Joining device, and article manufacturing method

Abstract

To provide a technique advantageous for reducing the generation of particles in a joining device.SOLUTION: A joining device performing processing of joining a first member to a second member, comprises: a first holding unit that holds a chuck in contact with the first member in the processing; a second holding unit that holds the chuck in attachment of the chuck to the first holding unit and / or removal of the chuck from the first holding unit; and a control unit that controls the balance between a first attractive force acting between the first holding unit and the chuck, and a second attractive force acting between the second holding unit and the chuck.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a bonding apparatus and an article manufacturing method.

Background Art

[0002] As a semiconductor manufacturing apparatus for manufacturing semiconductor devices and the like, a bonding apparatus is known that bonds a die, which is a bonded object, onto a substrate, which is an object to be bonded. For example, in the bonding apparatus, a process of picking up one die from a plurality of dies arranged on a dicing tape, a process of transporting the picked-up die, and a process of bonding the transported die onto the substrate are performed. In these processes, a jig for contacting the die is provided at the tip of a head that holds the die. The jig may be called a collet chuck and may hereinafter simply be referred to as a collet.

[0003] The collet is detachably provided on the head and may be replaced according to the variety (for example, size) of the die, or may be replaced due to reasons such as breakage or contamination of the collet. Therefore, the bonding apparatus may be provided with a mechanism for attaching and detaching the collet to and from the head. Patent Document 1 discloses a technique of gripping a collet with an opening and closing arm having a claw structure to attach the collet to a head (collet holder) and detach the collet from the head.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the technique described in Patent Document 1, when gripping a collet with an opening and closing arm having a claw structure, the opening and closing arm slides on the collet, so particles may be generated every time the collet is attached or detached. If such particles adhere to the collet, it may become difficult to bond the die to the substrate with high precision, such as the die tilting due to the influence of the particles and being held by the collet. Therefore, a technique for reducing the generation of particles during attachment and detachment of the collet is desired.

[0006] Therefore, an object of the present invention is to provide a technique advantageous for reducing the generation of particles in a bonding apparatus.

Means for Solving the Problems

[0007] In order to achieve the above object, a bonding apparatus according to one aspect of the present invention is a bonding apparatus that performs a process of bonding a first member to a second member, and in the process, a first holding portion that holds a chuck that contacts the first member, and attachment of the chuck to the first holding portion, and / or detachment of the chuck from the first holding portion, a second holding portion that holds the chuck, and a control portion that controls the balance between a first attractive force acting between the first holding portion and the chuck and a second attractive force acting between the second holding portion and the chuck.

[0008] A further object or other aspect of the present invention will be clarified by the preferred embodiments described below with reference to the accompanying drawings.

Effects of the Invention

[0009] According to the present invention, for example, it is possible to provide a technique advantageous for reducing the generation of particles in a bonding apparatus.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Modes for Carrying Out the Invention

[0011] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential for the invention, and the plurality of features may be arbitrarily combined. Furthermore, in the accompanying drawings, the same or similar configurations are given the same reference numerals, and duplicate explanations are omitted.

[0012] In this specification and the accompanying drawings, directions are typically indicated in an XYZ coordinate system with a plane parallel to the horizontal plane being the XY plane. Directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are referred to as the X-direction, Y-direction, and Z-direction, respectively, and rotations around the X-axis, Y-axis, and Z-axis are denoted as θX, θY, and θZ, respectively. Control and drive (movement) with respect to the X-axis, Y-axis, and Z-axis each mean control or drive (movement) in a direction parallel to the X-axis, a direction parallel to the Y-axis, and a direction parallel to the Z-axis. Also, control or drive with respect to the θX-axis, θY-axis, and θZ-axis each mean control or drive related to rotation around an axis parallel to the X-axis, rotation around an axis parallel to the Y-axis, and rotation around an axis parallel to the Z-axis.

[0013] <First Embodiment> The bonding device 100 according to the first embodiment of the present invention will be described. FIG. 1 is a schematic diagram showing a configuration example of the bonding device 100 of the present embodiment. The bonding device 100 is a device that bonds a first member (bonded object) to a second member (object to be bonded), and can be used as a semiconductor manufacturing device for manufacturing semiconductor devices. The bonding device 100 of the present embodiment is a device that sequentially bonds each of a plurality of first members to a second substrate. Note that the configuration example of the bonding device 100 shown in FIG. 1 and the flow of the bonding process described below are merely examples and do not limit the form of the present invention.

[0014] As the first member, for example, a chip having a bonding surface provided with a pattern can be used. Examples of such chips include dies obtained by singulating a wafer on which a semiconductor device is formed, as well as those in which several dies are stacked, small pieces of material, optical elements, MEMS, and structures. In the present embodiment, an example in which a die is used as the first member will be described, and hereinafter the first member may be referred to as a "die".

[0015] As the second member, for example, a substrate having a joint surface provided with a pattern can be used. As the substrate, in addition to a wafer on which a semiconductor device is formed, a silicon wafer, a silicon wafer on which wiring is formed, a glass wafer, a glass panel on which wiring is formed, an organic panel (PCB) on which wiring is formed, a metal panel, etc. can be mentioned. The substrate may be a wafer to which one or more dies are already joined. In the present embodiment, an example in which a wafer is used as the second member will be described, and hereinafter the second member may be referred to as a "substrate".

[0016] In addition, in the present embodiment, as a bonding method between the first member (die) and the second member (substrate), various temporary bonding or permanent bonding methods can be applied. For example, as the bonding method, bonding with an adhesive, temporary bonding with a temporary adhesive, bonding by hybrid bonding, atomic diffusion bonding, vacuum bonding, bump bonding, etc. can be mentioned.

[0017] As shown in FIG. 1, the bonding apparatus 100 includes a pickup unit 40, a bonding unit 50, and a control unit CNT. The control unit CNT is configured by a computer (information processing apparatus) having a processor such as a CPU (Central Processing Unit) and a storage unit such as a memory, and controls the bonding process by controlling each part of the bonding apparatus 100. The bonding process may include a step of picking up the die 71 (first member) by the pickup unit 40 and a step of bonding the die 71 to the substrate 72 by the bonding unit 50. Further, the control unit CNT can also control the attachment process and / or the detachment process described later.

[0018] The pickup unit 40 is a unit that picks up the dies 71 one by one from the dicing tape 43a attached to the dicing frame 43, and may include a pickup head 41 and a frame holding part 42. The dicing frame 43 is held by the frame holding part 42, and a plurality of dies 71 are arranged on the dicing tape 43a attached to the dicing frame 43. The pickup head 41 is configured to be movable in the Z direction, and picks up one die 71 from among the plurality of dies 71 on the dicing tape 43a. Specifically, the pickup head 41 holds the die 71 on the dicing tape 43a by moving in the -Z direction, and picks up the die 71 from the dicing tape 43a by moving in the +Z direction. Further, the pickup head 41 is configured to be movable in the XY direction. The pickup head 41 that has picked up the die 71 moves from the pickup unit 40 to the bonding unit 50, and conveys the die 71 onto the intermediate stage 52 of the bonding unit 50.

[0019] The bonding unit 50 is a unit that bonds the die 71 to the substrate 72, and may include a bonding head 51, an intermediate stage 52, a substrate stage 53, a die imaging unit 54, and a substrate imaging unit 55. The bonding head 51 is configured to hold the die 71 and be movable in the Z direction. The intermediate stage 52 holds the die 71 conveyed by the pickup head 41, and is configured to be movable in the XY direction on the base surface plate 56. The substrate stage 53 holds the substrate 72, and is configured to be movable in the XY direction on the base surface plate 56. The die imaging unit 54 is disposed, for example, on the substrate stage 53, and images the bonding surface of the die 71 held by the bonding head 51. Further, the substrate imaging unit 55 images the bonding surface of the substrate 72 held by the substrate stage 53.

[0020] When the die 71 is conveyed onto the intermediate stage 52 by the pickup head 41, the intermediate stage 52 moves on the base platen 56 so that the die 71 is disposed below the bonding head 51. The bonding head 51 moves in the -Z direction to hold the die 71 on the intermediate stage 52 and then moves in the +Z direction while holding the die 71. Next, the substrate stage 53 moves on the base platen 56 so that the target area of the substrate 72 to which the die 71 is to be bonded is disposed below the bonding head 51. After the alignment between the die 71 held by the bonding head 51 and the target area of the substrate 72 is performed by the movement of the substrate stage 53, the bonding head 51 moves in the -Z direction and bonds the die 71 onto the target area of the substrate 72. The alignment between the die 71 and the substrate 72 can be performed based on, for example, an image of the bonding surface of the die 71 obtained by the die imaging unit 54 and an image of the surface to be bonded of the substrate 72 obtained by the substrate imaging unit 55.

[0021] Here, in the bonding apparatus 100, at least one of the units that hold the die 71 may be provided with a chuck 10 that contacts the die 71 and a holder 20 (first holding portion) that holds the chuck 10. In the configuration example shown in FIG. 1, as the unit that holds the die 71, a pickup head 41, a bonding head 51, and an intermediate stage 52 are provided, and at least one of them is provided with the chuck 10 and the holder 20. Hereinafter, as an example, a configuration example of the pickup head 41 having the chuck 10 and the holder 20 will be described. Further, in the present embodiment, an example in which a collet chuck (sometimes abbreviated as "collet") is used as the chuck 10 will be described. Hereinafter, the chuck 10 may be denoted as "collet 10", and the holder 20 that holds the collet 10 may be denoted as "collet holder 20".

[0022] FIG. 2 shows a configuration example of a pickup head 41 having a collet 10 and a collet holder 20. The pickup head 41 can generally include a collet 10, a collet holder 20 that holds the collet 10, and a head body 41a that holds the collet holder 20. FIG. 2(a) shows a state in which the collet 10, the collet holder 20, and the head body 41a are separated, and FIG. 2(b) shows a state in which the collet 10, the collet holder 20, and the head body 41a are integrated. Further, the pickup head 41 can be configured to be movable in the Z direction by driving the head body 41 in the Z direction by a drive mechanism 44.

[0023] The collet holder 20 is always held by the head body 41a. The head body 41a is provided with flow paths 41b to 41c communicating with a vacuum source 45, and a negative pressure (vacuum suction force) for holding the die 71 is provided from the vacuum source 45 to the flow paths 41b to 41c. The collet holder 20 is provided with a flow path 21. The flow path 21 of the collet holder 20 is arranged to communicate with the flow path 41b of the head body 41a in a state where the collet holder 20 is held by the head body 41a. Further, the collet holder 20 shown in FIG. 2 is provided with a first permanent magnet 22 (described later) that generates an attractive force (magnetic force) for attracting the collet 10, and a first negative pressure generation unit 23 (described later) constituted by a flow path communicating with the vacuum source 45. The flow path as the first negative pressure generation unit 23 is arranged to communicate with the flow path 41c of the head body 41a in a state where the collet holder 20 is held by the head body 41a.

[0024] The collet 10 is held by a collet holder 20 in the joining process. A flow path 11 is also provided in the collet 10. The flow path 11 of the collet 10 is arranged to communicate with the flow path 21 of the collet holder 20 in a state where the collet 10 is held by the collet holder 20. Thereby, a negative pressure is provided from a vacuum source 45 to the flow path 11 of the collet 10 through the flow path 41b of the head body 41a and the flow path 21 of the collet holder 20, and the die 71 contacting the contact surface 10a of the collet 10 can be held by the pickup head 41.

[0025] In the example of FIG. 2, the first permanent magnet 22 is provided in the collet holder 20, but it may be provided in the collet 10. That is, a first permanent magnet that generates an attractive force (magnetic force) for attracting the collet 10 and the collet holder 20 to each other may be provided in at least one of the collet 10 and the collet holder 20. The first permanent magnet is for compensating for the self-weight of the collet 10, that is, for preventing the collet 10 from falling off the collet holder 20 even when the joining device 100 stops.

[0026] The above-described configuration example of the pickup head 41 can be adopted for the bonding head 51 and the intermediate stage 52. Configuration examples of the collet 10, the collet holder 20, and the replacement holder 30 (Examples 1 to 6 of the present embodiment and Modification Examples 1 to 2 of the second embodiment), which will be described later, can also be adopted not only for the pickup head 41 but also for the bonding head 51 and the intermediate stage 52. Further, the collet 10 and the collet holder 20 may be configured as common components for the pickup head 41, the bonding head 51, and the intermediate stage 52, or may be configured as different components (shape and structure) for each unit. Note that the configuration example of the pickup head 41 is merely an example and does not limit the form of the present invention.

[0027] Incidentally, the collet 10 may be replaced according to the variety (e.g., size) of the die 71, or may be replaced due to reasons such as damage or contamination of the collet 10. Therefore, as shown in FIG. 1, the bonding apparatus 100 is provided with a collet replacement unit 60 for replacing the collet 10. The collet replacement unit 60 is used to perform an attachment process of attaching the collet 10 to the collet holder 20 and / or a removal process of removing the collet 10 from the collet holder 20. Hereinafter, a configuration example of the collet replacement unit 60 in the present embodiment will be described.

[0028] FIG. 3 shows a configuration example of the collet replacement unit 60. In FIG. 3, the collet 10 and the collet holder 20 are also illustrated. The collet replacement unit 60 may include a collet supply unit 30a, a collet disposal unit 30b, and a main body unit 61.

[0029] The collet supply unit 30a holds the collet 10 to be newly attached to the collet holder 20 in the attachment process and supplies the collet 10 to the collet holder 20. The collet disposal unit 30b holds the collet 10 received from the collet holder 20 in the removal process and disposes of the collet 10. The collet supply unit 30a and the collet disposal unit 30b may have the same configuration. Also, in the example of FIG. 3, a second negative pressure generation unit 32, which will be described later and is constituted by a flow path communicating with the vacuum source 62, is provided in each of the collet supply unit 30a and the collet disposal unit 30b.

[0030] The main body 61 supports the collet supply unit 30a and the collet disposal unit 30b. Also, the main body 61 may be configured as a drive mechanism that drives the collet supply unit 30a and the collet disposal unit 30b in the XY directions. Thereby, alignment between the collet holder 20 and the collet exchanger 60 can be performed so that the collet supply unit 30a is disposed below the collet holder 20 in the attachment process. Alternatively, alignment between the collet holder 20 and the collet exchanger 60 can be performed so that the collet disposal unit 30b is disposed below the collet holder 20 in the removal process. However, this alignment may be performed by a drive mechanism that drives a unit (for example, a pickup head 41, a bonding head 51, an intermediate stage 52) that holds the die 71, in addition to or instead of the drive mechanism (main body 61) of the collet exchanger 60. That is, it may be understood that the alignment between the collet holder 20 and the collet exchanger 60 in the attachment process and / or the removal process is performed by a drive mechanism that relatively drives the collet holder 20 and the collet exchanger 60.

[0031] Here, each of the collet supply unit 30a and the collet disposal unit 30b functions as a holding unit (second holding unit) that holds the collet 10 in the attachment process and / or the removal process. Hereinafter, the collet supply unit 30a and the collet disposal unit 30b may be collectively referred to as an "exchange holder 30". The exchange holder 30 is configured to hold the collet 10 so as not to contact the contact surface 10a of the collet 10. Further, in the example of FIG. 3, the roles are shared such that one of the plurality (two) of exchange holders 30 (collet supply unit 30a) performs the attachment process and the other (collet disposal unit 30b) performs the removal process, but it is not limited thereto. For example, one or more exchange holders 30 that can each perform both the attachment process and the removal process may be provided.

[0032] Next, a specific configuration example of the collet 10, the collet holder 20, and the replacement holder 30 in the present embodiment will be described. FIG. 4 shows a representative example of the specific configuration of the collet 10, the collet holder 20, and the replacement holder 30. FIGS. 4(a) to 4(b) show a representative example of the specific configuration of the collet holder 20, and FIGS. 4(c) to 4(d) show a representative example of the specific configuration of the collet 10. Further, FIGS. 4(e) to 4(g) show a representative example of the specific configuration of the replacement holder 30. For example, one of the collet holders 20 shown in FIGS. 4(a) to 4(b), one of the collets 10 shown in FIGS. 4(c) to 4(d), and one of the replacement holders 30 shown in FIGS. 4(e) to 4(g) can be selectively combined and applied to the bonding apparatus 100.

[0033] As described above, the collet 10 is held by the collet holder 20 and contacts the die 71 to suck and hold the die 71. The collet 10 has a flow path 11 that communicates with the vacuum source 45 through the flow path 21 of the collet holder 20 while being held by the collet holder 20. The collet 10 may be composed of a plurality of parts or a single part. Further, the collet holder 20 is held by at least one of the units that hold the die 71. Examples of the unit that holds the die 71 include the pickup head 41, the bonding head 51, and the intermediate stage 52.

[0034] At least one of the collet 10 and the collet holder 20 is provided with a first permanent magnet that generates an attractive force (magnetic force) for attracting the collet 10 and the collet holder 20 to each other. The first permanent magnet is for compensating for the self-weight of the collet 10, that is, for preventing the collet 10 from falling off the collet holder 20 even when the bonding apparatus 100 stops. Thereby, in the present embodiment, it is possible to prevent the collet 10 from falling off the collet holder 20 when the bonding apparatus 100 stops without fixing the collet 10 to the collet holder 20 by means such as bolting, adhesion, or mechanical clamping.

[0035] When the first permanent magnet 22 is provided in the collet holder 20 as shown in FIG. 4(a), the permanent magnet may not be provided in the collet 10 as shown in FIG. 4(c). In this case, the collet 10 may contain a magnetic material. Further, when the first permanent magnet 12 is provided in the collet 10 as shown in FIG. 4(d), the permanent magnet may not be provided in the collet holder 20 as shown in FIG. 4(b). In this case, the collet holder 20 may contain a magnetic material. The first permanent magnets 12 and 22 bear at least part of the attractive force acting between the collet 10 and the collet holder 20.

[0036] The collet holder 20 may have a first changing part for changing the attractive force acting between the collet 10 and the collet holder 20. The attractive force acting between the collet 10 and the collet holder 20 may be understood as an attractive force that attracts the collet 10 and the collet holder 20 to each other, and may be hereinafter referred to as the "first attractive force".

[0037] The collet holder 20 shown in FIG. 4(a) has a first negative pressure generating part 23 that generates a negative pressure (vacuum suction force) for attracting the collet 10 as the first changing part. The first negative pressure generating part 23 is configured as a flow path (suction hole) communicating with the vacuum source 45, and may be understood as a unit including the vacuum source 45. The control unit CNT can change the first attractive force by controlling the negative pressure generated in the first negative pressure generating part 23 (vacuum source 45). Further, the collet holder 20 shown in FIG. 4(b) has a first electromagnet 24 that generates an attractive force (magnetic force) for attracting the collet 10 as the first changing part. The control unit CNT can change the first attractive force by controlling the attractive force generated in the first electromagnet 24. In the present embodiment, the control unit CNT controls the first changing part (the first negative pressure generating part 23, the first electromagnet 24), but the present invention is not limited thereto. When the collet holder 20 has an individual control unit, the control unit may control the first changing part.

[0038] The exchange holder 30 may have a second permanent magnet 31 that generates an attractive force acting between the collet 10 and the exchange holder 30, and / or a second changing unit for changing the attractive force. The attractive force acting between the collet 10 and the exchange holder 30 may be understood as an attractive force that attracts the collet 10 and the exchange holder 30 to each other, and may be hereinafter referred to as the "second attractive force".

[0039] The exchange holder 30 shown in FIG. 4(e) has a second permanent magnet 31 that generates an attractive force (magnetic force) that attracts the collet 10. The attractive force (magnetic force) generated by the second permanent magnet 31 to attract the collet 10 and the exchange holder 30 to each other is greater than the attractive force (magnetic force) generated by the first permanent magnets 12 and 22 to attract the collet 10 and the collet holder 20 to each other. Further, when the second permanent magnet 31 is provided on the exchange holder 30, the collet 10 may contain a magnetic material.

[0040] The exchange holder 30 shown in FIG. 4(f) has a second negative pressure generating unit 32 that generates a negative pressure (vacuum suction force) that attracts the collet 10 as a second changing unit. The second negative pressure generating unit 32 is configured as a flow path (suction hole) communicating with the vacuum source 62, and may be understood as a unit including the vacuum source 62. The control unit CNT can change the second attractive force by controlling the negative pressure generated in the second negative pressure generating unit 32 (vacuum source 62). Further, the collet holder 20 shown in FIG. 4(g) has a first electromagnet 33 that generates an attractive force (magnetic force) that attracts the collet 10 as a second changing unit. The control unit CNT can change the second attractive force by controlling the attractive force generated in the second electromagnet 33. In the present embodiment, the configuration is such that the control unit CNT controls the second changing unit (the second negative pressure generating unit 32, the first electromagnet 33), but the present invention is not limited thereto. When the collet holder 20 has an individual control unit, the configuration may be such that the control unit controls the second changing unit.

[0041] Next, the removal process of removing the collet 10 from the collet holder 20 using the exchange holder 30 will be described. FIG. 5 is a diagram showing a specific example of the removal process. In FIG. 5, an example of using the collet holder 20 of FIG. 4(a), the collet 10 of FIG. 4(c), and the exchange holder 30 of FIG. 4(e) is shown. FIG. 6 is a flowchart showing the removal process. The removal process can be controlled by the control unit CNT.

[0042] In step S11, the control unit CNT aligns the collet holder 20 and the exchange holder 30 so that the collet holder 20 holding the collet 10 is disposed above the exchange holder 30 (see FIG. 5(a)). The alignment can be performed by relatively driving the collet holder 20 and the exchange holder 30 using the drive mechanism of the main body 61 of the collet exchanger 60 and / or the drive mechanism of the unit holding the die 71.

[0043] In step S12, the control unit CNT contacts the collet 10 held by the collet holder 20 with the exchange holder 30 by narrowing the distance between the collet holder 20 and the exchange holder 30 (see FIG. 5(b)). The drive for narrowing the distance between the collet holder 20 and the exchange holder 30 can be performed by relatively driving the collet holder 20 and the exchange holder 30 using the drive mechanism of the collet exchanger 60 and / or the drive mechanism of the unit holding the die 71.

[0044] In step S13, the control unit CNT controls the balance (relationship) between the first attraction force and the second attraction force so that the second attraction force is greater than the first attraction force. In the example of FIG. 5, the attraction force (magnetic force) of the second permanent magnet 31 in the exchange holder 30 is greater than the attraction force (magnetic force) of the first permanent magnet 22 in the collet holder 20. Therefore, the control unit CNT can make the second attraction force greater than the first attraction force by reducing (for example, turning off) the negative pressure generated in the first negative pressure generating unit 23.

[0045] In step S14, the control unit CNT separates the collet 10 from the collet holder 20 by widening the distance between the collet holder 20 and the exchange holder 30 (see Fig. 5(c)). The driving for widening the distance between the collet holder 20 and the exchange holder 30 can be performed by relatively driving the collet holder 20 and the exchange holder 30 using the driving mechanism of the collet exchange unit 60 and / or the driving mechanism of the unit holding the die 71.

[0046] Next, the attachment process of attaching the collet 10 to the collet holder 20 using the exchange holder 30 will be described. The attachment process may be considered as the reverse of the removal process. Fig. 7 is a flowchart showing the attachment process. The attachment process can be controlled by the control unit CNT.

[0047] In step S21, the control unit CNT aligns the positions of the collet holder 20 and the exchange holder 30 so that the exchange holder 30 holding the collet 10 is disposed below the collet holder 20 (see Fig. 5(c)). In step S22, the control unit CNT contacts the collet holder 20 with the collet 10 held by the exchange holder 30 by narrowing the distance between the collet holder 20 and the exchange holder 30 (see Fig. 5(b)).

[0048] In step S23, the control unit CNT controls the balance between the first attractive force and the second attractive force so that the first attractive force is greater than the second attractive force. In the example of Fig. 5, the attractive force (magnetic force) of the second permanent magnet 31 in the exchange holder 30 is greater than the attractive force (magnetic force) of the first permanent magnet 22 in the collet holder 20. Therefore, the control unit CNT can make the first attractive force greater than the second attractive force by increasing (for example, turning on) the negative pressure generated in the first negative pressure generating unit 23. Next, in step S24, the control unit CNT widens the distance between the collet holder 20 and the exchange holder 30 (see Fig. 5(a)). Thereby, the collet 10 is attached to the collet holder 20.

[0049] The above examples are the basic attachment and detachment processes in the bonding apparatus 100 of the present embodiment. However, there are multiple types of configurations for the collet 10, the collet holder 20, and the replacement holder 30 other than those shown in FIGS. 1(a) to (g), and the methods of the attachment process and / or the detachment process may change according to their selective combinations. Hereinafter, examples of selective combinations of the collet 10, the collet holder 20, and the replacement holder 30 will be described.

[0050] [Embodiment 1] In Embodiment 1, an example will be described in which a first permanent magnet 22 and a first modification part are provided in the collet holder 20, and a second permanent magnet 31 is provided in the replacement holder 30. FIG. 8(a) shows an example in which the first negative pressure generating part 23 is provided in the collet holder 20 as the first modification part. FIG. 8(b) shows an example in which the first electromagnet 24 is provided in the collet holder 20 as the first modification part.

[0051] In Embodiment 1, the collet 10 contains a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 22 of the collet holder 20. The holding of the collet 10 by the collet holder 20 is performed by the attractive force (magnetic force) of the first permanent magnet 22, and in FIG. 8(a), by the attractive force (negative pressure, vacuum suction force) generated by the first negative pressure generating part 23, and in FIG. 8(b), by the attractive force (magnetic force) generated by the first electromagnet 24. Also, the holding of the collet 10 by the replacement holder 30 is performed by the second permanent magnet 31.

[0052] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 8, let the self-weight of the collet 10 be "G" and the attractive force generated by the first permanent magnet 22 of the collet holder 20 be "M2". Also, let the attractive force generated by the first negative pressure generating part 23 or the first electromagnet 24 of the collet holder 20 be "N2", and the attractive force generated by the second permanent magnet 31 of the replacement holder 30 be "N3". In this case, each force needs to satisfy the following relational expressions. G < M2, M2 < N3 + G, N3 + G < M2 + N2

[0053] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the replacement holder 30. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 comes into contact with the collet 10 held by the replacement holder 30, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is increased (for example, turned on). In this case, until the collet holder 20 comes into complete contact with the collet 10, it is preferable to keep the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 in the off state.

[0054] When the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned on, the first attracting force acting between the collet 10 and the collet holder 20 becomes the total value (M2 + N2) obtained by adding the suction force N2 to the suction force M2 of the first permanent magnet 22. On the other hand, the second attracting force acting between the collet 10 and the replacement holder 30 becomes the total value (N3 + G) of the suction force N3 of the second permanent magnet 31 and the self-weight G of the collet 10. As a result, the balance between the first attracting force and the second attracting force becomes (N3 + G < M2 + N2). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 is controlled so that the above relational expression (N3 + G < M2 + N2) is satisfied, that is, the first attracting force becomes larger than the second attracting force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0055] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 comes into contact with the replacement holder 30, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is decreased (for example, turned off). In this case, until the collet 10 comes into complete contact with the replacement holder 30, it is preferable to keep the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 in the on state.

[0056] When the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 of the collet holder 20 is turned off, the first attracting force acting between the collet 10 and the collet holder 20 is only the attracting force M2 of the first permanent magnet 22. On the other hand, the second attracting force acting between the collet 10 and the exchange holder 30 is the total value (N3 + G) of the attracting force N3 of the second permanent magnet 31 and the self-weight G of the collet 10. As a result, the balance between the first attracting force and the second attracting force becomes (M2 < N3 + G). That is, the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 is controlled so that the above relational expression (M2 < N3 + G) is satisfied, that is, the second attracting force becomes larger than the first attracting force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the exchange holder 30.

[0057] Thus, in the first embodiment, the attachment process and the removal process are performed by controlling the suction force of the first negative pressure generating part 23 or the first electromagnet 24 provided in the collet holder 20. Here, the control of the suction force of the first electromagnet 24 is not limited to the on / off control of the suction force of the first electromagnet 24, and may be performed by switching control between the N pole and the S pole of the first electromagnet 24.

[0058] [Second Embodiment] In the second embodiment, an example in which the first permanent magnet 22 is provided in the collet holder 20 and the second changing part is provided in the exchange holder 30 will be described. Fig. 9(a) shows an example in which the second negative pressure generating part 32 is provided in the exchange holder 30 as the second changing part. Fig. 9(b) shows an example in which the second electromagnet 33 is provided in the exchange holder 30 as the second changing part.

[0059] In Example 2, the collet 10 contains a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 22 of the collet holder 20. The holding of the collet 10 by the collet holder 20 is also performed by the first permanent magnet 22 of the collet holder 20. Further, the holding of the collet 10 by the exchange holder 30 is performed by the suction force (negative pressure, vacuum suction force) generated by the second negative pressure generating portion 32 in FIG. 9(a) and by the suction force (magnetic force) generated by the second electromagnet 33 in FIG. 9(b).

[0060] Next, the force relationship applied to the collet 10 will be described. For example, as shown in FIG. 9, let the self-weight of the collet 10 be "G", the suction force generated by the first permanent magnet 22 of the collet holder 20 be "M2", and the suction force generated by the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 be "N3". In this case, each force needs to satisfy the following relational expressions. G < M2, M2 < N3 + G

[0061] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the exchange holder 30. After aligning the positions of the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 contacts the collet 10 held by the exchange holder 30, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is reduced (for example, turned off). In this case, until the collet holder 20 completely contacts the collet 10, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 in the on state.

[0062] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned off, the second attracting force acting between the collet 10 and the exchange holder 30 becomes only the self-weight G of the collet 10. On the other hand, the first attracting force acting between the collet 10 and the collet holder 20 becomes the attracting force M2 of the first permanent magnet 22. As a result, the balance between the first attracting force and the second attracting force becomes (G < M2). That is, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 is controlled so that the above relational expression (G < M2) is satisfied, that is, the first attracting force becomes larger than the second attracting force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0063] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 contacts the exchange holder 30, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is increased (for example, turned on). In this case, until the collet 10 completely contacts the exchange holder 30, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 off.

[0064] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned on, the second attracting force acting between the collet 10 and the exchange holder 30 becomes the total value (N3 + G) obtained by adding the suction force N3 to the self-weight G of the collet 10. On the other hand, the first attracting force acting between the collet 10 and the collet holder 20 is only the attracting force M2 of the first permanent magnet 22. As a result, the balance between the first attracting force and the second attracting force becomes (M2 < N3 + G). That is, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 is controlled so that the above relational expression (M2 < N3 + G) is satisfied, that is, the second attracting force becomes larger than the first attracting force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the exchange holder 30.

[0065] As described above, in the second embodiment, the attachment process and the detachment process are performed by controlling the suction force of the second negative pressure generating unit 32 or the second electromagnet 33 provided in the replacement holder 30. Here, the control of the suction force of the second electromagnet 33 is not limited to the on / off control of the suction force of the second electromagnet 33, and may be performed by switching control between the N pole and the S pole of the second electromagnet 33.

[0066] [Embodiment 3] In the third embodiment, an example will be described in which a first permanent magnet 22 and a first modification unit are provided in the collet holder 20, and a second modification unit is provided in the replacement holder 30. FIG. 10(a) shows an example in which the first negative pressure generating unit 23 is provided in the collet holder 20 as the first modification unit, and the second negative pressure generating unit 32 is provided in the replacement holder 30 as the second modification unit. FIG. 10(b) shows an example in which the first electromagnet 24 is provided in the collet holder 20 as the first modification unit, and the second electromagnet 33 is provided in the replacement holder 30 as the second modification unit.

[0067] In the third embodiment, the collet 10 includes a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 22 of the collet holder 20. The holding of the collet 10 by the collet holder 20 is performed by the suction force (magnetic force) of the first permanent magnet 22, and in FIG. 10(a), by the suction force (negative pressure, vacuum suction force) generated by the first negative pressure generating unit 23, and in FIG. 10(b), by the suction force (magnetic force) generated by the first electromagnet 24. Further, the holding of the collet 10 by the replacement holder 30 is performed in FIG. 10(a) by the suction force (negative pressure, vacuum suction force) generated by the second negative pressure generating unit 32, and in FIG. 10(b), by the suction force (magnetic force) generated by the second electromagnet 33.

[0068] Next, the force relationship acting on the collet 10 will be described. For example, as shown in FIG. 10, let the self-weight of the collet 10 be "G", and the attractive force generated by the first permanent magnet 22 of the collet holder 20 be "M2". Also, let the attractive force generated by the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 be "N2", and the attractive force generated by the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 be "N3". In this case, each force needs to satisfy the following relational expressions. G < M2, M2 < N3 + G

[0069] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the exchange holder 30. After aligning the positions of the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 contacts the collet 10 held by the exchange holder 30, the attractive force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is increased (for example, turned on). In this case, until the collet holder 20 completely contacts the collet 10, it is preferable to keep the attractive force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 in the off state. Also, regarding the attractive force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30, it is preferable to keep it on until the collet holder 20 contacts the collet 10 on the exchange holder 30, and turn it off when the collet holder 20 contacts the collet 10.

[0070] When the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned on, the first attractive force acting between the collet 10 and the collet holder 20 becomes the total value (M2 + N2) obtained by adding the suction force N2 to the suction force M2 of the first permanent magnet 22. On the other hand, since the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned off, the second attractive force acting between the collet 10 and the exchange holder 30 is only the self-weight G of the collet 10. As a result, the balance between the first attractive force and the second attractive force becomes (G < M2 + N2). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 and the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 are controlled so that the above relational expression (G < M2) is satisfied, that is, the first attractive force becomes larger than the second attractive force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20. Here, according to the above relational expression (G < M2), the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 may seem unnecessary, but by applying the suction force N2, the suction force M2 of the first permanent magnet 22 can be minimized.

[0071] Next, the removal process will be described. The removal process is started while the collet 10 is held by the collet holder 20. After aligning the positions of the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 comes into contact with the exchange holder 30, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is increased (for example, turned on). In this case, until the collet 10 comes into complete contact with the exchange holder 30, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 turned off. Regarding the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20, it is preferable to keep it turned on until the collet holder 20 comes into contact with the collet 10 on the exchange holder 30, and turn it off when the collet holder 20 comes into contact with the collet 10.

[0072] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned on, the second attractive force acting between the collet 10 and the exchange holder 30 becomes the total value (N3 + G) obtained by adding the suction force N3 to the self-weight G of the collet 10. On the other hand, since the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned off, the first attractive force acting between the collet 10 and the collet holder 20 becomes only the suction force M2 of the first permanent magnet 22. As a result, the balance between the first attractive force and the second attractive force becomes (M2 < N3 + G). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 and the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 are controlled so that the above relational expression (M2 < N3 + G) is satisfied, that is, so that the second attractive force becomes larger than the first attractive force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the exchange holder 30.

[0073] In this way, in the third embodiment, the attachment process and the detachment process are performed by controlling the suction force of the first negative pressure generating portion 23 or the first electromagnet 24 provided in the collet holder 20 and the suction force of the second negative pressure generating portion 32 or the second electromagnet 33 provided in the exchange holder 30. Here, the control of the suction force of the first electromagnet 24 is not limited to the on / off control of the suction force of the first electromagnet 24, and may be performed by switching control between the N pole and the S pole of the first electromagnet 24. Similarly, the control of the suction force of the second electromagnet 33 is not limited to the on / off control of the suction force of the second electromagnet 33, and may be performed by switching control between the N pole and the S pole of the second electromagnet 33.

[0074] [Fourth Embodiment] In the fourth embodiment, an example in which a first permanent magnet 12 is provided on the collet 10 and a first modification portion is provided on the collet holder 20 will be described. FIG. 11(a) shows an example in which the first negative pressure generating portion 23 is provided on the collet holder 20 as the first modification portion. FIG. 11(b) shows an example in which the first electromagnet 24 is provided on the collet holder 20 as the first modification portion.

[0075] In Example 4, the collet holder 20 contains a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 12 of the collet 10. The holding of the collet 10 by the collet holder 20 is performed by the attractive force generated by the first negative pressure generating portion 23 (negative pressure, vacuum suction force) in FIG. 11(a) and the attractive force (magnetic force) generated by the first electromagnet 24 in FIG. 11(b) in addition to the attractive force of the first permanent magnet 12. When the collet holder 20 has the first electromagnet 24, the collet 10 contains a magnetic material. Further, the exchange holder 30 contains a magnetic material, and the holding of the collet 10 by the exchange holder 30 is performed by the attractive force (magnetic force) of the first permanent magnet 12 of the collet 10.

[0076] Also, in Example 4, in the contact state where the collet 10 is in contact with the collet holder 20 and the exchange holder 30, the attractive force of the first permanent magnet 12 of the collet 10 with respect to the magnetic material of the collet holder 20 is smaller than the attractive force of the first permanent magnet 12 with respect to the magnetic material of the exchange holder 30. For example, in the contact state, the position of the first permanent magnet 12 in the collet 10 is adjusted so that the distance from the first permanent magnet 12 to the magnetic material of the collet holder 20 is farther than the distance from the first permanent magnet 12 to the magnetic material of the exchange holder 30. Alternatively, not limited to the position of the first permanent magnet 12 in the collet 10, the positions of the magnetic materials in the collet holder 20 and the exchange holder 30 may be adjusted.

[0077] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 11, let the self-weight of the collet 10 be "G", and the attractive force generated by the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 be "N2". Also, let the attractive force generated by the first permanent magnet 12 of the collet 10 with respect to the collet holder 20 (magnetic material) be "M12" in the state where the collet 10 is in contact with the collet holder 20. Let the attractive force generated by the first permanent magnet 12 of the collet 10 with respect to the exchange holder 30 (magnetic material) be "M13" in the state where the collet 10 is in contact with the exchange holder 30. In this case, each force needs to satisfy the following relational expressions. G<M12, G + M13<N2, M12<G + M13

[0078] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the exchange holder 30. After aligning the collet holder 20 with the exchange holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 contacts the collet 10 held by the exchange holder 30, the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 of the collet holder 20 is increased (for example, turned on). In this case, until the collet holder 20 completely contacts the collet 10, it is advisable to keep the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 off.

[0079] When the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 of the collet holder 20 is turned on, the first attraction force acting between the collet 10 and the collet holder 20 becomes the total value (M12 + N2) obtained by adding the suction force N2 to the suction force M12 of the first permanent magnet 12 of the collet 10. On the other hand, the second attraction force acting between the collet 10 and the exchange holder 30 becomes the total value (G + M13) of the suction force M13 of the first permanent magnet 12 of the collet 10 and the self-weight G of the collet 10. As a result, the balance between the first attraction force and the second attraction force becomes (G + M13<M12 + N2). That is, the suction force N2 of the first negative pressure generating part 23 or the first electromagnet 24 is controlled so that the above relational expression (G + M13<N2) is satisfied, that is, the first attraction force becomes greater than the second attraction force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0080] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 contacts the replacement holder 30, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is reduced (for example, turned off). In this case, until the collet 10 completely contacts the replacement holder 30, it is advisable to keep the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 on.

[0081] When the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned off, the first attracting force acting between the collet 10 and the collet holder 20 is only the attracting force M12 of the first permanent magnet 12 of the collet 10. On the other hand, the second attracting force acting between the collet 10 and the replacement holder 30 is the sum value (G + M13) of the attracting force M13 of the first permanent magnet 12 of the collet 10 and the self-weight G of the collet 10. As a result, the balance between the first attracting force and the second attracting force becomes (M12 < G + M13). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 is controlled so that the above relational expression (M12 < G + M13) is satisfied, that is, the second attracting force becomes larger than the first attracting force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the replacement holder 30.

[0082] Thus, in the fourth embodiment, the attachment process and the removal process are performed by controlling the suction force of the first negative pressure generating portion 23 or the first electromagnet 24 provided in the collet holder 20. Here, the control of the suction force of the first electromagnet 24 is not limited to the on / off control of the suction force of the first electromagnet 24, and may be performed by switching control between the N pole and the S pole of the first electromagnet 24.

[0083] [Embodiment 5] In Example 5, an example will be described in which a first permanent magnet 12 is provided on the collet 10 and a second modification part is provided on the replacement holder 30. Fig. 12(a) shows an example in which the second negative pressure generating part 32 is provided on the replacement holder 30 as the second modification part. Fig. 12(b) shows an example in which the second electromagnet 33 is provided on the replacement holder 30 as the second modification part.

[0084] In Example 5, the collet holder 20 includes a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 12 of the collet 10. The holding of the collet 10 by the collet holder 20 is performed by the attractive force (magnetic force) of the first permanent magnet 12. Further, the replacement holder 30 includes a magnetic material. The holding of the collet 10 by the replacement holder 30 is performed by the attractive force (magnetic force) of the first permanent magnet 12, and in Fig. 12(a), by the attractive force (negative pressure, vacuum suction force) generated by the second negative pressure generating part 32, and in Fig. 12(b), by the attractive force (magnetic force) generated by the second electromagnet 33. When the replacement holder 30 has the second electromagnet 33, the collet 10 includes a magnetic material.

[0085] Further, in Example 5, in the contact state where the collet 10 is in contact with the collet holder 20 and the replacement holder 30, the attractive force of the first permanent magnet 12 on the magnetic material of the replacement holder 30 is smaller than the attractive force of the first permanent magnet 12 on the magnetic material of the collet holder 20. For example, in the contact state, the position of the first permanent magnet 12 on the collet 10 is adjusted so that the distance from the first permanent magnet 12 to the magnetic material of the replacement holder 30 is farther than the distance from the first permanent magnet 12 to the magnetic material of the collet holder 20. Alternatively, not limited to the position of the first permanent magnet 12 on the collet 10, the positions of the magnetic materials in the collet holder 20 and the replacement holder 30 may be adjusted.

[0086] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 12, let the self-weight of the collet 10 be "G", and the suction force generated by the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 be "N3". Also, in a state where the collet 10 is in contact with the collet holder 20, let the suction force generated by the first permanent magnet 12 of the collet 10 with respect to the collet holder 20 (magnetic body) be "M12". In a state where the collet 10 is in contact with the exchange holder 30, let the suction force generated by the first permanent magnet 12 of the collet 10 with respect to the exchange holder 30 (magnetic body) be "M13". In this case, each force needs to satisfy the following relational expressions. G < M12, G + M13 < M12, M12 < G + N3

[0087] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the exchange holder 30. After aligning the positions of the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 comes into contact with the collet 10 held by the exchange holder 30, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is reduced (for example, turned off). In this case, until the collet holder 20 is completely in contact with the collet 10, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 in the on state.

[0088] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned off, the second attractive force acting between the collet 10 and the exchange holder 30 becomes the total value (G + M13) of the suction force M13 of the first permanent magnet 12 of the collet 10 and the self-weight G of the collet 10. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the suction force M12 of the first permanent magnet 12 of the collet 10. As a result, the balance between the first attractive force and the second attractive force becomes (G + M13 < M12). That is, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 is controlled so that the above relational expression (G + M13 < M12) is satisfied, that is, the first attractive force is larger than the second attractive force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0089] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the positions of the collet holder 20 and the exchange holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 comes into contact with the exchange holder 30, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is increased (for example, turned on). In this case, until the collet 10 comes into complete contact with the exchange holder 30, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 off.

[0090] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned on, the second attracting force acting between the collet 10 and the exchange holder 30 includes the total value (G + N3) obtained by adding the suction force N3 to the self-weight G of the collet 10. On the other hand, the first attracting force acting between the collet 10 and the collet holder 20 is only the suction force M12 of the first permanent magnet 12 of the collet 10. As a result, the balance between the first attracting force and the second attracting force becomes (M12 < G + N3). That is, the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 is controlled so that the above relational expression (M12 < G + N3) is satisfied, that is, the second attracting force becomes larger than the first attracting force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the exchange holder 30. Here, when considering the suction force M13 of the first permanent magnet 12 of the collet 10 in the second attracting force, the balance between the first attracting force and the second attracting force becomes (M12 < G + N3 + M13), and the suction force N3 can be reduced by the amount considering the suction force M13.

[0091] As described above, in the fifth embodiment, the attachment process and the detachment process are performed by controlling the suction force of the second negative pressure generating portion 32 or the second electromagnet 33 provided in the exchange holder 30. Here, the control of the suction force of the second electromagnet 33 is not limited to the on / off control of the suction force of the second electromagnet 33, and may be performed by switching control between the N pole and the S pole of the second electromagnet 33.

[0092] [Embodiment 6] In the sixth embodiment, an example will be described in which a first permanent magnet 12 is provided on the collet 10, a first modification unit is provided on the collet holder 20, and a second modification unit is provided on the exchange holder 30. FIG. 13(a) shows an example in which the first negative pressure generating portion 23 is provided on the collet holder 20 as the first modification unit, and the second negative pressure generating portion 32 is provided on the exchange holder 30 as the second modification unit. FIG. 13(b) shows an example in which the first electromagnet 24 is provided on the collet holder 20 as the first modification unit, and the second electromagnet 33 is provided on the exchange holder 30 as the second modification unit.

[0093] In Example 6, the collet holder 20 includes a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 12 of the collet 10. The holding of the collet 10 by the collet holder 20 is performed by the attractive force generated by the first permanent magnet 12, and in FIG. 13(a), by the attractive force (negative pressure, vacuum suction force) generated by the first negative pressure generating portion 23, and in FIG. 13(b), by the attractive force (magnetic force) generated by the first electromagnet 24. Further, the exchange holder 30 includes a magnetic material. The holding of the collet 10 by the exchange holder 30 is performed by the attractive force (magnetic force) generated by the first permanent magnet 12, and in FIG. 13(a), by the attractive force (negative pressure, vacuum suction force) generated by the second negative pressure generating portion 32, and in FIG. 13(b), by the attractive force (magnetic force) generated by the second electromagnet 33. When the collet holder 20 has the first electromagnet 24 and / or when the exchange holder 30 has the second electromagnet 33, the collet 10 includes a magnetic material.

[0094] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 13, let the self-weight of the collet 10 be "G", the attractive force generated by the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 be "N2", and the attractive force generated by the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 be "N3". Further, when the collet 10 is in contact with the collet holder 20, let the attractive force generated by the first permanent magnet 12 of the collet 10 with respect to the collet holder 20 (magnetic material) be "M12". When the collet 10 is in contact with the exchange holder 30, let the attractive force generated by the first permanent magnet 12 of the collet 10 with respect to the exchange holder 30 (magnetic material) be "M13". In this case, each force needs to satisfy the following relational expressions. G < M12, M12 < G + N3, G + M13 < N2

[0095] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the replacement holder 30. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 contacts the collet 10 held by the replacement holder 30, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is increased (for example, turned on). In this case, until the collet holder 20 completely contacts the collet 10, it is preferable to keep the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 in the off state. Regarding the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the replacement holder 30, since the holding force M13 of the first permanent magnet 12 of the collet 10 is generated, it may be in the on state or in the off state. Preferably, the suction force N3 is kept on until the collet holder 20 contacts the collet 10 on the replacement holder 30, and the suction force N3 is turned off when the collet holder 20 contacts the collet 10.

[0096] When the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned on, the first attractive force acting between the collet 10 and the collet holder 20 becomes a value including the suction force N2 (specifically, M12 + N2). On the other hand, the second attractive force acting between the collet 10 and the replacement holder 30 becomes the total value (G + M13) of the suction force M13 of the first permanent magnet 12 and the self-weight G of the collet 10 because the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the replacement holder 30 is turned off. As a result, the balance between the first attractive force and the second attractive force becomes (G + M13 < N2). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 and the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 are controlled so that the above relational expression (G + M13 < N2) is satisfied, that is, the first attractive force is greater than the second attractive force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0097] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 with the exchange holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 contacts the exchange holder 30, the suction force N2 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is increased (for example, turned on). In this case, until the collet 10 is completely in contact with the exchange holder 30, it is preferable to keep the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 off. Also, regarding the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20, it should be kept on until the collet holder 20 contacts the collet 10 on the exchange holder 30, and then turned off when the collet holder 20 contacts the collet 10.

[0098] When the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 of the exchange holder 30 is turned on, the second attractive force acting between the collet 10 and the exchange holder 30 becomes a value (G + N3) including the self-weight G of the collet 10 and the suction force N3. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the suction force M12 of the first permanent magnet 12 of the collet 10 because the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 of the collet holder 20 is turned off. As a result, the balance between the first attractive force and the second attractive force becomes (M12 < G + M13). That is, the suction force N2 of the first negative pressure generating portion 23 or the first electromagnet 24 and the suction force N3 of the second negative pressure generating portion 32 or the second electromagnet 33 are controlled so that the above relational expression (M12 < G + M13) is satisfied, that is, the second attractive force is greater than the first attractive force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the exchange holder 30.

[0099] As described above, in the sixth embodiment, the attachment process and the detachment process are performed by controlling the suction force of the first negative pressure generating unit 23 or the first electromagnet 24 provided in the collet holder 20 and the suction force of the second negative pressure generating unit 32 or the second electromagnet 33 provided in the exchange holder 30. Here, the control of the suction force of the first electromagnet 24 is not limited to the on / off control of the suction force of the first electromagnet 24, and may be performed by switching control between the N pole and the S pole of the first electromagnet 24. Similarly, the control of the suction force of the second electromagnet 33 is not limited to the on / off control of the suction force of the second electromagnet 33, and may be performed by switching control between the N pole and the S pole of the second electromagnet 33.

[0100] As described above, in the bonding apparatus 100 of the present embodiment, the attachment process and / or the detachment process is performed by controlling the balance between the first attractive force acting between the collet 10 and the collet holder 20 and the second attractive force acting between the collet 10 and the exchange holder 30. By using the first attractive force and the second attractive force in the attachment process and / or the detachment process in this way, the operation of sliding another member with respect to the collet 10 or the collet holder 20 is not included, so that the generation of particles in the bonding apparatus 100 can be reduced.

[0101] <Second Embodiment> The second embodiment according to the present invention will be described. In this embodiment, a modification example of the second modification unit that can be provided in the exchange holder 30 will be described. Note that this embodiment basically follows the first embodiment, and may follow the first embodiment except for the matters mentioned below.

[0102] [Modification Example 1] FIG. 14 shows a modification example 1 of the second modification unit provided in the exchange holder 30. Here, an example will be described in which the first permanent magnet 22 is provided in the collet holder 20 and the second modification unit is provided in the exchange holder 30. Note that any of the configurations described in the first embodiment may be applied as the configuration of the collet 10 and the collet holder 20.

[0103] The second modification part shown in FIG. 14 may include a second permanent magnet 31 that generates a magnetic force for attracting the collet 10, and a magnet driving unit 34 that drives the second permanent magnet 31 in the Z direction so as to move the second permanent magnet 31 closer to or farther from the collet 10. In this configuration, the control unit CNT can change the second attractive force acting between the collet 10 and the exchange holder 30 by driving the second permanent magnet 31 in the Z direction by the magnet driving unit 34.

[0104] In Modification 1, the collet 10 contains a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 22 of the collet holder 20. The holding of the collet 10 by the collet holder 20 is also performed by the first permanent magnet 22 of the collet holder 20. Further, the holding of the collet 10 by the exchange holder 30 is performed by the second permanent magnet 31. In the attachment process, the second permanent magnet 31 is driven by the magnet driving unit 34 so as to move the second permanent magnet 31 away from the collet 10, thereby reducing the second attractive force acting between the collet 10 and the exchange holder 30. On the other hand, in the removal process, the second permanent magnet 31 is driven by the magnet driving unit 34 so as to move the second permanent magnet 31 closer to the collet 10, thereby increasing the second attractive force acting between the collet 10 and the exchange holder 30.

[0105] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 14, let the self-weight of the collet 10 be "G", and the attractive force generated by the first permanent magnet 22 of the collet holder 20 be "M2". Also, let the attractive force of the second permanent magnet 31 when the second permanent magnet 31 of the exchange holder 30 is moved closer to the collet 10 be "M3H", and the attractive force of the second permanent magnet 31 when the second permanent magnet 31 of the exchange holder 30 is moved away from the collet 10 be "M3L". In this case, each force needs to satisfy the following relational expressions. G < M2, M2 < G + M3H, G + M3L < M2

[0106] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the replacement holder 30. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 comes into contact with the collet 10 held by the replacement holder 30, the magnet driving unit 34 moves the second permanent magnet 31 away from the collet 10 to generate an attractive force M3L in the second permanent magnet 31. In this case, until the collet holder 20 comes into complete contact with the collet 10, it is advisable to move the second permanent magnet 31 closer to the collet 10 by the magnet driving unit 34 to generate an attractive force M3H in the second permanent magnet 31.

[0107] When the magnet driving unit 34 moves the second permanent magnet 31 away from the collet 10, the second attractive force acting between the collet 10 and the replacement holder 30 becomes the total value (G + M3L) of the attractive force M3L of the second permanent magnet 31 and the self-weight G of the collet 10. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the attractive force M2 of the first permanent magnet 22. As a result, the balance between the first attractive force and the second attractive force becomes (G + M3L < M2). That is, the attractive force of the second permanent magnet 31 is controlled by the magnet driving unit 34 so that the above relational expression (G + M3L < M2) is satisfied, that is, the first attractive force is greater than the second attractive force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0108] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 with the replacement holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 comes into contact with the replacement holder 30, the magnet driving unit 34 moves the second permanent magnet 31 closer to the collet 10 to generate an attractive force M3H in the second permanent magnet 31. In this case, until the collet holder 20 comes into complete contact with the collet 10, it is advisable to move the second permanent magnet 31 away from the collet 10 by a certain amount by the magnet driving unit 34.

[0109] When the second permanent magnet 31 is moved closer to the collet 10 by the magnet drive unit 34, the second attractive force acting between the collet 10 and the replacement holder 30 becomes the total value (G + M3H) of the attractive force M3H of the second permanent magnet 31 and the self-weight G of the collet 10. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the attractive force M2 of the first permanent magnet 22. As a result, the balance between the first attractive force and the second attractive force is (M2 < G + M3H). That is, the attractive force of the second permanent magnet 31 is controlled by the magnet drive unit 34 so that the above relational expression (M2 < G + M3H) is satisfied, that is, the second attractive force becomes larger than the first attractive force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the replacement holder 30.

[0110] In this way, in Modification 1, the attachment process and the removal process are performed by driving the second permanent magnet 31 by the magnet drive unit 34 to control the attractive force of the second permanent magnet 31. Here, in Modification 1, in the second modification part of the replacement holder 30, a configuration including the second permanent magnet 31 and the magnet drive unit 34 is adopted, but the same configuration can also be adopted in the first modification part of the collet holder 20. That is, the first modification part of the collet holder 20 may have a configuration including the first permanent magnet and the magnet drive unit.

[0111] [Modification 2] FIG. 15 shows a second modification of the second modification part provided in the replacement holder 30. Here, an example will be described in which the first permanent magnet 22 is provided on the collet holder 20 and the second modification part is provided on the replacement holder 30. Note that any of the configurations described in the first embodiment may be applied to the configurations of the collet 10 and the collet holder 20.

[0112] The second modification part shown in FIG. 15 may include a second permanent magnet 31 that generates a magnetic force for attracting the collet 10, a blocking member 35 that blocks the magnetic force, and a member driving part 36 that drives the blocking member 35 so as to insert and remove the blocking member 35 between the second permanent magnet 31 and the collet 10. In this configuration, the control unit CNT can change the second attractive force acting between the collet 10 and the exchange holder 30 by driving the blocking member 35 by the member driving part 36.

[0113] In the second modification, the collet 10 contains a magnetic material, and the self-weight compensation of the collet 10 is performed by the first permanent magnet 22 of the collet holder 20. The holding of the collet 10 by the collet holder 20 is also performed by the first permanent magnet 22 of the collet holder 20. Further, the holding of the collet 10 by the exchange holder 30 is performed by the second permanent magnet 31. In the attachment process, the second attractive force acting between the collet 10 and the exchange holder 30 is reduced by driving the blocking member 35 by the member driving part 36 so that the blocking member 35 is inserted between the second permanent magnet 31 and the collet 10. On the other hand, in the removal process, the second attractive force acting between the collet 10 and the exchange holder 30 is increased by driving the blocking member 35 by the member driving part 36 so that the blocking member 35 is removed from between the second permanent magnet 31 and the collet 10.

[0114] Next, the relationship of the forces applied to the collet 10 will be described. For example, as shown in FIG. 15, let the self-weight of the collet 10 be "G" and the attractive force generated by the first permanent magnet 22 of the collet holder 20 be "M2". Also, let the attractive force of the second permanent magnet 31 in the normal state where the blocking member 35 is removed from between the second permanent magnet 31 of the exchange holder 30 and the collet 10 be "M3". Let the attractive force of the second permanent magnet 31 in the state where the blocking member 35 is inserted between the second permanent magnet 31 of the exchange holder 30 and the collet 10 be "M3s". In this case, each force needs to satisfy the following relational expressions. Note that the attractive force M3s does not need to be zero, and it is sufficient if it can be weakened to the magnetic force for which the following relational expressions hold. G < M2, M2 < G + M3, G + M3s < M2

[0115] Next, the attachment process will be described. The attachment process starts with the collet 10 being held by the replacement holder 30. After aligning the collet holder 20 and the replacement holder 30, the collet holder 20 is lowered. Then, when the collet holder 20 contacts the collet 10 held by the replacement holder 30, the member driving unit 36 inserts the blocking member 35 between the second permanent magnet 31 and the collet 10. In this case, until the collet holder 20 completely contacts the collet 10, it is preferable to keep the blocking member 35 removed from between the second permanent magnet 31 and the collet 10.

[0116] When the member driving unit 36 inserts the blocking member 35 between the second permanent magnet 31 and the collet 10, the second attractive force acting between the collet 10 and the replacement holder 30 becomes the total value (G + M3s) of the attractive force M3s of the second permanent magnet 31 and the self-weight G of the collet 10. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the attractive force M2 of the first permanent magnet 22. As a result, the balance between the first attractive force and the second attractive force becomes (G + M3s < M2). That is, the attractive force of the second permanent magnet 31 is controlled by the member driving unit 36 so that the above relational expression (G + M3s < M2) is satisfied, that is, the first attractive force becomes larger than the second attractive force. By raising the collet holder 20 in this state, the collet 10 is attached to the collet holder 20.

[0117] Next, the removal process will be described. The removal process starts with the collet 10 being held by the collet holder 20. After aligning the collet holder 20 and the replacement holder 30, the collet holder 20 is lowered. Then, when the collet 10 held by the collet holder 20 contacts the replacement holder 30, the member driving unit 36 removes the blocking member 35 from between the second permanent magnet 31 and the collet 10. In this case, until the collet holder 20 completely contacts the collet 10, it is preferable to keep the blocking member 35 inserted between the second permanent magnet 31 and the collet 10.

[0118] When the shielding member 35 is removed from between the second permanent magnet 31 and the collet 10 by the member driving unit 36, the second attractive force acting between the collet 10 and the replacement holder 30 becomes the total value (G + M3) of the attractive force M3 of the second permanent magnet 31 and the self-weight G of the collet 10. On the other hand, the first attractive force acting between the collet 10 and the collet holder 20 is only the attractive force M2 of the first permanent magnet 22. As a result, the balance between the first attractive force and the second attractive force becomes (M2 < G + M3). That is, the attractive force of the second permanent magnet 31 is controlled by the member driving unit 36 so that the above relational expression (M2 < G + M3) is satisfied, that is, the second attractive force becomes larger than the first attractive force. By raising the collet holder 20 in this state, the collet 10 is removed from the collet holder 20 and held by the replacement holder 30.

[0119] As described above, in the second modification, the attachment process and the removal process are performed by inserting and removing the shielding member 35 between the second permanent magnet 31 and the collet 10 by the member driving unit 36 to control the attractive force of the second permanent magnet 31. Here, in the second modification, the second modification part of the replacement holder 30 is configured to include the second permanent magnet 31, the shielding member 35, and the member driving unit 36, but the same configuration can also be adopted in the first modification part of the collet holder 20. That is, the first modification part of the collet holder 20 may be configured to include the first permanent magnet, the shielding member, and the member driving unit.

[0120] <Embodiment of a method for manufacturing an article> A method for manufacturing an article (such as a semiconductor IC element, a liquid crystal display element, MEMS, etc.) using the above-described bonding apparatus will be described. The article manufacturing method according to an embodiment of the present invention is suitable for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. The article manufacturing method of the present embodiment includes a bonding step of bonding a first member to a second member using the above-described bonding apparatus, a processing step of processing the second member to which the first member is bonded by the bonding step, and a manufacturing step of manufacturing an article from the second member processed in the processing step. Further, the manufacturing method includes other well-known steps (such as probing, dicing, bonding, packaging, etc.). The manufacturing method of the article of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

[0121] <Summary of Embodiment> The disclosure of this specification includes the following bonding apparatus and article manufacturing method. (Item 1) A bonding apparatus that performs a process of bonding a first member to a second member, In the process, a first holding portion that holds a chuck that contacts the first member, A second holding portion that holds the chuck in attaching the chuck to the first holding portion and / or in detaching the chuck from the first holding portion, A control portion that controls a balance between a first attracting force acting between the first holding portion and the chuck and a second attracting force acting between the second holding portion and the chuck, A bonding apparatus characterized by comprising the above. (Item 2) The control portion controls the balance such that the first attracting force is made larger than the second attracting force in the attachment and the second attracting force is made larger than the first attracting force in the detachment. The bonding apparatus according to Item 1, characterized by this. (Item 3) In at least one of the first holding part and the chuck, a first permanent magnet that generates a force for attracting the chuck and the first holding part to each other is provided. The bonding device according to item 1 or 2, characterized in that. (Item 4) The control unit controls the balance by changing the first attracting force. The bonding device according to at least one of items 1 to 3, characterized in that. (Item 5) The first holding part includes a first negative pressure generating part that generates a negative pressure for attracting the chuck. The control unit changes the first attracting force by changing the negative pressure generated in the first negative pressure generating part. The bonding device according to item 4, characterized in that. (Item 6) The first holding part includes a first electromagnet that generates a magnetic force for attracting the chuck. The control unit changes the first attracting force by changing the magnetic force generated in the first electromagnet. The bonding device according to item 4 or 5, characterized in that. (Item 7) The second holding part has a second permanent magnet for attracting the chuck. The bonding device according to any one of items 4 to 6, characterized in that. (Item 8) The control unit controls the balance by changing the second attracting force. The bonding device according to any one of items 1 to 7, characterized in that. (Item 9) The second holding part includes a second negative pressure generating part that generates a negative pressure for attracting the chuck. The control unit changes the second attracting force by changing the negative pressure generated in the second negative pressure generating part. The bonding device according to item 8, characterized in that. (Item 10) The second holding part includes a second electromagnet that generates a magnetic force for attracting the chuck. The control unit changes the second attracting force by changing the magnetic force generated in the second electromagnet. The bonding device according to item 8 or 9, characterized in that. (Item 11) The second holding part includes a second permanent magnet that generates a magnetic force for attracting the chuck, and a magnet driving part that drives the second permanent magnet so as to move the second permanent magnet closer to or farther from the chuck. The control part changes the second attracting force by driving the second permanent magnet by the magnet driving part. The bonding device according to any one of items 8 to 10, characterized in that. (Item 12) The second holding part includes a second permanent magnet that generates a magnetic force for attracting the chuck, a blocking member that blocks the magnetic force, and a member driving part that drives the blocking member so as to insert and remove the blocking member between the second permanent magnet and the chuck. The control part changes the second attracting force by driving the blocking member by the member driving part. The bonding device according to any one of items 8 to 10, characterized in that. (Item 13) The bonding device further includes a driving mechanism that relatively drives the first holding part and the second holding part. The control part controls the driving mechanism so as to align the first holding part and the second holding part during the attachment and / or the detachment. The bonding device according to any one of items 1 to 12, characterized in that. (Item 14) The chuck has a contact surface that contacts the first member. The second holding part is configured to hold the chuck so as not to contact the contact surface of the chuck. The bonding device according to any one of items 1 to 13, characterized in that. (Item 15) A bonding step of bonding a first member to a second member using the bonding device according to any one of items 1 to 14, A processing step of processing the second member to which the first member is bonded by the bonding step, A manufacturing step of manufacturing an article from the second member processed in the processing step, An article manufacturing method characterized by including.

[0122] The invention is not limited to the above embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the claims are attached to disclose the scope of the invention.

Description of Reference Numerals

[0123] 10: Collet (Chuck), 12: First Permanent Magnet, 20: Collet Holder (First Holding Portion), 22: First Permanent Magnet, 23: First Negative Pressure Generation Unit, 24: First Electromagnet, 30: Exchange Holder (Second Holding Portion), 31: Second Permanent Magnet, 32: Second Negative Pressure Generation Unit, 33: Second Electromagnet, 40: Pickup Unit, 50: Bonding Unit, 60: Collet Exchange Unit, 100: Bonding Device

Claims

1. A bonding apparatus that performs a process of bonding a first member to a second member, in the process, a first holding portion that holds a chuck that contacts the first member, a second holding portion that holds the chuck in attaching the chuck to the first holding portion and / or detaching the chuck from the first holding portion, a control portion that controls a balance between a first attracting force acting between the first holding portion and the chuck and a second attracting force acting between the second holding portion and the chuck, and characterized by comprising the above.

2. The bonding apparatus according to claim 1, wherein the control portion controls the balance such that the first attracting force is made greater than the second attracting force in the attachment and the second attracting force is made greater than the first attracting force in the detachment.

3. The bonding apparatus according to claim 1 or 2, wherein at least one of the first holding portion and the chuck is provided with a first permanent magnet that generates a force for attracting the chuck and the first holding portion to each other.

4. The bonding apparatus according to claim 1 or 2, wherein the control portion controls the balance by changing the first attracting force.

5. The first holding portion includes a first negative pressure generating portion that generates a negative pressure for attracting the chuck, The bonding apparatus according to claim 4, wherein the control portion changes the first attracting force by changing the negative pressure generated in the first negative pressure generating portion.

6. The first holding portion includes a first electromagnet that generates a magnetic force for attracting the chuck, The bonding apparatus according to claim 4, wherein the control portion changes the first attracting force by changing the magnetic force generated in the first electromagnet.

7. The bonding apparatus according to claim 4, wherein the second holding portion has a second permanent magnet for attracting the chuck.

8. The bonding apparatus according to claim 1 or 2, wherein the control portion controls the balance by changing the second attracting force.

9. The second holding portion includes a second negative pressure generating portion that generates a negative pressure for attracting the chuck, The bonding apparatus according to claim 8, wherein the control portion changes the second attracting force by changing the negative pressure generated in the second negative pressure generating portion.

10. The second holding part includes a second electromagnet that generates a magnetic force for attracting the chuck. The control unit changes the second attracting force by changing the magnetic force generated in the second electromagnet. The bonding device according to claim 8 is characterized by this.

11. The second holding part includes a second permanent magnet that generates a magnetic force for attracting the chuck, and a magnet driving part that drives the second permanent magnet so as to approach or move away from the chuck. The control unit changes the second attracting force by driving the second permanent magnet by the magnet driving part. The bonding device according to claim 8 is characterized by this.

12. The second holding part includes a second permanent magnet that generates a magnetic force for attracting the chuck, a blocking member that blocks the magnetic force, and a member driving part that drives the blocking member so as to insert and remove the blocking member between the second permanent magnet and the chuck. The control unit changes the second attracting force by driving the blocking member by the member driving part. The bonding device according to claim 8 is characterized by this.

13. The bonding device further includes a driving mechanism that relatively drives the first holding part and the second holding part. The control unit controls the driving mechanism so as to align the first holding part and the second holding part during the attachment and / or the removal. The bonding device according to claim 1 or 2 is characterized by this.

14. The chuck has a contact surface that contacts the first member. The second holding part is configured to hold the chuck so as not to contact the contact surface of the chuck. The bonding device according to claim 1 or 2 is characterized by this.

15. A bonding step of bonding a first member to a second member using the bonding device according to claim 1 or 2, A processing step of processing the second member to which the first member is bonded by the bonding step, A manufacturing step of manufacturing an article from the second member processed in the processing step, An article manufacturing method characterized by including these steps.

Images