Tray assembly for a precursor delivery device and related methods

Abstract

The tray assembly includes a plurality of tray portions. Each of the plurality of trays includes a first tray portion and a second tray portion that can be integrally coupled by a retainer and can engage with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly can be repositioned between an extended position and a pushed-in position. In the pushed-in position, the tray assembly can be inserted into the ampoule. In the extended position, the tray assembly can be removed from the ampoule.

Description

Technical Field

[0001] The present invention relates to an arrangement-changeable tray assembly for a precursor delivery device and related methods.

[0002] Priority This disclosure claims the priority of U.S. Provisional Patent Application No. 63 / 341,832, filed on May 13, 2022, which is incorporated herein by reference.

Background Art

[0003] Delivering a precursor involves generating a vapor precursor from a solid precursor material contained in an ampoule. The vapor precursor is sent downstream to reach an apparatus such as a semiconductor processing apparatus.

Summary of the Invention

[0004] Some embodiments of the present disclosure relate to a tray assembly. In some embodiments, the tray assembly includes a first tray portion and a second tray portion. In some embodiments, the first tray portion and the second tray portion can be coupled by a retainer and, when integrally coupled by the retainer, are configured to be engageable with a cam member in a form that can be changed in arrangement between an expanded arrangement and a pushed-in arrangement based on the orientation of the cam member.

[0005] In some embodiments, the first tray portion includes a first pedestal member portion, and the second tray portion includes a second pedestal member portion. In some embodiments, when the retainer is disposed on the outer periphery of the first pedestal member portion and the second pedestal member portion, the retainer integrally couples the first pedestal member portion and the second pedestal member portion to define a pedestal member.

[0006] In some embodiments, the retainer includes at least one of an elastomeric band, a compressible ring, an annular spring, or any combination thereof.

[0007] In some embodiments, the first tray portion includes a first slot member portion, and the second tray portion includes a second slot member portion. In some embodiments, when the first tray portion and the second tray portion are integrally coupled by a retainer, the first slot member portion and the second slot member portion define a slot member.

[0008] In some embodiments, the cam member is configured to be aligned between the first slot member portion and the second slot member portion.

[0009] In some embodiments, the cam member is repositionable between a first orientation and a second orientation. In some embodiments, in the first orientation, the cam member is configured to engage the slot member. In some embodiments, in the second orientation, the cam member is configured not to engage the slot member.

[0010] In some embodiments, in the first orientation, the cam member presses the slot member in such a way that the first tray portion and the second tray portion are configured in an expanded arrangement.

[0011] In some embodiments, in the second orientation, the cam member does not press the slot member in such a way that the first tray portion and the second tray portion are configured in a pushed-in arrangement.

[0012] In some embodiments, the cam member further includes a locking member, and the locking member is configured to be insertable between the first tray portion and the second tray portion to lock the first tray portion and the second tray portion in an expanded arrangement.

[0013] In some embodiments, in the pushed-in arrangement, the first tray portion and the second tray portion are configured to be supported by the locking member.

[0014] In some embodiments, at least one of the first tray portion and the second tray portion comprises a plurality of slits.

[0015] In some embodiments, the cam member further comprises a hollow shaft member that defines a passageway for vapor.

[0016] Some embodiments of the present disclosure relate to a precursor delivery device. In some embodiments, the precursor delivery device comprises an ampoule and a tray assembly according to any one of the embodiments disclosed herein in any combination.

[0017] In some embodiments, in the expanded configuration, the first tray portion and the second tray portion press against the inner wall surface of the ampoule so as to be in thermal contact with the ampoule.

[0018] In some embodiments, in the expanded configuration, the first tray portion and the second tray portion define a passageway for vapor between the first tray portion and the second tray portion.

[0019] In some embodiments, in the pushed-in configuration, the first tray portion and the second tray portion are not in thermal contact with the inner wall surface of the ampoule.

[0020] Some embodiments of the present disclosure relate to a method. In some embodiments, the aforementioned method comprises the step of obtaining a tray assembly according to any one of the embodiments disclosed herein in any combination. In some embodiments, the aforementioned method comprises the step of orienting the cam member such that the first tray portion and the second tray portion are configured in a pushed-in configuration. In some embodiments, the aforementioned method comprises the step of inserting the tray assembly into the inner chamber of the ampoule. In some embodiments, the aforementioned method comprises the step of orienting the cam member such that the first tray portion and the second tray portion are configured in an expanded configuration.

[0021] In some embodiments, the foregoing method further comprises orienting a cam member and removing the tray assembly from the inner chamber of the ampoule such that the first tray portion and the second tray portion are configured in a pushed-in arrangement.

[0022] Some embodiments of the present disclosure relate to a tray. In some embodiments, the tray comprises a body. In some embodiments, the body has a pushed-in arrangement and an extended arrangement. In some embodiments, the extended arrangement comprises an opening through the body that defines a passage therethrough.

[0023] In some embodiments, the pushed-in arrangement does not comprise an opening through the body.

[0024] Some embodiments of the present disclosure will be described herein by way of example only with reference to the accompanying drawings. Referring now to the drawings in detail, it is emphasized that the illustrated embodiments are by way of example only and are for the purpose of considering embodiments of the present disclosure with the aid of the figures. In this regard, it will be apparent to those skilled in the art how embodiments of the present disclosure may be implemented in accordance with the description corresponding to the figures.

Brief Description of the Drawings

[0025]

Figure 1

Figure 2A

Figure 2B

Figure 2C

Figure 2D

Figure 2E

Figure 3

Figure 4

Mode for Carrying Out the Invention

[0026] Among the disclosed advantages and improvements, other objects and advantages of the present disclosure will become apparent from the following description taken in conjunction with the accompanying drawings. Although detailed embodiments of the present disclosure are disclosed herein, it should be understood that the disclosed embodiments are merely illustrative of the present disclosure which can be implemented in various forms. In addition, each of the examples described with respect to the various embodiments of the present disclosure is to be considered illustrative and not limiting.

[0027] Any conventional patents and publications referred to herein are hereby incorporated by reference in their entirety.

[0028] Throughout this specification and the claims, the following terms have the meanings explicitly associated herein unless the context clearly dictates otherwise. The phrases "in one embodiment," "in an embodiment," and "in some embodiments" in this specification do not necessarily refer to the same embodiment, although they may. Further, the phrases "in another embodiment" and "in some other embodiments" in this specification do not necessarily refer to different embodiments, although they may. All embodiments of the present disclosure are intended to be combinable without departing from the scope or spirit of the present disclosure.

[0029] As used herein, the phrase "based on" is not exclusive and, unless the context clearly dictates otherwise, allows for additional elements not recited. Additionally, throughout the specification, the meaning of "a," "an," and "the" includes referring to a plurality. The meaning of "in" includes "in" and "on the surface of."

[0030] FIG. 1 shows a schematic cross-sectional view of a non-limiting example of an ampoule 100 according to some embodiments. The ampoule 100 contains a tray assembly 102 within an inner chamber 104 of the ampoule 100. The inner chamber 104 has an inner wall surface 106. The tray assembly 102 includes a tray 108, each of which is configured to contain a vaporizable precursor. Each of the trays 108 of the tray assembly 102 includes a portion 110 configured to be in contact (e.g., thermal contact, physical contact, etc.) with the inner wall surface 106 of the ampoule 100. By the portion 110 contacting the inner wall surface 106 surface-to-surface, heat transfer from the ampoule 100 to each tray 108, and thus from each tray 108 to the vaporizable precursor on each tray 108, is improved. Various fluid flow paths are defined within the inner chamber 104 of the ampoule 100 such that fluid can flow through the ampoule 100 in an upward, downward, or both directions. The ampoule 100, as illustrated, has a generally cylindrical inner chamber. However, it will be understood that the inner chamber 104 of the ampoule can have other shapes without departing from the scope of the present disclosure.

[0031] The tray 108 of the tray assembly 102 is configurable between an extended configuration and a pushed-in configuration. In the extended configuration, the diameter of each tray 108 is increased by an amount sufficient for each portion of each tray 108 to press against the inner wall surface 106 of the ampoule 100. The outward radial expansion of each tray 108 in this manner improves thermal contact with the inner wall surface 106 of the ampoule 100 and also serves to fix each tray 108 and the tray assembly 102 within the inner chamber 104 of the ampoule 100. In the pushed-in configuration, the diameter of each tray 108 is smaller than the diameter of the inner chamber 104 of the ampoule 100. By pushing each tray 108 inward radially in this manner, the size of the tray assembly 102 is reduced, enabling the tray assembly 102 to be relatively easily installed in and removed from ampoules of any size and depth. Thus, the tray assembly 102 is insertable into the inner chamber 104 of the ampoule 100 in the pushed-in configuration, and once inserted, the tray assembly 102 is configurable to the extended configuration to achieve thermal contact with the ampoule 100. Subsequently, the tray assembly 102 can be configurable back to the pushed-in configuration for removal from the ampoule 100.

[0032] Figures 2A - 2D show various aspects of a tray assembly 200. The tray assembly 200 includes a first tray portion 202A and a second tray portion 202B. The first tray portion 202A and the second tray portion 202B can be integrally coupled by a retainer 204 and can engage a cam member 206. Depending on the orientation of the cam member 206, the tray 202 is configurable between an extended configuration and a pushed-in configuration. Figure 2A shows a schematic perspective view of the first tray portion 202A. Figure 2B shows a schematic perspective view of the second tray portion 202B. Figure 2C shows a schematic plan view of the tray assembly in the extended configuration. Figure 2D shows a schematic plan view of the tray assembly in the pushed-in configuration. Figure 2E shows a schematic plan view of the cam member 206. The various aspects of the tray assembly shown in each of Figures 2A - 2E will be discussed in more detail below.

[0033] Figure 2A shows a schematic perspective view of a non-limiting embodiment of a first tray portion 202A according to some embodiments. The first tray portion 202A includes a first pedestal member portion 208A, a first slot member portion 210A, a first bottom plate 212A, and a first arcuate wall structure 214A. The first pedestal member portion 208A and the first slot member portion 210A are generally installed at or near a central vertical axis 216A. The first bottom plate 212A connects the first pedestal member portion 208A to the first arcuate wall structure 214A. As shown, the first bottom plate 212A has an inclined portion 218A that transitions to a non-inclined portion 220A near the periphery of the first bottom plate 212A. The non-inclined portion 220A is connected to the first arcuate wall structure 214A that extends around the entire periphery of the first bottom plate 212A except at the location where the first tray portion 202A can be coupled to the second tray portion 202B.

[0034] Figure 2B shows a schematic perspective view of a non-limiting embodiment of a second tray portion 202B according to some embodiments. The second tray portion 202B includes a second pedestal member portion 208B, a second slot member portion 210B, a second bottom plate 212B, and a second arcuate wall structure 214B. The second pedestal member portion 208B and the second slot member portion 210B are generally installed at or near a central vertical axis 216B. The second bottom plate 212B connects the second pedestal member portion 208B to the second arcuate wall structure 214B. As shown, the second bottom plate 212B has an inclined portion 218B that transitions to a non-inclined portion 220B near the periphery of the second bottom plate 212B. The non-inclined portion 220B is connected to the second arcuate wall structure 214B that extends around the entire periphery of the second bottom plate 212B except at the location where the second tray portion 202B can be coupled to the first tray portion 202A.

[0035] In FIGS. 2C - 2D, it is shown that the first tray portion 202A and the second tray portion 202B are assembled together to obtain a tray assembly 200. When assembled together, a retainer 204 is provided at the outer edges of the first pedestal member portion 208A and the second pedestal member portion 208B. The retainer 204 may comprise at least one of an elastomeric band, a compressible ring, an annular spring, or any other similar component. When installed at the outer edge and in an overall compressed state, the retainer 204 applies a radially inward force sufficient to integrally couple the first pedestal member portion 208A and the second pedestal member portion 208B to define a pedestal member 208. Since the first slot member portion 210A and the second slot member portion 210B are formed within the first pedestal member portion 208A and the second pedestal member portion 208B, the slot member 210 is also defined by joining the first pedestal member portion 208A and the second pedestal member portion 208B. It will be understood that direct contact between the surfaces of the two components is not necessary for the two components to be integrally couplable or to be coupled.

[0036] Figure 2E shows a schematic plan view of a cam member 206 according to some embodiments. As shown in Figure 2E, the cam member 206 includes a cam 232 and a pin 234. Referring now to Figures 2C - 2D, it is shown that the cam member 206 is disposed between a first tray portion 202A and a second tray portion 202B and is rotatably aligned with a first slot member portion 210A and a second slot member portion 210B. When rotatably aligned, the cam member 206 can be repositioned between various orientations in which the cam 232 of the cam member 206 either engages or does not engage the slot member 210. For example, in Figure 2C, the cam member 206 is oriented such that the cam 232 engages the slot member 210. By engaging in this way, the cam 232 pushes on the slot member 210 such that the first tray portion 202A and the second tray portion 202B are pulled apart but still sufficiently joined together by the retainer 204. The opening formed between the first tray portion 202A and the second tray portion 202B defines a passage for fluid or vapor. In some embodiments, the pin 234 of the cam member 206 is used to lock the tray 202 in an extended configuration. That is, the pin 234 of the cam member 206 is placed or fixed between the first tray portion 202A and the second tray portion 202B, thereby locking the first tray portion 202A and the second tray portion 202B in place. Once the lock is released, the cam member 206 can be rotated in either direction to configure or reconfigure the tray assembly 200 in a pushed - in configuration. By rotating the cam member 206, the cam 232 is disengaged from the slot member 210 in a manner sufficient for both the first tray portion 202A and the second tray portion 202B to be pushed together. As shown in Figure 2D, in the pushed - in configuration, neither the cam 232 nor the cam member 206 engages the slot member 210, or if either does engage, such engagement is less in degree than the engagement seen in the extended configuration. In the pushed - in configuration, the pin can be positioned above or below the pedestal member 208.

[0037] FIG. 3 shows a schematic plan view of a cam member apparatus 300 according to some embodiments. The cam member apparatus 300 includes a shaft 302 and a cam member 304 disposed along the length of the shaft 302. In some embodiments, the shaft 302 is hollow so as to define a passage for fluid or vapor. Each of the cam members 304 includes a cam 306 and a pin 308. Each of the cam members 304 is configured to be rotatably aligned between slot member portions of different trays. That is, each of the cam members 304 is engageable with a slot member from a different tray such that the tray assembly includes a plurality of trays, each of which is configurable between an extended arrangement and a pushed-in arrangement. As shown in FIG. 3, the cam member apparatus 300 is configured for three trays, up to a total of four trays. For example, a tray assembly employing the cam member apparatus 300 can include three separate trays on each of the cam members 304. In the pushed-in arrangement, the cam member apparatus 300 is configured to support each of the three trays on a respective pin 308 of the cam members 304. That is, each pin 308 of the cam members 304 is positioned below each tray such that each tray rides on the pin 308. In this arrangement, the tray assembly is insertable into and removable from an ampule. In the extended arrangement, the cams 306 of the cam members 304 are aligned between and engage with the slot members of each of the trays to cause the first tray portion and the second tray portion of each of the trays to be separated so as to achieve the extended arrangement. The change in the arrangement of the trays between the extended arrangement and the pushed-in arrangement can be performed simultaneously. Although the cam member apparatus 300 is configured for a total of three to four trays, it will be understood that the cam member apparatus 300 can be configured for one to one hundred trays, i.e., any number of trays between one and one hundred.

[0038] FIG. 4 is a flowchart of method 400 according to some embodiments. As shown in FIG. 4, method 400 may include, in any order, one or more of step 402 of obtaining a tray assembly according to any one or more embodiments disclosed herein in any combination, step 404 of orienting a cam member in a first orientation such that a first tray portion and a second tray portion are configured in a pushed-in arrangement, step 406 of inserting the tray assembly into an inner chamber of an ampoule, step 408 of orienting the cam member in a second orientation such that the first tray portion and the second tray portion are configured in an extended arrangement, step 410 of orienting the cam member in the first orientation such that the first tray portion and the second tray portion are configured in a pushed-in arrangement, and step 412 of removing the tray assembly from the inner chamber of the ampoule.

[0039] Any of the components of the present disclosure may include a material that conducts heat. Materials that conduct heat include, but are not limited to, stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel, nickel-coated materials, graphite, graphite coated with pyrolytic carbon, graphite coated with silicon carbide, boron nitride, at least one of ceramic materials, any combination thereof, any alloy thereof, or any composite material thereof. In some embodiments, the tray or any portion thereof includes at least one of stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel, nickel-coated materials, graphite, graphite coated with pyrolytic carbon, graphite coated with silicon carbide, boron nitride, ceramic materials, any combination thereof, any alloy thereof, or any composite material thereof. In some embodiments, the tray or any portion thereof includes at least one of graphite, nickel, stainless steel, aluminum alloy, or any combination thereof. In some embodiments, the tray or any portion thereof is coated with nickel using sputter deposition. In some embodiments, the tray or any portion thereof is coated with graphite. In some embodiments, the graphite includes polycrystalline graphite having an amorphous carbon content of 20% to 80% by volume based on the total volume of the graphite.

[0040] The tray is configured to contain a vaporizable precursor. The vaporizable precursor may include, consist of, or consist essentially of at least one of elemental metals, metal halides, metal oxyhalides, organometallic compounds, organometallic complexes, or any combination thereof.

[0041] In some embodiments, the vaporizable precursor is dimethylhydrazine, trimethylaluminum (TMA), hafnium chloride (HfCl 4 ), zirconium chloride (ZrCl 4 ), indium trichloride, indium monochloride, aluminum trichloride, titanium iodide, tungsten carbonyl, Ba(DPM) 2, bis(dipivaloylmethanato)strontium (Sr(DPM) 2 ), TiO(DPM) 2 , tetrakis(dipivaloylmethanato)zirconium (Zr(DPM) 4 ), decaborane, octadecaborane, boron, magnesium, gallium, indium, antimony, copper, phosphorus, arsenic, lithium, sodium tetrafluoroborate, a precursor incorporating an alkylamidinato ligand, an organometallic precursor, zirconium tert-butoxide (Zr(t-OBu) 4 ), tetrakis(diethylamino)zirconium (Zr(Net 2 )) 4 ), tetrakis(diethylamino)hafnium (Hf(Net 2 )) 4 ), tetrakis(dimethylamino)titanium (TDMAT), tert-butylimino tris(diethylamino)tantalum (TBTDET), pentakis(dimethylamino)tantalum (PDMAT), pentakis(ethylmethylamino)tantalum (PEMAT), tetrakis(dimethylamino)zirconium (Zr(NMe 2 )) 4 ), hafnium tert-butoxide (Hf(tOBu) 4 ), xenon difluoride (XeF 2 ), xenon tetrafluoride (XeF 4 ), xenon hexafluoride (XeF 6 ), including at least one of these, or any combination thereof, consisting of these, or consisting essentially of these.

[0042] In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one of decaborane, hafnium tetrachloride, zirconium tetrachloride, indium trichloride, metal organic β-diketonate complexes, tungsten hexafluoride, cyclopentadienylcycloheptatrienyltitanium (CpTiCht), aluminum trichloride, titanium iodide, cyclooctatetraenylcyclopentadienyltitanium, bis(cyclopentadienyl)titanium diazide, trimethylgallium, trimethylindium, alkylaluminum such as trimethylaluminum, triethylaluminum, trimethylamine alane, dimethylzinc, tetramethyltin, trimethylantimony, diethylcadmium, tungsten carbonyl, or any combination thereof.

[0043] In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one of elemental boron, copper, phosphorus, decaborane, gallium halides, indium halides, antimony halides, arsenic halides, gallium halides, aluminum iodide, titanium iodide, MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 5 , WOCl 4 , WCl 6 , cyclopentadienylcycloheptatrienyltitanium (CpTiCht), cyclooctatetraenylcyclopentadienyltitanium, bis(cyclopentadienyl)titanium diazide, In(CH 3 ) 2 (hfac), dibromomethylstibine, tungsten carbonyl, metal organic β-diketonate complexes, metal organic alkoxide complexes, metal organic carboxylate complexes, metal organic aryl complexes, metal organic amide complexes, or any combination thereof. In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one of MoO 2 Cl 2 , MoOCl 4 , WO 2 Cl 2 , WOCl 4including at least one of, or any combination of, consisting of, or consisting essentially of these.

[0044] In some embodiments, the vaporizable precursor is, for example, but not limited to, decaborane (B 10 H 14 ), pentaborane (B 5 H 9 ), octadecaborane (B 18 H 22 ), boric acid (H 3 BO 3 ), SbCl 3 , SbCl 5 , or at least one of any type of source material that can be liquefied by heating or solubilizing in a solvent containing at least one of, or any combination of, consisting of, or consisting essentially of these. In some embodiments, the vaporizable precursor is AsCl 3 , AsBr 3 , AsF 3 , AsF 5 , AsH 3 , As 4 O 6 , As 2 Se 3 m, As 2 S 2 , As 2 S 3 , As 2 S 5 , As 2 Te 3 , B 4 H 11 , B 4 H 10 , B 3 H 6 N 3 , BBr 3 , BCl 3 , BF 3 , BF 3 .O(C 2 H 5 ) 2 , BF 3 .HOCH 3 , B 2 H 6 , F 2, HF, GeBr 4 , GeCl 4 , GeF 4 , GeH 4 , H 2 , HCl, H 2 , HSe, H 2 , HTe, H 2 , S, WF 6 , SiH 4 , SiH 2 Cl 2 , SiHCl 3 , SiCl 4 , SiH 3 Cl, NH 3 , NH 3 , Ar, Br 2 , HBr, BrF 5 , CO 2 , CO, COCl 2 , COF 2 , Cl 2 , ClF 3 , CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 8 , C 5 F 8 , CHF 3 , CH 2 F 2 , CH 3 F, CH 4 , SiH 6 , He, HCN, Kr, Ne, Ni(CO) 4 , HNO 3 , NO, N 2 , NO 2 , NF 3 , N 2 O, C 8 H 24 O 4 Si 4 , PH 3 , POCl 3 , PCl 5 , PF 3 , PFS, SbH 3 , SO 2 , SF 6 , SF 4 , Si(OC 2 H 5 )4 , C 4 H 16 Si 4 O 4 , Si(CH 3 ) 4 , SiH(CH 3 ) 3 , TiCl 4 , Xe, SiF 4 , WOF 4 , TaBr 5 , TaCl 5 , TaF 5 , Sb(C 2 H 5 ) 3 , Sb(CH 3 ) 3 , In(CH 3 ) 3 , PBr 5 , PBr 3 , RuF 5 at least one of, or any combination of, or consisting of, or consisting essentially of these.

[0045] In some embodiments, the solvent is an organic solvent, an inorganic solvent, or any combination thereof. In some embodiments, the solvent comprises arsenic, phosphorus, antimony, germanium, indium, tin, selenium, tellurium, fluorine, carbon, boron, aluminum, bromine, carbon, chlorine, nitrogen, silicon, tungsten, tantalum, ruthenium, selenium, nickel, sulfur, or any combination thereof. It will be understood that other vaporizable precursors may be used herein without departing from the present disclosure.

[0046] Aspect The following aspects will be described. It should be understood that any one or more of the features described in the following aspects can be combined with any one or more of the other aspects.

[0047] Aspect 1. A tray assembly comprising a first tray portion and a second tray portion wherein The first tray portion and the second tray portion can be joined by a retainer, and when integrally joined by the retainer, the first tray portion and the second tray portion are configured to be engageable with a cam member in a manner that allows the arrangement to be changed between an extended arrangement and a pushed-in arrangement based on the orientation of the cam member.

[0048] Aspect 2. The first tray portion includes a first pedestal member portion. The second tray portion includes a second pedestal member portion. When the retainer is disposed on the outer periphery of the first pedestal member portion and the second pedestal member portion, the retainer integrally joins the first pedestal member portion and the second pedestal member portion so as to define a pedestal member. The tray assembly according to Aspect 1.

[0049] Aspect 3. The retainer includes at least one of an elastomeric band, a compressible ring, an annular spring, or any combination thereof, and the tray assembly according to any one of Aspects 1 to 2.

[0050] Aspect 4. The first tray portion includes a first slot member portion. The second tray portion includes a second slot member portion. When the first tray portion and the second tray portion are integrally joined by a retainer, the first slot member portion and the second slot member portion define a slot member. The tray assembly according to any one of Aspects 1 to 3.

[0051] Aspect 5. The cam member is configured to be aligned between the first slot member portion and the second slot member portion, and the tray assembly according to Aspect 4.

[0052] Aspect 6. The cam member can be repositioned between a first orientation and a second orientation. In the first orientation, the cam member is configured to engage the slot member. In the second orientation, the cam member is configured not to engage with the slot member. The tray assembly according to aspect 5.

[0053] Aspect 7. The tray assembly according to aspect 6, wherein in the first orientation, the cam member presses the slot member in such a way that the first tray portion and the second tray portion are configured in an extended arrangement.

[0054] Aspect 8. The tray assembly according to aspect 6, wherein in the second orientation, the cam member does not press the slot member in such a way that the first tray portion and the second tray portion are configured in a pushed-in arrangement.

[0055] Aspect 9. The cam member further comprises a locking member and the locking member is configured to be insertable between the first tray portion and the second tray portion so as to lock the first tray portion and the second tray portion in an extended arrangement. The tray assembly according to aspect 5.

[0056] Aspect 10. In the pushed-in arrangement, the first tray portion and the second tray portion are configured to be supported by the locking member. The tray assembly according to aspect 9.

[0057] Aspect 11. At least one of the first tray portion and the second tray portion comprises a plurality of slits. The tray assembly according to any one of aspects 1 to 10.

[0058] Aspect 12. The cam member further comprises a hollow shaft member that defines a passage for steam. The tray assembly according to any one of aspects 1 to 11.

[0059] Aspect 13. The first tray portion and the second tray portion are made of at least one of stainless steel, silver, silver alloy, copper, copper alloy, aluminum, aluminum alloy, lead, nickel, nickel-coated material, graphite, graphite coated with pyrolytic carbon, graphite coated with silicon carbide, boron nitride, ceramic material, any combination thereof, any alloy thereof, or any composite material thereof, and the tray assembly according to any one of Aspects 1 to 12.

[0060] Aspect 14. The first tray portion and the second tray portion are made of at least one of graphite, nickel, stainless steel, and aluminum alloy, or any combination thereof, and the tray assembly according to any one of Aspects 1 to 13.

[0061] Aspect 15. The first tray portion and the second tray portion include an aluminum alloy, and the first tray portion and the second tray portion are configured to contain a vaporizable precursor containing a metal halide, and the tray assembly according to any one of Aspects 1 to 14.

[0062] Aspect 16. The first tray portion and the second tray portion are coated with nickel using sputter deposition, and the tray assembly according to any one of Aspects 1 to 15.

[0063] Aspect 17. The first tray portion and the second tray portion are coated with graphite, and the graphite includes polycrystalline graphite having an amorphous carbon content of 20% to 80% by volume based on the total volume of the graphite, and the tray assembly according to any one of Aspects 1 to 16.

[0064] Aspect 18. An ampoule and the tray assembly according to any one of Claims 1 to 17 comprising a precursor delivery device.

[0065] Aspect 19. In an extended arrangement, the first tray portion and the second tray portion press against the inner wall surface of the ampoule so as to be in thermal contact with the ampoule, and the precursor delivery device according to Aspect 18.

[0066] Aspect 20. The precursor delivery device according to aspect 18, wherein in the extended arrangement, the first tray portion and the second tray portion define a passage for vapor between the first tray portion and the second tray portion.

[0067] Aspect 21. The precursor delivery device according to aspect 18, wherein in the pushed-in arrangement, the first tray portion and the second tray portion are not in thermal contact with the inner wall surface of the ampoule.

[0068] Aspect 22. Obtaining the tray assembly according to any one of aspects 1 to 17, Orienting the cam member such that the first tray portion and the second tray portion are configured in a pushed-in arrangement, Inserting the tray assembly into the inner chamber of the ampoule, Orienting the cam member such that the first tray portion and the second tray portion are configured in an extended arrangement A method comprising.

[0069] Aspect 23. Orienting the cam member such that the first tray portion and the second tray portion are configured in a pushed-in arrangement, Removing the tray assembly from the inner chamber of the ampoule The method according to aspect 22, further comprising.

[0070] Aspect 24. A tray comprising a body, The body has a pushed-in arrangement and an extended arrangement, The extended arrangement includes an opening through the body that defines a passage therethrough. Tray.

[0071] Aspect 25. The tray according to aspect 24, wherein the pushed-in arrangement does not include an opening through the body.

[0072] In particular, it should be understood that changes may be made in detail, without departing from the scope of the present disclosure, with respect to the constituent materials used and the shape, size, and arrangement of the parts. This specification and the described embodiments are examples, and the true scope and spirit of the present disclosure are indicated by the appended claims.

Claims

1. A tray assembly comprising a first tray portion and a second tray portion, wherein the first tray portion and the second tray portion can be joined by a retainer, and when integrally joined by the retainer, the first tray portion and the second tray portion are configured to be engageable with the cam member in a form that allows the arrangement to be changed between an expanded arrangement and a pushed-in arrangement based on the orientation of the cam member.

2. The first tray portion includes a first pedestal member portion, the second tray portion includes a second pedestal member portion, and when the retainer is disposed on the outer periphery of the first pedestal member portion and the second pedestal member portion, the retainer integrally joins the first pedestal member portion and the second pedestal member portion so as to define a pedestal member. The tray assembly according to claim 1.

3. The tray assembly according to claim 1, wherein the retainer comprises at least one of an elastomeric band, a compressible ring, an annular spring, or any combination thereof.

4. The first tray portion includes a first slot member portion, the second tray portion includes a second slot member portion, and when the first tray portion and the second tray portion are integrally joined by the retainer, the first slot member portion and the second slot member portion define a slot member. The tray assembly according to claim 1.

5. The tray assembly according to claim 4, wherein the cam member is configured to be aligned between the first slot member portion and the second slot member portion.

6. The cam member is capable of changing its arrangement between a first orientation and a second orientation, in the first orientation, the cam member is configured to engage the slot member, and in the second orientation, the cam member is configured not to engage the slot member. The tray assembly according to claim 5.

7. In the first orientation, the cam member pushes the slot member in a form in which the first tray portion and the second tray portion are configured in the expanded arrangement. The tray assembly according to claim 6.

8. In the second orientation, the cam member does not push the slot member in a form in which the first tray portion and the second tray portion are configured in the pushed-in arrangement. ​ ​ The tray assembly according to claim 6.

9. The cam member further comprises a locking member and is configured such that the locking member is insertable between the first tray portion and the second tray portion so as to lock the first tray portion and the second tray portion in the expanded arrangement. The tray assembly according to claim 5.

10. In the pushed-in arrangement, the first tray portion and the second tray portion are configured to be supported by the locking member. The tray assembly according to claim 9.

11. At least one of the first tray portion and the second tray portion comprises a plurality of slits. The tray assembly according to claim 1.

12. The cam member further comprises a hollow shaft member that defines a passage for vapor. The tray assembly according to claim 1.

13. The first tray portion and the second tray portion include at least one of stainless steel, silver, silver alloy, copper, copper alloy, aluminum, aluminum alloy, lead, nickel, nickel-coated material, graphite, graphite coated with pyrolytic carbon, graphite coated with silicon carbide, boron nitride, ceramic material, any combination thereof, any alloy thereof, or any composite material thereof. The tray assembly according to claim 1.

14. The first tray portion and the second tray portion include at least one of graphite, nickel, stainless steel, aluminum alloy, or any combination thereof. The tray assembly according to claim 1.

15. The first tray portion and the second tray portion include an aluminum alloy and are configured to contain a vaporizable precursor containing a metal halide. The tray assembly according to claim 1.

16. The first tray portion and the second tray portion are coated with nickel using sputter deposition. The tray assembly according to claim 1.

17. The first tray portion and the second tray portion are coated with graphite, and the graphite includes polycrystalline graphite having an amorphous carbon content of 20% to 80% of the volume based on the total volume of the graphite. The tray assembly according to claim 1.

18. An ampoule and the tray assembly according to claim 1 comprising a precursor delivery device.

19. ​ The precursor delivery device according to claim 18, wherein in the expanded arrangement, the first tray portion and the second tray portion press against an inner wall surface of the ampoule so as to be in thermal contact with the ampoule.

20. The precursor delivery device according to claim 19, wherein in the pushed-in arrangement, the first tray portion and the second tray portion are not in thermal contact with the inner wall surface of the ampoule.

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