Coating apparatus

Abstract

To provide a coating apparatus capable of suppressing variation in a flow-rate distribution, in a width direction, of a coating liquid flowing out from a coating manifold.SOLUTION: A coating apparatus 1 includes: a coating manifold 110 for supplying a coating liquid to a base material; a supply flow path 200 that supplies the coating liquid to the coating manifold; and a connection flow path 300 that connects the supply flow path and the coating manifold. The connection flow path 300 includes at least one branch flow path 311a and a plurality of branch flow paths 312a branched from the at least one branch flow path 311a. A cross-sectional area of each of the plurality of branch flow paths 312a is equal to a value obtained by dividing a cross-sectional area of the branch flow path 311a by the number of the plurality of branch flow paths 312a.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a coating device. [Background technology]

[0002] Japanese Patent Application Laid-Open Publication No. 2022-041501 (Patent Document 1) discloses a coating device including a first manifold, a plurality of flow paths connected to the first manifold, and a die including a second manifold connected to the plurality of flow paths. A coating liquid is supplied to the first manifold from a tank. The first manifold has the function of supplying the coating liquid uniformly to each flow path. The second manifold has the function of adjusting the pressure of the coating liquid in the width direction. The coating liquid flowing out of the second manifold is discharged toward a substrate from a discharge port of the die. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-041501 Summary of the Invention [Problem to be solved by the invention]

[0004] In the coating device described in Patent Document 1, non-uniform shear rate distribution in the first manifold causes stagnation in the first manifold. This causes fluctuations in the flow rate distribution in the width direction, for example, during intermittent coating or when the viscosity of the coating fluid changes. As a result, the thickness of the coating fluid discharged from the second manifold varies.

[0005] An object of the present disclosure is to provide a coating device that can suppress fluctuations in the flow rate distribution in the width direction of a coating liquid flowing out from a coating manifold. [Means for solving the problem]

[0006] A coating device according to one aspect of the present disclosure is a coating device that forms a coating film on a substrate by supplying a coating liquid to the substrate, and includes a coating manifold for supplying the coating liquid to the substrate, a supply flow path that supplies the coating liquid to the coating manifold, and a connecting flow path that connects the supply flow path to the coating manifold. The connecting flow path includes at least one first flow path and a plurality of second flow paths branching from the at least one first flow path. The cross-sectional area of ​​each of the plurality of second flow paths is equal to the cross-sectional area of ​​the at least one first flow path divided by the number of the plurality of second flow paths. Note that "equal" has a broad meaning that includes being completely identical and being substantially equal (for example, having only slight deviations due to manufacturing variations).

[0007] In a coating device according to one aspect of the present disclosure, as described above, the cross-sectional area of ​​each of the plurality of second flow paths is equal to the cross-sectional area of ​​at least one first flow path divided by the number of the plurality of second flow paths. This prevents differences in the shear rate (flow rate) (flow rate / cross-sectional area) of the coating fluid in each second flow path, and also prevents differences between the shear rate of the coating fluid in the second flow path and the shear rate of the coating fluid in at least one first flow path. As a result, the shear rate of the coating fluid in the connecting flow path can be kept constant, thereby preventing stagnation of the coating fluid in the connecting flow path. This prevents fluctuations in the flow rate distribution in the width direction of the coating fluid flowing out of the coating manifold. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to provide a coating device that can suppress fluctuations in the flow rate distribution in the width direction of a coating liquid flowing out from a coating manifold. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a cross-sectional view schematically illustrating a coating device according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a plan view showing the configuration of a connecting flow channel and a supply flow channel. [Figure 3]FIG. 2 is a diagram schematically illustrating a connecting channel and a supply channel. [Figure 4] Fig. 4(A) is a cross-sectional view taken along line IVa-IVa in Fig. 2. Fig. 4(B) is a cross-sectional view taken along line IVb-IVb in Fig. 2. Fig. 4(C) is a cross-sectional view taken along line IVc-IVc in Fig. 2. Fig. 4(D) is a cross-sectional view taken along line IVd-IVd in Fig. 2. Fig. 4(E) is a cross-sectional view taken along line IVe-IVe in Fig. 2. Fig. 4(F) is a cross-sectional view taken along line IVf-IVf in Fig. 2. [Figure 5] FIG. 4 is a side view showing the configuration of a connecting flow channel and a supply flow channel. [Figure 6] FIG. 10 is a side view showing the configuration of a connecting flow channel and a supply flow channel in a modified example of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The present disclosure will be described with reference to the accompanying drawings, in which the same or corresponding elements are designated by the same reference numerals.

[0011] 1 is a cross-sectional view schematically illustrating a coating device according to one embodiment of the present disclosure. The coating device 1 is an apparatus that applies a coating liquid 30 to a substrate 20 transported by a roll 10. In this embodiment, a slurry used for electrodes of a storage cell is used as the coating liquid 30, and an electrode foil made of aluminum or the like is used as the substrate 20. However, the substrate 20 and the coating liquid 30 are not limited to these.

[0012] As shown in FIG. 1, the coating device 1 includes a die 100 , a supply flow path 200 , and a connecting flow path 300 .

[0013] The die 100 applies (supplies) the coating liquid 30 to the substrate 20. The die 100 includes a coating manifold 110. The coating manifold 110 has a function of discharging the coating liquid 30 onto the substrate 20 at a uniform thickness in the width direction (the direction parallel to the rotation axis of the roll 10).

[0014] The die 100 has a slit portion 112 connected to the outlet of a coating manifold 110, and a discharge port 114 connected to the slit portion 112. The coating fluid 30 flowing out of the coating manifold 110 is discharged from the discharge port 114 via the slit portion 112 onto the substrate 20. As a result, a coating film 32 is formed on the substrate 20.

[0015] The supply flow path 200 is a flow path for supplying the coating liquid 30 to the coating manifold 110. The coating liquid 30 is sent to the supply flow path 200 by a pump 220 from a tank 210 that stores the coating liquid 30.

[0016] The connecting flow path 300 connects the supply flow path 200 and the coating manifold 110. The connecting flow path 300 has the function of leveling the coating liquid 30 flowing into the coating manifold 110 in the width direction. Note that in Figure 1, the connecting flow path 300 is simply shown as a single flow path.

[0017] 2 is a perspective view schematically illustrating a coating device. The connecting flow path 300 has at least one flow path section 310. In this embodiment, seven flow path sections 310 are provided in the connecting flow path 300. However, the number of flow path sections 310 is not limited to seven. As shown in FIG. 2, the connecting flow path 300 has an inverted tournament structure in which it branches off in stages from the supply flow path 200.

[0018] The flow path section 310 has a shape that branches into two branch flow paths with equal flow path distances. In other words, the flow path section 310 has one upstream end and two downstream end sections. The flow path distance refers to the length of the central axis of each branch flow path. FIG. 3 shows the central axis of each branch flow path. The two branch flow paths branched from one flow path have the same cross-sectional area. Furthermore, each branch flow path is formed so that its cross-sectional area is constant.

[0019] Hereinafter, the flow path section 310 connected to the downstream end 230 of the supply flow path 200 will be referred to as the "first flow path section 311," the flow path section 310 connected to each downstream end 330 of the first flow path section 311 will be referred to as the "second flow path section 312," and the flow path section 310 connected to each downstream end 331 of the second flow path section 312 will be referred to as the "third flow path section 313." In the embodiment shown in FIGS. 2 and 3, the connecting flow path 300 has one first flow path section 311, two second flow path sections 312, and four third flow path sections 313. The downstream end 330 is an example of the "end" in this disclosure.

[0020] As shown in FIG. 2, the direction in which the supply flow path 200 and the connecting flow path 300 are connected (the direction in which the first flow path section 311 to the third flow path section 313 are aligned) is defined as the X direction. The direction in which the two second flow path sections 312 (the four third flow path sections 313) are aligned is defined as the Y direction. The Z direction is a direction perpendicular to both the X direction and the Y direction. The X direction and the Y direction are perpendicular to each other. The supply flow path 200, the first flow path section 311, the second flow path section 312, and the third flow path section 313 are aligned in this order from the X2 side. The X direction and the Y direction are examples of the "second direction" and the "first direction" in the present disclosure.

[0021] The first flow path section 311 branches off from the supply flow path 200. An upstream end 320 of the first flow path section 311 is connected to a downstream end 230 of the supply flow path 200. The first flow path section 311 is a section that receives the coating liquid 30 sent from the supply flow path 200.

[0022] Each second flow path section 312 branches off from the first flow path section 311. An upstream end 321 of each second flow path section 312 is connected to a downstream end 330 of each first flow path section 311.

[0023] Each third flow path section 313 branches off from the second flow path section 312. An upstream end 322 of the third flow path section 313 is connected to a downstream end 331 of the second flow path section 312. In this embodiment, a flow rate adjustment valve 400 is provided in each third flow path section 313. However, the flow rate adjustment valve 400 may be provided in the second flow path section 312. A downstream end 332 of the third flow path section 313 is connected to the coating manifold 110.

[0024] The first flow path section 311 has two branch flow paths 311a branched from the supply flow path 200. The upstream end of one branch flow path 311a and the upstream end of the other branch flow path 311a form an upstream end 320. The downstream end of each branch flow path 311a forms a downstream end 330. The branch flow path 311a is an example of the "first flow path" of the present disclosure.

[0025] One branch flow channel 311a extends from the upstream end 320 toward the Y1 side. The other branch flow channel 311a extends from the upstream end 320 toward the Y2 side. A notch portion 341 is formed in the upstream end 320. The notch portion 341 adjusts the flow rate of the coating liquid 30 from the supply flow channel 200 to the branch flow channel 311a on the Y1 side and the flow rate of the coating liquid 30 from the supply flow channel 200 to the branch flow channel 311a on the Y2 side. The notch portion 341 is located on the center line α of the supply flow channel 200. The center line α extends in the X direction. The center line α is a line that passes through the center C1 of the downstream end 230 of the supply flow channel 200.

[0026] The connecting flow path 300 is formed symmetrically with respect to the center line α of the supply flow path 200, and therefore, only the portion on the Y1 side of the center line α will be described below as a representative example.

[0027] The branch flow path 311a has an upstream flow path 311b and a downstream flow path 311c. The upstream flow path 311b extends in the Y direction. The upstream flow path 311b connects the supply flow path 200 and the downstream flow path 311c. The downstream flow path 311c extends in the X direction. The downstream flow path 311c connects the upstream flow path 311b and the second flow path section 312 (each branch flow path 312a described below).

[0028] The second flow path section 312 has two branch flow paths 312a branching from the first flow path section 311. The upstream end of one branch flow path 312a and the upstream end of the other branch flow path 312a form an upstream end section 321. The downstream end section of each branch flow path 312a forms a downstream end section 331. The branch flow path 312a is an example of a "second flow path" in the present disclosure. The upstream end section 321 is an example of a "branch section" in the present disclosure.

[0029] One branch flow path 312a extends from the upstream end 321 to the Y1 side. The other branch flow path 312a extends from the upstream end 321 to the Y2 side. A notch 342 is formed in the upstream end 321. The notch 342 adjusts the flow rate of the coating liquid 30 from the branch flow path 311a to the branch flow path 312a on the Y1 side and the flow rate of the coating liquid 30 from the branch flow path 311a to the branch flow path 311a on the Y2 side. The branch flow path 312a on the Y1 side and the branch flow path 312a on the Y2 side are examples of a "one-side flow path" and a "other-side flow path," respectively.

[0030] The notch portion 342 is provided at a position closer to the Y1 side than the center line β of the downstream flow path 312c. The center line β extends in the X direction. The center line β is a line that passes through the center C2 of the downstream end portion 330 of the downstream flow path 311c (branch flow path 311a). In other words, the notch portion 342 is provided at a position closer to the Y1 side than the center C2.

[0031] In this embodiment, the notch portion 342 is located closer to the center C2 in the direction in which the coating liquid 30 flows through the upstream flow path 311b (i.e., the Y1 direction). Here, as the coating liquid 30 flows toward the Y1 side in the upstream flow path 311b, a moment toward the Y1 side is generated in the coating liquid 30. Therefore, a moment toward the Y1 side is also generated in the coating liquid 30 immediately before it flows into the second flow path portion 312. In contrast, by providing the notch portion 342 at a position closer to the Y1 side than the center C2, the amount of coating liquid 30 flowing into the branch flow path 312a on the Y1 side can be reduced. As a result, the flow rate of the coating liquid 30 into the branch flow path 312a on the Y1 side and the flow rate of the coating liquid 30 into the branch flow path 312a on the Y2 side can be made uniform.

[0032] Each branch flow path 312a has an upstream flow path 312b and a downstream flow path 312c. The upstream flow path 312b extends in the Y direction. The upstream flow path 312b connects the first flow path section 311 and the downstream flow path 312c. The downstream flow path 312c extends in the X direction. The downstream flow path 312c connects the upstream flow path 312b and the third flow path section 313 (each branch flow path 313a or each branch flow path 313b described below).

[0033] The third flow path section 313 includes two branch flow paths 313a branched from the branch flow path 312a on the Y1 side. The third flow path section 313 also includes two branch flow paths 313b branched from the branch flow path 312a on the Y2 side. The branch flow paths 313a and 313b are examples of the "third flow path" and "fourth flow path" of the present disclosure, respectively.

[0034] One branch flow path 313a extends from the upstream end 322 to the Y1 side. The other branch flow path 313a extends from the upstream end 322 to the Y2 side. A notch 343 is formed in the upstream end 322 connected to the Y1-side branch flow path 312a. The notch 343 is located closer to the Y1 side than the center line γ. The center line γ extends in the X direction. The center line γ is a line passing through the center C3 of the downstream end 331 of the Y1-side branch flow path 312a (downstream flow path 312c). In other words, the notch 343 is located closer to the Y1 side than the center C3.

[0035] One branch flow path 313b extends from the upstream end 322 to the Y1 side. The other branch flow path 313b extends from the upstream end 322 to the Y2 side. A notch 344 is formed in the upstream end 322 connected to the Y2-side branch flow path 312a. The notch 344 is located closer to the Y2 side than the center line δ. The center line δ extends in the X direction. The center line δ is a line passing through the center C4 of the downstream end 331 of the Y2-side branch flow path 312a (downstream flow path 312c). In other words, the notch 344 is located closer to the Y2 side than the center C4.

[0036] In conventional coating devices, uneven shear rate distribution in the connecting flow channels causes stagnation in the connecting flow channels. This causes fluctuations in the flow rate distribution in the width direction, for example, during intermittent coating or when the viscosity of the coating fluid 30 changes. As a result, variations occur in the thickness of the coating fluid 30 discharged from the coating manifold.

[0037] Therefore, in this embodiment, if a plurality of post-branch flow paths are branched from the pre-branch flow path, the cross-sectional area of ​​each of the plurality of post-branch flow paths is equal to the value obtained by dividing the cross-sectional area of ​​the pre-branch flow path by the number of the plurality of post-branch flow paths. Note that "equal" has a broad meaning that includes being completely identical and being substantially equal (for example, having only a slight deviation due to manufacturing variations). This will be explained in detail below.

[0038] Specifically, if the cross-sectional area of ​​each branch flow path 311a (see Figure 4(A)) is 4S, the cross-sectional area of ​​the branch flow path 312a on the Y1 side (see Figure 4(B)) and the cross-sectional area of ​​the branch flow path 312a on the Y2 side (see Figure 4(C)) are each 2S.

[0039] That is, the cross-sectional area of ​​each of the two branch flow paths 312a branched from the branch flow path 311a is equal to the value obtained by dividing the cross-sectional area of ​​the branch flow path 311a by the number of branch flow paths 312a (connected to the branch flow path 311a) (i.e., 2). In other words, the cross-sectional area of ​​each branch flow path 312a is equal to the value obtained by dividing the cross-sectional area of ​​the branch flow path 311a by the number of branches from the branch flow path 311a to the branch flow paths 312a. From another perspective, the cross-sectional area of ​​the branch flow path 311a is equal to the sum of the cross-sectional areas of the two branch flow paths 312a branched from the branch flow path 311a.

[0040] Here, if the flow rate of coating liquid 30 in supply flow path 200 is 8Q, the flow rate of coating liquid 30 in branch flow path 311a is 4Q. The flow rate of coating liquid 30 in branch flow path 312a is 2Q. The flow rate of coating liquid 30 in each of branch flow paths 313a and 313b is Q.

[0041] Therefore, the shear rate (flow rate) of coating liquid 30 in branch channel 311a (flow rate / cross-sectional area=4Q / 4S) is equal to the shear rate (2Q / 2S) of coating liquid 30 in branch channel 312a. This makes the shear rate of coating liquid 30 constant (exhibiting a constant viscosity), thereby suppressing fluctuations in the flow rate distribution of coating liquid 30 in the width direction (Y direction).

[0042] Furthermore, the cross-sectional area of ​​each branch flow path 313a (see FIG. 4(D)) is S. Therefore, the cross-sectional area of ​​each of the two branch flow paths 313a branched from the branch flow path 312a is equal to the value obtained by dividing the cross-sectional area of ​​the branch flow path 312a by the number of branch flow paths 313a (connected to that branch flow path 312a) (i.e., 2). In other words, the cross-sectional area of ​​each branch flow path 313a is equal to the value obtained by dividing the cross-sectional area of ​​the branch flow path 312a by the number of branches from the branch flow path 312a to the branch flow path 313a. From another perspective, the cross-sectional area of ​​the branch flow path 312a is equal to the sum of the cross-sectional areas of the two branch flow paths 313a branched from the branch flow path 312a.

[0043] Similarly, the cross-sectional area of ​​each branch flow path 313b (see FIG. 4(E)) is S. Therefore, the cross-sectional area of ​​each of the two branch flow paths 313b branched from the branch flow path 312a is equal to the cross-sectional area of ​​the branch flow path 312a divided by the number of branch flow paths 313b (connected to the branch flow path 312a) (i.e., 2). In other words, the cross-sectional area of ​​each branch flow path 313b is equal to the cross-sectional area of ​​the branch flow path 312a divided by the number of branches from the branch flow path 312a to the branch flow path 313b. From another perspective, the cross-sectional area of ​​the branch flow path 312a is equal to the sum of the cross-sectional areas of the two branch flow paths 313b branched from the branch flow path 312a.

[0044] This makes the shear rate (2Q / 2S) of coating liquid 30 in branch flow path 312a equal to the shear rate (Q / S) of coating liquid 30 in each of branch flow paths 313a and 313b. As a result, the shear rate of coating liquid 30 becomes constant and a constant viscosity is developed, thereby suppressing fluctuations in the flow rate distribution of coating liquid 30 in the width direction (Y direction).

[0045] Furthermore, the cross-sectional area of ​​the supply flow path 200 (see FIG. 4(F)) is 8S. Therefore, the cross-sectional area of ​​each of the two branch flow paths 311a branched from the supply flow path 200 is equal to the value obtained by dividing the cross-sectional area of ​​the supply flow path 200 by the number of branch flow paths 311a (i.e., 2). In other words, the cross-sectional area of ​​each branch flow path 311a is equal to the value obtained by dividing the cross-sectional area of ​​the supply flow path 200 by the number of branches from the supply flow path 200 to the branch flow paths 311a. From another perspective, the cross-sectional area of ​​the supply flow path 200 is equal to the sum of the cross-sectional areas of the two branch flow paths 311a branched from the supply flow path 200.

[0046] This makes the shear rate (8Q / 8S) of the coating liquid 30 in the supply flow path 200 equal to the shear rate (4Q / 4S) of the coating liquid 30 in the branch flow path 311a. As a result, when the coating liquid 30 moves from the supply flow path 200 to the branch flow path 311a, the shear rate of the coating liquid 30 becomes constant (the coating liquid 30 develops a constant viscosity), and therefore fluctuations in the flow rate distribution of the coating liquid 30 can be suppressed.

[0047] 5 is a side view of the supply flow channel 200 and the connecting flow channel 300. The supply flow channel 200 has an end 201 and an end 202. The end 201 and the end 202 are the ends of the supply flow channel 200 on the Z1 side and the Z2 side, respectively. The end 201 and the end 202 each extend in the X direction.

[0048] The first flow path section 311 has an end section 311d and an end section 311e. The end section 311d and the end section 311e are respectively the Z1-side and Z2-side ends of the first flow path section 311. The end sections 311d and 311e each extend in the X direction.

[0049] The second flow path section 312 has an end section 312d and an end section 312e. The end section 312d and the end section 312e are the Z1-side and Z2-side ends, respectively, of the second flow path section 312. The end sections 312d and 312e each extend in the X direction.

[0050] The third flow path section 313 has an end section 313c and an end section 313d. The end section 313c and the end section 313d are the Z1-side and Z2-side ends, respectively, of the third flow path section 313. The end sections 313c and 313d each extend in the X direction.

[0051] In the Z direction, the end 201, the end 311d, the end 312d, and the end 313c are provided at the same position.

[0052] End 311e is located closer to the Z1 side than end 202. Supply flow path 200 has inclined portion 203 connecting end 202 and end 311e. Inclined portion 203 is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0053] End 312e is located closer to the Z1 side than end 311e. First flow path section 311 has inclined section 311f connecting end 311e and end 312e. Inclined section 311f is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0054] End 313d is located closer to the Z1 side than end 312e. Second flow path section 312 has inclined section 312f connecting end 312e and end 313d. Inclined section 312f is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0055] 5, the flow path portion formed by the supply flow path 200 and the connecting flow path 300 has a stepped shape in which the Z2 side end gradually approaches the Z1 side end toward the X1 side. Note that the position of the Z1 side end of the flow path portion in the Z direction is constant.

[0056] In this embodiment, the supply flow path 200 and the first flow path section 311 (two branch flow paths 311a, FIG. 2) extend along the same plane. Specifically, the supply flow path 200 and the first flow path section 311 (two branch flow paths 311a) extend along the XY plane.

[0057] This makes it possible to prevent the coating liquid 30 from colliding with the wall surface of the flow path pipe when moving from the supply flow path 200 to the first flow path section 311, compared to when the plane along which the supply flow path 200 extends and the plane along which the first flow path section 311 (each branch flow path 311a) extends intersect. As a result, it is possible to prevent pressure loss of the coating liquid 30.

[0058] Furthermore, in this embodiment, the connecting flow path 300 forms a plurality of paths through which the coating fluid 30 flows from the supply flow path 200 to the coating manifold 110. Each of the plurality of paths is composed of one of the branch flow paths 311a, one of the branch flow paths 312a, and one of the branch flow paths 313a (or branch flow path 313b). The plurality of paths have the same path length.

[0059] This makes it possible to prevent the pressure loss of the coating liquid 30 from becoming uneven, regardless of which path the coating liquid 30 passes through. As a result, fluctuations in the flow rate distribution of the coating liquid 30 flowing out of the coating manifold 110 in the width direction are suppressed.

[0060] As described above, in this embodiment, the cross-sectional area of ​​each of the multiple post-branch flow paths (e.g., branch flow path 312a) is equal to the cross-sectional area of ​​the pre-branch flow path (e.g., branch flow path 311a) divided by the number of multiple post-branch flow paths. This makes it possible to prevent differences in the shear rate (flow velocity) of the coating liquid 30 between the pre-branch and post-branch flow paths. As a result, the coating liquid 30 develops a constant viscosity, making it possible to prevent fluctuations in the flow rate distribution of the coating liquid 30.

[0061] <Modification> In the above embodiment, an example was shown in which the position in the Z direction of the end portion on the Z1 side of the flow path portion formed by the supply flow path 200 and the connecting flow path 300 is constant, but the present disclosure is not limited to this.

[0062] 6 , a connecting flow path 350 is connected to the coating manifold 110. The supply flow path 240 is connected to the connecting flow path 350. The connecting flow path 350 includes a first flow path portion 351, a second flow path portion 352, and a third flow path portion 353.

[0063] The supply flow path 240 has an end 241 and an end 242. The end 241 and the end 242 are the ends on the Z1 side and the Z2 side, respectively, of the supply flow path 240. The end 241 and the end 242 each extend in the X direction.

[0064] The first flow path section 351 has an end section 351a and an end section 351b. The end section 351a and the end section 351b are the Z1-side and Z2-side ends, respectively, of the first flow path section 351. The end section 351a and the end section 351b each extend in the X direction.

[0065] The second flow path section 352 has an end section 352a and an end section 352b. The end section 352a and the end section 352b are the Z1-side and Z2-side ends, respectively, of the second flow path section 352. The end section 352a and the end section 352b each extend in the X direction.

[0066] The third flow path section 353 has an end section 353a and an end section 353b. The end section 353a and the end section 353b are the Z1-side and Z2-side ends, respectively, of the third flow path section 353. The end section 353a and the end section 353b each extend in the X direction.

[0067] The end 351a is disposed closer to the Z2 side than the end 241. The supply flow path 240 has an inclined portion 243 that connects the end 241 and the end 351a. The inclined portion 243 is inclined so as to lean (incline) toward the Z2 side as it approaches the X1 side.

[0068] End 351b is disposed closer to the Z1 side than end 242. Supply flow path 240 has an inclined portion 244 connecting end 242 and end 351b. Inclined portion 244 is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0069] The end 352a is disposed closer to the Z2 side than the end 351a. The first flow path section 351 has an inclined section 351c connecting the end 351a and the end 352a. The inclined section 351c is inclined so as to lean (incline) toward the Z2 side as it approaches the X1 side.

[0070] The end 352b is disposed closer to the Z1 side than the end 351b. The first flow path section 351 has an inclined section 351d connecting the end 351b and the end 352b. The inclined section 351d is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0071] The end 353a is disposed closer to the Z2 side than the end 352a. The second flow path section 352 has an inclined section 352c connecting the end 352a and the end 353a. The inclined section 352c is inclined so as to lean (incline) toward the Z2 side as it approaches the X1 side.

[0072] The end 353b is disposed closer to the Z1 side than the end 352b. The second flow path section 352 has an inclined section 352d connecting the end 352b and the end 353b. The inclined section 352d is inclined so as to lean (incline) toward the Z1 side as it approaches the X1 side.

[0073] Therefore, as shown in FIG. 6, the flow path section formed by the supply flow path 240 and the connecting flow path 350 has a stepped shape such that the ends on the Z1 side and Z2 side gradually approach the center of the flow path section in the Z direction (see the dashed line in FIG. 6) as they move toward the X1 side.

[0074] In the above embodiment, an example has been shown in which three flow path sections (311 to 313) are provided between the supply flow path 200 and the coating manifold 110, but the present disclosure is not limited to this. For example, the third flow path section 313 does not have to be provided. Furthermore, the connecting flow path may include four or more flow path sections.

[0075] In the above embodiment, an example has been shown in which the notch portion 342 of the second flow path portion 312 is shifted to one side in the Y direction with respect to the center C2, but the present disclosure is not limited to this. The notch portion 342 may be provided at the same position in the Y direction as the center C2. The same may be true for the notch portion 343 of the third flow path portion 313. Furthermore, the notch portion 341 of the first flow path portion 311 may be shifted to one side in the Y direction with respect to the center C1. Furthermore, at least one of the notch portions 341 to 343 does not have to be provided in the connecting flow path 300.

[0076] In the above embodiment, the two branch flow paths 311a and the supply flow path 200 extend along the same plane, but the present disclosure is not limited to this. For example, the supply flow path 200 may extend in the Z direction, so that the plane on which the branch flow paths 311a extend and the plane on which the supply flow path 200 extends may intersect (be perpendicular to) each other.

[0077] In the above embodiment, an example was shown in which the path lengths of the multiple paths in the connecting flow path 300 were equal to each other, but the present disclosure is not limited to this. The path lengths may be different from each other.

[0078] In the above embodiment, an example in which two branch flow paths 311a are provided is shown, but the present disclosure is not limited to this, and only one branch flow path 311a may be provided.

[0079] In the above embodiment, an example in which one flow path is branched into two branch flow paths has been shown, but the present disclosure is not limited to this. One flow path may be branched into three or more branch flow paths.

[0080] It should be noted that the embodiments disclosed herein are illustrative in all respects and should not be considered limiting. The scope of the present disclosure is defined by the claims rather than the description of the above embodiments, and further includes all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0081] 1 Coating device, 10 Roll, 20 Substrate, 30 Coating liquid, 32 Coating film, 100 Die, 110 Coating manifold, 112 Slit section, 114 Discharge port, 200, 240 Supply flow path, 210 Tank, 220 Pump, 300, 350 Connecting flow path, 310 Flow path section, 311, 351 First flow path section, 311a Branch flow path (first flow path), 312, 352 Second flow path section, 311b Upstream side flow path, 311c Downstream side flow path, 312a Branch flow path (second flow path) (one side flow path) (other side flow path), 313, 353 Third flow path section, 313a Branch flow path (third flow path), 313b Branch flow path (fourth flow path), 321 Upstream side end (branch section), 330 Downstream side end (end), 342 Notch area, center of C2.

Claims

1. A coating device that forms a coating film on a substrate by supplying a coating liquid to the substrate, a coating manifold for supplying the coating liquid to the substrate; a supply flow path that supplies the coating liquid to the coating manifold; a connecting flow path that connects the supply flow path and the coating manifold, The connecting flow path is at least one first flow path; a plurality of second flow paths branched from the at least one first flow path, a cross-sectional area of ​​each of the plurality of second flow paths is equal to a value obtained by dividing a cross-sectional area of ​​the at least one first flow path by the number of the plurality of second flow paths.

2. the plurality of second flow paths include a first flow path and a second flow path branched from the at least one first flow path, The connecting flow path is a plurality of third flow paths branched from the one-side flow path; a plurality of fourth flow paths branched from the other-side flow path, a cross-sectional area of ​​each of the plurality of third flow paths is equal to a value obtained by dividing a cross-sectional area of ​​the one-side flow path by the number of the plurality of third flow paths; The coating device according to claim 1 , wherein a cross-sectional area of ​​each of the plurality of fourth flow paths is equal to a value obtained by dividing a cross-sectional area of ​​the other-side flow path by the number of the plurality of fourth flow paths.

3. the connecting flow path is provided with a notch portion that adjusts a flow rate of the coating liquid from the at least one first flow path to the one-side flow path and a flow rate of the coating liquid from the at least one first flow path to the other-side flow path, the notch portion is provided at a branch portion between the one-side flow path and the other-side flow path, the one-side flow path extends from the branch portion to one side in a first direction, the other-side flow path extends from the branch portion to the other side in the first direction, The at least one first flow path includes: an upstream flow path extending in the first direction and through which the coating liquid flows to the one side in the first direction; a downstream flow path extending in a second direction intersecting the first direction and connecting each of the one-side flow path and the other-side flow path to the upstream flow path, The coating device according to claim 2 , wherein the notch portion is provided at a position shifted toward the one side in the first direction with respect to a center of the downstream end of the downstream flow path.

4. the at least one first flow path includes a plurality of first flow paths branched from the supply flow path, 4. The coating device according to claim 1, wherein a cross-sectional area of ​​each of the plurality of first flow paths is equal to a value obtained by dividing a cross-sectional area of ​​the supply flow path by the number of the plurality of first flow paths.

5. The coating device according to claim 4 , wherein each of the plurality of first flow paths and the supply flow path extend along the same plane.

6. the connecting flow paths form a plurality of paths through which the coating liquid flows from the supply flow path to the coating manifold, The coating device according to any one of claims 1 to 3, wherein the plurality of paths have the same path length.

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