Workpiece manufacturing device and workpiece manufacturing method

Abstract

To provide a workpiece manufacturing device that can suppress occurrences of cracks in fragile parts and ensure the normality of the fragile parts.SOLUTION: A workpiece manufacturing device includes a cylinder mechanism 55, an electro-pneumatic regulator 60, a load sensor 65, an imaging device 66, or the like. The cylinder mechanism 55 is operated by driving air supplied from the electro-pneumatic regulator 60. A piezoelectric element 17, which is one example of a fragile part, is absorbed to an absorption part 50 and is placed on a piezo mounting part 15 as one example of a parts mounting part. The pressure of the driving air when the piezoelectric element 17 is placed is input to a recording part 35. Additionally, the pressure load when the piezoelectric element 17 is pressed is input to the recording part 35. Furthermore, the piezoelectric element 17 is captured by the imaging device 66, and information regarding images (for example, the presence of cracks or the like) is recorded in the recording part 35.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a method and an apparatus for manufacturing a workpiece having a fragile component such as a piezoelectric element.

Background Art

[0002] A disk device is used in an information processing apparatus such as a personal computer. The disk device includes a magnetic disk that rotates around a spindle, a carriage that pivots around a pivot shaft, and the like. A suspension for a disk device is provided on an arm of the carriage. In this specification, the suspension for a disk device may be simply referred to as a suspension.

[0003] The suspension for a disk device includes a base plate, a load beam, a flexure disposed along the load beam, and the like. A slider is provided at a gimbal portion formed near the tip of the flexure. An element for accessing data recorded on the disk, such as reading and writing, is provided on the slider.

[0004] In order to cope with higher recording density of the disk, it is necessary to be able to position the magnetic head with higher precision with respect to the recording surface of the disk. For this reason, as disclosed in Patent Document 1 and Patent Document 2, a suspension equipped with a piezoelectric element as an actuator has been developed. Hereinafter, the piezoelectric element may be referred to as "piezo". The suspension for a disk device is an example of a workpiece, and the piezoelectric element is an example of a fragile component.

[0005] The piezoelectric element (piezo) used in the workpiece is disposed in the component mounting portion of the workpiece. Before fixing the piezoelectric element to the component mounting portion, an adhesive is applied to the component mounting portion. After the piezoelectric element is placed on the adhesive, the adhesive cures, and the piezoelectric element is fixed to the component mounting portion.

[0006] In order to place small electronic components on a workpiece, it is possible to use a component mounting apparatus equipped with a suction nozzle as described in, for example, Patent Document 3. However, the piezoelectric element has a thickness of, for example, several tens of μm to several hundreds of μm and is extremely brittle, so cracks may occur even when a slight external force is applied.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0008] Workpieces such as suspensions that have been completed through a series of manufacturing processes are finally inspected by an inspection process to determine whether there are any abnormalities. Various electronic components are arranged on the completed workpieces. In the inspection process, the electrical characteristics and various items of the workpieces are inspected. If an abnormality is found in the completed workpiece, in order to find the cause, the manufacturing process of the workpiece, etc. is traced. If it is found that there is a problem in the manufacturing process, processing is performed to solve the problem.

[0009] Workpieces such as suspensions are manufactured through various processes. Moreover, a large number of workpieces are manufactured. For this reason, it is not easy to identify in which manufacturing process defective workpieces occur. As a result of intensive research by the present inventors, there were quite a few cases where cracks were found in fragile components such as piezoelectric elements.

[0010] Since a piezoelectric element with a crack shows abnormalities in its electrical characteristics, it can be detected by an electrical inspection. However, even if a defective product is found during the inspection of the completed work, a large number of works will have been manufactured up to that point. For this reason, there is a possibility that a large number of defective products will occur.

[0011] Against this background, it has been required to ensure that vulnerable components such as piezoelectric elements are not damaged at a relatively early stage of the work manufacturing process. Also, in order to reduce defective products of the work as much as possible, it has been found that it is meaningful to detect the presence or absence of damage to vulnerable components at a relatively early stage of the manufacturing process and take countermeasures.

[0012] An object of the present invention is to provide a work manufacturing apparatus and a manufacturing method that can suppress the occurrence of defective products in the process of mounting vulnerable components on a work and can serve as a basis for ensuring the soundness of the vulnerable components.

Means for Solving the Problems

[0013] One embodiment is a work manufacturing apparatus including a component mounting portion where vulnerable components are arranged, and includes a cylinder mechanism, a pneumatic regulator, a suction portion, a load sensor, an imaging device, an image inspection portion, a recording portion, and the like. The cylinder mechanism is operated by driving air such as air. The pneumatic regulator supplies the driving air to the cylinder mechanism. The suction portion is provided in the cylinder mechanism and sucks the vulnerable component.

[0014] The load sensor detects the pressing load received by the vulnerable component when the suction portion presses the piezoelectric element. The imaging device photographs the vulnerable component arranged in the component mounting portion. The image inspection portion processes the image of the vulnerable component photographed by the imaging device. The recording portion records information regarding the pressure of the driving air when the vulnerable component is pushed by the suction portion, records information regarding the pressing load, and records information image-processed by the image inspection portion.

[0015] In the manufacturing apparatus of the present embodiment, information on whether or not a crack has occurred in the fragile component may be recorded in the recording unit. A display unit for displaying the information recorded in the recording unit may be further provided.

[0016] One embodiment of the method for manufacturing the workpiece is to adsorb the fragile component to the adsorption unit, and place the adsorbed fragile component on the component mounting unit by a cylinder mechanism operated by driving air from an electro-pneumatic regulator. Further, information regarding the driving air when the adsorption unit presses the fragile component disposed on the component mounting unit is recorded in the recording unit. The pressing load received by the fragile component is detected, and information regarding the pressing load is recorded in the recording unit. Further, the fragile component disposed on the component mounting unit is photographed by an imaging device, and information regarding the photographed image is recorded in the recording unit.

[0017] In the manufacturing method of the present embodiment, the pressing load may be fed back to the electro-pneumatic regulator, and the cylinder mechanism may be controlled so that the pressing load falls within a predetermined range. When a crack has occurred in the fragile component photographed by the imaging device, the pressing load at that time is fed back to the electro-pneumatic regulator, and the pressure of the driving air may be adjusted to a value at which no crack occurs. Based on the information recorded in the recording unit, it is ensured that no crack has occurred at the time when the fragile component is mounted.

Advantages of the Invention

[0018] According to the present invention, it is possible to detect the presence or absence of damage to the fragile component at the time when the fragile component is disposed on the component mounting unit of the workpiece. Further, information such as the pressure of the driving air when the fragile component is disposed and the pressing load received by the fragile component can be managed, which is effective in ensuring the soundness of the fragile component.

Brief Description of the Drawings

[0019]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0020] Hereinafter, a workpiece manufacturing apparatus and a manufacturing method according to one embodiment will be described with reference to FIGS. 1 to 6. FIG. 1 is a perspective view schematically showing a piezo mounting device 1 which is a part of a workpiece manufacturing apparatus. The piezo mounting device 1 is arranged on a piezo mounting stage 2 of a facility for manufacturing a suspension.

[0021] FIG. 2 shows an example of a workpiece to be manufactured (suspension 10 for a disk device). Hereinafter, the suspension 10 for a disk device will be simply referred to as the suspension 10. The suspension 10 shown in FIG. 2 includes a base portion 12 including a base plate 11, a load beam 13 made of a stainless steel plate, a flexure 14, and a piezo mounting portion 15 as a component mounting portion. The piezo mounting portion 15 includes a first mounting portion 15a and a second mounting portion 15b. Piezoelectric elements 17 as fragile components are arranged on these mounting portions 15a and 15b, respectively. In this specification, a piezoelectric element (Piezoelectric Element) may be referred to as a piezo (Piezo). Note that the fragile component may be other than a piezoelectric element.

[0022] The direction indicated by X1 in FIG. 2 is, for convenience, referred to as the longitudinal direction of the suspension 10, and the direction indicated by Y1 is referred to as the width direction. The flexure 14 extends along the load beam 13 in the longitudinal direction of the suspension 10. A slider 18 that functions as a magnetic head is disposed on a gimbal portion formed near the tip of the flexure 14.

[0023] An example of the piezo mounting portion 15 is shown in FIG. 5. A piezoelectric element 17 is disposed on the piezo mounting portion 15. The piezoelectric element 17 has a piezoelectric body 20 made of a piezoelectric material, a first electrode 21 provided on one surface of the piezoelectric body 20, and a second electrode 22 provided on the other surface of the piezoelectric body 20. The piezoelectric body 20 is made of a piezoelectric material (for example, lead zirconate titanate) having a piezoelectric effect and an inverse piezoelectric effect.

[0024] As shown in FIG. 5, the piezoelectric element 17 is fixed to the support portion 25 of the piezo mounting portion 15 by an electrically insulating adhesive 26. The piezoelectric element 17 has a function of slightly moving the tip side of the suspension 10 in the width direction. That is, when a voltage is applied to the piezoelectric body 20, the piezoelectric body 20 expands and contracts according to the voltage, and the tip side of the suspension 10 moves.

[0025] The piezo mounting device 1 shown in FIG. 1 has a function of mounting the piezoelectric element 17 on the piezo mounting portion 15 of the suspension 10. In this specification, a workpiece during manufacturing before the suspension 10 is completed is referred to as an intermediate product W. The piezo mounting device 1 is disposed on a piezo mounting stage 2.

[0026] As shown in FIG. 1, the piezo mounting device 1 includes a transport mechanism 30 that moves the workpiece, a piezo supply mechanism 31 that supplies the piezoelectric element 17 to the piezo mounting portion 15, a control unit 33, a recording unit 35 having a memory for storing data, a display unit 36, and the like. These control unit 33, recording unit 35, display unit 36, etc. may be included in an information processing device 37 such as a personal computer. The recording unit 35 may be a database other than the information processing device 37.

[0027] The conveying mechanism 30 has a work support 40 on which a plurality of intermediate products W are arranged, and a drive unit 42 that moves the work support 40 along a guide member 41. The plurality of intermediate products W are connected to each other by a frame W1 to form a sheet-like chain product W2 (chain sheet). The chain product W2 arranged on the work support 40 is conveyed in the direction indicated by the arrow M1 in FIG. 1 by the drive unit 42.

[0028] The piezo supply mechanism 31 has a suction portion 50 and a negative pressure generation source 51 that generates a negative pressure in the suction portion 50. The suction portion 50 sucks air from a suction hole 50a (shown in FIG. 5) to adsorb and hold the piezoelectric element 17. Further, the piezo supply mechanism 31 has a cylinder mechanism 55 that mainly moves the suction portion 50 in the vertical direction, a moving mechanism 56 that moves the cylinder mechanism 55, and an electro pneumatic regulator 60.

[0029] A gas supply source 61 is connected to the electro pneumatic regulator 60. The gas supply source 61 supplies a pressurized gas (for example, air) to the electro pneumatic regulator 60. The electro pneumatic regulator 60 controls the pressure of the gas supplied from the gas supply source 61 and supplies the controlled gas (referred to as drive air in this specification) to the cylinder mechanism 55. Although air is generally used as the drive air, a gas other than air, for example, a chemically inert gas, may be used.

[0030] An example of the electro pneumatic regulator 60 has an intake solenoid valve, an exhaust solenoid valve, a pressure sensor, etc. that are electrically controlled by a control unit 33. When placing the piezoelectric element 17 on the piezo mounting portion 15, information regarding the pressure of the drive air monitored by the pressure sensor is recorded in a recording unit 35.

[0031] The cylinder mechanism 55 has a cylinder body 55a to which driving air is supplied, and a rod portion 55b extending downward from the cylinder body 55a. The rod portion 55b operates according to the pressure of the driving air supplied to the cylinder body 55a. For this reason, the suction portion 50 moves in the vertical direction by the cylinder mechanism 55 that operates by the driving air.

[0032] When the piezoelectric element 17 is arranged on the piezo mounting portion 15, driving air is supplied from the pneumatic regulator 60 to the cylinder mechanism 55. Thereby, the piezoelectric element 17 can be pushed against the support portion 25 of the piezo mounting portion 15 with a minute load (pressing load). An example of the cylinder mechanism 55 is a pneumatic air cylinder capable of controlling a minute pressing load. The piezoelectric element 17 arranged on the piezo mounting portion 15 is pushed with a minute load by the suction portion 50 that operates according to the driving air.

[0033] As shown in FIGS. 1 and 5, a load sensor 65 such as a load cell is provided on the work support 40. Note that the load sensor 65 may be provided on the cylinder mechanism 55. The load sensor 65 detects the load (pressing load) received by the piezoelectric element 17 when the piezoelectric element 17 arranged on the piezo mounting portion 15 is pushed by the suction portion 50. Information regarding this pressing load is stored in the recording unit 35. Preferably, the pressing load detected by the load sensor 65 is fed back to the pneumatic regulator 60, and the cylinder mechanism 55 is controlled so that the suction portion 50 pushes the piezoelectric element 17 within a predetermined pressing load range.

[0034] As shown in FIG. 1, an imaging device 66 is arranged on the piezo mounting stage 2. The imaging device 66 is arranged on the downstream side in the moving direction of the work with respect to the piezo supply mechanism 31. An example of the imaging device 66 is a camera using a solid-state imaging device (CCD), and images the piezoelectric element 17 arranged on the piezo mounting portion 15. The image captured by the imaging device 66 is processed in the image inspection unit 66a.

[0035] The image inspection unit 66a processes the image of the piezoelectric element 17 based on a predetermined algorithm and outputs information regarding the image to the recording unit 35. For example, information such as whether there is damage such as a crack in the piezoelectric element 17 is recorded in the recording unit 35. The information recorded in the recording unit 35 may be displayed on the display unit 36. When damage such as a crack is detected, the pressing load at the time when the piezoelectric element 17 is mounted may be fed back to the pneumatic regulator 60, and measures such as reducing the pressure of the driving air may be taken.

[0036] Figures 3 and 4 show a piezo assembly 70 composed of a plurality of piezoelectric elements 17 before being mounted on the intermediate product W. A sheet member 72 is provided inside the ring frame 71, and the piezo assembly 70 is disposed on the sheet member 72. The ring frame 71, the sheet member 72, and the piezo assembly 70 are provided in the piezo standby stage 73.

[0037] As shown in FIG. 3, the suction unit 50 descends toward the piezo assembly 70, approaches a specific piezoelectric element 17 to be suctioned, and stops. At this time, air is being sucked in from the suction holes 50a of the suction unit 50. In this state, from below the sheet member 72, the piezoelectric element 17 to be suctioned is slightly lifted by the pushing member. By doing so, the desired piezoelectric element 17 is suctioned to the suction unit 50.

[0038] As shown in FIG. 4, with the piezoelectric element 17 suctioned to the suction unit 50, the cylinder mechanism 55 rises, so that the suction unit 50 and the piezoelectric element 17 rise. Then, as shown in FIG. 1, the suction unit 50 and the piezoelectric element 17 move directly above the piezo mounting portion 15. In this state, the suction unit 50 moves downward by the driving air supplied from the pneumatic regulator 60, so that the piezoelectric element 17 is disposed on the piezo mounting portion 15.

[0039] Before the piezoelectric element 17 is placed on the piezo mounting portion 15, a liquid adhesive 26 (shown in FIG. 5) before curing is applied to the piezo mounting portion 15. The piezoelectric element 17 adsorbed by the adsorption portion 50 is placed on the uncured adhesive 26. Thereafter, the adsorption portion 50 moves slightly downward by the driving air supplied from the pneumatic regulator 60 to the cylinder mechanism 55. As a result, the piezoelectric element 17 is pushed toward the uncured adhesive 26. Since the piezoelectric element 17 is adsorbed by the adsorption portion 50, it is avoided that the piezoelectric element 17 moves in an unspecified direction on the uncured adhesive 26.

[0040] The pressure of the driving air supplied from the pneumatic regulator 60 to the cylinder mechanism 55 is constantly monitored. Information regarding the driving air when the piezoelectric element 17 is placed on the piezo mounting portion 15 and the piezoelectric element 17 is pushed by the adsorption portion 50 is recorded in the recording unit 35. Further, the pressing load received by the piezoelectric element 17 when the adsorption portion 50 presses the piezoelectric element 17 is detected by the load sensor 65. Information regarding this pressing load is recorded in the recording unit 35.

[0041] FIG. 6 is a flowchart showing a part of the suspension manufacturing process. A series of processes ST1 to ST8 described below are performed in a state where a plurality of intermediate products W are connected to the frame W1 (the state of the chained product W2 shown in FIG. 1). In the adhesive application step ST1 shown in FIG. 6, an uncured adhesive 26 (shown in FIG. 5) is applied to the piezo mounting portion 15. The adhesive 26 is applied to the piezo mounting portion 15 by a dispenser.

[0042] In the step ST2 of mounting the piezo, the piezoelectric element 17 is placed on the piezo mounting portion 15. For example, as shown in FIG. 3, the adsorption portion 50 descends toward the piezo assembly 70, and the piezoelectric element 17 is adsorbed by the adsorption portion 50. As shown in FIG. 4, after the piezoelectric element 17 adsorbed by the adsorption portion 50 rises, as shown in FIG. 1, the piezoelectric element 17 adsorbed by the adsorption portion 50 moves directly above the piezo mounting portion 15.

[0043] As shown in FIG. 5, in a state where the piezoelectric element 17 is disposed on the adhesive 26, driving air is supplied from the pneumatic regulator 60 to the cylinder mechanism 55. As a result, the piezoelectric element 17 is slightly pushed by the suction portion 50. Information regarding the pressure of the driving air at this time is recorded in the recording unit 35. Further, the pressing load when the piezoelectric element 17 is pushed is detected by the load sensor 65, and information regarding the pressing load is recorded in the recording unit 35. After the piezoelectric element 17 is disposed on the piezo mounting portion 15, the negative pressure of the suction portion 50 is released and the suction portion 50 rises.

[0044] In the imaging step ST3 of FIG. 6, the piezoelectric element 17 disposed on the piezo mounting portion 15 is photographed by the imaging device 66. The photographed image is analyzed by the image inspection unit 66a, and it is determined based on the image whether damage such as a crack has occurred in the piezoelectric element 17 and other inspection items. In the step ST4 of recording the result of the image processing, the result of the image processing is recorded in the recording unit 35. By analyzing the degree of cracking and the position of the crack of the crack, the cause of the crack can be known to some extent. For example, it is determined that there is a problem with the pressing load of the cylinder mechanism 55, or the relative position between the piezoelectric element 17 and the suction portion 50 is poor.

[0045] In the step ST5 of applying an additional adhesive, an additional adhesive is supplied around the piezoelectric element 17 or the like as necessary. In the step ST6 of curing the adhesive, the adhesive 26 is cured. For example, when the adhesive 26 is of the thermosetting type, the adhesive is heated and cured in a high-temperature atmosphere. When the adhesive is of the ultraviolet-curing type, the adhesive is irradiated with ultraviolet rays.

[0046] In the step ST7 of bending the suspension 10 (so-called load bending), the vicinity of the base portion 12 of the suspension 10 is bent in the thickness direction. By performing this load bending, the degree of deflection and the spring load of the suspension 10 with respect to the disk can be optimized.

[0047] In the inspection process ST8 of FIG. 6, the suspension 10 is inspected. In this inspection process ST8, for example, the electrical characteristics of the suspension 10 and the shape of the suspension 10 are carefully examined. In the inspection process ST8, by measuring the electrical characteristics of the piezoelectric element 17, it is possible to detect damage (such as cracks) in the piezoelectric element 17.

[0048] However, the completed suspension 10 has been manufactured through many manufacturing processes. Therefore, even if damage to the piezoelectric element 17 is detected in the inspection process ST8, a large number of suspensions 10 have been manufactured up to that point. Moreover, it requires a considerable amount of effort to identify the cause of the breakage by tracing back the manufacturing process. Also, even if measures are taken after the damage to the piezoelectric element is detected, there may be a large number of defective products up to that point.

[0049] On the other hand, according to the workpiece manufacturing apparatus and manufacturing method of the present embodiment, the situation of the piezoelectric element immediately after being placed on the piezo mounting portion is recorded in the recording unit 35. Therefore, it is possible to detect at an early stage of the manufacturing stage of the suspension that the mounted piezoelectric element is damaged. Also, since the drive air supplied from the pneumatic regulator 60 is monitored, it is possible to confirm that the pressure of the drive air is not outside the predetermined range, and it can be proved that there is no problem with the pressure setting of the drive air.

[0050] Although problems may occur in the cylinder mechanism 55 and the pneumatic regulator 60, it is also possible to analyze such problems based on the information recorded in the recording unit 35. Moreover, the information recorded in the recording unit 35 can be used as a basis for guaranteeing the normality of the piezoelectric element 17 at the time when it is placed on the piezo mounting portion.

[0051] In the inspection process ST8 of FIG. 6, the suspension 10 determined to be qualified is separated from the frame W2 (shown in FIG. 1) in the process ST9 of separating the frame, and becomes individual products.

[0052] In practicing the present invention, it goes without saying that various changes can be made to the specific forms of each element constituting the workpiece manufacturing apparatus, including the specific forms of the vulnerable parts and component mounting parts as workpieces. Further, it is also possible to apply the technical idea of the present invention to workpieces other than suspensions and workpieces having vulnerable parts other than piezoelectric elements.

Explanation of Signs

[0053] 1…Piezoelectric mounting device, 10…Suspension (an example of a workpiece), 13…Load beam, 14…Flexure, 15…Piezoelectric mounting part (an example of a component mounting part), 17…Piezoelectric element (an example of a vulnerable part), 26…Adhesive, 31…Piezoelectric supply mechanism, 33…Control unit, 35…Recording unit, 36…Display unit, 40…Workpiece support, 50…Suction part, 51…Negative pressure generation source, 55…Cylinder mechanism, 60…Pneumatic regulator, 61…Gas supply source, 65…Load sensor, 66…Imaging device, 66a…Image inspection part, W…Intermediate product (workpiece before completion).

Claims

1. A manufacturing apparatus for a workpiece provided with a component mounting portion on which a fragile component is disposed, a cylinder mechanism actuated by driving air; a pneumatic regulator for supplying the driving air to the cylinder mechanism; a suction portion provided on the cylinder mechanism for sucking the fragile component; a load sensor for detecting the pressing load received by the fragile component when the fragile component is pushed by the suction portion; an imaging device for imaging the fragile component disposed on the component mounting portion; an image inspection unit for processing an image of the fragile component captured by the imaging device; a recording unit for recording information regarding the pressure of the driving air when the fragile component is pushed by the suction portion, recording information regarding the pressing load, and recording information image-processed by the image inspection unit; A manufacturing apparatus for a workpiece, comprising the above.

2. In the manufacturing apparatus according to Claim 1, A manufacturing apparatus in which information on whether or not a crack has occurred in the fragile component is recorded in the recording unit.

3. In the manufacturing apparatus according to Claim 1, A manufacturing apparatus further comprising a display unit for displaying the information recorded in the recording unit.

4. A manufacturing method for a workpiece provided with a component mounting portion on which a fragile component is disposed, sucking the fragile component by a suction portion; disposing the sucked fragile component on the component mounting portion by a cylinder mechanism actuated by driving air from a pneumatic regulator; recording, in a recording unit, information regarding the driving air when the suction portion pushes the fragile component disposed on the component mounting portion; detecting the pressing load received by the fragile component; recording information regarding the pressing load in the recording unit; The fragile component arranged on the component mounting part is photographed by an imaging device, and information regarding the photographed image is recorded in the recording part. A method for manufacturing a workpiece, characterized by the above.

5. In the manufacturing method according to claim 4, a manufacturing method in which the pressing load is fed back to the pneumatic regulator and the cylinder mechanism is controlled so that the pressing load falls within a predetermined range.

6. In the manufacturing method according to claim 4, when a crack has occurred in the fragile component photographed by the imaging device, the pressing load at that time is fed back to the pneumatic regulator, and the pressure of the driving air is adjusted to a value at which no crack occurs.

7. In the manufacturing method according to claim 4, a manufacturing method in which, based on the information recorded in the recording part, it is guaranteed that no crack has occurred at the time when the fragile component is mounted.

Images