Solid target material supply device, extreme ultraviolet light generator, and method for producing electronic device

Abstract

To provide a solid target material supply device capable of readily and stably supplying a solid target material to a molten target container, by suppressing clogging of a funnel, by extending a time difference of fall.SOLUTION: A solid target material supply device includes a solid target container, a first path through which the solid target material supplied from the solid target container passes, a tube that receives the solid target material having passed through the first path, a delivery rod that sends the target material inside the tube along the length of the tube, and a drive unit that reciprocates the delivery rod along the length of the tube, and a delivery device; a second path through which the target material delivered by the delivery device passes; and a funnel for guiding the target material falling through the second path into a molten target container of an extreme ultraviolet light generation device. The drive unit drives the delivery rod such that, when two or more target materials fall from the second path into the funnel during a single reciprocating motion, the time difference between the falls becomes longer than 1.1 seconds.SELECTED DRAWING: Figure 13

Description

[Technical Field]

[0001] The present disclosure relates to a solid target material supply apparatus, an extreme ultraviolet light generating apparatus, and a method for manufacturing an electronic device. [Background technology]

[0002] In recent years, with the miniaturization of semiconductor processes, the miniaturization of transfer patterns in optical lithography for semiconductor processes has progressed rapidly. In the next generation, fine processing of 10 nm or less will be required. For this reason, there is a demand for the development of an exposure tool that combines an extreme ultraviolet (EUV) light generation device that generates EUV light with a wavelength of approximately 13 nm and a reduced projection reflective optical system.

[0003] As an EUV light generation device, development of an LPP (Laser Produced Plasma) type device that uses plasma generated by irradiating a target material with laser light is progressing. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] US Patent Application Publication No. 2023 / 0008733 [Patent Document 2] Japanese Patent Application Laid-Open No. 2003-164553 [Patent Document 3] Summary of JP 2005-249000 A

[0005] A solid target material supply device according to one aspect of the present disclosure comprises: a solid target container that stores solid target material; a first path through which the solid target material supplied from the solid target container passes; a delivery device including a tube that receives the solid target material that has passed through the first path, a delivery rod that delivers the solid target material inside the tube in the longitudinal direction of the tube; and a drive unit that reciprocates the delivery rod in the longitudinal direction of the tube; a second path through which the solid target material delivered by the delivery device passes; and a funnel for guiding the solid target material that passes through the second path and falls into the molten target container of the extreme ultraviolet light generation device, wherein the drive unit drives the delivery rod so that when two or more solid target materials fall from the second path into the funnel with one reciprocating motion, the time difference between the falls is longer than 1.1 seconds.

[0006] A method for manufacturing an electronic device according to one aspect of the present disclosure includes: a solid target container that contains a solid target material; a first path through which the solid target material supplied from the solid target container passes; a delivery device including a tube that receives the solid target material that has passed through the first path, a delivery rod that delivers the solid target material inside the tube in the length direction of the tube; and a drive unit that reciprocates the delivery rod in the length direction of the tube; a second path through which the solid target material delivered by the delivery device passes; and a funnel that guides the solid target material that has passed through the second path and dropped to a molten target container of an extreme ultraviolet light generation device, and the drive unit drives the funnel to deliver two or more solid target materials from the second path to the funnel with one reciprocating motion. the extreme ultraviolet light is generated by an extreme ultraviolet light generation device that includes a solid target material supply device that drives the delivery rod so that the time difference between the falls is longer than 1.1 seconds when the solid target material falls; a molten target container that melts the solid target material supplied by the solid target material supply device to generate molten target material; a nozzle that emits the molten target material generated in the molten target container; a laser device that irradiates pulsed laser light onto the molten target material that has been emitted from the nozzle and reached a predetermined area; and an EUV collector mirror that collects the extreme ultraviolet light emitted from the plasma generated in the predetermined area; the extreme ultraviolet light is output to an exposure device; and the extreme ultraviolet light is exposed onto a photosensitive substrate in the exposure device to manufacture an electronic device.

[0007] A method for manufacturing an electronic device according to one aspect of the present disclosure includes: a solid target container that contains a solid target material; a first path through which the solid target material supplied from the solid target container passes; a delivery device including a tube that receives the solid target material that has passed through the first path, a delivery rod that delivers the solid target material inside the tube in the length direction of the tube, and a drive unit that reciprocates the delivery rod in the length direction of the tube; a second path through which the solid target material delivered by the delivery device passes; and a funnel for guiding the solid target material that has passed through the second path and fallen into a molten target container of an extreme ultraviolet light generation device, wherein the drive unit drives the funnel when two or more solid target materials fall from the second path into the funnel with one reciprocating motion. a solid target material supply device that drives the delivery rod so that the time difference between the drops is longer than 1.1 seconds; a molten target container that melts the solid target material supplied by the solid target material supply device to generate molten target material; a nozzle that emits the molten target material generated in the molten target container; a laser device that irradiates with pulsed laser light the molten target material that has been emitted from the nozzle and reached a predetermined area; and an EUV focusing mirror that focuses the extreme ultraviolet light emitted from the plasma generated in the predetermined area, thereby inspecting the mask for defects, selecting a mask using the inspection results, and exposing and transferring the pattern formed on the selected mask onto a photosensitive substrate. [Brief explanation of the drawings]

[0008] Some embodiments of the present disclosure will now be described, by way of example only, with reference to the accompanying drawings, in which: [Figure 1] Figure 1 shows the configuration of an LPP-type EUV light generation system. [Figure 2] FIG. 2 shows the configuration of a droplet target generation device in an EUV light generation system according to a comparative example. [Figure 3] FIG. 3 shows the configuration and operation of a transmission device in a comparative example. [Figure 4] FIG. 4 shows the configuration and operation of a transmission device in a comparative example. [Figure 5] FIG. 5 shows the configuration and operation of a transmission device in a comparative example. [Figure 6] FIG. 6 shows the configuration and operation of a transmission device in a comparative example. [Figure 7] FIG. 7 illustrates the movement of the solid target material in response to the reciprocating motion of the delivery rod. [Figure 8] FIG. 8 shows a funnel and feed tube for receiving the solid target material that falls from the outlet and directing it to the molten target vessel. [Figure 9] FIG. 9 shows a first example where two solid target materials fall into the funnel in one reciprocating motion of the delivery bar. [Figure 10] FIG. 10 is a graph showing the timing of dropping the solid target material in the first example together with the cam curve of the cam. [Figure 11] FIG. 11 shows a second example in which two solid target materials fall into the funnel in one reciprocating motion of the delivery rod. [Figure 12] FIG. 12 is a graph showing the timing of dropping the solid target material in the second example together with the cam curve of the cam. [Figure 13] FIG. 13 shows the configuration of the cam and cam follower in the first embodiment. [Figure 14] FIG. 14 is a graph showing the timing of dropping the solid target material in the first example of the first embodiment together with the cam curve of the cam. [Figure 15] FIG. 15 is a graph showing the timing of dropping the solid target material in the first embodiment in the second example together with the cam curve of the cam. [Figure 16] FIG. 16 shows the configuration of a droplet target generation device according to the second embodiment. [Figure 17] FIG. 17 shows the configuration of an exposure tool connected to an EUV light generation system. [Figure 18] Figure 18 shows the configuration of the inspection device connected to the EUV light generation system. Embodiment

[0009] <Contents> 1. Overview of EUV Light Generation System 11 1.1 Configuration 1.2 Operation 2. Comparative Example 2.1 Configuration of the droplet target generation device 26 2.1.1 Solid Target Material Supply System 260 2.1.2 Molten target vessel C3 2.1.3 Nozzle 52 2.2 Operation of the droplet target generation device 26 2.3 Configuration of the transmission device 8 2.4 Operation of the sending device 8 2.5 Issues with the comparative example 3. Time lag of fall T ψ -T ω the solid target material supply device 260, 3.1 Configuration of Cam 841a 3.2 Cam curve of cam 841a 3.3 Effect 4. Solid target material supply device 260c including detector D2 4.1 Configuration 4.2 Operation 4.3 Effect 5.Other 5.1 EUV light utilization equipment 6 5.2 Supplementary Information

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The embodiments described below show some examples of the present disclosure and do not limit the content of the present disclosure. Furthermore, not all of the configurations and operations described in each embodiment are necessarily essential as the configurations and operations of the present disclosure. Note that the same components are given the same reference symbols, and redundant explanations will be omitted.

[0011] 1. Overview of EUV Light Generation System 11 1.1 Configuration FIG. 1 shows the configuration of an LPP-type EUV light generation system 11. The EUV light generation apparatus 1 is used together with a laser apparatus 3. In this disclosure, a system including the EUV light generation apparatus 1 and the laser apparatus 3 is referred to as the EUV light generation system 11. The EUV light generation apparatus 1 includes a chamber 2 and a droplet target generator 26. The chamber 2 is a sealable container. The droplet target generator 26 supplies a target 27 containing a target material into the chamber 2. The target material may include tin, terbium, gadolinium, lithium, xenon, or a combination of any two or more of these.

[0012] A through-hole is provided in the wall of the chamber 2. The through-hole is closed by a window 21, through which the pulsed laser beam 32 output from the laser device 3 passes. An EUV collector mirror 23 having a reflective surface with an ellipsoidal shape is disposed inside the chamber 2. The EUV collector mirror 23 has first and second focal points. A multilayer reflective film in which molybdenum and silicon are alternately stacked is formed on the surface of the EUV collector mirror 23. The EUV collector mirror 23 is disposed so that its first focal point is located in the plasma generation region 25 and its second focal point is located at the intermediate focal point 292. A through-hole 24 is provided in the center of the EUV collector mirror 23, through which the pulsed laser beam 33 passes.

[0013] The EUV light generation device 1 includes an EUV light generation processor 5, a target sensor 4, etc. The EUV light generation processor 5 is a processing device including a memory 501 in which a control program is stored and a CPU (central processing unit) 502 that executes the control program. The EUV light generation processor 5 is specially configured or programmed to execute various processes included in the present disclosure. The target sensor 4 detects at least one of the presence, trajectory, position, and speed of the target 27. The target sensor 4 may also have an imaging function.

[0014] The EUV light generation system 1 also includes a connection part 29 that connects the interior of the chamber 2 with the interior of the EUV light utilization system 6. The EUV light utilization system 6 may be an exposure system 6a shown in FIG. 17 or an inspection system 6b shown in FIG. 18. A wall 291 having an aperture formed therein is provided inside the connection part 29. The wall 291 is positioned so that the aperture is located at the second focal point of the EUV collector mirror 23.

[0015] The EUV light generation system 1 further includes a laser beam transmission device 34, a laser beam focusing mirror 22, and a target recovery unit 28 for recovering the target 27. The laser beam transmission device 34 includes an optical element for defining the transmission state of the pulsed laser beam 32, and an actuator for adjusting the position, attitude, etc. of the optical element.

[0016] 1.2 Operation The operation of the EUV light generation system 11 will be described with reference to Fig. 1. Pulsed laser light 31 output from the laser device 3 passes through a laser light transmission device 34, passes through a window 21 as pulsed laser light 32, and enters the chamber 2. The pulsed laser light 32 travels through the chamber 2 along the laser light path, is reflected by the laser beam focusing mirror 22, and is irradiated onto the target 27 as pulsed laser light 33.

[0017] The droplet target generation device 26 outputs a target 27 toward the plasma generation region 25 inside the chamber 2. The target 27 is irradiated with a pulsed laser beam 33. The target 27 irradiated with the pulsed laser beam 33 is converted into plasma, and the plasma emits radiation 251. The EUV light contained in the radiation 251 is reflected by the EUV collector mirror 23 with a higher reflectance than light in other wavelength ranges. Reflected light 252 containing EUV light reflected by the EUV collector mirror 23 is collected at an intermediate focus 292 and output to the EUV light utilization device 6. Note that one target 27 may be irradiated with multiple pulses contained in the pulsed laser beam 33.

[0018] The EUV light generation processor 5 controls the entire EUV light generation system 11. The EUV light generation processor 5 processes the detection results of the target sensor 4. Based on the detection results of the target sensor 4, the EUV light generation processor 5 controls the timing and output direction of the target 27. Furthermore, the EUV light generation processor 5 controls the oscillation timing of the laser device 3, the propagation direction of the pulsed laser beam 32, the focusing position of the pulsed laser beam 33, etc. The various controls described above are merely examples, and other controls may be added as necessary.

[0019] 2. Comparative Example 2.1 Configuration of the droplet target generation device 26 2 shows the configuration of a droplet target generation device 26 in an EUV light generation system 11 according to a comparative example. The comparative example in the present disclosure refers to a configuration that the applicant recognizes as being known only by the applicant, and is not a publicly known example that the applicant acknowledges. The droplet target generation device 26 includes a solid target material supply device 260, a molten target container C3, and a nozzle 52.

[0020] 2.1.1 Solid Target Material Supply System 260 The solid target material supply device 260 includes a solid target container C1, a dispenser 7, a sending device 8, a funnel 9, a load lock chamber C2, a target supply processor 55, supply pipes 40 to 45, a gas cylinder G1, and a pressure regulator 56. The path of the solid target material 270 formed by the dispenser 7 and the supply pipe 40 corresponds to a first path through which the solid target material 270 supplied from the solid target container C1 passes. The supply pipe 41 corresponds to a second path through which the solid target material 270 sent by the sending device 8 passes.

[0021] The target supply processor 55 is a processing device including a memory 551 in which a control program is stored and a CPU 552 that executes the control program. The target supply processor 55 corresponds to the processor in this disclosure. The target supply processor 55 is specially configured or programmed to execute various processes included in this disclosure.

[0022] The solid target container C1 is a container that contains a solid target material 270 such as tin. The solid target material 270 may be, for example, approximately spherical grains of approximately the same size. The grain size of the solid target material 270 is, for example, 2 mm or more and 5 mm or less. The grain size of the solid target material 270 is, for example, the diameter of a perfect sphere with the same volume. The temperature inside the solid target container C1 is lower than the melting point of the target material. The pressure inside the solid target container C1 is approximately the same as atmospheric pressure.

[0023] A dispensing device 7 is connected to the bottom of the solid target container C1, and the dispensing device 7 is connected to a sending device 8 via a supply pipe 40. Details of the sending device 8 will be described later with reference to FIGS. 3 to 6. The supply pipe 41 is disposed at an angle to the direction of gravity, and the sending device 8 is connected to the lower end of the supply pipe 41. A funnel 9 is disposed below a discharge port 410 near the upper end of the supply pipe 41, with a gap between the discharge port 410 and the funnel 9. The funnel 9 is connected to a load lock chamber C2 via supply pipes 42 and 43. A valve V1 is connected between the supply pipes 42 and 43.

[0024] The load lock chamber C2 is a container that contains the solid target material 270 supplied from the solid target container C1. The temperature inside the load lock chamber C2 is lower than the melting point of the target material. The load lock chamber C2 is connected to the molten target container C3 via supply pipes 44 and 45. A valve V2 is connected between the supply pipes 44 and 45.

[0025] 2.1.2 Molten target vessel C3 The molten target container C3 is a container that contains the target material supplied from the load lock chamber C2. The molten target container C3 is connected to a gas cylinder G1 via a pressurized gas pipe L0. The gas cylinder G1 contains a high-pressure rare gas such as argon gas or helium gas as pressurized gas. A pressure regulator 56 and a pressure gauge P are arranged on the pressurized gas pipe L0. The target supply processor 55 controls the pressure regulator 56 based on the output of the pressure gauge P, thereby adjusting the pressure inside the molten target container C3 to a predetermined pressure higher than atmospheric pressure.

[0026] A heater 51 and a level sensor 54 are disposed in the molten target container C3. The heater 51 is connected to a power supply (not shown) and heats the interior of the molten target container C3 to a predetermined temperature higher than the melting point of the target material. The power supply is controlled based on the output of a temperature sensor (not shown) disposed in the molten target container C3, thereby controlling the temperature inside the molten target container C3. As a result, the solid target material 270 is melted in the molten target container C3, generating the molten target material. The level sensor 54 detects the liquid level of the molten target material inside the molten target container C3.

[0027] 2.1.3 Nozzle 52 The nozzle 52 is disposed at the lower end of the molten target container C3 in the direction of gravity. The tip of the nozzle 52 opens into the interior of the chamber 2 (see FIG. 1). A piezoelectric element 53 is disposed in the nozzle 52.

[0028] 2.2 Operation of the droplet target generation device 26 When the level sensor 54 detects that the liquid surface position of the molten target material inside the molten target container C3 has fallen below a threshold, the solid target material 270 is replenished from the solid target container C1 as follows.

[0029] The target supply processor 55 opens valve V1 while keeping valve V2 closed. With valve V2 closed, the interior of the molten target container C3 is maintained at high pressure. By opening valve V1, the load lock chamber C2 is ready to receive the solid target material 270.

[0030] The target supply processor 55 calculates the amount of solid target material 270 to be supplied by the dispensing device 7 from the shortage of the molten target material inside the molten target container C3, and outputs a dispensing signal to the dispensing device 7. The dispensing device 7 dispenses the solid target material 270 one by one to the supply pipe 40 in accordance with the dispensing signal. The target supply processor 55 does not output the next dispensing signal until the replenishment of the solid target material 270 into the molten target container C3 based on the most recent dispensing signal is completed.

[0031] The delivery device 8 receives the solid target material 270 from the supply pipe 40 and delivers the solid target material 270 one by one to the supply pipe 41 at regular time intervals in accordance with a control signal from the target supply processor 55 .

[0032] The solid target materials 270 delivered one by one from the delivery device 8 to the supply pipe 41 are pressed by the solid target materials 270 delivered later. As a result, the solid target materials 270 move in a line through the supply pipe 41 against gravity, and fall sequentially from the discharge port 410 into the funnel 9, starting with the leading solid target material 270. By delivering the solid target materials 270 against gravity, the height of the entire EUV light generation system 11, including the solid target material supply device 260, can be reduced, and the flexibility in installing the EUV light generation system 11 can be improved.

[0033] The solid target material 270 that has dropped into the funnel 9 from the discharge port 410 flows into the supply pipe 42. The solid target material 270 moves to the load lock chamber C2 through the open valve V1 and the supply pipe 43. When the desired amount of solid target material 270 has moved to the load lock chamber C2, the target supply processor 55 stops the operation of the dispensing device 7 and the sending device 8 and closes the valve V1.

[0034] Next, the target supply processor 55 opens valve V2 to supply the solid target material 270 contained in the load lock chamber C2 to the molten target container C3. The solid target material 270 moves from the load lock chamber C2 to the molten target container C3. The solid target material 270 supplied to the molten target container C3 melts and mixes with the target material already contained and melted in the molten target container C3. The heater 51 prevents the temperature inside the molten target container C3 from decreasing.

[0035] When valve V2 is opened, part of the gas inside the molten target vessel C3 moves to the load lock chamber C2, causing a temporary drop in the pressure inside the molten target vessel C3. Because valve V1 is closed before valve V2 is opened, the high-pressure gas inside the molten target vessel C3 is prevented from flowing from valve V1 toward the funnel 9. In addition, pressurized gas inside gas cylinder G1 is supplied to the molten target vessel C3 via pressure regulator 56, thereby restoring the pressure inside the molten target vessel C3.

[0036] The molten target material inside the molten target container C3 is ejected from the opening at the tip of the nozzle 52 due to the pressure difference between the pressurized gas supplied from the pressure regulator 56 and the pressure inside the chamber 2. When the nozzle 52 is vibrated by the piezoelectric element 53, the jet of molten target material ejected from the nozzle 52 is separated into droplets, which become the target 27.

[0037] According to the comparative example, the solid target material 270 contained in the solid target container C1, which is at approximately atmospheric pressure, can be supplied to the inside of the molten target container C3, which is at high pressure. Even if the target material inside the molten target container C3 is consumed, the target material can be replenished without replacing the molten target container C3, thereby reducing the downtime of the EUV light generation system 1.

[0038] 2.3 Configuration of the transmission device 8 3 to 6 show the configuration and operation of a delivery device 8 in a comparative example. In FIGS. 3 to 6, the individual solid target materials 270 are labeled with symbols α to ω, and these symbols α to ω may be used to distinguish between them. The delivery device 8 includes a tube 80, a delivery rod 81, a stopper 82, and a base portion 83.

[0039] The tube 80 has a cylindrical shape with a straight central axis, and includes a receiving port 801 for receiving the solid target material 270 that has passed through the dispensing device 7 and the supply tube 40, and an inlet / outlet 802 facing the receiving port 801. The delivery rod 81 is located inside the tube 80, and is configured to deliver the solid target material 270 inside the tube 80 by alternately moving forward and backward in the lengthwise direction of the tube 80 using a driving unit 84.

[0040] The direction of the forward movement of the delivery rod 81 is the X direction, the direction in which the solid target material 270 passes through the receiving port 801 is the Z direction, and one of the directions perpendicular to the X and Z directions is the Y direction. Figures 3 to 6 are views of the delivery device 8 as viewed in the -Y direction. The tube 80 is supported by a base 83 at an angle A with respect to the horizontal direction, and is connected to a supply tube 41 which has an even greater inclination. A drive unit 84 is supported by the base 83.

[0041] The stopper 82 includes a tapered portion 820 and a rod portion 824. The tapered portion 820 is supported by the rod portion 824, and the rod portion 824 is supported by the base portion 83 via a rotation shaft 825. The rotation shaft 825 is parallel to the Y direction, and the stopper 82 is movable while rotating within a plane parallel to the XZ plane.

[0042] Tapered portion 820 passes through entrance / exit 802 of pipe 80. Tapered portion 820 includes a first surface 821 and a second surface 822. First surface 821 is inclined with respect to the X direction, and second surface 822 intersects with the X direction at an angle closer to perpendicular than the angle between the X direction and first surface 821.

[0043] 3 to 6 is applied to the stopper 82 by the restoring force of the spring 826. When the delivery rod 81 moves forward in the X direction, the stopper 82 is pressed by the delivery rod 81 and rotates clockwise against the restoring force of the spring 826. When the delivery rod 81 moves backward in the -X direction, the stopper 82 rotates counterclockwise by the restoring force of the spring 826, but when the stopper 82 hits the locking pin 827, the counterclockwise rotation of the stopper 82 is restricted. At this time, as shown in FIG. 3, the solid target material γ inside the tube 80 is restricted from returning in the -X direction by the stopper 82. In addition, a space is secured between the receiving port 801 and the inlet / outlet 802 to receive the solid target material β supplied from the receiving port 801.

[0044] 2.4 Operation of the sending device 8 3 to 6, the operation of the delivery device 8 to deliver the solid target material β waiting in the supply pipe 40 to the supply pipe 41 will be described. As a result of the delivery device 8 delivering the plurality of solid target materials 270 one by one, it is assumed that the solid target materials γ to ω have already been filled in a line inside the pipe 80 and the supply pipe 41, as shown in Fig. 3. When the delivery rod 81 moves back and reaches the most retracted position in the -X direction, the solid target material β moves into the space between the receiving port 801 and the entrance / exit port 802.

[0045] Thereafter, the delivery rod 81 moves in the X direction within the tube 80, and presses against the first surface 821 of the stopper 82 via the solid target material β between the receiving port 801 and the exit port 802. As shown in Fig. 4, the stopper 82 pressed by the delivery rod 81 rotates clockwise in Fig. 4 against the restoring force of the spring 826, and most of the tapered portion 820 moves to the outside of the tube 80. As a result, a passage is formed within the tube 80 that moves the solid target material β in the X direction.

[0046] The solid target material β is pressed against the wall surface on the −Z direction side of the inside of the tube 80 by the reaction force from the inclined first surface 821 of the stopper 82, and is then pressed by the delivery rod 81 moving in the X direction, and moves inside the tube 80 as shown by arrow B in FIG. 4. The solid target material β presses the solid target materials γ to ω. In this way, the delivery rod 81 delivers the solid target materials β to ω against gravity, causing the solid target material ω to fall from the discharge port 410.

[0047] When the solid target material β moves over the ridge between the first surface 821 and the second surface 822 of the tapered portion 820 and separates from the first surface 821, the stopper 82 rotates counterclockwise in FIG. 4 to the tip position of the delivery rod 81 due to the restoring force of the spring 826. In other words, the passage of the solid target material 270 in the tube 80 becomes maximum when the solid target material β moves over the ridge between the first surface 821 and the second surface 822 of the tapered portion 820, and thereafter the tapered portion 820 moves toward the inside of the tube 80.

[0048] 5, when the delivery rod 81 starts to move in the -X direction, the stopper 82 rotates counterclockwise in FIG. 5 while being pressed against the delivery rod 81 by the restoring force of the spring 826, and the tapered portion 820 moves further toward the inside of the tube 80. At this time, the solid target material β cannot get over the ridge between the first surface 821 and the second surface 822, and therefore cannot return to the space between the receiving port 801 and the entrance / exit port 802, and remains in contact with the second surface 822. The counterclockwise rotation of the stopper 82 is stopped by the locking pin 827.

[0049] As shown in FIG. 6, when the delivery rod 81 moves to the most retracted position in the −X direction, the solid target material α waiting in the supply pipe 40 moves into the space between the receiving port 801 and the exit port 802.

[0050] Thereafter, the operations described with reference to FIGS. 3 to 6 are repeated to deliver the solid target materials 270 to the supply pipe 41 one by one.

[0051] FIG. 7 shows the movement of the solid target materials β to ω in response to the reciprocating motion of the delivery rod 81. FIG. 7 shows a cam 841 and a cam follower 842 that constitute the drive unit 84. The cam 841 includes a rotation axis C that is fixed at a fixed position relative to the base unit 83 (see FIG. 3) and is rotatable clockwise around the rotation axis C by a motor (not shown). The cam follower 842 includes a rotation axis F that is fixed to the rear end of the delivery rod 81 and is rotatable around the rotation axis F. The cam follower 842 is pressed by the cam surface of the cam 841 and moves forward in the X direction together with the delivery rod 81. The delivery rod 81 is pressed in the −X direction by a biasing mechanism (not shown). When the cam surface retreats, the delivery rod 81 moves backward in the −X direction together with the cam follower 842. Therefore, the cam follower 842 is constantly in contact with the cam surface of the cam 841. The delivery rod 81 performs one reciprocating motion with each rotation of the cam 841.

[0052] The tip position of the delivery rod 81 when the delivery rod 81 is retracted to the furthest position in the -X direction is defined as Stt. The position of the second surface 822 of the stopper 82 when the stopper 82 shown in FIG. 3 is in contact with the locking pin 827, i.e., the rear end position of the solid target material γ restricted by the stopper 82 is defined as Stp. The position of the discharge port 410 of the supply pipe 41 is defined as End. The positions Stt, Stp, and End are constant regardless of the size or shape of the solid target materials β to ω.

[0053] The particle size of the solid target material β is Φ β The gap between the solid target materials β and γ when the delivery rod 81 is retracted to the farthest side in the −X direction is defined as the receiving margin Mβ The solid target materials β and γ may have different particle sizes, but the acceptance margin M β In defining the acceptance margin M, the difference in particle size between the solid target materials β and γ is assumed to be negligibly small. β is the particle size Φ of the solid target material β from the distance between the positions Stt and Stp. β is equal to the value obtained by subtracting

[0054] The distance from the center of gravity of the solid target material ω to the position End when the delivery rod 81 is retracted to the farthest position in the −X direction is defined as the waiting margin M ω The waiting margin M ω is equal to the value obtained by subtracting the sum of the particle diameters of the solid target materials γ to ψ and half the particle diameter of the solid target material ω from the distance between the positions Stp and End.

[0055] The distance between the centers of gravity of the solid target material ψ and ω is G ω-ψ The solid target materials ψ and ω may have different particle sizes, but the distance between the centers of gravity G ω-ψ In defining the above, the difference in particle size between the solid target materials ψ and ω is assumed to be negligibly small.

[0056] Acceptance margin M β is the particle size Φ of the solid target material β β and the waiting margin M ω depends on the particle size of the solid target material γ~ω, and the distance between the centers of gravity G ω-ψ depends on the particle size of the solid target material ψ and ω. The solid target material β to ω do not need to be spherical, but the acceptance margin M β , waiting margin M ω , and the distance between the centers of gravity G ω-ψ In defining the above, the difference in shape between the solid target materials β to ω and a perfect sphere can be ignored.

[0057] The displacement Po of the feed rod 81 when the feed rod 81 is moved to the farthest rearward position in the -X direction is set to 0 (Po=0). β When moving forward (Po=Mβ ), the solid target materials β and γ come into contact with each other. Thereafter, when the feed rod 81 moves forward in response to the rotation of the cam 841, the solid target materials β to ω move in the X direction.

[0058] The cam 841 further rotates, and the sending rod 81 moves in the X direction. β +M ω When moving forward (Po=M β +M ω ), the center of gravity of the solid target material ω reaches the position End, and the solid target material ω falls from the discharge port 410 into the funnel 9. Thereafter, when the delivery rod 81 moves forward in response to the rotation of the cam 841, the solid target materials β to ψ move in the X direction.

[0059] When the delivery rod 81 moves forward to the maximum in the X direction, the displacement Po is M β +M ω +G ω-ψ If it is less than (Po <M β +M ω +G ω-ψ ), the center of gravity of the solid target material ψ does not reach the position End, so the solid target material ψ remains inside the supply pipe 41. Thereafter, the delivery rod 81 makes a return movement in the −X direction in response to the rotation of the cam 841. In this case, one solid target material ω is supplied toward the supply pipe 42 with one reciprocating movement of the delivery rod 81.

[0060] 2.5 Issues with the comparative example 8 shows a funnel 9 and a supply pipe 42 for receiving the solid target material 270 dropped from the discharge port 410 and guiding it to the molten target container C3. The funnel 9 has a conical shape whose diameter decreases from the top to the bottom. The bottom of the funnel 9 is connected to the supply pipe 42. The inner diameter of the bottom of the funnel 9 is approximately equal to the inner diameter of the supply pipe 42 and is larger than the average particle size of the solid target material 270 contained in the solid target container C1 but smaller than twice the average particle size. Therefore, two or more solid target materials 270 cannot pass through the supply pipe 42 at the same time; they pass through the supply pipe 42 one at a time.

[0061] The solid target material 270 that has fallen into the funnel 9 moves due to gravity toward the bottom end of the funnel 9. If the direction of movement of the solid target material 270 that has fallen into the funnel 9 has a rotational component around the central axis of the funnel 9, the solid target material 270 receives a reaction force having a component in the direction opposite to gravity from the inner surface of the funnel 9 in response to the centrifugal force. At this time, the solid target material 270 moves in a spiral along the inner surface of the funnel 9, and it may take a long time to reach the bottom end of the funnel 9.

[0062] If the next solid target material ψ falls into the funnel 9 before the solid target material ω reaches the bottom end of the funnel 9, the two solid target materials ω and ψ may come into contact near the bottom end of the funnel 9, restricting each other's downward movement and causing clogging. For this reason, the time required for one reciprocating motion of the delivery rod 81 must be long enough so that the solid target material ψ falls into the funnel 9 with a sufficient time interval after the solid target material ω falls into the funnel 9.

[0063] However, it is possible that a plurality of solid target materials ω and ψ may fall into the funnel 9 during one reciprocating motion of the delivery rod 81. This will be described with reference to FIGS.

[0064] 9 shows a first example in which two solid target materials ω and ψ fall into the funnel 9 in one reciprocating motion of the delivery rod 81. In FIG. 9, the acceptance margin M β and the distance between the centers of gravity G ω-ψ is the same as in Figure 7, but the waiting margin M ω is smaller than that in Figure 7. Therefore, M β +M ω The value of is smaller than that in Fig. 7. That is, the solid target material ω falls faster than that in Fig. 7.

[0065] In Figure 9, M β +M ω +G ω-ψ The value of is also smaller than that in FIG. 7. By the time the delivery rod 81 has advanced to the maximum in the X direction, the displacement Po has reached M β +M ω +G ω-ψ When Po=M β+M ω +G ω-ψ ), the center of gravity of the solid target material ψ reaches the position End, and the solid target material ψ falls. In this way, two solid target materials ω and ψ fall into the funnel 9 by one reciprocating motion of the delivery rod 81.

[0066] FIG. 10 is a graph showing the timing of the solid target materials ω and ψ falling in the first example, along with the cam curve of the cam 841. The horizontal axis represents the rotation angle θ of the cam 841 and the time T when the cam 841 rotates at a constant speed. The maximum value of the time T corresponds to the time required for one reciprocating motion of the delivery rod 81, which is 6.0 seconds in FIG. 10. The vertical axis represents the displacement Po of the delivery rod 81 due to the motion of the cam 841, normalized to a maximum value of 1. The positions on the cam curve corresponding to the timing of the solid target materials ω and ψ are indicated by ωout1 and ψout1, respectively.

[0067] 10, the solid target material ω falls at ωout1 where the displacement Po is 0.1 and the time T is 2.0 seconds, and the solid target material ψ falls at ψout1 where the displacement Po is 1.0 and the time T is 3.0 seconds. Even though the difference in displacement Po between ωout1 and ψout1 is large at 0.9, the difference in time T is only 1.0 second.

[0068] 11 shows a second example in which two solid target materials ω and ψ fall into the funnel 9 in one reciprocating motion of the delivery rod 81. In FIG. 11, the waiting margin M ω and the distance between the centers of gravity G ω-ψ is the same as in Figure 7, but the acceptance margin M β is smaller than that in Figure 7. Therefore, M β +M ω The value of and M β +M ω +G ω-ψ The value of is also smaller than that in Figure 7. β +M ω When it reaches (Po=M β +M ω ), the solid target material ω falls.

[0069] Before the delivery rod 81 advances most in the X direction, the displacement Po reaches M β +M ω +G ω-ψ When it reaches (Po=M β +M ω +G ω-ψ ), the solid target material ψ also falls. In this way, two solid target materials ω and ψ fall into the funnel 9 by one reciprocating motion of the delivery rod 81.

[0070] 12 is a graph showing the timings at which the solid target materials ω and ψ fall in the second example, along with the cam curve of the cam 841. The definitions of the horizontal and vertical axes and the cam curve are the same as those in FIG. 10. The positions on the cam curve corresponding to the timings at which the solid target materials ω and ψ fall are indicated by ωout2 and ψout2, respectively.

[0071] 12, the solid target material ω falls at ωout2 where the displacement Po is 0.08 and the time T is 1.8 seconds, and the solid target material ψ falls at ψout2 where the displacement Po is 0.98 and the time T is 2.9 seconds. Even though the difference in the displacement Po between ωout2 and ψout2 is large at 0.9, the difference in the time T is only 1.1 seconds.

[0072] The embodiment described below is related to suppressing clogging in the funnel 9 and stably replenishing the solid target material 270 even when multiple solid target materials 270 fall into the funnel 9 with a single reciprocating motion of the delivery rod 81.

[0073] 3. Time lag of fall T ψ -T ω the solid target material supply device 260, 3.1 Configuration of Cam 841a 13 shows the configuration of cam 841a and cam follower 842 in the first embodiment. In Fig. 13, cam follower 842 is in contact with the cam surface of cam 841a at a portion where θ = 0°, which is the shortest distance from rotation axis C. When cam 841a rotates clockwise, cam follower 842 reciprocates along an extension of the line segment connecting rotation axes C and F.

[0074] The portion of the cam surface of the cam 841a that is farthest from the rotation axis C is located in the portion where θ>180°. Therefore, the first rotation angle θ1 of the cam 841a that causes the forward motion of the feed rod 81 is greater than the second rotation angle θ2 of the cam 841a that causes the backward motion of the feed rod 81. The first rotation angle θ1 may be smaller than three times the second rotation angle θ2. The first and second rotation angles θ1 and θ2 are, for example, 230° and 130°, respectively.

[0075] 3.2 Cam curve of cam 841a 14 is a graph showing the timing of the solid target materials ω and ψ falling in the first example of the first embodiment together with the cam curve of the cam 841a. The horizontal and vertical axes are defined in the same way as in FIG. 10. The time T corresponding to the peak position of the cam curve is referred to as the peak time T. peak The time T corresponding to the rotation angle θ=0 of the cam 841a is set as the start time T min and the start time T min The time required for one rotation of the cam 841a, that is, the time required for one reciprocating motion of the delivery rod 81, is defined as the rotation period T max and the rotation period T max It is desirable that the time is longer than 3.0 seconds and shorter than 12.0 seconds.

[0076] The time required for the forward movement of the delivery rod 81, T peak -T min is the time required for the return movement T max -T peak Longer. The time required for the outward movement is T peak -T min is the time required for the return movement T max -T peakWhen the peak position of the cam curve where the displacement Po=1 is at θ=230°, the peak time T peak and the time required for the outward movement T peak -T min The rotation period T is about 3.8 seconds. max If is 6.0 seconds, the time required for the return movement is T max -T peak is about 2.2 seconds.

[0077] The slope of the cam curve corresponds to the speed of the reciprocating motion of the feed rod 81. Of the approximately 3.8 seconds of forward motion, the speed is slow for approximately the first 1 second and the last 1 second, and then faster for approximately the middle 1.8 seconds. Furthermore, when the maximum absolute values ​​of the speeds of the forward and backward motions are Va and Vb, respectively, the drive unit 84 reciprocates the feed rod 81 so that Va is smaller than Vb. The drive unit 84 may also reciprocate the feed rod 81 so that Va is greater than one-third of Vb. It is desirable that Va be greater than 0.5 mm / s and less than 4.0 mm / s.

[0078] In Figure 14, the acceptance margin M β and waiting margin M ω 9 and 10, and two solid target materials ω and ψ fall into the funnel 9 by one reciprocating motion of the delivery rod 81. In this case, the displacement Po is 0.1, and the time T ω At ωout3, where ω is 0.9 seconds, the solid target material ω falls, the displacement Po is 1.0, and the time T ψ The solid target material ψ falls at ψout3, which is approximately 3.8 seconds. ψ -T ω is approximately 2.9 seconds.

[0079] 15 is a graph showing the drop timing of the solid target materials ω and ψ of the first embodiment in the second example, along with the cam curve of the cam 841a. The horizontal and vertical axes are defined in the same way as in FIG. 10, and the cam curve is the same as in FIG. 14.

[0080] In Figure 15, the acceptance margin M βand standby margin M ω is the same as FIGS. 11 and 12, and it is assumed that two solid target substances ω and ψ fall into the funnel 9 by one reciprocating motion of the delivery rod 81. In that case, the displacement Po is 0.08, and the time T ω is 0.8 seconds, and the solid target substance ω falls at ωout4, and the displacement Po is 0.98, and the time T ψ is about 3.0 seconds, and the solid target substance ψ falls at ψout4. The time difference T ψ -T ω is about 2.2 seconds.

[0081] The time difference T ψ -T ω is not limited to the lengths shown in FIGS. 14 and 15, but it is desirable that it is longer than one-fifth of the rotation period T max . The time difference T ψ -T ω is desirably longer than 1.1 seconds and shorter than 8.0 seconds. Although the case where the cam 841a rotates at a constant speed has been described, the rotation speed may be changed to control the time difference T ψ -T ω , the required time T peak -T min for the forward movement, the rotation period T max and so on.

[0082] The difference in the displacement Po between ωout3 and ψout3 in FIG. 14 and the difference in the displacement Po between ωout4 and ψout4 in FIG. 15 are both 0.9, but this value varies depending on the distance G ω-ψ between the centers of gravity of the solid target substances ψ and ω. If the moving distance L of the forward movement of the delivery rod 81 with respect to the distance G ω-ψ between the centers of gravity is too long, it is highly likely that two or more solid target substances 270 will fall in one reciprocating motion. Also, if the moving distance L is too short, it is highly likely that the solid target substance 270 will not fall even when the delivery rod 81 moves forward. When the average particle diameter of the solid target substance 270 accommodated in the solid target container C1 is D, it is desirable that the moving distance L of the forward movement of the delivery rod 81 is in the range of 1.05D < L < 1.6D.

[0083] 3.3 Action (1) According to the first embodiment, the solid target material supply device 260 includes a solid target container C1, a dispensing device 7 and a supply pipe 40, a sending device 8, a supply pipe 41, and a funnel 9. The solid target container C1 contains the solid target material 270. The dispensing device 7 and the supply pipe 40 allow the solid target material 270 supplied from the solid target container C1 to pass through. The sending device 8 includes a pipe 80 that receives the solid target material 270 that has passed through the dispensing device 7 and the supply pipe 40, a sending rod 81 that sends the solid target material 270 inside the pipe 80 in the X direction, which is the length direction of the pipe 80, and a drive unit 84 that reciprocates the sending rod 81 in the X direction and the −X direction, which is the length direction of the pipe 80. The supply pipe 41 allows the solid target material 270 sent by the sending device 8 to pass through. The funnel 9 guides the solid target material 270 that passes through the supply pipe 41 and falls to the molten target container C3 of the EUV light generation system 1. When two or more solid target materials 270 fall from the supply pipe 41 into the funnel 9 by one reciprocating motion of the delivery rod 81, the drive unit 84 determines the time difference T ψ -T ω The delivery rod 81 is driven so that the time is longer than 1.1 seconds.

[0084] According to this, the time difference between the falls, T ψ -T ω By lengthening the length, clogging of the funnel 9 can be suppressed, and the solid target material 270 can be stably supplied to the molten target container C3.

[0085] (2) According to the first embodiment, the driving unit 84 determines the time T required for the outward movement of the feeding rod 81 toward the supply pipe 41 during the reciprocating movement of the feeding rod 81. peak -T min The time required for the return movement in the opposite direction to the forward movement is T max -T peak The delivery rod 81 is reciprocated to become longer.

[0086] According to this, the time difference between the fall and the return movement is T ψ -T ω can be made longer.

[0087] (3) According to the first embodiment, the driving unit 84 has a time required for the forward movement T peak -T min However, the time required for the return movement is T max -T peak The delivery rod 81 is reciprocated so that the length is shorter than three times the length of the delivery rod 81.

[0088] According to this, the time required for the outward movement is T peak -T min In addition, the time required for the return movement T max -T peak By ensuring sufficient space, the delivery device 8 can be operated smoothly.

[0089] (4) According to the first embodiment, the drive unit 84 includes a cam 841a and a cam follower 842, and the first rotation angle θ1 of the cam 841a, which causes the forward movement of the delivery rod 81 toward the supply pipe 41, is greater than the second rotation angle θ2 of the cam 841a, which causes the return movement in the opposite direction to the forward movement.

[0090] According to this, when the cam 841a is rotated at a constant speed, the time required for the forward movement is T peak -T min The time required for the return movement is T max -T peak Since the time difference between the falls can be longer than T ψ -T ω can be made longer.

[0091] (5) According to the first embodiment, the first rotation angle θ1 is smaller than three times the second rotation angle θ2.

[0092] According to this, when the cam 841a is rotated at a constant speed, the time required for the forward movement is T peak -T min In addition, the time required for the return movement T max -T peak Since sufficient space can be secured, the delivery device 8 can be operated smoothly.

[0093] (6) According to the first embodiment, the drive unit 84 reciprocates the delivery rod 81 so that the maximum absolute value Va of the speed of the forward movement of the delivery rod 81 moving toward the supply pipe 41 is smaller than the maximum absolute value Vb of the speed of the return movement in the opposite direction to the forward movement.

[0094] According to this, the time difference between the fall and the return movement is T ψ -T ω can be made longer.

[0095] (7) According to the first embodiment, the drive unit 84 reciprocates the delivery rod 81 so that the maximum absolute value Va of the speed of the forward movement is greater than one-third of the maximum absolute value Vb of the speed of the backward movement.

[0096] According to this, by preventing not only the speed of the forward movement but also the speed of the return movement from being too fast, the delivery device 8 can be operated smoothly.

[0097] (8) According to the first embodiment, the drive unit 84 reciprocates the delivery rod 81 so that the maximum absolute value Va of the speed of the forward movement of the delivery rod 81 toward the supply pipe 41 is greater than 0.5 mm / s and less than 4.0 mm / s.

[0098] According to this, by setting Va to be faster than 0.5 mm / s, the amount of solid target material 270 delivered per unit time can be ensured sufficiently. ψ -T ω can be made longer.

[0099] (9) According to the first embodiment, the driving unit 84 determines the time difference T ψ -T ω The sending rod 81 is driven so that the time required for one reciprocating motion of the sending rod 81 is longer than one-fifth of the time required for one reciprocating motion of the sending rod 81.

[0100] According to this, the time difference between the falls, T ψ -T ωBy lengthening the length, clogging of the funnel 9 can be suppressed.

[0101] (10) According to the first embodiment, the driving unit 84 determines the time difference T ψ -T ω The delivery rod 81 is driven so that the time is shorter than 8.0 seconds.

[0102] According to this, the time difference between the falls, T ψ -T ω By ensuring that the time is not too long, the amount of solid target material 270 replenished per unit time can be ensured.

[0103] (11) According to the first embodiment, the driving unit 84 drives the feeding rod 81 so that the time required for one reciprocating motion of the feeding rod 81 is longer than 3.0 seconds.

[0104] According to this, by making the time required for one reciprocating motion longer than 3.0 seconds, the time difference between the falls, T ψ -T ω This can prevent the length from becoming too short.

[0105] (12) According to the first embodiment, the driving unit 84 drives the feeding rod 81 so that the time required for one reciprocating motion of the feeding rod 81 is shorter than 12.0 seconds.

[0106] According to this, by making the time required for one reciprocating motion shorter than 12.0 seconds, it is possible to ensure a sufficient number of solid target materials 270 delivered per unit time.

[0107] (13) According to the first embodiment, the distance L of the forward movement of the delivery rod 81 toward the supply pipe 41 is smaller than 1.6 times the average particle size D of the solid target material 270 contained in the solid target container C1.

[0108] According to this, by ensuring that the distance L of the forward movement of the delivery rod 81 is not too long compared to the average particle size D of the solid target material 270, it is possible to prevent two or more solid target materials 270 from falling in one reciprocating movement.

[0109] (14) According to the first embodiment, the moving distance L of the forward motion of the delivery rod 81 is greater than 1.05 times the average particle size D of the solid target material 270 contained in the solid target container C1.

[0110] According to this, by ensuring a sufficient moving distance L of the forward movement of the delivery rod 81, the solid target material 270 can be delivered smoothly.

[0111] In other respects, the first embodiment is similar to the comparative example.

[0112] 4. Solid target material supply device 260c including detector D2 4.1 Configuration 16 shows the configuration of a droplet target generation device 26 in the second embodiment. In the second embodiment, a solid target material supply device 260c includes a detector D2 and a display device 57.

[0113] Detector D2 is disposed near the emission port 410. Detector D2 may be a device that detects light output from a light source (not shown) and reflected by the solid target material 270. Display device 57 is a device that displays information so that it can be visually recognized, and may be an image display device or a light-emitting element.

[0114] 4.2 Operation The detector D2 transmits a detection signal to the target supply processor 55 each time a solid target material 270 falls from the discharge port 410. Based on the detection signal, the target supply processor 55 controls the driver 84 so that the time difference between the detection signals is longer than 1.1 seconds.

[0115] The target supply processor 55 outputs an error signal when the time difference between the detection signals detected by the detector D2 is 1.1 seconds or less, and the display device 57 displays a warning in response to the error signal.

[0116] 4.3 Effect (15) According to the second embodiment, the solid target material supply device 260c detects the solid target material 270 falling from the supply pipe 41, and calculates the time difference T ψ -T ω and a target supply processor 55 that controls the drive unit 84 so that the time is longer than 1.1 seconds.

[0117] According to this, the driving unit 84 is controlled based on the detection result of the detector D2, and the time difference T ψ -T ω This can increase the reliability of control so that the time required for the start-up exceeds 1.1 seconds.

[0118] (16) According to the second embodiment, the solid target material supply device 260c includes a detector D2 that detects the solid target material 270 falling from the supply pipe 41, and a target supply processor 55 that outputs an error signal if the time difference detected by the detector D2 is less than or equal to 1.1 seconds.

[0119] According to this, by outputting an error signal, it becomes possible to take measures such as stopping the delivery device 8 or slowing down the reciprocating motion of the delivery rod 81.

[0120] (17) According to the second embodiment, the solid target material supply device 260c includes a display device 57 that displays a warning in response to an error signal.

[0121] This allows the user of the EUV light generation apparatus 1 to be notified of the error by displaying a warning.

[0122] In other respects, the second embodiment is similar to the first embodiment.

[0123] 5.Other 5.1 EUV light utilization equipment 6 FIG. 17 shows the configuration of an exposure apparatus 6a connected to an EUV light generation system 11. In FIG. 17, the exposure apparatus 6a, which serves as the EUV light utilization apparatus 6 (see FIG. 1), includes a mask illumination unit 608 and a workpiece illumination unit 609. The mask illumination unit 608 illuminates a mask pattern on a mask table MT via a reflection optical system with EUV light incident from the EUV light generation system 11. The workpiece illumination unit 609 forms an image of the EUV light reflected by the mask table MT onto a workpiece (not shown) placed on a workpiece table WT via a reflection optical system. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with photoresist. The exposure apparatus 6a exposes the workpiece to EUV light reflecting the mask pattern by synchronously translating the mask table MT and the workpiece table WT. Electronic devices can be manufactured by transferring a device pattern onto a semiconductor wafer using the exposure process described above.

[0124] FIG. 18 shows the configuration of an inspection apparatus 6b connected to the EUV light generation system 11. In FIG. 18, the inspection apparatus 6b, which serves as the EUV light utilization apparatus 6 (see FIG. 1), includes an illumination optical system 603 and a detection optical system 606. The illumination optical system 603 reflects EUV light incident from the EUV light generation system 11 and irradiates a mask 605 placed on a mask stage 604. The mask 605 here includes a mask blank before a pattern is formed. The detection optical system 606 reflects the EUV light from the illuminated mask 605 and forms an image on the light-receiving surface of a detector 607. The detector 607 receives the EUV light and acquires an image of the mask 605. The detector 607 is, for example, a TDI (time delay integration) camera. The image of the mask 605 acquired through the above process is used to inspect the mask 605 for defects, and the inspection results are used to select a mask suitable for manufacturing an electronic device. The pattern formed on the selected mask is then exposed and transferred onto a photosensitive substrate using an exposure apparatus 6a, thereby manufacturing an electronic device.

[0125] 5.2 Supplementary Information The above description is intended to be illustrative rather than limiting. Thus, it will be apparent to one skilled in the art that modifications can be made to the disclosed embodiments without departing from the scope of the claims. It will also be apparent to one skilled in the art that the disclosed embodiments can be used in combination.

[0126] Terms used throughout this specification and claims should be construed as "open ended" unless expressly stated otherwise. For example, words such as "comprise," "have," "comprise," and "equip" should be construed as meaning "without excluding the presence of elements other than those listed." In addition, the modifier "a" should be construed as meaning "at least one" or "one or more." In addition, the term "at least one of A, B, and C" should be construed as "A," "B," "C," "A+B," "A+C," "B+C," or "A+B+C." Furthermore, it should be construed as including combinations of these with elements other than "A," "B," and "C."

Claims

1. a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube for receiving the solid target material that has passed through the first path; a delivery rod for delivering the solid target material within the tube along the length of the tube; a drive unit that reciprocates the delivery rod in the longitudinal direction of the tube; the delivery device, a second path through which the solid target material delivered by the delivery device passes; a funnel for guiding the solid target material falling through the second path to a molten target container of an extreme ultraviolet light generating device; Equipped with the driving unit drives the delivery rod so that, when two or more solid target materials fall from the second path into the funnel by one reciprocating motion, the time difference between the falls is longer than 1.1 seconds. Solid target material supply device.

2. 2. The solid target material supply device according to claim 1, the drive unit reciprocates the feed rod such that a required time for a forward movement of the reciprocating movement, in which the feed rod moves toward the second path, is longer than a required time for a return movement in the opposite direction to the forward movement. Solid target material supply device.

3. 3. The solid target material supply device according to claim 2, The drive unit reciprocates the feed rod so that the time required for the forward movement is shorter than three times the time required for the return movement. Solid target material supply device.

4. 2. The solid target material supply device according to claim 1, the drive unit includes a cam and a cam follower, a first rotation angle of the cam that causes a forward movement of the reciprocating movement in which the feed rod moves toward the second path is larger than a second rotation angle of the cam that causes a return movement in the opposite direction to the forward movement; Solid target material supply device.

5. 5. The solid target material supply device according to claim 4, the first rotation angle is less than three times the second rotation angle; Solid target material supply device.

6. 2. The solid target material supply device according to claim 1, the drive unit reciprocates the feed rod such that a maximum absolute value of a speed of a forward movement in which the feed rod moves toward the second path is smaller than a maximum absolute value of a speed of a return movement in a direction opposite to the forward movement. Solid target material supply device.

7. 7. The solid target material supply device according to claim 6, the drive unit reciprocates the delivery rod so that the maximum absolute value of the speed of the forward movement is greater than one-third of the maximum absolute value of the speed of the return movement. Solid target material supply device.

8. 2. The solid target material supply device according to claim 1, the drive unit reciprocates the feed rod such that the maximum absolute value of the speed of a forward movement, in which the feed rod moves toward the second path, is greater than 0.5 mm / s and less than 4.0 mm / s. Solid target material supply device.

9. 2. The solid target material supply device according to claim 1, The drive unit drives the delivery rod so that the time difference is longer than one-fifth of the time required for one reciprocating motion. Solid target material supply device.

10. 2. The solid target material supply device according to claim 1, The drive unit drives the delivery rod so that the time difference is shorter than 8.0 seconds. Solid target material supply device.

11. 2. The solid target material supply device according to claim 1, The drive unit drives the delivery rod so that the time required for one reciprocating motion is longer than 3.0 seconds. Solid target material supply device.

12. 12. The solid target material supply device according to claim 11, The drive unit drives the delivery rod so that the time required for one reciprocating motion is shorter than 12.0 seconds. Solid target material supply device.

13. 2. The solid target material supply device according to claim 1, a moving distance of a forward movement of the delivery rod toward the second path in the reciprocating movement is smaller than 1.6 times the average particle size of the solid target material contained in the solid target container; Solid target material supply device.

14. 14. The solid target material supply device according to claim 13, The travel distance is greater than 1.05 times the average particle size. Solid target material supply device.

15. 2. The solid target material supply device according to claim 1, a detector for detecting solid target material falling from the second path; a processor that controls the driving unit based on the detection result of the detector so that the time difference is longer than 1.1 seconds; The solid target material supply device further comprises:

16. 2. The solid target material supply device according to claim 1, a detector for detecting solid target material falling from the second path; a processor that outputs an error signal if the time difference detected by the detector is less than or equal to 1.1 seconds; The solid target material supply device further comprises:

17. 17. The solid target material supply apparatus of claim 16, A display device that displays a warning in response to the error signal The solid target material supply device further comprises:

18. a solid target material supply device according to claim 1; a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; An extreme ultraviolet light generating device comprising:

19. A method for manufacturing an electronic device, comprising: a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube for receiving the solid target material that has passed through the first path; a delivery rod for delivering the solid target material within the tube along the length of the tube; a drive unit that reciprocates the delivery rod in the longitudinal direction of the tube; the delivery device, a second path through which the solid target material delivered by the delivery device passes; a funnel for guiding the solid target material falling through the second path to a molten target container of an extreme ultraviolet light generating device; Equipped with a solid target material supply device, wherein the drive unit drives the delivery rod so that, when two or more solid target materials fall from the second path into the funnel by one reciprocating motion, a time difference between the falls is longer than 1.1 seconds; a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; generating extreme ultraviolet light by an extreme ultraviolet light generating device comprising: Extreme ultraviolet light is output to the exposure device, In order to manufacture an electronic device, a photosensitive substrate is exposed to extreme ultraviolet light in the exposure apparatus. A method for manufacturing an electronic device, comprising:

20. A method for manufacturing an electronic device, comprising: a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube for receiving the solid target material that has passed through the first path; a delivery rod for delivering the solid target material within the tube along the length of the tube; a drive unit that reciprocates the delivery rod in the longitudinal direction of the tube; the delivery device, a second path through which the solid target material delivered by the delivery device passes; a funnel for guiding the solid target material falling through the second path to a molten target container of an extreme ultraviolet light generating device; Equipped with a solid target material supply device, wherein the drive unit drives the delivery rod so that, when two or more solid target materials fall from the second path into the funnel by one reciprocating motion, a time difference between the falls is longer than 1.1 seconds; a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; and inspecting a mask for defects by irradiating the mask with extreme ultraviolet light generated by an extreme ultraviolet light generating device comprising: selecting a mask using the results of said testing; The pattern formed on the selected mask is transferred onto a photosensitive substrate by exposure. A method for manufacturing an electronic device, comprising:

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