Pcsel magnetometer

Abstract

To provide a magnetometer including a resonant atomic medium, a photonic crystal surface-emitting laser (PCSEL), and a photodetector.SOLUTION: The resonant atomic medium includes color centers or other dopants which form vacancies that emit fluorescence when excited by excitation light having an excitation wavelength. The characteristics of the fluorescence depend on the magnetic field applied to the resonant atomic medium. The PCSEL is configured to generate excitation light having the excitation wavelength of the vacancies and to direct the excitation light toward the resonant atomic medium. A photodetector is configured to receive the fluorescence and to generate a measurement signal indicating the magnetic field applied to the resonant atomic medium and the fluorescence.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE

[0001] Aspects of the present disclosure relate to magnetic measurements, and in particular to optical magnetometers. [Background technology]

[0002]

[0002] Conventional magnetometers are often limited by their size, complexity, and sensitivity. Summary of the Invention

[0003]

[0003] An optical magnetometer using a photonic crystal surface-emitting laser (PCSEL) and a resonant atomic medium to measure magnetic fields is shown in and / or described in connection with at least one of the drawings and more fully described in the claims.

[0004]

[0004] These and other advantages, features, and novel features of the present disclosure, as well as details of illustrative embodiments of the present disclosure, can be more fully understood from the following description and drawings.

[0005]

[0005] The various features and advantages of the present disclosure can be more readily understood by reference to the following detailed description in conjunction with the accompanying drawings, in which like reference numerals refer to like structural elements. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 illustrates a magnetometer with a photonic crystal surface-emitting laser (PCSEL) on a resonant atomic medium substrate in accordance with various aspects of the present disclosure. [Figure 2] FIG. 2 illustrates a magnetometer with an array of PCSELs on a resonant atomic medium substrate in accordance with various aspects of the present disclosure. [Figure 3] FIG. 3 illustrates a magnetometer including a PCSEL with a meta-optic surface on a resonant atomic medium substrate in accordance with various aspects of the present disclosure. [Figure 4]FIG. 4 illustrates a magnetometer including a PCSEL with a grating coupler on a resonant atomic medium substrate in accordance with various aspects of the present disclosure. [Figure 5] FIG. 5 illustrates a magnetometer including a PCSEL with a resonant atomic medium layer in accordance with various aspects of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0007]

[0011] The following discussion provides various examples of optical magnetometers that use photonic crystal surface-emitting lasers (PCSELs) and resonant atomic media to measure magnetic fields. Such examples are not limiting, and the scope of the appended claims should not be limited to the particular examples disclosed. In the following discussion, the terms "example" and "for example" are not intended to be limiting.

[0008]

[0012] The drawings illustrate structures in a general manner, and descriptions and details of well-known structures and techniques may be omitted to avoid unnecessarily obscuring the present disclosure. Furthermore, elements in the depicted drawings may not be drawn to scale. For example, the dimensions of some of the elements in the drawings may be exaggerated relative to other elements to help facilitate understanding of examples described in this disclosure. The same reference numerals in various drawings refer to the same elements.

[0009]

[0013] The term "and / or" means any one or more of the items in the list connected by "and / or." As an example, "x and / or y" means any element of the 3-element set {(x), (y), (x,y)}. As another example, "x, y, and / or z" means any element of the 7-element set {(x), (y), (z), (x,y), (x,z), (y,z), (x,y,z)}.

[0010]

[0014] The terms "comprises," "comprising," "includes," and / or "including" are open-ended terms and specify the presence of stated features but do not exclude the presence or addition of one or more other features.

[0011]

[0015] Terms such as "first," "second," and the like may be used herein to describe various elements and should not be considered limiting. These terms are merely used to distinguish one element from another. Thus, for example, a first element discussed in this disclosure could be termed a second element without departing from the teachings of this disclosure.

[0012]

[0016] Unless otherwise specified, the term "coupled" may be used to describe two elements that are in direct contact with each other, or to describe two elements that are indirectly connected by one or more other elements. For example, if element A is coupled to element B, element A may be in direct contact with element B, or indirectly connected to element B by an intervening element C. Similarly, the terms "over" or "above" may be used to describe two elements that are in direct contact with each other, or to describe two elements that are indirectly connected by one or more other elements.

[0013]

[0017] A feature of the present disclosure is directed to magnetic measurements and optical magnetometers. In various embodiments, the optical magnetometer includes a photonic crystal surface-emitting laser (PCSEL) and diamond or silicon carbide, which has a color center and is used as a resonant atomic medium. The resonant atomic medium can endow the PCSEL with magnetic field detection capabilities. Incorporation of a resonant atomic medium (e.g., diamond, silicon carbide, etc.) can result in a more compact, sensitive, and / or efficient magnetometer compared to conventional techniques.

[0014]

[0018] Referring now to FIG. 1 , an example optical magnetometer 10 is shown. The optical magnetometer 10 can include a resonant atomic medium (RAM) substrate 100, a PCSEL 200, and a fluorescence detector 300. Generally, the PCSEL 200 emits light X having an excitation wavelength. The excitation light X can be directed into the RAM substrate 100, and color centers embedded in the RAM substrate 100 can fluoresce as light F in a manner dependent on or indicative of the magnetic field experienced by the RAM substrate 100. The fluorescence detector 300 can receive the fluorescence F and generate a fluorometric signal indicative of the detected fluorescence and, therefore, the magnetic field experienced by the RAM substrate 100. In this manner, the optical magnetometer 10 can detect and / or measure magnetic fields in its vicinity.

[0015]

[0019] RAM substrate 100 may include diamond or silicon carbide (SiC) filled with color centers, which form vacancies (e.g., nitrogen-vacancies in diamond, silicon-vacancies in SiC) that fluoresce in response to excitation light X having an excitation wavelength. Furthermore, the fluorescence of such vacancies may vary based on a magnetic field applied to RAM substrate 100. Specifically, in the presence of an applied magnetic field, the spins of atoms within the vacancy centers may be deflected, leading to energy shifts observable through changes in absorption or photoluminescence. These energy shifts correspond to changes in fluorescence F and can be monitored by the fluorescence detector 300 of magnetometer 10. Through such detected energy shifts, the characteristics of the magnetic field can be determined.

[0016]

[0020] To provide excitation light X to the RAM substrate 100, the PCSEL 200 can be formed on the top side of the RAM substrate 100. The PCSEL 200 can be configured to emit light X from its bottom surface or bottom side toward the top side of the RAM substrate 100. Furthermore, the PCSEL 200 can be configured to emit light X having an excitation wavelength for a color center of the RAM substrate 100. Thus, the emitted excitation light X can be directed into the RAM substrate 100 and the color centers of the RAM substrate 100.

[0017]

[0021] As shown, the PCSEL 200 can be configured as a stack of layers on the top side of the RAM substrate 100. Specifically, the PCSEL stack can include a lower cladding layer 210, an active region 220, a photonic crystal 230, an upper cladding layer 240, and an upper Bragg reflector (DBR) stack or mirror 250. Specifically, the bottom side of the lower cladding layer 210 can be on the top side of the RAM substrate 100, the bottom side of the active region 220 can be on the top side of the lower cladding layer 210, and the bottom side of the photonic crystal 230 can be on the top side of the active region 220. Furthermore, the bottom side of the upper cladding layer 240 can be on the top side of the photonic crystal 230, and the bottom side of the upper mirror 250 can be on the top side of the upper cladding layer 240.

[0018]

[0022] PCSEL 200 may further include a P-contact 260 and an N-contact 270 on the top side of RAM substrate 100. P-contact 260 may be electrically coupled to lower cladding layer 210. Similarly, n-contact 270 may be electrically coupled to upper cladding layer 240. As further shown, PCSEL 200 may include an electrically insulating region 262 that electrically isolates P-contact 260 from the lateral sides of active region 220, photonic crystal 230, and upper cladding layer 240. PCSEL 200 may further include an electrically insulating region 272 that electrically isolates n-contact 270 from the lateral sides of lower cladding layer 210, active region 220, and photonic crystal 230.

[0019]

[0023] The illustrated arrangement of the p-contact 260 and the n-contact 270 is merely an example. In other embodiments, the p-contact 260 and the n-contact 270 can be arranged differently. For example, the p-contact 260 and the n-contact 270 can be swapped, with the p-contact 260 coupled to the upper cladding layer 240 and the n-contact 270 coupled to the lower cladding layer 210. The active region 220 can include quantum wells, quantum dots, and / or quantum dashes, which can be electrically pumped via the p-contact 260 and the n-contact 270 and via respective electrodes in the cladding layers 210, 240. As a result of such electrical pumping of the PCSEL 200, the active region 220 can emit and develop pump light X through the photonic crystal 230. In some embodiments, the PCSEL 200 can develop pump light X at a pump wavelength suitable for exciting vacancies in the RAM substrate 100. In some embodiments, the p-contact 260 and the n-contact 270 can electrically pump the PCSEL 200 to develop continuous, frequency-modulated, and / or polarized excitation light X, which can improve the sensitivity of the magnetometer.

[0020]

[0024] Photonic crystal 230 can include a thin layer of semiconductor material that acts as a lateral cavity (i.e., a cavity that extends parallel to the top side of RAM substrate 100). Specifically, photonic crystal can include a thin layer of gallium arsenide (GaAs), gallium nitride (GaN), indium phosphide (InP), or other semitransparent material. Additionally, photonic crystal 230 can include a pattern (e.g., rectangular, triangular, etc.) of air or other dielectric material holes spanning a specific area. Photonic crystal 230 can also be transparent to light having an excitation wavelength appropriate for exciting color centers in RAM substrate 100.

[0021]

[0025] Active region 220 may be coupled to photonic crystal 230 and may provide laser gain via stimulated emission. Active region 220 may be separated from photonic crystal 230 by a thin electron-blocking layer that keeps electrical carriers confined in active region 220.

[0022]

[0026] As shown, the active region 220 and the photonic crystal 230 may be sandwiched between the lower cladding layer 210 and the upper cladding layer 240. Specifically, the bottom side of the upper cladding layer 240 is on the top side of the photonic crystal 230, and the bottom side of the active region 220 is on the top side of the lower cladding layer 210. Although the active region 220 is depicted below the photonic crystal 230 in FIG. 1 , in some embodiments of the PCSEL 200, the positions of the active region 220 and the photonic crystal 230 may be swapped. In such embodiments, the bottom side of the active region 220 may be on the top side of the photonic crystal 230. Furthermore, the bottom side of the upper cladding layer 240 may be on the top side of the active region 220, and the bottom side of the photonic crystal 230 may be on the top side of the lower cladding layer 210.

[0023]

[0027] Regardless, the upper cladding layer 240 can comprise an n-doped semi-transparent material that is electrically conductive and optically transparent to the pump wavelength. Similarly, the lower cladding layer 210 can comprise a p-doped semi-transparent material that is electrically conductive and optically transparent to the pump wavelength. As a result, the cladding layers 210, 240 can electrically pump the PCSEL 200 while allowing the pump light X to pass through and reach the top of the RAM substrate 100.

[0024]

[0028] In some embodiments, the RAM substrate 100 can include a diamond substrate. The diamond substrate can have nitrogen-vacancy (NV) centers embedded therein. The NV centers can provide point defects or vacancies in the diamond lattice structure, which exhibit spin-dependent photoluminescence in the presence of a magnetic field. Specifically, the NV centers can fluoresce red light F, such as light having a wavelength of about 750 nm (e.g., 750 nm ± 20 nm), when excited by visible green light X, such as light having a wavelength of about 532 nm (e.g., 532 nm ± 20 nm).

[0025]

[0029] In some embodiments, RAM substrate 100 can include a silicon carbide (SiC) substrate. SiC substrates can also be implanted with silicon-vacancy or other dopants. These color centers in the SiC lattice structure exhibit spin-dependent photoluminescence in the presence of a magnetic field. Specifically, silicon-vacancy color centers can fluoresce light F having a wavelength of about 919 nm (e.g., 919 nm ± 20 nm) when excited by visible red light X, such as light having a wavelength of about 785 nm (e.g., 785 nm ± 20 nm).

[0026]

[0030] As described above, the RAM substrate 100 can provide a magnetometer with magnet sensing capabilities. However, in addition to such sensing capabilities, the RAM substrate 100 also acts as a heat sink due to its thermal properties. Specifically, such thermal properties can provide temperature stabilization, which can help ensure stability of the wavelength of the excitation light X emitted from the bottom side of the PCSEL 200 into the top side of the RAM substrate 100.

[0027]

[0031] Although diamond and silicon carbide are shown as examples of resonant atomic media, other crystalline structures may also have embedded color centers and be used as the resonant atomic media in the magnetometers described herein. For such embodiments, the PCSEL 200 may be configured to develop excitation light X at an appropriate wavelength to excite the photoluminescence of the embedded color centers.

[0028]

[0032] The top mirror 250 can reflect the excitation light X towards the bottom side of the PCSEL 200 and into the top side of the RAM substrate 100. Furthermore, the RAM substrate 100 can be transparent to the wavelength of the fluorescent light F and the wavelength of the excitation light X, thus allowing the fluorescent light detector 300 to receive and detect the fluorescent light F.

[0029]

[0033] Fluorescence detector 300 can be designed with a narrow passband filter and / or a narrow wavelength detection range. Such a narrow passband can effectively filter excitation light X from fluorescence light F. In some embodiments, fluorescence detector 300 can otherwise be designed to extract or detect fluorescence light F in the presence of excitation light X, regardless of the presence / absence of a narrow passband filter.

[0030]

[0034] As depicted, a fluorescence detector 300 can be disposed below the RAM substrate 100 to receive the fluorescence light F. The fluorescence detector 300 can be designed to detect a wavelength range of interest (e.g., a wavelength range that includes the fluorescence light F) and to generate a fluorescence measurement signal indicative of the detected light in the wavelength range of interest and the effect of the magnetic field on the fluorescence light F. For example, the fluorescence detector 300 can be configured to detect fluorescence light F in the wavelength range of 600-800 nm when used with a diamond RAM substrate 100 that fluoresces red light at approximately 750 nm. The fluorescence detector 300 and / or magnetometer 10 can include additional filters that allow a narrow range of light to reach the detection element (e.g., a photodiode) of the fluorescence detector 300.

[0031]

[0035] Referring now to FIG. 2 , an optical magnetometer 11 is shown that includes multiple PCSELs 200 on the top side of a RAM substrate 100. The optical magnetometer 11 can be implemented in a manner similar to the optical magnetometer 10 of FIG. 1 . However, because multiple PCSELs 200 are present, the optical magnetometer 11 can excite multiple portions of the RAM substrate 100. Thus, multiple portions of the RAM substrate 100 can provide fluorescent light F to the fluorescence detector 300. The fluorescence detector 300 can generate a fluorescence measurement signal based on the fluorescent light F from multiple sources. Such a configuration effectively increases the amount of fluorescent light F generated in the presence of a magnetic field and potentially enhances the sensitivity and / or accuracy of the optical magnetometer 11 compared to the optical magnetometer 10 of FIG. 1 .

[0032]

[0036] 2, individual p-contacts 260 and / or n-contacts 270 can be shared by or coupled to multiple PCSELs 200. Such a configuration can help reduce the surface area used by multiple PCSELs 200. Furthermore, such a configuration can reduce the number of electrical leads or connections required to electrically pump the PCSELs 200.

[0033]

[0037] 2 shows a linear arrangement of three PCSELs 200. However, the optical magnetometer 11 may be implemented in other arrangements, such as, for example, a two-dimensional array of PCSELs 200, a two-dimensional torus array of PCSELs 200, etc. Furthermore, the optical magnetometer 11 may be implemented using other numbers of PCSELs 200 than those shown.

[0034]

[0038] In some embodiments, all of the PCSELs 200 can be electrically pumped simultaneously, which may increase the amount of fluorescence F and the sensitivity of the magnetometer 11. However, in some embodiments, the PCSELs 200 can be electrically pumped individually, sequentially, etc. Such selectivity may allow for reduced power consumption and / or heat generation of the magnetometer 11.

[0035]

[0039] Referring now to FIG. 3 , an optical magnetometer 12 is shown that includes a PCSEL 202 having a meta-optical surface 280. The optical magnetometer 12 can be implemented in a manner similar to the optical magnetometer 10 of FIG. 1 . However, unlike the PCSEL 200 of FIG. 1 , the PCSEL 202 of FIG. 3 includes a meta-optical surface 280 between the bottom side of the lower cladding layer 210 and the top side of the RAM substrate 100. Generally, PCSELs emit somewhat collimated light. Due to the collimated nature of the emitted excitation light X, the PCSEL 200 of FIG. 1 may excite a small area of ​​the RAM substrate 100. The meta-optical surface 280 of the PCSEL 202 can provide beam shaping of the excitation light X, allowing the excitation light X to excite a large area of ​​the RAM substrate 100. Thus, the meta-optical surface 280 can increase the sensitivity and / or accuracy of the optical magnetometer 12 compared to the optical magnetometer 10 of FIG. 1 .

[0036]

[0040] Referring now to FIG. 4, an optical magnetometer 13 is shown that includes a PCSEL 203 with a grating coupler 285. The optical magnetometer 12 can be implemented in a manner similar to the optical magnetometer 10 of FIG. 1. However, unlike the PCSEL 200 of FIG. 1, the PCSEL 203 of FIG. 4 includes a grating coupler 285 between the bottom side of the lower cladding layer 210 and the top side of the RAM substrate 100. As discussed above, PCSELs emit somewhat collimated light. Due to the collimated nature of the emitted excitation light X, the PCSEL 200 of FIG. 1 can excite a small area of ​​the RAM substrate 100. The grating coupler 285 can couple the excitation light X of the PCSEL 202 into the RAM substrate 100 at an angle.

[0037]

[0041] The surface of RAM substrate 100 can be designed to reflect excitation light X having an excitation wavelength (e.g., green) and to be transparent to fluorescence light F having a fluorescence wavelength (e.g., red). As a result, excitation light X can propagate laterally along RAM substrate 100, exciting color centers along its path. Fluorescence light F can pass through the bottom side of RAM substrate 100 to fluorescence detector 300. Grating coupler 285 can thus increase the amount of fluorescence F received by fluorescence detector 30, thereby increasing the sensitivity and / or accuracy of optical magnetometer 12 compared to optical magnetometer 10 of FIG. 1.

[0038]

[0042] Referring to FIG. 5 , an optical magnetometer 14 is shown that includes a PCSEL 204 that emits light toward a resonant atomic medium (RAM) layer 400 disposed on its top side. As shown, the optical magnetometer 14 can include a substrate 101, a PCSEL 204, a fluorescence detector 301, and the RAM layer 400. Generally, the PCSEL 204 emits light X having an excitation wavelength. The excitation light X can be directed toward the RAM layer 400, and color centers embedded in the RAM layer 400 can fluoresce as light F in a manner that is dependent on or indicative of the magnetic field experienced by the RAM layer 400. The fluorescence detector 301 can receive the fluorescence F and generate a fluorescence measurement signal that is indicative of the detected fluorescence and, therefore, the magnetic field experienced by the RAM layer 400. In this manner, the optical magnetometer 14 can detect and / or measure magnetic fields in its vicinity.

[0039]

[0043] The substrate 101 can be implemented in a manner similar to the RAM substrate 100 of FIG. 1 . Specifically, the substrate 100 can include diamond or silicon carbide (SiC) with embedded color centers. However, unlike the RAM substrate 100, the substrate 101 does not receive the excitation light X from the PCSEL 204. Thus, in some embodiments, the substrate 101 can lack color centers and / or can be implemented using other semiconductor or crystalline materials. In some embodiments, the substrate 101 can act as a heat sink due to its thermal properties. Specifically, such thermal properties can provide thermal stabilization, which can help ensure stability of the wavelength of the excitation light X emitted from the top side of the PCSEL 204 to the bottom side of the RAM layer 400.

[0040]

[0044] As shown, the PCSEL 204 can be constructed as a stack of layers on the top side of the substrate 101. Specifically, the PCSEL stack can include a bottom mirror 252, a bottom cladding layer 210, an active region 220, a photonic crystal 230, and an top cladding layer 240. Specifically, the bottom side of the bottom mirror 252 can be on the top side of the substrate 101, the bottom side of the bottom cladding layer 210 can be on the top side of the bottom mirror 252, and the bottom side of the active region 220 can be on the top side of the bottom cladding layer 210. Furthermore, the bottom side of the photonic crystal 230 can be on the top side of the active region 220, the bottom side of the top cladding layer 240 can be on the top side of the photonic crystal 230, and the bottom side of the RAM layer 400 can be on the top side of the top cladding layer 240.

[0041]

[0045] The active region 220, photonic crystal 230, cladding layers 210, 240, contacts 260, 270, and electrical isolation regions 262, 272 can be implemented in a manner similar to the active region 220, photonic crystal 230, cladding layers 210, 240, contacts 260, 270, and electrical isolation regions 262, 272 of the optical magnetometer 10 of Figure 1. Similarly, the bottom mirror 252, although located below the active region 220, can be implemented in a manner similar to the top mirror 250 of Figure 1. The bottom mirror 252 can therefore reflect the excitation light X towards the RAM layer 400 on the top side of the PCSEL 204. Furthermore, similar to the RAM substrate 100 of Figure 1, the RAM layer 400 can be transparent to the wavelength of the fluorescent light F and the wavelength of the excitation light X, thereby allowing the fluorescence detector 301 located above the PCSEL 204 to receive and detect the fluorescent light F.

[0042]

[0046] As previously mentioned, the RAM layer 400 can be implemented similarly to the RAM substrate 100 of FIG. 1. Specifically, the RAM layer 400 can include a diamond layer embedded with nitrogen-vacancy (NV) centers. The NV centers can provide point defects or vacancies in the diamond lattice structure, which exhibit spin-dependent photoluminescence in the presence of a magnetic field. Specifically, the NV centers can fluoresce red light F (e.g., light having a wavelength of about 750 nm) when excited by visible green light X (e.g., light having a wavelength of about 532 nm).

[0043]

[0047] In some embodiments, RAM layer 400 can include a silicon carbide (SiC) layer embedded with color centers from silicon vacancies or other dopants. These color centers in the SiC lattice structure exhibit spin-dependent photoluminescence in the presence of a magnetic field. Specifically, silicon vacancy color centers can fluoresce light F having a wavelength of about 919 nm when excited by visible red light X (e.g., light having a wavelength of about 785 nm).

[0044]

[0048] Although diamond and silicon carbide are shown as examples of resonant atomic media for RAM layer 400, other crystalline materials can also have color centers embedded therein and be used as the resonant atomic media for the magnetometers disclosed herein. For such embodiments, PCSEL 204 can be configured to develop excitation light X at a wavelength appropriate for exciting the photoluminescence of the embedded color centers.

[0045]

[0049] 1, fluorescence detector 301 can be designed to have a narrow passband filter and / or a narrow wavelength detection range. Such a narrow passband can effectively filter excitation light X from fluorescence light F. In some embodiments, fluorescence detector 301 can otherwise be designed to extract or detect fluorescence light F in the presence of excitation light X, regardless of the presence / absence of a narrow passband filter.

[0046]

[0050] As depicted, a fluorescence detector 301 can be disposed above the PCSEL 204 and RAM layer 400 and can receive excitation light X from the PCSEL 204 and fluorescence F from the RAM layer 400. The fluorescence detector 301 can be designed to detect a wavelength range of interest (e.g., a wavelength range that includes fluorescence F) and to generate a fluorescence measurement signal indicative of the detected light in the wavelength range of interest and the magnetic field effect on the fluorescence F. For example, the fluorescence detector 301 can be configured to detect fluorescence F in the wavelength range of 600-800 nm when used with a diamond RAM layer 400 that fluoresces red light at approximately 750 nm. The fluorescence detector 301 and / or magnetometer 14 can include additional filters that allow a narrow range of light to reach the detection element (e.g., a photodiode) of the fluorescence detector 301.

[0047]

[0051] While this disclosure includes reference to particular examples, those skilled in the art will recognize that various modifications can be made and equivalents can be substituted without departing from the scope of this disclosure. Furthermore, modifications can be made to the disclosed examples without departing from the scope of this disclosure. For example, the disclosed magnetometers can include additional components, such as a reference magnet, an electrical driver, a power monitor, and the like, without departing from the scope of this disclosure. Accordingly, this disclosure is not limited to the disclosed examples, and it is intended that this disclosure include all examples falling within the scope of the appended claims.

Claims

1. A magnetometer, a resonant atomic medium containing a color center or other dopant; a photonic crystal surface-emitting laser (PCSEL); a photodetector configured to generate a measurement signal indicative of a magnetic field applied to the resonant atomic medium; Magnetometer including.

2. 2. The magnetometer of claim 1, the color center or other dopant forms a vacancy that fluoresces when excited by excitation light having an excitation wavelength; a PCSEL configured to develop the pump light having the pump wavelength of the vacancy and direct the pump light toward the resonant atomic medium; Magnetometer.

3. 3. The magnetometer of claim 2, wherein the PCSEL includes a plurality of electrical contacts for electrically pumping the PCSEL to develop the excitation light at the excitation wavelength.

4. 10. The magnetometer of claim 1, wherein the resonating atomic medium comprises silicon carbide embedded with silicon-vacancy forming color centers or other dopants.

5. 3. The magnetometer of claim 2, the resonant atomic medium comprises silicon carbide embedded with silicon-vacancy forming color centers or other dopants; the excitation light has a wavelength of about 785 nm; The fluorescent light has a wavelength of about 919 nm. Magnetometer.

6. 10. The magnetometer of claim 1, wherein the resonating atomic medium comprises diamond embedded with color centers forming nitrogen-vacancy (NV) centers.

7. 3. The magnetometer of claim 2, the resonant atomic medium comprises diamond embedded with color centers forming nitrogen-vacancy (NV) centers; the excitation light has a wavelength of green light; the fluorescent light has a wavelength of red light; Magnetometer.

8. 3. The magnetometer of claim 2, the resonant atomic medium comprises diamond embedded with color centers forming nitrogen-vacancy (NV) centers; the excitation light has a wavelength of about 532 nm; The fluorescent light has a wavelength of about 750 nm. Magnetometer.

9. 2. The magnetometer of claim 1, a substrate including the resonant atomic medium Including, the PCSEL is over a top side of the substrate and is configured to direct excitation light toward the top side of the substrate; the photodetector is disposed below the bottom side of the substrate and receives fluorescent light from the bottom side of the substrate. Magnetometer.

10. 10. The magnetometer of claim 9, wherein the PCSEL includes a top mirror that directs the excitation light toward a top side of the substrate.

11. 2. The magnetometer of claim 1, Board including the top side Including, the resonant atomic medium is on the top side of the PCSEL; the PCSEL is on the top side of the substrate and is configured to direct excitation light to the bottom side of the resonant atomic medium; the photodetector is disposed on the top side of the resonant atomic medium so as to receive the fluorescent light from the top side of the resonant atomic medium; Magnetometer.

12. 12. The magnetometer of claim 11, wherein the PCSEL includes a bottom mirror that directs the excitation light toward a bottom side of the resonant atomic medium.

13. 3. The magnetometer of claim 2, comprising a plurality of PCSELs, each configured to develop pump light having a pump wavelength of the vacancy and direct the pump light toward the resonant atomic medium.

14. 10. The magnetometer of claim 1, wherein the PCSEL includes a meta-optic surface that shapes excitation light emitted into the resonant atomic medium.

15. 2. The magnetometer of claim 1, the PCSEL includes a grating coupler that couples pump light into the resonant atomic medium at an angle; one or more surfaces of the resonant atomic medium are configured to reflect the excitation light and allow the fluorescent light to pass through; Magnetometer.

16. 1. A magnetometer method comprising: emitting excitation light from a photonic crystal surface-emitting laser (PCSEL) into a resonant atomic medium containing color centers or other dopants; generating a measurement signal indicative of a magnetic field applied to the resonant atomic medium using a photodetector; A method comprising:

17. 17. The method of claim 16, using the emitted excitation light to excite the color centers or vacancies formed by other dopants in the resonant atomic medium; emitting fluorescence in response to exciting the vacancies, the fluorescence having characteristics dependent on a magnetic field applied to the resonant atomic medium; generating the measurement signal based on the fluorescence using the photodetector; A method comprising:

18. 20. The method of claim 17, comprising exciting the vacancies with pump light from a plurality of PCSELs.

19. 17. The method of claim 16, wherein the resonant atomic medium comprises silicon carbide embedded with silicon-vacancy forming color centers or other dopants.

20. 17. The method of claim 16, wherein the resonant atomic medium comprises diamond embedded with color centers forming nitrogen-vacancy (NV) centers.

21. 17. The method of claim 16, comprising emitting the excitation light from a plurality of PCSELs into the resonant atomic medium.

22. 17. The method of claim 16, comprising shaping the excitation light with a meta-optic surface.

23. 18. The method of claim 17, coupling the pump light into the resonant atomic medium at an angle using a grating coupler; reflecting the excitation light using one or more surfaces of the resonant atomic medium; allowing the fluorescent light to pass through at least one of the one or more surfaces; A method comprising:

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