Transfer robot

Abstract

To provide a transport robot that enables a configuration of a mechanism to be simplified even when the transport robot includes a variable mechanism that changes a pitch between a plurality of mounting parts.SOLUTION: In a transport robot, a substrate holding device 2 includes: a plurality of hands 3 each including a hand fork 31; a variable mechanism 4 that changes a pitch between the hand forks; a base member 6 to which the hands and the variable mechanism are attached; and a plurality of guide mechanisms 8 that hold the hands movably in a Z-axis direction. The variable mechanism includes a driving part 42 that rotates a rotary shaft 41 about an axis extending in an X-axis direction; a lever member 43 that rotates while a first end 433 is connected to the rotary shaft 41; and a plurality of connecting parts 44 that are disposed at positions spaced apart from the rotary shaft by a predetermined distance along a longitudinal direction of the lever member and connect the hands with the lever member, and rotates the lever member about the axis to move the plurality of hands in the Z-axis direction to change the pitch between the hand forks.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a transport robot. [Background technology]

[0002] A transfer robot equipped with a substrate loading mechanism for unloading substrates from a storage unit in which multiple substrates are stored stacked at a predetermined pitch is described in Patent Document 1. The substrate loading mechanism in this document includes multiple hands with substrate loading sections arranged to overlap each other in the vertical direction, which is the Z-axis direction, at a predetermined pitch, and a pitch change mechanism for changing the pitch between the loading sections. The hands include hand forks as loading sections. The hand forks extend from the base ends of the hand forks in the X-axis direction.

[0003] The pitch change mechanism includes a lever member rotatably supported on a fulcrum shaft disposed with the Y direction as its axial direction and to which a hand is connected, and a drive mechanism that rotates the lever member. The hand connecting portion that connects the hand and lever member includes a protruding member attached to the lever member and protruding in the Y direction, and a guide member attached to the movable hand and having an engagement groove with which the protruding member engages.

[0004] The drive mechanism includes a linearly moving member that moves linearly in the Z-axis direction, a motor serving as a drive source, a male screw member that rotates with the motor's power, and a nut member that is attached to the linearly moving member and engages with the male screw member. The motor's rotation shaft extends in the Z-axis direction. The drive mechanism is located on the side opposite the tip of the hand. The lever member rotates around the fulcrum axis as the linearly moving member moves up and down. Therefore, the pitch change mechanism converts the rotational force of the rotation shaft extending in the Z-axis direction into a force that moves in the Z-axis direction, moving the linearly moving member, and by rotating the lever member via this linearly moving member, changes the pitch of the hand fork. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-179419 Summary of the Invention [Problem to be solved by the invention]

[0006] The pitch change mechanism of Patent Document 1 converts the rotational force of a rotation axis extending in the Z-axis direction into a force moving in the Z-axis direction to move a linear moving member, and then rotates a lever member via this linear moving member, which has the problem of requiring a large number of parts and making the configuration complicated.

[0007] In view of the above problems, an object of the present invention is to provide a transport robot that can simplify the configuration of a variable mechanism even when the transport robot is equipped with a variable mechanism that changes the pitch between multiple mounting sections on which substrates are mounted. [Means for solving the problem]

[0008] In order to solve the above problems, a transport robot of the present invention is a transport robot for transporting substrates out of a storage unit in which a plurality of substrates are stored stacked at a predetermined pitch, the transport robot comprising: a first substrate holding device on which the plurality of substrates are placed; the first substrate holding device being arranged to be overlapped at a predetermined pitch in the vertical direction and comprising a plurality of hands each having a placement section on which the substrates are placed; a variable mechanism for changing the pitch between the plurality of placement sections; a base member to which the plurality of hands and the variable mechanism are attached; and a plurality of guide mechanisms for holding each of the plurality of hands movably in the vertical direction and fixed to the base member. where the vertical direction is the Z-axis direction, the direction perpendicular to the Z-axis direction is the X-axis direction, the direction perpendicular to the X-axis and Z-axis directions is the Y-axis direction, the tip side of the hand inserted into the storage section is the first direction in the X-axis direction, and the base end side opposite the tip side of the hand is the second direction in the X-axis direction. The variable mechanism comprises: a drive unit that rotates a rotation shaft part around an axis extending in the X-axis direction; lever members that are arranged in the second direction in the X-axis direction of the multiple hands, extend in a direction perpendicular to the X-axis direction, and have a first end connected to the rotation shaft part and rotate around the axis; and a plurality of connecting parts that are arranged at positions equally spaced a predetermined distance from the rotation shaft part along the longitudinal direction of the lever member and connect each of the multiple hands to the lever member, and when the lever member rotates around the axis, the multiple hands each move in the Z-axis direction, and the pitch between the multiple mounting parts is changed. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view of a transfer robot 100. As shown in FIG. [Figure 2] FIG. 2 is a perspective view of the first substrate mounting mechanism as seen from the tip side. [Figure 3] FIG. 3 is a perspective view of the first substrate mounting mechanism as seen from the base end side. [Figure 4] FIG. 4 is a plan view of the first substrate mounting mechanism as seen from above. [Figure 5] FIG. 5 is a perspective view of the hand 3 as seen from the tip side. [Figure 6] FIG. 6 is an exploded perspective view of the first hand. [Figure 7] FIG. 7 is a perspective view of the first hand, the first gripping unit, and the guide mechanism. [Figure 8] FIG. 8 is a perspective view of the second hand, the second gripping unit, and the guide mechanism. [Figure 9] FIG. 9 is a perspective view of the third hand, the third gripping unit, and the guide mechanism. [Figure 10] FIG. 10 is a perspective view of the fourth hand, the fourth gripping unit, and the guide mechanism. [Figure 11] FIG. 11 is a diagram illustrating the adjustment unit. [Figure 12] FIG. 12 is a perspective view of the first substrate mounting mechanism from the tip side with the lever member removed. [Figure 13] FIG. 13 is a perspective view of the first substrate mounting mechanism from the base end side with the lever member removed. [Figure 14] FIG. 14 is a perspective view of the first substrate mounting mechanism seen from the base end side in a state in which the pitch between the hand forks is widened by driving the variable mechanism. [Figure 15] FIG. 15 is a perspective view of the gripping mechanism. [Figure 16] FIG. 16 is a view seen from the line AA in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0011] (Transport robot) FIG. 1 is a perspective view of a transfer robot 100. The transfer robot 100 of this embodiment is incorporated into a manufacturing line for semiconductor wafers or the like for use. For example, the transfer robot 100 simultaneously unloads multiple substrates W from a storage cassette (storage section) in which multiple substrates W are stored stacked at a predetermined pitch, and loads the multiple substrates W into a processing cassette (storage section) in a heating furnace in which the substrates W are stored stacked at a predetermined pitch. The transfer robot 100 also simultaneously unloads multiple substrates W from a processing cassette and loads the substrates W into the storage cassette. In this embodiment, the pitch of the substrates W stored in the storage cassette is different from the pitch of the substrates W stored in the processing cassette.

[0012] As shown in FIG. 1, the transfer robot 100 includes a first substrate holding device 2 on which a plurality of substrates W are placed, a first robot arm 10 for moving the first substrate holding device 2, a second substrate holding device 17 on which one substrate W is placed, a second robot arm 12 for moving the second substrate holding device 17, a turning mechanism 14 for rotatably supporting the base ends of the first robot arm 10 and the second robot arm 12, an elevating mechanism 13 for moving the turning mechanism 14 in the vertical direction, and a control and a control unit 9.

[0013] The first substrate holding device 2 includes a plurality of hands 3 each having hand forks arranged to overlap at a predetermined pitch in the vertical direction, and a variable mechanism for changing the pitch between the plurality of hand fork sections. The second substrate holding device 17 includes a single hand 16 arranged to overlap the uppermost first hand 3A of the plurality of hands 3 in the Z1 direction, and having a hand fork 161 on which a substrate W is placed. The hand fork 161 corresponds to the "second placement section" of the present invention. The second substrate holding device 17 also includes a gripping mechanism 171 for gripping the substrate W placed on the hand fork 161.

[0014] The first robot arm 10 has two joints and is configured to extend and retract in the horizontal direction as a whole. This allows the first robot arm 10 to move the first substrate holding device 2 along the horizontal direction. The second robot arm 12 has two joints and is configured to extend and retract in the horizontal direction as a whole. This allows the second robot arm 12 to move the second substrate holding device 17 along the horizontal direction.

[0015] The turning mechanism 14 includes a first support part 141 that supports the first robot arm 10 and the second robot arm 12, and a second support part 142 that supports the first support part 141. A drive part 143 for rotating the first support part 141 is housed inside the second support part 142. When the drive part 143 is driven, the first support part 141 rotates relative to the second support part 142.

[0016] The lifting mechanism 13 includes a base portion 131 to which the second support portion 142 is fixed, a support frame 132 that supports the base portion 131 so that it can be raised and lowered, and a drive portion 133 that moves the base portion 131 up and down relative to the support frame 132. The drive portion 133 includes a motor that serves as a drive source, and a power transmission portion that transmits the power of the motor to the base portion 131.

[0017] The control unit 9 controls the first substrate holding device 2, the first robot arm 10, the second substrate holding device 17, the second robot arm 12, the turning mechanism 14, and the lifting mechanism 13 based on commands from a higher-level device.

[0018] (1st board holding device) Fig. 2 is a perspective view of the first substrate mounting mechanism as seen from the tip side, Fig. 3 is a perspective view of the first substrate mounting mechanism as seen from the base end side, and Fig. 4 is a plan view of the first substrate mounting mechanism as seen from above.

[0019] In the following description, as shown in Figure 2 etc., three mutually perpendicular directions are referred to as the X-axis direction, Y-axis direction, and Z-axis direction. The up-down direction is the Z-axis direction, with the upper side being the Z1 direction and the lower side being the Z2 direction. In the X-axis direction, the X1 direction (first direction) is the tip side of the hand 3 inserted into the cassette, and the X2 direction (second direction) is the base side opposite the tip side of the hand 3. The plane formed by the X and Y directions is referred to as the XY plane, the plane formed by the Y and Z directions is referred to as the YZ plane, and the plane formed by the Z and X directions is referred to as the ZX plane.

[0020] As shown in Figures 2 and 3, the first substrate holding device 2 comprises a plurality of hands 3 arranged to overlap at a predetermined pitch in the Z-axis direction and equipped with hand forks 31 on which a substrate W is placed, a variable mechanism 4 for changing the pitch between the plurality of hand forks 31, a gripping mechanism 5 for gripping the substrate W placed on the hand 3, a base member 6 to which the plurality of hands 3, variable mechanism 4 and gripping mechanism 5 are attached, an attachment member 7 for attaching the hand 3 to the base member 6, and a detection mechanism 15 for detecting that the gripping mechanism 5 is gripping the substrate W.

[0021] The base member 6 is attached to the first robot arm 10. The base member 6 includes a main body 61, a first support member 62, a second support member 63, and a third support member 64. The main body 61 is composed of a flat plate-shaped member. The first support member 62, the second support member 63, and the third support member 64 are fixed to the upper surface of the main body 61. The first support member 62 is located in the Y1 direction of the hand 3 and supports the hand 3 via the attachment member 7. The second support member 63 is located in the Y2 direction of the hand 3 and supports the hand 3 via the attachment member 7. The third support member 64 is located in the Y2 direction of the main body 61 and, together with the second support member 63, supports the drive unit 42 of the variable mechanism 4.

[0022] The hand 3 comprises, from top to bottom, a first hand 3A, a second hand 3B, a third hand 3C, and a fourth hand 3D. In this embodiment, the hand forks 31A of the first hand 3A, the hand forks 31B of the second hand 3B, the hand forks 31C of the third hand 3C, and the hand forks 31D of the fourth hand 3D are arranged at approximately the same pitch in the Z-axis direction.

[0023] In this embodiment, the mounting member 7 is a guide mechanism 8. A guide mechanism 8 is provided for each hand 3 and holds each hand 3 movably in the Z-axis direction. As shown in FIGS. 2 to 4, the guide mechanism 8 includes a rail portion 81 extending in the Z-axis direction, a slider 82 movable in the Z-axis direction relative to the rail portion 81, and a hand fixing portion 83 fixed to the slider 82. The main body 36 is fixed to the hand fixing portion 83 with a screw. A guide mechanism 8A to which the first hand 3A is attached and a guide mechanism 8B to which the second hand 3B is attached are fixed to the second support member 63. The guide mechanism 8A is located in the X1 direction of the guide mechanism 8B. A guide mechanism 8C to which the third hand 3C is attached and a guide mechanism 8D to which the fourth hand 3D is attached are fixed to the first support member 62. The guide mechanism 8C is located in the X1 direction of the guide mechanism 8D.

[0024] (hand) FIG. 5 is a perspective view of the hand 3 as seen from the tip side. FIG. 6 is an exploded perspective view of the first hand. FIG. 7 is a perspective view of the first hand, first gripping unit, and guide mechanism. FIG. 8 is a perspective view of the second hand, second gripping unit, and guide mechanism. FIG. 9 is a perspective view of the third hand, third gripping unit, and guide mechanism. FIG. 10 is a perspective view of the fourth hand, fourth gripping unit, and guide mechanism. FIG. 11 is a diagram illustrating the adjustment unit.

[0025] As shown in FIG. 5, each hand 3 has the same basic configuration. Therefore, as an example of the basic configuration of each hand 3, a first hand 3A shown in FIG. 6 will be described. As shown in FIG. 6, the first hand 3A includes a connection member 32A to which a hand fork 31A is fixed, and a coupling mechanism 33A that couples the connection member 32A to the mounting member 7. A base 311 of the hand fork 31A is fixed to the connection member 32A with a screw 312. The connection member 32A is a flat plate-shaped member. The connection member 32A includes a first connection portion 321A to which the hand fork 31A is fixed, and a second connection portion 322A to which the coupling mechanism 33A is fixed. The connection member 32A includes a holder 323 that holds the gripping portion 51 of the gripping mechanism 5. In this embodiment, the holder 323 is a hole 324 that penetrates the first connection portion 321A in the X-axis direction.

[0026] The linking mechanism 33A includes a main body 36A that overlaps with the second connection portion 322A of the connection member 32A in the Z-axis direction and is fixed to the mounting member 7, a fixing screw 37 as a fixing portion for fixing the connection member 32A to the main body 36A, and an adjustment screw 38 and a screw hole 320 as an inclination adjustment portion for adjusting the inclination of the connection member 32A relative to the main body 36A. The main body 36A is a flat plate-shaped member.

[0027] As shown in FIGS. 6 and 7, in the first hand 3A, the second connecting portion 322A is The main body 36A is positioned in the X2 and Y2 directions of the hand 3A. The main body 36A overlaps the second connection portion 322A in the Z1 direction. As shown in FIG. 7, the Y2 end of the main body 36A is fixed to the hand fixing portion 83 with a screw. Eight adjustment screws 38 are provided. As shown in FIG. 11, the adjustment screws 38 are screwed into threaded holes 320 provided in the main body 36A. The threaded holes 320 pass through the main body 36A. When the adjustment screws 38 are screwed in, the tips of the adjustment screws 38 protrude from the threaded holes 320 toward the second connection portion 322A and come into contact with the second connection portion 322A, adjusting the gap between the main body 36A and the second connection portion 322A. Therefore, when the screwing depth of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the second connection portion 322A, thereby adjusting the inclination of the connection member 32A relative to the main body 36A. This adjusts the levelness of the hand fork 31A. After the screwing depth of each adjustment screw 38 has been adjusted, the main body 36A and the connection member 32A are fixed with the fixing screw 37.

[0028] As shown in FIG. 8, in the second hand 3B, the second connection portion 322B is positioned in the X2 and Y2 directions of the second hand 3B. The main body portion 36B overlaps the second connection portion 322B in the Z2 direction. As shown in FIG. 5, the linking mechanism 33B of the second hand 3B overlaps the linking mechanism 33A of the first hand 3A in the Z axis direction. As shown in FIG. 8, the Y2-direction end of the main body portion 36B is fixed to the hand fixing portion 83 with a screw. Eight adjustment screws 38 are provided. The adjustment screws 38 are screwed into threaded holes 320 provided in the second connection portion 322B. The threaded holes 320 penetrate the second connection portion 322B. When the adjustment screws 38 are screwed in, the tips of the adjustment screws 38 protrude from the threaded holes 320 toward the main body portion 36B and come into contact with the main body portion 36B, adjusting the gap between the main body portion 36B and the second connection portion 322B. Therefore, when the amount of threading of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the main body 36B, thereby adjusting the inclination of the connecting member 32B relative to the main body 36B. This adjusts the levelness of the hand fork 31B. After the amount of threading of each adjustment screw 38 has been adjusted, the main body 36B and the connecting member 32B are fixed together with the fixing screw 37.

[0029] 4 and 7, the connecting member 32A and the main body 36A of the first hand 3A are provided with openings 330A through which the heads 371 of the adjusting screws 38 and the heads 381 of the fixing screws 37 of the second hand 3B are exposed. As a result, even if the first hand 3A and the second hand 3B overlap in the Z axis direction, the amount of threading of the adjusting screws 38 can be adjusted and the main body 36B and the connecting member 32B can be fixed by the fixing screws 37 from the Z1 direction of the first hand 3A.

[0030] As shown in FIGS. 4 and 5, the connecting mechanism 33C of the third hand 3C is visible from the Z1 direction of the first hand 3A. As shown in FIG. 9, in the third hand 3C, the second connecting portion 322C is located in the X2 and Y1 directions of the third hand 3C. The main body 36C overlaps the second connecting portion 322C from the Z1 direction. The Y2 end of the main body 36C is fixed to the hand fixing portion 83 with a screw. Eight adjusting screws 38 are provided. The adjusting screws 38 are screwed into threaded holes 320 provided in the main body 36C. The threaded holes 320 penetrate the main body 36C. When the adjusting screws 38 are screwed in, the tips of the adjusting screws 38 protrude from the threaded holes 320 toward the second connecting portion 322C and come into contact with the second connecting portion 322C, adjusting the gap between the main body 36C and the second connecting portion 322C. Therefore, when the screwing depth of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the second connection portion 322C, thereby adjusting the inclination of the connection member 32C with respect to the main body 36C. This adjusts the levelness of the hand fork 31C. After the screwing depth of each adjustment screw 38C is adjusted, the main body 36C and the connection member 32C are fixed with the fixing screw 37.

[0031] As shown in FIG. 10, in the fourth hand 3D, the second connecting portion 322D of the fourth hand 3D The main body 36D is positioned in the X2 and Y1 directions. The main body 36D overlaps the second connecting portion 322D in the Z2 direction. As shown in FIG. 5, the linking mechanism 33D of the fourth hand 3D overlaps the linking mechanism 33C of the third hand 3C in the Z-axis direction. As shown in FIG. 10, the Y2-direction end of the main body 36D is fixed to the hand fixing portion 83 with a screw. Eight adjusting screws 38 are provided. The adjusting screws 38 are screwed into threaded holes 320 provided in the second connecting portion 322D. The threaded holes 320 penetrate the second connecting portion 322D. When the adjusting screws 38 are screwed in, the tips of the adjusting screws 38 protrude from the threaded holes 320 toward the main body 36D and come into contact with the main body 36D, adjusting the gap between the main body 36D and the second connecting portion 322D. Therefore, when the screwing amount of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the main body 36D, thereby adjusting the inclination of the connecting member 32D relative to the main body 36D. This adjusts the levelness of the hand fork 31D. After the screwing amount of each adjustment screw 38 has been adjusted, the main body 36D and the connecting member 32D are fixed with the fixing screw 37.

[0032] 4 and 9, the connecting member 32C and the main body 36C of the third hand 3C are provided with openings 330C through which the heads 371 of the adjusting screws 38 and the heads 381 of the fixing screws 37 of the fourth hand 3D are exposed. As a result, even if the third hand 3C and the fourth hand 3D overlap in the Z axis direction, the amount of threading of the adjusting screws 38 can be adjusted and the main body 36D and the connecting member 32D can be fixed by the fixing screws 37 from the Z1 direction of the third hand 3C.

[0033] (variable mechanism) Fig. 12 is a perspective view of the first substrate mounting mechanism when viewed from the tip side with the lever member removed. Fig. 13 is a perspective view of the first substrate mounting mechanism when viewed from the base side with the lever member removed. Fig. 14 is a perspective view of the first substrate mounting mechanism when viewed from the base side with the variable mechanism driven to widen the pitch between the hand forks.

[0034] 12 and 13, the variable mechanism 4 includes a drive unit 42 that rotates a rotary shaft unit 41 about an axis extending in the X-axis direction, a lever member 43 whose first end 433 is connected to the rotary shaft unit 41 and that rotates about the axis, and a plurality of connecting units 44 that are arranged at positions spaced apart at equal intervals a predetermined distance from the rotary shaft unit 41 along the longitudinal direction of the lever member 43 and that connect each of the plurality of hands 3 to the lever member 43. In this embodiment, four connecting units 44 are provided.

[0035] The driving unit 42 is disposed outside the multiple hands 3 in the Y-axis direction and at a position overlapping with the multiple hands 3 in the Y-axis direction. The driving unit 42 is fixed to the second support member 63 and the third support member 64. The driving unit 42 includes a motor 421 serving as a driving source and a transmission mechanism 422 that transmits the driving force of the motor 421. The lever member 43 is disposed in the X2 direction of the multiple hands 3 and extends in the Y-axis direction.

[0036] The connecting portion 44 includes a protrusion 431 protruding from the lever member 43 in the X1 direction, and a connecting base portion 441 fixed to the hand 3 and having a groove 442 extending in the Y-axis direction. The protrusion 431 is fitted into the groove 442 and includes a roller 432 rotatably supported relative to the protrusion 431. The connecting base portion 441 is fixed to a connecting base fixing portion 39 provided on the main body portion 36 of each hand 3. More specifically, the four connecting base portions 441 are fixed, in order in the Y1 direction, to the connecting base fixing portions 39 of the main body portion 36A of the first hand 3A, the main body portion 36B of the second hand 3B, the main body portion 36C of the third hand 3C, and the main body portion 36D of the fourth hand 3D. The connecting base fixing part 39 is provided with a groove 391 extending in the Z-axis direction, and the connecting base part 441 is accommodated in the groove 391 and is movable in the Z-axis direction along the groove 391. The connecting base part 441 adjusts its position in the Z-axis direction relative to the hand 3. The connecting base part 441 is provided with an adjustment part 443 for adjustably fixing the connecting base part 441 to the connecting base fixing part 39 of the hand 3 by a screw 445 inserted into the elongated hole 444.

[0037] When the lever member 43 rotates around the axis, the multiple hands 3 each move in the Z-axis direction, changing the pitch between the multiple hand forks 31. More specifically, as shown in FIG. 14, when the lever member 43 rotates around the axis in the Z2 direction, the multiple hands 3 each move in the Z-axis direction, widening the pitch between the multiple hand forks 31. As shown in FIG. 3, when the lever member 43 rotates around the axis in the Z1 direction, the multiple hands 3 each move in the Z-axis direction, narrowing the pitch between the multiple hand forks 31. At this time, the rollers 432 of the protrusions 431 move in the Y-axis direction along the grooves 442 as the lever member 43 rotates around the axis. This allows the hands 3 to move in the Z-axis direction when the lever member 43 rotates.

[0038] (gripping mechanism) 15 is a perspective view of the gripping mechanism. As shown in FIGS. 3 and 15, the gripping mechanism 5 includes gripping portions 51 for contacting and gripping a substrate W placed on the hand 3, biasing members 52 for biasing the gripping portions 51 in a gripping direction (X1 direction) for gripping the substrate W, a moving member 53 for contacting the gripping portions 51 and moving the gripping portions 51 in a retraction direction (X2 direction) for retracting from the substrate W, and a driving unit 54 connected to the moving member 53 for driving the moving member 53 in the gripping direction and the retraction direction. As shown in FIGS. 7 to 10, a plurality of gripping portions 51 are provided corresponding to each hand 3. A plurality of biasing members 52 are provided corresponding to each of the plurality of gripping portions 51. The multiple gripping portions 51 include a first gripping portion 51A for gripping a substrate W placed on the first hand 3A, a second gripping portion 51B for gripping a substrate W placed on the second hand 3B, a third gripping portion 51C for gripping a substrate W placed on the third hand 3C, and a fourth gripping portion 51D for gripping a substrate W placed on the fourth hand 3D.

[0039] As shown in FIGS. 7 to 10 and 15, the gripping unit 51 includes a gripping roller 55 disposed at the end on the gripping direction side and capable of contacting the substrate W, a shaft member 56 on which the gripping roller 55 is rotatably supported and which extends in the X2 direction (retraction direction), and a shaft mounting portion 58 fixed to the holding unit 323. A hook portion 561 protruding in the Y-axis direction is provided at the X2-direction end of the shaft member 56. The shaft mounting portion 58 holds the shaft member 56 movably in the X-axis direction. The shaft mounting portion 58 includes a main body portion 581 to which the shaft member 56 is fixed, and two connecting shafts 582 extending in the X-axis direction. The two connecting shafts 582 are inserted into respective hole portions 324 and fixed to the connecting member 32. Specifically, the X1-direction ends of the two connecting shafts 582 inserted into the hole portions 324 are fixed to the connecting member 32 by screws 585 via plate members 584. A through-hole penetrating the main body 581 in the X-axis direction is provided, and the connecting shaft 582 is inserted into this through-hole. As a result, the main body 581 is supported by the connecting shaft 582 in a state where it can move in the X-axis direction. The biasing member 52 is a compression coil spring. The biasing member 52 is inserted into the connecting shaft 582, and the X1-direction end of the biasing member 52 abuts against the main body 581, and the X2-direction end of the biasing member 52 abuts against a retaining portion 583 provided at the X2-direction end of the connecting shaft 582. As a result, the biasing member 52 biases the grip portion 51 in the X1 direction.

[0040] 15, when viewed from the Z-axis direction, gripping roller 55A of first gripping portion 51A and gripping roller 55B of second gripping portion 51B are misaligned in the Y-axis direction. Gripping roller 55B of second gripping portion 51B and gripping roller 55C of third gripping portion 51C are misaligned in the Y-axis direction. Gripping roller 55C of third gripping portion 51C and gripping roller 55D of fourth gripping portion 51D are misaligned in the Y-axis direction.

[0041] 3 and 15, the driving unit 54 is an air cylinder 540. The air cylinder 540 is fixed to the main body 61. A rod 541 of the air cylinder 540 protrudes in the X2 direction. When the air cylinder 540 is driven, the rod 541 moves back and forth in the X-axis direction.

[0042] 3 and 15, the moving member 53 includes a rod fixing portion 531 fixed to a rod 541, a flat movable portion 532 fixed to the rod fixing portion 531, and a retraction lever 533 fixed to the movable portion 532 and extending in the Z1 direction. A guide mechanism 534 is disposed in the Z2 direction of the movable portion 532, and the movable portion 532 is supported by the guide mechanism 534 so as to be movable in the X-axis direction. As shown in FIG. 15, the retraction lever 533 is located in the X1 direction of each hook portion 561 and overlaps with each hook portion 561 in the X-axis direction. Therefore, when the air cylinder 540 is driven to move the retraction lever 533 in the X2 direction, the retraction lever 533 abuts against each hook portion 561 and moves each gripping portion 51 in the X2 direction. As a result, each gripping portion 51 moves away from the substrate W placed on the hand 3, and the substrate W is released from its fixed position. Furthermore, when the air cylinder 540 is driven to move the retraction lever 533 in the X1 direction, the biasing member 52 biases each of the gripping portions 51 to move each of the gripping portions 51 in the X1 direction. As a result, each of the gripping portions 51 comes into contact with the substrate W placed on the hand 3 and grips the substrate W.

[0043] (detection mechanism) 16 is a view seen from the direction AA in FIG. 2. As shown in FIG. 16, the detection mechanism 15 includes five sensors 151 as detectors for detecting the positions of the five grippers 51 in the X-axis direction. In this embodiment, the sensors 151 are optical sensors in which a light-emitting element and a light-receiving element are arranged opposite each other. The five sensors 151 are fixed to the main body 36 of each connecting mechanism 33. That is, a sensor 151 is held by each hand 3. The detection mechanism 15 also includes a detection plate 152 that passes between the light-emitting element and the light-receiving element of each sensor 151. The detection plate 152 is fixed to each gripper 51. In this embodiment, when the gripper 51 grips the substrate W, the detection plate 152 is disposed between the light-emitting element and the light-receiving element of the sensor 151. Therefore, the light-receiving element of the sensor 151 receives light from the light-emitting element, thereby detecting that the substrate W is being gripped by the gripper 51.

[0044] (Transport robot operation) Depending on the situation, the transfer robot 100 of this embodiment can transfer one substrate W or five substrates W. When the transfer robot 100 transfers one substrate W from a storage cassette to a processing cassette, the control unit 9 drives the second robot arm 12 to unload the one substrate W from the storage cassette and transfer it to the processing cassette.

[0045] When the transport robot 100 unloads five substrates W from a storage cassette to a processing cassette, the control unit 9 drives the drive unit 42 to change the pitch between the hand forks 31 so that the pitch between the substrates W stored in the storage cassette and the pitch between the hand forks 31 are the same, and simultaneously drives the first robot arm 10 and the second robot arm 12 to unload the five substrates W from the storage cassette. Thereafter, the control unit 9 drives the drive unit 42 to change the pitch between the hand forks 31 so that the pitch between the substrates W stored in the processing cassette and the pitch between the hand forks 31 are the same, and simultaneously drives the first robot arm 10 and the second robot arm 12 to transport the five substrates W to the processing cassette. At this time, when the pitch between the hand forks 31 is changed by the variable mechanism 4, the hand fork 31 of the first hand 3A moves in the Z-axis direction, and the pitch between the hand fork 31 of the first hand 3A and the hand fork 161 of the single hand 16 is also changed by the same interval. As a result, the transfer robot 100 By simultaneously driving the first robot arm 10 and the second robot arm 12, five substrates W can be transported.

[0046] (Action and effect) The transfer robot 100 includes a first substrate holding device 2. The first substrate holding device 2 includes a plurality of hands 3 arranged to overlap at a predetermined pitch in the Z-axis direction and each having a hand fork 31 on which a substrate W is placed, an adjustable mechanism 4 for adjusting the pitch between the plurality of hand forks 31, a base member 6 to which the plurality of hands 3 and the adjustable mechanism 4 are attached, and a plurality of guide mechanisms 8 for holding each of the plurality of hands 3 movably in the Z-axis direction and fixed to the base member 6. The adjustable mechanism 4 includes a drive unit 42 for rotating a rotation shaft unit 41 about an axis extending in the X-axis direction, a lever member 43 arranged in the X2 direction of the plurality of hands 3, extending in a direction perpendicular to the X-axis direction, and having a first end 433 connected to the rotation shaft unit 41 and rotating about the axis, and a plurality of connecting units 44 arranged at positions equally spaced a predetermined distance from the rotation shaft unit 41 along the longitudinal direction of the lever member 43 and connecting each of the plurality of hands 3 to the lever member 43. When the lever member 43 rotates around the axis, each of the hands 3 moves in the Z-axis direction, and the pitch between the hand forks 31 is changed.

[0047] According to the transfer robot 100 of this embodiment, the rotating shaft 41 is aligned along the X-axis direction, and the lever member 43 is directly rotated by the driving unit 42 to change the pitch between the multiple hand forks 31. This simplifies the configuration of the variable mechanism 4 that changes the pitch between the multiple hand forks 31. Furthermore, because the rotating shaft 41 rotated by the driving unit 42 extends in the X-axis direction, it is possible to prevent the dimension of the first substrate holding device 2 in the Z-axis direction from becoming larger compared to a configuration in which the rotating shaft 41 extends in the Z-axis direction.

[0048] The connecting portion 44 includes a protrusion 431 that protrudes from the lever member 43 toward the hand 3, and a connecting base portion 441 that is fixed to the hand 3 and has a groove 442 that extends in the Y-axis direction. The protrusion 431 fits into the groove 442, and moves along the groove 442 when the lever member 43 rotates around the axis. This allows the protrusion 431 to move the connecting base portion 441 in the Z-axis direction, even when the protrusion 431 moves in an arc around the rotation shaft portion 41.

[0049] The protrusion 431 is fitted into the groove 442 and includes a roller 432 that is rotatably supported relative to the protrusion 431. This allows the protrusion 431 to move easily in the groove 442.

[0050] The connecting base part 441 includes an adjustment part 443 for adjustably fixing the position in the Z axis direction relative to the hand 3. The adjustment part 443 is an elongated hole 444 that is long in the Z axis direction. The connecting base part 441 is fixed to the hand 3 by a screw 445 that is inserted into the elongated hole 444. This makes it easy to adjust the position of the connecting base part 441 in the Z axis direction relative to the hand 3.

[0051] The driving unit 42 is disposed outside the multiple hands 3 in the Y-axis direction and at a position overlapping the multiple hands 3 in the Y-axis direction. This makes it possible to prevent the dimension of the first substrate holding device 2 in the X-axis direction from becoming larger than in a configuration in which the driving unit 42 is disposed outside the multiple hands 3 in the X2 direction.

[0052] The transport robot 100 includes a first substrate holding device 2, a first robot arm 10 that moves the first substrate holding device 2, one single hand 16 that is arranged to overlap with the first hand 3A in the Z1 direction of the first hand 3A and has a hand fork 161 on which a substrate W is placed, a second robot arm 12 that moves the single hand 16, and a second robot arm 13 that moves the first substrate holding device 2, the first hand 3A, and a second robot arm 14 that moves the single hand 16. The transport robot 100 includes a control unit 9 that drives the first robot arm 10 and the second robot arm 12. When one substrate W is to be removed from the storage unit, the control unit 9 drives the second robot arm 12 to remove the one substrate W from the storage unit. When five substrates W are to be removed from the storage unit, the control unit 9 drives the drive unit 42 to change the pitch between the multiple hand forks 31 and simultaneously drives the first robot arm 10 and the second robot arm 12 to remove the five substrates W from the storage unit. This allows the transport robot 100 to transport one substrate W or five substrates W depending on the situation.

[0053] (Other variations) In the above embodiment, the adjustment portion is composed of a plurality of adjustment screws 38 and a plurality of through-holes 320 into which the adjustment screws 38 are screwed, but the adjustment portion may also be a shim for adjusting the gap sandwiched between the main body portion 36 and the connecting member 32.

[0054] The present technology can be configured as follows.

[0055] (1) 1. A transport robot for unloading substrates from a storage unit in which a plurality of substrates are stored stacked at a predetermined pitch, a first substrate holding device on which a plurality of the substrates are placed, the first substrate holding device, a plurality of hands arranged to overlap at a predetermined pitch in the vertical direction and each having a placement portion on which the substrate is placed; a variable mechanism for changing the pitch between the plurality of mounting sections; a base member to which the plurality of hands and the variable mechanism are attached; a plurality of guide mechanisms that hold the plurality of hands so that they can move in the vertical direction and are fixed to the base member; Equipped with If the up-and-down direction is the Z-axis direction, the direction perpendicular to the Z-axis direction is the X-axis direction, the direction perpendicular to the X-axis and Z-axis directions is the Y-axis direction, the tip end side of the hand inserted into the storage section is the first direction in the X-axis direction, and the base end side opposite to the tip end side of the hand is the second direction in the X-axis direction, then: the variable mechanism includes: a drive unit that rotates a rotation shaft unit about an axis extending in the X-axis direction; a lever member that is arranged in a second direction in the X-axis direction of the plurality of hands, extends in a direction perpendicular to the X-axis direction, and has a first end connected to the rotation shaft unit and rotates about the axis; and a plurality of connecting units that are arranged at positions equally spaced a predetermined distance from the rotation shaft unit along the longitudinal direction of the lever unit and connect each of the plurality of hands to the lever member, A transport robot characterized in that when the lever member rotates around the axis, each of the multiple hands moves in the Z-axis direction, changing the pitch between the multiple placement sections.

[0056] This simplifies the configuration of the variable mechanism that changes the pitch between the multiple mounting units. Because the rotation shaft rotated by the drive unit extends in the X-axis direction, it is possible to prevent the size of the first substrate holding device in the Z-axis direction from increasing compared to a configuration in which the rotation shaft extends in the Z-axis direction.

[0057] (2) the connecting portion includes a protrusion portion that protrudes from the lever member toward the hand, and a connecting base portion that is fixed to the hand and has a groove portion that extends in the Y-axis direction; The transport robot described in (1) is characterized in that the protrusion fits into the groove and moves along the groove when the lever member rotates around the axis.

[0058] As a result, even when the protrusion moves in an arc around the rotation shaft 41, the protrusion can move the connection base in the Z-axis direction.

[0059] (3) The transport robot according to (2) is characterized in that the protrusion is fitted into the groove and has a roller supported rotatably relative to the protrusion.

[0060] This allows the protrusion to move easily in the groove in the Z-axis direction.

[0061] (4) The transport robot according to (2) or (3), wherein the connecting base portion includes an adjustment portion for adjustably fixing the position in the Z-axis direction relative to the hand.

[0062] This makes it easy to adjust the position of the connection base part relative to the hand in the Z-axis direction.

[0063] The adjustment portion is a slot that is long in the Z-axis direction, The transport robot according to (4) is characterized in that the connecting base part is fixed to the hand by a screw inserted into the long hole.

[0064] (6) The transport robot according to any one of claims 1 to 5, characterized in that the drive unit is arranged outside the plurality of hands in the Y-axis direction and at a position overlapping with the plurality of hands in the Y-axis direction.

[0065] This makes it possible to prevent the size of the first substrate holding device in the Z-axis direction from increasing.

[0066] (7) a first robot arm that moves the first substrate holding device; one single hand that is arranged above a first hand that is arranged at the top of the plurality of hands so as to overlap the first hand, and that includes a second placement portion on which the substrate is placed; a second robot arm that moves the single hand; a control unit that drives the drive unit, the first robot arm, and the second robot arm, The control unit When one of the substrates is to be removed from the storage unit, the second robot arm is driven to remove the one of the substrates from the storage unit; A transport robot described in any one of (1) to (6), characterized in that when multiple substrates are to be removed from the storage section, the drive section is driven to change the pitch between the multiple mounting sections, and the first robot arm and the second robot arm are driven simultaneously to remove the multiple substrates from the storage section.

[0067] This allows the transfer robot to transfer one substrate or multiple substrates depending on the situation. [Explanation of symbols]

[0068] 100...transport robot, 2...first substrate holding device, 3...hand, 3A...first hand, 3B...second hand, 3C...third hand, 3D...fourth hand, 4...variable mechanism, 5...gripping mechanism, 6...base member, 7...mounting member, 8·8A·8B·8C·8D...guide mechanism, 9...control unit, 10...first robot arm, 12...second robot arm, 13...lifting mechanism, 14...turning mechanism unit, 15...detection mechanism, 16...single hand, 17...second substrate holding device, 31-31D...hand fork, 32-32D...connecting member, 33-33D...coupling mechanism, 36-36D...main body, 37...fixing screw, 38...adjusting screw, 39...coupling base fixing portion, 41...rotating shaft portion, 42...driving portion, 43...lever member, 44...coupling portion, 51...gripping portion, 51A...first gripping portion, 51B...second gripping portion, 51C...third gripping portion, 51D...fourth gripping portion, 55-55D...gripping roller, 56...shaft member, 58...shaft mounting portion, 61...main body, 62...first support member, 63...second support member, 64...third support member, 81...rail portion, 82...slider, 83...hand fixing portion, 131...base portion, 132...support frame, 133...drive portion, 141...support portion, 142...support portion, 143...drive portion, 151...sensor, 152...detection plate, 161...hand fork, 171...gripping mechanism, 311...base portion, 312...screw, 320...screw hole, 321...first connecting portion, 322-322D...second connecting portion, 323...holding portion, 324...hole portion, 330A...opening, 330C...opening, 371...head portion, 381... Head, 391...groove portion, 421...motor, 422...transmission mechanism, 431...projection portion, 432...roller, 433...first end portion, 441...connection base portion, 442...groove portion, 443...adjustment portion, 444...long hole, 445...screw, 531...rod fixing portion, 532...movable portion, 533...retraction lever, 534...guide mechanism, 540...air cylinder, 541...rod, 561...hook portion, 581...main body portion, 582...connection shaft, 583...prevention portion, 584...plate member, 585...screw, W...board

Claims

1. 1. A transport robot for unloading substrates from a storage unit in which a plurality of substrates are stored stacked at a predetermined pitch, a first substrate holding device on which a plurality of the substrates are placed, the first substrate holding device, a plurality of hands arranged to overlap at a predetermined pitch in the vertical direction and each having a placement portion on which the substrate is placed; a variable mechanism for changing the pitch between the plurality of mounting sections; a base member to which the plurality of hands and the variable mechanism are attached; a plurality of guide mechanisms that hold the plurality of hands so that they can move in the vertical direction and are fixed to the base member; Equipped with Let us define the vertical direction as the Z-axis direction, the direction perpendicular to the Z-axis direction as the X-axis direction, the direction perpendicular to the X-axis and Z-axis directions as the Y-axis direction, the tip end side of the hand inserted into the storage section as the first direction in the X-axis direction, and the base end side opposite to the tip end side of the hand as the second direction in the X-axis direction. the variable mechanism includes: a drive unit that rotates a rotation shaft unit about an axis extending in the X-axis direction; a lever member that is arranged in a second direction of the X-axis direction of the plurality of hands, extends in a direction perpendicular to the X-axis direction, and has a first end connected to the rotation shaft unit and rotates about the axis; and a plurality of connecting units that are arranged at positions equally spaced a predetermined distance from the rotation shaft unit along the longitudinal direction of the lever unit and connect each of the plurality of hands to the lever member, When the lever member rotates around the axis, each of the plurality of hands moves in the Z-axis direction, thereby changing the pitch between the plurality of placement sections.

2. the connecting portion includes a protrusion portion that protrudes from the lever member toward the hand, and a connecting base portion that is fixed to the hand and has a groove portion that extends in the Y-axis direction; 2. The transfer robot according to claim 1, wherein the protrusion fits into the groove and moves along the groove when the lever member rotates around the axis.

3. 3. The transfer robot according to claim 2, wherein the protrusion includes a roller that fits into the groove and is rotatably supported relative to the protrusion.

4. 4. The transfer robot according to claim 2, wherein the connection base portion includes an adjustment portion for adjustably fixing a position of the connection base portion relative to the hand in the Z-axis direction.

5. The adjustment portion is a slot that is long in the Z-axis direction, 5. The transfer robot according to claim 4, wherein the connecting base portion is fixed to the hand by a screw inserted into the elongated hole.

6. 2. The transfer robot according to claim 1, wherein the driving unit is disposed outside the plurality of hands in the Y-axis direction and at a position overlapping the plurality of hands in the Y-axis direction.

7. a first robot arm that moves the first substrate holding device; one single hand that is arranged above a first hand that is arranged at the top of the plurality of hands so as to overlap the first hand, the single hand including a second placement portion on which the substrate is placed; a second robot arm that moves the single hand; A control for driving the driving unit, the first robot arm, and the second robot arm and a The control unit When one of the substrates is to be removed from the storage unit, the second robot arm is driven to remove the one of the substrates from the storage unit; 2. The transport robot according to claim 1, wherein, when a plurality of the substrates are to be removed from the storage section, the drive section is driven to change the pitch between the plurality of mounting sections, and the first robot arm and the second robot arm are driven simultaneously to remove the plurality of the substrates from the storage section.

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