Solid source precursor vessel

Abstract

To provide ready access to reactant vapor while providing improved serviceability (e.g., recharging) of a solid source precursor vessel.SOLUTION: The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of a compressed precursor material that typically have higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases capacity of the source vessel resulting in longer intervals between replacement and / or refilling the source vessel.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure generally relates to vapor reactors and systems. In particular, the present disclosure relates to an apparatus for delivering reaction gases from solid source precursors.

Background Art

[0002] For various applications, including depositing and etching materials on a substrate surface (e.g., a semiconductor wafer), vapor reactor systems such as chemical vapor deposition (CVD), plasma CVD (PECVD), and atomic layer deposition (ALD) can be used. For example, a vapor reactor system can be used to deposit and / or etch a layer on a substrate to form semiconductor devices, flat panel display devices, photovoltaic devices, microelectromechanical systems (MEMS), and the like.

[0003] In a vapor reactor system, reaction gases of different reactants (also referred to herein as "precursor gases") are delivered to one or more substrates in a reaction chamber. The reaction chamber typically includes one or more substrates supported on one or more substrate holders (such as susceptors), and the substrates and substrate holders are maintained at a desired process temperature. The reaction gases can react with each other or with the surface of the substrate to form a thin film on the substrate, and the growth rate is controlled, inter alia, by the temperature or amount of the reaction gases.

[0004] In some applications, the reactive gas is stored in the reactant source container in gaseous form. In such applications, the reactive vapor is often gaseous at ambient (i.e., normal) pressure and temperature. Examples of such gases include nitrogen, oxygen, hydrogen, and ammonia. However, in some cases, the vapor of a source chemical (a “precursor”) that is liquid or solid at ambient pressure and temperature is used. These source chemicals may have to be heated to produce sufficient amounts of vapor for the reaction process. Some solid substances (referred to herein as “solid source precursors”) have very low vapor pressures at room temperature and thus have to be heated and / or maintained at very low pressures to produce sufficient amounts of reactive vapor.

[0005] A typical solid source precursor delivery system includes a solid source precursor container and a heating system (e.g., radiant heat lamp, resistive heater, etc.). The container contains the solid precursor (e.g., in powder form). The heating system heats the container to increase the vapor pressure of the precursor gas in the container. Unless otherwise stated, the heating system heats the solid precursor such that the solid precursor evaporates (e.g., sublimates). Thus, the container is sometimes referred to as a sublimator. The container has an inlet and an outlet for flowing an inert carrier gas (e.g., nitrogen) through the container to transport the evaporated precursor to the substrate reaction chamber. Usually, the path through the container is an indirect path that increases the distance the carrier gas travels through the container, thereby increasing the saturation of the carrier gas with the evaporated precursor. The carrier gas pushes the precursor vapor through the container outlet and ultimately flows into the substrate reaction chamber. The container typically includes an isolation valve to fluidly isolate the contents of the container from the outside.

[0006] Any discussion, including the discussion of problems and solutions, set forth in this section is included in this disclosure solely for the purpose of providing context to the disclosure and should not be taken as an admission that some or all of the discussion was known at the time the invention was made or otherwise constitutes prior art.

SUMMARY OF THE INVENTION

MEANS FOR SOLVING THE PROBLEM

[0007] This summary is provided to introduce a selection of concepts in a simplified form. These concepts are further described in the detailed description of the embodiments of the example disclosed below. This summary is not necessarily intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0008] The present disclosure generally relates to a solid source precursor delivery system. More specifically, the present disclosure relates to a solid source precursor container, which is used to evaporate a certain amount of solid precursor stored in the container. The disclosed source container replaces a single serpentine channel used to store a certain amount of precursor and direct a carrier gas through the container with a plurality of individual cavities or pockets within the interior of the container. Each individual pocket can be filled with a precursor. In one configuration, the pockets can be filled with preformed blocks of compressed precursor having a higher density than can typically be achieved when packing a powdered precursor into a serpentine channel. The increased density of the solid precursor material increases the capacity of the source container, and as a result, lengthens the interval between source container replacement and / or replenishment.

[0009] In one configuration, a reactant source container including a container body and a lid is provided. The lid is configured to adhere to the container body and enclose an internal region of the container body defined by one or more sidewalls and a bottom surface. A plurality of individual pockets, each configured to hold a fixed amount of solid source precursor, are formed within the internal region of the container body. In one configuration, the pockets can be of uniform size (e.g., having a common dimension). The individual pockets can have any configuration. For example, the pockets can be cylindrical, rectangular prismatic, etc. Generally, each pocket has a closed lower or bottom end, one or more sidewalls, and an open upper end. In such a configuration, the pocket can receive a pre-formed block of compressed solid precursor (e.g., through the open upper end). This configuration facilitates filling of the source container. The plurality of individual pockets within the interior of the source container are each exposed to a fluid flow path that passes through the interior of the container between a fluid path inlet end and a fluid path outlet end. This fluid path passes over each individual pocket within the source container and enables the transport of vaporized precursor from the source container. To define the fluid path over the open end of each pocket, the path can be non-direct (e.g., serpentine) between the fluid path inlet end and the fluid path outlet end.

[0010] In one configuration, the container body has a two-piece structure. In this configuration, the container body can have a base that receives an insert in which a plurality of pockets are formed. In a further configuration, the insert can be formed in multiple layers stacked to form a plurality of pockets. Such a configuration can be beneficial when working with hard and / or brittle materials.

[0011] In another configuration, the plurality of pockets can be formed by a plurality of intersecting dividing walls that collectively define a matrix of pockets within the interior of the container body. In one configuration, the dividing walls can be evenly spaced to enhance heat conduction throughout the container body. In such a configuration, the container body can have a high degree of symmetry.

[0012] These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of several embodiments with reference to the accompanying drawings. The present disclosure is not limited to any particular embodiment disclosed.

[0013] A more complete understanding of the exemplary embodiments of the present disclosure can be obtained by referring to the detailed description and the claims in connection with the following exemplary drawings.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3A

Figure 3B

Figure 4

Figure 5A

Figure 5B

Figure 5C

Figure 6

Figure 7

Best Mode for Carrying Out the Invention

[0015] It will be understood that the elements in the drawings are illustrated for simplicity and clarity and are not necessarily drawn to scale. For example, some dimensions of the elements in the drawings may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of the present disclosure.

[0016] The following description of the exemplary embodiments provided is merely exemplary and is intended for illustrative purposes only. The following description is not intended to limit the scope of the present disclosure or the claims. Also, the description of multiple embodiments having the described features is not intended to exclude other embodiments having additional features or other embodiments incorporating different combinations of the described features.

[0017] The present disclosure generally relates to improved solid source precursor containers, apparatuses, and methods. The disclosed embodiments enable improved maintainability (e.g., refilling) of solid source precursor containers while making reactant vapor immediately available.

[0018] FIG. 1 schematically shows an exemplary vapor-phase reactor system 100, which includes a reactor 102, a solid reactant source 110, a second reactant source 112, and a carrier / purge gas source 114, the reactor 102 including a reaction chamber 104, a susceptor 106 for holding a substrate 116 during processing, and a gas distribution system 108 for dispensing one or more reactants onto the surface of the substrate 116. The reactant sources and the carrier / purge gas source are fluidly coupled to the reaction chamber 104 via fluid conduits and various valves or controllers. The system also includes a vacuum source 118. The solid reactant source is configured to supply a vapor-phase reactant generated from a solid precursor source container 20 into the vapor-phase reactor 102. The solid source container 20 contains a precursor or source chemical (not shown), which is solid under standard conditions (i.e., room temperature and atmospheric pressure). The solid precursor evaporates within the source container 20, which can be maintained at or above the evaporation temperature of the precursor. The resulting evaporated reactant is then supplied into the reaction chamber 104. The source container 20 can be disposed within a reactant source cabinet 12, which can be individually evacuated and / or thermally controlled. The exemplary system 100 can be used for, but not limited to, deposition, such as chemical vapor deposition (CVD), plasma CVD (PECVD), or atomic layer deposition (ALD).

[0019] As shown in FIG. 1, the precursor source container 20 is fluidly coupled to the reactor 102 via a conduit 22. By selectively opening the valve 24 in the conduit 22, it is possible to supply a gas-phase reactant (e.g., an evaporated solid precursor) from the precursor source container 20 to the reactor 102. Preferably, an inert or non-reactive gas is used as the carrier gas for the evaporated precursor. The carrier gas (e.g., nitrogen or argon) can be supplied into the precursor source container 20 through the carrier gas supply conduit 26. In this regard, the precursor source container 20 includes at least one inlet valve 44 for connection to the carrier gas supply conduit 26 and at least one outlet valve 42 for connection to the reactor 102 via the conduit 22. The carrier gas supply conduit 26 includes at least one valve 28, which can be used to fluidly isolate the interior of the source container 20 from a source of carrier gas (not shown).

[0020] The precursor source container 20 can be disposed within the reactant source cabinet 12. The internal space 18 of the cabinet 12 can be maintained at a reduced pressure to, for example, facilitate radiative heating of the components within the cabinet 12 (e.g., source containers) and thermally isolate such components from each other to facilitate a uniform temperature field. In other variations, the cabinet is not evacuated and includes convection-enhancing devices (e.g., fans, cross-flow, etc.). The illustrated cabinet 12 includes one or more heating devices 8, such as a radiant heater. Additionally, a reflector (not shown) can be provided, which can be configured to surround the components within the cabinet 12 and reflect the radiant heat generated by the heating device 8 to the components disposed within the cabinet 12. The reflector can be provided on the inner walls, ceiling, and / or floor of the cabinet 12. An additional heater (not shown) can be provided to heat the conduit 22 and any valves between the cabinet 12 and the reactor 102 to prevent condensation of the precursor gas.

[0021] FIG. 2 shows an embodiment of the solid precursor source container 20. As shown, the precursor source container 20 includes a container body 30 and a lid 40. As shown, the lid 40 is removed from the container body 30. However, it will be understood that the lid 40 is fixed to the container body 30 when assembled. The illustrated container 20 is fixed to each other by a fixing element (not shown), such as a combination of screws or nuts and bolts. The fixing element is adapted to extend into or through aligned mating holes (e.g., bolt holes) that extend around the lid and around the flange of the container body 30. Those skilled in the art will understand that this assembly can be fixed to each other by various alternative methods. As described herein, the container body 30 is configured to hold a certain amount of solid precursor. The lid 40 is configured to direct a gas stream (e.g., a carrier gas) through an internal flow path of the container body to remove the vaporized precursor (e.g., a reaction gas). When the solid source precursor is depleted and needs to be replaced, it is customary to replace the entire source container 20 with a new one having the full amount of source chemical.

[0022] In the illustrated embodiment, the lid 40 of the container includes an inlet valve 44 and an outlet valve 42. The inlet valve 44 has an inlet for receiving a carrier gas via a carrier gas conduit 26 (see FIG. 1). The inlet valve 44 has an outlet that is in fluid communication with the inlet end of an internal flow path through the container body. That is, the outlet of the inlet valve 44 is connected to a fluid passage through the lid that communicates with the interior of the container body when the source container is assembled. The outlet valve 42 has an inlet that is in fluid communication with the outlet end of an internal flow path through the container body (e.g., via a fluid passage through the lid). The outlet valve has an outlet that is in fluid communication with a fluid conduit 22 extending between the source container 20 and the reactor. Various valves, manifolds, and conduits can be disposed between the fluid conduit and the outlet valve. In use, the carrier gas flows into the source container through the inlet valve 44, out of the outlet valve 42 through the interior of the container body 30, and out of the source container. In the illustrated embodiment, the lid 40 further includes a vent or purge valve 46 disposed between the inlet and outlet valves 44, 42. The purge valve 46 has an inlet that is in fluid communication with an intermediate portion of an internal flow path through the container body (e.g., via a fluid passage through the lid). The purge valve also has an exhaust outlet. In use, the purge valve can be opened to discharge gas flow from the internal flow path out of the container and has an inlet connectable to a source of purge gas (not shown) and an outlet that is in fluid communication with an intermediate portion of an internal flow path through the container body. During operation, the purge valve can be used to expel gas (e.g., carrier gas and / or reaction gas) from the interior of the source container 20.

[0023] Each of valves 42, 44, and 46 (if utilized) preferably includes valve porting blocks 43, 45, and 47, respectively, each including a gas flow passage that can be restricted or opened by the valve. For example, the porting block 45 of the inlet valve 44 preferably includes an internal gas flow passage extending from a side of the porting block to a restrictor region including an internal device (not shown) for restricting the flow of gas, such as a valve seat and a movable restrictor or diaphragm. In one embodiment, the movable internal restrictor or diaphragm can be moved by turning a knob (e.g., the larger cylindrical upper portion of valve 44) either manually or by an automated method. Another internal gas flow passage preferably extends from the restrictor region through the opposite side of the porting block 45 to an inlet passage extending into the source container 20 through the lid 40.

[0024] Figures 3A and 3B show an embodiment of a flow path through the interior of the container body 30. As shown, the container body includes a flow path 38, which is a continuous serpentine path extending between an inlet end 32 and an outlet end 34. When the source container is assembled, the inlet end 32 is disposed beneath the inlet valve of the lid, and the outlet end 34 is disposed beneath the outlet valve of the lid. Thus, when the source container is assembled, the inlet and outlet ends 34, 32 of the flow path 38 are in fluid communication with the inlet and outlet valves of the lid, respectively. In the illustrated embodiment, an intermediate portion of the flow path 38 includes a purge port manifold 36 that is in fluid communication with a purge valve when the source container is assembled. As shown, the flow path 38 extends between the front and rear walls of the container body as a series of parallel channels connected at adjacent ends alternately. The flow path defines a tortuous or serpentine path that the carrier gas must travel when flowing through the container body 30. In use, the flow path 38 contains a solid precursor source, such as a powder. For example, a solid source precursor / chemical can be packed into the bottom of the channel. When the source container is heated, at least a portion of the solid precursor in the channel can evaporate. By exposing the carrier gas to the vaporized precursor while sending the carrier gas through the long serpentine flow path 38 between the inlet end 32 and the outlet end 34, the carrier gas is caused to carry reactant vapor. That is, this requires the carrier gas to flow along a longer path while being exposed to the precursor source, so it is exposed to the precursor source for a longer time and thus is more likely to become saturated with the vaporized precursor.

[0025] The carrier body shown in FIGS. 3A and 3B is effective for generating gas-phase reactants from solid precursors, but embodiments of this carrier body have many drawbacks. Specifically, by forming a serpentine flow path using narrow and deep channels, removal and replacement of the solid source precursor (e.g., compacted powder) becomes difficult. Further, the narrow and deep channels limit the amount of solid precursor that can be held in the container body of the source vessel. That is, a significant amount of the internal volume of the container body is utilized to form the dividing walls that define the serpentine flow path. Aspects of the present disclosure are based in part on the recognition that by increasing the surface area of the solid precursor, it becomes possible to effectively saturate the carrier gas over a shorter flow path while allowing the container body to hold an increased amount of the solid precursor.

[0026] Figure 4 shows an embodiment of a two-piece container body 130 according to various aspects of the present disclosure. Although shown as a two-piece container body, it will be understood that this embodiment is provided by way of example and not limitation. Along these lines, it will be understood that the container body can be a single-piece container body similar to those described above. It will be further understood that the container body 130 of FIG. 4 can be replaced with the container body 30 of FIG. 2. That is, the lid of FIG. 2 can be utilized with the container body 130. In the illustrated embodiment, the container body 130 includes a base member 132 and an insertion tray 150. The base member 132 is a generally rectangular element having four side walls 134a-134d, a bottom surface 136, and a generally open top surface. These side walls and bottom surface collectively define an opening / recess (e.g., an interior region) sized to receive the insertion tray 150. In the illustrated embodiment, the base member 132 further includes a shelf 138 disposed within its interior proximate to the front wall 134a. This shelf 138 includes an inlet manifold 144, an outlet manifold 142, and a purge valve manifold 146. When the tray insert 150 is disposed within the interior of the base member 132, an opening in the side wall of the inlet manifold 144 opens into an opening 155b at a first end of a flow path (not shown) extending through the insertion tray 150. Similarly, when the insertion tray 150 is disposed within the base member 132, an opening in the outlet manifold 142 opens into a second opening 155a at a second end of the flow path extending through the insertion tray. Similarly, an opening in the side wall of the purge manifold 146 opens into a third opening 155c disposed in an intermediate portion of the flow path passing through the insertion tray 150. When the lid 40 is attached to the container body (see, e.g., FIG. 2), the inlet manifold 144 is disposed below the inlet valve 44, and the outlet manifold 142 is disposed below the outlet valve 42.

[0027] In the illustrated embodiment, the outer surface of the tray insert 150 is shaped to correspond to the inner surface of the base member as defined by the sidewalls and bottom surface. When inserted, the upper edge of the inserted tray is generally at the same height as the upper edge of the base member 132. The tray insert 150 includes a plurality of individual pockets 152 each configured to hold a defined amount of solid source precursor. The individual pockets extend from an open upper end proximate the upper edge of the tray insert to a closed lower end proximate the bottom surface of the tray insert and are formed into the tray insert. In one embodiment, all of the pockets 152 have the same dimensions (e.g., length, width, and depth), and the pockets are capable of receiving the same pre-prepared amount (e.g., a compressed block) of solid precursor. However, this is not a strict requirement.

[0028] Figures 5A-5C respectively show a perspective view of the insertion tray 150, a cross-sectional view of the insertion tray along the cutting line A-A' of Figure 5A, and a cross-sectional view of the insertion tray along the cutting line B-B' of Figure 5A. In the illustrated embodiment, the tray insert 150 includes four outer walls 154a-d (hereinafter 154 unless otherwise specified) that define a generally rectangular outer perimeter of the tray insert 150. Each of the outer walls extends from a solid bottom surface 156 to an upper edge. The upper edge of the tray insert 150 is configured to engage the bottom surface of the lid when the source container is assembled. To provide a plurality of pockets 152, the illustrated tray insert includes a first plurality of dividing walls 162a-f (hereinafter 162 unless otherwise specified) that extend between the front wall 154a and the rear wall 154c of the tray insert 150. The tray insert also includes a second plurality of dividing walls 164a-e (hereinafter 164 unless otherwise specified) that extend between the side walls 154b and 154d of the tray insert 150. In the illustrated embodiment, the first and second pluralities of dividing walls 162 and 164 are evenly spaced between their respective pairs of outer walls and are substantially parallel to their respective outer walls. That is, the first plurality of dividing walls 162 can substantially cross the second plurality of dividing walls 164. In this configuration, the two sets of dividing walls 162, 164 define a matrix of pockets 152 of equal size. Although discussed as being formed by the intersection of the transverse dividing walls, it will be understood that the pockets can be defined in other ways. As an example, the individual pockets can each be a cylindrical hole recessed into the tray insert (i.e., if a two-piece container body is used) or into the container body (i.e., if a one-piece container body is used). However, the use of transverse dividing walls that define a matrix of pockets of equal size results in a more symmetric container body. Such symmetry can provide a more uniform thermal performance when the source container is heated.

[0029] In the illustrated embodiment, each of the pockets 152 has substantially the same cross-sectional dimensions. That is, each pocket 152 can have the same length "L" when measured between two opposing sidewalls and the same width "W" when measured between another pair of opposing sidewalls. See FIG. 5B. Further, each pocket can have the same depth "D" when measured from the closed bottom surface 156 of the pocket to the open top end 158. As shown, by using pockets of a common size, it becomes possible to fill the pockets with a pre-formed amount of solid precursor. That is, instead of filling the bottom of a deep and narrow channel (e.g., a serpentine flow path) with powder and compressing the powder at the bottom of the channel, a pre-formed compression block 172 of the precursor material can be inserted into each of the pockets 152. For example, the precursor powder can be compressed into a block 172 sized to fit within the interior of the pocket 152. By using the compression block 172, the density of the precursor within the source container is increased. As an example, by filling the deep and narrow channel of the flow path 38 shown in FIGS. 3A and 3B with a precursor powder of hafnium chloride (HfCl4), typically, as a result, the maximum precursor density was about 2 grams per cubic centimeter (g / cc). By utilizing the compression block, a precursor density of 3 g / cc or more often results. Assuming that the internal volumes of the container body 30 of FIG. 3A and the container body 130 of FIG. 4 are equal, by using the pre-compressed precursor block, the capacity of the source container increases by 50%. As a result of this increase in the capacity of the source container, the interval between source container replacements and / or refills is lengthened. Similarly, this reduces the downtime in the manufacturing process.

[0030] It should be noted that each top edge or open end 158 of the pocket 152 is typically disposed below the upper edge of the insertion tray 150 or the container 30. More specifically, there must be a space above each pocket so that the carrier gas can flow over the top surface of the pocket between the inlet and outlet of the container body. As best shown in FIG. 5A, the dividing walls 162, 164 and the outer wall 154 are collectively utilized to define a flow path 170 through the insertion tray 150. This flow path extends over the top surface (e.g., the open end 158) of each pocket 152, enabling the carrier gas to carry the evaporation precursor from each pocket when the source container is in use. The outer wall 154 typically has an overall height such that it contacts the bottom surface of the lid of the source container when assembled. The dividing wall 162 can be configured in various ways to have a height equal to the upper edge of the outer wall or a lower height (e.g., the same height as the upper edge of the pocket 152) to direct the fluid flow through the container. In the illustrated embodiment, each pocket 152 is defined by four side walls. Two of the side walls have an overall height such that they contact the lid when the source container is assembled, while the other two side walls have a lower height and define a flow path across the upper surface of the pocket 152. FIG. 5A shows one non-limiting embodiment of the flow path 170 that extends over the top surface of each pocket 152 between the inlet and outlet.

[0031] As shown in FIGS. 5A - 5C, the insertion tray 150 can be a monolithic element. For example, the insertion tray can be milled from a single block of material or cast into a single piece. Other fabrication techniques are also possible.

[0032] FIG. 6 shows an alternative embodiment of the insertion tray 150. In this embodiment, the insertion tray is formed from three layers of wall fixtures 160a, 160b, and 160c. The insertion tray can be manufactured by stacking these layers of wall fixtures 160a - c. In one embodiment, each of the wall fixtures can define a matrix of pockets having upper and lower open ends. In such an embodiment, the fixtures can be stacked on a flat plate that forms the bottom of the insertion tray. In another embodiment, the lowermost wall fixture 160c can include a bottom surface. Although shown as having three layers, it will be understood that a multi - layer insertion tray can have more or fewer layers. Constructing the insertion tray from separate layers can be particularly beneficial, but not limited to, insertion trays made from ceramic materials such as aluminum nitride and silicon carbide. It will be further understood that the insertion tray and / or the container body can be made from a variety of materials including ceramics and stainless steel.

[0033] FIG. 7 shows another embodiment of the container body 230. In this embodiment, the container body has a one - piece structure. That is, the pockets 152 are integrally formed within the container body 30. In such a configuration, the pockets 152 can here also have common dimensions to facilitate filling the pockets with blocks of a common size of the compression precursor. As shown, the flow path 170 here also passes between the inlet manifold 144 and the outlet manifold 142 while passing over the respective open top surfaces of the pockets. As described above, when the source container is assembled, these manifolds are in fluid communication with the inlet and outlet valves.

[0034] Exemplary embodiments of the present disclosure are described herein, but it should be understood that the present disclosure is not so limited. Various modifications, variations, and enhancements of the systems and methods described herein can be made without departing from the spirit and scope of the present disclosure. The subject matter of the present disclosure includes all novel and non-obvious combinations and sub-combinations of various systems, components, and configurations, as well as other features, functions, acts, and / or characteristics disclosed herein, and any equivalents thereof.

Description of Reference Numerals

[0035] 8 Heating device 12 Reactant source cabinet 18 Internal space 20 Solid precursor source container 22 Fluid conduit 24 Valve 26 Carrier gas supply conduit 28 Valve 30 Container body 32 Inlet end 34 Outlet end 36 Purge port manifold 38 Flow path 40 Lid 42 Outlet valve 43 Valve porting block 44 Inlet valve 45 Valve porting block 46 Purge valve 47 Valve porting block 100 Gas phase reactor system 102 Gas phase reactor 104 Reaction chamber 106 Susceptor 108 Gas distribution system 110 Solid reactant source 112 Second reactant source 114 Carrier / purge gas source 116 Substrate 118 Vacuum source 130 Two-piece container body 132 Base member 134a - 134d Side walls 136 Bottom surface 138 Shelf 142 Outlet manifold 144 Inlet manifold 146 Purge valve manifold 150 Insertion tray 152 Individual pockets 154a Front wall 154b Side wall 154c Rear wall 154d Side wall 155a Second opening 155b Opening at the first end 155c Third opening 156 Bottom surface 158 Top end 160a - c Wall fixtures 162a - f First plurality of dividing walls 164a - e Second plurality of dividing walls 170 Flow path 172 Pre - formed compression block 230 Container body

Claims

1. A container body having an outer wall and a bottom surface that define an internal region of the container body, the container body; A plurality of pockets disposed within the internal region of the container body, each of the plurality of pockets being configured to contain a fixed amount of a solid source precursor, the plurality of pockets; A lid configured to engage the container body, the lid enclosing the internal region of the container body when connected to the container body; A fluid flow path within the internal region of the container body, formed above the plurality of pockets and below the bottom surface of the lid, extending between an inlet end and an outlet end along a path passing over at least a portion of each of the plurality of pockets, the fluid flow path; A reactant source container including the above.

2. An inlet valve and an outlet valve attached to the top surface of the lid, each valve being connected to a fluid passage through the lid, the inlet valve and the outlet valve; The container according to claim 1, further including the above.

3. When the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid flow path, and the outlet valve is in fluid communication with the outlet end of the fluid flow path. The container according to claim 2.

4. Each of the plurality of pockets; A closed bottom end; An open top end; At least one side wall surface extending between the closed bottom end and the open top end, the closed bottom end, the open top end, and the at least one side wall surface defining the internal volume of the pocket, the at least one side wall surface; The container according to claim 1, including the above.

5. Each of the plurality of pockets has a common dimension. The container according to claim 4.

6. Each of the plurality of pockets includes a rectangular prism. The container according to claim 4.

7. An insert configured to be disposed within the internal region of the container body, the plurality of pockets being formed within the insert, the insert; The container according to claim 1, further including the above.

8. The insert includes at least a first layer and a second layer, the first and second layers being stacked within the internal region of the container body and collectively defining the plurality of pockets. The container according to claim 1.

9. The first and second layers of the insert are formed from a ceramic material. The container according to claim 1.

10. The container according to claim 1, wherein the flow path includes an indirect flow path between the inlet end and the outlet end.

11. A first plurality of parallel dividing walls extending between a first set of opposing side walls of the container body, A second plurality of parallel dividing walls extending between a second set of opposing side walls of the container body, wherein the first and second pluralities of dividing walls intersect to define a matrix of the plurality of pockets. A second plurality of parallel dividing walls, The container according to claim 1, further comprising:

12. The container according to claim 11, wherein the first plurality of dividing walls and the second plurality of dividing walls are each equally spaced between the first set of opposing side walls and the second set of opposing side walls.

13. The container according to claim 11, wherein the first and second pluralities of dividing walls have different heights so as to define the fluid flow path between the inlet end and the outlet end.

14. A container body having an outer wall and a bottom surface defining an inner region of the container body, a container body, A first plurality of parallel dividing walls extending between a first set of opposing side walls of the container body, A second plurality of parallel dividing walls extending between a second set of opposing side walls of the container body, wherein the first and second pluralities of dividing walls intersect to define a matrix of pockets within the inner region of the container body, and each of the pockets of the matrix is configured to contain a fixed amount of a solid source precursor. A second plurality of parallel dividing walls, A lid configured to engage the container body, the lid enclosing the inner region of the container body when connected to the container body, A fluid flow path defined by the bottom surface of the lid, the outer wall of the container, and the first and second pluralities of dividing walls, the fluid flow path extending between an inlet end and an outlet end and passing over the top surface of each of the matrix of pockets. A fluid flow path, A reactant source container comprising:

15. The container according to claim 14, wherein each of the matrix of pockets has a common dimension.

16. The container according to claim 14, wherein the fluid flow path includes an indirect flow path between the inlet end and the outlet end.

17. An inlet valve and an outlet valve attached to the top surface of the lid, each valve being connected to a fluid passage through the lid, and when the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid flow path, and the outlet valve is in fluid communication with the outlet end of the fluid flow path. The inlet valve and the outlet valve The container according to claim 14, further comprising.

18. A method for use in a reactant source container, comprising: Accessing an internal region of a container body of the reactant source container, the internal region including a plurality of individual pockets; Inserting a preformed block of a compressed solid precursor into each of the plurality of individual pockets; Attaching a lid to the container body to enclose the internal region; Raising the temperature of the reactant source container and introducing a carrier gas through a flow path extending between a flow path inlet end and a flow path outlet end through the internal region of the reactant source container, the carrier gas removing the evaporated precursor from the container; A method comprising.

19. The method according to claim 18, wherein the carrier gas is guided over the top surface of each of the plurality of individual pockets as it passes between the flow path inlet end and the flow path outlet end.

20. The method according to claim 18, wherein the carrier gas is guided over a path that at least partially meanders between the flow path inlet end and the flow path outlet end.

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