Mask assembly and method of manufacturing organic light emitting device using the same

Abstract

To provide a mask assembly and a method of manufacturing an organic light emitting device using the same.SOLUTION: According to an embodiment, a mask assembly may include a mask frame, a plurality of short-side sticks disposed on the mask frame and disposed in a direction along the short side of the mask frame, a plurality of long-side sticks disposed on the short-side sticks and disposed in a direction along the long side of the mask frame, and deposition masks disposed on the long-side sticks. The long-side sticks may comprise a first long-side stick disposed adjacent to the long side of the mask frame and a second long-side stick disposed so as to be spaced apart from the long side of the mask frame, the first long-side stick may comprise wing portions extending in the direction of the short side of the mask frame so as to mask part of openings of the deposition masks, and the long side of the mask frame may comprise wing grooves in which the wing portions are seated.SELECTED DRAWING: Figure 10

Description

Technical Field

[0001] The present invention relates to a mask assembly and a method for manufacturing an organic light-emitting device using the same.

Background Art

[0002] An organic light-emitting display device realizes video display using light emitted from an organic light-emitting device, which is a self-luminous element. In an organic light-emitting device including a light-emitting layer interposed between opposing electrode layers, excitons generated by recombination of holes and electrons can change from an excited state to a ground state to emit light.

[0003] As a method for manufacturing the electrode layer and / or the light-emitting layer, etc., a vapor deposition process using a vapor deposition mask can be exemplified. For example, a vapor deposition mask having a pattern opening with substantially the same shape as the pattern of the layer to be formed is aligned on a substrate, and a vapor deposition material is vapor-deposited on the substrate through the opening of the vapor deposition mask to form a pattern layer of a desired shape. The vapor deposition mask can be supported by a mask frame and adhered to the substrate.

[0004] On the other hand, as the organic light-emitting display device becomes increasingly high-resolution, the sizes of the electrodes and the light-emitting layer of the organic light-emitting device become smaller, and therefore, a more precise vapor deposition method is required.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] The problem to be solved by the present invention is to provide a mask assembly capable of improving the precision of the vapor deposition process by stably supporting a vapor deposition mask, and a method for manufacturing an organic light-emitting device using the same.

[0007] The problems of the present invention are not limited to the problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

Means for Solving the Problems

[0008] A mask assembly according to an embodiment for solving the above problems includes a mask frame, a plurality of short-side sticks disposed on the mask frame and extending along the short side of the mask frame, a plurality of long-side sticks disposed on the plurality of short-side sticks and extending along the long side of the mask frame, and a vapor deposition mask disposed on the plurality of long-side sticks. The plurality of long-side sticks include a first long-side stick disposed adjacent to the long side of the mask frame and a second long-side stick disposed spaced apart from the long side of the mask frame. The first long-side stick includes a blade portion extending in the direction of the short side of the mask frame so as to mask a part of the opening of the vapor deposition mask. The long side (the portion forming the long side) of the mask frame includes a blade groove on which the blade portion is mounted. In the present application, the term "groove" is not limited to an elongated linear one, and means a recess or hole for assembling the end portion of the stick.

[0009] The short side (the short side portion of the rectangular frame) of the mask frame includes a long-side stick groove on which each end portion of the plurality of long-side sticks is mounted, and the long side (the long side portion of the rectangular frame) of the mask frame includes a short-side stick groove on which each end portion of the plurality of short-side sticks is mounted.

[0010] The blade groove and the short-side stick groove are arranged so as to overlap each other.

[0011] The end of the short-side stick is seated in the short-side stick groove, and the blade part is installed in the blade groove located above the short-side stick groove.

[0012] The blade part includes a first blade part installed in the blade groove and a second blade part arranged symmetrically with the first blade part with respect to the extension direction of the long-side stick.

[0013] The height of the long-side stick groove is the same as the height of the blade groove.

[0014] The width of the blade groove is larger than the width of the short-side stick groove. In the present application, the term "width of the groove" means the dimension in the direction along the short-side portion in the case of the groove on the short-side portion of the mask frame, and means the dimension in the direction along the short-side portion in the case of the groove on the short-side portion of the mask frame.

[0015] A first length of the blade groove extending from the inner side surface of the mask frame is shorter than a second length of the long-side stick groove extending from the inner side surface of the mask frame.

[0016] The vapor deposition mask is arranged in the direction along the short side of the mask frame.

[0017] The vapor deposition mask includes fixing parts located at both ends of the vapor deposition mask, at least one vapor deposition pattern part located between the fixing parts and including a plurality of pattern openings, and rib parts located around the vapor deposition pattern part.

[0018] A mask assembly according to an embodiment for solving the above problems includes a mask frame, a plurality of long-side sticks disposed on the mask frame and arranged in a direction along the long side of the mask frame, a plurality of short-side sticks disposed on the plurality of long-side sticks and arranged in a direction along the short side of the mask frame, and a vapor deposition mask disposed on the plurality of short-side sticks. The plurality of long-side sticks include a first long-side stick disposed adjacent to the long side of the mask frame and a second long-side stick disposed spaced apart from the long side of the mask frame. The first long-side stick includes a blade portion extending in a direction toward the short side of the mask frame so as to mask a part of the opening of the vapor deposition mask. The long side of the mask frame includes a blade groove on which the blade portion is mounted.

[0019] The short side of the mask frame includes a long-side stick groove on which each end of the plurality of long-side sticks is mounted, and the long side of the mask frame includes a short-side stick groove on which each end of the plurality of short-side sticks is mounted.

[0020] The blade groove and the short-side stick groove are arranged to overlap each other.

[0021] The end of the short-side stick is mounted in the short-side stick groove, and the blade portion is mounted in the blade groove located below the short-side stick groove.

[0022] The blade portion includes a first blade portion mounted in the blade groove and a second blade portion symmetrically arranged with respect to the first blade portion with reference to the extension direction of the long-side stick.

[0023] The height of the long-side stick groove is the same as the height of the blade groove.

[0024] The width of the blade groove is larger than the width of the short-side stick groove.

[0025] The first length of the blade groove extending from the inner side surface of the mask frame is shorter than the second length of the long side stick groove extending from the inner side surface of the mask frame.

[0026] The evaporation mask is arranged in a direction along the short side of the mask frame.

[0027] The evaporation mask includes fixing portions located at both ends of the evaporation mask, at least one evaporation pattern portion located between the fixing portions and including a plurality of pattern openings, and rib portions located around the evaporation pattern portion.

[0028] A method for manufacturing an organic light-emitting element according to an embodiment for solving the above problems includes a step of disposing a substrate on one surface of a mask assembly, a step of disposing an evaporation source so as to face the other surface of the mask assembly, and a step of vaporizing an evaporation material accommodated in the evaporation source so that the vaporized evaporation material passes through the mask assembly and is deposited on the substrate. The mask assembly includes a mask frame, a plurality of short side sticks disposed on the mask frame and arranged in a direction along the short side of the mask frame, a plurality of long side sticks disposed on the plurality of short side sticks and arranged in a direction along the long side of the mask frame, and an evaporation mask disposed on the plurality of long side sticks. The plurality of long side sticks include a first long side stick disposed adjacent to the long side of the mask frame and a second long side stick disposed spaced apart from the long side of the mask frame. The first long side stick includes blade portions extending in a direction toward the short side of the mask frame so as to mask a part of the opening of the evaporation mask. The long side of the mask frame includes blade grooves on which the blade portions are mounted.

[0029] The short side of the mask frame includes long side stick grooves on which the ends of the plurality of long side sticks are mounted, and the long side of the mask frame includes short side stick grooves on which the ends of the plurality of short side sticks are mounted.

[0030] The blade groove and the short-side stick groove are arranged so as to overlap each other.

[0031] The end of the short-side stick is installed in the short-side stick groove, and the blade part is installed in the blade groove located above the short-side stick groove.

[0032] Specific contents of other embodiments are included in the detailed description and the drawings.

Effects of the Invention

[0033] According to the mask assembly and the method for manufacturing an organic light-emitting element using the same according to the embodiment, by stably supporting the evaporation mask, the precision of the evaporation process can be improved.

[0034] The effects according to the embodiment are not limited to the contents exemplified above, and more diverse effects are included in this specification.

Brief Description of the Drawings

[0035]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Mode for Carrying Out the Invention

[0036] The advantages, features, and the method for achieving them of the present invention will become clear by referring to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be realized in various different forms. These embodiments are merely provided to complete the disclosure of the present invention and to fully inform those with ordinary knowledge in the technical field to which the present invention belongs of the scope of the invention. The present invention is defined only by the scope of the claims.

[0037] When an element or layer is referred to as "on" another element or layer, it includes all cases where another layer or another element is interposed immediately above or in the middle of the other element. The same reference numerals throughout the specification refer to the same components. Since the shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining the embodiments are exemplary, the present invention is not limited to the matters shown in the drawings.

[0038] The first, second, etc. are used to describe various components, but of course these components are not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below can be the second component within the technical idea of the present invention.

[0039] The features of each of the various embodiments of the present invention can be partially or wholly combined or combined with each other, enabling various technical linkages and drives, and each embodiment can be implemented independently of each other or in cooperation with each other.

[0040] Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

[0041] FIG. 1 is a plan view of a display device 1 according to an embodiment. FIG. 2 is a cross-sectional view of the display device 1 according to an embodiment. FIG. 3 is a plan view of the display device 1 according to an embodiment. For example, FIG. 3 can be a view showing a state in which the sub-region SR is bent from one end of the bending region BR.

[0042] In the plan view of FIG. 1, for convenience of explanation, the directions of up, down, left, and right are defined. The up-down direction is defined as the first direction DR1 as the vertical direction or column direction, the left-right direction is defined as the second direction DR2 as the horizontal direction or row direction, and the vertical direction is defined as the third direction DR3.

[0043] The display device 1 can be a device that displays videos and still images. The display device 1 can be applied to not only portable electronic devices such as mobile phones, smartphones, tablet PCs (Personal Computers), and smartwatches, watch phones, mobile communication terminals, electronic notebooks, e-books, PMPs (Portable Multimedia Players), navigation devices, UMPCs (Ultra Mobile PCs), etc., but also various products such as televisions, notebook computers, monitors, billboards, and the Internet of Things. Examples of the display device 1 can be an organic light-emitting display device, a liquid crystal display device, a plasma display device, a field emission display device, an electrophoretic display device, an electro-wetting display device, a quantum dot light-emitting display device, a micro LED display device, etc. Hereinafter, the organic light-emitting display device will be described as an example of the display device 1, but the embodiments are not limited thereto.

[0044] Referring to FIGS. 1 to 3, the display device 1 according to an embodiment may include a display panel 10. The display panel 10 may include a substrate SUB including a flexible polymer material such as polyimide. Therefore, the display panel 10 can be warped, bent, folded, or rolled up.

[0045] The display panel 10 may include a main region MR, a bending region BR extending from one side of the main region MR, and a sub-region SR extending from one side of the bending region BR. The bending region BR is a region disposed between the main region MR and the sub-region SR and can have a state of being bent at a specified curvature. The sub-region SR can be disposed so as to overlap the main region MR in the thickness direction (e.g., the third direction DR3) when the bending region BR is bent.

[0046] The display area DA for displaying the screen on the display panel 10 is arranged within the main area MR. The non-display area NDA that does not display the screen on the display panel 10 can be the remaining area excluding the display area DA. The main area MR can generally have a shape similar to the outer shape on the plane of the display device 1. The main area MR can be a flat area located on a single plane.

[0047] The display area DA of the display panel 10 can be arranged at the center of the main area MR. The display area DA can include a plurality of pixels. The display area DA can have a rectangular shape or a rectangular shape with rounded corners.

[0048] The non-display area NDA can be located around the display area DA in the main area MR. The non-display area NDA of the main area MR can be placed in the area from the outer boundary of the display area DA to the edge of the display panel 10. Signal wirings and drive circuits for applying signals to the display area DA can be arranged in the non-display area NDA of the main area MR.

[0049] The bending area BR can be connected to one end of the main area MR. The width of the bending area BR can be smaller than the width (width of the short side) of the main area MR. In the bending area BR, the display panel 10 can be bent with a curvature in the downward direction in the thickness direction, for example, in the opposite direction of the display surface.

[0050] The sub-area SR can extend in a direction parallel to the main area MR from one end of the bending area BR. The sub-area SR can overlap the main area MR in the thickness direction of the display panel 10. The sub-area SR can overlap the non-display area NDA at the edge of the main area MR and further extend to the display area DA of the main area MR.

[0051] Drive chips 20 can be arranged on the sub-area SR of the display panel 10. The drive chips 20 can include integrated circuits for driving the display panel 10. The drive chips 20 can be mounted on the display panel 10 in the sub-area SR.

[0052] The driving chip 20 can be attached onto the display panel 10 by an anisotropic conductive film or can be attached onto the display panel 10 by ultrasonic bonding.

[0053] A pad portion (not shown) can be arranged at an end of the sub-region SR of the display panel 10. The display panel 10 can be connected to the display driving substrate 30 via the pad portion. The display driving substrate 30 can be a flexible printed circuit board or a film.

[0054] A plurality of signal wirings can be arranged in the sub-region SR, the bending region BR, and the main region MR. The signal wiring can extend from the main region MR through the bending region BR to the pad portion of the sub-region SR.

[0055] Thus, in the display device 1 according to the embodiment shown in FIGS. 1 to 3, when the bending region BR of the display panel 10 is bent, the sub-region SR where the pad portion and the driving chip 20 are arranged is arranged to face downward in the thickness direction.

[0056] FIG. 4 is a diagram showing a cross-sectional structure in which a part of the display region DA of the display panel 10 according to an embodiment is cut.

[0057] In the description with reference to FIG. 4, the expression “~above” means the third direction DR3 toward which the front surface of the display panel 10 faces. The front surface of the display panel 10 means the direction in which the light-emitting elements included in the display panel 10 emit light for displaying an image.

[0058] Referring to FIG. 4, the display panel 10 is based on a flexible substrate SUB. The substrate SUB is made of an insulating material such as a polymer resin. For example, the substrate SUB is made of polyimide. Therefore, the substrate SUB can be bent, folded, rolled, etc. The substrate SUB may include a multi-layer including a first substrate SUB1 and a second substrate SUB2 and a barrier film BR disposed therebetween. For example, the substrate SUB of the display panel 10 includes a first substrate SUB1, a barrier film BR disposed on the first substrate SUB1, and a second substrate SUB2 disposed on the barrier film BR. The first substrate SUB1 and the second substrate SUB2 can include a flexible material such as polyimide.

[0059] The barrier film BR is a film for protecting the transistors of the thin film transistor layer TFTL and the light emitting layer 172 of the light emitting element layer EML from the permeating moisture. The barrier film BR is composed of a plurality of inorganic films 911 laminated alternately. For example, the barrier film BR can be formed of a multi-layer (laminated) film in which one or more inorganic films 911 among a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, and an aluminum oxide layer are laminated alternately.

[0060] On the second substrate SUB2, a thin film transistor layer TFTL including thin film transistors, a light emitting element layer EML including light emitting elements LEL, a sealing layer TFEL for sealing the light emitting elements LEL, and a touch sensing portion TDU can be sequentially laminated. Although not shown, in the non-display area NDA of the display panel 10, at least some of the layers shown in FIG. 4 may not be disposed. The thin film transistor layer TFTL, the light emitting element layer EML, and the sealing layer TFEL can be named as a display portion DU for performing a function of displaying an image, but the name is not limited thereto.

[0061] On the second substrate SUB2, thin film transistors of a pixel driving circuit for driving each pixel are arranged. FIG. 4 shows an arbitrary first thin film transistor TFT1 among the thin film transistors of the pixel driving circuit. For example, the first thin film transistor TFT1 can play the role of a driving transistor in the pixel driving circuit.

[0062] The first thin film transistor TFT1 may include a first active layer ACT1 and a first gate electrode G1. The first active layer ACT1 can include polycrystalline silicon, single crystal silicon, low temperature polycrystalline silicon, amorphous silicon, or an oxide semiconductor.

[0063] The first active layer ACT1 may include a first source region S1 and a first drain region D1. The first channel region CHA1 may be a region that overlaps with the first gate electrode G1 in a third direction DR3 which is the thickness direction of the substrate SUB. The first source region S1 is arranged on one side of the first active layer ACT1, and the first drain region D1 may be arranged on the other side of the first active layer ACT1. The first source region S1 and the first drain region D1 may be regions that do not overlap with the first gate electrode G1 in the third direction DR3. The first source region S1 and the first drain region D1 may be regions doped with ions or impurities in a silicon semiconductor or an oxide semiconductor to have conductivity.

[0064] A gate insulating film 130 may be arranged on the first active layer ACT1 of the first thin film transistor TFT1. The gate insulating film 130 can be formed of an inorganic film, for example, a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer.

[0065] On the gate insulating film 130, the first gate electrode G1 and the first capacitor electrode CAE1 of the first thin film transistor TFT1 can be arranged. The first gate electrode G1 can overlap the first active layer ACT1 in the third direction DR3. In FIG. 4, a case where the first gate electrode G1 and the first capacitor electrode CAE1 are arranged apart from each other is shown, but the first gate electrode G1 and the first capacitor electrode CAE1 may be connected to each other. The first gate electrode G1 and the first capacitor electrode CAE1 can be formed of a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0066] An interlayer insulating film 140 can be arranged on the first gate electrode G1 and the first capacitor electrode CAE1 of the first thin film transistor TFT1. Specifically, a first interlayer insulating film 141 can be arranged on the first gate electrode G1 and the first capacitor electrode CAE1 of the first thin film transistor TFT1. The first interlayer insulating film 141 can be formed of an inorganic film, for example, a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. The first interlayer insulating film 141 can be formed of a plurality of inorganic films.

[0067] On the first interlayer insulating film 141, a second capacitor electrode CAE2 can be disposed. The second capacitor electrode CAE2 can overlap with the first capacitor electrode CAE1 of the first thin film transistor TFT1 in the third direction DR3. When the first capacitor electrode CAE1 is connected to the first gate electrode G1, the second capacitor electrode CAE2 can overlap with the first gate electrode G1 in the third direction DR3. Since the first interlayer insulating film 141 has a predetermined dielectric constant, a capacitor can be formed by the first capacitor electrode CAE1, the second capacitor electrode CAE2, and the first interlayer insulating film 141 disposed therebetween. The second capacitor electrode CAE2 can be formed of a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0068] On the second capacitor electrode CAE2, a second interlayer insulating film 142 can be disposed. The second interlayer insulating film 142 can be formed of an inorganic film, for example, a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. The second interlayer insulating film 142 can be formed of a plurality of inorganic films.

[0069] On the second interlayer insulating film 142, a first anode connection electrode ANDE1 can be disposed. The first anode connection electrode ANDE1 can be connected to the first drain region D1 of the first thin film transistor TFT1 through a first connection contact hole ANCT1 penetrating the gate insulating film 130, the first interlayer insulating film 141, and the second interlayer insulating film 142. The first anode connection electrode ANDE1 can be formed of a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0070] On the first anode connection electrode ANDE1, a first planarization film 160 for planarizing the step due to the first thin film transistor TFT1 can be disposed. The first planarization film 160 can be formed of an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0071] On the first planarization film 160, a second anode connection electrode ANDE2 can be disposed. The second anode connection electrode ANDE2 can be connected to the first anode connection electrode ANDE1 through a second connection contact hole ANCT2 penetrating the first planarization film 160. The second anode connection electrode ANDE2 can be formed of a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0072] On the second anode connection electrode ANDE2, a second planarization film 180 can be disposed. The second planarization film 180 can be formed of an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0073] On the second planarization film 180, a light emitting element LEL and a bank 190 can be disposed. Each of the light emitting elements LEL includes a pixel electrode 171, a light emitting layer 172, and a common electrode 173.

[0074] The pixel electrode 171 can be disposed on the second planarization film 180. The pixel electrode 171 can be connected to the second anode connection electrode ANDE2 through a third connection contact hole ANCT3 penetrating the second planarization film 180.

[0075] A top emission structure that emits light in the direction of the common electrode 173 with respect to the light-emitting layer 172. The pixel electrode 171 can be formed of a highly reflective metal material such as a stacked structure of aluminum and titanium (Ti / Al / Ti), a stacked structure of aluminum and ITO (Indium Tin Oxide) (ITO / Al / ITO), an APC alloy, and a stacked structure of an APC alloy and ITO (ITO / APC / ITO). The APC alloy is an alloy of silver (Ag), palladium (Pd), and copper (Cu).

[0076] The bank 190 can be formed to outline the pixel electrode 171 on the second planarization film 180 in order to define (define) the light-emitting region of each pixel, for example, the light-emitting portion. The light-emitting portion (e.g., EA1, EA2) indicates a region where the pixel electrode 171, the light-emitting layer 172, and the common electrode 173 are sequentially stacked and holes from the pixel electrode 171 and electrons from the common electrode 173 recombine in the light-emitting layer 172 to emit light.

[0077] FIG. 4 exemplarily shows that the bank 190 partitions the first light-emitting portion EA1 of the first pixel adjacent to each other and the second light-emitting portion EA2 of the second pixel. Such a bank 190 can be arranged to cover the edge of the pixel electrode 171. The bank 190 can be formed of an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin. The bank 190 may be named a pixel definition (definition) film (PDL: Pixel Definition Layer). Although not shown, the display panel 10 includes a plurality of pixels including a first pixel, a second pixel, and a third pixel. For example, the first pixel may include a first light-emitting portion that emits a first color, the second pixel may include a second light-emitting portion that emits a second color, and the third pixel may include a third light-emitting portion that emits a third color. According to some embodiments, the plurality of pixels may further include a fourth pixel, and the fourth pixel may include a fourth light-emitting portion that emits a fourth color.

[0078] A light-emitting layer 172 can be disposed on the pixel electrode 171 and the bank 190. The light-emitting layer 172 can contain an organic substance and emit a predetermined color. For example, the light-emitting layer 172 includes a hole transporting layer, an organic substance layer, and an electron transporting layer.

[0079] The common electrode 173 can be disposed on the light-emitting layer 172. The common electrode 173 can be disposed so as to cover the light-emitting layer 172. The common electrode 173 can be a common layer commonly disposed for the first light-emitting portion EA1, the second light-emitting portion EA2, and a third light-emitting portion (not shown). A capping layer can be formed on the common electrode 173.

[0080] In the top-emission structure, the common electrode 173 can be formed of a transparent metal material (TCO, Transparent Conductive Material) such as ITO or IZO that transmits light, or a semi-transmissive conductive material such as magnesium (Mg), silver (Ag), or an alloy of magnesium (Mg) and silver (Ag). When the common electrode 173 is formed of a semi-transmissive conductive material, the light extraction efficiency is increased by a micro cavity.

[0081] A spacer 191 can be disposed on the bank 190. The spacer 191 can serve to support a mask during the process of manufacturing the light-emitting layer 172. The spacer 191 can be formed of an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0082] On the common electrode 173, a sealing layer TFEL can be disposed. The sealing layer TFEL includes at least one inorganic film in order to prevent oxygen or moisture from penetrating into the light-emitting element layer EML. Further, the sealing layer TFEL includes at least one organic film in order to protect the light-emitting element layer EML from foreign matters such as dust. For example, the sealing layer TFEL includes a first sealing inorganic film TFE1, a sealing organic film TFE2, and a second sealing inorganic film TFE3.

[0083] The first sealing inorganic film TFE1 is disposed on the common electrode 173, the sealing organic film TFE2 is disposed on the first sealing inorganic film TFE1, and the second sealing inorganic film TFE3 can be disposed on the sealing organic film TFE2. The first sealing inorganic film TFE1 and the second sealing inorganic film TFE3 can be formed of a multilayer film in which one or more inorganic films among a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, and an aluminum oxide layer are alternately laminated. The sealing organic film TFE2 can be an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0084] On the sealing layer TFEL, a touch sensing unit TDU can be disposed. The touch sensing unit TDU can be a mutual capacitance type touch sensor or a self-capacitance type touch sensor. FIG. 4 shows a mutual capacitance type touch sensor, but the present invention is not limited thereto. The touch sensing unit TDU includes a first touch insulating film TINS1, a connection electrode BE1, a second touch insulating film TINS2, a driving electrode TE, a sensing electrode RE, and a third touch insulating film TINS3.

[0085] The first touch insulating film TINS1 can be formed of an inorganic film, for example, a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer.

[0086] A connection electrode BE1 may be disposed on the first touch insulating film TINS1. The connection electrode BE1 can be formed as a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0087] A second touch insulating film TINS2 is disposed on the connection electrode BE1. The second touch insulating film TINS2 can be formed of an inorganic film, such as a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. Alternatively, the second touch insulating film TINS2 can be formed of an organic film, such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0088] A drive electrode TE and a sensing electrode RE may be disposed on the second touch insulating film TINS2. The drive electrode TE and the sensing electrode RE can be formed as a single layer or a multilayer made of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.

[0089] The drive electrode TE and the sensing electrode RE may overlap the connection electrode BE1 in the third direction DR3. The drive electrode TE can be connected to the connection electrode BE1 through a touch contact hole TCNT1 that penetrates the first touch insulating film TINS1.

[0090] On the driving electrode TE and the sensing electrode RE, a third touch insulating film TINS3 is formed. The third touch insulating film TINS3 can serve to flatten the steps formed by the driving electrode TE, the sensing electrode RE, and the connecting electrode BE1. The third touch insulating film TINS3 can be formed of an organic film such as an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, or a polyimide resin.

[0091] Hereinafter, a mask assembly 500 according to an embodiment described in relation to FIGS. 5 to 16 is used in the deposition process of the light-emitting layer 172 of the display panel 10 described with reference to FIG. 4.

[0092] FIG. 5 is a perspective view of a mask assembly according to an embodiment. FIG. 6 is an exploded perspective view of a mask assembly according to an embodiment.

[0093] Referring to FIGS. 5 and 6, a mask assembly 500 according to an embodiment includes a mask frame 610, a plurality of short-side sticks 620 disposed on the mask frame 610 and arranged in a direction along the short side of the mask frame 610, a plurality of long-side sticks 630 disposed on the plurality of short-side sticks 620 and arranged in a direction along the long side of the mask frame 610, and a deposition mask 640 disposed on the plurality of long-side sticks 630.

[0094] In this specification, the long-side stick may be named "first stick", and the short-side stick may be named "second stick". Alternatively, in this specification, the long-side stick may be named "second stick", and the short-side stick may be named "first stick".

[0095] The mask frame 610 can be combined with the deposition mask 640 to support the deposition mask 640. The mask frame 610 can have a thickness in a predetermined third direction Z so as to stably support the deposition mask 640 and the like.

[0096] The mask frame 610 may have a rectangular strip shape including a pair of long sides and a pair of short sides, with a frame opening 610p formed in the center. For example, the pair of long sides may extend in the first direction X and face each other in the second direction Y, and the pair of short sides may extend in the second direction Y and face each other in the first direction X.

[0097] The shape of the frame opening 610p on the plane may be substantially rectangular. The frame opening 610p can provide a path for the deposition material to pass through.

[0098] According to one embodiment, the mask frame 610 may have a rectangular strip shape with the lengths of both pairs of sides being the same, and the shape of the frame opening 610p on the plane may be square.

[0099] The mask frame 610 is made of a material with high rigidity, such as a metal like stainless steel.

[0100] The mask frame 610 may be coupled to the long side sticks 630 and the short side sticks 620 to support the long side sticks 630 and the short side sticks 620. In an exemplary embodiment, the mask frame 610 includes one or more grooves 611, 612, 613 for at least partially accommodating the long side sticks 630.

[0101] The short side sticks 620 are disposed on one side (the upper side in the drawing) of the mask frame 610. The short side sticks 620 may be support members configured to additionally support the vapor deposition mask 640 disposed on the upper part together with the long side sticks 630.

[0102] One side (the upper side in the drawing) of the short side sticks 620 may be a flat surface having a predetermined area so as to be effectively supported by abutting and contacting the upper vapor deposition mask 640. In an exemplary embodiment, the shape of the radial cross-section of the short side sticks 620 may be a flat rectangle with the lengths of the upper side (i.e., one side) and the lower side (i.e., the other side) being long and the lengths of both side edges being short.

[0103] The short-side stick 620 can extend in the second direction Y, intersect the long-side stick 630, and cross the frame opening 610p. For example, the short-side stick 620 can be generally rod-shaped with a length greater than its width.

[0104] The long-side stick 630 is disposed on one surface (the upper surface in the drawing) of the short-side stick 620. The long-side stick 630 can be a support member configured to additionally support the vapor deposition mask 640 disposed above.

[0105] One surface (the upper surface in the drawing) of the long-side stick 630 can be a flat surface having a predetermined area so as to be effectively supported by abutting and contacting the upper vapor deposition mask 640. In an exemplary embodiment, the shape of the radial cross-section of the long-side stick 630 can be a flat rectangle with a longer length of the upper side (i.e., one surface) and the lower side (i.e., the other surface), and a shorter length of both side edges.

[0106] The long-side stick 630 can extend in the first direction X and cross the frame opening 610p. For example, the long-side stick 630 can be generally bar-shaped with a length (e.g., the length in the first direction X) greater than its width (e.g., the width in the second direction Y).

[0107] The long-side stick 630 can extend in the first direction X and be inserted and disposed in a first groove (e.g., long-side stick groove) 611 with both ends 631 disposed on the short sides of the mask frame 610. The long-side stick 630 can be disposed so as not to overlap the vapor deposition pattern portion 642 of the vapor deposition mask 640. For example, the long-side stick 630 can be disposed to overlap the rib portion 643 of the vapor deposition mask 640 described later. The mask frame 610 and the long-side stick 630 are made of the same material to prevent deformation due to differences in thermal expansion characteristics during the vapor deposition process. Note that the first groove 611 of the mask frame 610 can be disposed to overlap a blade groove (e.g., third groove, 613) for accommodating the blade portion (821a in FIG. 10) of the outermost first long-side stick (820 in FIG. 10) of the long-side stick 630.

[0108] When the mask frame 610 includes a long side in the first direction X and a short side in the second direction Y, the length of the short side stick 620 may be shorter than the length of the long side stick 630. As will be described later, the short side stick 620 may be inserted and disposed in a second groove (e.g., short side stick groove, 612) extending in the second direction Y with both end portions 621 disposed on the long side of the mask frame 610. The short side stick 620 may be disposed so as not to overlap the deposition pattern portion 642 of the deposition mask 640, similar to the long side stick 630. For example, the short side stick 620 may overlap with the boundary between two deposition masks 640 disposed adjacent to each other. The short side stick 620 is made of the same material as the long side stick 630.

[0109] FIG. 7 is a perspective view of a deposition mask according to an embodiment.

[0110] The deposition mask 640 is disposed so as to extend in a direction along the short side of the mask frame 610. The deposition mask 640 may be disposed on one surface of the long side stick 630 and one surface of the short side stick 620. The deposition mask 640 has one surface (the upper surface in the drawing) and the other surface (the lower surface in the drawing). One surface is the surface that contacts a substrate (not shown) during the deposition process, and the other surface is the surface on the opposite side of the one surface and may be the surface on which the deposition material is provided. The other surface of the deposition mask 640 may abut and contact one or more of the mask frame 610, the long side stick 630, or the short side stick 620.

[0111] The vapor deposition mask 640 may have a shape in which the length (e.g., the length in the second direction Y) is greater than the width (e.g., the width in the first direction X). The vapor deposition masks 640 may each be a divided mask that extends in the first direction X and a plurality of them are arranged adjacent to each other in the second direction Y. In other embodiments, the vapor deposition mask 640 may be an integrally formed single-sheet mask (a "mother mask") having an area on a plane that covers the frame opening 610p. In an exemplary embodiment, the vapor deposition mask 640 may be a fine metal mask made of a metal material. The vapor deposition mask 640 may be made of a metal such as stainless steel, nickel, cobalt, or an alloy thereof. In some embodiments, the vapor deposition mask 640 can also be magnetic.

[0112] The vapor deposition mask 640 may include fixing portions 641 located at both ends in its longitudinal direction (i.e., the second direction), a plurality of vapor deposition pattern portions 642 located closer to the center side than the fixing portions 641, and rib portions 643 located between the vapor deposition pattern portions 642.

[0113] The fixing portion 641 is a portion that abuts and is joined in contact with the mask frame 610. For example, the fixing portion 641 may be welded and joined to the mask frame 610. The welding method is not particularly limited, and examples thereof include laser welding and resistance heating welding.

[0114] The vapor deposition pattern portion 642 is a portion in which a plurality of pattern openings 642p through which the vapor deposition material passes are formed. A plurality of vapor deposition pattern portions 642 may be arranged at intervals in the longitudinal direction (i.e., the second direction Y) of the vapor deposition mask.

[0115] Between the vapor deposition pattern portions 642 adjacent to each other in the second direction Y, a rib portion 643 is defined. That is, the rib portion 643 can be a reference for partitioning the vapor deposition pattern portions 642 adjacent to each other in the second direction Y. The rib portion 643 has no pattern opening 642p formed therein and can block the passage of the vapor deposition material. In an exemplary embodiment, the rib portion 643 can overlap with the long side stick 630 extending in the first direction X.

[0116] The pattern opening 642p is an opening that penetrates one surface and the other surface of the vapor deposition mask 640. The pattern openings 642p of the vapor deposition mask 640 aligned on a substrate (not shown) can expose the vapor deposition target region of the substrate. That is, the pattern opening 642p can have a shape on a plane that is substantially the same as the vapor deposition pattern to be formed. Figures 1 and the like illustrate the case where the pattern openings 642p are spaced apart from each other in the first direction X and the second direction Y and have a dot shape on the plane, and are arranged in a substantially matrix pattern to form the vapor deposition pattern portions 642. However, the present invention is not limited thereto, and the pattern opening 642p can be in a slit shape extending in the first direction X or the second direction Y on the plane.

[0117] FIG. 8 is a plan view of a mask assembly 500 according to a comparative example. FIG. 9 is a diagram for explaining the warpage of the long side stick 630 according to the comparative example.

[0118] Referring to FIGS. 8 and 9, the mask assembly 500 according to the comparative example includes a plurality of long side sticks 630 coupled to the mask frame 610. The plurality of long side sticks 630 are arranged along the long sides of the mask frame 610 and can be arranged to mask a part of the vapor deposition pattern portion 642 of the vapor deposition mask. For example, the four corners of the vapor deposition pattern portion 642 can have a round shape with a specified curvature in plan view.

[0119] The plurality of long-side sticks 630 may include blade portions 811 and 821 that extend in the short-side direction of the mask frame 610 so as to mask the corners of the vapor deposition pattern portion 642 into a rounded shape. The plurality of long-side sticks 630 may include a first long-side stick 820 disposed adjacent to the long side of the mask frame 610 and a second long-side stick 810 disposed spaced apart from the long side of the mask frame 610. For example, the first long-side stick 820 may be the outermost long-side stick 630 among the plurality of long-side sticks 630. The second long-side stick 810 may be the long-side stick 630 disposed between the first long-side sticks 820.

[0120] In this specification, the blade portion may be named with terms such as "extension portion" or "projection portion".

[0121] According to the comparative example, by being disposed on the outermost side, the first long-side stick 820 includes an asymmetric blade portion 821. For example, the first long-side stick 820 includes a blade portion 821 (e.g., an asymmetric blade portion) that protrudes only in one direction. Note that as the second long-side stick 810 is disposed between the first long-side sticks 820 on both sides, the second long-side stick 810 includes blade portions 811 that are line-symmetric with respect to the central axis in the longitudinal direction. For example, the second long-side stick 810 includes blade portions 811 (e.g., symmetric blade portions) that protrude in both directions (e.g., the vertical direction in FIG. 8). The second long-side stick 810 has a symmetric shape in plan view due to the blade portions 811 protruding in both directions.

[0122] In the mask assembly 500 according to the comparative example, since the first long-side stick 820 includes the asymmetric blade part 821, warping (curving) may occur in the first long-side stick 820. For example, when the first long-side stick 820 is coupled to the mask frame 610, the tensile force applied to the first long-side stick 820 causes the first long-side stick 820 to warp in a specific direction (e.g., 901 in FIG. 9). Such warping of the first long-side stick 820 is because the blade part 821 included in the first long-side stick 820 has an asymmetric shape. The warping of the first long-side stick 820 may cause defects in the vapor deposition process.

[0123] In one embodiment of the present invention, the first long-side stick 820 is configured to include symmetric blade parts 821 so as to prevent warping of the first long-side stick 820 as described in the comparative example (e.g., FIG. 10). Further, a blade groove 613 (e.g., the third groove) is formed in the mask frame 610 so that the blade parts 821 of the first long-side stick 820 are inserted therein. The blade groove 613 of the mask frame 610 is arranged to overlap with the second groove 612 into which the short-side stick 620 is inserted. Therefore, on the surface of the mask frame 610 where the end of the vapor deposition mask is welded, no height difference occurs even if the blade parts 821 of the long-side stick 630 are arranged on top thereof. Such an embodiment of the present invention can prevent defects such as breakage of the vapor deposition mask and improve the reliability of the vapor deposition process.

[0124] Hereinafter, with reference to FIGS. 10 to 16, the mask assembly 500 according to an embodiment of the present invention will be described more specifically.

[0125] FIG. 10 is a perspective view schematically showing a part of the mask assembly 500 according to an embodiment. FIG. 11 is a cross-sectional view of the mask assembly 500 taken along the line A-A' of FIG. 10.

[0126] One embodiment of the present invention shown in FIGS. 10 and 11 is different from the comparative example shown in FIG. 8 in that the first long-side stick 820 arranged adjacent to the long side of the mask frame 610 includes symmetric blade portions 821, and a blade groove 613 (e.g., the third groove) is formed in the mask frame 610 so that the blade portions 821 of the first long-side stick 820 are inserted. Hereinafter, only one embodiment of the present invention different from the comparative example shown in FIG. 8 will be described.

[0127] Referring to FIGS. 10 and 11, the mask assembly 500 includes a plurality of long-side sticks 630 coupled to the mask frame 610. The plurality of long-side sticks 630 are arranged in the long-side direction of the mask frame 610 (e.g., the X direction in FIG. 6) alongside the long side of the mask frame 610 and can be arranged to mask a part of the vapor deposition pattern portion 642 of the vapor deposition mask. For example, the four corners of each vapor deposition pattern portion 642 can have a round shape with a specified curvature in a plan view.

[0128] The plurality of long-side sticks 630 can include blade portions 811 and 821 extending in the short-side direction of the mask frame 610 (e.g., the Y direction in FIG. 6) so as to mask the corners of the vapor deposition pattern portion 642 in a round shape. The plurality of long-side sticks 630 can include a first long-side stick 820 arranged adjacent to the long side of the mask frame 610 and a second long-side stick 810 arranged spaced apart from the long side of the mask frame 610. For example, the first long-side stick 820 can be the outermost long-side stick 630 among the plurality of long-side sticks 630. The second long-side stick 810 can be the long-side stick 630 arranged between the first long-side sticks 820.

[0129] According to one embodiment, the first long-side stick 820 includes symmetric blade parts 821. For example, the first long-side stick 820 includes blade parts 821 protruding in both directions. On the other hand, the second long-side stick 810 is disposed between the first long-side sticks 820 and includes symmetric blade parts 811. Each of the first long-side stick 820 and the second long-side stick 810 has a symmetric shape in plan view due to the blade parts 811 and 821 protruding in both directions.

[0130] The long side of the mask frame 610 includes a blade groove 613 in which the blade part 821 of the first long-side stick 820 is installed. Here, the blade part 821 includes a first blade part 821a installed in the blade groove 613 and a second blade part 821b symmetrically arranged with respect to the first blade part 821a based on the extension direction of the long-side stick 630. The long side of the mask frame 610 may include the blade groove 613 such that the first blade part 821a among the first blade part 821a and the second blade part 821b of the first long-side stick 820 is inserted.

[0131] The long side of the mask frame 610 includes a second groove 612 (e.g., short-side stick groove) in which each end of the plurality of short-side sticks 620 is installed. The blade groove 613 and the second groove 612 are arranged to overlap each other. For example, the blade groove 613 in which the first blade part 821a of the first long-side stick 820 is installed may be located above the second groove 612 in which the end (621 in FIG. 6) of the short-side stick 620 is installed.

[0132] The end (621 in FIG. 6) of the short-side stick 620 is installed in the second groove 612, and the blade part 821 (i.e., the first blade part 821a) is installed in the blade groove 613 located above the second groove 612. For example, the height of the bottom surface 1110 of the second groove 612 may be lower than the height of the bottom surface 1120 of the blade groove 613.

[0133] The width W2 of the blade groove 613 is larger than the width W1 of the second groove 612.

[0134] Note that a first groove 611 (e.g., long-side stick groove) is disposed on the short side of the mask frame 610, and the height of the first groove 611 is the same as the height of the blade groove 613.

[0135] According to one embodiment, the long-side stick 630 can be coupled to the mask frame 610 by being inserted into the first groove 611 and then undergoing a welding process. On the other hand, the first blade portion 821a of the long-side stick 630 may be inserted into the blade groove 613 without undergoing a welding process. The reason for not performing the welding process on the first blade portion 821a of the long-side stick 630 is to prevent the long-side stick 630 from being twisted due to the welding process. For example, when welding is performed on the first blade portion 821a, the lifting of the second blade portion 821b where no welding is performed may occur.

[0136] FIG. 12 is a diagram for explaining the length of the blade groove 613 according to one embodiment.

[0137] The embodiment of FIG. 12 is different from the embodiment of FIG. 10 in that the length d1 of the blade groove 613 is different from the length d2 of the first groove 611. Here, the length d1 of the blade groove 613 means the length that the blade groove 613 extends from the inner side surface of the mask frame 610. Also, the length d2 of the first groove 611 means the length that the first groove 611 extends from the inner side surface of the mask frame 610. The length d1 of the blade groove 613 means the length that the blade groove 613 overlaps with the mask frame 610. Also, the length d2 of the first groove 611 means the length that the first groove 611 overlaps with the mask frame 610.

[0138] In the embodiment of FIG. 10, the length d1 of the blade groove 613 may be the same as the length d2 of the first groove 611. On the other hand, in the embodiment of FIG. 12, the length d1 of the blade groove 613 is made shorter than the length d2 of the first groove 611. For example, the first length d1 of the blade groove 613 extending from the inner side surface of the mask frame 610 is shorter than the second length d2 of the first groove 611 extending from the inner side surface of the mask frame 610.

[0139] In one embodiment of the present invention, by making the length d1 of the blade groove 613 shorter than the length d2 of the first groove 611, it is easy to secure a space where the vapor deposition mask is welded at the short side of the mask frame 610. For example, in FIG. 12, the dotted line 1201 indicates an area of the mask frame 610 where the vapor deposition mask is welded, and the welded portion of the vapor deposition mask can be an area secured by relatively shortening the length d1 by which the blade groove 613 extends from the inner side surface of the mask frame 610.

[0140] FIG. 13 is an exploded perspective view of a mask assembly 500 according to an embodiment. FIG. 14 is a perspective view schematically showing a part of the mask assembly 500 according to the embodiment shown in FIG. 13. FIG. 15 is a cross-sectional view of the mask assembly 500 taken along line B-B' of FIG. 14.

[0141] The embodiments of FIGS. 13 to 15 are different from the embodiment of the present invention described in FIGS. 6 to 12 in that the short-side stick 620 is arranged on the long-side stick 630. Hereinafter, only the features that have changed in the embodiments of FIGS. 13 to 15 will be described. The features not described in FIGS. 13 to 15 shall be replaced with the description according to the embodiment referring to FIGS. 6 to 12.

[0142] Referring to FIGS. 13 to 15, a mask assembly 500 according to an embodiment includes a mask frame 610, a plurality of long-side sticks 630 arranged on the mask frame 610 and arranged in a direction along the long side of the mask frame 610, a plurality of short-side sticks 620 arranged on the plurality of long-side sticks 630 and arranged in a direction along the short side of the mask frame 610, and a vapor deposition mask arranged on the plurality of short-side sticks 620.

[0143] The plurality of long-side sticks 630 include a first long-side stick 820 arranged adjacent to the long side of the mask frame 610 and a second long-side stick 810 arranged spaced apart from the long side of the mask frame 610.

[0144] The first long-side stick 820 includes blade parts 811 and 821 that extend in the direction of the short side of the mask frame 610 so as to mask a part of the opening of the vapor deposition mask. The long side of the mask frame 610 includes a blade groove 613 in which a part 821 of the blade parts 811 and 821 is installed.

[0145] The short side of the mask frame 610 includes a first groove 611 in which the respective ends of the plurality of long-side sticks 630 are installed. The long side of the mask frame 610 includes a second groove 612 in which the respective ends of the plurality of short-side sticks 620 are installed.

[0146] On the long side of the mask frame 610, the blade groove 613 and the second groove 612 are arranged so as to overlap each other. The width of the blade groove 613 can be substantially the same as the width of the second groove 612. For example, the blade groove 613 and the second groove 612 can be grooves formed substantially integrally.

[0147] In the blade groove 613 and the second groove 612, the first blade part 821a of the long-side stick 820 is installed, and the end part (621 in FIG. 6) of the short-side stick 620 can be installed on the first blade part 821a of the long-side stick 820.

[0148] The height of the first groove 611 is the same as the height of the blade groove 613. Here, the height of the first groove 611 means the depth from the upper surface of the mask frame 610 to the bottom surface of the first groove 611. The height of the blade groove 613 means the depth from the upper surface of the mask frame 610 to the bottom surface of the blade groove 613.

[0149] The first length (e.g., d1 in FIG. 12) of the blade groove 613 extending from the inner side surface of the mask frame 610 is shorter than the second length (e.g., d2 in FIG. 12) of the first groove 611 extending from the inner side surface of the mask frame 610. The length d1 of the blade groove 613 means the length by which the blade groove 613 overlaps the mask frame 610. Also, the length d2 of the first groove 611 means the length by which the first groove 611 overlaps the mask frame 610.

[0150] FIG. 16 is a schematic diagram showing a vapor deposition process using a mask assembly according to an embodiment.

[0151] Referring to FIG. 16, the mask assembly 500 is disposed and fixed on the frame holder 1610. The frame holder 1610 can support the mask frame 610 by overlapping at least a part of the outer portion of the mask frame 610.

[0152] A substrate 1620 is disposed on one surface (the upper surface in the drawing) of the mask assembly 500, that is, on one surface of the vapor deposition mask 640. The substrate 1620 can be a vapor deposition target. For example, the substrate 1620 can be the substrate SUB of the display panel 10 described with reference to FIGS. 1 to 4.

[0153] The other surface (the lower surface in the drawing) of the substrate 1620 can be disposed so as to face one surface of the vapor deposition mask 640. For example, the other surface (the lower surface in the drawing) of the substrate 1620 can be disposed so as to abut and contact one surface of the vapor deposition mask 640.

[0154] A vapor deposition source 1600 is disposed on the other surface (the lower surface in the drawing) of the mask assembly 500. For example, the vapor deposition source 1600 can be disposed so as to face the other surface (the lower surface in the drawing) of the mask assembly 500. The vapor deposition source 1600 can accommodate a vapor deposition material therein and vaporize the vapor deposition material during the vapor deposition process to provide it to the substrate 1620 side.

[0155] The vapor deposition material passes through the frame opening of the mask frame 610 and the pattern opening (642p in FIG. 7) of the vapor deposition mask 640, and can be vapor-deposited on the other surface of the substrate 1620 exposed by the pattern opening 642p of the vapor deposition mask 640 to form a patterned thin film layer. For example, the patterned thin film layer vapor-deposited on the substrate 1620 can be at least a part of the light-emitting layer 172 described with reference to FIG. 4.

[0156] According to one embodiment, a vapor deposition process using the mask assembly 500, for example, a method for manufacturing an organic light-emitting device can include the following steps. For example, the method for manufacturing an organic light-emitting device can include the steps of disposing a substrate 1620 on one surface of the mask assembly 500, disposing a vapor deposition source 1600 so as to face the other surface of the mask assembly 500, and vaporizing the vapor deposition material contained in the vapor deposition source 1600 so that the vaporized vapor deposition material passes through the mask assembly 500 and is vapor-deposited on the substrate 1620.

[0157] As described above, embodiments of the present invention have been described with reference to the accompanying drawings. However, those having ordinary knowledge in the technical field to which the present invention pertains can understand that the present invention can be implemented in other specific forms without changing its technical idea and essential features. Therefore, it should be understood that the above-described embodiment is exemplary in all respects and not restrictive.

[0158] According to a preferred embodiment, it is as follows.

[0159] The background of this case is as follows (i) to (xii).

[0160] (i) Organic light-emitting display panels in which organic light-emitting devices (OLEDs) are arranged are widely used in mobile devices such as smartphones, tablet PCs, and smartwatches. They are also used in large TVs and the like.

[0161] (ii) When manufacturing an organic light-emitting display panel, for each region corresponding to a sub-pixel (pixel dot), particularly the pixel aperture, a material substance constituting an organic light-emitting layer for emitting light of a predetermined color is vapor-deposited.

[0162] (iii) In this vapor deposition process, a vapor deposition mask (640) provided with an aperture for each pixel dot is used.

[0163] (iv) This vapor deposition mask (640) is a plate with predetermined openings, typically formed in an elongated rectangular shape, and a plurality of elongated plate-shaped vapor deposition masks (640) are attached to a rectangular mask frame (610).

[0164] (v) Further, in order to prevent the relatively thin vapor deposition mask (640) from bending, crossbars (san; long-side sticks (630) and short-side sticks (620)) in the vertical and horizontal directions (longitudinal direction and width direction) are provided between the mask frame (610) and the plate-shaped vapor deposition mask (640).

[0165] (vi) At this time, generally, the longitudinal bars (long-side sticks (630)) are welded to each other in a state where they are overlapped on the transverse bars (short-side sticks (620)). Further, the mask frame (610) is provided with recesses ("grooves") so as to receive both ends of the longitudinal bars (long-side sticks (630)) and both ends of the transverse bars (short-side sticks (620)). And at least both ends of the longitudinal bars (long-side sticks (630)) are welded to the mask frame (610).

[0166] (vii) According to FIG. 3 of Patent Document 1 etc., regions corresponding to each display panel are arranged between the longitudinal bars (ST1: "long-side stick (630)" in the present application), and the longitudinal bars (ST1) are provided with portions protruding in the lateral direction (corresponding to the blade parts (811, 812) in the present application) corresponding to rounding the corner parts of the display region of the display panel.

[0167] (viii) According to FIG. 3 of Patent Document 1 etc., the plate-shaped vapor deposition mask (MSK; 640 in the present application) is a strip-shaped divided mask spanned between the long-side portions on both sides in the mask frame (610), and is arranged to butt against each other in the long-side direction of the mask frame (610). And the transverse bars (short-side sticks (620)) are located at the boundary portions of the strip-shaped divided masks.

[0168] (ix) According to, for example, FIG. 3 of Patent Document 1, it is further as follows. That is, the two outermost vertical bars (long side sticks (630)) are located at both ends of a region where the deposition regions (regions where openings corresponding to pixel dots are arranged, and regions corresponding to one display region of the display panel) are arranged in a matrix. And the other vertical bars (long side sticks (630)) located inside are located at the boundaries separating the deposition regions from each other.

[0169] (x) Such a mask assembly may have the vertical bars (long side sticks (630)) bent laterally during the process of assembling it or during use (FIG. 9).

[0170] (xi) The lateral bending occurs in the outermost vertical bars (long side sticks (630)), that is, those close to the long side portions of the mask frame (610). (xii) The outermost vertical bars (long side sticks (630)) are provided with portions (blade portions 821) protruding laterally only on the inner side.

[0171] Therefore, according to a particularly preferred embodiment, it can be any one or any combination of the following A1 to A8. A1 The outermost vertical bars (long side sticks (630)) are provided with portions (blade portions 821a) protruding laterally not only on the inner side but also on the outer side. Preferably, they are provided so as to be substantially line-symmetric with respect to the central axis of the vertical bars (long side sticks (630)).

[0172] A2 The portions (blade portions 821a) protruding laterally outward from the outermost vertical bars (long side sticks (630)) have their tip ends received in the receiving recesses ( "grooves" (612, 613)) in the long side portions of the mask frame (610) together with the ends of the horizontal bars (short side sticks (620)).

[0173] A3 The tip ends of the "blade portions 821" are wider than the ends of the horizontal bars (short side sticks (620)). In particular, the horizontal crossbar (short-side stick (620)) may have a constant width over its entire length. Therefore, the receiving recesses (the "grooves" (612, 613)) in the long-side portion of the mask frame (610) are narrower at the bottom and wider at the top, and step portions are formed on both side walls. Here, the depth up to this step portion (the depth of the "third groove (613)") is the same as the depth of the receiving recess (the "first groove (611)") in the short-side portion of the mask frame (610).

[0174] The outermost vertical bar (long-side stick (630)) of A4 is welded in a state where both ends are received in the receiving recesses (the "grooves" (611)) in the short-side portion of the mask frame (610), similar to the other inner vertical bars (long-side sticks (630)).

[0175] The outermost vertical bar (long-side stick (630)) of A5 is welded to the upper surface of the horizontal crossbar (short-side stick (620)) in the region where it overlaps with the horizontal crossbar (short-side stick (620)).

[0176] The tip of the "blade part 821" of A6 is welded to the upper surface of the horizontal crossbar (short-side stick (620)), but not to the mask frame (610) (the step portion thereof).

[0177] The dimension by which the tip of the "blade part 821" of A7 extends outward from the inner side surface of the mask frame (610) is smaller than that at one end of the horizontal crossbar (short-side stick (620)). Note that the dimension by which the "blade part 821" extends corresponds to the dimension of the rounded portion of the angle in the vapor deposition region corresponding to the display region.

[0178] Instead of the above (vi) and A3, the horizontal crossbar (short-side stick (620)) may be overlapped on the vertical bar (long-side stick (630)) and welded to each other (FIGS. 13 to 14 of the present application). In that case, the receiving recesses (the "grooves" (612, 613)) in the long side portion of the mask frame (610) can be made to have the same width corresponding to the tip of the "blade part 821" over the lower and upper parts.

Explanation of reference numerals

[0179] 10 Display device 100 Display panel

Claims

1. In a mask assembly, a mask frame; a plurality of short-side sticks disposed on the mask frame and arranged in a direction along the short side of the mask frame; a plurality of long-side sticks disposed on the plurality of short-side sticks and arranged in a direction along the long side of the mask frame; and a vapor deposition mask disposed on the plurality of long-side sticks, wherein the plurality of long-side sticks include a first long-side stick arranged adjacent to the long side of the mask frame and a second long-side stick arranged spaced apart from the long side of the mask frame, the first long-side stick includes a blade portion extending in a direction toward the short side of the mask frame so as to mask a part of the opening of the vapor deposition mask, the long side of the mask frame includes a blade groove on which the blade portion is mounted, a mask assembly.

2. The short side of the mask frame includes a long-side stick groove on which each end portion of the plurality of long-side sticks is mounted, The long side of the mask frame includes a short-side stick groove on which each end portion of the plurality of short-side sticks is mounted, the mask assembly according to claim 1.

3. The mask assembly according to claim 2, wherein the blade groove and the short-side stick groove are arranged to overlap each other.

4. An end portion of the short-side stick is mounted in the short-side stick groove, The mask assembly according to claim 3, wherein the blade portion is mounted in the blade groove located above the short-side stick groove.

5. The mask assembly according to claim 4, wherein the blade portion includes a first blade portion mounted in the blade groove and a second blade portion arranged symmetrically with the first blade portion with respect to the extension direction of the long-side stick.

6. The mask assembly according to claim 2, wherein the height of the long-side stick groove is the same as the height of the blade groove.

7. The mask assembly according to claim 2, wherein the width of the blade groove is larger than the width of the short-side stick groove.

8. The mask assembly according to claim 2, wherein a first length of the blade groove extending from the inner side surface of the mask frame is shorter than a second length of the long-side stick groove extending from the inner side surface of the mask frame.

9. The mask assembly according to claim 1, wherein the vapor deposition mask is arranged in a direction along the short side of the mask frame.

10. The vapor deposition mask is Fixing parts located at both ends of the vapor deposition mask; At least one vapor deposition pattern part located between the fixing parts and including a plurality of pattern openings; and The mask assembly according to claim 1, including a rib part located around the vapor deposition pattern part.

11. In a mask assembly, A mask frame; A plurality of long side sticks arranged on the mask frame and arranged in a direction along the long side of the mask frame; A plurality of short side sticks arranged on the plurality of long side sticks and arranged in a direction along the short side of the mask frame; and Including a vapor deposition mask arranged on the plurality of short side sticks, The plurality of long side sticks include a first long side stick arranged adjacent to the long side of the mask frame and a second long side stick arranged spaced apart from the long side of the mask frame, The first long side stick includes a blade part extending in the direction of the short side of the mask frame so as to mask a part of the opening of the vapor deposition mask, The long side of the mask frame includes a blade groove on which the blade part is installed, a mask assembly.

12. The short side of the mask frame includes a long side stick groove on which each end of the plurality of long side sticks is installed, The long side of the mask frame includes a short side stick groove on which each end of the plurality of short side sticks is installed, the mask assembly according to claim 11.

13. The mask assembly according to claim 12, wherein the blade groove and the short side stick groove are arranged to overlap each other.

14. The end of the short side stick is installed in the short side stick groove, The mask assembly according to claim 13, wherein the blade part is installed in the blade groove located below the short side stick groove.

15. The mask assembly according to claim 14, wherein the blade part includes a first blade part installed in the blade groove and a second blade part arranged symmetrically with respect to the first blade part based on the extension direction of the long side stick.

16. The mask assembly according to claim 12, wherein the height of the long side stick groove is the same as the height of the blade groove.

17. The mask assembly according to claim 12, wherein the width of the blade groove is larger than the width of the short side stick groove.

18. The mask assembly according to claim 12, wherein a first length of the blade groove extending from an inner side surface of the mask frame is shorter than a second length of the long-side stick groove extending from the inner side surface of the mask frame.

19. The mask assembly according to claim 11, wherein the evaporation mask is arranged in a direction along the short side of the mask frame.

20. The evaporation mask is fixing portions located at both ends of the evaporation mask; at least one evaporation pattern portion located between the fixing portions and including a plurality of pattern openings; and the mask assembly according to claim 11, including rib portions located around the evaporation pattern portion.

21. In a method for manufacturing an organic light-emitting device, a step of arranging a substrate on one surface of a mask assembly; a step of arranging an evaporation source so as to face the other surface of the mask assembly; and a step of vaporizing a deposition material accommodated in the evaporation source so that the vaporized deposition material passes through the mask assembly and is deposited on the substrate, wherein the mask assembly is a mask frame; a plurality of short-side sticks arranged on the mask frame and arranged in a direction along the short side of the mask frame; a plurality of long-side sticks arranged on the plurality of short-side sticks and arranged in a direction along the long side of the mask frame; and an evaporation mask arranged on the plurality of long-side sticks, the plurality of long-side sticks include a first long-side stick arranged adjacent to the long side of the mask frame and a second long-side stick arranged spaced apart from the long side of the mask frame, the first long-side stick includes blade portions extending in a direction toward the short side of the mask frame so as to mask a part of the opening of the evaporation mask, a method for manufacturing an organic light-emitting device, wherein the long side of the mask frame includes a blade groove on which the blade portions are mounted.

22. The short side of the mask frame includes long-side stick grooves on which respective ends of the plurality of long-side sticks are mounted, The method for manufacturing an organic light-emitting device according to claim 21, wherein the long side of the mask frame includes short-side stick grooves on which respective ends of the plurality of short-side sticks are mounted.

23. The method for manufacturing an organic light-emitting device according to claim 22, wherein the blade groove and the short-side stick groove are arranged so as to overlap each other.

24. The end of the short-side stick is installed in the short-side stick groove, The method for manufacturing an organic light-emitting element according to claim 23, wherein the blade part is installed in the blade groove located above the short-side stick groove.

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