Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can prevent the generation of sheet peeling failure.SOLUTION: A sheet peeling device EA includes attaching means 10 for attaching a removable adhesive member PS to an adhesive sheet AS pasted on an outer surface WKE of adherend WK, and peeling means 20 that applies tension to the removable adhesive member PS pasted on the adhesive sheet AS and peels the adhesive sheet AS from the adherend WK along a prescribed peeling progression direction PD. The adhesive sheet AS is also pasted on a first surface WK1 and a second surface WK2 of the adherend WK crossing the peeling progression direction PD in a folded state. The pasting means 10 is provided with a first attaching member 16B for attaching the removable adhesive member PS on a portion of the adhesive sheet AS pasted on the first surface WK1 and a second attaching member 16D for attaching the removable adhesive member PS on a portion of the adhesive sheet AS pasted on the second surface WK2.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] A sheet peeling device for peeling an adhesive sheet from an adherend is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the sheet peeling device 10 (sheet peeling device) described in Patent Document 1, when the adhesive sheet S (adhesive sheet) to be peeled is bent and attached not only to the outer peripheral portion 32 (outer peripheral surface) but also to the central portion 31 (other surface) of the semiconductor wafer 30 (adherend) like the second film 22 (adhesive sheet) of Patent Document 2, when the peeling sheet PS (peeling member) is attached with a pressing head 34 (pressing means) having a flat pressing portion, the adhesion area of the peeling member to the adhesive sheet is insufficient, and when peeling the adhesive sheet from the adherend, a sheet peeling failure occurs in which the peeling member peels off from the adhesive sheet.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of preventing the occurrence of sheet peeling failure.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Advantages of the Invention

[0007] According to the present invention, a peeling member is attached to an adhesive sheet portion that is bent and attached to one surface of an adherend by a first attachment member, and the peeling member is attached to an adhesive sheet portion that is bent and attached to the other surface of the adherend by a second attachment member. Therefore, there is no shortage of the adhesion area of the peeling member to the adhesive sheet, and it is possible to prevent the occurrence of poor sheet peeling.

Brief Description of the Drawings

[0008]

Figure 1

Modes for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are in a perpendicular relationship with each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Further, in this embodiment, based on the case when viewed from the direction of arrow VD parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the arrow direction of the Y-axis, and "rear" is the opposite direction.

[0010] The sheet peeling device EA for implementing the sheet peeling method of the present invention includes an attachment means 10 that performs an attachment process of attaching a peeling sheet PS as a peeling member to an adhesive sheet AS attached to the outer peripheral surface WKE of an adherend WK, a peeling means 20 that applies tension to the peeling sheet PS attached to the adhesive sheet AS and peels the adhesive sheet AS from the adherend WK along a predetermined peeling progress direction PD (see Fig. 1(I)), and an attitude adjustment means 30 that adjusts the attitude of the peeling sheet PS so that the attitude of the peeling sheet PS corresponds to the bending attitude of the adhesive sheet AS at a stage before the attachment means 10 attaches the peeling sheet PS to the adhesive sheet AS. In the present embodiment, the adherend WK has a circular shape centered on the adherend center WKC. Further, as shown in Fig. 1(D), the adhesive sheet AS is also bent and attached to one surface WK1 and the other surface WK2 of the adherend WK located in a direction intersecting the peeling progress direction PD.

[0011] The mounting means 10 includes a support member 11 that directly or indirectly supports each member constituting the mounting means 10, a support roller 12 that supports the strip-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a sheet support base 14 that is supported by a slide shaft 14B slidable on a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, a linear motor 16 as a driving device supported by an output shaft 15A of a linear motion motor 15 as a driving machine, a first attachment member 16B that is supported by a first slider 16A of the linear motor 16 and attaches the peeling sheet PS to an adhesive sheet AS portion attached to one surface WK1, a second attachment member 16D that is supported by a second slider 16C (see FIG. 1(E)) of the linear motor 16 and attaches the peeling sheet PS to an adhesive sheet AS portion attached to the other surface WK2, a third attachment member 16E (see FIG. 1(E)) that is provided on both the first attachment member 16B and the second attachment member 16D and attaches the peeling adhesive sheet PS to an adhesive sheet AS portion attached to an outer peripheral surface WKE, a cutter blade 17 as a cutting means supported by an output shaft 17B of a linear motion motor 17A as a driving device, a receiving member 18C supported by a slider 18B of a linear motor 18A as a driving device, a rotation motor 18D as a driving device supported by the receiving member 18C, a pressing member 18 attached to an output shaft 18E of the rotation motor 18D, and a coil heater 19 (see FIG. 1(E)) as an energy applying means that is provided inside each of the first and second attachment members 16B and 16D and performs an energy applying process of applying heat to the peeling sheet PS. Note that the peeling sheet PS of the present embodiment employs a heat-sensitive adhesive sheet whose adhesive strength is improved by applying heat as a predetermined energy.

[0012] The peeling means 20 includes a linear motor 21 as a driving device, a rotation motor 22 as a driving device supported by a slider 21A of the linear motor 21, a support table 23 having a support surface 23A that is supported by an output shaft 22A of the rotation motor 22 and can be suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), an imaging means such as a camera or a projector, and various sensors such as an optical sensor and an ultrasonic sensor, and an edge detector mechanism 24 capable of detecting a peeling start edge AS1 of the adhesive sheet AS. Note that the support table 23 of the present embodiment is configured to rotate about a table center 23C by a rotation motor 22.

[0013] The posture adjustment means 30 includes a linear motor 31 as a driving device, sandwiching rollers 32 as pressing members rotatably supported on two roller arms 32A swingably supported on a slider 31A thereof, and a coil spring 33 (see FIG. 1(D)) as a biasing means for biasing the sandwiching rollers 32 in a direction to approach each other.

[0014] The operation of the above sheet peeling device EA will be described. First, for the sheet peeling device EA in which each member is arranged at an initial position shown by a solid line in FIG. 1(A), a user of the sheet peeling device EA (hereinafter simply referred to as "user") inputs a signal for starting automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK with the adhesive sheet AS attached to the outer peripheral surface WKE on the support table 23 so that the adherend center WKC overlaps the table center 23C as shown in FIG. 1(A). Then, the peeling means 20 drives a decompression means (not shown) and starts suction holding on the support surface 23A.

[0015] Thereafter, the peeling means 20 drives the rotation motor 22 and the edge detector mechanism 24 to rotate the adherend WK in the direction of arrow RD, and the edge detector mechanism 24 detects the peeling start edge AS1 of the adhesive sheet AS. The drive of the rotation motor 22 is stopped with the rear part in the rotation direction of the peeling start edge AS1 disposed in front of the first and second attachment members 16B and 16D (see Fig. 1(C)). Next, the attachment means 10 drives the linear motor 18A. As shown in Fig. 1(B), the receiving member 18C is pressed against the sheet support base 14 to move the sheet support base 14 to the right, and the tip of the peeling sheet PS is positioned on the receiving member 18C. Then, the attachment means 10 drives the rotation motor 18D. As shown by the two-dot chain line in Fig. 1(B), after the tip of the peeling sheet PS is gripped by the pressing member 18 and the receiving member 18C, the linear motor 18A is driven. As shown in Fig. 1(C), the receiving member 18C is returned to the initial position to pull out the peeling sheet PS by a predetermined length.

[0016] Next, the posture adjusting means 30 drives the linear motor 31. As shown by the two-dot chain line in Figs. 1(C) and 1(D), the clamping roller 32 is advanced, and the peeling sheet PS is bent to adjust the posture of the peeling sheet PS so as to correspond to the bending posture of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK. Thereafter, the attachment means 10 drives the linear motor 16 to move the sliders 16A and 16C in the vertical direction, and as shown in Fig. 1(E), the distance between the first attachment member 16B and the second attachment member 16D is set to a predetermined distance so that the peeling sheet PS can be pressed against the outer peripheral surface WKE by each third attachment member 16E. Next, the attachment means 10 drives the linear motion motor 15. As shown in Fig. 1(F), after the peeling sheet PS is pressed against the portion of the adhesive sheet AS attached to the outer peripheral surface WKE by each third attachment member 16E, the linear motor 16 is driven. As shown in Figs. 1(G) and 1(H), the peeling sheet PS is pressed against the portions of the adhesive sheet AS attached to one surface WK1 and the other surface WK2 by the first and second attachment members 16B and 16D.

[0017] Then, the mounting means 10 drives the coil heater 19, heats the peeling sheet PS via the first and second mounting members 16B and 16D and each third mounting member 16E, attaches the peeling sheet PS to the adhesive sheet AS, and then stops driving the coil heater 19. Next, the mounting means 10 drives the linear motor 17A, lowers the cutter blade 17 as shown by the two-dot chain line in Fig. 1(H) to cut the peeling sheet PS, and then the mounting means 10 and the posture adjusting means 30 drive the linear motors 15 and 17A and the linear motors 16 and 31 to return the clamping roller 32, the first and second mounting members 16B and 16D, and the cutter blade 17 to their initial positions.

[0018] Thereafter, the peeling means 20 drives the linear motor 21 and the rotation motor 22, and as shown in Fig. 1(I), while rotating the adherend WK in the direction of arrow RD, moves the adherend WK forward. As a result, tension is applied to the adhesive sheet AS via the peeling sheet PS, and the adhesive sheet AS is peeled off from the adherend WK. Next, when the entire adhesive sheet AS is peeled off from the adherend WK, the peeling means 20 stops driving the linear motor 21 and the rotation motor 22, and then the user or a conveying means (not shown) holds the adhesive sheet AS. Then, when the mounting means 10 drives the rotation motor 18D to return the pressing member 18 to its initial position, the user or a conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Next, when the peeling means 20 stops driving a decompression means (not shown) and releases the suction holding on the support surface 23A, the user or a conveying means (not shown) conveys the adherend WK to the next process, and then the peeling means 20 drives the linear motor 21 and the rotation motor 22 to return the support table 23 to its initial position, and the same operations as above are repeated thereafter.

[0019] According to the embodiment as described above, the peeling sheet PS is attached to the adhesive sheet portion bent and attached to one surface WK1 of the adherend WK by the first attachment member 16B, and the peeling adhesive sheet PS is attached to the adhesive sheet portion bent and attached to the other surface WK2 of the adherend WK by the second attachment member 16D. Therefore, the adhesion area of the peeling sheet PS to the adhesive sheet AS is sufficient, and it is possible to prevent the occurrence of sheet peeling failure.

[0020] The means and steps in the present invention are not limited at all as long as they can perform the operations, functions or steps described for those means and steps. Moreover, they are not limited to the components and steps of merely one embodiment shown in the above embodiment. For example, the peeling means may be any means as long as it can apply tension to the peeling member attached to the adhesive sheet and peel the adhesive sheet from the adherend along a predetermined peeling progress direction, and it is not limited at all as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0021] After peeling the adhesive sheet AS from the adherend WK, the peeling means 10 may cut the peeling sheet PS, or may cut the peeling sheet PS before attaching the peeling sheet PS to the adherend WK, or may not cut the peeling sheet PS, or may not have the cutting means 17, or a single-sheet peeling sheet PS may be employed. Instead of or in combination with the receiving member 18C, the rotation motor 18D, and the pressing member 18, a configuration may be adopted in which the peeling sheet PS is held by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a drive device, etc. The peeling sheet PS may be attached to the front portion in the rotation direction of the peeling start edge AS1. Depending on where the peeling start edge AS1 is located, the position where the peeling sheet PS is attached can be determined, and the peeling means 20 can determine the direction in which the adherend WK is rotated. As the peeling member, for example, a pressure-sensitive adhesive adhesive sheet, a heat-sensitive adhesive adhesive sheet, an adhesive tape, a pressure-sensitive adhesive sheet, a pressure-sensitive adhesive tape, etc. may be employed. As the peeling member, metal, resin, rubber, etc. may be employed, and they may be attached to the adhesive sheet AS by welding, an adhesive, etc. The peeling sheet PS may be attached to the adhesive sheet AS so as to exceed the width orthogonal to the peeling progress direction PD of the adhesive sheet AS, or the peeling sheet PS may be attached to the adhesive sheet AS so as not to exceed the width orthogonal to the peeling progress direction PD of the adhesive sheet AS. The first attachment member 16B may be of any shape such as a roller shape or a plate-like member, may be of the same shape as the second attachment member 16D, or may be of a different shape from the second attachment member 16D as shown in FIG. 1(J). As shown in FIG. 1(J), it may be supported by the output shaft 16G of the driver 16F supported by the second attachment member 16D and may be separated from and approach the second attachment member 16D. As shown in FIG. 1(K), a configuration in which it does not separate from and approach the second attachment member 16D may also be employed. The second attachment member 16D may be of any shape such as a roller shape or a plate-like member, or may have the same shape as the first attachment member 16B, or may have a shape different from that of the first attachment member 16B as shown in FIG. 1(J). It may be supported by an output shaft of a drive mechanism (not shown) supported by the first attachment member 16B and may approach or separate from the first attachment member 16B. Alternatively, as shown in FIG. 1(K), it may be configured not to approach or separate from the first attachment member 16B. The third attachment member 16E may be provided only on the first attachment member 16B, or may be provided only on the second attachment member 16D, or may be detachably provided with respect to the first attachment member 16B and the second attachment member 16D. It may be composed of the same material as the material constituting the first attachment member 16B or a different material, or may be composed of the same material as the material constituting the second attachment member 16D or a different material. The energy applying means may apply any type of energy as predetermined energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light rays, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air. Any energy that can improve the adhesive force of the peeling member in consideration of the characteristics, properties, nature, material, composition, and configuration of the peeling member may be applied. It may be provided at a location other than the location shown in the above embodiment, and may be provided anywhere as long as it is a position where predetermined energy can be applied to the peeling member. It may or may not be provided in the sheet peeling device EA of the present invention.

[0022] As the peeling means 20, a support table 23 that cannot be adsorbed and held on the support surface 23A may be adopted, or the adherend WK may be held by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a drive device, etc. There may be an upper pressing member that sandwiches and holds the adherend WK with the support table 23, or the edge detector 24 may be eliminated, and for example, the adherend WK with the adhesive sheet AS attached may be placed on the support table 23 so that the peeling start edge AS1 is at a predetermined position. In the embodiment, the peeling means 20 moves the adherend WK away from the mounting means 10 while keeping the mounting means 10 stationary, and rotates the adherend WK about the adherend center WKC to peel the adhesive sheet AS from the adherend WK. However, while moving the mounting means 10 away from the adherend WK, the adherend WK may also be moved away from the mounting means 10, and the adherend WK may be rotated about the adherend center WKC to peel the adhesive sheet AS from the adherend WK. Alternatively, while revolving the mounting means 10 around the adherend WK, the adherend WK may be moved away from the mounting means 10, and the adherend WK may be rotated about the adherend center WKC to peel the adhesive sheet AS from the adherend WK. Further, while moving the mounting means 10 away from the adherend WK and revolving the mounting means 10 around the adherend WK, the adherend WK may also be moved away from the mounting means 10, and the adherend WK may be rotated about the adherend center WKC to peel the adhesive sheet AS from the adherend WK. In a state where the adherend WK is stationary, the mounting means 10 may be moved away from the adherend WK and the mounting means 10 may be revolved around the adherend WK to peel the adhesive sheet AS from the adherend WK. While moving the adherend WK away from the mounting means 10, the mounting means 10 may be moved away from the adherend WK and the mounting means 10 may be revolved around the adherend WK to peel the adhesive sheet AS from the adherend WK. While rotating the adherend WK about the adherend center WKC, the mounting means 10 may be moved away from the adherend WK and the mounting means 10 may be revolved around the adherend WK to peel the adhesive sheet AS from the adherend WK. Instead of or in combination with the linear motor 21, the rotary motor 22, and the support table 23, drive devices such as an articulated robot or other devices may be employed to move the mounting means 10 away from the adherend WK or revolve the mounting means 10 around the adherend WK, or to move the adherend WK away from the mounting means 10 or rotate the adherend WK about the adherend center WKC to peel the adhesive sheet AS from the adherend WK.A peeling member or an adhesive sheet AS may be wound around an output shaft or a winding shaft rotatable by a drive mechanism to peel the adhesive sheet AS from an adherend.

[0023] Instead of or in combination with the linear motor 31 and the sandwiching roller 3, the posture adjusting means 30 may employ a plate-like member, a turning belt, air blowing, a chuck cylinder, a chuck motor, etc., and adjust the posture of the peeling sheet PS so that the posture of the peeling sheet PS corresponds to the bending posture of the adhesive sheet AS. Alternatively, the material of the sandwiching roller 32 may be made of a material capable of elastic deformation such as rubber or resin, or may be made of a material incapable of elastic deformation such as metal or glass. Further, the posture of the peeling sheet PS may be adjusted so that the posture of the peeling sheet PS corresponds to the bending posture of the adhesive sheet AS without bringing the peeling sheet PS into contact with the adhesive sheet AS. The posture adjusting means 30 may or may not be provided in the sheet peeling device EA of the present invention.

[0024] Next, the adhesive sheet AS may be attached to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WKE overlap, or may be attached to the adherend WK such that one edge and the other edge are in contact, or may be attached to the adherend WK such that one edge and the other edge are separated. The planar shape may be any shape such as a straight shape, a curved shape, or a bent shape. It may also be one in which the adhesive force decreases by a predetermined second energy. Such an adhesive sheet AS may be, for example, one in which the adhesive force decreases by any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air. In this case, as the second energy applying means for applying a predetermined second energy to the adhesive sheet AS, for example, any means such as one that applies electromagnetic waves, one that applies a heating medium, or one that applies a cooling medium may be adopted. Any second energy applying means may be used as long as it can decrease the adhesive force of the adhesive sheet AS in consideration of the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS. The surface shape of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK may be the same as or different from the shape of the outer peripheral surface WKE of the adherend WK. One surface WK1 and the other surface WK2 of the adherend WK to which the adhesive sheet AS is bent and attached may be surfaces adjacent to the outer peripheral surface WKE of the adherend WK, or may be surfaces not adjacent to the outer peripheral surface WKE of the adherend WK due to the presence of other surfaces between the outer peripheral surface WKE of the adherend WK.

[0025] As the member for peeling, any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light rays, sound waves, X-rays or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air may be applied, and the adhesive force may be improved by the application of such energy, or it may not be improved by the application of a predetermined energy. The width orthogonal to the peeling progress direction PD may be the same as, shorter than, or longer than the width orthogonal to the peeling progress direction PD of the adhesive sheet AS.

[0026] The next process may be any process such as a plating process, a cleaning process, an etching process, an immersion process, a cutting process, an oxide film forming process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a coating process, a lamination process, a sheet adhesion process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc.

[0027] In the present invention, the materials, types, shapes, etc. of the adhesive sheet AS, the peeling member, and the adherend WK are not particularly limited. For example, the adhesive sheet AS, the peeling member, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. Also, the adhesive sheet AS and the peeling member may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet AS or peeling member is employed, they may be adhered by an appropriate method such as providing heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS or the peeling member. Further, such an adhesive sheet AS or peeling member may be, for example, a single-layer one having only an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, the intermediate layer, or the cover layer is provided detachably, a single-sided adhesive sheet composed only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or it may be a composite formed of two or more of them, and members and articles in any form can also be targeted. Note that the adhesive sheet AS may be, for example, any sheet, film, tape, etc. such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer.

[0028] The drive equipment in the above-described embodiment may individually employ electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a so-called multi-joint robot having two or three or more joints, actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, etc., or those in which these electric equipment and actuators are directly or indirectly combined may be employed, or those capable or incapable of torque control, speed control, etc. with respect to the output portions of these electric equipment and actuators may be employed.

[0029] In the above embodiment, any object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, the relatively moving object A and object B, may be such that object B moves relative to object A that does not move, or object A moves relative to object B that does not move, or both object A and object B may move. As long as the results achieved by the movement are the same, either object A or object B may move. When a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided. The surface of the rotating member or the rotating member itself may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means or a pressing member such as a pressing roller, a pressing head, a first attachment member 16B, a second attachment member 16D, a sandwiching roller 32, etc., that presses an object to be pressed is employed, instead of or in combination with those exemplified above, in addition to a roller, a round bar, a blade material, a brush-shaped member, a means by blowing a gas such as air or gas may be employed. The pressing member may be composed of a deformable member such as rubber, resin, or sponge, or may be composed of a member that does not deform. When a peeling means or a peeling member such as a peeling plate or a peeling roller, that peels an object to be peeled is employed, instead of or in combination with those exemplified above, a member such as a plate-shaped member, a round bar, or a roller may be employed. The peeling member may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. When a support (holding) means or a support (holding) member, etc., that supports (holds) a supported member (held member) is employed, a configuration that supports (holds) the supported member by a gripping means such as a chuck motor or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), a magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc., may be adopted. When a cutting means or a cutting member, etc., that cuts a member to be cut or forms a notch or a cutting line in the member to be cut is employed, instead of or in combination with those exemplified above, a cutter blade, a laser cutter, an ion beam, firepower, heat, water pressure, a heating wire,It may also be possible to adopt a method of cutting by spraying gas, liquid, etc., or to move and cut an object that is cut by combining appropriate driving devices. When biasing means are adopted, they may be constituted by springs, rubber, resins, driving devices, or the like.

Explanation of Reference Numerals

[0030] EA…Sheet peeling device 10…Mounting means 16B…First mounting member 16D…Second mounting member 16E…Third mounting member 19…Coil heater (energy imparting means) 20…Peeling means AS…Adhesive sheet PD…Peeling progress direction PS…Peeling sheet (peeling member) WK…Adherend WK1…One surface WK2…The other surface WKE…Outer peripheral surface

Claims

1. Attachment means for attaching a peeling member to an adhesive sheet attached to the outer peripheral surface of an adherend, and peeling means for applying tension to the peeling member attached to the adhesive sheet and peeling the adhesive sheet from the adherend along a predetermined peeling progress direction, wherein the adhesive sheet is also bent and attached to one surface and the other surface of the adherend located in a direction intersecting the peeling progress direction, and the attachment means includes a first attachment member for attaching the peeling member to an adhesive sheet portion attached to the one surface, and a second attachment member for attaching the peeling member to an adhesive sheet portion attached to the other surface. A sheet peeling device characterized by this.

2. The attachment means is provided on at least one of the first attachment member and the second attachment member, and includes a third attachment member for attaching the peeling member to an adhesive sheet portion attached to the outer peripheral surface. The sheet peeling device according to claim 1, characterized by this.

3. The peeling member is such that its adhesive force is improved when a predetermined energy is applied, and the attachment means includes energy applying means for applying the predetermined energy to the peeling member. The sheet peeling device according to claim 1 or claim 2, characterized by this.

4. An attachment step of attaching a peeling member to an adhesive sheet attached to the outer peripheral surface of an adherend, and a peeling step of applying tension to the peeling member attached to the adhesive sheet and peeling the adhesive sheet from the adherend along a predetermined peeling progress direction are carried out, wherein the adhesive sheet is also bent and attached to one surface and the other surface of the adherend located in a direction intersecting the peeling progress direction, and in the attachment step, attachment means including a first attachment member for attaching the peeling member to an adhesive sheet portion attached to the one surface and a second attachment member for attaching the peeling member to an adhesive sheet portion attached to the other surface is used to attach the peeling member to the adhesive sheet. A sheet peeling method characterized by this.

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