Conveying system

By using tire means with a slightly smaller inner diameter than the rim and a non-slip surface, the AGV's rotational accuracy is maintained, addressing the issue of meandering and ensuring precise travel.

JP2026013054APending Publication Date: 2026-01-28DISCO CORP
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Patent Information

Application Number
JP2024113209
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-07-16
Publication Date
2026-01-28

AI Technical Summary

Technical Problem

The adhesive applied to the drive wheels of AGVs can sometimes come off, causing errors in rotational speed and accuracy, leading to meandering and reduced travel accuracy.

Method used

The AGV is equipped with right and left tire means, each having a rotatable wheel with a tire mounted on a rim where the inner diameter is slightly smaller than the outer diameter, ensuring close contact and preventing free spinning, and includes a non-slip surface with projections and recesses to maintain rotational accuracy.

Benefits of technology

This configuration maintains the rotational accuracy of the AGV's wheels, preventing meandering and ensuring precise travel along the guide line.

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Abstract

To provide a conveying system capable of solving the problem that the traveling accuracy of an automatic conveying device is deteriorated due to the meandering of the automatic conveying device caused by the deviation of the rotating speed and rotating accuracy of a tire of the automatic conveying device.SOLUTION: In a conveyance system, a traveling panel on which an automatic conveyance device travels is disposed on a top plate of a processing device including a plurality of processing devices, and a traveling guide line for guiding traveling of the automatic conveyance device is formed on the traveling panel. The automatic conveying device includes a right tire means 28 and a left tire means arranged so as to sandwich the traveling guide line, a front wheel arranged in front of the right tire means 28 and the left tire means, and a rear wheel arranged in the rear of the right tire means and the left tire means. The right tire means and the left tire means include a rotatable wheel 281, a tire 281 mounted on a rim 281a of the wheel 281, and a drive source 283 for rotating the wheel 281, and an inside diameter D1 of the tire 281 is formed slightly smaller than an outside diameter 281a of the rim D2.SELECTED DRAWING: Figure 4
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Description

[Technical Field]

[0001] The present invention relates to a conveying system in which a traveling panel along which an automatic conveying device travels is arranged on the top plate of a processing device including multiple processing devices, and a traveling guide line for guiding the travel of the automatic conveying device is formed on the traveling panel. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. These chips are then used in electrical devices such as mobile phones and personal computers.

[0003] The present applicant has also developed and proposed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport vehicle (hereinafter referred to as an "AGV") travels between the processing devices to transport wafers from the wafer storage device to each processing device and to transport consumables (see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0005] A guide line is formed on the travel path to guide the AGV's travel, and the AGV is equipped with drive wheels on the left and right sides of the guide line, as well as directional casters on the front and back and a reading sensor that reads the guide line, thereby maintaining the accuracy of its progress.

[0006] However, the adhesive applied to the left and right drive wheels to ensure close contact between the tire and wheel can sometimes come off, causing problems such as errors in the tire's rotational speed and rotational accuracy, causing the AGV to meander and reducing its travel accuracy.

[0007] The present invention has been made in consideration of the above facts, and its main technical objective is to provide a conveyance system that can solve the problem of deviations in the rotation speed and rotation accuracy of the AGV's tires, causing the AGV to meander and resulting in a deterioration in its progress accuracy. [Means for solving the problem]

[0008] In order to solve the above-mentioned main technical problem, according to the present invention, there is provided a conveying system in which a traveling panel on which an automatic conveying device travels is arranged on the top plate of a processing device including a plurality of processing devices, and a traveling guide line for guiding the travel of the automatic conveying device is formed on the traveling panel, the automatic conveying device is configured to include right tire means and left tire means arranged on either side of the traveling guide line, front wheels arranged in front of the right tire means and left tire means, and rear wheels arranged behind the right tire means and left tire means, the right tire means and left tire means each having a rotatable wheel, a tire attached to the rim of the wheel, and a drive source for rotating the wheel, and the inner diameter of the tire is formed slightly smaller than the outer diameter of the rim.

[0009] The drive source preferably includes a fixed shaft and a rotating body that rotates around the fixed shaft, the rotating body including the wheel. The drive source also preferably includes a rotating shaft, the wheel being attached to the rotating shaft. Furthermore, the rim preferably includes a non-slip surface, the non-slip surface preferably including a plurality of projections and recesses. [Effects of the Invention]

[0010] The conveying system of the present invention includes a traveling panel on which an automatic conveying device travels, disposed on the top plate of a processing device including a plurality of processing devices, and a traveling guide line formed on the traveling panel to guide the travel of the automatic conveying device. The automatic conveying device includes right and left tire means disposed on either side of the traveling guide line, front wheels disposed in front of the right and left tire means, and rear wheels disposed behind the right and left tire means. The right and left tire means each include a rotatable wheel, a tire mounted on the rim of the wheel, and a drive source for rotating the wheel. The inner diameter of the tire is slightly smaller than the outer diameter of the rim, so that the tire is mounted in close contact with the rim and does not spin freely relative to the wheel. This maintains the rotational accuracy of the left and right drive wheels as the AGV travels on the traveling panel along the traveling guide line, thereby eliminating the problem of the AGV meandering and deteriorating progress accuracy. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a schematic diagram of a transport system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of an automatic conveyance device of the conveyance system shown in FIG. [Figure 3] 3 is a perspective view showing a state in which a cover is removed from the main body of the automatic conveying device shown in FIG. 2. FIG. [Figure 4] 4(a) is an enlarged perspective view of the left tire means of the automatic conveying device shown in FIG. 3, together with a perspective view showing the left tire means in an exploded state; FIG. 4(b) is a side view showing a cross section of a portion of the left tire means shown in FIG. [Figure 5] (a) is a perspective view showing another embodiment of the left tire means, together with a perspective view showing the left tire means in an exploded state; (b) is a conceptual diagram showing the shape of the tire and rim of the left tire means shown in (a). DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a transport system configured based on the present invention will be described in detail with reference to the accompanying drawings.

[0013] 1 shows a conveyance system 2 of this embodiment. In the illustrated conveyance system 2, a travel panel 10 on which multiple AGVs (A) to (E) travel is disposed on a top plate 6 of a processing device 4 including multiple processing devices, and a travel guide line 12 is formed on the travel panel 10 to guide the travel of the AGVs (A) to (E).

[0014] The transport system 2 is equipped with a server 100 that controls and manages the travel of each AGV by communicating with each AGV. The server 100 is configured with a control program for controlling and managing the travel of each AGV, and control signals including information about the position of each AGV, information about the route each AGV should travel, and information about the speed when traveling through each area on the route are transmitted from an antenna 110 connected to the server 100 to the AGVs (A) to (E) traveling on the travel panel 10. The server 100 is equipped with a display means (monitor) 102 that an operator refers to when managing the transport system 2, including the travel of each AGV. The display means 102 is a touch panel type, and the operator can give instructions to the server 100 by operating a keyboard, buttons, etc. displayed on the screen.

[0015] The processing equipment 4 in this embodiment includes, for example, an article storage device 4a that manages articles, and a first processing device 4b, a second processing device 4c, and a third processing device 4d into which articles are transferred by AGVs (A) to (E). Examples of articles stored in and transferred from the article storage device 4a include workpieces such as semiconductor wafers that are processed by the first to third processing devices 4b to 4d, and processing tools used in processing by the first to third processing devices 4b to 4d. Examples of such processing tools include cutting blades used in cutting workpieces and grinding wheels with grinding stones used in grinding workpieces to thin them. Furthermore, workpieces processed by the first to third processing devices 4b to 4d and used processing tools are also transferred from the first to third processing devices 4b to 4d and transferred into the article storage device 4a by AGVs (A) to (E). In the illustrated conveyance system 2, one article storage device 4a and first to third processing devices 4b to 4d are provided as processing devices 4, but the number of article storage devices and processing devices constituting the processing device 4 can be arbitrarily set. In addition, the size and shape of the traveling panel 10 formed on the top plate 6 and the number of AGVs traveling on the traveling panel 10 can be arbitrarily set as needed.

[0016] A traveling panel 10 is disposed on the top plate 6 of the processing device 4, and the plurality of processing devices 4 are connected to one another by the traveling panel 10. The traveling panel 10 is formed with transfer openings 10a to 10d through which articles are delivered between the AGVs (A) to (E) and the processing devices 4. Although not shown, a transfer opening corresponding in position and size to the transfer openings 10a to 10d is also formed on the top plate 6 of each processing device 4. Then, articles such as workpieces and processing tools are delivered between the AGVs (A) to (E) and each processing device 4 through the transfer openings 10a to 10d of the traveling panel 10.

[0017] As described above, the upper surface of the traveling panel 10 is provided with a travel guide line 12 for guiding the travel of the AGVs (A)-(E). The positions on the traveling panel 10 are defined by XY coordinates set on the traveling panel 10. The AGVs (A)-(E) travel on the travel guide line 12 to travel along a route set based on the XY coordinates. The AGVs transport workpieces and processing tools received from the item storage device 4a to the first to third processing devices 4b-4d, and transport workpieces processed by the first to third processing devices 4b-4d and processing tools removed for replacement to the storage device 4a. As shown in FIG. 1, the traveling panel 10 is provided with a fall prevention wall 14 to prevent the AGVs (A)-(E) from falling off the traveling panel 10 even if they deviate from the travel guide line 12.

[0018] The AGV (A) of this embodiment will be described with reference to Figures 2 and 3. Note that since the AGVs (B) to (E) have the same configuration as the AGV (A), the description of the AGVs (B) to (E) will be omitted.

[0019] The AGV (A) of this embodiment is configured to include right and left tire means arranged on either side of the above-mentioned travel guide line 12, front wheels arranged in front of the right and left tire means, and rear wheels arranged behind the right and left tire means, and its specific configuration is as shown below.

[0020] The AGV (A) of this embodiment includes a main body 16 on which electrical components are mounted, and a cover 18 that covers the main body 16. The AGV (A) shown in Fig. 2 will be described in more detail with reference to Fig. 3, which shows a perspective view of the main body 16 and the cover 18 disassembled and viewed obliquely from the rear. Fig. 3 shows a state in which a cassette 42 is lowered when the AGV (A) stores and transports workpieces and processing tools.

[0021] The main body 16 includes a frame 20 formed of a single metal plate on which various electrical components (described later) are mounted. An opening 20a is formed in the center of the frame 20, and the frame 20 includes a front support wall 22 extending upward from the front end of the opening 20a, and a rear support wall 24 extending upward from the rear end of the opening 20a. The front-rear and left-right directions of the AGV (A) are indicated by arrows in Figures 2 and 3.

[0022] As shown in Fig. 3, the AGV (A) is equipped with a battery 32 that supplies power to each electrical component, a left tire means 28, a right tire means 30, and a front reading sensor 60a and a rear reading sensor 60b that read the travel guide line 12 formed on the travel panel 10. As can be seen from Figs. 2 and 3, the left tire means 28 and the right tire means 30 are disposed so as to sandwich the travel guide line 12. The sensors that read the travel guide line 12 are not necessarily limited to the above-described arrangement of the front reading sensor 60a and the rear reading sensor 60b, and may instead be, for example, only the front reading sensor 60a.

[0023] As shown in Fig. 3, the left tire means 28 is supported by the left support piece 26 of the frame 20. The right tire means 30 is supported by the right support piece (not visible in Fig. 3) of the frame 20. A pair of left and right front wheels 38 (the right side is not visible) are disposed in front of the left tire means 28 and the right tire means 30, and a pair of left and right rear wheels 40 are disposed behind the left tire means 28 and the right tire means 30. The front wheels 38 and the rear wheels 40 are both directional casters and are attached to the frame 20 so as to be swivel freely about an axis in the vertical direction.

[0024] The opening 20a is formed in a central area surrounded by the left tire means 28, right tire means 30, front wheels 38, 38, and rear wheels 40, 40 mounted on the frame 20. The AGV (A) is equipped with a belt winding means 17 that raises and lowers a cassette 42 containing articles through the opening 20a. The belt winding means 17 will be described in more detail below.

[0025] The belt winding means 17 includes a lift motor 34 and a driver 36 that controls the lift motor 34. The lift motor 34 lifts and lowers a cassette 42 containing articles to be transported via two left belts 44 and two right belts 46 attached to one end (top surface) of the cassette 42. The lift motor 34 in this embodiment is disposed behind the rear support wall 24 of the frame 20, and is fixed to the top surface of the frame 20 via an appropriate fixture (not shown).

[0026] The cassette 42, which is raised and lowered by the lifting motor 34, is formed in a box shape with a vertical dimension (thickness) that is smaller than the dimensions in the front-rear and left-right directions. The cassette 42 has a storage section 42a that stores articles, and a flip-up cover section 42b that opens and closes an opening (not shown) of the storage section 42a.

[0027] 3, the two left belts 44 are attached to the upper left surface of the storage section 42a of the cassette 42 at a distance from each other in the front-to-rear direction and extend upward. The upper portion of the left belt 44 passes through an opening 20a in the frame 20 and is guided by a left guide roller 48. This left guide roller 48 is rotatably supported by left guide roller support portions 22a, 24a formed on the front support wall 20a and rear support wall 24 of the frame 20.

[0028] The two right belts 46 are attached to the upper right surface of the storage section 42a of the cassette 42 at a distance from each other in the front-to-rear direction and extend upward. The upper portion of the right belt 46 passes through an opening 20a in the frame 20 and is guided by a right guide roller 50. The right guide roller 50 is rotatably supported by right guide roller support sections 22b, 24b formed on the front support wall 20a and the rear support wall 24 of the frame 20.

[0029] The upper ends of the left belt 44 and the right belt 46 are connected to take-up rollers 52, which are respectively disposed between a left guide roller 48 and a right guide roller 50. The take-up rollers 52 are rotatably supported by take-up roller support portions 22c, 24c formed on the front support wall 20 and the rear support wall 24 of the frame 20, and are connected to the lift motor 34.

[0030] The cassette 42 can be raised and lowered in the direction indicated by arrow R1 by operating the lifting motor 34 of the belt winding means 17 to rotate the winding roller 52 forward or backward to wind or unwind the left belt 44 and the right belt 46. When the AGV (A) travels on the traveling panel 10, the cassette 42 is housed inside the main body 16 through the opening 20a by winding up the left belt 44 and the right belt 46.

[0031] The driver 36 controls the drive current output to the lift motor 34, and is fixed to the rear surface of the rear support wall 24 of the frame 20 via an appropriate fixture (not shown). The drive current output by the driver 36 is controlled by a control means 54 mounted on the rear of the frame 20. The control means 54 is configured by a computer having an appropriate processor and memory, and power is supplied to the control means 54 from the battery 32.

[0032] The control means 54 is provided with an antenna 56, and receives a control signal transmitted from the server 100 via the antenna 56, and transmits information about the AGV (A) managed by the control means 54 to the server 100. The cover 18 is formed with a hole 18a that exposes the antenna 56 to the outside when the cover 18 is attached to the main body 16.

[0033] Here, the left tire means 28 of this embodiment will be described in detail with reference to Fig. 4. In the following description, only the left tire means 28 will be described, but the right tire means 30 also has a similar configuration, so a detailed description of the right tire means 30 will be omitted.

[0034] FIG. 4(a) shows a perspective view of the left tire means 28 and an exploded view showing the left tire means 28 in an exploded state. As shown in the figure, the left tire means 28 includes a rotatable wheel 281, a left tire 282 mounted on a rim 281a of the wheel 281, and a left tire drive source 283 as a drive source for rotating the wheel 281. The left tire drive source 283 is fixed to and supported by the left support piece 26 of the frame 20. The left tire drive source 283 is configured by, for example, an electric motor (servo motor). As can be seen from the exploded view shown at the bottom of FIG. 4(a) and FIG. 4(b), the rim 281a of the wheel 281 of this embodiment includes a disk-shaped base portion 281c and an annular protrusion 281b disposed at the center of the base portion 281c so as to protrude outward. An opening 282a is formed in the center of the left tire 282 to allow the left tire 282 to be mounted on the rim 281a of the wheel 281, and an annular recess 282b into which the annular protrusion 281b of the rim 281a described above is inserted is formed in the center of the opening 282a. The left tire 282 described above can be made of synthetic rubber such as urethane rubber, which is non-slip and elastically deformable when traveling on the running panel 10.

[0035] As shown in FIG. 4(b), in the left tire means 28 of this embodiment, the inner diameter D1 of the opening 282a of the left tire 282 mounted on the rim 281a of the wheel 281 is formed to be slightly smaller than the outer diameter D2 of the base portion 281c of the rim 281a (for example, D1 = (0.98 to 0.95) D2). Here, the "slightly smaller dimension" in this embodiment refers to a dimension that allows the left tire 282 to be mounted on the rim 281a while being elastically deformed, and a dimension that does not significantly change the diameter or shape of the left tire 282 when the left tire 282 is mounted on the rim 281a of the wheel 281, and does not impair the traveling accuracy when the AGV (A) is traveling. The right tire means 30 has the same configuration as the left tire means 28 described above. The drive current supplied to the drive sources of the left tire means 28 and the right tire means 30 is also controlled by the driver 36, and by adjusting the rotation speed and direction, the AGV (A) can move forward, backward, turn right, turn left, and turn on the spot.

[0036] The AGV (A) of this embodiment is operated based on a control signal transmitted by the server 100. The AGV (A) travels along a route defined by the XY coordinates on the travel panel 10 instructed by the control signal from the server 100, while reading the travel guide line 12 and the codes indicating the XY coordinates of each position formed at intervals on the travel guide line 12 with the front reading sensor 60a and rear reading sensor 60b. The position of the AGV (A) is accurately determined by the code information indicating the XY coordinates on the travel guide line 12, as well as the number of rotations and angle of rotation of the left tire means 28 and right tire means 30. The left tire means and right tire means of the other AGVs (B) to (E) have similar configurations.

[0037] As described above, the inner diameter of the tire of either the left tire means or the right tire means attached to each AGV is formed slightly smaller than the outer diameter of the wheel rim, so that the tire is attached in close contact with the rim and does not spin freely relative to the wheel, maintaining the rotational accuracy of the left and right drive wheels when the AGV travels on the traveling panel 10 along the travel guide line 12. As a result, the problem of the AGV meandering and deteriorating travel accuracy is eliminated.

[0038] Furthermore, in the embodiment shown in FIGS. 4(a) and 4(b), a non-slip surface 284 is formed on the surface of the rim 281a of the wheel 281. The non-slip surface 284 is formed, for example, with a plurality of projections and recesses. By forming such non-slip surfaces 284, freewheeling when the driving force of the driving source is transmitted to the tire via the wheel is further suppressed, thereby ensuring more reliable travel accuracy. It is also preferable that the inner diameter of the annular recess 282b of the left tire 282 is formed to be slightly smaller than the outer diameter of the annular protrusion 281b of the rim 281a. With such a configuration, the left tire 282 adheres more closely to the rim 281a of the wheel 281, contributing to ensuring travel accuracy.

[0039] The left and right tire means of the AGV in the conveyance system of the present invention are not limited to the above-described embodiment. Other embodiments of the tire means of the present invention will be described with reference to Figures 5(a) and 5(b). The tire means shown in the figure is a left tire means 28' that is used in place of the left tire means 28 described above. Since the right tire means has the same configuration, a description of the right tire means will be omitted.

[0040] The left tire means 28' shown in Fig. 5 is attached to the left support piece 26 of the frame 20, similar to the left tire means 28 described above. As shown in Fig. 5(a), the left tire means 28' includes a drive source 281', which includes a fixed shaft 281'd fixed to the left support piece 26 of the frame 20 and a rotating body 281'e that rotates around the fixed shaft 281'd, and the rotating body 281'e also includes a wheel on which a left tire 282' is mounted.

[0041] As can be seen from FIG. 5(b) in addition to FIG. 5(a), a rim 281'a is formed on a rotating body 281'e that also serves as a wheel. An outer peripheral surface 281'b of the rim 281'a is formed with unevenness, including multiple grooves 281'c (six in the illustrated example) that extend in a direction along the fixed shaft 281'd. An opening 282'a is formed in the center of the left tire 282' for mounting the left tire 282' on the rim 281'a of the rotating body 281'e, and multiple protrusions 282'b that engage with the grooves 281'c of the rim 281'a are formed on the inner surface of the opening 282'a. Similar to the left tire 282 described above, the left tire 282' can be made of elastically deformable synthetic rubber, such as urethane rubber.

[0042] 5(b), in the left tire means 28' of this embodiment, the inner diameter D3 of the opening 282'a of the left tire 282' shown on the left side of the drawing is formed to be slightly smaller than the outer diameter D4 of the outer peripheral surface 281'b of the rim 281'a shown on the right side of the drawing (for example, D3 = (0.98 to 0.95) D4). Also, the dimension D5 between two convex portions 282'b formed at opposing positions in the opening 282'a is formed to be slightly smaller than the dimension D6 between two opposing concave grooves 281'c in the rim 281'a (for example, D5 = (0.98 to 0.95) D6). Here, the "slightly smaller dimensions" in this embodiment refer to dimensions that allow the opening 282'a of the left tire 282' to be elastically deformed relative to the rim 281'a, as in the previously described embodiment, and that do not significantly change the diameter or shape of the left tire 282' when the left tire 282' is mounted on the rotating body 281' constituting the wheel, thereby preventing a loss of travel accuracy when the AGV (A) is traveling. Although detailed explanations are omitted, the right tire side is also configured in the same manner as the left tire means 28' described above. By configuring the tire means in this manner, the rotational speed and rotational direction of the electric motor constituting the drive source can be adjusted to enable the AGV (A) to move forward, backward, turn right, turn left, and turn on the spot.

[0043] In this embodiment, the inner diameters of the tires of the left tire means 28' and the right tire means (not shown) are also slightly smaller than the outer diameter of the wheel rims. This allows the tires to be mounted tightly on the rims, preventing them from spinning freely relative to the wheels. This maintains the rotational accuracy of the left and right drive wheels when the AGV travels on the traveling panel 10 along the travel guide line 12. This eliminates the problem of the AGV meandering and deteriorating travel accuracy. Furthermore, when the tires are mounted on the rotating body constituting the drive source, the unevenness, including the multiple recessed grooves formed on the outer peripheral surface of the rim, engages with the inner side of the opening of the tire, thereby functioning as a slip prevention device. This prevents the tires from spinning freely when the driving force of the rotating body constituting the drive source is transmitted to the tires via the rim, thereby more reliably ensuring travel accuracy.

[0044] In the above-described embodiment, the recessed groove 281'c formed in the rim 281'a and the protrusion 282'b formed in the opening 282'a on the left tire 282' side may be omitted. Even in this case, by forming the inner diameter D3 of the opening 282'a slightly smaller than the outer diameter D4 of the outer peripheral surface 281'b of the rim 281'a, the left tire 282' is mounted in close contact with the rim 281'a, preventing the left tire 282 from spinning freely relative to the rotating body 281' that constitutes the wheel, and maintaining the accuracy of travel when the AGV travels on the traveling panel 10 along the travel guide line 12. [Explanation of symbols]

[0045] 2:Transport system 4: Processing equipment 4a: Goods storage device 4b to 4d: First to third processing devices 6: Top plate 10: Travel panel 10a~10d: Delivery area 12: Driving guidance line 14: Fall prevention wall 16: Main body 17: Belt winding means 18: Cover 20: Frame 20a:Aperture 22: Front support wall 24: Rear support wall 26:Left side support piece 28: Left tire means 281: Wheel 281a: Rim 281b: Circular convex part 281c: Base 282: Left tire 282a: opening 282b: Annular recess 283: Left tire drive source 284: Anti-slip 28': Left tire means 281':Drive source 281'a: Rim 281'b: Outer surface 281'c: concave groove 281'd: Fixed axis 281'e: Rotating body 282': Left tire 282'a:Opening 282'b: Convex part 30:Right tire means 32: Battery 34: Lifting motor 36: Driver 38: Front wheel 40: Rear wheel 42: Cassette 44: Left belt 46: Right belt 48: Left guide roller 50: Right guide roller 52: Winding roller 54: Control means 56: Antenna 60a: Front reading sensor 60b: Rear reading sensor 100: Server 102:Display means 110: Antenna

Claims

1. A conveyance system in which a travel panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, and a travel guide line for guiding the travel of the automatic conveyance device is formed on the travel panel, The automatic transport device includes a right tire means and a left tire means disposed on either side of the travel guide line; front wheels disposed in front of the right tire means and the left tire means; rear wheels disposed rearward of the right tire means and the left tire means; The present invention is configured to include The right tire means and the left tire means each include a rotatable wheel, a tire mounted on a rim of the wheel, and a drive source for rotating the wheel; A transport system in which the inner diameter of the tire is slightly smaller than the outer diameter of the rim.

2. The drive source includes a fixed shaft and a rotating body that rotates around the fixed shaft, 2. The transport system of claim 1, wherein the rotating body comprises the wheel.

3. 2. The transport system according to claim 1, wherein the drive source includes a rotating shaft, and the wheel is attached to the rotating shaft.

4. 2. The transport system of claim 1, wherein the rim is formed with a non-slip surface.

5. 2. The transport system according to claim 1, wherein the anti-slip surface is formed by a plurality of projections and recesses.

Citation Information

Patent Citations

  • Automatic workpiece carrier

    JP2020013892A