Dressing method

Abstract

To provide a dressing method of a blade side face which can more reduce a load acting on a cutting blade as compared with before.SOLUTION: The dressing method includes at least: a first positioning step 1002 of positioning at a position where one outer peripheral side face of a dressing tool comes in contact with a first side face of a cutting blade; a first dressing step 1003 of dressing by relatively moving the cutting blade and the dressing tool to make the first side face of the cutting blade come in contact with the one outer peripheral side face of the dressing tool; a second positioning step 1004 of positioning at a position where the other outer peripheral side face of the dressing tool comes in contact with a second side face of the cutting blade; and a second dressing step 1005 of dressing by relatively moving the cutting blade and the dressing tool to make the second side face of the cutting blade come in contact with the other outer peripheral side face of the dressing tool.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a dressing method. [Background technology]

[0002] Silicon wafers with multiple IC (Integrated Circuit) and LSI (Large Scale Integration) devices formed on their front surface are ground to a predetermined thickness on their back surface, and then cut into individual devices by a cutting machine for use in electrical devices such as mobile phones and personal computers. Package devices such as CSP (Chip Size Package) and QFN (Quad Flat Non-leaded package) and ceramic capacitors (hereinafter simply referred to as workpieces) are also cut into individual devices by a cutting machine for use in electrical devices.

[0003] In the process of dividing the workpiece into individual devices, a cutting blade is attached to a cutting device and the workpiece is divided into individual devices by cutting. The cutting blade is selected from various cutting blades, such as electroformed blades made of nickel-plated diamond abrasive grains, resin blades made of resin- or metal-bonded diamond abrasive grains, and metal blades, depending on the characteristics of the workpiece.

[0004] Here, after the cutting blade is attached to the cutting device, a dressing process is carried out using a dressing tool to cut the cutting blade into the dressing tool in order to make the cutting blade perfectly round and to protrude (sharpen) the abrasive grains before actual processing (see, for example, Patent Document 1).

[0005] The normal dressing process involves cutting the tip of the cutting blade 0.5 mm into a 1 mm thick dressing tool, so the side of the cutting blade is dressed in the area up to 0.5 mm from the tip. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-049120 Summary of the Invention [Problem to be solved by the invention]

[0007] However, in recent years, the structure of workpieces has become more complex, and dressing (sharpening) may be required in an area 0.5 mm or more from the tip of the blade. In this case, performing the dressing process using conventional methods requires the cutting blade to cut deeply into a thick dressing tool. However, cutting the cutting blade deeply into the dressing tool can increase the load on the cutting blade depending on the processing conditions, which can lead to damage to the cutting blade.

[0008] The present invention has been made in view of the above problems, and its object is to provide a method for dressing the side surface of a blade that can reduce the load on the cutting blade compared to conventional methods. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems and achieve the object, the dressing method of the present invention is a dressing method for dressing the first side and the second side of a cutting blade having a circular cutting edge and having a first side and a second side by using a rectangular dressing tool, the dressing method including: a holding step for holding the dressing tool on a chuck table of a cutting device; a first positioning step for positioning one outer peripheral side of the dressing tool at a position where it comes into contact with the first side or the second side of the cutting blade; and a step for moving the cutting blade and the dressing tool relatively to dress the first side or the second side of the cutting blade. The dressing tool comprises at least a first dressing step of dressing the first or second side of the cutting blade by contacting it with one of the outer peripheral side surfaces of a dressing tool; a second positioning step of positioning the dressing tool at a position where the other outer peripheral side surface of the dressing tool contacts the second or first side surface of the cutting blade; and a second dressing step of dressing the second or first side surface of the cutting blade by moving the cutting blade and the dressing tool relatively to each other and contacting the second or first side surface of the cutting blade with the other outer peripheral side surface of the dressing tool.

[0010] In order to solve the above-mentioned problems and achieve the object, the dressing method of the present invention is a dressing method for dressing the first side and the second side of a cutting blade having a circular cutting edge and having a first side and a second side by using a rectangular dressing tool, the dressing tool having a groove formed in advance that is wider than the thickness of the cutting blade, the method comprising: a holding step for holding the dressing tool on a chuck table of a cutting device; a first positioning step for positioning the dressing tool at a position where one inner wall surface of the groove contacts the first side or the second side of the cutting blade; a first dressing step of dressing the first or second side of the cutting blade by moving the dressing tool and the cutting blade relative to each other and bringing the first or second side of the cutting blade into contact with one of the inner wall surfaces of the groove; a second positioning step of positioning the cutting blade at a position where the second or first side of the cutting blade comes into contact with the other inner wall surface of the groove; and a second dressing step of dressing the second or first side of the cutting blade by moving the cutting blade and the dressing tool relative to each other and bringing the second or first side of the cutting blade into contact with the other inner wall surface of the groove. [Effects of the Invention]

[0011] The present invention dresses the first or second side of the cutting blade by rubbing the outer peripheral side of the dressing tool against the first or second side of the cutting blade along the surface direction, thereby reducing the load on the cutting blade compared to conventional methods, even when dressing of the blade side is required in an area 0.5 mm or more from the tip of the blade. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a flowchart showing the procedure of the dressing method according to the first embodiment. [Figure 2] FIG. 2 is a perspective view showing an example of the configuration of a cutting device that performs the dressing method according to the first embodiment. [Figure 3] FIG. 3 is a perspective view illustrating the holding step shown in FIG. [Figure 4] FIG. 4 is a perspective view illustrating the first positioning step and the first dressing step shown in FIG. [Figure 5] FIG. 5 is a cross-sectional view illustrating the first positioning step and the first dressing step shown in FIG. [Figure 6] FIG. 6 is a perspective view illustrating the second positioning step and the second dressing step shown in FIG. [Figure 7] FIG. 7 is a cross-sectional view illustrating the second positioning step and the second dressing step shown in FIG. [Figure 8] FIG. 8 is a perspective view illustrating the first positioning step, the first dressing step, the second positioning step, and the second dressing step of the dressing method according to the second embodiment. [Figure 9] FIG. 9 is a cross-sectional view illustrating the first positioning step and the first dressing step of the dressing method according to the second embodiment. [Figure 10] FIG. 10 is a cross-sectional view illustrating the second positioning step and the second dressing step of the dressing method according to the second embodiment. [Figure 11] FIG. 11 is a perspective view showing an example of the configuration of a cutting device that performs the dressing method according to the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0014] [Embodiment 1] A dressing method according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a flowchart showing the processing steps of the dressing method according to the first embodiment. As shown in FIG. 1, the dressing method according to the first embodiment includes a holding step 1001, a first positioning step 1002, a first dressing step 1003, a second positioning step 1004, and a second dressing step 1005. The dressing method according to the first embodiment is a dressing method for dressing a first side surface 26 (see FIGS. 5 and 7) and a second side surface 27 (see FIGS. 5 and 7) of a cutting blade 21 (see FIG. 2, etc.) having a circular cutting edge 24 (see FIGS. 5 and 7) described below and having a first side surface 26 (see FIGS. 5 and 7) and a second side surface 27 (see FIGS. 5 and 7) by using a rectangular dressing tool 200 (see FIG. 2, etc.) described below.

[0015] Fig. 2 is a perspective view showing a configuration example of a cutting device 1 that performs the dressing method according to embodiment 1. As shown in Fig. 2, the cutting device 1 that performs the dressing method according to embodiment 1 includes a chuck table 10, a cutting unit 20, an X-axis direction moving unit 31, a Y-axis direction moving unit 32, a Z-axis direction moving unit 33, and a control unit 40.

[0016] The cutting device 1 is a device that cuts a workpiece 100 shown in FIG. 2 using a cutting blade 21 of a cutting unit 20 (described later). The workpiece 100, which is the cutting target of the cutting device 1, is, for example, a disk-shaped wafer such as a semiconductor device wafer or an optical device wafer, made of a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide, as shown in FIG. 2. The workpiece 100 has a plurality of planned division lines formed in a lattice pattern on a flat surface 101, and a plurality of devices, such as integrated circuits (ICs) and large-scale integrated circuits (LSIs), are formed in the areas defined by the planned division lines. As shown in FIG. 2, the workpiece 100 may have a support tape 105 attached to a back surface 104 on the back side of the front surface 101, and an annular frame 106 attached to the outer edge of the support tape 105. That is, the workpiece 100 may be supported and fixed to an opening in the annular frame 106 via the support tape 105. Furthermore, the workpiece 100 is not limited to a wafer, but may also be a circular package substrate having multiple devices sealed with resin, such as a CSP (Chip Size Package) or a QFN (Quad Flat Non-leaded package), a ceramic plate, or a glass plate.

[0017] The cutting device 1 uses a dressing tool 200 shown in Fig. 2 to dress the cutting blade 21 for the purpose of making the cutting blade 21 perfectly round and protruding (sharpening) the abrasive grains. The dressing tool 200 is used for dressing the cutting blade 21 by being cut by the cutting blade 21 or by rubbing against the cutting blade 21, thereby removing the metal plating or bonding material covering the abrasive grains of the cutting blade 21 and causing the abrasive grains to protrude, thereby sharpening the cutting blade 21, i.e., improving the processing quality of the cutting blade 21. The dressing tool 200 is formed from a bonding material in which abrasive grains, such as white alundum or green carbon, whose abrasive grain size is smaller than that of the cutting edge 24 of the cutting blade 21, are bonded with a resin or the like, and is appropriately selected and used depending on the characteristics of the cutting edge 24 of the cutting blade 21.

[0018] The dressing tool 200 for dressing the cutting blade 21 in the cutting device 1 is formed to extend in at least one direction, has a pair of parallel outer peripheral side surfaces 202 that extend linearly in a plan view, and is formed in a flat plate shape that is thicker than a desired length 29 (see FIG. 5 ) described below. In the first embodiment, the dressing tool 200 is formed in a rectangular flat plate shape in a plan view, for example, as shown in FIG. 2 , and has two pairs of parallel outer peripheral side surfaces 202, 203 that extend linearly in a plan view. The outer peripheral side surfaces 202, 203 are both parallel to the thickness direction of the dressing tool 200 and are formed on flat surfaces. In this specification, "parallel" not only refers to perfectly accurate parallelism, but also includes cases where the parallelism is not perfectly accurate due to dimensional errors, design errors, etc., and cases where the parallelism is slightly deviated from perfectly accurate parallelism within a predetermined error range, that is, so-called "approximately parallel."

[0019] Here, when distinguishing between the pair of outer peripheral side surfaces 202, "-1" and "-2" are added after the reference numerals, respectively, to indicate one outer peripheral side surface 202-1 and the other outer peripheral side surface 202-2. When distinguishing between the pair of outer peripheral side surfaces 203, "-1" and "-2" are added after the reference numerals, respectively, to indicate one outer peripheral side surface 203-1 and the other outer peripheral side surface 203-2.

[0020] 2, the dressing tool 200 may have a support tape 205 attached to a back surface 204 behind the front surface 201, and an annular frame 206 attached to the outer edge of the support tape 205. That is, the dressing tool 200 may be supported and fixed to the opening of the annular frame 206 via the support tape 205.

[0021] As shown in FIG. 2, the chuck table 10 includes a disk-shaped frame body with a recess and a disk-shaped suction portion fitted into the recess. The suction portion of the chuck table 10 is formed of porous ceramic or the like with numerous porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the chuck table 10 is a holding surface 11 on which a workpiece 100 or a dressing tool 200 is placed. The holding surface 11 suction-holds the placed workpiece 100 or dressing tool 200 by negative pressure introduced from the vacuum suction source. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are parallel to the horizontal XY plane. The chuck table 10 is movable along the X-axis direction, which is parallel to the horizontal direction, by an X-axis direction moving unit 31. The chuck table 10 is provided with a rotary drive source (not shown) below the frame body and the suction portion, and is configured to be freely rotatable (rotatable) around the central axis of the holding surface 11, which is parallel to the Z-axis direction that passes through the center of the holding surface 11 and is parallel to the vertical direction, by the rotary drive source.

[0022] As shown in Fig. 2, the cutting unit 20 has a cutting blade 21 and a spindle 22. The cutting blade 21 has a circular cutting edge 24 (see Figs. 5 and 7) formed in an annular shape with a predetermined thickness 25 (see Figs. 5 and 7), and has a first side surface 26 (see Figs. 5 and 7) and a second side surface 27 (see Figs. 5 and 7) that are parallel to each other and are opposite each other. In the first embodiment, the cutting edge 24 of the cutting blade 21 is, for example, an electroformed blade in which abrasive grains such as diamond or cubic boron nitride (CBN) are solidified with a metal plating such as nickel plating, or a resin blade or metal-bonded blade in which abrasive grains such as diamond or CBN are solidified with a bond material (binding material) such as a resin bond or a metal bond, and is appropriately selected and used depending on the characteristics of the workpiece 100. The cutting blade 21 may be a so-called hub blade in which an annular cutting edge 24 is fixed to the outer periphery of an annular base, or a so-called hubless blade that is essentially composed of only the annular cutting edge 24 .

[0023] The cutting edge 24 of the cutting blade 21 is formed in a shape in which at least the first side surface 26 and the second side surface 27 are both flat and parallel to each other. In the first embodiment, the cutting edge 24 of the cutting blade 21 is formed in a flat shape in which, for example, the cross section along the radial direction of the cutting edge 24 is rectangular in the entire circumferential direction of the cutting edge 24, i.e., the outer peripheral end surface 28 (see FIGS. 5 and 7) is flat, the first side surface 26 and the second side surface 27 are both flat and parallel to each other, and both edges formed between the outer peripheral end surface 28 and the first side surface 26 and the second side surface 27 are both nearly right angles. Note that the cutting edge 24 of the cutting blade 21 is not limited to a flat shape in the present invention, and the portion (tip portion) of the cutting edge 24 closer to the outer peripheral end than the first side surface 26 and the second side surface 27 may be formed in any shape suitable for forming a cutting groove of a desired shape (for example, the cross section along the radial direction of the cutting edge 24 is V-shaped, U-shaped, etc.).

[0024] The cutting blade 21 is attached to the tip of the spindle 22 and is rotated by the spindle 22, which serves as the rotation axis, to cut the workpiece 100 held on the chuck table 10. The cutting blade 21 is also attached to the tip of the spindle 22 and is rotated by the spindle 22, which serves as the rotation axis, to be dressed by a dressing tool 200 held on the chuck table 10.

[0025] The spindle 22 is provided such that its rotation axis direction is parallel to the horizontal direction and parallel to the Y-axis direction, which is perpendicular to the X-axis direction. That is, the spindle 22 is provided rotatably about an axis parallel to the Y-axis direction, and is rotated about the axis by a motor (not shown) connected to the spindle 22. The spindle 22 supports the cutting blade 21 attached to the tip of the spindle 22 so that the cutting blade 21 is rotatable about an axis parallel to the Y-axis direction. When the cutting blade 21 is attached to the tip of the spindle 22, the first side surface 26 and the second side surface 27 of the cutting blade 21 are perpendicular to the Y-axis direction, which is the rotation axis direction of the spindle 22, i.e., parallel to the XZ plane.

[0026] The spindle 22 of the cutting unit 20 is provided so as to be movable in the Y-axis direction and the Z-axis direction by a Y-axis direction moving unit 32 and a Z-axis direction moving unit 33, respectively. In the first embodiment, as shown in FIG. 2, the cutting device 1 is provided with two sets of cutting units 20, that is, a two-spindle dicer, a so-called facing dual type cutting device (processing device).

[0027] The X-axis direction moving unit 31 moves the chuck table 10 along the X-axis direction relative to the cutting unit 20. The Y-axis direction moving unit 32 and the Z-axis direction moving unit 33 move the cutting unit 20 along the Y-axis direction and the Z-axis direction, respectively, relative to the chuck table 10.

[0028] In the first embodiment, the X-axis direction moving unit 31, the Y-axis direction moving unit 32, and the Z-axis direction moving unit 33 are all known ball screw mechanisms having a motor, a ball screw, and a guide. The X-axis direction moving unit 31, the Y-axis direction moving unit 32, and the Z-axis direction moving unit 33 each include an encoder that reads the rotational position of the motor, and detects the relative positions of the chuck table 10 and the cutting unit 20 in the X-axis direction, the Y-axis direction, and the Z-axis direction based on the rotational position of the motor read by the encoder, and outputs the detected relative positions to the control unit 40. Here, the relative positions in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined using an apparatus coordinate system provided in the cutting apparatus 1. The X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33 are not limited to a configuration in which the relative positions of the chuck table 10 and the cutting unit 20 are detected by an encoder, but may also be configured by linear scales parallel to the X-axis, Y-axis and Z-axis directions, respectively, and reading heads that are movable in the X-axis, Y-axis and Z-axis directions by the X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33, respectively, and that read the graduations of the linear scales.

[0029] The cutting unit 20 rotates the cutting blade 21 attached to the tip of the spindle 22 around an axis parallel to the Y-axis direction by the rotational movement of the spindle 22, while moving the cutting blade 21 along the X-axis direction relative to the workpiece 100 on the chuck table 10 using the X-axis direction moving unit 31, thereby cutting the workpiece 100 along the planned dividing line with the cutting blade 21 to form a cutting groove (machined groove), thereby dividing the workpiece 100 along the planned dividing line.

[0030] The control unit 40 controls the operation of various components of the cutting device 1, causing the cutting device 1 to perform various processes such as cutting the workpiece 100 and dressing the cutting blade 21, including the steps of the dressing method according to the first embodiment. In the first embodiment, the control unit 40 includes a computer system. The computer system included in the control unit 40 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as a ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 40 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 40, and outputs control signals for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the control unit 40.

[0031] Next, this specification will explain a dressing method according to embodiment 1 with reference to the drawings. FIG. 3 is a perspective view illustrating the holding step 1001 shown in FIG. 1. FIGS. 4 and 5 are a perspective view and a cross-sectional view, respectively, illustrating the first positioning step 1002 and the first dressing step 1003 shown in FIG. 1. FIGS. 6 and 7 are a perspective view and a cross-sectional view, respectively, illustrating the second positioning step 1004 and the second dressing step 1005 shown in FIG. 1. Note that in FIGS. 5 and 7, the support tape 205 and the annular frame 206 are omitted, as they do not have a significant impact on the explanation of each step of the dressing method according to embodiment 1.

[0032] In the dressing method according to the first embodiment, in a holding step 1001, as shown in FIG. 3, the dressing tool 200 is held on the chuck table 10 of the cutting device 1, and in a first positioning step 1002 and a first dressing step 1003, as shown in FIGS. 4 and 5, one outer peripheral side surface 202-1 of the dressing tool 200 on the chuck table 10 is positioned to face one side surface (the first side surface 26 or the second side surface 27) of the cutting blade 21 that faces in the opposite direction to the one outer peripheral side surface 202-1. 6 and 7 , in a second positioning step 1004 and a second dressing step 1005, the other side (the second side 27 or the first side 26) of the first side 26 and the second side 27 of the cutting blade 21 that is oriented in the opposite direction to the other outer peripheral side 202-2 is dressed with the other outer peripheral side 202-2 of the dressing tool 200 on the chuck table 10, thereby dressing both the first side 26 and the second side 27 of the cutting blade 21. Note that the present invention is not limited to this, and the first side 26 and the second side 27 of the cutting blade 21 may be dressed with one outer peripheral side 203-1 and the other outer peripheral side 203-2 of the dressing tool 200, respectively, instead of the one outer peripheral side 202-1 and the other outer peripheral side 202-2.

[0033] As described above, in the dressing method according to the first embodiment, the first positioning step 1002 and the first dressing step 1003 form one set, and the second positioning step 1004 and the second dressing step 1005 form another set, and either set may be performed first or either set may be performed last. In the first embodiment, a form is described in which the set of the first positioning step 1002 and the first dressing step 1003 is performed first, and the set of the second positioning step 1004 and the second dressing step 1005 is performed later, but the present invention is not limited to this, and the set of the second positioning step 1004 and the second dressing step 1005 may be performed first, and the set of the first positioning step 1002 and the first dressing step 1003 may be performed later.

[0034] In addition, in the first embodiment, specifically, a form will be described in which, in the first positioning step 1002 and the first dressing step 1003, one outer peripheral side surface 202-1 dresses the first side surface 26 facing in the opposite direction to the one outer peripheral side surface 202-1, and, in the second positioning step 1004 and the second dressing step 1005, the other outer peripheral side surface 202-2 dresses the second side surface 27 facing in the opposite direction to the other outer peripheral side surface 202-2. However, the present invention is not limited to this, and the first In the positioning step 1002 and the first dressing step 1003, one of the outer peripheral sides 202-1 may dress the second side 27 facing in the opposite direction to the one outer peripheral side 202-1, and in the second positioning step 1004 and the second dressing step 1005, the other outer peripheral side 202-2 may dress the first side 26 facing in the opposite direction to the other outer peripheral side 202-2.In the following description, where appropriate, this latter case will be indicated in parentheses after the first case, with "(or ~)".

[0035] Before the start of the dressing method according to the first embodiment, or before the start of the dressing method according to the first embodiment and at least before the first positioning step 1002, the cutting blade 21 to be dressed is attached to the tip of the spindle 22. When the cutting blade 21 to be dressed is attached to the tip of the spindle 22, as shown in Figures 4 to 7, the first side surface 26 and the second side surface 27 of the cutting blade 21 are both oriented perpendicular to the Y-axis direction, which is the rotational axis direction of the spindle 22 to which the cutting blade 21 is attached, i.e., parallel to the XZ plane.

[0036] In addition, in embodiment 1, a form is described in which the cutting blade 21 to be dressed is attached to the tip of the spindle 22 so that the first side 26 of the cutting blade 21 faces the tip side (-Y direction side) of the spindle 22 to which the cutting blade 21 is attached, and the second side 27 of the cutting blade 21 faces the base side side (+Y direction side) of the spindle 22 to which the cutting blade 21 is attached; however, the present invention is not limited to this, and the cutting blade 21 may be attached to the tip of the spindle 22 so that the first side 26 faces the base side side (+Y direction side) of the spindle 22 to which the cutting blade 21 is attached, and the second side 27 faces the tip side side (-Y direction side) of the spindle 22 to which the cutting blade 21 is attached, and in the following description, the latter case will be indicated in parentheses as "(or ~)" after the first case as appropriate.

[0037] 3, the holding step 1001 is a step of holding the dressing tool 200 on the chuck table 10 of the cutting device 1. In the holding step 1001, as shown in FIG. 3, the dressing tool 200 supported and fixed to the opening of the annular frame 206 via the support tape 205 is transported and placed on the chuck table 10 of the cutting device 1 by a transport unit (not shown), and the dressing tool 200 placed on the chuck table 10 is suction-held by the holding surface 11 of the chuck table 10 via the support tape 205.

[0038] The first positioning step 1002 is a step of positioning one outer peripheral side surface 202-1 of the dressing tool 200 and the first side surface 26 (or second side surface 27) of the cutting blade 21 at a position where one outer peripheral side surface 202-1 of the dressing tool 200 held by suction on the chuck table 10 comes into contact with the first side surface 26 (or second side surface 27) of the cutting blade 21, as shown in Figures 4 and 5.

[0039] In the first positioning step 1002, first, a rotational drive source (not shown) rotates the chuck table 10 that suction-holds the dressing tool 200, thereby performing a rotational operation process to position one outer peripheral side surface 202-1 so that it is perpendicular to the Y-axis direction, which is the rotational axis direction of the spindle 22, i.e., parallel to the XZ plane. In the first positioning step 1002, this rotational operation process also positions the other outer peripheral side surface 202-2, which is parallel to the one outer peripheral side surface 202-1, so that it is perpendicular to the Y-axis direction, which is the rotational axis direction of the spindle 22, i.e., parallel to the XZ plane.

[0040] In the first embodiment, in the first positioning step 1002, the chuck table 10 that holds the dressing tool 200 by suction is rotated to position the dressing tool 200 held by suction on the chuck table 10 so that one outer peripheral side surface 202-1 faces toward the side (+Y direction) where the spindle 22 to which the cutting blade 21 to be dressed is attached is provided, and the other outer peripheral side surface 202-2 faces toward the side (-Y direction) opposite to the side where the spindle 22 to which the cutting blade 21 to be dressed is attached is provided. In the first positioning step 1002, the dressing tool 200 held by suction on the chuck table 10 is thereby positioned so that one outer peripheral side surface 202-1 faces in the direction opposite to the first side surface 26 (or second side surface 27) of the cutting blade 21, and the other outer peripheral side surface 202-2 faces in the direction opposite to the second side surface 27 (or second side surface 27) of the cutting blade 21.

[0041] In the first positioning step 1002, the Y-axis direction moving unit 32 and the Z-axis direction moving unit 33 then move the spindle 22, on which the cutting blade 21 to be dressed is mounted, along the Y-axis direction and the Z-axis direction relative to the chuck table 10 that suction-holds the dressing tool 200, thereby aligning the positions of one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) in the Y-axis direction and the Z-axis direction, thereby bringing one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) into contact with each other.

[0042] Here, aligning the positions in the Y-axis direction of one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) specifically means that the Y-axis direction position of an arbitrary point on one outer peripheral side surface 202-1 in the device coordinate system is made to coincide with the Y-axis direction position of an arbitrary point on the first side surface 26 (or the second side surface 27) in the device coordinate system by the Y-axis direction movement unit 32 so that the one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) do not move apart from each other in the Y-axis direction. Note that in the first positioning step 1002, the positions in the Y-axis direction of one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) may be aligned so that the one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) are pressed against each other in the Y-axis direction.

[0043] Furthermore, aligning the Z-axis positions of one outer peripheral side surface 202-1 and the first side surface 26 (or the second side surface 27) specifically means using the Z-axis movement unit 33 to align the Z-axis position in the device coordinate system of a point located a desired length 29 (see FIGS. 5 and 7) below the upper end of one outer peripheral side surface 202-1 with the Z-axis position in the device coordinate system of the lowest point of the first side surface 26 (or the second side surface 27) (the lowest point of the blade tip, which is the tip of the cutting blade 21). The desired length 29 defines the region to be dressed on the first side surface 26 (or the second side surface 27) of the cutting blade 21 as a region from the blade tip to the desired length 29, and is arbitrarily determined in advance. The desired length 29 is preferably 0.5 mm or more. In this case, a region of the first side surface 26 (or the second side surface 27) of the cutting blade 21 that is 0.5 mm or more from the blade tip can be dressed.

[0044] The first dressing step 1003 is a step of dressing the first side surface 26 (or the second side surface 27) of the cutting blade 21 by moving the cutting blade 21 and the dressing tool 200 relatively after the first positioning step 1002, and bringing the first side surface 26 (or the second side surface 27) of the cutting blade 21 into contact with one of the outer peripheral side surfaces 202-1 of the dressing tool 200, as shown in Figures 4 and 5.

[0045] Specifically, in the first dressing step 1003, while maintaining the positions in the Y-axis direction and the Z-axis direction of one of the outer peripheral side surfaces 202-1 and the first side surface 26 (or the second side surface 27) in contact with each other in the first positioning step 1002, the spindle 22 is rotated around an axis parallel to the Y-axis direction by a motor (not shown), thereby moving the cutting blade 21 attached to the spindle 22 relative to the dressing tool 200 held by suction on the chuck table 10. 2, and the chuck table 10 that holds the dressing tool 200 by suction is moved along the X-axis direction by the X-axis direction moving unit 31 relative to the spindle 22 on which the cutting blade 21 is attached, so that one of the outer peripheral side surfaces 202-1 and the first side surface 26 (or the second side surface 27) are rubbed against each other along the XZ plane direction, and the first side surface 26 (or the second side surface 27) is dressed by one of the outer peripheral side surfaces 202-1 of the dressing tool 200.

[0046] 6 and 7, after the holding step 1001 is performed, the second positioning step 1004 is a step of positioning the other outer peripheral side surface 202-2 of the dressing tool 200 and the second side surface 27 (or the first side surface 26) of the cutting blade 21 at a position where the other outer peripheral side surface 202-2 of the dressing tool 200 held by suction on the chuck table 10 comes into contact with the second side surface 27 (or the first side surface 26) of the cutting blade 21. That is, the second positioning step 1004 is a step of positioning the reverse surfaces of the surfaces that were positioned in contact with each other in the first positioning step 1002 in contact with each other.

[0047] In the first embodiment, the second positioning step 1004 is performed after the first positioning step 1002 and the first dressing step 1003, and therefore, the rotation operation process similar to that of the first positioning step 1002 can be omitted in the second positioning step 1004. Note that, if the second positioning step 1004 is performed before the first positioning step 1002 and the first dressing step 1003, the rotation operation process must be performed in the second positioning step 1004, but the rotation operation process can be omitted in the first positioning step 1002.

[0048] In the second positioning step 1004, similarly to the first positioning step 1002, the Y-axis direction moving unit 32 and the Z-axis direction moving unit 33 move the spindle 22 on which the cutting blade 21 to be dressed is mounted along the Y-axis direction and the Z-axis direction relative to the chuck table 10 that suction-holds the dressing tool 200, thereby aligning the positions of the other outer peripheral side surface 202-2 and the second side surface 27 (or the first side surface 26) in the Y-axis direction and the Z-axis direction, thereby bringing the other outer peripheral side surface 202-2 and the second side surface 27 (or the first side surface 26) into contact with each other.

[0049] 6 and 7, after the second positioning step 1004 is performed, the second dressing step 1005 is a step of dressing the second side surface 27 (or the first side surface 26) of the cutting blade 21 by relatively moving the cutting blade 21 and the dressing tool 200 to bring the second side surface 27 (or the first side surface 26) of the cutting blade 21 into contact with the other outer peripheral side surface 202-2 of the dressing tool 200. That is, the second dressing step 1005 is a step of bringing the reverse surfaces of the surfaces that were positioned in contact with each other in the first dressing step 1003 into contact with each other, thereby dressing the reverse surfaces of the surfaces dressed in the first dressing step 1003.

[0050] Specifically, in the second dressing step 1005, while maintaining the positions in the Y-axis direction and the Z-axis direction of the other outer peripheral side surface 202-2 and the second side surface 27 (or the first side surface 26) in a state where they are in contact with each other in the second positioning step 1004, the spindle 22 is rotated around an axis parallel to the Y-axis direction by a motor (not shown), thereby moving the cutting blade 21 attached to the spindle 22 relative to the dressing tool 200 held by suction on the chuck table 10. 2, and the chuck table 10, which holds the dressing tool 200 by suction, is moved along the X-axis direction by the X-axis movement unit 31 relative to the spindle 22 on which the cutting blade 21 is attached, so that the other outer peripheral side surface 202-2 and the second side surface 27 (or the first side surface 26) are rubbed against each other along the XZ plane direction, and the second side surface 27 (or the first side surface 26) is dressed by the other outer peripheral side surface 202-2 of the dressing tool 200.

[0051] In the dressing method according to the first embodiment, the first positioning step 1002 and the first dressing step 1003, and the second positioning step 1004 and the second dressing step 1005 may each be performed once, or the first positioning step 1002 and the first dressing step 1003 may be repeatedly performed to repeatedly dress the first side surface 26 facing in the opposite direction to the one outer peripheral side surface 202-1 by one outer peripheral side surface 202-1, or the second positioning step 1004 and the second dressing step 1005 may be repeatedly performed to repeatedly dress the second side surface 27 facing in the opposite direction to the other outer peripheral side surface 202-2 by the other outer peripheral side surface 202-2.

[0052] The dressing method of embodiment 1 having the above-described configuration dresses the first side surface 26 or the second side surface 27 of the cutting blade 21 with the outer peripheral side surface 202 of the dressing tool 200 by rubbing the outer peripheral side surface 202 of the dressing tool 200 against the first side surface 26 or the second side surface 27 of the cutting blade 21 along the surface direction, thereby achieving the effect of reducing the load on the cutting blade 21 compared to conventional methods, even when dressing of the blade side surface is required in an area 0.5 mm or more from the tip of the blade.

[0053] [Embodiment 2] A dressing method according to a second embodiment of the present invention will be described. FIG. 8 is a perspective view illustrating a first positioning step 1002, a first dressing step 1003, a second positioning step 1004, and a second dressing step 1005 of the dressing method according to the second embodiment. FIG. 9 is a cross-sectional view illustrating the first positioning step 1002 and the first dressing step 1003 of the dressing method according to the second embodiment. FIG. 10 is a cross-sectional view illustrating the second positioning step 1004 and the second dressing step 1005 of the dressing method according to the second embodiment. As with FIGS. 5 and 7, FIGS. 9 and 10 omit illustration of the support tape 205 and the annular frame 206, which do not significantly affect the description of each step of the dressing method according to the second embodiment. Note that in FIGS. 8, 9, and 10, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0054] The dressing method of embodiment 2 is the same as the dressing method of embodiment 1, except that the dressing tool 200 used to dress the cutting blade 21 is changed to a dressing tool 200-2 in which a groove 207 is formed in advance, and the first side 26 and the second side 27 of the cutting blade 21 are dressed by one inner wall surface 209-1 and the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2, respectively, instead of one outer peripheral side surface 202-1 and the other outer peripheral side surface 202-2 of the dressing tool 200.Other matters, such as the fact that the method is performed using a cutting device 1, are the same as those of embodiment 1.

[0055] The dressing tool 200-2 used in the second embodiment is the dressing tool 200 used in the first embodiment, further having at least one groove 207 formed therein. In the example of the second embodiment shown in Figs. 8 to 10, the dressing tool 200-2 has one groove 207 formed therein, but the present invention is not limited to this, and two or more grooves 207 may be formed therein, and the grooves 207 may be formed parallel to each other or may be formed to intersect each other.

[0056] The groove 207 formed in the dressing tool 200-2 is formed to extend in one direction and has a pair of parallel inner wall surfaces 209 that extend linearly in a plan view. The pair of inner wall surfaces 209 are both parallel to the thickness direction of the dressing tool 200-2 and are formed as flat planes. The groove 207 is formed so that a width 208-1 of a portion where the pair of inner wall surfaces 209 are formed is wider than a thickness 25 of the cutting edge 24 of the cutting blade 21 to be dressed. In other words, the distance between the pair of inner wall surfaces 209 of the groove 207 is wider than the thickness 25 of the cutting edge 24 of the cutting blade 21 to be dressed. Furthermore, the groove 207 is formed so that a depth 208-2 of a portion where the pair of inner wall surfaces 209 are formed is deeper than a desired length 29. The groove 207 may be formed in any shape in the portion deeper than the portion where the pair of inner wall surfaces 209 are formed. Here, when the pair of inner wall surfaces 209 need to be distinguished from each other, they will be referred to as one inner wall surface 209-1 and the other inner wall surface 209-2 by adding "-1" and "-2" after the reference numerals, respectively.

[0057] The holding step 1001 of the dressing method according to the second embodiment is the same as the holding step 1001 of the dressing method according to the first embodiment, except that the object held on the chuck table 10 of the cutting device 1 is changed from the dressing tool 200 to a dressing tool 200-2. That is, the holding step 1001 of the dressing method according to the second embodiment is a step of holding the dressing tool 200-2 on the chuck table 10 of the cutting device 1.

[0058] The first positioning step 1002 of the dressing method of embodiment 2 is the first positioning step 1002 of the dressing method of embodiment 1, except that the object to be positioned at a position that contacts the first side surface 26 (or second side surface 27) of the cutting blade 21 is changed from one outer peripheral side surface 202-1 of the dressing tool 200 to one inner wall surface 209-1 of the groove 207 of the dressing tool 200-2. That is, the first positioning step 1002 of the dressing method of embodiment 2 is a step of positioning one inner wall surface 209-1 of the groove 207 of the dressing tool 200-2 and the first side surface 26 (or second side surface 27) of the cutting blade 21 at a position where one inner wall surface 209-1 of the groove 207 of the dressing tool 200-2 held by suction on the chuck table 10 comes into contact with the first side surface 26 (or second side surface 27) of the cutting blade 21, as shown in Figures 8 and 9.

[0059] In the first positioning step 1002 of the dressing method according to the second embodiment, similarly to the first positioning step 1002 of the dressing method according to the first embodiment, first, a rotational operation process is performed in which the chuck table 10 that suction-holds the dressing tool 200-2 is rotated by a rotation drive source (not shown) to position one inner wall surface 209-1 so as to be perpendicular to the Y-axis direction which is the rotational axis direction of the spindle 22, i.e., parallel to the XZ plane. In the first positioning step 1002 of the dressing method according to the second embodiment, this rotational operation process also positions the other inner wall surface 209-2, which is parallel to the one inner wall surface 209-1, so as to be perpendicular to the Y-axis direction which is the rotational axis direction of the spindle 22, i.e., parallel to the XZ plane.

[0060] In embodiment 2, in the first positioning step 1002, the chuck table 10 that holds the dressing tool 200-2 by suction is rotated to position the dressing tool 200-2 that is held by suction on the chuck table 10 so that one inner wall surface 209-1 faces the side (+Y direction) where the spindle 22 on which the cutting blade 21 to be dressed is mounted is provided, and the other inner wall surface 209-2 faces the side (-Y direction) opposite to the side where the spindle 22 on which the cutting blade 21 to be dressed is mounted is provided. In the first positioning step 1002, the dressing tool 200-2 held by suction on the chuck table 10 is positioned so that one inner wall surface 209-1 faces in the opposite direction to the first side surface 26 (or second side surface 27) of the cutting blade 21, and the other inner wall surface 209-2 faces in the opposite direction to the second side surface 27 (or second side surface 27) of the cutting blade 21.

[0061] From this point on, in the first positioning step 1002 of the dressing method of embodiment 2, the object to be positioned at a position that contacts the first side surface 26 (or second side surface 27) of the cutting blade 21 is changed from one outer peripheral side surface 202-1 of the dressing tool 200 to one inner wall surface 209-1 of the groove 207 of the dressing tool 200-2, and other matters are the same as those of embodiment 1.

[0062] The first dressing step 1003 of the dressing method of embodiment 2 is the first dressing step 1003 of the dressing method of embodiment 1, except that the object to be dressed by contacting with the first side surface 26 (or second side surface 27) of the cutting blade 21 is changed from one outer peripheral side surface 202-1 of the dressing tool 200 to one inner wall surface 209-1 of the groove 207 of the dressing tool 200-2. That is, the first dressing step 1003 of the dressing method of embodiment 2 is a step of dressing the first side surface 26 (or the second side surface 27) of the cutting blade 21 by moving the cutting blade 21 and the dressing tool 200-2 relatively after performing the first positioning step 1002, as shown in Figures 8 and 9, and bringing the first side surface 26 (or the second side surface 27) of the cutting blade 21 into contact with one of the inner wall surfaces 209-1 of the groove 207 of the dressing tool 200-2.

[0063] The second positioning step 1004 of the dressing method of embodiment 2 is the second positioning step 1004 of the dressing method of embodiment 1, except that the object to be positioned at a position that contacts the second side surface 27 (or first side surface 26) of the cutting blade 21 is changed from the other outer peripheral side surface 202-2 of the dressing tool 200 to the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2. That is, the second positioning step 1004 of the dressing method of embodiment 2 is a step of positioning the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2 and the second side surface 27 (or the first side surface 26) of the cutting blade 21 at a position where the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2 held by suction on the chuck table 10 comes into contact with the second side surface 27 (or the first side surface 26) of the cutting blade 21, as shown in Figures 8 and 10.

[0064] The second dressing step 1005 of the dressing method of embodiment 2 is the second dressing step 1005 of the dressing method of embodiment 1, except that the object to be dressed by contacting with the second side surface 27 (or first side surface 26) of the cutting blade 21 is changed from one outer peripheral side surface 202-1 of the dressing tool 200 to the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2. That is, the second dressing step 1005 of the dressing method of embodiment 2 is a step of dressing the second side surface 27 (or the first side surface 26) of the cutting blade 21 after the second positioning step 1004 is performed, by moving the cutting blade 21 and the dressing tool 200-2 relatively to bring the second side surface 27 (or the first side surface 26) of the cutting blade 21 into contact with the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2, as shown in Figures 8 and 10.

[0065] The dressing method of embodiment 2 having the above-described configuration is the dressing method of embodiment 1, except that the dressing tool 200 used to dress the cutting blade 21 is changed to a dressing tool 200-2 in which a groove 207 is formed in advance, and the first side surface 26 and the second side surface 27 of the cutting blade 21 are dressed by one inner wall surface 209-1 and the other inner wall surface 209-2 of the groove 207 of the dressing tool 200-2, respectively, instead of one outer peripheral side surface 202-1 and the other outer peripheral side surface 202-2 of the dressing tool 200, and therefore has the same effect as embodiment 1.

[0066] Furthermore, the dressing method of embodiment 2 can be applied to dressing tools that are formed in a shape that is not suitable for use with the dressing method of embodiment 1 because they do not have a pair of outer peripheral side surfaces 202, by forming a recessed groove 207 to turn them into dressing tool 200-2, thereby allowing efficient use of dressing tools formed in various shapes.

[0067] [Embodiment 3] A dressing method according to embodiment 3 of the present invention will be described. Fig. 11 is a perspective view showing a configuration example of a cutting device 1-2 that performs the dressing method according to embodiment 3. In Fig. 11, the same parts as those in embodiments 1 and 2 are denoted by the same reference numerals, and their description will be omitted.

[0068] The dressing method of embodiment 3 is the same as that of embodiment 1 and embodiment 2, except that instead of using cutting device 1, cutting device 1-2 is used; all other details are the same as those of embodiment 1 and embodiment 2.

[0069] 11, a cutting apparatus 1-2 for carrying out the dressing method according to the third embodiment is configured similarly to the cutting apparatus 1 for carrying out the dressing methods according to the first and second embodiments, except that it further includes a chuck table 10-2. That is, as shown in FIG. 11, the cutting apparatus 1-2 includes a chuck table 10, a chuck table 10-2, a cutting unit 20, an X-axis direction moving unit 31, a Y-axis direction moving unit 32, a Z-axis direction moving unit 33, and a control unit 40.

[0070] As shown in FIG. 11 , the chuck table 10-2 is disposed adjacent to the chuck table 10. The chuck table 10-2 includes a rectangular frame body with a rectangular recess formed therein in a plan view and a rectangular suction portion fitted into the recess. Like the chuck table 10, the suction portion of the chuck table 10-2 has a porous portion formed of a porous ceramic or the like with numerous porous holes and is connected to a suction source (not shown) via a suction path (not shown). As shown in FIG. 11 , the upper surface of the suction portion of the chuck table 10-2 is a holding surface 11-2 on which the dressing tools 200 and 200-2 without the support tape 205 and annular frame 206 are placed. The holding surface 11-2 holds the placed dressing tools 200 and 200-2 by suction using negative pressure introduced from the suction source. The holding surface 11-2 and the upper surface of the frame body of the chuck table 10-2 are located on the same plane and are parallel to a horizontal plane.

[0071] In the third embodiment, the holding surface 11-2 of the chuck table 10-2 is formed smaller than the holding surface 11 of the chuck table 10, is formed smaller than the workpiece 100 in a plan view, and is formed to have the same shape and size as the dressing tools 200, 200-2 in a plan view. In this manner, the chuck table 10-2 is a so-called sub-chuck table that holds the dressing tools 200, 200-2, while the chuck table 10 is a main chuck table that suction-holds the workpiece 100. The chuck table 10-2 is fixed adjacent to the chuck table 10 so as to move integrally with the chuck table 10 by the X-axis direction moving unit 31. Like chuck table 10, chuck table 10-2 has a rotary drive source (not shown) provided below the frame body and suction portion, and is configured to be freely rotatable (rotatable) around the central axis of holding surface 11-2, which is parallel to the Z-axis direction passing through the center of holding surface 11-2 and parallel to the vertical direction, by the rotary drive source.

[0072] In the example of embodiment 3 shown in Figure 11, only one chuck table 10-2 is provided, but the present invention is not limited to this and multiple chuck tables may be provided, for example, one for each of the two cutting units 20 provided, for a total of two chuck tables.

[0073] The dressing method of embodiment 3 is the same as that of embodiment 1 and embodiment 2, except that the object that suction-holds the dressing tools 200, 200-2 in each step is changed from the chuck table 10 to the chuck table 10-2, and other matters are the same as those of embodiment 1 and embodiment 2.

[0074] The dressing method of embodiment 3 having the above-described configuration is the same as the dressing method of embodiment 1 and embodiment 2, except that instead of using a cutting device 1 that does not have a chuck table 10-2, a cutting device 1-2 that has an additional chuck table 10-2 is used, and the object that sucks and holds the dressing tools 200, 200-2 in each step is changed from the chuck table 10 to the chuck table 10-2.Other matters are the same as those of embodiment 1 and embodiment 2, and therefore the same effects as those of embodiment 1 and embodiment 2 are achieved.

[0075] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0076] 1,1-2 Cutting equipment 10,10-2 Chuck table 21 Cutting blade 24 cutting edge 25 Thickness 26 First aspect 27 Second aspect 200,200-2 Dressing Tool 202, 203 Outer periphery side 202-1, 203-1 One outer peripheral side 202-2, 203-2 Other outer peripheral side 207 Groove 208-1 Width 209 Inner wall 209-1 One of the inner walls 209-2 Other inner wall 1001 holding steps 1002 First positioning step 1003 First dressing step 1004 Second positioning step 1005 Second dressing step

Claims

1. A dressing method for dressing a cutting blade having a circular cutting edge and a first side surface and a second side surface by using a rectangular dressing tool, the method comprising: a holding step of holding the dressing tool on a chuck table of a cutting device; a first positioning step of positioning the dressing tool at a position where one outer peripheral side surface of the dressing tool contacts the first side surface or the second side surface of the cutting blade; a first dressing step of dressing the first side surface or the second side surface of the cutting blade by moving the cutting blade and the dressing tool relative to each other and bringing the first side surface or the second side surface of the cutting blade into contact with one of the outer peripheral side surfaces of the dressing tool; a second positioning step of positioning the other outer peripheral side surface of the dressing tool at a position where the other outer peripheral side surface of the dressing tool contacts the second side surface or the first side surface of the cutting blade; a second dressing step of dressing the second side surface or the first side surface of the cutting blade by moving the cutting blade and the dressing tool relative to each other and bringing the second side surface or the first side surface of the cutting blade into contact with the other outer peripheral side surface of the dressing tool; A dressing method comprising at least the steps of:

2. A dressing method for dressing a cutting blade having a circular cutting edge and a first side surface and a second side surface by using a rectangular dressing tool, the method comprising: The dressing tool has a groove formed therein in advance, the groove having a width greater than the thickness of the cutting blade; a holding step of holding the dressing tool on a chuck table of a cutting device; a first positioning step of positioning the cutting blade at a position where one inner wall surface of the groove contacts the first side surface or the second side surface of the cutting blade; a first dressing step of dressing the first side surface or the second side surface of the cutting blade by moving the cutting blade and the dressing tool relatively to bring the first side surface or the second side surface of the cutting blade into contact with one of the inner wall surfaces of the groove; a second positioning step of positioning the other inner wall surface of the groove at a position where the second side surface or the first side surface of the cutting blade comes into contact with the other inner wall surface of the groove; a second dressing step of dressing the second side surface or the first side surface of the cutting blade by moving the cutting blade and the dressing tool relatively to bring the second side surface or the first side surface of the cutting blade into contact with the other inner wall surface of the groove; A dressing method comprising at least the steps of:

Images