Panel housing container, cleaning system, and cleaning method

Abstract

To provide a panel housing container, a cleaning system, and a cleaning method capable of improving a cleaning efficiency of an internal space.SOLUTION: A panel housing container 1 includes a container main body 2 having an internal space V in which a plurality of panels are stored in a state of being stacked at intervals in a vertical direction and an opening 2a, and a lid body 3 that closes the opening 2a. The container main body 2 includes a bottom plate 22 that defines a lower end of the internal space V, a rear wall 24 that faces the lid body 3 in a state where the lid body 3 closes the opening 2a and defines a rear end of the internal space V, a first check valve that is attached to an air supply port provided in the bottom plate 22 and prevents a gas from flowing out of the internal space V, a second check valve that is attached to an exhaust port provided in the bottom plate 22 and prevents a gas from flowing into the internal space V, and an air supply valve 34 that is attached to a through hole 3c provided in one of the lid body 3 and the rear wall 24. The air supply valve 34 prevents the gas from flowing out of the internal space V.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to panel enclosures, cleaning systems, and cleaning methods. [Background technology]

[0002] There are known techniques for purifying the interior space of a storage container with a gas. For example, Patent Document 1 describes an air purifier that includes a casing, an intake nozzle, and a supply nozzle protruding from the casing, purifies air drawn in through the intake nozzle within the casing, and delivers the purified air from the supply nozzle. This air purifier circulates and purifies the air in the storage container, maintaining the clean state of the storage container, with the intake nozzle connected to one of two breathing ports provided in the bottom plate of the storage container and the supply nozzle connected to the other breathing port. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-26674 Summary of the Invention [Problem to be solved by the invention]

[0004] In the storage container described in Patent Document 1, two ventilation ports, to which a supply nozzle and an intake nozzle are respectively connected, are provided on the bottom plate of the storage container. For example, if a panel is stored in the storage container, the air supplied through the ventilation ports is blocked by the panel, making it difficult for the air to reach the entire interior space of the storage container. In this technical field, there is a demand for improved cleaning efficiency.

[0005] The present disclosure describes a panel enclosure, cleaning system, and cleaning method that can improve the efficiency of cleaning an interior space. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure includes an internal space for storing multiple panels stacked at intervals in the vertical direction, a container body having an opening, and a lid that closes the opening. The container body has a bottom plate that defines the lower end of the internal space, a rear wall that faces the lid in a front-to-rear direction that intersects the vertical direction when the lid closes the opening and defines the rear end of the internal space, a first check valve attached to an air inlet provided in the bottom plate and prevents gas from flowing out of the internal space, a second check valve attached to an exhaust port provided in the bottom plate and prevents gas from flowing into the internal space, and a third check valve attached to a through-hole provided in one of the lid and the rear wall. The third check valve prevents gas from flowing out of or into the internal space.

[0007] In this panel storage container, multiple panels are stacked vertically at intervals and stored in the container body, and a through-hole is provided in one of the lid and rear wall of the container body that face each other in the front-rear direction. With this configuration, the through-hole faces the peripheral edge of the panel and is not covered by the panel. For example, when the third check valve prevents gas from flowing out of the internal space, the through-hole can be used as an air inlet for supplying gas to the internal space. In this case, gas supplied through the through-hole into the internal space flows while bypassing the panel. When the third check valve prevents gas from flowing into the internal space, the through-hole can be used as an exhaust port for discharging gas from the internal space. In this case, gas discharged from the internal space through the through-hole flows while bypassing the panel. As described above, whether the through-hole is used as an air inlet or an exhaust port, gas is more likely to be distributed throughout the entire internal space. As a result, the cleaning efficiency of the internal space can be improved.

[0008] In the panel storage container, the through hole may be a first through hole provided in the lid. A second through hole may be provided in the rear wall. The container body may have a fourth check valve attached to the second through hole to prevent the other of gas from flowing out of the internal space and gas from flowing into the internal space. With this configuration, both the first through hole and the second through hole face the peripheral end surface of the panel and are not covered by the panel. For example, when the first through hole is used as an air inlet for supplying gas to the internal space and the second through hole is used as an outlet for discharging gas from the internal space, gas flows from the first through hole to the second through hole, bypassing the panel. When the second through hole is used as an air inlet for supplying gas to the internal space and the first through hole is used as an outlet for discharging gas from the internal space, gas flows from the second through hole to the first through hole, bypassing the panel. This makes it easier for gas to spread throughout the entire internal space. As a result, the cleaning efficiency of the internal space can be improved.

[0009] In the panel housing container, the fourth check valve may be embedded in the rear wall. In this case, the fourth check valve protrudes less than in a configuration in which the fourth check valve protrudes rearward from the rear wall. If a standard specifies the maximum overall length of the panel housing container in the front-to-rear direction, the standard can be complied with without reducing the capacity of the container body.

[0010] In the panel storage container, the through-hole may be provided in the lid. The container body may have a flange that defines the opening. The lid may have a first surface facing the interior space and a second surface opposite the first surface. The third check valve may protrude forward from the second surface. The front end of the third check valve may be closer to the interior space than the front end face of the flange. For example, when the panel storage container is placed on a panel transfer device, the front end of the panel storage container may come into contact with the panel transfer device in order for the panel transfer device to operate the panel storage container. According to the above configuration, the front end face of the flange is located forward of the front end of the third check valve, reducing the possibility of the third check valve coming into contact with the panel transfer device. This reduces the possibility of the third check valve and the panel transfer device interfering with each other and causing damage.

[0011] A cleaning system according to another aspect of the present disclosure includes the panel housing container described above and an air supply device that supplies gas to the interior space through the through-hole. The third check valve prevents gas from leaking from the interior space. Because this cleaning system includes the panel housing container described above, gas supplied to the interior space through the through-hole flows while avoiding the panel. This makes it easier for the gas to spread throughout the interior space. As a result, it is possible to improve the cleaning efficiency of the interior space.

[0012] A cleaning system according to yet another aspect of the present disclosure includes the panel housing container described above, an air supply device that supplies gas to the interior space through an air supply port, and an exhaust device that exhausts gas from the interior space through a through-hole. The third check valve prevents gas from flowing into the interior space. Because this cleaning system includes the panel housing container described above, gas exhausted from the interior space through the through-hole flows around the panel. This makes it easier for the gas to spread throughout the entire interior space. As a result, the cleaning efficiency of the interior space can be improved.

[0013] The cleaning system may further include a particle counter that counts particles contained in the gas exhausted from the internal space. The amount of particles contained in the gas exhausted from the internal space is correlated with the amount of particles contained in the internal space. Therefore, the count value of the particle counter can be used to estimate the cleanliness of the internal space.

[0014] The cleaning system may further include a barometer that measures the air pressure in the internal space. A measurement port to which the barometer is connected may be provided in the cover or rear wall. For example, if a barometer and an exhaust device are connected to the same exhaust port, the pressure of the gas exhausted from the exhaust port may be increased by the exhaust device, and this pressure may deviate from the air pressure in the internal space. With the above configuration, the barometer is connected to the measurement port, thereby reducing air pressure measurement errors caused by the exhaust device.

[0015] A cleaning method according to yet another aspect of the present disclosure is a method for cleaning a panel storage container having an interior space for storing multiple panels stacked at intervals in the vertical direction, a container body having an opening, and a lid that closes the opening. The cleaning method includes the steps of preparing a panel storage container and cleaning the interior space. The container body has a bottom plate that defines the lower end of the interior space, a rear wall that faces the lid in a front-to-rear direction intersecting the vertical direction when the lid closes the opening and defines the rear end of the interior space, a first check valve attached to an air inlet provided in the bottom plate to prevent gas from escaping from the interior space, a second check valve attached to an exhaust port provided in the bottom plate to prevent gas from entering the interior space, and a third check valve attached to a through-hole provided in either the lid or the rear wall. The third check valve prevents gas from either escaping from the interior space or entering into the interior space. In the process of cleaning the internal space, when the third check valve prevents gas from flowing out of the internal space, gas is supplied through the through hole, and when the third check valve prevents gas from flowing into the internal space, gas is discharged through the through hole.

[0016] In this cleaning method, a panel storage container includes a container body in which multiple panels are stacked vertically at intervals, and a through-hole is provided in one of the lid and rear wall of the container body that face each other in the front-to-rear direction. With this configuration, the through-hole faces the peripheral edge of the panel and is not covered by the panel. When gas is supplied to the internal space through the through-hole, the gas supplied from the through-hole to the internal space flows while avoiding the panel. When gas is exhausted from the internal space through the through-hole, the gas exhausted from the internal space through the through-hole flows while avoiding the panel. As described above, whether the through-hole is used as an air intake port or an exhaust port, gas is more likely to spread throughout the entire internal space. As a result, the cleaning efficiency of the internal space can be improved.

[0017] In the cleaning method, the through hole may be a first through hole provided in the lid. A second through hole may be provided in the rear wall. The container body may have a fourth check valve attached to the second through hole and configured to prevent the other of gas from flowing out from the internal space and gas from flowing into the internal space. In the step of cleaning the internal space, when the fourth check valve prevents gas from flowing in from the internal space, gas may be supplied through the first through hole and discharged through the second through hole. Alternatively, when the fourth check valve prevents gas from flowing out from the internal space, gas may be supplied through the second through hole and discharged through the first through hole. According to this configuration, both the first through hole and the second through hole face the peripheral end surface of the panel and are not covered by the panel. For example, when the first through hole is used as an air inlet for supplying gas to the internal space and the second through hole is used as an outlet for discharging gas from the internal space, gas flows from the first through hole to the second through hole, bypassing the panel. When the second through-hole is used as an air inlet for supplying gas to the interior space and the first through-hole is used as an outlet for discharging gas from the interior space, the gas flows from the second through-hole to the first through-hole, bypassing the panel. This makes it easier for the gas to spread throughout the entire interior space. As a result, the cleaning efficiency of the interior space can be improved.

[0018] In the step of cleaning the internal space of the cleaning method, the flow rate of the gas supplied to the internal space or the flow rate of the gas discharged from the internal space may be controlled so that the air pressure in the internal space is maintained at a positive pressure. Positive air pressure in the internal space reduces the possibility of particles entering the internal space from the outside. Therefore, this configuration makes it possible to improve the cleaning efficiency of the internal space.

[0019] In the cleaning method, the step of cleaning the internal space may include counting particles contained in gas exhausted from the internal space. The amount of particles contained in the gas exhausted from the internal space can be said to be correlated with the amount of particles contained in the internal space. Therefore, the cleanliness of the internal space can be estimated based on the count value of the particle counter. [Effects of the Invention]

[0020] According to the present disclosure, the cleaning efficiency of the interior space can be improved. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a block diagram of a cleaning system according to one embodiment. [Figure 2] FIG. 2 is an exploded perspective view of the panel storage container shown in FIG. [Figure 3] FIG. 3 is a rear view of the panel housing container shown in FIG. [Figure 4] FIG. 4 is a bottom view of the panel housing container shown in FIG. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. [Figure 7] FIG. 7 is a diagram schematically showing the flow of gas in the panel housing container shown in FIG. [Figure 8] FIG. 8 is a partially enlarged cross-sectional view of a panel storage container according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction (first direction) is a direction that intersects (here, is perpendicular to) the X-axis direction and the Z-axis direction (second direction). The Z-axis direction is a direction that intersects (here, is perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction).

[0023] A cleaning system according to one embodiment will be described with reference to Fig. 1. Fig. 1 is a block diagram of a cleaning system according to one embodiment. The cleaning system 100 shown in Fig. 1 is a system that cleans the internal space V (see Fig. 2) of a panel storage container 1. The cleaning system 100 includes the panel storage container 1, an air supply device 101, an exhaust device 102, a particle counter 103, and a barometer 104.

[0024] The cleaning system 100 can remove particles contained in the internal space V by supplying gas to the internal space V of the panel storage container 1. The cleaning system 100 is installed in, for example, a clean room.

[0025] The panel storage container 1 is a container for storing multiple panels. The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. The panel storage container 1 is, for example, called a FOUP (Front Opening Unified Pod) and is used to transport panels within a factory. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels are rectangular. Examples of panel sizes include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily and may be, for example, 6, 12, 16, or 24.

[0026] The panel storage container 1 is used, for example, in a manufacturing device for manufacturing electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, a process of sealing these electronic components with epoxy resin or the like, a process of peeling the sealed electronic components from the carrier panel in panel form, and a process of cutting out the panel-shaped electronic components individually. The panel storage container 1 is used to transport panels between these processes. Details of the panel storage container 1 will be described later.

[0027] The air supply device 101 is a device that supplies gas to the internal space V. The gas is, for example, CDA (Clean Dry Air). CDA is dry air that complies with JIS B8392 and is a gas obtained by filtering out 99% or more of particles having a particle size of 0.01 μm or more contained in the dry air. For example, class 1 dry air specified in JIS B8392 is used as the dry air. The gas supplied by the air supply device 101 may be an inert gas such as nitrogen gas or argon gas. Here, CDA is used from the viewpoints of improving safety and reducing costs.

[0028] The cleaning system 100 includes an air supply pipe 105. The air supply device 101 is connected to the panel housing 1 by the air supply pipe 105. The air supply device 101 supplies gas to the panel housing 1 through the air supply pipe 105. The air supply pipe 105 may include one pipe or multiple pipes.

[0029] The exhaust device 102 is a device that exhausts gas from the internal space V. The exhaust device 102 includes, for example, an exhaust fan. The cleaning system 100 includes an exhaust pipe 106. The exhaust device 102 is connected to the panel housing container 1 by the exhaust pipe 106. The exhaust device 102 exhausts gas from the panel housing container 1 through the exhaust pipe 106. The exhaust pipe 106 may include one pipe or multiple pipes.

[0030] Particle counter 103 is a device that counts particles contained in the gas exhausted from internal space V. Particle counter 103 outputs the particle count value to a display device (not shown). Cleaning system 100 includes piping 107. Particle counter 103 is connected to exhaust pipe 106 via piping 107. Particle counter 103 can suck in a portion of the gas flowing through exhaust pipe 106 via piping 107. When exhaust device 102 exhausts gas from panel housing container 1, particle counter 103 sucks in the gas, causing a portion of the gas exhausted from internal space V to branch from exhaust pipe 106 to piping 107. Particle counter 103 counts particles contained in the branched gas.

[0031] The barometer 104 is an instrument that measures the air pressure in the internal space V. The cleaning system 100 includes a pipe 108. The barometer 104 is in communication with the internal space V of the panel storage container 1 via the pipe 108. The barometer 104 outputs the measured value of the air pressure to a display device (not shown) at predetermined time intervals.

[0032] Next, the panel storage container 1 will be described in detail with reference to Fig. 2. Fig. 2 is an exploded perspective view of the panel storage container shown in Fig. 1. As shown in Fig. 2, the panel storage container 1 includes a container body 2, a lid body 3, and a pair of handles 4.

[0033] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 has an internal space V for storing multiple panels. Specifically, the container body 2 stores multiple panels stacked vertically with intervals between them. The panels are inserted into and removed from the container body 2 through the opening 2a. Details of the container body 2 will be described later.

[0034] The lid 3 is a member for closing the opening 2a of the container body 2. The lid 3 airtightly closes the opening 2a of the container body 2 via a sealing member such as a gasket. The lid 3 is detachably attached to a flange 25 that defines the opening 2a. The lid 3 includes a lid body 31, a cover member 32, a locking mechanism 33, an air intake valve 34, an exhaust valve 35, and a pipe joint 36 for measurement.

[0035] The lid body 31 is the main body of the lid body 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material such as aluminum or magnesium alloy. The lid body 31 may be made of a thermoplastic resin such as polycarbonate resin. The lid body 31 has a front surface 31a (second surface) and a back surface 31b (first surface). The back surface 31b is the surface that faces the internal space V and the multiple panels in the front-rear direction when the lid body 3 closes the opening 2a. The front surface 31a is the surface opposite the back surface 31b in the front-rear direction. The lid body 31 is provided with a through hole 3a (measurement port), a through hole 3b (first through hole), and a through hole 3c (first through hole) that penetrate the lid body 31 in the front-rear direction. When the panel storage container 1 is viewed from the front, the through hole 3a is located in the upper left corner of the lid body 31, the through hole 3b is located in the upper right corner of the lid body 31, and the through hole 3c is located in the lower right corner of the lid body 31.

[0036] The cover member 32 is a member that covers the front surface 31a of the lid main body 31. The cover member 32 is a rectangular plate material. The cover member 32 is made of a resin material such as polycarbonate. The outer shape of the cover member 32 is slightly smaller than the outer shape of the lid main body 31. The cover member 32 is provided with a keyhole 32h. A key (not shown) is inserted into the keyhole 32h.

[0037] The locking mechanism 33 locks or unlocks the lid 3 by operating a key inserted in the keyhole 32h. The locking mechanism 33 includes a latch (not shown). With the lid 3 attached to the flange 25, the latch is inserted into the locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid 3.

[0038] The air intake valve 34 is a mechanism for supplying gas to the internal space V. The air intake valve 34 is a check valve configured to allow gas to flow into the internal space V while preventing gas from flowing out of the internal space V. When the air intake valve 34 is connected to the air intake pipe 105, the air intake valve 34 opens if the gas pressure in the air intake pipe 105 is higher than the gas pressure in the internal space V by a predetermined pressure or more. The air intake valve 34 is attached to the through hole 3c. The air intake device 101 can be connected to the through hole 3c via the air intake valve 34.

[0039] The exhaust valve 35 is a mechanism for discharging gas from the internal space V. The exhaust valve 35 is a check valve configured to allow gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 35 is connected to the exhaust pipe 106, the exhaust valve 35 opens if the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure or more. The exhaust valve 35 is attached to the through hole 3b. The exhaust device 102 can be connected to the through hole 3b via the exhaust valve 35.

[0040] The pipe fitting 36 connects the internal space V with the external space of the container body 2. The pipe fitting 36 is attached to the through-hole 3a. A pipe 108 can be connected to the pipe fitting 36. The barometer 104 can be connected to the through-hole 3a via the pipe fitting 36. When the pipe 108 is not connected to the pipe fitting 36, the pipe fitting 36 is closed by a cap (not shown).

[0041] The pair of handles 4 are members used when the conveying device conveys the panel storage container 1. The pair of handles 4 are provided on both left and right ends of the top plate 21. The conveying device can convey the panel storage container 1 by grasping the pair of handles 4 and lifting the panel storage container 1.

[0042] The container body 2, the lid 3, and the pair of handles 4 are formed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material for the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may also be used as the resin contained in the molding material for the resin material.

[0043] Conductive materials and various antistatic agents may be added to these resins. Examples of conductive materials include carbon fibers, carbon powder, carbon nanotubes, and conductive polymers. Examples of antistatic agents that can be used include anionic, cationic, and nonionic antistatic agents. Benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based ultraviolet absorbers may also be added. Glass fibers or carbon fibers, which improve rigidity, may also be added selectively.

[0044] Next, the container body 2 will be described in detail with further reference to Fig. 3. Fig. 3 is a rear view of the panel storage container shown in Fig. 1. As shown in Figs. 2 and 3, the container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, a frame 26, a base portion 27, an air intake valve 28 (fourth check valve), an exhaust valve 29 (fourth check valve), a measurement pipe joint 30, and a cover member 37.

[0045] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are disposed substantially parallel to each other. The pair of side walls 23 face each other in the left-right direction and are disposed substantially parallel to each other. The rear wall 24 faces the lid body 3 in the front-rear direction when the lid body 3 closes the opening 2a. Any two adjacent members of the top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are connected to each other. An internal space V is defined by the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24.

[0046] The bottom plate 22 is provided with two air intake ports 22a (see FIG. 5) and two air exhaust ports 22b (see FIG. 5) that vertically penetrate the bottom plate 22. The two air intake ports 22a are provided at the rear part of the bottom plate 22 and are arranged in the left-right direction between two shafts 62a (described later) arranged on the left and right when viewed from above the bottom plate 22. One air intake port 22a is arranged near one of the shafts 62a, and the other air intake port 22a is arranged near the other shaft 62a.

[0047] The two exhaust ports 22b are provided in the front portion of the bottom plate 22 and are arranged in the left-right direction between the two shafts 62a arranged on the left and right when viewed from above the bottom plate 22. One exhaust port 22b is arranged near one of the shafts 62a, and the other exhaust port 22b is arranged near the other shaft 62a.

[0048] The rear wall 24 is provided with through-hole 24a (measurement port), through-hole 24b (second through-hole), and through-hole 24c (second through-hole) that penetrate the rear wall 24 in the front-to-rear direction. When the panel storage container 1 is viewed from the front, through-hole 24a is located in the upper right corner of the rear wall 24, through-hole 24b is located in the upper left corner of the rear wall 24, and through-hole 24c is located in the lower left corner of the rear wall 24.

[0049] The flange 25 is a rectangular frame body that is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. Two locking holes 25h are provided in each of the upper and lower frame parts of the flange 25, spaced apart in the left-right direction. The locking holes 25h in the upper frame part and the locking holes 25h in the lower frame part are provided in positions facing each other in the up-down direction. The flange 25 has a front end surface 25a that forms the front end of the flange 25. The front end surface 25a surrounds the opening 2a when the container body 2 is viewed from the front.

[0050] The frame 26 is used to secure the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24. The frame 26 is made of a metal material such as aluminum or stainless steel. The frame 26 is provided on the front surface of the rear wall 24. The frame 26 has a frame portion 26a, a support column 26b, and a pair of support columns 26c. The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

[0051] The support pillar 26b and the pair of support pillars 26c are columnar members extending in the up-down direction. One support pillar 26c, support pillar 26b, and the other support pillar 26c are arranged in that order in the left-right direction and are disposed substantially parallel to each other. The support pillar 26b and the pair of support pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The support pillar 26b is provided at the center of the frame body 26 in the left-right direction, and the pair of support pillars 26c are provided near both ends of the frame body 26 in the left-right direction. The support pillar 26b has a plurality of fitting holes for attaching a shaft 61a of a support member 61 (described later). The support pillar 26c has a plurality of fitting holes for attaching a shaft 62a of a support member 62 (described later).

[0052] The pedestal portion 27 is a portion that serves as the base of the container body 2. The pedestal portion 27 is provided on the lower surface of the bottom plate 22. The pedestal portion 27 is formed by combining a plurality of pillar-shaped support members.

[0053] Air intake valve 28 is a mechanism for supplying gas to internal space V. Air intake valve 28 is a check valve configured to allow gas to flow into internal space V while preventing gas from flowing out of internal space V. When air intake valve 28 is connected to air intake pipe 105, air intake valve 28 opens if the gas pressure in air intake pipe 105 is higher than the gas pressure in internal space V by a predetermined pressure or more. Air intake valve 28 is attached to through hole 24c and embedded in rear wall 24. Air intake device 101 can be connected to through hole 24c via air intake valve 28.

[0054] The exhaust valve 29 is a mechanism for discharging gas from the internal space V. The exhaust valve 29 is a check valve configured to allow gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 29 is connected to the exhaust pipe 106, the exhaust valve 29 opens if the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure or more. The exhaust valve 29 is attached to the through hole 24b and embedded in the rear wall 24. The exhaust device 102 can be connected to the through hole 24b via the exhaust valve 29.

[0055] The pipe fitting 30 connects the internal space V with the external space of the container body 2. The pipe fitting 30 is attached to the through-hole 24a and embedded in the rear wall 24. A pipe 108 can be connected to the pipe fitting 30. The barometer 104 can be connected to the through-hole 24a via the pipe fitting 30. When the pipe 108 is not connected to the pipe fitting 30, the pipe fitting 30 is closed by a cap (not shown).

[0056] Thus, when the panel storage container 1 is viewed from the front, the air intake valve 28 is located in the lower left corner of the rear wall 24, and the exhaust valve 35 is located in the upper right corner. Therefore, the air intake valve 28 and the exhaust valve 35 are arranged along a diagonal line of the panel storage container 1. Similarly, the air intake valve 34 and the exhaust valve 29 are arranged along a diagonal line of the panel storage container 1.

[0057] Next, the members provided at the bottom of the panel housing container 1 will be described with reference to Fig. 4. Fig. 4 is a bottom view of the panel housing container shown in Fig. 1. As shown in Fig. 4, the panel housing container 1 further includes a base substrate 51, a mounting plate 52, a mounting plate 53, a positioning member 54, an air intake valve 55 (first check valve), and an exhaust valve 56 (second check valve).

[0058] The base substrate 51 is a substrate for mounting the positioning member 54, the intake valve 55, and the exhaust valve 56. The base substrate 51 is a rectangular plate material. The base substrate 51 is provided below the pedestal portion 27. The base substrate 51 is provided with a through hole 51h for mounting the intake valve 55 and a through hole 51j for mounting the exhaust valve 56. The base substrate 51 is provided with two through holes 51h and two through holes 51j. The two through holes 51h are provided at two rear corners of the four corners of the base substrate 51, respectively. The two through holes 51j are provided at two front corners of the four corners of the base substrate 51, respectively. The through holes 51h communicate with the intake port 22a (see FIG. 5) provided in the bottom plate 22 via the intake valve 55. The through holes 51j communicate with the exhaust port 22b (see FIG. 5) provided in the bottom plate 22 via the exhaust valve 56.

[0059] The mounting plates 52 and 53 are members for attaching the positioning member 54 to the base substrate 51. The mounting plates 52 and 53 are plate-shaped members. The mounting plate 52 is provided with two through holes 52g for exposing the positioning member 54. The mounting plate 52 is further provided with two through holes 52h between the two through holes 52g, which are used to fix the panel housing container 1. The two through holes 52h are aligned in the left-right direction. Each through hole 52h is, for example, a rectangular elongated hole extending in the left-right direction.

[0060] The mounting plate 53 is provided on the underside of the rear portion of the base substrate 51. The mounting plate 53 is provided with through holes 53g for exposing the positioning members 54. The positioning members 54 are members used by external devices such as a transport device or a processing device to position the panel storage container 1 (container body 2). The positioning members 54 are V-shaped plates. The positioning members 54 are fitted into mounting holes in the base substrate 51 so as to be recessed (upward) toward the bottom plate 22. A V-shaped groove is defined by the V-shaped surfaces of the positioning members 54. The V-shaped surfaces are subjected to a wear-resistant surface treatment. The panel storage container 1 includes three positioning members 54.

[0061] The air intake valve 55 and the exhaust valve 56 are used to maintain cleanliness and low humidity inside the panel housing container 1 (internal space V). The air intake valve 55 is a mechanism for supplying gas to the internal space V. The air intake valve 55 is a check valve configured to allow gas to flow into the internal space V while preventing gas from flowing out of the internal space V. When the air intake valve 55 is connected to the air intake pipe 105, the air intake valve 55 opens when the gas pressure in the air intake pipe 105 is higher than the gas pressure in the internal space V by a predetermined pressure or more. The air intake valve 55 is attached to the air intake port 22a while being inserted through the through hole 51h. The air intake device 101 can be connected to the air intake port 22a via the air intake valve 55. In this embodiment, the panel housing container 1 includes two air intake valves 55. The two air intake valves 55 are provided so as to be exposed from the two through holes 51h, respectively.

[0062] The exhaust valve 56 is a mechanism for discharging gas from the internal space V. The exhaust valve 56 is a check valve configured to allow gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 56 is connected to the exhaust pipe 106, the exhaust valve 56 opens if the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure or more. The exhaust valve 56 is attached to the exhaust port 22b while being inserted through the through hole 51j. The exhaust device 102 can be connected to the exhaust port 22b via the exhaust valve 56. In this embodiment, the panel housing container 1 includes two exhaust valves 56. The two exhaust valves 56 are provided so as to be exposed from the two through holes 51j, respectively.

[0063] At the corners of the container body 2, cover members 37 for preventing particles from entering the internal space V are provided.

[0064] Next, the internal structure of the container body 2 will be described with reference to Fig. 5. Fig. 5 is a cross-sectional view taken along line VV in Fig. 2. As shown in Fig. 5, the panel storage container 1 includes a plurality of support members 61, a plurality of support members 62, a plurality of struts 63, a plurality of holders 64, and a plurality of side plates 65.

[0065] Each support member 61 is a portion for supporting the center portion of the panel in the left-right direction. Each support member 61 includes a shaft 61a and a plurality of elastic bodies 61b. Each support member 62 is a portion for supporting the end portion of the panel in the left-right direction. Each support member 62 includes a shaft 62a, a plurality of elastic bodies 62b, a stopper 62c, and a stopper 62d.

[0066] The shafts 61a and 62a are columnar (e.g., cylindrical) members extending in the front-to-rear direction. The rear end of the shaft 61a is fixed to the support column 26b. The rear end of the shaft 62a is fixed to the support column 26c. The shafts 61a and 62a are made of, for example, a material with high bending rigidity. Examples of materials that the shafts 61a and 62a are made of include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the shaft 62a in the front-to-rear direction is slightly longer than the length of the panel in the front-to-rear direction, but longer than the length of the shaft 61a in the front-to-rear direction.

[0067] Each elastic body 61b is an annular (e.g., annular) member provided on the outer circumferential surface of the shaft 61a around the axis of the shaft 61a. Each elastic body 62b is an annular (e.g., annular) member provided on the outer circumferential surface of the shaft 62a around the axis of the shaft 62a. The elastic bodies 61b, 62b are provided to suppress panel slippage and improve panel positioning accuracy. The elastic bodies 61b, 62b are made of, for example, a rubber material. Examples of rubber materials include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The multiple elastic bodies 61b are arranged at regular intervals in the extension direction of the shaft 61a. The multiple elastic bodies 62b are arranged at regular intervals in the extension direction of the shaft 62a.

[0068] The stopper 62c is a member for determining the position of the rear end of the panel. The stopper 62c is made of, for example, the resin material described above. The stopper 62c is provided at the rear end of the shaft 62a. The stopper 62c has a block shape. The stopper 62c has an insertion hole for inserting the shaft 62a in the front-rear direction.

[0069] The stopper 62d is a member that prevents the panel from popping out and determines the position of the front end of the panel. The stopper 62d is made of, for example, the resin material described above. The stopper 62d is provided at the front end of the shaft 62a.

[0070] The number of support members 61 and support members 62 varies depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel storage container 1 includes one support member 61 and two support members 62 per panel. In other words, one support member 61 and two support members 62 form a storage stage that stores one panel. In the left-right direction, one support member 61 is arranged between two support members 62.

[0071] Each support pillar 63 is a member for attaching a holder 64. Each support pillar 63 is a columnar member extending in the vertical direction from the top plate 21 to the bottom plate 22. Each support pillar 63 is made of a metal material such as aluminum or stainless steel. Each support pillar 63 is provided on the inner surface of the side wall 23. In this embodiment, two support pillars 63 are provided on each side wall 23. The two support pillars 63 are aligned in the front-to-rear direction and disposed substantially parallel to each other.

[0072] Each holder 64 is a member that holds (supports) the shaft 62a and supports the left-right end of the panel. In this embodiment, each holder 64 is provided across four storage stages. Three holders 64 are provided in the vertical direction per support column 63. The front surface of each holder 64 abuts against the rear surface of the support column 63, and the holder 64 is fixed to the support column 63 with screws. Therefore, in this embodiment, six holders 64 are provided on each side wall 23.

[0073] Each holder 64 includes mounting portions 64a in the same number as the number of shafts 62a that can be held by the holder 64. In this embodiment, each holder 64 includes four mounting portions 64a. Each mounting portion 64a is a portion on which an end portion of a panel in the left-right direction is placed and which holds a shaft 62a. Each mounting portion 64a protrudes in the left-right direction toward the internal space V. Each mounting portion 64a has an insertion hole that penetrates the mounting portion 64a in the front-rear direction, and the shaft 62a is inserted through the insertion hole.

[0074] Each side plate 65 is a member for attaching the support column 63. Each side plate 65 is a plate-shaped member extending in the vertical direction. Each side plate 65 is made of a metal material such as aluminum or stainless steel. Each side plate 65 is provided on the outer surface of the side wall 23. In this embodiment, two side plates 65 are provided on each side wall 23. The two side plates 65 are aligned in the front-to-rear direction and disposed substantially parallel to each other. One side plate 65 is provided near the center of the side wall 23 in the front-to-rear direction, and the other side plate 65 is provided near the front end of the side wall 23 in the front-to-rear direction.

[0075] Next, the positional relationship between each valve and each pipe joint will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view taken along line VI-VI in Fig. 3.

[0076] As shown in FIG. 6, the intake valve 34 protrudes forward from the front surface 31a. The tip 34a of the intake valve 34 is located rearward of the front surface of the cover member 32 and rearward of the front end surface 25a of the flange 25. That is, the tip 34a of the intake valve 34 is closer to the internal space V than the front end surface 25a of the flange 25. Similarly, the exhaust valve 35 protrudes forward from the front surface 31a. The tip 35a of the exhaust valve 35 is located rearward of the front surface of the cover member 32 and rearward of the front end surface 25a of the flange 25. That is, the tip 35a of the exhaust valve 35 is closer to the internal space V than the front end surface 25a of the flange 25. Similarly, the pipe fitting 36 (see FIG. 2) protrudes forward from the front surface 31a. The tip of the pipe fitting 36 is located rearward of the front surface of the cover member 32 and rearward of the front end surface 25a of the flange 25. That is, the tip of the pipe joint 36 is closer to the internal space V than the front end surface 25 a of the flange 25 .

[0077] As described above, the intake valve 28, the exhaust valve 29 (see FIG. 3), and the pipe fitting 30 are each embedded in the rear wall 24. The leading end 28a (rear end) of the intake valve 28 protrudes slightly rearward from the rear wall 24, but extends to a position substantially coincident with the rear end 37a of the cover member 37 in the front-to-rear direction. Similarly, the leading end 29a (rear end) of the exhaust valve 29 protrudes slightly rearward from the rear wall 24, but extends to a position substantially coincident with the rear end 37a of the cover member 37 in the front-to-rear direction. Similarly, the leading end 30a (rear end) of the pipe fitting 30 protrudes slightly rearward from the rear wall 24, but extends to a position substantially coincident with the rear end 37a of the cover member 37 in the front-to-rear direction. In other words, the leading ends 28a, 29a, and 30a are located on the same plane as the rear end of the cover member 37, which is perpendicular to the front-to-rear direction.

[0078] Next, the flow of gas in the panel housing container 1 will be described with reference to Figure 7. Figure 7 is a diagram schematically illustrating the flow of gas in the panel housing container shown in Figure 1. Figure 7 shows flows FL1, FL2, FL3, FL4, FL5, and FL6. Flow FL1 is the flow of gas supplied to intake valve 55. Flow FL2 is the flow of gas supplied to intake valve 28. Flow FL3 is the flow of gas supplied to intake valve 34. Flow FL4 is the flow of gas discharged from exhaust valve 56. Flow FL5 is the flow of gas discharged from exhaust valve 29. Flow FL6 is the flow of gas discharged from exhaust valve 35.

[0079] The air intake device 101 is selectively connected to one or more of the air intake valves 28, 34, and 55 via an air intake pipe 105, and the exhaust device 102 is selectively connected to one or more of the exhaust valves 29, 35, and 56 via an exhaust pipe 106. This selectively realizes the gas flow shown in Fig. 7.

[0080] Next, a method for cleaning the panel storage container 1 will be described. First, a preparation step is carried out. In the preparation step, the panel storage container 1 to be cleaned is prepared. Then, an air supply device 101, an exhaust device 102, a barometer 104, and a particle counter 103 are connected to the panel storage container 1.

[0081] In this embodiment, the panel housing container 1 has air intake valves 28, 34, and 55 as valves capable of supplying gas to the internal space V, and an air intake device 101 is connected to at least one of these air intake valves via an air intake pipe 105. Similarly, in this embodiment, the panel housing container 1 has exhaust valves 29, 35, and 56 as valves capable of discharging gas from the internal space V, and an exhaust device 102 is connected to at least one of these exhaust valves via an exhaust pipe 106. In this embodiment, the panel housing container 1 has pipe joints 30 and 36 as pipe joints for measurement, and a barometer 104 is connected to at least one of these pipe joints via a pipe 108. Furthermore, a particle counter 103 is connected to the exhaust pipe 106 via a pipe 107. In the following description, a case where the exhaust device 102 is connected to the intake valve 28, the exhaust device 102 is connected to the exhaust valve 35, and the pressure gauge 104 is connected to the pipe joint 36 will be exemplified.

[0082] Next, a cleaning process is carried out to clean the internal space V. In the cleaning process, first, the barometer 104 is activated and measurement is started. Then, the air supply device 101 is set to obtain a desired air supply flow rate and air supply is started, and the exhaust device 102 is set to obtain a desired exhaust flow rate and exhaust is started. The particle counter 103 is activated together with the exhaust device 102 and measurement is started. The air supply flow rate and the exhaust flow rate are set so that the air pressure in the internal space V maintains a positive pressure. Positive pressure means a state in which the air pressure in the internal space V is higher than the air pressure outside the container body 2. The exhaust flow rate is, for example, the sum of the exhaust flow rate by the exhaust device 102 and the exhaust flow rate by the particle counter 103. For example, the air supply flow rate is set to a value higher than the exhaust flow rate.

[0083] As a result, as shown in flow FL2 in Fig. 7, gas (CDA) is supplied from the gas supply device 101 to the internal space V via the gas supply pipe 105 and the gas supply valve 28. The gas supplied from the gas supply device 101 blows off particles adhering to the components in the internal space V. Then, as shown in flow FL6 in Fig. 7, the blown-off particles are exhausted together with the gas from the internal space V via the exhaust valve 35 and the exhaust pipe 106.

[0084] When the panel storage container 1 is viewed from the front, the air intake valve 28 is provided in the lower left corner of the rear wall 24, and the exhaust valve 35 is provided in the upper right corner of the lid body 31. Therefore, gas is supplied from the lower left rear of the internal space V and exhausted from the upper right front of the internal space V. This allows the gas to spread widely throughout the internal space V. This allows particles to be efficiently exhausted.

[0085] In this example, the supply air flow rate is set to a value greater than the exhaust air flow rate, so the air pressure in the internal space V becomes positive. This reduces the possibility of particles entering the internal space V from outside the container body 2. When the internal space V is in a positive pressure state, gas can also be exhausted from the exhaust valve 56 and the exhaust valve 29. In this case, the gas flows along the flows FL4 and FL5 in addition to the flows FL2 and FL6.

[0086] Next, it is determined whether or not a termination condition, which is a condition for terminating the cleaning of the internal space V, has been satisfied. Here, the termination condition is exemplified as the count value of the particle counter 103 falling below a preset target value. If the count value output from the particle counter 103 is greater than the target value, it is determined that the termination condition has not been satisfied, and the cleaning process is continued until the termination condition is satisfied.

[0087] On the other hand, if the count value output from the particle counter 103 is smaller than the target value, it is determined that the termination condition is met and the cleaning process is terminated. Then, the operations of the air supply device 101, the exhaust device 102, the barometer 104, and the particle counter 103 are stopped, and the air supply device 101, the exhaust device 102, the barometer 104, and the particle counter 103 are removed from the panel storage container 1.

[0088] This completes the series of steps in the cleaning method.

[0089] In the panel storage container 1, cleaning system 100, and cleaning method for the panel storage container 1 described above, multiple panels are stored in the container body 2 in a stacked state with gaps between them in the vertical direction. The lid 3 is provided with through-holes 3b and 3c, and the rear wall 24 is provided with through-holes 24b and 24c. The through-holes 3b, 3c, 24b, and 24c face the peripheral edge surfaces of the panels and are not covered by the panels. Gas supplied to the internal space V through the through-holes 3c and 24c flows while avoiding the panels. Gas exhausted from the internal space V through the through-holes 3b and 24b flows while avoiding the panels. As described above, gas supplied or exhausted through the through-holes 3b, 3c, 24b, and 24c flows while avoiding the panels, making it easier for the gas to spread throughout the entire internal space V. As a result, the cleaning efficiency of the internal space V can be improved.

[0090] For example, when gas is supplied to the internal space V through the through hole 3c and exhausted from the internal space V through the through hole 24b, the gas flows from the through hole 3c toward the through hole 34b, bypassing the panel. When gas is supplied to the internal space V through the through hole 24c and exhausted from the internal space V through the through hole 3b, the gas flows from the through hole 24c toward the through hole 3b, bypassing the panel. This makes it easier for the gas to spread throughout the entire internal space V. As a result, the cleaning efficiency of the internal space V can be improved.

[0091] The through holes 3c and the through holes 24b are arranged along a diagonal line of the panel housing container 1. Similarly, the through holes 3b and the through holes 24c are arranged along a diagonal line of the panel housing container 1. Therefore, the distance between the through holes used as air inlets and the through holes used as air outlets can be increased, making it easier for gas to spread throughout the entire internal space V. As a result, the cleaning efficiency of the internal space V can be further improved.

[0092] The intake valve 28, exhaust valve 29, and pipe joint 30 are each embedded in the rear wall 24. The amount of protrusion of these valves and pipe joints is small compared to a configuration in which these valves and pipe joints are provided so as to protrude rearward from the rear wall 24. The SEMI standard specifies the maximum value of the overall length of the panel housing container 1 in the front-to-rear direction, so it is possible to comply with the SEMI standard without reducing the capacity of the container body 2.

[0093] For example, when the panel storage container 1 is placed on a panel transfer device (load port), the front end of the panel storage container 1 may come into contact with the panel transfer device in order for the panel transfer device to operate the panel storage container 1. In the panel storage container 1, the front end surface 25a of the flange 25 is located forward of the tip 34a of the air inlet valve 34, the tip 35a of the exhaust valve 35, and the tip 36a of the pipe joint 36, thereby reducing the possibility that the air inlet valve 34, the exhaust valve 35, and the pipe joint 36 will come into contact with the panel transfer device. This reduces the possibility that the air inlet valve 34, the exhaust valve 35, and the pipe joint 36 will interfere with and be damaged by the panel transfer device.

[0094] The particle counter 103 counts particles contained in the gas discharged from the internal space V. In the cleaning process, the particles contained in the gas discharged from the internal space V are counted. It can be said that the amount of particles contained in the gas discharged from the internal space V is correlated with the amount of particles contained in the internal space V. Therefore, the count value of the particle counter can be used to estimate the cleanliness of the internal space. Therefore, when the count value falls below a target value, it can be determined that the internal space V has been sufficiently cleaned, and the cleaning can be terminated.

[0095] For example, if the barometer 104 and the exhaust device 102 are connected to the same exhaust port, the pressure of the gas exhausted from the exhaust port may be increased by the exhaust device 102, causing the pressure to deviate from the air pressure in the internal space V. In the panel storage container 1, the barometer 104 is connected to the through hole 3a or the through hole 24a. With this configuration, the barometer 104 is connected to the through hole 3a or the through hole 24a that is different from the exhaust port, and therefore it is possible to reduce air pressure measurement errors caused by the exhaust device 102. For example, if a display device (not shown) displays the measurement value of the barometer 104, the operator can more accurately grasp the air pressure in the internal space V.

[0096] In the cleaning process, the supply air flow rate and the exhaust air flow rate are controlled so that the air pressure in the internal space V is maintained at a positive pressure. When the air pressure in the internal space V is a positive pressure, the possibility of particles entering the internal space V from outside the container body 2 is reduced. Therefore, the cleaning efficiency of the internal space V can be improved.

[0097] Next, a panel storage container according to a modified example will be described with reference to Fig. 8. Fig. 8 is a partially enlarged cross-sectional view of the panel storage container according to the modified example. As shown in Fig. 8, the panel storage container 1A according to the modified example differs from the panel storage container 1 mainly in the manner in which the air intake valve 28, the exhaust valve 29, and the pipe joint 30 are attached.

[0098] In the panel storage container 1A, the air intake valve 28, the exhaust valve 29, and the pipe joint 30 protrude rearward from the rear wall 24. The tip 28a of the air intake valve 28, the tip 29a of the exhaust valve 29, and the tip 30a of the pipe joint 30 are each located rearward of the rear end 37a of the cover member 37. For example, when the panel storage container 1 is placed on a panel transfer device (load port), the air intake valve 28, the exhaust valve 29, and the pipe joint 30 do not come into contact with the panel transfer device, and therefore the air intake valve 28, the exhaust valve 29, and the pipe joint 30 do not interfere with the panel transfer device.

[0099] The panel storage container, cleaning system, and cleaning method according to the present disclosure are not limited to the above-described embodiments.

[0100] The panel storage container 1 may be a FOSB (Front Opening Shipping Box) used to transport panels (substrates) between factories.

[0101] At least one of the through holes 3a and 24a may not be provided.

[0102] It is sufficient that at least one of the through holes 3b, 3c, 24b, and 24c is provided in the panel storage container 1. For example, if at least one of the through holes 3b and 3c is provided and neither of the through holes 24b nor 24c is provided, there is no need to form a through hole in the rear wall 24. Therefore, of the components of a conventional panel storage container, it is only necessary to change the design of the lid, and the panel storage container 1 can be easily manufactured.

[0103] Each of the through holes 3a, 3b, 3c, 24a, 24b, and 24c may be used as an air inlet, an exhaust port, or a measurement port. A valve or a pipe joint is attached to each through hole depending on its function.

[0104] When a through-hole is provided in the cover 3 and a through-hole is not provided in the rear wall 24, the air inlet valve 34 and the exhaust valve 35 may be arranged along a diagonal line of the cover 3. Similarly, when a through-hole is provided in the rear wall 24 and a through-hole is not provided in the cover 3, the air inlet valve 28 and the exhaust valve 29 may be arranged along a diagonal line of the rear wall 24.

[0105] The positions at which the through holes 3a, 3b, and 3c are provided are not limited to the positions shown in Fig. 2. The through holes 3a, 3b, and 3c may be provided at any position on the front surface 31a that is not covered by the cover member 32.

[0106] The positions at which the through-holes 24a, 24b, and 24c are provided are not limited to the positions shown in Fig. 3. The through-holes 24a, 24b, and 24c may be provided at any position on the rear wall 24 as long as they do not interfere with the frame body 26.

[0107] The tip 34 a of the intake valve 34 , the tip 35 a of the exhaust valve 35 , and the tip 36 a of the pipe joint 36 may be located forward of the front end surface 25 a of the flange 25 .

[0108] Air intake pipe 105 may be connected to two or more of air intake valves 28, 34, and 55. In this case, air intake pipe 105 may have branch pipes connecting each air intake valve to air intake device 101, and each branch pipe may be provided with a valve. With this configuration, an operator can select through which air intake valve 28, 34, or 55 gas will be supplied to internal space V by opening or closing the valve provided on each branch pipe.

[0109] Similarly, the exhaust pipe 106 may be connected to two or more of the exhaust valves 29, 35, and 56. In this case, the exhaust pipe 106 may have branch pipes connecting each exhaust valve to the exhaust device 102, and each branch pipe may be provided with a valve. With this configuration, an operator can select through which of the exhaust valves 29, 35, and 56 gas is discharged from the internal space V by opening and closing the valves provided on each branch pipe. When the exhaust pipe 106 is connected to two or more of the exhaust valves 29, 35, and 56, the exhaust pipe 106 may include branch pipe sections connected to the exhaust valves, the number of which is equal to the number of exhaust valves to which the exhaust pipe 106 is connected, and a main pipe section to which all the branch pipe sections converge. In this case, the particle counter 103 may be connected to the main pipe section via piping 107. Alternatively, the cleaning system 100 may include particle counters 103 in the same number as the exhaust valves to which the exhaust pipe 106 is connected, and the particle counters 103 may be connected to each branch pipe portion via piping.

[0110] The air supply device 101, the exhaust device 102, the particle counter 103, and the barometer 104 may be integrated into a cleaning device.

[0111] When gas is supplied to the internal space V by the gas supply device 101, the air pressure in the internal space V becomes higher than the air pressure outside the container body 2, and the gas can be naturally discharged from each exhaust valve. Therefore, the cleaning system 100 does not need to include the exhaust device 102.

[0112] The cleaning system 100 does not need to include the barometer 104. Even in this case, the air pressure in the internal space V can be calculated from the intake air flow rate of the air intake device 101, the exhaust air flow rate of the exhaust device 102, the elapsed time since the start of operation of the air intake device 101, and the elapsed time since the start of operation of the exhaust device 102. In this case, neither of the through holes 3a nor 24a needs to be provided.

[0113] The cleaning system 100 does not necessarily have to include the particle counter 103. In this case, for example, the end condition for the cleaning process may be that the elapsed time from the start of cleaning reaches a preset time.

[0114] In the cleaning process, if the count value of the particle counter 103 is equal to or greater than a predetermined value after a predetermined time (e.g., 5 minutes) has elapsed since the start of air supply and exhaust, it may be determined that the internal space V of the panel storage container 1 needs to be washed with water.

[0115] (Addendum) [Article 1] a container body having an internal space for storing a plurality of panels stacked vertically at intervals from one another, and an opening; a lid that closes the opening; Equipped with The container body is a bottom plate defining a lower end of the internal space; a rear wall that faces the lid body in a front-rear direction intersecting with the up-down direction when the lid body closes the opening and defines a rear end of the internal space; a first check valve attached to an air supply port provided in the bottom plate and preventing gas from flowing out of the internal space; a second check valve attached to an exhaust port provided in the bottom plate and preventing gas from flowing into the internal space; a third check valve attached to a through-hole provided in one of the lid body and the rear wall; and The third check valve prevents one of gas from flowing out of the interior space and gas from flowing into the interior space.

[0116] [Clause 2] the through hole is a first through hole provided in the lid, The rear wall is provided with a second through hole, The panel storage container described in clause 1, wherein the container body has a fourth check valve attached to the second through hole to prevent the other of gas from flowing out of the internal space and gas from flowing into the internal space.

[0117] [Article 3] 3. The panel enclosure of claim 2, wherein the fourth check valve is embedded in the rear wall.

[0118] [Article 4] the through-hole is provided in the lid, the container body has a flange that defines the opening; The lid body has a first surface facing the internal space and a second surface opposite to the first surface, the third check valve protrudes forward from the second surface, The panel storage container according to any one of clauses 1 to 3, wherein a front end of the third check valve is closer to the internal space than a front end face of the flange.

[0119] [Article 5] A panel storage container according to any one of clauses 1 to 4, an air supply device that supplies gas to the internal space through the through hole, The third check valve prevents gas from escaping from the interior space.

[0120] [Article 6] A panel storage container according to any one of clauses 1 to 4, an air supply device that supplies gas to the internal space through the air supply port; an exhaust device that exhausts gas from the internal space through the through hole, The third check valve prevents gas from entering the interior space.

[0121] [Article 7] The cleaning system according to clause 5 or 6, further comprising a particle counter that counts particles contained in the gas discharged from the internal space.

[0122] [Article 8] Further provided is a barometer for measuring the air pressure in the internal space, The cleaning system according to any one of clauses 5 to 7, wherein the cover or the rear wall is provided with a measurement port to which the barometer is connected.

[0123] [Article 9] A cleaning method for cleaning a panel storage container having an internal space for storing a plurality of panels stacked vertically at intervals from one another, a container body having an opening, and a lid body for closing the opening, comprising: providing the panel container; cleaning the interior space; Including, The container body is a bottom plate defining a lower end of the internal space; a rear wall that faces the lid body in a front-rear direction intersecting with the up-down direction when the lid body closes the opening and defines a rear end of the internal space; a first check valve attached to an air supply port provided in the bottom plate and preventing gas from flowing out of the internal space; a second check valve attached to an exhaust port provided in the bottom plate and preventing gas from flowing into the internal space; a third check valve attached to a through-hole provided in one of the lid body and the rear wall; and the third check valve prevents one of gas from flowing out of the internal space and gas from flowing into the internal space; In the step of cleaning the internal space, When the third check valve prevents gas from flowing out of the internal space, gas is supplied through the through hole, A cleaning method, wherein when the third check valve prevents gas from flowing into the internal space, gas is discharged through the through hole.

[0124] [Article 10] the through hole is a first through hole provided in the lid, The rear wall is provided with a second through hole, the container body has a fourth check valve attached to the second through hole and configured to prevent the other of gas from flowing out from the internal space and gas from flowing into the internal space; In the step of cleaning the internal space, When the fourth check valve prevents gas from flowing in from the internal space, gas is supplied through the first through-hole and discharged through the second through-hole, Item 10. The cleaning method according to Item 9, wherein when the fourth check valve prevents gas from flowing out of the internal space, gas is supplied through the second through-hole and gas is discharged through the first through-hole.

[0125] [Article 11] 11. The cleaning method according to claim 9 or 10, wherein in the step of cleaning the internal space, a flow rate of the gas supplied to the internal space or a flow rate of the gas discharged from the internal space is controlled so that the air pressure in the internal space is maintained at a positive pressure.

[0126] [Article 12] The cleaning method according to any one of clauses 9 to 11, wherein in the step of cleaning the internal space, particles contained in the gas discharged from the internal space are counted. [Explanation of symbols]

[0127] 1...panel storage container, 2...container body, 2a...opening, 3...lid body, 3a...through hole (measurement port), 3b, 3c...through holes (first through holes), 22...bottom plate, 24...rear wall, 24a...through hole (measurement port), 24b, 24c...through holes (second through holes), 25...flange, 25a...front end face (end face), 28...air supply valve (fourth check valve), 29...exhaust valve (fourth check valve) check valve), 31a...front surface (second surface), 31b...back surface (first surface), 34...air intake valve (third check valve), 35...exhaust valve (third check valve), 55...air intake valve (first check valve), 56...exhaust valve (second check valve), 100...purification system, 101...air intake device, 102...exhaust device, 103...particle counter, 104...barometer, V...internal space.

Claims

1. a container body having an internal space for storing a plurality of panels stacked vertically at intervals from one another, and an opening; a lid that closes the opening; Equipped with The container body is a bottom plate defining a lower end of the internal space; a rear wall that faces the lid body in a front-rear direction intersecting with the up-down direction when the lid body closes the opening and defines a rear end of the internal space; a first check valve attached to an air supply port provided in the bottom plate and preventing gas from leaking from the internal space; a second check valve attached to an exhaust port provided in the bottom plate and preventing gas from flowing into the internal space; a third check valve attached to a through-hole provided in one of the cover body and the rear wall; and The third check valve prevents one of gas from flowing out of the interior space and gas from flowing into the interior space.

2. the through hole is a first through hole provided in the lid, A second through hole is provided in the rear wall, The panel storage container according to claim 1 , wherein the container body has a fourth check valve attached to the second through-hole to prevent the other of gas from flowing out from the internal space and gas from flowing into the internal space.

3. The panel housing container according to claim 2 , wherein the fourth check valve is embedded in the rear wall.

4. the through-hole is provided in the lid, the container body has a flange that defines the opening; The lid body has a first surface facing the internal space and a second surface opposite to the first surface, the third check valve protrudes forward from the second surface, The panel storage container according to any one of claims 1 to 3, wherein a front end of the third check valve is closer to the internal space than a front end surface of the flange.

5. The panel storage container according to any one of claims 1 to 3, an air supply device that supplies gas to the internal space through the through hole, The third check valve prevents gas from escaping from the interior space.

6. The panel storage container according to any one of claims 1 to 3, an air supply device that supplies gas to the internal space through the air supply port; an exhaust device that exhausts gas from the internal space through the through hole, The third check valve prevents gas from entering the interior space.

7. The cleaning system according to claim 5 , further comprising a particle counter that counts particles contained in the gas discharged from the internal space.

8. Further provided is a barometer for measuring the air pressure in the internal space, The cleaning system according to claim 5 , wherein the cover or the rear wall is provided with a measurement port to which the barometer is connected.

9. A cleaning method for cleaning a panel storage container having an internal space for storing a plurality of panels stacked vertically at intervals from one another, a container body having an opening, and a lid body for closing the opening, comprising: providing the panel container; cleaning the interior space; Including, The container body is a bottom plate defining a lower end of the internal space; a rear wall that faces the lid body in a front-rear direction intersecting with the up-down direction when the lid body closes the opening and defines a rear end of the internal space; a first check valve attached to an air supply port provided in the bottom plate and preventing gas from leaking from the internal space; a second check valve attached to an exhaust port provided in the bottom plate and preventing gas from flowing into the internal space; a third check valve attached to a through-hole provided in one of the cover body and the rear wall; and the third check valve prevents one of gas from flowing out of the internal space and gas from flowing into the internal space; In the step of cleaning the internal space, When the third check valve prevents gas from flowing out of the internal space, gas is supplied through the through hole, When the third check valve prevents gas from flowing into the internal space, the gas is discharged through the through hole.

10. the through hole is a first through hole provided in the lid, A second through hole is provided in the rear wall, the container body has a fourth check valve attached to the second through-hole and configured to prevent the other of gas from flowing out from the internal space and gas from flowing into the internal space; In the step of cleaning the internal space, When the fourth check valve prevents gas from flowing in from the internal space, gas is supplied through the first through-hole and discharged through the second through-hole, 10. The cleaning method according to claim 9, wherein when the fourth check valve prevents gas from flowing out of the internal space, gas is supplied through the second through-hole and gas is discharged through the first through-hole.

11. 11. The cleaning method according to claim 9 or 10, wherein in the step of cleaning the internal space, a flow rate of the gas supplied to the internal space or a flow rate of the gas exhausted from the internal space is controlled so that the air pressure in the internal space is maintained at a positive pressure.

12. 11. The cleaning method according to claim 9, wherein in the step of cleaning the internal space, particles contained in the gas discharged from the internal space are counted.

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