Excimer lamp, light irradiation device and lighting state display method for excimer lamp

Abstract

To visually confirm a lighting state of an excimer lamp without providing an optical member, a sensor, etc., for visible light derivation.SOLUTION: An excimer lamp 10 forms a discharge space S, includes an extension part 37 which extends from an end of a discharge container 15, and is disposed within an irradiation container 90 by a holding member 95. The excimer lamp 10 is held in such a manner that at least a portion of the extension part 37 protrudes from the holding member 95. The discharge container 15 and the holding member 95 constitute an opaque shield member 98 by which the discharge container 15 is wrapped and enclosed and light (visible light) radiated by discharge is shielded. An exposure face ER (a light emission part 14) where light transmitted through the extension part 37 by the discharge is emitted so as to be visible is provided in a part of a protrusion 38 protruding from the holding member 95 in the extension part 37.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an excimer lamp, and more particularly to an excimer lamp that can be incorporated into an ultraviolet irradiation module that irradiates ultraviolet rays, an ozone generation module, or the like. [Background technology]

[0002] Excimer lamps can be used as ultraviolet irradiation lamps in ultraviolet irradiation devices, ozone generators, etc., and are housed in a container such as a lamp house (hereinafter referred to as an irradiation container) to perform sterilization treatments and ozone generation by ultraviolet irradiation. Such irradiation containers are often configured to block light so that ultraviolet rays do not leak from anywhere other than windows, or to block ultraviolet rays without providing windows. This makes it difficult to check the lamp's lighting status, such as whether the lamp is lighting normally or whether abnormal discharge is occurring.

[0003] To make it possible to visually check the lamp lighting state, for example, an optical member (glass rod or glass fiber) that extracts visible light emitted from the lamp along with ultraviolet radiation is provided inside the container, and the visible light is guided outside the lamp house through a window (see Patent Document 1). Also, in ozone generating devices such as deodorizers or ultraviolet irradiation devices, a window is formed on the side of the housing (casing) so that the discharge generation area can be visually checked (see Patent Document 2). This makes it possible to visually check the visible light emitted along with ultraviolet radiation.

[0004] On the other hand, a method is also known in which a sensor for detecting visible light is provided next to the discharge vessel of the excimer lamp, and the sensor detects the visible light emitted outside the discharge vessel together with ultraviolet rays to confirm the lamp lighting state (see Patent Document 3). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 7-220687 [Patent Document 2] Patent No. 7053191 [Patent Document 3] Japanese Patent Application Laid-Open No. 2003-092084 [Patent Document 4] Patent application No. 2023-119080 [Patent Document 5] Patent application No. 2023-184501 Summary of the Invention [Problem to be solved by the invention]

[0006] For example, when an ultraviolet irradiation module equipped with an excimer lamp, a power supply, etc., and an ozone generation module are incorporated into an apparatus that performs ultraviolet irradiation treatment or ozone generation, the arrangement and configuration of the excimer lamp relative to the irradiation vessel, the installation space, etc. are restricted due to the use conditions, the use environment, etc. Therefore, it is difficult to arrange an optical member for deriving visible light inside the irradiation vessel, or to install a sensor near the discharge vessel.

[0007] Therefore, it is required to be able to visually check the lighting state of an excimer lamp without providing an optical member or sensor for deriving visible light. [Means for solving the problem]

[0008] The excimer lamp of the present invention comprises a discharge vessel that forms a discharge space and through which light emitted by discharge passes, and an extension that extends from an end of the discharge vessel and through which the light emitted by discharge passes. The extension is a member (hereinafter also referred to as an "enclosing member") that encloses the discharge vessel and the extension, and has a portion (herein referred to as a "protruding portion") that protrudes from a shielding member that blocks light that has passed through the discharge vessel.

[0009] Here, "shielding member" refers to an opaque member that blocks light that has passed through the discharge vessel, light that has propagated from the discharge vessel to the extension portion (visible light), light that has passed through the extension portion, etc., so that they cannot be seen. For example, this includes a vessel that has a reflective surface on the inside. In addition, even materials that are not generally referred to as members, such as film-like materials with a reflective surface, are considered to be shielding members as long as they have that function (blocking light so that it cannot be seen). For example, metals such as electrode films that reflect light are also included in shielding members.

[0010] The enclosing member (shielding member) may be configured to surround the discharge vessel and part of the extension. The enclosing member may be configured with multiple members or a single member. It may be configured to integrally enclose the discharge vessel and part of the extension.

[0011] The enclosing member (shielding member) can be configured, for example, by the discharge vessel and a holding member that holds the extension to the discharge vessel, or by a reflective film (such as an outer electrode) that covers the extension and reflects light emitted by the discharge.

[0012] In the present invention, a light emitting portion is provided on at least a part of the protrusion, through which light transmitted through the extension can be visually recognized. The light emitting portion may have various configurations. For example, an exposed surface may be provided by exposing a part of the outer circumferential surface of the protrusion. Furthermore, the light emitting portion may be provided on the outer circumferential surface closer to the discharge vessel than the tip of the extension.

[0013] Accordingly, the light emitting portion can be provided on the outer peripheral surface between the holding member and the tip of the extending portion, or on the outer peripheral surface between the reflective film and the tip of the extending portion.

[0014] The extension can be provided with a covering member on at least one of the tip side of the light emitting portion and the discharge vessel side. The covering member covers the extension so as to prevent light from entering the protrusion from outside the shielding member. The extension can also be configured so that the transmittance of the extension is lower than the transmittance of the discharge vessel in the wavelength range of light emitted by discharge in the discharge space.

[0015] For example, the discharge vessel may have an inner tube and an outer tube, and the inner tube may have a small diameter portion that covers the inner electrode disposed in the discharge vessel, and a large diameter portion that has a flange-shaped portion to which the outer tube is welded and an extension portion formed therein. The outer diameter of the small diameter portion is smaller than the outer diameter of the extension portion.

[0016] When the inner electrode is a foil electrode, the large diameter portion can be configured to have a tubular portion that covers the power supply rod connected to the foil electrode without contacting it, and the inner diameter of the tubular portion can be smaller than the width of the foil electrode.

[0017] Another aspect of the present invention is a light irradiation container comprising an excimer lamp having a discharge container which forms a discharge space and through which light emitted by discharge passes, and an extension extending from the end of the discharge container and through which the light emitted by discharge passes, and a shielding member which encompasses the discharge container and part of the extension and blocks the light which has passed through the discharge container, and at least part of the protrusion protruding from the shielding member of the extension is provided with a light emitting portion which allows the light which has passed through the extension to be visible.

[0018] The method for indicating the lighting state of an excimer lamp of the present invention comprises covering an excimer lamp with a shielding member, the excimer lamp comprising a discharge vessel that forms a discharge space and through which light emitted by discharge passes, and an extension portion that extends from the end of the discharge vessel and through which the light emitted by discharge passes, and providing a light emitting portion on at least a part of the extension portion that protrudes from the shielding member so that the light that has passed through the extension portion can be visually recognized, and when the excimer lamp is turned on, the light emitted by discharge is emitted from the light emitting portion rather than from the shielding member. [Effects of the Invention]

[0019] According to the present invention, the lighting state of an excimer lamp can be visually confirmed without providing an optical member or a sensor for deriving visible light. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a schematic configuration diagram of an ozone generation module equipped with an excimer lamp according to an embodiment of the present invention. [Figure 2] 1 is a schematic cross-sectional view of an excimer lamp and an irradiation vessel. [Figure 3] FIG. 3 is a cross-sectional view of the excimer lamp taken along line III-III in FIG. 2. [Figure 4] FIG. 4 is a schematic cross-sectional view of a module according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, an excimer lamp and a module (light irradiator) including the excimer lamp according to this embodiment will be described with reference to the drawings.

[0022] FIG. 1 is a schematic diagram of an ozone generation module equipped with an excimer lamp according to this embodiment.

[0023] The ozone generation module 5 is capable of generating ozone by irradiating an oxygen-containing gas with ultraviolet rays, and is installed in the device 1 that uses the generated ozone. The ozone generation module 5 includes an excimer lamp 10, an irradiation container 90, and a power supply unit 92. The excimer lamp 10 is held in an irradiation space F (ultraviolet irradiation area, ozone generation area) within the irradiation container 90 by a holding member 95, and is supplied with power from the power supply unit 92 via a power supply line 80.

[0024] An oxygen-containing gas (such as air) flows into the irradiation space F through an inlet 90A of the irradiation container 90. The excimer lamp 10 irradiates the gas flowing around the lamp with ultraviolet light in the irradiation space F to generate ozone. The ozone-containing gas flows out of the irradiation space F through an outlet 90B of the irradiation container 90.

[0025] The irradiation container 90 and holding member 95 that cover the excimer lamp 10 constitute an opaque member (hereinafter referred to as a shielding member) 98 that covers the excimer lamp 10 so as to prevent light emitted into the irradiation space F inside the irradiation container 90 by the discharge of the excimer lamp 10 from escaping to the outside. In addition, the vicinity of the gas inlet 90A and outlet 90B of the irradiation container 90 are also configured to be opaque so that piping is connected thereto to prevent light from leaking to the outside. Therefore, an operator cannot see the light leaking from the shielding member 98.

[0026] The shielding member 98 does not need to have a sealed structure, but at least from a position where an operator can see the shielding member 98, light leaking from the opaque shielding member 98 cannot be seen. The irradiation container 90 is not limited to a box-like shape, and may be configured as a cylinder with an inlet and an outlet on both end faces. The holding member 95 does not need to be configured as one side of the irradiation container 90, but may be provided inside the irradiation container 90.

[0027] The excimer lamp 10 includes a discharge vessel 15, and an extension 37 extends from the end of the discharge vessel 15. The extension 37 is provided with a portion 38 (hereinafter referred to as the "protrusion") that protrudes outward from the shielding member 98 (holding member 95). As will be described later, a part of the protrusion 38 is provided with a light emitting portion 14 that allows visible light that is emitted by the discharge of the excimer lamp 10 and that has passed through the protrusion 38 (extension 37). The light emitting portion 14 is located in a position that allows it to be seen from the outside through a window 3 provided in the housing of the device 1.

[0028] Fig. 2 is a schematic cross-sectional view of the excimer lamp 10 and the irradiation vessel 90. Fig. 3 is a cross-sectional view of the excimer lamp taken along III-III in Fig. 2.

[0029] The excimer lamp 10 is configured as a double-tube excimer lamp, and includes a tubular discharge vessel (discharge tube) 15 formed by welding an outer tube 20 and an inner tube 30 made of a dielectric material such as quartz glass. Here, the excimer lamp 10 is configured as a compact excimer lamp. For example, the axial length (light-emitting length) of the discharge vessel can be set in the range of 20 mm to 400 mm. The outer diameter of the outer tube 20 can be set in the range of 5 mm to 30 mm, preferably 8 mm to 25 mm.

[0030] An annular (cylindrical) discharge space S is formed between the outer tube 20 and the inner tube 30. A rare gas such as xenon gas, or a mixture of a rare gas and a halogen gas, is sealed in the discharge space S as a discharge gas. The inner tube 30 is made of a material that has a lower transmittance than the outer tube 20 for the wavelengths of ultraviolet light emitted from the discharge. For example, the outer tube 20 is made of synthetic quartz glass, and the inner tube 30 is made of fused silica glass, which has a lower transmittance than synthetic quartz glass for the wavelengths of ultraviolet light.

[0031] An outer electrode 50 is disposed on the outer surface of the outer tube 20 that constitutes the discharge vessel 15. The outer electrode 50 is configured by winding a linear electrode portion made of a conductive metal along the outer surface of the outer tube 20, spirally wound along the tube axis C, and disposed at predetermined intervals. The cross section of the outer tube 20 along the tube diameter (lamp diameter) direction is formed in a hollow circular shape here.

[0032] The electrode (hereinafter referred to as the inner electrode) 40 covering the inner tube 30 is configured as a foil-like electrode (hereinafter also referred to as the foil electrode) extending along the tube axis (hereinafter also referred to as the lamp axis) C. The inner electrode 40 is not exposed to the discharge space S, but is buried within the inner tube 30.

[0033] A power feed rod 70 connected to a power feed line 80 is connected near one end 40T of the inner electrode 40 along the lamp axis C. Cylindrical ends 50T1 and 50T2 provided on the outer electrode 50 are electrically connected to the linear electrode portion. The outer electrode 50 is connected to earth or to a power supply unit 92 via a power feed line (not shown).

[0034] The inner tube 30 is formed with a flange-like portion (hereinafter also referred to as an expanded diameter portion) 31 that protrudes in the radial direction, and one end of the outer tube 20 is welded to the expanded diameter portion 31. The other end of the outer tube 20 is integrally formed with a protruding portion (exhaust pipe) 22 that is formed during the lamp manufacturing process.

[0035] The polarities of the inner electrode 40 and the outer electrode 50 are set to anode and cathode, respectively. High frequency (for example, in the range of several kHz to several tens of MHz) and high voltage (for example, in the range of several kV to several tens of kV) are supplied to the excimer lamp 10 via the power feed rod 70. This causes a dielectric barrier discharge in the discharge space S, and excimer light of a predetermined spectrum (for example, a wavelength of 172 nm) is emitted from the discharge space S.

[0036] The foil-shaped inner electrode 40 is arranged coaxially with the center of the inner tube 30, with its center in the width direction and thickness direction aligned with the center position of the inner tube 30. The inner tube 30 is also arranged coaxially with the outer tube 20. Therefore, the inner electrode 40 is arranged coaxially with the outer tube 20 and symmetrically with respect to the lamp axis C. Here, the width direction of the inner electrode 40 is defined as the Y direction, and the direction perpendicular thereto (thickness direction) is defined as the X direction (see FIG. 3).

[0037] The inner electrode 40 has a flat portion 42 with a substantially constant thickness, and has wedge-shaped portions 44 that taper from both widthwise ends of the flat portion 42 to both widthwise ends E1, E2 of the inner electrode 40. However, the inner electrode 40 may have a knife-edge shape with a cross section that slopes smoothly from the center along the electrode width direction toward both widthwise ends E1, E2 of the inner electrode.

[0038] The inner tube 30 has a cross-sectional shape with a different diameter along the tube axis C. Specifically, the inner tube 30 has a portion (hereinafter referred to as a small diameter portion) 32 that covers the foil-shaped inner electrode 40 in the discharge space S, and a portion (hereinafter referred to as a large diameter portion) 34 that has an expanded diameter portion 31 and covers the cylindrical power feed rod 70.

[0039] The large diameter portion 34 formed in the range L2 along the tube axis C is provided with a portion 36 (hereinafter referred to as the exposed portion) that extends further into the discharge space S than the expanded diameter portion 31 and is exposed to the discharge space S, and an extension portion 37 that extends beyond the outer tube 20 from the discharge vessel 15 to the outside of the discharge space S. The above-mentioned light emitting portion 14 is provided in the portion that protrudes to the outside without being covered by the shielding member 98 (the irradiation vessel 90 and the holding member 95), i.e., in part of the protrusion portion 38. The extension portion 37 is formed so that its radial cross section is circular.

[0040] The small diameter portion 32 has a substantially constant radial cross-sectional shape in a range L1 formed along the tube axis C, covers the vicinity of the connection between the inner electrode 40 and the power feed rod 70, and extends to the vicinity of the end 40T of the inner electrode 40. The radial cross-sectional shape of the portion of the small diameter portion 32 covering the inner electrode 40 is not circular but is elongated elliptical or oval.

[0041] The power feed rod 70 extends along the lamp axis C and is arranged coaxially with the inner tube 30 (discharge vessel 15). In the large diameter portion 34, the exposed portion 36, the expanded diameter portion 31, and a portion of the extended portion 34 on the expanded diameter portion 31 side are sealed during the lamp manufacturing process and are in contact with the power feed rod 70, whereas the tip portion 37T side of the extended portion 37 is formed with a tubular portion 39 having an annular (cylindrical) power feed space (hereinafter also referred to as hollow portion) 37R that surrounds the power feed rod 70 that penetrates the large diameter portion 34 without contacting it. The inner diameter D0 of the tubular portion 39 is smaller than the length W0 of the inner electrode 40 in the electrode width direction (Y direction).

[0042] As described above, the excimer lamp 10 is covered, except for the protrusion 38, so that light leaking from the shielding member 98 composed of the irradiation container 90 and the holding member 95 cannot be seen. The excimer lamp 10, in which the discharge container 15 is housed within the irradiation container 90, is held by the holding member 95. The holding member 95 is attached to the end of the irradiation container 90 and is configured to hold the extension 37 of the large diameter portion 34. The holding member 95 also forms one side of the irradiation container 90, preventing the light irradiated from the excimer lamp 10 from escaping to the outside.

[0043] The holding member 95 is configured as an opaque light-blocking member that blocks at least ultraviolet light and visible light that pass through the discharge vessel 15 and are irradiated into the irradiation space F inside the irradiation vessel 90. In addition, the holding member 95 can be configured to block light (including visible light) that is irradiated onto the outer surface of the holding member 95 from outside the irradiation vessel 90.

[0044] Alternatively, the holding member 95 can be configured as a translucent holding member with a light-reducing (attenuating) function, so that visible light emitted from the discharge can be emitted. For example, it can be configured as a bore-through connector. Even in this case, it can be configured to block light (ultraviolet light) emitted by the discharge inside the irradiation container 90.

[0045] The power feeder 80 is composed of a conductive wire 83 at the center axis and an insulating coating 84 that covers the conductive wire 83. The end 70T of the power feeder rod 70 and the end 83T of the conductive wire 83 are crimped and electrically connected by a crimp sleeve 81. A covering member 82 that blocks light from outside the irradiation container 90 is provided between the end 84T of the insulating coating 84 and the end 37T of the extension 37. In this case, the covering member 82 is composed of an opaque insulating covering material such as a heat-shrinkable insulating tube. It can also be configured as a translucent covering member with a dimming (attenuation) function, allowing visible light emitted from the discharge to be emitted.

[0046] The outer peripheral surface of the extension portion 37 is exposed between the holding member 95 and the covering member 82 (hereinafter referred to as the exposed surface ER). This exposed surface ER is configured as the above-mentioned light emitting portion 14. Note that the exposed surface ER can also be configured as a window portion by covering it with a transparent material that transmits visible light (for example, a transparent glass member) or a dimming member (for example, a member that changes color from white depending on the lighting state, such as a translucent glass member).

[0047] A portion of the light emitted by discharge occurring in discharge space S of excimer lamp 10 passes from discharge space S through discharge vessel 15 and through extension 37 of inner large-diameter portion 34 of irradiation vessel 90, and is guided to the side of tip 37T of extension 37, i.e., to the outside of irradiation vessel 90. Therefore, when excimer lamp 10 is in a lighting state, light emitted from the discharge passes through discharge vessel 15 from discharge space S and is emitted into irradiation vessel 90, and light that enters exposed portion 36 from discharge space S and passes through extension 37 is emitted from exposed surface ER. When excimer lamp 10 is in a lighting state, visible light is emitted from the discharge together with ultraviolet light, and passes through large-diameter portion 34 exposed to discharge space S, so exposed surface ER functions as an indicator that shows that excimer lamp 10 is in a lighting state.

[0048] At this time, because the covering member 82 covers the vicinity of the tip end 37T of the extension portion 37, visible light irradiated from outside the irradiation container 90 toward the vicinity of one end side of the exposed surface ER is blocked by the covering member 82. In addition, the holding member 95 also blocks visible light irradiated from outside the irradiation container 90 toward the vicinity of the opposite end side of the exposed surface ER. Visible light from outside, such as illumination light, does not reach both sides of the exposed surface ER, thereby increasing the visibility of the visible light emitted from the exposed surface ER.

[0049] The large diameter portion 34 having the extension 37 has a larger diameter than the small diameter portion 32 that faces the outer electrode 50 in the discharge space S. Therefore, light emitted by discharge is more likely to be incident on the large diameter portion 34. As a result, the visible light emitted from the exposed surface ER is perceived as bright light.

[0050] The power feed rod 70 covered by the extension 37 has a rough surface, and therefore light passing through toward the tip 37T of the extension 37 is diffusely reflected and attenuated at the contact surface with the extension 37. However, by forming the tubular portion 39 that forms the annular (cylindrical) power feed space 37R that surrounds the power feed rod 70 penetrating the large diameter portion 34 without coming into contact with it, it is possible to prevent attenuation of light passing through toward the tip 37T of the extension 37.

[0051] On the other hand, the size of the power supply space 37R, i.e., the inner diameter D0 of the tubular portion 39 of the extension portion 37, is smaller than the length (width) W0 in the electrode width direction of the inner electrode 40. As a result, more light is transmitted to the portion (protruding portion 38) of the extension portion 37 that is not covered by the shielding member 98 composed of the irradiation container 90 and the holding member 95 and that protrudes to the outside.

[0052] Furthermore, the portion of the extension 37 protruding from the holding member 95 is covered with a covering member 82 that blocks light from outside the irradiation container 90, except for the exposed surface ER.

[0053] As described above, the light emitted by the discharge and incident on the extension 37 is configured to be transmitted to the outside of the irradiation container 90 without attenuation as much as possible, and outside the irradiation container 90, the light is emitted from the exposed surface ER, which is part of the part protruding from the irradiation container 90. This suppresses ozone generation outside the irradiation container 90 due to the light emitted from the exposed surface ER.

[0054] Furthermore, a light-shielding member 82 covers the vicinity of the tip 37T of the extension 37, and the exposed surface ER is provided closer to the irradiation container 90 than the tip 37T. The light transmitted through the extension 37 has a relatively high light intensity at the tip 37T due to the optical fiber effect, but visibility is poor because it is easily affected by visible light irradiated from outside, such as illumination light. By providing the exposed surface ER as a light-emitting portion on the outer peripheral surface of the protruding part of the extension 37, visibility is improved.

[0055] The light emitting section may be configured not only by the exposed surface ER (or the window portion covering the exposed surface ER) but also by combining both the holding member 95 and the covering member 82, or by combining either one of them.

[0056] For example, if the light-blocking member 95 is configured as a bore-through connector with a dimming function, its appearance will be perceived as white when the excimer lamp 10 is not lit. When the excimer lamp 10 is lit, the color will change and it will be perceived as a color other than white, such as reddish purple or green.

[0057] If the holding member 95 has a color-changing function in response to irradiated light, such as a bore-through connector, the exposed surface ER may not be provided between the holding member 95 and the covering member 82. The covering member 82 may also be configured as a light-reducing member rather than a light-blocking member. In this case, it is possible to configure a light emitting portion by covering the portion of the extension 37 that protrudes from the holding member 95. Alternatively, the light emitting portion may be configured by the exposed surface ER and the covering member 82.

[0058] Such an excimer lamp 10 can be manufactured, for example, by the manufacturing method described below.

[0059] First, an expanded diameter portion is formed on a cylindrical glass tube (hereinafter referred to as a sealing tube) that forms the large diameter portion of the inner tube and is integrally and hermetically sealed with the outer tube. At this time, a hollow portion with an inner diameter that allows a cylindrical power feed rod to be inserted is provided in the large diameter portion. In addition, a cylindrical glass tube (hereinafter referred to as a sealing tube) that forms the small diameter portion of the inner tube and is integrally sealed with the inner electrode is fused coaxially to the sealing tube. At this time, a hollow portion with an inner diameter that allows a foil-shaped inner electrode to be inserted is provided in the small diameter portion, and the sealing tube has a smaller outer diameter and thickness and a larger inner diameter than the sealing tube. Note that a process of cutting the glass tube may be performed instead.

[0060] After the power feed rod is connected to the inner electrode by resistance welding or the like, it is inserted into an inner tube having a large diameter portion and a small diameter portion formed as an integral part. The inner tube with the inner electrode and power feed rod inserted is evacuated and sealed, and the inner tube is heated from the outside to seal the small diameter portion of the inner tube to the inner electrode and the large diameter portion to the power feed wire. At this time, the heating is adjusted so that the cross section of the small diameter portion becomes an oblong shape.

[0061] For example, by rotating the glass tube and heating it with a burner or the like, the inner surface of the glass tube is uniformly circumferentially contracted (reduced in diameter) until it comes into contact with both ends (wedge-shaped portions) of the foil-shaped inner electrode, and the glass tube between the portions in contact with the both ends (wedge-shaped portions) of the inner electrode is contracted along the thickness direction of the inner electrode to be integrated with the flat portion, thereby making it possible to weld the glass tube to an oblong or elliptical cross section and to the inner electrode. Note that a step of coating the glass tube may be performed instead.

[0062] An outer tube made of quartz glass or the like is then formed with an exhaust pipe at one end and an insertion opening at the other end, and the inner tube to which the inner electrode and power supply rod are sealed is inserted into the outer tube, and the insertion opening of the outer tube is welded to the expanded diameter portion of the inner tube. The outer tube has an inner diameter corresponding to the outer diameter of the expanded diameter portion of the inner tube.

[0063] While the entire discharge vessel is heated, a vacuum is drawn through the exhaust pipe to remove impurities, and after the discharge gas is filled in, the exhaust pipe is sealed and an outer electrode is disposed on the outer surface of the outer tube.

[0064] The end of the power feed rod protruding from the extension and the end of the conductive wire are surrounded by a crimping sleeve and crimped together to electrically connect them. To prevent the crimping sleeve from being exposed, a covering member disposed between the end of the insulating covering of the power feed wire and the end of the extension is thermally shrunk to cover it.

[0065] The discharge vessel of the excimer lamp manufactured in this manner is placed in the irradiation space within the irradiation vessel, and the extension portion of the excimer lamp is supported by a holding member (here, a bore-through connector) attached to one end of the irradiation vessel so that a part of the extension portion (protrusion portion) protrudes to the outside, thereby installing the excimer lamp coaxially with the irradiation space so that it can be attached and detached to the irradiation vessel.

[0066] When a high-frequency high voltage is applied between the inner electrode, which is connected to a power supply via a power feed rod and a power supply line, and the outer electrode, which is connected to earth via a power supply line, a discharge occurs in the discharge space. A portion of the light, including ultraviolet light, emitted from the discharge space in the direction of the lamp diameter passes through the outer tube and is irradiated into the irradiation space.

[0067] In addition, part of the light emitted in the direction of the lamp axis from the discharge generated in the discharge space enters the exposed part of the large diameter section, and is transmitted to the end of the extension section due to the fiber effect (an effect based on the same principle as optical fibers used in communication circuits) caused by repeated reflections on the inner and outer surfaces of the tubular section, and is then emitted from the exposed surface.

[0068] An operator visually checks the visible light emitted from this exposed surface to confirm the lighting state of the excimer lamp.

[0069] As described above, the excimer lamp 10 constituting the module of this embodiment forms a discharge space S, has an extension 37 extending from the end of the discharge vessel 15, and is placed in the irradiation vessel 90 by a holding member 95. The excimer lamp 10 is held so that at least a portion of the extension 37 protrudes from the holding member 95. The discharge vessel 15 and the holding member 95 constitute an opaque shielding member 98 that encloses and surrounds the discharge vessel 15 and blocks light (visible light) emitted by discharge. A portion of the protrusion 38 of the extension 37 protruding from the holding member 95 is provided with an exposed surface ER (light emitting portion 14) that emits light that has passed through the extension 37 due to discharge so as to be visible.

[0070] Next, a module according to a second embodiment will be described with reference to Fig. 4. In the second embodiment, the module is configured as a spot irradiation type ultraviolet irradiation module.

[0071] FIG. 4 is a schematic cross-sectional view of a module according to the second embodiment.

[0072] The ultraviolet irradiation module (light irradiator) 5' includes an excimer lamp 100 and a power supply (not shown). The excimer lamp 100 is configured as a spot irradiation lamp, and irradiates light containing ultraviolet rays in one direction from the emission surface (exit surface, window portion) 115W of the discharge vessel 115. An object to be treated with ultraviolet rays (not shown) is placed inside the irradiation vessel 190.

[0073] As in the first embodiment, the discharge vessel 115 has a double-tube structure in which an outer tube 120 and an inner tube 130 are coaxially arranged, and the inner electrode 140 is covered by the inner tube 130. The inner tube 130 has a small diameter portion 132 and a large diameter portion 134, and an extension portion 137 is formed in the large diameter portion 134.

[0074] In the second embodiment, the shielding member 198 is composed of the irradiation container 190, the holding member 195, and the reflective film 150, and an operator cannot see the light leaking from the shielding member 198. The outer electrode 150 is composed of a reflective film that covers the discharge container 112 (hereinafter referred to as the reflective film 150). The reflective film 150 reflects light that is emitted to the outside of the discharge container 112 by discharge. The reflective film 150 is also configured to block light from the outside of the irradiation container 190. The reflective film 150 extends from one end 150T1 near the emission surface 115W to an end 150T2 that covers the extension portion 137. At least a part of the extension portion 137 is provided with a protrusion 138 that protrudes outside the reflective film 150.

[0075] The holding member 195 forms one side surface of the irradiation vessel 190 and holds the outer peripheral portion of the outer tube 120 close to the emission surface 115W of the discharge vessel 115. As in the first embodiment, the irradiation vessel 190 and the holding member 195 block light emitted from the emission surface 115W by discharge. They are also configured to block light from outside the irradiation vessel 190. For example, the holding member 195 can be configured as a hermetic seal member (O-ring).

[0076] An end 170T of the power feed rod 170 and an end 183T of the conductive wire 183 are crimped and electrically connected by a crimping sleeve 181. A covering member 182 that blocks light irradiated from outside the irradiation container 190 is provided between an end 184T of the insulating covering 184 and an end 137T of the extension portion 137.

[0077] Such an excimer lamp 100 can be manufactured, for example, by the manufacturing method described below.

[0078] An outer tube made of quartz glass or the like is formed with an exhaust tube at one end, an exhaust tube on its outer periphery, and an insertion port at the other end, and as in the first embodiment, the inner tube with the inner electrode and power feed rod sealed thereto is inserted into the outer tube and welded, and discharge gas is sealed in through the exhaust tube. The outer electrode made of a reflective film is formed directly on the outer periphery of the outer tube and the extended part by sputtering after masking the area on the outer surface of the discharge tube that will become the emission surface and the area that will become the protrusion (light emitting part), and surface treating the area where the outer electrode will be provided by irradiating it with ultraviolet light.

[0079] The discharge vessel (outer tube) of the excimer lamp manufactured in this manner is supported by a holding member attached to a part of the irradiation vessel so that the emission surface of the discharge vessel faces the object to be treated with ultraviolet light inside the irradiation vessel, thereby installing the excimer lamp so that it can be attached and detached to the irradiation vessel.

[0080] As in the first embodiment, when a high-frequency high voltage is applied between the inner electrode and the outer electrode, a discharge occurs in the discharge space. Then, a portion of the light, including ultraviolet rays, emitted from the discharge space passes through the emission surface of the discharge vessel and is irradiated onto an object to be treated with ultraviolet rays in the irradiation space. In addition, a portion of the light emitted in the lamp axial direction enters the exposed portion of the large-diameter portion and propagates toward the end of the extension portion.

[0081] The ultraviolet irradiation module (light irradiator) 5' is covered, except for the protruding portion 138 of the excimer lamp 100, so that light leaking from a shielding member 198 composed of an irradiation container 190, a holding member 195, and a reflective film 150 cannot be seen. The protruding portion 138 has an exposed surface ER between the reflective film 190 of the extension portion 137 and the covering member 182. This allows light that has passed through the extension portion 137 to be emitted from the exposed surface ER. An operator can visually check the visible light emitted together with the ultraviolet light at the exposed surface ER to confirm the lighting state of the excimer lamp 100.

[0082] In this way, similar to the excimer lamp 10 in which light is emitted from the outer peripheral surface of the discharge vessel as in the first embodiment, the spot irradiation type excimer lamp 100 also has an exposed surface ER in the extension portion 37 that functions as a light emitting portion and a lighting indicator portion, making it possible to detect whether the excimer lamp 10 is lighting in a normal state or in an abnormal state due to abnormal discharge.

[0083] It is also possible to provide a light emitting portion (such as an exposed surface) in a line irradiation type excimer lamp. For example, in the line irradiation type excimer lamp described in Patent Document 4, an exposed surface may be provided next to the end of the extension portion of the reflective film, and a covering member may be provided at the connection portion with the power supply line.

[0084] It is also possible to provide a light emitting portion in a hollow excimer lamp. For example, in the hollow excimer lamp described in Patent Document 5, it is possible to provide an exposed surface that is not covered with a reflective film in the portion protruding from the discharge vessel of a tube through which a fluid such as gas flows along the lamp axis. [Explanation of symbols]

[0085] 5. Ozone generation module (light irradiator) 10 Excimer Lamp 20 Outer tube 30 inner tube 37 Stretching section 40 inner electrode 50 outer electrode 82 Covering material 90 Irradiation container (irradiation part) 95 Support member ER exposed surface

Claims

1. a discharge vessel that forms a discharge space and through which light emitted by discharge passes; an extension extending from an end of the discharge vessel and transmitting light emitted by the discharge; the extension portion is provided with a protrusion that encompasses the discharge vessel and the extension portion and protrudes from a shielding member that blocks light that has passed through the discharge vessel, An excimer lamp characterized in that a light emitting portion is provided on at least a part of the protruding portion, through which light transmitted through the extending portion can be visually recognized.

2. 2. The excimer lamp according to claim 1, wherein a covering member is provided on at least one side of the light emitting portion so as to cover the protrusion so as to prevent light from entering the protrusion from outside the shielding member.

3. 2. The excimer lamp according to claim 1, wherein the light emitting portion is provided on the outer peripheral surface closer to the discharge vessel than the tip of the extension portion.

4. 2. The excimer lamp according to claim 1, wherein the light emitting portion is provided on the outer peripheral surface between a holding member that holds the extension portion to the discharge vessel and the tip of the extension portion.

5. 2. The excimer lamp according to claim 1, wherein the light emitting portion is provided on the outer peripheral surface between a reflective film that covers the extension portion and reflects light emitted by discharge and the tip of the extension portion.

6. the discharge vessel having an inner tube and an outer tube; a small diameter portion of the inner tube covering an inner electrode disposed within the discharge vessel; a flange-shaped portion to which the outer pipe is welded and a large diameter portion in which the extension portion is formed, 6. The excimer lamp according to claim 1, wherein the outer diameter of the small diameter portion is smaller than the outer diameter of the extended portion.

7. The inner electrode is a foil electrode, the large diameter portion has a tubular portion that covers a power feed rod connected to the foil electrode without contacting the power feed rod, 7. The excimer lamp according to claim 6, wherein the inner diameter of the tubular portion is smaller than the width of the foil electrode.

8. 6. The excimer lamp according to claim 1, wherein the transmittance of the extension is lower than the transmittance of the discharge vessel in the wavelength range of light emitted by the discharge in the discharge space.

9. a discharge vessel that forms a discharge space and through which light emitted by discharge passes; an excimer lamp including an extension extending from an end of the discharge vessel and through which light emitted by discharge passes; a shielding member that covers the discharge vessel and a part of the extending portion and blocks light that has passed through the discharge vessel, A light irradiator, characterized in that a light emitting portion that allows light transmitted through the extension portion to be visible is provided on at least a part of a protruding portion that protrudes from the shielding member of the extension portion.

10. an excimer lamp including a discharge vessel that forms a discharge space and through which light emitted by discharge passes, and an extension portion that extends from an end of the discharge vessel and through which the light emitted by discharge passes, the excimer lamp being covered with a shielding member, and a light emitting portion being provided on at least a part of the protrusion that protrudes from the shielding member so that the light that has passed through the extension portion can be visually recognized; A method for indicating the lighting state of an excimer lamp, characterized in that when the excimer lamp is lit, light emitted by discharge is emitted not from the shielding member but from the light emitting portion.

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