Robot-shaped processing device

Abstract

To solve various problems generated accordingly to generation of friction heat with a simpler configuration in a processing device that causes a tool 2 to rotate and contact a workpiece.SOLUTION: A processing device includes a passage 18 and gas sending means. The passage 18 is formed by drilling a body 19 of a holder 5 and is opened at at least two positions on a surface of the body 19. The gas sending means sends air to an inflow side opening 20a among two openings 20 of the passage 18 and causes the air to be jetted from an outflow side opening 20b. The air jetted from the outflow side opening 20b exerts a shearing force to a tool 2 or collides with the tool 2.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a robotic machining apparatus that machines while rotationally contacting a predetermined tool with a workpiece, and particularly relates to a mode of friction stir welding of the workpiece.

Background Art

[0002] Conventionally, for example, in a robotic machining apparatus that friction stir welds a workpiece, it is known to equip the tip of a multi-joint robot with the following tools and holders as end effectors. That is, the tool contacts the workpiece while rotating to friction stir weld the workpiece. Further, the holder holds the tool and rotates coaxially with the tool. Then, for example, by rotating the holder by the output of an electric motor and operating the robot, the tool is rotationally contacted with the workpiece and moved along a predetermined locus to perform friction stir welding.

[0003] And such a robotic machining apparatus potentially has the following problems due to the generation of frictional heat associated with rotational contact. That is, a decrease in the life of the tool, a decrease in the quality of the workpiece, etc., and further, when the holder is assembled to the main shaft, grease deterioration of the bearing in the main shaft also becomes a problem. Therefore, in order to absorb frictional heat, a configuration is considered in which a refrigerant passage is provided in the tool and the holder, and during machining of the workpiece, refrigerant is passed through this passage to absorb frictional heat by heat exchange with the refrigerant (see, for example, Patent Document 1).

[0004] By the way, Patent Document 1 mainly assumes the use of cooling water as the refrigerant. Here, although cooling water is easy to control the temperature and can obtain a predetermined effect for cooling the tool, it has the following problems. That is, in order to cool the cooling water that has become high temperature due to heat absorption from the tool and the holder and use it again, the following configuration is required, and the configuration for absorbing frictional heat becomes large-scale. Specifically, cooling means such as a radiator, a circulation circuit for cooling water, a pump, a temperature sensor, etc. are required.

[0005] In addition, in order to suppress leakage of cooling water, a high-performance seal structure is required. In particular, since it is necessary to allow cooling water to flow from a non-rotating passage into a passage of a rotating tool or holder, the seal structure around the communication portion between the rotating passage and the non-rotating passage needs to be particularly high-performance.

[0006] Furthermore, since the location where frictional heat is generated is considered to be the tip of the tool that makes rotational contact with the workpiece, in order to suppress the diffusion of frictional heat by heat conduction, it is preferable to extend the cooling water passage to the tip of the tool as much as possible. On the other hand, due to the mechanical durability of the tool itself, it is difficult to extend the passage to the tip of the tool, and there is a mechanical limit to the extension of the passage.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0008] The present disclosure has been made to solve the above problems, and an object thereof is to solve various problems caused by the generation of frictional heat in a robot-type machining apparatus that rotatably contacts a tool with a workpiece with a simpler configuration.

Means for Solving the Problems

[0009] The robot-type machining apparatus of the present disclosure includes the following tool and holder as an end effector of a robot. First, the tool contacts the workpiece while rotating to machine the workpiece, and the holder holds the tool and rotates coaxially with the tool. Then, the robot-type machining apparatus machines the workpiece while three-dimensionally moving while rotating an integral body of the tool and the holder. In addition, the robot-type processing device includes the following passage and gas feeding means. First, the passage is formed through the body of the holder and opens at at least two locations on the surface of the body. Further, the gas feeding means feeds gas into one of the two openings of the passage and ejects the gas from the other opening.

[0010] Then, the gas ejected from the other opening exerts a shearing force on the tool or collides with it. Accordingly, according to the present disclosure, potentially, in a robot-type processing device that rotationally contacts a tool with a workpiece, various problems caused by the generation of frictional heat can be solved with a simpler configuration.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Modes for Carrying Out the Invention

[0012] The robot-type processing device of the embodiment will be described based on the following examples.

Examples

[0013] 〔Configuration of Example〕 The configuration of the robotic machining apparatus 1 according to the embodiment will be described with reference to the drawings (hereinafter, the robotic machining apparatus 1 may be abbreviated as the machining apparatus 1). Here, the machining apparatus 1 is configured to mount a predetermined tool 2 on a robot 3 and machine a workpiece 4 while bringing it into rotational contact with the workpiece 4. In the embodiment, a mode of friction stir welding the workpiece 4 will be taken as an example for description (see FIGS. 1 to 3).

[0014] Here, the robot 3 is, for example, a well-known vertically articulated type, and a plurality of end effectors such as a tool 2 and a holder 5 are mounted at its tip. Further, the tool 2 contacts the workpiece 4 while rotating to machine the workpiece 4, and the holder 5 holds the tool 2 and rotates coaxially with the tool 2. Then, the machining apparatus 1 machines the workpiece 4 while three-dimensionally moving the integrated body of the tool 2 and the holder 5 by the robot 3 while rotating it.

[0015] Also, at the tip of the robot 3, that is, at the tip of the final-stage arm 3a, a mounting plate 7 is attached so as to be perpendicular to the axis of the arm 3a, and various end effectors are mounted on the mounting plate 7. Further, the end effectors are roughly classified into the following two types: a machining unit 8 and a linear motion unit 9. That is, the machining unit 8 is a part that mainly performs friction stir welding of the workpiece 4 having a tool 2 and the like, and the linear motion unit 9 is a part that linearly drives the machining unit 8 relative to the robot 3.

[0016] The linear motion unit 9 is composed of a well-known ball screw 9a, a slider 9b, an electric motor 9c, and the like. Then, the linear motion unit 9 converts the torque generated by the electric motor 9c into a linear force by the ball screw 9a while restricting the rotation by the slider 9b to linearly drive the entire machining unit 8.

[0017] In addition to the robot 3, the machining unit 8, and the linear motion unit 9, the machining apparatus 1 includes a control unit 10 and a gas feeding means 11 to be described later, and the robot 3, the machining unit 8, the linear motion unit 9, and the gas feeding means 11 are controlled in their operations by the control unit 10. The control unit 10 is a control panel having a well-known configuration. The processing unit 8 will be described in detail below.

[0018] The processing unit 8 includes a tool 2, a holder 5, a cylindrical body 13, an electric motor 14, a main shaft 15, and a support connecting portion 16. While rotating and driving the holder 5 holding the tool 2 by the electric motor 14, the work 4 is processed by the tool 2.

[0019] Here, the electric motor 14 rotationally drives an integral body of the tool 2 and the holder 5. Further, the main shaft 15 has the holder 5 and the electric motor 14 mounted thereon, transmits the output of the electric motor 14 to the holder 5, and bears the rotation, and is stationary relative to the robot 3. Furthermore, the support connecting portion 16 holds and supports the main shaft 15, and is integrated with the slider 9b of the linear motion portion 9 to connect the processing unit 8 and the linear motion portion 9. Then, the entire processing unit 8 is linearly driven by the linear motion portion 9 via the support connecting portion 16.

[0020] Note that the tool 2, the holder 5, the cylindrical body 13, the electric motor 14, and the main shaft 15 are coaxial, and the output shaft of the electric motor 14, the tool 2, and the holder 5 rotate around the same rotation axis. Further, the linear motion portion 9 linearly drives the processing unit 8 in the direction of the rotation axis (hereinafter, the direction of the rotation axis regarding the processing unit 8 may be referred to as the axial direction). The tool 2 and the holder 5 will be described in detail below (see FIG. 4).

[0021] The tool 2 has a protruding portion 2a protruding outside the holder 5 and a fitting portion 2b fitted into the holder 5. Further, the protruding portion 2a is, for example, a continuous structure of two coaxial and different-diameter cylindrical portions, and the diameter of the tip side is reduced stepwise with respect to the rear portion. Then, for example, the edges of two metal plates 4a and 4b as the work 4 are butted against each other to form a boundary line 4c, and while rotating the tool 2, the tool 2 is applied to the work 4 as follows to friction stir-join the two metal plates 4a and 4b (see FIG. 3).

[0022] That is, while rotating the tool 2, the small-diameter portion 2c on the tip side is press-fitted into the boundary line 4c, and the step surface of the rear large-diameter portion 2d is brought into contact with the surface near the boundary line 4c. As a result, the outer peripheral surface of the small-diameter portion 2c and the step surface of the large-diameter portion 2d are in sliding contact with the edges and the surfaces near the edges of the metal plates 4a and 4b, generating frictional heat. Due to this frictional heat, the portion near the boundary line 4c within both metal plates 4a and 4b undergoes plastic flow and is stirred and mixed by the tool 2.

[0023] Then, while maintaining this state, by moving the tool 2 along the boundary line 4c, the two metal plates 4a and 4b are joined along the boundary line 4c. The fitting portion 2b is a portion used for fastening with the holder 5, and various fastening methods such as a collet method and a set screw method can be adopted for the fastening method.

[0024] Next, the holder 5 has a fitting portion 5a that fits onto the main shaft 15 and a protruding portion 5b that protrudes outside the main shaft 15 and holds the tool 2 (see Fig. 4). Here, the protruding portion 5b is a cylindrical body as a whole. The tip-side portion forms a tool holding portion 5c, and the rear portion near the fitting portion 5a forms a covering portion 5d.

[0025] The tool holding portion 5c is a portion that receives the fitting portion 2b of the tool 2, and the covering portion 5d is a portion that is covered by the cylindrical body 13 described later. The fitting portion 5a is a portion used for fastening with the main shaft 15, and various fastening methods such as a collet method and a set screw method can also be adopted for the fastening method between the fitting portion 5a and the main shaft 15. In addition, the holder 5 is provided with a center hole 5e that penetrates the whole in the axial direction. The tip side of the center hole 5e has a reduced diameter compared to the rear, and the fitting portion 2b is fitted in this reduced-diameter region.

[0026] Furthermore, the holder 5 has a passage 18 as follows. That is, the holder 5 has a metal body, namely, a body 19 made of metal, and the passage 18 is formed through the body 19 and opens at at least two locations on the surface of the body 19. And, of the two openings 20 of the passage 18, gas is fed into one opening 20, and gas is ejected from the other opening 20. Also, the gas ejected from the other opening 20 flows toward the workpiece 4 while exerting a shearing force on or colliding with the tool 2, and collides with the workpiece 4 and diffuses.

[0027] That is, the body 19 is provided with a passage 18 through which gas can pass, and the configuration of the passage 18 is set so that the ejected gas can realize the above-described flow. Hereinafter, of the openings 20 of the passage 18, the opening 20 serving as the gas inlet may be referred to as the inflow-side opening 20a, and the opening 20 serving as the gas outlet may be referred to as the outflow-side opening 20b. Subsequently, the configuration of the passage 18 will be described in detail.

[0028] The passage 18 has the following radial passage 18a and axial passage 18b. First, the radial passage 18a is provided in the covering portion 5d so as to have an axis perpendicular to the rotation axis, and opens to the outer peripheral surface of the covering portion 5d and the inner peripheral surface of the center hole 5e (see FIGS. 4 and 5). Also, the axial passage 18b is provided so as to have an axis parallel to the rotation axis, straddles both the tool holding portion 5c and the covering portion 5d, and opens to the tip surface of the holder 5 and the radial passage 18a.

[0029] And, for example, eight combinations of such radial and axial passages 18a and 18b are provided at equal angular intervals around the rotation axis. As a result, eight openings 20 exist on the outer peripheral surface of the covering portion 5d, and eight openings 20 exist around the tool 2 on the tip surface (see FIG. 6).

[0030] Next, the cylindrical body 13 covers the covering portion 5d from the outer peripheral side, is fixed to the main shaft 15 by a predetermined bracket 13a, and is stationary relative to the robot 3 (see Fig. 4). An annular groove 22 is provided on the inner periphery of the cylindrical body 13, and the opening 20 provided in the covering portion 5d opens into the groove 22. The cylindrical body 13 has a bearing 13b for receiving the rotation of the holder 5, and the bearing 13b is a well-known ball bearing. Note that the axial movement of the cylindrical body 13 is restricted by a flange 5f provided on the holder 5 and a flange part 13c separately attached to the holder 5.

[0031] Also, the tip of the pipe 11a constituting the gas feeding means 11 is attached to the cylindrical body 13. That is, the cylindrical body 13 is provided with a mounting hole 13d for mounting the tip of the pipe 11a, and the mounting hole 13d communicates with the groove 22. By mounting the tip of the pipe 11a in the mounting hole 13d, the flow path inside the pipe 11a communicates with the groove 22.

[0032] Here, the gas feeding means 11 is a means for feeding gas into the passage 18, and has the following pump 11b and flow path forming body. First, the pump 11b has a well-known configuration for pressurizing and discharging gas, sucks and pressurizes air as the gas and discharges it. The flow path forming body forms a flow path for sending gas from the discharge port of the pump 11b to the passage 18, and is composed of the above-mentioned pipe 11a. Also, the tip of the pipe 11a near the cylindrical body 13 is fixed to the main shaft 15 by a predetermined bracket 11c.

[0033] As described above, the opening 20 provided on the outer peripheral surface of the covering portion 5d functions as the inflow side opening 20a, and the opening 20 provided on the tip surface of the holder 5 functions as the outflow side opening 20b. The gas feeding means 11 feeds air into the inflow side opening 20a on the outer peripheral surface of the covering portion 5d and ejects air from the outflow side opening 20b on the tip surface of the holder 5.

[0034] That is, the processing device 1 can send air into the passage 18 through the gas feeding means 11, pass it through, and further eject the air from the passage 18 to apply a shearing force to the tool 2 or cause a collision while flowing it toward the workpiece 4. Then, the processing device 1 operates as follows, for example, by the control unit 10.

[0035] 〔Operation method of the embodiment〕 The operation method of the processing device 1 of the embodiment will be described. First, with the tool 2 separated from the workpiece 4 before processing, in the gas feeding means 11, the pump 11b is started to pass air through the passage 18 and eject it from the passage 18. Next, in the processing unit 8, the electric motor 14 is started to rotate the tool 2 and the holder 5. Subsequently, the robot 3 is operated to bring the tool 2 closer to the boundary line 4c of the workpiece 4.

[0036] Thereafter, in the linear motion unit 9, the electric motor 9c is started to rotate the tool 2 while press-fitting the small-diameter portion 2c into the boundary line 4c and bringing the stepped surface of the large-diameter portion 2d into contact with the surface near the boundary line 4c. As a result, the outer peripheral surface of the small-diameter portion 2c and the stepped surface of the large-diameter portion 2d are in sliding contact with the edges and the surfaces near the edges of the metal plates 4a and 4b, generating frictional heat. Due to this frictional heat, the portions near the boundary line 4c of both metal plates 4a and 4b are plastically fluidized and stirred and mixed by the tool 2.

[0037] Subsequently, while maintaining such a sliding contact state, the tool 2 is moved along the boundary line 4c by the operation of the robot 3. As a result, the two metal plates 4a and 4b are joined along the boundary line 4c. During this time, air continues to be ejected from the passage 18, and the ejected air flows toward the plastically fluidized region near the boundary line 4c inside the workpiece 4 while applying a shearing force to the tool 2 or causing a collision, and collides with and diffuses in this region. As a result, the tool 2 continues to be cooled from the outside, and the workpiece 4 is sequentially cooled in the vicinity of the boundary line 4c according to the movement trajectories of the tool 2 and the holder 5.

[0038] 〔Effect of Example 1〕 The processing apparatus 1 of Example 1 includes the following tool 2 and holder 5 as the end effector of the robot 3. First, the tool 2 contacts the workpiece 4 while rotating to process the workpiece 4, and the holder 5 holds the tool 2 and rotates coaxially with the tool 2. Then, the processing apparatus 1 processes the workpiece 4 while rotating and three-dimensionally moving the integral body of the tool 2 and the holder 5.

[0039] Further, the processing apparatus 1 includes the following passage 18 and gas feeding means 11. First, the passage 18 is formed through the body 19 of the holder 5 and opens at at least two locations on the surface of the body 19. Also, the gas feeding means 11 feeds air into the inflow-side opening 20a of the two openings 20 of the passage 18 and ejects air from the outflow-side opening 20b.

[0040] Then, the air ejected from the outflow-side opening 20b exerts a shearing force on the tool 2 or collides with it. Thereby, potentially, in the processing apparatus 1 that rotationally contacts the tool 2 with the workpiece 4, various problems caused by the generation of frictional heat can be solved with a simpler configuration.

[0041] That is, by using air, which is a gas, instead of cooling water as the refrigerant that absorbs frictional heat, there is no need to reuse the refrigerant, so the configuration for absorbing frictional heat can be formed by the pump 11b and the one-way flow path, and it can be greatly simplified. Also, since air does not have as strict a requirement for leakage suppression as cooling water, the seal structure can also be simplified.

[0042] Furthermore, since gas is ejected from the passage 18 of the holder 5 to exert a shearing force on the tool 2 or collide with it, the tool 2 can be cooled from the outside. For this reason, there is no need to provide a refrigerant passage in the tool 2, so the diffusion of frictional heat can be suppressed in the vicinity of the generation location without reducing the mechanical durability of the tool 2.

[0043] In the processing apparatus 1 of the comparative example shown in FIG. 7, the passage 18 is not provided in the body 19, the tip of the pipe 11a is arranged to face the surface of the tool 2, and air is ejected from the tip of the pipe to collide with the tool 2. Although the tool 2 can be cooled from the outside by air without using cooling water in the processing apparatus 1 of the comparative example, there are the following problems.

[0044] That is, when other jigs are present around the tool 2, the number of pipe tips that can be arranged around the tool 2 is limited in order to avoid interference with these jigs. Therefore, the cooling capacity of the tool 2 is also limited. On the other hand, according to the processing apparatus 1 of the embodiment, the cooling capacity can be increased by increasing the number of openings 20 at the tip surface of the holder 5, that is, by increasing the number of passages 5.

[0045] According to the processing apparatus 1 of the embodiment, the air ejected from the outflow side opening 20b flows toward the workpiece 4 while exerting a shearing force on the tool 2 or colliding with the tool 2. Thereby, the workpiece 4 can also be cooled, so that the finished quality of the workpiece 4 can be improved. In particular, in the case of friction stir welding, since the portion near the boundary line 4c plasticized by frictional heat in the workpiece 4 can be cooled, the generation of distortion due to heat accumulation in the workpiece 4 can be efficiently suppressed.

[0046] According to the processing apparatus 1 of the embodiment, the inflow side opening 20a is provided on the outer peripheral surface of the cylindrical covering portion 5d inside the body 19. The processing apparatus 1 further includes the following cylindrical body 13. That is, the cylindrical body 13 covers the covering portion 5d from the outer peripheral side and has a bearing 13b for receiving the rotation of the holder 5. An annular groove 22 is provided on the inner periphery of the cylindrical body 13, and the inflow side opening 20a opens into the groove 22.

[0047] As a result, even when the tool 2 and the holder 5 are rotating, by continuously feeding air into the groove 22, air can continue to pass through the passage 18 and continuously be ejected from the outflow-side opening 20b. Therefore, even when the tool 2 and the holder 5 are rotating, the diffusion of frictional heat can continue to be suppressed.

[0048] The processing apparatus 1 of the embodiment includes a main shaft 15 to which the holder 5 is attached, and the groove 22 and the cylindrical body 13 are located outside the main shaft 15. As a result, without modifying any other parts of the processing apparatus 1 such as the main shaft 15 and the electric motor 14, by modifying the holder 5 to the above specifications and assembling the cylindrical body 13, various problems caused by the generation of frictional heat can be solved.

[0049] According to the processing apparatus 1 of the embodiment, the main shaft 15 is relatively stationary with respect to the robot 3, and the cylindrical body 13 is fixed to the main shaft 15. As a result, the cylindrical body 13 can be fixed to the main shaft 15 that is present near itself and has high rigidity. Therefore, the position and posture of the cylindrical body 13 can be stabilized.

[0050] According to the apparatus 1 of the embodiment, the gas feeding means 11 has a pipe 11a as the following flow path forming body. That is, the flow path forming body forms a flow path for sending gas from the pump 11b as a gas supply source to the passage 18. Further, the cylindrical body 13 is provided with a mounting hole 13d to which the tip of the pipe 11a is mounted, and the mounting hole 13d communicates with the groove 22.

[0051] And a portion of the pipe 11a near the cylindrical body 13 is fixed to the main shaft 15. As a result, a portion of the pipe 11a near the cylindrical body 13 can be fixed to the main shaft 15 that is present near itself and has high rigidity. Therefore, the position and posture of the portion of the pipe 11a near the cylindrical body 13 can be stabilized.

[0052] 〔Modification〕 The embodiments disclose a specific example, and it goes without saying that the present invention is not limited to the embodiments. For example, according to the processing apparatus 1 of the embodiment, an inflow-side opening 20a was provided on the outer peripheral surface of the coating portion 5d, and an annular groove 22 was provided on the inner periphery of the cylindrical body 13. By opening the inflow-side opening 20a in the groove 22, air was caused to flow from the groove 22 into the passage 18. However, it is not limited to such a mode.

[0053] For example, a groove 22 may be provided on the outer peripheral surface of the coating portion 5d, the inflow-side opening 20a may be opened in the groove 22, and the groove 22 may be covered from the outer peripheral side by the cylindrical body 13, so that air flows from the groove 22 into the passage 18.

[0054] Also, according to the processing apparatus 1 of the embodiment, the tool 2, the holder 5, the electric motor 14, and the spindle 15 were coaxial, and the output shaft of the electric motor 14, the tool 2, and the holder 5 rotated around the same rotation axis. However, it is not limited to such a mode. For example, the tool 2, the holder 5, and the spindle 15 and the electric motor 14 may be non-coaxial, and the output of the electric motor 14 may be transmitted to the holder 5 by a pulley.

Explanation of Reference Numerals

[0055] 1 Processing apparatus (robot-type processing apparatus) 2 Tool 3 Robot 4 Workpiece 5 Holder 11 Gas feeding means 18 Passage 19 Body 20 Opening 20a Inflow-side opening (one opening) 20b Outflow-side opening (the other opening)

Claims

1. A robot-type machining apparatus comprising a tool that contacts a workpiece while rotating to machine the workpiece, and a holder that holds the tool and rotates coaxially with the tool as an end effector of a robot, the robot-type machining apparatus machining the workpiece while three-dimensionally moving the integrated tool and holder while rotating them, a passage formed through the body of the holder and opening at at least two locations on the surface of the body, gas feeding means for feeding gas into one of the two openings of the passage and ejecting gas from the other opening, wherein the gas ejected from the other opening exerts a shearing force on or collides with the tool, characterized in that it is a robot-type machining apparatus.

2. In the robot-type machining apparatus according to Claim 1, wherein the gas ejected from the other opening exerts a shearing force on or collides with the tool while flowing toward the workpiece, characterized in that it is a robot-type machining apparatus.

3. In the robot-type machining apparatus according to Claim 1, at least a part of the outer peripheral surface of the body is cylindrical, and one of the openings is provided in this cylindrical range, the robot-type machining apparatus, comprises a cylindrical body that covers the cylindrical range from the outer peripheral side and has a bearing that receives the rotation of the holder, an annular groove is provided on the inner circumference of this cylindrical body, wherein one of the openings opens into this groove, characterized in that it is a robot-type machining apparatus.

4. In the robot-type machining apparatus according to Claim 1, at least a part of the outer peripheral surface of the body is cylindrical, and an annular groove is provided in this cylindrical range, one of the openings opens into this groove, the robot-type machining apparatus, characterized in that it comprises a cylindrical body that covers the groove from the outer peripheral side and has a bearing that receives the rotation of the holder.

5. In the robot-type machining apparatus according to Claim 3 or Claim 4, comprises a spindle to which the holder is attached, wherein the groove and the cylindrical body are located outside the spindle, characterized in that it is a robot-type machining apparatus.

6. In the robot-type machining apparatus according to Claim 5, the spindle is relatively stationary with respect to the robot, wherein the cylindrical body is fixed to the spindle, characterized in that it is a robot-type machining apparatus.

7. In the robot-type machining apparatus according to Claim 5, The gas supply means has a flow path forming body that forms a flow path for sending gas from a predetermined gas supply source to the passage. The cylindrical body is provided with a mounting hole to which the tip of the flow path forming body is mounted, and the mounting hole communicates with the groove. The main shaft is stationary relative to the robot. The robot type processing apparatus is characterized in that the tip portion on the side of the cylindrical body of the flow path forming body is fixed to the main shaft.

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