Transfer robot

Abstract

To provide a transfer robot including a substrate holding device that does not cause a positional deviation between a mounting part and a gripping part that grips a substrate mounted on the mounting part.SOLUTION: A first substrate holding device 2 includes: hands 3 each including a hand fork 31 on which a substrate is placed; a gripping mechanism 5 for gripping the substrate; a base member 6 on which the gripping mechanism 5 is mounted; and attachment members 7 for attaching the hands 3 to the base member 6. The gripping mechanism includes gripping parts for gripping the substrate. The hand includes: a connection member 32 to which the hand forks are fixed and which includes holding parts of the grip parts; and coupling mechanism 33 that couples the connection member 32 with the attachment members 7. The coupling mechanism 33 includes: a main body part that overlaps the connection member 32 in a Z-axis direction and is fixed to the attachment member 7; fixing screws that fix the connection member 32 to the main body portion; and a plurality of adjustment screws and a plurality of screw holes for adjusting an inclination of the hand fork with respect to the main body part.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a transport robot. [Background technology]

[0002] Patent Document 1 describes a transfer robot equipped with a substrate loading mechanism for unloading substrates from a storage unit in which multiple substrates are stacked at a predetermined pitch. The substrate loading mechanism in this document includes multiple hands with substrate loading sections arranged to be stacked vertically at a predetermined pitch, a pitch change mechanism for changing the pitch between the loading sections, a gripping mechanism for gripping the substrates loaded on the hands, and a base member attached to a first arm. The hands include hand forks as loading sections and a fixing member to which the hand forks are fixed. The hand forks are fixed to the fixing member with screws. The fixing member is attached to the base member. The gripping mechanism includes multiple gripping sections for gripping the substrates, multiple biasing members for biasing the gripping sections in the direction of gripping the substrates, and a moving member that abuts against the gripping sections and moves the multiple gripping sections in a direction away from the substrates. The gripping part includes two gripping rollers that can contact the substrate, a roller support part that rotatably supports the gripping rollers, and two shaft members that extend from the roller support part toward the base end side of the gripping part. The shaft members are inserted into through holes provided in a connecting member that is fixed to the fixing member. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-179420 Summary of the Invention [Problem to be solved by the invention]

[0004] In a hand such as that described in Patent Document 1, a shim is disposed between the fixed member and the hand fork to adjust the level of the hand fork. By adjusting the thickness of this shim, the inclination of the hand fork is adjusted and the hand fork is set horizontally. Here, since the shaft member is attached to the fixed member via a connecting member, when the inclination of the hand fork relative to the fixed member is adjusted, the position of the gripping roller shifts relative to the hand fork. If the position of the gripping roller shifts relative to the hand fork, the gripping roller will not abut against the substrate, and the gripping mechanism may not be able to grip the substrate mounted on the hand fork.

[0005] In view of the above problems, an object of the present invention is to provide a transport robot equipped with a substrate holding device that prevents misalignment between the mounting part on which a substrate is placed and the gripping part that grips the substrate placed on the mounting part, even when the horizontality of the mounting part is checked. [Means for solving the problem]

[0006] In order to achieve the above object, a transport robot of the present invention comprises a substrate holding device including a hand having a placement portion on which a substrate is placed, a gripping mechanism for gripping the substrate placed on the hand, a base member on which the hand and the gripping mechanism are mounted, and an attachment member for attaching the hand to the base member, wherein the gripping mechanism comprises a gripping portion for contacting the substrate placed on the hand to grip the substrate, a biasing member for biasing the gripping portion in a gripping direction in which the substrate is gripped, a moving member for contacting the gripping portion to move the gripping portion in a retraction direction in which the gripping portion is retracted from the substrate, and a drive unit connected to the moving member for driving the moving member in the gripping direction and the retraction direction, and the hand comprises the placement portion, a connecting member to which the placement portion is fixed and which has a holding portion for holding the gripping portion, and a coupling mechanism for coupling the connecting member to the attachment member, and the coupling mechanism comprises a coupling member The mounting member is characterized by comprising a main body portion that overlaps the mounting member in the vertical direction and is fixed to the mounting member, a fixing portion for fixing the connecting member to the main body portion, and an inclination adjustment portion that adjusts the inclination of the mounting portion relative to the main body portion via the connecting member. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view of a transfer robot 100. As shown in FIG. [Figure 2] FIG. 2 is a perspective view of the first substrate mounting mechanism as seen from the tip side. [Figure 3] FIG. 3 is a perspective view of the first substrate mounting mechanism as seen from the base end side. [Figure 4] FIG. 4 is a plan view of the first substrate mounting mechanism as seen from above. [Figure 5] FIG. 5 is a perspective view of the hand 3 as seen from the tip side. [Figure 6] FIG. 6 is an exploded perspective view of the first hand. [Figure 7] FIG. 7 is a perspective view of the first hand, the first gripping unit, and the guide mechanism. [Figure 8] FIG. 8 is a perspective view of the second hand, the second gripping unit, and the guide mechanism. [Figure 9] FIG. 9 is a perspective view of the third hand, the third gripping unit, and the guide mechanism. [Figure 10] FIG. 10 is a perspective view of the fourth hand, the fourth gripping unit, and the guide mechanism. [Figure 11] FIG. 11 is a diagram illustrating the adjustment unit. [Figure 12] FIG. 12 is a perspective view of the first substrate mounting mechanism from the tip side with the lever member removed. [Figure 13] FIG. 13 is a perspective view of the first substrate mounting mechanism from the base end side with the lever member removed. [Figure 14] FIG. 14 is a perspective view of the first substrate mounting mechanism seen from the base end side in a state in which the pitch between the hand forks is widened by driving the variable mechanism. [Figure 15] FIG. 15 is a perspective view of the gripping mechanism. [Figure 16] FIG. 16 is a view seen from the line AA in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0009] (Transport robot) FIG. 1 is a perspective view of a transfer robot 100. The transfer robot 100 of this embodiment is incorporated into a manufacturing line for semiconductor wafers or the like for use. For example, the transfer robot 100 simultaneously unloads multiple substrates W from a storage cassette (storage section) in which multiple substrates W are stored stacked at a predetermined pitch, and loads the multiple substrates W into a processing cassette (storage section) in a heating furnace in which the substrates W are stored stacked at a predetermined pitch. The transfer robot 100 also simultaneously unloads multiple substrates W from a processing cassette and loads the substrates W into the storage cassette. In this embodiment, the pitch of the substrates W stored in the storage cassette is different from the pitch of the substrates W stored in the processing cassette.

[0010] As shown in Figure 1, the transport robot 100 includes a first substrate holding device 2 on which multiple substrates W are placed, a first robot arm 10 that moves the first substrate holding device 2, a second substrate holding device 17 on which one substrate W is placed, a second robot arm 12 that moves the second substrate holding device 17, a rotation mechanism 14 that rotatably supports the base ends of the first robot arm 10 and the second robot arm 12, a lifting mechanism 13 that moves the rotation mechanism 14 in the vertical direction, and a control unit 9.

[0011] The first substrate holding device 2 includes a plurality of hands 3 each having hand forks arranged to overlap at a predetermined pitch in the vertical direction, and a variable mechanism for changing the pitch between the plurality of hand fork sections. The second substrate holding device 17 includes a single hand 16 arranged to overlap the first hand 3A, which is arranged at the top of the plurality of hands 3, in the Z1 direction, and having a hand fork 161 on which the substrate W is placed. The hand fork 16 The second substrate holding device 17 includes a gripping mechanism 171 for gripping the substrate W placed on the hand fork 161. ... gripping mechanism 171 is a part of the hand fork 161 that corresponds to the "second mounting section" of the present invention.

[0012] The first robot arm 10 has two joints and is configured to extend and retract in the horizontal direction as a whole. This allows the first robot arm 10 to move the first substrate holding device 2 along the horizontal direction. The second robot arm 12 has two joints and is configured to extend and retract in the horizontal direction as a whole. This allows the second robot arm 12 to move the second substrate holding device 17 along the horizontal direction.

[0013] The turning mechanism 14 includes a first support part 141 that supports the first robot arm 10 and the second robot arm 12, and a second support part 142 that supports the first support part 141. A drive part 143 for rotating the first support part 141 is housed inside the second support part 142. When the drive part 143 is driven, the first support part 141 rotates relative to the second support part 142.

[0014] The lifting mechanism 13 includes a base portion 131 to which the second support portion 142 is fixed, a support frame 132 that supports the base portion 131 so that it can be raised and lowered, and a drive portion 133 that moves the base portion 131 up and down relative to the support frame 132. The drive portion 133 includes a motor that serves as a drive source, and a power transmission portion that transmits the power of the motor to the base portion 131.

[0015] The control unit 9 controls the first substrate holding device 2, the first robot arm 10, the second substrate holding device 17, the second robot arm 12, the turning mechanism 14, and the lifting mechanism 13 based on commands from a higher-level device.

[0016] (1st board holding device) Fig. 2 is a perspective view of the first substrate mounting mechanism as seen from the tip side, Fig. 3 is a perspective view of the first substrate mounting mechanism as seen from the base end side, and Fig. 4 is a plan view of the first substrate mounting mechanism as seen from above.

[0017] In the following description, as shown in Figure 2 etc., three mutually perpendicular directions are referred to as the X-axis direction, Y-axis direction, and Z-axis direction. The up-down direction is the Z-axis direction, with the upper side being the Z1 direction and the lower side being the Z2 direction. In the X-axis direction, the X1 direction (first direction) is the tip side of the hand 3 inserted into the cassette, and the X2 direction (second direction) is the base side opposite the tip side of the hand 3. The plane formed by the X and Y directions is referred to as the XY plane, the plane formed by the Y and Z directions is referred to as the YZ plane, and the plane formed by the Z and X directions is referred to as the ZX plane.

[0018] As shown in Figures 2 and 3, the first substrate holding device 2 comprises a plurality of hands 3 arranged to overlap at a predetermined pitch in the Z-axis direction and equipped with hand forks 31 on which a substrate W is placed, a variable mechanism 4 for changing the pitch between the plurality of hand forks 31, a gripping mechanism 5 for gripping the substrate W placed on the hand 3, a base member 6 to which the plurality of hands 3, variable mechanism 4 and gripping mechanism 5 are attached, an attachment member 7 for attaching the hand 3 to the base member 6, and a detection mechanism 15 for detecting that the gripping mechanism 5 is gripping the substrate W.

[0019] The base member 6 is attached to the first robot arm 10. The base member 6 comprises a main body 61, a first support member 62, a second support member 63, and a third support member 64. The main body 61 is made of a flat plate-shaped member. The first support member 62, the second support member 63, and the third support member 64 are fixed to the upper surface of the main body 61. The first support member 62 is positioned in the Y1 direction of the hand 3 and supports the hand 3 via the attachment member 7. The second support member 63 is positioned in the Y2 direction of the hand 3 and supports the hand 3 via the attachment member 7. Third support member The support member 64 is located in the Y2 direction of the main body 61 and supports the drive unit 42 of the variable mechanism 4 together with the second support member 63.

[0020] The hand 3 comprises, from top to bottom, a first hand 3A, a second hand 3B, a third hand 3C, and a fourth hand 3D. In this embodiment, the hand forks 31A of the first hand 3A, the hand forks 31B of the second hand 3B, the hand forks 31C of the third hand 3C, and the hand forks 31D of the fourth hand 3D are arranged at approximately the same pitch in the Z-axis direction.

[0021] In this embodiment, the mounting member 7 is a guide mechanism 8. A guide mechanism 8 is provided for each hand 3 and holds each hand 3 movably in the Z-axis direction. As shown in FIGS. 2 to 4, the guide mechanism 8 includes a rail portion 81 extending in the Z-axis direction, a slider 82 movable in the Z-axis direction relative to the rail portion 81, and a hand fixing portion 83 fixed to the slider 82. The main body 36 is fixed to the hand fixing portion 83 with a screw. A guide mechanism 8A to which the first hand 3A is attached and a guide mechanism 8B to which the second hand 3B is attached are fixed to the second support member 63. The guide mechanism 8A is located in the X1 direction of the guide mechanism 8B. A guide mechanism 8C to which the third hand 3C is attached and a guide mechanism 8D to which the fourth hand 3D is attached are fixed to the first support member 62. The guide mechanism 8C is located in the X1 direction of the guide mechanism 8D.

[0022] (hand) FIG. 5 is a perspective view of the hand 3 as seen from the tip side. FIG. 6 is an exploded perspective view of the first hand. FIG. 7 is a perspective view of the first hand, first gripping unit, and guide mechanism. FIG. 8 is a perspective view of the second hand, second gripping unit, and guide mechanism. FIG. 9 is a perspective view of the third hand, third gripping unit, and guide mechanism. FIG. 10 is a perspective view of the fourth hand, fourth gripping unit, and guide mechanism. FIG. 11 is a diagram illustrating the adjustment unit.

[0023] As shown in FIG. 5, each hand 3 has the same basic configuration. Therefore, as an example of the basic configuration of each hand 3, a first hand 3A shown in FIG. 6 will be described. As shown in FIG. 6, the first hand 3A includes a connection member 32A to which a hand fork 31A is fixed, and a coupling mechanism 33A that couples the connection member 32A to the mounting member 7. A base 311 of the hand fork 31A is fixed to the connection member 32A with a screw 312. The connection member 32A is a flat plate-shaped member. The connection member 32A includes a first connection portion 321A to which the hand fork 31A is fixed, and a second connection portion 322A to which the coupling mechanism 33A is fixed. The connection member 32A includes a holder 323 that holds the gripping portion 51 of the gripping mechanism 5. In this embodiment, the holder 323 is a hole 324 that penetrates the first connection portion 321A in the X-axis direction.

[0024] The linking mechanism 33A includes a main body 36A that overlaps with the second connection portion 322A of the connection member 32A in the Z-axis direction and is fixed to the mounting member 7, a fixing screw 37 as a fixing portion for fixing the connection member 32A to the main body 36A, and an adjustment screw 38 and a screw hole 320 as an inclination adjustment portion for adjusting the inclination of the connection member 32A relative to the main body 36A. The main body 36A is a flat plate-shaped member.

[0025] As shown in FIGS. 6 and 7, in the first hand 3A, the second connection portion 322A is located in the X2 direction and the Y2 direction of the first hand 3A. The main body 36A overlaps the second connection portion 322A from the Z1 direction. As shown in FIG. 7, the Y2-direction end of the main body 36A is fixed to the hand fixing portion 83 by a screw. Eight adjustment screws 38 are provided. As shown in FIG. 11, the adjustment screws 38 are screwed into threaded holes 320 provided in the main body 36A. The threaded holes 320 penetrate the main body 36A. When the adjustment screws 38 are screwed in, the tips of the adjustment screws 38 protrude from the threaded holes 320 toward the second connection portion 322A and come into contact with the second connection portion 322A, adjusting the gap between the main body 36A and the second connection portion 322A. Therefore, each of the threaded holes 320 When the amount of each adjustment screw 38 is adjusted relative to the second connecting portion 322A, the tip of the adjustment screw 38 comes into contact with the second connecting portion 322A, thereby adjusting the inclination of the connecting member 32A relative to the main body 36A. This adjusts the level of the hand fork 31A. After the amount of each adjustment screw 38 is adjusted, the main body 36A and the connecting member 32A are fixed together with the fixing screw 37.

[0026] As shown in FIG. 8, in the second hand 3B, the second connection portion 322B is positioned in the X2 and Y2 directions of the second hand 3B. The main body portion 36B overlaps the second connection portion 322B in the Z2 direction. As shown in FIG. 5, the linking mechanism 33B of the second hand 3B overlaps the linking mechanism 33A of the first hand 3A in the Z axis direction. As shown in FIG. 8, the Y2-direction end of the main body portion 36B is fixed to the hand fixing portion 83 with a screw. Eight adjustment screws 38 are provided. The adjustment screws 38 are screwed into threaded holes 320 provided in the second connection portion 322B. The threaded holes 320 penetrate the second connection portion 322B. When the adjustment screws 38 are screwed in, the tips of the adjustment screws 38 protrude from the threaded holes 320 toward the main body portion 36B and come into contact with the main body portion 36B, adjusting the gap between the main body portion 36B and the second connection portion 322B. Therefore, when the amount of threading of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the main body 36B, thereby adjusting the inclination of the connecting member 32B relative to the main body 36B. This adjusts the levelness of the hand fork 31B. After the amount of threading of each adjustment screw 38 has been adjusted, the main body 36B and the connecting member 32B are fixed together with the fixing screw 37.

[0027] 4 and 7, the connecting member 32A and the main body 36A of the first hand 3A are provided with openings 330A through which the heads 371 of the adjusting screws 38 and the heads 381 of the fixing screws 37 of the second hand 3B are exposed. As a result, even if the first hand 3A and the second hand 3B overlap in the Z axis direction, the amount of threading of the adjusting screws 38 can be adjusted and the main body 36B and the connecting member 32B can be fixed by the fixing screws 37 from the Z1 direction of the first hand 3A.

[0028] As shown in FIGS. 4 and 5, the connecting mechanism 33C of the third hand 3C is visible from the Z1 direction of the first hand 3A. As shown in FIG. 9, in the third hand 3C, the second connecting portion 322C is located in the X2 and Y1 directions of the third hand 3C. The main body 36C overlaps the second connecting portion 322C from the Z1 direction. The Y2 end of the main body 36C is fixed to the hand fixing portion 83 with a screw. Eight adjusting screws 38 are provided. The adjusting screws 38 are screwed into threaded holes 320 provided in the main body 36C. The threaded holes 320 penetrate the main body 36C. When the adjusting screws 38 are screwed in, the tips of the adjusting screws 38 protrude from the threaded holes 320 toward the second connecting portion 322C and come into contact with the second connecting portion 322C, adjusting the gap between the main body 36C and the second connecting portion 322C. Therefore, when the screwing depth of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the second connection portion 322C, thereby adjusting the inclination of the connection member 32C with respect to the main body 36C. This adjusts the levelness of the hand fork 31C. After the screwing depth of each adjustment screw 38C is adjusted, the main body 36C and the connection member 32C are fixed with the fixing screw 37.

[0029] As shown in FIG. 10, in the fourth hand 3D, the second connection portion 322D is located in the X2 direction and the Y1 direction of the fourth hand 3D. The main body portion 36D overlaps the second connection portion 322D from the Z2 direction. As shown in FIG. 5, the linking mechanism 33D of the fourth hand 3D overlaps with the linking mechanism 33C of the third hand 3C in the Z axis direction. As shown in FIG. 10, the Y2 direction end of the main body portion 36D is fixed to the hand fixing portion 83 by a screw. Eight adjustment screws 38 are provided. The adjustment screws 38 are screwed into threaded holes 320 provided in the second connection portion 322D. The threaded holes 320 pass through the second connection portion 322D. When the adjustment screws 38 are screwed in, the tips of the adjustment screws 38 protrude from the threaded holes 320 toward the main body portion 36D and are fixed to the main body portion 36D. The adjustment screws 38 contact the main body 36D, adjusting the gap between the main body 36D and the second connecting portion 322D. Therefore, when the amount of threading of each adjustment screw 38 into each screw hole 320 is adjusted, the tip of the adjustment screw 38 contacts the main body 36D, adjusting the inclination of the connecting member 32D relative to the main body 36D. This adjusts the levelness of the hand fork 31D. After the amount of threading of each adjustment screw 38 has been adjusted, the main body 36D and the connecting member 32D are fixed together with the fixing screws 37.

[0030] 4 and 9, the connecting member 32C and the main body 36C of the third hand 3C are provided with openings 330C through which the heads 371 of the adjusting screws 38 and the heads 381 of the fixing screws 37 of the fourth hand 3D are exposed. As a result, even if the third hand 3C and the fourth hand 3D overlap in the Z axis direction, the amount of threading of the adjusting screws 38 can be adjusted and the main body 36D and the connecting member 32D can be fixed by the fixing screws 37 from the Z1 direction of the third hand 3C.

[0031] (variable mechanism) Fig. 12 is a perspective view of the first substrate mounting mechanism when viewed from the tip side with the lever member removed. Fig. 13 is a perspective view of the first substrate mounting mechanism when viewed from the base side with the lever member removed. Fig. 14 is a perspective view of the first substrate mounting mechanism when viewed from the base side with the variable mechanism driven to widen the pitch between the hand forks.

[0032] 12 and 13, the variable mechanism 4 includes a drive unit 42 that rotates a rotary shaft unit 41 about an axis extending in the X-axis direction, a lever member 43 whose first end 433 is connected to the rotary shaft unit 41 and that rotates about the axis, and a plurality of connecting units 44 that are arranged at positions spaced apart at equal intervals a predetermined distance from the rotary shaft unit 41 along the longitudinal direction of the lever member 43 and that connect each of the plurality of hands 3 to the lever member 43. In this embodiment, four connecting units 44 are provided.

[0033] The driving unit 42 is disposed outside the multiple hands 3 in the Y-axis direction and at a position overlapping with the multiple hands 3 in the Y-axis direction. The driving unit 42 is fixed to the second support member 63 and the third support member 64. The driving unit 42 includes a motor 421 serving as a driving source and a transmission mechanism 422 that transmits the driving force of the motor 421. The lever member 43 is disposed in the X2 direction of the multiple hands 3 and extends in the Y-axis direction.

[0034] The connecting portion 44 includes a protrusion 431 protruding from the lever member 43 in the X1 direction, and a connecting base portion 441 fixed to the hand 3 and having a groove 442 extending in the Y-axis direction. The protrusion 431 is fitted into the groove 442 and includes a roller 432 rotatably supported relative to the protrusion 431. The connecting base portion 441 is fixed to a connecting base fixing portion 39 provided on the main body portion 36 of each hand 3. More specifically, the four connecting base portions 441 are fixed, in order in the Y1 direction, to the connecting base fixing portions 39 of the main body portion 36A of the first hand 3A, the main body portion 36B of the second hand 3B, the main body portion 36C of the third hand 3C, and the main body portion 36D of the fourth hand 3D. The connecting base fixing part 39 is provided with a groove 391 extending in the Z-axis direction, and the connecting base part 441 is housed in the groove 391 and is movable in the Z-axis direction along the groove 391. The connecting base part 441 is provided with an adjustment part 443 for adjustably fixing the position of the connecting base part 441 in the Z-axis direction relative to the hand 3. The adjustment part 443 is an elongated hole 444 that is long in the Z-axis direction. The connecting base part 441 is fixed to the connecting base fixing part 39 of the hand 3 with a screw 445 inserted into the elongated hole 444.

[0035] When the lever member 43 rotates around the axis, the hands 3 each move in the Z-axis direction, changing the pitch between the hand forks 31. More specifically, as shown in FIG. 14, when the lever member 43 rotates around the axis in the Z2 direction, the hands 3 move in the Z2 direction. , each move in the Z-axis direction, widening the pitch between the multiple hand forks 31. As shown in FIG. 3, when the lever member 43 rotates in the Z1 direction around its axis, each of the multiple hands 3 move in the Z-axis direction, narrowing the pitch between the multiple hand forks 31. At this time, the rollers 432 of the protrusions 431 move in the Y-axis direction along the grooves 442 when the lever member 43 rotates around its axis. This makes it possible to move each hand 3 in the Z-axis direction when the lever member 43 rotates.

[0036] (gripping mechanism) 15 is a perspective view of the gripping mechanism. As shown in FIGS. 3 and 15, the gripping mechanism 5 includes gripping portions 51 for contacting and gripping a substrate W placed on the hand 3, biasing members 52 for biasing the gripping portions 51 in a gripping direction (X1 direction) for gripping the substrate W, a moving member 53 for contacting the gripping portions 51 and moving the gripping portions 51 in a retraction direction (X2 direction) for retracting from the substrate W, and a driving unit 54 connected to the moving member 53 for driving the moving member 53 in the gripping direction and the retraction direction. As shown in FIGS. 7 to 10, a plurality of gripping portions 51 are provided corresponding to each hand 3. A plurality of biasing members 52 are provided corresponding to each of the plurality of gripping portions 51. The multiple gripping portions 51 include a first gripping portion 51A for gripping a substrate W placed on the first hand 3A, a second gripping portion 51B for gripping a substrate W placed on the second hand 3B, a third gripping portion 51C for gripping a substrate W placed on the third hand 3C, and a fourth gripping portion 51D for gripping a substrate W placed on the fourth hand 3D.

[0037] As shown in FIGS. 7 to 10 and 15, the gripping unit 51 includes a gripping roller 55 disposed at an end on the gripping direction side and capable of contacting the substrate W, a shaft member 56 on which the gripping roller 55 is rotatably supported and which extends in the X2 direction (retraction direction), and a shaft mounting portion 58 fixed to the holding unit 323. A hook portion 561 protruding in the Y-axis direction is provided at the X2-direction end of the shaft member 56. The shaft mounting portion 58 holds the shaft member 56 movably in the X-axis direction. The shaft mounting portion 58 includes a main body portion 581 to which the shaft member 56 is fixed, and two connecting shafts 582 extending in the X-axis direction. The two connecting shafts 582 are inserted into respective hole portions 324 and fixed to the connecting member 32. Specifically, the X1-direction ends of the two connecting shafts 582 inserted into the hole portions 324 are fixed to the connecting member 32 by screws 585 via plate members 584. A through-hole penetrating the main body 581 in the X-axis direction is provided, and the connecting shaft 582 is inserted into this through-hole. As a result, the main body 581 is supported by the connecting shaft 582 in a state where it can move in the X-axis direction. The biasing member 52 is a compression coil spring. The biasing member 52 is inserted into the connecting shaft 582, and the X1-direction end of the biasing member 52 abuts against the main body 581, and the X2-direction end of the biasing member 52 abuts against a retaining portion 583 provided at the X2-direction end of the connecting shaft 582. As a result, the biasing member 52 biases the grip portion 51 in the X1 direction.

[0038] 15, when viewed from the Z-axis direction, gripping roller 55A of first gripping portion 51A and gripping roller 55B of second gripping portion 51B are misaligned in the Y-axis direction. Gripping roller 55B of second gripping portion 51B and gripping roller 55C of third gripping portion 51C are misaligned in the Y-axis direction. Gripping roller 55C of third gripping portion 51C and gripping roller 55D of fourth gripping portion 51D are misaligned in the Y-axis direction.

[0039] 3 and 15, the driving unit 54 is an air cylinder 540. The air cylinder 540 is fixed to the main body 61. A rod 541 of the air cylinder 540 protrudes in the X2 direction. When the air cylinder 540 is driven, the rod 541 moves back and forth in the X-axis direction.

[0040] As shown in FIGS. 3 and 15, the moving member 53 is a rod-fixed member that is fixed to a rod 541. The hand 3 includes a rod fixing portion 531, a flat movable portion 532 fixed to the rod fixing portion 531, and a retraction lever 533 fixed to the movable portion 532 and extending in the Z1 direction. A guide mechanism 534 is disposed in the Z2 direction of the movable portion 532, and the movable portion 532 is supported by the guide mechanism 534 so as to be movable in the X-axis direction. As shown in FIG. 15 , the retraction lever 533 is located in the X1 direction of each hook portion 561 and overlaps with each hook portion 561 in the X-axis direction. Therefore, when the air cylinder 540 is driven to move the retraction lever 533 in the X2 direction, the retraction lever 533 abuts against each hook portion 561 and moves each gripping portion 51 in the X2 direction. As a result, each gripping portion 51 moves away from the substrate W placed on the hand 3, and the substrate W is released from its fixation. Furthermore, when the air cylinder 540 is driven to move the retraction lever 533 in the X1 direction, the biasing member 52 biases each of the gripping portions 51 to move each of the gripping portions 51 in the X1 direction. As a result, each of the gripping portions 51 comes into contact with the substrate W placed on the hand 3 and grips the substrate W.

[0041] (detection mechanism) 16 is a view seen from the direction AA in FIG. 2. As shown in FIG. 16, the detection mechanism 15 includes five sensors 151 as detectors for detecting the positions of the five grippers 51 in the X-axis direction. In this embodiment, the sensors 151 are optical sensors in which a light-emitting element and a light-receiving element are arranged opposite each other. The five sensors 151 are fixed to the main body 36 of each connecting mechanism 33. That is, a sensor 151 is held by each hand 3. The detection mechanism 15 also includes a detection plate 152 that passes between the light-emitting element and the light-receiving element of each sensor 151. The detection plate 152 is fixed to each gripper 51. In this embodiment, when the gripper 51 grips the substrate W, the detection plate 152 is disposed between the light-emitting element and the light-receiving element of the sensor 151. Therefore, the light-receiving element of the sensor 151 receives light from the light-emitting element, thereby detecting that the substrate W is being gripped by the gripper 51.

[0042] (Transport robot operation) Depending on the situation, the transfer robot 100 of this embodiment can transfer one substrate W or five substrates W. When the transfer robot 100 transfers one substrate W from a storage cassette to a processing cassette, the control unit 9 drives the second robot arm 12 to unload the one substrate W from the storage cassette and transfer it to the processing cassette.

[0043] When the transport robot 100 unloads five substrates W from a storage cassette to a processing cassette, the control unit 9 drives the drive unit 42 to change the pitch between the hand forks 31 so that the pitch between the substrates W stored in the storage cassette and the pitch between the hand forks 31 are the same, and simultaneously drives the first robot arm 10 and the second robot arm 12 to unload the five substrates W from the storage cassette. Thereafter, the control unit 9 drives the drive unit 42 to change the pitch between the hand forks 31 so that the pitch between the substrates W stored in the processing cassette and the pitch between the hand forks 31 are the same, and simultaneously drives the first robot arm 10 and the second robot arm 12 to transport the five substrates W to the processing cassette. At this time, when the pitch between the hand forks 31 is changed by the variable mechanism 4, the hand fork 31 of the first hand 3A moves in the Z-axis direction, and the pitch between the hand fork 31 of the first hand 3A and the hand fork 161 of the single hand 16 is also changed by the same interval. As a result, the transfer robot 100 can transfer five substrates W by driving the first robot arm 10 and the second robot arm 12 simultaneously.

[0044] (Action and effect) The transfer robot 100 includes a first substrate holding device 2. The first substrate holding device 2 includes a hand 3 having a hand fork 31 on which a substrate W is placed, a gripping mechanism 5 for gripping the substrate W placed on the hand 3, a base member 6 on which the hand 3 and the gripping mechanism 5 are mounted, and a hand The hand 3 includes an attachment member 7 for attaching the hand 3 to the base member 6. The gripping mechanism 5 includes a gripping portion 51 for contacting and gripping the substrate W placed on the hand 3, a biasing member 52 for biasing the gripping portion 51 in the X1 direction (gripping direction) to grip the substrate W, a moving member 53 for contacting the gripping portion 51 and moving the gripping portion in the X2 direction (retraction direction) to retract from the substrate W, and a driving unit 54 connected to the moving member 53 for driving the moving member 53 in the X1 direction and the X2 direction. The hand 3 includes a hand fork 31, a connecting member 32 having a holding portion 323 to which the hand fork 31 is fixed and which holds the gripping portion 51, and a linking mechanism 33 for linking the connecting member 32 to the attachment member 7. The linking mechanism 33 includes a main body 36 that overlaps with the connecting member 32 in the Z-axis direction and is fixed to the mounting member 7, a fixing screw 37 as a fixing part for fixing the connecting member 32 to the main body 36, and an inclination adjustment part that adjusts the inclination of the hand fork 31 relative to the main body 36 via the connecting member 32. The adjustment part is made up of a plurality of adjustment screws 38 and a plurality of threaded holes 320 into which the adjustment screws 38 are screwed.

[0045] According to the transfer robot 100 of this embodiment, the horizontality of the hand fork 31 is adjusted relative to the main body 36 via the connecting member 32 that holds the gripper 51. This makes it possible to prevent misalignment between the hand fork 31 and the gripper 51 even when the horizontality of the hand fork 31 is adjusted.

[0046] The screw hole 320 is provided on one side of the main body 36 and the connecting member 32. When the amount of threading of the adjustment screw 38 into the screw hole 320 is adjusted, the tip of the adjustment screw 38 comes into contact with the other side of the main body 36 and the connecting member 32, thereby adjusting the tilt of the hand fork 31. This makes it easy to adjust the tilt.

[0047] A plurality of hands 3 are provided so as to overlap at a predetermined pitch in the Z-axis direction. A plurality of gripping units 51 are provided corresponding to the plurality of hands 3, respectively. A plurality of biasing members 52 are provided corresponding to the plurality of gripping units 51, respectively. The moving member 53 moves the plurality of gripping units 51. As a result, even if the first substrate holding device 2 is equipped with a variable mechanism 4 that changes the pitch between the hand forks 31, the variable mechanism 4 can change the pitch between the hand forks 31 because the moving member 53 is separated from each gripping unit 51. In addition, the driving unit 54 can simultaneously retract the plurality of gripping units 51 by moving one moving member 53.

[0048] The multiple hands 3 include a first hand 3A that is positioned furthest in the Z1 direction and a second hand 3B that is positioned further in the Z2 direction from the first hand 3A. The linking mechanism 33A of the first hand 3A and the linking mechanism 33B of the second hand 3B overlap in the Z axis direction. The connecting member 32A and the main body 36A of the first hand 3A are provided with an opening 330A through which the head 381 of the adjustment screw 38 of the second hand 3B is exposed. This allows the adjustment screw 38 to be adjusted through the opening 330A to adjust the level of the hand fork 31B of the second hand 3B, even when the first hand 3A and the second hand 3B are overlapped in the Z axis direction.

[0049] The multiple hands 3 include a third hand 3C arranged in the Z2 direction of the second hand 3B and a fourth hand 3D arranged in the Z2 direction of the third hand 3C. The connecting mechanism 33C of the third hand 3C and the connecting mechanism 33D of the fourth hand 3D overlap in the Z axis direction. The connecting mechanism 33C of the third hand 3C and the connecting mechanism 33D of the fourth hand 3D do not overlap with the connecting mechanism 33A of the first hand 3A and the connecting mechanism 33B of the second hand 3B in the Z axis direction. The connecting mechanism 33C of the third hand 3C is visible from the Z1 direction of the first hand 3A. The connecting mechanism 33C of the third hand 3C and the main body 36C of the third hand 3C have an opening 330C through which the head 381 of the adjusting screw 38 of the fourth hand 4D is exposed. As a result, the connecting mechanism 33C of the third hand 3C is visible from the Z1 direction of the first hand 3A, so even when multiple hands 3 are stacked in the Z-axis direction, the water of the hand fork 31C of the third hand 3C can be seen. Furthermore, because the connecting mechanism 33C of the third hand 3C and the main body 36C of the third hand 3C are provided with an opening 330C, even when the third hand 3C and the fourth hand 3D are stacked in the Z-axis direction, the adjustment screw 38 can be adjusted through the opening 330C to adjust the level of the hand fork 31D of the fourth hand 3D.

[0050] The multiple gripping portions 51 include a first gripping portion 51A for gripping a substrate W placed on the first hand 3A, a second gripping portion 51B for gripping a substrate W placed on the second hand 3B, a third gripping portion 51C for gripping a substrate W placed on the third hand 3C, and a fourth gripping portion 51D for gripping a substrate W placed on the fourth hand 3D. When viewed from the Z axis direction, gripping roller 55A of first gripping unit 51A and gripping roller 55B of second gripping unit 51B are misaligned in the Y axis direction. Gripping roller 55B of second gripping unit 51B and gripping roller 55C of third gripping unit 51C are misaligned in the Y axis direction. Gripping roller 55C of third gripping unit 51C and gripping roller 55D of fourth gripping unit 51D are misaligned in the Y axis direction. This makes it possible to reduce the distance between gripping units 51 in the Z axis direction even when gripping roller 55 is thick in the Z axis direction, thereby enabling first substrate holding device 2 to be made smaller in size in the Z axis direction.

[0051] (Other variations) In the above embodiment, the adjustment portion is composed of a plurality of adjustment screws 38 and a plurality of through-holes 320 into which the adjustment screws 38 are screwed, but the adjustment portion may also be a shim for adjusting the gap sandwiched between the main body portion 36 and the connecting member 32.

[0052] The present technology can be configured as follows.

[0053] (1) a substrate holding device including a hand having a placement portion on which a substrate is placed, a gripping mechanism for gripping the substrate placed on the hand, a base member on which the hand and the gripping mechanism are mounted, and an attachment member for attaching the hand to the base member; the gripping mechanism includes a gripping portion for contacting the substrate placed on the hand to grip the substrate, a biasing member for biasing the gripping portion in a gripping direction in which the substrate is gripped, a moving member for contacting the gripping portion to move the gripping portion in a retraction direction in which the gripping portion is retracted from the substrate, and a driving portion connected to the moving member for driving the moving member in the gripping direction and the retraction direction, the hand includes the placement portion, a connecting member having a holding portion to which the placement portion is fixed and which holds the gripping portion, and a connecting mechanism which connects the connecting member to the mounting member, The transport robot is characterized in that the connecting mechanism comprises a main body portion that overlaps the connecting member in the vertical direction and is fixed to the mounting member, a fixing portion for fixing the connecting member to the main body portion, and an inclination adjustment portion that adjusts the inclination of the placement portion relative to the main body portion via the connecting member.

[0054] This makes it possible to prevent misalignment between the placing portion and the gripping portion even when the horizontality of the placing portion is adjusted.

[0055] (2) the adjustment unit is composed of a plurality of adjustment screws and a plurality of screw holes through which the adjustment screws are screwed, the screw holes are provided on one side of the main body and the connecting member, When the screwing amount of the adjustment screw into the screw hole is adjusted, the tip of the adjustment screw comes into contact with the other side of the main body and the connecting member, thereby adjusting the tilt of the placement portion. The transport robot according to (1) is characterized in that

[0056] This makes it easy to adjust the tilt.

[0057] (3) The gripping unit includes a gripping roller that is disposed at an end on the gripping direction side and can come into contact with the substrate, and a shaft member that rotatably supports the gripping roller and extends in the retraction direction. a shaft mounting portion fixed to the holding portion, The transport robot according to (2), wherein the shaft mounting portion holds the shaft member movably in the gripping direction and the retracting direction.

[0058] (4) The hands are provided in plurality so as to overlap at a predetermined pitch in the vertical direction, a plurality of the gripping portions are provided corresponding to the plurality of hands, a plurality of the biasing members are provided corresponding to the plurality of gripping portions, The transport robot according to any one of (3), wherein the moving member moves the plurality of gripping parts.

[0059] This allows the drive unit to simultaneously retract the plurality of gripping units by moving one moving member.

[0060] (5) the plurality of hands include a first hand disposed at the top and a second hand disposed below the first hand; the connecting mechanism of the first hand and the connecting mechanism of the second hand are overlapped in the vertical direction, The transport robot described in (4) is characterized in that the connecting member of the first hand and the main body are provided with an opening through which the head of the adjustment screw of the second hand is exposed.

[0061] This allows the adjustment screw to be adjusted through the opening to adjust the horizontality of the placement portion of the second hand even when the first hand and the second hand are stacked vertically.

[0062] (6) the plurality of hands includes a third hand disposed below the second hand and a fourth hand disposed below the third hand, the connecting mechanism of the third hand and the connecting mechanism of the fourth hand are overlapped in the vertical direction, the connecting mechanism of the third hand and the connecting mechanism of the fourth hand do not overlap with the connecting mechanism of the first hand and the connecting mechanism of the second hand in the vertical direction, the connecting mechanism of the third hand is visible from above the first hand, The transport robot described in (5) is characterized in that the connecting member of the third hand and the main body of the third hand are provided with an opening through which the head of the adjustment screw of the fourth hand is exposed.

[0063] As a result, the connecting mechanism of the third hand can be seen from above the first hand, so the level of the placement section of the third hand can be adjusted even when multiple hands are stacked vertically. Also, because openings are provided in the connecting mechanism of the third hand and the main body of the third hand, even when the third hand and the fourth hand are stacked vertically, By adjusting the adjusting screw, the horizontality of the placement part of the fourth hand can be adjusted.

[0064] (7) the plurality of gripping portions include a first gripping portion for gripping the substrate placed on the first hand, a second gripping portion for gripping the substrate placed on the second hand, a third gripping portion for gripping the substrate placed on the third hand, and a fourth gripping portion for gripping the substrate placed on the fourth hand; The transport robot described in (6) is characterized in that, when viewed from the top-bottom direction, in an orthogonal direction perpendicular to the top-bottom direction and the gripping direction, the gripping rollers of the first gripping unit and the gripping rollers of the second gripping unit are misaligned, the gripping rollers of the second gripping unit and the gripping rollers of the third gripping unit are misaligned, and the gripping rollers of the third gripping unit and the gripping rollers of the fourth gripping unit are misaligned.

[0065] This makes it possible to reduce the distance between the gripping parts in the vertical direction even when the gripping rollers are thick in the vertical direction, thereby making it possible to reduce the size of the first substrate holding device in the vertical direction. [Explanation of symbols]

[0066] 100...transport robot, 2...first substrate holding device, 3...hand, 3A...first hand, 3B...second hand, 3C...third hand, 3D...fourth hand, 4...variable mechanism, 5...gripping mechanism, 6...base member, 7...mounting member, 8·8A·8B·8C·8D...guide mechanism, 9...control unit, 10...first robot arm, 12...second robot arm, 13...lifting mechanism, 14...turning mechanism unit, 15...detection mechanism, 16...single hand, 17...second substrate holding device, 31-31D...hand fork, 32-32D...connecting member, 33-33D...coupling mechanism, 36-36D...main body, 37...fixing screw, 38...adjusting screw, 39...coupling base fixing portion, 41...rotating shaft portion, 42...driving portion, 43...lever member, 44...coupling portion, 51...gripping portion, 51A...first gripping portion, 51B...second gripping portion, 51C...third gripping portion, 51D...fourth gripping portion, 55-55D...gripping roller, 56...shaft member, 58...shaft mounting portion, 61...main body, 62...first support member, 63...second support member, 64...third support member, 81...rail portion, 82...slider, 83...hand fixing portion, 131...base portion, 132...support frame, 133...drive portion, 141...support portion, 142...support portion, 143...drive portion, 151...sensor, 152...detection plate, 161...hand fork, 171...gripping mechanism, 311...base portion, 312...screw, 320...screw hole, 321...first connecting portion, 322-322D...second connecting portion, 323...holding portion, 324...hole portion, 330A...opening, 330C...opening, 371...head portion, 381... Head, 391...groove portion, 421...motor, 422...transmission mechanism, 431...projection portion, 432...roller, 433...first end portion, 441...connection base portion, 442...groove portion, 443...adjustment portion, 444...long hole, 445...screw, 531...rod fixing portion, 532...movable portion, 533...retraction lever, 534...guide mechanism, 540...air cylinder, 541...rod, 561...hook portion, 581...main body portion, 582...connection shaft, 583...prevention portion, 584...plate member, 585...screw, W...board

Claims

1. a substrate holding device including a hand having a placement portion on which a substrate is placed, a gripping mechanism for gripping the substrate placed on the hand, a base member on which the hand and the gripping mechanism are mounted, and an attachment member for attaching the hand to the base member; the gripping mechanism includes a gripping portion for contacting the substrate placed on the hand to grip the substrate, a biasing member for biasing the gripping portion in a gripping direction in which the substrate is gripped, a moving member for contacting the gripping portion to move the gripping portion in a retraction direction in which the gripping portion is retracted from the substrate, and a driving portion connected to the moving member for driving the moving member in the gripping direction and the retraction direction, the hand includes the placement portion, a connecting member having a holding portion to which the placement portion is fixed and which holds the gripping portion, and a coupling mechanism that couples the connecting member to the mounting member, The transport robot is characterized in that the connecting mechanism comprises a main body portion that overlaps the connecting member in the vertical direction and is fixed to the mounting member, a fixing portion for fixing the connecting member to the main body portion, and an inclination adjustment portion that adjusts the inclination of the placement portion relative to the main body portion via the connecting member.

2. the adjustment unit is composed of a plurality of adjustment screws and a plurality of screw holes through which the adjustment screws are screwed, the screw holes are provided on one side of the main body and the connecting member, 2. The transport robot according to claim 1, wherein when the amount of threading of the adjustment screw into the screw hole is adjusted, the tip of the adjustment screw comes into contact with the other side of the main body and the connecting member, thereby adjusting the inclination of the placement portion.

3. The gripping unit includes a gripping roller that is disposed at an end on the gripping direction side and can come into contact with the substrate, and a shaft member that rotatably supports the gripping roller and extends in the retraction direction. a shaft mounting portion fixed to the holding portion, 3. The transfer robot according to claim 2, wherein the shaft mounting portion holds the shaft member movably in the gripping direction and the retracting direction.

4. The hands are provided in plurality so as to overlap at a predetermined pitch in the vertical direction, a plurality of the gripping portions are provided corresponding to the plurality of hands, a plurality of the biasing members are provided corresponding to the plurality of gripping portions, The transfer robot according to claim 3 , wherein the moving member moves the plurality of gripping parts.

5. the plurality of hands include a first hand disposed at the top and a second hand disposed below the first hand, the connecting mechanism of the first hand and the connecting mechanism of the second hand are overlapped in the vertical direction, 5. The transfer robot according to claim 4, wherein the connecting member of the first hand and the main body are provided with openings through which heads of the adjusting screws of the second hand are exposed.

6. the plurality of hands include a third hand disposed below the second hand and a fourth hand disposed below the third hand, the connecting mechanism of the third hand and the connecting mechanism of the fourth hand are overlapped in the vertical direction, The connecting mechanism of the third hand and the connecting mechanism of the fourth hand, and the first hand the connecting mechanism of the first hand and the connecting mechanism of the second hand do not overlap in the vertical direction, the connecting mechanism of the third hand is visible from above the first hand, 6. The transport robot according to claim 5, wherein the connecting member of the third hand and the main body of the third hand are provided with an opening through which a head of the adjusting screw of the fourth hand is exposed.

7. the plurality of gripping portions include a first gripping portion for gripping the substrate placed on the first hand, a second gripping portion for gripping the substrate placed on the second hand, a third gripping portion for gripping the substrate placed on the third hand, and a fourth gripping portion for gripping the substrate placed on the fourth hand; 7. The transport robot according to claim 6, wherein, when viewed from the top-bottom direction, in an orthogonal direction perpendicular to the top-bottom direction and the gripping direction, the gripping rollers of the first gripping unit and the second gripping unit are misaligned, the gripping rollers of the second gripping unit and the third gripping unit are misaligned, and the gripping rollers of the third gripping unit and the fourth gripping unit are misaligned.

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