Inspection jig and inspection device

Abstract

To provide an inspection jig capable of reducing in size and improving rotational positioning accuracy.SOLUTION: An inspection jig 4 comprises: a jig-side body part 41 having a first jig-side face 41a and a second jig-side face 41b; a plurality of jig-side clamp parts 42 provided on the second jig-side face 41b to be attached to an inspection device; and a jig-side connector part electrically connecting an inspection target and the inspection device. Each of the plurality of jig-side clamp parts 42 is disposed on an outer periphery of the second jig-side face 41b. The jig-side connector part has a first jig-side connector part 43A provided on the second jig-side face 41b and electrically connected to the inspection device. The first jig-side connector part 43A is disposed at a position closer to the center of the second jig-side face 41b than each of the jig-side clamp parts 42. Among the plurality of jig-side clamp parts 42, two are disposed with the first jig-side connector part 43A interposed therebetween.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present disclosure relates to an inspection jig used to inspect a linear transport system, and an inspection device equipped with the inspection jig. [Background technology]

[0002] Conveyance systems using linear motors (hereinafter referred to as "linear conveyance systems") are expanding in application due to their features of enabling product processing and assembly on a track with high-precision positioning and the ability to control the speed of each mover. The inspection process for stators in linear conveyance systems includes a step of fixing the stator to be inspected to a linear conveyance system installed in an inspection device and installing wiring to electrically connect the stator to the linear conveyance system, thereby inspecting the performance of the stator after it is installed in the linear conveyance system. Conventional assembly methods for this process require a worker to fix the stator to the linear conveyance system and install the wiring inside the inspection device, which poses a problem of time-consuming installation of the stator in the inspection device.

[0003] One method for solving the above problem is to use a robot tool changer, as disclosed in Patent Document 1, for example. A jig is detachably attached to the tip of the robot tool changer, and a stator is fixed to the jig. The robot tool changer has one clamp portion located in the center and two connector portions located on the outer periphery, and is configured so that the jig can be easily attached and detached using the clamp portion and is electrically connected to the jig via the connector portions. In the robot tool changer disclosed in Patent Document 1, one of the two connector portions has a positioning mechanism. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 1-210177 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the technology disclosed in Patent Document 1, the clamp unit is located in the center of the robot tool changer, which means that the connector unit arrangement space is dispersed around the outer periphery of the robot tool changer. Inspection of a linear transport system requires many electric wires, such as signal wires for transmitting and receiving signals from sensors and power wires for supplying power to coils. Therefore, if the connector unit arrangement space is dispersed as in the technology disclosed in Patent Document 1, the robot tool changer must be enlarged to ensure a larger connector unit arrangement space. This leads to the problem of an increased size of the robot tool changer.

[0006] Furthermore, inspection of a linear transport system requires a clamping force that can withstand the magnetic attraction force generated when the mover is moved, so when using a single clamping unit as in the technology disclosed in Patent Document 1, it is necessary to increase the size of the clamping unit and increase the clamping force, which poses a problem of increasing the size of the robot tool changer.

[0007] Furthermore, in the technology disclosed in Patent Document 1, the clamp located at the center of the robot tool changer is used as the center of rotation, and the rotational position of the robot tool changer is determined by one of the connectors equipped with a positioning mechanism, so the distance from the clamp, which serves as the center of rotation, to one of the connectors is short, which results in a problem of low positioning accuracy in the rotational direction of the robot tool changer.

[0008] The present disclosure has been made in view of the above, and aims to provide an inspection jig that can be made smaller and that can improve positioning accuracy in the rotational direction. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems and achieve the object, an inspection jig according to the present disclosure is an inspection jig for detachably fixing an inspection object to an inspection device, and includes a jig-side main body, a plurality of jig-side clamps, and a jig-side connector. The jig-side main body has a first jig side surface to which the inspection object is attached and a second jig side surface facing opposite the first jig side surface. The plurality of jig-side clamps are provided on the second jig side surface and attached to the inspection device. The jig-side connector portion electrically connects the inspection object to the inspection device. Each of the plurality of jig-side clamps is disposed on the outer periphery of the second jig side surface. The jig-side connector portion is provided on the second jig side surface and has a first jig-side connector portion that is electrically connected to the inspection device. The first jig-side connector portion is disposed at a position closer to the center of the second jig side surface than each of the jig-side clamps. Two of the plurality of jig-side clamping portions are arranged with the first jig-side connector portion therebetween. [Effects of the Invention]

[0010] The inspection jig according to the present disclosure has the effect of enabling miniaturization and improving positioning accuracy in the rotational direction. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a plan view showing a linear transport system according to a first embodiment; [Figure 2] FIG. 1 is a side view showing a linear transport system according to a first embodiment; [Figure 3] FIG. 1 is a side view showing an inspection device according to a first embodiment; [Figure 4] A cross-sectional view taken along line IV-IV shown in Figure 3. [Figure 5] Cross-sectional view taken along line VV shown in Figure 3 [Figure 6] FIG. 6 is a partially enlarged cross-sectional view of FIG. 5, showing the linear transport system, the inspection jig, and the jig receiving portion according to the first embodiment. [Figure 7] FIG. 1 is a perspective view showing a stator, an inspection jig, and a jig receiving portion according to the first embodiment; [Figure 8] FIG. 1 is a perspective view showing a jig receiving portion according to the first embodiment; [Figure 9] FIG. 1 is a perspective view showing a stator and an inspection jig according to the first embodiment; [Figure 10] FIG. 10 is a perspective view showing a stator and an inspection jig according to a second embodiment. [Figure 11] FIG. 11 is a perspective view showing a stator and an inspection jig according to a third embodiment. [Figure 12] FIG. 13 is a perspective view showing a stator, an inspection jig, and a jig receiving portion according to a fourth embodiment. [Figure 13] FIG. 13 is a perspective view showing a stator and an inspection jig according to a fourth embodiment. [Figure 14] FIG. 10 is a cross-sectional view showing a linear transport system, an inspection jig, and a jig receiving portion according to a fourth embodiment, the cross-sectional view corresponding to the VV line cross-sectional view shown in FIG. [Figure 15] FIG. 20 is a perspective view showing a stator and an inspection jig according to a first modification of the fourth embodiment. [Figure 16] FIG. 10 is a cross-sectional view showing a linear transport system, an inspection jig, and a jig receiving portion in a second modification of the fourth embodiment, which corresponds to the cross-sectional view taken along line VV in FIG. [Figure 17] FIG. 10 is a cross-sectional view showing a linear transport system, an inspection jig, and a jig receiving portion in a second modification of the fourth embodiment, which corresponds to the cross-sectional view taken along line VV in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] An inspection jig and an inspection device according to an embodiment will be described in detail below with reference to the drawings.

[0013] Embodiment 1 Prior to describing the inspection jig 4 and the inspection device 1 according to the first embodiment, the configuration of a linear conveyance system 2 including a stator 21b to be inspected will be described. FIG. 1 is a plan view showing the linear conveyance system 2 according to the first embodiment. FIG. 2 is a side view showing the linear conveyance system 2 according to the first embodiment. The linear conveyance system 2 is a system that conveys objects using a linear motor. Arrow T in FIGS. 1 and 2 indicates the conveyance direction. The linear conveyance system 2 includes a plurality of track modules 21 and a plurality of movers 22. Although not shown, the linear conveyance system 2 also includes a control device that controls the movement of the movers 22. A conveyance line 23 is formed by connecting a plurality of track modules 21. The shape of the conveyance line 23 shown in FIG. 1 is a track shape formed by connecting linear track modules 21 and curved track modules 21, but this shape may be changed as appropriate. For example, the shape of the conveyance line 23 may be a straight line formed by connecting linear track modules 21, or a branched line formed by branching into multiple lines along the way. Each of the multiple movers 22 moves along the transfer line 23. In other words, the transfer direction is the direction in which the movers 22 move along the transfer line 23. Details of the track module 21 and the movers 22 will be described later.

[0014] Next, the configuration of the inspection device 1 will be described. Fig. 3 is a side view showing the inspection device 1 according to the first embodiment. Fig. 4 is a cross-sectional view taken along line IV-IV shown in Fig. 3. Fig. 5 is a cross-sectional view taken along line VV shown in Fig. 3.

[0015] As shown in FIGS. 3 to 5, the inspection device 1 is a device that inspects a stator 21b of a linear conveyance system 2. In an inspection using the inspection device 1, the stator 21b to be inspected is installed on a track module 21 installed in the inspection device 1 to construct a linear conveyance system 2, and the performance of the stator 21b is inspected by operating the mover 22. In this embodiment, the inspection target is a linear stator 21b, but a curved stator 21b may also be used. Furthermore, in this embodiment, the inspection target is the stator 21b, but it may also be a track module 21 including the stator 21b and a base 21a (described later). Furthermore, in this embodiment, the inspection device 1 is a device that installs the stator 21b on the track module 21 installed in the inspection device 1, but it may also be a device that installs the stator 21b alone in the inspection device 1. As shown in FIGS. 4 and 5, the inspection device 1 includes a jig receiving unit 3 and an inspection jig 4 in addition to the linear conveyance system 2. Below, the track module 21 and the mover 22 of the linear conveyance system 2 will be described in detail, followed by a detailed description of the jig receiving section 3 and the inspection jig 4. Note that in Fig. 3, only the stator 21b to be inspected among the multiple stators 21b is indicated by diagonal hatching.

[0016] FIG. 6 is a partially enlarged view of FIG. 5 and is a cross-sectional view showing the linear conveyance system 2, the inspection jig 4, and the jig receiving portion 3 in the first embodiment. Note that FIG. 6 also shows the power lines 43b, 33b, and 21o, the signal lines 43a, 33a, and 21n, the second jig-side connector portion 43B, and the stator-side connector portion 21m, which are omitted from FIG. 4. Hereinafter, directions will be described in accordance with the right-handed XYZ coordinate system shown in FIG. 6. The X-axis direction is perpendicular to the plane of FIG. 6 and coincides with the conveyance direction. The Y-axis direction is perpendicular to the X-axis direction and coincides with the horizontal direction. The Z-axis direction is perpendicular to both the X-axis and Y-axis directions and coincides with the vertical direction. In the following description, the positive direction in the Z-axis direction is defined as upward, and the negative direction in the Z-axis direction is defined as downward. As shown in FIG. 6, each track module 21 includes a base 21a, a stator 21b, a first position detection unit 21c, and two guide rails 21d and 21e.

[0017] Base 21a is a member that holds stator 21b, first position detection unit 21c, and guide rails 21d and 21e. Base 21a has bottom 21f, holding unit 21g, and two guide rail mounting units 21h and 21i. Bottom 21f extends in the Y-axis direction. Holding unit 21g extends upward in the Z-axis direction from the Y-axis end of bottom 21f that faces mover 22. Holding unit 21g has a through-hole 21j that penetrates in the Y-axis direction. Inspection jig 4 is placed in through-hole 21j.

[0018] One guide rail mounting portion 21h extends in the Y-axis direction from a position close to the lower end of holding portion 21g toward movable element 22. The other guide rail mounting portion 21i extends in the Y-axis direction from the upper end of holding portion 21g toward movable element 22. Guide rail mounting portion 21h and guide rail mounting portion 21i are disposed at an interval from each other in the Z-axis direction. Guide rail mounting portion 21h and guide rail mounting portion 21i are disposed in parallel.

[0019] The stator 21b is a component provided on the base 21a and constitutes a linear motor together with the mover 22. The stator 21b is disposed between the two guide rail mounting portions 21h, 21i at an interval in the Z-axis direction. The stator 21b has a plurality of coils 21k arranged side by side in the X-axis direction. The stator 21b has a plurality of stator-side connector portions 21m arranged at intervals from each other in the Z-axis direction. The stator-side connector portions 21m are provided on the surface of the stator 21b facing the inspection jig 4 and are electrically connected to the inspection jig 4. There are two stator-side connector portions 21m. Each stator-side connector portion 21m is disposed near the center of the stator 21b in the Z-axis direction.

[0020] The stator 21b has a motor driver (not shown). The motor driver has a board that controls the current flowing through each of the multiple coils 21k. In other words, the motor driver has the function of controlling the current through the coils 21k. Since each of the multiple stators 21b has a motor driver, the multiple motor drivers are arranged adjacent to each other. The motor driver also has the function of communicating with the first position detection unit 21c, communicating between adjacent motor drivers, and communicating with a higher-level control device. The motor driver may be integrated with the stator 21b, the first position detection unit 21c, and the guide rails 21d and 21e to form the track module 21, or may be provided independently from the track module 21.

[0021] The first position detector 21c is a member provided on the stator 21b. The first position detector 21c is, for example, a substrate having a plurality of Hall elements. The first position detector 21c is provided on the lower surface of the stator 21b.

[0022] One guide rail 21d is provided on one guide rail mounting portion 21h. The other guide rail 21e is provided on the other guide rail mounting portion 21i. Guide rail 21d is provided on the lower surface of guide rail mounting portion 21h. Guide rail 21e is provided on the upper surface of guide rail mounting portion 21i.

[0023] Each mover 22 includes a mover body 22a, a motor magnet 22b, a second position detection unit 22c, and a plurality of guide rollers 22d, 22e. The mover 22 moves along the guide rails 21d, 21e, thereby moving along the conveyor line 23.

[0024] The mover body 22a has a magnet mounting portion 22f and two guide roller mounting portions 22g and 22h. The magnet mounting portion 22f and the two guide roller mounting portions 22g and 22h are integrally formed. The magnet mounting portion 22f extends in the Z-axis direction. The magnet mounting portion 22f is disposed at a distance from the stator 21b and the base 21a in the Y-axis direction.

[0025] Motor magnet 22b is provided on the surface of magnet mounting portion 22f facing stator 21b. Motor magnet 22b is, for example, a plurality of permanent magnets. Motor magnet 22b is composed of south-pole permanent magnets and north-pole permanent magnets arranged alternately in the X-axis direction. Motor magnet 22b and coil 21k are positioned in the same position in the Z-axis direction. In other words, motor magnet 22b and coil 21k are arranged in positions facing each other in the Y-axis direction. Motor magnet 22b is arranged at an interval from coil 21k in the Y-axis direction. A magnetic field is generated by the current flowing through coil 21k, and this magnetic field generates a driving force in motor magnet 22b, causing mover 22 to move.

[0026] The second position detector 22c is a device provided on the mover 22 and detects the position of the mover 22 together with the first position detector 21c. The second position detector 22c is, for example, a scale magnet having multiple magnetic poles. The first position detector 21c and the second position detector 22c are positioned in the same position in the Y-axis direction. That is, the first position detector 21c and the second position detector 22c are disposed opposite each other in the Z-axis direction. The first position detector 21c and the second position detector 22c are disposed at intervals in the Z-axis direction. The second position detector 22c is provided on the surface of the magnet mounting portion 22f facing the stator 21b. The second position detector 22c is disposed below the motor magnet 22b and spaced apart from the motor magnet 22b. Note that the configurations of the first position detector 21c and the second position detector 22c are not limited to the example shown in the figure, as long as they are capable of detecting the position of the mover 22. The position of the mover 22 may be detected by, for example, a method using an optical system.

[0027] One guide roller mounting portion 22g extends in the Y-axis direction from the lower end of the magnet mounting portion 22f toward the base 21a. One guide roller mounting portion 22g is arranged below the guide rail mounting portion 21h and spaced apart from the guide rail mounting portion 21h. The other guide roller mounting portion 22h extends in the Y-axis direction from the upper end of the magnet mounting portion 22f toward the base 21a. The other guide roller mounting portion 22h is arranged above the guide rail mounting portion 21i and spaced apart from the guide rail mounting portion 21i. The guide roller mounting portion 22g and the guide roller mounting portion 22h are arranged at an interval from each other in the Z-axis direction. The guide roller mounting portion 22g and the guide roller mounting portion 22h are arranged in parallel.

[0028] The guide rollers 22d, 22e and the guide rails 21d, 21e are members for holding the mover 22 so that the mover 22 does not move in any direction other than the conveyance direction. A plurality of guide roller shafts 22i extending in the Z-axis direction are provided on the upper surface of the guide roller attachment portion 22g. One guide roller 22d is provided on each guide roller shaft 22i, and rotates around the guide roller shaft 22i. Two guide rollers 22d make up a set. The guide rollers 22d in one set are spaced apart from each other in the Y-axis direction, with the guide rail 21d sandwiched between them.

[0029] A plurality of guide roller shafts 22j extending in the Z-axis direction are provided on the underside of the guide roller attachment portion 22h. One guide roller 22e is provided on each guide roller shaft 22j and rotates around the guide roller shaft 22j. Two guide rollers 22e make up a set. The guide rollers 22e in one set are spaced apart from each other in the Y-axis direction and are arranged with the guide rail 21e between them.

[0030] In this embodiment, the guide rollers 22d, 22e are flat rollers, but are not particularly limited as long as they can hold the mover 22 so that the mover 22 does not move in directions other than the conveyance direction. Furthermore, in this embodiment, the guide rails 21d, 21e are flat guide rails, but are not particularly limited as long as they can hold the mover 22 so that the mover 22 does not move in directions other than the conveyance direction. For example, the guide rollers 22d, 22e may be V-shaped V-rollers, and the grooves in the guide rails 21d, 21e into which the guide rollers 22d, 22e fit may be V-shaped. Furthermore, the linear conveyance system 2 may be configured to hold the mover 22 by means other than the guide rollers 22d, 22e and the guide rails 21d, 21e.

[0031] Fig. 7 is a perspective view showing the stator 21b, the inspection jig 4, and the jig receiving portion 3 in the first embodiment. Fig. 8 is a perspective view showing the jig receiving portion 3 in the first embodiment. The jig receiving portion 3 is a portion that is installed in the inspection device 1 shown in Figs. 4 and 5 and to which the inspection jig 4 is attached. As shown in Fig. 8, the jig receiving portion 3 includes a receiving portion-side main body portion 31, a plurality of receiving portion-side clamp portions 32, one receiving portion-side connector portion 33, and one receiving portion-side guide portion 34.

[0032] In this embodiment, the shape of the receiving part side main body 31 is a rectangular plate that is longer in the X-axis direction than in the Z-axis direction, but this may be modified as appropriate. The receiving part side main body 31 has a first receiving part side surface 31a that is attached to the inspection device 1 and a second receiving part side surface 31b that faces away from the first receiving part side surface 31a. The receiving part side main body 31 also has four surfaces, namely, a third receiving part side surface 31c, a fourth receiving part side surface 31d, a fifth receiving part side surface 31e, and a sixth receiving part side surface 31f, that connect the outer periphery of the first receiving part side surface 31a and the outer periphery of the second receiving part side surface 31b.

[0033] The first receiving portion side surface 31a is a rectangular plane extending in the X-axis direction and the Z-axis direction. The second receiving portion side surface 31b is a rectangular plane extending in the X-axis direction and the Z-axis direction. The third receiving portion side surface 31c is a rectangular plane extending in the X-axis direction and the Y-axis direction, and connects one end edges of the first receiving portion side surface 31a and the second receiving portion side surface 31b in the Z-axis direction. The fourth receiving portion side surface 31d is a rectangular plane extending in the X-axis direction and the Y-axis direction, and connects the other end edges of the first receiving portion side surface 31a and the second receiving portion side surface 31b in the Z-axis direction.

[0034] The fifth receiving portion side surface 31e is a rectangular plane extending in the Y-axis direction and the Z-axis direction, and connects one end edge of the first receiving portion side surface 31a and one end edge of the second receiving portion side surface 31b in the X-axis direction. The sixth receiving portion side surface 31f is a rectangular plane extending in the Y-axis direction and the Z-axis direction, and connects the other end edge of the first receiving portion side surface 31a and one end edge of the second receiving portion side surface 31b in the X-axis direction. The boundary between the adjacent third receiving portion side surface 31c and the fifth receiving portion side surface 31e and the boundary between the adjacent third receiving portion side surface 31c and the sixth receiving portion side surface 31f are chamfered. The boundary between the adjacent fourth receiving portion side surface 31d and the fifth receiving portion side surface 31e and the boundary between the adjacent fourth receiving portion side surface 31d and the sixth receiving portion side surface 31f are chamfered.

[0035] The plurality of receiving part side clamps 32 are provided on the second receiving part side surface 31b and are portions to which the inspection jig 4 shown in FIG. 7 is attached. In this embodiment, the number of receiving part side clamps 32 is two, but it may be three or more. Each of the two receiving part side clamps 32 is disposed on the outer periphery of the second receiving part side surface 31b. That is, each of the two receiving part side clamps 32 is disposed at a position shifted to one side or the other in the X-axis direction from the center of the second receiving part side surface 31b in the X-axis direction. The two receiving part side clamps 32 are disposed at an interval from each other in the X-axis direction. The two receiving part side clamps 32 are disposed with the receiving part side connector portion 33 between them.

[0036] As shown in Fig. 7, the receiving part side clamping portion 32 protrudes in the Y-axis direction from the second receiving part side surface 31b toward the inspection jig 4. As shown in Fig. 8, the receiving part side clamping portion 32 has a truncated cone-shaped convex portion 32a. The receiving part side clamping portion 32 has a plurality of wall portions 32b formed concentrically around the convex portion 32a. An annular receiving part side contact surface 32c is formed at the tip of the outermost wall portion 32b.

[0037] The receiving part side connector portion 33 is provided on the second receiving part side surface 31b and is electrically connected to the inspection jig 4 shown in FIG. 7. There is one receiving part side connector portion 33. The receiving part side connector portion 33 is arranged at a position closer to the center of the second receiving part side surface 31b than each receiving part side clamp portion 32. In this embodiment, the receiving part side connector portion 33 is arranged at the center of the second receiving part side surface 31b in the X-axis direction and the Z-axis direction. The receiving part side connector portion 33 protrudes in the Y-axis direction from the second receiving part side surface 31b toward the inspection jig 4 shown in FIG. 7. In this embodiment, the shape of the receiving part side connector portion 33 is a rectangular parallelepiped, but this may be changed as appropriate.

[0038] The receiving part side guide portion 34 is provided on the second receiving part side surface 31b. In this embodiment, there is one receiving part side guide portion 34. The receiving part side guide portion 34 is arranged on one side (above) of the receiving part side connector portion 33 in the Z axis direction, away from the receiving part side connector portion 33. The receiving part side guide portion 34 and the receiving part side connector portion 33 are positioned in the same position in the X axis direction. The receiving part side guide portion 34 is arranged away from each receiving part side clamp portion 32 in the X axis direction and the Z axis direction. The receiving part side guide portion 34 is a pin that protrudes from the second receiving part side surface 31b toward the inspection jig 4 shown in Figure 7. In this embodiment, the shape of the receiving part side guide portion 34 is a shape in which a cylindrical portion and a truncated cone portion are connected together, but this may be changed as appropriate.

[0039] As shown in FIG. 5, the inspection jig 4 is a jig for detachably fixing the stator 21b, which is the object of inspection, to the inspection device 1. More specifically, the inspection jig 4 detachably fixes the stator 21b to a jig receiving portion 3 attached to the inspection device 1. FIG. 9 is a perspective view showing the stator 21b and the inspection jig 4 according to the first embodiment. As shown in FIG. 9, the inspection jig 4 includes a jig-side main body 41, a plurality of jig-side clamps 42, one jig-side connector 43, and one jig-side guide 44. The direction in which the inspection jig 4 and the stator 21b face each other coincides with the Y-axis direction. The in-plane direction of a second jig side surface 41b (described later) of the inspection jig 4 is a direction perpendicular to the direction in which the inspection jig 4 and the stator 21b face each other, and includes two directions, the X-axis direction and the Z-axis direction.

[0040] In this embodiment, the shape of the jig-side main body 41 is a rectangular plate that is longer in the X-axis direction than in the Z-axis direction, but this may be modified as appropriate. The jig-side main body 41 has a first jig side surface 41a to which the stator 21b is attached and a second jig side surface 41b facing away from the first jig side surface 41a. The jig-side main body 41 also has four surfaces, namely, a third jig side surface 41c, a fourth jig side surface 41d, a fifth jig side surface 41e, and a sixth jig side surface 41f, which connect the outer periphery of the first jig side surface 41a with the outer periphery of the second jig side surface 41b.

[0041] The first jig side surface 41a is a rectangular surface extending in the X-axis direction and the Z-axis direction. The second jig side surface 41b is a rectangular plane extending in the X-axis direction and the Z-axis direction. The third jig side surface 41c is a rectangular plane extending in the X-axis direction and the Y-axis direction, and connects one end edges of the first jig side surface 41a and the second jig side surface 41b in the Z-axis direction. The fourth jig side surface 41d is a rectangular plane extending in the X-axis direction and the Y-axis direction, and connects the other end edges of the first jig side surface 41a and the second jig side surface 41b in the Z-axis direction.

[0042] The fifth jig side surface 41e is a rectangular plane extending in the Y-axis direction and the Z-axis direction, and connects one end edge of the first jig side surface 41a and one end edge of the second jig side surface 41b in the X-axis direction. The sixth jig side surface 41f is a rectangular plane extending in the Y-axis direction and the Z-axis direction, and connects the other end edge of the first jig side surface 41a and one end edge of the second jig side surface 41b in the X-axis direction. The boundary between the adjacent third jig side surface 41c and the fifth jig side surface 41e and the boundary between the adjacent third jig side surface 41c and the sixth jig side surface 41f are chamfered. The boundary between the adjacent fourth jig side surface 41d and the fifth jig side surface 41e and the boundary between the adjacent fourth jig side surface 41d and the sixth jig side surface 41f are chamfered.

[0043] The multiple jig-side clamps 42 are provided on the second jig side surface 41b and are attached to the inspection device 1 (jig receiving portion 3) shown in FIG. 5. In this embodiment, the number of jig-side clamps 42 is two, but it may be three or more. Each of the two jig-side clamps 42 is disposed on the outer periphery of the second jig side surface 41b. That is, each of the two jig-side clamps 42 is disposed at a position shifted to one side or the other in the X-axis direction from the center of the second jig side surface 41b in the X-axis direction. The two jig-side clamps 42 are disposed at an interval from each other in the X-axis direction. The two jig-side clamps 42 are disposed with the jig-side connector portion 43 between them.

[0044] As shown in FIG. 7, the jig-side clamping portion 42 protrudes in the Y-axis direction from the second jig side surface 41b toward the jig receiving portion 3. As shown in FIG. 9, the shape of the jig-side clamping portion 42 is cylindrical in this embodiment, but may be modified as appropriate. The jig-side clamping portion 42 has a cylindrical peripheral wall portion 42a. A recess 42b is formed inside the peripheral wall portion 42a. An annular jig-side contact surface 42c is formed at the tip of the peripheral wall portion 42a. Each of the two jig-side clamping portions 42 corresponds one-to-one to the receiving portion-side clamping portion 32 shown in FIG. 8. In other words, one jig-side clamping portion 42 is fixed to one receiving portion-side clamping portion 32.

[0045] When the jig-side clamp portion 42 and the receiving part-side clamp portion 32 are fixed to each other as shown in Fig. 7, the jig-side contact surface 42c and the receiving part-side contact surface 32c are in circumferential surface contact, and the convex portion 32a shown in Fig. 8 is positioned in the concave portion 42b shown in Fig. 9. By fixing the jig-side clamp portion 42 and the receiving part-side clamp portion 32 to each other, the inspection jig 4 is attached to the jig receiving part 3, and the stator 21b is fixed to the inspection device 1 shown in Fig. 5 via the inspection jig 4 and the jig receiving part 3.

[0046] In this embodiment, the fixing structure between the jig-side clamp 42 and the receiving part-side clamp 32 is a structure in which one of the jig-side clamp 42 and the receiving part-side clamp 32 is pulled into the other by air to fix them. When the air-pushing direction is aligned with the Y-axis direction, the inspection jig 4 can be positioned in the XZ plane with respect to the jig receiving part 3 with high precision. Note that the fixing structure between the jig-side clamp 42 and the receiving part-side clamp 32 may be a pull-in structure in which an operator operates a clamp lever, a pull-in structure in which an electric chuck is used, or the like, in addition to the air-pushing structure.

[0047] One of the two jig-side clamps 42 shown in FIG. 9 is configured to position the inspection jig 4 in the X-axis and Z-axis directions relative to the jig receiving part 3 shown in FIG. 8. The other of the two jig-side clamps 42 is configured to position the inspection jig 4 in the Z-axis direction only relative to the jig receiving part 3. This positions the inspection jig 4 in the rotational direction θy about the Y-axis relative to the jig receiving part 3. In other words, rotation of the inspection jig 4 in the rotational direction θy about the Y-axis relative to the jig receiving part 3 is limited. An example of a structure that positions the inspection jig 4 in the Z-axis direction only relative to the jig receiving part 3 is a structure in which only the diameter of the recess 42b of the jig-side clamp 42 in the Z-axis direction is smaller than the diameter of the other parts. Note that the jig-side clamp 42 may have a convex portion, and the receiving part-side clamp 32 may have a concave portion. In this configuration, an example of a structure for positioning the inspection jig 4 only in the Z-axis direction relative to the jig receiving part 3 is a structure in which the diameter of the convex part of one of the two jig-side clamp parts 42 in the Z-axis direction is larger than the diameter of the other part. That is, the convex part of the jig-side clamp part 42 may be shaped like a diaphragm pin.

[0048] As shown in FIG. 6, the jig-side connector 43 electrically connects the stator 21b and the inspection device 1 (jig receiving portion 3). The jig-side connector 43 includes a first jig-side connector 43A provided on the second jig side surface 41b and electrically connected to the receiving portion-side connector 33 of the jig receiving portion 3, and a second jig-side connector 43B provided on the first jig side surface 41a and electrically connected to the stator-side connector 21m of the stator 21b. There are two second jig-side connectors 43B. The two second jig-side connectors 43B are spaced apart from each other in the Z-axis direction. Each second jig-side connector 43B is located near the center of the first jig side surface 41a in the Z-axis direction.

[0049] As shown in FIG. 9, there is one first jig-side connector portion 43A. The first jig-side connector portion 43A is disposed closer to the center of the second jig side surface 41b than the jig-side clamp portions 42. In this embodiment, the first jig-side connector portion 43A is disposed at the center of the second jig side surface 41b in the X-axis direction and the Z-axis direction. The first jig-side connector portion 43A protrudes in the Y-axis direction from the second jig side surface 41b toward the jig receiving portion 3 shown in FIG. 7. In this embodiment, the shape of the first jig-side connector portion 43A is a rectangular parallelepiped, but may be modified as appropriate.

[0050] The first jig-side connector 43A has a signal line 43a and a power line 43b. The power line 43b is an electric wire for supplying power to the coil 21k shown in FIG. 6. Power is supplied to the coil 21k via the multiple power lines 43b, 33b, and 21o, the receiving part-side connector 33, the first jig-side connector 43A, the second jig-side connector 43B, and the stator-side connector 21m. The signal line 43a is an electric wire for communicating position data of the mover 22 detected by the first position detector 21c and the second position detector 22c shown in FIG. 6. The position data of the mover 22 is communicated via the multiple signal lines 43a, 33a, and 21n, the receiving part-side connector 33, the first jig-side connector 43A, the second jig-side connector 43B, and the stator-side connector 21m. As shown in Fig. 7, the jig-side clamp 42 and the receiving part-side clamp 32 are fixed to each other, thereby electrically connecting the first jig-side connector 43A to the receiving part-side connector 33 shown in Fig. 8. That is, the first jig-side connector 43A and the receiving part-side connector 33 are detached from each other by attaching and detaching the jig-side clamp 42 and the receiving part-side clamp 32. An example of such a structure is a structure in which the first jig-side connector 43A and the receiving part-side connector 33 are connected by a contact probe.

[0051] 9, the jig-side guide portion 44 is a portion that positions the inspection jig 4 on the inspection device 1 when the jig-side clamp portion 42 is not attached to the inspection device 1 (jig receiving portion 3) shown in FIG. 5. More specifically, the jig-side guide portion 44 is a portion that cooperates with the receiving portion-side guide portion 34 to hold the inspection jig 4 relative to the jig receiving portion 3 when the jig-side clamp portion 42 is in an unclamped state where the jig-side clamp portion 42 is not fixed to the receiving portion-side clamp portion 32 shown in FIG. 8. The number of jig-side guide portions 44 may be the same as the number of receiving portion-side guide portions 34, and in this embodiment, there is one.

[0052] The jig side guide portion 44 is provided on the second jig side surface 41b. The jig side guide portion 44 is arranged on one side (above) of the first jig side connector portion 43A in the Z axis direction, away from the first jig side connector portion 43A. The jig side guide portion 44 and the first jig side connector portion 43A are positioned in the same position in the X axis direction. The jig side guide portion 44 is arranged away from each jig side clamp portion 42 in the X axis direction and the Z axis direction. The jig side guide portion 44 is a hole drilled from the second jig side surface 41b toward the first jig side surface 41a. The receiving part side guide portion 34 shown in FIG. 8 is arranged in the jig side guide portion 44. The shape of the jig side guide portion 44 may be any shape as long as it allows the receiving part side guide portion 34 to be arranged therein, and in this embodiment, it is cylindrical.

[0053] Next, the effects of the inspection jig 4 and the inspection device 1 according to this embodiment will be described.

[0054] In this embodiment, as shown in FIG. 9, each of the multiple jig clamps 42 is disposed on the outer periphery of the second jig side surface 41b, and the first jig connector 43A is disposed closer to the center of the second jig side surface 41b than the jig clamps 42. This configuration allows the arrangement space for the first jig connector 43A to be concentrated in the center of the inspection jig 4, thereby providing a larger arrangement space for the first jig connector 43A. Furthermore, since the clamping force required to withstand the magnetic attraction force when the mover 22 is moved as shown in FIG. 6 can be shared by two jig clamps 42, the clamping force required for each jig clamp 42 is smaller than when there is only one jig clamp 42, and the size of each jig clamp 42 can be reduced. Therefore, this embodiment enables the inspection jig 4 to be made smaller.

[0055] 9, the two jig-side clamps 42 are arranged with the first jig-side connector 43A therebetween, so that one of the jig-side clamps 42 serves as the center of rotation in the rotation direction θy, and the other jig-side clamp 42 can be used to position the inspection jig 4 in the rotation direction θy. This eliminates the need for a positioning pin in the rotation direction, making it possible to reduce the size of the inspection device 1. Furthermore, in this embodiment, the one jig-side clamp 42 that serves as the center of rotation in the rotation direction θy and the other jig-side clamp 42 that serves as the positioning part in the rotation direction θy are arranged with the first jig-side connector 43A therebetween. With this configuration, the distance from the center of rotation in the rotation direction θy (clamp portion 42 on one jig side) to the positioning portion in the rotation direction θy (clamp portion 42 on the other jig side) is longer than in the technology disclosed in Patent Document 1, in which the clamp portion that serves as the center of rotation and the connector portion that serves as the positioning portion in the rotation direction are adjacent, thereby improving the positioning accuracy in the rotation direction θy of the inspection jig 4.

[0056] 5, in the inspection process for the stator 21b of the linear conveyance system 2, it is necessary to install the stator 21b in the linear conveyance system 2 by fixing the stator 21b to the track module 21 in the inspection device 1 and installing wiring to electrically connect the stator 21b to the linear conveyance system 2. By using the inspection jig 4 during this installation, an operator can easily perform the work of fixing the stator 21b to the linear conveyance system 2 and the work of installing wiring within the inspection device 1. That is, in this embodiment, the work of attaching and detaching the stator 21b to the linear conveyance system 2 is facilitated.

[0057] Next, a modification of the first embodiment will be described.

[0058] In this embodiment, the number of jig-side clamping sections 42 shown in Fig. 9 is two, but it may be three or more. When the number of jig-side clamping sections 42 is three or more, one jig-side clamping section 42 is configured to position the inspection jig 4 in the X-axis direction and the Z-axis direction relative to the jig receiving section 3 shown in Fig. 8, and another jig-side clamping section 42 is configured to position the inspection jig 4 only in the Z-axis direction relative to the jig receiving section 3. Furthermore, these two jig-side clamping sections 42 are configured to be the farthest apart among the three or more jig-side clamping sections 42, and the other jig-side clamping sections 42 are configured not to contribute to positioning the inspection jig 4 relative to the jig receiving section 3.

[0059] 8 and 9, in this embodiment, the receiving part-side guide portion 34 is a pin and the jig-side guide portion 44 is a hole, but they may be reversed. That is, the receiving part-side guide portion 34 may be a hole drilled from the second receiving part side surface 31b toward the first receiving part side surface 31a, and the jig-side guide portion 44 may be a pin protruding from the second jig side surface 41b toward the jig receiving part 3.

[0060] Embodiment 2 Next, an inspection jig 4A according to a second embodiment will be described with reference to Fig. 10. Fig. 10 is a perspective view showing the stator 21b and the inspection jig 4A in the second embodiment. In this embodiment, the position of the jig-side guide portion 44 differs from that in the first embodiment. In the second embodiment, parts that overlap with those in the first embodiment are given the same reference numerals and descriptions thereof will be omitted.

[0061] The jig-side main body 41 has a third jig side surface 41c different from the first jig side surface 41a and the second jig side surface 41b. The jig-side guide portion 44 is provided on the third jig side surface 41c. The jig-side guide portion 44 is provided on a surface different from the second jig side surface 41b on which the jig-side clamp portion 42 and the first jig-side connector portion 43A are provided. The jig-side guide portion 44 is a hole drilled in the Z-axis direction from the third jig side surface 41c toward the fourth jig side surface 41d. In this embodiment, the number of jig-side guide portions 44 is two, but this may be changed as appropriate. The two jig-side guide portions 44 are arranged at an interval from each other in the X-axis direction.

[0062] Next, the effects of the inspection jig 4A according to this embodiment will be described.

[0063] In this embodiment, the jig-side main body 41 has a third jig side surface 41c that is different from the first jig side surface 41a and the second jig side surface 41b. Also, in this embodiment, the inspection jig 4A has a jig-side guide portion 44 that is provided on the third jig side surface 41c and that positions the inspection jig 4A on the inspection device 1 when the jig-side clamp portion 42 is not attached to the inspection device 1 shown in FIG. 5. With this configuration, the jig-side guide portion 44 is not provided on the second jig side surface 41b on which the first jig side connector portion 43A is provided, which makes it possible to increase the arrangement space for the first jig side connector portion 43A on the second jig side surface 41b or to reduce the size of the inspection jig 4A.

[0064] Next, a modification of the second embodiment will be described.

[0065] Although the jig-side guide portion 44 is configured as a hole in this embodiment, it is not particularly limited as long as it is capable of positioning the inspection jig 4A in the jig receiving portion 3. For example, the jig-side guide portion 44 may be in the form of a pin protruding from the third jig side surface 41c, or may be positioned in the jig receiving portion 3 by the outer shape of the inspection jig 4A. In this embodiment, the inspection jig 4A is positioned in the jig receiving portion 3 via the jig-side guide portion 44 and the receiving portion-side guide portion 34, but this is not limited to this. For example, a structure may be adopted in which a jig (not shown) separately provided in the inspection device 1 and the inspection jig 4A are positioned via each other's guide portions, and the inspection jig 4A is positioned in the jig receiving portion 3 via a jig (not shown) connected to the jig receiving portion 3.

[0066] Embodiment 3 Next, an inspection jig 4B according to the third embodiment will be described with reference to Fig. 11. Fig. 11 is a perspective view showing the stator 21b and the inspection jig 4B in the third embodiment. This embodiment differs from the first embodiment described above in that the first jig side connector portion 43A is separated into two. In the third embodiment, parts that overlap with those in the first embodiment described above are given the same reference numerals and descriptions thereof will be omitted.

[0067] The first jig-side connector portion 43A is separated into a first detachable connector 43c having a signal line 43a and a second detachable connector 43d having a power line 43b. The first detachable connector 43c and the second detachable connector 43d are spaced apart in the X-axis direction. The two jig-side clamp portions 42 are arranged with the first detachable connector 43c and the second detachable connector 43d interposed therebetween. In this embodiment, the first detachable connector 43c and the second detachable connector 43d are shaped like square pillars having central axes extending in the Z-axis direction, but this may be modified as appropriate.

[0068] Next, the effects of the inspection jig 4B according to this embodiment will be described.

[0069] In this embodiment, the first jig-side connector portion 43A is separated into a first separable connector 43c having a signal line 43a and a second separable connector 43d having a power line 43b. This configuration can prevent noise generated in the power line 43b from being mixed into the electrical signal transmitted through the signal line 43a. In other words, the influence of noise generated in the power line 43b on the signal line 43a can be reduced, thereby improving the operational reliability of the inspection device 1.

[0070] Next, a modification of the third embodiment will be described.

[0071] In this embodiment, the first separable connector 43c and the second separable connector 43d have the same shape, but they may have different shapes.

[0072] Embodiment 4 Next, an inspection jig 4C according to the fourth embodiment will be described with reference to FIGS. 12 to 14. FIG. 12 is a perspective view showing the stator 21b, the inspection jig 4C, and the jig receiving portion 3 according to the fourth embodiment. FIG. 13 is a perspective view showing the stator 21b and the inspection jig 4C according to the fourth embodiment. FIG. 14 is a cross-sectional view showing the linear conveyance system 2, the inspection jig 4C, and the jig receiving portion 3 according to the fourth embodiment, and corresponds to the cross-sectional view taken along line VV in FIG. 3. This embodiment differs from the first embodiment in that the same inspection jig 4C and the same jig receiving portion 3 can be used for multiple types of stators 21b with different shapes. In the fourth embodiment, parts that overlap with those in the first and second embodiments are designated by the same reference numerals, and descriptions thereof will be omitted.

[0073] Figure 12 shows three types of stators 21b with different shapes lined up. All of the inspection jigs 4C have the same configuration. All of the jig receiving portions 3 also have the same configuration. As shown in Figure 13, the inspection jig 4C has an attachment portion 45 to which multiple types of stators 21b with different shapes can be attached. The attachment portion 45 includes a positioning pin 45a and a screw hole 45b.

[0074] The positioning pins 45a are provided on the first jig side surface 41a. Each positioning pin 45a protrudes from the first jig side surface 41a toward the stator 21b in the Y-axis direction. In this embodiment, the shape of each positioning pin 45a is cylindrical, but this may be changed as appropriate. The number of positioning pins 45a is two in this embodiment, but this may be changed as appropriate. The two positioning pins 45a are arranged spaced apart from each other in the Z-axis direction. The positions of the two positioning pins 45a projected onto the second jig side surface 41b are positions on one side and the other of the first jig side connector portion 43A away from the first jig side connector portion 43A in the Z-axis direction and are aligned with the first jig side connector portion 43A in the X-axis direction.

[0075] The screw holes 45b are holes that penetrate from the second jig side surface 41b to the first jig side surface 41a. In this embodiment, the number of screw holes 45b is four, but may be changed as appropriate. The four screw holes 45b are arranged at intervals from one another in the X-axis direction and the Z-axis direction, and are provided at the four corners of the jig-side main body 41. One screw hole 45b is arranged on one side of one jig-side clamp 42 in the Z-axis direction, spaced apart from the jig-side clamp 42, and one screw hole 45b is arranged on one side of the other jig-side clamp 42 in the Z-axis direction, spaced apart from the jig-side clamp 42.

[0076] Although not specifically illustrated, each of the multiple types of stators 21b includes a positioning hole into which the positioning pin 45a is inserted and a threaded hole communicating with the threaded hole 45b. The diameters and positions of the positioning holes of the various stators 21b are the same in this embodiment. The diameters and positions of the threaded holes of the various stators 21b are the same in this embodiment. That is, the positioning references and fixing structures of the various stators 21b are the same in this embodiment. The positioning pins 45a of the inspection jig 4C can be inserted into the positioning holes of the various stators 21b. Furthermore, the threaded holes 45b of the inspection jig 4C can be connected to the threaded holes of the various stators 21b. That is, the inspection jig 4C is structured to correspond to the positioning references and fixing structures of the various stators 21b. Screws (not shown) that fix the inspection jig 4C to the various stators 21b are screwed into the threaded holes 45b and the threaded holes of the various stators 21b.

[0077] As shown in FIG. 14, each second jig-side connector portion 43B is electrically connectable to a different stator-side connector portion 21m of each of a plurality of types of stators 21b having different shapes. Each second jig-side connector portion 43B is electrically connectable to the stator-side connector portion 21m. The configuration (position, size, etc.) of the stator-side connector portion 21m is different from that of the stator-side connector portion 21m shown in FIG. 6 described above. Each second jig-side connector portion 43B is electrically connectable to the stator-side connector portion 21m shown in FIG. 6 and is also electrically connectable to the stator-side connector portion 21m shown in FIG. 14. An example of a structure that enables such a connection is a structure in which the second jig-side connector portion 43B is a socket with a large number of pins, while the stator-side connector portion 21m of each stator 21b is a socket with a small number of pins, and the stator-side connector portion 21m of each stator 21b is inserted into the second jig-side connector portion 43B.

[0078] Next, the effects of the inspection jig 4C according to this embodiment will be described.

[0079] 13, the inspection jig 4C has mounting portions 45 to which multiple types of stators 21b, which are inspection targets and have different shapes, can be mounted, thereby allowing multiple types of stators 21b to be mounted using a single inspection jig 4C, thereby reducing the number of inspection jigs 4C. Furthermore, multiple types of stators 21b can be mounted to the inspection device 1 via a common inspection jig 4C, making it possible to reduce the number of inspection devices 1 and the time required for changing the setup of the inspection device 1.

[0080] 14, in this embodiment, the second jig-side connector portion 43B can electrically connect different stator-side connector portions 21m of multiple types of stators 21b having different shapes, so that multiple types of stators 21b can be electrically connected with one inspection jig 4C, thereby reducing the number of inspection jigs 4C. Also, multiple types of stators 21b can be electrically connected to the inspection device 1 via a common inspection jig 4C, so that the number of inspection devices 1 and the time required for changing the setup of the inspection device 1 can be reduced.

[0081] Next, a modification of the fourth embodiment will be described.

[0082] In this embodiment, the positioning references (diameter and position of the positioning holes) and fixing structures (diameter and position of the screw holes) of the various types of stators 21b are the same so that multiple types of stators 21b can be attached to a single inspection jig 4C. However, this is not limiting. For example, the inspection jig 4C may be provided with multiple types of mounting portions 45 that can be attached to the various types of stators 21b using different positioning references and fixing structures. FIG. 15 shows an example. FIG. 15 is a perspective view showing the stator 21b and the inspection jig 4C according to Modification 1 of Embodiment 4. The inspection jig 4C shown in FIG. 15 includes two types of mounting portions 45A and 45B. One mounting portion 45A includes a positioning pin 45a1 and a screw hole 45b1. The other mounting portion 45B includes a positioning pin 45a2 that is provided at a different position from the positioning pin 45a1 and a screw hole 45b2 that is provided at a different position from the screw hole 45b1. That is, the two types of mounting portions 45A, 45B have different structures so as to accommodate the different positioning references and fixing structures of the two types of stators 21b. While two types of mounting portions 45A, 45B are illustrated in FIG. 15, three or more types of mounting portions 45 may be provided on the inspection jig 4C. Also, while FIG. 15 assumes that the positions of the positioning holes and the positions of the screw holes are different for each type of stator 21b, the diameters of the positioning holes and the diameters of the screw holes for each type of stator 21b may be different for each type of stator 21b. In this configuration, the diameters of the positioning pins 45a1, 45a2 may be different, or the diameters of the screw holes 45b1, 45b2 may be different.

[0083] In the present embodiment, a single second jig connector 43B is electrically connectable to the different stator connectors 21m of the multiple types of stators 21b so that a single inspection jig 4C can electrically connect the different stator connectors 21m of the multiple types of stators 21b. However, this is not limiting. For example, the inspection jig 4C may be provided with multiple types of second jig connectors 43B that can electrically connect to the different stator connectors 21m of the multiple types of stators 21b. An example is shown in FIGS. 16 and 17. FIGS. 16 and 17 are cross-sectional views showing the linear conveyance system 2, the inspection jig 4C, and the jig receiving unit 3 in Modification 2 of Embodiment 4, corresponding to the cross-sectional view taken along line VV in FIG. 3. The inspection jig 4C shown in FIGS. 16 and 17 includes two types of second jig connectors 43B1 and 43B2. The number of each type of second jig-side connector portion 43B1, 43B2 is two. The two second jig-side connector portions 43B2 are spaced apart from each other in the Z-axis direction. Two second jig-side connector portions 43B1 are arranged between the two second jig-side connector portions 43B2. As shown in FIG. 16, in the case of a stator 21b having two stator-side connector portions 21m arranged closer to the center in the Z-axis direction, the two second jig-side connector portions 43B1 are electrically connected to the two stator-side connector portions 21m, respectively. On the other hand, as shown in FIG. 17, in the case of a stator 21b having two stator-side connector portions 21m arranged away from the center in the Z-axis direction, the two second jig-side connector portions 43B2 are electrically connected to the two stator-side connector portions 21m, respectively.

[0084] In the present embodiment, one inspection jig 4C is capable of electrically connecting different stator-side connector portions 21m of multiple types of stators 21b, but this is not limiting. For example, the same stator-side connector portion 21m may be provided for each of multiple types of stators 21b, and a second jig-side connector portion 43B that can be electrically connected to the stator-side connector portion 21m may be provided in the inspection jig 4C.

[0085] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or different embodiments may be combined with each other. It is also possible to omit or modify parts of the configurations as long as they do not deviate from the gist of the invention.

[0086] Various aspects of the present disclosure are summarized below as appendices.

[0087] (Appendix 1) An inspection jig for detachably fixing an inspection object to an inspection device, a jig-side main body portion having a first jig side surface to which the inspection object is attached and a second jig side surface facing away from the first jig side surface; a plurality of jig-side clamps provided on a side surface of the second jig and attached to the inspection device; a jig-side connector portion that electrically connects the inspection object and the inspection device; Equipped with Each of the plurality of jig-side clamping portions is disposed on an outer periphery of the second jig side surface, the jig-side connector portion has a first jig-side connector portion provided on a side surface of the second jig and electrically connected to the inspection device; the first jig-side connector portion is disposed at a position closer to the center of the second jig side surface than each of the jig-side clamp portions; An inspection jig characterized in that two of the plurality of jig-side clamp portions are arranged with the first jig-side connector portion between them. (Appendix 2) the jig-side main body portion has a third jig side surface different from the first jig side surface and the second jig side surface, 2. The inspection jig described in Appendix 1, further comprising a jig-side guide portion provided on the third jig side surface, which positions the inspection jig relative to the inspection device when the jig-side clamp portion is not attached to the inspection device. (Appendix 3) An inspection jig as described in Appendix 1 or 2, characterized in that the first jig side connector portion is separated into a first separable connector having a signal line and a second separable connector having a power line. (Appendix 4) An inspection jig described in any one of appendices 1 to 3, characterized in that it has an attachment portion provided on a side surface of the first jig and capable of attaching multiple types of inspection objects having different shapes. (Appendix 5) the jig-side connector portion includes a second jig-side connector portion provided on a side surface of the first jig and electrically connected to the inspection object; An inspection jig described in any one of appendices 1 to 4, characterized in that the second jig side connector portion is capable of connecting different connector portions of multiple types of inspection objects having different shapes. (Appendix 6) an inspection jig receiving portion; An inspection jig according to any one of appendices 1 to 5 attached to the inspection jig receiving portion; An inspection device comprising: [Explanation of symbols]

[0088] 1 Inspection device, 2 Linear conveyance system, 3 Jig receiving portion, 4, 4A, 4B, 4C Inspection jig, 21 Track module, 21a Base, 21b Stator, 21c First position detection portion, 21d, 21e Guide rail, 21f Bottom, 21g Holding portion, 21h, 21i Guide rail mounting portion, 21j Through hole, 21k Coil, 21m Stator side connector portion, 21n, 33a, 43a Signal line, 21o, 33b, 43b Power line, 22 Mover, 22a Mover body, 22b Motor magnet, 22c Second position detection portion, 22d, 22e Guide roller, 22f Magnet mounting portion, 22g, 22h Guide roller mounting portion, 22i, 22j Guide roller shaft, 23 Conveyor line, 31 Receiving portion side main body portion, 31a First receiving portion side surface, 31b Second receiving portion side surface, 31c Third receiving portion side surface, 31d Fourth receiving portion side surface, 31e Fifth receiving portion side surface, 31f Sixth receiving portion side surface, 32 Receiving portion side clamp portion, 32a Convex portion, 32b Wall portion, 32c Receiving portion side contact surface, 33 Receiving portion side connector portion, 34 Receiving portion side guide portion, 41 Jig side main body portion, 41a First jig side surface, 41b Second jig side surface, 41c Third jig side surface, 41d Fourth jig side surface, 41e Fifth jig side surface, 41f Sixth jig side surface, 42 Jig side clamp portion, 42a Peripheral wall portion, 42b Recessed portion, 42c Jig side contact surface, 43 Jig side connector portion, 43A First jig side connector portion, 43B, 43B1, 43B2 Second jig side connector portion, 43c first separation connector, 43d second separation connector, 44 jig side guide portion, 45, 45A, 45B mounting portions, 45a, 45a1, 45a2 positioning pins, 45b, 45b1, 45b2 screw holes.

Claims

1. An inspection jig for detachably fixing an inspection object to an inspection device, a jig-side main body portion having a first jig side surface to which the inspection object is attached and a second jig side surface facing away from the first jig side surface; a plurality of jig-side clamps provided on a side surface of the second jig and attached to the inspection device; a jig-side connector portion that electrically connects the inspection object and the inspection device; Equipped with Each of the plurality of jig-side clamping portions is disposed on an outer periphery of the second jig side surface, the jig-side connector portion includes a first jig-side connector portion provided on a side surface of the second jig and electrically connected to the inspection device; the first jig-side connector portion is disposed at a position closer to the center of the second jig side surface than the jig-side clamp portions; An inspection jig, characterized in that two of the plurality of jig-side clamping portions are arranged with the first jig-side connector portion therebetween.

2. the jig-side main body portion has a third jig side surface different from the first jig side surface and the second jig side surface, 2. The inspection jig according to claim 1, further comprising a jig-side guide portion provided on the third jig side surface, which positions the inspection jig relative to the inspection device when the jig-side clamp portion is not attached to the inspection device.

3. 2. The inspection jig according to claim 1, wherein the first jig-side connector portion is separated into a first separable connector having a signal line and a second separable connector having a power line.

4. 2. The inspection jig according to claim 1, further comprising a mounting portion provided on a side surface of the first jig, to which a plurality of types of inspection objects having different shapes can be mounted.

5. the jig-side connector portion includes a second jig-side connector portion provided on a side surface of the first jig and electrically connected to the inspection object; 2. The inspection jig according to claim 1, wherein the second jig-side connector portion is connectable to different connector portions of a plurality of types of the inspection objects having different shapes.

6. an inspection jig receiving portion; The inspection jig according to any one of claims 1 to 5, which is attached to the inspection jig receiving portion; An inspection device comprising:

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