Reactor and apparatus for treating effluent gas stream

Abstract

To provide a reactor for pyrolysis of an effluent stream from a manufacturing process using microwaves and an apparatus for the same.SOLUTION: A reactor for treating gaseous an effluent gas stream includes an inlet module, a reaction module, one or more microwave modules, and a sensor. The inlet module includes one or more guiding conduits configured to guide an effluent stream from a manufacturing process. The reaction module is in fluid communication with the inlet module and includes a body and a reaction chamber. The guiding conduit is connected to the reaction chamber. The microwave module includes a microwave generation unit and a waveguide unit, wherein the waveguide unit is connected to the reaction chamber and configured to transmit microwave radiation generated by the microwave generation unit into the reaction chamber. The sensor is disposed within the reaction chamber and configured to receive the microwave radiation from the waveguide unit and convert the microwave radiation into thermal energy.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a reactor and an apparatus for treating gaseous pollutants, and more particularly to a reactor and an apparatus for thermally decomposing effluents from a manufacturing process using microwaves. [Background technology]

[0002] In the manufacturing, electronics, and chemical industries, for example, the manufacturing processes for semiconductors, displays, solar panels, and films all generate gaseous pollutants, including various chemicals that are harmful to humans and the environment, necessitating the installation of equipment to treat the gaseous pollutants. Common methods include combustion, plasma, water washing, and catalytic methods, with combustion and plasma methods currently providing the most efficient decomposition. Examples of prior art include the devices disclosed in U.S. Patent Nos. US12161964B2, US12158266B2, and US11985754B2, and U.S. Patent Application Publication Nos. US20240375158A1, US20240381519A1, and US20240082782A1.

[0003] However, combustion-type exhaust gas treatment devices require fuel, resulting in significant energy consumption and greenhouse gas emissions, as well as high maintenance costs and large volume. Plasma-type exhaust gas treatment devices require complex power systems and electric field designs, resulting in high costs, low stability, and the risk of electromagnetic interference. Summary of the Invention

[0004] The present disclosure provides a reactor for treating gaseous pollutants, comprising: an air intake module; a reaction module; one or more microwave modules; and a sensor; the air intake module comprises one or more guide pipes configured to guide discharge from a manufacturing process; the reaction module is fluidly connected to the air intake module; the reaction module comprises a body and a reaction chamber defined by the body; the guide pipes of the air intake module are in communication with the reaction chamber; the microwave module is connected to the reaction module and comprises a microwave generating unit and a wave-guiding unit connected to the microwave generating unit; the wave-guiding unit is connected to the reaction chamber and transmits microwave radiation generated in the microwave generating unit to the reaction chamber; the sensor is disposed in the reaction chamber and configured to receive the microwave radiation from the wave-guiding unit and convert the microwave radiation into thermal energy; and the temperature in the reaction chamber is at least 1000°C.

[0005] The present disclosure further provides an apparatus for treating gaseous pollutants, comprising the reactor described above, a water tank, and a secondary reactor, wherein the water tank is connected downstream of the reactor to receive the effluent from the reactor, and the secondary reactor is connected to the water tank to receive the effluent flowing through the water tank. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a block diagram of a thermal reactor according to an example of the present disclosure. [Figure 2A] FIG. 1 is a perspective view of a thermal reactor according to an example of the present disclosure. [Figure 2B] FIG. 2B is an exploded view of FIG. 2A. [Figure 2C] FIG. 2B is a schematic diagram of the cross section of FIG. 2A. [Figure 3] FIG. 2B is a three-dimensional cross-sectional schematic diagram of FIG. 2A. [Figure 4] FIG. 2B is a schematic diagram of a longitudinal section of FIG. 2A. [Figure 5A] FIG. 2 is a perspective view of a thermal reactor according to another example of the present disclosure. [Figure 5B] FIG. 5B is an exploded view of FIG. 5A. [Figure 6] FIG. 5B is a three-dimensional cross-sectional schematic diagram of FIG. 5A. [Figure 7] FIG. 5B is a schematic diagram of a longitudinal section of FIG. 5A. [Figure 8] 1 is a perspective view of an apparatus for treating gaseous pollutants according to an example of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0007] The present disclosure provides a reactor, particularly a thermal reactor, for treating gaseous pollutants. The reactor can be used as an abatement device to treat pollutants, such as waste gases, which are effluent streams from manufacturing processes for semiconductors, display panels, solar panels, etc. Furthermore, the reactor can treat substances harmful to the environment and human health, such as fluorine-containing compounds (PFCs), silane and its derivatives, chlorine-containing compounds, nitrogen-containing compounds, volatile organic compounds (VOCs), and metal organic compounds, which are generated in chemical vapor deposition (CVD) or etching processes. The thermal reactor can be a standalone device for treating gaseous pollutants, or can be incorporated into a device for treating gaseous pollutants to form a part thereof. For example, the thermal reactor can be a thermal reactor in a combustion / water-washing exhaust gas treatment device or a thermal reactor in a combustion-type exhaust gas treatment device.

[0008] 1 shows a block diagram of an example of the thermal reactor, which includes an air inlet module 10, a reaction module 11, a microwave module 12, and a sensor 13. The air inlet module 10 guides an exhaust stream E from a manufacturing process to the reaction module 11, and the sensor 13 is provided in the reaction module 11. The combination of the sensor 13 and the microwave module 12 generates high temperature and heat in the reaction module 11, thereby decomposing the exhaust stream E. The microwave module 12 includes a microwave generation unit 12a and a waveguide unit 12b connected to the microwave generation unit 12a. The microwave generation unit 12a is connected to a power source and generates microwave radiation, and the waveguide unit 12b transmits the microwave radiation to the sensor 13. The reaction module 11 is configured to pass the exhaust stream E through a thermal zone, which is formed when the sensor 13 is heated by the microwave radiation. By providing the microwave radiation and the sensor 13 in combination, high temperatures for pyrolysis can be obtained with less power consumption and in a short time.

[0009] 2A to 4 show schematic diagrams of an example of the thermal reactor, which includes an abatement unit 20, a plurality of air inlet pipes 21, a sensor component 22, and a plurality of microwave modules 23. The abatement unit 20 includes an outer casing 201, a top cover component 202, and an annular base 203. The outer casing 201 is mounted on the annular base 203, which is connected to a downstream component of the thermal reactor, such as a water tank or a wet scrubber. The top cover component 202 is mounted on the outer casing 201, which includes a flange 2021 and a cover 2022. The flange 2021 is mounted on the outer casing 201, and the cover 2022 is mounted on the flange 2021. The abatement unit 20 defines a chamber, which can be divided into an upper region 20a-1, a middle region 20a-2, and a lower region 20a-3. In this example, there are four air intake pipes 21, and lid 2022 has four first through-holes 2022a, and air intake pipes 21 are provided in first through-holes 2022a. Discharge flow E is injected into the chamber from air intake ends 210 of air intake pipes 21, and air intake pipes 21 are provided upright, i.e., perpendicular to the plane of lid 2022 or the horizontal plane (or the ground); in another example, air intake pipes 21 can be provided obliquely, for example, at an angle of 60 to 90 degrees from the plane or horizontal plane.

[0010] In some examples, the abatement unit 20 may be referred to as a reaction module, the chamber defined by the abatement unit 20 may be referred to as a reaction chamber, the outer cylinder 201 may be referred to as an annular wall, and the top cap component 202 may be referred to as a head component.

[0011] The sensor component 22 includes an outer sleeve 220, an inner sleeve 221, and a plurality of tubing segments 222. In one example, the outer sleeve 220, the inner sleeve 221, and the tubing segments 222 each include the same or different sensor materials (e.g., the inner sleeve 221 is made from a sensor material and another material), in another example, the outer sleeve 220, the inner sleeve 221, and the tubing segments 222 are made from the same or different sensor materials (e.g., the inner sleeve 221 is a sensor material), or in another example, at least one of the outer sleeve 220, the inner sleeve 221, and the tubing segments 222 may be made from a sensor material; for example, only the outer sleeve 220 and the inner sleeve 221 may be made from a sensor material, and the tubing segments 222 may be made from a non-sensor material.

[0012] 2C, the outer sleeve 220 and the inner sleeve 221 are both cylindrical but have different diameters. The inner sleeve 221 has a smaller diameter than the outer sleeve 220 and is disposed coaxially within the outer sleeve 220, defining an annular space 220a. A plurality of tube pieces 222, also cylindrical, are disposed within the annular space 220a. In this example, the tube pieces 222 are disposed axially symmetrically with respect to the inner sleeve 221, and the outer sleeve 220, the inner sleeve 221, and the tube pieces 222 are all disposed coaxially by extending in the same direction.

[0013] The outer sleeve 220 is disposed within the chamber of the abatement unit 20 and includes a barrel-shaped body 2201 having an annular wall 2202, an upper opening 2203, and a bottom plate 2204. The inner sleeve 221 includes a top plate 2210 and a hollow insert 2211, the top plate 2210 being disposed in the upper opening 2203 of the outer sleeve 220 and the hollow insert 2211 extending downward from a central region of the top plate 2210, passing through the interior space of the barrel-shaped body 2201, and extending to a bottom perforated hole 2205 on the bottom plate 2204.

[0014] The top plate 2210 of the inner sleeve 221 has a central through hole 2210a and four second through holes 2210b, the cover body 2022 of the top cover component 202 is provided on the top plate 2210 of the inner sleeve 221, and the hollow insert 2211 of the inner sleeve 221 defines a hollow portion 2211a, which has a first end 2211b connected to the top plate 2210 and a second end 2211c opposite to the first end 2211b.

[0015] The first end 2211b of the hollow insert 2211 has one or more inlet holes 2211d, which are formed by drilling through the top of the annular wall of the hollow insert 2211, and the hollow portion 2211a of the hollow insert 2211 communicates with the downstream end of the airflow channel formed by the annular space 220a via the inlet holes 2211d, in this example the inlet holes 2211d are lateral openings formed in the annular wall of the hollow insert 2211, and the hollow portion 2211a has a bottom opening 2211e, and the hollow insert 2211 extends downward to a bottom through hole 2205 on the bottom plate 2204 of the outer sleeve 220, in this example the hollow insert 2211 can pass below or extend to the bottom through hole 2205.

[0016] The cover 2022 is disposed above the top plate 2210, covers the central through-hole 2210a, and closes the central through-hole 2210a, so that the discharge flow E enters through the inlet hole 2211d and then flows downward into the hollow portion 2211a, the second through-holes 2210b are disposed around the central through-hole 2210a and correspond to the first through-hole 2022a of the cover 2022, and the air supply pipe 21 is connected to the pipe part 222 by the second through-hole 2210b, thereby forming an end-to-end connected air flow channel.

[0017] The pipe parts 222 are disposed in the annular space 220a and extend downward from the cover 2022, with their outlet ends 222a located in the lower region 20a-3. In other words, the outlet ports of the airflow channels are adjacent to but not in contact with the bottom plate 2204. Therefore, the exhaust flow E discharged from the outlet ends 222a flows into the annular space 220a.

[0018] In some examples, the outer sleeve 220 can be referred to as the body of the reaction module and has an annular wall. In some examples, the combination of the air inlet tube 21 and the tube piece 222 can be collectively referred to as a guide line, and the guide line can be or be part of the air inlet module 10. In other examples, the guide line can include only the air inlet tube 21, which is inserted into the top of the body of the reaction module.

[0019] In some examples, the abatement unit 20 can be referred to as the main body of the reaction module, and the top cover component 202, the annular base 203, and the outer casing 201 of the abatement unit 20 can be referred to as the top portion, the bottom portion, and the annular wall portion of the main body, respectively. The sensor component 22 extends from the top portion of the main body to an outlet opening (e.g., bottom through-hole 2205) provided in the bottom portion of the main body, and an annular space (e.g., annular space 220a) located within the annular wall portion and surrounding the sleeve is defined between the top and bottom portions, and the annular space is fluidly connected to the guide conduit to introduce the discharge flow E and is fluidly connected to one or more inlets (e.g., inlet holes 2211d) provided on the sleeve to guide the discharge flow E into the hollow portion 2211a.

[0020] In some examples, an annular space 220a may be defined between the top and bottom portions and within the annular wall 2202, surrounding the inner sleeve 221, the annular space 220a being fluidly connected to the guide conduit to introduce the discharge flow E and fluidly connected to one or more inlet holes 2211d provided in the inner sleeve 221, thereby guiding the discharge flow E into the hollow portion 2211a.

[0021] 4, in this example, the discharge flow E enters the air supply end 210 of the air supply pipe 21, then flows downward through the pipe part 222, and is discharged from the outlet end 222a into the annular space 220a of the outer sleeve 220. The discharge flow E then flows upward and inward through the inlet hole 2211d of the hollow insert 2211, enters the hollow portion 2211a, and then continues downward to be discharged from the bottom opening 2211e.

[0022] The microwave module 23 includes a microwave generating unit 231 and a wave-guiding unit 232 connected to the microwave generating unit 231, and the microwave module 23 is connected to the outer annular wall of the outer casing 201. The wave-guiding unit 232 transmits microwave radiation generated in the microwave generating unit 231 to the sensor component 22 located in the chamber of the abatement unit 20. In one example, the outer sleeve 220, the inner sleeve 221, and the tubing piece 222 are all made of a sensor material and can be collectively referred to as a sensor, which defines one or more gas channels, for example, with a pipe defined by the tubing piece 222, a pipe defined by the annular space 220a, and / or a pipe defined by the inner sleeve 221.

[0023] The sensor is configured to receive microwave radiation from the wave-guiding unit 232 and convert the microwave radiation into thermal energy, which is conducted to one or more gas channels defined by the outer sleeve 220, the inner sleeve 221, and the tubing 222. When in operation, temperatures within the reaction chamber (or the gas channels) can reach at least 1000°C.

[0024] 4, the flow direction of the exhaust flow E is approximately perpendicular to the transmission direction of the microwave radiation provided by the wave-guiding unit 232. In this example, the transmission direction may be transverse, and the transverse direction is perpendicular to the side walls of the sensor, e.g., the cylindrical walls of the outer sleeve 220, the inner sleeve 221 and / or the tubing piece 222.

[0025] 5A to 7 show schematic diagrams of another example of a thermal reactor, which includes a main body 30, an air inlet pipe 31, a sensor component 32, and a plurality of microwave modules 33. The main body 30 includes an outer cylinder 301, a top cover component 302, and an annular base 303. The outer cylinder 301 is attached to the annular base 303, which is connected to a downstream component of the thermal reactor, such as a water tank or a wet scrubber. The top cover component 302 is attached to the outer cylinder 301, which includes a flange 3021 and a cover 3022. The flange 3021 is attached to the outer cylinder 301, and the cover 3022 is attached to the flange 3021. The main body 30 defines a chamber 30a, which can be divided into an upper region 30a-1, a middle region 30a-2, and a lower region 30a-3. In this example, the thermal reactor further comprises a temperature sensor 40 .

[0026] In this example, there is only one air intake pipe 31, and the cover 3022 has an opening 3022a, which passes through the opening 3022a of the cover 3022 and extends into the chamber 30a of the main body 30. The discharge flow E is injected into the chamber 30a from the inlet 310 of the air intake pipe 31, and the air intake pipe 31 is provided upright, i.e., perpendicular to the plane of the cover 3022 or a horizontal plane (or the ground); in another example, the air intake pipe 31 can be provided obliquely, for example, at an angle of 60 to 90 degrees from the plane or horizontal plane.

[0027] The sensor component 32 includes a sleeve 320, the material of which includes a sensor material, or in another example, the material of the sleeve 320 is made of the sensor material. The sensor component 32 is provided in a chamber 30a of the main body 30. In this example, the sleeve 320 has a two-layer structure including a first layer 320a and a second layer 320b, which are an outer layer and an inner layer, respectively, where the first layer 320a is made of a thermal insulating material and the second layer 320b is made of a sensor material. In another example, the sleeve 320 may have a single-layer structure or a multi-layer structure. As long as the sleeve 320 includes a sensor material, the specific structure or number of layers may vary.

[0028] The sleeve 320 is positioned below the lid body 3022, the sleeve 320 extends downward from the central region of the lid body 3022 and is positioned within the chamber 30a, the sleeve 320 has a hollow portion 3200, a top opening 3201 and a bottom opening 3202, the top opening 3201 is connected to the opening 3022a of the lid body 3022, the hollow portion 3200 extends downward to the central opening 3030 of the annular base 303 of the main body 30, and the bottom opening 3202 is aligned with the central opening 3030.

[0029] The air intake pipe 31 has a pipe body including a first section 311 and a second section 312, the first section 311 being located above the lid 3022 and outside the chamber 30a, the second section 312 being located below the lid 3022 and inside the hollow portion 3200 of the sleeve 320, and the second section 312 extending downward to remain above the bottom opening 3202 of the sleeve 320, i.e., the outlet 313 of the air intake pipe 31 is located above the bottom opening 3202 at a certain distance. In this example, the outlet 313 of the air intake pipe 31 is located in the lower region 30a-3 of the chamber 30a, but in another example, the outlet 313 of the air intake pipe 31 may be located in the upper region 30a-1 or the middle region 30a-2 of the chamber 30a.

[0030] In some examples, the air inlet tube 31 may be referred to as a guide conduit, and the second section 312 may be referred to as an exhaust section, and are located in the hollow portion 3200 of the sleeve 320. In this example, one or more air inlets are defined in the sleeve 320, and the air inlets may be referred to as orifices 320c that communicate downstream of the air inlet tube 31 and communicate downstream of the guide conduit, so that the exhaust flow E flows through the hollow portion 3200 of the sensor component 32. In some examples, the top cover component 302 may be referred to as a top region of the body 30, the outer casing 301 may be referred to as an annular wall portion of the body 30, the annular base 303 may be referred to as a bottom region of the body 30, and the central opening 3030 may be referred to as an outlet opening formed in the annular base 303.

[0031] In this example, the discharge flow E enters through the inlet 310 of the air supply pipe 31, then flows directly downward through the sleeve 320 of the sensor component 32, and flows from above downward to be discharged through the bottom opening 3202 of the sleeve 320.

[0032] The microwave module 33 includes a microwave generating unit 331 and a wave-guiding unit 332 connected to the microwave generating unit 331, and the microwave module 33 is connected to the outer annular wall of the outer cylinder 301. The wave-guiding unit 332 transmits the microwave radiation generated in the microwave generating unit 331 to the sensor component 32 located in the chamber 30a of the body 30.

[0033] FIG. 8 shows a schematic diagram of an apparatus for treating gaseous pollutants according to one example of the present disclosure, the apparatus including a case and a plurality of modules, the case including a frame 50 and a housing, the modules including a pump component 51, a reactor component 52, and an electronic and control component 53, and in some examples, the apparatus further includes a gas supply system (e.g., a gas control panel) and one or more fluid transport components, the gas supply system being capable of transporting, for example, an inert gas such as nitrogen or compressed air (CDA), and the fluid transport components being capable of transporting, for example, freshly pumped water or cooling water.

[0034] The reactor component 52 includes an exhaust gas guide device 521, a first-stage reactor 522, a second-stage reactor 523, and a water tank 524, and the second-stage reactor 523 can be the above-mentioned thermal reactor, or the second-stage reactor 523 can be a packed scrubber.

[0035] Although the reactor according to the present disclosure has been described in detail with reference to the drawings of specific examples, the present disclosure is not limited to these specific details. Those skilled in the art will recognize that various modifications and structural changes may be made without departing from the spirit of the present disclosure and the scope of the claims that follow, or equivalently. Furthermore, the features of each example described in the present disclosure may be combined with one another. In other words, the present disclosure encompasses multiple independent embodiments that have practical utility. While each example is disclosed in a preferred form, the specific form should not be considered a limiting description, and in fact may have various variations or modifications. The subject matter encompassed by the present disclosure includes all non-obvious novel combinations and subcombinations of all parts, features, functions, and / or properties disclosed herein. Therefore, the scope of the following claims should be interpreted broadly consistent with the scope described in the present disclosure.

[0036] It should be understood that terms used herein, such as "first," "second," "left," "right," "upper," "lower," "front," "rear," "side," "upper," "lower," "internal," "external," "inside," and "outside," merely indicate relative positions for reference and do not specifically limit the orientation or manner of construction of the present disclosure. Furthermore, the term "exemplary" is used to list or describe, and the example described does not represent a preferred or particularly advantageous example, but merely describes one possible embodiment of the present disclosure.

[0037] As used in this disclosure, words such as "comprise," "have," and the like have the same meaning. When "comprise" or its derivatives are used, it should not be construed as exclusive, i.e., such words do not exclude situations in which other components, steps, etc. are further included. When modified in this disclosure (especially in the claims), using articles such as "a," "the," or the like, or when not modified by an article, it includes both the singular and the plural, unless expressly stated otherwise or the context clearly indicates otherwise. Similarly, when a "first" component or similar language is used, it should be understood to cover one or more of that type of component, and not to necessarily imply or exclude the presence of two or more of that type of component.

[0038] Also, in the present disclosure, "X and / or Y" should be understood as (X), (Y) or (X and Y), and "X, Y and / or Z" should be understood as (X), (Y), (Z), (X and Y), (X and Z), (Y and Z) or (X, Y and Z). [Explanation of symbols]

[0039] 10 Air Supply Module 11 Reaction Module 12 Microwave Module 12a Microwave generating unit 12b Waveguide unit 13 Sensors 20 Abatement Unit 20a-1 Upper area 20a-2 Intermediate area 20a-3 Lower region 201 Outer cylinder 202 Top Cover Component 2021 Flange 2022 Lid 2022a First through hole 203 Circular Base 21 Air supply pipe 210 Air supply end 22 Sensor Components 220 Outer sleeve 220a Annular Space 2201 Barrel-shaped body 2202 Annular wall 2203 Top opening 2204 Bottom plate 2205 Bottom through hole 221 Inner sleeve 2210 Top plate 2210a Central perforation hole 2210b Second through hole 2211 Hollow insert 2211a Hollow part 2211b First Edge 2211c Second Edge 2211d Entrance hole 2211e Bottom opening 222 Pipe parts 222a Outlet end 23 Microwave Module 231 Microwave Generator Unit 232 Waveguide Unit 30 Main Unit 30a chamber 30a-1 Upper area 30a-2 Intermediate area 30a-3 Lower area 301 Outer cylinder 302 Top Cover Component 3021 flange 3022 Lid 3022a opening 303 Circular Base 3030 Central opening 31 Air supply pipe 310 Entrance 311 First Section 312 Second Section 313 Exit 32 Sensor Components 320 Sleeve 320a First Layer 320b Second layer 320c orifice 3200 Hollow part 3201 Top opening 3202 Bottom opening 33 Microwave Module 331 Microwave Generator Unit 332 Waveguide Unit 40 Temperature Sensor 50 frames 51 Pump Components 52 Reactor Components 521 Exhaust gas guide device 522 First stage reactor 523 Second stage reactor 524 Water Tank 53 Electronic and Control Components E discharge stream

Claims

1. 1. A reactor for treating gaseous pollutants, comprising: an air intake module including one or more guide lines configured to guide exhaust from the manufacturing process; a reaction module fluidly connected to the air supply module, the reaction module including a body and a reaction chamber defined by the body, the guide conduit of the air supply module communicating with the reaction chamber; one or more microwave modules connected to the reaction module, each including a microwave generating unit and a wave-guiding unit connected to the microwave generating unit, the wave-guiding unit connected to the reaction chamber and transmitting microwave radiation generated in the microwave generating unit to the reaction chamber; a sensor disposed within the reaction chamber configured to receive the microwave radiation from the wave-guiding unit and convert the microwave radiation into thermal energy; the temperature in the reaction chamber is at least 1000°C; Reactor.

2. 2. The reactor of claim 1, wherein the body includes an annular wall and a head component disposed on the annular wall, the annular wall defining the reaction chamber, and the waveguiding unit of the microwave module is laterally connected to the annular wall and radiatively coupled to the reaction chamber to emit the microwave radiation along one or more laterally directions.

3. 2. The reactor of claim 1, wherein the sensor comprises a sleeve fixed in the reaction chamber and a hollow portion defined by the sleeve; the guide pipe comprises an inlet end located outside the reaction chamber, an outlet end located in the reaction chamber, and a pipe connected between the inlet end and the outlet end and inserted into the body of the reaction module, the outlet end and the hollow portion being connected to each other, whereby the discharged matter flows through the hollow portion of the sensor.

4. 2. The reactor of claim 1, wherein the guide pipe is inserted into the top of the body, the guide pipe including an inlet end located outside the reaction chamber, an outlet end located inside the reaction chamber, and a pipe connected between the inlet end and the outlet end, the sensor including a sleeve fixed in the reaction chamber and a hollow portion defined by the sleeve, the sleeve having an inner diameter larger than the tube, and the outlet section of the pipe of the guide pipe is located in the hollow portion of the sleeve, whereby the effluent flows through the hollow portion of the sensor.

5. 2. The reactor of claim 1, wherein the sensor comprises a sleeve fixed in the reaction chamber and a hollow portion defined by the sleeve, the sleeve having one or more air inlets, the air inlets communicating downstream of the guide conduit, whereby the effluent flows through the hollow portion of the sensor.

6. 2. The reactor of claim 1, wherein the body includes a top portion, a bottom portion, and an annular wall portion connected between the top portion and the bottom portion, and the sensor includes a sleeve provided within the reaction chamber and a hollow portion defined by the sleeve, the sleeve extending from the top portion of the body to an outlet opening provided in the bottom portion of the body, and an annular space located within the annular wall portion and surrounding the sleeve is defined between the top portion and the bottom portion, the annular space being in fluid communication with the guide conduit for introducing the effluent and in fluid communication with one or more inlets provided on the sleeve, thereby guiding the effluent into the hollow portion.

7. 10. The reactor of claim 1, wherein the body includes an annular wall portion, and the waveguide unit of the microwave module is connected to the annular wall portion, whereby an output end of the waveguide unit transmits the microwave radiation to the sensor.

8. 2. The reactor of claim 1, wherein the sensor comprises a sleeve fixed in the reaction chamber and one or more gas channels defined by the sleeve, the gas channels being connected downstream of the guide conduit.

9. 2. The reactor of claim 1, wherein the sensor comprises a sleeve fixed within the reaction chamber and a hollow portion defined by the sleeve, the sleeve comprising a first tube wall made from one or more insulating materials and a second tube wall made from one or more sensor materials, the first tube wall and the second tube wall being fitted together.

10. 1. An apparatus for treating gaseous pollutants, comprising: The reactor according to any one of claims 1 to 9, a water tank connected downstream of the reactor to receive the discharge from the reactor; a secondary reactor connected to the water tank to receive the effluent flowing through the water tank; An apparatus comprising:

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