Metal container, iodinated hydrocarbon filled container, and iodinated hydrocarbon

Abstract

To provide a metal container, an iodinated hydrocarbon filled container, and iodinated hydrocarbons capable of suppressing deterioration in quality of iodinated hydrocarbons stored under high temperature in a state where the metal container is filled with the iodinated hydrocarbons.SOLUTION: A metal container used for filling of iodinated hydrocarbons, includes a cylindrical trunk part, where a maximum height Rz of a surface roughness on an inner surface of the cylindrical trunk part is 2.0 μm or less.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a metal container, an iodinated hydrocarbon-filled container, and an iodinated hydrocarbon. [Background technology]

[0002] Iodohydrocarbons are compounds that are widely used industrially as chemical raw materials and solvents. In recent years, they have also come to be used in various processes in semiconductor manufacturing. Metal containers, such as metal high-pressure vessels (cylinders) or metal canisters, are used as storage containers for these iodinated hydrocarbons used in various processes in semiconductor manufacturing, unlike the resin or glass containers typically used as storage containers for chemical raw materials.

[0003] However, it is known that the purity of iodinated hydrocarbons can decrease depending on factors such as storage conditions, and this property remains a major challenge for the industry. As a solution to this problem, for example, Patent Document 1 below discloses an iodohydrocarbon storage container for filling with iodohydrocarbon, which is made of a material with excellent pressure resistance, such as stainless steel, and uses an iodohydrocarbon stabilizing material made of metallic copper, metallic silver, or the like on the surfaces inside the container that come into contact with the liquid iodohydrocarbon and the surfaces that come into contact with the gas iodohydrocarbon. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-24073 Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, when iodohydrocarbons are used for, for example, semiconductor film formation applications, they are sometimes stored in metal containers at high temperatures (for example, at temperatures of 100°C or higher) in order to increase their vapor pressure and ensure the supply of iodohydrocarbons to semiconductor manufacturing equipment, etc. However, the iodinated hydrocarbon storage container described in Patent Document 1 has room for improvement in terms of suppressing deterioration of the quality of iodinated hydrocarbons, particularly at high temperatures.

[0006] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a metal container, an iodocarbon-filled container, and iodocarbon, which can suppress quality deterioration of the iodocarbon even when filled with the iodocarbon and stored at high temperatures. [Means for solving the problem]

[0007] As a result of extensive research into solving the above-mentioned problems, the present inventors have found that the above-mentioned problems can be solved by increasing the flatness of the inner surface by reducing the maximum height of surface roughness on the inner surface of the cylindrical body of a metal container filled with iodinated hydrocarbon to a specific value or less, thereby completing the present invention.

[0008] That is, one aspect of the present invention provides a metal container used for filling an iodinated hydrocarbon, the metal container including a cylindrical body, wherein the maximum height Rz of the surface roughness on the inner surface of the cylindrical body is 2.0 μm or less. This metal container can prevent deterioration in the quality of the iodohydrocarbons even when filled with the iodohydrocarbons and stored at high temperatures.

[0009] Another aspect of the present invention provides an iodinated hydrocarbon-filled container comprising the above-mentioned metal container and an iodinated hydrocarbon filled in the metal container. This container filled with iodinated hydrocarbons can prevent deterioration in the quality of the iodinated hydrocarbons even when stored at high temperatures.

[0010] Yet another aspect of the present invention provides an iodinated hydrocarbon obtained by removing it from the above-mentioned metal container. Since this iodinated hydrocarbon is obtained by removing it from the metal container, deterioration in quality can be suppressed even after it has been stored in the metal container at high temperatures.

[0011] In the above iodinated hydrocarbon, the hydrocarbon group may have 1 to 4 carbon atoms and 1 to 3 iodines.

[0012] The iodinated hydrocarbon may be an iodinated saturated hydrocarbon.

[0013] The iodinated hydrocarbon may be diiodomethane.

[0014] At least a portion of the metal container may be made of stainless steel.

[0015] In the present invention, an iodinated hydrocarbon refers to a compound represented by RI (R represents a hydrocarbon group, and I represents iodine), or a compound in which some of the hydrogen atoms contained in R of this compound are substituted with iodine. [Effects of the Invention]

[0016] According to the present invention, there are provided a metal container, an iodocarbon-filled container, and an iodocarbon, which are capable of suppressing deterioration in the quality of the iodocarbon even when filled with the iodocarbon and stored at high temperatures. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a partial cross-sectional view schematically illustrating one embodiment of an iodinated hydrocarbon-filled container of the present invention. [Figure 2] 1 is a graph showing the relationship between the number of days of storage and the diiodomethane concentration in Example 1 and Comparative Example 1. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals, and duplicate explanations will be omitted. Furthermore, the dimensional ratios of the drawings are not limited to those shown in the drawings.

[0019] <Iodocarbon filled container> 1 is a partial cross-sectional view schematically illustrating one embodiment of an iodinated hydrocarbon-filled container of the present invention. As shown in FIG. 1, the iodinated hydrocarbon-filled container 100 includes a metal container 10 and an iodinated hydrocarbon 20 filled in the metal container 10. The metal container 10 has a cylindrical body 11. The maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body 11 is 2.0 μm or less.

[0020] According to the iodohydrocarbon filled container 100, deterioration of the quality of the iodohydrocarbon can be suppressed even when stored at high temperatures.

[0021] The metal container 10 and the iodinated hydrocarbon 20 will be described in more detail below. (metal container) The metal container 10 includes a cylindrical body 11. Specifically, as shown in FIG. 1 , the metal container 10 further includes a bottom 12 provided at the lower end of the cylindrical body 11, a lid 13 provided at the upper end of the cylindrical body 11, and a valve 14 provided on the lid 13. In this embodiment, the valve 14 includes a valve for filling the iodinated hydrocarbon 20 and a valve for discharging the iodinated hydrocarbon 20. The valve 14 may be configured as a single valve. In this case, the valve 14 serves both as a valve for filling the iodinated hydrocarbon 20 and a valve for discharging the iodinated hydrocarbon 20.

[0022] The metal container 10 may be made of a single metal layer, or may be made of a laminate of two or more metal layers.

[0023] The maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body portion 11 may be 2.0 μm or less. In this case, the metal container 10 can suppress quality deterioration of the iodohydrocarbon even when filled with the iodohydrocarbon and stored at high temperatures, compared to when the maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body portion 11 exceeds 2.0 μm. From the viewpoint of further suppressing quality deterioration of the iodohydrocarbon, the maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body portion 11 is preferably 1.0 μm or less, more preferably 0.8 μm or less, and particularly preferably 0.6 μm or less. The maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body portion 11 may be greater than 0.025 μm.

[0024] The maximum height Rz of the surface roughness on the inner surface of the portion other than the cylindrical body portion 11 (for example, the bottom portion 12 and the lid portion 13) is not particularly limited, and may be 2.0 μm or less, or may be greater than 2.0 μm.

[0025] The maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body 11 can be achieved, for example, by polishing the inner surface of an unpolished container. Polishing methods include physical polishing methods such as blast polishing, buff polishing, and centrifugal barrel polishing, chemical polishing methods that involve treatment with chemicals, and electrolytic polishing methods that involve contact with an electrolytic polishing solution and passing an electric current through it to polish the surface. Note that the polishing method is not limited to the above methods as long as it can achieve the desired maximum height Rz of the surface roughness.

[0026] The maximum height Rz of the surface roughness of the inner surface 10a of the cylindrical body portion 11 in the present invention can be measured in accordance with JIS B 0633:2001 and JIS B 0651:2001. Specifically, when measuring the maximum height Rz of the surface roughness, a surface roughness measuring instrument sold by a measuring instrument manufacturer can be used, such as the surface roughness measuring instrument manufactured by Mitutoyo Corporation.

[0027] Although there are no particular limitations on the metal constituting the metallic container 10, it is preferable to use a material that can ensure airtightness and has excellent pressure resistance. Examples of such metals include manganese steel, stainless steel, alloy steel such as chromium-molybdenum steel, carbon steel, and aluminum alloy. Here, it is preferable that at least a part of the metal container 10 is made of stainless steel. In this case, it is possible to improve the pressure resistance of the metal container 10. In particular, it is preferable that at least the cylindrical body 11 of the metal container 10 is made of stainless steel.

[0028] (iodinated hydrocarbons) Although there are no particular limitations on the iodohydrocarbon 20, from the viewpoint of ease of handling, when the iodohydrocarbon 20 is used for semiconductor film formation, the iodohydrocarbon 20 is preferably an iodohydrocarbon having a high vapor pressure. As the iodohydrocarbon having a high vapor pressure, an iodohydrocarbon having a hydrocarbon group with 1 to 8 carbon atoms and 1 to 4 iodines is preferred, and an iodohydrocarbon having a hydrocarbon group with 1 to 4 carbon atoms and 1 to 3 iodines is more preferred. These iodohydrocarbons 20 exist in a liquid or solid state at room temperature, but among the above-mentioned iodohydrocarbons having a high vapor pressure, an iodohydrocarbon that exists in a liquid state at room temperature is preferred from the viewpoint of ease of handling. The iodinated hydrocarbon may be an iodinated saturated hydrocarbon or an iodinated unsaturated hydrocarbon, such as diiodomethane. Furthermore, if the metal container 10 is pressure-resistant, the iodinated hydrocarbon 20 can be stored in a pressurized state.

[0029] <Method for manufacturing containers filled with iodinated hydrocarbons> Next, an embodiment of the method for producing an iodinated hydrocarbon-filled container of the present invention will be described. The method for manufacturing an iodohydrocarbon-filled container includes a step of filling a metal container 10 with an iodohydrocarbon 20 to manufacture an iodohydrocarbon-filled container 100. Specifically, in this step, the iodohydrocarbon 20 is filled into the metal container 10 through one of the valves 14.

[0030] In general, iodohydrocarbons are highly reactive. Therefore, it is preferable to fill the metal container 10 with the iodohydrocarbon 20 in a light-shielded and dehumidified environment to prevent the intrusion of air during filling. For example, in an inert gas atmosphere, one of the two valves 14 is opened to introduce the iodohydrocarbon 20 into the metal container 10, and the valve 14 is closed to seal the metal container 10 and fill the metal container 10 with the iodohydrocarbon 20. From the viewpoint of preventing the intrusion of air during filling into the metal container 10, it is more preferable to connect the iodohydrocarbon supply source to the metal container 10 via piping and fill the metal container 10 with the iodohydrocarbon 20 in a closed system that minimizes the possibility of air intrusion. For example, the iodohydrocarbon supply source may be connected via piping to the metal container 10, which has been previously depressurized, and the iodohydrocarbon 20 may be filled into the metal container 10 by utilizing the pressure difference between the metal container 10 and the iodohydrocarbon supply source.

[0031] After filling the metal container 10 with the iodinated hydrocarbon 20, an inert gas may be sealed in the metal container 10 and the iodinated hydrocarbon 20 may be stored under normal pressure or under pressure. Alternatively, an iodinated hydrocarbon supply source may be connected by piping to the metal container 10 in which the inert gas has been sealed in advance, and the iodinated hydrocarbon may be pressure-fed with the inert gas and filled into the metal container 10.

[0032] <Iodohydrocarbons> The iodinated hydrocarbon of the present disclosure may be the iodinated hydrocarbon obtained by removing it from the metal container 10. Since this iodinated hydrocarbon is obtained by removing it from the metal container 10, it is possible to suppress deterioration in quality even after it is stored in the metal container 10 at high temperatures. [Example]

[0033] The present invention will be described in more detail below with reference to examples and comparative examples, but the present invention is not limited to the following examples.

[0034] Example 1 First, a cylindrical SUS316L pipe (inner diameter 6.35 mm × length 100 mm × wall thickness 1.0 mm) with female nuts on both ends was prepared as the cylindrical body, and a SUS316L cap was attached to the bottom end of the pipe using a Swagelok® tube fitting. This resulted in a metal container body. The maximum height Rz of the inner surface roughness of the pipe was measured by cutting the same pipe and using a contact surface roughness tester conforming to JIS B 0633:2001 and JIS B 0651:2001. As shown in Table 1, this was 0.4 μm. Next, 0.75 mL of diiodomethane (approximately half the volume of the container) was placed in the main body of the metal container under a dry N2 atmosphere, and then a SUS316 cap was attached to the top end of the piping as a lid for the metal container using a Swagelok (registered trademark) tube joint, and the container was sealed. Thus, a container filled with an iodinated hydrocarbon was obtained.

[0035] (Comparative Example 1) An iodinated hydrocarbon-filled container was obtained in the same manner as in Example 1, except that the maximum height Rz of the surface roughness of the inner surface of the cylindrical body was set to 2.8 μm as shown in Table 1.

[0036] <Test to confirm quality deterioration prevention effect> The iodohydrocarbon-filled containers of Example 1 and Comparative Example 1 were subjected to a test to confirm the effect of inhibiting quality deterioration caused by iodohydrocarbons as follows. That is, first, the purity of diiodomethane, the concentration of iodomethane, and the concentrations of other components (components other than diiodomethane and iodomethane) were measured as the purity or concentration before the test using a GC-FID (manufactured by Shimadzu Corporation, product name: GC-2014) for the iodinated hydrocarbon-filled containers of Example 1 and Comparative Example 1. The results are shown in Table 1 and Figure 2. Next, the containers filled with iodinated hydrocarbons of Example 1 and Comparative Example 1 were placed in a thermostatic chamber and stored at 100°C. After 13 and 44 days of storage, the containers were removed from the thermostatic chamber and allowed to cool to 20-25°C. The purity of diiodomethane, the concentration of iodomethane, and the concentrations of other components (components other than diiodomethane and iodomethane) were measured using the GC-FID. The results are shown in Table 1 and Figure 2.

[0037] The purity of the diiodomethane is calculated by the following formula: Diiodomethane purity (%) = 100% - iodomethane concentration (%) - other component concentration (%) Here, the unit % for purity and concentration is GC area % (area % of the obtained GC chart).

[0038] [Table 1]

[0039] As shown in Table 1 and FIG. 2, Example 1 showed a smaller increase in iodomethane concentration and a smaller decrease in diiodomethane purity than Comparative Example 1, indicating that deterioration in the quality of diiodomethane was suppressed.

[0040] This confirms that the metal container of the present invention can suppress deterioration in the quality of iodohydrocarbons even when filled with the iodohydrocarbons and stored at high temperatures. [Explanation of symbols]

[0041] 10...metal container, 10a...inner surface, 11...cylindrical body, 20...iodinated hydrocarbon, 100...container filled with iodinated hydrocarbon.

Claims

1. A metal container used for filling iodinated hydrocarbons, a cylindrical body portion; A metal container, wherein the maximum height Rz of the surface roughness on the inner surface of the cylindrical body is 2.0 μm or less.

2. 2. The metal container according to claim 1, wherein the hydrocarbon group in the iodinated hydrocarbon has 1 to 4 carbon atoms and 1 to 3 iodines.

3. 2. The metal container of claim 1, wherein the iodinated hydrocarbon is an iodinated saturated hydrocarbon.

4. 4. The metal container of claim 3, wherein the iodinated saturated hydrocarbon is diiodomethane.

5. The metal container according to any one of claims 1 to 4, at least a portion of which is made of stainless steel.

6. The metal container according to claim 1; and an iodinated hydrocarbon filled container comprising the metal container.

7. 7. The container filled with an iodinated hydrocarbon according to claim 6, wherein the number of carbon atoms in the hydrocarbon group in the iodinated hydrocarbon is 1 to 4 and the number of iodines is 1 to 3.

8. 8. The iodohydrocarbon filled container of claim 7, wherein the iodohydrocarbon is an iodinated saturated hydrocarbon.

9. 9. The iodinated hydrocarbon filled container of claim 8, wherein the iodinated saturated hydrocarbon is diiodomethane.

10. 10. The iodinated hydrocarbon-filled container according to claim 6, wherein at least a portion of the metal container is made of stainless steel.

11. 2. An iodinated hydrocarbon obtained by removing it from the metal container according to claim 1.

12. 12. The iodinated hydrocarbon according to claim 11, wherein the hydrocarbon group in the iodinated hydrocarbon has 1 to 4 carbon atoms and 1 to 3 iodines.

13. 12. The iodohydrocarbon of claim 11, wherein the iodohydrocarbon is an iodinated saturated hydrocarbon.

14. 14. The iodinated saturated hydrocarbon of claim 13, wherein the iodinated saturated hydrocarbon is diiodomethane.

15. 12. The iodinated hydrocarbon of claim 11, wherein the metal container is at least partially constructed of stainless steel.

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