Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can prevent the generation of sheet peeling failure.SOLUTION: A sheet peeling device EA includes pasting means 10 for pasting a removable adhesive member PS on an adhesive sheet AS pasted on an outer surface WKC of adherend WK, and peeling means 20 that applies tension to the removable adhesive member PS pasted on the adhesive sheet AS and peels the adhesive sheet AS from the adherend WK along a prescribed peeling progression direction PD. The adhesive sheet AS is also pasted on surfaces WK1, WK2 of the adherend WK crossing the peeling progression direction PD in a folded state. The pasting means 10 also pasts the removable adhesive member PS on potions of the adhesive sheet AS pasted on the surfaces WK1, WK2 after pasting the removable adhesive member PS on a potion of the adhesive sheet AS pasted on an outer surface WK3 of the adherend WK.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] A sheet peeling device for peeling an adhesive sheet from an adherend is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the sheet peeling device 10 (sheet peeling device) described in Patent Document 1, when the adhesive sheet S (adhesive sheet) to be peeled is bent and attached not only to the outer peripheral portion 32 (outer peripheral surface) of the semiconductor wafer 30 (adherend) but also to the central portion 31 (other surface), for example, like the second film 22 (adhesive sheet) of Patent Document 2, even if the peeling sheet PS (peeling adhesive member) is attached with the pressing head 34 (pressing means), the peeling adhesive member is adhered only to a part of the adhesive sheet, and the adhesion area of the peeling adhesive member to the adhesive sheet is insufficient, resulting in a sheet peeling failure in which the peeling adhesive member peels off from the adhesive sheet when peeling the adhesive sheet from the adherend.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of preventing the occurrence of sheet peeling failure.

Means for Solving the Problems

[0006] The present invention adopts the configuration described in the claims.

Effect of the Invention

[0007] According to the present invention, after attaching the peeling adhesive member to the adhesive sheet portion attached to the outer peripheral surface of the adherend, the peeling adhesive member is also attached to the adhesive sheet portion attached to the other surface. Therefore, the adhesion area of the peeling adhesive member to the adhesive sheet is sufficient, and it is possible to prevent the occurrence of poor sheet peeling.

Brief Description of the Drawings

[0008]

Figure 1

Mode for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Further, in this embodiment, when viewed from the direction of arrow VD parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the direction of the arrow of the Z-axis, "down" is the opposite direction, "left" is the direction of the arrow of the X-axis, "right" is the opposite direction, "front" is the direction of the arrow of the Y-axis, and "rear" is the opposite direction.

[0010] The sheet peeling device EA for implementing the sheet peeling method of the present invention includes an attaching means 10 that performs an attaching step of attaching a peeling sheet PS as a peeling adhesive member to an adhesive sheet AS attached to the outer peripheral surface WKE of an adherend WK, a peeling means 20 that applies tension to the peeling sheet PS attached to the adhesive sheet AS and peels the adhesive sheet AS from the adherend WK along a predetermined peeling progress direction PD (see FIG. 1(F)), and an energy applying means 30 (see FIG. 1(D)) that performs an energy applying step of applying heat as a predetermined energy to the peeling sheet PS. In the present embodiment, the adherend WK has a circular shape centered on the adherend center WKC. Further, as shown in FIG. 1(D), the adhesive sheet AS is also bent and attached to one surface WK1 and the other surface WK2, which are the other surfaces of the adherend WK located in a direction intersecting the peeling progress direction PD.

[0011] The attaching means 10 includes a support member 11 that directly or indirectly supports each member constituting the attaching means 10, a support roller 12 that supports a strip-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a sheet support base 14 that is supported by a slide shaft 14B slidable in a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, a first attaching member 15 that performs a first attaching step of attaching the peeling sheet PS to the adhesive sheet AS portion attached to the outer peripheral surface WKE, a second attaching member 16 that performs a second attaching step of attaching the peeling sheet PS to the adhesive sheet AS portions attached to one surface WK1 and the other surface WK2, a cutter blade 17 as a cutting means supported by an output shaft 17B of a linear motor 17A as a driving device, a receiving member 18 supported by a slider 18B of a linear motor 18A as a driving device, and a pressing member 19 attached to an output shaft 19B of a rotation motor 19A as a driving device supported by the receiving member 18. After attaching the peeling sheet PS to the adhesive sheet AS portion attached to the outer peripheral surface WKE, the peeling sheet PS is also attached to the adhesive sheet AS portions attached to one surface WK1 and the other surface WK2. The first attachment member 15 includes a linear motor 15A as a driving device, a base 15C supported by the output shaft 15B of the linear motor 15A, and a first plate 15F as a pressing member for the outer peripheral surface, which is supported by a slide shaft 15D (see Fig. 1(D)) slidable with respect to the base 15C and is biased in a direction away from the base 15C by a coil spring 15E as biasing means. The second attachment member 16 includes the linear motor 15A shared with the first attachment member 15, the base 15C, and a second plate 16C as a pressing member for the other surface, which is supported by a slide shaft 16A (see Fig. 1(D)) slidable with respect to the base 15C and is biased in a direction approaching the first plate 15F by a coil spring 16B as biasing means. Note that the peeling sheet PS of the present embodiment employs a heat-sensitive adhesive sheet whose adhesive force is improved by applying heat as a predetermined energy.

[0012] The peeling means 20 includes a linear motor 21 as a driving device, a rotating motor 22 as a driving device supported by a slider 21A of the linear motor 21, a support table 23 having a support surface 23A that can be suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown) supported by an output shaft 22A of the rotating motor 22, an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and an edge detector 24 capable of detecting a peeling start edge AS1 of the adhesive sheet AS. Note that the support table 23 of the present embodiment is configured to rotate about a table center 23C by the rotating motor 22.

[0013] The energy applying means 30 includes heating devices 31 (see Fig. 1(D)) such as coil heaters or heating sides of heat pipes provided inside the first plate 15F and each second plate 16C.

[0014] The operation of the above sheet peeling device EA will be described. First, for the sheet peeling device EA in which each member is arranged at the initial position indicated by the solid line in FIG. 1(A), a user of the sheet peeling device EA (hereinafter simply referred to as the "user") inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK with the adhesive sheet AS attached to the outer peripheral surface WKE on the support table 23 so that the adherend center WKC overlaps with the table center 23C as shown in FIG. 1(A). Then, the peeling means 20 drives a decompression means (not shown) and starts suction holding on the support surface 23A.

[0015] Thereafter, the peeling means 20 drives the rotation motor 22 and the edge detector mechanism 24, and rotates the adherend WK in the direction of arrow RD as shown in FIG. 1(B) to detect the peeling start edge AS1 of the adhesive sheet AS with the edge detector mechanism 24. Based on the detection result of the edge detector mechanism 24, the drive of the rotation motor 22 is stopped with the rear part in the rotation direction of the peeling start edge AS1 arranged to the right of the first and second plates 15F and 16C (see the AA view in FIG. 1(C)). Next, the pasting means 10 drives the linear motor 18A, and as shown in FIG. 1(B), presses the receiving member 18 against the sheet support base 14 and moves the sheet support base 14 backward together with the receiving member 18 to position the tip of the peeling sheet PS on the receiving member 18. Then, the pasting means 10 drives the rotation motor 19A, and as shown by the two-dot chain line in FIG. 1(B), after gripping the tip of the peeling sheet PS with the pressing member 19 and the receiving member 18, the linear motor 18A is driven, and as shown in FIG. 1(C), the receiving member 18 is returned to the initial position to pull out the peeling sheet PS by a predetermined length.

[0016] Next, the attaching means 10 drives the linear motor 15A to move the base 15C to the right. As shown in FIG. 1(D), first, the peeling sheet PS is attached to the portion of the adhesive sheet AS attached to the outer peripheral surface WKE with the first plate 15F. Then, when the movement of the base 15C to the right continues, as shown in FIG. 1(E), the coil springs 15E and 16B are compressed, and the peeling sheet PS is attached to the portions of the adhesive sheet AS attached to one surface WK1 and the other surface WK2 by the second plate 16C. After that, when the peeling sheet PS is attached to the portions of the adhesive sheet AS attached to one surface WK1 and the other surface WK2, after the attaching means 10 stops driving the linear motor 15A, the energy applying means 30 drives the heating device 31 to heat the peeling sheet PS through the first plate 15F and the second plate 16C to improve the adhesive force of the peeling sheet PS. Next, the attaching means 10 drives the linear motor 17A. As shown by the two-dot chain line in FIG. 1(C), after the cutter blade 17 is inserted into the concave groove 14D to cut the peeling sheet PS, the linear motors 15A and 17A are driven to return the base 15C and the cutter blade 17 to their initial positions.

[0017] Then, the peeling means 20 drives the linear motor 21 and the rotation motor 22, and as shown in FIG. 1(F), while rotating the adherend WK in the direction of arrow RD, the adherend WK is moved to the right. As a result, tension is applied to the adhesive sheet AS via the peeling sheet PS, and the adhesive sheet AS is peeled off from the adherend WK. Next, as shown by the two-dot chain line in FIG. 1(F), when the entire adhesive sheet AS is peeled off from the adherend WK and the user or a conveying means (not shown) holds the adhesive sheet AS, the peeling means 20 stops driving the linear motor 21 and the rotation motor 22. Thereafter, when the sticking means 10 drives the rotation motor 19A to return the pressing member 19 to the initial position, the user or a conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Next, when the peeling means 20 stops driving a decompression means (not shown) and releases the suction holding on the support surface 23A, after the user or a conveying means (not shown) conveys the adherend WK to the next process, the peeling means 20 drives the linear motor 21 and the rotation motor 22 to return the support table 23 to the initial position, and thereafter the same operations as described above are repeated.

[0018] According to the above-described embodiment, after the peeling sheet PS is attached to the portion of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK, the peeling sheet PS is also attached to the portions of the adhesive sheet AS attached to one surface WK1 and the other surface WK2. Therefore, the adhesion area of the peeling sheet PS to the adhesive sheet AS is sufficient, and it is possible to prevent the occurrence of poor sheet peeling.

[0019] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps. Moreover, they are not limited at all to the components and steps of merely one embodiment shown in the above-described embodiment. For example, the peeling means may be any means as long as it can apply tension to the peeling adhesive member attached to the adhesive sheet and peel the adhesive sheet from the adherend along a predetermined peeling progress direction, and is not limited as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0020] After peeling the adhesive sheet AS from the adherend WK, the peeling means 10 may cut the peeling sheet PS, or may cut the peeling sheet PS before attaching the peeling sheet PS to the adherend WK, or may employ a single-sheet peeling sheet PS, or may not cut the peeling sheet PS. The linear motion motor 15A, the base 15C, etc. may not be shared by the first attaching member 15 and the second attaching member 16, or the cutting means 17 may not be provided. Instead of or in combination with the receiving member 18, the rotation motor 19A, and the pressing member 19, a configuration for holding the peeling sheet PS by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. may be adopted. For example, the peeling sheet PS may be attached to the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK by a driving device such as an articulated robot. The peeling sheet PS may be attached to the front portion in the rotational direction of the peeling start edge AS1. Depending on where the peeling start edge AS1 is located, the position where the peeling sheet PS is attached can be determined, and the direction in which the peeling means 20 rotates the adherend WK can be determined.

[0021] The attaching means 10 may include a first attaching member 1A and a second attaching member 1B as shown in FIG. 1(G). Such a first attaching member 1A includes a linear motion motor 1A1 as a driving device and a first pad 1A3 as an outer peripheral surface pressing member supported by the output shaft 1A2 of the linear motion motor 1A1. The second attaching member 1B includes a linear motion motor 1B1 as a driving device and a second pad 1B3 as another surface pressing member supported by the output shaft 1B2 of the linear motion motor 1B1, and is provided on both the upper and lower sides of the first attaching member 1A. The first pad 1A3 and the second pad 1B3 incorporate a heating device 31. In this case, the pasting means 10 drives the linear motor 1A1. First, as shown by the dashed-dotted line in Fig. 1(G), the peeling sheet PS is pasted on the adhesive sheet AS portion attached to the outer peripheral surface WKE with the first pad 1A3. Next, the pasting means 10 drives each linear motor 1B1. As shown by the dashed-dotted line in Fig. 1(G), the peeling sheet PS is pasted on the adhesive sheet AS portions attached to one surface WK1 and the other surface WK2 with the second pad 1B3. Then, the energy applying means 30 drives the heating device 31 to heat the peeling sheet PS via the first pad 1A3 and the second pad 1B3, and improve the adhesive force of the peeling sheet PS. Even with the pasting means 10 shown in Fig. 1(G) like this, the same effects as those of the above-described embodiment can be achieved.

[0022] The pasting means 10 may include a first pasting member 1C and a second pasting member 1D as shown in Fig. 1(H). Such a first pasting member 1C includes a linear motor 1C1 as a driver and a pressing jig 1C3 as an outer peripheral surface pressing member supported by the output shaft 1C2 of the linear motor 1C1. The second pasting member 1D includes a pressurizing means 1D1 such as a pressurizing pump or a turbine, and a nozzle 1D2 having an air outlet (not shown) for blowing out a gas AR as another surface pressing member, such as air or a mixed gas, which is supported above and below the pressing jig 1C3 and sent from the pressurizing means 1D1. The heating device 31 is built into the pressing jig 1C3 and the nozzle 1D2. In this case, the pasting means 10 drives the linear motor 1C1. First, as shown by the dashed-dotted line in Fig. 1(H), the peeling sheet PS is pasted on the adhesive sheet AS portion attached to the outer peripheral surface WKE with the pressing jig 1C3. Next, the pasting means 10 drives the pressurizing means 1D1 to blow out the gas AR from each nozzle 1D2, and paste the peeling sheet PS on the adhesive sheet AS portions attached to one surface WK1 and the other surface WK2. Then, the energy applying means 30 drives the heating device 31 to heat the peeling sheet PS via the pressing jig 1C3 and the gas AR, and improve the adhesive force of the peeling sheet PS. Even with the pasting means 10 shown in FIG. 1(H) like this, the same effects as those of the above-described embodiment can be achieved.

[0023] The pasting means 10 may include a first pasting member 1E and a second pasting member 1F as shown in FIG. 1(I). Such a first pasting member 1E includes a linear motor 1E1 as a driver, a base 1E3 supported on the output shaft 1E2 of the linear motor 1E1, and two sliding shafts 1E4 slidable on the base 1E3, each rotatably supported by a coil spring 1E5 as a biasing means and biased in a direction of pressing against each other. The first pasting member 1E also includes two pressing rollers 1E6 as outer peripheral surface pressing members. Further, the second pasting member 1F is configured to also serve as the first pasting member 1E, and the two pressing rollers 1E6 function as pressing members for other surfaces. Each pressing roller 1E6 has a built-in heating device 31. In this case, the energy applying means 30 drives the heating device 31 to heat the pressing roller 1E6. Then, the pasting means 10 drives the linear motor 1E1, and as shown by the two-dot chain line in FIG. 1(I), first, the peeling sheet PS is pasted on the adhesive sheet AS portion adhered to the outer peripheral surface WKE with the pressing roller 1E6. Thereafter, the pasting means 10 drives the linear motor 1E1, and as shown by the two-dot chain line in FIG. 1(I), the peeling sheet PS is pasted on the adhesive sheet AS portions adhered to one surface WK1 and the other surface WK2 with the pressing roller 1E6. Even with the pasting means 10 shown in FIG. 1(I) like this, the same effects as those of the above-described embodiment can be achieved.

[0024] As the peeling means 20, a support table 23 that cannot be adsorbed and held on the support surface 23A may be adopted, or the adherend WK may be held by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. There may be an upper pressing member that sandwiches and holds the adherend WK with the support table 23. The edge detector 24 may be eliminated, and for example, the adherend WK with the adhesive sheet AS attached may be placed on the support table 23 so that the peeling start edge AS1 is at a predetermined position. In the embodiment, while keeping the pasting means 10 stationary, the adherend WK is moved away from the pasting means 10 and rotated about the center of the adherend WKC, so that the adhesive sheet AS is peeled from the adherend WK. However, while moving the pasting means 10 away from the adherend WK, the adherend WK may also be moved away from the pasting means 10 and rotated about the center of the adherend WKC, so that the adhesive sheet AS is peeled from the adherend WK. While revolving the pasting means 10 around the adherend WK, the adherend WK may be moved away from the pasting means 10 and rotated about the center of the adherend WKC, so that the adhesive sheet AS is peeled from the adherend WK. While moving the pasting means 10 away from the adherend WK and revolving the pasting means 10 around the adherend WK, the adherend WK may also be moved away from the pasting means 10, and further, the adherend WK may be rotated about the center of the adherend WKC, so that the adhesive sheet AS is peeled from the adherend WK. While keeping the adherend WK stationary, the pasting means 10 may be moved away from the adherend WK and revolved around the adherend WK, so that the adhesive sheet AS is peeled from the adherend WK. While moving the adherend WK away from the pasting means 10, the pasting means 10 may be moved away from the adherend WK and revolved around the adherend WK, so that the adhesive sheet AS is peeled from the adherend WK. While rotating the adherend WK about the center of the adherend WKC,The attaching means 10 may be moved away from the adherend WK and revolved around the adherend WK to peel the adhesive sheet AS from the adherend WK. Instead of or in combination with the linear motor 21, the rotary motor 22, and the support table 23, a driving device such as an articulated robot or other devices may be employed to move the attaching means 10 away from the adherend WK or revolve the attaching means 10 around the adherend WK, or to move the adherend WK away from the attaching means 10 or rotate the adherend WK about the adherend center WKC to peel the adhesive sheet AS from the adherend WK.

[0025] The energy applying means 30 may apply any predetermined energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air. Any energy may be applied as long as it can improve the adhesive strength of the peeling adhesive member in consideration of the characteristics, properties, nature, material, composition, and configuration of the peeling adhesive member. It may be provided at a location other than the location shown in the above embodiment, and may be provided anywhere as long as it can apply a predetermined energy to the peeling adhesive member. It may or may not be provided in the sheet peeling device EA of the present invention.

[0026] Next, the adhesive sheet AS may be bent only on one surface WK1, which is the other surface of the adherend WK located in a direction intersecting the peeling progress direction PD, and adhered to the outer peripheral surface WKE of the adherend WK, or may be bent only on the other surface WK2, which is the other surface of the adherend WK located in a direction intersecting the peeling progress direction PD, and adhered to the outer peripheral surface WKE of the adherend WK. Alternatively, it may be adhered to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WKE overlap, or adhered to the adherend WK such that one edge and the other edge are in contact, or adhered to the adherend WK such that one edge and the other edge are separated. The planar shape may be any shape such as a straight shape, a curved shape, or a bent shape. It may also be one in which the adhesive force decreases by a predetermined second energy. Such an adhesive sheet AS may be, for example, one in which the adhesive force decreases by any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air. In this case, as the second energy applying means for applying a predetermined second energy to the adhesive sheet AS, for example, any means such as one that applies electromagnetic waves, one that applies a heating media, or one that applies a cooling media may be adopted. Any second energy that can decrease the adhesive force of the adhesive sheet AS may be applied as long as it is considered in view of the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS. The surface shape of the adhesive sheet AS adhered to the outer peripheral surface WKE of the adherend WK may be the same as or different from the shape of the outer peripheral surface WKE of the adherend WK.

[0027] The adhesive member for peeling may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet. In addition to the adhesive sheet, for example, in addition to adhesive tapes, adhesive sheets, and adhesive tapes, those in which an adhesive medium such as an adhesive or an adhesive is laminated on a base material such as metal, resin, or rubber may also be used. As a predetermined energy, any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air may be applied to improve the adhesive force, or those in which the adhesive force is not improved by a predetermined energy may also be used.

[0028] The next process may be any process such as a plating process, a cleaning process, an etching process, an immersion process, a cutting process, an oxide film forming process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a coating process, a lamination process, a sheet adhesion process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc.

[0029] In the present invention, the materials, types, shapes, etc. of the adhesive sheet AS, the peeling adhesive member, and the adherend WK are not particularly limited. For example, the adhesive sheet AS, the peeling adhesive member, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. The adhesive sheet AS and the peeling adhesive member may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet AS or peeling adhesive member is adopted, it may be adhered by an appropriate method such as providing heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the adhesive sheet AS or the peeling adhesive member. Further, such an adhesive sheet AS or peeling adhesive member may be, for example, a single-layer one having only an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, the intermediate layer, or the cover layer is detachably provided, a single-sided adhesive sheet composed only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or a composite formed of two or more of them, and can also target any form of member or article. Note that the adhesive sheet AS may be, for example, any sheet, film, tape, etc. such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet.

[0030] The drive device in the above-described embodiment may employ, individually, electric devices such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a so-called multi-joint robot having two or more joints of three axes or more, actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, or may employ those in which these electric devices and actuators are directly or indirectly combined, or may employ those capable or incapable of torque control, speed control, etc. for the output portions of these electric devices and actuators.

[0031] In the above embodiment, some object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, the relatively moving object A and object B, may be such that object B moves relative to object A which does not move, or object A moves relative to object B which does not move, or both object A and object B may move. As long as the results achieved by the movement are the same, either object A or object B may move. When a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided. The surface of the rotating member or the rotating member itself may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be adopted. When a pressing means or pressing member for pressing an object to be pressed, such as a pressing roller, pressing head, first and second plates 15F, 16C, first and second pads 1A3, 1B3, etc., is adopted, in addition to or in combination with those exemplified above, in addition to a roller, round bar, blade material, brush-shaped member, a means by blowing a gas such as air or gas may be adopted. The pressing member may be composed of a deformable member such as rubber, resin, or sponge, or may be composed of a member that does not deform. When a peeling means or peeling member for peeling an object to be peeled, such as a peeling plate or peeling roller, is adopted, in addition to or in combination with those exemplified above, members such as a plate-shaped member, round bar, or roller may be adopted. The peeling member may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. When a supporting (holding) means or supporting (holding) member for supporting (holding) a supported member (held member) is adopted, a gripping means such as a chuck motor or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a configuration for supporting (holding) the supported member by a driving device, etc., may be adopted. When a cutting means or cutting member for cutting a member to be cut or forming a notch or cutting line in the member to be cut is adopted, in addition to or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire,It may be possible to adopt a method of cutting by spraying a gas, a liquid, or the like, or to move and cut by combining appropriate driving devices. When biasing means is adopted, it may be composed of a spring, rubber, resin, a driving device, or the like.

Explanation of Reference Numerals

[0032] EA... Sheet peeling device 10... Affixing means 20... Peeling means 30... Energy imparting means AS... Adhesive sheet PD... Peeling progress direction PS... Peeling sheet (peeling adhesive member) WK... Adherend WK1... One surface (the other surface) WK2... The other surface (the other surface) WKE... Outer peripheral surface

Claims

1. Pasting means for pasting a peeling adhesive member onto an adhesive sheet attached to the outer peripheral surface of an adherend; Peeling means for applying tension to the peeling adhesive member attached to the adhesive sheet and peeling the adhesive sheet from the adherend along a predetermined peeling progress direction, and comprising: The adhesive sheet is also bent and pasted onto another surface of the adherend located in a direction intersecting the peeling progress direction; The pasting means is characterized in that, after pasting the peeling adhesive member onto the adhesive sheet portion attached to the outer peripheral surface, the peeling adhesive member is also pasted onto the adhesive sheet portion attached to the other surface. A sheet peeling device.

2. The peeling adhesive member is configured such that its adhesive force is improved when a predetermined energy is applied; The sheet peeling device according to claim 1, further comprising energy applying means for applying the predetermined energy to the peeling adhesive member.

3. A pasting step of pasting a peeling adhesive member onto an adhesive sheet attached to the outer peripheral surface of an adherend; A peeling step of applying tension to the peeling adhesive member attached to the adhesive sheet and peeling the adhesive sheet from the adherend along a predetermined peeling progress direction; The adhesive sheet is also bent and pasted onto another surface of the adherend located in a direction intersecting the peeling progress direction; The pasting step is characterized in that, after pasting the peeling adhesive member onto the adhesive sheet portion attached to the outer peripheral surface, the peeling adhesive member is also pasted onto the adhesive sheet portion attached to the other surface. A sheet peeling method.

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