Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having a good shape can be produced.SOLUTION: The resist composition contains one or more resins and an acid generator. At least one of the one or more resins contains a structural unit represented by formula (III), at least one of the one or more resins contains a structural unit represented by formula (I2), and at least one of the one or more resins contains a structural unit represented by formula (I3). [R2-R4 each represent a hydrogen atom, a halogen atom or the like; X2 represents a single bond or *-CO-O-; X3 represents a single bond or -CO-; L2 and L12 each represent a single bond or an optionally substituted hydrocarbon group; RA represents a saturated hydrocarbon group; RB represents a saturated hydrocarbon group; and L13 represents a single bond or an optionally substituted hydrocarbon group.]SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to a resist composition and a method for producing a resist pattern using the resist composition. [Background technology]

[0002] Patent Document 1 describes a resin containing the following structural unit and a structural unit having an acid labile group. TIFF2025086349000001.tif2958

[0003] Patent Document 1 also describes a resin containing the following structural unit and a structural unit having an acid labile group. TIFF2025086349000002.tif3160 [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2014-067015 A Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide a resist composition that can form a resist pattern having a better shape than a resist pattern formed from the above resist composition. [Means for solving the problem]

[0006] The present invention includes the following inventions. [1] A resist composition comprising one or more resins and an acid generator, wherein at least one of the one or more resins contains a structural unit represented by formula (III), at least one of the one or more resins contains a structural unit represented by formula (I2), and at least one of the one or more resins contains a structural unit represented by formula (I3). TIFF2025086349000003.tif4098[In formula (III), R 4 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. X 2 represents a single bond or *-CO-O-. * represents R 4 represents the bonding site with the carbon atom to which it is bonded. L 2 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. X 3 represents a single bond or -CO-. mk represents an integer of 1 to 4. When mk is 2 or more, the groups in the multiple parentheses may be the same or different.] TIFF2025086349000004.tif3291[In formula (I2), R 2 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R A are either the same or different. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced.] TIFF2025086349000005.tif4091[In formula (I3), R 3 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. R B represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u2 represents an integer of 0 to 2, and when u2 is 2, a plurality of R B are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 2. L 13 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced.] [2] The resist composition according to [1], wherein one of the one or more resins contains a structural unit represented by formula (III) and a structural unit represented by formula (I2). [3] The resist composition according to [1] or [2], wherein one of the one or more resins contains a structural unit represented by formula (III) and a structural unit represented by formula (I3). [4] The resist composition according to any one of [1] to [3], wherein one of the one or more resins contains a structural unit represented by formula (III), a structural unit represented by formula (I2), and a structural unit represented by formula (I3). [5] The resist composition according to any one of [1] to [4], comprising a resin containing a structural unit represented by formula (III) and a structural unit represented by formula (I2), and a resin containing a structural unit represented by formula (III) and a structural unit represented by formula (I3). [6] The resist composition according to any one of [1] to [5], wherein the content of the structural unit represented by formula (III) in the resin containing the structural unit represented by formula (III) is 10 to 50 mol % based on all structural units. [7] The resist composition according to any one of [1] to [6], wherein, in one or more resins, a ratio of the total number of moles of structural units represented by formula (I2) contained in all of the resins to the total number of moles of structural units represented by formula (I3) contained in all of the resins is 20:80 to 60:40. [8] The resist composition according to any one of [1] to [7], wherein in the resin containing a structural unit represented by formula (III), the total content of the structural unit represented by formula (III), the structural unit represented by formula (I2), and the structural unit represented by formula (I3) is 90 mol % or more and 100 mol % or less. [9] The resist composition according to any one of [1] to [8], wherein none of the one or more resins contains a structural unit having an acid labile group.

[10] The resist composition according to any one of [1] to [9], wherein the acid generator includes a salt represented by formula (B1). TIFF2025086349000006.tif1492[In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the multiple parentheses may be the same or different. Z1 + represents an organic cation.

[11] (1) A step of applying the resist composition according to any one of [1] to

[10] onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the heated composition layer; A method for producing a resist pattern comprising the steps of: Effect of the Invention

[0007] By using the resist composition of the present invention, a resist pattern with a good shape can be produced. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In this specification, the term "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a straight-chain structure and a branched structure may have either one. -CH contained in a hydrocarbon group, etc. 2 - is -O-, -S-, -CO- or -SO 2 When replaced with -, the same example applies to each group, and the number of carbon atoms before replacement is the number of carbon atoms of the hydrocarbon group, etc. "Combined group" means a group in which two or more of the exemplified groups are combined, and the valence of these groups may be appropriately changed depending on the bond form. "Derived from" or "derived from" refers to a polymerizable C=C bond contained in the molecule becoming a single bond (-CC- group) by polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., each group may have hydrogen atoms at any position and number contained in the group replaced by bonds. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituted group. As used herein, the term "acid labile group" refers to a group which has a leaving group and which, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), is eliminated to form a hydrophilic group (e.g., a hydroxy group or a carboxy group). The term "base labile group" refers to a group which has a leaving group and which, when contacted with a base (e.g., trimethylamine, etc.), is eliminated to form a hydrophilic group (e.g., a carboxy group or a hydroxy group). In this specification, the term "solids content of a resist composition" refers to the sum of the components excluding the solvent (E), which will be described later, from the total amount of the resist composition.

[0009] [Resist Composition] The resist composition of the present invention contains one or more resins (hereinafter sometimes referred to as "resin component (A)" or "resin (A)") and an acid generator (hereinafter sometimes referred to as "acid generator (B)"). At least one of the one or more resins contains a structural unit represented by formula (III) (hereinafter sometimes referred to as "structural unit (III)"); at least one of the one or more resins contains a structural unit represented by formula (I2) (hereinafter sometimes referred to as "structural unit (I2)"); and at least one of the one or more resins contains a structural unit represented by formula (I3) (hereinafter sometimes referred to as "structural unit (I3)"). For example, the structural unit (III), the structural unit (I2), and the structural unit (I3) may each be contained in a different resin; one resin may contain "structural unit (III)", "structural unit (I2)", and "structural unit (I3)"; a mixture of a resin containing "structural unit (III)" and "structural unit (I2)" and a resin containing "structural unit (III)" and "structural unit (I3)"; or a mixture of a resin containing "structural unit (III)" and a resin containing "structural unit (I2)" and "structural unit (I3)". The resist composition of the present invention preferably contains a quencher such as a basic compound or a salt that generates an acid having a weaker acidity than the acid generated from the acid generator (hereinafter may be referred to as "quencher (C)"), and preferably contains a solvent (hereinafter may be referred to as "solvent (E)").

[0010] <Resin component (A)> <Structural unit (III)> The structural unit (III) is a structural unit represented by the following formula (III), and is derived from a compound represented by the following formula (III-s) (hereinafter, may be referred to as compound (III-s)). 2 =CR 4The double bond is cleaved. TIFF2025086349000007.tif52136 [In formula (III) and formula (III-s), all symbols have the same meanings as defined above.]

[0011] R 4 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 4 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 4 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0012] L 2 Examples of the hydrocarbon group in include cyclic hydrocarbon groups such as chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be groups combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0013] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site may be any position. TIFF2025086349000008.tif46168For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group are exemplified. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include divalent to pentavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenetetrayl group, and an arenetyl group. Specific examples of aromatic hydrocarbon groups include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms, further preferably 6 to 14 carbon atoms, and further preferably 6 to 10 carbon atoms.

[0014] Examples of groups that combine two or more types include a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group, a group that combines an aromatic hydrocarbon group with a chain hydrocarbon group, a group that combines an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is X 2 may be bound to Examples of groups that combine an alicyclic hydrocarbon group and a chain hydrocarbon group include groups in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-(alicyclic hydrocarbon group-) mk etc.), groups in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(chain hydrocarbon group-) mketc.), groups in which one or more alicyclic hydrocarbon groups and a chain hydrocarbon group are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-(alicyclic hydrocarbon group-chain hydrocarbon group-) mk , *-Linear hydrocarbon group-Alicyclic hydrocarbon group-(Linear hydrocarbon group-) mk etc.), groups in which one or more chain hydrocarbon groups and alicyclic hydrocarbon groups are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(chain hydrocarbon group-alicyclic hydrocarbon group-) mk , *-alicyclic hydrocarbon group-chain hydrocarbon group-(alicyclic hydrocarbon group-) mk etc.), a group in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group, and a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to the chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-(chain hydrocarbon group-alicyclic hydrocarbon group-) mk , *-Acyclic hydrocarbon group-Alicyclic hydrocarbon group-Acyclic hydrocarbon group-(Alicyclic hydrocarbon group-) mk etc.), groups in which one or more chain hydrocarbon groups and an alicyclic hydrocarbon group and another chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-) mk , *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-(chain hydrocarbon group-) mk etc.) Examples of groups that combine an aromatic hydrocarbon group and a chain hydrocarbon group include groups in which one or more aromatic hydrocarbon groups are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-(aromatic hydrocarbon group-) mk etc.), groups in which one or more chain hydrocarbon groups are bonded to an aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-(chain hydrocarbon group-) mk etc.), groups in which one or more aromatic hydrocarbon groups and a chain hydrocarbon group are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-(aromatic hydrocarbon group-chain hydrocarbon group-) mk , *-Linear hydrocarbon group-Aromatic hydrocarbon group-(Linear hydrocarbon group-) mk etc.) Examples of groups that combine an alicyclic hydrocarbon group with an aromatic hydrocarbon group include groups in which one or more aromatic hydrocarbon groups are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(aromatic hydrocarbon group-) mketc.), groups in which one or more alicyclic hydrocarbon groups are bonded to an aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-(alicyclic hydrocarbon group-) mk etc.), and groups in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (for example, the following groups (the bonding site is at any position), etc.). TIFF2025086349000009.tif23166 Examples of groups that combine an alicyclic hydrocarbon group, an open chain hydrocarbon group, and an aromatic hydrocarbon group include a group in which one or more aromatic hydrocarbon groups and open chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-aromatic hydrocarbon group-(open chain hydrocarbon group-) mk etc.), groups in which one or more alicyclic hydrocarbon groups and chain hydrocarbon groups are bonded to an aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-alicyclic hydrocarbon group-(chain hydrocarbon group-) mk etc.) * is X 2 It represents the binding site with Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites.

[0015] L 2 -CH contained in the hydrocarbon group having 1 to 28 carbon atoms 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. L 2 -CH contained in the hydrocarbon group having 1 to 28 carbon atoms 2 - is -O-, -S-, -SO 2 When it is replaced by - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. -CH contained in the hydrocarbon group 2 -, -O-, -S-, -SO 2 The group substituted for - or -CO- is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2- is replaced by -S-), alkoxy group (-CH 2 - is replaced by -O-), alkylthio group (-CH 2 - is replaced by -S-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylsulfonyl group (-CH 2 -But-SO 2 - substituted), alkylcarbonyl group (a group in which -CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkoxycarbonyloxy group (-CH 2 -CH 2 -CH 2 - is replaced by -O-CO-O-), oxy group (-CH 2 - is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH at any position contained in the alkanediyl group) 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group)2 -CH 2 - is replaced by -CO-O-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 -), alkanediylthio group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 Examples of the alkyl group include a cycloalkyl group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a combination of two or more of these groups. Also included are groups in which one or more of the hydrogen atoms of these groups are replaced with a bonding site. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group may be 2 to 16, preferably 2 to 1, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0016] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0017] In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group replaced with - include the following groups. In addition, among the groups shown below, -O- is -S-, -CO- is -SO 2 Also included are groups each replaced with -. The binding site may be at any position. TIFF2025086349000010.tif47168-CH contained in a group that combines an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 Examples of groups substituted with - include the following groups: The binding site may be at any position. TIFF2025086349000011.tif26164L 2 The hydrocarbon group in may have one or more substituents. The substituents include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (including the —CH 2 - may be replaced by -O- or -CO-.) Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 2The hydrocarbon group in the formula (I) can have a halogen atom as a substituent, and thus can substantially have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a fluorinated alkyl group having 1 to 6 carbon atoms, a chlorinated alkyl group having 1 to 6 carbon atoms, a brominated alkyl group having 1 to 6 carbon atoms, and an iodinated alkyl group having 1 to 6 carbon atoms. Specific examples include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2. L 2 By including a branched structure in the hydrocarbon group of L 2 can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. L 2 -CH contained in the hydrocarbon group 2 - is replaced by -O- or -CO-, 2can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, or an alkylcarbonyloxy group. The alkoxy group includes an alkoxy group having 1 to 11 carbon atoms, the alkoxycarbonyl group includes an alkoxycarbonyl group having 2 to 11 carbon atoms, the alkylcarbonyl group includes an alkylcarbonyl group having 2 to 12 carbon atoms, and the alkylcarbonyloxy group includes an alkylcarbonyloxy group having 2 to 11 carbon atoms. These substituted groups include the same as the groups exemplified in this specification, within the range permitted by the upper limit of the carbon number. L 2 The substituent that the hydrocarbon group in the formula (I) may have is, for example, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (including —CH 2 - may be replaced by -O- or -CO-), and a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group or a methoxy group is even more preferred.

[0018] L 2 represents a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (provided that the —CH 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that the -CH 2 - is -O-, -S-, -CO- or -SO 2 -) or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2-, -O-, -S-, -SO 2 - or -CO-), and a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH 2 - is -O-, -S-, -CO- or -SO 2 -) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (with the proviso that the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 -, -O-, -S-, -SO 2 - or -CO-), and a chain hydrocarbon group having 1 to 9 carbon atoms which may have a substituent (with the proviso that -CH 2 - may be replaced by -O- or -CO-) or a cyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (provided that the -CH 2 -, -O-, -S-, -SO 2 - or -CO-) is more preferable, and the -CH 2 may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms (however, -CH 2 - is -O-, -S-, -CO- or -SO 2-), or an aromatic hydrocarbon group having 6 to 10 carbon atoms (which may have one or more halogen atoms, one or more alkyl groups having 1 to 3 carbon atoms, one or more haloalkyl groups having 1 to 3 carbon atoms, or one or more alkoxy groups having 1 to 3 carbon atoms), is even more preferably a chain hydrocarbon group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 carbon atoms (which may have one or more halogen atoms, one or more alkyl groups having 1 to 3 carbon atoms, or one or more alkoxy groups having 1 to 3 carbon atoms). Also, L 2 is *-L 22 (-)mk or *-L 22 (-X 23 -L 23 -)mk(L 22 represents an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms, an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group combining an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms and an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms, and -CH contained in the cyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by -CH 2 - may be replaced by -O- or -CO-. * represents X 2 It represents the binding site with X 23 represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents L 22 It represents the binding site with L 23 represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and -CH 2 - may be replaced by -O- or -CO-. Examples of combinations of a chain hydrocarbon group and a cyclic hydrocarbon group include *-chain hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-, *-alicyclic hydrocarbon group or aromatic hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-chain hydrocarbon group-, etc. * is X 2It represents the binding site with The substituents that each group may have include L 2 The substituents which may be possessed by the group include the same groups as those exemplified above. L 22 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group obtained by condensing these groups. 2 Examples of the groups include the same groups as those exemplified in the above. L 22 and L 23 As the chain hydrocarbon group of L 2 Examples of the groups include the same groups as those exemplified in the above. L 22 is a chain hydrocarbon group having 1 to 9 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group). 2 - may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 -) or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by -CH 2 - may be replaced by -O- or -CO-.) is preferably a chain hydrocarbon group having 1 to 9 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-) or a cyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group). 2 - may be replaced by -O- or -CO-.) is more preferred, and a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (-CH 2 - may be replaced by -O- or -CO-) or a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group).2 - may be replaced by -O- or -CO-.) is more preferred. L 23 is preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent, more preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms, even more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. mk is preferably an integer of 1 to 3, and is preferably 1 or 2.

[0019] L 2 Examples of the structural unit (III) which is a chain hydrocarbon group include the following structural units: TIFF2025086349000012.tif74163

[0020] In the above structural unit, R 4 and R 4 Specific examples of the structural unit (III) include structural units in which a hydrogen atom corresponding to the following formula is replaced with a halogen atom, a haloalkyl group or an alkyl group.

[0021] L 2 Examples of the structural unit (III) which is an alicyclic hydrocarbon group or a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are combined include the following structural units. TIFF2025086349000013.tif4895 [In the formula (III-A) and (III-B), R 4 , X 3 and mk have the same meaning as in formula (III). L 24 is -O- or *-O-(CH 2 ) k2 -CO-O-. k2 represents an integer of 1 to 7, and * represents a bonding site with —CO—. R 24represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. ml represents an integer of 0 to 4. When ml is 2 or more, multiple R 24 may be the same or different. R 25 and R 26 each independently represents a hydrogen atom, a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. R 27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. mn represents an integer of 0 to 6. When mn is 2 or more, a plurality of R 27 may be the same or different.

[0022] In formula (III-A) and formula (III-B), R 24 , R 25 , R 26 and R 27As long as the upper limit of the number of carbon atoms allows, the halogen atom, the alkyl group having 1 to 6 carbon atoms which may have a halogen atom, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, the alkylcarbonyloxy group having 2 to 4 carbon atoms, the acryloyloxy group or the methacryloyloxy group may be selected from L. 2 Examples of the groups include those exemplified in the following: R 24 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. R 25 is preferably a hydrogen atom, a hydroxy group or a carboxy group. R 26 is preferably a hydrogen atom, a hydroxy group or a carboxy group, and is preferably a hydrogen atom. R 27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. ml is preferably an integer of any one of 0 to 3, more preferably 0, 1 or 2, even more preferably 0 or 1, and even more preferably 0. mn is preferably an integer of 0 to 4, more preferably an integer of 0 to 3, even more preferably 0 or 1, and even more preferably 0. L24 is -O- or k2 is 1 to 4 *-O-(CH 2 ) k2 It is preferably -CO-O-, and more preferably -O-. mk is preferably an integer of 1 to 3, and more preferably 1 or 2.

[0023] Examples of the structural unit (III-A) and the structural unit (III-B) include structural units derived from monomers described in JP-A-2010-204646 and the following structural units. 4 and the like, in which the methyl group corresponding to the following formula (I) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025086349000014.tif138157

[0024] L 2 Examples of the structural unit (III) which is an aromatic hydrocarbon group or a group in which a chain hydrocarbon group and an aromatic hydrocarbon group are combined include the following structural units. TIFF2025086349000015.tif43101 [In formula (III-C), R 4 , X 2 , X 3 and mk have the same meaning as in formula (III). R 24 and ml have the same meaning as in formula (III-A). L 25 is a single bond or *-L 26 -X 4 - stands for "-" and * stands for "X". 2 It represents the binding site with L 26 represents an alkanediyl group having 1 to 8 carbon atoms. X 4 represents -O-, -CO-O- or -O-CO-. mc represents an integer from 0 to 2.

[0025] In formula (III-C), R 24 The group includes the same groups as those exemplified in formula (III-A). In formula (III-C), R 24 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0026] mk is preferably 1, 2 or 3, and more preferably 1 or 2. ml is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. In formula (III-C), -X 3 -OH, when mc is 0 (benzene ring), L 25 In particular, at least one of them is preferably bonded to the meta or para position, and more preferably bonded to the meta position. 3 When -OH is bonded, each hydroxy group is preferably bonded at the meta and para positions. When mc is 1 (naphthalene ring), L 25 When the bonding position of is the 1st position, it may be bonded to any of the 2nd to 8th positions. 25 When the bonding position of L is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. 25 When the bonding position of L is position 1, at least one of them is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. 25 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position. In formula (III-C), when mc is 0, the following structural units are exemplified. TIFF2025086349000016.tif3173 [In formula (III-C1), all symbols have the same meaning as in formula (III-C)]

[0027] Examples of the structural unit (III-C) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577, and structural units listed below. In the structural unit represented below, R in the structural unit (III-C) 4 and the like, in which the methyl group corresponding to the following formula (I) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025086349000017.tif111168

[0028] TIFF2025086349000018.tif83166 In the resin containing the structural unit (III), the structural unit (III) may contain one or more kinds. The content of the structural unit (III) relative to the total structural units in the resin containing the structural unit (III) is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more. In addition, 100 mol% or less is mentioned, and when other structural units are contained, it is preferably 90 mol% or less, more preferably 80 mol% or less, even more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 50 mol% or less. Specifically, it is 1 to 100 mol%, preferably 5 to 90 mol%, more preferably 10 to 70 mol%, and even more preferably 15 to 50 mol%.

[0029] <Structural unit (I2)> The structural unit (I2) is a structural unit represented by the following formula (I2), and is derived from, for example, a compound represented by the following formula (I2-s) (hereinafter, may be referred to as compound (I2-s)). 2 =CR 2The double bond is cleaved. TIFF2025086349000019.tif46133 [In formula (I2) and formula (I2-s), all symbols have the same meanings as defined above.]

[0030] In formula (I2), R 2 is R 4 The same can be mentioned. R 2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups, and monocyclic or polycyclic alicyclic hydrocarbon groups), and aromatic hydrocarbon groups, and may be a hydrocarbon group formed by combining two or more of these groups. 12 -CH contained in the hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Examples include: Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 24, more preferably 1 to 18, even more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0031] The alkanediyl group contains -CH 2 - is -O-, -S-, -CO- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH 2 - is replaced by -O-CO-), thiol group (-CH 2 - is replaced by -S-), alkoxy group (-CH 2 - is replaced by -O-), alkylthio group (-CH 2 - is replaced by -S-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylsulfonyl group (-CH at any position in the alkyl group) 2 -But-SO 2-substituted), alkylcarbonyloxy group (a group in which -CH 2 -CH 2 - is replaced by -CO-O-), alkoxycarbonyloxy group (-CH 2 -CH 2 -CH 2 - is replaced by -O-CO-O-), oxy group (-CH 2 - is replaced by -O-), carbonyl group (-CH 2 - is replaced by -CO-), thio group (-CH 2 - is replaced by -S-), sulfonyl group (-CH 2 -But-SO 2 -), alkanediyloxy group (groups in which -CH at any position in the alkanediyl group is replaced with -CH 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH at any position contained in the alkanediyl group) 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 - is replaced by -CO-O-), alkanediylthio group (-CH at any position in the alkanediyl group) 2 - is replaced by -S-), alkanediylsulfonyl group (-CH at any position contained in the alkanediyl group) 2 -But-SO 2 - substituted groups). Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylthio group includes an alkylthio group having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, a hexanediyloxy group, an octanediyloxy group, a 2-ethylhexanediyloxy group, a nonanediyloxy group, a decanediyloxy group, an undecanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, pentanediyloxycarbonyl group, hexanediyloxycarbonyl group, octanediyloxycarbonyl group, 2-ethylhexanediyloxycarbonyl group, nonanediyloxycarbonyl group, decanediyloxycarbonyl group, undecanediyloxycarbonyl group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, a pentanediylcarbonyl group, a hexanediylcarbonyl group, an octanediylcarbonyl group, a 2-ethylhexanediylcarbonyl group, a nonanediylcarbonyl group, a decanediylcarbonyl group, an undecanediylcarbonyl group, etc. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, a butanediylcarbonyloxy group, a pentanediylcarbonyloxy group, a hexanediylcarbonyloxy group, an octanediylcarbonyloxy group, a 2-ethylhexanediylcarbonyloxy group, a nonanediylcarbonyloxy group, a decanediylcarbonyloxy group, an undecanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, a pentanediylthio group, a hexanediylthio group, a heptanediylthio group, an octanediylthio group, a nonanediylthio group, a decanediylthio group, an undecanediylthio group, a dodecanediylthio group, a 2-methylpropanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. In addition, the substitutions in the alkenediyl group and alkynediyl group may include a carbon-carbon double bond or a carbon-carbon triple bond at any position in the above-mentioned examples of substitutions in the alkanediyl group.

[0032] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below. The bonding site may be any position. TIFF2025086349000020.tif46168Specifically, examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, and cyclooctane-1,5-diyl group, and examples of polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. In addition, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group replaced with - include the groups shown below. In addition, among the groups shown below, -O- is -S-, -CO- is -SO 2 Also included are groups each replaced with -. The binding site may be at any position. TIFF2025086349000021.tif47169-CH contained in a group that combines an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, further preferably 6 to 14, and further more preferably 6 to 10. -CH contained in the hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 When the carbon atom is replaced by -, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the hydrocarbon group. In addition, the number may be 1 or 2 or more.

[0033] Examples of the hydrocarbon group having two or more groups combined include a group having a chain hydrocarbon group such as an alkanediyl group combined with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, and the combination may include two or more of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group. For example, -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc. Any of the groups may be bonded to an oxygen atom.

[0034] L 12 The substituents on the hydrocarbon group include halogen atoms and cyano groups. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 12 -CH contained in the hydrocarbon group 2 - is replaced by -O- or -CO-, 12can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, or an alkylcarbonyloxy group. L 12 The hydrocarbon group in may have one or more substituents.

[0035] L 12 is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (-CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted.) or a group consisting of a combination of a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO-) is preferably an alkanediyl group having 1 to 6 carbon atoms or a group in which an alkanediyl group having 1 to 6 carbon atoms is combined with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO-) is more preferred, and a group combining an alkanediyl group having 1 to 3 carbon atoms or an alkanediyl group having 1 to 5 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH contained in the alkanediyl group and the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.) is more preferred, and a methylene group, an adamantanediyl group -O-CO-O-CH 2 -,-Norbornane lactone diyl group -CO-O-CH 2 - or -Cyclohexanediyl group -O-CO-O-CH 2 It is even more preferred that

[0036] R A Examples of the saturated hydrocarbon group include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups in which two or more of these groups are combined. R A Examples of the alkyl group include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, nonyl, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic saturated hydrocarbon group may be any of monocyclic, polycyclic and spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. The combined group may be a group in which one each of the above-mentioned alkyl groups and alicyclic saturated hydrocarbon groups is combined, or a group in which two or more of either one or two or more of both are combined. It is preferred that u1 is 0 or 1.

[0037] Examples of the structural unit (I2) include the following structural units. TIFF2025086349000022.tif73160

[0038] In the structural units represented by formulae (I2-1) to (I2-9), R 2 Specific examples of the structural unit (I2) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom. Among these, structural units represented by formula (I2-1), formula (I2-4), and formula (I2-5) are preferred, and the structural unit represented by formula (I2-1) is more preferred. In the resin containing the structural unit (I2), the structural unit (I2) may contain one or more kinds. The content of the structural unit (I2) with respect to all structural units in the resin containing the structural unit (I2) is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, still more preferably 20 mol% or more, and even more preferably 30 mol% or more. In addition, it may be 100 mol% or less, and in the case where other structural units are contained, it is preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, and even more preferably 75 mol% or less. Specifically, it may be 1 to 100 mol%, preferably 5 to 90 mol%, more preferably 10 to 85 mol%, and even more preferably 15 to 80 mol%.

[0039] <Structural unit (I3)> The structural unit (I3) is a structural unit represented by the following formula (I3), and is derived from, for example, a compound represented by the following formula (I3-s) (hereinafter, may be referred to as compound (I3-s)). 2 =CR 3 The double bond is cleaved. TIFF2025086349000023.tif47131 [In formula (I3) and formula (I3-s), all symbols have the same meanings as defined above.]

[0040] In formula (I3), R 3 is R 4 The same can be mentioned. R 3 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L 13 Hydrocarbon groups (containing -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be substituted.) is L12 Hydrocarbon groups (containing -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be substituted.) and the like. L 13 The substituents of the hydrocarbon group of L 12 The substituents are the same as those of the hydrocarbon group of the above. L 13 The hydrocarbon group in may have one or more substituents. L 13 is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (-CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO- may be substituted.) or a group consisting of a combination of a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO-) is preferably an alkanediyl group having 1 to 6 carbon atoms or a group in which an alkanediyl group having 1 to 6 carbon atoms is combined with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH 2 -, -O-, -S-, -SO 2 - or -CO-) is more preferred, and a group combining an alkanediyl group having 1 to 3 carbon atoms or an alkanediyl group having 1 to 5 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH contained in the alkanediyl group and the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.) is more preferred, and a methylene group, an adamantanediyl group -O-CO-O-CH 2 -,-Norbornane lactone diyl group -CO-O-CH 2- or -Cyclohexanediyl group -O-CO-O-CH 2 It is even more preferred that

[0041] When the group represented by the following formula is a group represented by formula (IC), TIFF2025086349000024.tif2981The group represented by formula (IC) is preferably a group represented by the following formula: TIFF2025086349000025.tif2664

[0042] In the group represented by formula (IC), u2 is 1 and R B L 13 and a group represented by the following formula (IC-1) bonded to the carbon atom adjacent to TIFF2025086349000026.tif3174s1 is preferably 1 and t1 is preferably 1.

[0043] R B Examples of the saturated hydrocarbon group include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups in which two or more of these groups are combined. R B Examples of the alkyl group include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, nonyl, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic saturated hydrocarbon group may be any of monocyclic, polycyclic and spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. The combined group may be a group in which one each of the above-mentioned alkyl groups and alicyclic saturated hydrocarbon groups is combined, or a group in which two or more of either one or two or more of both are combined.

[0044] Examples of the structural unit (I3) include the following structural units. TIFF2025086349000027.tif114166

[0045] In the structural units represented by formulae (I3-1) to (I3-12), R 3 Specific examples of the structural unit (I3) include structural units in which a methyl group corresponding to the following formula is replaced with a hydrogen atom. Among these, the structural units represented by formulae (I3-1) to (I3-3), (I3-7), (I3-8) and (I3-9) are preferred, the structural units represented by formulae (I3-1) to (I3-3) are more preferred, and the structural unit represented by formula (I3-1) is even more preferred. In the resin containing the structural unit (I3), the structural unit (I3) may contain one or more kinds. The content of the structural unit (I3) relative to all structural units in the resin containing the structural unit (I3) is 1 mol% or more, preferably 10 mol% or more, more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. In addition, it may be 100 mol% or less, and when other structural units are contained, it is preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, and even more preferably 75 mol% or less. Specifically, it may be 1 to 100 mol%, preferably 10 to 90 mol%, more preferably 20 to 85 mol%, and even more preferably 30 to 80 mol%.

[0046] <Other structural units> One or more resins contained in the resist composition of the present invention may contain structural units other than the structural units (III), (I2) and (I3). Examples of structural units other than the structural unit (III), the structural unit (I2), and the structural unit (I3) include structural units that do not have an acid labile group (hereinafter sometimes referred to as "structural unit (s)") and structural units derived from other monomers known in the art. The term "acid labile group" refers to a group that has a leaving group and that is eliminated by contact with an acid to form a hydrophilic group (e.g., a hydroxyl group or a carboxyl group). It is preferable that one or more resins contained in the resist composition of the present invention are substantially free of structural units having an acid labile group (hereinafter, may be referred to as "structural unit (a1)"). Here, "substantially free of structural units having an acid labile group" refers to synthesis without actively adding monomers having an acid labile group during synthesis of the resin, and the content of structural units having an acid labile group relative to all structural units is 5 mol% or less, preferably 2 mol% or less, more preferably 1 mol% or less, and even more preferably 0.1 mol% or less.

[0047] Structural unit(s) The structural unit (s) is derived from a monomer having no acid labile group (hereinafter, may be referred to as "monomer (s)"). As the monomer from which the structural unit (s) is derived, a monomer having no acid labile group known in the resist field can be used. The structural unit (s) preferably has a fluorinated alkyl alcohol hydroxy group, a carboxy group, or a lactone ring. If a resin containing a structural unit having a hydroxy group and no acid labile group (hereinafter sometimes referred to as "structural unit (a2)", but not including structural unit (III)) and / or a structural unit having a lactone ring and no acid labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and adhesion to the substrate can be improved. In addition to the above-mentioned structural units, the structural unit (s) may also include a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)", except for the structural unit represented by formula (I1)), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)").

[0048] (Structural unit (a2-B)) An example of a structural unit having a fluorinated alkyl alcoholic hydroxy group is a structural unit represented by formula (a2-B) (hereinafter, may be referred to as "structural unit (a2-B)"). TIFF2025086349000028.tif51105[In formula (a2-B), R a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a50 is a single bond or *-X a51 -(A a52 -X a52 ) nb - stands for -R. a50 represents the bonding site with the carbon atom to which it is bonded. A a52 represents an alkanediyl group having 1 to 8 carbon atoms. X a51 and X a52 each independently represents -O-, -CO-O-, or -O-CO-. nb represents 0 or 1. R a54 and R a55 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a51 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. R a56 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. mb4 represents an integer of 1 to 3, and when mb4 is 2 or greater, the groups in the multiple parentheses may be the same or different. mb5 represents an integer from 0 to 4. When mb5 is 2 or more, multiple R a56 may be the same or different, provided that 1≦mb4+mb5≦5.

[0049] R a54 and R a55 Examples of the fluorinated alkyl group having 1 to 4 carbon atoms include a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, and a 4,4,4-trifluorobutyl group. a54 and R a55 As the alkyl group, a trifluoromethyl group is preferable. L a51 Examples of the alkanediyl group having 1 to 3 carbon atoms include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. a51 is preferably a single bond or a methylene group. R a56As the alkyl group having 1 to 6 carbon atoms, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, and the alkylcarbonyloxy group having 2 to 4 carbon atoms, which may have a halogen atom, as long as the upper limit of the number of carbon atoms allows, L 2 The same groups as those exemplified above are included. R a56 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. mb4 is preferably 1 or 2, and more preferably 1. Even more preferably, mb4 is 1 and the group in parentheses is bonded to the para position. mb5 is preferably an integer of 0 to 2, more preferably 0 or 1, and even more preferably 0. The structural unit (a2-B) is more preferably a structural unit represented by the following formula (a2-B1) (hereinafter, sometimes referred to as "structural unit (a2-B1)"). TIFF2025086349000029.tif4687[In formula (a2-B1), R a57 represents a hydrogen atom or a methyl group. A a53 represents a single bond or *-CO-O-, and * represents -R a57 represents the bonding site with the carbon atom to which it is bonded. R a56 , mb4 and mb5 have the same meanings as in formula (a2-B). In formula (a2-B1), R a57 is preferably a hydrogen atom. A a53 is preferably a single bond.

[0050] Examples of the structural unit (a2-B) include the structural units shown below. TIFF2025086349000030.tif62168In the structural units represented by formulas (a2-3-1) to (a2-3-8), R a50 In the structural units represented by formulas (a2-3-9) to (a2-3-16), the hydrogen atom corresponding to R is replaced with a methyl group. a50 Specific examples of the structural unit (a2-B) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom. Among these, the structural units represented by the formulae (a2-3-1) to (a2-3-8) are preferred, the structural units represented by the formulae (a2-3-1) to (a2-3-4) are more preferred, and the structural unit represented by the formula (a2-3-1) is even more preferred.

[0051] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0052] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), (a3-2), (a3-3) or (a3-4). One of these may be contained alone, or two or more of them may be contained. TIFF2025086349000031.tif51164 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or *-O-(CH 2 ) k3 It represents a group represented by -CO-O- (k3 represents an integer of any of 1 to 7). L a7 , -O-, *-OL a8-O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 -CH 2 - or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same or different.]

[0053] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. Ra18 , R a19 , R a20 and R a24 As the halogen atom and the alkyl group which may have a halogen atom in the formula (III), R 4 The same examples as those exemplified above are included. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. L a4 ~L a6 are each independently preferably -O- or *-O-(CH 2 ) k3 In the -CO-O- group, k3 is an integer of 1 to 4, and more preferably -O- and *-O-CH 2 It is preferably an oxygen atom. L a7 is preferably -O- or *-OL a8 -CO-O-, more preferably -O-, -O-CH 2 -CO-O- or -OC 2 H 4 -CO-O-. R a18 , R a19 , R a20 and R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025086349000032.tif4051(in the formula, R a24 , L a7 has the same meaning as above.)

[0054] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any one of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural unit, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom is preferred. TIFF2025086349000033.tif108164

[0055] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2025086349000034.tif3355[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and -CH 2 - may be replaced by -O- or -CO-.

[0056] R 42Examples of the saturated hydrocarbon group represented by the formula (I) include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group, and branched alkyl groups such as an isopropyl group and an isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups, such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups, such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site): TIFF2025086349000035.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl groups, and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 -CH of saturated hydrocarbon groups contained in 2Examples of the group in which - is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group in which two or more of these groups are combined, etc. Examples of these replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0057] The structural unit (a4) is R 42 is preferably a saturated hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter may be referred to as "structural unit (a4-1)"), a structural unit represented by formula (a4-2) (hereinafter may be referred to as "structural unit (a4-2)"), a structural unit represented by formula (a4-3) (hereinafter may be referred to as "structural unit (a4-3)"), and a structural unit represented by formula (a4-A) (hereinafter may be referred to as "structural unit (a4-A)"). The structural unit represented by formula (a4-1) is a structural unit shown below. TIFF2025086349000036.tif4864[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom.

[0058] L 41Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include linear alkanediyl groups having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups having a fluorine atom, such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0059] L 42f Examples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42fExamples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0060] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0061] The structural unit (a4-1) may be any of the structural units shown below and R in the structural unit (a4-1) in the structural unit shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025086349000037.tif98158The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025086349000038.tif5574[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom. 43f and R43f The total number of carbon atoms in the molecule is limited to 21.

[0062] L 43f and R 43f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of saturated hydrocarbon groups in the formula are L 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the saturated hydrocarbon groups exemplified above.

[0063] L 43f The saturated hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1). TIFF2025086349000039.tif13120[In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, ** is -O-CO-R 43f This is the binding site for

[0064] L in the group represented by formula (L43f-1) 45f , L46f and L 47f Examples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group, etc. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, etc. It is preferred that s is 0.

[0065] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for TIFF2025086349000040.tif47140

[0066] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B). TIFF2025086349000041.tif69102 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f It represents the binding site with R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The saturated hydrocarbon group of R is as long as the upper limit of the carbon number permits. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, and *-(CF 2 ) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB The saturated hydrocarbon group represented by R in formula (a4) is as large as possible within the upper limit of the number of carbon atoms. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a combination thereof, more preferably a divalent chain saturated hydrocarbon group which has a fluorine atom, and further preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group which may have a fluorine atom, an alicyclic saturated hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4- More preferred are fluorinated alkyl groups such as an octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, and a perfluorooctyl group; a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, and a perfluoroadamantylmethyl group.

[0067] In formula (a4-2B), *-A 43f -X 43 -R 43fB An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group). TIFF2025086349000042.tif15169

[0068] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025086349000043.tif99167

[0069] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025086349000044.tif111163

[0070] The structural unit (a4) also includes a structural unit represented by formula (a4-3). TIFF2025086349000045.tif5576[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. R 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH 2 - may be replaced by -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom. 44f and R 44f The maximum total carbon number is 21.

[0071] L 44f and R 44f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of saturated hydrocarbon groups in the formula are L 44f and R 44f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups. L 44fis an alkanediyl group having 1 to 14 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-.) is preferred, and -(CH 2 ) j1 -, -(CH 2 ) j2 -O-(CH 2 ) j3 -or-(CH 2 ) j4 -CO-O-(CH 2 ) j5 - (j1 to j5 each independently represent an integer of 1 to 6). Also, an alkanediyl group having 1 to 4 carbon atoms (one of -CH 2 - may be replaced by -O-, and one -CH 2 -CH 2 It is further preferred that - may be replaced by -CO-O- or -O-CO-. R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms and having a fluorine atom, or a group combining these, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0072] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025086349000046.tif86165

[0073] TIFF2025086349000047.tif3686[In formula (a4-A), R 1represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH 2 - may be replaced by -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the multiple parentheses may be the same or different.]

[0074] R 1 As the halogen atom and the alkyl group which may have a halogen atom in the formula (III), R 4 The same examples as those exemplified above are included. R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0075] L 1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may be groups combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0076] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site may be any position. TIFF2025086349000048.tif46164 For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. Examples of such groups include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group bonded to a norbornanediyl group or an adamantanediyl group via a spiro bond. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms.

[0077] Examples of groups that combine two or more types include a group that combines an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any group is X 11 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such an alkyl group include a group in which a hydroxyl group is bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), and a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group- etc.). * is X 11 It represents the binding site with Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites.

[0078] L 1 -CH contained in an aliphatic hydrocarbon group having 1 to 28 carbon atoms 2 -, -O-, -S-, -SO 2 It may be replaced by - or -CO-. L 1 -CH contained in an aliphatic hydrocarbon group having 1 to 28 carbon atoms 2 - is -O-, -S-, -SO 2 When it is replaced by - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group. -CH contained in aliphatic hydrocarbon groups 2 -, -O-, -S-, -SO 2Examples of the group substituted with - or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group obtained by combining two or more of these groups, etc. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. -CH contained in alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted.

[0079] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the —CH contained in the alkyl group or the alicyclic hydrocarbon group). 2 - may be replaced by -O- or -CO-.) Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the haloalkyl group having 1 to 4 carbon atoms include a fluorinated alkyl group having 1 to 4 carbon atoms, a chlorinated alkyl group having 1 to 4 carbon atoms, a brominated alkyl group having 1 to 4 carbon atoms, and an iodinated alkyl group having 1 to 4 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and a cyclodecyl group, and polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and further preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and further preferably 6 to 10. -CH in the alkyl group 2When - is replaced by -O- or -CO-, the number of carbon atoms before the replacement is the total number of carbon atoms in the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, and an alkoxycarbonyloxy group. These replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The alkoxy group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, further preferably 1 to 4 carbon atoms, and further preferably 1 to 3 carbon atoms. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 8, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. In addition, -CH contained in alicyclic hydrocarbon groups 2 Examples of the group in which - is replaced by -O- or -CO- include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted. L 1 Examples of the substituent that the aliphatic hydrocarbon group in the formula (I) may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-), and a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the -CH 2- may be replaced by -O- or -CO-.) is more preferred, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group or a methoxy group is even more preferred. L 1 is R 3 When the fluorinated alkyl group does not form an alicyclic hydrocarbon group, the chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (the —CH 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-.) is preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -CO-), a group formed by combining an optionally substituted alicyclic hydrocarbon group having 3 to 12 carbon atoms or an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-.) is more preferred, and a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group is more preferred). 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group 2- may be replaced by -O- or -CO-) or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-.

[0080] R 2 Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, Examples of the fluorinated alkyl group include -2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. The number of carbon atoms of the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3. R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as long as the upper limit of the carbon number allows. 2The same examples of the fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups above are also included. R 2 is R 3 When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R 2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms. R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 3 L 1 Examples of the group formed by bonding with include groups represented by the following formulas: In the following formulas, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A , L 1 R is a part of a hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. 3 L 1 The alicyclic hydrocarbon group formed by bonding with the above preferably has 3 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and further preferably 3 to 6 carbon atoms. TIFF2025086349000049.tif25130R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0081] Examples of the structural unit (a4-A) include the following structural units. TIFF2025086349000050.tif120166

[0082] TIFF2025086349000051.tif74169

[0083] In the above structural unit, R 1 A structural unit in which the methyl group corresponding to R is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or an alkyl group other than a methyl group, and R 1 Specific examples of the structural unit (a4-A) include structural units in which a hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group or an alkyl group.

[0084] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) may be a group containing a linear, branched or cyclic hydrocarbon group. Among these, the structural unit (a5) is preferably a group containing an alicyclic hydrocarbon group. An example of the structural unit (a5) is a structural unit represented by formula (a5-1). TIFF2025086349000052.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH 2 - may be replaced by -O- or -CO-.

[0085] R 52The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group, a norbornyl group, and the like. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group. An example of the alicyclic hydrocarbon group having a substituent is a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55 Examples of the divalent saturated hydrocarbon group in include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and a divalent chain saturated hydrocarbon group is preferred. Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as a methylene group, an ethylene group, a propanediyl group, a butanediyl group, and a pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl and norbornanediyl.

[0086] L 55 -CH contained in the divalent saturated hydrocarbon group represented by 2 Examples of the group in which - is replaced by -O- or -CO- include groups represented by formulae (L1-1) to (L1-4). In the following formulae, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025086349000053.tif18165[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 ) which represents the binding site with L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, and more preferably a cyclohexanediyl group or an adamantanediyl group.

[0087] Examples of the group represented by formula (L1-1) include the divalent groups shown below. TIFF2025086349000054.tif36147 Examples of the group represented by formula (L1-2) include the divalent groups shown below. TIFF2025086349000055.tif23130 Examples of the group represented by formula (L1-3) include the divalent groups shown below. TIFF2025086349000056.tif16147 Examples of the group represented by formula (L1-4) include the divalent groups shown below. TIFF2025086349000057.tif13168L 55 is preferably a single bond or a group represented by formula (L1-1).

[0088] The structural unit (a5-1) may be any of the structural units shown below and R in the structural unit (a5-1) in the structural unit shown below. 51 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025086349000058.tif111150

[0089] <Structural unit (a6)> The structural unit (a6) is -SO 2 - group, -SO 2 It is preferred that the compound has a - group on the side chain. -SO 2 The structural unit having a - group is -SO 2 - groups, or may have a linear structure having -SO 2 - groups, or may have a branched structure having -SO 2 It may have a cyclic structure (monocyclic or polycyclic structure) having a - group. 2 A structural unit having a cyclic structure having a - group, more preferably, -SO 2 It is a structural unit having a ring structure (sultone ring) containing -O-. The sultone ring may be represented by the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and the formula (T 1 The binding site can be any position. The sultone ring may be monocyclic, but is preferably polycyclic. A polycyclic sultone ring is one in which the atomic group constituting the ring is -SO 2 It means a bridged ring containing -O-, and has the formula (T 1 -1) and the formula (T 1 The sultone ring is represented by the formula (T 1 -2) The ring is made up of -SO 2In addition to -O-, the ring may further contain a heteroatom, such as an oxygen atom, a sulfur atom, or a nitrogen atom, and preferably an oxygen atom. TIFF2025086349000059.tif2977 The sultone ring may have a substituent. Examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms. Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, and preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl and naphthylethyl groups. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferably, an alkoxycarbonyl group having 6 or less carbon atoms is used, and more preferably, a methoxycarbonyl group is used. Alkylcarbonyl groups include acetyl, propionyl and butyryl groups. From the viewpoint of ease of production of the monomer from which the structural unit (a6) is derived, a sultone ring having no substituent is preferred.

[0090] The sultone ring is preferably a ring represented by the following formula (T1'). TIFF2025086349000060.tif2666[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. The binding site is at any position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 Examples of the substituent include the same ones as the substituents on the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxyl group is preferred. ma is preferably 0 or 1, and more preferably 0.

[0091] Examples of the ring represented by formula (T1') include the following rings. The binding site may be any position. Among them, the binding site is preferably the 1st or 3rd position. TIFF2025086349000061.tif44148-SO 2 The structural unit having a - group preferably further has a group derived from a polymerizable group, such as a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, or a methacryloylthio group. Among these, the monomer from which the structural unit (a6) is derived is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0092] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025086349000062.tif4177[In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. A xx is an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH 2 - is -O-, -CO- or -N(R d )- may also be replaced. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents the same group as above. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. R c and R d each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

[0093] R x Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. R x Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group. An alkyl group having 1 to 4 carbon atoms is preferred, and a methyl group or an ethyl group is more preferred. R x Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and may be a combination of two or more of these groups. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, linear alkanediyl groups such as a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic divalent alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples of the polycyclic divalent alicyclic saturated hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. A x The bonding position of to the sultone ring may be any position, but is preferably the 1-position.

[0094] Examples of the structural unit (a6-0) include the following structural units. TIFF2025086349000063.tif93150Of these, structural units represented by formulae (a6-1), (a6-2), (a6-6), (a6-7), (a6-8) and (a6-12) are preferred, and structural units represented by formulae (a6-1), (a6-2), (a6-7) and (a6-8) are more preferred.

[0095] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit (hereinafter, sometimes referred to as "structural unit (a7)") that decomposes upon exposure to generate an acid other than the structural unit (I). Specific examples of the structural unit (a7) include structural units described in JP 2016-79235 A, and it is preferable that the structural unit (a7) is a structural unit having a sulfonate group or a carboxylate group and an organic cation in a side chain, or a structural unit having a sulfonio group and an organic anion in a side chain.

[0096] The structural unit having a sulfonate group or carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A). TIFF2025086349000064.tif26123[In formula (a7-A), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 is a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R a7 represents the bonding site with the carbon atom to which it is bonded. L a71 and L a72 each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents L a71 It represents the binding site with na7 represents an integer of 0 to 2. When na7 is 2, the groups in the parentheses may be the same or different. RA - represents a sulfonate anion or a carboxyl anion. Z.A. + represents an organic cation.

[0097] R a7 The halogen atom and the alkyl group which may have a halogen atom in the formula (III) are 4 The same examples as those given above are included. a71 The alkyl group in the formula (III) is R 4 The same examples as those exemplified above are included. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0098] X a71 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025086349000065.tif3251[In formula (X10), Ax is R a7 represents a bond type bonding to the carbon atom to which is bonded, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Ay is L a71 and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or more, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, -CO-NR a71 A bond represented by - is preferred. The bonding position of Ay in the phenylene group is preferably the m-position or p-position relative to the bonding position of Ax, and more preferably the p-position. Among these, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. X a71 Examples of the substituent include a single bond and a substituent represented by the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by * -R a7 represents the bonding site with the carbon atom to which L is bonded. a71 It represents the binding site with X 20 is -O- or -NR a71 - represents. TIFF2025086349000066.tif43161 formula (X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups. TIFF2025086349000067.tif87162 Among them, X a71 is a single bond and the formula (X 10 -1'), expression (X 10 -3')~expression(X 10 -9'), which is preferably a single bond or a group represented by the formula (X 10 -1'), expression (X 10 -4'), expression (X10 -5'), expression (X 10 -6') and formula (X 10 -9'), a single bond, a group represented by the formula (X 10 -1'), a group represented by the formula (X 10 -5'), a group represented by the formula (X 10 -6') or formula (X 10 -9') is more preferable.

[0099] L a71 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a71 and X a72 Also, L a72 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a72 and R.A. - Examples of such groups include groups that bond to the L a71 and L a72 Examples of the chain hydrocarbon group include a group in which one hydrogen atom has been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The chain hydrocarbon group preferably has 1 to 20 carbon atoms, more preferably 1 to 18 carbon atoms, and even more preferably 1 to 10 carbon atoms. L a71 and La72 Examples of the alicyclic hydrocarbon group include a group in which one hydrogen atom has been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cycloheptyl group, a cyclohexyl group, a cyclopentyl group, and a cyclooctyl group. L a71 and L a72 Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a bridged structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are bonded by a spiro bond. Examples of the cycloalkyl group having a bridged structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are bonded by a spiro bond include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group are bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include the following formula: TIFF2025086349000068.tif28158When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 6 to 18 carbon atoms, and more preferably 7 to 12. L a71 and L a72 The aromatic hydrocarbon group may be a group in which one hydrogen atom has been removed from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and further preferably 6 to 10. La71 and L a72 -CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. L a71 and L a72 Among the hydrocarbon groups, -CH 2 - is -O-, -CO-, -S- or -SO 2 Examples of the group substituted for - include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, and an alkanediylcarbonyloxy group. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L a71 and L a72 Among the hydrocarbon groups, -CH contained in an alicyclic hydrocarbon group or a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 Examples of the group substituted with - include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted. L a71 and L a72 Among the hydrocarbon groups, -CH contained in aromatic hydrocarbon groups 2 - may be replaced by -O- or -S-, -CH 2 Examples of the group in which - is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. L a71 and L a72Examples of the group in which two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group are combined include a group in which the chain hydrocarbon group and the alicyclic hydrocarbon group are combined, a group in which the chain hydrocarbon group and the aromatic hydrocarbon group are combined, a group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined, and a group in which the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined. The group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined may be a condensed ring. L a71 and L a72 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a71 and L a72 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. a71 and L a72 The -CH chain hydrocarbon group contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 - is replaced by L a71 and L a72 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. na7 is preferably 0 or 1. ZA in formula (a7-A) + Examples of the cation include the same as the cation in the salt represented by formula (B1) etc.

[0100] In formula (a7-A), L a71 and L a72 When the hydrocarbon group is a saturated hydrocarbon group, in the formula (a7-B) described later, b7 The divalent linking group may include the same groups as those exemplified above. Examples of the structural unit represented by formula (a7-A) include a structural unit represented by formula (a7-A1). TIFF2025086349000069.tif30138[In formula (a7-A1), R a7 , X a71 , L a71 , X a72 , na7, R.A. - and Z.A. + has the same meaning as above. z7 represents an integer of 0 to 6. Q a7 , Q b7 , R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms; when z7 is 2 or more, z71 and R z72 may be the same or different.] Q a7 , Q b7 , R z71 and R z72 As the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in R a7 Examples of the groups include the same groups as those exemplified in the above.

[0101] Examples of the structural unit represented by formula (a7-A) include the following structural units, R a7 Examples of the structural units include those in which the group corresponding to the methyl group in the above formula (I) is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom) or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.), and the structural units described in WO 2012 / 050015. + represents an organic cation. TIFF2025086349000070.tif244163

[0102] TIFF2025086349000071.tif130158

[0103] The structural unit having a sulfonio group and an organic anion on the side chain is preferably a structural unit represented by formula (a7-B). TIFF2025086349000072.tif28104[In formula (a7-B), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent; R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are attached. A - represents an organic anion. R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a7-A) include the same halogen atom and the alkyl group which may have a halogen atom as in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by the formula (I) include a phenylene group and a naphthylene group. R b72 and R b73 Examples of the hydrocarbon group represented by the formula (I) include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups formed by combining these groups include those similar to those described above. A b7 Examples of the divalent linking group represented by the formula (I) include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. 2 - may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include divalent chain saturated hydrocarbon groups such as linear or branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations of these are also possible. Specifically, straight-chain alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, and dodecane-1,12-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; and divalent polycyclic alicyclic saturated hydrocarbon groups, such as polycyclic cycloalkanediyl groups, such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. -CH contained in saturated hydrocarbon groups 2 Examples of the divalent groups in which - is replaced by -O-, -S- or -CO- include the following divalent groups. However, -CH contained in a saturated hydrocarbon group is not included. 2 The number of carbon atoms before - is replaced by -O-, -S-, or -CO- is 17 or less. In the following formula, * and ** represent binding sites, * represents R b71 It represents the binding site with TIFF2025086349000073.tif123161[where, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0104] The structural unit containing a cation in formula (a7-B) includes the structural units represented by the following formula: a7 Examples of such structural units include those in which a group corresponding to the methyl group in the above formula (I) is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.). JPEG2025086349000074.jpg72164

[0105] A - Examples of the organic anion represented by the formula (I) include a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion, and a carboxylate anion. - The organic anion represented by the formula (I) is preferably a sulfonate anion, and the sulfonate anion is more preferably the same as the anion exemplified for the acid generator (B). Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylate anion include the same anions exemplified for the acid generator (B).

[0106] Examples of the structural unit represented by formula (a7-B) include structural units represented below. TIFF2025086349000075.tif95157

[0107] Examples of the structural unit (a1) that is substantially absent in the resin contained in the resist composition of the present invention include the following structural units. The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin (A) is preferably a group represented by formula (1) (hereinafter sometimes referred to as group (1)) and / or a group represented by formula (2) (hereinafter sometimes referred to as group (2)). TIFF2025086349000076.tif2298[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2025086349000077.tif2278[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and the —CH 2 - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na′ represents 0 or 1. * denotes a binding site.]

[0108] R a1 , R a2 and R a3Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 Examples of the alkenyl group in include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site). R a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms. TIFF2025086349000078.tif10159R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group in include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and an alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or a cycloalkylalkyl group such as a methylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025086349000079.tif27138

[0109] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a2’ and R a3’ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’)-XR a3’ Examples of the groups include the following: * represents a binding site. TIFF2025086349000080.tif19124R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0110] In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group; R a3 is an adamantyl group, ma=0, and na=1. Specific examples of the group (1) include the following groups: * represents a binding site. TIFF2025086349000081.tif149166

[0111] Specific examples of the group (2) include the following groups: * represents a bonding site. TIFF2025086349000082.tif55153

[0112] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. By using a resin (A) having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition, the resolution of the resist pattern can be improved.

[0113] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one or two structural units selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025086349000083.tif44141 [In the formula (a1-0), the formula (a1-1) and the formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or *-O-(CH 2 ) k1 represents --CO--O--, k1 represents an integer of 1 to 7, and * represents a bonding site with --CO--. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[0114] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5 Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , Ra4 and R a5 is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or -O-(CH 2 ) k01 It is -CO-O- (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , Ra04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group which may have a halogen atom. m1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0115] Examples of the structural unit (a1-0) include a structural unit represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01 and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group. Structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14) and (a1-0-19) to (a1-0-24) are preferred. TIFF2025086349000084.tif119159

[0116] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP 2010-204646 A. Among them, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are a4 In the above formula (a1-1-1), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-2), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-3), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-4), a structural unit is more preferred. TIFF2025086349000085.tif39169

[0117] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which a methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025086349000086.tif91163

[0118] An example of the structural unit (a1) having a group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)"). TIFF2025086349000087.tif31119[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH 2 - is -O-, -CO- or -NR a18 - may be replaced. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the hydrocarbon group and the -CH 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or greater, the groups in the multiple parentheses may be the same or different. na11 represents an integer of 0 to 4. When na11 is 2 or more, multiple R a17 may be the same or different from each other. mc represents an integer from 0 to 2.

[0119] R a1 and R a17 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, further preferably a methoxy group or an ethoxy group, and further more preferably a methoxy group. R a17 In the above, examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, further preferably a methoxymethyl group or an ethoxyethyl group, and further more preferably a methoxymethyl group. R a17 In the above, examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and further preferably a methoxyethoxy group or an ethoxyethoxy group. R a17Examples of the alkylcarbonyl group in include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and further preferably an acetyl group. R a17 In the above formula, examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and further preferably an acetyloxy group. R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0120] A a11Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl groups. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the alkanediyl group. A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 The groups substituted for - include hydroxyl, carboxyl, carbonyl, oxy, and amino groups (including -CH 2 -But -NR a18 -), alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylamino group (groups where -CH is replaced at any position in the alkyl group) 2 -But -NR a18 -substituted group), peptide group (-CH contained in ethylene group)2 -CH 2 -But-CO-NR a18 -), alkanediyloxy group, alkanediyloxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, alkanediylsulfonyl group, alkanediylthio group, alkanediylamino group (groups in which -CH at any position in the alkanediyl group is replaced with -), 2 -But -NR a18 These substituted groups include those exemplified in this specification, within the range permitted by the upper limit of the carbon number. The alkylamino group includes alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, and an octylamino group. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylamino group includes an alkanediylamino group having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. For example, A a11 -CH contained in the alkanediyl group 2 - is -O-, -CO- or -NR a18 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 Among them, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NRa18 - is preferred, where A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a1 A represents the bonding site with the carbon atom to which it is attached. a12 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a11 The same alkanediyl groups as those shown in the above are also included. A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, and a single bond, *-CO-O- or *-CO-O-CH 2 It is more preferably -CO-O-, and further preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1. mc is preferably 0 or 1.

[0121] R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination thereof. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025086349000088.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, and norbornylethyl group), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36 Examples of the alkyl group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that is formed by bonding together with the -CO- to which they are bonded include the following groups. * represents a bonding site, and one of the groups is R a34 This is the binding site for TIFF2025086349000089.tif15105

[0122] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36The alkyl group and the alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0123] -OC(R a34 )(R a35 )-OR a36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 It is preferable that at least one of them is bonded to the o-position or the m-position, and more preferable that it is bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a11 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a11 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0124] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP 2010-204646 A. Preferably, the structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4) are a1and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively. TIFF2025086349000090.tif228165

[0125] An example of a structural unit derived from a (meth)acrylic monomer having the group (2) is a structural unit represented by formula (a1-5) (hereinafter, may be referred to as "structural unit (a1-5)"). TIFF2025086349000091.tif4759[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 It represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3. R in formula (a1-5) a8 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Of these, it is preferred that one is -O- and the other is -S-. It is preferable that s1 is 1. s1' is preferably an integer of 0 to 2. Z a1 is a single bond or -CH 2 -CO-O- is preferred.

[0126] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP 2010-61117 A. Among them, the structural units represented by formulae (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred. TIFF2025086349000092.tif31130

[0127] An example of the structural unit (a1) having a group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)"). TIFF2025086349000093.tif3481[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, where * represents the bonding site with -Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OLa61 -or*-CO-OL a62 -, * represents the bonding site with -Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[0128] R in formula (a1-6) a61 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. R a61 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and further preferably a methyl group or an ethyl group. R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R a62 and R a63 Examples of the ring formed by bonding with each other include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 When they are bonded to each other to form a ring, -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2025086349000094.tif33110

[0129] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. L a61 and L a62 is preferably each independently a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, and more preferably a single bond. X a62 is preferably a single bond or *-OL a61 -, and more preferably a single bond.

[0130] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and further preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0131] Examples of the structural unit (a1-6) include structural units represented by formulae (a1-6-1) to (a1-6-44), preferably structural units represented by formulae (a1-6-1) to (a1-6-9), more preferably structural units represented by formulae (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and even more preferably structural units represented by formulae (a1-6-1) or (a1-6-2). a61The structural unit in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and the structural unit in which R a61 The structural unit (a1-6) also includes a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom or the like. TIFF2025086349000095.tif227165

[0132] Examples of the structural unit (a1) include the following structural units. TIFF2025086349000096.tif33167

[0133] Further, examples of the structural unit (a1) include the following structural units. TIFF2025086349000097.tif51120

[0134] In one embodiment of the resin component (A) contained in the resist composition of the present invention, among one or more resins, one resin is preferably a resin containing structural units (III) and (I2) (hereinafter, may be referred to as "resin (AI12)") and another resin is preferably a resin containing structural units (III) and (I3) (hereinafter, may be referred to as "resin (AI13)"). In another embodiment of the resin component (A), it is preferably a resin containing structural units (III), (I2) and (I3) (hereinafter, may be referred to as "resin (AI123)"). In resin (AI12), resin (AI13), and resin (AI123), the content of the structural unit (III) relative to all structural units is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more. Also, 90 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 50 mol% or less. Specifically, 1 to 90 mol% is mentioned, preferably 5 to 90 mol%, more preferably 5 to 70 mol%, even more preferably 10 to 70 mol%, even more preferably 10 to 50 mol%, even more preferably 15 to 50 mol%, even more preferably 15 to 40 mol%, and even more preferably 20 to 35 mol%. The content of the structural unit (I2) in the resin (AI12) and the resin (AI123) is, relative to the total structural units, 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. Also, it is preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, and even more preferably 75 mol% or less. Specifically, it is preferably 1 to 90 mol%, more preferably 5 to 90 mol%, even more preferably 10 to 85 mol%, even more preferably 10 to 80 mol%, and even more preferably 15 to 80 mol%. The content of the structural unit (I3) in the resin (AI13) and the resin (AI123) is, based on the total structural units, 1 mol% or more, preferably 10 mol% or more, more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. Also, it is preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, and even more preferably 75 mol% or less. Specifically, it is preferably 10 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 30 to 80 mol%, and even more preferably 40 to 80 mol%. The total content of the structural unit (III), the structural unit (I2) and the structural unit (I3) in the resin (AI12), the resin (AI13) and the resin (AI123) is preferably 30 mol% or more, more preferably 50 mol% or more, even more preferably 60 mol% or more, and even more preferably 70 mol% or more, based on the total structural units. Also, it is preferably 100 mol% or less. Specifically, it is preferably 30 to 100 mol%, more preferably 50 to 100 mol%, even more preferably 60 to 100 mol%, even more preferably 70 to 100 mol%, and even more preferably 90 mol% to 100 mol%. Also, the total molar ratio of the structural unit (III), the structural unit (I2) and the structural unit (I3) in the resin (AI12), the resin (AI13) and the resin (AI123) is preferably 5:95 to 40:60. In one or more resins, the ratio of the total number of moles of the structural unit (I2) contained in all the resins to the total number of moles of the structural unit (I3) contained in all the resins is 20:80 to 60:40. It is preferable that resin (AI12), resin (AI13) and resin (AI123) are substantially free of structural units having an acid labile group, and it is preferable that among the one or more resins, none of the resins are substantially free of structural units having an acid labile group. The weight average molecular weight of resin (AI12), resin (AI13) and resin (AI123) is preferably independently 2,000 or more (more preferably 2,500 or more, even more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, even more preferably 15,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the Examples.

[0135] <Resin not containing structural unit (III), structural unit (I2) or structural unit (I3)> The resist composition of the present invention may also use a resin that does not contain the structural unit (III), the structural unit (I2) or the structural unit (I3). Examples of resins that do not contain the structural unit (III), the structural unit (I2), or the structural unit (I3) include resins containing the structural unit (a4) or the structural unit (a5) (hereinafter, sometimes referred to as resin (X)). Examples of the resin (X) include, among others, a resin consisting only of the structural unit (a4) and a resin consisting of the structural unit (a4) and the structural unit (a5) (hereinafter, a resin consisting only of the structural unit (a4) and a resin consisting of the structural unit (a4) and the structural unit (a5) may be collectively referred to as resin (X)). Examples of structural units that the resin (X) may further have include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. When the resin (X) contains the structural unit (a4), the content of the structural unit (a4) in the resin (X) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, based on the total of all structural units in the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) in the total of all structural units in the resin (X) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more. Also, 100 mol% or less may be mentioned, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, 20 to 100 mol% may be mentioned, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Also, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) may be 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and even more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Also, 100 mol% or less may be mentioned. Specifically, 40 to 100 mol% may be mentioned, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and even more preferably 80 to 100 mol%. The content of the structural unit (a2) which may be further contained is, for example, 1 to 45 mol %, preferably 2 to 30 mol %, and more preferably 2 to 20 mol %, based on the total of all structural units in the resin (X). In particular, the resin (X) is preferably a resin consisting only of the structural unit (a4) and / or the structural unit (a5). In this case, the molar ratio of the structural unit (a4):structural unit (a5) may be 0:100 to 100:0, preferably 10:90 to 90:10, more preferably 30:70 to 70:30, and even more preferably 40:60 to 60:40. Each structural unit constituting the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (e.g., radical polymerization method) using a monomer that derives these structural units. The content of each structural unit in the resin (X) can be adjusted by the amount of the monomer used for polymerization. The weight average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but may contain oligomers having a lower weight average molecular weight than this. The method for measuring the weight average molecular weight of resin (X) is the same as that for resin (A).

[0136] When the resist composition of the present invention contains resin (X), the content thereof is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, even more preferably 1 to 40 parts by mass, still more preferably 1 to 30 parts by mass, and particularly preferably 1 to 8 parts by mass, relative to 100 parts by mass of the total content of resins other than resin (X).

[0137] The total content of the resin component (A) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 82% by mass or more and 99% by mass or less, even more preferably 85% by mass or more and 99% by mass or less, and even more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The total content of the resin (AI12), the resin (AI13) and the resin (AI123) in the resist composition is preferably 80% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The solid content of the resist composition and the resin content therein can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0138] [Method of synthesizing resin] Each structural unit constituting the resin may be used alone or in combination of two or more kinds, and may be produced by a known polymerization method (e.g., radical polymerization method) using a monomer that leads to the desired structural unit. The content of each structural unit in the resin can be adjusted by the amount of monomer used for polymerization. Each monomer may be synthesized by a conventionally known method or obtained from the market. In addition, the resin synthesized by the polymerization reaction may be treated with an acid or alkali to incorporate the desired structural unit into the resin. For example, the structural unit (a2-A) can be incorporated into the resin (A) by polymerizing the resin using the structural unit (a1-4), and then treating the resin with an acid such as p-toluenesulfonic acid. In addition, the structural unit (a2-A) can be incorporated into the resin by polymerizing the resin using acetoxystyrene, and then treating the resin with an alkali such as tetramethylammonium hydroxide.

[0139] <Acid Generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Examples of ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonate anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylate anion. The acid generator (B) may be a structural unit having an acid generating function, for example, a resin containing the above-mentioned structural unit (a7).

[0140] As the acid generator (B), compounds that generate acid by radiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779,778, U.S. Pat. No. 3,849,137, German Patent No. 3914407, and European Patent No. 126,712, can be used. Compounds produced by known methods can also be used. The acid generator (B) can be used alone or in combination of two or more. The acid generator (B) may also be an acid generator having an acid labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid labile group, and the acid labile group preferably contains the above-mentioned group (1) or group (2). When the resist composition of the present invention contains a compound having an acid labile group, it does not need to contain a resin that contains a structural unit having an acid labile group.

[0141] A preferred embodiment of the acid generator (B) is a salt represented by formula (B1) (hereinafter may be referred to as "salt (B1)" or "acid generator (B1)") or a salt represented by formula (B2) (hereinafter may be referred to as "salt (B2)" or "acid generator (B2)"). TIFF2025086349000098.tif1492 [In formula (B1), all symbols have the same meaning as above.] L b1 The (nb1+1)-valent hydrocarbon group is a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, or a monovalent group that is a combination of two or more of these groups, from which nb1 hydrogen atoms have been removed to form one or more L b2 The hydrocarbon group preferably has 1 to 48 carbon atoms, more preferably 1 to 42 carbon atoms, even more preferably 1 to 36 carbon atoms, even more preferably 1 to 30 carbon atoms, and even more preferably 1 to 24 carbon atoms. Examples of the chain hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are condensed, and cycloalkyl groups in which two rings are bonded by a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded by a spiro bond include spirocyclic cycloalkyl groups in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group are bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025086349000099.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8.When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. The aromatic hydrocarbon group may be an aryl group having nb1 hydrogen atoms removed therefrom, such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, or a fluorenyl group. More specifically, aromatic hydrocarbon groups represented by the following formulas are included. TIFF2025086349000100.tif1085The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 -CH contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. L b1 Among the hydrocarbon groups, -CH 2 - is -O-, -CO-, -S- or -SO 2 The group substituted for - is a hydroxy group (-CH 2 - is replaced by -O-), carboxy group (-CH contained in ethyl group) 2 -CH2 - is replaced by -O-CO-), carbonyl group (-CH 2 - is replaced by -CO-), oxy group (-CH 2 - is replaced by -O-), alkoxy group (-CH 2 - is replaced by -O-), alkoxycarbonyl group (-CH 2 -CH 2 - is replaced by -O-CO-), alkylcarbonyl group (-CH 2 - is replaced by -CO-), alkylcarbonyloxy group (-CH 2 -CH 2 - is replaced by -CO-O-), alkanediyloxy group (-CH at any position in the alkanediyl group) 2 - is replaced by -O-), alkanediyloxycarbonyl group (-CH at any position contained in the alkanediyl group) 2 -CH 2 - is replaced by -O-CO-), alkanediylcarbonyl group (-CH at any position in the alkanediyl group) 2 - is replaced by -CO-), alkanediylcarbonyloxy group (-CH at any position in the alkanediyl group) 2 -CH 2 These substituted groups include those similar to the groups exemplified in this specification, within the range permitted by the upper limit of the carbon number. L b1 Among the hydrocarbon groups, -CH contained in alicyclic hydrocarbon groups 2 - is -O-, -CO-, -S- or -SO 2Examples of the group substituted with - include groups containing structures such as cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, and cyclic sulfonate ester (sultone). Specific examples include alicyclic hydrocarbon groups represented by the following formula. The bonding position of the alicyclic hydrocarbon groups represented by the following formula may be any position. TIFF2025086349000101.tif48165L b1 Among the hydrocarbon groups, -CH contained in aromatic hydrocarbon groups 2 - may be replaced by -O- or -S-, -CH 2 Examples of the group in which - is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, etc. Specific examples include aromatic hydrocarbon groups represented by the following formulas. TIFF2025086349000102.tif1326 Examples of the group that combines two or more groups selected from the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group include a group that combines the above chain hydrocarbon group with the above alicyclic hydrocarbon group, a group that combines the above chain hydrocarbon group with the above aromatic hydrocarbon group, a group that combines the above alicyclic hydrocarbon group with the above aromatic hydrocarbon group, and a group that combines the above chain hydrocarbon group with the above alicyclic hydrocarbon group with the above aromatic hydrocarbon group. The group that combines the alicyclic hydrocarbon group with the aromatic hydrocarbon group may be a condensed ring. -CH contained in a group that combines an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 Examples of the group substituted with - include the same groups as those exemplified in this specification, within the upper limit of the carbon number permitted. L b2 The divalent hydrocarbon group includes a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups. A monovalent hydrocarbon group is formed by removing one hydrogen atom to give Y b1 Examples of such groups include groups that bond to the L b2The divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group consisting of two or more of these groups are each, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the monovalent hydrocarbon group include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups from which one hydrogen atom has been removed. L b1 and L b2 The substituent that the hydrocarbon group may have includes a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b1 and L b2 In the case where L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2 The -CH chain hydrocarbon group contained in the hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 - is replaced by L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, or an alkylsulfonyl group. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group are represented by L b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified in 1. When the alicyclic hydrocarbon groups and aromatic hydrocarbon groups do not have a substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1Examples of the substituent that the methyl group may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group. 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced. Y b1 The number of carbon atoms in the hydrocarbon group that may be contained in the cyclic hydrocarbon group is b1 The carbon number of the cyclic hydrocarbon group is not included in the carbon number of the cyclic hydrocarbon group. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that may be substituted on the cyclic hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the carbon number, b1 Examples of the alkyl group include the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group obtained by combining two or more of these groups. b1 The cyclic hydrocarbon group may have a substituent selected from the group consisting of -CH 2 - is -O-, -S-, -CO- or -SO 2 Examples of groups substituted with - include, within the upper limit of the carbon number, L b1 -CH contained in the hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 The same groups as those exemplified as the groups substituted with - can be mentioned. b1The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group may have as a substituent may constitute a protecting group or a leaving group generally used in the art (for example, an acid labile group or a base labile group such as the above-mentioned group (1) or group (2)). Here, the "base labile group" means a group which has a leaving group and is released by contact with a base to form a hydrophilic group (for example, a hydroxy group or a carboxy group).

[0142] The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter, may be referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter, may be referred to as "anion (B1-A2)"). TIFF2025086349000103.tif31125[In formula (B1-A1), L b2 and Y b1 has the same meaning as in formula (B1). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the multiple parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. nb2 represents an integer of 1 to 3. When nb2 is 2 or more, the groups in the parentheses may be the same or different.] Q b1 , Q b2 , Q b3 and Qb4 Examples of the alkyl group represented by the formula (I) include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each preferably independently a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0143] L b3 The hydrocarbon group in the formula (B1) is, within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above are included. In formula (B1-A1), L b3is a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (-CH contained in the chain hydrocarbon group). 2 - may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 -), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (the -CH 2 - may be replaced by -O- or -S-.) or a group combining two or more of these groups is preferable, and a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1) is more preferable. In addition, -CH contained in the chain hydrocarbon group 2 When - is replaced by -O- or -CO-, -CH contained in a chain hydrocarbon group 2 The number of - replaced by -O- or -CO- is preferably 1 to 4, and one -CH 2 -CH 2 - is replaced by -O-CO- or -CO-O-, or one -CH 2 -CH 2 -CH 2 It is preferred that - is replaced by -O-CO-O-. TIFF2025086349000104.tif1682[In formula (Lb3-1), nb2 has the same meaning as in formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and the —CH 2 - may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and -CH contained in the alicyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2- may be replaced by -CH contained in the aromatic hydrocarbon group. 2 - may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent binding sites, * represents X 1 represents the binding site for In formula (Lb3-1), L b31 The chain hydrocarbon group of L is as long as the upper limit of the carbon number allows. b1 Examples of the chain hydrocarbon groups include the same groups as those exemplified above. In formula (Lb3-1), W b3 The alicyclic and aromatic hydrocarbon groups of L are as long as the upper limit of the carbon number permits. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified by 1. In formula (Lb3-1), L b31 The substituents which the chain hydrocarbon group may have and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 The substituents which the hydrocarbon group may have include the same groups as those exemplified above. L b31 is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-. Among them, W b3 As the alicyclic hydrocarbon group and aromatic hydrocarbon group of the above, the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below are preferable. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent a bonding site, * represents X 1 Or L b31 represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 At least one ** represents a binding site for L b2 In the alicyclic hydrocarbon group shown below, -CH 2 - is -O-, -S-, -CO- or -SO 2 The -CH contained in the alicyclic hydrocarbon group may be replaced with -.2 - is -O-, -S-, -CO- or -SO 2 When it is replaced by -, it is preferable that an ether ring, an ester ring (lactone), a carbonate ring, a sulfonate ring (sultone) or an acetal ring is formed. In the formula (B1-A1) of TIFF2025086349000105.tif37167, L b2 is a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (-CH contained in the chain hydrocarbon group). 2 - may be replaced by -O- or -CO-.) is preferred, and a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 One of X represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. 2 represents -O-, -CO-O-, -O-CO-, or -O-CO-O-. * and ** represent binding sites, and ** represents Y b1 where L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less. In formula (B1-A1), Y b1 is a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group). 2 - is -O-, -CO-, -S- or -SO 2 -), and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - is -O-, -CO-, -S- or -SO 2 -) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (the -CH contained in the alicyclic hydrocarbon group) is more preferred. 2 - is -O-, -CO-, -S- or -SO 2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, groups represented by the following formulae (Y1) to (Y36) are more preferred. In formulae (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, R represents an alkyl group having 1 to 4 carbon atoms. Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group may have, and * represents L b2 The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, although these are not specifically shown in the following formulae. TIFF2025086349000106.tif84159

[0144] The anion represented by formula (B1-A1) is preferably an anion represented by formula (B1-A1-1) to formula (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" depending on the formula number.], and more preferably an anion represented by any of formula (B1-A1-1) to formula (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to formula (B1-A1-33), formula (B1-A1-36) to formula (B1-A1-40), and formula (B1-A1-47) to formula (B1-A1-85). TIFF2025086349000107.tif216160

[0145] TIFF2025086349000108.tif249151

[0146] TIFF2025086349000109.tif254163

[0147] Here, R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8L is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 has the same meaning as above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0148] Preferred anions represented by formula (B1-A1) include anions represented by formulas (B1a-1) to (B1a-70), respectively. Among them, anions represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) are preferred. TIFF2025086349000110.tif185163

[0149] TIFF2025086349000111.tif252166

[0150] TIFF2025086349000112.tif70166

[0151] The anion represented by formula (B1-A2) is represented by the following formula: TIFF2025086349000113.tif23100[In formula (B1-A2), L b2 and Y b1 has the same meaning as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and the —CH 2 - may be replaced by -O- or -CO-. nb4 represents an integer of 1 to 5. When nb4 is 2 or more, the groups in the multiple parentheses may be the same or different. nb3 represents an integer of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same or different from each other. However, 1≦nb4+nb3≦5 is satisfied.

[0152] In formula (B1-A2), L b2 Examples of hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (B1). b2 Examples of hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group are the same as those of L. b2 Hydrocarbon radical, Y b1 The substituents which the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 Hydrocarbon radical, Y b1 Examples of the substituent that the methyl group and the cyclic hydrocarbon group may have include the same as those mentioned above. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (the —CH 2 - may be replaced by -O- or -CO-.) More preferably, *-CO-OL b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and the —CH 2 - may be replaced by -O- or -CO-. * represents SO 3 - It represents the bonding site with the benzene ring to which L is attached. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. Y b1 is a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group). 2 - is -O-, -CO-, -S- or -SO 2-), and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - is -O-, -CO-, -S- or -SO 2 -) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. b1 Or L b1 More preferably, it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by the following: Specifically, it is preferably the groups represented by the above formulae (Y1) to (Y36), and more preferably the groups represented by the above formulae (Y1) to (Y19). TIFF2025086349000114.tif83158

[0153] In formula (B1-A2), nb4 is preferably any integer of 1 to 4, more preferably any integer of 1 to 3, further preferably 1 or 2, and further more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bond position of SO 3 - It is preferable that the structure be the following structure in which the m-position of the benzene ring is substituted with respect to the bonding position of the above. TIFF2025086349000115.tif26107[where L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (B1-A2). In formula (B1-A2), when nb4 is 2 or more, a plurality of L b2 and Y b1 are preferably the same groups.

[0154] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. Rb1 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. -CH in the alkyl group 2 Examples of the group in which - is replaced by -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. These replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. R b1 each independently represents a halogen atom or an alkyl group having 1 to 4 carbon atoms (-CH 2 - may be replaced by -O- or -CO-.) is preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (the -CH 2 - may be replaced by -O- or -CO-.) is more preferable, and a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group is even more preferable. nb3 is preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 More preferably, nb3 is a fluorine atom or an iodine atom. When nb3 is 2, R b1 It is preferable that one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms. b1 It is more preferable that one of them is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0155] Examples of the anion represented by formula (B1-A2) include the following anions. Among them, the anions represented by formulae (B2a-1) to (B2a-20) are preferred, and the anions represented by formulae (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are preferred in the case of some R b1 is omitted, and may contain substituents not shown. TIFF2025086349000116.tif102153

[0156] In another embodiment, the acid generator (B) may have a sulfonylimide anion, a sulfonylmethide anion, or a carboxylate anion, and a salt represented by formula (B2) (hereinafter sometimes referred to as “salt (B2)” or “acid generator (B2)”) or a salt in which the anion of the salt represented by formula (B1) is replaced with a carboxylate anion can also be used as the acid generator (B). TIFF2025086349000117.tif1399[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. Y b1’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. nb5 represents an integer of 2 or 3. When nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 A is a carbon atom. The groups in the parentheses may be the same or different from each other, and two groups in the parentheses are bonded to form A 1 may form a ring comprising: Z2 + represents an organic cation. In formula (B2), L b2’ and Y b1’ Examples of the hydrocarbon group, cyclic hydrocarbon group and substituent are L in formula (B1-A1). b2 and Y b1 The same groups as those shown below can be mentioned. In formula (B2), L b2’ is a single bond, *-L b23 -, *-L b23 -X 2 -or*-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may contain a fluorine atom. 2 and X 3 each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O- or -CO-. * is SO 2 It is preferable that the bond is a bond with Y b1’ is a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH contained in the cyclic hydrocarbon group). 2 - is -O-, -CO-, -S- or -SO 2 -), and a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - is -O-, -S-, -CO- or -SO 2 It is more preferable that the alkyl group is a C6 to C18 aromatic hydrocarbon group which may have a substituent. Specifically, it is preferable that the alkyl group is a trifluoromethyl group or a group represented by any one of the formulae (Y1) to (Y36) exemplified in the formula (B1-A1). In formula (B2), two -SO 2 -L b2’-Y b1’ Together, A 1 When a ring containing the formula (B2') is formed, examples of the anion include an anion represented by the formula (B2'). TIFF2025086349000118.tif21112[In formula (B2'), A 1 , Y b1’ , L b2’ and nb5 have the same meaning as in formula (B2). W b4 represents a disulfonylimide ring or disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced with a fluorine atom.

[0157] Examples of the anion of the salt represented by formula (B2) include the following: Among these, the anions represented by formulae (B3a-1) and (B3a-2) are preferred. TIFF2025086349000119.tif189164Carboxylic acid anions include the following: TIFF2025086349000120.tif41155

[0158] Z1 + and Z2 + Examples of the organic cation include organic onium cation, organic sulfonium cation, organic iodonium cation, organic ammonium cation, benzothiazolium cation, and organic phosphonium cation. Among these, organic sulfonium cation and organic iodonium cation are preferred, and arylsulfonium cation or aryl iodonium cation are more preferred. Specifically, the organic cation includes cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, may be referred to as "cation (b2-1)" depending on the formula number). TIFF2025086349000121.tif82160[Formula (b2-1) to (b2-5), R b4 ~R b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH 2 - may be replaced by -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH 2- may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents an open chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the open chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and the -CH 2 - may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH 2 - may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different. u3 represents an integer of 1 to 3, and satisfies 1≦u3+q23≦5. u4 and u5 each independently represent an integer of 0 to 3, and satisfy 0≦u4+o21≦5 and 0≦u5+p22≦5. o21, p22, q23, r24, t25 and s26 each independently represent an integer of 0 to 4. When u3, u4 and u5 each are 2 or more, the groups in the multiple parentheses are the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, multiple R b21 ~R b26 are the same or different. When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of them is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0159] The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2025086349000122.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms.

[0160] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples of such groups include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and further preferably 1 to 4.

[0161] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples thereof include aromatic hydrocarbon groups having a chain hydrocarbon group (such as a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, a p-tert-butylphenyl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group (such as a p-cyclohexylphenyl group and a p-adamantylphenyl group). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. An example of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group is a p-methoxyphenyl group. Examples of the chain hydrocarbon group in which a hydrogen atom has been substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, and a naphthylethyl group.

[0162] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group.

[0163] Rb4 and R b5 The ring formed by bonding to each other together with the sulfur atom to which they are bonded may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, and preferably rings having 4 to 18 carbon atoms. Examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, and preferably 3-membered to 7-membered rings, and examples of such rings include the following rings. * represents a bonding site. TIFF2025086349000123.tif18125

[0164] R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. For example, it may be a thiolane-1-ium ring (tetrahydrothiophenium ring), a thiane-1-ium ring, a 1,4-oxathiane-4-ium ring, etc. R b11 and R b12 The ring formed by combining with may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. The ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples of the ring include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring. R b27 ~R b29 Examples of groups containing an acid labile group include -R c30 , -CO-OR c30 Or -L c10 -CO-OR c30 A group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, R c30 represents an acid labile group. R b27 ~R b29 Examples of the acid labile group include the above-mentioned group (1) or group (2).

[0165] Among the cations (b2-1) to (b2-5), the cation (b2-1), the cation (b2-4) or the cation (b2-5) is preferred. Examples of the cation (b2-1) include the following cations. TIFF2025086349000124.tif158165Examples of the cation (b2-2) include the following cations. TIFF2025086349000125.tif14135Examples of the cation (b2-3) include the following cations. TIFF2025086349000126.tif21130Examples of the cation (b2-4) include the following cations. TIFF2025086349000127.tif130167Examples of the cation (b2-5) include the following cations. TIFF2025086349000128.tif114159

[0166] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, which can be combined arbitrarily. The acid generator (B) is preferably a combination of an anion represented by any one of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), (B1a-35) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), and (B3a-1) to (B3a-20) and a cation (b2-1), a cation (b2-2), a cation (b2-3), a cation (b2-4), or a cation (b2-5).

[0167] The acid generator (B) is preferably one represented by formula (B1-1) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28). Among them, those containing an arylsulfonium cation are preferred, and those represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) are particularly preferred. TIFF2025086349000129.tif174167

[0168] TIFF2025086349000130.tif249155

[0169] TIFF2025086349000131.tif254165

[0170] TIFF2025086349000132.tif252160

[0171] TIFF2025086349000133.tif249163

[0172] TIFF2025086349000134.tif132163

[0173] TIFF2025086349000135.tif105163

[0174] TIFF2025086349000136.tif253165

[0175] In the resist composition of the present invention, the content of the acid generator (B) is, for example, 0.1% by mass or more and 99.9% by mass or less, preferably 1% by mass or more and 45% by mass or less, more preferably 1% by mass or more and 40% by mass or less, and even more preferably 3% by mass or more and 35% by mass or less, relative to the solid content of the resist composition. In addition, in the resist composition of the present invention, the content of the acid generator (B) is, for 100 parts by mass of the resin (A), preferably 1 part by mass or more and 50 parts by mass or less, more preferably 1 part by mass or more and 45 parts by mass or less, even more preferably 3 parts by mass or more and 40 parts by mass or less, and even more preferably 3 parts by mass or more and 35 parts by mass or less.

[0176] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by a known analytical method such as liquid chromatography or gas chromatography. Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; cyclic esters such as γ-butyrolactone; etc. One type of solvent (E) may be used alone, or two or more types may be used.

[0177] <Quencher (C)> The quencher (C) may be a basic nitrogen-containing organic compound or a salt (excluding the carboxylate represented by formula (I)) that generates an acid weaker in acidity than the acid generated from the acid generator (B). When the resist composition contains the quencher (C), the content of the quencher (C) is preferably about 0.01 to 15 mass%, more preferably about 0.01 to 10 mass%, even more preferably about 0.1 to 8 mass%, and even more preferably about 0.1 to 7 mass%, based on the solid content of the resist composition. The basic nitrogen-containing organic compound includes amines and ammonium salts. The amines include aliphatic amines and aromatic amines. The aliphatic amines include primary amines, secondary amines, and tertiary amines. Amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, Amines, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine amine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane Examples of the amines include 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, and bipyridine. Preferred are aromatic amines such as diisopropylaniline, and more preferred are 2,6-diisopropylaniline. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, and the like.

[0178] The acidity of a salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is indicated by the acid dissociation constant (pKa). A salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is a salt having an acid dissociation constant of the acid generated from the salt usually of -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include salts represented by the following formula, salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably a salt that generates a carboxylic acid with a lower acidity than the acid generated from the acid generator (B) (a salt having a carboxylic acid anion), more preferably the weak acid inner salt (D), and even more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid inner salts (D). TIFF2025086349000137.tif94157

[0179] The weak acid inner salt (D) is preferably a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylate anion substituted for at least one of the two phenyl groups bonded to the iodonium cation, and specifically includes salts represented by the following formula:

[0180] TIFF2025086349000138.tif1695[In formula (D), R D1 and R D2 each independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group, or a halogen atom. m' and n' each independently represent an integer of 0 to 4. When m' is 2 or more, a plurality of R D1 may be the same or different, and when n' is 2 or more, a plurality of R D2 may be the same or different.] R D1 and R D2 Examples of the hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups. Examples of the chain hydrocarbon group include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, and a nonyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and may be either saturated or unsaturated. Examples of the alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclononyl, and cyclododecyl, norbornyl, and adamantyl groups. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a 1-naphthyl group, a 2-naphthyl group, a 2-methylphenyl group, a 3-methylphenyl group, a 4-methylphenyl group, a 4-ethylphenyl group, a 4-propylphenyl group, a 4-isopropylphenyl group, a 4-butylphenyl group, a 4-t-butylphenyl group, a 4-hexylphenyl group, a 4-cyclohexylphenyl group, an anthryl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Groups formed by combining these groups include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, and aralkyl groups (e.g., phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, and 6-phenyl-1-hexyl group). Examples of the alkoxy group include a methoxy group and an ethoxy group. Examples of the acyl group include an acetyl group, a propanoyl group, a benzoyl group, and a cyclohexanecarbonyl group. Examples of the acyloxy group include the above-mentioned acyl group to which an oxy group (-O-) is bonded. Examples of the alkoxycarbonyl group include the above alkoxy groups bonded to a carbonyl group (-CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom. R D1 and R D2 are each independently preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group or a halogen atom. m' and n' are each preferably an integer of 0 to 2, more preferably 0. When m' is 2 or more, a plurality of RD1 may be the same or different, and when n' is 2 or more, a plurality of R D2 may be the same or different.

[0181] More specifically, the following salts are included: TIFF2025086349000139.tif72165

[0182] <Other Ingredients> The resist composition of the present invention may contain components other than the above-mentioned components (hereinafter, sometimes referred to as "other components (F)") as necessary. There are no particular limitations on the other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc., can be used.

[0183] Preparation of Resist Composition The resist composition of the present invention can be prepared by mixing the resin (A) and the acid generator (B), and, if necessary, a resin other than the resin (A), the solvent (E), the quencher (C), and other components (F). The order of mixing is arbitrary and is not particularly limited. The temperature during mixing can be selected from 10 to 40°C depending on the type of resin, the solubility of the resin in the solvent (E), and the like. The mixing time can be selected from 0.5 to 24 hours depending on the mixing temperature. The mixing means is not particularly limited, and stirring and mixing can be used. After mixing the components, it is preferable to filter the mixture using a filter having a pore size of about 0.003 to 0.2 μm.

[0184] <Method for Producing Resist Pattern> The method for producing a resist pattern of the present invention comprises the steps of: (1) applying the resist composition of the present invention onto a substrate; (2) A step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A step of developing the composition layer after heating. The resist composition can be applied onto a substrate using a commonly used device such as a spin coater. Examples of the substrate include inorganic substrates such as silicon wafers and organic substrates having a resist film formed on the surface. Before applying the resist composition, the substrate may be cleaned, and an anti-reflective film or the like may be formed on the substrate. The composition after coating is dried to remove the solvent and form a composition layer. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a vacuum device. The heating temperature is preferably 50 to 200°C, and the heating time is preferably 10 to 180 seconds. The pressure during drying under reduced pressure is preferably 1 to 1.0×10 5 It is preferable that the pressure is about Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. The exposure light source may be a KrF excimer laser (wavelength 248 nm), an ArF excimer laser (wavelength 193 nm), or a F 2 Various lasers can be used, such as those that emit ultraviolet laser light such as an excimer laser (wavelength 157 nm), those that convert the wavelength of laser light from a solid-state laser light source (YAG or semiconductor laser, etc.) to emit harmonic laser light in the far ultraviolet or vacuum ultraviolet range, and those that irradiate electron beams or extreme ultraviolet light (EUV). In this specification, irradiation with these types of radiation may be collectively referred to as "exposure." During exposure, exposure is usually performed through a mask corresponding to the desired pattern. When the exposure light source is an electron beam, exposure may be performed by direct writing without using a mask. The composition layer after exposure is subjected to a heat treatment (so-called post-exposure bake) in order to promote a deprotection reaction in the acid labile group. The heating temperature is usually about 50 to 200°C, preferably about 70 to 150°C. A chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. In addition, before development, the steps of applying a resist composition, drying, exposing, and heating may be repeated on the composition layer after exposure. The composition layer after heating is usually developed using a developing device and a developer. Examples of the developing method include a dip method, a paddle method, a spray method, and a dynamic dispense method. The developing temperature is preferably, for example, 5 to 60° C., and the developing time is preferably, for example, 5 to 300 seconds. By selecting the type of developer as follows, a positive resist pattern or a negative resist pattern can be produced. When a positive resist pattern is produced from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer may be any of various alkaline aqueous solutions used in this field. For example, an aqueous solution of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) may be used. The alkaline developer may contain a surfactant. After development, the resist pattern is preferably washed with ultrapure water, and then water remaining on the substrate and the pattern is removed. When producing a negative resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as an "organic developer") is used as the developer. Examples of organic solvents contained in organic developers include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole. The content of the organic solvent in the organic developer is preferably from 90% by mass to 100% by mass, more preferably from 95% by mass to 100% by mass, and further preferably consists essentially of the organic solvent. Among them, the organic developer is preferably a developer containing butyl acetate and / or 2-heptanone. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and even more preferably substantially only butyl acetate and / or 2-heptanone. The organic developer may contain a surfactant and may contain a small amount of water. During development, the development may be stopped by replacing the organic developer with a different type of solvent. The resist pattern after development is preferably washed with a rinse solution. There are no particular limitations on the rinse solution as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent. After cleaning, it is preferable to remove any rinsing liquid remaining on the substrate and the pattern.

[0185] <Application> The resist composition of the present invention is suitable as a resist composition for KrF excimer laser exposure, a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, and is particularly suitable as a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, and is useful for semiconductor microfabrication. EXAMPLES

[0186] The present invention will be described in more detail with reference to examples. In the examples, "%" and "parts" expressing the content or amount used are based on mass unless otherwise specified. The weight average molecular weight is a value determined by gel permeation chromatography under the following conditions. Equipment: HLC-8120GPC model (Tosoh Corporation) Column: TSKgel Multipore H XL -M x 3 + guard column (Tosoh) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (Tosoh Corporation) The structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (Agilent 1100 LC, Agilent LC / MSD MASS). In the following examples, the value of the molecular ion peak is indicated by "MASS".

[0187] Resin synthesis The compounds (monomers) used in the synthesis of the resin are shown below. TIFF2025086349000140.tif84165Hereinafter, these compounds will be referred to as "monomer (I-1)" etc. according to their formula numbers.

[0188] Synthesis Example 1 [Synthesis of Resin A-1] Monomer (a2-1-3), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-1-3):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 5 mol% and 15 mol%, respectively, based on the total monomer amount, and these were heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 5.0 x 10 3 Resin A-1 having the following structural units was obtained in a yield of 94%. TIFF2025086349000141.tif29142

[0189] Synthesis Example 2 [Synthesis of Resin A-2] Monomer (III'-10), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (III'-10):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 5 mol% and 15 mol%, respectively, based on the total monomer amount, and these were heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 5.3 x 10 3 Resin A-2 having the following structural units was obtained in a yield of 89%. TIFF2025086349000142.tif29142

[0190] Synthesis Example 3 [Synthesis of Resin A-3] Monomer (a2-1-3), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-1-3):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 1.5 mol% and 4.5 mol%, respectively, based on the total monomer amount, and these were heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 9.0 x 10 3 Resin A-3 having the following structural unit was obtained in a yield of 90%. TIFF2025086349000143.tif29142

[0191] Synthesis Example 4 [Synthesis of Resin A-4] Monomer (III'-10), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (III'-10):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 1.5 mol% and 4.5 mol%, respectively, based on the total monomer amount, and these were heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 9.2 x 10 3 Resin A-4 having the following structural unit was obtained in a yield of 87%. TIFF2025086349000144.tif29142

[0192] Synthesis Example 5 [Synthesis of Resin A-5] Monomer (a2-1-1) and monomer (I1-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-1-1):monomer (I1-1)] was 30:70. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 5 mol% and 15 mol%, respectively, based on the total monomer amount, and the mixture was heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 5.1 x 10 3 Resin A-5 having the following structural unit was obtained in a yield of 92%. TIFF2025086349000145.tif28112

[0193] Synthesis Example 6 [Synthesis of Resin A-6] Monomer (a2-1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-1-1):monomer (I2-1)] was 30:70. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 5 mol% and 15 mol%, respectively, based on the total monomer amount, and the mixture was heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 5.0×10 3 Resin A-6 having the following structural unit was obtained in a yield of 90%. TIFF2025086349000146.tif29107

[0194] Synthesis Example 7 [Synthesis of Resin A-7] Monomer (a2-1-1), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-1-1):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 1.5 mol% and 4.5 mol%, respectively, based on the total monomer amount, and these were heated at 73°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 8.9 x 10 3 Resin A-7 having the following structural unit was obtained in a yield of 93%. TIFF2025086349000147.tif29142

[0195] Synthesis Example 8 [Synthesis of Resin A-8] Monomer (a2-2-1), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-1):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, propylene glycol monomethyl ether was mixed into this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the resulting mixture in amounts of 3 mol% and 9 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 75°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 6.0 x 10 3 Resin A-8 having the following structural unit was obtained in a yield of 96%. TIFF2025086349000148.tif34142

[0196] Synthesis Example 9 [Synthesis of Resin A-9] Monomer (a2-2-1) and monomer (I1-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-1):monomer (I1-1)] was 30:70. Furthermore, propylene glycol monomethyl ether was mixed into this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the resulting mixture in amounts of 3 mol% and 9 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 75°C for about 5 hours. The polymerization reaction liquid was then poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer with a weight average molecular weight of about 6.8×10 3 Resin A-9 having the following structural units was obtained in a yield of 88%. TIFF2025086349000149.tif34101

[0197] Synthesis Example 10 [Synthesis of Resin A-10] Monomer (a2-2-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-1):monomer (I2-1)] was 30:70. Furthermore, propylene glycol monomethyl ether acetate was mixed with this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in an amount of 3 mol% and 9 mol%, respectively, with respect to the total monomer amount, and these were heated at 80°C for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5 wt%) was added to the polymerization reaction liquid in an amount of 2.0 times the total mass of all monomers, and the mixture was stirred for 6 hours and then separated. The obtained organic layer was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer with a weight average molecular weight of about 5.4×10 3 Resin A-10 having the following structural units was obtained in a yield of 93%. TIFF2025086349000150.tif3692

[0198] Synthesis Example 11 [Synthesis of Resin A-11] Monomer (a2-2-4) and monomer (I1-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-4):monomer (I1-1)] was 30:70. Furthermore, propylene glycol monomethyl ether acetate was mixed with this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 3.3 mol% and 9.9 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 80°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer with a weight average molecular weight of about 4.8×10 3 Resin A-11 having the following structural units was obtained in a yield of 77%. TIFF2025086349000151.tif2892

[0199] Synthesis Example 12 [Synthesis of Resin A-12] Monomer (a2-2-4) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-4):monomer (I2-1)] was 30:70. Furthermore, propylene glycol monomethyl ether acetate was mixed with this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 3.3 mol% and 9.9 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 80°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer with a weight average molecular weight of about 4.5×10 3 Resin A-12 having the following structural units was obtained in a yield of 89%. TIFF2025086349000152.tif3192

[0200] Synthesis Example 13 [Synthesis of Resin A-13] Monomer (a2-2-4), monomer (I1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a2-2-4):monomer (I1-1):monomer (I2-1)] was 30:18:52. Furthermore, propylene glycol monomethyl ether was mixed into this monomer mixture in an amount of 1.5 times the total mass of all monomers. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the obtained mixture in amounts of 3 mol% and 9 mol%, respectively, relative to the total monomer amount, and these were heated at 75°C for about 5 hours. Thereafter, the polymerization reaction liquid was poured into a large amount of n-heptane to precipitate a resin, which was then filtered and collected to obtain a polymer having a weight average molecular weight of about 4.7 x 10 3 Resin A-13 having the following structural units was obtained in a yield of 88%. TIFF2025086349000153.tif29141

[0201] Synthesis Example 14 [Synthesis of Resin AX-1] Monomer (I2-1) was used as the monomer, and propylene glycol monomethyl ether acetate was mixed with this monomer in an amount twice the mass of the monomer. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the resulting mixture in amounts of 4 mol% and 12 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 73°C for approximately 5 hours. The polymerization reaction liquid was then poured into a large amount of n-heptane to precipitate a resin, which was then filtered and recovered to obtain a polymer with a weight average molecular weight of approximately 4.7 x 10 3 Resin AX-1 having the following structural units was obtained in a yield of 79%. TIFF2025086349000154.tif2953

[0202] Synthesis Example 15 [Synthesis of Resin AX-2] Monomer (I1-1) was used as the monomer, and propylene glycol monomethyl ether acetate was mixed with this monomer in an amount twice the mass of the monomer. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the resulting mixture in amounts of 4 mol% and 12 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 73°C for approximately 5 hours. The polymerization reaction liquid was then poured into a large amount of n-heptane to precipitate a resin, which was then filtered and recovered to obtain a polymer with a weight average molecular weight of approximately 5.2 x 10 3 Resin AX-2 having the following structural units was obtained in a yield of 86%. TIFF2025086349000155.tif2950

[0203] Synthesis Example 16 [Synthesis of Resin AX-3] Monomer (a1-2-5), monomer (a2-1-1) and monomer (I2-1) were used as monomers, and mixed so that the molar ratio [monomer (a1-2-5):monomer (a2-1-1):monomer (I2-1)] was 18:30:52, and propylene glycol monomethyl ether acetate was added in an amount 1.5 times the total monomer amount to form a solution. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the solution in amounts of 1 mol% and 3 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 75°C for about 5 hours. The resulting reaction mixture was poured into a large amount of a methanol / water mixed solvent to precipitate a resin, which was then filtered. The resin thus obtained was stirred in methanol and filtered to obtain a resin having a weight average molecular weight of 8.3 x 10 3 Resin AX-3 (copolymer) was obtained in a yield of 88%. This resin AX-3 has the following structural units. TIFF2025086349000156.tif33114

[0204] Synthesis Example 17 [Synthesis of Resin AX-4] Monomer (a1-2-5), monomer (a2-1-1) and monomer (I1-1) were used as monomers, and mixed so that the molar ratio [monomer (a1-2-5):monomer (a2-1-1):monomer (I1-1)] was 18:30:52, and propylene glycol monomethyl ether acetate was added in an amount 1.5 times the total monomer amount to form a solution. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to the solution in amounts of 1 mol% and 3 mol%, respectively, relative to the total monomer amount, and the mixture was heated at 75°C for about 5 hours. The resulting reaction mixture was poured into a large amount of a methanol / water mixed solvent to precipitate a resin, which was then filtered. The resin thus obtained was stirred in methanol and filtered to obtain a resin having a weight average molecular weight of 8.6 x 10 3 Resin AX-4 (copolymer) was obtained in a yield of 82%. This resin AX-4 has the following structural units. TIFF2025086349000157.tif33114

[0205] Synthesis Example 18: Synthesis of Resin X1 Monomer (a4-2A-4) was used as the monomer, and methyl isobutyl ketone was added in an amount 1.5 times the mass of the total monomer amount to prepare a solution. Azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators to this solution in amounts of 0.7 mol% and 2.1 mol% relative to the total monomer amount, respectively, and the mixture was heated at 75°C for about 5 hours. The resulting reaction mixture was poured into a large amount of a methanol / water mixed solvent to precipitate a resin, which was then filtered and the weight-average molecular weight of the resin was 1.7 x 10 4 Resin X1 was obtained in a yield of 77%. This resin X1 has the following structural units. TIFF2025086349000158.tif3456

[0206] <Preparation of resist composition> The components shown in Table 1 were mixed and dissolved to obtain a mixture, which was then filtered through a fluororesin filter having a pore size of 0.2 μm to prepare a resist composition. [Table 1]

[0207] <Resin> A-1~A-13, AX-1~AX-4, X1: Resin A-1~Resin A-13, Resin AX-1~Resin AX-4, Resin X1 <Acid Generator (B)> B1-1: Salt represented by formula (B1-1) (synthesized according to the examples in JP 2010-152341 A) TIFF2025086349000160.tif2793<Quencher(C)> C1: Dicyclohexylmethylamine (Tokyo Chemical Industry Co., Ltd.) <Solvent> Propylene glycol monomethyl ether acetate 110 parts Propylene glycol monomethyl ether 50 parts γ-butyrolactone 4 parts

[0208] <Production and Evaluation of Resist Patterns> A composition for organic anti-reflective coating (ARC-29; manufactured by Nissan Chemical Industries, Ltd.) was applied to a silicon wafer and baked at 205° C. for 60 seconds to form an organic anti-reflective coating having a thickness of 780 Å. Next, the resist composition was spin-coated on the organic anti-reflective coating so that the film thickness after drying (pre-baking) would be 200 nm. The silicon wafer coated with the resist composition was pre-baked on a direct hot plate at the temperature shown in the “PB” column of Table 1 for 60 seconds to form a resist film (composition layer). The silicon wafer on which the resist film was formed was subjected to immersion exposure to a line and space pattern by changing the exposure dose stepwise using an ArF excimer laser stepper for immersion exposure (XT:1900Gi; manufactured by ASML, NA=1.35, 3 / 4 Annular XY polarization). Note that ultrapure water was used as the immersion medium. After exposure, the silicon wafer was post-exposure baked on a hot plate for 60 seconds at the temperature shown in the "PEB" column of Table 1. The silicon wafer was then paddle developed for 60 seconds with a 2.38% aqueous tetramethylammonium hydroxide solution to obtain a resist pattern.

[0209] For each resist pattern, the exposure amount at which the line width of a 400 nm line and space pattern became 1:1 was defined as the effective sensitivity.

[0210] <Shape evaluation> The 50 nm line and space patterns were observed under a scanning electron microscope. Those with a top shape and bottom shape close to a rectangle (a) were judged as ○, and those with a top shape that was round (b) or close to a T-shape (c), or those with bottom drag (d) were judged as ×. TIFF2025086349000161.tif29136 [Table 2] [Industrial Applicability]

[0211] INDUSTRIAL APPLICABILITY The resist composition of the present invention is suitable for semiconductor microfabrication because it can produce resist patterns with excellent shape, and is therefore extremely useful industrially.

Claims

1. One or more resins; and an acid generator, At least one of the one or more resins comprises a structural unit represented by formula (III): At least one of the one or more resins contains a structural unit represented by formula (I2), A resist composition, wherein at least one of the one or more resins contains a structural unit represented by formula (I3). [In formula (III), R ４ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X ２ represents a single bond or *-CO-O-. ４ represents the bonding site with the carbon atom to which it is bonded. L ２ represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. X ３ represents a single bond or --CO--. mk represents an integer of 1 to 4. When mk is 2 or more, the groups in the parentheses may be the same or different. [In formula (I2), R ２ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ - may be replaced. [In formula (I3), R ３ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. R Ｂ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u2 represents an integer of 0 to 2, and when u2 is 2, a plurality of R Ｂ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 2. L １３ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ - may be replaced.

2. 2. The resist composition according to claim 1, wherein one of the one or more resins contains a structural unit represented by formula (III) and a structural unit represented by formula (I2).

3. 2. The resist composition according to claim 1, wherein one of the one or more resins contains a structural unit represented by formula (III) and a structural unit represented by formula (I3).

4. 2. The resist composition according to claim 1, wherein one of the one or more resins contains a structural unit represented by formula (III), a structural unit represented by formula (I2), and a structural unit represented by formula (I3).

5. A resin including a structural unit represented by the formula (III) and a structural unit represented by the formula (I2), The resist composition according to claim 1, comprising a resin containing the structural unit represented by formula (III) and the structural unit represented by formula (I3).

6. 2. The resist composition according to claim 1, wherein the content of the structural unit represented by formula (III) in the resin containing the structural unit represented by formula (III) is 10 to 50 mol % based on all structural units.

7. 2. The resist composition according to claim 1, wherein, in the one or more resins, a ratio of the total number of moles of the structural units represented by formula (I2) contained in all the resins to the total number of moles of the structural units represented by formula (I3) contained in all the resins is from 20:80 to 60:

40.

8. 2. The resist composition according to claim 1, wherein in the resin containing the structural unit represented by formula (III), the total content of the structural unit represented by formula (III), the structural unit represented by formula (I2), and the structural unit represented by formula (I3) is 90 mol % or more and 100 mol % or less.

9. 2. The resist composition according to claim 1, wherein none of the one or more resins contains a structural unit having an acid labile group.

10. 2. The resist composition according to claim 1, wherein the acid generator comprises a salt represented by formula (B1). [In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z1 ＋ represents an organic cation.

11. (1) A step of applying a resist composition according to any one of claims 1 to 10 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

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