Substrate transfer device and substrate processing apparatus including the same

Abstract

To provide a substrate transfer device capable of securely gripping a substrate.SOLUTION: A first hand 55a is provided with a first pusher 71a for gripping a substrate, which is located at a base end of a branch blade 110a and is positioned between a pair of first base end guides 113a, and a second hand 56a is provided with a second pusher 72a for gripping a substrate, which is positioned between a pair of second base end guides 123a. The first pusher 71a includes a first member 711a and a second member 712a against which the substrate abuts, and the second pusher 72a is positioned between the first member 711a and the second member 712a.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a substrate transfer device capable of simultaneously transferring a plurality of substrates in horizontal positions, and a substrate processing apparatus including the same. [Background technology]

[0002] Patent Document 1 describes a robot for transporting substrates. This robot has multiple blades capable of holding substrates in a horizontal position. Each blade is arranged vertically and is capable of simultaneously picking up horizontally oriented substrates arranged at intervals in the vertical direction. A movable abutment (hereinafter referred to as a "pusher" in this specification) for gripping the substrate is provided at the base of each blade. The pushers are arranged in a stack in the vertical direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2010 / 103876 Summary of the Invention [Problem to be solved by the invention]

[0004] However, with the above configuration, there are cases where the substrate cannot be securely gripped. In recent years, the types of substrates transported by substrate transport devices have become more diverse. Therefore, there is a demand for a substrate transport device that can transport even warped substrates and thick substrates made by bonding multiple substrates together. With current pushers, there is a possibility that the vertical thickness is insufficient and the substrate cannot be securely gripped. Because pushers are stacked one on top of the other, there is a limit to how thick the pushers can be made in the vertical direction.

[0005] The present invention has been made in view of the above circumstances, and has an object to provide a substrate transport device that can securely grip a substrate, and a substrate processing apparatus including the same. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems, the present invention has the following configuration. That is, the substrate transport device of the present invention is In a substrate transport device for transporting a substrate, a first hand capable of holding a substrate in a horizontal position; a second hand capable of holding a substrate in a horizontal position different from the substrate; a holding unit that holds the first hand and the second hand in a vertical arrangement; an arm that movably supports the holding portion; a base member supporting the arm, the first hand comprises a first blade, a pair of first base end guides provided at a base end of the first blade and contacting a lower surface of the substrate to support the substrate, a pair of first tip end guides provided at a tip end of the first blade and contacting a lower surface of the substrate to support the substrate, and a first pusher for gripping the substrate that is located at the base end of the first blade and is sandwiched between the pair of first base end guides, the second hand comprises a second blade, a pair of second base end guides provided at a base end of the second blade and contacting the lower surface of the substrate to support the substrate, a pair of second tip end guides provided at a tip end of the second blade and contacting the lower surface of the substrate to support the substrate, and a second pusher for gripping the substrate that is located at the base end of the second blade and is sandwiched between the pair of second base end guides, The first pusher includes a first member and a second member that each come into contact with the substrate and press the substrate forward, and the second pusher includes a third member that come into contact with the substrate and press the substrate forward, and the third member is located between the first member and the second member in a plan view. It is characterized by the following.

[0007] [Actions and Effects] The first hand of the present invention includes a first pusher for gripping a substrate at the base end of the first blade, positioned between a pair of first base end guides, and the second hand includes a second pusher for gripping a substrate, positioned between a pair of second base end guides. The first pushers each include a first member and a second member against which the substrate abuts, and a third member associated with the second pusher is positioned between the first and second members. With this configuration, the positions of the first pusher and the second pusher are different from each other. Therefore, even if the first pusher and the second pusher are thick in the vertical direction, they do not interfere with each other. This invention provides a substrate transport device that reliably grips and transports warped or thick substrates with thick pushers.

[0008] In addition, in the above-mentioned substrate transport device, the second hand is provided at a position not overlapping with the first hand in a plan view, the holding unit includes a lifting mechanism that can move the first hand and the second hand relative to each other in a vertical direction; It is preferable if the lifting mechanism is capable of positioning the first hand and the second hand in a flush state in which they are positioned on the same plane, and a separated state in which the first hand and the second hand are separated vertically.

[0009] [Operations and Effects] According to the above-described configuration, the second hand is provided at a position that does not overlap with the first hand in a plan view, and the holding unit includes a lifting mechanism that can move the first hand and the second hand relative to each other in the vertical direction, and the lifting mechanism can bring the first hand and the second hand into a flush state where they are positioned on the same plane, and a separated state where the first hand and the second hand are separated in the vertical direction. The present invention can also be applied to a substrate transport device that can change the number of substrates transported by moving the first hand and the second hand relative to each other in the vertical direction.

[0010] In addition, in the above-mentioned substrate transport device, the pair of first base end guides are in a line-symmetric relationship with each other with respect to a virtual line that bisects the circular substrate in a plan view, the pair of first tip guides are in a line-symmetric relationship with each other with respect to the virtual line, the pair of second base end guides are symmetrical with respect to each other with respect to the virtual line, the pair of second tip guides are symmetrical with respect to each other with respect to the virtual line, the first member and the second member of the first pusher are in a line-symmetric relationship with each other with respect to the virtual line, It is preferable that the third member of the second pusher is on the imaginary line.

[0011] [Operations and Effects] According to the above-described configuration, the first base end guides are symmetrical to each other with respect to an imaginary line that bisects the circular substrate in a plan view, the first tip end guides are symmetrical to each other with respect to the imaginary line, the second base end guides are symmetrical to each other with respect to the imaginary line, the second tip end guides are symmetrical to each other with respect to the imaginary line, the first member and the second member of the first pusher are symmetrical to each other with respect to the imaginary line, and the second pusher is located on the imaginary line. With this configuration, the first pusher pushes the substrate from the left and right, pressing the substrate against the first tip guides that are symmetrical to each other with respect to the imaginary line. Furthermore, the third member of the second pusher pushes the substrate from the center, pressing the substrate against the pair of second tip guides that are symmetrical to each other with respect to the imaginary line. With this configuration, the substrate does not shift position when gripping a viscous substrate.

[0012] In addition, in the above-mentioned substrate transport device, the shapes of the tips of the first member and the second member of the first pusher that come into contact with the substrate are modeled after the shape of the substrate; It is preferable that the shape of the tip of the third member of the second pusher that abuts against the substrate follows the shape of the substrate.

[0013] [Actions and Effects] According to the above-described configuration, the shapes of the tips of the first and second members of the first pusher that contact the substrate follow the shape of the substrate, and the shape of the tip of the second pusher that contacts the substrate follows the shape of the substrate. With this configuration, the first and second members of the first pusher can grip the substrate with a wide contact surface. Therefore, the first pusher can grip the substrate more reliably. Similarly, the tip of the third member of the second pusher can grip the substrate with a wide contact surface. Therefore, the second pusher can grip the substrate more reliably.

[0014] In addition, in the above-mentioned substrate transport device, It is preferable that the tip of the first member protrudes in a direction perpendicular to the direction of movement of the first member, and the tip of the second member protrudes in a direction perpendicular to the direction of movement of the second member.

[0015] [Operation and Effect] According to the above-described configuration, the tip of the first member protrudes in a direction perpendicular to the movement direction of the first member, and the tip of the second member protrudes in a direction perpendicular to the movement direction of the second member. With this configuration, the first member and the second member of the first pusher can grip the substrate with a wide contact surface. Therefore, the first pusher can grip the substrate more reliably.

[0016] In addition, in the above-mentioned substrate transport device, a first holding unit having the first hand and the second hand; It is preferable that the apparatus has two hands similar to the first hand and the second hand, and further includes a second holding portion provided vertically spaced apart from the first holding portion.

[0017] [Operation and Effect] According to the above-mentioned configuration, the first holding unit has a first hand and a second hand, and the second holding unit has a first hand and a second hand and is spaced apart vertically from the first holding unit. With this configuration, the number of substrates that can be transported simultaneously can be increased.

[0018] In addition, in the above-mentioned substrate transport device, the first hand includes a first drive mechanism capable of moving the first member and the second member toward and away from the substrate while maintaining their relative positions; The second hand preferably includes a second drive mechanism capable of moving the third member toward and away from the substrate.

[0019] [Actions and Effects] According to the above-described configuration, the first hand includes a first drive mechanism capable of moving the first and second members toward the substrate while maintaining their relative positions, and the second hand includes a second drive mechanism capable of moving the third member toward the substrate. With this configuration, the first drive mechanism causes the first and second members to approach the substrate synchronously, thereby gripping the substrate with the first hand. The substrate is then gripped with equal force on both sides. According to the above-described configuration, the substrate can be gripped reliably.

[0020] In addition, in the above-mentioned substrate transport device, the first drive mechanism includes a first power unit that generates power, and a first pusher arm that transmits the power of the first power unit to a first member and a second member of the first pusher; the second drive mechanism includes a second power unit that generates power and is located vertically spaced from the first power unit; The second drive mechanism preferably includes a second pusher arm that transmits the power of the second power unit to a third member of the second pusher, the second pusher arm being located away from the first pusher arm.

[0021] [Operations and Effects] According to the above-described configuration, the first drive mechanism includes a first power unit that generates power and a first pusher arm that transmits the power of the first power unit to the first member and the second member of the first pusher, the second drive mechanism includes a second power unit that generates power at a position vertically spaced from the first power unit, and the second drive mechanism includes a second pusher arm that transmits the power of the second power unit to the third member of the second pusher at a position away from the first pusher arm. With this configuration, a substrate transport device can be configured by stacking power units in the vertical direction, and the configuration of the present invention can be realized without making major design changes to conventional devices.

[0022] This specification also discloses a substrate processing apparatus that includes the substrate transfer apparatus described above and that includes a single-wafer processing chamber for performing a predetermined process on a substrate. [Effects of the Invention]

[0023] According to the present invention, it is possible to provide a substrate transport device capable of securely gripping a substrate, and a substrate processing apparatus including the same. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is a perspective view illustrating the overall configuration of a substrate transfer device according to a first embodiment. [Figure 2] FIG. 2 is a perspective view illustrating the overall configuration of the gripping mechanism according to the first embodiment. [Figure 3] FIG. 3 is a perspective view illustrating vertical movement of branch blades according to the first embodiment. [Figure 4] FIG. 3 is a perspective view illustrating vertical movement of branch blades according to the first embodiment. [Figure 5] FIG. 2 is a plan view illustrating a guide according to the first embodiment. [Figure 6] FIG. 2 is a plan view illustrating a guide according to the first embodiment. [Figure 7] FIG. 2 is a plan view illustrating a guide according to the first embodiment. [Figure 8] FIG. 2 is a perspective view illustrating a pusher according to the first embodiment. [Figure 9] FIG. 2 is a plan view illustrating a pusher according to the first embodiment. [Figure 10] FIG. 2 is a cross-sectional view illustrating a drive mechanism of the pusher according to the first embodiment. [Figure 11] FIG. 2 is a perspective view illustrating a pusher arm according to the first embodiment. [Figure 12] FIG. 2 is a cross-sectional view illustrating a drive mechanism of the pusher according to the first embodiment. [Figure 13] FIG. 10 is a plan view illustrating a substrate processing apparatus according to a second embodiment. [Figure 14] FIG. 10 is a plan view illustrating a modified example of the present invention. [Figure 15] FIG. 10 is a plan view illustrating a modified example of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0025] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate transfer device according to an embodiment of the present invention is configured to simultaneously pick up and transfer four substrates arranged in a vertical direction and in a horizontal position. [Example]

[0026] <1. Overall structure> FIG. 1 illustrates a substrate transfer apparatus 100 of this example. The substrate transfer apparatus 100 of this example is equipped with a gripping mechanism 50 that can individually grip four substrates W in a horizontal position. The gripping mechanism 50 is supported by an elongated arm 51a that extends horizontally. The gripping mechanism 50 and the arm 51a are connected via a joint. This joint allows the gripping mechanism 50 to rotate around a vertical axis L1 relative to the arm 51a. The arm 51a movably supports holding units 61a and 61b, which will be described later, that the gripping mechanism 50 has.

[0027] Arm 51a has a gripping mechanism 50 at its tip. The base end of arm 51a is connected to elongated arm 51b that extends horizontally. Arm 51a and arm 51b are connected via a joint. This joint allows arm 51a to rotate around vertical axis L2 relative to arm 51b.

[0028] The tip of arm 51b is connected to arm 51a. The base end of arm 51b is connected to a main shaft 52 that extends in the vertical direction. Main shaft 52 is extendable and retractable. The extension and contraction of main shaft 52 changes the vertical height of gripping mechanism 50. Arm 51b and main shaft 52 are connected via a joint. This joint allows arm 51b to rotate around vertical axis L3 relative to main shaft 52.

[0029] The robot base 53 is configured to support the main shaft 52. The robot base 53 constitutes the bottom of the substrate transfer device 100. The robot base 53 is a base member that supports the arms 51a and 51b.

[0030] <2. Overview of gripping member> FIG. 2 is a perspective view illustrating an overview of the gripping mechanism 50 of this example. The gripping mechanism 50 is provided with four hands for gripping a horizontally oriented substrate W. The gripping mechanism 50 has two holders 61a and 61b arranged one above the other. The upper holder 61a holds a first hand 55a and a second hand 56a. The lower holder 61b holds a first hand 55b and a second hand 56b. The upper first hand 55a and second hand 56a are used, for example, to transport processed substrates. The lower first hand 55b and second hand 56b are used, for example, to transport unprocessed substrates. In this way, in this example, contamination between substrates is prevented by using different hands depending on the transport purpose (unprocessed and processed). For the same purpose, two hands are used to transport two substrates simultaneously, thereby improving processing efficiency.

[0031] The holder 61a can be in a state suitable for transporting only one unprocessed substrate W by aligning the first hand 55a and the second hand 56a on the same plane in the vertical direction. When gripping one substrate W, folding either the first hand 55a or the second hand 56a prevents the hand from colliding with a holder (e.g., a carrier C described below) that holds the substrate W to be gripped. Similarly, the holder 61b can be in a state suitable for transporting only one processed substrate W by aligning the first hand 55b and the second hand 56b on the same plane. In this way, the holder 61b is configured to achieve the same effects as the holder 61a.

[0032] The first hand 55a will now be described. As shown in Fig. 2, the first hand 55a includes a first branch blade 110a, a pair of first base end guides 113a, a pair of first tip end guides 114a, and a first pusher 71a. The tip of the first branch blade 110a is branched into two. The first hand 55a is configured to grip the substrate W supported on the upper surface of the first branch blade 110a by pressing the substrate W with the first pusher 71a.

[0033] 2, the second hand 56a has first and second blade pieces 121a and 122a extending horizontally, a pair of second base end guides 123a, a pair of second tip end guides 124a, and a second pusher 72a. The second hand 56a is configured to press the substrate W supported by the upper surfaces of the first and second blade pieces 121a and 122a with the second pusher 72a.

[0034] Like the first hand 55a, the first hand 55b includes a branch blade 110b, a pair of first base end guides 113b, a pair of first tip end guides 114b, and a first pusher 71b. The first hand 55b is configured to grip the substrate W by pressing the substrate W supported on the upper surface of the branch blade 110b with the first pusher 71b.

[0035] Similar to the second hand 56a, the second hand 56b has a first blade piece 121b, a second blade piece 122b, a pair of second base end guides 123b, a pair of second tip end guides 124b, and a second pusher 72b. The second hand 56b is configured to press the substrate W supported by the upper surfaces of the first blade piece 121b and the second blade piece 122b with the second pusher 72b.

[0036] The holder 61a is a blade support connected to the base ends of the branch blade 110a, the first blade piece 121a, and the second blade piece 122a. On the other hand, the holder 61b is a blade support connected to the base ends of the branch blade 110b, the first blade piece 121b, and the second blade piece 122b (described later). The holders 61a and 61b are stacked vertically in the gripping mechanism 50. The holder 61a holds the first hand 55a and the second hand 56a in alignment in the vertical direction Z. Similarly, the holder 61b holds the first hand 55b and the second hand 56b in alignment in the vertical direction Z. The holder 61b is spaced apart from the holder 61a in the vertical direction.

[0037] In a plan view, the base end of branch blade 110a and the base end of branch blade 110b are located at the same position. Branch blade 110a and branch blade 110b have the same shape and extend in the same direction. Branch blade 110a is located above branch blade 110b. Therefore, in a plan view, branch blade 110b is hidden by the back surface of branch blade 110a. Branch blade 110a has a shape that is bilaterally symmetrical with respect to an imaginary line IL that passes through the base end. The same applies to branch blade 110b.

[0038] In a plan view, the base end of the first blade piece 121a and the base end of the first blade piece 121b are located at the same position. The first blade piece 121a and the first blade piece 121b have the same shape and extend in the same direction. The first blade piece 121a is located above the first blade piece 121b. Therefore, in a plan view, the first blade piece 121b is hidden by the back surface of the first blade piece 121a.

[0039] In a plan view, the base end of the second blade piece 122a and the base end of the second blade piece 122b are located at the same position. The second blade piece 122a and the second blade piece 122b have the same shape and extend in the same direction. The second blade piece 122a is located above the second blade piece 122b. Therefore, in a plan view, the second blade piece 122b is hidden by the back surface of the second blade piece 122a.

[0040] The first blade piece 121a and the second blade piece 122a are shaped to be mirror images of each other with respect to the imaginary line IL. The same applies to the first blade piece 121b and the second blade piece 122b.

[0041] <3. About the four stacked hands> As described above, the gripping mechanism 50 of this example is configured to be able to grip four substrates W simultaneously. That is, the gripping mechanism 50 is configured with four different hands arranged in the vertical direction. First, the branch blade 110a associated with the first hand 55a is located in the top layer of the gripping mechanism 50. The branch blade 110a can hold a substrate W in a horizontal position.

[0042] The first blade piece 121a and the second blade piece 122a are located in the upper intermediate layer below the branch blade 110a. The first blade piece 121a and the second blade piece 122a are located at the same position in the vertical direction. The first blade piece 121a and the second blade piece 122a each hold one side of the substrate W, thereby holding the substrate W in a horizontal position.

[0043] The first blade piece 121b and the second blade piece 122b associated with the second hand 56b are located in the lower intermediate layer below the first blade piece 121a and the second blade piece 122a associated with the second hand 56a in the upper intermediate layer. The first blade piece 121b and the second blade piece 122b are located at the same position in the vertical direction. The first blade piece 121b and the second blade piece 122b each hold one side of the substrate W, thereby holding the substrate W in a horizontal position.

[0044] The branch blade 110b associated with the first hand 55b is located below the first blade piece 121b and the second blade piece 122b associated with the lower intermediate layer, which is the lowest layer of the gripping mechanism 50. The branch blade 110b can hold the substrate W in a horizontal position.

[0045] The up-and-down movement of the branch blade 110a in the uppermost layer will now be described. The branch blade 110a can move vertically relative to the first blade piece 121a and the second blade piece 122a in the upper middle layer. That is, the branch blade 110a can be displaced between a position above the first blade piece 121a and the second blade piece 122a and a position that is the same as the first blade piece 121a and the second blade piece 122a in the vertical direction.

[0046] The branch blade 110b of the lowest layer can also move vertically relative to the first blade piece 121b and the second blade piece 122b of the lower intermediate layer, i.e., the branch blade 110b can be displaced between a position below the first blade piece 121b and the second blade piece 122b and a position that is the same vertically as the first blade piece 121b and the second blade piece 122b.

[0047] 3 is a perspective view of the branch blade 110a of the top layer separated from the first blade piece 121a and the second blade piece 122a of the upper intermediate layer, and the branch blade 110b of the bottom layer also separated from the first blade piece 121b and the second blade piece 122b of the lower intermediate layer.

[0048] Figure 4 is a perspective view of branch blade 110a in the same plane as first blade piece 121a and second blade piece 122a of the upper intermediate layer, and branch blade 110b in the same plane as first blade piece 121b and second blade piece 122b of the lower intermediate layer.

[0049] The vertical movement of the branch blade 110a is achieved by a lifting mechanism 63a provided in the holder 61a and a lifting mechanism 63b provided in the holder 61b. In this manner, the holder 61a is provided with a lifting mechanism 63a that can move the first hand 55a and the second hand 56a relative to each other in the vertical direction Z. The lifting mechanism 63a can position the first hand 55a and the second hand 56a on the same plane. The lifting mechanism 63a can also move the first hand 55a and the second hand 56a away from each other in the vertical direction Z. The holder 61b is also provided with a lifting mechanism 63b that has a similar function.

[0050] The lifting mechanism 63a allows the first hand 55a and the second hand 56a to be flush with each other, allowing the state to be switched between a state suitable for holding only one substrate W, and a state suitable for holding two substrates W, allowing the first hand 55a and the second hand 56a to be spaced apart vertically.

[0051] The lifting mechanism 63a and the lifting mechanism 63b synchronously operate the branch blade 110a and the branch blade 110b to create two states: a state shown in Fig. 3 in which the branch blade 110a and the branch blade 110b are separated by a maximum distance, and a state shown in Fig. 4 in which the branch blade 110a and the branch blade 110b are brought closest to each other. The gripping mechanism 50 in the state shown in Fig. 3 can simultaneously grip four substrates W in a horizontal position, and the gripping mechanism 50 in the state shown in Fig. 4 can simultaneously grip two substrates W in a horizontal position.

[0052] The lifting mechanism 63b allows the first hand 55b and the second hand 56b to be flush with each other, allowing the state to be switched between a state suitable for holding only one substrate W, and a state suitable for holding two substrates W, allowing the first hand 55b and the second hand 56b to be spaced apart vertically.

[0053] To achieve this lifting and lowering operation, the branch blade 110a of the uppermost layer has a distinctive shape. Specifically, as can be seen from the plan view of FIG. 5, the branch blade 110a and the first blade piece 121a of the upper middle layer are positioned so as not to overlap each other in a plan view. The same applies to the branch blade 110a and the second blade piece 122a. This configuration prevents the branch blade 110a from colliding with the first blade piece 121a when the branch blade 110a is placed in the upper middle layer. The same applies to the second blade piece 122a. The second hand 56a is positioned so as not to overlap the first hand 55a in a plan view.

[0054] Similarly, the branch blade 110b of the lowest layer and the first blade piece 121b of the lower intermediate layer are positioned so as not to overlap each other in a plan view. The same applies to the branch blade 110b and the second blade piece 122b. In other words, the second hand 56b is positioned so as not to overlap the first hand 55b in a plan view. With this configuration, the branch blade 110b achieves the same effects as the branch blade 110a described above.

[0055] <4. About the guide> Next, the guides of the branch blade 110a in the uppermost layer will be described. Four guides are provided on the upper surface of the branch blade 110a. Specifically, a pair of first base end guides 113a is provided at the base end of the branch blade 110a. Meanwhile, a pair of first tip guides 114a is provided at the tip of the branch blade 110a. The branch blade 110a has two branches toward the tip, and a first tip guide 114a is provided on each of the branches. The pair of first base end guides 113a and the pair of first tip guides 114a abut the lower surface of the substrate W, respectively. The pair of first base end guides 113a and the pair of first tip guides 114a are protrusions provided on the upper surface of the branch blade 110a. Therefore, the substrate W is supported at four points: the pair of first base end guides 113a and the pair of first tip guides 114a.

[0056] 5, the pair of first base end guides 113a provided on the branch blade 110a are positioned symmetrically with respect to the imaginary line IL. That is, the pair of first base end guides 113a are in a line-symmetric relationship with respect to each other with respect to the imaginary line IL. Similarly, the pair of first tip guides 114a provided on the branch blade 110a are positioned symmetrically with respect to the imaginary line IL. That is, the pair of first tip guides 114a are in a line-symmetric relationship with respect to each other with respect to the imaginary line IL. This allows the branch blade 110a to support one half of the substrate W divided along the imaginary line IL under the same conditions, and prevents the substrate W pressed by the first pusher 71a (described later) from rotating.

[0057] The branch blade 110b in the lowest layer also has four guides, similar to the branch blade 110a. That is, a pair of first base end guides 113b is provided at the base end of the branch blade 110b, and a pair of first tip end guides 114b is provided at the tip end of the branch blade 110b. Similar to the branch blade 110a, the pair of first base end guides 113b are provided symmetrically with respect to the imaginary line IL, and the pair of first tip end guides 114b are provided symmetrically with respect to the imaginary line IL. That is, the pair of first base end guides 113b are line-symmetric with respect to each other with respect to the imaginary line IL. Similarly, the pair of first tip end guides 114b are line-symmetric with respect to each other with respect to the imaginary line IL.

[0058] The first hand 55a includes a pair of first base end guides 113a whose base ends contact the underside of the substrate W, and a pair of first tip end guides 114a whose tip ends contact the underside of the substrate W. Similarly, the first hand 55b includes a pair of first base end guides 113b whose base ends contact the underside of the substrate W, and a pair of first tip end guides 114b whose tip ends contact the underside of the substrate W.

[0059] Next, the guides of the first blade piece 121a and the second blade piece 122a associated with the upper intermediate layer will be described. As shown in Fig. 2, a total of four guides are provided on the top surfaces of the first blade piece 121a and the second blade piece 122a. That is, a second base end guide 123a is provided at each of the base ends of the first blade piece 121a and the second blade piece 122a. A second tip end guide 124a is provided at each of the tip ends of the first blade piece 121a and the second blade piece 122a.

[0060] As can be seen from the plan view of FIG. 5, the pair of second base end guides 123a provided on the first blade piece 121a and the second blade piece 122a are positioned symmetrically with respect to the imaginary line IL. That is, the pair of second base end guides 123a are line-symmetric with respect to each other with respect to the imaginary line IL. Similarly, the pair of second tip guides 124a provided on the first blade piece 121a and the second blade piece 122a are positioned symmetrically with respect to the imaginary line IL. That is, the pair of second tip guides 124a are line-symmetric with respect to each other with respect to the imaginary line IL. This allows the first blade piece 121a and the second blade piece 122a to support one half of the substrate W divided along the imaginary line IL under the same conditions, preventing the substrate W pressed by the second pusher 72a (described later) from rotating.

[0061] The first blade piece 121b and the second blade piece 122b associated with the lower intermediate layer also have four guides, similar to the first blade piece 121a and the second blade piece 122a associated with the upper intermediate layer. That is, a pair of second base end guides 123b is provided at the base ends of the first blade piece 121b and the second blade piece 122b, and a pair of second tip end guides 124b is provided at the tip ends of the first blade piece 121b and the second blade piece 122b. Similar to the first blade piece 121a and the second blade piece 122a, the pair of second base end guides 123b are provided symmetrically with respect to the imaginary line IL, and the pair of second tip end guides 124b are provided symmetrically with respect to the imaginary line IL. That is, the pair of second base end guides 123b are symmetrical with respect to each other with respect to the imaginary line IL. Similarly, the pair of second tip guides 124b are in a line-symmetric relationship with respect to the imaginary line IL.

[0062] The second hand 56a includes a pair of second base end guides 123a whose base ends contact the underside of the substrate W, and a pair of second tip end guides 124a whose tip ends contact the underside of the substrate W. Similarly, the second hand 56b includes a pair of second base end guides 123b whose base ends contact the underside of the substrate W, and a pair of second tip end guides 124b whose tip ends contact the underside of the substrate W.

[0063] The guides that come into contact with the substrate W change depending on the position of the branch blade 110a, and this point will be explained below. The plan view of Fig. 6 shows how the branch blade 110a relating to the uppermost layer holds the substrate W with four guides: a pair of first base end guides 113a and a pair of first tip end guides 114a. The second base end guides 123a and second tip end guides 124a of the first blade piece 121a and second blade piece 122a relating to the upper intermediate layer are all located below the branch blade 110a, and therefore do not come into contact with the substrate W supported by the branch blade 110a.

[0064] The same applies to the branch blade 110b in the lowest layer. The branch blade 110b in the lowest layer holds the substrate W with four guides: a pair of first base end guides 113b and a pair of first tip end guides 114b. The second base end guides 123b and second tip end guides 124b of the first blade piece 121b and second blade piece 122b in the lower intermediate layer are all above the branch blade 110a, and therefore do not come into contact with the substrate W supported by the branch blade 110b.

[0065] 7 shows a state in which the branch blade 110a is positioned on the same plane as the upper intermediate layer. At this time, the branch blade 110a, together with the first blade piece 121a and the second blade piece 122a, supports one horizontally oriented substrate W. Therefore, the substrate W comes into contact with eight guides: a pair of first base end guides 113a, a pair of first tip end guides 114a, a pair of second base end guides 123a, and a pair of second tip end guides 124a.

[0066] The same situation applies to branch blade 110b, which is located on the same plane as the lower intermediate layer. At this time, branch blade 110b, together with first blade piece 121b and second blade piece 122b, supports one horizontally oriented substrate W. Therefore, the substrate W comes into contact with eight guides: a pair of first base end guides 113b, a pair of first tip end guides 114b, a pair of second base end guides 123b, and a pair of second tip end guides 124b.

[0067] The substrate W that comes into contact with the eight guides of the branch blade 110a is pressed and gripped by a first pusher 71a or a second pusher 72a, which will be described later. The substrate W that comes into contact with the eight guides of the branch blade 110b is pressed and gripped by a first pusher 71b or a second pusher 72b, which will be described later.

[0068] <5.About Pusher> Next, the pushers will be described. Fig. 8 illustrates a first pusher 71a provided in the first hand associated with the branch blade 110a, and a second pusher 72a provided in the second hand associated with the first blade piece 121a and the second blade piece 122a.

[0069] First, the first pusher 71a will be described. The first pusher 71a is a substrate gripping member located at the base end of the first hand 55a and sandwiched between a pair of first base end guides 113a. The first pusher 71a includes a first member 711a and a second member 712a that are thick in the vertical direction Z, and a connecting member 73a that bridges the first member 711a and the second member 712a. The first member 711a and the second member 712a are integrated by the connecting member 73a. The first member 711a and the second member 712a are members that are thicker in the vertical direction Z than their width in the direction from the first member 711a toward the second member 712a.

[0070] The first pusher 71a has a connecting member 73a disposed on its ceiling surface, and a first member 711a and a second member 712a disposed as side walls of the connecting member 73a extending in the direction of movement of the first pusher 71a. Therefore, a space is created surrounded by the connecting member 73a, the first member 711a, and the second member 712a. A third member 721 of the second pusher 72a (described later) is housed in this space.

[0071] The first pusher 71a can move toward and away from the substrate W, and can change states between a closed state in which the tip of the first member 711a and the tip of the second member 712a are simultaneously brought into contact with the substrate W, and an open state in which the tip of the first member 711a and the tip of the second member 712a are moved away from the substrate W.

[0072] Next, the second pusher 72a will be described. The third member 721 of the second pusher 72a is a substrate gripping member located at the base end of the second hand 56a and positioned between the pair of second base end guides 123a. Unlike the first member 711a and the second member 712a of the first pusher 71a, the third member 721 of the second pusher 72a is a member whose width in the direction from the first member 711a to the second member 712a is greater than its thickness in the vertical direction Z. As described above, the third member 721 of the second pusher 72a is located in the space surrounded by the connecting member 73a, the first member 711a, and the second member 712a. In other words, the third member 721 of the second pusher 72a is positioned between the first member 711a and the second member 712a of the first pusher 71a.

[0073] The third member 721 of the second pusher 72a can move toward and away from the substrate W, and can change state between a closed state in which the tip contacts the substrate W, and an open state in which the tip is separated from the substrate W.

[0074] The first pusher 71a is attached to the first hand 55a, which is made up of the branch blade 110a, and is configured to move following the up and down movement of the branch blade 110a. In FIG. 8, the branch blade 110a is on the same plane as the first blade piece 121a and the second blade piece 122a, so the first pusher 71a is in the same position as the second pusher 72a in the vertical direction. When the branch blade 110a is raised to the top layer, the first pusher 71a also rises and moves away from the second pusher 72a. This state is shown in FIG. 2.

[0075] FIG. 8 also illustrates a first pusher 71b provided in the first hand 55a associated with the branch blade 110b, and a second pusher 72b provided in the second hand associated with the first blade piece 121b and the second blade piece 122b.

[0076] The first pusher 71b on the bottom layer has a similar configuration to the first pusher 71a on the top layer, but is located below the first pusher 71a and has a shape similar to that of the first pusher 71a turned upside down. The first pusher 71b has a connecting member 73b on its bottom surface, and a first member 711b and a second member 712b as side walls of the connecting member 73b that extend in the direction in which the first pusher 71b moves forward and backward. The second pusher 72b, which will be described later, is housed in the space surrounded by the connecting member 73b, first member 711b, and second member 712b.

[0077] The first pusher 71b, like the first pusher 71a, can move toward and away from the substrate W, and can change its state between the closed state and the open state described above. The first pusher 71b is a substrate gripping member located at the base end of the first hand 55b, and is positioned between the pair of first base end guides 113b.

[0078] The third member 722 of the second pusher 72b associated with the lower intermediate layer has the same configuration as the second pusher 72a associated with the upper intermediate layer. The third member 722 of the second pusher 72b can be located in the space surrounded by the connecting member 73b, the first member 711b, and the second member 712b. In other words, the third member 722 of the second pusher 72b is located between the first member 711b and the second member 712b of the first pusher 71b.

[0079] The second pusher 72b can also move toward and away from the substrate W, and can change its state between the closed state and the open state described above. The second pusher 72b is a substrate gripping member located at the base end of the second hand 56b, and is positioned between the pair of second base end guides 123b.

[0080] The first pusher 71b is attached to the first hand formed by the branch blade 110b, and is configured to move following the up and down movement of the branch blade 110b. In Fig. 8, the branch blade 110b is on the same plane as the first blade piece 121b and the second blade piece 122b, so the first pusher 71b is in the same position as the second pusher 72b in the vertical direction. When the branch blade 110b is lowered to the lowest layer, the first pusher 71a also lowers and moves away from the second pusher 72a.

[0081] 9, the first member 711a and the second member 712a provided on the first pusher 71a relating to the uppermost layer are positioned symmetrically with respect to the imaginary line IL. In other words, the first member 711a and the second member 712a are positioned symmetrically with respect to each other with respect to the imaginary line IL. This allows the first pusher 71a to press both sides of the substrate W divided into two by the imaginary line IL under the same conditions, so the substrate W will not rotate when pressed.

[0082] 9 also illustrates the second pusher 72a in the upper intermediate layer. The second pusher 72a is located on the imaginary line IL. This allows the second pusher 72a to press both sides of the substrate W divided by the imaginary line IL under the same conditions, preventing the substrate W from rotating during pressing.

[0083] Like the first pusher 71a, the first pusher 71b relating to the lowest layer also has a first member 711b and a second member 712b that are positioned symmetrically with respect to the imaginary line IL. In other words, the first member 711b and the second member 712b are positioned symmetrically with respect to each other with respect to the imaginary line IL. This allows the first pusher 71b to achieve the same effect as the first pusher 71a described above. Meanwhile, the second pusher 72b relating to the lower intermediate layer also lies on the imaginary line IL like the second pusher 72a. This allows the second pusher 72b to achieve the same effect as the second pusher 72a described above.

[0084] <6. Pusher drive mechanism> 10 illustrates the drive mechanism that realizes the opening and closing operation of the pusher. The drive mechanism for the pusher is housed inside the holder 61a. The first drive mechanism 101a that operates the first pusher 71a includes a first power unit 81a that generates power and a first pusher arm 91a that transmits the power of the first power unit 81a to the first pusher 71a.

[0085] The first hand 55a has a first drive mechanism 101a that can move the first member 711a and the second member 712a closer to the substrate W while maintaining their relative positions. The first drive mechanism 101a is equipped with a first power unit 81a that generates power and a first pusher arm 91a that transmits the power of the first power unit 81a to the first pusher 71a. The first power unit 81a is configured, for example, by an air cylinder. The other power units 82a, 81b, and 82b are configured similarly.

[0086] The first power unit 81a can move the first pusher arm 91a back and forth in the direction of the imaginary line IL. The first power unit 81a is a rectangular parallelepiped member extending along the imaginary line IL. The first power unit 81a has a base portion that is fixed to the holding portion 61a and does not move, and a movable portion supported by the base portion. The movable portion can be moved back and forth in the direction of the imaginary line IL by a power generation source provided at the base portion. The base end of the first pusher arm 91a is connected to the movable portion and can move back and forth together with the movable portion. The tip end of the first pusher arm 91a is connected to the connecting member 73a associated with the first pusher 71a, so the first power unit 81a can move the movable portion back and forth to move the connecting member 73a, the first member 711a, and the second member 712a back and forth. Based on this principle, the first pusher 71a can change its state between an open state and a closed state.

[0087] The second drive mechanism 102a, which is responsible for the operation of the second pusher 72a, includes a second power unit 82a that generates power and a second pusher arm 92a that transmits the power of the second power unit 82a to the third member 721 of the second pusher 72a. The second power unit 82a can move the third member 721 of the second pusher arm 92a back and forth in a direction extending along the imaginary line IL. The second power unit 82a is a rectangular parallelepiped member that extends along the imaginary line IL. Similar to the first power unit 81a, the second power unit 82a has a base that is fixed to the holding unit 61a and does not move, and a movable unit that is supported by the base. The movable unit can be moved back and forth in the direction extending along the imaginary line IL by a power generation source provided at the base. The base end of the second pusher arm 92a is connected to the movable unit, and can be moved back and forth together with the movable unit. The tip of the second pusher arm 92a is connected to the second pusher 72a, so the second power unit 82a can move the moving unit to move the second pusher 72a forward and backward. Based on this principle, the second pusher 72a can change its state between an open state and a closed state.

[0088] The second hand 56a has a second drive mechanism 102a that can move the third member 721 of the second pusher 72a toward and away from the substrate W. The second drive mechanism 102a has a second power unit 82a that generates power, located at a position separated from the first power unit 81a in the vertical direction Z. The second drive mechanism 102a has a second pusher arm 92a that transmits the power of the second power unit 82a to the third member 721 of the second pusher 72a, located at a position separated from the first pusher arm 91a.

[0089] The first power section 81a and the second power section 82a are stacked in the vertical direction Z. That is, the first power section 81a is located above the second power section 82a.

[0090] FIG. 10 also illustrates that a drive mechanism for the pusher is also provided inside the holder 61b. The first drive mechanism 101b for operating the first pusher 71b includes a first power unit 81b that generates power and a first pusher arm 91b that transmits the power of the first power unit 81b to the first pusher 71b. The configuration of the first power unit 81a is the same as that of the first power unit 81a, and the configuration of the first pusher arm 91b is the same as that of the first pusher arm 91a. Therefore, the first power unit 81b can move the connecting member 73b, the first member 711b, and the second member 712b forward and backward by moving the moving unit. Based on this principle, the first pusher 71b can change its state between an open state and a closed state. The first hand 55b has a first driving mechanism 101b that can move the first member 711b and the second member 712b closer to the substrate W while maintaining their relative positions.

[0091] The first hand 55b has a first driving mechanism 101b that can move the first member 711b and the second member 712b closer to the substrate W while maintaining their relative positions. The first driving mechanism 101b includes a first power unit 81b that generates power, and a first pusher arm 91b that transmits the power of the first power unit 81b to the first pusher 71b.

[0092] The second drive mechanism 102b, which is responsible for the operation of the second pusher 72b, includes a second power unit 82b that generates power and a second pusher arm 92b that transmits the power of the second power unit 82b to the second pusher 72b. The configuration of the second power unit 82a is the same as that of the second power unit 82a, and the configuration of the second pusher arm 92b is the same as that of the second pusher arm 92a. Therefore, the second power unit 82b can move the second pusher 72b forward and backward by moving the moving unit. Based on this principle, the second pusher 72b can change its state between an open state and a closed state. The second hand 56b includes a second drive mechanism 102b that can move the second pusher 72b closer to the substrate W.

[0093] The second hand 56b has a second drive mechanism 102b that can move the second pusher 72b closer to the substrate W. The second drive mechanism 102b includes a second power unit 82b that generates power, located at a position separated from the first power unit 81b in the vertical direction Z. The second drive mechanism 102b also includes a second pusher arm 92b that transmits the power of the second power unit 82b to the second pusher 72b, located at a position separated from the first pusher arm 91b.

[0094] The first power section 81b and the second power section 82b are stacked in the vertical direction Z. That is, the first power section 81b is located below the second power section 82b. The second power section 82b is located below the second power section 82a. Therefore, the first power section 81a, the second power section 82a, the second power section 82b, and the first power section 81a are stacked in this order.

[0095] The first pusher arm 91a and the second pusher arm 92a are arranged to avoid each other, and this point will be explained below. Figure 11 is a perspective view illustrating the positional relationship between the first pusher arm 91a and the second pusher arm 92a. The first pusher arm 91a connected to the first pusher 71a and the second pusher arm 92a connected to the second pusher 72a are arranged in positions that are symmetrical with respect to the imaginary line IL. Therefore, when the first pusher arm 91a moves forward or backward, the first pusher arm 91a does not collide with the second pusher arm 92a. Furthermore, when the second pusher arm 92a moves forward or backward, the second pusher arm 92a does not collide with the first pusher arm 91a.

[0096] Although not shown in the figures, the first pusher arm 91b and the second pusher arm 92b associated with the holder 61b are provided in positions that are symmetrical with respect to the imaginary line IL. Therefore, when the first pusher arm 91b moves forward or backward, the first pusher arm 91b does not collide with the second pusher arm 92b. Furthermore, when the second pusher arm 92b moves forward or backward, the second pusher arm 92b does not collide with the first pusher arm 91b.

[0097] Note that the first pusher arm 91a and the second pusher arm 92b are located at different positions in the vertical direction Z, so they will not collide with each other even if either one moves. The same is true for the relationship between the first pusher arm 91a and the first pusher arm 91b, the relationship between the second pusher arm 92a and the second pusher arm 92b, and the relationship between the first pusher arm 91b and the second pusher arm 92a. Therefore, the first pusher arm 91a, the second pusher arm 92a, the first pusher arm 91b, and the second pusher arm 92b can independently move the four pushers forward and backward.

[0098] The first drive mechanism 101a can move in the vertical direction relative to the second drive mechanism 102a, and this point will be explained below. Figure 10 shows the first drive mechanism 101a when each blade is configured as shown in Figure 3. The first drive mechanism 101a moves in the vertical direction Z following the up and down movement of the branch blade 110a. The up and down movement of the first drive mechanism 101a is achieved by the lifting mechanism 63a.

[0099] In the case of FIG. 10, the first drive mechanism 101a for the top layer is located away from the second drive mechanism 102a in the vertical direction Z. Therefore, a large gap exists between the first drive mechanism 101a and the second drive mechanism 102a. When the branch blade 110a is lowered from the state of FIG. 10, the first drive mechanism 101a is also lowered while maintaining its positional relationship with the branch blade 110a. At this time, the positions of the branch blade 110a and the first pusher 71a in the vertical direction Z are constant. This is because the first pusher 71a connected to the first drive mechanism 101a moves up and down in accordance with the movement of the first drive mechanism 101a up and down.

[0100] 12 shows the first drive mechanism 101a when the branch blade 110a actually descends to the position where the first blade piece 121a is located. At this time, the gap between the first drive mechanism 101a and the second drive mechanism 102a is reduced to a minimum.

[0101] As shown in FIG. 11, the first pusher arm 91a and the second pusher arm 92a are positioned symmetrically with respect to the imaginary line IL, so that even if the first drive mechanism 101a descends to the vicinity of the second drive mechanism 102a, they will not collide with each other.

[0102] Next, the first drive mechanism 101b associated with the bottom layer will be described. In the case of FIG. 10, the first drive mechanism 101b is positioned away from the second drive mechanism 102b in the vertical direction Z. Therefore, a large gap exists between the first drive mechanism 101b and the second drive mechanism 102b. When the branch blade 110b is raised from the state shown in FIG. 10, the first drive mechanism 101b is also raised while maintaining its positional relationship with the branch blade 110b. At this time, the positions of the branch blade 110b and the first pusher 71b in the vertical direction Z remain constant. This is because the first pusher 71b connected to the first drive mechanism 101b moves up and down in conjunction with the movement of the first drive mechanism 101b.

[0103] 12 shows the first drive mechanism 101b when the branch blade 110b actually rises to the position where the first blade piece 121b is located. At this time, the gap between the first drive mechanism 101b and the second drive mechanism 102b is reduced to a minimum.

[0104] As described above, the first pusher arm 91b and the second pusher arm 92b are positioned symmetrically with respect to the imaginary line IL, so that even if the first drive mechanism 101b rises close to the second drive mechanism 102b, they will not collide with each other.

[0105] <7. Effects of the Example> As described above, the first hand 55a of this embodiment includes a first pusher 71a for gripping a substrate, which is located at the base end of the branch blade 110a and sandwiched between a pair of first base end guides 113a. The second hand 56a includes a second pusher 72a for gripping a substrate, which is sandwiched between a pair of second base end guides 123a. The first pusher 71a includes a first member 711a and a second member 712a that contact the substrate, and the third member 721 of the second pusher 72a is sandwiched between the first member 711a and the second member 712a. With this configuration, the positions of the first pusher 71a and the second pusher 72a are different from each other. Therefore, even if the first pusher 71a and the second pusher 72a are thick in the vertical direction, the pushers do not interfere with each other. According to the present invention, it is possible to provide a substrate transport device 100 that can securely grip and transport a warped or thick substrate W with a thick pusher.

[0106] According to the configuration of this example, the second hand 56a is provided at a position that does not overlap the first hand 55a in a plan view, and the holder 61a includes a lifting mechanism 63a that can move the first hand 55a and the second hand 56a relative to each other in the vertical direction, and the lifting mechanism 63a can position the first hand 55a and the second hand 56a on the same plane and can move the first hand 55a and the second hand 56a apart in the vertical direction Z. The configuration of this example can also be applied to a substrate transport device that can change the number of substrates W to be transported by moving the first hand 55a and the second hand 56a relatively in the vertical direction Z.

[0107] According to the configuration of this example, the first base end guides 113a are each in a line-symmetric relationship with respect to an imaginary line IL that bisects the circular substrate W in a plan view, the first tip guides 114a are each in a line-symmetric relationship with respect to the imaginary line IL, the second base end guides 123a are each in a line-symmetric relationship with respect to the imaginary line IL, the second tip guides 124a are each in a line-symmetric relationship with respect to the imaginary line IL, the first member 711a and the second member 712a of the first pusher 71a are each in a line-symmetric relationship with respect to the imaginary line IL, and the second pusher 72a is on the imaginary line IL. With this configuration, the first pusher 71a pushes the substrate W from the left and right, pressing the substrate against the first tip guides 114a that are each in a line-symmetric relationship with respect to the imaginary line IL. Furthermore, the second pusher 72a pushes the substrate W from the center, pressing the substrate W against a pair of second tip guides 124a that are symmetrical to each other with respect to the imaginary line IL. With this configuration, the substrate will not shift position when gripping a viscous substrate.

[0108] According to the configuration of this example, the device is provided with a first holding unit 61a having a first hand 55a and a second hand 56a, and a second holding unit 61b having the first hand 55a and the second hand 56a and spaced apart in the vertical direction from the first holding unit 61a. With this configuration, the number of substrates that can be transported simultaneously can be increased.

[0109] According to the configuration of this example, the first hand 55a is equipped with a first drive mechanism 101a that can move the first member 711a and the second member 712a closer to the substrate W while maintaining their relative positions, and the second hand 56a is equipped with a second drive mechanism 102a that can move the second pusher 72a closer to the substrate W. With this configuration, the first drive mechanism 101a causes the first member 711a and the second member 712a to synchronously move closer to the substrate W, thereby causing the first hand 55a to grip the substrate W. As a result, the substrate W is gripped by forces of equal strength on both the left and right sides. With the above configuration, the substrate W can be gripped reliably.

[0110] According to the configuration of this example, the first drive mechanism 101a includes a first power unit 81a that generates power and a first pusher arm 91a that transmits the power of the first power unit 81a to the first pusher 71a, the second drive mechanism 102a includes a second power unit 82a that generates power and is located vertically spaced from the first power unit 81a, and the second drive mechanism 102a includes a second pusher arm 92a that transmits the power of the second power unit 82a to the second pusher 72a and is located away from the first pusher arm 91a. With this configuration, a substrate transport device can be configured by stacking power units in the vertical direction, and the configuration of the present invention can be realized without making major design changes to conventional devices. [Example]

[0111] This example relates to a substrate processing apparatus 1 equipped with the substrate transfer apparatus 100 described in the first embodiment. Details thereof will be described below.

[0112] <8. Overall composition> 13 is a plan view showing the overall configuration of the substrate processing apparatus of this example. The substrate processing apparatus 1 of this example has an indexer block 3 and a processing block 4. The substrate processing apparatus 1 has a block housing 1A that houses each block. The block housing 1A has a substantially rectangular shape in a plan view. A load port 11 is provided to protrude from a wall surface on one end side of the block housing 1A.

[0113] In this example, for convenience, the direction in which the indexer block 3 and the processing block 4 in the substrate processing apparatus 1 are arranged is referred to as the front-to-rear direction (X direction). The X direction extends horizontally. The direction from the processing block 4 to the indexer block 3 in the substrate processing apparatus 1 is referred to as the front. The direction opposite to the front is referred to as the rear. The horizontal direction perpendicular to the X direction is referred to as the left-to-right direction (Y direction). The Y direction is also the direction in which the multiple load ports 11 are arranged. For convenience, one side of the Y direction is referred to as the right, and the direction opposite to the right is referred to as the left. The height direction (Z direction) is perpendicular to both the X direction and the Y direction and coincides with the vertical direction. In each figure, front, back, right, left, top, and bottom are indicated as appropriate for reference.

[0114] <9. Indexer Block> 13, the indexer block 3 includes a load port 11 which serves as an entrance through which a carrier C, which stores a plurality of substrates W in a horizontal position at predetermined intervals in the Z direction, is introduced into the block. The carrier C can be placed on the load port 11.

[0115] A plurality of substrates W (for example, 25 substrates) are stored in a stack in one carrier C. The carrier C storing unprocessed substrates W to be carried into the substrate processing apparatus 1 is first placed on the load port 11.

[0116] An indexer robot IR capable of transporting four horizontally oriented substrates W simultaneously is disposed in the indexer block 3. The indexer robot IR can be configured with the substrate transport apparatus 100 described above. The indexer robot IR can access the path 34 provided at the boundary between the indexer block 3 and the processing block 4 shown in FIG. 1 and any of the four load ports 11, and transfers substrates W between the path 34 and carriers C installed on the load ports 11. The transfer of substrates W by the indexer robot IR is achieved by a gripping mechanism 50.

[0117] The path 34 can support a maximum of four substrates W stacked in the vertical direction Z.

[0118] <10. Processing Block> The processing block 4 is configured to mainly remove native oxide films grown on the surfaces of substrates W. The processing block 4 has a second column CL2 located at the rear of the path 34, a first column CL1 provided to the left of the second column CL2, and a third column CL3 provided to the right of the second column CL2. Therefore, the second column CL2 is sandwiched between the first column CL1 and the third column CL3 on the left and right.

[0119] In the first row CL1, chemical liquid processing chambers 41 each having a mechanical chuck 8 for rotatably supporting a substrate W and a nozzle 10 for supplying a chemical liquid to the substrate W are arranged in the X direction. Each chemical liquid processing chamber 41 is configured by housing the mechanical chuck 8 and the nozzle 10 in a rectangular parallelepiped housing 42. In the first row CL1 of FIG. 1, two chemical liquid processing chambers 41 are arranged one behind the other. The first row CL1 has a stack of chemical liquid processing chambers 41 stacked one on top of the other. The stack is configured by stacking two or more layers of chemical liquid processing chambers 41.

[0120] The second row CL2 serves as a passage along which a center robot CR, which transports horizontally oriented substrates W, moves back and forth. The center robot CR can access the above-mentioned path 34 as well as the chemical liquid treatment chambers 41 in the first row CL1 and the chemical liquid treatment chambers 41 provided in the third row CL3, which will be described later.

[0121] The center robot CR is capable of moving back and forth in the X direction and moving up and down in the Z direction so as to transport the substrate W to each accessible position. The center robot CR can also face the hand 46 that holds the substrate W to any of the front, left, and right directions.

[0122] The third row CL3 has a configuration similar to that of the first row CL1. Two chemical liquid treatment chambers 41 are arranged in the X direction in the third row CL3. The third row CL3 has a stack of chemical liquid treatment chambers 41 stacked one on top of the other. The stack is formed by stacking two or more layers of chemical liquid treatment chambers 41.

[0123] <11. Other configurations> As shown in Fig. 13, the substrate processing apparatus 1 includes a control unit 131 for controlling the apparatus. Although not shown in Fig. 13, the control unit 131 is also provided with a corresponding storage unit. The control unit 131 is configured, for example, by a CPU (Central Processing Unit). The specific configuration of the control unit is not limited, and for example, each control related to the substrate processing apparatus 1 may be configured by a single processor, or each control may be configured by an individual processor.

[0124] The control related to the control unit 131 includes, for example, control related to the indexer robot IR and the center robot CR.

[0125] The storage unit stores programs and parameters related to the control. The storage unit may be configured as a single device, or may be configured as individual devices corresponding to each control. Furthermore, the substrate processing apparatus 1 of this example is not particularly limited in the configuration of the device that realizes the storage unit.

[0126] In this way, the substrate transfer apparatus 100 of this example can be used in the substrate processing apparatus 1.

[0127] <12. Variations> The present invention is not limited to the above-described configuration, but can be modified as follows.

[0128] <Variation 1> In this modified example shown in FIG. 14, the shapes of the tips of the first member 711a and the second member 712a of the first pusher 71a that come into contact with the substrate W are modeled after the shape of the substrate W, and the shape of the tips of the second pusher 72a that come into contact with the substrate are modeled after the shape of the substrate W. With this configuration, the first member 711a and the second member 712a of the first pusher 71a can grip the substrate W with a wide contact surface. Therefore, the first pusher 71a can grip the substrate W more reliably. Similarly, the tips of the second pusher 72a can grip the substrate W with a wide contact surface. Therefore, the second pusher 72a can grip the substrate W more reliably.

[0129] <Variation 2> 15, the tip of the first member 711a protrudes in a direction perpendicular to the movement direction of the first member 711a (extension direction of the virtual line IL), and the tip of the second member 712a protrudes in a direction perpendicular to the movement direction of the second member 712a (extension direction of the virtual line IL). With this configuration, the first member 711a and the second member 712a of the first pusher 71a can grip the substrate W with a wide contact surface. Therefore, the first pusher 71a can grip the substrate more reliably. [Explanation of symbols]

[0130] 1. Substrate processing equipment 1A Block Housing 3 Indexer Blocks 4 Processing Blocks 8 Mechanical chuck 10 nozzles 11 Loading Port 34 Pass 41 Chemical treatment chamber 42 Case 46 hands 50 Gripping mechanism 51a Arm 51b Arm 52 Spindle 53 Robot Base 55a 1st hand 55b First Hand 56a Second Hand 56b Second Hand 61a Holding part 61b Holding part 63a Lifting mechanism 63b Lifting mechanism 71a First Pusher 71b First Pusher 72a 2nd Pusher 72b 2nd Pusher 73a Connecting member 73b Connecting member 81a 1st power section 81b 1st power section 82a 2nd power section 82b 2nd power section 91a First pusher arm 91b First pusher arm 92a Second pusher arm 92b Second pusher arm 100 Substrate transport device 101a First drive mechanism 101b First driving mechanism 102a second drive mechanism 102b Second driving mechanism 110a branch blade 110b Branch Blade 113a First base end guide 113b First base end guide 114a First tip guide 114b First tip guide 121a First blade piece 121b First blade piece 122a Second blade piece 122b Second blade piece 123a Second base end guide 123b Second base end guide 124a Second tip guide 124b Second tip guide 131 Control Unit 711a First member 711b First member 712a Second member 712b Second member 721 Third member 722 Third member C Carrier CL1 1st row CL2 2nd row CL3 3rd row CR Center Robot IR Indexer Robot W substrate

Claims

1. In a substrate transport device for transporting a substrate, a first hand capable of holding a substrate in a horizontal position; a second hand capable of holding a substrate in a horizontal position different from the substrate; a holding unit that holds the first hand and the second hand in a vertical arrangement; an arm that movably supports the holding portion; a base member supporting the arm, the first hand comprises a first blade, a pair of first base end guides provided at a base end of the first blade and contacting a lower surface of the substrate to support the substrate, a pair of first tip end guides provided at a tip end of the first blade and contacting a lower surface of the substrate to support the substrate, and a first pusher for gripping the substrate that is located at the base end of the first blade and is sandwiched between the pair of first base end guides, the second hand includes a second blade, a pair of second base end guides provided at a base end of the second blade and contacting the lower surface of the substrate to support the substrate, a pair of second tip end guides provided at a tip end of the second blade and contacting the lower surface of the substrate to support the substrate, and a second pusher for gripping the substrate that is located at the base end of the second blade and is sandwiched between the pair of second base end guides, The first pusher includes a first member and a second member that each come into contact with the substrate and press the substrate forward, and the second pusher includes a third member that comes into contact with the substrate and presses the substrate forward, and the third member is located between the first member and the second member in a plan view. A substrate transport device characterized by:

2. 2. The substrate transport device according to claim 1, the second hand is provided at a position not overlapping with the first hand in a plan view, the holding unit includes a lifting mechanism that can move the first hand and the second hand relative to each other in a vertical direction, The lifting mechanism can set the first hand and the second hand to a flush state in which they are positioned on the same plane, and a separated state in which the first hand and the second hand are separated in the vertical direction. A substrate transport device characterized by:

3. 2. The substrate transport device according to claim 1, the pair of first base end guides are in a line-symmetric relationship with each other with respect to a virtual line that bisects the substrate, which is circular in plan view, the pair of first tip guides are in a line-symmetric relationship with each other with respect to the virtual line, the pair of second base end guides are in a line-symmetric relationship with each other with respect to the virtual line, the pair of second tip guides are in a line-symmetric relationship with each other with respect to the virtual line, the first member and the second member of the first pusher are in a line-symmetric relationship with each other with respect to the virtual line, The third member of the second pusher is on the imaginary line. A substrate transport device characterized by:

4. 2. The substrate transport device according to claim 1, the shapes of the tips of the first member and the second member of the first pusher that come into contact with the substrate are modeled after the shape of the substrate; The shape of the tip of the third member of the second pusher that abuts against the substrate follows the shape of the substrate. A substrate transport device characterized by:

5. 5. The substrate transport device according to claim 4, a tip end of the first member protrudes in a direction perpendicular to a moving direction of the first member, The tip of the second member protrudes in a direction perpendicular to the moving direction of the second member. A substrate transport device characterized by:

6. 2. The substrate transport device according to claim 1, a first holding unit having the first hand and the second hand; The apparatus has two hands similar to the first hand and the second hand, and is provided with a second holding portion spaced apart in the vertical direction from the first holding portion. A substrate transport device characterized by:

7. 2. The substrate transport device according to claim 1, the first hand includes a first drive mechanism capable of moving the first member and the second member toward and away from the substrate while maintaining their relative positions; The second hand includes a second drive mechanism capable of moving the third member toward and away from the substrate. A substrate transport device characterized by:

8. 8. The substrate transport device according to claim 7, the first drive mechanism includes a first power unit that generates power, and a first pusher arm that transmits the power of the first power unit to the first member and the second member of the first pusher, the second drive mechanism includes a second power unit that generates power and is located vertically spaced from the first power unit; The second drive mechanism includes a second pusher arm that transmits the power of the second power unit to a third member of the second pusher, and the second pusher arm is located away from the first pusher arm. A substrate transport device characterized by:

9. A substrate processing apparatus comprising the substrate transfer device according to claim 1, A single-wafer processing chamber is provided to perform predetermined processing on the substrate. A substrate processing apparatus characterized by:

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