piece and a second inspection holding surface orthogonal to the first inspection holding surface and for holding a second inspection piece. The rotation driving unit is configured to rotate and move the inspection holding surface between a first position where the first inspection holding surface is positioned at the processing position and the second inspection holding surface is positioned at the imaging position and a second position where the first inspection holding surface is positioned at the imaging position and the second inspection holding surface is positioned at the processing position. The processing apparatus according to claim 1, characterized in that.

3. The processing unit includes: a rotating spindle, a mount connected to the spindle, and a cutting blade fixed to the mount. The processing apparatus according to claim 1 or 2.

4. The processing apparatus further includes a determination unit configured to determine whether the shape of the processing groove is normal based on an image captured by the imaging unit. The processing apparatus according to claim 1 or 2.

5. A method for processing a workpiece using the processing apparatus according to claim 1, the method comprising: positioning the inspection piece at the processing position; a processing step of forming a processing groove on the inspection piece such that a cross section is exposed at at least one end of the inspection piece in a direction orthogonal to the rotation axis; rotating the inspection holding surface to position it at the imaging position; and an imaging step of imaging a cross section on either the processing start side or the processing end side of the processing groove with the imaging unit.

6. A method for processing a workpiece using the processing apparatus according to claim 2, the method comprising: a first processing step of positioning the first inspection holding surface at the processing position and forming a first processing groove on the first inspection piece; ​ ​ ​ ​ ​ A first imaging step of positioning the first inspection holding surface at the imaging position and imaging a cross-section of the starting side of the first processing groove with the imaging unit; A processing start side inspection step including; A second processing step of positioning the second inspection holding surface at the processing position and forming a second processing groove in the second inspection piece; A second imaging step of positioning the second inspection holding surface at the imaging position and imaging a cross-section of the end side of the second processing groove with the imaging unit; A processing end side inspection step including; and Of the processing start side inspection step and the processing end side inspection step A processing method for a workpiece that performs at least any one of them.

7. By the image captured by the imaging unit, The processing method for a workpiece according to claim 5 or 6, further comprising a determination step of determining whether the shape of the processing groove is normal. The processing method for a workpiece according to claim 5 or 6.

8. The processing unit has a cutting blade, By the image captured by the imaging unit, The processing method for a workpiece according to claim 5 or claim 6, further comprising a cutting edge position detection step of detecting the cutting edge position of the cutting blade. The processing method for a workpiece according to claim 5 or claim 6.

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