Detection device

Abstract

To provide a technique capable of separating expansion / contraction strain and bending strain.SOLUTION: A detection device includes a flexible substrate and a bridge circuit disposed in the substrate. In the bridge circuit, a first resistance element, a second resistance element, a third resistance element, and a fourth resistance element are connected in this order in series in a closed loop shape. The first resistance element is a stretchable resistance element in which a first portion and a second portion are connected in series. The second resistance element, the third resistance element, and the fourth resistance element are non-stretchable resistance elements. The first portion and the second portion of the first resistance element are provided in different layers of the substrate, overlap in a length direction in plan view, and are arranged in parallel.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a detection device. [Background technology]

[0002] A strain gauge having a Wheatstone bridge circuit is proposed, for example, in Japanese Patent Application Laid-Open No. 2019-90723. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-90723 Summary of the Invention [Problem to be solved by the invention]

[0004] Stretchable devices are required to respond to complex movements such as not only bending but also expansion, contraction, and twisting. When a stretchable sensor is attached to the human body (for example, the back of the hand) to sense skin movement, the sensor sees both expansion and contraction strain signals in the amplifier output. If you want to detect only expansion and contraction strain, you need to cancel the bending strain component from the detection signal.

[0005] An object of the present disclosure is to provide a technology that can distinguish between expansion and contraction strain and bending strain.

[0006] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0007] A brief summary of the representative aspects of the present invention is as follows.

[0008] That is, the detection device is a flexible substrate; a bridge circuit disposed within the substrate; the bridge circuit includes a first resistor element, a second resistor element, a third resistor element, and a fourth resistor element connected in series in this order in a closed loop; The first resistance element is an elastic resistance element in which a first portion and a second portion are connected in series, the second resistance element, the third resistance element, and the fourth resistance element are non-elastic resistance elements; The first portion and the second portion of the first resistor element are provided on different layers of the substrate, and are arranged parallel to each other and overlap each other in the length direction in a plan view. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view of a detection device according to an embodiment and an enlarged view of one strain sensor. [Figure 2] FIG. 2 is a schematic plan view of one strain sensor of FIG. [Figure 3] FIG. 3 is a circuit diagram of one strain sensor of FIG. [Figure 4] FIG. 4 is a schematic cross-sectional view of one strain sensor of FIG. [Figure 5] FIG. 5 is a diagram illustrating an example of the configuration of the stretchable area. [Figure 6] FIG. 6 is a diagram illustrating an example of the configuration of the stretchable area. [Figure 7] FIG. 7 is a schematic diagram illustrating the state of the first resistor element. [Figure 8] FIG. 8 is a circuit diagram of a strain sensor illustrating the tensile strain state. [Figure 9] FIG. 9 is a circuit diagram of a strain sensor illustrating the bending strain state. [Figure 10] FIG. 10 is a block diagram of a detection circuit according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0011] It should be noted that the disclosure is merely an example, and any appropriate modifications that a person skilled in the art can easily conceive while maintaining the gist of the disclosure are naturally included within the scope of the disclosure. In addition, in order to clarify the explanation, the drawings may show the width, thickness, shape, etc. of each part schematically compared to the actual embodiment, but these are merely examples and do not limit the interpretation of the disclosure.

[0012] Furthermore, in this specification and each drawing, elements similar to those previously described with respect to the previous drawings are given the same reference numerals, and detailed descriptions thereof may be omitted as appropriate.

[0013] (Embodiment) Fig. 1 is a plan view of a detection device according to an embodiment and an enlarged view of one strain sensor. Fig. 2 is a schematic plan view of one strain sensor in Fig. 1. Fig. 3 is a circuit diagram of one strain sensor in Fig. 1. Fig. 4 is a schematic cross-sectional view of one strain sensor in Fig. 1.

[0014] 1, the detection device 1 includes a support substrate SUB as a sensor panel, a sensor unit 2 arranged on the support substrate SUB, and a flexible circuit board FPC on which 00273 is provided. The support substrate SUB may also be referred to as a sensor substrate.

[0015] The support substrate SUB is made of a flexible substrate that is rectangular in plan view. As a result, the support substrate SUB bends flexibly when subjected to external force, and can be attached to the human body (for example, the back of the hand) to sense the movement of the skin, and can be brought into close contact with the skin. In this example, the support substrate SUB has, for example, a rectangular active area AA, and the sensor unit 2 is arranged in the active area AA. The active area AA is also called the active area AA. The sensor unit 2 has a plurality of strain sensors sen (Xsen, Ysen) arranged in a matrix in a first direction X and a second direction Y intersecting the first direction X. In this example, the plurality of strain sensors sen (Xsen, Ysen) includes a plurality of first direction sensors Xsen and a plurality of second direction sensors Ysen. The plurality of first direction sensors Xsen are configured to detect, for example, expansion and contraction of the support substrate SUB along the first direction X. The plurality of second direction sensors Ysen are configured to detect, for example, expansion and contraction of the support substrate SUB along the second direction Y.

[0016] The detection circuit 3 is configured to receive a plurality of detection values ​​composed of a plurality of analog sensing signals that indicate expansion and contraction of the support substrate SUB sensed by a plurality of first direction sensors Xsen and a plurality of second direction sensors Ysen. The detection circuit 3 is configured to calculate and output a plurality of digital sensing data that indicate, for example, expansion and contraction of the support substrate SUB based on the plurality of detection values. The detection circuit 3 is also configured to calculate and output a plurality of detection coordinates corresponding to the plurality of digital sensing data as digital coordinate value data. In this way, the host processor HOST that receives the plurality of digital sensing data and the digital coordinate value data can detect the movement of the skin from the data on expansion and contraction of the support substrate SUB.

[0017] An enlarged view of one second direction sensor Ysen is shown in Figure 1. Note that the first direction sensor Xsen is configured by rotating the second direction sensor Ysen by 90 degrees to the right or left, so the second direction sensor Ysen will be described here as a representative example.

[0018] The second direction sensor Ysen includes an elastic area (also called an elastic portion) ARE and a non-elastic area (also called a non-elastic portion) ARNE, which are arranged along the second direction Y. The longitudinal direction (length direction) of the elastic area ARE is the second direction Y in the case of the second direction sensor Ysen, and is the first direction X in the case of the first direction sensor Xsen. When the support substrate SUB is stretched in the first direction X or the second direction Y, tensile strain occurs in the elastic portion ARE on the active area AA. On the other hand, even when the support substrate SUB is stretched in the first direction X or the second direction Y, the non-elastic portion ARNE is hardly deformed in the first direction X or the second direction Y.

[0019] A gauge resistance element RG is formed in the stretchable area ARE as the first resistance element R1. In this example, the stretchable area ARE has a bellows-like shape in a plan view. The gauge resistance element RG has a bellows-like shape in a plan view and constitutes a stretchable resistance element. When no strain is applied to the stretchable area ARE, that is, when no strain is applied to the gauge resistance element RG, the gauge resistance element RG has a resistance value RG0. On the other hand, when the stretchable area ARE is stretched, that is, when the gauge resistance element RG is stretched, the gauge resistance element RG has a resistance value RG0+ΔR that is larger than the resistance value RG0 ((RG0+ΔR)>RG0). When the stretchable area ARE is compressed, that is, when the gauge resistance element RG is compressed, the gauge resistance element RG has a resistance value RG0-ΔR that is smaller than the resistance value RG0 ((RG0-ΔR) <RG0)。

[0020] The non-stretchable area ARNE is formed with a second resistor R2, a third resistor R3, and a fourth resistor R4, which together with the gauge resistor RG form a bridge circuit BRC. The second resistor R2, the third resistor R3, and the fourth resistor R4 can be considered reference resistors. The resistance value RR0 of each of the second resistor R2, the third resistor R3, and the fourth resistor R4 is configured to be the same as the resistance value RG0 of the gauge resistor RG formed in the stretchable area ARE when no strain is applied (RR0 = RG0).

[0021] A schematic plan view of one strain sensor is shown in Figure 2. A circuit diagram of one strain sensor is shown in Figure 3. In Figure 2, because the accordion-like shape of the stretchable area ARE is complex, the shape of the stretchable area ARE is shown schematically as a rectangle to simplify the drawing.

[0022] As shown in Figures 2 and 3, a gauge resistance element RG is formed in the stretchable area ARE as the first resistance element R1. The first resistance element R1 (RG) is divided into a first portion RG1 and a second portion RG2. The first resistance element R1 (RG) is a stretchable resistance element in which the first portion RG1 and the second portion RG2 are connected in series. The first portion RG1 and the second portion RG2 are provided on different layers of the support substrate SUB (see Figure 4), and are arranged parallel and overlapping in the longitudinal direction in a plan view.

[0023] The non-elastic area ARNE has formed therein a second resistor element R2, a third resistor element R3, and a fourth resistor element R4, which are non-elastic resistor elements.

[0024] The first resistor element R1 (RG), which is an elastic resistor element, is bellows-shaped in plan view (see Figure 1). The second resistor element R2, the third resistor element R3, and the fourth resistor element R4, which are non-elastic resistor elements, are straight (linear) in plan view.

[0025] As shown in Figures 2 and 3, the bridge circuit BRC is configured by connecting a first resistor element R1 (RG1, RG2), a second resistor element R2, a third resistor element R3, and a fourth resistor element R4 in series in this order in a closed loop. The bridge circuit BRC has a first node N1 to a fourth node N4. The first node N1 is the connection point between the first resistor element R1 (RG1, RG2) and the second resistor element R2. The second node N2 is the connection point between the second resistor element R2 and the third resistor element R3. The third node N3 is the connection point between the third resistor element R3 and the fourth resistor element R4. The fourth node N4 is the connection point between the fourth resistor element R4 and the first resistor element R1 (RG1, RG2).

[0026] A first wiring LV1 as a first power supply line to which a power supply potential (Power) is applied is connected to a first node N1, and a third wiring LV3 as a second power supply line to which a ground potential (Gnd) is applied is connected to a third node N3, so that a predetermined voltage is applied between the first node N1 and the third node N3.

[0027] Furthermore, the second wiring LV2 as the signal wiring Rxn is connected to the second node N2, the fourth wiring LV4 as the signal wiring Rxn+1 is connected to the fourth node N4, and the detection circuit 3 is connected to the second wiring LV2 and the fourth wiring LV4, thereby enabling the detection circuit 3 to detect a change in the resistance value of the first resistor element R1 (RG1, RG2).

[0028] In other words, in the detection device 1, the bridge circuits BRC provided in the multiple strain sensors sen (Xsen, Ysen) include at least one first bridge circuit BRC provided in the first direction sensor Xsen and at least one second bridge circuit BRC provided in the second direction sensor Ysen. The first resistor element R1 (RG) of the first bridge circuit has a bellows shape that extends entirely in the first direction X. The first resistor element R1 (RG) of the second bridge circuit has a bellows shape that extends entirely in a second direction Y that is different from the first direction X. The signal wirings Rxn (LV2) and Rxn+1 (LV4) are independent for each strain sensor sen (Xsen, Ysen). The first power supply line (LV1) and the second power supply line (LV3) may be common to each strain sensor sen (Xsen, Ysen) or may be independent.

[0029] The detection device 1 of the present disclosure can confirm the amount of expansion or contraction of an object by detecting the potential difference between both ends of a bridge circuit BRC formed by a resistive element R1 (RG) in the stretchable portion ARE and three reference resistive elements (R2, R3, R4) in the non-stretchable portion ARE using an amplifier in the detection circuit 3. In addition, a plurality of first direction sensors Xsen and a plurality of second direction sensors Ysen are present on the active area AA of the sensor unit 2 of the present disclosure, making it a two-axis stretchable sensor.

[0030] Next, a cross-sectional view of the main part (bridge circuit BRC) of the detection device 1 will be described with reference to FIG.

[0031] 4, the support substrate SUB of the detection device 1 includes a base substrate PI made of a polyimide resin or the like, and a first-layer wiring layer (RG2, 10) formed on the main surface of the base substrate PI. The first-layer wiring layer (RG2, 10) includes a second portion RG2 of the first resistor element R1 (RG) and a first-layer metal wiring 10 electrically connected to the second portion RG2. Furthermore, a first insulating film 12 is formed so as to cover a part of the main surface of the base substrate PI, the second portion RG2, and the first-layer metal wiring 10. The first insulating film 12 can be made of, for example, silicon nitride (SiN).

[0032] Two contact holes CH1 and CH2 are formed in the vertical direction in the first insulating film 12. Metal connection wirings 141 and 142 are buried inside the contact holes CH1 and CH2. The connection wirings 141 and 142 are electrically connected to the first-layer metal wiring 10.

[0033] A second wiring layer (RG1, R2, R3, R4, 20) is formed on the main surface of the first insulating film 12. The second wiring layer includes a first portion RG1 of the first resistor R1 (RG), a second resistor R2, a third resistor R3, a fourth resistor R4, and a second-layer metal wiring 20.

[0034] The first portion RG1 of the first resistor R1 (RG) is provided above the second portion RG2. That is, the first portion RG1 and the second portion RG2 are provided in different layers (wiring layers) of the support substrate SUB. The first portion RG1 and the second portion RG2 overlap in the longitudinal direction and are arranged parallel to each other. The second-layer metal wiring 20 connects the first portion RG1, the second resistor R2, the third resistor R3, and the fourth resistor R4 in series in this order. One end 201 of the second-layer metal wiring 20 is electrically connected to one end 101 of the first-layer metal wiring 10 via a connection wiring 141, and the other end 202 of the second-layer metal wiring 20 is electrically connected to the other end 102 of the first-layer metal wiring 10 via a connection wiring 142.

[0035] As a result, the bridge circuit BRC is configured by connecting in series in a closed loop the second part RG2 of the first resistor element R1, one end 101 of the first layer metal wiring 10, the connection wiring 141, one end 201 of the second layer metal wiring 20, the first part RG1 of the first resistor element R1, the second resistor element R2, the third resistor element R3, the fourth resistor element R4, the other end 202 of the second layer metal wiring 20, the connection wiring 142, and the other end 102 of the first layer metal wiring 10 in this order.

[0036] A second insulating film 14 is provided on the main surface of the first insulating film 12 so as to cover the second wiring layer (RG1, R2, R3, R4, 20). Four contact holes CH21, CH22, CH23, and CH24 are provided in the second insulating film 14 in the vertical direction. Metal connection wirings 241, 242, 243, and 244 are buried inside the contact holes CH1 and CH2. The second-layer metal wiring 20 connecting the first portion RG1 and the second resistor element R2 serves as a first node N1, and the connection wiring 241 is electrically connected to the first node N1. The second-layer metal wiring 20 connecting the second resistor element R2 and the third resistor element R3 serves as a second node N2, and the connection wiring 242 is electrically connected to the second node N2. The second-layer metal wiring 20 connecting the third resistor element R3 and the fourth resistor element R4 serves as a third node N3, and the connection wiring 243 is electrically connected to the third node N3. The other end 202 of the second-layer metal wiring 20 serves as a fourth node N4, and the connection wiring 244 is electrically connected to the fourth node N4.

[0037] A third wiring layer (LV1, LV2, LV3, LV4) is formed on the main surface of the second insulating film 14. The first wiring LV1 is electrically connected to a connection wiring 241. The second wiring LV2 is electrically connected to a connection wiring 242. The third wiring LV3 is electrically connected to a connection wiring 243. The fourth wiring LV4 is electrically connected to a connection wiring 244.

[0038] A third insulating film 16 is formed on the main surface of the second insulating film 14 so as to cover the third wiring layer (LV1, LV2, LV3, LV4). A fourth insulating film 18 constituting a surface protection film is formed on the main surface of the third insulating film 16.

[0039] Here, the support substrate SUB of the detection device 1 has the following features.

[0040] 1) When the support substrate SUB is in a flat state (not bent), the first portion RG1 and the second portion RG2 of the first resistor element RG have substantially the same length and resistance value. 2) The Young's modulus of the first insulating layer 12 between the first portion RG1 and the second portion RG2 of the first resistor element RG is substantially constant. 3) The position of the neutral plane NS between the first portion RG1 and the second portion RG2 is set within the first insulating film 12. The distance between the first portion RG1 and the neutral plane NS and the distance between the second portion RG2 and the neutral plane NS are designed to be approximately the same so that the absolute values ​​of the strain applied to the first portion RG1 and the second portion RG2 are approximately the same. Here, the neutral plane NS is defined as a plane where neither expansion (tension) nor contraction (compression) occurs before or after bending of the support substrate SUB (i.e., a plane where strain is zero even after bending). 4) The first portion RG1 and the second portion RG2 are provided on different layers of the support substrate SUB. The first portion RG1 and the second portion RG2 overlap in the length direction and are arranged in parallel in a plan view. 5) The second portion RG2 of the first resistor element RG is provided in the first wiring layer. 6) The first portion RG1 of the first resistor RG, the second resistor R2, the third resistor R3, and the fourth resistor R4 are provided in the same layer (the second wiring layer). 7) The first wiring LV1, the second wiring LV2, the third wiring LV3, and the fourth wiring LV4 are provided in a third wiring layer, which is a wiring layer different from the first wiring layer and the second wiring layer.

[0041] FIG. 5 is a diagram illustrating an example of the configuration of the elastic area ARE. FIG. 5 shows the elastic area ARE in its initial state (flat state or unbent) when it is neither stretched nor compressed. FIG. 5A is a plan view of a first portion RG1 of the second wiring layer and a first wiring LV1 of the third wiring layer formed in the elastic area ARE. The first portion RG1 has a bellows shape. FIG. 5B is a plan view of a second portion RG1 of the first wiring layer formed in the elastic area ARE. The second portion RG2 has a bellows shape. The elastic area ARE of FIG. 5A is configured by being superimposed on the elastic area ARE of FIG. 5B. In other words, the first portion RG1 is superimposed on the second portion RG2 (the first portion RG1 overlaps the second portion RG2). When the stretchable area ARE is neither stretched nor compressed, the shape and length of the first portion RG1 are the same as the shape and length of the second portion RG2, and the resistance value of the first portion RG1 and the resistance value of the second portion RG2 are the same.

[0042] FIG. 6 illustrates an example of the configuration of the elastic area ARE. A in FIG. 6 is the same as A in FIG. 5 and represents the initial state when the elastic area ARE is neither stretched nor compressed. B in FIG. 6 represents the stretched state of the elastic area ARE. Therefore, if the resistance of the first portion RG1 when the elastic area ARE is neither stretched nor compressed is RG01, the resistance value increases from RG01 to RG01+ΔR because the first portion RG1 is stretched. In the elastic area ARE, the first wiring LV1 located in the center of the meander wiring does not deform much even when the elastic area ARE is stretched or compressed (the resistance value of the first wiring LV1 does not change). On the other hand, the first portion RG1 (or the second portion RG2: see B in FIG. 5) located in the corner of the meander wiring (the end side in the wiring width direction) is easily deformed when the elastic area ARE is stretched, and therefore its resistance value is easily changed. Furthermore, the non-elastic area ARNE, where the second resistor element R2, the third resistor element R3, and the fourth resistor element R4 are located, hardly deforms regardless of the stretch ratio. In other words, the resistance values ​​of the second resistor element R2, the third resistor element R3, and the fourth resistor element R4 formed in the non-elastic area ARNE are hardly deformed even when the elastic area ARE is stretched or compressed, and therefore the resistance values ​​do not change.

[0043] Next, the initial state, tensile strain state, and bending strain state of the first portion RG1 and second portion RG2 of the first resistor element RG will be described using Fig. 7. Fig. 7 is a schematic diagram illustrating the states of the first resistor element RG. Fig. 7 shows cross-sectional views of the first portion RG1 and second portion RG2 in the longitudinal direction of the stretchable area ARE, depicting an initial state A in which the stretchable area ARE is neither stretched nor compressed, a stretchable strain state B in which the stretchable area ARE is stretched, and a bending strain state C in which the stretchable area ARE is bent.

[0044] In the initial state A, the elastic area ARE is neither stretched nor compressed, so the lengths and resistances of the first portion RG1 and the second portion RG2 are substantially equal. The resistance of the first portion RG1 at this time is RG01, and the resistance of the second portion RG2 is RG02 (= RG01). Here, the strain of the elastic area ARE is the same above and below the neutral plane NS.

[0045] In the tensile strain state B, the elastic area ARE is stretched, so the length and resistance of the first portion RG1 and the second portion RG2 are substantially equal. In this case, the resistance of the first portion RG1 is RG01+ΔR, and the resistance of the second portion RG2 is RG02+ΔR (=RG01+ΔR). Here, the strain of the elastic area ARE is the same above and below the neutral plane NS.

[0046] Although not shown, in the compressive strain state, the stretchable area ARE is compressed, so the lengths and resistances of the first portion RG1 and the second portion RG2 are substantially equal. In this case, the resistance of the first portion RG1 is RG01-ΔR, and the resistance of the second portion RG2 is RG02-ΔR (=RG01-ΔR).

[0047] In bending strain state C, the elastic area ARE above the neutral plane NS is in tension, and the elastic area ARE below the neutral plane NS is in compression. Therefore, the resistance of the first portion RG1 is RG01 + ΔR', and the resistance of the second portion RG2 is RG02 - ΔR' (= RG01 - ΔR'). Here, if the strain of the first portion RG1 is ε1 and the strain of the second portion RG2 is ε2, then |ε1| = |ε2|.

[0048] Fig. 8 is a circuit diagram of a strain sensor illustrating a tensile strain state, and Fig. 9 is a circuit diagram of a strain sensor illustrating a bending strain state.

[0049] 8, in the tensile strain state, the resistance value of the first portion RG1 is RG01+ΔR, and the resistance value of the second portion RG2 is RG02+ΔR (=RG01+ΔR). Here, if the resistance value Rr is given by (Equation 1), the signal VS is given by (Equation 2).

[0050] Rr = (RG01 + ΔR + RG02 + ΔR) (Equation 1) VS=Vrxn-Vrn+1=(Vcc / 2)×(ΔR / Rr) (Formula 2) Here, Vrxn is the voltage of the signal wiring Rxn, Vrn+1 is the voltage of the signal wiring Rxn+1, Vcc is the voltage of the power supply potential (Power), and the ground potential (Gnd) is 0V.

[0051] Although the explanation here is for a stretched strain state, (Equation 2) can also be used for a stretched strain state (compression).

[0052] As shown in Figure 9, in the bending strain state, the resistance value of the first portion RG1 is RG01 + ΔR, and the resistance value of the second portion RG2 is RG02 - ΔR (= RG01 - ΔR). In other words, when the cable is bent, signals of different polarities are seen. In this case, the signal potential VS is as follows:

[0053] VS=0 Therefore, by connecting a bridge circuit BRC to each placement node of each strain sensor (Ysen, Xsen) as shown in Figures 3, 8, and 9, bending strain is canceled and only expansion and contraction strain (tension strain and expansion and contraction strain) can be accurately detected.

[0054] 10 is a block diagram of a detection circuit according to an embodiment. Here, an example will be described in which the sensor unit 2 includes, for example, eight strain sensors sen (Xsen, Ysen). In this case, the detection circuit 3 includes an analog front-end circuit (AFEIC) to which 16 signal wirings Rx1-Rx16 are connected as signal wirings Rx from the eight strain sensors sen. The AFEIC converts the 16 analog detection signals detected from the strain sensors sen into digital signals for each frame and transmits them to the host device HOST.

[0055] The AFEIC has a readout circuit RCKT that generates drive control signals DCS such as power supply potential (Power), ground potential (Gnd), and timing signals to read out the eight strain sensors sen for each frame, an analog-to-digital conversion circuit ADC that converts the analog detection signals read out via signal wiring Rx1-Rx16 into digital data, and a digital signal processor DSP that performs, for example, filtering processing on the digital data.

[0056] The host device HOST has a data receiving circuit that receives digital data (raw data) read from the AFEIC via the host interface HOSTIF, and an arithmetic processing circuit PROC that performs data shaping and coordinate calculations based on the received digital data to calculate expansion and contraction of the object to be measured. The host device HOST and the AFEIC may further be configured to be capable of performing inter-device communication using a serial peripheral interface SPI.

[0057] All detection devices that can be implemented by a person skilled in the art by appropriately modifying the design of the detection device described above as an embodiment of the present disclosure also fall within the scope of the present disclosure, as long as they include the gist of the present disclosure.

[0058] Within the scope of the concept of the present disclosure, a person skilled in the art may conceive of various modifications and alterations, and it is understood that these modifications and alterations also fall within the scope of the present disclosure. For example, to the above-described embodiments, a person skilled in the art may appropriately add, delete, or change the design of components, or add, omit, or change the conditions of steps, and these modifications are also included within the scope of the present disclosure as long as they include the gist of the present disclosure.

[0059] Furthermore, other effects and advantages brought about by the aspects described in this embodiment that are clear from the description in this specification or that can be appropriately thought of by a person skilled in the art are naturally understood to be brought about by the present disclosure.

[0060] Various disclosures can be formed by appropriately combining multiple components disclosed in the above embodiments. For example, some components may be omitted from all components shown in the embodiments. Furthermore, components from different embodiments may be appropriately combined. [Explanation of symbols]

[0061] 1: detection device, 2: sensor unit, 3: detection circuit, SUB: support substrate, Xsen: first direction sensor, Ysen: second direction sensor, ARE: stretchable area, ARNE: non-stretchable area, BRC: bridge circuit, R1 (RG): first resistive element, R2: second resistive element, R3: third resistive element, R4: fourth resistive element, RG1: first part, RG2: second part

Claims

1. a flexible substrate; a bridge circuit disposed within the substrate; the bridge circuit includes a first resistor element, a second resistor element, a third resistor element, and a fourth resistor element connected in series in this order in a closed loop; The first resistance element is an elastic resistance element in which a first portion and a second portion are connected in series, the second resistance element, the third resistance element, and the fourth resistance element are non-elastic resistance elements; the first portion and the second portion of the first resistor element are provided on different layers of the substrate, and are arranged in parallel and overlap each other in a longitudinal direction in a plan view. Detection device.

2. 2. The detection device according to claim 1, The sensing device, wherein an insulating layer between the first portion and the second portion of the first resistive element has a substantially constant Young's modulus.

3. 2. The detection device according to claim 1, The detection device, wherein when the substrate is in a planar state, the first portion and the second portion of the first resistor element have substantially the same length and resistance value.

4. 2. The detection device according to claim 1, The detection device, wherein the first portion of the first resistive element, the second resistive element, the third resistive element, and the fourth resistive element are provided in the same layer.

5. 2. The detection device according to claim 1, the elastic resistance element is bellows-shaped; A detection device, wherein the non-elastic resistive element is straight.

6. 2. The detection device according to claim 1, If a connection point between the first resistance element and the second resistance element is a first node, a connection point between the second resistance element and the third resistance element is a second node, a connection point between the third resistance element and the fourth resistance element is a third node, and a connection point between the fourth resistance element and the first resistance element is a fourth node, then: a power supply line is connected between the first node and the third node to apply a predetermined voltage; a detection circuit connected to the second node and the fourth node;

7. 7. The detection device according to claim 6, the second portion of the first resistor element is formed in a first layer of the substrate; the first portion of the first resistor element is formed in a second layer different from the first layer of the substrate, a detection device, wherein the power supply line connected to the first node and the third node, and the signal wiring connected to the detection circuit connected to the second node and the fourth node are provided on a third layer different from the first layer and the second layer.

8. 2. The detection device according to claim 1, The detection device has a plurality of bridge circuits arranged in a matrix in plan view.

9. 2. The detection device according to claim 1, The bridge circuit includes: at least one first bridge circuit; at least one second bridge circuit; the first resistor element of the first bridge circuit has a bellows shape that extends generally in a first direction; The detection device, wherein the first resistive element of the second bridge circuit has a bellows shape that extends entirely in a second direction different from the first direction.

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