Vibration device

Abstract

To provide a thin vibration device having stable vibration characteristics.SOLUTION: A vibration device includes a vibration element including a first excitation electrode and a first connection electrode electrically connected to the first excitation electrode, and a container including a substrate on which the vibration element is mounted, the substrate including a first mounting pad bonded to the first connection electrode via a conductive adhesive, and a first groove provided between the first mounting pad and the first excitation electrode in a plan view. A bottom portion of the first groove has a curved shape in a cross-sectional view from a second direction orthogonal to a first direction from the first mounting pad toward the first excitation electrode.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a vibration device. [Background technology]

[0002] For example, Patent Document 1 discloses a quartz crystal device with grooves on the outer periphery of a pair of crystal holding terminals that hold a quartz crystal blank. According to this document, by providing grooves on the outer periphery of the pair of crystal holding terminals on the substrate of the container body, the mechanical bond with the frame wall is reduced, preventing deformation of the container body after bonding the metal cover and maintaining good vibration characteristics. Judging from the aspects of Figures 1(a) and 1(b) in this document, it is assumed that the cross section of the groove is rectangular.

[0003] Furthermore, when mounting a crystal blank to a crystal holding terminal, a conductive adhesive is used, but if the conductive adhesive spreads too much during mounting, it comes into contact with the crystal blank and affects its vibration characteristics. This problem is particularly noticeable in thin crystal devices, and has been an obstacle to making them thinner. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-173974 Summary of the Invention [Problem to be solved by the invention]

[0005] However, when a groove having a rectangular cross-sectional shape is provided in the substrate of the container body as in Patent Document 1, stress is concentrated at the corners of the bottom of the groove, which may reduce the strength of the substrate. On the other hand, if the substrate is made thicker to ensure strength, it becomes difficult to make the device thinner. In other words, there was a demand for a thin vibration device with stable vibration characteristics. [Means for solving the problem]

[0006] A vibration device according to one embodiment of the present application comprises a vibration element having a first excitation electrode and a first connection electrode electrically connected to the first excitation electrode, and a container having a substrate on which the vibration element is mounted, wherein the substrate has a first mounting pad bonded to the first connection electrode via a conductive adhesive, and a first groove provided between the first mounting pad and the first excitation electrode in a planar view, and the bottom of the first groove has a curved shape in a cross-sectional view from a second direction perpendicular to a first direction from the first mounting pad toward the first excitation electrode. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view of a vibration device according to a first embodiment. [Figure 2] FIG. 2 is a cross-sectional side view taken along the line bb in FIG. 1 . [Figure 3] FIG. [Figure 4] FIG. [Figure 5] Enlarged view of part c in Figure 2. [Figure 6] FIG. 4 is a cross-sectional view taken along the line dd in FIG. 3 . [Figure 7] FIG. 10 is a plan view of a container body according to a second embodiment. [Figure 8] FIG. [Figure 9] FIG. 10 is an enlarged plan view of the periphery of the first mounting pad when the conductive adhesive is applied. [Figure 10] FIG. 11 is an enlarged side cross-sectional view of a container body according to a third embodiment. [Figure 11] FIG. 10 is a plan view of a container body according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Embodiment 1 ***Vibration Device Overview*** Fig. 1 is a perspective view of a vibration device according to a first embodiment. Fig. 2 is a side cross-sectional view taken along the line bb in Fig. 1. Fig. 3 is a plan view of a container body. Fig. 4 is a plan view of a vibration element. Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0009] As shown in FIG. 1, the resonation device 100 of this embodiment is a box-shaped surface-mount device having a substantially rectangular shape in plan view, and is an oscillator composed of a container body 10, a lid body 50, and the like. Note that each drawing illustrates three mutually orthogonal axes: an X axis, a Y axis, and a Z axis. In this embodiment, the direction in which the long sides of the rectangular resonation device 100 extend is the X-positive direction, the direction in which the short sides extend is the Y-positive direction, and the thickness direction of the resonation device 100 is the Z-positive direction. The Z-positive direction is also referred to as the upward direction, and the Z-negative direction is also referred to as the downward direction. The X-positive direction and the X-negative direction are collectively referred to as the X-direction. The same applies to the Y-axis and the Z-axis.

[0010] As shown in FIG. 2, the vibration device 100 is composed of a container body 10 as a container, a vibration element 30, a lid body 50, and the like. The container body 10 is a package body having a recessed cavity 12 that houses the vibration element 30. The vibration element 30 is mounted on a first surface 11a of a base substrate 11 of the container body 10. The first surface 11a of the base substrate 11 is the bottom surface of the cavity 12. In a preferred example, the container body 10 is a ceramic package. The base substrate 11 corresponds to a substrate. A second surface 11b of the base substrate 11 is the bottom surface of the container body 10, and a plurality of mounting terminals (not shown) are provided on the second surface 11b.

[0011] In a preferred example, the vibration element 30 is a quartz crystal resonator formed from an AT-cut quartz crystal substrate. However, the vibration element 30 is not limited thereto, and may be a quartz crystal resonator formed from an X-cut quartz crystal substrate, a Y-cut quartz crystal substrate, a Z-cut quartz crystal substrate, a BT-cut quartz crystal substrate, an SC-cut quartz crystal substrate, an ST-cut quartz crystal substrate, or the like. The vibration element 30 may also be a resonator formed from a piezoelectric single crystal such as lithium niobate, lithium tantalate, lithium tetraborate, langasite, potassium niobate, or gallium phosphate. The vibration element 30 may also be a SAW (Surface Acoustic Wave) resonator or a MEMS (Micro Electro Mechanical Systems) resonator as a silicon resonator formed using a silicon substrate.

[0012] The cover 50 is a lid made of a plate-like member, covers the cavity 12, and is joined to the container body 10. In a preferred example, the cover 50 is made of an alloy such as Kovar. The lid 50 is airtightly joined to the container body 10 with a joining material (not shown). In a preferred example, the cavity 12 is airtightly sealed in a reduced pressure state. However, the cavity 12 may also be airtightly sealed in an inert gas atmosphere.

[0013] ***Mounting of the vibration element*** FIG. 4 is a plan view of the vibration element 30 as viewed from above. As shown in FIG. 4, the vibration element 30 has a rectangular shape, and a second excitation electrode 32 is provided on its upper surface. The second excitation electrode 32 is a rectangular electrode, and a wiring 32a extends from one long side in the negative X direction. A rectangular second connection electrode 34 is provided at one vertex of the vibration element 30. The second connection electrode 34 is a terminal for mounting the vibration element 30. The second connection electrode 34 is provided on the upper and lower surfaces, covering one vertex of the vibration element 30. The second excitation electrode 32 and the second connection electrode 34 are electrically connected by the wiring 32a.

[0014] Similarly, a first excitation electrode 31 that pairs with the second excitation electrode 32 is provided on the lower surface of the vibration element 30. A wiring 31a extends in the negative X direction from one long side of the first excitation electrode 31. A first connection electrode 33 that pairs with the second connection electrode 34 is provided at an apex portion of one short side of the vibration element 30 opposite the second connection electrode 34. Like the second connection electrode 34, the first connection electrode 33 is provided on the upper and lower surfaces, covering the corresponding apex portion of the vibration element 30. The first excitation electrode 31 and the first connection electrode 33 are electrically connected by the wiring 31a. With this configuration, the vibration element 30 can be mounted on the container body 10 without distinguishing between the upper and lower surfaces.

[0015] The first connection electrode 33 is formed by laminating an underlayer and an uppermost layer. In a preferred embodiment, the underlayer is mainly composed of a single layer of Cu or Ni, or a mixture containing either of them. The upper layer is mainly composed of Au, but is not limited to this. The underlayer may also be a single layer of Mo or W, or an alloy thereof. The second connection electrode 34 is the same as the first connection electrode 33. In a preferred embodiment, the first excitation electrode 31 and the second excitation electrode 32 also have the same laminated structure as the first connection electrode 33. In other words, the vibration device 100 includes a vibration element 30 having a first excitation electrode 31 and a first connection electrode 33 electrically connected to the first excitation electrode 31, and a container body 10 having a base substrate 11 on which the vibration element 30 is mounted. The vibration element 30 has a lower surface as a first surface on which the first excitation electrode 31 is provided, an upper surface as a second surface opposite to the first surface, a second excitation electrode 32 provided on the upper surface, and a second connection electrode 34 electrically connected to the second excitation electrode 32.

[0016] 3 is a plan view of the container body 10 with the lid 50 removed, with the vibration element 30 indicated by a dotted line. As shown in FIG. 3, a first mounting pad 1a and a second mounting pad 1b are provided on the first surface 11a of the container body 10 at positions that overlap with the first connection electrode 33 and the second connection electrode 34 of the vibration element 30. The first mounting pad 1a is a rectangular electrode that is approximately the same size as the first connection electrode 33. The second mounting pad 1b is a rectangular electrode that is approximately the same size as the second connection electrode 34. The first mounting pad 1a is composed of a base layer and an uppermost layer. In a preferred example, the base layer has a two-layer structure with a Ni layer on a single layer of Mo or W. The main component of the upper layer is Au, but this is not a limitation.

[0017] 3, a first groove 2a is provided between the first mounting pad 1a and the first excitation electrode 31. Similarly, a second groove 2b is provided between the second mounting pad 1b and the first excitation electrode 31. The first groove 2a has a rectangular shape in a plan view. More specifically, the first groove 2a has a rectangular shape with its long sides extending in the Y direction and its short sides extending in the X direction. The first groove 2a has four corners with rounded corners. The second groove 2b, which is paired with the first groove 2a, has a similar shape.

[0018] As shown in FIG. 2, the vibration element 30 is mounted on the first surface 11a of the base substrate 11 by a conductive adhesive 3. More specifically, the first connection electrode 33 and the first mounting pad 1a are bonded together by the conductive adhesive 3. Similarly, the second connection electrode 34 and the second mounting pad 1b are bonded together by the conductive adhesive 3. In a preferred example, the conductive adhesive 3 is a silver paste. However, the conductive adhesive 3 is not limited to silver paste, and may be any conductive adhesive containing an organic binder resin and conductive particles.

[0019] 2, the first groove 2a is a groove provided on the first surface 11a of the base substrate 11. When the vibration element 30 is mounted, the conductive adhesive 3 that is crushed and spread between the first connection electrode 33 and the first mounting pad 1a enters the first groove 2a. In this way, the first groove 2a acts as a stopper, preventing the conductive adhesive 3 from spreading and coming into contact with the first excitation electrode 31. 3, the length of the first groove 2a in the Y direction is slightly longer than the length of the first mounting pad 1a, but this is not limited to this and may be any length that allows it to function as a stopper for the conductive adhesive 3. The same applies to the second groove 2b. In other words, the base substrate 11 has a first mounting pad 1a bonded to the first connection electrode 33 via the conductive adhesive 3, and a first groove 2a provided between the first mounting pad 1a and the first excitation electrode 31 in a plan view. The base substrate 11 also has a second mounting pad 1b bonded to the second connection electrode 34 via the conductive adhesive 3, and a second groove 2b provided between the second mounting pad 1b and the first excitation electrode 31 in a plan view. The entire first groove 2a does not necessarily have to be provided between the first mounting pad 1a and the first excitation electrode 31. The above-mentioned effect can be obtained as long as at least a part of the first groove 2a is located between the first mounting pad 1a and the first excitation electrode 31. The same applies to the second groove 2b.

[0020] ***Groove Configuration*** FIG. 5 is an enlarged view of part c in FIG. 5, the first groove 2a is a V-shaped groove in a cross-sectional view. More specifically, the first groove 2a is composed of a first side 21 that descends from the first surface 11a of the base substrate 11 on the first mounting pad 1a side, a bottom 23 at the deepest part, and a second side 22 that ascends from the bottom 23 to the first surface 11a on the first excitation electrode 31 side. A rounded corner is provided at the corner between the first surface 11a and the first side 21. The bottom 23 has a U-shaped curved shape. A rounded corner is provided at the corner between the second side 22 and the first surface 11a. In other words, the bottom 23 of the first groove 2a has a curved shape when viewed in cross section from the Y direction as a second direction perpendicular to the X direction as a first direction from the first mounting pad 1a toward the first excitation electrode 31.

[0021] In FIG. 5, a line segment that passes through the contact point at the deepest part of the bottom portion 23 and is parallel to the first surface 11a is defined as a tangent line 60. A line segment that passes through the contact point of the bottom portion 23 and is perpendicular to the tangent line 60 is defined as a perpendicular line 61. As shown in FIG. 5, the angle α of the first side 21 with respect to the tangent line 60 is larger than the angle β of the second side 22 with respect to the tangent line 60. In other words, the inclination of the first side 21 with respect to the tangent line 60 is larger than the inclination of the second side 22. In other words, in a cross-sectional view, the inclination of the first groove 2a on the side of the first mounting pad 1a is larger than the inclination of the first groove 2a on the side of the first excitation electrode 31. The length L1 from the end of the first mounting pad 1a to the perpendicular line 61 is shorter than the length L2 from the end of the first excitation electrode 31 to the perpendicular line 61. In other words, in a cross-sectional view, the deepest part of the first groove 2a is located closer to the first mounting pad 1a than the first excitation electrode 31.

[0022] The cross-sectional shape of the second groove 2b in cross-sectional view from the Y direction is the same as the cross-sectional shape of the first groove 2a. In other words, the bottom 23 of the second groove 2b has a curved shape in cross-sectional view from the Y direction as the second direction. In cross-sectional view, the inclination of the second groove 2b on the second mounting pad 1b side is greater than the inclination of the second groove 2b on the first excitation electrode 31 side.

[0023] FIG. 6 is a cross-sectional view taken along the line dd in FIG. As shown in FIG. 6, the bottom 23 of the first groove 2a has a curved shape. The curve of the bottom 23 in a cross-sectional view from the X direction, which is the first direction, has a smaller curvature than the curve of the bottom in the Y direction. The corners of the first groove 2a are provided with rounded corners. The bottom 23 may be straight, but rounded corners are provided at both ends. In other words, the bottom 23 of the first groove 2a has a curved shape in a cross-sectional view from the X direction.

[0024] The cross-sectional shape of the second grooves 2b in cross-sectional view from the X direction is the same as the cross-sectional shape of the first grooves 2a. In other words, the bottoms 23 of the second grooves 2b have a curved shape in cross-sectional view from the X direction. The first grooves 2a and the second grooves 2b as shown in FIGS. 5 and 6 can be formed by pressing a ceramic green sheet, which is the material of the base substrate 11, while heating it using a mold having a shape corresponding to the shape of the grooves. In this way, by providing the first groove 2a between the first mounting pad 1a and the first excitation electrode 31 in plan view, the first groove 2a functions as a stopper, suppressing the spread of the conductive adhesive 3 and preventing the conductive adhesive 3 from coming into contact with the first excitation electrode 31 of the vibration element 30. Furthermore, since the corners including the bottom 23 of the first groove 2a have a curved shape in cross-sectional view, stress concentration is reduced. Therefore, the base substrate 11 can be made thinner.

[0025] As described above, the vibration device 100 of this embodiment can provide the following effects. The vibration device 100 comprises a vibration element 30 having a first excitation electrode 31 and a first connection electrode 33 electrically connected to the first excitation electrode 31, and a container body 10 having a base substrate 11 on which the vibration element 30 is mounted, and the base substrate 11 as a substrate has a first mounting pad 1a bonded to the first connection electrode 33 via a conductive adhesive 3, and a first groove 2a provided between the first mounting pad 1a and the first excitation electrode 31 in a planar view, and the bottom 23 of the first groove 2a has a curved shape in a cross-sectional view from the Y direction as a second direction perpendicular to the X direction as a first direction from the first mounting pad 1a toward the first excitation electrode 31.

[0026] According to this, the first groove 2a functions as a stopper, which suppresses the spread of the conductive adhesive 3 and prevents the conductive adhesive 3 from contacting the first excitation electrode 31 of the vibration element 30. Therefore, there is no effect on the vibration characteristics. Furthermore, the curved shape of bottom 23 of first groove 2a in cross section reduces stress concentration, thereby enabling base substrate 11 to be made thinner. Therefore, it is possible to provide a thin resonator device 100 with stable vibration characteristics.

[0027] In addition, in a cross-sectional view from the Y direction, the inclination of the first groove 2a on the first mounting pad 1a side is greater than the inclination of the first groove 2a on the first excitation electrode 31 side. This makes it easier to guide the conductive adhesive 3 into the first groove 2a.

[0028] In addition, in a cross-sectional view from the Y direction, the deepest portion of the first groove 2a is located closer to the first mounting pad 1a than the first excitation electrode 31. This makes it easier to guide the conductive adhesive 3 into the first groove 2a.

[0029] The bottom 23 of the first groove 2a has a curved shape when viewed in cross section from the X direction. According to this, the bottom 23 of the first groove 2a has no corners, so that stress concentration is reduced, and the base substrate 11 can be made thinner.

[0030] The vibration element 30 has a lower surface as a first surface on which a first excitation electrode 31 is provided, an upper surface as a second surface that is opposite to the first surface, a second excitation electrode 32 provided on the upper surface, and a second connection electrode 34 electrically connected to the second excitation electrode 32, and the base substrate 11 has a second mounting pad 1b bonded to the second connection electrode 34 via a conductive adhesive 3, and a second groove 2b provided between the second mounting pad 1b and the first excitation electrode 31 in a planar view, and the bottom 23 of the second groove 2b has a curved shape in a cross-sectional view from the Y direction as the second direction. This allows the first groove 2a and the second groove 2b to function as stoppers, thereby suppressing the spread of the conductive adhesive 3 and preventing the conductive adhesive 3 from coming into contact with the first excitation electrode 31 of the vibration element 30. Furthermore, since bottoms 23 of first groove 2a and second groove 2b have a curved shape in cross section, stress concentration is reduced, and base substrate 11 can be made thinner. Therefore, it is possible to provide a thin resonator device 100 with stable vibration characteristics.

[0031] The bottom 23 of the second groove 2b has a curved shape when viewed in cross section from the X direction. According to this, there are no corners at the bottom 23 of the second groove 2b, so that stress concentration is reduced, and the base substrate 11 can be made thinner.

[0032] Embodiment 2 ***Different mounting pad configurations*** Fig. 7 is a plan view of a container body according to embodiment 2, and corresponds to Fig. 3. Fig. 8 is a side cross-sectional view of a groove, and corresponds to Fig. 5. In the resonation device 100 of the above embodiment, a portion of the mounting pad may be inserted into the first groove 2a and the second groove 2b. Hereinafter, the same parts as those in the above embodiment will be given the same reference numerals, and duplicated explanations will be omitted.

[0033] 7, the container body 10b of the resonation device 100 of this embodiment includes first mounting pads 5a and second mounting pads 5b that are different from the first mounting pads 1a and second mounting pads 1b described above. Except for this, the container body 10b is the same as the container body 10 described above. 7, the right side of the first mounting pad 5a on the first groove 2a side partially overlaps with the first groove 2a. Specifically, the right side of the first mounting pad 5a has a stepped first portion 51, a second portion 52, and a third portion 53, each having different lengths in the X-positive direction. The first portion 51, the second portion 52, and the third portion 53 are arranged in this order from the Y-positive direction to the Y-negative direction.

[0034] The lengths of the first portion 51, the second portion 52, and the third portion 53 in the positive X direction increase in this order. The first portion 51 is the shortest and does not reach the first groove 2a. The second portion 52 is of an intermediate length and reaches the first groove 2a. The third portion 53 is the longest and extends into the first groove 2a. Fig. 8 is a side cross-sectional view of the third portion 53 of the first mounting pad 5a. As shown in Fig. 8, the tip of the third portion 53 reaches close to the bottom 23 of the first groove 2a. Alternatively, the third portion 53 may reach the second side 22 of the first groove 2a. In other words, in plan view, a part of the first mounting pad 5a overlaps with the first groove 2a. The right side of the first mounting pad 5a as part thereof has a staircase shape.

[0035] FIG. 9 is an enlarged plan view of the periphery of the first mounting pad when the conductive adhesive is applied, and the conductive adhesive 3 after application is indicated by a dotted line. As shown in Figure 9, when the conductive adhesive 3 is applied, most of the first mounting pad 5a is covered with the conductive adhesive 3. In the example of Figure 9, only the third portion 53 is exposed from the conductive adhesive 3. As mentioned above, the first mounting pad 5a is a metal layer, so it can be identified by image recognition. In other words, it is possible to determine how far the conductive adhesive 3 reaches in the three stepped portions by image recognition. This makes it possible to grasp the application state of the conductive adhesive 3 by image recognition using the first portion 51, the second portion 52, and the third portion 53 of the first mounting pad 5a as a measure.

[0036] Return to Figure 7. The second mounting pad 5b is the same as the first mounting pad 5a except for the arrangement order of the first portion 51, the second portion 52, and the third portion 53. In the second mounting pad 5b, the first portion 51, the second portion 52, and the third portion 53 are arranged in this order from the negative Y direction to the positive Y direction. The overlapping shape of the first mounting pad 5a with the first groove 2a is not limited to a staircase shape, but may be any shape that allows the application state of the conductive adhesive 3 to be grasped by image recognition, for example, a shape in which the straight right side is inclined.

[0037] As described above, according to the vibration device 100 including the container body 10b of this embodiment, the following effects can be obtained in addition to the effects of the above embodiment. In the resonation device 100 including the container body 10b, a part of the first mounting pad 5a overlaps with the first groove 2a in a plan view. This allows the application condition of the conductive adhesive 3 to be grasped by image recognition using the part of the first mounting pad 5a that has entered the first groove 2a as a measure. This makes it possible to appropriately control the amount of the conductive adhesive 3 applied, and to prevent the conductive adhesive 3 from coming into contact with the first excitation electrode 31 of the vibration element 30. This is particularly suitable for thin vibration devices that require strict application amount control. Therefore, it is possible to provide a thin resonator device 100 with stable vibration characteristics.

[0038] Furthermore, the right side of the first mounting pad 5a is shaped like a staircase. This makes it possible to grasp the application state of the conductive adhesive 3 by image recognition using the first portion 51, the second portion 52, and the third portion 53 of the first mounting pad 5a as a measure. Therefore, it is possible to provide a thin resonator device 100 with stable vibration characteristics.

[0039] Embodiment 3 ***Different groove configurations*** 10 is an enlarged side cross-sectional view of the container body according to embodiment 3, and corresponds to FIG. 5. In the container of the vibration device 100 according to embodiment 3, the side cross-sectional shapes of the first groove and the second groove are different from those of embodiment 1. Hereinafter, the same parts as those in the above embodiments are denoted by the same reference numerals, and duplicated explanations will be omitted.

[0040] 10, the first groove 6a in this embodiment is a U-shaped groove in cross section. More specifically, the first groove 6a is composed of a first side 25 that falls vertically from the first surface 11a of the base substrate 11 on the first mounting pad 1a side, a bottom 27 at the deepest part, and a second side 26 that rises vertically from the bottom 27 to the first surface 11a on the first excitation electrode 31 side. A rounded corner is provided at the corner between the first surface 11a and the first side 25. A rounded corner is provided at the corner between the second side 26 and the first surface 11a. The bottom 27 includes a first curved portion 27a that is curved in a cross-sectional view and a second curved portion 27b that is curved in a cross-sectional view. The bottom 27 also includes a bottom surface portion 27c that connects the first curved portion 27a and the second curved portion 27b and is linear in a cross-sectional view. In other words, the bottom 27 of the first groove 6a has a curved shape in a cross-sectional view from the Y direction, which is a second direction orthogonal to the X direction, which is a first direction from the first mounting pad 1a toward the first excitation electrode 31.

[0041] Embodiment 4 ***Different groove configurations*** FIG. 11 is a plan view of a container body according to the fourth embodiment, and corresponds to FIG. In the resonation device 100 of the above embodiment, a groove may also be provided between the first mounting pad 1a and the second mounting pad 1b. Hereinafter, the same parts as those in the above embodiment will be given the same reference numerals, and duplicated explanations will be omitted.

[0042] 11, the container body 10c of the vibration device 100 of this embodiment has a third groove 4a and a fourth groove 4b between the first mounting pad 1a and the second mounting pad 1b. Except for this, the container body 10c is the same as the container body 10 described above. The third groove 4a extends along the Y-positive side of the first mounting pad 1a, and is connected to the first groove 2a on the X-positive side. Although not shown, the cross section of the third groove 4a has a curved bottom and rounded corners, similar to the first groove 2a. In other words, the base substrate 11 of the container body 10c has the third groove 4a and the fourth groove 4b between the first mounting pad 1a and the second mounting pad 1b. According to this, when mounting the vibration element 30, the conductive adhesive 3 that has been crushed and spreads enters the third groove 4a, and the third groove 4a functions as a stopper, suppressing the spread of the conductive adhesive 3 and preventing the conductive adhesive 3 from coming into contact with the second mounting pad 1b, thereby not affecting the vibration characteristics.

[0043] The fourth groove 4b extends along the negative Y side of the second mounting pad 1b, and is connected to the second groove 2b on the positive X side. Although not shown, the cross section of the fourth groove 4b has a curved bottom and rounded corners, similar to the first groove 2a. In other words, the bottoms of the third groove 4a and the fourth groove 4b are curved in cross section. According to this, when mounting the vibration element 30, the conductive adhesive 3 that has been crushed and spreads enters the fourth groove 4b, and the fourth groove 4b functions as a stopper, suppressing the spread of the conductive adhesive 3 and preventing the conductive adhesive 3 from coming into contact with the first mounting pad 1a, thereby not affecting the vibration characteristics.

[0044] The third groove 4a and the first groove 2a are not limited to being connected to each other, and each may be an independent groove. The same applies to the fourth groove 4b and the second groove 2b.

[0045] As described above, according to the vibration device 100 including the container body 10c of this embodiment, the following effects can be obtained in addition to the effects of the above embodiment. The base substrate 11 of the container body 10c has a third groove 4a between the first mounting pad 1a and the second mounting pad 1b. According to this, the third groove 4a and the fourth groove 4b function as stoppers, which suppress the spread of the conductive adhesive 3 and prevent a short circuit between the first mounting pad 1a and the second mounting pad 1b. Furthermore, the bottoms of the third groove 4a and the fourth groove 4b have a curved shape in cross section, and therefore there are no corners at the bottoms, which reduces stress concentration and allows the base substrate 11 to be made thinner. Therefore, it is possible to provide a thin resonator device 100 with stable vibration characteristics. [Explanation of symbols]

[0046] 1a...first mounting pad, 1b...second mounting pad, 2a...first groove, 2b...second groove, 3...conductive adhesive, 4a...third groove, 4b...fourth groove, 5a...first mounting pad, 5b...second mounting pad, 10...container body, 10b...container body, 10c...container body, 11...base substrate, 11a...first surface, 11b...second surface, 12...cavity, 21...first side, 22...second side, 23...bottom, 6a...first groove, 2 5...first side, 26...second side, 27...bottom, 27a...first curved portion, 27b...second curved portion, 27c...bottom surface portion, 30...vibration element, 31...first excitation electrode, 31a...wiring, 32...second excitation electrode, 32a...wiring, 33...first connection electrode, 34...second connection electrode, 50...lid, 51...first part, 52...second part, 53...third part, 60...tangent, 61...perpendicular line, 100...vibration device, L1...length, L2...length.

Claims

1. a vibration element having a first excitation electrode and a first connection electrode electrically connected to the first excitation electrode; a container having a substrate on which the vibration element is mounted, The substrate is a first mounting pad bonded to the first connection electrode via a conductive adhesive; a first groove provided between the first mounting pad and the first excitation electrode in a plan view; a bottom portion of the first groove has a curved shape when viewed in a cross section from a second direction orthogonal to a first direction from the first mounting pad toward the first excitation electrode; Vibration device.

2. In the cross-sectional view, an inclination of the first groove on the first mounting pad side is larger than an inclination of the first groove on the first excitation electrode side. The vibration device according to claim 1 .

3. In the cross-sectional view, the deepest portion of the first groove is located closer to the first mounting pad than the first excitation electrode. The vibration device according to claim 1 .

4. a bottom portion of the first groove has a curved shape in a cross-sectional view from the first direction; The vibration device according to claim 2 .

5. In the plan view, a portion of the first mounting pad overlaps with the first groove. The vibration device according to claim 1 .

6. In the plan view, the portion of the first mounting pad has a staircase shape. The vibration device according to claim 5 .

7. The vibration element is a first surface on which the first excitation electrode is provided; a second surface opposite to the first surface; a second excitation electrode provided on the second surface; a second connection electrode electrically connected to the second excitation electrode, The substrate is a second mounting pad bonded to the second connection electrode via a conductive adhesive; a second groove provided between the second mounting pad and the first excitation electrode in the plan view, a bottom portion of the second groove has a curved shape in a cross-sectional view from the second direction; The vibration device according to claim 1 .

8. a bottom portion of the second groove has a curved shape in a cross-sectional view from the first direction; The vibration device according to claim 7 .

9. the substrate has a third groove and a fourth groove between the first mounting pad and the second mounting pad; The vibration device according to claim 7 .

10. the bottoms of the third groove and the fourth groove have a curved shape in cross section; The vibration device according to claim 9 .

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