Pressing member and holding device

Abstract

To provide a pressing member and a holding device, which enable both uniform pressing on a pressing target and efficient heating or cooling of the pressing target.SOLUTION: A pressing member is for pressing on a pressing target and comprises: a pressed part for receiving an external load; and a pressing part extending from the pressed part to be in contact with and press the pressing target. The pressing part has a plurality of through-holes penetrating in an extension direction and a hole extending in a direction perpendicular to the penetrating direction of the through-holes.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a pressing member and a holding device.

Background Art

[0002] Conventionally, when performing a conduction state inspection or an operation characteristic inspection of an object to be inspected such as a semiconductor integrated circuit, a plurality of contact probes are used to establish an electrical connection between the object to be inspected and a signal processing device having a circuit board that outputs a test signal. These plurality of contact probes are set in a holding device for the object to be inspected called a lid or housed in a socket (see, for example, Patent Documents 1 and 2). At this time, a pressing member for pressing the object to be inspected against the contact probe is provided on the lid or the socket. For example, a through hole through which a medium (liquid or gas) for heating or cooling the object to be inspected passes is formed in the pressing member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, as described in Patent Documents 1 and 2, the through hole formed in the above-described pressing member is provided at the central portion of the pressing member. At this time, if the size of the through hole is increased to improve the efficiency of heating or cooling, the pressing against the object to be inspected may become unstable.

[0005] The present invention has been made in view of the above, and an object thereof is to provide a pressing member and a holding device capable of achieving both uniform pressing against an object to be pressed and efficient heating or cooling of the object to be pressed.

Means for Solving the Problem

[0006] In order to solve the above-described problems and achieve the object, a pressing member according to the present invention is a pressing member that presses a pressing target, and includes a pressed portion that receives an external load, and a pressing portion that extends from the pressed portion and abuts against the pressing target to perform pressing. The pressing portion is formed with a plurality of through holes that penetrate in the extending direction and a hole portion that extends in a direction intersecting the penetrating direction of the through holes.

[0007] Further, the pressing member according to the present invention is characterized in that, in the above invention, the plurality of through holes are arranged in a lattice pattern.

[0008] Further, the pressing member according to the present invention is characterized in that, in the above invention, the hole portion is a slit formed on the end surface.

[0009] Further, the pressing member according to the present invention is characterized in that, in the above invention, the hole portion is a through hole formed on a side surface continuous with the end surface.

[0010] Further, the pressing member according to the present invention has a recess that forms a space extending from the pressed portion toward the pressing portion side, and the pressing portion has a bottomed cylindrical shape with a space formed by the recess and a bottom provided on the side opposite to the pressed portion side, and the hole portion is formed on a wall surface that forms the recess.

[0011] Further, a holding device according to the present invention includes a frame, a base plate that rotatably supports the frame, and a pressing member that is provided between the frame and the base plate and presses a pressing target. The pressing member has a pressed portion that receives an external load and a pressing portion that extends from the pressed portion and abuts against the pressing target to perform pressing. The pressing portion is formed with a plurality of through holes that penetrate in the extending direction and a hole portion that extends in a direction intersecting the penetrating direction of the through holes.

Advantages of the Invention

[0012] According to the present invention, there is an effect that uniform pressing against an object to be pressed and efficient heating or cooling of the object to be pressed can be achieved simultaneously.

Brief Description of the Drawings

[0013]

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DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited by the following embodiments. Also, each drawing referred to in the following description only schematically shows the shape, size, and positional relationship to the extent that the content of the present invention can be understood. Therefore, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing.

[0015] (Embodiment) FIG. 1 is a cross-sectional view showing the configuration of a lid according to an embodiment of the present invention. The lid 1 shown in FIG. 1 is a device used when performing an electrical characteristic inspection of a semiconductor integrated circuit 100, which is an object to be inspected. The lid 1 presses the semiconductor integrated circuit 100 against a contact probe 102 held by a probe holder 101, and sends a medium for heating or cooling to the semiconductor integrated circuit 100 side to heat or cool the semiconductor integrated circuit 100. The contact probe 102 transmits an inspection signal output from the circuit board to the semiconductor integrated circuit 100.

[0016] The lid 1 includes a frame 2, a base plate 3, a latch 4, a bearing 5, a pressing member 6, a compression spring 7, a torsion spring 8, a bolt 9, and a handle 10.

[0017] The frame 2 is rotatably provided around a predetermined axis with respect to the base plate 3. The base plate 3 is fixed to the object to be inspected (semiconductor integrated circuit 100) and the probe holder 101. The frame 2 is biased in a direction away from the base plate 3 by a torsion spring 8. The torsion spring 8 is attached to a shaft 3a formed on the base plate 3, with one end fixed to the frame 2 and the other end fixed to the base plate 3.

[0018] The latch 4 is rotatably supported about the shaft 2a with respect to the frame 2. The latch 4 maintains the state in which the frame 2 is in pressure contact with the base plate 3 by locking to the base plate 3. The latch 4 is biased by a compression spring 7 to rotate toward the base plate 3 side. Therefore, when the latch 4 rolls, the locking state between the latch 4 and the base plate 3 changes. At this time, when the latch 4 is locked to the base plate 3, the position of the frame 2 with respect to the base plate 3 is fixed.

[0019] The bearing 5 supports the frame 2 and the bolt 9 so that rotation about the shaft of the bolt 9 is not transmitted to the frame 2 or the pressing member 6.

[0020] One end of the pressing member 6 abuts against the bolt 9, and the other end abuts against the inspection target (semiconductor integrated circuit 100) to be pressed. The pressing member 6 has a pressed portion 61 that abuts against the bolt 9 and receives a load from the bolt 9, and a pressing portion 62 that extends to the side opposite to the side of the pressed portion 61 that abuts against the bolt 9 and presses the inspection target. The pressed portion 61 has a flat plate shape. The pressing portion 62 extends in a prismatic shape from the central portion of the pressed portion 61. The pressing member 6 is formed using, for example, PEEK (Poly Ether Ether Ketone), copper, aluminum, anodized aluminum, ceramics, etc. In addition, for example, materials in which copper is coated with nickel plating, aluminum and anodized aluminum are mixed, or the characteristics are adjusted based on PEEK may also be used.

[0021] The bolt 9 is screwed with the frame 2, one end abuts against the pressing member 6, and a handle 10 is provided at the other end. The user rotates the bolt 9 about its axis by rotating the handle 10. In addition, through holes 1a penetrating in the axial direction N are formed in the frame 2, the bolt 9, and the handle 10. This axis N passes through the center of the pressing member 6.

[0022] Figures 2 and 3 are perspective views showing a partial configuration of a pressing member included in a lid according to an embodiment of the present invention. Figure 2 shows an end portion of the pressing portion 62 on the side opposite to the side connected to the pressed portion 61. Figure 3 shows a configuration of a part (1 / 4) obtained by cutting the pressing member 6 into four equal parts.

[0023] The pressing member 6 has a plurality (here, 16) of through holes 63 that penetrate through the end face on the side opposite to the pressing portion 62 side of the pressed portion 61 and the end face on the side opposite to the pressed portion 61 side of the pressing portion 62, and a plurality (here, 8) of slits 64 that extend from the end face on the side opposite to the pressed portion 61 side of the pressing portion 62 to the side surface connected to the end face and extend in a direction orthogonal to the penetrating direction of the through holes 63. The plurality of through holes 63 are arranged in a lattice pattern. For example, at both end faces of the pressing portion 62, the respective openings of each through hole 63 are arranged in a lattice pattern. Also, each slit 64 passes through the center of each intersecting through hole 63. Further, the slits 64 that intersect each other extend in directions orthogonal to each other.

[0024] In addition, in Figure 3, an example is shown in which the opening on the pressed portion 61 side of the through hole 63 has a tapered shape that expands in diameter toward the outside, but it is not limited to this shape. For example, it may have a uniform diameter when opening. Also, in the present embodiment, an example in which a plurality of through holes 63 are arranged in a lattice pattern will be described, but a staggered lattice pattern, a lattice pattern or a staggered lattice pattern in which some are intermittent, or an irregular arrangement according to the characteristics of the object to be pressed may also be used. Further, the slits 64 do not necessarily need to be orthogonal to each other, and the angle formed by the intersecting slits 64 can be set to an angle other than a right angle. Furthermore, the extending direction of the slits 64 is not limited to the direction orthogonal to the penetrating direction of the through holes 63, and any direction that intersects the penetrating direction of the through holes 63 may be used.

[0025] Here, when heating or cooling the object to be inspected (semiconductor integrated circuit 100) through the lid 1, a medium (liquid or gas) is introduced through the through-hole 1a. At this time, in the pressing member 6, since a plurality of through-holes 63 and a plurality of slits 64 are formed, the medium can be transmitted to the object to be inspected quickly and uniformly.

[0026] Also, when pressing the object to be inspected toward the contact probe 102 side by the lid 1, the pressing portion 62 has a material portion (thickness) between the through-holes 63, and the portions other than the openings of the through-holes 63 and the slits 64 form the contact surface with the object to be inspected. Therefore, a contact area is ensured, and as a result, the object to be inspected can be pressed uniformly. The pressing portion 62 shown in FIG. 2 has contact surfaces arranged in a lattice pattern. By arranging the contact surfaces regularly in this way, it becomes possible to press the object to be pressed uniformly.

[0027] According to the embodiment described above, by securing the material portion (thickness) other than the portions where the through-holes 63 and the slits 64 are formed, uniform pressing against the object to be inspected is realized, and by forming the through-holes 63 and the slits 64, efficient heating or cooling of the object to be inspected can be realized.

[0028] (Modification 1) Next, Modification 1 of the present embodiment will be described with reference to FIGS. 4 and 5. FIGS. 4 and 5 are perspective views showing a partial configuration of a pressing member provided in a lid according to Modification 1 of the embodiment of the present invention. Modification 1 has the same configuration as the above-described embodiment except that the configuration of the pressing member in the lid 1 according to the embodiment is changed. The same components as those in the above-described embodiment are denoted by the same reference numerals.

[0029] The pressing member 6A according to Modification 1 has a pressed portion 61A that abuts against the bolt 9 and receives a load from the bolt 9, and a pressing portion 62A that extends on the side opposite to the side where the pressed portion 61A abuts against the bolt 9 and presses the object to be inspected (semiconductor integrated circuit 100). The pressed portion 61A has a flat plate shape. The pressing portion 62A extends in a prismatic shape from the central portion of the pressed portion 61A.

[0030] FIG. 4 shows the end portion of the pressing portion 62A on the side opposite to the side continuous with the pressed portion 61A. FIG. 5 shows the configuration of a part (1 / 4) obtained by cutting the pressing member 6A into four equal parts.

[0031] The pressing member 6A has a recess 65 that forms a space extending from the pressed portion 61A toward the pressing portion 62A side. That is, the pressing portion 62A forms a bottomed cylindrical shape in which a space is formed by the recess 65 and a bottom portion 621 provided on the side opposite to the pressed portion 61A side. Note that the recess 65 forms a space connected to all of a plurality of first through-holes 66 described later. Further, on the bottom portion 621 of the pressing portion 62A, a plurality (here, 16) of first through-holes 66 that are connected to the recess 65 and penetrate the bottom portion 621, and a plurality (here, 16) of second through-holes 67 that are provided on the wall surface forming the recess 65 and penetrate the wall surface are formed. The plurality of first through-holes 66 are arranged in a lattice pattern. For example, when viewed from the end surface of each first through-hole 66 on the side opposite to the pressed portion 61A side of the pressing portion 62A, the openings are arranged in a lattice pattern. The second through-hole 67 shows an example located on the bottom portion 621 side in FIGS. 4 and 5, but is not limited to this position, and can be provided on the side surface connected to the end surface of the pressing portion 62A on the side opposite to the pressed portion 61A, can be on the pressed portion 61A side, or the positions of the through-holes can be different for each through-hole.

[0032] Here, when heating or cooling the inspection object through the lid according to the first modification, a medium (liquid or gas) is introduced through the through-hole 1a. At this time, in the pressing member 6A, since the recess 65 and the plurality of first through-holes 66 are formed, the medium can be quickly and uniformly transmitted to the inspection object. Further, since the second through-holes 67 are formed, the circulation of the medium in the pressing member 6A is promoted, and the medium can be efficiently circulated.

[0033] Further, when pressing the object to be inspected toward the contact probe 102 by the lid, the pressing portion 62A has a thickness between the first through holes 66 (here, the bottom portion 621), and the portion other than the openings of the first through holes 66 forms a contact surface with respect to the object to be inspected. As a result, a contact area is ensured, and accordingly, the object to be inspected can be uniformly pressed.

[0034] According to the first modification example described above, uniform pressing against the object to be inspected is achieved by securing a material portion (thickness; here, mainly the bottom portion 621) other than the portion where the concave portion 65 and the first through holes 66 are formed, and efficient heating or cooling of the object to be inspected can be achieved by forming the concave portion 65, the first through holes 66, and the second through holes 67.

[0035] (Modification Example 2) Next, a second modification example of the present embodiment will be described with reference to FIGS. 6 and 7. FIGS. 6 and 7 are perspective views showing a partial configuration of a pressing member included in a lid according to a second modification example of the embodiment of the present invention. The second modification example has the same configuration as the above-described embodiment except that the configuration of the pressing member in the lid 1 according to the embodiment is changed. The same components as those in the above-described embodiment are denoted by the same reference numerals.

[0036] The pressing member 6B according to the second modification example has a pressed portion 61B that abuts against the bolt 9 and receives a load from the bolt 9, and a pressing portion 62B that extends to the side opposite to the side of the pressed portion 61B that abuts against the bolt 9 and presses the object to be inspected (semiconductor integrated circuit 100). The pressed portion 61B has a flat plate shape. The pressing portion 62B extends in a prismatic shape from the central portion of the pressed portion 61B.

[0037] FIG. 6 shows an end portion of the pressing portion 62B on the side opposite to the side continuous with the pressed portion 61B. FIG. 7 shows a configuration of a part (1 / 4) obtained by cutting the pressing member 6B into four equal parts.

[0038] The pressing member 6B is formed with a through hole 63 (referred to herein as the first through hole 63) and a plurality (here, eight) of second through holes 68 formed in the pressing portion 62B and penetrating in a direction orthogonal to the penetrating direction of the first through hole 63. The second through holes 68 are formed on the side surface that continues to the end surface on the side opposite to the pressed portion 61B side of the pressing portion 62B. In FIGS. 6 and 7, the second through holes 68 are shown as being located on the end side opposite to the pressed portion 61B side of the pressing portion 62B, but are not limited to this position, and may be on the side of the pressed portion 61A, or may have different positions for each through hole.

[0039] Here, when heating or cooling the inspection target (semiconductor integrated circuit 100) through the lid according to Modification 2, a medium (liquid or gas) is introduced through the through hole 1a. At this time, in the pressing member 6A, since a plurality of first through holes 63 are formed, the medium can be quickly and uniformly transmitted to the inspection target (semiconductor integrated circuit 100). Further, since the second through holes 68 are formed, the circulation of the medium in the pressing member 6B is promoted, and the medium can be efficiently circulated.

[0040] Also, when the inspection target (semiconductor integrated circuit 100) is pressed toward the contact probe 102 by the lid, the pressing portion 62B has a thickness between the first through holes 63, and the portion other than the openings of the first through holes 63 forms a contact surface with the inspection target, so that the inspection target (semiconductor integrated circuit 100) can be uniformly pressed.

[0041] According to Modification 2 described above, uniform pressing against the inspection target is achieved by ensuring the thickness (here, mainly the bottom portion 621) other than the portions where the concave portion 65 and the first through hole 66 are formed, and efficient heating or cooling of the inspection target can be achieved by forming the first through hole 63 and the second through hole 68.

[0042] (Analysis example) Hereinafter, an example of analyzing the displacement during pressing of the pressing member to be inspected and the temperature rise during heating for Embodiments, Modification Examples 1 and 2, and the conventional example will be described with reference to FIGS. 8 to 22. In the lid, components other than the pressing member will be described as being the same.

[0043] [Conventional Example 1] FIGS. 8 and 9 are perspective views showing a partial configuration of a conventional pressing member. The pressing member 200 according to Conventional Example 1 has a pressed portion 201 that abuts against the bolt 9 and receives a load from the bolt 9, and a pressing portion 202 that extends on the side opposite to the side where the pressed portion 201 abuts against the bolt 9 and presses the object to be inspected. The pressed portion 201 has a flat plate shape. The pressing portion 202 extends in a prismatic shape from the central portion of the pressed portion 201.

[0044] FIG. 8 shows the end portion of the pressing portion on the side opposite to the side connected to the pressed portion. FIG. 9 shows the configuration of a part (1 / 4) obtained by cutting the pressing member into four equal parts. The pressing member 200 has a through hole 203 that penetrates the end surface of the pressed portion 201 on the side opposite to the pressing portion 202 side and the end surface of the pressing portion 202 on the side opposite to the pressed portion 201 side, and a plurality (here, four) of slits 204 provided at the end of the pressing portion 202 on the side opposite to the pressed portion 201 side and extending in a direction orthogonal to the penetrating direction of the through hole 203. The through hole 203 forms an opening having a diameter that is at least half the length of one side of the rectangle formed by the outer edge in a cross section having a plane orthogonal to the extending direction of the pressing portion 202 as the cutting surface. For each slit 204, the straight lines extending in the extending direction of the slit 204 pass through the center of the through hole 203, for example.

[0045] [Conventional Example 2] FIGS. 10 and 11 are perspective views showing a partial configuration of a conventional pressing member. The pressing member 200A according to the second conventional example has a pressed portion 201A that abuts against the bolt 9 and receives the load from the bolt 9, and a pressing portion 202A that extends to the side opposite to the side of the pressed portion 201A that abuts against the bolt 9 and presses the inspection object. The pressed portion 201A has a flat plate shape. The pressing portion 202A extends in a prismatic shape from the central portion of the pressed portion 201A.

[0046] FIG. 10 shows the end portion of the pressing portion on the side opposite to the side connected to the pressed portion. FIG. 11 shows the configuration of a part (1 / 4) obtained by cutting the pressing member into four equal parts. The pressing member 200 has a through hole 205 that penetrates the end face of the pressed portion 201A on the side opposite to the pressing portion 202A side and the end face of the pressing portion 202A on the side opposite to the pressed portion 201A side, and a plurality (here, four) of slits 206 that are provided at the end portion of the pressing portion 202A on the side opposite to the pressed portion 201A side and extend in a direction orthogonal to the penetrating direction of the through hole 205 are formed. The through hole 205 forms an opening having a diameter less than half the length of one side of the rectangle formed by the outer edge in a cross section having a plane orthogonal to the extending direction of the pressing portion 202A as a cut surface. For each slit 206, the straight lines extending in the extending direction of the slit 206 respectively pass through, for example, the center of the through hole 203.

[0047] Hereinafter, an example in which the displacements of the pressing member and the inspection object when the surface on the side opposite to the pressing member side of the inspection object (model 400) is pressurized at 1.54 MPa will be described.

[0048] FIG. 12 is a diagram for explaining the displacements of the pressing member and the inspection object during pressing by the pressing member shown in FIGS. 2 and 3. FIG. 13 is a diagram for explaining the displacement of the inspection object during pressing by the pressing member shown in FIGS. 2 and 3. In FIGS. 12 and 13, for the model 300 corresponding to the pressing member 6 shown in FIGS. 2 and 3 and the model 400 corresponding to the inspection object, the displacements between the vicinity of the end portion on the inspection object side of the pressing member and the inspection object during pressing are shown in color.

[0049] FIG. 14 is a diagram for explaining the displacement of the pressing member and the object to be inspected during pressing by the pressing member shown in FIGS. 4 and 5. FIG. 15 is a diagram for explaining the displacement of the object to be inspected during pressing by the pressing member shown in FIGS. 4 and 5. In FIGS. 14 and 15, for the model 310 corresponding to the pressing member 6A shown in FIGS. 4 and 5 and the model 400 corresponding to the object to be inspected, the displacements between the vicinity of the end portion on the object-to-be-inspected side of the pressing member and the object to be inspected during pressing are shown in color.

[0050] FIG. 16 is a diagram for explaining the displacement of the pressing member and the object to be inspected during pressing by the pressing member shown in FIGS. 6 and 7. FIG. 17 is a diagram for explaining the displacement of the object to be inspected during pressing by the pressing member shown in FIGS. 6 and 7. In FIGS. 16 and 17, for the model 320 corresponding to the pressing member 6B shown in FIGS. 6 and 7 and the model 400 corresponding to the object to be inspected, the displacements between the vicinity of the end portion on the object-to-be-inspected side of the pressing member and the object to be inspected during pressing are shown in color.

[0051] FIG. 18 is a diagram for explaining the displacement of the pressing member and the object to be inspected during pressing by the pressing member shown in FIGS. 8 and 9. FIG. 19 is a diagram for explaining the displacement of the object to be inspected during pressing by the pressing member shown in FIGS. 8 and 9. In FIGS. 18 and 19, for the model 500 corresponding to the pressing member 200 (conventional example 1) shown in FIGS. 8 and 9 and the model 400 corresponding to the object to be inspected, the displacements between the vicinity of the end portion on the object-to-be-inspected side of the pressing member and the object to be inspected during pressing are shown in color.

[0052] FIG. 20 is a diagram for explaining the displacement of the pressing member and the object to be inspected during pressing by the pressing member shown in FIGS. 10 and 11. FIG. 21 is a diagram for explaining the displacement of the object to be inspected during pressing by the pressing member shown in FIGS. 10 and 11. In FIGS. 20 and 21, for the model 510 corresponding to the pressing member 200A (conventional example 2) shown in FIGS. 10 and 11 and the model 400 corresponding to the object to be inspected, the displacements between the vicinity of the end portion on the object-to-be-inspected side of the pressing member and the object to be inspected during pressing are shown in color.

[0053] As shown in FIGS. 20 and 21, when pressing the object to be inspected using the pressing portion 202A having a large contact area with the object to be inspected, a load is uniformly applied to the object to be inspected, and the displacements of the pressing member 200A and the object to be inspected during pressing are small.

[0054] On the other hand, as shown in FIGS. 18 and 19, when pressing the object to be inspected using the pressing portion 202 having a small contact area with the object to be inspected, the load applied to the object to be inspected becomes non-uniform, and the displacements of the pressing member 200 and the object to be inspected during pressing become large.

[0055] In contrast, as shown in FIGS. 12 to 17, the pressing members 6, 6A, and 6B according to the present embodiment and Modification Examples 1 and 2 have displacements equal to or smaller than those of Comparative Example 2. Note that, in the models 310 (pressing member 6A) and 400 (object to be inspected) shown in FIGS. 14 and 15, the maximum value of the displacement is large, but the object to be inspected is displaced as a whole, and the difference between the maximum displacement and the minimum displacement is smaller than the displacement amount of the object to be inspected shown in FIG. 19.

[0056] From these analysis results, it can be said that the pressing members according to the present embodiment and Modification Examples 1 and 2 can press the object to be inspected more uniformly than the pressing member according to Comparative Example 1.

[0057] Subsequently, an example of analyzing the spread (heat distribution) of heat when heating the object to be inspected via the pressing member will be described.

[0058] FIG. 22 is a diagram for explaining the time change of the temperature rise in each pressing member. FIG. 22 shows the temperature changes of the present invention (pressing member 6 according to the present embodiment: see FIGS. 2 and 3), Comparative Example 1 (pressing member 200: see FIGS. 8 and 9), and Comparative Example 2 (pressing member 200A: see FIGS. 10 and 11).

[0059] Here, it can be seen that when heating the object to be inspected using the pressing portion 202 having a large opening of the through hole (Comparative Example 1), the spread of heat is faster than when using the pressing portion 202A having a small opening of the through hole (Comparative Example 2).

[0060] In contrast, it can be seen that the pressing member 6 according to the present embodiment has a faster heat spread than those of the conventional examples 1 and 2. From these analysis results, it can be said that the pressing member according to the present embodiment can heat the inspection object faster than the pressing member according to the conventional example 1. Further, in the pressing members according to the first and second modified examples as well, since a space such as a through-hole is secured in the same manner as the pressing member according to the embodiment, it can be said that the inspection object can be heated equal to or more than the pressing member according to the conventional example 1.

[0061] According to the analysis results described above, it can be said that the pressing members according to the present embodiment and the first and second modified examples can achieve both uniform pressing on the inspection object and efficient heating or cooling of the pressed object, as compared with the conventional examples 1 and 2.

[0062] So far, the embodiments for carrying out the present invention have been described, but the present invention should not be limited only by the above-described embodiments. In the above-described embodiments and the first and second modified examples, an example in which the through-hole penetration directions are parallel to each other has been described, but the through-holes may be formed so as to be different from each other. Further, the lid configuration described in the embodiment is merely an example, and various known types of lids can be applied. Furthermore, the pressing members according to the present embodiment and the modified examples may be adopted in other holding devices such as sockets and handlers.

[0063] Thus, the present invention can include various embodiments not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims.

[0064] As described above, the pressing member and the holding device according to the present invention are suitable for achieving both uniform pressing on the pressing object and efficient heating or cooling of the pressed object.

Explanation of Reference Numerals

[0065] 1 Lid 2 Frame 3 Base Plate 4 Latch 5 Bearing 6, 6A, 6B, 200, 200A Pressing Member 7 Compression Spring 8 Torsion Spring 9 Bolt 10 Handle 61, 61A, 61B, 201, 201A Pressed Portion 62, 62A, 62B, 202, 202A Pressing Portion 63 Through-Hole (First Through-Hole) 64, 204, 206 Slit 65 Recess 66 First Through-Hole 67, 68 Second Through-Hole 100 Semiconductor Integrated Circuit 101 Probe Holder 102 Contact Probe 203, 205 Through-Hole 621 Bottom

Claims

1. A pressing member for pressing an object to be pressed, comprising: a pressed portion for receiving an external load; a pressing portion extending from the pressed portion and contacting and pressing the object to be pressed; The pressing portion is provided with a plurality of through holes penetrating in the extending direction, and a hole portion extending in a direction intersecting the penetrating direction of the through holes. A pressing member characterized in that the plurality of through holes are arranged in a lattice pattern. The pressing member according to claim 1, characterized in that the hole portion is a slit formed on the end surface. The pressing member according to claim 1, characterized in that the hole portion is a through hole formed on a side surface continuous with the end surface. The pressing member according to claim 1, characterized in that it has a recess for forming a space extending from the pressed portion toward the pressing portion side, and the pressing portion has a bottomed cylindrical shape with a space formed by the recess and provided on the side opposite to the pressed portion side, and the hole portion is formed on a wall surface forming the recess.

6. A holding device, comprising: a frame; a base plate for rotatably supporting the frame; a pressing member provided between the frame and the base plate for pressing an object to be pressed, the pressing member having a pressed portion for receiving an external load and a pressing portion extending from the pressed portion and contacting and pressing the object to be pressed, and the pressing portion being provided with a plurality of through holes penetrating in the extending direction and a hole portion extending in a direction intersecting the penetrating direction of the through holes. Characterized in that ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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