Carboxylate, carboxylic acid generator, resist composition, and method for producing resist pattern

Abstract

To form a resist pattern having good line edge roughness (LER).SOLUTION: A carboxylic acid generator contains a carboxylate represented by formula (I).SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a carboxylic acid salt, a carboxylic acid generator, a resist composition, and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a carboxylate represented by the following formula, and a resist composition containing the carboxylate as a carboxylic acid generator.

[0003] [ka]

[0004] Patent Document 2 describes a carboxylate represented by the following formula:

[0005] [ka] [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-039502 [Patent Document 2] Japanese Patent Application Publication No. 2019-137684 Summary of the Invention [Problem to be solved by the invention]

[0007] There is a demand for a technology that can form resist patterns with good line edge roughness (LER). [Means for solving the problem]

[0008] The present invention includes the following inventions. [Invention 1] A carboxylic acid generator containing a carboxylic acid salt represented by formula (I):

[0009] [ka]

[0010] [In formula (I), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2.

[0011] m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R 1 may be the same or different from each other.

[0012] R 1 represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -CO-, -S-, -SO-, and -NR 11 It may be replaced by - or -SO2-.

[0013] When X is a sulfur atom and m1 is 2, two R 1 are combined to form S + and -CH2- contained in the ring may be -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0014] R 11 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 3 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar 3 It contains an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group.

[0015] R 6represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, or -NR 11 It may be replaced by - or -SO2-.

[0016] R 9 represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, or -NR 11 It may be replaced by - or -SO2-.

[0017] When X is a sulfur atom and m10 is 2 or 3, two R 9 are combined to form S + The two R forming the ring may form a ring containing 9 is S + It may also be a single bond formed between two benzene rings connecting the

[0018] A 3 represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0019] Ar 3 represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or greater, the groups in the parentheses may be the same or different.

[0020] m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R 9may be the same or different from each other.

[0021] However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. 9 At least one R 9 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring.

[0022] X 0 represents a hydrocarbon group having 2 to 72 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -CO-, -SO-, and -NR 11 - or -SO2- may be replaced.] [Invention 2] At least one m3 is an integer greater than or equal to 1, A 3 But **-X 03 -L 03 -or**-L 03 -X 03 - and X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and —CH— contained in the hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—), ** is X + The carboxylic acid generator according to [Invention 1], wherein the carboxylic acid generator represents a bonding site with a benzene ring to which the carboxylic acid generator is bonded.

[0023] [Invention 3] X 03 is —O— or —S—. [Invention 4] L 03 is a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0024] [Invention 5] The carboxylic acid generator according to any one of [Invention 1] to [Invention 4], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-1) or formula (IC-2).

[0025] [ka]

[0026] [In formula (IC-1) and formula (IC-2), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0027] m3A, m3B and m3C each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different.

[0028] When m3B is 2 or more, the groups in the parentheses may be the same or different. When m3C is 2 or more, the groups in the parentheses may be the same or different.

[0029] m9A, m9B and m9C each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R 9 may be the same or different from each other. When m9B is 2 or more, multiple R 9 may be the same or different from each other.

[0030] When m9C is 2 or more, multiple R 9 may be the same or different from each other. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.

[0031] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 6] The carboxylic acid generator according to any one of [Invention 1] to [Invention 4], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-3).

[0032] [ka]

[0033] [In formula (IC-3), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0034] m3A and m3B each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different.

[0035] When m3B is 2 or more, the groups in the parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5.

[0036] When m9A is 2 or more, multiple R 9 may be the same or different from each other. When m9B is 2 or more, multiple R 9 may be the same or different from each other. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.] [Invention 7] The carboxylic acid generator according to any one of [Invention 1] to [Invention 4], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-4).

[0037] [ka]

[0038] [In formula (IC-4), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0039] m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R 9 may be the same or different from each other.

[0040] m3A and m9A satisfy 1≦m3A+m9A≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.

[0041] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 8] At least one m3 is 1, Ar 3 is a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring.

[0042] [Invention 9] X 0 is an acyclic hydrocarbon group having 2 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms and an acyclic hydrocarbon group having 1 to 18 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an acyclic hydrocarbon group having 1 to 18 carbon atoms are combined, The —CH2— contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not limited to —O—, —S—, —CO—, —SO—, or —NR 11 The carboxylic acid generator according to any one of [Invention 1] to [Invention 6], wherein the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

[0043] [Invention 10] A resist composition comprising the carboxylic acid generator according to any one of [Invention 1] to [Invention 9] and an acid generator other than the carboxylic acid generator.

[0044] [Invention 11] The resist composition according to [Invention 10], wherein the acid generator contains a salt represented by formula (B1).

[0045] [ka]

[0046] [In formula (B1), L b1 represents a (nb1+1)-valent hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -CO-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0047] L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -CO-, -SO-, and -NR 11 It may be replaced by - or -SO2-.

[0048] Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group is not selected from -O-, -S-, -SO2-, -SO-, -NR 11 It may be replaced by - or -CO-.

[0049] nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z + represents an organic cation. [Invention 12] Further, the composition contains a resin containing a structural unit having an acid labile group, [Invention 10] or the resist composition according to [Invention 10], wherein the structural unit having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6).

[0050] [ka]

[0051] [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—.

[0052] R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. The alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may contain a halogen atom.

[0053] R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0054] m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3.

[0055] [ka]

[0056] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0057] R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0058] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with

[0059] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-.

[0060] na1 represents an integer of 1 to 5, and when na1 is 2 or greater, the groups in the parentheses may be the same or different from each other. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17 may be the same or different from each other.

[0061] mc represents an integer between 0 and 2.

[0062] [ka]

[0063] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0064] Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-.

[0065] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.

[0066] [ka]

[0067] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0068] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0069] X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents the binding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0070] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] [Invention 13] The resist composition according to any one of [Invention 8] to [Invention 12], further comprising a resin that includes a structural unit having a fluorine atom.

[0071] [Invention 14] (1) A step of applying the resist composition according to any one of [Invention 10] to [Invention 13] onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

[0072] [Invention 15] A carboxylate represented by the above formula (I). [Invention 16] At least one m3 is an integer greater than or equal to 1, A 3 But **-X 03 -L 03 -or**-L 03 -X 03 - and X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and —CH— contained in the hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—), ** is X + The carboxylate according to [Invention 15], wherein the carboxylate represents a bonding site with the benzene ring to which the carboxylate is bonded.

[0073] [Invention 17] X 03 is —O— or —S—. [Invention 18] L 03 is a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0074] [Invention 19] The carboxylate according to any one of [Invention 15] to [Invention 18], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-1) or formula (IC-2).

[0075] [ka]

[0076] [In formula (IC-1) and formula (IC-2), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0077] m3A, m3B and m3C each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different.

[0078] When m3B is 2 or more, the groups in the parentheses may be the same or different. When m3C is 2 or more, the groups in the parentheses may be the same or different.

[0079] m9A, m9B and m9C each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R 9 may be the same or different from each other. When m9B is 2 or more, multiple R 9 may be the same or different from each other.

[0080] When m9C is 2 or more, multiple R 9 may be the same or different from each other. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R 9 At least one R 9represents a linear alkyl group having 2 to 12 carbon atoms.

[0081] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 20] The carboxylate according to any one of [Invention 15] to [Invention 18], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-3).

[0082] [ka]

[0083] [In formula (IC-3), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0084] m3A and m3B each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different.

[0085] When m3B is 2 or more, the groups in the parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5.

[0086] When m9A is 2 or more, multiple R 9 may be the same or different from each other. When m9B is 2 or more, multiple R 9may be the same or different from each other. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.] [Invention 21] The carboxylate according to any one of [Invention 15] to [Invention 18], wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-4).

[0087] [ka]

[0088] [In formula (IC-4), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0089] m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R 9 may be the same or different from each other.

[0090] m3A and m9A satisfy 1≦m3A+m9A≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.

[0091] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 22] At least one m3 is an integer greater than or equal to 1, Ar 3 is a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring.

[0092] [Invention 23] X 0 is an acyclic hydrocarbon group having 2 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms and an acyclic hydrocarbon group having 1 to 18 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an acyclic hydrocarbon group having 1 to 18 carbon atoms are combined, The —CH2— contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not limited to —O—, —S—, —CO—, —SO—, or —NR 11 The carboxylate according to any one of [Invention 15] to [Invention 22], wherein the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. [Effects of the Invention]

[0093] According to the present invention, a resist pattern can be produced with good line edge roughness (LER). DETAILED DESCRIPTION OF THE INVENTION

[0094] In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a linear structure and a branched structure may have either. When -CH2- contained in a hydrocarbon group or the like is replaced with -O-, -S-, -CO-, -SO-, -NR 11 When a group is replaced with - or -SO2-, the same examples apply to each group, and the number of carbon atoms before the replacement is the number of carbon atoms in the hydrocarbon group, etc. "Combined group" refers to a group formed by combining two or more of the exemplified groups, with their valence, bonding form, etc. appropriately modified. "Derived from" or "derived from" refers to the polymerizable C=C bond contained in the molecule becoming a single bond (-CC- group) through polymerization. When stereoisomers exist, all stereoisomers are included. "Acid labile group" refers to a group that has a leaving group and, upon contact with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxy group, a carboxy group, etc.). "Base labile group" refers to a group that has a leaving group and, upon contact with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxy group, a carboxy group, etc.). In each group, any position and any number of hydrogen atoms contained in the group may be replaced with bonding sites depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituted group.

[0095] In this specification, the term "solid content of the resist composition" refers to the sum of all components in the resist composition excluding the solvent (E), which will be described later. [Carboxylate represented by formula (I)] The present invention relates to a carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)" or "carboxylate (I)").

[0096] In the salt (I), the side with a positive charge is sometimes called the "cation (I)" and the side with a negative charge is sometimes called the "anion (I)." [Cation (I)] The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC).

[0097] [ka]

[0098] [In formula (IC), all symbols have the same meanings as in formula (I)] R 3 The alkyl group having 2 to 12 carbon atoms is a linear alkyl group or Ar 3 Examples of the branched alkyl group include a branched alkyl group containing an alkanediyl group having 1 or more carbon atoms bonded to the alkyl group, and preferably represents a linear alkyl group having 2 to 12 carbon atoms. Examples of the linear alkyl group include an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, and an n-dodecyl group. Examples of the branched alkyl group include a 2-methylpropyl group, a 2,2-dimethylpropyl group, and a 3,3-dimethylbutyl group. The number of carbon atoms in the alkyl group is preferably 2 to 8, and more preferably 3 to 6.

[0099] R 6 and R 9 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 , R 6 and R 9 Examples of the hydrocarbon group having 1 to 18 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups.

[0100] The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0101] The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.

[0102] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position.

[0103] [ka]

[0104] Specifically, examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12.

[0105] Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0106] Among chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, groups formed by combining two or more groups include groups formed by combining an aromatic hydrocarbon group with a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-. An alkanediyl group is formed by removing one hydrogen atom from the above-mentioned alkyl group. groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*; -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-); and groups in which an aromatic hydrocarbon group and an alicyclic hydrocarbon group are combined (for example, aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * indicates a bonding site.

[0107] The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group.

[0108] Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group.

[0109] Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group.

[0110] Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group.

[0111] In addition, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined, and any of the groups may be bonded to a benzene ring.

[0112] The alkanediyl group is a group obtained by removing one hydrogen atom from the alkyl group described above and bonding to an alicyclic hydrocarbon group or an aromatic hydrocarbon group, and is a straight-chain or branched alkanediyl group. Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl.

[0113] R 1 , R 6 and R 9 In the case of -CH2- contained in the hydrocarbon group represented by the formula 11 When the hydrocarbon group is substituted with - or -SO2-, the number of carbon atoms before the substitution is the total number of carbon atoms in the hydrocarbon group.

[0114] R 11Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0115] The -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, or -NR 11 The group substituted with - or -SO2- includes a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), peptide group (a group in which -CH2-CH2- in an ethylene group is replaced with -CO-NR 11 -), carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups.

[0116] Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0117] Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0118] Examples of the alkylamino group include alkylamino groups having 1 to 17 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0119] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0120] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0121] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0122] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0123] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0124] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0125] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0126] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 27 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0127] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group.

[0128] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -SO2-, -SO-, -NR 11Examples of groups substituted with - or -CO- include the groups shown below. In the groups shown below, -O- or -CO- may be replaced with -S- or -SO2-. The binding site may be at any position.

[0129] [ka]

[0130] R 1 , R 6 and R 9 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. 1 , R 6 and R 9 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, which essentially results in R 1 , R 6 and R 9 may have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, or an alkylsulfonyl group.

[0131] Examples of halogen atoms include the same groups as those described above. 9 When R is a hydrocarbon group having a halogen atom, 9 Examples of the hydrocarbon group having a halogen atom include a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom.

[0132] Examples of the alkyl group having a halogen include a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 12 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0133] -CH2- contained in the haloalkyl group may be replaced with -O- or -CO-, and examples of the haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group and haloalkylcarbonyloxy group include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms.

[0134] The hydrocarbon group may have one or more substituents. R 1 represents an alkyl group having 1 to 12 carbon atoms (the —CH2— contained in the alkyl group is not limited to —O—, —CO—, —S—, —SO—, —NR 11 - or -SO2-, and two R 1 are combined to form S + It is preferable that the alkyl group is an aromatic hydrocarbon group which may have a substituent, or a group in which these are combined.

[0135] R 6represents a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -OR 10 , -O-CO-OR 10 or -OL 10 -CO-OR 10 is preferred, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), and an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), is even more preferred, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and an iodine atom, a fluorine atom, a hydroxy group, a It is more preferably an alkyl group having 1 to 6 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms, even more preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, a methoxy group, an ethoxy group, or a hydroxy group.

[0136] R 9is preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), still more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, or a t-butyl group.

[0137] Also, R 9 When m3=0, R is 1 or more. 9 At least one R 9 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group preferably contains an alkanediyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring, and more preferably represents a linear alkyl group having 2 to 12 carbon atoms; R 3 It is more preferable that the alkyl group is the same as the alkyl groups exemplified as the alkyl groups having 2 to 12 carbon atoms.

[0138] Ar 3 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include groups derived from a benzene ring or a naphthalene ring, such as a phenylene group or a naphthylene group. 3 Examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms include groups derived from a furan ring, a thiophene ring, a benzofuran ring, or a benzothiophene ring.

[0139] Ar 3is preferably a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring, and more preferably a group derived from a benzene ring. A 3 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, even more preferably 1 to 16, still more preferably 1 to 14, and even more preferably 1 to 12.

[0140] Examples of the chain hydrocarbon group include a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, and the like. and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl.

[0141] The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0142] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position.

[0143] [ka]

[0144] Specific examples include monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2'cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond.

[0145] The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0146] Examples of groups formed by combining groups include a group formed by combining an alicyclic hydrocarbon group with an alkanediyl group, a group formed by combining an aromatic hydrocarbon group with an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Furthermore, any of the groups may be bonded to a benzene ring.

[0147] Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-.

[0148] Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-.

[0149] Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0150] A 3 In this case, -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, -NR 11 When the hydrocarbon group is substituted with - or -SO2-, the number of carbon atoms before the substitution is taken as the total number of carbon atoms in the hydrocarbon group. The number may be 1 or 2 or more, but is preferably 1 or 2.

[0151] The -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, or -NR 11 Examples of groups substituted with - or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11 -), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11-substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups.

[0152] Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0153] Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0154] Examples of the alkylamino group include alkylamino groups having 1 to 19 carbon atoms, such as methylamino, ethylamino, dimethylamino, propylamino, butylamino, pentylamino, and hexylamino groups. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0155] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0156] Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0157] Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0158] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0159] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 19 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0160] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0161] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0162] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 19 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0163] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 19 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0164] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 17 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0165] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -CO-, -S-, -SO-, -NR 11Examples of the group replaced by - or -SO2- include the groups shown below. Also included are groups in which -O- is replaced by -S- and -CO- is replaced by -SO2-. The bonding site can be at any position.

[0166] [ka]

[0167] A 3 The substituents that the hydrocarbon group may have include R 6 and R 9 Examples of the substituents include the same groups as those exemplified as the substituents that the hydrocarbon group may have. A 3 each independently represents a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-, provided that at least one of -CH2- contained in the hydrocarbon group is not -O-, -CO-, -S-, -SO-, or -NR2-. 11 - or -SO2- is preferably substituted.

[0168] Specifically, A 3 is **-L 031 -X 03 -L 032 -is (X 03 each independently represents -O-, -CO-, -S-, -SO-, or -NR 11 - or -SO2-. 031 and L 032 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced. 031 and L 032 The total number of carbon atoms in X is preferably 0 to 18. +It is more preferable that A 3 is **-X 03 -L 03 -or**-L 03 -X 03 -is (X 03 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-. 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not -O-, -CO-, -S-, -SO-, or -NR 11 - or -SO2- may be replaced. ** represents X + It is more preferable that A represents the bonding site with the benzene ring to which it is bonded. 3 -O-, -CO-, -S-, -SO-, -NR 11 Preferred are those which have no substituents other than the - or -SO2- substitution.

[0169] L 031 , L 032 and L 03 a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-) has a carbon number of 1 to 18, and A 3 Examples of the groups include the same groups as those listed in the above.

[0170] X 03 is preferably —O— or —S—, and more preferably —O—. L 031 , L 032 and L 03 are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11- or -SO2-), and a single bond or a hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-) is more preferred, and a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group in which a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms are combined (the -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-), even more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-), even more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-), and even more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-). Among these, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group is preferred, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, or a carbonyl group is more preferred. 031 and L 032 The total number of carbon atoms is preferably 0 to 18.

[0171] m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0172] m6 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0173] R 3 Ar 3 The bond position to Ar 3 is a group derived from a benzene ring, A 3 The bonding position of A may be either o-position, m-position or p-position. 3 It is preferably bonded to the p-position or m-position relative to the bonding position of (I), and more preferably bonded to the p-position.

[0174] R 6 Ar 3 The bonding position to Ar is not particularly limited. 3 is a group derived from a benzene ring, R 6 Ar 3 The binding position to A 3 It may be at the o-position, m-position, or p-position relative to the bonding position of R 6 is A 3 It is preferably bonded to the p-position or m-position, more preferably m-position, relative to the bonding position of R 6 is A 3 With respect to the bonding positions of R, it is preferred that one is bonded to the o-position or m-position, and one is bonded to the p-position or m-position, and more preferred that two are bonded to the m-position. 6 is A 3 With respect to the bonding positions of R, it is preferred that two are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferred that one is bonded to the o-position and two are bonded to the m-position. 6 is A 3With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the o-position and two are bonded to the m-position.

[0175] R 9 The bonding position of to the benzene ring is X + The bonding position of R may be either o-position, m-position, or p-position. 9 The bonding position of the benzene ring is m3=0, and R 9 is a linear alkyl group having 2 to 12 carbon atoms, X + The bonding position of X may be either o-position, m-position or p-position. + It is preferably bonded to the p-position or m-position relative to the bonding position of (I), and more preferably bonded to the p-position.

[0176] Among them, when m9 is 1, R 9 is X + It is preferably bonded to the p-position or m-position, more preferably to the p-position, relative to the bonding position of R 9 is X + With respect to the bonding positions of R, it is preferred that one is bonded to the o- or m-position and one is bonded to the p- or m-position, and it is more preferred that one is bonded to the m-position and one is bonded to the p- or m-position. 9 are each independently, X + With respect to the bonding positions of R, it is preferred that two are bonded to the o- or m-position and one is bonded to the p- or m-position, and it is more preferred that two are bonded to the m-position and one is bonded to the p-position. 9 are each independently, X + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the m-position, one is bonded to the o-position and one is bonded to the p-position.

[0177] A 3 X +The bonding positions of X to the benzene ring are each independently + The bonding position of X may be either o-position, m-position or p-position. + More specifically, when m3 is 1, A 3 is X + It is preferably bonded to the p-position or m-position, more preferably to the p-position, relative to the bonding position of A. 3 is X + With respect to the bonding positions of A, one is bonded to the o-position or m-position, and one is bonded to the o-position or m-position, and more preferably two are bonded to the m-position. 3 are each independently, X + With respect to the bonding positions of A, it is preferred that two are bonded to the o- or m-position and one is bonded to the p- or m-position, and it is more preferred that two are bonded to the m-position and one is bonded to the p-position. 3 is X + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the o-position and two are bonded to the m-position.

[0178] Also, when X is a sulfur atom and m10=3, two R 9 are combined to form S + In particular, two R 9 are combined to form S + It is preferable that the cation is a cation represented by formula (IC′).

[0179] [ka]

[0180] [In formula (IC′), R 3 , R 6 , R 9 , m3, m6, m9, A3 , Ar 3 The symbols have the same meanings as above.

[0181] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] X 7 is preferably a single bond, —CH 2 — or —O—.

[0182] The Two R's 1 The ring formed by bonding together with the sulfur atom to which they are bonded may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated ring. This ring may have 3 to 18 carbon atoms, and preferably has 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, and preferably a 3- to 7-membered ring, such as the rings shown below. * represents a bonding site.

[0183] [ka]

[0184] Examples of the cation (I) represented by formula (IC) include cations represented by formula (IC-1), formula (IC-2), formula (IC-3), and formula (IC-4) (hereinafter, these may be referred to as "cation (IC-1)," "cation (IC-2)," "cation (IC-3)," and "cation (IC-4)," respectively).

[0185] [ka]

[0186] In formulae (IC-1), (IC-2), (IC-3) and (IC-4), all symbols have the same meanings as defined above. X 03 The bonding position of to the benzene ring is A 3 The bonding position to the benzene ring is the same as that of

[0187] In formulas (IC-1), (IC-2), (IC-3), and (IC-4), when m3A + m3B + m3C = 0, cations represented by formulas (IC-1'), (IC-2'), (IC-3'), and (IC-4') (hereinafter, these may be referred to as "cation (IC-1')," "cation (IC-2')," "cation (IC-3')," and "cation (IC-4')," respectively) are given.

[0188] [ka]

[0189] [In formula (IC-1′), formula (IC-2′), formula (IC-3′) and formula (IC-4′), R 9 , m9A, m9B, m9C and X 7 The symbols have the same meanings as above.

[0190] R 9A , R 9B and R 9C each independently represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar 3 and an alkanediyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the Examples of the cation of the salt (I) include cations represented by the following formulae (Ic-1) to (Ic-85).

[0191] [ka]

[0192] [ka]

[0193] [ka]

[0194] [ka]

[0195] [ka]

[0196] [ka]

[0197] [ka]

[0198] [Anion (I)] The anion (I) of the carboxylate represented by formula (I) is X 0 -COO - It is an anion represented by the formula:

[0199] In formula (I), X 0 Examples of the hydrocarbon group represented by the formula include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, alkynyl groups, and alkanediyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups combining these groups. The -CH2- contained in the hydrocarbon group can be -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2- may be substituted. In the hydrocarbon group, CO2 - The atom adjacent to is preferably a carbon atom, and in the aliphatic hydrocarbon group, CO - The atom adjacent to is more preferably a carbon atom. The number of carbon atoms in the hydrocarbon group is, for example, 2 to 64, may be 2 to 48, is preferably 2 to 36, more preferably 2 to 30, still more preferably 2 to 24, still more preferably 2 to 18, and still more preferably 2 to 12.

[0200] Examples of the alkyl group include linear or branched alkyl groups, such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a nonyl group.

[0201] Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl.

[0202] The alkyl group and the alkanediyl group each independently have 1 to 18 carbon atoms, more preferably 1 to 12 carbon atoms, even more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.

[0203] Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups.

[0204] Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group.

[0205] The chain hydrocarbon group preferably has 1 to 18 carbon atoms, more preferably 1 to 12 carbon atoms, even more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.

[0206] The -CH2- contained in the chain hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 Examples of groups substituted with - or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11 -substituted groups).

[0207] Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, a phenyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0208] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group.

[0209] Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0210] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0211] Examples of the alkylamino group include alkylamino groups having 1 to 17 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0212] The alkanediyloxy group, alkanediyloxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, alkanediylsulfonyl group, and alkanediylthio group can be obtained by replacing one hydrogen atom at any position of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group, or alkylsulfonyl group with a bonding site.

[0213] The substitution in the alkenyl group or alkynyl group may be any of the substitutions in the alkyl group exemplified above, as long as it contains a carbon-carbon double bond or a carbon-carbon triple bond at any position.

[0214] The alicyclic hydrocarbon group may be any of monocyclic, polycyclic, and spiro rings, and may be any of saturated and unsaturated. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl groups, polycyclic cycloalkyl groups such as norbornyl and adamantyl groups, and spiro rings having a cycloalkyl group bonded to a cycloalkyl group, norbornyl group, or adamantyl group via a spiro bond.

[0215] Examples of the alicyclic hydrocarbon group include the following groups: The bonding site can be any position.

[0216] [ka]

[0217] The alicyclic hydrocarbon group preferably has 3 to 36 carbon atoms, more preferably 3 to 24 carbon atoms, even more preferably 3 to 18 carbon atoms, still more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms.

[0218] The -CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11The group substituted with - or -SO2- may form an ether ring, ketone ring, lactone ring, sultone ring, or acetal ring, and specific examples thereof include the groups shown below. Further examples include groups in which -O- is replaced with -S- and -CO- is replaced with -SO2-, among the groups shown below. The bonding site can be at any position.

[0219] [ka]

[0220] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10.

[0221] In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkanediyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group).

[0222] The combined groups are: A group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (the —CH2— contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not an alkyl group such as —O—, —S—, —CO—, —SO—, —NR 11 - or -SO2-), A group in which a chain hydrocarbon group and an aromatic hydrocarbon group are combined (-CH2- contained in the chain hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), and A group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined (-CH2- contained in the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11- or -SO2-).

[0223] In addition, in the combination, two or more types of each of the alicyclic hydrocarbon group, the chain hydrocarbon group and the aromatic hydrocarbon group may be combined. Specifically, the combined groups include: Alicyclic hydrocarbon groups such as adamantylmethylene groups and cyclohexylmethylene groups - chain hydrocarbon groups -*, (alicyclic hydrocarbon groups) 2-chain hydrocarbon groups -* (-CH2- contained in the chain hydrocarbon groups and the alicyclic hydrocarbon groups is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), Chain hydrocarbon groups such as methyladamantyl and dimethyladamantyl groups - alicyclic hydrocarbon groups -*, (chain hydrocarbon groups)2-alicyclic hydrocarbon groups -* (-CH2- contained in the chain hydrocarbon groups and the alicyclic hydrocarbon groups is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), a chain hydrocarbon group such as a tolyl group or a xylyl group - an aromatic hydrocarbon group -* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-); chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-* such as a methylcyclohexylmethylene group, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Aromatic hydrocarbon group such as benzyl group - Chain hydrocarbon group - * (-CH2- contained in the chain hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), A chain hydrocarbon group such as a tolylmethyl group - an aromatic hydrocarbon group - a chain hydrocarbon group - * (the -CH2- contained in the chain hydrocarbon group is not limited to -O-, -S-, -CO-, -SO-, -NR 11- or -SO2-), Chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-*, such as methyladamantanemethyleneadamantyl group and di(methyladamantanemethylene)adamantyl group, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), Alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group) 2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group) 2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group) 2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), Chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), etc. Here, * represents the bonding site with the carbon atom of the carbonyl group.

[0224] X 0-CH2- contained in the hydrocarbon group represented by the formula: 11 When X is replaced with - or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the hydrocarbon group. 0 When a substituent is bonded to a hydrocarbon group represented by the formula: Figure imgf000012_0001, the number of carbon atoms before substitution is the total number of carbon atoms in the hydrocarbon group.

[0225] X 0 The hydrocarbon group represented by the formula (I) may have one or more substituents. Examples of the substituent include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these.

[0226] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a nonyl group.

[0227] Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and a dodecyloxy group.

[0228] The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0229] Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group.

[0230] Examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include the groups shown below. ** indicates X 0 represents the binding site with

[0231] [ka]

[0232] Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include aryl groups such as a phenyl group and a naphthyl group. Examples of the combined group include a group combining a hydroxy group with an alkyl group having 1 to 12 carbon atoms, a group combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms, a group combining an alicyclic hydrocarbon group having 3 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms, and a group combining a halogen atom with an alkyl group having 1 to 12 carbon atoms.

[0233] Examples of the group combining a hydroxy group with an alkyl group having 1 to 12 carbon atoms include hydroxyalkyl groups having 1 to 12 carbon atoms, such as a hydroxymethyl group and a hydroxyethyl group.

[0234] Examples of the group combining an alkyl group having 1 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms include aralkyl groups having 7 to 22 carbon atoms such as a benzyl group, and alkylaryl groups having 7 to 22 carbon atoms such as a tolyl group and a xylyl group.

[0235] Examples of the group formed by combining an alicyclic hydrocarbon group having 3 to 12 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms include a cyclohexylphenyl group. Examples of the group in which a halogen atom is combined with an alkyl group having 1 to 12 carbon atoms include perfluoroalkyl groups having 1 to 12 carbon atoms, such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group.

[0236] X 0 The hydrocarbon group represented by the formula (I) is preferably an aliphatic hydrocarbon group having 1 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group is not limited to -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa) or a group represented by formula (bb), More preferably, it is an alicyclic hydrocarbon group which may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR2-, 11 - or -SO2-, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group), an aromatic hydrocarbon group which may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), More preferably, *-alicyclic hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 The alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO- represents a bonding site with a carbon atom of the formula (I), *-alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11 The chain hydrocarbon group and the alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (aa), a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an aromatic hydrocarbon group which may have a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), More preferably, *-a polycyclic alicyclic hydrocarbon group (-CH2- contained in the polycyclic alicyclic hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 The polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (1), *-polycyclic alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the polycyclic alicyclic hydrocarbon group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the polycyclic alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO- represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-polycyclic alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the polycyclic alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11 The chain hydrocarbon group and the polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (aa), a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an aromatic hydrocarbon group which may have a hydroxy group, a group represented by formula (aa) or a group represented by formula (bb), Particularly preferred are an adamantyl group, an adamantanone group, a hydroxyadamantyl group, a group combining an adamantyl group with an alkyl group (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), a group represented by formula (Y30F), a phenyl group having a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb).

[0237] In the above groups, the alicyclic hydrocarbon group has preferably 3 to 36 carbon atoms, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. The aromatic hydrocarbon group has preferably 6 to 36 carbon atoms, more preferably 6 to 24, even more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10.

[0238] The formula (Y30F), the group represented by the formula (aa), and the group represented by the formula (bb) are shown below.

[0239] [ka]

[0240] [In formula (aa), X a and X b each independently represents -O- or -S-. X 1a represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0241] X 2a represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0242] * -COO - represents the bonding site with the carbon atom of [In formula (bb), L A represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms.

[0243] L B represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -CO- or -SO2-.

[0244] R A represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0245] * -COO - represents the bonding site with the carbon atom of X a and X bare preferably the same atom, and more preferably both are oxygen atoms.

[0246] X 1a and X 2a Examples of the hydrocarbon group represented by the formula (I) include an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or a group in which two or more of these are combined. These hydrocarbon groups may have a substituent. Furthermore, -CH2- contained in these hydrocarbon groups may be -O-, -S-, -CO-, -SO-, -NR 11 The number of carbon atoms in the hydrocarbon group refers to the number of carbon atoms in the hydrocarbon group that does not have a substituent and is not substituted.

[0247] X 1a Examples of the aliphatic hydrocarbon group include chain hydrocarbon groups such as alkanetriyl groups, alicyclic hydrocarbon groups, and combinations thereof. Specific examples of the alkanetriyl group include a methine group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, and a dodecanetriyl group.

[0248] The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclobutanetriyl group, a cyclopentanetriyl group, a cyclohexanetriyl group, and a cyclooctanetriyl group.

[0249] Examples of the polycyclic alicyclic hydrocarbon group include a norbornanetriyl group and an adamantanetriyl group. Examples of the aromatic hydrocarbon group include a benzenetriyl group, a naphthalenetriyl group, and an anthracenetriyl group.

[0250] In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanediyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanediyl group, or a cycloalkanetetrayl group).

[0251] X 1a The hydrocarbon group represented by the formula (I) has 1 to 24 carbon atoms and may further have one or more substituents. Examples of the substituents include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these.

[0252] Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above.

[0253] X 1a The hydrocarbon group represented by the formula (w1-3) is preferably an alkanetriyl group having 1 to 6 carbon atoms which may have a substituent or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, more preferably an alkanetriyl group having 1 to 6 carbon atoms or a group represented by any of formulas (w1-1) to (w1-11), and even more preferably an alkanetriyl group having 1 to 6 carbon atoms, a polycyclic hydrocarbon group such as a group represented by formula (w1-1) or a group represented by formula (w1-3), or a monocyclic hydrocarbon group such as a group represented by formula (w1-2) or a group represented by formula (w1-6).

[0254] [ka]

[0255] [In formulas (w1-1) to (w1-11), The ring may have a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a combination thereof.

[0256] * denotes a binding site.] X 2a The hydrocarbon group represented by the formula (I) preferably has 2 to 48 carbon atoms, more preferably 4 to 48 carbon atoms, even more preferably 6 to 44 carbon atoms, even more preferably 8 to 40 carbon atoms, and even more preferably 10 to 38 carbon atoms.

[0257] X 2a Examples of the substituent that the hydrocarbon group in the formula (I) may have include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these.

[0258] Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above.

[0259] X 2a The hydrocarbon group having 1 to 48 carbon atoms represented by the following formula may have one or more substituents. X 2a The substituent that the hydrocarbon group in the formula (I) may have is preferably a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

[0260] X 2aExamples of the hydrocarbon group in include linear or branched chain hydrocarbon groups (for example, alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups.

[0261] Specific examples thereof include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, and octane-1,8-diyl; and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups, such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; and aromatic hydrocarbon groups such as phenylene, naphthylene, biphenylene, anthrylene, phenanthrylene, and binaphthylene.

[0262] In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group).

[0263] Examples of the combined group include a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are combined, a group in which a chain hydrocarbon group and an aromatic hydrocarbon group are combined, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Specific examples include a group in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group)2, etc.), a group in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (e.g., -alicyclic hydrocarbon group-chain hydrocarbon group, -alicyclic hydrocarbon group-(chain hydrocarbon group)2, etc.), and a group in which one or more alicyclic hydrocarbon groups and chain hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group-chain hydrocarbon group)2, etc.).

[0264] X 2a The hydrocarbon group in a chain hydrocarbon group having 2 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or It is preferably a group (which may have a substituent) comprising a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), a chain hydrocarbon group having 4 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or It is more preferable that the group is a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), a chain hydrocarbon group having 6 to 14 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or More preferably, it is a group (which may have a substituent) that combines a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) with an alicyclic hydrocarbon group having 5 to 14 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-).

[0265] Specifically, X 2a Examples of the hydrocarbon group in an alkanediyl group having 2 to 18 carbon atoms (-CH- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is preferably a group (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), an alkanediyl group having 4 to 18 carbon atoms (-CH- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is more preferable that the alkyl group is an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and the alkyl group may have a substituent. an alkanediyl group having 6 to 14 carbon atoms (wherein —CH— contained in the alkanediyl group may be replaced by —O— or —CO—, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group (-CH2- contained in the adamantanediyl group may be replaced with -O- or -CO-) (the group may have a substituent), or More preferred are groups (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-).

[0266] More specifically, X 2a is the formula (X 2 -1), a group represented by the formula (X 2 -2), a group represented by the formula (X 2 -3) or a group represented by the formula (X 2 -4) is preferred.

[0267] [ka]

[0268] [In the formula, R 1x , R 2x , R 3x , R 4x , R 5x and R 6x each independently represents an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group combining two or more of these groups, and -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-, and the alkyl group and the alicyclic hydrocarbon group may have a substituent.

[0269] * is X a and X b represents the binding site with The combined group may be a combination of one alkyl group and one alicyclic hydrocarbon group described above, or two or more of either one or two or more of both. In this case, the number of carbon atoms in the combined group is 39 or less, and preferably 37 or less.

[0270] Among them, R 1x, R 2x , R 3x , R 4x , R 5x and R 6x Examples thereof include an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-, and the alkyl group may have a substituent), an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or a combination of an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group and more preferably a group (which may have a substituent) combining a methoxy group, an adamantyl group (wherein —CH— may be replaced by —O— or —CO— and the adamantyl group may have a substituent), or an alkyl group having 1 to 6 carbon atoms (wherein —CH— may be replaced by —O— or —CO—).

[0271] The group represented by formula (aa) is more preferably a group represented by any one of the following formulas (aa1), (aa2), (aa3) and (aa4).

[0272] [ka]

[0273] [In formula (aa1) to formula (aa4), W 1a represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms. X a and X b Each of X independently represents -O- or -S-. a and Xb is W 1a It bonds to the same carbon atom contained in

[0274] R 1x , R 2x , R 3x , R 4x , R 5x and R 6x each independently represents an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group combining two or more of these groups, and -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-, and the alkyl group and the alicyclic hydrocarbon group may have a substituent.

[0275] * -COO - represents the bonding site with the carbon atom of In formulas (aa1) to (aa4), W 1a The alicyclic hydrocarbon group is more preferably a group represented by formula (w1-1) to formula (w1-11), and even more preferably a polycyclic hydrocarbon group such as a group represented by formula (w1-1) or a group represented by formula (w1-3), or a monocyclic hydrocarbon group such as a group represented by formula (w1-2) or a group represented by formula (w1-6).

[0276] In formula (bb), L A and L B Examples of the alkanediyl group having 1 to 6 carbon atoms include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 4, and more preferably 1 to 3.

[0277] Examples of the alkanediyl group which may have a fluorine atom include perfluoroalkanediyl groups such as a difluoromethylene group, a perfluoroethylene group, a perfluoropropanediyl group, a perfluorobutanediyl group, and a perfluoropentanediyl group.

[0278] The -CH2- contained in the alkanediyl group can be substituted with -O-, -S-, -SO2-, -SO-, or -NR 11 When the alkanediyl group is replaced with - or -CO-, the number of carbon atoms before the replacement is the total number of carbon atoms in the alkanediyl group. The alkanediyl group includes a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), an alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), an alkanediylamino group (a group in which -CH2- at any position in an alkanediyl group is replaced with -NR 11 -substituted group).

[0279] Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group and alkylsulfonyl group are the same as those mentioned above. Examples of the alkanediyloxy group include a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, and a pentanediyloxy group.

[0280] Examples of the alkanediylthio group include a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, and a pentanediylthio group. Examples of the alkanediylsulfonyl group include a methylenesulfonyl group, an ethylenesulfonyl group, a propanediylsulfonyl group, a butanediylsulfonyl group, and a pentanediylsulfonyl group.

[0281] Examples of the alkanediyloxycarbonyl group include a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group.

[0282] Examples of the alkanediylcarbonyl group include a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group.

[0283] Examples of the alkanediylcarbonyloxy group include a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group.

[0284] Examples of the alkanediylamino group include a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, and a hexyleneamino group.

[0285] L A Examples of the aromatic hydrocarbon group having 6 to 14 carbon atoms include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 10, and more preferably 6.

[0286] L A Examples of the halogen atom that may be contained in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L AExamples of the perfluoroalkyl group having 1 to 4 carbon atoms that may be contained in the aryloxy group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group.

[0287] L A is preferably an alkanediyl group having 1 to 4 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms, and more preferably an alkanediyl group having 1 to 3 carbon atoms which may have a fluorine atom, or a phenylene group which may have a fluorine atom, an iodine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms.

[0288] L B is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and more preferably a single bond, a methylene group or an ethylene group.

[0289] R A Examples of the hydrocarbon group in include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups formed by combining these.

[0290] Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, an n-dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4.

[0291] Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups.

[0292] Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group.

[0293] The -CH2- contained in the chain hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 Examples of groups substituted for - or -SO2- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylsulfonyl group, and an alkylthio group.

[0294] Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylsulfonyl group and alkylthio group include an alkoxy group having 1 to 17 carbon atoms, an alkoxycarbonyl group having 2 to 17 carbon atoms, an alkylcarbonyl group having 2 to 18 carbon atoms, an alkylcarbonyloxy group having 2 to 17 carbon atoms, an alkylsulfonyl group having 1 to 17 carbon atoms and an alkylthio group having 1 to 17 carbon atoms, and examples thereof include the same groups as those described above.

[0295] The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl.

[0296] Specific examples of the alicyclic hydrocarbon group and the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include groups represented by the above formulae (y1) to (y71). The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0297] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10.

[0298] In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, a cycloalkanediyl group, or a cycloalkanetriyl group).

[0299] Groups formed by combination include groups combining an aromatic hydrocarbon group with a chain hydrocarbon group (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*), groups combining an alicyclic hydrocarbon group with a chain hydrocarbon group (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), and groups combining an aromatic hydrocarbon group with a alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * represents a bonding site.

[0300] The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group.

[0301] Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group.

[0302] Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group.

[0303] Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenyladamantyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include an adamantylphenyl group.

[0304] In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. B may be bound to

[0305] The -CH2- contained in the hydrocarbon group can be -O-, -S-, -CO-, -SO-, or -NR 11 In addition to the groups mentioned above, examples of the group substituted with - or -SO2- include a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, and a group formed by combining two or more of these groups.

[0306] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group.

[0307] The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO2-, -SO-, or -NR 11 When the hydrocarbon group is substituted with - or -CO-, the total number of carbon atoms in the hydrocarbon group is the number of carbon atoms before the substitution.

[0308] R A The substituents that the hydrocarbon group may have include a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group is not limited to -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-).

[0309] Examples of the halogen atom include the same groups as those mentioned above. Examples of the alkyl group having 1 to 12 carbon atoms include the same groups as those mentioned above. Examples of groups in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group.

[0310] Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group include alkoxy groups having 1 to 11 carbon atoms, alkoxycarbonyl groups having 2 to 11 carbon atoms, alkylcarbonyl groups having 2 to 12 carbon atoms, and alkylcarbonyloxy groups having 2 to 11 carbon atoms, and include, for example, the same groups as those described above.

[0311] R A The hydrocarbon group in may have one or more substituents. R A The hydrocarbon group in the formula (I) is an alkyl group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the alkyl group is not -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-) or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO2-, -NR2-). 11 - or -SO2- may be substituted.

[0312] Examples of the cyclic hydrocarbon group include cyclic hydrocarbon groups such as monocyclic or polycyclic alicyclic hydrocarbon groups having 3 to 18 carbon atoms and aromatic hydrocarbon groups having 6 to 18 carbon atoms, or combinations of these groups.

[0313] Examples of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and combined group include the same groups as those described above. In the combination, two or more types of alicyclic hydrocarbon groups and two or more types of aromatic hydrocarbon groups may be combined. B may be bound to

[0314] A cyclic hydrocarbon group having 3 to 18 carbon atoms (the cyclic hydrocarbon group may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2- may be replaced. an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 4 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), or It is preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms or a perfluoroalkyl group having 1 to 4 carbon atoms.

[0315] The group represented by formula (bb) is more preferably a group represented by formula (bb1).

[0316] [ka]

[0317] [In formula (bb1), L A and L B has the same meaning as formula (bb). W 2a represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, which may have a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group, and -CH2- contained in the alicyclic hydrocarbon group is selected from -O-, -S-, -CO-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0318] * -COO - represents the bonding site with the carbon atom of In equation (bb1), W 2ais an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms or a perfluoroalkyl group having 1 to 4 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group is not limited to -O-, -CO-, -SO-, -NR 11 - or -SO2- may be substituted.) is more preferred.

[0319] In equation (bb1), W 2a The alicyclic hydrocarbon group is preferably a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group, an adamantyl group, or the following groups (the bonding site may be at any position):

[0320] [ka]

[0321] Examples of the carboxylate anion in the carboxylate salt represented by formula (I) include the carboxylate anions described below.

[0322] [ka]

[0323] [ka]

[0324] [ka]

[0325] [ka]

[0326] Specific examples of the carboxylate (I) include salts of any combination of the above-mentioned cations and anions. Specific examples of the carboxylate (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the carboxylate (I) corresponds to the anion (I) or cation (I), respectively. For example, the carboxylate (I-1) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-1), the carboxylate (I-2) is a salt consisting of an anion represented by formula (Ia-2) and a cation represented by formula (Ic-1), and the carboxylate (I-101) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-2).

[0327] [ka]

[0328] [Table 1] JPEG2025114478000046.jpg237170

[0329] Among these, as the carboxylate (I), a salt obtained by combining an anion represented by any one of formulas (Ia-1) to (Ia-5), (Ia-10) to (Ia-21), and (Ia-57) to (Ia-66) with a cation represented by any one of formulas (Ic-1) to (Ic-80) is preferred.

[0330] <Method for producing carboxylate (I)> The carboxylate (I) can be produced by reacting a salt represented by formula (Ia) with a salt represented by formula (Ib) in a solvent.

[0331] [ka]

[0332] wherein all symbols have the same meanings as defined above. RA , R B and R C each independently represents a hydrocarbon group having 1 to 12 carbon atoms, or R A , R B and R C may combine to form an aromatic ring. D represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms.

[0333] X 10 represents a halogen atom or CH3SO4. Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and water.

[0334] The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours. The compound represented by formula (Ia) includes, for example, salts represented by the following formula, and can be easily produced by known production methods.

[0335] [ka]

[0336] Examples of the salt represented by formula (Ib) include salts represented by the following formula, which can be easily produced by known production methods.

[0337] [ka]

[0338] [Carboxylic Acid Generator] The carboxylic acid generator of the present invention is an acid generator containing a carboxylate (I). The carboxylate (I) of the present invention can act as a quencher or an acid generator in a resist composition. The carboxylic acid generator of the present invention may contain only one type of carboxylate (I) or two or more types of carboxylate (I). Furthermore, the carboxylic acid generator of the present invention may contain a carboxylate other than the carboxylate (I) that is known in the resist field.

[0339] [Resist Composition] The resist composition of the present invention contains a carboxylic acid generator containing the carboxylate (I) of the present invention and an acid generator (B) other than the carboxylate (I). The resist composition of the present invention may contain a resin (hereinafter sometimes referred to as "resin (A)") containing a structural unit having an acid labile group and / or a resin other than the resin (A). Here, the "acid labile group" refers to a group that has a leaving group and that is eliminated upon contact with an acid to form a hydrophilic group (e.g., a hydroxy group or a carboxy group).

[0340] The resist composition preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)").

[0341] In the resist composition of the present invention, the content of the carboxylate (I) is preferably from 0.1 to 35% by mass, more preferably from 0.5 to 30% by mass, and even more preferably from 1 to 25% by mass, relative to the solid content of the resist composition. Furthermore, the content of the carboxylate (I) may be preferably from 1 to 45 parts by mass, more preferably from 1 to 40 parts by mass, and even more preferably from 3 to 40 parts by mass, relative to 100 parts by mass of the resin (A) described below.

[0342] <Acid generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Examples of ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions.

[0343] The acid generator (B) may be a structural unit having an acid-generating function, for example, a resin having the structural unit (a7) described below. The acid generator (B) may be a compound that generates an acid when exposed to radiation, as described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779,778, U.S. Pat. No. 3,849,137, German Patent No. 3,914,407, or European Patent No. 126,712. Compounds produced by known methods may also be used. Two or more types of acid generator (B) may be used in combination.

[0344] The acid generator (B) may be an acid generator having an acid labile group. For example, the compound or resin that serves as the acid generator may contain a partial structure that becomes an acid labile group, and the acid labile group preferably contains the above-mentioned group (1) or group (2). When the resist composition of the present invention contains a compound that has an acid labile group, it does not necessarily need to contain a resin that contains a structural unit that has an acid labile group.

[0345] A preferred embodiment of the acid generator (B) is a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)" or "compound (B1)") or a salt represented by formula (B2) (hereinafter sometimes referred to as "acid generator (B2)" or "compound (B2)").

[0346] [ka]

[0347] [In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-.

[0348] L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0349] Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.

[0350] nb1 represents an integer of 1 to 6. When nb1 is 2 or greater, the groups in the parentheses may be the same or different. ZI + represents an organic cation. L b1 The (nb1+1)-valent hydrocarbon group includes a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, from which nb1 hydrogen atoms have been removed to form L. b2 Examples of such groups include groups that bond to the following:

[0351] The hydrocarbon group preferably has 1 to 48 carbon atoms, more preferably 1 to 42 carbon atoms, even more preferably 1 to 36 carbon atoms, even more preferably 1 to 30 carbon atoms, and even more preferably 1 to 24 carbon atoms.

[0352] Examples of the chain hydrocarbon group include groups in which nb hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentanedecyl, and heptadecyl. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl.

[0353] The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10.

[0354] Examples of the alicyclic hydrocarbon group include a group in which nb hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentane group, a cyclohexane group, a cyclopentyl group, and a cyclooctyl group.

[0355] Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are fused, and cycloalkyl groups in which two rings are bonded via a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are fused include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded via a spiro bond include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded via a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group.

[0356] More specifically, alicyclic hydrocarbon groups represented by the following formulas are included.

[0357] [ka]

[0358] When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, still more preferably 3 to 12, even more preferably 3 to 10, and still more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, still more preferably 6 to 12, and still more preferably 7 to 12.

[0359] Examples of aromatic hydrocarbon groups include groups in which nb1 hydrogen atoms have been removed from an aryl group, such as a phenyl group, naphthyl group, anthryl group, biphenyl group, and fluorenyl group.

[0360] More specifically, aromatic hydrocarbon groups represented by the following formulas are included.

[0361] [ka]

[0362] The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, still more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10.

[0363] L b1 When -CH2- in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is regarded as the number of carbon atoms in the hydrocarbon group. L b1Among the hydrocarbon groups in the above, groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2- in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (an alkyl group Examples of such groups include alkyl, alkylcarbonyl, alkyloxy, alkyl groups in which -CH- at any position in the alkyl group is replaced with -CO-), alkylcarbonyloxy groups (in which -CH-CH- at any position in the alkyl group is replaced with -CO-O-), alkanediyloxy groups (in which -CH- at any position in the alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (in which -CH-CH- at any position in the alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl groups (in which -CH- at any position in the alkanediyl group is replaced with -CO-), and alkanediylcarbonyloxy groups (in which -CH-CH- at any position in the alkanediyl group is replaced with -CO-). Examples of such groups in which a substitution is made include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0364] L b1 Among the hydrocarbon groups listed above, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2- include groups containing structures such as cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, and cyclic sulfonate ester (sultone). Specific examples include alicyclic hydrocarbon groups represented by the following formula: The bonding position of the alicyclic hydrocarbon groups listed in the following formula may be any position.

[0365] [ka]

[0366] L b1 Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specific examples include aromatic hydrocarbon groups represented by the following formulas:

[0367] Examples of the group combining two or more groups selected from the group consisting of a chain hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group, a group combining the above-mentioned chain hydrocarbon group with the above-mentioned aromatic hydrocarbon group, a group combining the above-mentioned alicyclic hydrocarbon group with the above-mentioned aromatic hydrocarbon group, and a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group and the above-mentioned aromatic hydrocarbon group. The group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group may be a fused ring.

[0368] L b2 Examples of the divalent hydrocarbon group include a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group combining two or more of these groups. A monovalent hydrocarbon group can be obtained by removing one hydrogen atom to form Y b1 Examples of such groups include groups that bond to the following:

[0369] L b2 The divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group formed by combining two or more of these groups are each, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the monovalent hydrocarbon group include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups and removing one hydrogen atom from them.

[0370] L b1 and L b2Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc.

[0371] L b1 and L b2 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as substantially a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, a carbonyl group, an oxycarbonyl group, a carbonyloxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group.

[0372] L b1 and L b2 The number of substituents that may be possessed by the group is not particularly limited, and the group may have a plurality of substituents. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined.

[0373] Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group are, respectively, L b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups include those similar to those exemplified in 1., and when they have no substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups.

[0374] Y b1 Examples of the substituent that the methyl group in Y may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. b1Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group (-CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-). Y b1 The number of carbon atoms in the hydrocarbon group that the cyclic hydrocarbon group may have is b1 The number of hydrocarbon groups of the cyclic hydrocarbon groups is not included in the number of hydrocarbon groups.

[0375] The halogen atoms include L b1 and L b2 Examples of the halogen atoms include the same halogen atoms as those exemplified as the substituents of the above. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that may be substituted on the cyclic hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the hydrocarbon groups include the chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups in which two or more of these groups are combined, as exemplified above.

[0376] Also, Y b1 Examples of the group in which -CH2- in the hydrocarbon group having 1 to 18 carbon atoms that the methyl group and cyclic hydrocarbon group may have as a substituent are replaced with -O-, -S-, -CO-, or -SO2-, within the range permitted by the upper limit of the number of carbon atoms, and include the same groups as those exemplified for the group in which -CH2- in the hydrocarbon group of Lb1 is replaced with -O-, -S-, -CO-, or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which may be substituted on the cyclic hydrocarbon group may constitute a protecting group or leaving group (acid labile group or base labile group) commonly used in the art.

[0377] The anion contained in the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter, may be referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter, may be referred to as "anion (B1-A2)").

[0378] [ka]

[0379] [In formula (B1-A1), L b2 and Y b1 has the same meaning as in formula (B1). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.

[0380] z1 represents an integer of 0 to 6. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a hydrocarbon group having 1 to 24 carbon atoms (nb2+1) which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0381] nb2 represents an integer of 1 to 3. Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group represented by include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0382] Q b1 , Q b2 , Q b3 and Qb4 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group.

[0383] Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms.

[0384] Q b3 and Q b4 are each preferably independently a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom.

[0385] z1 is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0386] L b3 The hydrocarbon group in the formula (B1) is, within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above can be mentioned. L b3is preferably a single bond, an optionally substituted chain hydrocarbon group of 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted alicyclic hydrocarbon group of 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), an optionally substituted aromatic hydrocarbon group of 6 to 10 carbon atoms (-CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-), or a group comprising a combination of two or more of these groups, and more preferably a single bond, an optionally substituted chain hydrocarbon group of 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1): When -CH2- in the chain hydrocarbon group is replaced with -O- or -CO-, the number is preferably 1 to 4, and it is preferred that one -CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO- or -CO-O-, or that one -CH2-CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO-O-.

[0387] [ka]

[0388] [In formula (Lb3-1), nb2 has the same meaning as in formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the chain hydrocarbon group may have a substituent.

[0389] W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, in which -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and -CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent.

[0390] * and ** represent binding sites, * represents X 1 represents the binding site with In formula (Lb3-1), L b31 The chain hydrocarbon group of L is as long as the upper limit of the carbon number allows. b1 Examples of the chain hydrocarbon groups include the same groups as those exemplified above.

[0391] W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of L are as long as the upper limit of the carbon number allows. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified above. L b31 The substituents which the chain hydrocarbon group of W may have and b1 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 Examples of the substituent that the hydrocarbon group may have include the same groups as the substituents exemplified above.

[0392] L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0393] Among them, W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group include the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent a bonding site, * represents X 1 or L b31 represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 represents a binding site with at least one ** b2represents a bonding site with. In the alicyclic hydrocarbon groups represented below, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2-, it is preferable that an ether ring, ester ring (lactone), carbonate ring, sulfonate ester ring (sultone ring), or acetal ring is formed.

[0394] [ka]

[0395] In formula (B1-A1), L b2 is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or -L b21 -X 2 -L b22 -**(L b21 and L b22 One of X represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent binding sites, and ** represents Y b1 represents the binding site with L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less.

[0396] In formula (B1-A1), Y b1is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, groups represented by the following formulae (Y1) to (Y36) are preferred. In formulae (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, R represents an alkyl group having 1 to 4 carbon atoms. Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, and * represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, b2 The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, although not specifically shown in the following formulae.

[0397] [ka]

[0398] The anion represented by formula (B1-A1) is preferably an anion represented by formula (B1-A1-1) to formula (B1-A1-85) (hereinafter, sometimes referred to as "anion (B1-A1-1)" depending on the formula number), and more preferably an anion represented by any of formulas (B1-A1-1) to (B1-A1-4), (B1-A1-9), (B1-A1-10), (B1-A1-24) to (B1-A1-33), (B1-A1-36) to (B1-A1-40), and (B1-A1-47) to (B1-A1-85).

[0399] [ka]

[0400] [ka]

[0401] [ka]

[0402] In formulas (B1-A1-1) to (B1-A1-85), R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms.

[0403] Q b1 and Q b2 has the same meaning as above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0404] Preferred anions represented by formula (B1-A1) include those represented by formulas (B1a-1) to (B1a-70). Of these, anions represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) are preferred.

[0405] [ka]

[0406] [ka]

[0407] [ka]

[0408] The anion represented by formula (B1-A2) is represented by the following formula:

[0409] [ka]

[0410] [In formula (B1-A2), L b2 and Y b1 has the same meaning as in formula (B1). nb4 represents an integer of 1 to 5. When nb4 is 2 or more, a plurality of -L b4 -Y b2 may be the same or different from each other.

[0411] R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and one --CH.sub.2-- contained in the alkyl group may be replaced with --O-- or --CO--. nb3 represents an integer of 0 to 4, and when nb3 is 2 or more, a plurality of R b1 may be the same or different from each other.

[0412] However, 1≦nb3+nb4≦5 is satisfied. In formula (B1-A2), L b2 and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (B1). b2 and Y b1 Examples of the cyclic hydrocarbon group are the same as those of L.b2 hydrocarbon group, Y b1 The substituents that the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 hydrocarbon group, Y b1 Examples of the substituents that the methyl group and cyclic hydrocarbon group may have are the same as those listed above.

[0413] These hydrocarbon groups, methyl groups and cyclic hydrocarbon groups may have one or more substituents. In formula (B1-A2), L b2 represents preferably a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-.), and more preferably *-CO-OL b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. * is SO3 - represents the bonding site with the benzene ring to which L is attached. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. ) and even more preferably *-CO-O-.

[0414] Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y in formula (B1-A1) is b1 or L b1 More preferably, it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by the following: Specifically, it is preferably a group represented by the above formulas (Y1) to (Y36), and more preferably a group represented by the above formulas (Y1) to (Y19).

[0415] In formula (B1-A2), nb4 is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bond position of SO3 - The following structure, which is substituted at the m-position of the benzene ring relative to the bonding position of

[0416] [ka]

[0417] [In the above formula, L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (B1-A2). If nb4 is 2 or more, multiple L b2 and Y b1 are preferably the same group.

[0418] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3.

[0419] R b1 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of groups in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. Specific examples of these are the same as those described above.

[0420] R b1are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group.

[0421] nb3 is an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When n3b is 2, R b1 Preferably, one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, b1 It is more preferable that one of the groups is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0422] Examples of the anion represented by formula (B1-A2) include the following anions. Among them, the anions represented by formulas (B2a-1) to (B2a-20) are preferred, and the anions represented by formulas (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are preferred in the case where some R b1 is omitted, and may contain substituents not shown.

[0423] [ka]

[0424] In another embodiment of the acid generator (B), an anion in which the anion of the salt represented by formula (B1) is replaced with a sulfonide anion, a sulfonylmethide anion, or a carboxylate anion is also preferably used as the acid generator (B). Examples of the sulfonide anion and sulfonylmethide anion include those represented by the following formula (B1-A3).

[0425] [ka]

[0426] [In formula (B1-A3), A 1 represents a nitrogen atom or a carbon atom. L b2 ' represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0427] Y b1 ' represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.

[0428] nb5 represents 2 or 3. When nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 is a carbon atom. The groups in parentheses may be the same or different, and two groups in parentheses are bonded to form A 1 may form a ring containing In formula (B1-A3), L b2 ′ and Y b1 Examples of the hydrocarbon group, cyclic hydrocarbon group and substituent of L′ are b2 and Y b1 The same groups as those shown below can be mentioned.

[0429] In formula (B1-A3), L b2′is a single bond, *-L b23 -, *-L b23 -X 2 -or*-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may contain a fluorine atom. 2 and X 3 each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.) is preferred.

[0430] In formula (B1-A3), Y b1′ is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms. Specifically, it is more preferably a trifluoromethyl group or a group represented by formulae (Y1) to (Y36) exemplified in formula (B1-A1).

[0431] nb5 is preferably 2 or 3. In formula (B1-A3), two -SO2-L b2′ -Y b1′ Together they form A 1 When a ring containing the formula (B1-A3′) is formed, examples thereof include anions represented by the formula (B1-A3′).

[0432] [ka]

[0433] [In formula (B1-A3′), A 1 , Y b1 ′, L b2 'nb5 has the same meaning as in formula (B1-A3). W b4 represents a disulfonylimide ring or disulfonylmethide ring having 3 to 12 carbon atoms, which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmide ring preferably has 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably substituted with a fluorine atom.

[0434] Examples of the anion represented by formula (B1-A3) include the following: Among these, anions represented by formula (B1-a3-1), formula (B1-a3-2) or formula (B1-a3-12) to formula (B1-a3-14) are preferred.

[0435] [ka]

[0436] Examples of carboxylate anions include the following:

[0437] [ka]

[0438] ZI + Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specific examples include cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, sometimes referred to as "cation (b2-1)" depending on the formula number).

[0439] [ka]

[0440] [In formulas (b2-1) to (b2-5), R b4 ~R b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms.

[0441] R b4 and R b5 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-.

[0442] R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms.

[0443] m2 and n2 each independently represent an integer of 0 to 5; When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different.

[0444] Rb9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-.

[0445] R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms.

[0446] R b11 and R b12 and may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-.

[0447] R b13 ~R b18 , R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms.

[0448] R b13 and R b14 and R b21 and R b22may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-.

[0449] R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid labile group. L b31 , L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5.

[0450] q2 and r2 each independently represent an integer of 0 to 4; u2 represents 0 or 1. o21, p22, q23, s26, t25 and r24 each independently represent an integer of 0 to 4.

[0451] u3 represents an integer of 1 to 3, and satisfies 1≦u3+q23≦5. u4 and u5 each independently represent an integer of 0 to 3, and satisfy 0≦u4+o21≦5 and 0≦u5+p22≦5.

[0452] When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different.

[0453] When o21, p22, q23, s26, t25 and r24 are each 2 or more, multiple R b21 ~R b26 are the same or different. When u3, u4 and u5 each represent 2 or more, the groups in the parentheses are the same or different.

[0454] o21, p22, q23, r24, t25 and s26 each independently represent an integer of 0 to 4. When o21, p22, q23, r24, t25 and s26 are each 2 or more, multiple R b21 ~R b26 are the same or different.] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of o2, p2, s2, t2, q2 and r2 is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom.

[0455] Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0456] The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl.

[0457] In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups:

[0458] [ka]

[0459] In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less.

[0460] The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4.

[0461] Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain hydrocarbon group of 1 to 18 carbon atoms (such as tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl), and aromatic hydrocarbon groups having an alicyclic hydrocarbon group of 3 to 18 carbon atoms (such as p-cyclohexylphenyl and p-adamantylphenyl). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, chain hydrocarbon groups having 1 to 18 carbon atoms and alicyclic hydrocarbon groups having 3 to 18 carbon atoms are preferred.

[0462] Examples of aromatic hydrocarbon groups in which hydrogen atoms are substituted with alkoxy groups include p-methoxyphenyl groups. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl.

[0463] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group.

[0464] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0465] Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group.

[0466] R b4 and R b5 and bond to each other together with the sulfur atom to which they are bonded to form a ring which may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring, for example, the following rings. * represents a bonding site.

[0467] [ka]

[0468] R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples thereof include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxathian-4-ium ring.

[0469] R b11 and R b12 The ring formed by combining these may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include a 3- to 12-membered ring, and preferably a 3- to 7-membered ring. Examples include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring.

[0470] R b27 ~R b29 Examples of groups containing an acid labile group include -R c30 , -CO-OR c30 or -L c10 -CO-OR c30 A group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid labile group.

[0471] R b27 ~R b29 The acid labile group is preferably a group represented by formula (1) or formula (2). Among the cations (b2-1) to (b2-5), the cation (b2-1), the cation (b2-4) or the cation (b2-5) is preferred.

[0472] Examples of the cation (b2-1) include the following cations.

[0473] [ka]

[0474] Examples of the cation (b2-2) include the following cations.

[0475] [ka]

[0476] Examples of the cation (b2-3) include the following cations.

[0477] [ka]

[0478] Examples of the cation (b2-4) include the following cations.

[0479] [ka]

[0480] Examples of the cation (b2-5) include the following cations.

[0481] [ka]

[0482] The acid generator (B1) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be combined in any desired manner. The salt (B1) is preferably a combination of an anion represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), (B1-3a-1) to (B1-3a-3), or (B1-3a-11) to (B1-3a-14), and a cation (b2-1), a cation (b2-2), a cation (b2-3), a cation (b2-4), or a cation (b2-5).

[0483] Preferred examples of the acid generator (B) include those represented by formulae (B1-1) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28). Among these, those containing an arylsulfonium cation are preferred, and those represented by formulae (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28) are particularly preferred.

[0484] [ka]

[0485] [ka]

[0486] [ka]

[0487] [ka]

[0488] [ka]

[0489] [ka]

[0490] [ka]

[0491] In the resist composition of the present invention, the content of the acid generator (B) is preferably from 1 to 45% by mass, more preferably from 1 to 40% by mass, and even more preferably from 3 to 35% by mass, based on the solid content of the resist composition. Furthermore, when the resist composition of the present invention contains a resin (A) described below, the content of the acid generator (B) is preferably from 1 to 45 parts by mass, more preferably from 1 to 40 parts by mass, and even more preferably from 3 to 35 parts by mass, based on 100 parts by mass of the resin (A).

[0492] In the resist composition of the present invention, the ratio of the carboxylate (I) to the acid generator (B) (mass ratio; carboxylate (I):acid generator (B)) is generally 0.1:99.9 to 99.9:0.1, preferably 1:99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5:95 to 95:5.

[0493] <Resin (A)> Resin (A) contains a structural unit having an acid labile group (hereinafter sometimes referred to as "structural unit (a1)"). Resin (A) preferably further contains a structural unit other than structural unit (a1). Examples of structural units other than structural unit (a1) include a structural unit not having an acid labile group (hereinafter sometimes referred to as "structural unit (s)"), structural units other than structural unit (a1) and structural unit (s) (for example, a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)") described below, a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)") described below, and other structural units derived from monomers known in the art.

[0494] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)").

[0495] The acid labile group contained in the resin (A) or the like is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)).

[0496] [ka]

[0497] [In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R a1 and R a2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom.

[0498] ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.]

[0499] [ka]

[0500] [In formula (2), R a1′ and R a2′ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3′ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2′ and R a3′ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom.

[0501] X represents an oxygen atom or a sulfur atom. na' represents 0 or 1. * denotes a binding site.] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group.

[0502] R a1 , R a2 and R a3 Examples of the alkenyl group in the formula (I) include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups.

[0503] R a1 , R a2 and R a3The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms.

[0504] [ka]

[0505] R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0506] Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1)(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-.

[0507] [ka]

[0508] R a1′ , R a2′ and R a3′ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups.

[0509] Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same as those listed in the above. R a2′ and R a3′ When they are bonded to each other to form a heterocyclic group together with the carbon atoms to which they are bonded and X, -C(R a1′ )(R a2′ )-XR a3′ Examples of the groups include the following: * represents a binding site.

[0510] [ka]

[0511] R a1′ and R a2′ At least one of these is preferably a hydrogen atom. na' is preferably 0. R a1 , R a2 , R a3 , R a1 , R a2′ and R a3′The halogen atom that may be contained in the ring may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.

[0512] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, and na=1. The group is preferably a tert-butoxycarbonyl group.

[0513] In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, and R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group, and R a3 is an adamantyl group, ma=0, and na=1.

[0514] Specific examples of the group (1) include the following: * represents a binding site.

[0515] [ka]

[0516] Specific examples of group (2) include the following groups: * represents a binding site.

[0517] [ka]

[0518] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. The use of a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition can improve the resolution of the resist pattern.

[0519] Examples of structural units derived from a (meth)acrylic monomer having group (1) include a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) is used, and more preferably at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more.

[0520] [ka]

[0521] [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—.

[0522] R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0523] R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0524] m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3. R a01 , R a4 , R a5 The halogen atom in the formula (I) may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.

[0525] R a01 , R a4 , R a5Examples of the alkyl group optionally having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group.

[0526] R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or —O—(CH2) k01 It is —CO—O— (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom.

[0527] R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above.

[0528] R a02 , R a03 , and R a04The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0529] R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group.

[0530] R a6 and R a7 The alkenyl group in the formula (I) is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group.

[0531] R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms.

[0532] In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less.

[0533] R a02 and R a03is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom.

[0534] R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom.

[0535] R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group which may have a halogen atom.

[0536] m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0537] n1' is preferably 0 or 1. Examples of the structural unit (a1-0) include structural units represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group, and structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14), and (a1-0-19) to (a1-0-24) are preferred.

[0538] [ka]

[0539] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among these, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are preferred. a4 A structural unit in which the methyl group corresponding to the formula (a1-1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred.

[0540] [ka]

[0541] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which the methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are substituted with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group.

[0542] [ka]

[0543] When the resin (A) or the like contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these structural units relative to all structural units in the resin (A) or the like is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content may be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content may be 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%.

[0544] When the resin (A) or the like contains the structural unit (a1-0), the content thereof, based on all structural units of the resin (A) or the like, can be 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, and still more preferably 35 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and still more preferably 60 mol% or less. Specifically, the content can be 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%.

[0545] When the resin (A) or the like contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these structural units, based on all structural units in the resin (A) or the like, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content can be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content can be 10 to 95 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, and even more preferably 20 to 75 mol%.

[0546] An example of the structural unit (a1) having the group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)").

[0547] [ka]

[0548] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0549] R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0550] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with

[0551] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-.

[0552] na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17 may be the same or different from each other.

[0553] mc represents an integer between 0 and 2. R a1 and R a17 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom.

[0554] R a1 and R a17Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0555] R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.

[0556] R a17 Examples of the alkoxyalkyl group in the formula (I) include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, even more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0557] Ra17 Examples of the alkoxyalkoxy group in include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and even more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0558] R a17 Examples of the alkylcarbonyl group in the formula (I) include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and even more preferably an acetyl group.

[0559] R a17 Examples of the alkylcarbonyloxy group in the formula (I) include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and even more preferably an acetyloxy group.

[0560] R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0561] A a11Examples of the alkanediyl group include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0562] R a18 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 When substituted with -, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the alkanediyl group.

[0563] A a11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 The groups substituted with - include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced with -O-), an amino group (a group in which -CH2- in a methyl group is replaced with -NRa18 -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR a18 -), peptide group (-CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18 -), alkanediyloxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-), an alkanediylamino group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -NR a18 These substituted groups include the same as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0564] Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino, ethylamino, propylamino, butylamino, pentylamino, hexylamino, and octylamino. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0565] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0566] For example, A a11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 Among them, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NR a18 - is preferred, where A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a1 A represents the bonding site with the carbon atom to which it is attached. a12 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a11 Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above.

[0567] A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0568] na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0569] mc is preferably 0 or 1. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which these groups are combined.

[0570] Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site):

[0571] [ka]

[0572] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. In particular, R a36 Examples of the group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these.

[0573] R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that are formed by bonding together with the -CO- to which they are bonded include the following groups: * represents a bonding site, and one of the groups is R a34 This is the binding site for

[0574] [ka]

[0575] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group.

[0576] R a36The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0577] -OC(R a34 )(R a35 )-OR a36 is eliminated upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group.

[0578] -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring (when mc is 0), A a11 In the case of a naphthalene ring (when mc is 1), A may be bonded to any of the o-position, m-position, or p-position relative to the bonding position of A. Among these, it is preferable that at least one of them is bonded to the o-position or p-position, and more preferably to the p-position. a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a11 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a11 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0579] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferred are structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4). a1 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20).

[0580] [ka]

[0581] When the resin (A) or the like contains the structural unit (a1-4), the content thereof, based on the total of all structural units in the resin (A) or the like, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and even more preferably 20 to 60 mol%.

[0582] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter, sometimes referred to as "structural unit (a1-5)").

[0583] [ka]

[0584] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0585] Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-.

[0586] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3. Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom, with a fluorine atom being preferred.

[0587] Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0588] In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L51 is preferably —O—.

[0589] L 52 and L 53 Among these, it is preferred that one is —O— and the other is —S—. s1 is preferably 1. s1' is preferably an integer of 0 to 2.

[0590] Z a1 is preferably a single bond or —CH2—CO—O—. Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among these, the structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred.

[0591] [ka]

[0592] When the resin (A) or the like contains the structural unit (a1-5), the content thereof, based on the total structural units of the resin (A) or the like, can be 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more. Also, the content can be 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, the content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%.

[0593] An example of the structural unit (a1) having the group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)").

[0594] [ka]

[0595] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0596] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0597] X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents the binding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0598] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] R a61 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Of these, a fluorine atom is preferred.

[0599] R a61 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0600] R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group.

[0601] R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic alicyclic hydrocarbon groups include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12.

[0602] Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0603] R a62 and R a63 Examples of the ring formed by bonding together include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents the bonding site with the oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12.

[0604] [ka]

[0605] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in the formula include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group.

[0606] L a61 and L a62 are each preferably independently a methylene group or an ethylene group. X a61 is preferably a single bond or —CO—O—*, and more preferably a single bond.

[0607] X a62is preferably a single bond or *-OL a61 -, and more preferably a single bond. Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group.

[0608] Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0609] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0610] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.

[0611] Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0612] Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0613] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0614] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0615] The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0616] Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group. Examples of the structural unit (a1-6) include structural units represented by formulas (a1-6-1) to (a1-6-44), preferably structural units represented by formulas (a1-6-1) to (a1-6-9), more preferably structural units represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and even more preferably structural units represented by formulas (a1-6-1) or (a1-6-2). a61 In the structural units shown below, the hydrogen atom corresponding to R is replaced by a methyl group or the like. a61 The structural unit (a1-6) also includes a structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom:

[0617] [ka]

[0618] When the resin (A) or the like contains the structural unit (a1-6), the content thereof, based on all structural units of the resin (A) or the like, can be 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0619] Further, examples of the structural unit (a1) include the following structural units.

[0620] [ka]

[0621] When the resin (A) or the like contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content of these structural units relative to the total structural units of the resin (A) or the like is preferably 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. The content may also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0622] Further, examples of the structural unit (a1) include the following structural units.

[0623] [ka]

[0624] When the resin (A) or the like contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content of these structural units relative to the total structural units of the resin (A) or the like is typically 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. The content may also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 60 mol%, more preferably 15 to 55 mol%, even more preferably 20 to 50 mol%, even more preferably 20 to 45 mol%, and particularly preferably 20 to 40 mol%.

[0625] <Structural unit(s)> The structural unit (s) is derived from a monomer (hereinafter sometimes referred to as "monomer (s)") that does not have an acid labile group. As the monomer from which the structural unit (s) is derived, a monomer that does not have an acid labile group known in the resist field can be used.

[0626] The structural unit (s) preferably has a hydroxyl group, a carboxyl group, or a lactone ring. The resist composition of the present invention may contain a resin containing a structural unit having a hydroxyl group or a carboxyl group but no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring but no acid labile group (hereinafter sometimes referred to as "structural unit (a3)"), thereby improving the resolution of the resist pattern and adhesion to the substrate. In addition to the structural units described above, structural units (s) may also include structural units having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), structural units having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), and structural units that decompose upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (a7)").

[0627] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, or a carboxy group.

[0628] [ka]

[0629] [In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0630] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with

[0631] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-.

[0632] L a22 represents a single bond or a chain hydrocarbon group of 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-.

[0633] na2 represents an integer of 1 to 5. R a2 Examples of the halogen atom in the formula include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom.

[0634] R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2.

[0635] R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A a21Examples of the alkanediyl group include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0636] R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The alkanediyl group contains -CH2-, -O-, -CO-, or -NR a28 When the alkanediyl is replaced by the alkanediyl group, the number of carbon atoms before the replacement is the number of carbon atoms of the alkanediyl.

[0637] A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 As described above, examples of the group substituted for include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediylamino group, etc. These substituted groups include the same as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0638] Among them, A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 Among them, *-CO-O- and *-CO-OA a22 -CO-O-, *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 A represents the bonding site with the carbon atom to which it is attached. a22 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a21 Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above.

[0639] A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0640] L a21 The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and may also be a group combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group).

[0641] L a21Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanpentyl group, and an alkanehexyl group.

[0642] Examples of the alkanediyl group include A a21 The same alkanediyl groups as those shown in the above are exemplified. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decantriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group.

[0643] Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group.

[0644] Examples of the alkanpentyl group include a methanepentyl group, an ethanepentyl group, a propanepentyl group, a butanepentyl group, a pentanepentyl group, and a hexanepentyl group.

[0645] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0646] L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in the above formula include the following alicyclic hydrocarbon groups: The binding site can be at any position.

[0647] [ka]

[0648] Examples include divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentyl group, and a cycloalkanehexyl group.

[0649] Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group.

[0650] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, still more preferably 6 to 12 carbon atoms, and particularly preferably 6 to 10 carbon atoms.

[0651] L a21 Examples of the aromatic hydrocarbon group in include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenetetrayl group, an arenetyl group, and an arenehexyl group.

[0652] Specific examples include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group.

[0653] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms, even more preferably 6 to 14 carbon atoms, still more preferably 6 to 12 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0654] Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is A a21 and L a22 may be bound to

[0655] The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO2-, -SO-, or -NR 11 Examples of the group substituted with - or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O- replaced by -SO-), alkylthio group (a group in which -CH2- at any position in the alkyl group is replaced by -S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in the alkyl group is replaced by -O-CO-), alkylsulfonyl group (a group in which -CH2- at any position in the alkyl group is replaced by -SO2-), alkylcarbonyl group (a group in which -CH2- at any position in the alkyl group is replaced by -CO-), alkylamino group (a group in which -CH2- at any position in the alkyl group is replaced by -NR 11-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group alkanediyl groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy groups (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), alkanediylsulfonyl groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), alkanediylthio groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), alkanediylamino groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -NR 11 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups have been replaced with a bonding site.

[0656] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0657] Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0658] Examples of the alkylamino group include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0659] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0660] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0661] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0662] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0663] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0664] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0665] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 17 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0666] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0667] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -CO-, -SO-, -NR 11 Examples of groups replaced with - or -SO2- include the following groups. Also included are groups in which -O- is replaced with -S- and -CO- is replaced with -SO2- among the groups shown below. The binding site can be at any position.

[0668] [ka]

[0669] The —CH2— contained in the combined group is not —O—, —S—, —CO—, —SO—, or —NR 11 Examples of groups substituted with - or -SO2- include the following groups: The binding site can be at any position.

[0670] [ka]

[0671] L a21 The hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—).

[0672] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21 The hydrocarbon group in the formula (I) may have a halogen atom as a substituent, thereby substantially having a substituent such as a haloalkyl group. Examples of the haloalkyl group include alkyl fluoride, alkyl chloride, alkyl bromide, and alkyl iodide, such as a chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, and perfluorobutyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0673] L a21 The hydrocarbon group of L a21can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0674] L a21 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, L a21 may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, or a methacryloyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, or alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group or alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and still more preferably 2 to 4.

[0675] The above groups also include the same groups as those exemplified in this specification. L a21The substituents that the hydrocarbon group in the formula (I) may have are preferably a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), still more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group.

[0676] Also, L a21 When the alkanediyl group is replaced by -O- or -CO-, etc., for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, * represents A a21 It is also preferred that the bond is

[0677] L a21 represents a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11- or -SO2-) or a group formed by combining a chain hydrocarbon group of 1 to 8 carbon atoms which may have a substituent with a cyclic hydrocarbon group of 3 to 20 carbon atoms which may have a substituent (wherein -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO-), and examples thereof include an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-) or a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms which may have a substituent with a cyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (provided that -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be substituted.) is more preferred.

[0678] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-dimethylpropane-1,3-diyl, pentane-2,4-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4.

[0679] L a22 may have one or more fluorine atoms. L a22 The -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and these substituted groups may be in the range of L, as long as the upper limit of the number of carbon atoms allows. a21 Examples include the same as those exemplified above.

[0680] na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 When R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units: a2 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2), similar to the structural unit below.

[0681] [ka]

[0682] When producing a resist pattern from the resist composition of the present invention, if a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet) is used as an exposure light source, the structural unit (a2) preferably has a phenolic hydroxy group, and more preferably the structural unit (a2-A) described below. Furthermore, if an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) preferably has an alcoholic hydroxy group, and more preferably the structural unit (a2-1) described below. The structural unit (a2) may contain one type alone or two or more types.

[0683] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, and examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)").

[0684] [ka]

[0685] [In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0686] R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0687] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with

[0688] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different.

[0689] na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2. R a2 and A a21 The groups include the same groups as those exemplified in formula (a2).

[0690] R a27 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, even more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0691] R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and still more preferably a methoxy group.

[0692] R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0693] R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0694] R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0695] R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0696] R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0697] nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0698] mc is preferably 0 or 1. -X a2-OH is a benzene ring (when mc is 0), A a21 In the case of a naphthalene ring (when mc is 1), A may be bonded to any of the o-position, m-position, or p-position relative to the bonding position of A. Among these, it is preferable that at least one of them is bonded to the m-position or p-position, and more preferably to the m-position. a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a21 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a21 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0699] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A Nos. 2010-204634 and 2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), where R in the structural unit (a2-A) a2 and a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group.

[0700] [ka]

[0701] [ka]

[0702] When the structural unit (a2-A) is contained in the resin (A) or the like, the content of the structural unit (a2-A) relative to all structural units is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more. It is also preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0703] The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., -CH2-C(-R a2 )- is the double bond CH2=C(-R a2 The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing a compound (a2-A') in the state of (a1-4). Alternatively, for example, the structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to thereby incorporate the structural unit into the resin (A). Alternatively, the structural unit (a2-A) can be polymerized using acetoxystyrene, followed by treatment with an alkali such as tetramethylammonium hydroxide, to thereby incorporate the structural unit into the resin (A).

[0704] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter may be referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter may be referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter may be referred to as "structural unit (a2-D)").

[0705] [ka]

[0706] [In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A).

[0707] L a25 is -O- or *-O-(CH2) k2 represents —CO—O—, and k2 represents an integer of 1 to 7. * represents the bonding site with —CO—. X a2 represents a single bond or -CO-.

[0708] R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other.

[0709] nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same or different from each other. L a25 is preferably -O-, -O-(CH2) f1 It is —CO—O— (wherein f1 represents an integer of 1 to 4), and more preferably —O—.

[0710] R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom.

[0711] R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0712] nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0713] nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and even more preferably 0 or 1. Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R in the following structural units: a2 In particular, structural units represented by any one of formulas (a2-B-1) to (a2-B-5) and formulas (a2-C-1) to (a2-C-9) are preferred.

[0714] [ka]

[0715] When the resin (A) or the like contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A) or the like. It may also be 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it may be 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0716] [ka]

[0717] [In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A).

[0718] R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom.

[0719] nD2 represents an integer of 1 to 5. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different, provided that 1≦nD2+nD22≦5. R a21 and R a22Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like.

[0720] R a21 and R a22 As the aryl group, a trifluoromethyl group is preferred. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group.

[0721] L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0722] nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1. Also preferably, nD2 is 1, and the group in parentheses is bonded to the p-position.

[0723] nD22 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, even more preferably 0 or 1, and even more preferably 0. The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)").

[0724] [ka]

[0725] [In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group.

[0726] A a21 is preferably a single bond. Examples of the structural unit (a2-D) include the structural units shown below.

[0727] [ka]

[0728] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulas (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural units represented by formula (a2-D-1) are even more preferred.

[0729] When the resin (A) or the like contains the structural unit (a2-D), its content relative to all structural units in the resin (A) or the like is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It is also preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0730] <Structural unit (a3)> The lactone ring contained in the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring with another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0731] The structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be contained alone, or two or more may be contained.

[0732] [ka]

[0733] [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or -O-(CH2) k3 It represents a group represented by —CO—O— (k3 represents an integer of 1 to 7).

[0734] L a7 -O-, *-OL a8 -O-, *-OLa8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-.

[0735] L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0736] X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms.

[0737] p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3.

[0738] w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same as or different from each other. R a21 , R a22 , R a23 and R a25Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group.

[0739] R a18 , R a19 , R a20 and R a24 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a18 , R a19 , R a20 and R a24 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, and preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0740] R a18 , R a19 , R a20 and R a24 Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0741] L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0742] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferably -O- or -O-(CH2) k3 In -CO-O-, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom.

[0743] R a18 ~R a21 is preferably a methyl group. R a22 and R a23 are each independently preferably a carboxy group, a cyano group, or a methyl group.

[0744] p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0745] R a25 is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH 2 —CO—O— or —O—C 2 H 4 —CO—O—.

[0746] w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'.

[0747] [ka]

[0748] (In the formula, R a24 , La7 has the same meaning as above.) Examples of the structural unit (a3) include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) include structural units represented by any of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural units, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom is preferred.

[0749] [ka]

[0750] When the resin (A) or the like contains the structural unit (a3), the total content thereof, based on all structural units in the resin (A), can be 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It can also be 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it can be 1 to 70 mol% or 5 to 70 mol%, preferably 1 to 65 mol% or 10 to 65 mol%, and even more preferably 1 to 60 mol% or 10 to 60 mol%.

[0751] The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). It is also preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, even more preferably 5 to 50 mol%, and even more preferably 10 to 50 mol%.

[0752] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below.

[0753] [ka]

[0754] [In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having 1 to 48 carbon atoms and containing a halogen atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.] R 42 Examples of the aliphatic hydrocarbon group represented by the formula (I) include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups.

[0755] Examples of the chain hydrocarbon group include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups.

[0756] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* indicates a bonding site):

[0757] [ka]

[0758] Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

[0759] Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0760] R 42 Examples of the halogen atom contained in the aliphatic hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 Examples of the aliphatic hydrocarbon group in which -CH- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. These substituted groups include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0761] The structural unit (a4) is R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 However, examples of the structural unit (a4) that is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter, may be referred to as "structural unit (a4-1)"), a structural unit represented by formula (a4-2) (hereinafter, may be referred to as "structural unit (a4-2)"), a structural unit represented by formula (a4-3) (hereinafter, may be referred to as "structural unit (a4-3)"), and a structural unit represented by formula (a4-A) (hereinafter, may be referred to as "structural unit (a4-A)").

[0762] The structural unit represented by formula (a4-1) is a structural unit shown below.

[0763] [ka]

[0764] [In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms.

[0765] L 42frepresents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom. L 41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0766] L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include a linear alkanediyl group having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom.

[0767] L 42fExamples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom.

[0768] L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0769] L 42fExamples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group.

[0770] L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0771] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group.

[0772] L 42f is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms. The structural unit (a4-1) includes the structural units shown below and R in the structural unit (a4-1) i...

Claims

1. A carboxylic acid generator containing a carboxylic acid salt represented by formula (I): 【Chemical 1】 [In formula (I), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2. m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R １ may be the same or different from each other. R １ represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m1 is 2, two R １ is bonded to S ＋ may form a ring containing -CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R １１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar ３ and an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group. R ６ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R ９ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m10 is 2 or 3, two R ９ is bonded to S ＋ The two R forming the ring may form a ring containing ９ is S ＋ and a single bond formed between two benzene rings connecting the two. A ３ represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Ar ３ represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. ９ At least one R ９ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring. X ０ represents a hydrocarbon group having 2 to 72 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ - may be replaced by .

2. At least one m3 is an integer of 1 or more, A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ The carboxylic acid generator according to claim 1 , wherein the carboxylic acid generator is a carboxylic acid generator having a carboxylic acid group bonded to a benzene ring.

3. X ０３ The carboxylic acid generator according to claim 2, wherein is —O— or —S—.

4. L ０３ is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH ２ 3. The carboxylic acid generator according to claim 2, wherein - may be replaced by -O- or -CO-.

5. 2. The carboxylic acid generator according to claim 1, wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-1) or formula (IC-2). 【Chemistry 2】 [In formula (IC-1) and formula (IC-2), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A, m3B, and m3C each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different. When m3B is 2 or more, the groups in the parentheses may be the same or different. When m3C is 2 or more, the groups in the parentheses may be the same or different. m9A, m9B and m9C each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R ９ may be the same or different from each other. When m9B is 2 or more, multiple R ９ may be the same or different from each other. When m9C is 2 or more, multiple R ９ may be the same or different from each other. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

6. 2. The carboxylic acid generator according to claim 1, wherein the cation of the carboxylic acid salt represented by formula (I) is a cation represented by formula (IC-3). 【Chemistry 3】 [In formula (IC-3), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A and m3B each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different. When m3B is 2 or more, the groups in the parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R ９ may be the same or different from each other. When m9B is 2 or more, multiple R ９ may be the same or different from each other. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms.

7. 2. The carboxylic acid generator according to claim 1, wherein the cation of the carboxylic acid salt represented by formula (I) is a cation represented by formula (IC-4). 【Chemistry 4】 [In formula (IC-4), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R ９ may be the same or different from each other. m3A and m9A each satisfy 1≦m3A+m9A≦5, and when m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

8. at least one m3 is 1; Ar ３ 2. The carboxylic acid generator according to claim 1, wherein is a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

9. X ０ is an open chain hydrocarbon group having 2 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, -CH contained in the chain hydrocarbon group and the alicyclic hydrocarbon group ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ The carboxylic acid generator according to claim 1, wherein the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

10. A resist composition comprising the carboxylic acid generator according to any one of claims 1 to 9 and an acid generator other than said carboxylic acid generator.

11. 11. The resist composition according to claim 10, wherein the acid generator comprises a salt represented by formula (B1). 【Chemistry 5】 [In formula (B1), L ｂ１ represents a (nb1+1)-valent hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. L ｂ２ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Y ｂ１ represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and —CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced by - or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z ＋ represents an organic cation.

12. Further, the composition contains a resin containing a structural unit having an acid labile group, The resist composition according to claim 10, wherein the structural unit having an acid labile group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). 【Chemistry 6】 [In formula (a1-0), formula (a1-1) and formula (a1-2), L ａ０１ , L ａ１ and L ａ２ are each independently —O— or *—O—(CH ２ ) ｋ１ represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R ａ０１ , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. The alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may contain a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. 【Chemistry 7】 [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and —CH ２ - represents -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R ａ３４ and R ａ３５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R ａ３６ represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａ３５ and R ａ３６ are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the —C—O— to which they are bonded, and the hydrocarbon group and —CH contained in the divalent hydrocarbon group ２ - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. 【Chemistry 8】 [In formula (a1-5), R ａ８ represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z ａ１ is a single bond or *-(CH ２ ) ｈ３ -CO-L ５４ -, h3 represents an integer of 1 to 4, * represents L ５１ represents the binding site with L ５１ , L ５２ , L ５３ and L ５４ each independently represents —O— or —S—. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] 【Chemistry 9】 [In formula (a1-6), R ａ６１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ６２ , R ａ６３ and R ａ６４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R ａ６２ and R ａ６３ are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X ａ６１ represents a single bond, —CO—O—*, or —CO—NR ａ６５ - represents *, * represents the bonding site with Ar, R ａ６５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ６２ is a single bond, *-O-L ａ６１ - or *-CO-O-L ａ６２ -, * represents a bonding site with Ar, L ａ６１ and L ａ６２ each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

13. 11. The resist composition according to claim 10, further comprising a resin containing a structural unit having a fluorine atom.

14. (1) a step of applying the resist composition according to claim 10 onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) a step of heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

15. A carboxylic acid salt represented by formula (I): 【Chemistry 10】 [In formula (I), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2. m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R １ may be the same or different from each other. R １ represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m1 is 2, two R １ is bonded to S ＋ may form a ring containing -CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R １１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar ３ and an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group. R ６ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R ９ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m10 is 2 or 3, two R ９ is bonded to S ＋ The two R forming the ring may form a ring containing ９ is S ＋ and a single bond formed between two benzene rings connecting the two. A ３ represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Ar ３ represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. ９ At least one R ９ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring. X ０ represents a hydrocarbon group having 2 to 72 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ - may be replaced by .

16. At least one m3 is an integer of 1 or more, A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ The carboxylate salt according to claim 15, wherein the benzene ring is bonded to the

17. X ０３ The carboxylate according to claim 16, wherein is —O— or —S—.

18. L ０３ is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH ２ The carboxylate according to claim 16, wherein - may be replaced by -O- or -CO-.

19. The carboxylate according to claim 15, wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-1) or formula (IC-2). 【Chemistry 11】 [In formula (IC-1) and formula (IC-2), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A, m3B, and m3C each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different. When m3B is 2 or more, the groups in the parentheses may be the same or different. When m3C is 2 or more, the groups in the parentheses may be the same or different. m9A, m9B and m9C each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R ９ may be the same or different from each other. When m9B is 2 or more, multiple R ９ may be the same or different from each other. When m9C is 2 or more, multiple R ９ may be the same or different from each other. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

20. The carboxylate according to claim 15, wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-3): 【Chemistry 12】 [In formula (IC-3), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A and m3B each independently represent an integer of 0 to 5. When m3A is 2 or more, the groups in the parentheses may be the same or different. When m3B is 2 or more, the groups in the parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5. When m9A is 2 or more, multiple R ９ may be the same or different from each other. When m9B is 2 or more, multiple R ９ may be the same or different from each other. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms.

21. The carboxylate according to claim 15, wherein the cation of the carboxylate represented by formula (I) is a cation represented by formula (IC-4). 【Chemistry 13】 [In formula (IC-4), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R ９ may be the same or different from each other. m3A and m9A each satisfy 1≦m3A+m9A≦5, and when m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

22. At least one m3 is an integer of 1 or more, Ar ３ The carboxylate according to claim 15, wherein is a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

23. X ０ is an open chain hydrocarbon group having 2 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group in which an aromatic hydrocarbon group having 6 to 36 carbon atoms and an open chain hydrocarbon group having 1 to 18 carbon atoms are combined, -CH contained in the chain hydrocarbon group and the alicyclic hydrocarbon group ２ - is -O-, -S-, -CO-, -SO-, -NR １１ -or-SO ２ The carboxylate according to claim 15, wherein each of the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

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