Inspection device, inspection method, and method for manufacturing battery

Abstract

To provide an inspection device, an inspection method, and a method for manufacturing a battery capable of achieving accurate inspection.SOLUTION: According to an embodiment, an inspection device includes an acquisition unit that acquires data obtained from an object to be inspected, and a processing unit that processes the data. The data includes two-dimensional magnetic field data related to a plane including first and second directions. The plane includes first and second areas, and first to third positions. The third position is a mid point between the first position and the second position in the first direction. The first area is located between the first position and the third position in the first direction. The second area is located between the third position and the second position in the first direction. The magnetic field data includes first area data related to the first area and second area data related to the second area. The processing unit inspects the object to be inspected on the basis of difference data between the first area data and second area inverted data obtained by inverting a magnetic field value included in the second area data in the first direction.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to an inspection apparatus, an inspection method, and a method for manufacturing a battery.

Background Art

[0002] For example, an inspection target is inspected by detecting a magnetic field generated from an inspection target such as a battery. Higher-precision inspection is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide an inspection apparatus, an inspection method, and a method for manufacturing a battery that enable high-precision inspection.

Means for Solving the Problems

[0005] According to an embodiment, an inspection apparatus includes an acquisition unit configured to acquire data obtained from an inspection target, and a processing unit configured to perform a first operation of processing the data acquired by the acquisition unit. The data includes two-dimensional magnetic field data related to a plane including a first direction and a second direction intersecting the first direction. The plane includes a first region, a second region, a first position, a second position, and a third position. The direction from the first region to the second region is along the first direction. The third position is the midpoint between the first position and the second position in the first direction. The first region is between the first position and the third position in the first direction. The second region is between the third position and the second position in the first direction. The magnetic field data includes first region data related to the first region and second region data related to the second region. In the first operation, the processing unit inspects the inspection target based on difference data between the second region inverted data obtained by inverting magnetic field values included in the second region data in the first direction and the first region data.

Brief Description of Drawings

[0006]

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[0007] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationships between the thickness and width of each part, the ratio of the sizes between parts, etc. are not necessarily the same as those in reality. Even when representing the same part, the dimensions and ratios may be represented differently in the drawings. In the present specification and each figure, the same reference numerals are given to the same elements as those described above with respect to the already shown figures, and the detailed description will be omitted as appropriate.

[0008] (First Embodiment) FIG. 1 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. FIG. 2 is a flowchart illustrating the operation of the inspection apparatus according to the first embodiment. FIGS. 3 to 7 are schematic diagrams illustrating the inspection apparatus according to the first embodiment. As shown in FIG. 1, an inspection apparatus 110 according to the embodiment includes an acquisition unit 71 and a processing unit 70. The acquisition unit 71 is configured to acquire data 10A obtained from an inspection target 80. The processing unit 70 is configured to perform a first operation of processing the data 10A acquired by the acquisition unit 71. The acquisition unit 71 is, for example, an interface. The processing unit 70 may be, for example, a processor circuit (e.g., an electric circuit).

[0009] FIG. 2 illustrates an inspection method performed by the inspection apparatus 110. As shown in FIG. 2, for example, the acquisition unit 71 acquires data 10A (step S111). For example, the processing unit 70 processes the data 10A (step S112). For example, the processing unit 70 outputs a processing result (step S113). The processing result includes an inspection result.

[0010] In one example, the inspection target 80 may be the battery 80C. The battery 80C may include, for example, a first electrode 81, a second electrode 82, and a battery unit 83. The battery unit 83 is provided, for example, between the first electrode 81 and the second electrode 82.

[0011] In one example, in the inspection of the battery 80C, a voltage is applied between the first electrode 81 and the second electrode 82. Due to the application of the voltage, a current flows between the first electrode 81 and the second electrode 82. A magnetic field is generated by the current. The generated magnetic field is detected by the magnetic field sensor 85. The magnetic field sensor 85 may include a sensor element 86 and a control unit 87. The relative position between the sensor element 86 and the inspection target 80 is changed.

[0012] Thus, the magnetic field sensor 85 is configured to acquire two-dimensional magnetic field data 10D from the inspection target 80. The control unit 87 can control, for example, the change in the relative position between the sensor element 86 and the inspection target 80. The control unit 87 can control, for example, the orientation of the sensor element 86. The sensor element 86 can detect a magnetic field in any direction. The control unit 87 may be able to process the signal obtained from the sensor element 86. The signal processing may include, for example, amplification. The signal processing may include any processing including, for example, A / D conversion. The two-dimensional magnetic field data 10D is supplied from the control unit 87 to the acquisition unit 71, for example.

[0013] For the communication (data transfer) between the magnetic field sensor 85 and the acquisition unit 71, any method of wired or wireless can be applied. The two-dimensional magnetic field data 10D may be stored in, for example, the storage unit 70M or the like.

[0014] The magnetic field data 10D obtained from the inspection target 80 includes two-dimensional magnetic field data 10D. FIG. 3 schematically illustrates the two-dimensional magnetic field data 10D. The two-dimensional magnetic field data 10D relates to a plane PL1 including a first direction D1 and a second direction D2 intersecting the first direction D1. In FIG. 3, the magnetic field intensities in the first direction D1 and the second direction D2 are shown by the shading of the image.

[0015] FIG. 4 shows the positional relationship between the two-dimensional magnetic field data 10D and the battery 80C in this example. As shown in FIG. 4, the magnetic field data 10D may include information regarding the magnetic field in a region wider than the battery 80C.

[0016] As shown in FIGS. 3 and 4, the magnetic field data 10D obtained from the inspection target 80 may include the magnetic field caused by the terminals that supply voltage (signals) to the first electrode 81 and the second electrode 82. In this example, the two-dimensional magnetic field data 10D includes a first terminal magnetic field 81H caused by a first terminal 81T electrically connected to the first electrode 81, and a second terminal magnetic field 82H caused by a second terminal 82T electrically connected to the second electrode 82.

[0017] As shown in FIG. 3, the plane PL1 includes a first region r1, a second region r2, a first position p1, a second position p2, and a third position p3. The direction from the first region r1 to the second region r2 is along the first direction D1. These positions are positions in the first direction D1. The third position p3 is the midpoint between the first position p1 and the second position p2 in the first direction D1. The first region r1 is between the first position p1 and the third position p3 in the first direction D1. The second region r2 is between the third position p3 and the second position p2 in the first direction D1. The magnetic field data 10D includes first region data 11D regarding the first region r1 and second region data 12D regarding the second region r2.

[0018] The first region data 11D corresponds to the magnetic field data (magnetic field values) in the first region 11 between the first position p1 and the third position p3. The second region data 12D corresponds to the magnetic field data (magnetic field values) in the second region 12 between the third position p3 and the second position p2.

[0019] In the first operation, the processing unit 70 inspects the inspection target 80 based on the difference data between the second region inversion data 12R obtained by inverting the magnetic field values included in the second region data 12D in the first direction D1 and the first region data 11D. For example, when the difference data exceeds a threshold value, it is determined that there is a defect.

[0020] FIG. 5 illustrates the second region inversion data 12R. The second region inversion data 12R is obtained by inverting the second region data 12D illustrated in FIG. 3 with respect to the first direction D1. The difference data between such second region inversion data 12R (FIG. 5) and the first region data 11D (see FIG. 3) is calculated.

[0021] FIGS. 6 and 7 illustrate the difference data 10F. In these figures, the magnitude of the value of the difference data 10F is indicated by the light and shade of the image. As described above, the difference data 10F corresponds to the difference between the second region inversion data 12R and the first region data 11D. Therefore, the number of data included in the distribution of the difference data 10F is 1 / 2 of the number of the two-dimensional magnetic field data 10D before processing. As shown in FIGS. 6 and 7, the difference data 10F may include a terminal-induced magnetic field 89H corresponding to the difference between the first terminal magnetic field 81H and the second terminal magnetic field 82H. Since the terminal-induced magnetic field 89H is not caused by the inspection target 80, it may be excluded from the processing for inspecting the inspection target 80. For example, the terminal-induced magnetic field 89H may be removed from the difference data 10F. Hereinafter, attention is paid to the data excluding the terminal-induced magnetic field 89H. In FIGS. 6 and 7, in the region excluding the terminal-induced magnetic field 89H, the value of the difference data 10F is locally large. This position corresponds to the position of the defect 89D of the inspection target 80.

[0022] In the example of FIG. 6, the case where the defect 89D exists in the first region 11 is illustrated. In the example of FIG. 7, the case where the defect 89D exists in the second region 12 is illustrated.

[0023] In the embodiment, the approximate position of the defect 89D may be estimated from information other than the above-described difference data 10F. For example, the processing unit 70 may estimate the position of the defect 89D from the two-dimensional magnetic field data 10D before the processing of the first operation. However, the accuracy of the position of the defect 89D estimated from the two-dimensional magnetic field data 10D is low. On the other hand, by using the difference data 10F regarding the difference between the two region data, the position of the defect 89D can be derived with high accuracy.

[0024] In the embodiment, it cannot be accurately determined whether the position of the defect 89D derived using the difference data 10F exists in the first region 11 or the second region 12. Therefore, by using the difference data 10F and the estimation result of the approximate position of the defect 89D described above, the position of the defect 89D can be accurately determined.

[0025] Thus, the processing unit 70 may be configured to determine the position of the defect 89D based on the estimation result that the position of the defect 89D of the inspection target 80 exists in either the first region 11 or the second region 12 and the difference data 10F described above. The first region 11 corresponds to the region where the first region data 11D is obtained. The second region 12 corresponds to the region where the second region data 12D is obtained. The order of the above estimation and the above first operation is arbitrary.

[0026] The estimation that the position of the defect 89D of the inspection target 80 exists in either the first region 11 or the second region 12 may be performed based on, for example, at least any one of the following first process, second process, and third process.

[0027] In the first process, based on the two-dimensional magnetic field data 10D, the highest value of the magnetic field in the first region 11 is set as the first highest value. The highest value of the magnetic field in the second region 12 is set as the second highest value. When the first highest value is higher than the second highest value, it is estimated that the position of the defect 89D is included in the first region 11. When the first highest value is not higher than the second highest value, it is estimated that the position of the defect 89D is included in the second region 12.

[0028] In the second process, an estimation is made with reference to the positions of the first electrode 81 and the second electrode 82 included in the battery 80C. That is, based on the two-dimensional magnetic field data 10D, the distance between the position (first position) where the maximum value of the magnetic field (first maximum value) in the first region 11 is obtained and the position of the first electrode 81 is defined as the first distance. Based on the two-dimensional magnetic field data 10D, the distance between the position (second position) where the maximum value of the magnetic field (second maximum value) in the second region 12 is obtained and the position of the second electrode 82 is defined as the second distance. If the first distance is shorter than the second distance, it is estimated that the position of the defect 89D is included in the first region 11. If the first distance is not shorter than the second distance, it is estimated that the position of the defect 89D is included in the second region 12.

[0029] In the third process, based on the past inspection results regarding the inspection target 80, it is estimated that the position of the defect 89D of the inspection target 80 exists in either the first region 11 or the second region 12. The past inspection results may be stored in the storage unit 70M, for example. In the third process, the information stored in the storage unit 70M is read out, and an estimation is made based on the read information. The past inspection results regarding the inspection target 80 may be obtained by machine learning, for example.

[0030] In the above-described first and second processes, the maximum value of the magnetic field may be calculated excluding the influence of the magnetic field (terminal-induced magnetic field 89H) caused by the terminals that supply the voltage (signal) applied to the first electrode 81 and the second electrode 82. In one example, the magnetic field (terminal-induced magnetic field 89H) caused by the terminals may be removed or reduced based on the difference between the two-dimensional magnetic field data 10D of a known normal product and the two-dimensional magnetic field data 10D of the inspection target 80.

[0031] As described above, the processing unit 70 may be configured to derive an estimation result that the position of the defect 89D of the inspection target 80 exists in either the first region 11 or the second region 12 from the two-dimensional magnetic field data 10D.

[0032] In an embodiment, based on past inspection results or the like, an estimation result that the position of the defect 89D of the inspection target 80 exists in either the first region 11 or the second region 12 may be derived.

[0033] In the examples of FIGS. 6 and 7, the position of the defect 89D is illustrated in the image data. The position of the defect 89D may be output by the value of the coordinates. By displaying the position of the defect 89D in the image data, the user of the inspection apparatus 110 can easily recognize the inspection result.

[0034] FIGS. 8 and 9 are schematic diagrams illustrating the inspection apparatus according to the first embodiment. FIG. 8 corresponds to the inspection result of FIG. 6. The difference data 10F is displayed in the first region 11 illustrated in FIG. 8. In FIG. 8, an image corresponding to the case where the difference is smaller than the threshold value is displayed in the second region 12. Thereby, the user of the inspection apparatus 110 can easily recognize the position of the defect 89D. FIG. 9 corresponds to the inspection result of FIG. 7. The difference data 10F is displayed in the second region 12 illustrated in FIG. 9. In FIG. 9, an image corresponding to the case where the difference is smaller than the threshold value is displayed in the first region 11. Thereby, the user of the inspection apparatus 110 can easily recognize the position of the defect 89D.

[0035] Such an image (inspection result) may be displayed on, for example, the display device 70D (see FIG. 1). The inspection apparatus 110 may include at least one of the display device 70D and the storage unit 70M.

[0036] In an embodiment, the two-dimensional magnetic field data 10D may relate to the component in the second direction D2. For example, the second direction D2 may be perpendicular to the first direction D1. For example, in the inspection of the battery 80C, there are differences in characteristics based on positive and negative at the first electrode 81 and the second electrode 82. Therefore, the magnetic field values included in the two-dimensional magnetic field data 10D are asymmetric with respect to the first direction D1. In an embodiment, by deriving the difference of the two-dimensional magnetic field data 10D of the component in the second direction D2, the position of the defect 89D can be accurately derived.

[0037] In an embodiment, the two-dimensional magnetic field data 10D may include a magnetic field component in the second direction D2. A magnetic field component along the first direction D1 may be used as part of the inspection. For example, the magnetic field component along the first direction D1 may be used to roughly estimate the position of a defect 89D in the inspection target 80.

[0038] As shown in FIG. 4, the direction from the first electrode 81 to the second electrode 82 may be along the above-described first direction D1 of the two-dimensional magnetic field data 10D. The direction from the first terminal 81T that supplies a voltage (signal) to the first electrode 81 to the second terminal 82T that supplies a voltage (signal) to the second electrode 82 may be along the first direction D1. The two-dimensional magnetic field data 10D includes the distribution of the magnetic field generated from the battery 80C when a voltage (signal) is applied between the first electrode 81 and the second electrode 82. The voltage (signal) may be supplied from the control unit 87 (FIG. 1). The voltage (signal) may be, for example, an alternating voltage (alternating signal). The two-dimensional magnetic field data 10D may include data obtained by detection based on the frequency of the alternating voltage. For example, the control unit 87 may include a lock-in amplifier. The lock-in amplifier may detect the magnetic field intensity extracted in synchronization with the alternating voltage (alternating signal). The extracted magnetic field intensity may be used as the magnetic field data 10D. Inspection with higher accuracy becomes possible.

[0039] (Second Embodiment) The second embodiment relates to an inspection method. In the inspection method, data 10A obtained from the inspection target 80 is acquired (step S111 in FIG. 2). The data 10A is processed (step S112 in FIG. 2).

[0040] The data 10A includes two-dimensional magnetic field data 10D regarding a plane PL1 including a first direction D1 and a second direction D2 intersecting the first direction D1. The plane PL1 includes a first position p1, a second position p2, and a third position p3. The third position p3 is the midpoint between the first position p1 and the second position p2 in the first direction D1. The magnetic field data 10D includes first region data 11D between the first position p1 and the third position p3 and second region data 12D between the third position p3 and the second position p2.

[0041] In an embodiment, an inspection target 80 is inspected based on difference data 10F between second region inverted data 12R in which magnetic field values included in second region data 12D are inverted in a first direction D1 and first region data 11D. High-precision inspection can be performed. An inspection result may be output (step S113 in FIG. 2).

[0042] For example, the magnetic field data 10D relates to a component in a second direction D2. The second direction D2 may be perpendicular to the first direction D1. The inspection target 80 may be a battery 80C. The battery 80C includes a first electrode 81, a second electrode 82, and a battery unit 83 between the first electrode 81 and the second electrode 82. The direction from the first electrode 81 to the second electrode 82 is along the first direction D1 of the two-dimensional magnetic field data 10D. For example, the two-dimensional magnetic field data 10D includes a magnetic field distribution generated from the battery 80C when an alternating voltage (alternating signal) is applied between the first electrode 81 and the second electrode 82.

[0043] In an embodiment, the position of a defect 89D in the inspection target 80 may be determined based on a presumption result that the position of the defect 89D exists in either the first region 11 or the second region 12 and the above-described difference data 10F. The first region 11 corresponds to a region where the first region data 11D is obtained. The second region 12 corresponds to a region where the second region data 12D is obtained.

[0044] (Third Embodiment) FIG. 10 is a flowchart illustrating a method for manufacturing a battery according to the third embodiment. As shown in FIG. 10, a battery 80C to be an inspection target 80 is manufactured (step S100). The battery 80C is inspected by the inspection method according to the second embodiment (step S110). In the inspection, the processes described with respect to the first embodiment and the second embodiment may be performed. High-precision inspection can be performed.

[0045] For example, the battery 80C may include a first electrode 81, a second electrode 82, and a battery section 83 between the first electrode 81 and the second electrode 82. The direction from the first electrode 81 to the second electrode 82 is along the first direction D1 of the two-dimensional magnetic field data 10D. For example, the two-dimensional magnetic field data 10D includes the distribution of the magnetic field generated from the battery 80C when an alternating voltage is applied between the first electrode 81 and the second electrode 82.

[0046] For example, the position of the defect 89D of the inspection target 80 may be determined based on the estimation result that the position of the defect 89D exists in either the first region 11 or the second region 12, and the difference data 10F. The first region 11 corresponds to the first region data 11D. The second region 12 corresponds to the second region data 12D.

[0047] As shown in FIG. 10, repair may be performed based on the inspection result (step S120). The inspection target 80 (battery 80C) after repair may be inspected again.

[0048] As shown in FIG. 10, the conditions may be changed based on the inspection result (step S130). For example, the conditions include the formation conditions of the battery 80C. For example, the change of the conditions includes the change of the material of the battery 80C. For example, the change of the conditions may include the design change of the battery 80C. The inspection apparatus 110 and the inspection method according to the embodiment may be used for defect analysis of the inspection target 80.

[0049] The embodiment may include the following configurations (for example, technical solutions). (Technical solution 1) An acquisition unit configured to acquire data obtained from an inspection target, A processing unit configured to perform a first operation of processing the data acquired by the acquisition unit, Comprising The data includes two-dimensional magnetic field data regarding a plane including a first direction and a second direction intersecting the first direction, The plane includes a first region, a second region, a first position, a second position, and a third position, The direction from the first region to the second region is along the first direction, The third position is the midpoint between the first position and the second position in the first direction, The first region is between the first position and the third position in the first direction, The second region is between the third position and the second position in the first direction, The magnetic field data includes first region data regarding the first region and second region data regarding the second region, In the first operation, the processing unit inspects the inspection target based on difference data between second region inversion data obtained by inverting a magnetic field value included in the second region data in the first direction and the first region data. An inspection apparatus.

[0050] (Technical solution 2) The magnetic field data is for the component in the second direction, and is the inspection apparatus described in Technical solution 1.

[0051] (Technical solution 3) The second direction is perpendicular to the first direction, and is the inspection apparatus described in Technical solution 1 or 2.

[0052] (Technical solution 4) The inspection target is a battery, and is the inspection apparatus described in any one of Technical solutions 1 to 3.

[0053] (Technical solution 5) The battery includes a first electrode, a second electrode, and a battery unit between the first electrode and the second electrode, The direction from the first electrode to the second electrode is along the first direction of the two-dimensional magnetic field data, and is the inspection apparatus described in Technical solution 4.

[0054] (Technical solution 6) The two-dimensional magnetic field data includes the distribution of the magnetic field generated from the battery when an alternating voltage is applied between the first electrode and the second electrode, and is the inspection apparatus described in Technical solution 5.

[0055] (Technical solution 7) The processing unit is configured to determine the position of the defect based on a presumption result that the position of the defect in the inspection target exists in either the first region or the second region, and the difference data. The first region corresponds to the first region data. The second region corresponds to the second region data. The inspection apparatus according to any one of Technical Solutions 1 to 6.

[0056] (Technical Solution 8) The inspection apparatus according to Technical Solution 7, wherein the processing unit is configured to derive the presumption result from the two-dimensional magnetic field data.

[0057] (Technical Solution 9) The inspection apparatus according to any one of Technical Solutions 1 to 8, further comprising a magnetic field sensor configured to acquire the two-dimensional magnetic field data from the inspection target.

[0058] (Technical Solution 10) Acquire data obtained from the inspection target, Process the data, The data includes two-dimensional magnetic field data regarding a plane including a first direction and a second direction intersecting the first direction. The plane includes a first region, a second region, a first position, a second position, and a third position. The direction from the first region to the second region is along the first direction. The third position is the midpoint between the first position and the second position in the first direction. The first region is between the first position and the third position in the first direction. The second region is between the third position and the second position in the first direction. The magnetic field data includes first region data regarding the first region and second region data regarding the second region. An inspection method for inspecting the object to be inspected based on the difference data between the second region inversion data obtained by inverting the magnetic field value included in the second region data in the first direction and the first region data. (Technical proposal 11)

[0059] The magnetic field data relates to the component in the second direction, and is the inspection method described in Technical Proposal 10.

[0060] (Technical proposal 12) The second direction is perpendicular to the first direction, and is the inspection method described in Technical Proposal 10 or 11.

[0061] (Technical proposal 13) The object to be inspected is a battery, and is the inspection method described in any one of Technical Proposals 10 to 12.

[0062] (Technical proposal 14) The battery includes a first electrode, a second electrode, and a battery portion between the first electrode and the second electrode. The direction from the first electrode to the second electrode is along the first direction of the two-dimensional magnetic field data, and is the inspection method described in Technical Proposal 13.

[0063] (Technical proposal 15) The two-dimensional magnetic field data includes the distribution of the magnetic field generated from the battery when an alternating voltage is applied between the first electrode and the second electrode, and is the inspection method described in Technical Proposal 14.

[0064] (Technical proposal 16) Based on the estimation result that the position of the defect of the object to be inspected exists in either the first region or the second region and the difference data, determine the position of the defect. The first region corresponds to the first region data. The second region corresponds to the second region data, and is the inspection method described in any one of Technical Proposals 10 to 15.

[0065] (Technical proposal 17) Fabricate the battery to be inspected. A method for manufacturing a battery, which inspects the battery by the inspection method according to any one of Technical Solutions 10 to 12.

[0066] (Technical Solution 18) The battery includes a first electrode, a second electrode, and a battery part between the first electrode and the second electrode. A method for manufacturing a battery according to Technical Solution 17, wherein the direction from the first electrode to the second electrode is along the first direction of the two-dimensional magnetic field data.

[0067] (Technical Solution 19) A method for manufacturing a battery according to Technical Solution 18, wherein the two-dimensional magnetic field data includes a distribution of a magnetic field generated from the battery when an alternating voltage is applied between the first electrode and the second electrode.

[0068] (Technical Solution 20) Determine the position of the defect based on the estimation result that the position of the defect to be inspected exists in either the first region or the second region and the difference data. The first region corresponds to the first region data. A method for manufacturing a battery according to any one of Technical Solutions 17 to 19, wherein the second region corresponds to the second region data.

[0069] According to the embodiment, an inspection device, an inspection method, and a method for manufacturing a battery capable of performing high-precision inspection can be provided.

[0070] As described above, the embodiments of the present invention have been described with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configurations of each element such as the acquisition unit and the processing unit included in the inspection device, the present invention can be similarly implemented by appropriately selecting from the range known to those skilled in the art, and as long as the same effects can be obtained, it is included in the scope of the present invention.

[0071] In addition, combinations of any two or more elements of each specific example within a technically possible range are also included in the scope of the present invention as long as they include the gist of the present invention.

[0072] In addition, based on the inspection apparatus, inspection method, and battery manufacturing method described above as embodiments of the present invention, all inspection apparatuses, inspection methods, and battery manufacturing methods that can be appropriately designed and modified by those skilled in the art also belong to the scope of the present invention as long as they include the gist of the present invention.

[0073] In addition, within the scope of the idea of the present invention, those skilled in the art can conceive of various modification examples and correction examples, and it is understood that those modification examples and correction examples also belong to the scope of the present invention.

[0074] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims and its equivalent scope.

Explanation of Reference Numerals

[0075] 10A: Data, 10D: Magnetic field data, 10F: Difference data, 11, 12: First and second regions, 11D, 12D: First and second region data, 12R: Second region inversion data, 70: Processing unit, 70D: Display device, 70M: Storage unit, 71: Acquisition unit, 80: Object to be inspected, 80C: Battery, 81, 82: First and second electrodes, 81H, 82H: First and second terminal magnetic fields, 81T, 82T: First and second terminals, 83: Battery unit, 85: Magnetic field sensor, 86: Sensor element, 87: Control unit, 89D: Defect, 89H: Terminal-induced magnetic field 89, 110: Inspection apparatus, D1, D2: First and second directions, PL1: Plane, p1~p3: First to third positions

Claims

1. An acquisition unit configured to acquire data obtained from an inspection target; A processing unit configured to perform a first operation of processing the data acquired by the acquisition unit; Comprising: The data includes two-dimensional magnetic field data related to a plane including a first direction and a second direction intersecting the first direction; The plane includes a first region, a second region, a first position, a second position, and a third position; The direction from the first region to the second region is along the first direction; The third position is the midpoint between the first position and the second position in the first direction; The first region is between the first position and the third position in the first direction; The second region is between the third position and the second position in the first direction; The magnetic field data includes first region data related to the first region and second region data related to the second region; In the first operation, the processing unit inspects the inspection target based on difference data between second region inverted data obtained by inverting a magnetic field value included in the second region data in the first direction and the first region data. An inspection device.

2. The magnetic field data relates to a component in the second direction. The inspection device according to claim 1.

3. The inspection target is a battery. The inspection device according to claim 1 or 2.

4. The battery includes a first electrode, a second electrode, and a battery unit between the first electrode and the second electrode; The direction from the first electrode to the second electrode is along the first direction of the two-dimensional magnetic field data. The inspection device according to claim 3.

5. The two-dimensional magnetic field data includes a distribution of a magnetic field generated from the battery when an alternating voltage is applied between the first electrode and the second electrode. The inspection device according to claim 4.

6. The processing unit is configured to determine the position of the defect based on a presumption result that the position of the defect in the inspection target exists in either the first region or the second region and the difference data; The first region corresponds to the first region data; The second region corresponds to the second region data. The inspection device according to any one of claims 1 to 5.

7. The processing unit is configured to derive the presumption result from the two-dimensional magnetic field data. The inspection device according to claim 6.

8. The inspection apparatus according to any one of claims 1 to 7, further comprising a magnetic field sensor configured to acquire the two-dimensional magnetic field data from the inspection target.

9. Acquire data obtained from the inspection target, Process the data, The data includes two-dimensional magnetic field data regarding a plane including a first direction and a second direction intersecting the first direction, The plane includes a first region, a second region, a first position, a second position, and a third position, The direction from the first region to the second region is along the first direction, The third position is the midpoint between the first position and the second position in the first direction, The first region is between the first position and the third position in the first direction, The second region is between the third position and the second position in the first direction, The magnetic field data includes first region data regarding the first region and second region data regarding the second region, An inspection method for inspecting the inspection target based on difference data between the first region data and second region inverted data obtained by inverting the magnetic field values included in the second region data in the first direction.

10. Determine the position of the defect based on a presumption result that the position of the defect in the inspection target exists in either the first region or the second region and the difference data, The first region corresponds to the first region data, The inspection method according to claim 9, wherein the second region corresponds to the second region data.

11. Fabricate the battery to be the inspection target, A method for manufacturing a battery, wherein the battery is inspected by the inspection method according to claim 9 or 10.

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