Nozzle swing mechanism used for cleaning machine

The nozzle oscillation mechanism in cleaning machines addresses the inefficiencies of fixed nozzles by enabling multiple cleanings and optimal time settings, reducing costs and enhancing cleaning effectiveness for semiconductors and circuit boards.

JP2025137430AActive Publication Date: 2025-09-19YANG HUCA INDUSTRY CO LTD
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Patent Information

Application Number
JP2025021930
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-03-06
Filing Date
2025-02-13
Publication Date
2025-09-19
Estimated Expiration
2045-02-13

AI Technical Summary

Technical Problem

Conventional cleaning machines for semiconductors and circuit boards face challenges in effectively cleaning various types and sizes of components due to fixed nozzles creating angles that hinder cleaning, and lack customization for optimal cleaning time and process adaptation.

Method used

A nozzle oscillation mechanism with a base, conveying device, and air knife assembly, featuring reciprocating nozzles and rollers, allows multiple cleanings of the same portion with a small number of nozzles, and adjustable air volume for optimal cleaning and draining performance.

Benefits of technology

Achieves efficient cleaning of semiconductor and circuit boards by reducing nozzle installation costs and optimizing cleaning time through reciprocating nozzle and roller movements, along with adjustable air discharge for uniform drying.

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Abstract

To perform multiple times of cleaning, with a small number of nozzles, on a predetermined sheet by reciprocating movement of the nozzles, so as to enable costs to be reduced compared with that in a case of mounting a large number of nozzles.SOLUTION: A nozzle swing mechanism used for a cleaning machine according to the present invention comprises a base, a conveying device 2, a cleaning device 3, and an air knife assembly. The base sequentially includes a cleaning region and a draining region. The conveying device has a supply part and a discharge part for conveying a predetermined sheet. The conveying device further includes a plurality of conveying rollers operated by a power device. The cleaning device is provided in the cleaning region. The cleaning device includes a plurality of nozzles 32 positioned above the conveying device. On at least one side of the plurality of nozzles, an assembly mechanism 312 that is assembled with a transmission mechanism that applies reciprocating movement is provided.SELECTED DRAWING: Figure 2
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Description

[Technical Field]

[0001] The present invention relates to a nozzle swinging mechanism used in a cleaning machine, and in particular to the effect of improving the cleaning quality when washing a specific sheet by moving the nozzle back and forth using a transmission mechanism, and setting an optimal cleaning time. [Background technology]

[0002] Recent advances in science and technology have led to widespread use of everyday electronic products and devices, such as smartphones, tablet PCs, and laptops, which has in turn promoted the development of the semiconductor and circuit board industries. Because a wide variety of chemicals are used in the production of semiconductors and circuit boards, chemicals and solvents tend to remain on semiconductor sheets. These chemicals and solvents not only pollute the environment but also affect the yield of semiconductors and circuit boards.

[0003] Currently, the cleaning process for semiconductors and circuit boards often requires a large number of water injection nozzles to clean the semiconductors and circuit boards. Furthermore, nozzles with fixed positions are prone to creating angles that make cleaning impossible. Furthermore, conventional cleaning machines are unable to customize the cleaning process or time to accommodate changes in the type and size of semiconductors and circuit boards. These points have led to urgent research and improvement by those skilled in the art. Summary of the Invention [Problem to be solved by the invention]

[0004] Therefore, the inventor collected relevant data on the above-mentioned problems and drawbacks, evaluated and examined them from various angles, and continued to try and modify them based on his many years of experience in the industry, resulting in the invention of a nozzle swing mechanism used in a cleaning machine. [Means for solving the problem]

[0005] A primary object of the present invention is to provide a nozzle oscillation mechanism for use in the above-mentioned washer. The nozzle oscillation mechanism includes a base, a conveying device, a cleaning device, and an air knife assembly. The base includes a cleaning area and a draining area, in that order. The conveying device has a supply unit located on the cleaning area side for conveying a predetermined sheet, and a discharge unit located on the draining area side. The conveying device also has multiple conveying rollers operated by a power unit. The cleaning device is located within the cleaning area. The cleaning device's interlocking device has multiple nozzles connected to it and multiple connecting parts located above the conveying device. An assembly mechanism is provided on at least one side of the upper connecting part. One side of the assembly mechanism has a protruding engagement part that is attached to a transmission mechanism that provides reciprocating motion. The air knife assembly is located within the draining area. The air knife assembly has multiple air knives located above the conveying device. By performing multiple cleaning operations on the same portion of the specified sheet by the reciprocating movement of the nozzles as described above, the specified sheet can be cleaned multiple times with a small number of nozzles, thereby achieving the effect of reducing costs when installing a large number of nozzles.

[0006] A secondary object of the present invention is as follows. Specifically, each of the transport rollers in the transport device has a transport section for transporting the specified sheet. Rotating sections are provided on both sides of each transport section. The power unit is engaged with the rotating section of at least one of the transport rollers via at least one first shaft pillar to control the reciprocating rotation of the transport roller. At least two second roller shafts are attached to the rotating section of each of the transport rollers on the side away from the power unit for rotating the rollers relative to each other. The reciprocating displacement of the transport rollers of the transport device achieves the object of enabling multiple cleanings of the same portion of the specified sheet.

[0007] Another object of the present invention is as follows. The air knife of the air knife assembly is provided with a storage space for storing pressurized gas supplied from a pre-installed air pressurizing device. The air knife is also provided with a flow straightening vane that prevents the flow of the gas and uniformly discharges the gas. Each air knife is provided with an air knife head extending downward and having an air knife port. At least one fastening member is inserted into the air knife head. By combining the uniform adjustment of the air volume by the flow straightening vane with the tightening of the fastening member, the volume of air discharged from the air knife port can be adjusted, thereby achieving optimal draining performance. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a front view of a nozzle swinging mechanism used in a cleaning machine according to the present invention. [Figure 2] FIG. 2 is a side view of a nozzle swinging mechanism used in the cleaning machine of the present invention. [Figure 3] 3A, 3B, and 3C are three-view diagrams of a transmission mechanism of a nozzle swing mechanism used in a cleaning machine according to the present invention. [Figure 4] 4A, 4B, and 4C are three-view diagrams of a connection device for a nozzle swing mechanism used in a cleaning machine according to the present invention. [Figure 5] 5A, 5B and 5C are three-view diagrams of an interlocking device of a nozzle swing mechanism used in a washer according to the present invention. [Figure 6] FIG. 6 is a schematic diagram of the nozzle swinging mechanism used in the washer of the present invention before the nozzle is moved. [Figure 7] FIG. 7 is a schematic view of the nozzle swinging mechanism used in the washer of the present invention after the nozzle has been moved. [Figure 8] FIG. 8 is a cross-sectional plan view of a nozzle swinging mechanism used in the cleaning machine of the present invention. [Figure 9]9A, 9B and 9C are three-view diagrams of the air knife of the nozzle swinging mechanism used in the washer of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] 1 to 5, 8, and 9, which show a front view and a side view of the nozzle swinging mechanism used in the washer of the present invention, a three-view view of the transmission mechanism, a three-view view of the connection device, a three-view view of the interlocking device, a cross-sectional plan view of the nozzle swinging mechanism, and a three-view view of the air knife. The nozzle swinging mechanism used in the washer of the present invention mainly includes a base 1, a conveying device 2, a washing device 3, and an air knife assembly 4. The connection relationships of these components are as follows:

[0010] The base 1 includes a washing area 11 and a draining area 12 in that order. The base 1 is also provided with the transport device 2 that performs reciprocating transport. The transport device 2 has a supply section 21 provided on the washing area 11 side and a discharge section 22 located on the draining area 12 side. The transport device 2 also has a plurality of transport rollers 24 operated by a power unit 23.

[0011] The cleaning device 3 is installed in the cleaning area 11. The interlocking device 31 of the cleaning device 3 has a plurality of nozzles 32 connected thereto and a plurality of connection parts 311 located above the conveying device 2. Furthermore, an assembly mechanism 312 is provided on at least one side of the upper connection portion 311. The assembly mechanism 312 has a shielding plate 3121 to which the connection portion 311 is connected. A main body 3122 protrudes from the shielding plate 3121 on the side opposite the connection portion. An engagement portion 3123 protrudes from one side of the main body 3122 and is attached to the power transmission mechanism 34 via a connection device 33. The connection device 33 has a plurality of protrusions 331 that engage with the engagement portions 3123, and can be fixed to the engagement portions 3123 by screw members 3124. In addition, a ceiling portion of the connection device 33 is bent, thereby extending a top plate 332 located above the power transmission mechanism 34. The power transmission mechanism 34 described above has a power transmission connection portion 341 that is attached to the connection device 33.

[0012] In addition, in order to clean from above and below, a plurality of nozzles 32 are also provided below the above-mentioned conveying device 2.

[0013] The air knife assembly 4 is located within the draining area 12 . The air knife assembly 4 also has a plurality of air knives 41 installed above the transfer device 2. Each air knife 41 has a storage space 410 for storing pressurized gas supplied from a pre-installed air pressurizer (not shown). A straightening plate 42 is also installed within the air knife 41 to prevent the gas from flowing and ensure uniform gas discharge. Each air knife 41 has an air knife head 411 extending downward, the air knife head 411 having an air knife port 4110. At least one fastening member 43 is inserted into the air knife head 411.

[0014] Each of the conveying rollers 24 in the conveying device 2 described above has a conveying section 241 for conveying a predetermined sheet 5 (e.g., a semiconductor, a circuit board, etc.). Rotating sections 242 are provided on both sides of the conveying section 241. At least two first roller shafts 25 are provided between the power unit 23 and the conveying rollers 24. Each of the first roller shafts 25 has a first shaft column 251 connected to the power unit 23 and at least one rotating section 242. A first connecting member 252 (e.g., a belt) is provided between the first roller shafts 25 to rotate them relative to each other. At least two second roller shafts 26 are attached to the rotating section 242 on the side of each of the conveying rollers 24 that is away from the power unit 23. The second roller shafts 26 rotate relative to each other via at least one second connecting member 261 (e.g., a belt, etc.). The power unit 23 may be a motor.

[0015] In addition, on both sides of the above-mentioned assembly mechanism 312, there is provided a sensing device 35 for detecting the swing direction of the assembly mechanism 312, and the sensing device 35 controls the forward and backward pushing effect of the transmission mechanism 34.

[0016] In addition, the transmission mechanism 34 may be an air cylinder, a hydraulic cylinder, or a push link that combines pneumatic, hydraulic, and electric functions, etc. It should be noted in advance that such easy and equivalent changes and modifications do not limit the scope of protection of the present invention.

[0017] 1, 2, 6, and 7 are front and side views, schematic diagrams of the nozzle swing mechanism used in the washer of the present invention, and schematic diagrams of the nozzle before and after nozzle movement. As is clear from the drawings, in actual application of the present invention, the predetermined sheet 5 is first transported from the supply section 21 of the conveying device 2. The predetermined sheet 5 is moved toward the discharge section 22 by the conveying rollers 24. Then, when the predetermined sheet 5 is transported to the cleaning area 11, the nozzle 32 of the cleaning device 3 delivers cleaning liquid pressurized by a connected, pre-installed pump (not shown). As a result, the nozzle 32 high-pressure washes the predetermined sheet 5. In addition, the nozzles 32 located on the upper side of the conveying device 2 are each pushed back and forth by the transmission mechanism 34, performing high-pressure washing multiple times on the moving predetermined sheet 5. Furthermore, the nozzles 32 moving back and forth can clean dirt from a wider range of angles. When the specified sheet 5 reaches the discharge side of the cleaning area 11, the conveying rollers 24 are rotated in the opposite direction by the rotation of the power unit 23, thereby moving the specified sheet 5 toward the supply unit 21. This allows the cleaning device 3 to continue the cleaning operation. When the specified sheet 5 reaches the load side of the cleaning area 11, the conveying rollers 24 are rotated in the opposite direction by the rotation of the power unit 23, thereby moving the specified sheet 5 again toward the discharge unit 22. This achieves the purpose of repeatedly cleaning dirt adhering to the specified sheet 5. This makes it possible to achieve the purpose of cleaning the specified sheet 5 multiple times with a small number of nozzles 32, thereby reducing the cost of installing a large number of nozzles 32. Furthermore, by making the transmission frequency of the transmission mechanism 34 and the reciprocating speed per minute of the power unit 23 individually configurable, the cleaning time can be optimized.

[0018] Furthermore, after the cleaning of the predetermined sheet 5 is completed, the predetermined sheet 5 enters the draining area 12 . The air knife 41 of the air knife assembly 4 then sprays gas pressurized by the pre-installed air pressurizer onto the surface of the specified sheet 5, removing cleaning liquid adhering to the specified sheet 5. The rectifying plate 42 installed inside the air knife 41 prevents the gas from being pressurized by the pre-installed air pressurizer and blown into the storage space 410, while allowing the gas to flow along the surface of the rectifying plate 42. This allows the gas to be uniformly discharged without directly releasing the internal pressure of the gas, by equalizing the pressure at the location and then flowing and releasing it along the gap between the rectifying plate 42 and the inner wall of the air knife 41. The size of the air knife port 4110 of the air knife head 411 can be adjusted by adjusting the tightening or loosening of the fastening member 43. This allows the size of the air blown from the air knife 41 to be controlled. The predetermined sheet 5 that has been blown by the air knife 41 is transported along the transport roller 24 to the discharge section 22 and collected. In this way, by adjusting the air volume, the purpose of controlling the air blowing and draining efficiency according to the material of each predetermined sheet 5 can be achieved.

[0019] 8, which is a plan sectional view of the nozzle swinging mechanism used in the cleaning machine of the present invention. As is clear from the drawing, in the present invention, the predetermined sheet 5 is conveyed by the conveying rollers 24 of the conveying device 2. Each of the conveying rollers 24 is connected to and rotates the adjacent conveying rollers 24 via the second roller shafts 26 attached to the rotating portions 242 on both sides. In a preferred embodiment of the present invention, the conveying rollers 24 may be connected to each other via attachment members 27 and arranged in parallel, in order to achieve the object of simultaneously conveying a larger number of the predetermined sheets 5.

[0020] The nozzles described above can be configured to have a spray range as needed. The transmission mechanism of the cleaning device can also be configured to have a forward / backward pushing distance and a number of reciprocating movements per minute. Furthermore, the number of nozzles attached and the spacing between them can also be configured.

[0021] In addition, the detailed operating principle of the nozzle oscillation is as follows. The spray range of the nozzle 32 is 400 mm, and the distance the nozzle 32 is pushed back and forth in cooperation with the transmission mechanism 34 is 25 mm each, resulting in a total spray range of 450 mm. The transmission mechanism 34 is capable of reciprocating 60 times per minute (adjustable). The number of nozzles 32 is eight, spaced 50 mm apart. Meanwhile, each of the lower conveying rollers 24 can convey 25 mm back and forth and reciprocate 10 times per minute, with a conveying speed of 2 m / min. The length of the specified sheet 5 to be conveyed is 500 mm. Based on the above assumptions, the planned cleaning time is set to 30 seconds. Since the specified sheet 5 takes 15 seconds from entry to discharge, the cleaning time for the specified sheet 5 is 15 seconds, with the nozzle 32 reciprocating 15 times and the conveying rollers 24 reciprocating 2.5 times. Since the nozzles 32 are spaced apart by 50 mm, the nozzles 32 reach positions just before and after each nozzle 32 after reciprocating. Three nozzles are used to clean the same position. Therefore, the number of times the same position is cleaned is (number of times the nozzles 32 reciprocate × 2) × (number of times the transport roller 24 reciprocates × 2). In other words, the number of times the same position is cleaned is (15 × 2) × (2.5 × 2) = 30 × 5 = 150, or 150 + (8 cleaning times for eight nozzles 32) = 158 times. Therefore, it takes 30 seconds to clean the specified sheet 5 at the same position 158 times.

[0022] On the other hand, in a process where normal washing is performed and the nozzle 32 and the transport roller 24 do not reciprocate, if the predetermined sheet 5 is washed in the same position for 30 seconds, washing can be performed only eight times.

[0023] The present invention is mainly characterized in that the reciprocating movement of the nozzles 32 in the cleaning device 3 is combined with the reciprocating displacement of the conveying rollers 24 in the conveying device 2 to perform multiple cleanings on the same portion of the predetermined sheet 5, thereby achieving the effect of performing multiple cleanings on the predetermined sheet 5 with a small number of nozzles 32. A secondary feature is that the uniform adjustment of the air volume by the straightening plate 42 in the air knife 41 is combined with the tightening of the fastening member 43 to adjust the magnitude of the air volume discharged from the air knife outlet 4110.

[0024] The above is merely a preferred embodiment of the present invention, and does not limit the scope of the present invention. Therefore, it should be noted in advance that any easy modifications and equivalent structural changes made using the contents of the specification and drawings of the present invention are also included within the scope of the present invention for the same reasons.

[0025] In summary, the nozzle oscillation mechanism used in the cleaning machine of this invention can reliably achieve its effects and objectives when actually applied. Therefore, this invention is certainly a highly practical research and development and meets the requirements for filing a patent for invention, so we are filing a patent application in accordance with the law. We hope that the examiner will grant this case as soon as possible to protect the inventor's research, development, and creative efforts. If the examiner has any doubts, please let us know in writing and the inventor will do his or her best to cooperate. [Explanation of symbols]

[0026] 1 pedestal 11 Cleaning Area 12 Draining area 2. Conveyor equipment 21 Supply section 22 Discharge section 23 Power plant 24 Conveyor roller 241 Conveyor 242 Rotating part 25 First roller shaft 251 First Axis Pillar 252 first connecting member 26 Second roller shaft 261 Second connecting member 27 Assembly parts 3 Cleaning equipment 31 Interlocking device 311 Connection 312 Assembly mechanism 3121 Shielding board 3122 Main unit 3123 Engagement part 3124 Screw components 32 nozzles 33 Connection Device 331 Convex 332 Top plate 34 Transmission Mechanism 341 Transmission connection 35 Sensing Device 4 Air knife assembly 41 Air Knife 410 Containment Space 411 Air Knife Head 4110 Air knife nozzle 42 Rectifier plate 43 Fastening member 5. Prescribed sheet

Claims

1. A nozzle swing mechanism used in a cleaning machine, a base, a conveying device, a cleaning device, and an air knife assembly; the base includes, in order, a washing area and a draining area; the conveying device has a supply unit provided on the side of the cleaning area for conveying a predetermined sheet, and a discharge unit located on the side of the draining area, the conveying device having a plurality of conveying rollers operated by a power unit; the cleaning device is provided within the cleaning area, and the interlocking device of the cleaning device has a plurality of connection parts to which a plurality of nozzles are connected and which are located on the upper side of the conveying device, and an assembly mechanism is provided on at least one side of the upper connection part, and an engagement part is protruding from one side of the assembly mechanism and is attached to a transmission mechanism that imparts reciprocating movement, The air knife assembly is disposed within the draining area, the air knife assembly having a plurality of air knives disposed above the conveying device.

2. The nozzles can set a spray range as needed, and the transmission mechanism of the cleaning device can further set a forward and backward pushing distance and the number of reciprocating swings per minute. Furthermore, the number of nozzles attached and the spacing distance can also be set, the spray range of the nozzles is 400 mm, the distances by which the nozzles are pushed forward and backward in cooperation with the transmission mechanism are 25 mm each, the transmission mechanism can reciprocate 60 times per minute, the number of nozzles is 8, and the spacing between each nozzle is 50 mm, and the transport rollers of the transport device are each 2. A nozzle swinging mechanism for use in a cleaning machine according to claim 1, comprising a conveying section, each of which is provided with a rotating section on both sides thereof, the power unit being engaged with the rotating section of at least one of the conveying rollers via at least one first shaft pillar to control the reciprocating rotation of the conveying roller, at least two second roller shafts being attached to the rotating section on the side of each of the conveying rollers away from the power unit for rotating the conveying rollers relative to each other, each of the conveying rollers being capable of conveying 25 mm back and forth and reciprocating 10 times per minute, with a conveying speed of 2 m / min.

3. 2. The nozzle swing mechanism for a washer according to claim 1, wherein the air knife of the air knife assembly has an accommodation space therein for accommodating pressurized gas supplied from a pre-installed air pressurizing device, the air knife has a flow straightening plate therein for preventing the flow of the gas and making the discharge of the gas uniform, and each of the air knives has an air knife head extending downward and having an air knife port, and at least one fastening member is inserted into the air knife head.

Citation Information

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