Antenna package and manufacturing method of antenna package

Abstract

To provide an antenna package.SOLUTION: An antenna package contains: a glass substrate; a plurality of antennas; a multilayer circuit structure; and a plurality of radio frequency chips. The glass substrate includes: a first front surface; and a second front surface. The plurality of antennas is arranged onto the first substrate of the glass substrate. The multilayer circuit structure includes: a first front surface; and a second front surface. The plurality of radio frequency chips is arranged onto the first front surface of the multilayer circuit structure. The second surface of the glass substrate is adhered onto the second front surface of the multilayer circuit structure.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to earlier applications, U.S. Provisional Application No. 63 / 486,103, filed February 21, 2023, and U.S. Patent Application No. 18 / 317,304, filed May 15, 2023, the entire contents of which are incorporated herein by reference.

[0002] Technical Field The present disclosure relates to antenna packages, and more particularly to antenna packages including large-scale antenna arrays. [Background technology]

[0003] In modern wireless communication technologies, satellite communications are becoming more competitive with traditional terrestrial communications technologies due to their better signal coverage and wider bandwidth. To achieve satellite communications, large-scale phased-array antennas capable of beamforming and high power gain are required. However, large-scale phased-array antennas require a much larger substrate area than traditional non-array antennas. Therefore, the manufacturing process is difficult and costly. Furthermore, incorporating array antennas into a package together with corresponding radio frequency (RF) chips makes mass production more difficult. Therefore, new antenna packages need to be developed to increase yield and reduce manufacturing costs. Summary of the Invention [Means for solving the problem]

[0004] One aspect of the present disclosure provides an antenna package. The antenna package includes a glass substrate, multiple antennas, a multilayer circuit structure, and multiple radio frequency chips. The glass substrate has a first surface and a second surface, and the antennas are disposed on the first surface of the glass substrate. The multilayer circuit structure has a first surface and a second surface, and the multiple radio frequency (RF) chips are disposed on the first surface of the multilayer circuit structure. The second surface of the glass substrate is bonded to the second surface of the multilayer circuit structure.

[0005] Another aspect of the present disclosure provides a method for manufacturing an antenna package, the method including the steps of providing a glass substrate having a first surface and a second surface, providing a multilayer circuit structure having a first surface and a second surface, bonding the second surface of the glass substrate to the second surface of the multilayer circuit structure, and disposing a plurality of antennas on the first surface of the glass substrate. [Brief explanation of the drawings]

[0006] The present disclosure can be more fully understood by reference to the detailed description and claims when considered in conjunction with the drawings, wherein like reference numerals refer to like elements throughout.

[0007] [Figure 1A] 1 shows an antenna package according to a comparative embodiment. [Figure 1B] 10 shows an antenna package according to another comparative embodiment. [Figure 2] 1 illustrates an antenna package according to an embodiment of the present disclosure. [Figure 3] 3 illustrates a top view of the antenna package of FIG. 2 according to an embodiment of the present disclosure. [Figure 4] 1 illustrates an antenna package according to another embodiment of the present disclosure. [Figure 5] 1 shows a flowchart of a method for manufacturing an antenna package according to an embodiment of the present disclosure. [Figure 6A] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6B] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6C] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6D] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6E] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6F] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. [Figure 6G] 6A to 6C are cross-sectional views illustrating steps in a manufacturing process of the antenna package of FIG. 2 according to the method of FIG. 5. DETAILED DESCRIPTION OF THE INVENTION

[0008] The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Below, specific examples of elements and arrangements are described to simplify the disclosure. It should be understood that these are merely examples and are not intended to be limiting. For example, in the following description, a reference to a first feature being formed above or on a second feature may include an embodiment in which the first feature and the second feature are formed in direct contact with each other, or an embodiment in which an additional feature is formed between the first feature and the second feature such that the first feature and the second feature are not in direct contact with each other. Additionally, the present disclosure may repeat reference numerals and / or characters in various examples. This repetition is for the purpose of brevity and clarity and does not, in itself, indicate a relationship between the various embodiments and / or configurations described.

[0009] Additionally, spatially relative terms such as "beneath," "below," "lower," "above," "upper," "on," and the like may be used herein for ease of description to describe the relationship of one element or feature to another, as shown in the drawings. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the drawings. The device may be oriented in other ways (rotated 90 degrees or oriented in other directions), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0010] As used herein, terms such as "first," "second," and "third" describe various elements, components, regions, layers, and / or sections, and these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or section from another element, component, region, layer, or section. As used herein, terms such as "first," "second," and "third" do not imply a sequence or order unless clearly indicated by context.

[0011] FIG. 1A illustrates an antenna package 900 according to a comparative embodiment. The antenna package 900 is packaged based on antenna-in-package (AiP) technology. As shown in FIG. 1A , a typical AiP structure 901 can be considered as a module including a package substrate 902, multiple antennas 904, and one or more RF chips 906. The antennas 904 and RF chips 906 are disposed on the upper surface of the package substrate 902. To realize a phased array antenna, multiple AiP structures 901 can be further assembled on a printed circuit board (PCB) 908. That is, when the AiP structure 901 is used, the antenna package 900 requires two substrates (i.e., the substrate 902 and the PCB 908). In this case, the manufacturing process of the antenna package 900 including the phased array antenna is complicated and costly.

[0012] FIG. 1B illustrates an antenna package 910 according to another comparative embodiment. The antenna package 910 uses a high-density interconnect (HDI) printed circuit board (PCB) 912. Using HDI technology allows designers to place more components on both sides of a raw PCB. For example, an antenna 914 can be formed on a first side 912A of the HDI PCB 912, and an RF chip 916 can be attached to a second side 912B of the HDI PCB 912. Therefore, unlike the antenna package 900, the antenna package 910 requires only a single-level substrate. However, because the HDI PCB 912 has a fairly high thermal expansion coefficient, it is prone to profile defects such as warpage in processes that require high temperatures. For example, a curing process for molding the RF chip 916 at temperatures between 200°C and 250°C can cause warpage in the HDI PCB 912, which can lead to reliability issues with flip-chip bonding and molding of the RF chip 916. Furthermore, the warpage can become even more severe as the size of the antenna package 910 increases. In such a case, to maintain a flat profile of the antenna package 910, encapsulation of the RF chip 916 can be performed separately, but this is very time-consuming and not cost-effective. Also, to reduce the degree of warpage, the HDI PCB 912 may need to include more layers (e.g., more than 10 layers) to form a symmetric stacked structure with respect to the core layer, which inevitably increases the thickness of the antenna package 910. Especially when a low-dielectric-constant material is selected as the stacked dielectric, the more layers there are, the higher the manufacturing cost.

[0013] FIG. 2 illustrates an antenna package 100 according to an embodiment of the present disclosure. The antenna package 100 includes a glass substrate 110, multiple antennas 120, a multilayer circuit structure 130, and multiple RF chips 140. As illustrated in FIG. 2 , the glass substrate 110 has a first surface 110A and a second surface 110B, and the antenna 120 is disposed on the first surface 110A of the glass substrate 110. The multilayer circuit structure 130 has a first surface 130A and a second surface 130B, and the RF chip 140 is disposed on the first surface 130A of the multilayer circuit structure 130. The second surface 110B of the glass substrate 110 is bonded to the second surface 130B of the multilayer circuit structure 130 by an adhesive material 150 that is applied to the second surface 130B of the multilayer circuit structure 130 and surrounds the glass substrate 110.

[0014] In this embodiment, the glass substrate 110 has a low coefficient of thermal expansion (CTE), which provides sufficient rigidity to the multilayer circuit structure 130 and prevents warping of the antenna package 100 at high temperatures (e.g., 200°C to 250°C), thereby improving flexibility in the manufacturing process. For example, due to the structural reinforcement and low CTE of the glass substrate 110, the molding layer 160 on the RF chip 140 can be formed and cured in a single molding process without worrying about warping. This makes the molding process more efficient, and as shown in FIG. 2, the molding layer 160 can form a continuous seal between multiple RF chips 140 or between an array of RF chips 140. Furthermore, by incorporating the glass substrate 110 into the antenna package 100, the number of layers of the multilayer circuit structure 130 can be reduced from 10 or more to 4 or 6 layers, which not only reduces manufacturing costs but also improves resistance to warping, especially in large-scale applications (e.g., 200 mm x 200 mm or larger).

[0015] In this embodiment, the multilayer circuit structure 130 may be a high-density interconnect printed circuit board or a conventional printed circuit board. In some embodiments, the multilayer circuit structure includes a core 132, multiple interconnect layers 134A, 134B or build-up layers, and multiple interconnect layers 136A, 136B or build-up layers. As shown in FIG. 2 , the interconnect layers 134A and 134B are disposed between the core 132 and a first surface 130A of the multilayer circuit structure 130, and the interconnect layers 136A and 136B are disposed between the core 132 and a second surface 130B of the multilayer circuit structure 130.

[0016] The core 132 and the interconnect layers 134A, 134B, 136A, and 136B can provide a signal transmission path between the antenna 120 and the RF chip 140. In some embodiments, the core 132 and the interconnect layers 134A, 134B, 136A, and 136B can include conductive traces to provide the signal transmission path. The interconnect layers 134A, 134B, and 136A can also include a dielectric material interposed between the conductive traces to insulate different traces from each other. In some embodiments, the dielectric portion of the multilayer circuit structure 130 can include a prepreg material, and the conductive portion of the multilayer circuit structure 130 can include a conductive material such as copper, tungsten, aluminum, titanium, tantalum, or alloys thereof. In some embodiments, the core 132 can be a copper clad laminate (CCL). In some embodiments, the core 132 can include plated-through holes.

[0017] In this embodiment, the interconnect layer 134B has a plurality of feed lines 172 on the first surface 130A of the multilayer circuit structure 130 that is coupled to the RF chip 140. The feed lines 172 can be considered as input / output ports of the antenna 120 and can supply RF signals to / from the antenna 120. For example, an RF signal generated by the RF chip 140 can be supplied to the antenna 120 via the feed lines 172, and the RF signal supplied to the feed lines 172 can be further transmitted to the antenna 120 via a transmission path provided by the interconnect layers 134A, 134B, 136A, and 136B and the core 132 in the multilayer circuit structure 130.

[0018] Also, in this embodiment, the glass substrate 110 may not have vias, i.e., may not have via holes penetrating the glass substrate 110. Therefore, the first surface 110A and the second surface 110B of the glass substrate 110 may be entirely flat and complete. In such a case, transmission of RF signals between the antenna 120 and the RF chip 140 partially relies on wireless coupling through the glass substrate 110.

[0019] Electromagnetic coupling technology is applied to wirelessly connect the antenna 120 and the RF chip 140 through the glass substrate 110. That is, in this embodiment, communication between the antenna 120 and the RF chip 140 is based in part on RF signals passing through the glass substrate 110, which is substantially transparent or has acceptable attenuation for the RF band. In some embodiments, the interconnect layer 136B may have a ground plane 174 on the second surface 130B of the multilayer circuit structure 130. That is, the ground plane 174 may be formed on the second surface 130B of the multilayer circuit structure 130. One or more openings (not shown) may also be formed in the ground plane 174 to allow transmission of electromagnetic signals.

[0020] As a result, an RF signal supplied to the feed line 172 can be transmitted via the conductive path provided by the interconnect layers 134A, 136A to the opening in the ground plane 174 and then wirelessly transmitted from the opening in the ground plane 174 through the glass substrate 110 to the antenna 120. Similarly, an RF signal received from the air by the antenna 120 can be transmitted wirelessly through the glass substrate 110 to the opening and further supplied to the feed line 172 via the conductive path provided by the interconnect layers 134A, 136A.

[0021] Because the distance between the antenna 120 and the ground plane 174 may affect the transmission of RF signals, the thickness of the glass substrate 110 should be determined according to the design of the antenna 120 and the operating frequency of the RF signal. In some embodiments, the thickness of the glass substrate 110 may be 300 μm to 1000 μm.

[0022] In such cases, the glass substrate 110 can provide sufficient thickness between the antenna 120 and the ground plane 174, so that the number of interconnect layers 134A, 134B, 136A, and 136B can be fewer than the number of layers required for an HDI PCB-based antenna package such as that shown in FIG. 1B. In some embodiments, the total number of interconnect layers in the multilayer circuit structure 130 can be six or less, the thickness of each interconnect layer, such as 134A or 136A, can be greater than 50 μm, and the dielectric portion of the interconnect layer 134A or 136A can be composed of a prepreg material, FR-4, or FR-5. Also, in some embodiments, the interconnect layers 134A, 134B, 136A, and 136B can be formed symmetrically with respect to the core 132. That is, the number of interconnect layers 134A and 134B can be the same as the number of interconnect layers 136A and 136B.

[0023] Additionally, because the distance between the ground plane 174 and the feed line 172 can significantly affect the impedance between the ground plane 174 and the feed line 172, the thickness of the core 132 may be determined according to a desired matching impedance between the ground plane 174 and the feed line 172 to reduce signal loss. In some embodiments, the coreless multilayer circuit structure 130 may be implemented within the antenna package 100 described herein.

[0024] 3 shows a top view of an antenna package 100 according to an embodiment of the present disclosure. As shown in FIGS. 2 and 3 , the adhesive material 150 is applied to the second surface 130B of the multilayer circuit structure 130 and surrounds the glass substrate 110. In this case, the area of ​​the glass substrate 110 is smaller than the area of ​​the multilayer circuit structure 130, so that the adhesive material 150 can be applied to the multilayer circuit structure 130 in a space that allows the adhesive material 150 to surround the glass substrate 110 and thereby secure the glass substrate 110 to the multilayer circuit structure 130. In some embodiments, the width W1 of the adhesive material 150 applied to the multilayer circuit structure 130 may be greater than 2 mm, and the height H1 of the adhesive material 150 laminated to the multilayer circuit structure 130 may be greater than one-third the height of the glass substrate 110. In some embodiments, if the adhesive material 150 has sufficient strength to secure the glass substrate 110 to the multilayer circuit structure 130, the width W1 may be less than 2 mm and / or the height H1 may be less than one-third of the height of the glass substrate 110.

[0025] In this embodiment, the adhesive material 150 may include a UV adhesive and / or silicone. However, the present disclosure is not limited thereto. In some embodiments, other types of adhesive materials may be used. Also, instead of applying the adhesive material around the glass substrate 110, the adhesive material may be applied between the glass substrate 110 and the multilayer circuit structure 130. FIG. 4 shows an antenna package 200 according to another embodiment of the present disclosure. The antenna package 200 and the antenna package 100 have similar structures, but the adhesive material 250 used in the antenna package 200 is applied between the second surface 110B of the glass substrate 110 and the second surface 130B of the multilayer circuit structure 130.

[0026] In such a case, the distance between the antenna 120 and the ground plane 174 may affect the transmission of RF signals, so the thickness of the adhesive material 250 disposed between the antenna 120 and the ground plane 174 is carefully determined. In some embodiments, the thickness of the adhesive material 250 is about 50 μm, and the thickness of the glass substrate is 300 μm to 1000 μm.

[0027] 5 shows a flowchart of a manufacturing method M1 of an antenna package according to one embodiment of the present disclosure. Method M1 includes steps S110 to S170. In some embodiments, method M1 can be applied to the manufacture of an antenna package 100, and FIGS. 6A to 6G are cross-sectional views showing the manufacturing process of the antenna package 100 according to method M1.

[0028] As shown in FIG. 6A, in step S110, a glass substrate 110 is provided. Generally, glass substrates 110 have advantages such as good insulation and low electrical loss (especially at high operating frequencies). Furthermore, the glass substrate 110's low CTE makes it an excellent candidate for preventing warpage of the antenna package 100. In some embodiments, the glass substrate 110 is rectangular or square with four straight sides. In some embodiments, the antenna package may be a large-scale antenna package capable of accommodating more than 256 antennas 120, and the length of one side of the glass substrate 110 (i.e., the side length of the antenna package 100) is approximately 200 mm or more. In some embodiments, the thickness of the glass substrate 110 may be 0.3 mm to 1 mm, depending on the distance between the ground plane and the antenna patch, which is determined based on important parameters of RF signal transmission.

[0029] As shown in FIG. 6B , in step S120, a multilayer circuit structure 130 is prepared. The multilayer circuit structure 130 has a first surface 130A and a second surface 130B, and the first surface 130A can be used to receive the RF chip 140 in a subsequent process. In some embodiments, the multilayer circuit structure 130 may be a core or coreless PCB substrate with or without high-density interconnect features, as long as the impedance between the ground plane 174 and the power supply line 172 (shown in FIG. 2 ) can be matched by the design of the conductive line routing. In some embodiments, the multilayer circuit structure 130 may include four or six build-up layers with a total thickness of several hundred micrometers. The dielectric of the build-up layers may include prepreg material, FR-4, or FR-5.

[0030] Before attaching the RF chip 140 to the first surface 130A of the multilayer circuit structure 130, in step S130, the second surface 130B of the multilayer circuit structure 130 can be bonded to the second surface 110B of the glass substrate 110, as shown in FIG. 6C. In this embodiment, as shown in FIG. 6C, the second surface 130B of the multilayer circuit structure 130 can be bonded to the second surface 110B of the glass substrate 110 by applying an adhesive material 150 to the second surface 130B of the multilayer circuit structure 130 and surrounding the glass substrate 110 (see also FIG. 3). However, the present disclosure is not limited thereto.

[0031] 4, the second surface 130B of the multilayer circuit structure 130 can be bonded to the second surface 110B of the glass substrate 110 by applying an adhesive material 250 between the second surface 130B of the multilayer circuit structure 130 and the second surface 110B of the glass substrate 110. In such cases, the adhesive material 250 may include a material that has a low CTE and a low loss tangent and simultaneously provides sufficient adhesion between the multilayer circuit structure 130 and the glass substrate 110. This allows the glass substrate 110, also made of a low CTE material, to maintain the flatness of the multilayer circuit structure 130 even when the antenna package 100 is designed for a large area (e.g., 200 mm × 200 mm or more) and is manufactured under high temperature conditions (e.g., 200°C to 250°C).

[0032] In some embodiments, the thickness of adhesive material 250 may be 30 μm to 100 μm, which is significantly thinner than the thickness of glass substrate 110 so as not to substantially impede the distance designed for electromagnetic signal transmission. Adhesive material 250 may also be selected from materials capable of relieving stress. In some embodiments, glass substrate 110 may be bonded to multilayer circuit structure 130 using adhesive material 250 made of a dry film through a lamination process. In some embodiments, both adhesive materials 150 and 250 may be applied to further enhance adhesion between glass substrate 110 and multilayer circuit structure 130.

[0033] After the glass substrate 110 is bonded to the multilayer circuit structure 130, in step S140, the RF chip 140 can be disposed on the first surface 130A of the multilayer circuit structure 130. In this embodiment, the RF chip 140 may be a bare chip, and as shown in FIG. 6D, in step S140, the RF chip 140 can be disposed on the multilayer circuit structure 130 by a flip-chip process. In this case, the RF chip 140 can be attached to the first surface 130A of the multilayer circuit structure 130 by soldering or other bonding techniques that require high-temperature conditions (e.g., 200°C to 250°C) without worrying about warping of the multilayer circuit structure 130.

[0034] In some embodiments, each of the RF chips 140 may be used to control multiple antennas 120. For example, an RF chip 140 may be coupled to four different antennas 120 for control. In such a case, if the antennas 120 are arranged as a 16x16 antenna array within the antenna package 100, the antenna package 100 may have 8x8 RF chips in the multilayer circuit structure 130. However, the present disclosure is not limited in this respect.

[0035] Furthermore, by bonding the multilayer circuit structure 130 to or supporting it on the glass substrate 110, warping of the antenna package 100 at high temperatures (e.g., 200°C to 250°C) can be prevented, and thus the RF chips 140 can be encapsulated in a single molding process in S150. For example, as shown in FIG. 6E, a molding material 162 can be applied to the first surface 130A of the multilayer circuit structure 130 to cover all of the RF chips 140 in the form of individual bare chips arranged on the first surface 130A of the multilayer circuit structure 130. The molding material 162 can then be hardened by increasing the temperature while maintaining the flatness of the multilayer circuit structure 130. As a result, a molding layer 160 can be formed that continuously encapsulates multiple RF chips 140, as shown in FIG. 2. Alternatively, there are no molding boundaries or voids between adjacent RF chips 140. In some embodiments, the use of a glass substrate 110 can control the warpage of the antenna package 100 to less than 0.75%. That is, when the length of one side of the glass substrate 110 is 200 mm, the height distortion of the antenna package 100 due to warpage can be less than 1.5 mm (i.e., 200 mm×0.75%). However, the present disclosure is not limited thereto.

[0036] In some embodiments, the molding material 162 may be a molding-underfill (MUF) material, which can fill the gap between the bonding or soldering structure under the RF chip 140 and the first surface 130A of the multilayer circuit structure 130 in one step and mold the RF chip 140 thereon. However, the present disclosure is not limited thereto. In some embodiments, the molding process may use two different materials: an underfill material and a molding material. For example, an underfill material such as capillary underfill (CUF) may be applied to fill the gap between the bonding or soldering structure under the RF chip 140 and the first surface 130A of the multilayer circuit structure 130, and then a molding material such as molding epoxy may be applied to the RF chip 140 and the underfill material. In some embodiments, the molding process may be performed by vacuum lamination of a dry film.

[0037] 6F, in step S160, multiple antennas 120 are disposed on the first surface 110A of the glass substrate 110. The antennas 120 may be arranged as a phased array antenna that can impart different phase shifts to a single radiator to achieve beamforming for long-distance transmission, such as the aforementioned satellite communications.

[0038] In some embodiments, the antenna 120 may be a patch antenna having a flat profile, which can be disposed or plated on the first surface 110A of the glass substrate 110. However, the present disclosure is not limited thereto. In some embodiments, the antenna 120 may be disposed on the first surface 110A of the glass substrate 110 by printing a metal material such as gold paste, silver paste, copper paste, or a mixture thereof. After disposing the antenna 120 on the first surface 110A of the glass substrate 110, a protective layer 180 may be formed on the first surface 110A of the glass substrate 110 in step S170 to protect the antenna 120, as shown in FIG. 6G.

[0039] In some embodiments, because the antenna 120 needs to be aligned with the opening in the ground plane 174, it is preferable to place the antenna 120 on the substrate glass 110 after the glass substrate 110 is bonded to the multilayer circuit structure 130 so that the alignment can be performed more accurately. However, the present disclosure is not limited in this respect.

[0040] Note that the order shown in the flowchart in FIG. 5 does not limit the order in which method M1 is performed. In some embodiments, steps S110 to S170 of method M1 may be performed in a different order. For example, steps S110 and S120 may be performed in parallel by different factories. Also, in some embodiments, if warpage of the multilayer circuit structure 130 is tolerable, the RF chip 140 may be placed on the multilayer circuit structure 130 (step S140) even before bonding the multilayer circuit structure 130 to the glass substrate 110 (step S130). In such a case, the molding process (step S150) may also be performed before step S130. However, in some embodiments, to reduce warpage of the multilayer circuit structure 130, the molding process for sealing the top of the RF chip 140 may be omitted, and only the underfill process may be performed to protect the soldered structure of the RF chip 140. Also, steps S160 and S170 may be performed before step S130. That is, the antenna 120 may be disposed on the glass substrate 110 before bonding the glass substrate 110 to the multilayer circuit structure 130. Alternatively, steps S160 and S170 may be performed after step S130 and before steps S140 and S150.

[0041] The antenna package and the manufacturing method of the antenna package according to the embodiment of the present disclosure can laminate a circuit board on a glass substrate. In such a case, the low CTE glass substrate can provide sufficient rigidity to the circuit board. Therefore, even if the antenna package has a large area (e.g., 200 mm x 200 mm or more) and requires processing at high temperatures (e.g., 200°C to 250°C), the antenna package can maintain its flatness profile. This allows multiple RF chips to be molded in a single molding process. As a result, the manufacturing process can be simplified and manufacturing costs can be reduced.

[0042] Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions, and alterations can be made in the present disclosure without departing from the spirit and scope of the disclosure as defined by the appended claims. For example, many of the processes discussed above can be implemented in different ways, substituted with other processes, or combined.

[0043] Furthermore, the scope of the present application is not intended to be limited to the particular embodiments of the processes, machines, manufacture, compositions of matter, means, methods, and steps described herein. Those skilled in the art will readily appreciate from this disclosure that any now-existing or future-developed process, machine, manufacture, composition of matter, means, method, or step that performs substantially the same function or achieves substantially the same result as the corresponding embodiment described herein can be utilized in accordance with the present disclosure. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps. [Explanation of symbols]

[0044] 100 Antenna Package 110 Glass substrate 110A: First surface of glass substrate 110 110B: Second surface of glass substrate 110 120 Antenna 130 Multilayer circuit structure 130A First surface of the multilayer circuit structure 130 130B Second surface of the multilayer circuit structure 130 132 Core 134A, 134B Interconnection layers 136A, 136B Interconnection layers 140 Radio frequency chip 150 Adhesive material 160 Forming layer 162 Forming material 172 Feeding line 174 Ground plane 180 Protection layer 200 Antenna package 250 Adhesive material 900 Antenna package 901 Antenna in-package structure 902 Package substrate 904 Antenna 906 Radio frequency chip 908 Printed circuit board 910 Antenna package 912 High-density interconnect printed circuit board 912A First surface of the high-density interconnect printed circuit board 912 912B Second surface of the high-density interconnect printed circuit board 912 914 Antenna 916 Radio frequency chip W1 Width of the adhesive material 150 H1 Height of the adhesive material 150 M1 Manufacturing method of the antenna package

Claims

1. a glass substrate having a first surface and a second surface; a plurality of antennas disposed on a first surface of the glass substrate; a multilayer circuit structure having a first surface and a second surface; a plurality of radio frequency (RF) chips disposed on a first surface of the multilayer circuit structure; The second surface of the glass substrate is adhered to the second surface of the multilayer circuit structure.

2. The multilayer circuit structure comprises: The core and a first number of first interconnect layers disposed between the core and a first surface of the multilayer circuit structure; 10. The antenna package of claim 1, further comprising: a second number of second interconnect layers disposed between said core and a second surface of said multilayer circuit structure.

3. The antenna package of claim 2 , wherein the thickness of each of the first interconnect layers is greater than 50 μm.

4. the first interconnect layer having a plurality of feed lines on a first surface of the multilayer circuit structure coupled to the plurality of RF chips; The antenna package of claim 2 , wherein the second interconnect layer has a ground plane on a second surface of the multilayer circuit structure.

5. The antenna package of claim 2 , wherein the sum of the first number and the second number is six or less.

6. 2. The antenna package according to claim 1, wherein the glass substrate has a thickness of 300 μm to 1000 μm.

7. 10. The antenna package of claim 1, further comprising at least one of a first adhesive material applied to the second surface of the multilayer circuit structure and surrounding the glass substrate, and a second adhesive material applied between the second surface of the glass substrate and the second surface of the multilayer circuit structure.

8. 8. The antenna package of claim 7, wherein the plurality of antennas are printed on the first surface of the glass substrate by using at least one of a gold paste, a silver paste, and a copper paste.

9. The antenna package of claim 1 , further comprising a molding layer covering the RF chip on a first surface of the multilayer circuit structure, the molding layer forming a continuous seal to the RF chip.

10. 10. The antenna package of claim 1, wherein the dielectric portion of the multilayer circuit structure comprises a prepreg material, FR-4, or FR-5.

11. 10. The antenna package of claim 1, having an area greater than 200 mm x 200 mm.

12. providing a glass substrate having a first surface and a second surface; providing a multi-layer circuit structure having a first surface and a second surface; bonding a second surface of the glass substrate to a second surface of the multilayer circuit structure; and disposing a plurality of antennas on the first surface of the glass substrate.

13. 13. The method of claim 12, further comprising the step of, after bonding the glass substrate to the multilayer circuit structure, placing a plurality of radio frequency (RF) chips on a first surface of the multilayer circuit structure by a flip-chip process.

14. 14. The method of claim 13, further comprising the step of encapsulating the plurality of RF chips in a single molding process after bonding the glass substrate to the multi-layer circuit structure.

15. The one-time molding process includes: applying a molding material to a first surface of the multilayer circuit structure; and curing the molding material.

16. The multilayer circuit structure comprises: The core and a first number of first interconnect layers disposed between the core and a first surface of the multilayer circuit structure; 13. The method of claim 12, further comprising: a second number of second interconnect layers disposed between the core and a second surface of the multilayer circuit structure.

17. the first interconnect layer having a plurality of feed lines on a first surface of the multilayer circuit structure coupled to the plurality of RF chips; 17. The method of claim 16, wherein the second interconnect layer has a ground plane on a second surface of the multilayer circuit structure.

18. The step of adhering the glass substrate to the multilayer circuit structure comprises: applying a first adhesive material to a second surface of the multilayer circuit structure and surrounding the glass substrate; applying a second adhesive material between the second surface of the glass substrate and the second surface of the multilayer circuit structure; The method of claim 12 , comprising at least one of:

19. The method of claim 12 , wherein adhering the glass substrate to the multilayer circuit structure comprises performing a dry film lamination process.

20. The method of claim 12 , further comprising the step of forming a protective layer on the first surface of the glass substrate to protect the plurality of antennas before the bonding step.

Images