Integrated metrology system

Abstract

To provide a safe integrated metrology system.SOLUTION: An integrated metrology system for evaluating semiconductor wafers comprises: a main body that has a rear side and a front side, the front side defining a front border of the main body; a front interface; and a keyboard 200 that is movably coupled to the main body. The keyboard 200 is configured to move between multiple positions, the multiple positions including a first position and a second position. When positioned at the first position, the keyboard extends outside the front border by a first distance. When positioned at the second position, the keyboard does not extend outside an imaginary line that is located up to a second distance from the front border. The second distance is smaller than the first distance.SELECTED DRAWING: Figure 22

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 62 / 966,152, filed January 27, 2020, which is incorporated herein by reference.

[0002] The present invention relates to an integrated measurement system. [Background technology]

[0003] An integrated metrology system must be suitable for integration with other systems, such as semiconductor manufacturing systems.

[0004] The integration typically involves connecting the integrated metrology system to the manufacturing system to enable wafers to be exchanged between the integrated metrology system and the manufacturing system. Summary of the Invention [Problem to be solved by the invention]

[0005] Integrated metrology systems must meet various conflicting demands: they must be compact (eg, have a minimal footprint) yet easy to maintain and perform high-precision measurement processes.

[0006] Integrated metrology systems may contain powerful light sources that dissipate a lot of heat, which can distort the optical elements of the integrated metrology system.

[0007] There is an increasing demand to provide efficient integrated measurement systems. [Means for solving the problem]

[0008] An integrated metrology system for evaluating semiconductor wafers is provided, the metrology system including a body, which may have a rear surface and a front surface, the front surface defining a front border of the body, one or more removable support units, which may be removably coupled to the body and which support the body while extending outside the front border, and at least one auxiliary support unit, which may be configured to support the body in the absence of the one or more removable support units.

[0009] The integrated metrology system may include at least one auxiliary support unit that may be configured to support the body without extending outside the front boundary.

[0010] The at least one auxiliary support unit may be movable relative to the main body.

[0011] The at least one auxiliary support unit may be configured to move relative to the main body along a first direction, and the one or more detachable support units may be configured to move relative to the main body along a second direction different from the first direction.

[0012] The second direction may be a vertical direction and the first direction may be a horizontal direction.

[0013] The one or more detachable support units may include wheels and arms.

[0014] The body may include a support frame defining a support frame inner space, and may be shaped and dimensioned so that a rear portion of the arm moves within the frame inner space.

[0015] The integrated metrology system may include a fixation element configured to hold the arm in a fixed position when the arm is partially disposed within the support frame interior space.

[0016] The arm may include a cavity, and the fixation element may have an edge shaped and dimensioned to fit into the cavity.

[0017] The integrated metrology system may include at least one additional support unit disposed below the main body.

[0018] The at least one additional support unit may be closer to the rear surface of the main body than the detachable support unit.

[0019] The at least one additional support unit may have a single degree of freedom.

[0020] The one or more detachable support units may include a wheel and an arm, the wheel may be rotatable about a wheel axis, and the wheel axis may be rotatable relative to the arm.

[0021] The one or more detachable support units may include a wheel and an arm, the wheel may be rotatable about a wheel axis, the wheel axis may be connected to a wheel housing, and the wheel housing may be rotatable relative to the arm.

[0022] An integrated metrology system for evaluating semiconductor wafers is provided, the metrology system including a body, which may have a rear surface and a front surface, the front surface defining a front boundary of the body, a front interface, and a keyboard, which may be movably coupled to the body, the keyboard being configured to move between a plurality of positions, the plurality of positions may include a first position and a second position, when positioned at the first position the keyboard extends outside the front boundary by a first distance, and when positioned at the second position the keyboard does not extend outside an imaginary line (virtual line) located at a maximum second distance from the front boundary, the second distance being less (shorter) than the first distance.

[0023] In the integrated measurement system, the second position may be a folded position, and the first position may be an extended position.

[0024] The keyboard may be rotatably coupled to the main body.

[0025] The keyboard may be rotatably coupled to the main body via a shaft located near the bottom of the keyboard when in the second position.

[0026] The second position may be a vertical position and the first position may be a horizontal position.

[0027] The keyboard may be non-rotatably coupled to the main body.

[0028] When disposed in the second position, the keyboard does not extend outside the front boundary.

[0029] When disposed in the second position, the keyboard extends outside the front boundary by the second distance.

[0030] The integrated metrology system may include a rear interface that mechanically interfaces the integrated metrology system with other systems.

[0031] The integrated metrology system may include a rear interface that mechanically interfaces the integrated metrology system with an equipment front-end module of a semiconductor manufacturing system.

[0032] The front interface may include an axis, and the keyboard may be configured to rotate around the axis while moving between the plurality of positions.

[0033] The integrated metrology system may include a fixation element for holding the unit in the second position.

[0034] The integrated measurement system may include a recess, and at least a portion of the keyboard may be located within the recess when in the second position.

[0035] An integrated metrology system for evaluating semiconductor wafers is provided, the metrology system may include a body that may include an optical head and a light source, the light source may be located at a lower portion of the body, the optical head may be located at an upper portion of the body, and the optical head may be optically coupled to the light source via an optical path that may include an optical cable and an optical coupler.

[0036] The light source and the optical head may be located in different compartments of the body, and the optical head may be located above the light source.

[0037] The body may include a plurality of intermediate compartments positionable between the light source and the optical head.

[0038] The integrated metrology system may include a removable module that is removably connectable to the intermediate compartment.

[0039] The light source may be located within a perforated compartment.

[0040] The main body may include a main body frame and a plurality of panels that can be removably connected to the main body frame.

[0041] The integrated metering system may include air suction elements located at the bottom of the body.

[0042] The integrated measurement system may include an air suction element configured to exhaust air from at least a vicinity of the light source toward a space located below a lowest compartment of the main body.

[0043] The air suction elements may be fans.

[0044] The integrated metering system may include an air suction element configured to evacuate air from at least a majority of the body.

[0045] The integrated metrology system may include an air suction element configured to evacuate air from the light source but not from the optical head.

[0046] The light source may be located within a lowest compartment of the main body.

[0047] The optical head may be located below a high performance mechanical stage control of the integrated metrology system.

[0048] The integrated measurement system may include a plurality of compartments and a plurality of removable modules removably connectable to the plurality of compartments.

[0049] The plurality of removable modules may include a computer module.

[0050] The light source may be a laser-driven light source.

[0051] The power consumption of the light source may be greater than 50 watts, for example in the range of 70 to 140 watts.

[0052] The integrated measurement system may include multiple compartments, at least some of which may be sealed and at least some of which may not be sealed.

[0053] The integrated measurement system may include multiple compartments, at least one compartment may have a perforated bottom and at least one other compartment may have a non-perforated bottom.

[0054] In order to understand the invention and to see how it may be carried into effect, preferred embodiments will now be described, by way of non-limiting example only, with reference to the accompanying drawings, in which: [Brief explanation of the drawings]

[0055] [Figure 1] FIG. 1 is a perspective view of an example of an integrated metrology system and other systems. [Figure 2]FIG. 1 is a side view of an example of an integrated metrology system and other systems. [Figure 3] FIG. 1 is a perspective view of an example of an integrated metrology system and other systems. [Figure 4] FIG. 1 is a side view of an example of an integrated metrology system and other systems. [Figure 5] FIG. 1 is a top view of an example of an integrated metrology system and other systems. [Figure 6] FIG. 1 is a top view of an example of a portion of an integrated metrology system and other systems. [Figure 7] FIG. 1 is a top view of an example of an integrated metrology system and other systems. [Figure 8] FIG. 1 is a top view of an example of a portion of an integrated metrology system and other systems. [Figure 9] FIG. 1 is a perspective view of an example of an integrated metrology system and other systems. [Figure 10] FIG. 1 is a perspective view of an example of an integrated metrology system and other systems. [Figure 11] FIG. 1 is a side view of an example of an integrated metrology system and other systems. [Figure 12] FIG. 1 is a perspective view of an example of a portion of an integrated metrology system and a portion of another system. [Figure 13] FIG. 1 is a perspective view of an example of a portion of an integrated metrology system. [Figure 14] FIG. 1 is a rear view of an example of an integrated metrology system without some of its exterior panels. [Figure 15] FIG. 1 is a perspective view of an example of an integrated metrology system without some of its exterior panels. [Figure 16] FIG. 1 is a rear view of an example of a portion of an integrated metrology system without some of its exterior panels. [Figure 17] FIG. 1 is a perspective view of an example mechanical stage and chuck of an integrated metrology system. [Figure 18] FIG. 1 is a rear view of an example mechanical stage and chuck of an integrated metrology system. [Figure 19] FIG. 1 is a perspective view of an example mechanical stage and chuck of an integrated metrology system. [Figure 20] FIG. 1 is a perspective view of an example of an optical component of an integrated metrology system. [Figure 21] FIG. 1 is a perspective view of an example of a portion of an integrated metrology system without some of its exterior panels. [Figure 22] 1A-1C are schematic diagrams of the keyboard in different positions. [Figure 23] 1A-1C are schematic diagrams of the keyboard in different positions. DETAILED DESCRIPTION OF THE INVENTION

[0056] In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be understood by those skilled in the art that the invention may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail so as not to obscure the invention.

[0057] The subject matter regarded as the invention is particularly pointed out and distinctly claimed in the concluding portion of the specification, however, the invention, both as to organization and method of operation, together with its objects, features, and advantages, may best be understood by reference to the following detailed description read in conjunction with the accompanying drawings.

[0058] It will be understood that for simplicity and clarity of illustration, the elements shown in the figures have not necessarily been drawn to scale. For example, the size of some elements may be exaggerated relative to other elements for clarity. Furthermore, where considered appropriate, reference numerals may be repeated among the figures to indicate corresponding or analogous elements.

[0059] At least one illustrated embodiment of this invention is, in most cases, implemented using electronic components and circuits known to those skilled in the art, and therefore will not be described in more detail than is deemed necessary, as set forth above, for an understanding and appreciation of the basic concepts of this invention and so as not to obscure or obscure the teachings of this invention.

[0060] Any numbers or values exemplified below should be considered as non-limiting examples.

[0061] Any combination of any of the elements and / or devices and / or features of any of the systems illustrated in any of the figures may be provided.

[0062] Any combination of any of the elements and / or devices and / or features (features) of any of the systems illustrated herein may be provided.

[0063] Any combination of any subject matter appearing in any of the claims (e.g., claims as originally filed) may be provided.

[0064] Any one of the drawings may or may not be to scale.

[0065] FIG. 1 is a perspective view of an example of an integrated measurement system 100 and other systems 10, where the other systems include an equipment front-end module. FIG. 2 is a side view of the example of the integrated measurement system 100 and other systems 10. FIG. 3 is a perspective view of the example of the integrated measurement system 100 and other systems 10. FIG. 4 is a side view of the example of the integrated measurement system 100 and other systems 10. FIG. 5 is a top view of the example of the integrated measurement system 100 and other systems 10. FIG. 6 is a top view of an example of a portion of the integrated measurement system 100 and other systems 10. FIG. 7 is a top view of an example of the integrated measurement system 100 and other systems 10 and a so-called light curtain 142. FIG. 8 is a top view of an example of a portion of the integrated measurement system 100 and other systems 10. FIG. 9 is a perspective view of the example of the integrated measurement system 100 and other systems 10. FIG. 10 is a perspective view of the example of the integrated measurement system 100 and other systems 10. FIG. 11 is a side view of the example of the integrated measurement system 100 and other systems 10. FIG. 12 is a perspective view of an example of a portion of the integrated metrology system 100 and a portion of another system 10. FIG. 13 is a perspective view of an example of a portion of the integrated metrology system 100. FIG. 14 is a rear view of an example of the integrated metrology system 100 without a portion of its exterior panel. FIG. 15 is a perspective view of an example of the integrated metrology system 100 without a portion of its exterior panel. FIG. 16 is a rear view of an example of a portion of the integrated metrology system 100 without a portion of its exterior panel. FIG. 17 is a perspective view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG. 18 is a rear view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG. 19 is a perspective view of an example of a mechanical stage and chuck of the integrated metrology system 100. FIG. 20 is a perspective view of an example of the optical components of the integrated metrology system 100. FIG. 21 is a perspective view of an example of a portion of the integrated metrology system 100 without a portion of its exterior panel. FIGS. 22 and 23 are schematic diagrams of a keyboard in different positions.

[0066] 1 to 5 and 9 to 11, the integrated measurement system 100 is connected to another system 10 by an interface such as a rear interface. The rear interface can mechanically and detachably connect the integrated measurement system to the other system.

[0067] The integrated metrology system 100 has a front surface 114, a rear surface 112, and includes: a. Main body 110. The front of the main body defines a (virtual) front border 140 on the floor below the integrated metrology system 100. A safety border 142 can be defined (e.g., by a user of the integrated metrology system) to be further away (from the main body) than the front border 140. b. Display 201. c. Keyboard 200. d. A front interface 210 supporting a keyboard. e. A high performance mechanical stage controller 260 that provides high voltage control signals to the mechanical stage. f. Various panels including a first front panel 101, a second front panel 105, a side panel 103, and another side panel 106. The panels are detachable and can be detachably connected to a main body frame 111 of the main body 110. g. One or more detachable support units 130, each of which may include a wheel 132 and an arm 134. h. At least one auxiliary support unit 150, each of which may include a leg. i. At least one additional support unit 160, each of which may include an additional wheel 163.

[0068] The display 201, keyboard 200, front interface 210, first front panel 101, and second front panel 105 are disposed on the front surface 114 of the integrated measurement system.

[0069] Integrated measurement system with multiple support units A stable and compact integrated measurement system is provided.

[0070] It is found that during the transportation of the integrated measurement system, the integrated measurement system needs to have a large supporting base, which contributes to the stability of the integrated measurement system during the transportation of the integrated measurement system.

[0071] Once the integrated measurement system has been transported to a desired location, the large support base is no longer necessary, especially since the large support base unnecessarily increases the footprint of the integrated measurement system.

[0072] The provided integrated metrology system comprises: (a) a main body 110 having a rear surface and a front surface, the rear surface facing the other system and the front surface defining a front boundary 140 of the main body; (b) one or more removable support units 130 detachably coupled to the main body and supporting the main body while extending outside the front boundary; and (c) at least one auxiliary support unit 150 configured to support the main body in the absence of the one or more removable support units.

[0073] After the integrated metrology system 100 is installed (see, e.g., FIG. 9), the one or more removable support units 130 can be removed and the main body 110 can be supported by at least one auxiliary support unit 150. The at least one auxiliary support unit 150 does not extend outside the front boundary to the same extent as the one or more removable support units, and may not even extend outside the front boundary at all.

[0074] The support base may be defined by (a) at least one additional support unit 160 positioned below the main body, and either (b) one or more detachable support units 130 (if still connected to the main base) and (c) at least one auxiliary support unit 150 (if positioned to support the main body).

[0075] The distance between the at least one additional support unit 160 and the one or more removable support units 130 exceeds (exceeds) the distance between the at least one additional support unit 160 and the at least one auxiliary support unit 150 .

[0076] Each support unit of the at least one additional support unit, the one or more removable support units and the at least one auxiliary support unit may be movable or fixed relative to the floor on which the integrated measurement system is located.

[0077] At least one auxiliary support unit 150 is configured to move relative to the main body along a first direction (e.g., upward and downward) between a position (upper position) in which the at least one auxiliary support unit contacts the floor and another position in which the at least one auxiliary support unit does not contact the floor.

[0078] The one or more removable support units 130 are configured to move relative to the body along a second direction (eg, horizontally outside the body).

[0079] The first direction may be different from the second direction.

[0080] The one or more detachable support units 130 may be removed after the at least one auxiliary support unit 160 has moved to a lower position and is supporting the main body therein.

[0081] 12-13 show examples of various support units. There may be any number of support units of any type (detachable, auxiliary, and additional support units).

[0082] Each detachable support unit 130 includes a wheel 132 and an arm 134. The wheel 132 is illustrated as having two degrees of freedom.

[0083] Wheel 132 rotates about wheel axis 131, which is connected to the wheel housing and is rotatable (relative to the body) along further axis 135. In Figures 12 and 13, the wheel axis is horizontal and the further axis is vertical.

[0084] The arm 134 can be supported by a support frame 119 that defines a support frame inner space 113, and within that space the arm 134 can be moved, for example horizontally, towards and outside the main body.

[0085] In FIG. 12, the arm 134 is outside the support frame internal space 113, and in FIG.

[0086] For movement within the frame interior space, a rear portion of arm 134 is shaped and dimensioned to move within support frame interior space 113 .

[0087] The arm 134 can be secured to the support frame 119 by a securing element 117 configured to hold the arm in place when the arm is partially disposed within the frame interior space. The securing element 117 can be a pin that can be pushed or rotated into an opening (a threaded opening can be used) formed in the support frame, thereby pressing the arm against the other side of the support frame.

[0088] The arm 134 may include an arm's cavity 133 into which an edge of the fixation element 117 may be placed to fix the position of the arm.

[0089] Each additional support unit 160 may be disposed below the main body and may include an additional wheel 163 and an additional housing 167. The additional wheel 163 may rotate around an additional shaft 161 rotatably coupled to the additional housing 167.

[0090] The additional housing 167 can be fixed to the main body or rotatably connected to the main body by a further shaft (not shown), so that the additional wheel has two degrees of freedom.

[0091] Each additional support unit 160 may be closer to the rear surface of the main body than the detachable support unit 130. Any of the support units may be provided in any other position.

[0092] The auxiliary support unit 150 may be a leg, may include wheels, may be fixed to the body, or may be movable relative to the body. The movement (between the upper and lower positions) may be achieved by rotation, linearly, or non-linearly.

[0093] Movable keyboard A safety border (also called a "safety light border" or "light curtain") (shown in FIG. 7 as 142) can be defined by the user of the integrated metrology system 100. If any part of the integrated metrology system 100 exceeds the safety border 142, the user may not operate the integrated metrology system 100 (and / or further systems 10). One or more sensors may be provided to monitor the safety border, determine whether a keyboard or other component has crossed the safety border, and, if a crossing occurs, sound an alarm, stop the manufacturing process, etc. In FIG. 7, the safety border 142 is defined by a portion 143 of the frame of the other device.

[0094] The integrated measurement system 100 includes a keyboard that extends outside the body when in use.

[0095] Maintaining the keyboard open would either exceed the safety boundary or require the integrated measurement system 100 body to be made smaller so that the integrated measurement system 100 does not exceed the safety boundary even when the keyboard is open.

[0096] An integrated measurement system can be provided that may include: (a) a main body 110 having a rear surface and a front surface, the rear surface facing other systems and the front surface defining a front boundary 140 of the main body; (b) a front interface 210; and (c) a keyboard 200 movably coupled to the main body via the front interface 210.

[0097] The keyboard 200 is configured to move between a plurality of positions, the plurality of positions including a first position and a second position.

[0098] When placed in a first position (extended or open position), the keyboard extends a first distance outside the front boundary 140. The first distance may be approximately the width of the keyboard.

[0099] When in the second position (folded or closed position), the keyboard does not extend outside an imaginary line located at a maximum second distance from the front boundary, the second distance being less than the first distance. The imaginary line may be located on the front boundary 140 or may be located away from the front boundary 140.

[0100] In Figures 1-5 the keyboard is in the first position.

[0101] In Figures 7-11 the keyboard is in the second position.

[0102] Figures 22 and 23 show a situation where the keyboard is in a first position and a further situation where the keyboard is in a second position.

[0103] Figures 22 and 23 show a second position in which the keyboard still extends slightly from the front boundary and also show a recess 209 formed in the body into which the keyboard and front interface fit completely or partially when in the second position.

[0104] The keyboard (or rather the front interface) can be rotatably connected to the main body by means of, for example, a keyboard axis 207 .

[0105] The keyboard axis can be located near a top of the keyboard. Figure 22 shows the keyboard axis 207 located near the bottom of the keyboard.

[0106] The second position may be a vertical or near-vertical position (see FIG. 22) and the first position may be a horizontal position.

[0107] The keyboard may be non-rotatably connected to the main body.

[0108] A keyboard fixation element may be provided to hold the keyboard in the second position (by mechanical and / or electromagnetic means).

[0109] The keyboard may be replaced by another device that is movable between different positions, including an open position and a closed position.

[0110] Integrated heat rejection and maintainable measurement system The integrated measurement system 100 is connected to other systems (via rear interfaces). It may be desirable to perform maintenance work on the integrated measurement system 100 without separating it from the other systems.

[0111] The integrated metrology system 100 can include a body frame and multiple panels that protect the body. The panels are detachably connected to the body frame (e.g., via clips, screws, bolts, and nuts) and can be easily removed for maintenance. The body frame can include openings (such as opening 109 in FIG. 16) that allow easy access to various components of the body.

[0112] Furthermore, the integrated metrology system 100 may have a modular configuration to facilitate maintenance and / or upgrades of the integrated metrology system 100. The various components of the integrated metrology system 100 may be arranged as removable modules that are positioned within multiple compartments of the integrated metrology system 100.

[0113] The integrated metrology system 100 may include very powerful light sources that dissipate a significant amount of heat.

[0114] The light source is spaced away from the optical head to prevent the heat from deforming the optical components of the optical head and damaging or deforming other devices in the integrated measurement system 100. Additionally, the heat is transported (dissipated) to the outside of the body by one or more air suction elements, such as air vents.

[0115] An integrated metrology system 100 for evaluating semiconductor wafers can be provided, and the metrology system can include a body 110 that can include an optical head 230 and a light source 220 .

[0116] The light source 220 is located in the lower part of the body, and the optical head 230 is located in the upper part of the body.

[0117] The optical head 230 is optically coupled to the light source 220 via an optical path that includes an optical cable (shown as 208 in FIG. 14) and may include additional optical components.

[0118] 14-15 show the main body 110 as including multiple compartments, such as first through fourth compartments 211 through 214. The first compartment 211 is the lowest compartment and the fourth compartment 214 is the highest compartment.

[0119] The optical head 230 is located in the fourth compartment 214 .

[0120] A mechanical stage 280 and a chuck 281 are located within the third compartment 213 .

[0121] A computer module 270 is located within the second compartment 212 .

[0122] A light source 220 is located within the first compartment 211 .

[0123] As mentioned above, the light source 220 and the optical head 230 are located in different compartments of the main body, with the optical head 230 located above the light source 220. In the example shown in Figures 14 and 15, the second compartment 212 and the third compartment 213 are intermediate compartments located between the light source 220 and the optical head 230.

[0124] As shown in Figures 14 and 15, and particularly Figure 21, air from near the light source is evacuated (e.g., sucked) by one or more air suction elements 250 located below the light source 220. A perforated plate 290 (comprising openings 291) is located between the one or more air suction elements 250 and the light source 220, and the openings formed in the perforated plate 290 allow the one or more air suction elements 250 to suck air from the space above the one or more air suction elements 250. Further perforated plates are shown in Figure 15. There may be multiple perforated plates at the bottom of one or more compartments.

[0125] The air suction element 250 is located at the bottom of the body and may extend (partially) outside the body and into the space 102 located below the lowest compartment of the body.

[0126] The air suction element can further evacuate air from at least most of the body, for example through an opening formed in the compartment, and can suction air from the second compartment 212 and from other compartments that are not sealed.

[0127] 14-15 further show that the optical head 230 is located below (or even just below) the high performance mechanical stage controller 260 of the integrated metrology system.

[0128] The light source 220 may be a laser-driven light source.

[0129] The power consumption of the light source may be greater than 50 watts, for example in the range of 70 to 140 watts.

[0130] 17 and 18 show a mechanical stage 280 that supports a chuck 281 and moves the chuck in various directions (e.g., X, Y, and Z). First end effectors 301 and second end effectors 302 may also be provided. The first end effector 301 is positioned above the second end effector 302. The first and second end effectors may move in various manners, such as upward and downward, so that the first end effector 301 can receive a first wafer (from another system 10) while the second end effector can receive another wafer from the chuck support for use in another system.

[0131] Any arrangement of components to achieve the same functionality is effectively "associated" such that the desired functionality is achieved. Thus, any two components herein that are combined to achieve a particular functionality can be considered to be "associated" with each other such that the desired functionality is achieved, regardless of architecture or intermediate components. Likewise, any two components so associated can also be considered to be "operably connected" or "operably coupled" with each other to achieve the desired functionality.

[0132] Furthermore, those skilled in the art will understand that the boundaries between the operations described above are merely exemplary. Operations may be combined into a single operation, a single operation may be distributed among additional operations, and operations may be performed with at least partial overlap in timing. Moreover, alternative embodiments may include multiple instances of an operation, and the order of operations may be changed in various other embodiments.

[0133] Also, for example, in one embodiment, the illustrated examples may be implemented on a single integrated circuit or as circuits located within the same device, or the examples may be implemented as any number of separate integrated circuits or separate devices interconnected with each other in any suitable manner.

[0134] Also, for example, each embodiment, or portions thereof, may be implemented as a software or code representation of a physical circuit or a logical representation that can be converted into a physical circuit, for example in any suitable type of hardware description language.

[0135] However, other modifications, variations, and alternatives are also possible. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense.

[0136] In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps other than those stated in the claim. Furthermore, as used herein, the terms "a" or "an" without a numeral are defined as one or more than one. Moreover, the use of preface words such as "at least one" and "one or more" in the claims shall not be construed as implying that the introduction of another claim element with a preface word (the indefinite article "a" or "an") limits any particular claim containing the claim element so introduced to an invention containing only one such element, even if the same claim also contains the preface word "one or more" or "at least one" and a preface word (the indefinite article such as "a" or "an"). The same applies to the use of definite articles. Unless otherwise stated, terms such as "first" and "second" are used to distinguish arbitrarily between the elements described by such terms. These terms are therefore not intended to necessarily indicate a temporal or other priority of such elements. The mere fact that certain measures are recited in mutually different claims does not indicate that a combination of these measures cannot be used to advantage.

[0137] While certain features of the invention have been illustrated and described in this specification, many modifications, substitutions, changes, and equivalents will occur to those skilled in the art. It is therefore to be understood that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the invention.

[0138] The terms "including," "comprising," "having," "consisting," and "consisting essentially of" are used interchangeably. For example, any method may include at least the steps included in the figures and / or description, or may include only the steps included in the figures and / or description. [Explanation of symbols]

[0139] 10 Another system (other system) 100 Integrated Measurement System 101 First Front Panel 102 Space under the main body 103 Side Panel 104 Top Panel 105 Second Front Panel 106 Alternate Side Panel 109 Aperture 110 Main Unit 111 Main frame 112 Rear 113 Support frame internal space 114 Front 116 Rear Interface 117 Arm fixing element 119 Support Frame 130 Detachable Support Unit 131 Wheel Axis 132 wheels 133 Arm Cavity 134 Arm 135 Further Axis 137 Wheel Housing 140 Front boundary 142 Safety Boundary 143 Frame parts of other systems 150 Auxiliary Support Unit 151 Interface to auxiliary support unit 160 Additional Support Unit 161 Additional axis 163 Additional Wheels 167 Additional Housing 200 keyboards 201 Display 207 Keyboard Axis 280 Optical Cable 209 Recess 210 Front Interface Compartments 211-215 219 Plate 220 light source 230 Optical Head 240 Optical Cable 250 air suction element 270 Computer Module 280 Mechanical Stage 281 Zipper 290 Perforated plate 291 Aperture 292 Nitrogen Source 293 Rock 301 First End Effector 302 Second End Effector 310 Optical Coupler 312 Optical Input 314 Optical Output 316 Gas Input 318 Gas Output

Claims

1. 1. An integrated metrology system for evaluating semiconductor wafers, comprising: a main body having a rear surface and a front surface, the front surface defining a front boundary of the main body; a front interface; and a keyboard movably coupled to the main body, the keyboard configured to move between a plurality of positions, the plurality of positions including a first position and a second position, the keyboard extending outside the front boundary by a first distance when positioned at the first position, and the keyboard not extending outside an imaginary line located at a maximum second distance from the front boundary when positioned at the second position, the second distance being less than the first distance; Integrated measurement system.

2. 2. The integrated metrology system of claim 1, wherein said second position is a collapsed position and said first position is an extended position.

3. 2. The integrated metrology system of claim 1, wherein the keyboard is rotatably coupled to the body.

4. 4. The integrated measurement system of claim 3, wherein the keyboard is rotatably coupled to the main body via a shaft located near a bottom of the keyboard when the keyboard is in the second position.

5. 2. The integrated metrology system of claim 1, wherein said second position is a vertical position and said first position is a horizontal position.

6. 2. The integrated measurement system of claim 1, wherein the keyboard is non-rotatably coupled to the body.

7. 2. The integrated metrology system of claim 1, wherein when disposed in said second position, said keyboard does not extend outside said front boundary.

8. 2. The integrated metrology system of claim 1, wherein when disposed in said second position, said keyboard extends outside said front boundary by said second distance.

9. 10. The integrated metrology system of claim 1, further comprising a rear interface for mechanically coupling the integrated metrology system to another system.

10. 10. The integrated metrology system of claim 1, further comprising a rear interface for mechanically coupling said integrated metrology system to an equipment front-end module of a semiconductor manufacturing system.

11. 2. The integrated metrology system of claim 1, wherein the front interface comprises an axis, and the keyboard is configured to rotate about the axis while moving between the plurality of positions.

12. 10. The integrated metrology system of claim 1, further comprising a fixture element for holding said unit in said second position.

13. 2. The integrated metrology system of claim 1, further comprising a recess, wherein at least a portion of said keyboard is located within said recess when said system is in said second position.

14. 2. The integrated measurement system of claim 1, wherein the main body comprises an optical head and a light source, the light source being disposed in a lower portion of the main body, the optical head being disposed in an upper portion of the main body, and the optical head being optically connected to the light source via an optical path including an optical cable.

15. the body having a rear surface and a front surface, the front surface defining a front boundary of the body; 2. The integrated metrology system of claim 1, further comprising one or more removable support units removably coupled to the body and extending outside the front boundary to support the body, and at least one auxiliary support unit configured to support the body in the absence of the one or more removable support units.

16. 1. An integrated metrology system for evaluating semiconductor wafers, comprising: a body including an optical head and a light source; The light source is disposed in a lower portion of the body; The optical head is disposed in an upper portion of the main body, an integrated measurement system, wherein the optical head is optically coupled to the light source via an optical path including an optical cable.

17. 17. The integrated metrology system of claim 16, wherein the light source and the optical head are located in different compartments of the body, and the optical head is positioned above the light source.

18. 18. The integrated metrology system of claim 17, wherein the body comprises a plurality of intermediate compartments disposed between the light source and the optical head.

19. 20. The integrated metrology system of claim 18, further comprising removable modules removably coupled to the intermediate compartments.

20. 17. The integrated metrology system of claim 16, wherein the light source is disposed within a perforated compartment.

21. 17. The integrated metrology system of claim 16, wherein the body comprises a body frame and a plurality of panels removably coupled to the body frame.

22. 17. The integrated metrology system of claim 16, further comprising an air suction element disposed at a bottom of the body.

23. 17. The integrated metrology system of claim 16, further comprising an air suction element configured to evacuate air from at least near the light source toward a space below a lowest compartment of the body.

24. 24. The integrated metrology system of claim 23, wherein the air suction element is a fan.

25. 17. The integrated metrology system of claim 16, further comprising an air suction element configured to evacuate air from at least a majority of the body.

26. 17. The integrated metrology system of claim 16, further comprising an air suction element configured to evacuate air from the light source but not from the optical head.

27. 17. The integrated metrology system of claim 16, wherein the light source is located in a lowest compartment of the body.

28. 17. The integrated metrology system of claim 16, wherein the optical head is located below a high performance mechanical stage control of the integrated metrology system.

29. 17. The integrated metrology system of claim 16, comprising a plurality of compartments and a plurality of removable modules removably coupled to the plurality of compartments.

30. 30. The integrated metrology system of claim 29, wherein the plurality of removable modules includes a computer module.

31. 17. The integrated metrology system of claim 16, wherein the light source is a laser-driven light source.

32. 17. The integrated metrology system of claim 16, wherein the light source has a power consumption of greater than 50 watts.

33. 17. The integrated metrology system of claim 16, comprising a plurality of compartments, at least some of the compartments being sealed and at least some of the other compartments being unsealed.

34. 17. The integrated metrology system of claim 16, comprising a plurality of compartments, at least one compartment having a perforated bottom and at least one other compartment having a non-perforated bottom.

35. 17. The integrated metrology system of claim 16, further comprising a keyboard movably coupled to the main body, the keyboard configured to move between a plurality of positions, the plurality of positions including a first position and a second position, wherein when positioned in the first position, the keyboard extends outside the front boundary by a first distance, and when positioned in the second position, the keyboard does not extend outside an imaginary line located at a maximum second distance from the front boundary, the second distance being less than the first distance.

36. 17. The integrated metrology system of claim 16, wherein the second position is a collapsed position and the first position is an extended position.

37. the body having a rear surface and a front surface, the front surface defining a front boundary of the body; 17. The integrated metrology system of claim 16, further comprising one or more removable support units removably coupled to the body and extending outside the front boundary to support the body, and at least one auxiliary support unit configured to support the body in the absence of the one or more removable support units.

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