Vessel

Abstract

To provide a vessel for vacuum transfer which realizes automation of opening and closing of the vessel while reducing failure of the operation.SOLUTION: A portable vessel (90) houses a workpiece of a vacuum processing device in a state that the workpiece is held in a vacuum and includes: a plate-like base (91) in which protruding parts (914) each located adjacent to at least a corner part of a loop form of a groove (912) in which a seal member is fitted are provided on an upper surface; and a lid (92) which is configured so that a side wall part (923) is located immediately above the groove.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a vessel applied to a vacuum processing apparatus. [Background technology]

[0002] Vacuum processing apparatuses, such as plasma processing apparatuses, are known that perform required processing on a workpiece within a vacuum chamber. It has also been proposed to apply a transport container to the vacuum processing apparatus, which can accommodate the workpiece while maintaining it under vacuum and can be transported into and out of the vacuum processing apparatus itself. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-170665 Summary of the Invention [Problem to be solved by the invention]

[0004] In the technology of Patent Document 1, the transport container is mainly composed of a box-shaped portion without a lid and a lid portion, and a sealing member is sandwiched between the box portion and the lid portion to maintain a vacuum in the internal space. However, it is difficult to take out and put in the workpiece, and there are issues with the reliability of these operations within the vacuum processing equipment. [Means for solving the problem]

[0005] In order to solve the above problems, one aspect of the present disclosure is a portable vessel that contains a workpiece to be processed by a vacuum processing device while holding it in a vacuum, the vessel comprising a base and a lid, the base being plate-shaped, and the upper surface of the base being provided with a groove that runs around the periphery to form a rounded square or a rounded rectangle and into which a sealing member is fitted, and a convex portion adjacent to at least the corners of the groove's circumferential shape, the lid having a plate-shaped ceiling portion and sidewall portions that extend downward from the ceiling portion and run around the periphery in a planar view, the sidewall portions of the lid being configured so that the sidewall portions of the lid attached to the base are positioned directly above the groove. [Effects of the Invention]

[0006] According to one aspect of the present disclosure, it is possible to realize automation of opening and closing of a vacuum transfer vessel while reducing the occurrence of operational malfunctions. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram showing an overview of a vacuum processing apparatus to which a vessel according to a first embodiment of the present disclosure is applied. [Figure 2] FIG. 2 is a block diagram showing a functional configuration of the vacuum processing apparatus. [Figure 3] FIG. 2 is a cross-sectional view of the vessel viewed from the front, illustrating an overview of the vessel. [Figure 4] FIG. 2 is a plan view showing a base body of the vessel. [Figure 5] FIG. 2 is a plan view showing the lid of the vessel. [Figure 6] FIG. 2 is a cross-sectional view of the vessel, showing an enlarged corner. [Figure 7] 1 is a diagram illustrating an outline of a load lock chamber of the vacuum processing apparatus, showing a state in which a lifting rod of an opening / closing mechanism is raised. [Figure 8] 1 is a diagram showing an outline of a load lock chamber of the vacuum processing apparatus, showing a state in which an opening and closing mechanism has detached the lid of the vessel from the base body. [Figure 9] FIG. 10 is a plan view showing a base body of a vessel according to a second embodiment of the present disclosure. [Figure 10] FIG. 10 is a plan view showing a base body of a vessel according to a third embodiment of the present disclosure. [Figure 11] FIG. 10 is a cross-sectional view seen from the front, illustrating an overview of a vessel according to a fourth embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0008] [Embodiment 1] An embodiment of the present invention will be described in detail below. However, the following description is intended to describe an example of a vessel according to the present invention and a vacuum processing apparatus 1 to which the vessel is applied, and the technical scope of the present invention is not limited to the following description and the contents of the drawings. Note that, in the following, directions and orientations are expressed assuming that the vertical line pointing upward is the positive direction of the Z axis, and that the X axis and Y axis are in a horizontal plane.

[0009] <Configuration overview of vacuum processing device 1> Fig. 1 is a diagram illustrating the configuration of a main part of a vacuum processing apparatus 1 to which a vessel 90 according to a first embodiment of the present disclosure is applied. Fig. 1 also illustrates the vessel 90, showing an example of a scene in which the vessel 90 is introduced into the vacuum processing apparatus 1. Fig. 2 is a block diagram showing the functional configuration of the vacuum processing apparatus 1.

[0010] The vacuum processing apparatus 1 includes a load lock chamber 10, an intermediate chamber 20, a vacuum processing chamber 30, a transfer mechanism 40, and a control unit 60 that controls each part of the vacuum processing apparatus 1. The load lock chamber 10 and the vacuum processing chamber 30 are airtightly connected via the intermediate chamber 20. The load lock chamber 10, the intermediate chamber 20, and the vacuum processing chamber 30 are arranged side by side in the X-axis direction.

[0011] A gate valve 21 capable of isolating the load lock chamber 10 from the vacuum processing chamber 30 is provided in the intermediate chamber 20. The transport mechanism 40 has a transfer rod 41 that can move back and forth in the X-axis direction. With the gate valve 21 open, the transport mechanism 40 can transport a holder 93 on which a workpiece (not shown) is placed between the load lock chamber 10 and the vacuum processing chamber 30.

[0012] The load lock chamber 10 includes a support mechanism 11, a vessel fixing mechanism 12, an opening / closing mechanism 13, and a door (not shown). The door can open the load lock chamber 10 to the outside, allowing a vessel 90 according to the first embodiment of the present disclosure to be introduced into the load lock chamber 10 from the outside. When the door is closed, the load lock chamber 10 can be kept airtight. The vessel fixing mechanism 12 is a stage that holds the vessel 90 inside the load lock chamber 10.

[0013] The support mechanism 11 supports the vessel fixing part 12 so that its position can be adjusted. The opening / closing mechanism 13 is a mechanism that opens and closes the vessel 90 held by the vessel fixing part 12. The opening / closing mechanism 13 has two lifting rods 131 that can descend from the ceiling side of the load lock chamber 10 toward the vessel fixing part 12 and can also ascend. Each of the lifting rods 131 is held by a seal block 14 on the ceiling of the load lock chamber 10 so that it can be raised and lowered, while keeping the load lock chamber 10 airtight.

[0014] A vacuum pipe 51 connected to a first vacuum pump unit 50 (vacuum pump unit) is connected to the load lock chamber 10, and the load lock chamber 10 can be evacuated by the first vacuum pump unit 50. A gas pipe 53 connected to a gas inlet unit 52 is also connected to the load lock chamber 10, and gas can be introduced into the load lock chamber 10 by the gas inlet unit 52.

[0015] An inert gas such as argon or nitrogen is preferably used as the gas introduced by the gas introduction unit 52. The gas introduction unit 52 is appropriately provided with an interlock mechanism that stops the gas introduction when the pressure inside the load lock chamber 10 reaches a predetermined pressure that exceeds atmospheric pressure, or a mechanism that releases the pressure in the load lock chamber 10 while continuing the gas introduction.

[0016] 1 is connected to the load lock chamber 10, making it possible to measure the dew point inside the load lock chamber 10. The detailed functions and operations of each part of the load lock chamber 10 will be described in more detail later.

[0017] The vacuum processing chamber 30 is divided into an anterior chamber section 31 and a processing chamber section 32 located above the anterior chamber section 31. The vacuum processing chamber 30 is equipped with an elevation mechanism 33 and an elevation stage 34. A vacuum pipe 55 connected to a second vacuum pump section 54 is connected to the vacuum processing chamber 30, and the vacuum processing chamber 30 can be evacuated by the second vacuum pump section 54.

[0018] The lifting mechanism 33 moves the lifting stage 34 up and down between the front chamber 31 and the processing chamber 32. When the lifting stage 34 is in a lowered position within the front chamber 31, the transport mechanism 40 can hold the holder 93 on which the workpiece is placed with the transfer rod 41 and transport it between the load lock chamber 10 and the lifting stage 34 of the vacuum processing chamber 30.

[0019] When the lift stage 34 is at a certain raised position within the processing chamber 32, the workpiece on the lift stage 34 can be subjected to the required vacuum processing. In FIG. 1, the lift stage 34 at the lowered position is indicated by a solid line, and the lift stage 34 halfway between the raised and lowered positions is indicated by a dotted line. The vacuum processing apparatus 1 that performs the required vacuum processing on the workpiece within the processing chamber 32 may be, for example, a plasma processing apparatus. A sputtering apparatus, a plasma CVD (Chemical Vapor Deposition) apparatus, a plasma etching apparatus, and a plasma ashing apparatus are all examples of plasma processing apparatuses.

[0020] The vacuum processing apparatus 1 is provided with an appropriate vacuum processing mechanism 35 for performing required vacuum processing within the processing chamber 32. Examples of functions of the vacuum processing mechanism 35 include a mechanism for generating plasma within the processing chamber 32, a mechanism for introducing required gases into the processing chamber 32, a mechanism for heating the lifting stage 34, and a mechanism for applying a bias to the lifting stage 34 or the film-forming raw material within the processing chamber 32.

[0021] <Vessel 90> Vessel 90 according to the first embodiment of the present disclosure is a portable vacuum transport container capable of accommodating workpieces while maintaining them under vacuum. Vessel 90 is composed of base 91 and lid 92, and accommodates the workpieces and holder 93 on which the workpieces are placed in the internal space defined by base 91 and lid 92.

[0022] Vessel 90 enables the workpiece to be transported between vacuum processing apparatus 1 and other apparatus while being held in a vacuum. To this end, load lock chamber 10 is configured so that vessel 90 can be received on vessel fixing portion 12, lid 92 of vessel 90 can be attached and detached to and from base 91, and the workpiece can be taken out or stored together with holder 93.

[0023] Fig. 3 is a cross-sectional view seen from the front (Y direction in Fig. 1) to show the main configuration of the vessel 90. Fig. 4 is a plan view of the base 91. Fig. 5 is a plan view of the lid 92. Fig. 3 shows cross-sections at positions AA of the base 91 in Fig. 4 and the lid 92 in Fig. 5. Fig. 6 is an enlarged view showing cross-sections at positions BB of the base 91 in Fig. 4 and the lid 92 in Fig. 5.

[0024] The lid 92 is composed of a plate-shaped ceiling portion 921 that is approximately square or rectangular in plan view, and sidewall portions 923 that extend downward from the outer edge, i.e., the four sides, of the ceiling portion 921. Therefore, the planar shape of the lid 92 is approximately square or rectangular. In plan view, the sidewall portions 923 run around the outer edge of the ceiling portion 921. In the plan view of the base 91 in FIG. 4, the position of the sidewall portions 923 of the lid 92 that are attached to the plate-shaped base 91 is indicated by a dotted line. Note that in FIG. 4, the outer edge of the sidewall portions 923 coincides with the outer edge of the lid 92 itself in plan view (the planar shape of the lid 92).

[0025] 3 to 6, the base 91 is a plate-like member that is approximately square or rectangular in plan view. However, the planar shape of the base 91 can be selected arbitrarily as long as the internal space partitioned by the base 91 and the lid 92 can be airtight. In the specific examples shown in FIGS. 3 to 6, the planar shape of the base 91 is set to the minimum size that approximately matches the planar shape of the lid 92, and is therefore approximately square or rectangular. However, since the vessel 90 only needs to be configured so that the base 91 surrounds the side wall portion 923 of the lid 92 in plan view, the planar shape of the base 91 is not limited to being approximately square or rectangular if the planar shape of the base 91 is not set to the minimum size.

[0026] Here, the term "approximately rectangular" refers to a shape that can be recognized as a rectangle as a whole. In other words, the term "approximately rectangular" includes rectangles that have been slightly modified. For example, a rectangle with rounded corners or a shape that is rectangular as a whole, such as a rectangle with at least one rounded corner (so-called R), is also an example of a "approximate rectangle." Another example of a "approximate rectangle" is a rectangle with a convex or concave portion on one of its sides. The term "approximate rectangle" also includes a shape that has a wave or curved portion on at least one of its sides, but can be recognized as a rectangle as a whole. The same applies to the term "approximately square."

[0027] 3, in a vessel 90 in which a lid 92 is attached to a base 91, the internal space is the space sandwiched between a ceiling 921 of the lid 92 and the base 91 in the vertical direction. In addition, the internal space is the space surrounded by a side wall 923 of the lid 92 in the horizontal direction.

[0028] Two engagement portions 922 are provided on the upper surface of the ceiling portion 921 of the lid body 92. The engagement portions 922 are, for example, screw holes, and can engage with threaded portions 132 (see FIG. 7), which are engagement portions on the opening / closing mechanism 13 and will be described later. The two engagement portions 922 are arranged on a diagonal line of the planar shape of the lid body 92. Line BB in FIG. 5 coincides with part of the diagonal line of the planar shape of the lid body 92. In particular, the two engagement portions 922 are arranged symmetrically about the center of the planar shape of the lid body 92, near each corner of the circular shape of a dovetail groove 912 (described later) of the base 91.

[0029] The bottom surface of the base 91 may be flat. Through holes 911 are provided at the four corners of the base 91 in the planar shape, and the base 91 can be fixed to the vessel fixing part 12 using appropriate engaging members such as screws or pins. Therefore, in a plan view, the through holes 911 are located outside the outer edge (see the dotted line in FIG. 4) of the lid 92 attached to the base 91.

[0030] A dovetail groove 912 (groove) is provided on the top surface of base 91 so as to circle around the outer edge of base 91. In a plan view, the overall shape of dovetail groove 912, when viewed as a line, is a rounded square or a rounded rectangle. Dovetail groove 912 is an inversely tapered groove whose groove width increases from the entrance toward the back.

[0031] A sealing member (not shown) is inserted into the entire dovetail groove 912. The sealing member is preferably ring-shaped to correspond to the circumferential shape of the dovetail groove 912. The following describes a specific example of a sealing member in which an O-ring is used. The upper end of the O-ring fitted into the dovetail groove 912 is positioned above the upper end of the dovetail groove 912. By fitting the O-ring into this inverted tapered groove, the vessel 90 is configured so that the O-ring does not easily fall off the base 91.

[0032] At one location on dovetail groove 912, a cylindrical hole 913 that does not penetrate through to the bottom surface of base 91 and opens to the top surface of base 91 with a diameter equal to or larger than the maximum groove width of dovetail groove 912 is arranged so as to overlap dovetail groove 912. Cylindrical hole 913 is an entrance and exit for a processing tool when forming inversely tapered dovetail groove 912 in base 91. Each of through holes 911 at the four corners of base 91 is arranged outside dovetail groove 912 that surrounds it.

[0033] Convex portions 914 are provided on the upper surface of base 91 adjacent to at least the corners of the circumferential shape of dovetail groove 912. At least at the corners of the circumferential shape of dovetail groove 912, the outer edge of convex portion 914 facing dovetail groove 912 is preferably configured to follow dovetail groove 912. In other words, since the circumferential shape of dovetail groove 912 is a rounded square or a rounded rectangle, the outer edge of convex portion 914 facing dovetail groove 912 near the corners of the circumferential shape of dovetail groove 912 preferably has a rounded shape in plan view.

[0034] 4, protrusion 914 is disposed inside the opening of dovetail groove 912 that runs around the upper surface of base 91, and is positioned slightly spaced apart so that the entire outer edge follows dovetail groove 912. Therefore, the outer edge of protrusion 914 is a rounded square or a rounded rectangle that is one size smaller than the overall rounded square or rounded rectangle of dovetail groove 912 described above.

[0035] However, the protrusion 914 may be disposed so that its entire outer edge is positioned slightly apart from the opening of the dovetail groove 912 around which the protrusion 914 runs, along the dovetail groove 912. Thus, surfaces of the same height are formed along the dovetail groove 912 on both sides of the opening of the dovetail groove 912. The top surface of the protrusion 914 is configured at a position higher than the surfaces on both sides of the opening of the dovetail groove 912, that is, at a position away from the bottom surface of the base 91. The side surface that forms the outer edge of the protrusion 914 and faces the dovetail groove 912 is preferably configured as an inclined surface 91S that slopes upward and away from the dovetail groove 912, as shown in FIG. 6 and other figures.

[0036] The protrusions 914 may be formed integrally with, for example, a metal main body portion of the base 91. Alternatively, the protrusions 914 may be formed from a separate member fixed to, for example, a metal main body portion of the base 91. In particular, if the separate member forming the protrusions 914 is provided detachably from the main body portion of the base 91, the protrusions 914 can be easily replaced when worn or damaged.

[0037] Furthermore, at least the surface of the protrusion 914 may be made of a material that is softer than the lid 92 and is less likely to scratch the lid 92 when it collides with the lid 92. Since the lid 92 plays a role in maintaining a vacuum by sandwiching a sealing member between the lid 92 and the base 91, it is preferable that the lid 92 be made of a material that is less likely to scratch. For example, the lid 92 may be made of metal, and the surface of the protrusion 914 may be made of resin.

[0038] On the upper surface of the base 91, inside the convex portion 914, a recess 915 having a surface recessed from the upper surface of the convex portion 914 toward the bottom surface of the base 91 may be appropriately provided, so that the holder 93 for the workpiece placed on the base 91 can be kept at a fixed position on the upper surface of the base 91. Note that the positioning of the holder 93 may be performed by a protrusion instead of the recess 915, and in that case the recess 915 need not be formed.

[0039] When lid 92 is attached to base 91 and assembled into vessel 90, the bottom surface of side wall 923 of lid 92 is located on a surface on the upper surface of base 91 that is flush with dovetail groove 912 and aligned with dovetail groove 912. That is, as shown in FIG. 4 , side wall 923 of lid 92 attached to base 91 is configured to be located directly above dovetail groove 912.

[0040] The bottom surface of side wall portion 923 of lid body 92 comes into contact with an O-ring inserted in dovetail groove 912, thereby airtightly sealing the internal space between base body 91 and lid body 92. Protrusion 914 is provided so that lid body 92 can be aligned to the correct position on base body 91 when lid body 92 is attached to base body 91.

[0041] <Transportation of the workpiece: Vessel insertion ~ Lid removal> 7 and 8, the transfer of an object to be vacuum-processed in vacuum processing apparatus 1 will be described. FIGS. 7 and 8 are diagrams showing the main part of load lock chamber 10 of vacuum processing apparatus 1.

[0042] 1 shows a state in which the opening and closing mechanism 13 is engaged with the lid 92 attached to the base 91 of the vessel 90, whereas Fig. 7 shows a state in which the opening and closing mechanism 13 is not engaged with the lid 92 in the same state. In Fig. 7, the lifting rod 131 of the opening and closing mechanism 13 is elevated above a position where it can engage with the lid 92 attached to the base 91. Fig. 8 also shows a state in which the opening and closing mechanism 13 engages with the lid 92 and is lifted up, causing the lid 92 to be detached from the base 91.

[0043] First, a vessel 90 is prepared, with the workpiece accommodated in a vacuum state in the internal space together with a holder 93. Vessel 90 in this state can be prepared appropriately by vacuum processing apparatus 1 or another apparatus. In vacuum processing apparatus 1, gate valve 21 is closed to isolate load lock chamber 10 from vacuum processing chamber 30, and the inside of load lock chamber 10 is at approximately atmospheric pressure, and then an operator opens the door of load lock chamber 10.

[0044] At this time, the gas inlet 52 purges the inside of the load lock chamber 10 with an inert gas, and efforts are made to prevent outside air from entering the inside of the load lock chamber 10 through the opening in the door. The flow rate of the inert gas used to purge the inside of the load lock chamber 10 may be adjusted by the control unit 60 so that the dew point inside the load lock chamber 10 measured by the dew point meter 15 is equal to or lower than a predetermined value.

[0045] An operator introduces the vessel 90 into the load lock chamber 10 through the opening in the door and places it on the vessel fixing part 12. At this time, the two lifting rods 131 are raised. The operator then inserts the engaging members into the through holes 911 in the base 91 to fix the base 91 to the vessel fixing part 12. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing part 12 in this state is as shown in FIG. 7. The operator then closes the door of the load lock chamber 10.

[0046] Next, when the operator issues a predetermined instruction to the control unit 60, the control unit 60 controls each part of the vacuum processing device 1 and automatically executes a series of sequences including the vacuum processing. First, the introduction of the inert gas into the load lock chamber 10 by the gas introduction unit 52 is stopped, and the first vacuum pump unit 50 evacuates the load lock chamber 10.

[0047] After the interior of the load lock chamber 10 has reached a predetermined vacuum level, a step is performed in which the workpiece is removed from the vessel 90. Note that, in order to sufficiently exhaust the remaining air in the load lock chamber 10, before the workpiece is removed from the vessel 90, evacuation and gas introduction may be repeated until the dew point inside the load lock chamber 10, measured by the dew point meter 15, falls to a predetermined value or below.

[0048] In order to remove the workpiece from the vessel 90, a step is performed in which the lid 92 is detached from the base 91 fixed to the vessel fixing part 12. First, the two lifting rods 131 in the opening / closing mechanism 13 are each lowered and rotated (spinned) about their central axes, causing the threaded portions 132 provided on the central axes at the lower ends of the lifting rods 131 to threadably engage with the engaging portions 922 of the lid 92. The threaded portions 132 are parts of the opening / closing mechanism 13 that engage with the engaging portions 922. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing part 12 in this state is as shown in FIG. 1.

[0049] In order to accurately align the screw portion 132 and the engaging portion 922, the support mechanism 11 that supports the vessel fixing portion 12 may adjust the position of the vessel 90 before the lifting rod 131 descends. Such alignment may be performed using an appropriate detection means provided as part of the support mechanism 11 or the opening / closing mechanism 13. As the detection means for detecting the position of the engaging portion 922 of the vessel 90, a camera (image acquisition unit) that acquires an image of the lid body 92, a distance sensor that detects the position of the lid body 92, or the like may be used as appropriate.

[0050] After the threaded portion 132 and the engaging portion 922 are engaged with each other, the two lifting rods 131 in the opening and closing mechanism 13 are raised without rotating, and the lid body 92 is separated from the base body 91 fixed to the vessel fixing portion 12. At this time, the two lifting rods 131 are not raised simultaneously but at slightly different times.

[0051] Because the engagement portion 922 of the lid 92 is disposed at a distance on a diagonal line of the planar shape of the lid 92 that corresponds to the circular shape of the dovetail groove 912, the lid 92 is pulled up at a slight incline in the direction of the diagonal line. In other words, the O-ring is first peeled off from the bottom surface of the side wall portion 923 of the lid 92 at the corner of the circular shape of the dovetail groove 912 that is closest to the engagement portion 922 that is pulled up first.

[0052] If the lid 92 is pulled up horizontally without tilting, the O-ring attached to the bottom surface must be peeled off from the side wall 923 of the lid 92 simultaneously over the entire O-ring, requiring a large force to separate the lid 92 from the base 91. Therefore, a large load is placed on the motor driving the lift rod 131 for the removal, and the motor and mechanism driving the lift rod 131 are subjected to a large impact at the moment of removal. This can easily cause malfunctions in the operation of the opening and closing mechanism of the vessel 90 and wear of the mechanism over time. However, the vacuum processing apparatus 1 according to the first embodiment allows for smooth removal, reducing the occurrence of such malfunctions.

[0053] Furthermore, because the lid 92 has two engagement portions 922 on a diagonal line as described above, the area where peeling begins is limited to the corners of the circumferential shape of the dovetail groove 912, and therefore only a small force is required in the initial stage of peeling. After the initial peeling, a relatively small force is required to peel the O-ring off the bottom surface of the side wall portion 923 of the lid 92.

[0054] Furthermore, if the lid 92 and the opening / closing mechanism 13 are engaged at one point and the lid 92 is pulled up, the tilt of the lid 92 cannot be controlled when the lid 92 is removed, and the lid 92 is likely to tilt excessively. Therefore, stress is likely to be applied to the engaging portions of both the lid 92 and the opening / closing mechanism 13 and to the mechanical parts of the opening / closing mechanism 13. This can easily cause malfunctions in the operation of the opening / closing mechanism of the vessel 90 and wear of the mechanism over time. However, according to the first embodiment, as described above, the vessel 90 can be opened and closed smoothly by the opening / closing mechanism 13, and the occurrence of such malfunctions is reduced.

[0055] As described above, when lid 92 attached to base 91 is separated, side wall 923 of lid 92 may come into contact with protrusion 914, particularly near the corner of the circumferential shape of dovetail groove 912. If the bottom surface of side wall 923 is scratched, the vacuum inside vessel 90 may not be maintained sufficiently.

[0056] However, the circumferential shape of dovetail groove 912 is a square or rectangle with rounded corners, and at least at the corners of the circumferential shape of dovetail groove 912, the outer edge of convex portion 914 that faces dovetail groove 912 is configured to follow dovetail groove 912. In this way, near the corners of the circumferential shape of dovetail groove 912, the outer edge of convex portion 914 that faces dovetail groove 912 is rounded in plan view and does not form an angular shape, so even if the bottom surface of side wall portion 923 comes into contact with it, the possibility of scratching the bottom surface of side wall portion 923 is reduced.

[0057] Furthermore, if the side surface of convex portion 914 facing dovetail groove 912 is configured as inclined surface 91S that slopes upward so as to move away from dovetail groove 912, this further reduces the possibility of scratching side wall portion 923. As shown in Fig. 6, it is particularly preferable that the cross section (plane passing through the Z axis in Fig. 1) of convex portion 914 from the side surface to the top surface be rounded and not angular.

[0058] <Transportation of workpiece: Removal of workpiece from vessel - vacuum treatment - re-installation> When the lid body 92 is lifted upward from the base body 91 by the two lifting rods 131 of the opening / closing mechanism part 13, the workpiece contained in the internal space of the vessel 90 can be removed, and the gate valve 21 is opened.

[0059] At this time, the positional relationship between the opening / closing mechanism 13, lid 92, base 91, and vessel fixing part 12 is as shown in Figure 8. The base 91 is fixed to the vessel fixing part 12, and the opening / closing mechanism 13 pulls the lid 92 up above the base 91. Because the base 91 is a plate-shaped member, the holder 93 placed on the base 91 is largely exposed, and can be easily picked up by the transfer rod 41 accessed from the side.

[0060] Therefore, the possibility of malfunctions occurring during the removal or insertion of holder 93 is reduced, and the possibility of damage to substrate 91 or the like due to malfunctions is also reduced. Therefore, according to embodiment 1, the removal or insertion of holder 93 within the vacuum processing apparatus is more reliably performed. The workpiece can be inserted into vessel 90 while the vacuum state is reliably maintained.

[0061] In conventional transfer containers, holders with workpieces placed on them are housed in a box-like, lidless container, making it difficult to remove and place the holders and workpieces even when the lid is open. Therefore, in conventional vacuum transfer containers, the holders are moved upward by a spring when the lid is opened, which is a complex configuration and can cause operational problems when automatically removing and placing holders and other items inside a vacuum processing device. Furthermore, vacuum transfer containers equipped with such mechanisms are prone to generating dust, especially when used for long periods of time.

[0062] The transport mechanism 40 operates, and the transfer rod 41 advances through the intermediate chamber 20 into the load lock chamber 10, where it holds the holder 93 by an appropriate method, such as by scooping up the holder 93 from above the substrate 91. At this time, the vessel fixing part 12 may perform an appropriate operation, such as slightly lowering it. The transfer rod 41 then retreats to the anterior chamber 31 of the vacuum processing chamber 30, places the holder 93 on the lift stage 34, and releases its hold on the holder 93. The transfer rod 41 then retreats to a standby position where it does not interfere with the lift stage 34. The gate valve 21 is then closed, isolating the load lock chamber 10 from the vacuum processing chamber 30.

[0063] Next, the lifting mechanism 33 raises the lifting stage 34 on which the holder 93 is placed to the processing chamber 32. After the vacuum processing mechanism 35 performs the required vacuum processing on the workpiece placed on the holder 93 in the processing chamber 32, the lifting stage 34 on which the holder 93 is placed returns to a lowered position in the anterior chamber 31. When the inside of the vacuum processing chamber 30 reaches a predetermined vacuum level by vacuuming using the second vacuum pump 54, the gate valve 21 is opened.

[0064] The transfer mechanism 40 operates to move the holder 93 from the lift stage 34 back onto the base 91 fixed to the vessel fixing part 12. After that, the transfer rod 41 returns to the standby position, the gate valve 21 closes, and the load lock chamber 10 and the vacuum processing chamber 30 are isolated from each other again.

[0065] <Transportation of processed material: Attaching the lid ~ Removing the vessel> The lifting rod 131 is lowered, and the lid 92 engaged with the threaded portion 132 of the opening / closing mechanism 13 is placed on the base 91. The positional relationship between the opening / closing mechanism 13, the vessel 90, and the vessel fixing portion 12 is returned to the state shown in FIG.

[0066] Thereafter, the pressure inside the load lock chamber 10 is returned to near atmospheric pressure while the opening / closing mechanism 13 appropriately applies a force to press the lid 92 toward the base 91. At this time, the first vacuum pump 50 stops evacuating the load lock chamber 10, and the gas inlet 52 begins introducing an inert gas into the load lock chamber 10.

[0067] In this way, the pressure around vessel 90 is changed from a vacuum state to atmospheric pressure with the O-ring between base 91 and lid 92 in tight contact therewith, so that the workpieces are accommodated inside vessel 90 with the vacuum state reliably maintained without leakage. Further, an operator opens the door of load lock chamber 10 and carries vessel 90 fixed on vessel fixing part 12 out of vacuum processing apparatus 1 together with the workpieces accommodated therein.

[0068] If the position of lid body 92 is deviated from the correct position when opening / closing mechanism 13 places lid body 92 on base body 91, side wall 923 of lid body 92 will ride up on convex portion 914 of base body 91. In this case, opening / closing mechanism 13 detects that lid body 92 cannot move to the predetermined height, and control unit 60 can easily determine that lid body 92 is not in the correct position for attachment.

[0069] In this case, control unit 60 can readjust the position of lid body 92 to the correct position for attachment by adjusting the position of lid body 92 relative to base 91 using support mechanism unit 11. Therefore, according to embodiment 1, when the object to be processed is automatically placed inside vessel 90 by vacuum processing apparatus 1, the object to be processed can be placed in the internal space of vessel 90 while reliably maintaining a vacuum state.

[0070] In the above description, the vessel 90 is manually loaded and unloaded into the load lock chamber 10 by an operator. However, the vacuum processing apparatus 1 may be configured to perform this procedure automatically. Although the example in which the opening / closing mechanism 13 and the lid 92 of the vessel 90 are engaged at two locations has been described, the number of engagement locations may be more than two. Even in this case, it is sufficient that one specific location is lifted up earlier than the other engagement locations when the lid 92 is detached from the base 91. The size of the vessel 90 is not particularly limited. The side length of the lid 92, which is generally square or rectangular, may be in the range of 5 cm to 3 m, for example.

[0071] [Embodiment 2] In the second embodiment, an example of a vessel having a shape that is partially different from that of the first embodiment is shown. A vessel 90 according to the second embodiment is similar to the first embodiment except that the shape of a base 91A is different from that of the base 91 in the first embodiment.

[0072] 9 is a plan view of a base body 91A of a vessel 90 according to a second embodiment of the present disclosure. On the top surface of the base body 91A, convex portions 914A are provided inside the circumferential shape of the dovetail groove 912, at each of the four corners of the circumferential shape of the dovetail groove 912. As in the first embodiment, the outer edges of these convex portions 914A facing the dovetail groove 912 at the corners of the circumferential shape of the dovetail groove 912 are rounded to fit the dovetail groove 912.

[0073] In base 91A, recess 916 for aligning holder 93 is provided so as to be recessed from a surface that continues from the side of the opening of dovetail groove 912 on the upper surface of base 91A, i.e., from a surface that is at the same height as the surfaces on both sides of the opening of dovetail groove 912. Although Fig. 9 shows a specific example in which protrusion 914A is disposed only on the inside of the circumferential shape of dovetail groove 912, it may also be disposed on the outside.

[0074] [Embodiment 3] In the third embodiment, an example of a vessel having a shape that is partially different from that of the first embodiment is shown. A vessel 90 according to the third embodiment is similar to that of the first embodiment except that the shape of a base 91B is different from that of the base 91 in the first embodiment.

[0075] 10 is a plan view of a base body 91B of a vessel according to a third embodiment of the present disclosure. On the top surface of base body 91A, protrusions 914B are provided at the four corners of the circumferential shape of dovetail groove 912, outside the circumferential shape of dovetail groove 912. In base body 91B, depressions 916 for aligning holder 93 are provided so as to be recessed from a surface that continues from the side of the opening of dovetail groove 912 on the top surface of base body 91B, i.e., a surface that is flush with the surfaces on both sides of the opening of dovetail groove 912.

[0076] [Embodiment 4] 11 is a diagram schematically illustrating a configuration of a main part of a vessel 90 according to embodiment 4 of the present disclosure. The vessel 90 according to embodiment 4 includes a pressure gauge 924 and a valve 925 in addition to the configuration of the vessel 90 according to embodiment 1.

[0077] The pressure gauge 924 is a measuring device that detects the pressure in the internal space of the vessel 90, which is partitioned by the base 91 and the lid 92 attached to the base 91. By providing the vessel 90 with the pressure gauge 924, it becomes possible to confirm whether the internal space of the vessel 90 is in a vacuum state.

[0078] Valve 925 is provided in a path that connects the internal space of vessel 90 with the outside of vessel 90. Valve 925 can control the state of communication / isolation between the internal space of vessel 90, which is partitioned by base 91 and lid 92 attached to base 91, and the outside. By providing valve 925 in vessel 90, when the internal space of vessel 90 is in a vacuum state, an operator can easily adjust the pressure in the internal space of vessel 90 to atmospheric pressure without using vacuum processing apparatus 1. In other words, valve 925 can be used as a so-called leak valve that releases the vacuum state of the internal space of vessel 90.

[0079] 〔summary〕 A first aspect of the present disclosure is a portable vessel that contains a workpiece to be processed by a vacuum processing device while holding it in a vacuum, the vessel comprising a base and a lid, the base being plate-shaped, and the upper surface of the base being provided with a groove that runs around the periphery to form a rounded square or a rounded rectangle and into which a sealing member is fitted, and a protrusion adjacent to at least the corner of the groove's circumferential shape, the lid having a plate-shaped ceiling and sidewalls that extend downward from the ceiling and run around the periphery in a planar view, the sidewalls of the lid being configured so that when attached to the base, they are positioned directly above the groove.

[0080] A vessel according to a second aspect of the present disclosure may be configured in accordance with the first aspect, such that at least at corners of the circumferential shape of the groove, the outer edge of the convex portion facing the groove follows the groove.

[0081] In a vessel according to a third aspect of the present disclosure, in the first or second aspect, the convex portion may be disposed inside and / or outside the circumferential shape of the groove so that the outer edge thereof follows the groove.

[0082] In a fourth aspect of the present disclosure, the vessel is the same as the first or second aspect, and a plurality of the protrusions may be provided on the inside of the circumferential shape of the groove, at each of the four corners of the circumferential shape of the groove.

[0083] In a fifth aspect of the present disclosure, the vessel is the same as the first or second aspect, and a plurality of the protrusions may be provided on the outside of the circumferential shape of the groove, at each of the four corners of the circumferential shape of the groove.

[0084] A vessel according to a sixth aspect of the present disclosure is any one of the first to fifth aspects, wherein the side surface of the convex portion facing the groove may be inclined so as to move away from the groove as it extends upward.

[0085] A vessel according to a seventh aspect of the present disclosure is any one of the vessels according to the first to sixth aspects, wherein the surfaces of the convex portions may be made of resin.

[0086] In the vessel of an eighth aspect of the present disclosure, in any one of the first to seventh aspects, the convex portion may be provided detachably with respect to the main body portion of the base.

[0087] A vessel according to a ninth aspect of the present disclosure, in any one of the first to eighth aspects above, may have a plurality of engagement portions on the upper surface of the lid body attached to the base, along a line located above the diagonal of the circular shape of the groove, with which a mechanism for separating the lid body from the base can engage.

[0088] The vessel of aspect 10 of the present disclosure, in any one of aspects 1 to 9 above, may further include a pressure gauge that detects the pressure in the internal space partitioned by the base and the lid attached to the base.

[0089] The vessel of aspect 11 of the present disclosure, in any of aspects 1 to 10 above, may further include a valve that controls communication / isolation between the interior space defined by the base and the lid attached to the base and the outside.

[0090] The present disclosure is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. For example, in embodiment 1, convex portion 914 of base 91 is disposed inside the circumferential shape of dovetail groove 912. However, convex portion 914 may be disposed outside the circumferential shape of dovetail groove 912 in the shape of a ring surrounding dovetail groove 912. [Explanation of symbols]

[0091] 1. Vacuum processing equipment 10 Load Lock Chamber 11 Support mechanism section 12 Vessel fixing part 13 Opening and closing mechanism 131 Lifting rod 132 Threaded section 14 Seal Block 15 Dew point meter 20 Intermediate Room 21 Gate valve 30 Vacuum Processing Chamber 40 Conveyor mechanism 41 Transfer rod 50 First vacuum pump section 54 Second vacuum pump section 51, 55 Vacuum piping 52 Gas inlet 53 Gas piping 60 Control Unit 90 Vessel 91, 91A, 91B base 911 Through hole 912 Dovetail groove 914, 914A, 914B convex part 91S Slope 92 Lid 921 Ceiling 922 Engagement part 923 Side wall 924 Pressure Gauge 925 Valve 93 Holder

Claims

1. A portable vessel that accommodates an object to be treated by a vacuum treatment device while being held in a vacuum, It comprises a base body and a lid body, The substrate is plate-shaped, On the upper surface of the base, a groove that surrounds the groove to form a rounded square or a rounded rectangle and into which a seal member is fitted; a convex portion adjacent to at least a corner portion of the circumferential shape of the groove, The lid body has a plate-shaped ceiling portion and a side wall portion that extends downward from the ceiling portion and surrounds the lid body in a plan view, The vessel is configured so that the side wall portion of the lid body attached to the base body is positioned directly above the groove.

2. At least at the corners of the circumferential shape of the groove, The vessel according to claim 1 , wherein an outer edge of the protrusion facing the groove is configured to fit along the groove.

3. The vessel according to claim 2 , wherein the convex portion is disposed inside and / or outside the circumferential shape of the groove so that an outer edge of the convex portion follows the groove.

4. The vessel according to claim 2 , wherein a plurality of the protrusions are provided on the inside of the circumferential shape of the groove, at four corners of the circumferential shape of the groove.

5. The vessel according to claim 1 , wherein a plurality of the protrusions are provided on the outer side of the circumferential shape of the groove, at four corners of the circumferential shape of the groove.

6. The vessel according to claim 1 , wherein a side surface of the protrusion facing the groove is inclined so as to move away from the groove as it extends upward.

7. The vessel according to claim 1 , wherein the surface of the convex portion is made of resin.

8. The vessel according to claim 1 , wherein the protrusion is detachably provided on the main body of the base.

9. 6. The vessel according to claim 1, wherein a plurality of engagement portions, with which a mechanism for separating the lid from the base engages, are provided on the upper surface of the lid attached to the base, along a line located above a diagonal line of the circumferential shape of the groove.

10. The vessel according to claim 1 , further comprising a pressure gauge that detects the pressure in an internal space defined by the base and the lid attached to the base.

11. 6. The vessel according to claim 1, further comprising a valve that controls communication / isolation between an internal space defined by the base and the lid attached to the base and the outside.

Images